(DLC)
Study of Wear Behavior of Nitrogenated Diamond-like Carbon (DLC) Films through
Friction Energy Analysis
Shuji YAMAMOTO
1
3 %
1 ) - 2 )
D L C
D L C D L C
(D i a m o n d - l i k e c a r b o n , D L C )
( s p3) ( s p2)
D L C
- C N D L C
D L C
C V D D L C D L C
( S U J 2 , S U S 4 4 0 C )
(H o l m - A r c h a r d ) -
D L C D L C
1 1 2
6
1
D L C
D L C
2 D L C D L C
D L C
( C6H6) D L C D L C
D L C E P M A D L C
X P S
D L C A F M
D L C s p3/ s p2 D L C
3
H o l m - A r c h a r d
H o l m - A r c h a r d
4
3 D L C
5 D L C 3
S U J 2
S U S 4 4 0 C D L C
S U J 2 S U S 4 4 0 C
S U J 2 S U S 4 4 0 C
S U J 2 S U S 4 4 0 C
S U J 2 2 0 %
S U S 4 4 0 C S U J 2
H o l m - A r c h a r d
D L C H o l m - A r c h a r d
6 D L C D L C
5 . 4 7 . 3 1 0 . 7 m a s s % D L C D L C
D L C D L C
D L C /
D L C
1 0 . 7
m a s s % D L C D L C
5 . 4 m a s s % D L C
D L C 7
.1
2015 3
[ ]
1. E valu atio n o f th e t em p er at ur e d is tr ibut io n in s tee l ba lls in d uc e d by f r ic tio n e ne r gy gen e r ate d d ur i ng t r ibot es t again s t d iam ond - lik e c ar bon c o at in gs
Sh uj i Yamamo to , Takah ir o O k uak i, M its ur u Eg as hir a, Ch it os h i M as u d a
Tr ibo lo gy M ate r i als , S ur f ac e & In te r f ac e , Vo l.9, ( 2015) , p p .3 3- 40
2. E valu at io n of w ear e ne r g y c o ns u mp tion of n it ro ge n ate d d iamo nd - lik e c ar bon a gain s t alum in a
Sh u ji Yamam ot o , M its ur u E gas h ir a, Kats u yo s hi Ko nd o h, Ch it os h i M as u d a,
Tr ibo lo gy le tt er s , Vol. 55, ( 2014) , p p . 279 - 288
3. Tr i b ol og ic a l b e ha v i or of D L Cs p r od u c ed b y rf P C VD b a s ed o n en er g e ti c e v a l ua t io n
Sh uj i Yamamo to , A ts u o Kaw ana, Chit o s hi M as u d a
Su r f ac e & C oat in g s Tec h no lo gy, Vo l. 236, ( 2013) , p p .4 57 - 464 4.Tr ibo lo g ic al be h avio r of s t ain les s s te el with r es p e c t to t h at of
DLC in t e rm s o f e n er get ic as p ec ts
Sh u ji Yamam ot o , A ts uo Kaw an a, Ch it os h i M as u d a Tr ibo lo gy M ate r i als , Su rf ac e & In te r f ac e
Vo l.7, ( 20 13) , p p . 161- 167
5.Re lat io ns hip be tw ee n t r ibo logic a l p r o pe r tie s an d s p3/s p2 s tr u c tu r e o f n it r oge n ate d d iam on d - lik e c ar bon d e p os ited by p las ma C VD
Sh uj i Yamam ot o , At s uo Kaw an a, H ir os h i Ic him ur a, Chit o s hi M as ud a ,
Su r f ac e & Co at in gs Te c hn ol og y, Vo l. 210 , ( 2012) , p p . 1- 9
6. CV D DLC
, ( 201 2), p p .35 - 40
.2
[ ]
7. Ef f e c t o f s ubs tr ate bias v olt age on th e p r op e r ti es o f ar c io n - p late d Ti N f ilms o nt o h igh s p e ed s te e ls
Sh uj i Yamamo to , H ir os h i Ic him ur a
J.M at er. Re s ., Vol. 11, ( 1996 ) , p p . 11 49- 1156
8. E f f ec t s o f in tr ins ic p r op e r t ie s of TiN c oat in gs on ac ou s tic em is s ion be ha vio r at s c r atc h te s t
Sh uj i Yamamo to , H ir os h i Ic him ur a
J.M at er, Re s ., Vol. 7, ( 1992 ) , p p .2240 - 2247
9. A to mic s Fea tu r es of t he In te r ac tio n be tw ee n a Sc r e w Dis lo c atio n and S elf - int er s t it ial A t om s in M od e l Ir o n and Van ad iu m Lat tic es
Eiic hi K URA M OTO , Yas uh is a AONO , S hu ji YA M AM O TO , Ko ic hi M AK II, and Te ts u o TSUTS UM I
Tr an s ac ti ons o f Th e Ir on an d S te el In st itu te of Jap an Vo l.28, ( 1988) , p p . 885
10. B CC
( 1988 ) 93
1. DLC
2014 9 25
2. DLC
2013 5 22
3. Ball-on-Disk DLC
2012 5 15
4. DLC
2011 5 25
.3
5. A DH E S ION O F TiN CO AT ING ON S TE EL
S. YA M AM OTO , T. O H MUR A, A . KAWA NA, Y. CH I BA an d H . ICH IM UR A
M RS I nt er n atio n al M ee tin g on Ad v an c e Mat er i als . Vo l.4 ( 1990) 507 9
6.
3 1991
7.
3 1990 9 26
8. TiN
2 1989 10 2
9. TiN
102 1988 3 31
10. ( A E)
102 1988 3 31
11.
99 1986 10 20
12. d i- int er s t it ial
98 1986 4 2