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Materials Science of Electronic and Optoelectronic Devices

Tadao Tanabe

1

(2)

平成29年度後期 授業実施予定

課 程 : 大学院 ・ 学部

(どちらかを選択)

科 目 名 : 応用電子材料学 曜日・講時・講義室: 金曜日・1 講時・講義室 3 担 当 教 員 :小山裕教授,佐藤俊一教授,吉川彰教授 田邉匡生准教授,小澤祐市准教授

第 1回 10月 6日(金)1講時(小山)

第 2回 10月13日(金)1講時(田邉)

第 3回 10月20日(金)1講時(田邉)

第 4回 10月27日(金)1講時(佐藤)

第 5回 11月10日(金)1講時(小澤)

第 6回 11月17日(金)1講時(吉川)

第 7回 11月24日(金)1講時(試験)

Oct. 6 Oyama

Oct.13 TanabePhotonic Device-Basic Oct. 20 Tanabe-Application

Oct. 27 Sato

Nov.10 Kozawa Nov.17 Yoshikawa

Nov.24 Examination 2

(3)

Quiz -Photonic Device-

1. What photonic devices do you know? (1~2 devices)

2. Explain the device (structure, function, feature,,, anything OK!)

3. What materials are used in the device?

Student ID: Name: 3

(4)

(1) INTRODUCTION

What is LIGHT?

Application of light to our life

Relation between light and materials

(2) Handling of LIGHT

Generation

Propagation :absorption Condensing(space)

Condensing(time)/modulating Amplification

Selecting Detecting

(3) Understanding of LIGHT for device fabrication

wavelength/frequency linewidth

pulse duration beam mode

polarization power density

(4) Photonic Technology (5) Applications

Basic of Photonic devices (Tanabe)

4

2017/10/13

(5)

(1) INTRODUCTION

What is LIGHT?

electric wave~light (electromagnetic wave) invisible/visible

straight propagation solar−blind

due to ozone absorbance of sunlight Laser

single-frequency

coherent(coordinate phase) high energy density

wikipedia.org 5

below 280 nm

(6)

hyperphysics.phy‐astr.gsu.edu

laserfront.jp

(1) INTRODUCTION

What is LIGHT?

electric wave~light (electromagnetic wave) invisible/visible

straight propagation solar−blind

Laser

single-frequency

coherent(coordinate phase) high energy density

light laser

wavelength wavelength

In te nsity In te nsity

light

laser

light

laser

6

(7)

Application of light(photonic device) to our life

lighting

photographing energy production communication

non-destructive inspection medical diagnosis/treatment

mitsubishielectric.co.jp

oneslidephotography.com digitaljournal.com

nonin.com itmedia.co.jp

furukawa.co.jp

canadianground.com 7

(8)

Evaluation for insulator covered metal surface defects in the construction

deformed Polyethylene

water diffusion to cracks in the concrete

Concrete

(10mm thickness)

THz image

non oxide surface:

Large

oxide surface:

Small insulators

THz transperencehigh Cu cable for Electric power

one-axis deformation

(a)平行偏光 (b)垂直偏光

0.0 0.2 0.4 0.6 0.8 1.0 1.2 0.00

0.05 0.10 0.15 0.20 0.25

伸び歪

(a)平行偏光 (b)垂直偏光

THz吸収強度

THz Applications: non-destructive inspection

TerahertzSafetynon-destructive

non-destructive : non-ionized 、 high-transparency safety : applicable to practical fields

1.5 2.0 2.5 3.0 3.5

0.00 0.05 0.10 0.15 0.20

射率(%)

周波数(THz)

酸化物無し 酸化物有り

@1.7THz:

酸化物による反射率減少

@2.3THz:

酸化物による反射率変化なし

1.5 2.0 2.5 3.0 3.5

0.00 0.05 0.10 0.15 0.20

射率(%)

周波数(THz)

酸化物無し 酸化物有り

@1.7THz:

酸化物による反射率減少

@2.3THz:

酸化物による反射率変化なし

n

ドーパント

ポリアニリン骨格 104 105 106 0.0

0.3 0.6

Molecular Weight

Absorbance @4THz

Molecular Weight

crack

THz Reflectivity

perpendicular

parallel

perpendicular parallel     

Elongation Strain

THz absorption

framework   dopant

dependence 

on surface condition       no dependence    

Frequency (THz)

Reflectivity non‐oxide

oxide

Reflectivity Absorbance

THzspectrum THz

Imaging    frequency

position peak 

normal

damaged

8

(9)

Application of light(photonic device) to our life

lighting: Lamp, LED

photographing: CCD, CMOS energy production: Solar Cell communication: LD, PIN-Diode

non-destructive inspection: Infrared-THZ medical diagnosis/treatment: LED/Laser

kaden.watch.impress.co.jp

oneslidephotography.com LED

photonicsonline.com

CCD CMOS

PIN‐Diode

9

(10)

Relation between light and materials

lighting: Lamp, LED: GaAsP, GaN photographing: CCD, CMOS: Si

energy production: Solar Cell: Si, GaAs communication: LD, PIN-Diode: InP

non-destructive inspection: THZ: GaP, GaSe

medical diagnosis/treatment: LED/Laser: GaAs, CO

2

led.or.jp 10

blue

red

wavelength

GaN

GaP

GaAs AlInGaP

GaAsP GaAlAs ZnO

semiconductors

e-

- +

n-type p-type

--

- -

h

sonyalpharumors.com

nonin.com

novuslight.com

intechopen.com

(11)

hyperphysics.phy‐astr.gsu.edu

(2) Handling of LIGHT

Generation

heating

energy gap in semiconductor nonlinear optical process

(frequency-mixing: DFG, SFG, SHG)

11 Ph.D. Thesis@Simone Montanari

todayifoundout.com

Electro

Luminescence

(12)

表面技術 61 (2010) 板東 完治

鍋谷暢一先生の資料 12 Lattice constant

Lattice constant

Bandg ap   ener gy Bandg ap   ener gy

(13)

13

(14)

(2) Handling of LIGHT

Generation

heating

energy gap in semiconductor nonlinear optical process

(frequency-mixing: DFG, SFG, SHG)

difference-frequency generation (DFG)

1E-3 0.01 0.1 1 10 100

0.1 1 10 100

TH z-w ave pow er ( m W )

GaP

eoo

oee

GaSe CdSe

ZnGeP2(oee) ZnGeP2(oee)

THz-wave power (mW) Frequency (THz) Wavelength m)

300 30 3

3000

ω

3

=50THz(60m) ω

2

=232THz(1.3m) ω

1

=282THz(1.064m)

t

t t P(1)

P(2)

P()

laser

Low PowerLinear High Power: nonlinear

P=

0

(1)

E+

0

(2)

E

2

+

0

(3)

E

3

+ ・・・

14

(15)

nonlinear  electronic  polarization

P

+ 

S

P

-

S

・ ・

DFG

incident beams

( near‐IR )

P

S

nonlinear  optical effect

difference‐

frequency

P

-

S

(THz vibrations)

2 2

t E P

 

phonon‐polariton (in GaP crystals )

EM‐wave emission

THz

=

P

-

S

Interaction with TO-phonon

Propagation from GaP

THz-wave radiation

THz

k

 

TO

THz-wave

THz

k

P

k

S

k

THz phase matched

P

S

THz-wave generation

nonlinear phase-matching condition small angle phase matching

THz-wave generation based on non-collinear phase-matched DFG in phonon-polariton of GaP

small angle tuning of two incident beams enables to generate tunable THz-wave

15

(16)

covesion.com

Claudio Attaccalite, CNRS researcher at Neel Institute Grenoble 16

(2) Handling of LIGHT

Generation

heating

energy gap in semiconductor nonlinear optical process

(frequency-mixing: DFG, SFG, SHG)

nb.uw.edu

(17)

Quantitative Evaluation of Collagen Fiber Structure in Human  Dermis Based on Two‐Dimensional Auto‐Correlation Analysis of  SHG (Second Harmonic Generation) Image

Transactions of Japanese Society for Medical and Biological Engineering  Vol. 55 (2017) No. 2 p. 91‐96

17

(2) Handling of LIGHT

Generation

heating

energy gap in semiconductor nonlinear optical process

(frequency-mixing: DFG, SFG, SHG)

(18)

(2) Handling of LIGHT

Propagation :absorption

in air, liquid and solid

:reflection, refraction, diffraction, absorption and scattering waveguide

optical fiber

ln T : Transmittance X

1

, x

2

: Thickness

100%

R%

T% ( measurement )

100‐R

T%=(100‐R) e ‐α x

X

18 Absorption

physics.louisville.edu flinnsci.com

Diffraction

(19)

19

(2) Handling of LIGHT

Propagation :absorption

in air, liquid and solid

:reflection, refraction, diffraction, absorption and scattering waveguide

optical fiber

panasonic.com

Anti-Reflection coating

No coating AR coating

lens lens

(20)

20

(2) Handling of LIGHT

Propagation :absorption

in air, liquid and solid

:reflection, refraction, diffraction, absorption and scattering waveguide

optical fiber

ccs‐inc.co.jp

iLectureonline

Nature Protocols 11, 664–687 (2016) 

(21)

(2) Handling of LIGHT

Condensing(space)

index lens

parabolic mirror

Spherical Lens Aspherical Lens

panasonic.com

Scientific Background

Nobel Prize in Physics 2009

Standardní optická vlákna 21

(22)

panasonic.com

22 Focusing length

(2) Handling of LIGHT

Condensing(space)

index lens

parabolic mirror

(23)

Optics Express Vol. 12, Issue 17, pp. 3934‐3939 (2004) 

edmundoptics.jp 23

(2) Handling of LIGHT

Condensing(space)

index lens

parabolic mirror

Photonic Crystal

(24)

(2) Handling of LIGHT

Condensing(time)/modulating

shutter mode lock Q-switching

thorlabs.com

rp‐photonics.com

daenotes.com thinksrs.com

ps~fs

wikipedia.org

ns

peopletoday24.com ms

24

(25)

25 坪井淳子

© 日本科学未来館

NATIONAL MUSEUM OF EMERGING SCIENCE AND INNOVATION investigation of fundamental chemical reactions, using  ultra‐short laser flashes, on the time scale on which the  reactions actually occur.

Nobel Prize in Chemistry 1999 Ahmed Zewail

(2) Handling of LIGHT

Condensing(time)/modulating

shutter mode lock Q-switching

panasonic.com

pulse   dur at ion   (sec)

at(10

‐18

) second Until now

Behavior of molecules

Behavior of electrons

Time resolution: 10

18

sec 

(26)

Fabry–Perot interferometer

http://hank.uoregon.edu

physik.uni‐siegen.de

26 www.fiberlabs.co.jp

(2) Handling of LIGHT

Amplification

stimulated emission in fiber Raman effect

Selecting

filter grating

interference Raman effect

Filter

flinnsci.com

Michelsointerferometer

physics.tutorvista.com

(27)

Signal Light (output) Signal Light (input)

Pump Light

GaP-AlGaP Raman Amplifier

Detector

・・・ ・・・

123

S1S2S3S4S5

2

80 ps

- high-frequency response - high gain

- narrow-frequency selection

Band gap

pump

signal amplified

12.12 THz

・ Stimulated Raman Amplifier

LO phonon

GaP

12.12 THz

clad

AR coating Reflection

pump signal

amplified

core

GaP AlGaP (2) Handling of LIGHT

Amplification

stimulated emission in fiber Raman effect

Selecting

filter grating

interference Raman effect

27

(28)

physics.tutorvista.com

(2) Handling of LIGHT Detecting

photoelectric effect

energy gap in semiconductor bolometer/pyroelectric effect

optotherm.com photoelectric effect

energy gap in semiconductor

bolometer/pyroelectric effect

physicsopenlab.org

28

4K Si

(29)

(3) Understanding of LIGHT conditions

wavelength/frequency linewidth

pulse duration :propagation distance beam mode

polarization

power density :beam diameter

physics.louisville.edu flinnsci.com

Fabry–Perot interferometer

http://hank.uoregon.edu

physik.uni‐siegen.de Michelsointerferometer

29

(30)

(3) Understanding of LIGHT conditions

wavelength/frequency linewidth

pulse duration beam mode polarization

power density :beam diameter

keyence.co.jp 狩野覚先生資料より 30

omron.co.jp

apioptics.com single mode multi mode

peak power

average power

time

time

jp.laserto.com

参照

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