3.2 ᬌ⸛ᢥ₂
3.2.11 㩷 ᦨᣂ㩷 ᳃↢ 2Gbit NAND ဳࡈ࠶ࠪࡘࡔࡕߩ SEE ߅ࠃ߮ TID ․ᕈ
3.2.11㩷ᦨᣂ㩷᳃↢2Gbit NANDဳࡈ࠶ࠪࡘࡔࡕߩSEE߅ࠃ߮TID․ᕈ
߁േࠍߔࠆ߇ޔߎߩേߪᚻേߢޔ߃߫“ᶖ”ࠍജߒ“Enter”ࠍᛂߜㄟ߿ࠅᣇࠍⴕ߁ (Manual Test)ޕേㅦᐲߪ10MHzߢࠆޕ
ᦨೋߩ⹜㛎߇⚳ੌᓟޔቶ᷷ߢ90ᤨ㑆ࠕ࠾࡞ߒߡޔౣ⹜㛎ࠍⴕߞߚޕManual⹜㛎ߢߪߔ ߴߡቢోߦേߒߚޕᰴߦDynamic⹜㛎ߣ߫ࠇߡࠆ⹜㛎ࠍⴕߞߚޕDynamic⹜㛎ߪࠦࡑ ࡦ࠼߇ታ㛎ⵝ⟎ߦࠃߞߡਈ߃ࠄࠇߡߡޔSEE⹜㛎ߢࡆࡓ߇ߔࠆߣหᤨߦޔ⺒ߺ/ᶖ/
ᦠㄟ ߇ⴕࠊࠇࠆޕߒ߆ߒޔCo60ࠟࡦࡑ✢߇ᾖߐࠇߡߥߩߢޔ⌀ߩᗧߩDynamic⹜ 㛎ߢߪߥޕߎߩࡕ࠼ߢߪࠛ߇ᬌߐࠇߚޕߎߩ⹜㛎ߢߪޔേᵄᢙ߇33.3MH㨦ߢ
ࠆޕSEE⹜㛎ߪ 3.2.11-3ߩࠃ߁ߦⴕߞߚޕ
(4) ⹜㛎⚿ᨐ㩷
࠻࠲࡞࠼࠭ߩ⹜㛎⚿ᨐߪޔ 3.2.11-1䇮 3.2.11-2ߩࠃ߁ߦ߹ߣࠄࠇࠆޕDynamic
߮㕒⊛⹜㛎ߩ㆑ߪޔ࿑ 3.2.11-1ߩࠃ߁ߦߥߞߡࠆޕᦨೋߩ⹜㛎ߢ߽ࠛ߇↢ߓߡ߅ ࠅޔdynamic⹜㛎ߢߩࠛߪޔ࠼࠭㊂ߣߣ߽ߦჇടߒߡࠆޕ
SEE⹜㛎⚿ᨐߪޔ 3.2.11-4ޔ 3.2.11-5ߣ࿑ 3.2.11-2㨪࿑ 3.2.11-5ߦ␜ߐࠇߡࠆޕ
3.2.11-1 ࠻࠲࡞࠼࠭⹏ଔ ⹜㛎ࡕ࠼ߩ᧦ઙ
⹜㛎ࡕ࠼ ᾖᤨ⋥೨ߩ
ᦠㄟߺࡄ࠲ࡦ ᾖᓟߩࡈࠔࡦ࡚ࠢࠪࡦ࠴ࠚ࠶ࠢౝኈ ࠨࡦࡊ࡞
ᢙ a)Read Only Checkerboard Mode㧦⺒ߒߩߺ
Clock Cycle㧦10MHz
2 㧔First Set㧕 b)Exercised
Manually
ਇ
㧔⸥ㅀߥߒ㧕
Mode㧦Read/Erase㧔࠴࠶ࡊ৻㧕/Write
ࡄ࠲ࡦ㧦ᰴߩ4ࡄ࠲ࡦ all“0”,all “1”, Checkerboard 㧒 Checkerboard㧔Complement㧕
Clock Cycle㧦10MHz
2 㧔First Set㧕
c)Exercised Manually &
Dynamically
ਇ
㧔⸥ㅀߥߒ㧕
Mode㧦BlockනߢޔRead/Erase/Write
ߘߩ Block ߇ቢੌߔࠆߣޔ㗅ᰴޔᰴߩ
Block߳⒖ⴕ
ࡄ࠲ࡦ㧦 ห
Clock Cycle㧦33.3MHz㧔ᦨᄢቯᩰ㧕
2 㧔Second Set㧕
㩷
㩷
࿑ 3.2.11-1 ࠻࠲࡞࠼࠭⹏
ଔߦ߅ߌࠆ࠳ࠗ࠽ࡒ࠶ࠢ߮ࠬ
࠲࠹ࠖ࠶ࠢࠛ₸ߩᲧセ
࠳ ࠗ ࠽ ࡒ ࠶ ࠢ ࠛ ߪ ޔ ૐ
࠼ ࠭ ㊂ Ბ 㓏 ߆ ࠄ ⊒ ↢ ߒ ᆎ ࠆޕ
3.2.11-2 ࠻࠲࡞࠼࠭⹏ଔ ⚿ᨐ 㧔1/2㧕
㩷 ⹜㛎ࡕ࠼ ࠨࡦࡊ࡞ᢙ 30Krad㧔SiO2㧕 50Krad㧔SiO2㧕 75Krad㧔SiO2㧕
a) Read Only 2 Pass Pass 2-Fail㧔ᵈ2㧕
b) Exercised
Manually 2 Pass Pass 1-Fail㧔ᵈ2㧕
㧔1-Pass㧕
ࠬ ࠲
࠹ ࠖ ࠶
ࠢ ࠛ
㩷 c) Exercised Manually &
Dynamically
2 Pass
1-Fail㧔ᵈ1㧕 㧔1-Pass㧕
1-Fail㧔ᵈ2㧕 㧔1-Pass㧕
࠳ ࠗ ࠽ ࡒ ࠶ ࠢ
ࠛ㩷
c) Exercised Manually &
Dynamically
ห
࿑ 3.2.11-1ߩㅢࠅޕ
ೋᦼᲑ㓏ߢߪޔᢙbitߩFailߢࠆ߇ޔ࠼࠭㊂ߣ ߣ߽ߦᕆፋߦFail߇Ⴧടߔࠆޕ
㧔ᵈ1㧕Fail ࡆ࠶࠻ᢙ2.9Mbit, Clock Cycleଐሽᕈߥߒ,Resetᓟࡈࠔࡦ࡚ࠢࠪࡦߪᱜᏱߦᓳᏫ ૉߒޔ1bitߩᢿ⛯⊛Fail㧔ᦼᓙ୯ “1”߇ ᤨ᛬“0”ߣ⺒߹ࠇࠆ㧕߇ᱷࠆޕ 㧔ᵈ 2㧕Read ߪPass ߔࠆ߇ޔErase߇ Fail ߔࠆޕ㧔“0”ߦ“1”ߪᦠߌࠆ߇ޔ“0”ࠍ“1”
ߦEraseߢ߈ߥޕ㧕 㩷
㩷
3.2.11-2࠻࠲࡞࠼࠭⹏ଔ ⚿ᨐ 㧔2/2㧕㩷 㩷 ⹜㛎ࡕ࠼㩷 ࠨ ࡦ ࡊ
࡞ᢙ㩷
100Krad(SiO2) ቶ᷷ࠕ࠾࡞ᓟ㩷 a) Read Only 2 2-Fail㧔ᵈ2㧕
b) Exercised Manually
2
2-Fail㧔ᵈ2㧕
90ᤨ㑆ߩࠕ࠾࡞ᓟ
γ㧕ࠬ࠲࠹ࠖ࠶ࠢࠛ㧦 PassߦᓳᏫ
δ㧕࠳ࠗ࠽ࡒ࠶ࠢࠛ㧦ᓳ Ꮻߖߕޕᄙᢙ㩕㩨㨹㩎-Fail
ࠬ ࠲
࠹ ࠖ ࠶
ࠢ ࠛ
㩷
c) Exercised Manually
& Dynamically
2
2-Fail㧔ᵈ2㧕
࠳ ࠗ ࠽ ࡒ ࠶ ࠢ
ࠛ㩷
c) Exercised Manually
& Dynamically ห㩷
࿑ 3.2.11-1 ߩㅢࠅޕ
ᢙᣣߩࠕ࠾࡞ᓟ
γ㧕ࠬ࠲࠹ࠖ࠶ࠢࠛ 㧦 PassߦᓳᏫ
ૉߒޔ1ޔ1bit-Fail㧔“1”
࿕ቯ㧕
δ㧕࠳ࠗ࠽ࡒ࠶ࠢࠛ㧦ᓳ Ꮻߖߕޕᄙᢙ㩕㩨㨹㩎-Fail 㧔ᵈ2㧕ReadߪPassߔࠆ߇ޔErase߇Failߔࠆޕ㧔“0”ߦ“1”ߪᦠߌࠆ߇ޔ“0”ࠍ“1”ߦErase ߢ߈ߥޕ㧕
㩷 㩷
3.2.11-3 ࠪࡦࠣ࡞ࠗࡌࡦ࠻⹏ଔ ታᣉ႐ᚲߣᾖࡈ࡞ࠛࡦࠬ㩷
㩷 ታᣉ႐ᚲ㩷 ᾖࡈ࡞ࠛࡦࠬ㩷
㊀☸ሶ㩷 Michigan State University NSCL (National Superconducting
Cyclotron Laboratory)
Texas A&M Cyclotron
1E+6㨪1E+7ions/cm2
ࡊࡠ࠻ࡦ
(100MeV/200MeV)
IUCF(Indiana University Cyclotron Facility)
1E+10㨪1E+11protons/cm2 㩷
3.2.11-4 ࠪࡦࠣ࡞ࠗࡌࡦ࠻⹏ଔ ࡃࠗࠕࠬ߮േࡕ࠼㩷
ࡃࠗࠕࠬ߮േࡕ࠼ ᾖਛߩࡃࠗࠕࠬ േࡕ࠼߅ࠃ߮ࠛࠞ࠙ࡦ࠻
Static-Unbiased ශടߥߒ
Static-Biased ශടߔࠆ
ᾖ೨ߦᦠ߈ㄟࠎߢߚࡄ࠲ࡦࠍᾖᓟ ߦ࠴ࠚ࠶ࠢߒޔࠛࠍࠞ࠙ࡦ࠻ߔࠆޕ
Dynamic Read ශടߔࠆ ᾖ೨ߦᦠ߈ㄟࠎߢߚࡄ࠲ࡦࠍᾖਛ
Readࠍ➅ࠅߒࠛࠍࠞ࠙ࡦ࠻ߔࠆޕ
Dynamic Read/Write ශടߔࠆ ᾖ೨ߦᦠ߈ㄟࠎߢߚࡄ࠲ࡦࠍᾖਛ
Read/ౣ Write ࠍ➅ࠅߒࠛࠍࠞ࠙ࡦ
࠻ߔࠆޕ Dynamic
Read/Erase/Write
ශടߔࠆ ᾖ೨ߦᦠ߈ㄟࠎߢߚࡄ࠲ࡦࠍᾖਛ Read/Erase/ౣ Write ࠍ➅ࠅߒࠛࠍ
ࠞ࠙ࡦ࠻ߔࠆޕ
3.2.11-5 ࠪࡦࠣ࡞ࠗࡌࡦ࠻⚿ᨐ
േࡕ࠼ ⚿ᨐ
ో⥸ All“0”߇ࡢࠬ࠻ࠤࠬࡄ࠲ࡦߢࠆޕ Static Mode
(Unbiased &
Biased)
Bit Error ߣ Page/Block Error߇ⷰኤߐࠇޔ߶ߣࠎߤ߇ޔ Page/Block Errorߣⷰࠄࠇࠆޕ
Page/Block Errorߪޔࡔࡕࠕࠗߩࠦࡦࡈ࡚ࠖࠣࠪ
ࡦࠫࠬ࠲ߩSEUߦ࿃ߔࠆޕ
Page/Block Errorಽࠍ㒰ߚBit Error ߩࠢࡠ࡚ࠬࠢࠪ
ࡦ࠺࠲ߪޔ࿑ 3.2.11-2ߦࠃࠆޕ Dynamic
Read Mode
㧔Bit Error, Page/Block Errorߩઁߦ㧕
Single Event Functional Interrupt (SEFIs)߇ⷰኤߐࠇߚޕ
࠺࠲ߪޔ࿑ 3.2.11-3ߦࠃࠆޕ Dynamic
Read/Write Mode 1㧕㊀☸ሶ
Dynamic
Read/Erase/Write Mode
㧔Bit Error, Page/Block Error ߅ࠃ߮SEFIs ߩઁߦ㧕 Functional failures (Destructive Event)߇ⷰኤߐࠇߚޕ Single Event Gate Ruptureߦࠃࠆ߽ߩߣᕁࠊࠇࠆޕ
࠺࠲ߪޔ࿑ 3.2.11-4߮࿑ 3.2.11-5ߦࠃࠆޕ 2㧕ࡊࡠ࠻ࡦ
㨯Static Single Bit Error :ⷰኤߐࠇߥ߆ߞߚޕ
Dynamic Read Error 㧦ૐ⊒↢㗫ᐲߢߪࠆ߇ⷰኤߐࠇߚޕ
࠼࿁〝ߦ߅ߡޔ࠻ࡦࠫࠚࡦ࠻㔚ᵹࡄ࡞ࠬߦࠃߞߡ ૐ㔚ᵹ (zero)߇㜞㔚 ᵹ(one)ߣ⺋ߞߡߒ߹߁⽎ߢࠆޕ
SEFI㧦1 ࿁ⷰኤߐࠇߚޕ㧔࠴࠶ࡊ߇ࠦࡑࡦ࠼ߦᔕ╵ߒߥߊߥߞߚޕ㧕
ઁߩࠛ㧦ᄢⷙᮨࡆ࠶࠻ࠛ߇SEEߣ߁ࠃࠅ࠻࠲࡞࠼࠭ലᨐߦࠃࠆਇ⦟ߣߒߡⷰ
ኤߐࠇߚޕ
㩷
࿑ 3.2.11-2 ࠬ࠲࠹ࠖ࠶ࠢ SEU ߩ
ࠢ ࡠ ࠬ ࠢ ࠪ ࡚ ࡦ Page/Block Errorಽࠍ㒰ߚBit Error
㩷 㩷
㩷
㩷 㩷
࿑ 3.2.11-4࠳ࠗ࠽ࡒ࠶ࠢ࠼/ࠗ࠻
ࠛߩࠢࡠ࡚ࠬࠢࠪࡦ
⹜㛎᧦ઙ㧦 Dynamic Read/Write Mode
Bit Error 㧦න cm2/bit
SEFIs㧔Page/Block Errorಽࠍ
㧕㧦න cm2/Device
DEST㧔Destructive㧕 㧦න
cm2/Device
Page/Block Errorಽࠍ㧕㧦න
cm2/Device
DEST㧔Destructive㧕 㧦න
cm2/Device
࿑ 3.2.11-3 ࠳ࠗ࠽ࡒ࠶ࠢ࠼
ࠛߩࠢࡠ࡚ࠬࠢࠪࡦ
⹜㛎᧦ઙ㧦 Dynamic Read Mode
Bit Error 㧦න cm2/bit
SEFIs㧔Page/Block Errorಽࠍ
㧕㧦න cm2/Device
㩷
㩷 㩷
(5) ⠨ኤ㩷
(a) 䊃䊷䉺䊦䊄䊷䉵⹏ଔ㩷
ᣥ࠹ࠢࡁࡠࠫߩਇើ⊒ᕈࡔࡕߩ✢ߦኻߔࠆᔕ╵ߪޔᣢߦ[16]㨪[18]ߢႎ๔ߐࠇߡ ߅ࠅޔ࠻࠲࡞࠼࠭⠴ᕈߪ࿁〝ㇱߩ⠴ᕈߦࠃࠅ߹ࠅޔ8㨪14Krad [17], [18]ߢߞ ߚ߇ޔ࿁ߩ90nm࠹ࠢࡁࡠࠫຠߪޔ㜞࠼࠭࠻ߩᾖߦ߅ߡ߽ޔ50Kradએߩ
⠴ᕈ߇ࠅޔࠕ࠾࡞ലᨐߩ⚦ߪ⺞ᩏߢ߈ߡߥ߽ߩߩޔᣧᓳᏫะࠍ␜ߒߡࠆߎ ߣ߆ࠄⷰߡޔૐ࠼࠭࠻ߩᾖߦ߅ߡߪᦝߦ㜞⠴ᕈࠍᜬߟߣ⠨߃ࠄࠇࠆޕ
✢ߦࠃࠆ࠳ࡔ㧙ࠫ߇ޔ߶ߣࠎߤೋᦼ⁁ᘒ߹ߢࠕ࠾࡞ߐࠇࠆߎߣߪޔ⦟ߊ⍮ࠄࠇߡ
ࠆ᭽ߦޔ㉄ൻ⤑ߩᓸ⚦ൻߣ⭯⤑ൻߦࠃࠆ✢⠴ᕈߩะߦࠃࠆ߽ߩߢࠅޔ࿁ߩ90nm
࠹ࠢࡁࡠࠫຠߩ⠴ᕈ߇㜞ߎߣ߇ᦼᓙߐࠇࠆޕ
⑳ߚߜߪߎߩ࠴࠶ࡊߩ⚦
ࡊࡠࠬᖱႎࠍ߽ߞߡߥ
߇ޔᦨᣂߩࡈ࠶ࠪࡘࡔࡕ
ߩ৻⥸⊛࠻ࡦࡀ࡞ࠥ࠻㉄ൻ
⤑ෘߪ7㨪10nmߢࠅޔߎࠇ
߇࠻ࡦࡀ࡞ࡊࡠࠬߦࠃࠆᣧ
ࠕ࠾࡞ലᨐࠍᜬߞߡࠆ ߣ⸃㉼ߐࠇࠆޕ
࿁〝ߩਇ⦟ߦࠃࠆᶖ
㧔Erase㧕ਇ⦟ߪޔ࠻࠲࡞
࠼࠭ߦࠃࠆਇ⦟ࡔࠞ࠾࠭ࡓ ߩ 1 ߟߢߪࠆ߇ోߡߢߪߥ
ޕ
࿑ 3.2.11-1ߩ75Kradᓟߦ߅ߡޔ2ࠨࡦࡊ࡞߇ޔᦨೋߩStatic-Readߢ1E+4⒟ᐲߩਇ
⦟ࡆ࠶࠻ࠍ␜ߒߚ㓙ߩࡆ࠶࠻ࠛࡑ࠶ࡊࠍޔ࿑ 3.2.11-6ߦ␜ߔ߇ޔߪߞ߈ࠅߣrowࠕ࠼
࿑ 3.2.11-5࠳ࠗ࠽ࡒ࠶ࠢ࠼/ࠗ࠻/
ࠗࠬࠛߩࠢࡠ࡚ࠬࠢࠪࡦ
⹜㛎᧦ઙ㧦 Dynamic Read/Erace/Write Mode
Bit Error 㧦න cm2/bit
SEFIs㧔Page/Block Errorಽࠍ㧕㧦 න cm2/Device
DEST㧔Destructive㧕 㧦න
cm2/Device
࿑ 3.2.11-6 75Krad(SiO2)ᾖࠨࡦࡊ࡞ߦ߅ߌࠆᦨೋ
ߩࠬ࠲࠹ࠖ࠶ࠢ࠼ᤨߩࡆ࠶࠻ࠛࡑ࠶ࡊ
ㄝ࿁〝ߩ㓚ኂߦࠃࠅޔࡦ࠳ࡓࡆ࠶࠻ߢߪߥߊޔ pageࠕ࠼ࠬଐሽࠍ␜ߒߡࠆޕ
ࠬߦ㓸ਛߒߡࠆߎߣ߇ಽ߆ࠆޕpageࠕ࠼߽ࠬ߹ߚrowࠕ࠼ࠬߢࠅword-lineࠕ
࠼ࠬߣหߓߢࠆޕߎࠇߪࠛ߇ޔrowࠕ࠼ࠬߦଥࠊࠆㄝ࿁〝ߦ࿃ߒߡ↢ߓߡ߅ ࠅޔޘߩࡆ࠶࠻ߦ࿃ߒߡߥߎߣࠍᗧߔࠆޕ
࿑ 3.2.11-7ߦ␜ߒߚ᭽ߦޔ⁁ߩࡈ࠶ࠪࡘߩ࠹ࠢࡁࡠࠫߢߪޔ࡞ߪ N ࠴ࡖࡀ࡞ߩ
࠻ࡦࠫࠬ࠲㧙ߢࠅޔࡈࡠ࠹ࠖࡦࠣࠥ࠻ࠍ㔚ሶߢḩߚߔߎߣߢ“0”ࠬ࠹࠻ߣߒޔ㔚 ሶࠍήߊߔߎߣߢ “1” ࠬ࠹࠻ߣߒߡࠆޕ✢ലᨐߢߪޔࠥ࠻㉄ൻ⤑ਛߦᱜ㔚⩄߇
↢ᚑߐࠇࠆߚޔᄌൻะߪ “0”Ј“1”ߣߥࠆޕㅒߪߥޕ
㊀☸ሶ⹏ଔߦ߅ߌࠆోߡߩࠪࡦࠣ࡞ࡆ࠶࠻ࠛߪ“0”Ј“1”ߢࠆޕTID⹏ଔߦ߅ߌࠆࠪ
ࡦࠣ࡞ࡆ࠶࠻ࠛߩะ߽ޔ㜞࠼࠭࠻ߦ߅ߡߪ “0”Ј“1”߇ᡰ㈩⊛ߢࠆޕૐ࠼
࠭࠻ߦ߅ߡߪޔ⚥Ⓧᾖߩㅜਛߢޔᤨ᛬ㅒߩะ߇ࠄࠇࠆ߇ޔᰴߩ⚥Ⓧᾖࠬ࠹࠶
ࡊߢߪߎߩㅒะߪᶖ߃ࠆޕ
ਥߥ⽎ߢࠆࠪࡦࠣ࡞ࡆ࠶࠻ࠬ࠲࠹ࠖ࠶ࠢࠛ࿑ 3.2.11-2ߪޔࠛ⸓ᱜࠍⴕߥ ߁ߎߣߦࠃࠅޔ߶ߣࠎߤࠍ㒰ᄖߔࠆߎߣ߇น⢻ߢࠆޕ
Dynamic Read/Erase/Writeࡕ࠼ߩࠛߪᣂߒࡔࠞ࠾࠭ࡓߢࠅޔዋߥߊߣ߽ޔએ ೨߆ࠄႎ๔ߐࠇߡࠆᾖᓟߩࡉࡠ࠶ࠢbyࡉࡠ࠶ࠢߩ࠼ߦࠃࠆࡄ࠲ࡦᲧセߢⷰኤߐ ࠇޔߘߩᓟߩᶖ/ౣᦠㄟߺߢ⽎߇ᶖ߃ߡߒ߹߁⽎ߢߪߥޕ
ߎ ߩ ⚿ ᨐ ߪ ޔ ⺒ ߺ ߒ ߣ ᶖ ࠬ
࠹࠶ࡊߪᱜᏱߦⴕߥ߁ߎߣ߇ߢ߈ࠆ
߽ߩߩޔౣᦠㄟߺࠬ࠹࠶ࡊࠍቢోߦ ⴕ ߥ ߁ ߎ ߣ ߇ ߢ ߈ ߕ ߦ ޔ 㜞 ࠼ ࠭
࠻ߩᾖߦ߅ߡߪᢙ⊖ਁࡆ࠶
࠻ߩࠛࠞ࠙ࡦ࠻ࠍ␜ߔ߽ߩߢ
ࠆޕ࿑ 3.2.11-1ߦ␜ߔㅢࠅߢࠆޕ
ߎߩࠛߪޔࠨࠗࠢ࡞࠲ࠗࡓࠍ×2
ޔ×4 ޔ߅ࠃ߮×8 ߦߒߡ߽ࠛ
ࠞ࠙ࡦ࠻ߦലᨐ߇ߥߎߣ߆ࠄ
ⷰߡޔࠨࠗࠢ࡞࠲ࠗࡓଐሽᕈࠍᜬߞ ߡߥޕ߽ߒޔห᭽ߩࠦࡑࡦ࠼߇ ࡑ࠾ࡘࠕ࡞ߢⴕߥࠊࠇޔోࡔࡕ߇
࠼ߐࠇޔߘߩᓟޔᶖߐࠇ/ౣᦠ ㄟߺߐࠇߡ߽ޔࡉࡠ࠶ࠢbyࡉࡠ࠶ࠢ
ߢⴕߥࠊࠇࠆ႐วޔࠛߪⷰኤߐࠇߥޕ
ߎߩ2ࠨࡦࡊ࡞ߣ⹜㛎⚿ᨐߩࠦࡇࠍࡔࠞߢࠆMicrom␠ߩຠ⾰⸽ࠣ࡞ࡊߦᜬߜ ㄟߺ࠴ࠚ࠶ࠢߒߡ߽ࠄߞߚߣߎࠈޔߊߟ߆ߩࠤࠬߦ߅ߡޔᶖߩߚߦࡉࡠ࠶ࠢ߇ㆬ
࿑ 3.2.11-7 ✢ߦࠃࠆ࠳ࡔ㧙ࠫߩࡔࠞ࠾࠭ࡓ (a)㉄ൻ⤑ਛߢߩᱜ㔚⩄ߩ⊒↢
(b)ࠗࠝࡦߩ㘧⒟ߦᴪߞߚ㉄ൻ⤑࠳ࡔ㧙ࠫޔ㉄ൻ⤑
ਛߦዉ߆ࠇࠆዉ㔚ࡄࠬ
߫ࠇߚ႐วޔㄭធߒߚ Word line ߽ㆬ߫ࠇߡࠆߎߣ߇್ߒߚޕ࿑ 3.2.11-6ߩࡆ࠶࠻ࠛ
ࡑ࠶ࡊߪޔߎߩ⸃ߣ৻⥌ߒޔࠛߪࡦ࠳ࡓߢߪߥߊRowࠕ࠼ࠬߦ㓸ਛߒߡ
ࠆޕߘߩᤨޔㄭធߒߚࡉࡠ࠶߽ࠢㇱಽ⊛ߦᶖߐࠇࠆߚߦࠛߣߒߡⷰኤߐࠇࠆߩߢ
ࠆޕߎߩWord lineߩࠞ࠶ࡊࡦࠣߪోߡߩࡉࡠ࠶ࠢߢⷰኤߐࠇࠆࠊߌߢߪߥ߇ޔޔᾖ
೨ߦ߽ⷰኤߐࠇߥ߇ޔߎߩㇱຠߩቝቮࠪࠬ࠹ࡓߢߩ↪ࠍ⚂ߔࠆߎߣߦߥࠆޕ
⑳㆐ߪޔઁߩ90nm NANDࡈ࠶ࠪࡘࡔࡕߦߟߡ߽TID⹏ଔࠍታᣉߒߚ߇ޔߎߜࠄ ߪޔߎߩ᭽ߥ࠳ࠗ࠽ࡒ࠶ࠢࠛࡕ࠼ߪ␜ߐߥ߆ߞߚޕߎߩࡐ࠻ߪᓟߦႎ๔ߔࠆޕ
✢ലᨐߩߥ⁁ᴫߦ߅ߡ߽ޔㄭធ࡞ߩ⊒߆ߊੂߪNANDࡈ࠶ࠪࡘࡔࡕߩ
ା㗬ᕈߦߣߞߡ㊀ⷐߥ⽎ߢࠆޕ߃߫ޔ߽ߒ࡞߇ᦠㄟߺߩߚߦㆬ߫ࠇߚ႐วޔWord lineߣBit lineߩਔᣇ߇ㆬ߫ࠇࠆ߇ޔNANDߩㅪ⛯࿁〝᭴ᚑ߆ࠄઁߩ࡞߇Word line߹
ߚߪBit lineߩߕࠇ߆߇ޔ㧔ඨಽ㧕ㆬ߫ࠇߚ⁁ᘒߦࠆߚߢࠆޕߎߩ㧔ඨಽ㧕ㆬ߫ࠇ
ߚ⁁ᘒߦ߅ߌࠆ⊒߆ߊੂ⠴ᕈߪޔㅧࡔࠞߦߣߞߡ㊀ⷐߥ㐿⊒⸳⸘ⷐ⚛ߢࠆޕ㧔ߎߩ
࠻ࡇ࠶ࠢࠬߪޔ[4],[21]ࠍෳᾖ㧕㩷
ߒ߆ߒޔᚒޘߩ⹜㛎ߢߪޔ࠳ࠗ࠽ࡒ࠶ࠢࠛߪޔࡂࡈ࡚ࠢࠪࡦ࡞ߩ߆ߊੂߦ ࠃࠆ߽ߩߢߪߥޕ㩷
㩷
(b) 䉲䊮䉫䊦䉟䊔䊮䊃⹏ଔ㩷
࿑ 3.2.11-2㨪࿑ 3.2.11-5ߩSEE⹏ଔ⚿ᨐߢߪޔࠛࡔࠞ࠾࠭ࡓߣߘߩࠢࡠ࡚ࠬࠢࠪ
ࡦߦߟߡႎ๔ߒߚ߇ޔߎࠇࠄߩࠛߩᕈ⾰ߪᣢߦႎ๔ߐࠇߡࠆ߽ߩߣ㘃ૃߢࠆޕ
߃߫ޔࡔࠞ࠾࠭ࡓߪޔ[16]ߢႎ๔ߐࠇߚฎ࠹ࠢࡁࡠࠫߩ߽ߩߣหߓߢࠆޕૉߒޔࠢࡠ
࡚ࠬࠢࠪࡦߪޔ2 ᩴએዊߐޕߎࠇߪቝቮࠪࠬ࠹ࡓߢߩ↪ߢߪ㝯ജ⊛ߢࠆޕ࿑
3.2.11-2ࠍࡢࠗࡉ࡞㑐ᢙߢࡈࠖ࠶࠹ࠖࡦࠣߒޔ㧔LETth㧩12ޔwidth LET㧩68ޔexponent㧩3 and saturation at 5E-13cm2/bit㧕ޔߎߩࡄࡔ࠲୯ߣAdams Ten Percent Worst Case EnvironmentߦኻߔࠆCREME96[22]ߦࠃࠆ⸘▚⚿ᨐߪޔ1.5E-16 Errors/bit-dayߢࠅޔ
࠴࠶ࡊ(2Gbit)ߚࠅ 9000ᐕߦ 1 ࿁⒟ᐲߣߥࠅޔᄙߊߩቝቮࠪࠬ࠹ࡓߣߞߡචಽዊߐ㗫 ᐲߢࠆޕ
㊀☸ሶࠗࠝࡦ⹏ଔߦ߅ߡޔᦨ߽ᮡḰ⊛ࠛࡕ࠼ߪޔࠗࠝࡦ߇ࡈࡠ࠹ࠖࡦࠣࠥ࠻
ࠍ⽾ㅢߔࠆ㓙ߩࠪࡦࠣ࡞ࡆ࠶࠻ࠛ ߩ“0”Ј“1”ォߢࠆޕ
ࠥ࠻㉄ൻ⤑ਛߦ࠻࠶ࡊߐࠇߚᱜ㔚⩄߇ޔࡈࡠ࠹ࠖࡦࠣࠥ࠻ਛߩ⽶㔚⩄ࠍ⋧Ვߔࠆ
⁁ᴫߪޔ࿑ 3.2.11-7(a)ߦන⚐ൻߒߡ␜ߒߚㅢࠅߢࠆ߇ޔታ㓙ߪ߽ߞߣⶄ㔀ߢࠅޔᣢߦႎ ๔ߐࠇߚ[23]㨪[25]ߩㅢࠅߢࠆޕ
ࠗࠝࡦࠬ࠻ࠗࠢߦࠃࠆ㉄ൻ⤑ߩ࠳ࡔ㧙ࠫޔૐᛶ᛫ߩࠢࡄࠬߩ⊒↢ߪޔ࿑ 3.2.11-7(b) ߦ࿑⸃ߒߚㅢࠅߢࠅޔᣢߦ[24],[25]ߢႎ๔ߐࠇߡࠆޕૉߒޔ࿁ߩ⹏ଔߦࡈࠜࠞࠬߐ ࠇߡߪߥޕ㩷
㩷
(6) ⚿䈶㩷
Micron Semiconductor␠ߩᦨᣂ ᳃↢ߩ 2Gbit NAND ࡈ࠶ࠪࡘࡔࡕߦኻߒTIDߣ SEEࠍ⹏ଔߒߚޕ
⚿ᨐߪޔ࠻࠲࡞࠼࠭⠴ᕈ߇㜞ߊߥߞߡࠆߎߣޔ߅ࠃ߮ޔ৻⥸⊛SEEߩࠢࡠ࡚ࠬࠢࠪ
ࡦ߇2ᩴએዊߐߊߥߞߡࠆὐ߇ޔᣥࡈ࠶ࠪࡘߩ࠹ࠢࡁࡠࠫຠߢᣢߦႎ๔ߐࠇߡࠆ
߽ߩߦᲧߴ⦟ߊߥߞߡߚޕ
㧔SEEߩ⊒↢㗫ᐲߪ㧕࠳ࠗ࠽ࡒ࠶ࠢࠛࡕ࠼ࠍޔቝቮࠪࠬ࠹ࡓ߳ߩ↪ࠍ⠨߃ ࠆߦଐὼᦸߢࠆޕ
3.2.12 ✢ᾖ䈮䉋䉎FG䊜䊝䊥․ᕈᄌൻ
ᢥ₂ฬ Variability in FG Memories Performance After Irradiation
ౖ IEEE Transaction on Nuclear Science, Vol.53, No. 6, pp. 3349- 3355, Dec. 2006.
⪺⠪ฬ Giorgio Cellere, A. Paccagnella, Angelo Visconti, and Mauro Bonanomi ኻ⽎䊂䊋䉟䉴 FG䊜䊝䊥
ታ㛎⸳ 15MeV 䉺䊮䊂䊛ടㅦེ䋨Laboratori Nazionali di Legnaro, INFN, Italy䋩
ᾖ✢⒳䈶 䉣䊈䊦䉩䊷䈱ಽ
273MeV-Au, 286MeV-I න⊒⽎䈲
Ⓧ▚✢㊂ലᨐ䈱ಽ
න⊒⽎䋨RILC䋩 ታ㛎䈲ℂ⺰䈱ಽ ታ㛎
(1) ⷐ㩷
Floating Gate (FG)ᒻਇើ⊒ᕈ䊜䊝䊥䈮㊀䉟䉥䊮䈏ᾖ䈘䉏䉎䈫䋬FGਛ䈱㔚⩄䈏㔚䈚䇮䉁䈢䊃 䊮䊈䊦㉄ൻ⤑ਛ䈪ᰳ㒱䈏⊒↢䈜䉎䇯䈖䉏䉌䈱ᰳ㒱䈮䉋䉎䊃䊤䉾䊒䉕䈚䈢䊃䊮䊈䊦䊌䉴䈏ᒻᚑ䈘䉏䇮 FGౝ䈱㔚⩄㔚䈏䈐䉎䋨RILC: Radiation Induced Leakage Current䋩䇯ᧄ⺰ᢥ䈪䈲䊜䊝䊥
ᜬ․ᕈ䈍䉋䈶䉴䊃䊧䉴ශടታ㛎䉋䉍䇮RILC 䈏 SILC 䈫ห᭽䈭ਇⷙೣᕈ䉕ᜬ䈧䈖䈫䉕␜䈜䇯䈖䈱ਇⷙ
ೣᕈ䈲ᰳ㒱Ḱ䈱㔚ሶභ⁁ᘒ䈱ᄌൻ䈮䉋䉎䉅䈱䈪䈅䉎䇯
(2) ᐨ⺰㩷
䉲䊥䉮䊮㉄ൻ⤑䈮✢䈏ᾖ䈘䉏䉎䈫㔚ሶ-ᱜሹኻ䈏⊒↢䈜䉎[1]䋨⊒↢䉣䊈䊦䉩䊷䋺17eV [2]䋩䇯
⊒↢䈚䈢䉨䊞䊥䉝䈲ඨᓘ4nm⒟ᐲ䈱㗔ၞ䈮䉧䉡䉴ಽᏓ䈚䇮columnar recombination model䈮ᓥ 䈇ౣ⚿ว䈜䉎䋨㔚⇇䈏ᒙ䈇႐ว䋬LET 䈏ᄢ䈐䈇ᤨ䈮⏕₸ᄢ䋩[3,4]䇯䉁䈢 E’ਛᔃ䇮⇇㕙Ḱ䇮ਛᕈ䊃 䊤䉾䊒䈭䈬䈏⊒↢䈜䉎[5-8]䇯⤑ෘ4nmએਅ䈱ᭂ⭯㉄ൻ⤑䈪䈲䇮⤑ਛ䈱䊃䊤䉾䊒䉕䈚䈢વዉᯏ᭴䈮 䉋䉍RILC䈏⊒↢䈜䉎䇯ේℂ⊛䈮䈲⤑ෘ10nmએ䈱㉄ൻ⤑䈪䉅䈎䈭䊥䊷䉪㔚ᵹჇട䈏↢䈛䉎䉅 䈱䈫⠨䈋䉌䉏䉎䈏䇮㉄ൻ⤑ෘჇᄢ䈮䈇䊃䊮䊈䊦⏕₸䈏ᕆỗ䈮ᷫዋ䈜䉎䈢䉄䇮RILC 䈱᷹ⷰ䈲㕖Ᏹ 䈮࿎㔍䈪䈅䉎䇯䉋䈦䈩䇮ᄢ㕙Ⓧ䈱᭴ㅧ䉕↪䈇䈩᷹ቯ䈏ⴕ䉒䉏䉎[12]䇯৻ᣇ䇮࿑ 3.2.12-1䈮␜䈚䈢 FG䊜䊝䊥䊂䊋䉟䉴䈲䇮RILC䈮ኻ䈚䈩ᗵฃᕈ䈏㜞
䈇[13]䇯䈱FG䊜䊝䊥䈪䈲ᢙජ⒟ᐲ䈱㔚ሶ ᵈ䈮䉋䉍⸥ᙘ䈏ⴕ䉒䉏䉎䈢䉄䇮䊃䊮䊈䊦㉄ൻ⤑
䈱䊥䊷䉪㔚ᵹᄌൻ䈮ኻ䈚䈩㕖Ᏹ䈮ᢅᗵ䈪䈅䉎䇯
䈎䈭䊥䊷䉪㔚ᵹ䈪䉅䇮㐳ᤨ㑆䈱ᜬ․ᕈ䈱ᄌൻ䈮 䉋䉍ᬌ⍮น⢻䈪䈅䉎[14,15]䇯䈠䈖䈪ᧄ⎇ⓥ䈪䈲䇮 ᦨᣂFG䊜䊝䊥䊂䊋䉟䉴䈱RILC䈮䉋䉎․ᕈᄌൻ
࿑ 3.2.12-1 ৻⥸⊛䈭 FG 䊜䊝䊥䉶䊦䈱ᢿ 㕙࿑
䈮䈧䈇䈩ᬌ⸛䉕ⴕ䈦䈢䇯
(3) ታ㛎ᣇᴺ䈍䉋䈶䊂䊋䉟䉴㩷
ᦨᣂ䈱4Mbit䊁䉴䊃䊂䊋䉟䉴䉕↪䈇䈩ታ㛎䉕ⴕ䈦䈢䇯
䊂䊋䉟䉴䈲8䉶䉪䉺䊷䈮ಽഀ䈘䉏䈢䊃䊮䊈䊦㉄ൻ⤑ෘ䋺
⚂10nm䈱NORᒻFG䉝䊧䉟䈪䈅䉍䇮W/E䉰䉟䉪䊦 10 ਁ࿁એ䇮ᜬᤨ㑆 10 ᐕએ䈏⸽䈘䉏䈩䈍䉍
䋨ᦨᄢ512MB䋩䇮㕖Ᏹ䈮䊥䊷䉪㔚ᵹ䈏ዊ䈘䈇䉶䊦䈫䈭䈦
䈩䈇䉎䇯䉁䈢䇮․ᱶ䈭᷹ቯⵝ⟎䈍䉋䈶Direct Memory Access (DMA)䉝䊦䉯䊥䉵䊛䉕↪䈜䉎䈖䈫䈮䉋䉍䇮ฦ 䉶䊦䈱VTH᷹ቯ䈏น⢻䈪䈅䉎䇯䉁䈢䇮ജ1䋨ૐVTH: FG䈮䊖䊷䊦⫾Ⓧ䋩䈫ജ0䋨㜞VTH: FG䈮㔚ሶ⫾Ⓧ䋩 䈱ਛ㑆䈱⁁ᘒ䈮䊒䊨䉫䊤䊛䈜䉎䈖䈫䉅น⢻䈪䈅䉎䇯
Laboratori Nazionali di Legnaro (INFN:
䉟䉺䊥䉝)䈱 15MeV 䉺䊮䊂䊛ടㅦེ䉕↪䈇䈩䇮Au (273MeV, SiO2㕙䈪䈱LET=85MeVcm2/mg) 䈍䉋䈶I (286MeV, LET=65MeVcm2/mg)䈱䉟䉥 䊮ᾖ䉕ⴕ䈦䈢䇯䈭䈍䇮䊌䉾䉲䊔䊷䉲䊢䊮ጀ䈮䈍䈔 䉎䉣䊈䊦䉩䊷䊨䉴䉕⠨ᘦ䈜䉎䈫䇮䊃䊮䊈䊦㉄ൻ⤑䈮 䈍䈔䉎ਔ⠪䈱LET䈲䇮䈾䈿ห䈛䈮䈭䉎䇯
(4) RILC䈱㉄ൻ⤑㔚⇇(Eox)ଐሽᕈ
㜞 LET䉟䉥䊮ᾖ䈪䈲䇮ᾖ䈮䉋䉎 VTHᄌൻ 䈏 ᄢ 䈐 䈇 䈢 䉄 䈮 䇮 ⵍ ᾖ 䉶 䊦 䉕 ․ ቯ น ⢻ 䈪 䈅 䉎 [14],[17]-[19]䇯Au ᾖᓟ䇮ౣᦠㄟ䉂䉕ⴕ䈦䈢䇯䋨10
ਁ࿁⒟ᐲએਅ䈱ᦠㄟ䉂䈲䇮䊃䊮䊈䊦㉄ൻ⤑䈮㊀ᄢ䈭 䉴䊃䊧䉴䈲ਈ䈋䈭䈇[13]䋩䇯166ᤨ㑆ᓟ䋨⚂ 1ㅳ㑆ᓟ䋩 䈮 VTH ᷹ቯ䉕ⴕ䈇䇮ⵍᾖ䉶䊦 䉕䈚䈢䇯࿑
3.2.12-2䈮䊂䊷䉺ᜬ⹜㛎䈮䉋䉎 VTH ᄌൻ(ƦVTH, retention) 䈫 䇮 ᾖ 䈮 䉋 䉎 VTH ᄌ ൻ (ƦVTH, irradation)䈫䈱㑐ଥ䉕␜䈜䇯䈖䈖䈪䇮䊒䊨䉾䊃䈱㆑䈇 䈲ᾖ೨䈱 VTH䉕␜䈚䈩䈍䉍䇮䈠䉏䈡䉏ห䈛 VTH䉕
ᜬ․ᕈ⹜㛎೨䈮ౣᦠ䈐ㄟ䉂䈚䈢䇯䈖䈱⚿ᨐ䉋䉍એ ਅ䈱ὐ䈏䉌䈎䈫䈭䈦䈢䇯
࿑ 3.2.12-2 166 ᤨ㑆䈱ᜬ⹜㛎ᓟ䈱 VTH䈫䋬Au䉟䉥䊮ᾖᓟ䈱VTH䈫䈱㑐ଥ
࿑ 3.2.12-3 Au䉟䉥䊮ᾖᓟ䇮166h ᜬ⹜㛎䉕➅䉍䈚䈢ᤨ䈱 VTHಽᏓᄌൻ䋮 ᾖ೨䈮ૐVTH䉕ᦠㄟ䉂䋨FG䈮ᱜሹ⫾
Ⓧ䋩
࿑ 3.2.12-4 Au 䉟䉥䊮ᾖᓟ䇮166h ᜬ⹜㛎䉕➅䉍䈚䈢ᤨ䈱 VTHಽᏓᄌൻ䇯 ᾖ೨䈮㜞 VTH䉕ᦠㄟ䉂䋨FG 䈮㔚ሶ⫾
Ⓧ䋩
1) 㕖Ᏹ䈮⍴䈇ᜬᤨ㑆䈮䉅䈎䈎䉒䉌䈝䇮ⵍᾖ䉶䊦䈱ᜬ⹜㛎䈮䉋䉎 VTHᄌൻ䈲䇮ᾖ䈮䉋䉎 VTHᄌൻ䈫ห᭽䈭ᄢ䈐䈘䈮䈭䈦䈩䈇䉎䇯
2) ᜬ⹜㛎䈮䉋䉎VTHᄌൻ䈲䇮ᦠ䈐ㄟ䉁䉏䈢VTH䈱 ୯䈮䈲ଐሽ䈚䈩䈇䈭䈇䇯
㉄ൻ⤑䈱ഠൻᯏ᭴䈮䈧䈇䈩䈲㩷 i)FG ⫾Ⓧ㔚⩄䈱
㔚㔚ᵹ㩷 ii)㔚ሶ䊶ᱜሹ䈱ౣ⚿ว㩷iii)ౣ⚿ว䉕ㅏ䉏 䈢ᱜሹ䈱⒖േ㩷 䈱3䈧䈱น⢻ᕈ䈏⠨䈋䉌䉏䉎䇯䈭䈍䇮 䈖䉏䉌䈱⽎䈲ᾖ⋥ᓟ䈮↢䈛䉎䇯ᾖᓟ10fs⒟ᐲ એ ౝ 䈮 䇮FG ⫾ Ⓧ 㔚 ⩄ 䈱 㔚 㔚 ᵹ 䈏 ⊒ ↢ 䈜 䉎 [18,19]䇯ᧄ㔚ᵹ䈲䇮㉄ൻ⤑㔚⇇䈏ዊ䈘䈇ᤨ䈮䈲ᵹ
䉏䈭䈇䈢䉄䇮㉄ൻ⤑ഠൻ䈱ਥⷐ࿃䈫䈲⠨䈋䈮䈒䈇䇯৻ᣇ䇮㉄ൻ⤑ਛ䈪䈱ᱜሹ⊒↢ᢙ䈲㔚⩄⊒↢₸
䈮ଐሽ䈜䉎䇯䈚䈎䈚䇮㜞LET䉟䉥䊮ᾖᤨ䈱㔚⩄⊒↢
₸ 䈲 䇮 㜞 㔚 ⇇ ਅ 䈪 䉅 1% એ ਅ 䈪 䈅 䉎 [3]䇯 LET=85MeVcm2/mg 䈱䉟䉥䊮ᾖᤨ䈱䇮䊃䊮䊈䊦㉄
ൻ⤑ਛ䈪䈱e-hኻ⊒↢ᢙ䈲10,000pair⒟ᐲ䈪䈅䉍䇮 100 એਅ䈱ᱜሹ䈚䈎⊒↢䈚䈭䈇䇯䉁䈢䈖䈱ᢙ䈲㔚⇇
ૐਅ䈫䈮ᷫዋ䋨2MV/cm 䈎䉌 0.1MV/cm 䈻䈱ᄌൻ 䈮䉋䉍⚂1ᩴᷫዋ[3]䋩䈚䇮㔚⇇䈏0䈱ᤨ䈲0䈫䈭䉎䇯䈜 䈭䉒䈤”1”⁁ᘒ䈪䈲ᱜሹ䈲䇮䈾䈿⊒↢䈚䈭䈇䇯䉋䈦䈩䇮 䈖䈱ᱜሹ䈏㉄ൻ⤑ഠൻ䈱ਥⷐ࿃䈫䉅⠨䈋䈮䈒䈇䇯৻ᣇ䇮
ౣ⚿ว䈱䉟䊔䊮䊃ᢙ䈲䊜䊝䊥⁁ᘒ䈏ᄌൻ䈚䈩䉅䈾䈫䉖䈬ᄌൻ䈞䈝䋨9,000ޯ10,000 ⒟ᐲ䋩䇮㉄ൻ⤑ഠ ൻ䈱ਥⷐ࿃䈲ౣ⚿ว䈠䈱䉅䈱䈪䈅䉎䈫⠨䈋䉎䈖䈫䈏䈪䈐䉎䇯䈖䉏䉁䈪ႎ๔䈪䈲䇮㉄ൻ⤑ഠൻ䈱ਥⷐ࿃
䈲᳓⚛䉟䉥䊮[20,22]䉇䊖䊷䊦[1,21,23]䈭䈬ᱜ㔚⩄䈱
⒖േ䈮䉋䉎䈫䈘䉏䈩䈇䉎䇯䉁䈢䇮䈖䉏䉌䈱⊒↢₸䈲㉄ൻ
⤑㔚⇇䈮ᄢ䈐䈒ଐሽ䈚䈭䈇䈫䈘䉏䈩䈍䉍ᚒ䇱䈱⺑䈫䈲
৻⥌䈚䈭䈇䇯䈖䉏䈲䇮ᧄታ㛎䈪↪䈇䈩䈇䉎䉋䈉䈭ᭂ⭯㉄
ൻ⤑ౝ䈱ౣ⚿ว䈲䇮ෘ䈇㉄ൻ⤑䈫䈲ᄢ䈐䈒⇣䈭䉎[24]䈖 䈫䇮䉁䈢䇮㊀䉟䉥䊮䈮䉋䉎㉄ൻ⤑ౝ䈪䈱㔚⩄⊒↢㊂䈱⹏
ଔ䈏ᱜ⏕䈮ⴕ䉒䉏䈩䈇䈭䈇䈖䈫䈭䈬䈮࿃䈚䈩䈇䉎䈫⠨
䈋䉌䉏䉎䇯ᢥ₂[3]䈪䈲䇮䉟䉥䊮ᣇะ䈫㔚⇇ᣇะ䈏
⋥䈚䈩䈇䉎⚿ᨐ䉕ၮ䈮⸘▚䉕ⴕ䈦䈩䈇䉎䈢䉄䇮㔚⩄
⊒↢₸䈱㔚⇇ଐሽᕈ䈲㕖Ᏹ䈮ዊ䈘䈇䈫⹏ଔ䈚䈩䈇䉎䈏䇮䈖䈱ᣇᴺ䈪䈲䇮ਔᣇะ䈏ᐔⴕ䈱႐ว䈱㔚
⇇ଐሽᕈ䉕⹏ଔ䈪䈐䈭䈇䇯䈖䈱䉋䈉䈭႐ว䇮వ䈮ㅀ䈼䈢䉋䈉䈮ᄢ䈐䈭㔚⇇ଐሽᕈ䈏੍ᗐ䈘䉏䇮ታ㛎⚿
ᨐ䈱⺑䈏࿎㔍䈮䈭䉎䇯
࿑ 3.2.12-5 ৻ㇱ䈱ⵍᾖFG䈱➅䉍䈚
ᜬ⹜㛎䈮䉋䉎VTHᄌൻ
࿑ 3.2.12-6 ৻ㇱ䈱ⵍᾖFG䈱➅䉍䈚
ᜬ⹜㛎䈮䉋䉎VTHᄌൻ䋨1࿁⋡⚳ੌᓟ䈱 ୯䈫䈱Ꮕ䋩
࿑ 3.2.12-7 ⽶䊋䉟䉝䉴䉴䊃䊧䉴ਅ䈱ᜬ
⹜㛎ਛ䈱VTHᄌൻ䋨ㅢᏱ䉶䊦䈫SILC䉕␜
䈚䈢䉶䊦䈫䈱Ყセ䋩
(5) RILC䈱ਇⷙೣ䈭ᝄ䉎⥰䈇㩷
ᜬታ㛎ᓟ䈮ౣᐲᦠㄟ䉂䉕ⴕ䈇䇮166ᤨ㑆ᓟ䈮ౣᐲVTH䉕᷹ቯ䈜䉎䇯䈫䈇䈉ታ㛎䉕3࿁➅䉍䈚 䈢䇯࿑ 3.2.12-3,࿑ 3.2.12-4䈮⚿ᨐ䉕␜䈜䇯࿑ 3.2.12-3䈮䈲ᾖ೨䈮㕖Ᏹ䈮ૐ䈇 VTH䋨FG 䈮ዋ
㊂䈱ᱜሹ⫾Ⓧ䋩䉕ᦠㄟ䉖䈣႐ว䇮࿑ 3.2.12-4䈮䈲㜞䈇VTH(Eox>3MV/cm)䈱႐ว䈱⚿ᨐ䉕␜䈜䇯 䈭䈍䇮䊁䊷䊦䈲ၮᧄ⊛䈮ᾖ䈮䉋䉎䉅䈱䈪䈅䉍䇮⋧ᒰ䈜䉎䉶䊦ᢙ䈲⚂ 230 䈣䈦䈢䇯ਔ⠪䈫䉅䇮➅䉍
䈚࿁ᢙଐሽᕈ䈲䉌䉏䈝䇮䈎䈧䇮䈾䈿ห䈛ಽᏓ䉕䈚䈩 䈇䉎䈖䈫䈎䉌䇮ᜬ⹜㛎ᓟ䈱VTHಽᏓ䈲ᾖ೨䈱⁁ᘒ 䈮ଐሽ䈚䈭䈇䈖䈫䈏䉒䈎䉎䇯ᧄታ㛎䈪䈲䇮106ions/cm2 䈫䈇䈉㕖Ᏹ䈮ૐ䈇䊐䊦䉣䊮䉴䈪ᾖ䉕ⴕ䈦䈩䈍䉍䇮ⵍᾖ
䉶䊦ᢙ䈲⚂ 350 䈪䈅䈦䈢䇯䈖䉏䈲ⵍᾖ䉶䊦䈱⚂
65%䈏䇮䈠䈱ᓟ1ㅳ㑆䈱ᜬ⹜㛎䈪䊥䊷䉨䊷䈮䈭䈦䈢
䈖䈫䉕␜䈚䈩䈇䉎䇯䉁䈢䈇䈒䈧䈎䈱䉶䊦䈲䇮VTH䈏⚂4V
⒟ᐲ䋨FG䈮㔚⩄䈏䈭䈇⁁ᘒ䈪䈱VTH䈫ห᭽䋩䈮䈭䈦䈩 䈍䉍䇮ᕆㅦ䈮㔚⩄䈏㔚䈚䈩䈇䉎䈖䈫䉕␜䈚䈩䈇䉎䇯એ
䈱䉋䈉䈮䇮䊂䊋䉟䉴ో䈫䈚䈩䈲䊂䊷䉺ᜬ⹜㛎࿁
ᢙ䈮䉋䉎 VTHಽᏓ䈱ᄌൻ䈲⏕䈪䈐䈭䈎䈦䈢䇯䈠䈖䈪䇮ฦ䉶䊦 VTHᄌൻ䈮䈧䈇䈩⹏ଔ䉕ⴕ䈦䈢䇯࿑
3.2.12-5䈮䈇䈒䈧䈎䈱ⵍᾖ䉶䊦䈮䈍䈔䉎⚿ᨐ䉕␜䈜䇯⚿ᨐ䉋䉍䇮⚛ሶᲤ䈮䈳䉌䈳䉌䈭േ䉕␜䈜 䈖䈫䈏䉒䈎䈦䈢䇯࿑ 3.2.12-6䈮䈲1࿁⋡䈱ᜬ⹜㛎⚳ੌᓟ䈱VTH䈮ኻ䈜䉎䇮2,3࿁⋡䈱Ꮕ䉕␜䈜䇯 䈖䈱ਇⷙೣ䈭ᝄ䉎⥰䈇䈲SILC䈫ห᭽䈪䈅䉎䇯SILC䈱႐ว䇮ᰳ㒱䈲䊃䊮䊈䊦㉄ൻ⤑ౝ䈪䊤䊮䉻䊛䈮
⊒↢䈚䇮ⶄᢙᰳ㒱䈏ਗ䉖䈣ᤨ䈮䈲䊌䊷䉮䊧䊷䉲䊢 䊮䊌䉴䈫䈭䉍䇮FGౝ㔚⩄䈱㔚䈏↢䈛䉎[26,27]䇯 䊌䉴䈱ዉ㔚₸䈲ᰳ㒱䈱㔚ሶභ⁁ᘒ䈮ኻ䈚䈩㕖 Ᏹ䈮ᢅᗵ䈪䈅䉎䇯࿑ 3.2.12-7䈮ᜬᤨ㑆䈮ኻ䈜 䉎 VTH 䈱 ᄌ ൻ 䉕 ␜ 䈜 䇯”typical”䈲 ㅢ Ᏹ 䉶 䊦䇮”SILC”䈲⽶䈱䉭䊷䊃䉴䊃䊧䉴ශടᓟ䈱䉶䊦䈱
⚿ᨐ䈪䈅䉍䇮䂾䈱䉶䊦䈪䈲ᕆㅦ䈮㔚䈚䈩䈇䉎䇯
৻ᣇ䃂䈪䈲䇮৻ᐲ㔚㔚ᵹ䈏ዊ䈘䈒䈭䉍䇮䈠䈱ᓟ 5×105s ⒟ᐲ䈪䊃䊤䉾䊒䈱㔚ሶභ⁁ᘒ䈏ᄌൻ䈚䇮
ౣ䈶ᕆㅦ䈮㔚䈏ⴕ䉒䉏䈩䈇䉎䇯
I 䉟䉥䊮ᾖᓟ䈮䉋䉍䇮4nm ⒟ᐲ䈱䉧䉡䉲䉝䊮
ඨᓘౝ䈮12⒟ᐲ䈱ᰳ㒱䈏ᒻᚑ䈘䉏䉎[16]䋨࿑ 3.2.12-8䋩䇯ᰳ㒱䈏㕖Ᏹ䈮⚦䈇╴ౝ䈪䈱䉂⊒↢
䈚䈩䈇䉎䈖䈫䈎䉌䇮2, 3䈱ᰳ㒱䈮䉋䈦䈩䉅䊌䊷䉮䊧䊷䉲䊢䊮䊌䉴䈏ᒻᚑ䈘䉏䇮ᄢ䈐䈭㔚ᵹ䈏ㅢㆊ䈪䈐 䉎䈫⠨䈋䉌䉏䉎䇯
࿑ 3.2.12-9 I䉟䉥䊮ⵍᾖ䉶䊦䈱䋬䉭䊷䊃䉴䊃 䊧䉴ශടᤨ㑆䈮ኻ䈜䉎 VTH ಽᏓᄌൻ䋨1, 3, 10, 30, 100, 300, 1000, 3000, 10000s䋩䋮
࿑ 3.2.12-8 ᰳ㒱䈱㔚ሶභ⁁ᘒᄌൻ 䈮䉋䉎䊌䊷䉮䊧䊷䉲䊢䊮䊌䉴䈱ዉ㔚₸ᄌ ൻ䋨ਇⷙೣᕈ䈱ේ࿃䈱⺑䋩
(6) ᜬ․ᕈ䈱ടㅦ⹜㛎䋨䉭䊷䊃䉴䊃䊧䉴䋩㩷
䉋䉍ᄙ䈒䈱䊂䊷䉺㓸䈱䈢䉄䈮䈲䇮➅䈚࿁ᢙ䈱 Ⴧട䈏ᔅⷐ䈫䈭䉎䇯᷹ቯᤨ㑆⍴❗䈱䈢䉄䈮એਅ䈱 ታ㛎䉕ⴕ䈦䈢䇯ᦨೋ䈮108ions/cm2䈱I䉟䉥䊮ᾖ
䈮䉋䉍䇮ᄙ䈒䈱FG⚛ሶ䈮RILC䉕⺃䈘䈞䈢䇯ᰴ䈮䇮 VCG=-3V 䈫䈚䈩 FG 㔚⩄㔚䉕ടㅦ䈘䈞䈢⁁ᘒ䈪
ᜬ ⹜ 㛎 䉕 ⴕ 䈦 䈢 䋨 ࿑ 3.2.12-9䋩 䇯 ⚿ ᨐ 䉋 䉍 䇮 10,000s 䈫䈇䈉⍴ᤨ㑆䈪䈇䈒䈧䈎䈱䉶䊦䈪 ƦVTH䈲 2V⒟ᐲ䈫䈭䉍䇮⍴ᤨ㑆ౝ䈪➅䈚࿁ᢙ䉕Ⴧᄢ䈪䈐䉎䇯
࿑ 3.2.12-10䈮ടㅦᜬ⹜㛎࿁ᢙ䈮䉋䉎 VTH䈱ᄌ ൻ䉕␜䈜䇯࿑ 3.2.12-10(a)䈲ᦠㄟ䉂⋥ᓟ䈱VTH䈪 䈅䉍䇮ታ㛎࿁ᢙ䈮䉋䉍ᄌൻ䈚䈭䈇䈖䈫䈏䉒䈎䉎䇯৻ᣇ䇮
࿑ 3.2.12-10(b)䈲 10,000s ⚻ㆊᓟ䈱 VTH䈪䈅䉍䇮
䉶䊦Ფ䈮⇣䈭䉎⚿ᨐ䈫䈭䈦䈢䇯䈖䈱⚿ᨐ䈲䇮ᰴ䈱ᜬ⹜㛎䈮䈍䈔䉎䊌䊷䉮䊧䊷䉲䊢䊮䊌䉴䈱ዉ㔚₸
ᄌൻ䈏੍ᗐ࿎㔍䈪䈅䉎䈖䈫䉕␜䈚䈩䈇䉎䇯৻⥸⊛䈮䇮 䊌䉴䈱ዉ㔚₸ᄌൻ䈲䊗䊷䉻䊷䊃䊤䉾䊒䈱㔚ሶභ
⁁ᘒᄌൻ䈮䉋䉎[28,29]䈫⠨䈋䉌䉏䉎䇯䊗䊷䉻䊷䊃䊤䉾 䊒䈱ᤨቯᢙ䈲 1㱘sޯ1s એ䈫ᐢ䈒ಽᏓ[30]䈚䈩䈇 䉎䈢䉄䈮䇮ዉ㔚₸ᄌൻ䈱੍᷹䈏࿎㔍䈪䈅䉎䈫⠨䈋䉌 䉏䉎䇯
࿑ 3.2.12-11(a)䈮䇮ᜬ⹜㛎䈱➅䈚䈮䉋䉍
ᜬ․ᕈ䈏ᄢ䈐䈒ᄌൻ䈚䈢䉶䊦䈮䈍䈔䉎ᜬ⹜㛎ਛ 䈱VTHᄌൻ䋨➅䉍䈚࿁ᢙଐሽᕈ䋩䉕␜䈜䇯䉁䈢䇮ᧄ
⚿ᨐ䈎䉌䊃䊮䊈䊦㉄ൻ⤑䈱 Ig-Eox ․ᕈ䉕⸘▚䈚䈢
⚿ ᨐ 䉕 ࿑ 3.2.12-11(b)䈮 ␜ 䈜 䇯 ⚿ ᨐ 䉋 䉍 䇮 VTH-time ․ᕈ䈏➅䉍䈚࿁ᢙ䈮䉋䉍ಽᢔ䈚䈩䈍䉍䇮 䈖䈱ಽᢔ䈲䉭䊷䊃䊥䊷䉪․ᕈ䈱ᄌൻ䋨䊌䊷䉮䊧䊷䉲䊢 䊮䊌䉴䈱ዉ㔚₸ᄌൻ䋩䈮࿃䈜䉎䈖䈫䈏䉒䈎䈦䈢䇯
ᦨᓟ䈮䇮ടㅦᜬ⹜㛎⚳ੌᓟ䈮䈍䈔䉎 VTH䈱➅
䈚࿁ᢙჇട䈮䉋䉎ᄌൻ㊂䈮䈧䈇䈩ᬌ⸛䈚䈢䇯 'VTH VTHrun(,10000si) VTHrun(i1),10000s
࿑ 3.2.12-12䈮ో᷹ቯ⹜ᢱ䈮䈍䈔䉎 ƦVTH㗫ᐲಽᨆ⚿ᨐ䉕␜䈜䇯䉁䈢ᧄ⏕₸ಽᏓ䈲䇮䉸䊐䊃䊑
䊧䊷䉪䉻䉡䊮䈮䉋䉎㔚ᵹᄌൻ䈮ኻ䈜䉎⎇ⓥ䈭䈬䈪↪䈇䉌䉏䈩䈇䉎LévyಽᏓ[32]䋨ቯಽᏓ䋩䈮䉋䉍䇮
࿑ 3.2.12-11 ᜬ⹜㛎ਛ䈮 VTH䈏ᄢ䈐䈒ᄌ ൻ䈚䈢䉶䊦䈱䇮ᜬᤨ㑆䈮ኻ䈜䉎 VTHᄌൻ (a)䈍䉋䈶Ig-Eox ․ᕈ(b)䈱➅䈚࿁ᢙଐሽ ᕈ
࿑ 3.2.12-10 ห৻䉶䊦䈮䈍䈔䉎ᜬ⹜
㛎࿁ᢙჇട䈮䉋䉎 VTHᄌൻ䇯(a)ᦠㄟ䉂⋥
ᓟ (b)10,000sᜬ⹜㛎⋥ᓟ