3. 標準ガスと標準化㩷

(1)

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3. 標準ガスと標準化㩷

㪊㪄㪈㪅㩷㪤㪩㪠㩷㪪㪝

_㪍

㩷㪚㪸㫃㫀㪹㫉㪸㫋㫀㫆㫅㩷㪪㪺㪸㫃㪼㩷

ᮡḰ‛⾰ߪỚᐲࠍ᳿߼ࠆ”߽ߩߐߒ”ߢ޽ࠆޕSF6ߦ㑐ߒߡߪޔ⃻ᤨὐߢߪ⛔৻⊛ߦෳᾖߐࠇߡ޿ࠆᮡḰ‛⾰ߪ ߥ޿ޕᦨೋߦ⸥ㅀߒߚࠃ߁ߦޔㆊ෰ߩ࠺࡯࠲߿ઁᯏ㑐ߩ࠺࡯࠲ߣᲧセน⢻ߥ࠺࡯࠲ࠍขᓧߔࠆߚ߼ߦᚒޘ߇ᮡḰ

‛⾰ߦߟ޿ߡⴕࠊߥߌࠇ߫ߥࠄߥ޿ߎߣߪޔ⥄ಽߚߜߩ”߽ߩߐߒ”㧔ࠬࠤ࡯࡞㧕ࠍ▤ℂߒޔ⛽ᜬߒ⛯ߌޔ⛔৻ߩ

ࠬࠤ࡯࡞߇ቢᚑߒߚߣ߈ߦߘࠇߣᾖࠄߒวࠊߖࠆߎߣ߇ߢ߈ࠆࠃ߁ߦߒߡ߅ߊޕߘߎߢᚒޘߪ⁛⥄ߩࠬࠤ࡯࡞

㧔MRI SF6Calibration Scale㧕ࠍ૞ᚑߒޔ⛽ᜬߒߡ޿ࠆޕ

ᚒޘߪࠟࠬలႯߩߚ߼ߩࠪࠬ࠹ࡓࠍᚲ᦭ߒߡ޿ࠆࠊߌߢߪߥ޿ߩߢޔᚒޘߩᮡḰࠟࠬߩߔߴߡߪJFP␠ߢ૞

⵾ߒߡ޿ࠆޕలႯኈེߦߪޔ10Lߩࠕ࡞ࡒ࠾࠙ࡓว㊄ኈེߦ㧝Sౝ㕙⎇⏴㧔ౝ㕙☻ᐲ߇⚂㧝Ǎm㧕ࠍᣉߒߚ߽ߩ ߦޔࠬ࠹ࡦ࡟ࠬ࠳ࠗࡗࡈ࡜ࡓᑼߩኈེ↪ᑯࠍขࠅઃߌߚ߽ߩࠍ↪޿ߡ޿ࠆޕኈེ↪ᑯขࠅઃߌᓟޔടᾲ⌀ⓨឃ᳇

ࠍⴕߞߡ߆ࠄޔፉᵤ⵾૞ᚲ␠⵾ߩᄢ⾰㊂♖ኒᄤ⒊㧔ᦨᄢ⒊㊂30kgޔಽ⸃⢻1mg㧕ࠍ↪޿ߚ⾰㊂Ყᷙวᴺ㧔㊀㊂ లႯᴺ㧕ߦࠃࠅޔࠟࠬ߇లႯߐࠇࠆޕߎߩᄤ⒊ߩ♖ᐲߪᦨᄢߢ߽±0.01㧑⒟ᐲߢ޽ࠆߎߣ߆ࠄᧄ⎇ⓥߢ㐿⊒ߒߚ

ࠪࠬ࠹ࡓߩಽᨆ♖ᐲࠍ㧝㨪1.5ᩴ߶ߤ਄࿁ࠆ߽ߩߣ޿߃ࠆޕ1998ᐕ12᦬ߦޔ㊀㊂లႯᴺߢ૞ᚑߒߚᮡḰࠟࠬ㧔ኈ

ེ⸥ภ⇟ภ CPB-18451㧕ߦߟߌࠄࠇߚSF6ߩỚᐲ㧔5.002ppt㧕ࠍᚒޘߩࠬࠤ࡯࡞ߣߔࠆߎߣߦ᳿߼ߚޕߔߥࠊ ߜߎߩᮡḰࠟࠬ㧔ᓟㅀߔࠆ߽ߩߣ඙೎ߔࠆߚ߼ߦޟࡊ࡜ࠗࡑ࡝࡯ࠬ࠲ࡦ࠳࡯࠼ࠟࠬޠߣ๭߱ޕ㧕ࠍ㧝ᰴᮡḰࠟࠬ

ߣߒޔ⃻႐ߢ૶↪ߔࠆᮡḰࠟࠬ㧔ࡢ࡯ࠠࡦࠣࠬ࠲ࡦ࠳࡯࠼ࠟࠬ㧕ߦߪߎߩࠟࠬࠍ↪޿ߡᮡḰൻࠍⴕ޿ޔᦨ⚳⊛ߦ

⹜ᢱߩ୯ࠍ᳿ቯߒߡ޿ߊߎߣߣߥࠆޕߎߩᮡḰࠟࠬߦߪޔ⓸⚛ࠍࡌ࡯ࠬࠟࠬߣߒޔߘࠇߦ SF6ߩߺ߇ᷝടߐࠇ ߡ޿ࠆޕ

ᮡḰࠟࠬߦ৻⇟᳞߼ࠄࠇࠆߎߣߪߘࠇ⥄りߩỚᐲ߇ᤨ㑆⊛ߦᄌൻߒߥ޿ߎߣߢ޽ࠆޕߒ߆ߒޔ㧝ᰴᮡḰࠟࠬߣ

޿߃ߤ߽ᤨ㑆ᄌൻߒߥ޿ߣ޿߁଻⸽ߪߥ޿ޕߒ߆߽ߘࠇߩߺߢߪ⥄りߩỚᐲᄌൻߩ᦭ήࠍ࠴ࠚ࠶ࠢߔࠆߎߣߪߢ ߈ߥ޿ޕߘߎߢޔหᤨᦼߦห᭽ߥኈེߦหߓᚻᴺߢ㧟ᧄߩᮡḰࠟࠬ㧔CPB-19055, CPB-19056, CPB-19057㧕ࠍ

૞ᚑߒޔవߩࡊ࡜ࠗࡑ࡝࡯ࠬ࠲ࡦ࠳࡯࠼ࠟࠬߢᮡḰൻࠍⴕ޿ޔߎࠇࠄ㧠ᧄߩ㧝ᰴᮡḰࠟࠬ㑆ߢ⋧੕ߦỚᐲᄌൻࠍ

࠴ࠚ࠶ࠢߔࠆ૕೙ࠍᢛ߃ߚޕߜߥߺߦޔࡊ࡜ࠗࡑ࡝࡯ࠬ࠲ࡦ࠳࡯࠼ࠟࠬߢᮡḰൻߐࠇߚ SF6ߩỚᐲߣޔ㊀㊂ల Ⴏᴺߢ᳿߼ߚSF6ߩỚᐲߪታߦࠃߊ৻⥌ߒߚ㧔Table 3-1㧕ޕߎࠇࠄ㧠ᧄߩ㧝ᰴᮡḰࠟࠬߩ⋧੕ᬌቯߪ⃻࿷ߦ⥋ࠆ

߹ߢⴕߞߡ޿ࠆޕౕ૕⊛ߦߪ

1. ࡊ࡜ࠗࡑ࡝࡯ࠬ࠲ࡦ࠳࡯࠼ࠟࠬߢޔઁߩ㧟ᧄߩ㧝ᰴᮡḰࠟࠬߩỚᐲߩ᷹ቯࠍⴕ޿ޔ⚻ᤨ⊛ߥỚᐲᄌൻ߇

⿠ߎߞߡ޿ߥ޿߆࠴ࠚ࠶ࠢߔࠆޕ

2. ࡊ࡜ࠗࡑ࡝࡯ࠬ࠲ࡦ࠳࡯࠼ࠟࠬએᄖߩ㧟ᧄߩ㧝ᰴᮡḰࠟࠬߩᦨೋߦ᳿߼ࠄࠇߚỚᐲࠍ↪޿ߡࡊ࡜ࠗࡑ࡝

㪫㪸㫅㫂㩷㪥㫆㪅㫇㫇㫋㪤㪼㪻㫀㪸㩷㪾㪸㫊㪩㪼㫄㪸㫉㫂

㪚㪧㪙㪈㪏㪋㪌㪈㪧㫉㫀㫄㪸㫉㫐㩿㪌㪅㪇㪇㪉㪀㪥

㪉

㪚㪧㪙㪈㪐㪇㪌㪌㪈㪇㪅㪈㫧㪇㪅㪈㩿㪈㪇㪅㪇㪎㪀㪥

㪉

㪂㪦

㪉

㫀㫅㪺㫃㫌㪻㫀㫅㪾䇭䋳㪚㪝㪚㫊㪚㪧㪙㪈㪐㪇㪌㪍㪎㪅㪈㪋㫧㪇㪅㪇㪋㩿㪎㪅㪈㪋㪈㪀㪥

㪉

㪂㪦

㪉

㫀㫅㪺㫃㫌㪻㫀㫅㪾䇭䋳㪚㪝㪚㫊㪚㪧㪙㪈㪐㪇㪌㪎㪊㪅㪇㪉㫧㪇㪅㪇㪊㩿㪊㪅㪇㪊㪉㪀㪥

㪉

㪂㪦

㪉

㫀㫅㪺㫃㫌㪻㫀㫅㪾䇭䋳㪚㪝㪚㫊

Table 3-1 Calibrated values of SF

6

Primary Standards.

(2)

Figure 3-1 ߦޔ㧠ᧄߩ㧝ᰴᮡḰࠟࠬߩSF6ߩᬌቯ୯ߩᤨ♽೉ᄌൻࠍ␜ߔ߇ޔ޿ߕࠇߩࡏࡦࡌߩ޿ߕࠇߩSF6

ߦߟ޿ߡ߽ᚒޘߩಽᨆ♖ᐲࠍ⿥߃ࠆࠃ߁ߥỚᐲߩᄌൻߪ⃻ᤨὐߢߪ⿠ߎߞߡ޿ߥ޿ߎߣ߇ࠃߊࠊ߆ࠆޕ

㪊㪄㪉㪅㩷䊪䊷䉨䊮䉫䉴䉺䊮䉻䊷䊄䉧䉴䈱ᬌቯ䊶▤ℂ㩷

㧝ᰴᮡḰࠟࠬߪ߈ࠊ߼ߡ㊀ⷐߥ߽ߩߢ޽ࠆ߆ࠄޔ․೎ߥ႐วએᄖߪ᷹ⷰߩߚ߼ߦ⎇ⓥቶ߆ࠄᜬߜ಴ߒ૶↪ߔࠆ ߎߣ߇޽ߞߡߪߥࠄߥ޿ޕߘߎߢ⃻႐⹜ᢱߩಽᨆߦ㓙ߒޔ⃻႐↪ᮡḰࠟࠬ㧔ࡢ࡯ࠠࡦࠣࠬ࠲ࡦ࠳࡯࠼ࠟࠬ㧕ࠍ૞

⵾ߒޔ૶↪ߔࠆޕᚒޘߩ⃻႐↪ᮡḰࠟࠬߪޔ㧝ᰴᮡḰࠟࠬߣห᭽ߥኈེߦห᭽ߥᚻᴺߢ૞⵾ߐࠇߡ޿ࠆޕ૞⵾ߒ ߚࡢ࡯ࠠࡦࠣࠬ࠲ࡦ࠳࡯࠼ࠟࠬࠍ↪޿ߡᦨ⚳⊛ߦ⹜ᢱߩ SF6ߩỚᐲࠍ᳿ቯߔࠆ㧔ᮡḰൻ㧕߹ߢߦᚒޘߪᰴߩࠃ ߁ߥᚻ㗅ࠍ〯ࠎߢ޿ࠆޕ

Ԙ 㧝ᰴᮡḰࠟࠬߦࠃࠆࡢ࡯ࠠࡦࠣࠬ࠲ࡦ࠳࡯࠼ࠟࠬߩᬌቯ ԙ ᬌቯ୯ߩࡕ࠾࠲࡯㧔⚂㧞ࡩ᦬Ფ㧕

Ԛ ࡢ࡯ࠠࡦࠣࠬ࠲ࡦ࠳࡯࠼ࠟࠬߩ⃻႐ߢߩ૶↪

ԛ ࡢ࡯ࠠࡦࠣࠬ࠲ࡦ࠳࡯࠼ࠟࠬߩᦨ⚳ᬌቯ Ԝ ⃻႐࠺࡯࠲ߩᮡḰൻ

ߘࠇߙࠇߦߟ޿ߡએਅߦ⹦⚦ࠍ⸥ㅀߔࠆޕ

㪊㪄㪉㪄㪈㪅㩷䋱ᰴᮡḰ䉧䉴䈮䉋䉎䊪䊷䉨䊮䉫䉴䉺䊮䉻䊷䊄䉧䉴䈱ᬌቯ㩷

ࡢ࡯ࠠࡦࠣࠬ࠲ࡦ࠳࡯࠼ࠟࠬߪ૞⵾ᓟ⋥ߜߦޔ㧝ᰴᮡḰࠟࠬࠍ↪޿ߡᮡḰൻߔࠆޕవߩ㧝ᰴᮡḰࠟࠬห᭽ޔࡢ

࡯ࠠࡦࠣࠬ࠲ࡦ࠳࡯࠼ࠟࠬߦߟ޿ߡ߽ޔ㧝ᰴᮡḰࠟࠬߢᮡḰൻߐࠇߚ SF6ߩỚᐲߣޔ㊀㊂లႯᴺߢ᳿߼ࠄࠇߚ SF6ߩỚᐲߦߪ᦭ᗧߥᏅߪ⹺߼ࠄࠇߥ޿㧔Table 3-2㧕ޕ

0 2 4 6 8 10 12

CPB18451 CPB19055 CPB19056 CPB19057

C alib ra te d S F

6

(p pt )

Time

Apr., 2006 Aug., 2006 Dec., 2006 Apr., 2007 Aug., 2007 Dec., 2007

Figure 3-1 Change in concentration of SF

6

in MRI Primary Standard gases.

(3)

㪊㪄㪉㪄㪉㪅㩷䊪䊷䉨䊮䉫䉴䉺䊮䉻䊷䊄䉧䉴ᬌቯ୯䈱䊝䊆䉺䊷㩷

Ớᐲᄌൻࠍ↢ߓࠆᮡḰࠟࠬߪ߽ߪ߿ᮡḰࠟࠬߣߪ޿߃ߕޔ⃻႐⹜ᢱߦኻߒߡ↪޿ࠆߎߣ߇޽ߞߡߪߥࠄߥ޿ޕ ߘߎߢޔᚒޘߪ૞⵾ߒߚࡢ࡯ࠠࡦࠣࠬ࠲ࡦ࠳࡯࠼ࠟࠬߦߟ޿ߡߪޔߘࠇࠍ⃻႐ߢ૶↪ߔࠆߚ߼ߦޔ૞ᚑᓟ᷹ቯ૞

ᬺ߇ਇน⢻ߥ႐วࠍ㒰޿ߡ᦬ߦ㧞࿁ߩ㗫ᐲߢ㧝ᰴᮡḰࠟࠬߦኻߒߡᬌቯ୯ࠍ⚂㧞㧜ࡩ᦬㑆ࡕ࠾࠲࡯ߒޔSF6ߩỚ ᐲᄌൻ߇ߥ޿߆ࠍ⏕⹺ߒߡ޿ࠆ(Figure 3-2, Figure 3-3)ޕ

0 1 2 3 4 5 6 7

CPB30551 CPB30552 CPB30556 CPB30555

Ca lib ra te d S F

6

(p pt )

Time

Apr., 2006 Aug., 2006 Dec., 2006 Apr., 2006 Aug., 2007 Dec., 2007

0 1 2 3 4 5 6 7 8

CPB17149 CPB28103 CPB15707 CPB28542

Ca lib ra te d S F

6

(p pt )

Apr., 2006 Aug., 2006 Dec., 2006 Apr., 2007 Aug., 2007 Dec., 2007 Figure 3-2 Change in concentration of SF

6

in MRI Secondary Standard gases (A series).

㪫㪸㫅㫂㩷㪥㫆㪅㪪㪼㫉㫀㪼㫊㫇㫇㫋㪤㪼㪻㫀㪸㩷㪾㪸㫊

㪚㪧㪙㪊㪇㪌㪌㪈㪘㪈㪅㪇㪈㫧㪇㪅㪇㪈㩿㪈㪅㪇㪇㪇㪀㪥

㪉

㪚㪧㪙㪊㪇㪌㪌㪉㪘㪉㪅㪋㪐㫧㪇㪅㪇㪊㩿㪈㪇㪅㪇㪎㪀㪥

㪉

㪚㪧㪙㪊㪇㪌㪌㪍㪘㪊㪅㪐㪏㫧㪇㪅㪇㪋㩿㪎㪅㪈㪋㪈㪀㪥

㪉

㪚㪧㪙㪊㪇㪌㪌㪌㪘㪍㪅㪇㪇㫧㪇㪅㪇㪋㩿㪊㪅㪇㪊㪉㪀㪥

㪉

㪂㪦

㪉

㪚㪧㪙㪈㪎㪈㪋㪐㪙㪋㪅㪇㪈㫧㪇㪅㪇㪉㩿㪊㪅㪐㪐㪏㪀㪥

㪉

㪚㪧㪙㪉㪏㪈㪇㪊㪙㪉㪅㪋㪐㫧㪇㪅㪇㪉㩿㪉㪅㪌㪇㪈㪀㪥

㪉

㪚㪧㪙㪈㪌㪎㪇㪎㪙㪎㪅㪇㪉㫧㪇㪅㪇㪊㩿㪍㪅㪐㪐㪐㪀㪥

㪉

㪚㪧㪙㪉㪏㪌㪋㪉㪙㪇㪅㪐㪐㪐㫧㪇㪅㪇㪇㪈㩿㪇㪅㪐㪐㪐㪈㪀㪥

㪉

Table 3-2 Calibrated values of SF

6

Working Standards.

(4)

㪊㪄㪉㪄㪊㪅㩷䊪䊷䉨䊮䉫䉴䉺䊮䉻䊷䊄䉧䉴䈱⃻႐䈪䈱૶↪㩷

ᚒޘߪᶏᵗ᷹ⷰ╬ޔSF6ߩ⃻႐ߢߩ᷹ቯߦ㓙ߒߡߪዋߥߊߣ߽Ớᐲߩ⇣ߥࠆ4ᧄߩࡢ࡯ࠠࡦࠣࠬ࠲ࡦ࠳࡯࠼ࠟ

ࠬࠍ↪޿ߡ޿ࠆޕ㧟ᧄએ਄ࠍ↪޿ࠆߎߣߢኒߥᬌ㊂✢߇૞ᚑߢ߈ࠆߩߺߢߥߊޔ᷹ⷰߩ⃻႐ߦ߅޿ߡ߽ߘࠇࠄࡢ

࡯ࠠࡦࠣࠬ࠲ࡦ࠳࡯࠼ࠟࠬߩỚᐲᄌൻߦߟ޿ߡߩ⋧੕ߦ࠴ࠚ࠶ࠢ߇น⢻ߣߥࠆޕ

㪊㪄㪉㪄㪋㪅㩷䊪䊷䉨䊮䉫䉴䉺䊮䉻䊷䊄䉧䉴䈱ᦨ⚳ᬌቯ㩷

᷹ⷰ╬ߦ↪޿ߚࡢ࡯ࠠࡦࠣࠬ࠲ࡦ࠳࡯࠼ࠟࠬߪ⎇ⓥቶߦᜬߜᏫߞߚᓟޔ⋥ߜߦ㧝ᰴᮡḰࠟࠬߦࠃߞߡౣ߮ᬌቯ

૞ᬺࠍⴕ޿ޔỚᐲᄌൻߩ࠴ࠚ࠶ࠢࠍⴕ߁ޕ

㪊㪄㪉㪄㪌㪅㩷 ⃻႐䊂䊷䉺䈱ᮡḰൻ㩷

⃻႐⹜ᢱߩỚᐲߪޔ᷹ⷰᓟߩ࠴ࠚ࠶ࠢࠍࡄࠬߒߚࡢ࡯ࠠࡦࠣࠬ࠲ࡦ࠳࡯࠼ࠟࠬߩߺߦࠃߞߡ૞ᚑߐࠇߚᬌ㊂✢

ࠍ↪޿ߡޔ᳿ቯߐࠇࠆߴ߈ߢ޽ࠆޕߎߎߢ᳿߼ࠄࠇߚỚᐲߪޔMRI SF6 Calibration ScaleၮḰߩỚᐲߣ⸒߁ߎ ߣߦߥࠆޕ

㪊㪄㪊㪅㩷 ᬌ㊂✢㩷

ಽᨆߐࠇߚ⚿ᨐߣߒߡឬ߆ࠇࠆࠣࡠࡑ࠻ࠣ࡜ࡓ߆ࠄࠗࡦ࠹ࠣ࡟࡯࠲ߦࠃࠅ⸘▚ߐࠇࠆࡇ࡯ࠢ㕙Ⓧߪ޽ߊ߹ߢ

߽ಽᨆ⹜ᢱਛߦ฽߹ࠇࠆ SF6ߩో㊂㧔mol ᢙ㧕ߦኻߔࠆ⋧ኻ୯ߢ޽ࠆޕߎߩ⹜ᢱߦߟ޿ߡߩࡇ࡯ࠢ㕙Ⓧࠍ mol ᢙߦ឵▚ߔࠆߚ߼ߦߪޔỚᐲᣢ⍮ߩ‛⾰ޔߔߥࠊߜᮡḰࠟࠬࠍቯኈߒߡ᷹ቯߒޔ᭽ޘߥSF6ߩmolᢙߣ㕙Ⓧ୯ ߣߩ㑐ଥ߆ࠄᬌ㊂✢ࠍ૞ᚑߔࠆߎߣ߇ᔅⷐߣߥࠆޕ

ಽᨆࠪࠬ࠹ࡓߦߪᄢዊ㧞ߟߩࠟࠬቯኈ▤߇⸳ߌࠄࠇߡ߅ࠅޔߒ߆߽ቯኈߒߚᮡḰࠟࠬࠍⶄᢙ࿁ಽ࠻࡜࠶ࡊߔࠆ ߎߣ߇น⢻ߥߩߢޔ੐ታ਄ߪ㧝ᧄߩᮡḰࠟࠬ߇ሽ࿷ߔࠇ߫ᬌ㊂✢ߩ૞ᚑߪน⢻ߣߥࠆޕߒ߆ߒޔ೨▵ߢ߽ㅀߴߡ ߈ߚࠃ߁ߦޔߚߣ߃᷹ⷰਛߢ޽ߞߡ߽ࡏࡦࡌౝߢ SF6ߩỚᐲ߆ᄌൻߒߥ޿ߣ޿߁଻⸽ߪߥ޿ߩߢޔⶄᢙᧄߩᮡ

Ḱࠟࠬߢ⋧੕ߦ࠴ࠚ࠶ࠢߒߥ߇ࠄᬌ㊂✢ࠍ૞ᚑߔࠆߎߣ߇ᦸ߹ߒ޿ޕߐࠄߦޔฦᮡḰࠟࠬߦߟ޿ߡ⇣ߥࠆ㧞ߟએ

਄ߩኈ㊂ߢ᷹ቯࠍⴕ߃߫ฦὐߦߟ޿ߡ߽࠴ࠚ࠶ࠢߢ߈ࠆޕ߹ߚޔSF6ߩᬌ㊂✢ߪᔅߕߒ߽⋥✢ᕈ߇㜞޿ߣߪ㒢ࠄ ߥ޿ߩߢࠃࠅᄙߊߩಽᨆὐࠍᜬߞߚᬌ㊂✢ࠍ૞ᚑߔࠆߎߣߢಽᨆ୯߳ߩା㗬ᕈߪ㜞߹ࠆ߽ߩߣ⠨߃ࠆޕ

0 0.2 0.4 0.6 0.8 1

0 2000 4000 6000 8000 10000

SF

6

(f m ol )

Peak Area [ZT

[

Z

ZT

Figure 3-4(a) Linear and quadratic calibration curves for SF

6

calibrated by least squares method (SF

6

< 1fmol).

(5)

Figure 3-4-a෸߮Figure 3-4-bߦߪSF6ߩᮮゲߦࡇ࡯ࠢ㕙Ⓧޔ❑ゲߦSF6ߩmolᢙࠍߣߞߚᬌ㊂✢ߩ଀ࠍ␜

ߔޕFigure 3-4-bߪFigure 3-4-aߩSF6ߩmol㊂߇ᄙ޿஥ߦ᜛ᄢߒߚ߽ߩߢ޽ࠆޕFigure 3-4-aߦߟ޿ߡޔ㧝

ᰴ෸߮㧞ᰴߩ࿁Ꮻࠍⴕߞߚߣߎࠈ޿ߕࠇ߽㜞޿⋧㑐ଥᢙࠍᜬߞߡ߅ࠅ߶߷⋥✢ߣߒߡ࿁Ꮻߢ߈ࠆߎߣ߇␜ߐࠇ ߚޕߒ߆ߒޔCFCs ߩᬌ㊂✢߇㧞ᰴ㑐ᢙߢࡈࠖ࠶࠻ߔࠆߎߣ߇ᄙߊߩ⎇ⓥ⠪ߦࠃߞߡႎ๔ߐࠇߡ޿ࠆࠃ߁ߦޔ Figure 3-4-bߦ߅޿ߡߪSF6ߩmol㊂ࠍჇ߿ߒߡ޿ߊߣᬌ㊂✢ߩ⋥✢ᕈ߇ᄬࠊࠇޔ㧞ᰴ㑐ᢙߦࠃࠆ࿁Ꮻ߇ᔅⷐ ߣߥࠆޕ

0 0.5 1 1.5 2 2.5 3 3.5 4

0 5000 10000 15000 20000 25000 30000 35000 SF

6

(f m ol)

Peak Area [ZT

[

Z

ZT

Figure 3-4(b) Same as Figure 3-4(a), but SF

6

3. 標準ガスと標準化 㩷

㩷