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] 博士論文、修士論文 master thesis inoue

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(1)

2

☎ ✆ ✝✟✞ ✠ ✡

VLSI

☛✟☞ ✌ ✍✏✎

X

✑ ✒ ✓ ✔ ✕✏✖ ✗ ✘ ✙

✚✜✛ ✢✤✣

✥✧✦✤★✧✩✧★✧✩✧✪✬✫✤✩✬✭✧✮✧✯✧✰✧✱✧✫✤✩✬✲✧✳

ISAS/JAXA

✴✧✵

✮✧✯✤✶

[email protected]

(2)

i

✹✻✺ ✼✾✽❀✿

X

❁❃❂❀❄❀❅❃❆❈❇❊❉❀❋✾●✾❍❏■▲❑ ✿❀▼✾◆❈❖❃P❘◗❃❙▲❚❈❯❊❱❘❲✾❳❩❨❏❬❀❭❃❪❘✿✾❫❀❴❃❵❀❛ ❇❀❜❀❝ ✿❀❞ ❡✾❢❩❣▲❤ P❘✐❀❥❦❚ ❍♠❧❀♥❏♦ ❯❩❚q♣❃r ♥ ❱ ●✾❍ ❪❩✿❀s❀t❃✉❀✈①✇❩② ❢✾③ ❱q④①⑤ ■ ⑤q✿❀▼❃◆❈❖❃P❀❲✾❳❩❨ ❬✾❭ ❇❘⑥❀⑦❏⑧❀⑨ ⑤ ❢❀⑩❩❶❈❷ s❹❸q❪❩❺ ❝✾❻▲❼ ✿❽▼✾◆❏❖❘❾❀❿❏❪❘➀✾➁❈❖▲❯➂P❈❱➂➃

X

❁✾➄❀➅❏❝❀❇ ✿➇➆❃➈❀➉ P❊➊❃➋ ❉✾❋ ❪➍➌❃➎❃➏❃➐✻➑ ❝✾❻ ❱➒④✾➓①➔ ⑩ ✿ ♦♠→ ⑤ ❧❩➣✻↔❃❇❊➄↕➅ ❚➙✿❀➛↕➜ ⑧❩➝↕➞♠➟❊➠✜❼➒↔ ❸➢➡✜❸➤✿

2010

✽ ❅❃❆❈❝❃❇❘➥♠➦❘➧♠➨ ❚❃➩q➫❦⑤ ❢❃③ ❱➂➃

X

❁ ➊❀➋❃➭❈➯❘➲ ❇❀↔❊➳ ❚➒➵❀❞♠❖ ⑧❊➸ ❡❃❢❀③ ❱q④ ➩➺➫ ♥ ➃

X

❁ ➊➻➋❀➭❏➯➼➲ ❇❘➽❀➾❈⑧ ⑩ ✿➇➃

X

❁❀➄❀➅❈❝ ➆ ③ ➭❈➯❩➚➻➪❀✿➇➶❀➹➻➘①❚➺➴❈➷❘➬❀➮❀❛❀➭❈➯➼➲ ❯➱✿❊t❀✃ ❇➻❐❮❒➻❰ ❳❩❨Ï❚qÐ❀Ñ ⑧❘Ò➻Ó❏♥ ❱ ❧ ❡

2

Ô➻Õ❀Ö ✇❩② ❧❀×❀ØÚÙ❀Û

VLSI

✿❃Ü❈⑤ ❢ Ü➻② ❑ ❚qÝ Þ ♥ ❱qß❀à❏❪❘➌✾➎ ❝❀❻ ❱q④❽➓Ï➔ ⑩ ✿❽➃

X

❁❈❝ ➆ ③ ➭❈➯❘➚✾➪❹❯➂❲❀❳❘❨❏❬❀❭❩➶✾➹✾➘❀✿❮Ü❏⑤ ❢❘á ② ❧❘â ã▲❚ ❻✾ä➼å▲æ ➷

CdTe

➬➻➮✾❛❀➭Ú➯❩➲ç❯➱✿➇èÏé ⑧➻↔❘➳Ú♥ ❱

2

Ô❀ÕÚ×✾Ø❈Ù➻Û

VLSI

✿↕Ü❈⑤ ❢ ➓ê➔ ❇ èÏé ß✾à ⑧❈ë ❱➂ì ❰❩í

Ý Þ ß❀à①❚qî

③✾❢ ✿ï➃

X

❁ ➊✾➋❀➭❏➯❘➲ ❇❩➽❀➾ ❚❀➩q➫①⑤ ❢✾③ ❱q④ð⑤ ■ ⑤➂✿❽è▲é ⑧

2

Ô✾ÕÚ×❀ØÚÙ❀Û

VLSI

❚ ↔❩➳Ú♥ ❱qñ❀ò ⑧ ✿↕Ü➻② ❑➺❇❘ó❈ô Þ ä❩åÚ❇ ➐❀➘➻ã❀✿↕õ➼ö❀÷ÚP▲ø❘❚ Ó ➹①⑤ ❢❀ù ❸ ♦ ❯➂❪❩➌✾➎✾➏✾➐❏➑ ❝✾❻ ❱➂④❏Ü ♦❩❝❊ú ⑩ ✿❀➓❦➔ ❇♠Û ❨♠❭ í ❪ ♦ ②❈û ❝❀↔❊➳ ❚➒ü ➟ ❢❏❤ ❧

CdTe

➬ ➮❀❛Ï❚➂î ③ ✿↕ý▲þ➼ÿ✁ ❨✄✂ ×✆☎✞✝ ❣✠✟ ❪ ↔➼➳ ⑤

500

µ

m

✡☞☛ ❐❀❇

2

Ô❀ÕÚ×✾ØÚÙ❀Û

LSI

❯ ó❏ô Þ ä å❏❧ ④✾Ý Þ ⑧ ⑩ ✿✾➓①➔ ❇ è①é➒ß✾à ❝❀❻ ❱➒ì ❰❊í

Ý Þ ß✾à❦❚➂î

③ ❧ ④ ♦❩❇ ➭❏➯❩➲ ⑧♠ë♠❼ ✿

-20

C

ù❃③❃❢

1.2keV

@60keV

❯ ③ → á ② ❧ ➶↕➹✾➘✬❯ ✿

CdTe

➬✾➮↕❛❃➭♠➯❊➲ ❇ ➆ ③✏✎✒✑ ã❦❚ ➽✒✓♠♥ ❱ ♦ ❯ ⑧❩⑦✞✔ ⑤ ❧ ④ ✇ ❑q⑧✆✕✗✖✗✘Ú❝ ⑩ ✿✠✙➼✽➻➉❀➓✻➔ ❇❏Û ❨Ú❭ í ❪ ↔➼➳ ⑤

1

Ô❀ÕÚ×➻Ø❈Ù➻Û

VLSI

❯ ✿❀Ü ❇✛✚✗✜➻●➻❍ ❚ æ ❯ ⑧ ⑤ ❢ ✿ ú ⑩

2

Ô❽Õ

12

12

❐↕❒➍❰ ❳ ❨

❇❽×➻Ø Ù➻Û

VLSI

❚✤✣✗✥ê⑤➺✿❽Ü ❇ ã❽➘ ✚✁✜ ❚✤✦ÚP★✧ ❧ ④ ♦❊❇

VLSI

⑩ ✿

KEK

❚ ❜✪✩ ❯ ♥ ❱➙➓❦➔ ❇✻Û ❨✻❭ í è é ❇✒✫✭✬★✮❃Ù✪✯ ❭ ⑧✏✰✭✱ ③↕❢✾ù ❼ ✿

260

µ

m

✡✞☛❩❐❀❝ ✿✾➬✾➮✾❛❀➭♠➯❘➲ ■▲❑➂❇✞✲✄✳ ❭ ✯ ❯✵✴✠✶ ✬✸✷ ❨①❚✺✹✞✻ ⑧✺✼❹❑ ②❈❱✽✣✞✥ ❯❘⑤ ❧ ④ ♦❊❇❈ë❏→ P ✾✞✿

2

Ô✾Õ♠❇✺❀❁✮✺✲✒❂

VLSI

(3)
(4)

iii

1

❬ ❭❫❪✵❴✠❵

1

2

❬ ❛

X

❜✞❝✞❞✞❡✄❢✺❣

3

2.1

NeXT

❅✾❆✞❤✞✐❏❇

X

➊❃➋❀➭♠➯❘➲

(HXI)

. . . .

3

2.2

CdTe

➬✾➮✾❛✾➭❏➯❩➲

. . . .

6

2.2.1

CdTe

➬✾➮✾❛✾➭❏➯❘➲

❇✛✰✒✕

❖❃P❘ã✒❥

. . . .

6

2.3

ì

❰❊í

Ý Þ ß✾à

. . . .

11

2.4

×❀Ø♠Ù❀Û

VLSI

. . . .

13

2.4.1

CMOS

í❈Ù✏❦

. . . .

14

2.4.2

VLSI

❙♠❇✛❧

. . . .

15

2.4.3

❾✾❿

î

×✾Ø❏Ù✾Û

VLSI

❇❃× ❭✒♠

✫❈✬❘❐♠❒

. . . .

17

3

❬ ♥❫♦✏♣✠q✵r▲s✒t✛✉✒✈✠✇❈①✠②

2

③✠④

VLSI

⑤✽⑥✄⑦✞⑧✺❛

X

❜✞❝✞❞✞❡✄❢✺❣✄②✺⑨✞⑩✞❶✞❷

19

3.1

➽✠❸♠❇

➩❩❖

. . . .

19

3.2

Caltech

❐✄☛❩í❀❇✏❹

. . . .

20

3.2.1

Caltech

❐▲☛❊í❀❇

✴✠✶

☛✒✬

. . . .

20

3.2.2

×✾Ø❏Ù✾Û➂Ò✾Ó✄❲✺❳

. . . .

20

3.2.3

✲✞❺❏❰❁✷➢❇

ô

. . . .

22

3.2.4

❭✄▼

➹✞❼

. . . .

22

3.3

❦▲☛✸✷➱×✄☛❩í

. . . .

24

3.4

➽✠❸❃●❀❍

. . . .

25

4

2

③✒④▲t✒❽▲❾✏❿

VLSI

H01

➁▲➂✒➃✛➄✞②✺➅✞➆

27

4.1

⑩▲➇❊❡

. . . .

28

4.2

❐▲☛❊í❀❇✺➈✾⑦✄➉

☛❁✷➢❇✺❹

. . . .

29

4.2.1

❐✄☛❊í❀❇✺➈✾⑦

. . . .

29

4.2.2

CORE

➊❀❇✏➋▲➉

☛✸✷➱❇✺➌✞➍ ❯➏➎✾➘

. . . .

29

4.3

×❀Ø❈➐❀Û✽➑

❇❩Ò✾Ó

. . . .

32

4.3.1

í

þ

×❏❰❩í✄➒✽➑

◗✞➓✾◗✄➔

➐✞☛✞✬

. . . .

32

4.3.2

→✾❰✽➣↕↔

❭✄▼✺➔

➐✞☛✞✬

. . . .

38

4.4

✡✠✬✏❦

❨✾➬✾➮✾❛✾➭❏➯❩➲ ❯

Ý✾ü

. . . .

49

4.4.1

✡✞✬✺❦

❨✾➬✾➮✾❛✾➭❏➯❩➲

. . . .

49

4.4.2

➣❁☛✸➙

➁✞➛

. . . .

50

4.5

ô

➯❈⑤

➐✺✯✄☛✞✬

. . . .

51

4.6

✲▲✳

✯❏❰✾Û❩❇✾❧

❇✺➜ ➛✞➝✾✉

❇✺➞✞✼

. . . .

60

4.7

ÿ

✷✛↔✽✯ ✴✄▼

✣✞➠

. . . .

62

4.7.1

❻✞✯

▼✽➡✞➢✞➤✄➥✺➦❁➧✽➨✄➩

(5)

iv

5

2

➾✞➚✄➪✠➶❈➹✛➘

VLSI

➴✞➷✺➬✞➮✄➱✺✃✞❐

67

5.1

❒✏❮Ï❰ÑÐ✠Ò

. . . .

67

5.2

2

Ó✠Ô

VLSI

Õ✞Ö✄×✞➺↕➙✺❰➏Ø

➩✞Ù✄Ú

➟✞Û✞Ü✞Ý

. . . .

68

5.3

Þ✒ß▲à✒➳âá✒ã▲ä✏å

➥✏æ✠ç

Õ✠Ö

. . . .

69

5.3.1

è❁é✽Þ✄➲✺è✞ê✞ë✄➫✺➺

Ù✺ì í

MON1

î

. . . .

69

5.3.2

ïñð❁òÏó✵ô➏ð❁ò✽õ✞ö✄ä✺å▲ê✒ë▲➫✏➺

Ù✏ì í

MON2

÷

3

î

. . . .

69

5.3.3

3

ð❫ò✵õ✠ö❈ä✛å❈ê✠ë✄➫✺➺

Ù✺ì í

MON4

î

. . . .

72

5.3.4

ø✞ù✞ú✞û✄ä✺å✄ê✞ë✄➫✺➺

Ù✛ì í

MON6

÷

MON7

î

. . . .

73

5.3.5

3

ð❫ò✵õ✠ö❈ä✛å✸ü✛ý

é✽ë✞Þ❁é✽Ü✄þ✺➺ ➥✺ÿ✞➠

. . . .

75

5.4

✂✁▲➫

à✄✁✆☎✂✝

Õ✠Ö

. . . .

76

5.4.1

Ø

➩✞Ù✄Ú

à✞✁✟☎✠✝

ù✞ø

. . . .

77

5.4.2

✡✠☎❁➻☞☛❁➫✺➺✄➲

. . . .

78

6

➽ ✌✠✍✞✎

79

✏✒✑

A 1

➾✞➚✄➪✠➶❈➹✛➘

VLSI

K01

81

A.1

➵✕☎✏è ➥✗✖✂✘

. . . .

81

A.2

æ✒ç

Õ✒Ö

. . . .

82

A.3 1

Ó✠Ô❈Þ✠ß❈à✠➳

VLSI-

✙✠✚✜✛

-

. . . .

82

✏✒✑

B 2

➾✞➚

VLSI

➴✗✢✕✣✗✤✠✥✟✦✞➴✞✧✠★✩✍✫✪✠✬

85

B.1

Þ✒ß▲à✒➳✗✭✄✮

➢✒➤✜✯✂✰

. . . .

85

B.2

✂✁▲➫

➡✠➢✒➤✜✱❈Ù✛ì✂✯✜✰

. . . .

85

B.3

✲✄✳✜✴✕✲✛➲✏Û✗✵✂✶

✱✒ì✜✯✂✰

. . . .

87

B.4

✵✂✷ óÑ➳✜✸✂✹✠➲✻✺

✯✂✰

(6)

v

1.1

2

Ó✠Ô✂✼

X

✽✜✾✠✿✠❀

Ù✞❁✄➥✞✖✠❂✟❃

. . . .

2

1.2

✳✜❄✸➻❆❅✟✹✞➲✺Ü✄þ✒➲✠➳✫❇

CdTe

❈✜✝✄❉

Ù✄❁

. . . .

2

2.1

HXI

➥✗❊✂✰▲➥✄❋

õ ❰❆●✂❍

õ

. . . .

3

2.2

❈✜✝✄❉

➡✄➥✞■❁➧✠❏

❰▲❑✟▼✺ö✠◆

ç íP❖✠◗✠❘✠❙

12m)

✭✗✮

. . . .

4

2.3

HXI

➥✗✖✂❂✆❃

. . . .

5

2.4

NeXT

❚✜❯

HXI

SXI

❱✗❇❳❲❩❨❭❬❳❪

Si

Ù❫❁ í

CCD

î❫❰

CdTe

❀ Ù❫❁❱➥

Ù

❍❵❴

5

2.5

❛✆❜

X

✽ ó☞❝✄➲✞❞✞✽✜❀

Ù✗❁❈➥✗❡✂❢

✮✂❣

. . . .

7

2.6

60 keV

X

✽✠❤

❱✞✐✟❥✟❪

CdTe

÷

GaAs

÷❧❦❫é✄♠✠➲

➥✞♥✠♦✠♣✠q✠r✄➥

Ù

❍✠❴

.

8

2.7

Pt/CdTe/Pt

CdTe

❀ Ù✗❁

❰➏÷❳❦ts✉☎❫➻▲✈✠➺✗✛

CdTe

✇✛➭✜①✞➺②✺

I-V

③ æ▲➥

④✜⑤

. . . .

9

2.8

❦❩s✉☎❁➻▲✈✠➺✄✛

CdTe

✇✺➭✠①✞➺⑥✺☞❀

Ù✞❁

ý✞⑦⑥❨✫❬✠⑧

241

Am

57

Co

Û✠⑨✟✝❫➻✉⑩

.

9

2.9

❝✠➺❶✺✛é✺➲✞➳✫✵✠❷✠●⑥❸ ÷✜❹

Ú✛➥✄❺✜❻❈➥

I-V

æ

. . . .

10

2.10

Û▲➫✂☎❩✺☞❼❁➲✺è

➥✞✖✠❂✟❃

. . . .

11

2.11 CdTe

❈✠✝✞❉✞⑩✠❀

Ù✞❁

2

Ó✞Ô

VLSI

➥✞❽✠❻

. . . .

12

2.12 In/Au

Û✄➫✠☎✻✺❾❼❁➲✺è

❽✠❻✠❿

. . . .

12

2.13

➀✜➁✂➂▲ý✞➃✟❜✟➄✞⑧

VLSI

❒✺❮

✶✟❬

. . . .

16

2.14 VA32TA

➵✟☎✺è

➥✠➅✞➆

ä✺å

. . . .

17

2.15 VA32TA

➇✫❇✟❲✠⑧

CdTe

❈✂✝✗❉✄⑩✜❀

Ù✗❁

. . . .

17

2.16

✈▲➸➈☛✆❦✄➫✺Þ✩✲✽➭✟➇✫❇✟❲✟❪✺Þ✞➺✠✈✞Ü✟✝✺➵✄➸✺➺

. . . .

18

3.1

caltech

➵✆☎✏è

÷

1

❈✠✝✞❉✞⑩ ➥✂➅✠➥

Þ✠ß❈à✠➳✵á✠ã❈ä✛å

➥✗✖✂❂✆❃

. . . .

21

3.2

caltech

➵✆☎✏è✠ý

➥✗➉✒➤

á✒ã

➥✄✖✜❂✟❃

. . . .

21

3.3

CdTe

♣✠q✠r

Ù✞❁✟➊

❼❁➲✛è ❽✜❻✻❏

❬✂⑧

Caltech

➵✟☎✺è✟➇✫➋✠➌

Ú

⑧✞➍✠➎✜➏✂➐

. . . .

24

3.4

CdTe

♣✂q✜r

Ù✞❁✆➊

❼❁➲✛è ❽✜❻❩❏

❬✜⑧

Caltech

➵✆☎✛è✆➇✫➋✜➌

Ú

⑧✗➍✠➎✜➏✠➐

➥✗✖✠❂✆❃

24

3.5

caltech

➵✆☎✏è

100

❈✜✝✄❉✗⑩

➥✗❻✂➑▲➥

Û✜⑨✕✝❫➻✉⑩

. . . .

25

3.6

caltech

➵✆☎✏è

❈✜✝✄❉✗⑩✻➒▲❰

ö✠◆ ç✄➥

ö✠➓

. . . .

26

3.7

caltech

➵✆☎✏è✆➇➈❇✆❲✂⑧✠➭✕➔✛➺✂✁▲➲✞➳

. . . .

26

4.1

H01

r❈➥✗➣✂↔

. . . .

29

4.2

H01

➥✗✖✕↕✜❃

. . . .

30

4.3

è❫é✵Þ▲➲✺è✟➙✫➛✠➜✠➝✠➜✟➞✄à✠☎✠✝

. . . .

32

4.4

3

ð❫ò✵õ✠ö❈ä✛å✸ü✛ý

➥✠Ù✏ì

➛✂➜

. . . .

35

4.5

➟❫➲✏è✗⑩✟➠✞➺✞⑩➡✺➏ä✺å

. . . .

36

4.6

❈✛➺✕✝✛Û↕➻✞✲✽➵✄➸✏➺✠ä✺å

. . . .

36

4.7

♠✠➲➈☛②✲✽➺✄➫✞➞✄à✠☎✠✝

ä✺å

. . . .

38

4.8

♠✠➲➈☛②✲✽➺✄➫✺ä✺å

➥✠➢✞➤✠➥✠➦

. . . .

39

4.9

➧✠ù✒ú✠û✄Þ✄➲✺è✞ý

1

ä✛ú✒û❩➇✄➨✜➩✂⑧

♥✂◗▲➥✞➉✞➤

. . . .

40

4.10

➧✠ù✒ú✠û✄Þ✄➲✺è✞ý❁ô✽ä✺ú✞û✩➇✞➨✠➩✠⑧

♥✠◗✄➥✞➉✞➤

. . . .

40

4.11

➧✠ù✒ú✠û✄Þ✄➲✺è

❦✟➫✒➯✆✲✽➺✠❦✩s✺➲✫➭✠➯

. . . .

41

4.12

➧✠ù✒ú✠û✄Þ✄➲✺è❁ô➏ð✞ö

➥✞Ù✺ì✠➉✞➤✄➥

(7)

vi

4.13

❦❈➲✠➳➈⑩

➉✒➤✜➲✂➳

ä✏å

í

SINGLE

î

. . . .

42

4.14

✡✏Û✠Ü✸é➵❦✒Û✠ä✏å

í

HYS

î

. . . .

43

4.15

➧✒ù✠ú✒û▲ä✏å

í

DTA

î

. . . .

44

4.16

✡✏Û✠Ü✸é➵❦✒Û

❍✜➯

. . . .

45

4.17

➸✒➲✗❦✻s❾☎✸➻Ñä✛å

í

OS

î

. . . .

46

4.18 20keV

➺✟➻

➥❫➉✞➤

✲➵➼✞⑩❩➇ ✱✠ì❫Ú

÷

DAC

0(LLLL:

)

15(HHHH

➽➾➍❵✽

)

➥✂➦❫Ú

⑧✗➚

♠✒➲➵☛❶✲â➺❈➫✛ä✏å ➥✞Ù✺ì

. . . .

47

4.19 200keV

➺➪➻

➥❫➉✠➤

✲❭➼➶⑩t➇ ✱✠ì Ú

÷

DAC

0(LLLL:

)

15(HHHH

➽➹➍➘✽

)

➥✂➦❫Ú

⑧✗➚

♠✒➲➵☛❶✲â➺❈➫✛ä✏å ➥✞Ù✺ì

. . . .

47

4.20 20keV

➺✟➻

➥✞➉✠➤

✲➵➼✗⑩✩➇ ✱✞ì❫Ú

÷

DAC

7

❱ ➥✜➦❁Ú

⑧✞➚

♠✞➲➵☛⑥✲â➺▲➫✏ä✛å

Ù✏ì

. . . .

48

4.21 200keV

➺✕➻

➥➴➉✒➤

✲➈➼➴⑩✩➇ ✱✞ì Ú

÷

DAC

7

❱ ➥➷➦✸Ú

⑧✄➚

♠✒➲✫☛➬✲✵➺✄➫✏ä✪å

➥✒Ù✛ì

. . . .

48

4.22 2

Ó✠Ô

VLSI

❰✞❈✠✝✞❉✞⑩✠❀

Ù✞❁✄➥✞❽✠➮

➭✟➔✺➺✠✁

. . . .

49

4.23 H01

CdTe

❈✠✝✞❉✞⑩✠❀

Ù✞❁

. . . .

49

4.24

❈✠✝❫❉✗⑩✜❀

Ù❫❁

❼❫➲✛è ❽❵❻

☛➱☎❩✺ ÷❐✃✆❒❵❝✠➺②✺✆é✺➲✗➳➵❇❵☛❮☎❮✺

í

➳✠✸❵✹✠➲t✺✞✲

➼✄⑩✠î ➥✗❰✂Ï

. . . .

50

4.25

☛✻☎✻✺

❰✜Ï❈➥✗Ð✂■✆❃

. . . .

50

4.26 2

Ñ✠Ò✕❱✜Ó✂Ô✠Õ✠Ö✠❱✒➭✂➼▲➲✸➻

➊✞✱

➄✄⑧✗➚✕❱✜×✏÷ ❻✠➑

36

➵✄➸✞➲✞Ø✞⑩✩➇✵Ø ➩✒Ù

❥✟Ù✄❰

❱✂❜✆❪

. . . .

51

4.27

♥✂Ú✜Û❈➥✗➦✂Ü

. . . .

52

4.28

Ø

➩✠Ù❈Ú

❦✒➺✜Ý❈➲✛Û ï

. . . .

53

4.29

Ø

➩✠Ù❈Ú

❦✒➺✜Ý❈➲✛Û✸ô

. . . .

54

4.30

Ø

➩✠Ù❈Ú

❦✒➺✜Ý❈➲✛Û✻Þ

. . . .

55

4.31

ß

SEL-X

àÏ❰➵Õ✂Ö✜❱✏÷✜✵✂✶

➉✂á

Ú✗â

ß

REQ-X

à

➊✠Ù✏ì❩❏

❬✕❪

. . . .

55

4.32

Ø

➩✠Ù❈Ú

❦✒➺✜Ý❈➲✛Û✕ã

. . . .

56

4.33

Ø

➩✠Ù❈Ú

❦✒➺✜Ý❈➲✛Û✻ä

. . . .

57

4.34

Ù

à➶✁å☎❐✝ ä✛å❳❱➪æç➄

â

÷çß

ACKB-X

à

➊➶✱✗ì❩❏

❬➪❪❱❰ ÷

j

è ò❫❱éß

SELECT

à

ê

➧➵ë✻❏

❬✏÷

j

è❫ò

Ø

➩✠Ù❈Ú✗➊

❒✗ì

❬✕❪

. . . .

58

4.35

Ø

➩✠Ù❈Ú

❦✒➺✜Ý❈➲✛Û✻í

. . . .

59

4.36

➭✕➔✛➺✂✁▲➲✒➳

⑧✜î

➥✗ï✂Ï✜ð✂ñ▲➥✞ò

. . . .

60

4.37

➅✄ó❩❏

â

❲✆❪

selector

ä✺å

. . . .

61

4.38

✝✒à✜☎✂✝ôß

CK

à↕❰õß

RD

à

➉✂á✆ö

æ✗❒ ß

WR

à ➉✜á

. . . .

61

4.39

❦✕✳❫➻✄✲➵✁✒Û▲➫

. . . .

62

4.40 4

÷

4

❈✠✝✞❉✞⑩✩➇➵ø

➦❫Ú✄❃✠➥✄ù✜ú❈➥✜û

éâÞ✕➇âØ ➩✠Ù

❥❫❰ýü

❥✕❪➵þ

. . . .

63

4.41

➫✏➭▲➯✒➲✠➳✏➵▲➸✏➺Ï➻✒ï

. . . .

64

4.42

➫✏➭▲➯✒➲✠➳✏➵▲➸✏➺Ï➻✏ô

. . . .

65

5.1

➀✂➁✜➂❈ý✠❒✏❮

Ú

2

Ó✠Ô▲Þ✒ß▲à✒➳

VLSI

í

H01

î

❒✏❮▲Û✂Ý✜✁✕➫✛➺✄⑩

. . . .

67

5.2

2

Ó✠Ô❈Þ✠ß❈à✠➳

VLSI

Õ✞Ö✄×✞➺⑥✺

. . . .

68

5.3

✲✄✳✜✴✕✲✛➲✏Û✗✵✂✶

(RFREF)100

µ

A

ý

è✸éâÞ❈➲✛è

Ù✛ì❈➥✛ÿ✂➦

➭✂➯

. . . .

69

5.4

✲✄✳✜✴✕✲✛➲✏Û✗✵✂✶

(RFREF)100

µ

A

ý

è✸éâÞ❈➲✛è Ù✛ì❈➥

❦✕➫✠➯✕✲â➺✂❦❩s✏➲➵➭✂➯

.

69

5.5

✳➘✴➪✲✛➲✆Û❫✵❵✶

➥❫➤

65

µ

A

ý

÷

CdTe200keV

➺❳➻

Ü✠Û ➻❾☛❵⑩❱Û✜❱✗✐❳❥❳❪✆è❁é Þ

➲✏è Ù✏ì

. . . .

70

5.6

CdTe200keV

➺✕➻

Ü✒Û ➻✉☛➷⑩✄Û✂❱➴✐✟❥❧❪✏è❁é Þ❈➲✪è Ù✏ì

❰▲ÿ★ð✸ò✵õ✒ö❈ä✏å ➥★Ù

ì

➭✜➯

. . . .

70

5.7

CdTe200keV

➺❧➻

Ü✒Û ➻☞☛➷⑩❈Û✂❱✄✐❧❥✟❪ ÿ★ð✸ò✵õ✒ö✭ä✺å

❦✭➯✜➫✕✲✽➺➷❦❩s✏➲✄❱

(8)

vii

5.8

✲✗✳✂✴✆✲✺➲✺Û✞✵✠✶

(DIFREF)

➥✗➤

40

µ

s

Ú

⑧✜Ö

÷

➺✗⑩✄✂▲à✆☎✞✝❈ä✛å

❍✂➯

71

5.9

✲✗✳✂✴✆✲✺➲✺Û✞✵✠✶

(DIFREF)

➥✗➤

180

µ

s

Ú

⑧✠Ö

÷

➺✄⑩✟✂❈à✠☎✡✝▲ä✏å

❍✜➯

71

5.10 CdTe200keV

➺✆➻

Ü✞Û↕➻☞☛✠⑩✄Û✠❱✞✐✟❥✟❪

1

ð✸òÏó

2

ð❫ò✵õ✠ö❈ä✛å ➥✛ÿ✂➦

➭✂➯

. . .

71

5.11 CdTe200keV

➺✕➻

Ü★Û ➻ ☛➷⑩❈Û➷❱❐✐❧❥❧❪ ï ð✸ò↕ó

2

ð ò õ ö✭ä✪å

❦✟➫✠➯➱✲ ➺

❦❩s✏➲➵➭✠➯

. . . .

71

5.12

ß

GAREF

à

➥✄➤

➲✞☛✻❏✠☞

⑧✠Ö

3

ð✸òâõ✒ö▲ä✏å

❈✛➺✕✝➵➛✡✌

. . . .

72

5.13

ß

ADJ2

à ❰

✱✞ì✠➉✠á

ß

AIN

à

✭✄✮

. . . .

73

5.14 DAC

➥✞➥✠➦

0

Ú

⑧✠Ö

÷✠➧✞ù✞ú✞û✄ä✺å

➥✞Ù✺ì✠➉✠á

. . . .

73

5.15 DAC

➥✞➥✠➦

0

Ú

⑧✠Ö

÷✠➧✞ù✞ú✞û✄ä✺å

➥✞Ù✺ì✠➉✠á

. . . .

73

5.16 4bit

❦✆✳✸➻✗✲➵✁✒Û▲➫ ➥✗➥✂➦

➇✆✍

Ú

⑧✜Ö

÷✂➧✠ù✒ú✠û✄ä✺å

➥✞Ù✺ì✠➉✠á

. . . . .

74

5.17 4bit

❦✆✳✸➻✗✲➵✁✒Û▲➫ ➥✗➥✂➦

➇✆✍✞✎✕❱

Ú

⑧✜Ö

÷✂➧✠ù✒ú✠û✄ä✺å

➥✞Ù✺ì✠➉✠á

. . . . .

74

5.18 3

ð❫ò✵õ✠ö❈ä✛å✸ü✛ý

é✵ë✠Þ✸éâÜ❈þ✛➺ ➥✛ÿ✂➦

. . . .

75

5.19 H01

FPGA

➥✞➉✠á✄➥✑✏

❸✞❰✠❸✞➇✓✒✟❥ ✖✜❂✕❃

. . . .

76

5.20 H01

Õ✠Ö✕❱

ö

➩✆❪âØ ➩✠Ù❈Ú

à✄✁✆☎✂✝

ù✠ø

. . . .

77

5.21 H01

Õ✠Ö✕❱

ö

➩✆❪✜✡✂☎✸➻❾☛❫➫✏➺▲➲

. . . .

78

A.1

➉✜á

á✠ã✄ä✺å

. . . .

83

A.2 K01

⑧✜î✂❱ ➥✂➑❫Ú

⑧✏Õ✠Ö❈×✠➺❶✺

. . . .

83

A.3 K01

➵▲➸✒➲✗Ø✄⑩❩➒▲❰

(9)
(10)

ix

2.1

HXI

➥✕✔

æ✗✖

1

. . . .

4

2.2

CdTe

♣✠q✠r✄➥

➏✚✙✠③

æ

. . . .

6

2.3

CMOS

è▲à✄❉✠Û

➥✕✛

ÒÏ❰✢✜✜Ò

. . . .

14

2.4

CMOS0.35

µ

m

➏✠➀✠☛✩✸✠➔✺➺✄➫

. . . .

14

3.1

Caltech

➵✟☎✺è

➥✤✣✞✥

. . . .

20

4.1

H01

➵✕☎✛è✄☛❩✸✜➔✏➺▲➫

. . . .

28

4.2

4.32

à✄✁✆☎✂✝✛ä✛å

➥✗✱❈Ù✛ì❈➥

✭✄✮

. . . .

56

4.3

4.33

à✄✁✆☎✂✝✛ä✛å

➥✗✱❈Ù✛ì❈➥

✭✄✮

. . . .

57

4.4

❦✆✳✸➻✗✲✫✁✞Û✄➫

➥✑✦✚✧✚★✚✩

. . . .

62

A.1 1

Ó✠Ô❈Þ✠ß❈à✠➳

VLSI

➵✆☎✏è✗☛✩✸✠➔✺➺✄➫

. . . .

82

B.1

Þ✠ß❈à✠➳

✱✄Ù✺ì✠➉✠á✄➥✞Ú✠Û

❰✫✪

ç

. . . .

85

B.2

✜✁❈➫➵⑩

✱✄Ù✺ì✠➉✠á✄➥✞Ú✠Û

❰✫✪

ç

. . . .

86

B.3

✳ç✴➪✲✆➲✆Û❫✵✠✶

✱✗ì❵✯❵✰✄➥❫Ú❵Û

❰✬✪ ç❳ö

æ✗❒❫➍✜➚❳❱✗✶❳❥❫✵✜✶

➏✮✭ ➤ í

❦å➫✁➯❳✲ ➺

❦❩s✏➲✛ý✞❇✟❲✠⑧

î

. . . .

87

B.4

✵✜✷ ó➏➳✠✸✠✹✞➲✩✺▲✭✞✮

✯✠✰

(11)
(12)

1

1

✯✚✰ ÷✜❤✞✱✕❱ ✯ ❲✑✱✚✲✆❱❈ü✛ý✤✳✞✱ ❏ ❬✠⑧✕✴✂✵✞✵ ✰✆➊ ÷✚✶✚✷ ➥✕✥✹✸ ❜✞Û✠Ý✞➺✗⑩❈ý✕✺✞✻✕❥✆❪✂Ù▲❰ ➊ Ó ✼ ❱✚✽❩❨➈➨✜❱✜❜✻❸✠✾✡✾✞✿✟❪✫þ✩Ù✗❬✂×✛÷✚✶✞✷✂✽Ï❰ Ú✄â ÷✚❀✚❁❃❂✜❜✄➜ ✩ ➇✄❰✞❪ û Ø✗⑩✄❄✞❅ ➊ ÷✞✶✚✷✠→ r❃❆ ❜✠➨✞ý✗❷✕î â✄■❈❇ ❜✕❉✡❊❩➇➈➯✆⑧ Ú✗â ❲✆❪✂Ù▲❰✄➇✠❋✞● Ú✗â ❲✆❪➈þ ✌ û Ø✄⑩✟❄✡❅✕✵ ✰✄❆ ✳✚✱✟×✺÷✞❍✡■✜❯✚❏✚❑ ✏ ÷✮▲✡▼✠÷✚▲✚▼❃◆✺÷✟❖ Ú✞â ➞✟✸✜☎✂✝✗➠✞❅✄⑩✆➨✩❨✓P ❇✺Ù ❥✠✁❃◗▲☎✹❘▲❱✤❙❩❪✒ü✏ý✺÷✡✶✞✷ ❆ ✿✻❨✆❚✟❪✓❯✚❱❈ý✚❲✻❨➈❬✟❪✫þ✩Ù✄❬✩❨✫×✺÷✡❳✡❨✜➛✕❱ ö ➩✟❪✆❩ ➑ ✳✡✱✟❱ æ✠❪❃❬✬❭✄❪❩❨➵❬ â ❲✕❪ ➊ ÷✞❫ r ❂✠❜✑✳✚✱ ❆ ➔✗❅✒ë✞❴✞❵✏÷✞✳✚✱ ❏ ❬✜⑧✤✵ ✰✟➊ ✵ ✰ ❜ ❆ ➨✏÷❜❛ ✰❞❝✓❡ ❢ ❆ ➨✑❣❃❖ ❆✑❤✚✐✡✏ ✍✡✌✞❥✡❦✟❧✡♠✑♥❃❄✚❅✑♦✚❣✹♣✕q✹r✬s✡t ❆✡✉✤✈✞✇✡①✞②✄③✞④✡⑤✚⑥✚⑦✑⑧❃⑨❃⑩✄❶✠❷✡❸✟❹ ⑥✚⑤✚❺✚⑤✑❻ s✚t✟❼✕❽❈❾ ❺✕❿✚➀✟③✚➁✞⑤✞⑥ ❣➃➂✚➄❃➅✟➆✕❴✚➇ ❸ r✠❼✕➈❃➉ ❺

X

➊✞➋✚➌✟➍✕➎✚➏❈➐ ⑥✞⑤✟➑✑➒✞➓✚③ ❣➔s✞t ③✚➁✚→✟➑✠➣ ➈✟➉✚❧✞♠✕♥❃↔✞↕✚❼✕➙➜➛✫➝✞➞❞➟✠➠✟➡✚➢ ➑✑➒✞➓✞③✚⑦

❣➔➤

X

➊➦➥➨➧❃➩✑➇✕➊✚➫✞➭✟➯✚❼✕➂✚➲✞➳✞➵

➸ ➍✑➺✞➻➽➼ ❺✟➑✆❻ ♣✑❼✑➾✚❣ ✇✚①✚➚ ❼✑➪❃➶✕➹✡➘❈➟✠➴✡➷ ➑✤➒✞➓✚③✚⑦ ❣✟➬✚➮❃➱❞✃❐♥❒➼✬❮ ③ ❣✞❰✚Ï✚➵ ➸ ➍ ➺✚➻❒➼ ❺❃➑✠❻ ➐ ❸

➐✠❣✡➤

X

➊Ð➥❐➧❃➩✑➇✑➊✚➫✚➭❃➯✚❼✑➂✚Ñ✚➳✚❰✚Ï✚➵

➸ ⑦✑⑧✟⑨✤Ò✞Ó ➐ ⑥✡⑤✞❺✡⑤✕❻ ♣✑❼ Ó✡Ô ➟✓Õ❃Ö✡➢ ➑✑➒✚➓✚③ ❣ Ó✚×

2010

Ø✞Õ✄Ù✑Ú✄Û❃➟✚Ü✓Ý✹➐✆❣✚Þ✚ß

X

➊✚à✚á

NeXT

➍✑â✚ã❞ä

q ⑥✚⑤✟➑✮å

1

æ ❻✮ç ❾ ⑦

❣❈♣✕❼

NeXT

à✡á ③✑è✚é

♣✟➼✕➟✡Ü✠Ý❞➐✓❣✞➤

X

➊✚❰✚Ï✞ê✄ë

② ❼✡Ö✕ì❞➟✓í î ➉ ③✕ï✟➓✞⑥✚⑤✟➑✓❻

NeXT

à✮á❃➯ ⑦ ❣➔ð✚ñ✟➯✑ò ➓✞⑥

80keV

ó✑➯✟➟✓ô✞õ✟➢ ➑ ♣❃➼✠➍÷ö✚ø ❺ ❣✞ù✮ú✞û ü✚ý ➟✠þ ⑤✞➒ ➬✡↕✕ÿ✄↕✁✚➆✑↕✚➍ è✡é ä✑q ➑✓❻✞ç ❾ ⑦ ♣✑❼✂✚➆✕↕✹➼ ❺ r☎✄✚➯✝✆❞➟☎✞ ❹✕⑥✞⑤✄➑☎✟✡✠✡☛ ê✟ë ② ➼÷➐ ⑥

❼✕➤

X

➊✞❰✚Ï✌☞✚õ✞ê✟ë

② ➟✑Ö✕ì❈➐ ⑥✞⑤❃➑✠❻✎✍✑✏ ❼✌✒✔✓✝✕✞➩✗✖✌✘✌✙✚ê✟ë ② ➯ ⑦ ❣➔➤

X

➊ ③✛✚ ➐ ⑥✡⑦✂✜✤⑦✛✢✡✣ ➡ ③✡❺✟❹✑⑥ ➐✚ó✄➛ ➒✡➓ ❣ ç ❾ ⑦

❣✁✤ ♥✚♥✦✥★✧✪✩✫✡✬✛✭

(CdTe)

⑤ ➛✢➂ ⑤ ✮✝✯ ø❞➟ ✜✕④ ✥✌✰✦✱✌✖✦✘✌✙ ③✳✲ Ü✞➐✆❣✁✴✡❼✞Ö✤ì❈➟✫✵ ❺✟❹✤⑥✁✶✤➒✕❻

CdTe

✖✦✘✦✙ ⑦ ❣✁✒✷✓✛✕✚➩✫✖✡✘✦✙➽➼✹✸ ⑤ ❣✚ò✻✺❃❼✛✼✡✽★✾✛✿❞➟✆ê❃ë✛❀✦❁✂✴✡❼ ✜ ❼ ③✝❂❄❃❆❅✂❇ ü✚ý ⑦✝❈✚× ➐ ⑥✞⑤✞❺✡⑤✕❻ ✴❃♣✑➯✕❣✚❰✚Ï✚ê❃ë ② ❼ Ò✞Ó✟③✡⑦ ❣✡❉ î ➟☎❊ ❸✞❺✝❋ ❀ ③ ☞✚➞❈➐✆❣ ❋ ❀✂✴✚q✡●✚q ③

LSI

✥❈➐ ➒✳❍✂■ ë✄➐✳❏✡❑✂▲✡▼✳✾✳✿✹➟☎◆✡❖❃➢ ➑ ♣❃➼✓➍✝P✞➻✟➯✦◗ ➑✓❻ ✴✚❼ ➒✡➓ ❣✑❘✦❙✁❚❱❯✚➩✑♠✑♥❞➟ ➏✁❲ ➑✚⑩ ➛ ❺ ❰✮Ï✞ê❃ë ②❜③✚➁✞⑤✚⑥✞⑦ ❣❨❳✮➱✝❩✕♥✡❘ ④ ❘ ④✞③❬✚✡❭ ➐ ⑥

❉✑❪✌✼✡✽✁❏❜➩✑➅ ❣❴❫✡❵✁❏❜➩✑➅ ❣

✴❃➐ ⑥✳❛

➩✤➅✕♥✂❜✚↕✑♥❝✩❆✾✳✿❞ó✕➯✡➍✳❞ ❷❃❹✕➒

2

Þ✡❡✂❏✡❑✂▲✌▼

VLSI

❢❤❣

1.1

✐❒➼✫❣✁✴✚q✟➟

CdTe

❁❒➼✹◆✌✰✟➢ ➑ ü✚ý ➍✝❥✞ö★❦❈➼ ❺❃➑✠❻✮ç ❾ ⑦ ❣✑❧✌✙✄➉ ③✚⑦

2cm

♠✝♥✡♦✚Ú✟❼ ❛✁♣✦q

➟☎r❃Ù✕❣

250

µ

m

s

➳❜❼✝t✑✉✌☞✮➠✚ø ➼✬❣

1keV

⑩✂❃✇✈ q ➒ ❧✮♠✑♥❜↔✞↕❬☞✚➠✮ø✞❣①✴❜➐ ⑥❬②✟⑤ ê❃ë ②✌③❨④ ➱✑▼✮➆✌✬✞➩✔✩ ➟ ⑤✡⑥⑦✜✑④

X

➊✞ê✄ë

❼✞Ö✑ì❞➟✗✵

❺❃❹✑⑥✚⑤❃➑✓❻

✖✡✘✌✙✟❼✤➤

X

➊✚ê❃ë✟➟✚Ü✕➉✹➼✠➢

➑ ❏✌❑★▲✌▼

VLSI

⑦ ❣ ➣✌⑧✄③ ➂✚➳ ❺ ü✡ý ➼✝⑨✌✬✗⑩⑦✬✚➟☎P✞➻➽➼✠➢ ➑✤➒✡➓ ③ ❣✚ð ñ❃➉ ③✦■✡⑥★✜ ❣✁✴ q✹r✆❼ ü ý ➟ ✜✤④ ▼✓♥ ↕✡➅ ⑦✦❶ r✓q

⑥ ⑤❃➑ ❻✚ç

❣❞♣ q❃ó ➯✤❣

IDEAS

❷✞❣❸▲✕↕❺❹✑➩✕➬ ③ ↕✟➱❱❹✓↕✳❻✑❼ ➀ ❣①❽✟➩ ✈✡❾✌❿ ✴✟➐ ⑥ ✧❺✓✳➀✌➁ ♥❱➂✑❏✝➃✌➄ ✈✡❾ ➼ ❼✑❮✁➅❬❻ ❼❞➟ ï✟➓✡⑥✞➁➆❃➇❿ ✴✚❼✡➈✚➯ ❿✡➉✡➊ ➉ ③ ➻✦➋✟➢ ➑☎➌ ø❈➟ ■✞➒ ➢ ⑩ ➛ ❺✳❿ ❽❈❾ ❺ ❏✚↕✡➍✡✤❃➱✝❚✂❯✑↕✚❼ ö✚ø ➌ ➟✫➎ ❹✤⑥✁✶✕➒✑❻ ❘✦♥✟➯ ❿❱➏✦➐✞③ Ü✞➟✳➑ →✟➑ ➼ ❿✚ç ❾✤❼✕➻✡➋❃➢ ➑☎➒ ❽❈➟✫➓ ➒ ➢ ⑩ ➛ ❺ ❏✡❑✂▲ ▼✚♣

VLSI

⑦✛❈✞× ➐ ⑥✡⑤✞❺✡❸✟❹✤➒✕❻ ♣✑❼ ⑩ ➛ ❺✤Ô✌➔ ❼✦➈✞➯ ❿✞ç ❾ ⑦✝→✔➣ ❼✌❏✡↕✌➍✌✤✄➱✳❚✂❯✑↕✚❼✞Ö✤ì❈➟✗✵ ❺ ➛✕♣✄➼✠➍✳P✡➻✌❥✡ö✁❦✚➯✡◗ ➑ ➼✹↔✁❲ ⑥✡⑤✟➑✓❻ ✴✡❼✳↕✔➙ ⑦✳❿ ó✳➛✛➜❝➝ ③✝❿

VLSI

❼ ➐✝➞✟⑦✦➟ ➆ ④ ➱✝❽ ④ ➱✕➬✹➼ ❺⑦❃ ➍✡Ù✞➯✡◗ ❃➠❿ ➡✝➢ ✠ ❼✛➤ ①✄❺ ì✁➥ ❿✌➦✦➧✌➨✡➩ ❼✝➫✡➭❃➍✌➯✛➲✟➯✦◗ ➑✆❻ ➜

2

③✝❿✡→✔➣ ❼✌❏✡↕✌➍✌✤✄➱✳❚★❯✕↕❃➟✗r ④ ♣ ➼✓➯ ❿ Ü✫➳❒➼✓➢ ➑✫➌ ø❞➟✫➓ ➒ ➢✑➷ ❶➠❿✞ç ❾ ③ ➼ ❹✤⑥✳➉✦➵❃❺

❏✌❑★▲✦▼

VLSI

➟ Ò✚Ó ➢ ➑ ö✡ø ➌ ➍✝➸ ➍ ➑✑❸ r✆➯✌◗ ➑✓❻ ✴✟➐ ⑥ ➜

3

③✝❿ ð✡ñ✟❼✛✖✦✘✡✙❃➅✂▲✛❩✞➬✡❼✡➈✡➯ ❿ ❏✦❑✁▲✦▼

VLSI

③ ➑ ⑤✡➒✂✜ ❼✟➟ ➺ ◆ ③ ➴✚➷ ➑✤❺✔➻❆❿ ⑨✦✬☎⑩➆✬✕❼✛➼✞í✄➍✌❦ ❸✳⑥✄❺✞⑤✡❸ r✠➯✦◗ ➑✆❻ ♣÷❼ ⑩ ➛ ❺✁➽✳➾❨➚ ➩✕❼✝➪ ❿➔Ó✮×✚ç ❾ ⑦✳❿ ➂❃❧✞♠✑♥❜↔✞↕ ✇✞①✞②

(13)

2

1

1.1:

X

❐✳❒❬❮✳❰✎Ï☎Ð✑Ñ☎Ò❬Ó ➱ÕÔ

CdTe

Ö✳×ÙØ✌ÑÕÚ✳Û✑Ü☎Ý❬Þ✳ß❬à✳áãâ✳Û✑ä✌åÕæ✳çÕè✳ßÙà✌Ü é✝ê✂ëíì✡î✳ï✝ð Ô✌ñ✦ò☎ó✝ñ✌ò✗ó

Ñ✌å✗æ✳ç✫è✳ß✝à✌ä✗á

2

ô✝õ

VLSI

ö✳Ñ✗÷✛ø✁ù✗ú✳û✝ü✳ý✝þ✳ÿ✁ Ü✄✂✆☎✄✝✄✞✠✟

ëíì✌ð Ô

1.2: 200

☛☎æ✳ý☞☎✍✌✌Ñ✌å☎æ✳ç☎è

4096

✎☞✏☞✑✄✒

ð

CdTe

å☎æ✳çÕè✳❰✌Ï☎Ð☞✓✄✔

ï

á

60 keV

Ñ

☎✁✖✁✗✡ä✙✘✠✚ î✜✛

ì

ú✁✢✤✣✡Ñ✁✥✠✦★✧★✩ ✪✬✫★✭★✮✝á☞✯✰☎✍✱✤✲✰✳✗Ý✰✴✁✮✤✵★✶✸✷✹✩✙✺✝ö★✳✁✻★✼

✳✄✾☞✿✁❀

4

ó

✳✄❁✰❂✠❃✌ù✍✔

LSI

✓✄❄✠❅

î

ï✳î✳ï✝ð☞❆ ò✄❇

ð

(

)

✳✄❉✰❃✄❊☞✿✄❀☞❋

ð

●✠❍✄■✰❏✠❑

✳✄▲✰▼✠✳✠◆☞❖☞P✄☎✄◗★❘✠✓✠❙✰❚✠☎☞P✍❯✤❱☞❲✄❳✠❨

❉☞❃✁❊✠✔

LSI

✓✄✔☞❩✄❀

200

☛✄❳✠❬

✳✄❪✠❫✠❴✠❵★❛☞❜✠❝✠❞ ❑✠❡

✓✄❢

❯✠❱✄✷

✳☞✘✠❣✄❤✄✐☞❥★❤☞❲✄❳✠❨

✳✠◆☞❖☞P✍❙☞❚

❭✁❦✠❧☞❭♥♠

CdTe

✿✄♦✠♣☞❜✠✿☞q♥r✠s☞t✄❩☞✚✄s☞✘✄❩★✉

2

✈✇✷

①✰②④③✁⑤✆⑥✤⑦

NeXT

⑧☞⑨✙⑩✆❶✠❷✙❸

③✙❹✄❺❼❻★❽❼❾☞❿✙➀✠➁✰➂✰➃❼➄✰➅✰➆✆➇✤➈✠➉

❶✙➊☞➋ ⑦☞➌➎➍

❶✰➏✰➐❼➑☞➒

VLSI

➀✤➁④③➔➓➣→✆↔✤⑥✰↕➣➙➔➛✆➀✤➁➝➜

➆✆➞✙➟④➠➢➡✙➤

❶➥➊✙➋★➦✙➧➝➨

⑦✰➩➥➫✰➭➣➯

❶★➲✙➳✰➵➥➸✙➺ →➥➻

➼❼➽

➑☞➾

❶★➚✰➪➹➶★➘

IP

➴★➷

➴➣➬✄❶

➀★➁✰⑦✆➮

⑥✠➱❐✃

❶✙➏

➈✰❒✰❮❼➟✠❰✆Ï★➈

➩☞➫

↕④Ð➢⑦

Ñ✰Ò →★Ó✰Ô✰Õ✆Ö✙❻☞×➣➙✄➛④Ø★Ù❼Ú

❻✠⑦✙➱❐✃

❶✆➒

➉➣➈☞➜✰Û✰Ü

2

Ý✰Þ❼❶

➜☞ß✤à☞á➎â✠Ù★⑦☞ã✙ä

×④åæ⑦

➦☞ç➎è

1

Ý✰Þ❼❶

➜☞ß✤é☞ê✙Õ✆Ö✤⑦✆➮

⑥✤ë☞ì✙í

6

Ý☞Þ➣❶

➜☞ß✠î✙ï➎③✄ð➣❾☞❿✤Õ✆Ö

❻☞×✆➙ñ→④òó⑦õô✰öø÷☞→☞➀✠➁øß★➓ø→☞ù✰Ùú⑥☞↕ø➙✁➛➣Ú★❿ñ⑦

CdTe

ûúü

VLSI

➶✄❶✠ýú➪✰þúÿ

❻✁✰↕ú⑥

è

⑦✁✂☎✄

→✰↕☞ß✤⑦

200

µ

m

✆ú➾

❶✰➷✞✝

➈✰➆✆③✜⑤❐➙✰Ø

➶✄❶✰➋✠✟

VLSI

➶☛✡

ù✌☞✆❿✎✍✰➄

❮✎✏❼③✌✑✠✒✔✓✎✕

➶✗✖✠✘✰➋ ➀★➁

⑦✎✙✞✚✙→

✆✙➾

➋☞❶✤ý☞➪✙þ☞ÿ➣❶✜✛✣✢

③✜⑤✆⑥✙↕✆➙✁➛

✤✎✥✣✦

➋☞➨

CdTe

û✰ü

➤✙➩★✧✌✩

2

✪☎✫

VLSI

↕☞❿✭✬

X

✮✎✯✎✰ ➩★✧✌✩

❶✭✛

➫➎③☞❹✤÷

➶✤➘

❿★⑦✞✱

➬✜✲✣✳ ➉✠✴

➏✌✵☎✶

✓☎✕ ✷✹✸☎✺

➋☞➨

Caltech

✻ ❻✠✼✰➙

500

µ

m

✆✰➾

2

✪☎✫

VLSI

↕✰❿

✂✎✄✎✽✎✾❼❻☎✿✙↕☞⑥✌❀✎❁✠❂❼➙✁➛❐â✞❃✜❻✠⑦✰➱❐✃✜➌❐➍

❶✰➏

➈✰❒✰❮✆➟✤❰✆Ï✤➈☞❻✜❄✠❅✰↕✰⑥✠⑦✎❆❼ß

➊✌❇➹➶

å✁➀★➁

➟✜❈✤➉☞➩★✧✌✩✎❉❼➯✣✧

➘✤❶ ❿✎❊

2

✪✎✫

VLSI

✷❋✸✣✺

➋✙➨

H01

✻✆❶ î☞ï

⑦☞ã

ä➣❻✣✿✰↕➥⑥➣Ú

❊❼➙✜➛❐Ø

VLSI

⑦✰➱④✃✁➌ ➍

1

✪●✫➣➏✰➐➣➑✰➒

VLSI

ã✰ä➣❻✭❄✠❅✙↕✰⑥✤⑦☞Ó❍❊

2

✪☎✫✣■

③✭❏✆↔✤❿

(14)

3

2

X

2.1

NeXT

❑▼▲▼◆▼❖◗P❙❘

X

❚▼❯▼❱▼❲◗❳❙❨

(HXI)

➱ ✃ ➨ ⑦

NeXT

⑧✰⑨ ❻✎☞↕✰⑥✠⑦❩✬

X

✮✎❬✎❭✆➋✠➚ ✄❐③ ➸☞➺ ❻ ➘

❿✌❪☎❫☎❴✎❵☎❛✎❜☎❝☎❞ ✷ ➄☞➈✌❡✆➈✞❢

➴ ➈ ✻ ➶ ⑦

CdTe

û✙ü ➤✰➩❍✧✭✩ ➶ ↕ Ð✗✬

X

✮ ❻❤❣✣✐ ❶✭❥ ↕✌❦ ➘ ↕ û✰ü ➤➎③ ✡ ➯ ➪ ù❤☞➎➙➥Ø ➶➔➋ ⑦ ❧☎♠ ➋ Ó✞❊☞⑥

80keV

♥☎♦

Ú ➋☞❶✜✯✎✰ ③☞❹✔♣ ➘ ⑥ú↕✆➙rq

1

s ➛ ➄☞➈✜❡❼➈t❢ ➴ ➈✆③ ➵ ↕✆➙✰Ø ➶ ❻✠✼✆å ⑦ ✉✎✈

cm

2

❶✌✇✎①✎② ô④③✁⑦

1 mm

2

❶ ➩✠✧ ② ❻ ➚ ✄★❂✆➙✙Ø ➶ ß ➸✰➺➹➶ →❼➙✁➛➣➮ ❶ ❿☎❊✤⑦☎③ ➾ ➟ ➒☞➴ ④ ✒⑥⑤✄③⑧⑦☞Õ❼❻✜⑨✎⑩✞❂✆➙✰Ø ➶ ß ➋✞✟ ⑦r❶✁❷ ❶✠❸✆➬✌✝ ➈✞❹✔❺☎❻✎❼ ■t❽ ➄✆➟✠❻✌❾❐➙✔✬

X

✮☎❿☎➀ ➶✗➁☎➂

➘ ⑥★⑦

2

➃✆❶ ❣✎✐★➄✌➅➣ß✤Ô☎➆ ➋✠✟ ➙✁➛➎â✞❃✜❻✤⑦➈➇➉✂✎➊➎③ ✟ ➙➌➋✠➍✭✂✎➎ ➺❼❶✭❥ ❣✎✐ ✯✎✰✣❿☎➀➎è Ó✠❊ ⑥ ✛✰➦ â★Ù✆➙✜➛ ➄✰➈✜❡➣➈✞❢ ➴ ➈ ➨✭➏☎➐✣➑☎➒

12m

❻✎✰↕✰⑥✠⑦☎➓✣➔☎→

10arcmin

❶✌✇✎①☎➣✣↔ ③➌↕✞✿✠➛✎❶④↔★⑥★⑦✎✬

X

✮➣➷★✝ ➈✰➆➣Ï✠➈ ✷

Hard X-ray Imager

HXI

❻ ➨ ⑦➎Ø ❶✭➣●↔ ③✭✱✌③➝➈✣❂❼➙➌➛●➜✎✕➣÷➥→ ② ô➎③➌↕ ✿❼Ø ➶

ß Ò☎➝ â✠Ù❼➙✄➛ â✠❃✄❻✠⑦

30

HPD:Harf power diameter

✻ ➶

↕❐Ð✗➊☎✐✎✂☎➎ ➺ ③ è ✿☞➄☞➈ ❡❼➈✠❢ ➴ ➈ ❶✜➟ ✐☎✂☎➠ ✷

PSF:Point spred function

✻✆❶✞❸✠➏ ❻✜➡✎➢ ➘ ⑥✠⑦

3-5

➞ ➊ ❶ ✂✎➎ ➺ ③⑧↕✞✿ Ø ➶ ß✜❜❐Ú★Ù✆➙✁➛➤❏

2.1

➶ ⑦➤❏

2.2

➨ Ø✆Ð ➘

❿ Ò✎➝☎➥☎➦ ③✔➧

➘ ❿ è✠❶☞➋ ×✆➙✁➛

VLSI

❶ ➜ ➑ ❈☞➄ þ ÿ →④ò è⑧➨✎➩ ❂❼➙ ➶ ⑦

HXI

➋☞➨

2 cm

×

1 cm

✓ ✟ â ❶✜➫✎➭ ③

3

✿✭➯☎➲☞⑦

2 cm

×

3 cm

➶ ↕④Ð ❬☎❭ ③✌✱✌③✆➈✣❂✆➙ è✤❶ ß✭➳☎⑨✠➵✌➸ Ò ➶ â✠Ù❼➙ ➶✗➨ ❾➺❃✄Ù➣➙✄➛❐Ø ❶✌➻✰➪ ⑦✠➼ ➶ ✿☎➽ ✆☎➾ ❈✭➚✞➽✭✓ ✟ â✎➪

250

❢ ➾✣➶ ✒➌➊ ➶ ❂✞➹

4.3

➊★➽✜➊✣✐☎✂✣➎

ß✜➘❙❃⑧➴✭➷✞➬✣➴☎➮✣➴☎➽

➫☎➭★➱

80

×

40=3200

✆✎➾

➚✠✚➺❃⑧✃✞➹✔❐❮❒✞❰✔Ï✜➷

10 keV

Ð

80 keV

➽✜Ñ

X

Ò✎❬☎❭✞Ó ➽☎Ô✣Õ✜❡✠Õ✞❢☎Ö✌Õ☎➽ ✇☎①☎②✎× ➪✔➳☎Ø✞➵ Ù✎Ú✠Û ➹✌Ü☎Ý✣Ï✜➷

HXI

➱ ➷⑥Þ✌➽ ❬✎❭✠Ó

100%

Ï ♦✞ß✭à✞á✭â☎ã ➪⑧↕★Ü☎✃✣ä☎➴✣å☎✃æ❰⑧✃ ß ❐

3arcmin

3cm

2cm

6arcmin

ç

2.1:

èêéêë✁ìêíïî

X

ðêñêòôó✁õ÷ö✁íêø❩ùûú✁ü÷ýrí÷þêÿ✁í÷ë✁✄✂✆☎êü✆✝❩ü✟✞✆✠êüôí✆✡☞☛êë☞ ✌✎✍✑✏

6arcmin

í✑✒✆✓

Ô✎Õ✕✔✠Õ✗✖✣Ö✜Õ✣➽✙✘✛✚✞Õ Û ➹✑✜✣✢✜➚✥✤☎Õ✛✦✙✧

Ó☎➱✕★✪✩✎Ò✪✫✭✬✕✮✪✯✎à✠á✕✰✲✱✴✳✣✵✷✶ Ü✷✸ ➷✙✹✪✺✪✻ à á✛✰ ➽✽✼✿✾ Ó❀✳❁✵ ➪❃❂ Þ ✶

Ü❀❄❁❅✿❆✿❇ ❒✭➴ ➹❉❈❋❊

X

Ò

Ï❍●●➹■✚✷❏

➾✿❑

Ö❁▲✿▼❖◆◗P

(15)

4

2

X

Ò✙❚✣❯☎à★á✑✰

ç

2.2: HXI

❱✆❲✟❳❩❨❭❬✟❪✟❫✆❴ôø❛❵êó✁õ÷ö✁í

1

❫✆❴êø✆❵✁í❝❜✄❞☞❡✑✂❭❢❀❣✆❬✟❱❛❤✁✐✟❥☞❪✆❦✟❧❝♠☞♥

è✜é✑♣✑q

12m)

r

2.1: HXI

í❛s✁t✑✉✿✈

1

➾✑②

➚✙③✥④✙⑤

250

µ

m (200

µ

m

500

µ

m)

×

2

×

3 cm

2

( 3 sensors )

⑦ Ø✗✜✣✢✜➚✥✤☎Õ

80 keV

⑦✣⑧

✜✣✢✜➚✥✤☎Õ

3 keV

⑨✛⑩❛❶

Õ✙❷✛❸

8 keV

✜✣✢✜➚✥✤☎Õ✛❹✙❺✣❻

(FWHM)

0.5

1 keV

❼✣❽ ❹✣❺✙❻

<

100

µ

s

❾✣❿✙➀✣➁

-20

0 degree

➂✣➃✙➄✣➅

<

250

µ

W /pixel

Background:NXB

➆❉✬❀➇

➁➉➈➋➊✣➌★Û✭➍ ❐⑥Þ✛➎

NXB

➎✣➏✕➐★Ï

à❍á✛✰

➈✛➑✥➒✕➓✭➔✑→✿➣ Õ✛↔↕◆✗Ï

●✪➙✕➛✕➜✙➝

ß

Û✭➍➋➞✪➟

✬✛➠☎â★Ó✙➡

❐t➬✣➎✑➢✣➤☎➷

Õ✛↔➥◆➧➦

✱☛à★á

➎✕➨

Ó

❶ ▼✑➩

Ò

✻✪➫✙➄

➭✪➯

✬✕✳✙✵ ➈ ❂æÞ

Ü✕➲✪➳ ➈✕➵✑➌

➏✑➐

✃✣ä☎➴✎å✎✃➺❰⑧✃

ß

Ü

➙✛➛✜➷

à✠á

➷ ➣ Õ✕↔➥◆

➎ ❽

Ó

➑ ▼✑➸◗➺✴➻✛④✗▼ ➣✣➼ ▼✌Ô P ➣ Õ✛↔➥◆➽➦

Ó✕✳✪✵✭✬

❂æÞ✙➙✛➛

ß

ß➾✱✕➚

Ï✪➎✙➪✭➷

à✠á

Ð

➎✑➶✙➹ ➈❛➘

á

Û

➍❛➴✙➷

✬✙➡ ✸ ➷

❚✙❯✙➬

➷➱➮t✃✷✃

✱✑❐❛❒

10

➩✙④

➒✙❮❛❰

➎✑Ï

ß

❼✙❽ ❹✙❺

❻ ➈➋Ð✭Ñ Þ

✱➋✬

➷✪Ò ❒✌➴ ➍ ❐

NeXT

Ï✪Ó

ß

➱❀Ô

HXI

Ñ

X

Ò

❚✪❯

❹✣Õ ➈×Ö✥Ø

➛✣Ó➾✸

Ô

10keV

Ù✣Ú ➎✛Û

X

Ò❉Ü✕Ô

HXI

➎✑Ý✞Ï✙Ó

Ð✙Þ

Ü

CCD

àtá✕✰✞Ó ➘ ➪

á

Þ

➍ ❐

HXI

➎✑ß✙à✙á

Ü✑â

2.1

Ï✄ã

Ý⑥❰

Þ

ß

➍ ❐åä

2.4

Ï

Ô

SXI

300

✖ ➒✪❮ ▼➋æ✭➎

X

Ò

CCD

✱èç

➪✛➤✗é✛ê✞Ü✛➢✪➤✭➎

CdTe

à★á✑✰

à★á✭â☎ã

➈➋ë✠Û ❐ ➷✪Ò ❒

Þ

à✞á✭â☎ã

➎☎Ü✎Ý✎Ï

Ü✕Ô

➮✞✃✷✃

✱✑❐

0.5mm

æ

Ô✙ì

Ó✣➡✙Þ

å

1.0mm

æ✭➎

à✞á

✰✭✬ ➴✪➷

Ó✪➡

(16)

2.1. NeXT

X

Ò✣❚✙❯✣à✞á✛✰

(HXI)

5

ç

2.3: HXI

í❛ï✁ð ç✆ñ

2.5cm

ò✑❢

8cm

ó☎í

BGO

ô☎ù✆õ✗öûü✙÷÷í✑ø❝ù✜ý✁í✗ú❭û✑ü☞❱

CdTe

❴êø❝❵êó✁õ÷ö✟ý✁þ☞ÿ✆❬✟❪ ñ✁✄✂

❢✆☎✞✝☞ô✠✟ ù☞✂✄✡☞☛❝❢

CdTe

❫✆❴êø✆❵êórõ÷ö✁í☞✌êý❩❱☞✍êë✟ô✏✎

ù❛☎✓✒✔✎✖✕✖✝

(DSSD)

ó☎õ⑧ö✘✗✖✙✛✚✙❥✑❪✢✜✑✂✖✗✔ó✛✣✓✡✖☛✑❳✑❪

ñ

✜÷í

DSSD

SGD

ì❛❲✙❳ ❨✴❬✙❪✘✥⑧í✙✂✖✦✘✧✛✥⑧í✜ì➋❢

CdTe

ÿ✟❨✔í✖★✓✕❛❴✛✩✑✠✢✪✌ù✢✫✭✬✜ÿ✪ý

SXI

❱✖✮✛✯✓✡✖✰✕❳✢✱✛✲❛❱✛❥ ❪✖✳✛✴✢✗✖✵✢✶✛✈

1

ñ

ç

2.4: NeXT

✷✛✸☎í

HXI

SXI

❱❛❲✙❳❩❨✴❬✙❪

Si

ó☎õ⑧ö

(17)

6

2

❙ ✺

X

✻✙❚✣❯☎à★á✑✰

2.2

CdTe

✼✾✽❀✿❀❁❃❂✾❄

2.2.1

CdTe

❅❇❆❉❈❉❊●❋■❍❑❏❇▲❉▼●◆❉❖■P❘◗

80keV

❙✭❐❯❚✓❱

➍ ●✓❲❯❳

X

➺ ❶ ▼✑➩ ✻ ➈ à✠á✢❱ ➍ ❙✙Ü✕Ô❩❨➾✶✌ß✛❬✘❭✢❪✗✬ ➴✙➷❴❫ ➡ ➍❯❵❜❛ Þ Ü✑Ô

❛ ➎✄●❴❲✖❳✙✜✪✢✑↔✭✤❞❝✑✦✪✧ ❫

Si

❫ Ü✄❡ ❹❴❳ à✞á✌â☎ã✄✬✔❢❤❣➋Þ ❳ ß✘✐❞❥ ❫ ➡ ➍❯❵❩❦♠❧ ➎ ❑ ↔✓❝ ♥ ❫ Ü✕Ô✘❨➉✶✜ß✭à✞á✛➬ ➯ ✱✑✶ ➛ Ô

➓ ↔✙↔♣♦✗✘ ◆❛✖✣▲✔q P

CdTe

➆ ➎✢rts ➈✈✉ ❥ ➛ ➚✔✐ ❵

CdTe

Ô✗➡ ➍ ß✙Ü

➓ ↔✙↔✘♦✢✇✢①✭✘ ◆➋✖✙▲✛q

(CdZnTe)

Ü✑Ô

II-VI

➎✔♦✙➤✢③ ❬✢❭✘❪✓❙ ❹✘④⑥⑤ Þ☞Ô✟â

2.2

➎✭●✓❲ ❙✛⑦✢⑧✓⑨✔⑩✷➚

❳✔❶ ➯✘❷ ➹

(Z

Cd

=48, Z

Te

=52)

➈☞❸✓❹ ➛✢❺ ➍✆❻

3

❼ ❵

CdTe

➎✄❽✢❾✘❿ ❒ ➈❯➀ ❳

X

✻ ➺ ❶ ▼✛➁

✻❞➂✏➃✕✰ ✱➄⑦✢⑧ ✶

➛ Ô ä

2.5

❙ ë ❱ ❵

CdTe

➎ ➂✓➃✄➅✢➆✗Ü

Si

2

➇✙Ù Ý ❫ ➡ ✸ Ô ❛ Þ ã ❫✄➈ â ⑨ ❳ ❶ ▼✔➁ ✻✢➂✏➃✕✰ ❫ ➡ ➙ ✐

NaI

➣ ▼✑➸➊➉❯❝✏➋ ➈

Ý✏➌ ➍☞❵ ä

2.6

➍⑥❣

é

➍ ●✓❲

❙✕Ô

0.5 mm

➎ æ➎⑤✕➎ ➬ ➯ ➎✛➢✙➤ Ô

CdTe

❫ Ü

60keV

X

Õ ➯➾➈

80%

Ù Ý✘➏ ❥ ➍ ➲➑➐ ❫ ➚ ➍ ➎ ❙✘✐ ❺ ✶ ➛ Ô

GaAs

Ü

40%

Ô

⑩ ➻✪▼

Ü✑❒

%

✶✔➍➾✱✈❥ ➍♣❛ ✱ ➐ ❫ ➚ ❳✢❺ ❵

CdTe

Ü✑Ô ❛ ➎✥●❴❲✈❳✔➒❴❺✘➓t➏ ❻ ❙✔➔ ❹ ➛ Ô✢→ ➀✪❾✪❿✷➈ ì ❻ ❙♣❱ ➍ ➎ ❙✔❡ ❹❴❳✛➣➉▼✷◆↕↔✓➙è❏✔♥✘➛✘➜✕↔✓↔♣❝

(

E

g

=1.5 eV)

➈➋Ð✭Ñ ➎

➐✕à✘➝ ❫

➍❯❵

2.2: CdTe

➟✛➠✛➡✢➢✖➤✄➥✛➦✛➧

: CdTe

➢✖➨✛➩✢✤

ACROTEC

➫✄➭✛➯✛➲✖➳✛➵✄➸

CdZnTe

➢✖➨✛➩

ACROTEC

➻✢➢➽➼✢➾✖➚✛➪✛➶✢➹✁➘

4

➴➬➷

❶✘➮ ❷♣➱ ✃✘❐

⑦✢❒♣❮

➣➎❰➎ÏÐ↔❴➙ÐÑ✔Ò

ǫ

(

µτ

)

e

(

µτ

)

h

Z

[ g/cm

3

]

[ Ωcm ]

[ eV ]

[ eV ]

[ cm

2

/V ]

[ cm

2

/V ]

CdTe

48/52

5.85

1

×

10

9

1.4

4.43

2

×

10

3

1

×

10

4

CdZnTe

48/30/52

5.81

3

×

10

10

1.6

4.6

1

×

10

3

3

×

10

5

Si

14

2.33

1

×

10

3

1.12

3.61

0.42

0.72

Ge

32

5.33

1

×

10

2

0.72

2.98

0.22

0.84

ǫ

: 1

Ó✓ÔtÕ

➮×ÖÙØ✘Ú

Ó➎Û❯Ü➎Ý✔Ô✘Þ✔ß✘à❴á

➛✘➜✔â❴↔✘ã

µτ

:

Õ

➮⑥ätå✢æ✔Ø✘Ú Ô✔ç✘è ❐êéÐë✘ì Ô✔í✘î✘ï✘ð

e

æ Õ ➮✘ñ

h

æ✛Ø♣Ú ò⑥ó æ✛ñ❞ô➑õ✢å✔ö✓÷✛ø✘ù✘ú✘û

Û❯ü✓ý

ACRORAD

þ

(

ÿ✁

)

é✄✂✆☎✞✝

ñ❞➒✠✟✘➛✢➜tâ✓↔✢ã☛✡✌☞✞✍

Û

ü❴ý

CdTe

✎✞✏✞✑✌✒✆✓✕✔✓Ô✞✖✕✗➎Û✙✘ ✟✛ñ✛✚

Ô☛✜✌✢✞✒✠✓✕✔✤✣✓Ô☛✥✌✦➎Û✙✧✠★✞✩✠✪ å✬✫

5

6

✭ î✯✮

2.2

Û

✰ Ý é ñ

CdTe

æ

Si

ñ

Ge

Þ✕✱✤✲✠✳✵✴✠✶✸✷✢Ôtç✢è ❐❤éÐë✘ì Ô✔í ✝✞✹

Ý

µτ

✺✆✻☛✼✾✽ ✟✵✿ é

✩✕❀

õ

Ý✁î

CdTe

Ô❂❁✤❃ ñ♣Ø✘Ú

Ô

µτ

✻❂✼❄✽ ✟■å

★♣Þ

ñ

0.5 mm

❅❉Ô❇❆

ÞtÓ❉❈❇✩

100 V

Û❇❊❂❋✾❈❂✩

●✸❍❏■❉❑✤▲

✘❏▼

æ

2 mm

▼ ❐✆✝ ñ ✒◆✓❇✔❉Ô❂❅◆❖ éP☎ ▼ ❐ Þ✵❈❂◗■á❉❘P❙ ñ Õ✞❚❉Þ❂❯❏❱❉✽ õ ÝP❲ Þ ñtØ❞Ú ✻☛✒❳✓❨✔❳❩✘Þ❭❬❫❪ Ñ✞Ò ✽ õ ✩✠❈ ä✠❴

(hole trapping)

î

Ò ✶✙✷ ❰✛Ò ◗❵❘☞Ô✕❛ ➱ Ô❨❜❵✪✌✽ æ✄ñ ✳✆✴✆✶✁✷✕❝ é ✚ Ô✔ç✘è✞❞✞❡✓Þ❇❢✌❣✠❤➑Ý å ★ ñ✆✐✓❰❇❥✕❦ ✻☛❧✞✥➎Û✁♠ ✿ ❈ å ✒✵✓✕✔➑Ô✕♥✞♦ ♣rq❵✽✁s✓Þ t✞✉ ✩☛❛ ➱ Ô✕✈✞✇✞✺ æ☛①✞② ❤➑Ý✖î❵❈ å ✻ ✉ ✩ ñ✌③➎ä ✉ å✌④✌⑤tâ✠⑥✘ã Ô ✐❴❰☛❥✕❦ Þ✛Ó✵❤✓Ý☛⑦✞⑧✆⑨❵❬ â✓æ❨⑩✌❶ Ô✠❷ ã ⑨✄Þ æ á❸❘❫❙ ñ✕❹✠✟❺④✌⑤✄â❳⑥✢ã✕❻ Þ❨❼❺❽ ✟✕❾❺❿ Û❨➀ ✟ ✩❳❈ ä❳❴

(Low-energy tail)

î

100 keV

Û✁➁✆➂❴Ý

t ❴ á☛✇ ✟✌④✤⑤✛â✵⑥✢ã Ô ✐➑❰☛❥☛❦✆➃✾➄ ✒✆✓☛✔❴Ô☛➅✤q➇➆ ä ✝ ❧✌✥✵❤➑Ý å ★ ñ t✠➈ ➉✞➊ á☛➋✞➌ é ❈☛✩ ✹ ❘✁➍ õ Ý ✫

7

✭ î

✿ Ô ❹✆④✞⑤✛â✵⑥✢ã☛❻ Ô✞➎ ãtâ Û✸➏✌➐✠❤➑Ý å ★✘Þ ñ ✳❳✴✵✶✸✷✌◗❵❘✈Ô✕❛ ➱ Û✁❱✆★✆✪✢ÝtÔ✢Þ✔ß✘à❴á✕❜ ✪✔á☛➑✆➒✌✷✤⑦✛Õ✤➓⑥Û☛◗✞➔❴Ý ✿ é ✻✕→✵➂❵❘ õ Ý☛✻ ñ✠✚✘õ Þ☛➣ ❴ ✶ ã ⑨✖Õ✤↔✓Ô❇↕✌❋✆✻☛➙✆➛ é á✓Ý✈î❺✎ ✏✞✑✞✒✆✓☛✔❴Ô ④✞⑤✔â✆⑥✢ã❇✡✌☞✤✍✓æ❇➜ ❖✤➝✠❈☛➞☛➟❴Ô☛➠✞➡❴Þ t✞✉ ✩ ③❑ä ➈ ñ ➞☛➟❴Ô☛➠✞➡ æ ✒✆✓✕✔➑Ô✕➢ ➤ é ✶ ã ⑨❯Õ✌↔➑Þ t✞✉ ✩☛➥✌➦❄✽ õ Ý✈î❵✽✆❘❯Þ☛➢ ➤ æ✛ñ ❆ ➮ Ô✕❜❄✪✌✽✛Þ t✌✉ ✩ ③➎ä Ý å ★ ñ ✶ ã ⑨ ✿ é ✝

(18)

2.2. CdTe

✎✞✏✞✑✞✒✆✓☛✔

7

2.5:

➵✌➸

X

➺➇➻➽➼❺➾✁➚✙➺✕➪✞➶✙➹✌➘✙➴☛➷✕➬✕➮❇➘

8

➴➬➷

CdTe

➸✞➼❺➾✁➚✙➺✕➪✞➶✙➹✠➱✕✃✁❐✙❒❵❮Ï❰

Ð

➹ÒÑ❺❐

Ð

NaI

Ó❺➾❫Ô✛Õ×Ö❞➾❨➱❫Ø✛ÕÚÙ❨Û❺➘❫➪✯➶❫Ü❨Ý❺Þ❫ß✯à☞➷

MeV

á❨â❞➫❨➸➽➲❺➱ ➸❏ã❨➾❫ä❳å ➾✄æ✕ç✌è✙é✕ê✌ë✛➫❨➸✛➲✙ì✕í✌è✕î✕❐✙ïðÑ✢➲✖➷ Ý✈î

CdTe

æ

10

9

Ωcm

é ✟❉❴ t ❴ á❇✇ ✟ ✱♣❒■❮➎Û ● ý☛❆✤ñ ✝✞✹ Ý❂✻ ñ✞ò✤ó

Ô

CdTe

✒◆✓❇✔ ✝ ætñ ✶ ã ⑨✈Õ✞↔➑Þ t Ý✸➠✞➡➑Ô❂➙✆➛✤◗❄❘ ñ

0.5 mm

❐ Ô☛❅◆❖♣Ô☛❆ ➮ Þ å✤✟ ❈❇✩ ñ

100 V

❐ Ô❇➑◆➒✞✷ ⑦✔Õ✞➓⑥Û✕◗✞➔✓Ý✔Ô✌✻✤➛✕ô é á✓Ý❯î

-20

❐ ▼ ❐ Þ☛õ✌ö✠❤❴Ý

✿ é✙✝ ñ÷✿

Ô☛ø æ✕ù✞ú ➏✤➐❵✽ õ Ý ● Ô✢Ô ñ ✳✆✴✆✶✁✷❴Û ✹ ý✌★✵✪✢ÝtÞ ætñ

500V

û✌ü➑Ô✛Õ✤➓✠✻❇ý✌þ✵ÿ ✝✤✹ Ý❯î ò♠ó æ✛ñ

CdTe

✎❺✏✌✑⑥Û✙✦ ✟✔ñ ô✏õ✘å✌④❺⑤✔â❳⑥✢ã✕✡✌☞❺✍ Û✁➊Ý å ★✢Þ ñ ò✌ó Ô t ❴ á ñ✄✂❞ã✆☎❩Ñ ⑨☞Õ✯❚➊Û❫✦ ✟ Ý ● Ô❞Þð❋❳➂❺✩ ñ✞✝ ➒

✂❞ã Ï é

❈ð✩✄è❞Ü✛❤✏Ý✙✒✛✓❨✔✏Ô✯✖❨✗♠Û❫✧✠★✯✩❳✪ å ✫

7

✭ ✫

9

✭ ✫

10

✭ ✫

11

✭ ✫

12

✭ î

✿ Ô☛✒✠✓☛✔✓Ô✠✟☛✡ æ✠☞☛✌ Þ ❹✠✟ ✶ ã ⑨✖Õ✞↔✓Þ ✹ ➈ ñ

CdTe

CdZnTe

✝✏✎✠✑❤é á ✉ ✩ ✟✘å☛✒✢ãtâ Ô✛ç♣è✏✓✔✍ ë✘ì ✻

❹✠✟✖✕✏✗ ✝ ● ñ

✇ ✟ Õ✌❁❑Û✕◗✤➔✌✩✞✳✆✴✆✶✙✷➑Û✙❱✆★✆✪ ✉ å ü ✝ ñ✘ô❴õ å✞④✞⑤✔â✆⑥✢ã❇✡✌☞✤✍ Û✘⑥Ý ✿ é ✻ ✝ ✪✢Ý✈î ò❺ó❴æ✏✙ ❚ Ö✛✚ ❚ é ● Þ Ò

❪✢✜✏✣

(Pt)

Û❫✦

✟ ✩✏✤ ➈ ñ✦✥ ✆ÿ✢Þ ✂✢ã✆☎✢Ñ ⑨✛Þ✢✧ ✟✠★☛✩ Û✌❈☛✩ ✟ å î

CdTe

✝ ➒ ✂✘ã✫✪Ðæ✛ñ

p

✬❴Ô☛✎✞✏✌✑ ✝✌✹

Ý

ACRORAD

þ❴Ô

CdTe

Cl

s❴Þ✛Ó❄❈✕✩ ñ✆✙

Û

➒✮✭✢✯✆✰✠✱

(In)

Þ✞❤✓Ý ✿ é Þ t❺✉ ✩✕✮✏✲✮✳✠✴➎Û✖Ü ➈ ñ ✶ ã ⑨❯Õ✌↔⑥Û ❹ ➆ ➩✠➂✓Ý ✿ é Þ t❺✉ ✩ ñ ✇ ✟✞④✞⑤✛â✵⑥✢ã✕✡✤☞✌✍ Û✵➎Ý ● Ô ✝✤✹ Ý❯î ❹ ✶ ã ⑨✈Õ✌↔ é ✟✾❴ ✟✔✡ æ ✇ ✟ ➑✠➒✤✷✌⑦➑Û✕◗✌➔➑Ý ✿ é ✻ ✝ ✪✘Ý ✿ é Û✘✶✆✷✵❈✕✩✔✤ ➈ ñ ✳✆✴✆✶✁✷✘Ô☛❯✞❱✞➋☛✸ ● ❜✞❼❴Þ☛➏✞➐ ✝ ✪♣Ý✖î ✹

2.7

Þ✠✺ ✌

Ô

Pt/CdTe/Pt

é✼✻✾✽ Ñ

❬✄✳

ã

✬❴Ô

In/CdTe/Pt

Ô✾✶

ã

⑨❯Õ✞↔

-

➑✠➒✤✷✌⑦

(I-V)

✟✔✿❑Û✘❀✆❤

13

✭ î ✻✾✽ Ñ

❬ ✳

ã

CdTe

✒◆✓❇✔❴Ô❄✶

ã ⑨✈Õ✞↔ æ✔ñ ☎✢❁✔❂❄❃ Þ✔✤ ✟ ✩

Pt/CdTe/Pt

CdTe

✒✵✓❇✔❴Þ❇✱✞✲✵✩

1

2

❅ ❹✵✟ ✶ ã ⑨❯Õ✤↔✤✺➎Û✘❆☛❇❄❈❇✩ ✟ Ý ✿ é ✻✤➍✤◗❴Ý✈î ✿ Ô ✿ é Þ t ➈ ñ

CdTe

✎✞✏✞✑✞✒✆✓☛✔❴Þ☛✇✞➑✆➒✞✷✞⑦❴Û✕◗✤➔✓Ý ✿ é ✻✠❈ ✍ é á ✉ å î ✹

2.8

Þ

CdTe

✝ ➒ ✂✘ã❉✪ ✒✆✓❇✔ ✝ ❘ õ♣å✖✌☛❊ ✝ Ô✤⑦✤⑧✆⑨❄❬ â Û✘❀✆❤ î✌✇✤➑✵➒✤✷✤⑦tÕ✞➓❑Û☛◗ ➔❴Ý ✿ é Þ t✠➈ ➎ ãtâ ✻✢❋☛●✾❈ ñ ✇ ✟✞④✞⑤✔â✠⑥♣ã✕✡✌☞✤✍ Û✵❆☛❇✾❈☛✩ ✟ Ý ✿ é ✻✞➍✞◗❴Ý❯î ä✛åtñ✌❹ ❊ Þ✆❈✕✩✵✽✠❘✖á➑Ý✙✇✤➑✠➒✞✷✞⑦✔Õ✌➓❑Û✕❊❇❋✠❤❴Ý

✿ é✙✝ ñ

✳✠✴✵✶✙✷❴Û✁❍✔■✓Þ❇❯✌❱✾✽✵❏ ñ✾❑✏▲✔▼✠◆✢❖ ✝ ③➎ä Ý✁ý☛P✠ÿ✤➛✕ô✤✺✆◗✖✧ ✟✤④✌⑤tâ✠⑥♣ã✕✡✤☞✌✍❙❘ ❆✔❇✠❤✆❚ ✿ é ✻ ✝ ✪ å✠✫

14

✭ î ✿❱❯

t

ñ ✻✄✽❳❲

❬ ✳❩❨❱✬

CdTe

✝ ➒ ✂ ❨ ✪ ✒ ✓P✔✄❬ ô■õ❩❭ ✿ ✍❪❘ ✗❩❫ ❤✄❚ ✻ ñ✄❶❩❴ ✝

Pt/CdTe/Pt

✝ ❬ ✰ ❘✘❵✏❛✌◗ ✉ ❭☛❜ ❪✆✶✁❝✔❨ ✻❙✽ ✭✮❞✁❡✔❢✏❵❣❚✙➭✏❤✵✻✏✤ ✿ ❚✵✐ ✿✖❯ ➭☛❤✮❬✢❥✌➑✠➒✤✷✌⑦✖❦✌➓ ❘ ❊ ❋✾❈☛✩✌◗❄❘✁❧✏♠✤✻✠♥✮♦☛◗☛♦☛❵✞✩✠❥ ④✞⑤✢♣✠⑥ ❨✠q✏r✔s✠✻✢t ② ❈✵✉ ♣

⑦✖✈✠➒ ❬ ✻

❃ ✻ ✉ ✩✆❈✔✇ ❴ ➭☛❤ ❯✆✿ ❞✵① ✹ ❚✘✐✔②✾③ ❯✆④✘♣ ❨✔⑤ ❯✖⑥☛⑦ ◗ t✆➈

20

C

⑧☛✓ ❯✕❹✔❊

◗✮⑨✘❥❶⑩✮❷✵◗

1000V/mm

❘✁❸

(19)

8

2

➒ ➓

X

➔✏→✔➣✏↔❣↕✠➙

2.6: 60 keV

➜✁➝

X

➞✠➟✠➠✏➡✁➢➥➤✠➦

CdTe

GaAs

➧✏➨✆➩➭➫✠➯✁➜✁➲✠➳✠➵✠➸✠➺➻➜✁➼✏➽✁➾✠➚

➪✮➶ ❿☛➹✏➁✔➘✏➴ ♣ ①✢↔✮↕✢➙✾➷✘➬✏➮❙⑨✠➈✠➱✔✃✆①✮❐☛❒☛➆✮❞✢➷✁❮✔❰✾⑨✢➈✮❐✢Ï✠✐✆Ð✔Ñ✠❥✮Ò ➉❣➊✁Ó ➴✏Ô❶Õ✢Ö ➋✏× ➪ÙØ☛Ú✞Û

ÐÙÜ✆Ý✏Þ➥ß☛❽➥➈✏àÙáãâ✏äæå

4

çéè✠êë⑨✮ìîí➥ïð❷✁ñ✏Ñëòóá✖ô✏õ✆ö ➪Ù÷ ❽➥➀✆ø✠ù✏⑤ ➶Ù➪ ❿➥ú Ö✵û✮Þ✮❺✆òýü ➪✖þ✏ÿ✁✄✂✆☎ ⑩✖ñ✆❒✏➆✞✝✁è✖á✠✟☛✡✌☞ ➪✎✍ ⑩ ô✏õ ➪✎✍ ⑩✔❺✆ò✑✏✫ì✵Ð✆➇✢➈☛❽❶ì✆✝✵❽✾❻ ✒ ➣✆✓☛➮✆✔ Û Þ✄✕☛➋✮è✮❐☛❒☛➆✁✝ ✆✖✌✗ ➇✢➈☛❽✆❒✙✘

ACRORAD

✚✆✛ ➪

CdTe

✓✢✜☛✣ ➪✞✤ ❻✑✥ ß ➪✄✦✢✧

✝ã⑨✢➈ãá✌★ ñ✔Ï✩✥✆✪☛✫✼➷✄✬✢✭❣❒✔➆✞✝ è❣❐

❒✙✘✌✮❙③ á

21.5

21.5mm

➪✱✰✆✲☛☎

CdTe

✳✢❿❄ú✔➴✵✴ýÞ✱✶❶⑨✖➈✢á✮➁ ➊✎✷✹✸ ➷✙✺✼✻✖➈

Am241

➪ ✽ Ö✄✾✖➔❙➷❀✿✆❁✼✻✖Ï✼✝✖➆☛❂✁á❄❃✢➴✮ø ✲☛☎

Þ✞✻✖➈

4

❅✖á❄❃✠➴❣ø✵➐☛❆✮Þ✁✻✢➈

0.2

❅✹✝✘❽❶❻ý❼✮❽✄❇✆❈❣è

❉☛❊

Þ✄❋☛●❄✻✖Ð✔❽✔➁✆❍ ø ✸❏■

✩❑

❷✘ñ☛Ï✩✘❶➆✢ñ❄à✖á

ACRORAD

✚ ✱✰

❐✢Ðã➏☛▲✁▼❣➷◆❇✆✛❣è✮❐❄❒

Ï✆❖☛è☛✬✆❒✙✘☛P ❹☛◗

á

eV products

✚☛❘✏á☛❙✾Ö☛❚✵❾❙Ö❯✚

CZT

è☛à✢á☛➏☛▲❱▼✔è✔Ð✏❽❣➆✁✝ ✤ ✬❙ò á

1mm

❲✆ñ✔Ï✹✝✢➆✆❂✵➐✆❆✮Þ ✽ Ö✎✾✖➔✾➷❯✿☛❁ ➅ ❒❱✝✄❃✢➴✮ø ✲✆☎❱

50

❅✄❳✆❨ ✤❀❩❱✖ ➇✠➈✁✻✆❬✮❻✆✝☛❻✁Ð ❭✆❪ ✥✆✫ ✱❫✌❴ ⑩✠ñ☛➈☛❽✮❒❯✘✌✮❄❵ ➪✁❛❀❜ ➅ ❿✞❝✠➴✆❞✮Ö✆❡✵↔✮↕✠➙❣Þ✏Ñ✏❽✔➈✏à✖á➥↔❣↕✠➙ ➪ ✥✆✪✆✫✮à✎❢ ❖☛➈✄❣☛❤❣è✆✬❙òóá✾➆ ➪ Ï☛❖✢á❣❿❱❝✖➴✆❞❣Ö☛❡✵↔✮↕✢➙ ➪✆✐✱❥

Þ✆✬✔Ï✆➇✖➈✏à✖á✆✮❄❵✠à

ACRORAD

Pt/CdTe/Pt

❦☛á✼❬✢Ï☛à✁✳✢❿☛ú☛➴✵✴❏❦ ➪

CdTe

✓☛✜✌✣❙➷✎❧✱♠✆Þ✄♥ ❹ ➈☛❽✮❒❀✘

✮✼❵✖à✖á✌♦☛♣☛á

CdTe

✓☛✜✆✣✔↔ ↕✢➙

➪ ➊ ➴❣ø þ☛q ➷✙r Þ✄s☛t ➅ ❒✔➆✁✝✖➷ ❛✢Û Þ✖á ✽ ➴✵✴ ➊ Ö✆❡ þ ❢✼➷✆❃❄ø✖ù ■ þ ❢ ➪✄✉ ò Þ✄✈ ➄ ✻✢Ïãô✔õ ➪☛✐✱❥

➷✙✇❣Ð✮➇✖Ï✞å

13

ç å

16

ç①✘

✽ ➴②✴ ➊ Ö☛❡ þ ❢✆✈❙❐

CdTe

✳✖❿✔ú❄➴③✴ ô❄õ

I-V

✫✼➷✩④

2.9

Þ✱⑤

✘❱④❄Þ❄àãá✹❃❄øãù

✲✢☎⑥

2mm

×

2mm

➪ ❙ ❿ ⑦ ➪ ✽ ➴⑧✴ ➊ Ö☛❡❯✈❶❐✵ô☛õ ➪ ▲✌⑨⑧✝❶⑩✆Þ✖áë➆✖ñ✹✝❶❷✌❸ ➅ ❒✢Ï✌❖✔Þ✠á✌❹✆❺ ➪ ✽ ➴✵✴ ➊ Ö✌❡ þ ❢❶➷❯❻

❽☛Ð☛❽

2mm

×

2mm

➪ ô☛õ ➪ ▲✆⑨ ✤ ⑤❄✻✢➈☛✬❣❒❀✘✆❼✆❽❙➷❀❷☛❸ ➅ ❒✞✝ á ✽ ➴②✴ ➊ Ö☛❡ þ ❢❶➷✙✈✁❾✔Ï ô☛õ✮à✢á✌❹☛❺ ➪

ô✏õ✮Þ✄❷☛ï✮➈

1

❿✆❳✆❨

➊ ➴✆ø þ✌q✞ s✆❽❣➆❱✝ ✌✖✆✗ ❒❀✘✾➆ ➪ ➆✞✝ ✗❄➀ á✆➁☛❾✮❿✏➀ ➁ þ ➂❶➷ ➃✖➄ ✻✖Ï✎➂ ➪

CdTe

ô✏õ ➪ ➊ ➴✮ø þ✆q à✠á✆➃✆✣ ➪

90%

❳☛❨✮à✄➄ ✲ ➷ q ñ✏➈☛Ñ❶ò á✏❾ ■ ø ➪✄➅✆➆

à

10%

❳☛➇✮è✆✬✮❒✔➆✁✝ ✌✖☛✗

❒❀✘

20

C

á

500V

❾❣❿✔➀✏➁☛➈☛Þ✔Ñ☛❽☛➈

10pA

✝✵❽❄➉

➊ ➴✮ø þ q✌➊ à✠á➋❹✆❺ ➪ ô✏õ ➪ ❉✌➌

á

40

C

Þ➍❬✠è✄➎✌➏✹✻✢Ï✌➈☛Þ✎➐ ➅✹➑ ñ✆❒ ➊ è✆✬✆❒❯✘ ✽ ➴⑧✴ ➊ Ö✌❡❀✈✾❐

CdTe

✳✢❿☛ú☛➴✵✴ Þ✁➒☛➇✢➈✢á✆➓✆➔✮è✄❢✁❖☛➈✄★✮ñ☛Ï✆→✆➣ ■✁↔

Ü✆↕✵✝ á✼➒✢❽✢➬☛➮✆✫❶➷

ß✢➓

X

↔✮↕✢ô☛õ ❮☛➋

(20)

2.2. CdTe

✓✆✜✆✣☛↔✮↕✢➙

9

2.7:

➛✄➜✌➝✎➞❯➟✙➠

CdTe

➼☛➽❯➡✁➢ ➧✏➨❱➤➥➞✌➦✑➧✎➜❀➠

CdTe

➨❀➩✄➛✎➜✁➫ ➜

I-V

➭✱➯✏➜❀➲✄➳✄➵ ➸✎➺❯➻❱➼➾➽❱➚✎➪❯➶

2mm

×

2mm

➧✎➹ ➪❯➶

0.5mm

➵✎➘➷➴

20

C

➵✢➬

13

2.8:

➨❱➤✃➞✌➦➾➧✎➜❯➠

CdTe

➨❯➩✎➛✎➜❱➫ ➼✏➽❀➡✌❐❯❒❱❮

➻✌❰

241

Am

ÏÑÐ✎Ò❱➢

57

Co

ÏÑÓ✎Ò✏➜✎Ô

Õ

➟❱➦×Ö➷➵

➽➍➚Ø➪❯➶

2mm

×

2mm

➧◆➹ ➪❯➶

0.5mm

➵◆➘➷➴

20

C

➵ÚÙ✠➩ØÛ✎ÔÝÜ➷Þ

500V

➵àß

➩➾Û✏➯❯ß

CP5102BS

á✁➧➷â✎ã✌Û✏➯❯ßÙ➡

ORTEC571

á❯ä

➧✎â➷ã✌å❯æ✎ç

0.5

µ

s

➡❯è✎æ

é

(21)

10

ë

2

ì í

X

➔✏→✔➣✏↔❣↕✠➙

2.9:

î✎➜✞➫✖➩✵➯✙ï❀Ü✱ð✱ñ✼ò ➧✎ó

é

➜✙ô✄õ✔➜

I-V

➭✄➯✱➵❱ö❀➟✄÷✙Ö✱Ü✄ð✔➜

➽✞➚✱➪❀➶✄➸✩➺❀➻✁➼

2mm

×

2mm

➧Ø➹ ➪❯➶

0.5mm

➵➷➘✎➴

20

C

参照

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