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Study of Wear Behavior of Nitrogenated Diamond-like Carbon (DLC) Films through Friction Energy Analysis

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(1)

(DLC)

Study of Wear Behavior of Nitrogenated Diamond-like Carbon (DLC) Films through

Friction Energy Analysis

Shuji YAMAMOTO

(2)

1

3 %

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D L C

D L C D L C

(D i a m o n d - l i k e c a r b o n , D L C )

( s p3) ( s p2)

D L C

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D L C

C V D D L C D L C

( S U J 2 , S U S 4 4 0 C )

(H o l m - A r c h a r d ) -

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D L C D L C

1 1 2

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1

D L C

D L C

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D L C

( C6H6) D L C D L C

D L C E P M A D L C

X P S

D L C A F M

D L C s p3/ s p2 D L C

3

H o l m - A r c h a r d

H o l m - A r c h a r d

4

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S U J 2

S U S 4 4 0 C D L C

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S U J 2 S U S 4 4 0 C

S U J 2 S U S 4 4 0 C

S U J 2 2 0 %

S U S 4 4 0 C S U J 2

H o l m - A r c h a r d

D L C H o l m - A r c h a r d

6 D L C D L C

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D L C D L C

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(5)

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2015 3

[ ]

1. E valu atio n o f th e t em p er at ur e d is tr ibut io n in s tee l ba lls in d uc e d by f r ic tio n e ne r gy gen e r ate d d ur i ng t r ibot es t again s t d iam ond - lik e c ar bon c o at in gs

Sh uj i Yamamo to , Takah ir o O k uak i, M its ur u Eg as hir a, Ch it os h i M as u d a

Tr ibo lo gy M ate r i als , S ur f ac e & In te r f ac e , Vo l.9, ( 2015) , p p .3 3- 40

2. E valu at io n of w ear e ne r g y c o ns u mp tion of n it ro ge n ate d d iamo nd - lik e c ar bon a gain s t alum in a

Sh u ji Yamam ot o , M its ur u E gas h ir a, Kats u yo s hi Ko nd o h, Ch it os h i M as u d a,

Tr ibo lo gy le tt er s , Vol. 55, ( 2014) , p p . 279 - 288

3. Tr i b ol og ic a l b e ha v i or of D L Cs p r od u c ed b y rf P C VD b a s ed o n en er g e ti c e v a l ua t io n

Sh uj i Yamamo to , A ts u o Kaw ana, Chit o s hi M as u d a

Su r f ac e & C oat in g s Tec h no lo gy, Vo l. 236, ( 2013) , p p .4 57 - 464 4.Tr ibo lo g ic al be h avio r of s t ain les s s te el with r es p e c t to t h at of

DLC in t e rm s o f e n er get ic as p ec ts

Sh u ji Yamam ot o , A ts uo Kaw an a, Ch it os h i M as u d a Tr ibo lo gy M ate r i als , Su rf ac e & In te r f ac e

Vo l.7, ( 20 13) , p p . 161- 167

5.Re lat io ns hip be tw ee n t r ibo logic a l p r o pe r tie s an d s p3/s p2 s tr u c tu r e o f n it r oge n ate d d iam on d - lik e c ar bon d e p os ited by p las ma C VD

Sh uj i Yamam ot o , At s uo Kaw an a, H ir os h i Ic him ur a, Chit o s hi M as ud a ,

Su r f ac e & Co at in gs Te c hn ol og y, Vo l. 210 , ( 2012) , p p . 1- 9

6. CV D DLC

, ( 201 2), p p .35 - 40

(6)

.2

[ ]

7. Ef f e c t o f s ubs tr ate bias v olt age on th e p r op e r ti es o f ar c io n - p late d Ti N f ilms o nt o h igh s p e ed s te e ls

Sh uj i Yamamo to , H ir os h i Ic him ur a

J.M at er. Re s ., Vol. 11, ( 1996 ) , p p . 11 49- 1156

8. E f f ec t s o f in tr ins ic p r op e r t ie s of TiN c oat in gs on ac ou s tic em is s ion be ha vio r at s c r atc h te s t

Sh uj i Yamamo to , H ir os h i Ic him ur a

J.M at er, Re s ., Vol. 7, ( 1992 ) , p p .2240 - 2247

9. A to mic s Fea tu r es of t he In te r ac tio n be tw ee n a Sc r e w Dis lo c atio n and S elf - int er s t it ial A t om s in M od e l Ir o n and Van ad iu m Lat tic es

Eiic hi K URA M OTO , Yas uh is a AONO , S hu ji YA M AM O TO , Ko ic hi M AK II, and Te ts u o TSUTS UM I

Tr an s ac ti ons o f Th e Ir on an d S te el In st itu te of Jap an Vo l.28, ( 1988) , p p . 885

10. B CC

( 1988 ) 93

1. DLC

2014 9 25

2. DLC

2013 5 22

3. Ball-on-Disk DLC

2012 5 15

4. DLC

2011 5 25

(7)

.3

5. A DH E S ION O F TiN CO AT ING ON S TE EL

S. YA M AM OTO , T. O H MUR A, A . KAWA NA, Y. CH I BA an d H . ICH IM UR A

M RS I nt er n atio n al M ee tin g on Ad v an c e Mat er i als . Vo l.4 ( 1990) 507 9

6.

3 1991

7.

3 1990 9 26

8. TiN

2 1989 10 2

9. TiN

102 1988 3 31

10. ( A E)

102 1988 3 31

11.

99 1986 10 20

12. d i- int er s t it ial

98 1986 4 2

参照

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