(DLC)
Study of Wear Behavior of Nitrogenated Diamond-like Carbon (DLC) Films through
Friction Energy Analysis
Shuji YAMAMOTO
2 0 1 5 3
1
( D L C ) D L C D L C
D L C
D L C
D L C
D L C D L C
D L C
1
2 D L C D L C
( C6H6) D L C C V D D L C
( s p3) / ( s p2)
X P S
D L C D L C
C - N s p3
D L C s p3 D L C
2 3
H o l m - A r c h a r d -
4 D L C
D L C
D L C p p m
p p m p p m
5 D L C D L C
3 S U J 2
S U S 4 4 0 C D L C
S U J 2 S U S 4 4 0 C
S U J 2 S U S 4 4 0 C
S U J 2 S U S 4 4 0 C
S U J 2 2 0 %
S U S 4 4 0 C S U J 2
3
H o l m - A r c h a r d
D L C H o l m - A r c h a r d
6 D L C D L C
D L C D L C
D L C
D L C D L C
D L C
D L C D L C
7
D L C
2 0 1 5 3
( )