• 検索結果がありません。

結論

ドキュメント内 ナノアンテナ構造体を用いた (ページ 113-128)

第 7 章 結論

C.5 結論

以上の結果により、有機ナノピラー型赤外線センサにおいて、暗電流低減の可能性と、波長

2.47μmまでの光検出の可能性を実験的に確認することができた。

付録 D 装置の性能等

光検出器の光学応答を取得するのに必要な装置の性能についてまとめる。

黒体炉

Table. C. 1 SR200-33 設定温度範囲 50~1200℃

温度精度 ±3℃

温度安定性 短期:±0.25℃、長期: ±0.4℃ 黒体炉内温度均一性 ±4℃@800℃(typical)

放射率 0.99±0.01

消費電力 1700W max

設定分解能 1℃

電源 230/115V AC 50/60Hz

使用環境温度 0~50℃

口径 0.8mm~22.2mm

(アパーチャーホイール使用) 光学チョッパの周波数 1Hz~20kHz

光学チョッパの精度 ±0.2Hz @1Hz~10kHz

±0.5Hz @10kHz~20kHz 光学チョッパの安定性 ±0.1%

波長可変レーザ

Table. C. 2 SC450-2

白色光のパワー >2W

可視光(波長450-750nm)のパワー >300mW スペクトル平均パワー密度 > 1mW/nm スペクトルの平坦性 < 6dB

最小波長 460nm

最大波長 2000nm

電源 100-240V, 50/60 Hz

ビーム径 2mm @ 633nm

Table. C. 3 Acousto-Optic Tunable Filter (AOTF) 可視光の波長範囲 400nm~650nm 近赤外(NIR1)の波長範囲 650nm~1100nm 近赤外(NIR2)の波長範囲 1100nm~2000nm 波長の選択チャネル 8

可視光のバンド幅 2~7nm 近赤外(NIR1)のバンド幅 2nm~5nm 近赤外(NIR2)のバンド幅 4nm~16nm コンピュータとの

インターフェース USB

ソースメータ

Table. C. 4 ADCMT 6242

電圧電源 100V AC

消費電力 180VA以下

発生・測定電圧 0~±6V 発生・測定電流 0~±5A

電圧発生分解能 10μV @300mVレンジ 電流発生分解能 1nA @30μAレンジ 電圧測定分解能 1μV @300mVレンジ 電流測定分解能 100pA @30μAレンジ 電圧源低周波(DC~100Hz)ノイズ ~50μV @ 300mVレンジ 電流源低周波(DC~100Hz)ノイズ ~10nA @ 30μAレンジ

Table. C. 5 Keithley 2614B 電圧電源 100V~250V AC

消費電力 240VA以下

発生・測定電圧 0~±200V 発生・測定電流 0~±10A

電圧発生分解能 5μV @200mVレンジ 電流発生分解能 0.2nA @10μAレンジ 電圧測定分解能 0.1μV @200mVレンジ 電流測定分解能 10pA @10μAレンジ 電圧源低周波(DC~10Hz)ノイズ ~20μV @ 200mVレンジ 電流源低周波(DC~10Hz)ノイズ ~60pA @ 10μAレンジ

分光反射特性装置

Table. C. 6 U4000 測定有効波長 240nm~2600nm 光束間距離 200nm

測光レンジ

吸光度:-2~5.0Abs (0.001Abs単位) 透過率:0~999.9%(0.01%単位)

反射率:0~999.9%(0.01%単位)

光源 紫外域:重水素放射管

可視、赤外域:50Wヨウ素タングステンランプ 検出器 紫外、可視域:光電子増倍管

近赤外域:冷却型PbS

Table. C. 7 FTIR spectrometer IRTracer-100

干渉計

30°入射マイケルソン干渉計

アドバンストダイナミックアライメント機構内蔵 オートドライヤー付き密閉型干渉計

ビームスプリッタ

Ge蒸着KBr(中赤外用、標準)

Ge蒸着CsI(中/遠赤外用)

Si蒸着CaF2(近赤外用)

波数範囲 12,500~240cm-1

検出器

温度調節機構付きDLATGS検出器(中/遠赤外用、標準)

液体窒素冷却型MCT(Hg-Cd-Te)検出器(中赤外用)

InGaAs検出器(近赤外用)

光源 高輝度セラミックス光源(中/遠赤外用、標準)

タングステンランプ(近赤外用)

分解能 0.25、0.5、1、2、4、8、16cm-1(中/遠赤外)

2、4、8、16cm-1(近赤外)

データロガー

Table. C. 8 DL850 with 701251module

電圧電源 100V~120V/200~240V AC

消費電力 200VA以下

動作温度範囲 5~40℃ 最高サンプリングレート 1MS/s

分解能 16ビット

帯域 300kHz

チャネル数 2

最小レンジ 1mV/div

ノイズ ±100μVtyp

付録 E 使用したパラメータ

Table. D.1 Parameters

Symbol Contents Value Unit

εSi Dielectric constant 11.9 -

ε0 Permittivity in vacuum 8.85418 ×10-14 F/m

q Elementary charge 1.60218 ×10-19 C

k Boltzmann constant 1.38066 ×10-23 J/K

h Plank constant 6.62617 ×10-34 J・s

A** Effective Richardson constant 120 A/cm2/K2

m0 Electron rest mass 9.1095×10-31 Kg

m2

Tunneling

effective mass in direction of current flow

1.73081×10-31 Kg

NV

Effective density of states in

valence band 2.65×1019 cm-3

参考文献

[1] S. Su, B. Cheng, C. Xue, W. Wang, Q. Cao, H. Xue, W. Hu, G. Zhang, Y. Zuo, and Q. Wang,

“GeSn pin photodetector for all telecommunication bands detection,” Optics Express 19, 6400 (2011).

[2] K. C. Balram, R. M. Audet, and D. A. B. Miller, “Nanoscale resonant-cavity-enhanced germanium photodetectors with lithographically defined spectral response for improved performance at telecommunications wavelengths,” Optics Express 21, 10228 (2013).

[3] S. Y. Zhu, G. Q. Lo, and D. L. Kwong, “Low-cost and high-speed SOI waveguide-based silicide Schottky-barrier MSM photodetectors for broadband optical communications,” Ieee Photonics Technology Letters 20, 1396 (2008).

[4] F.Wang, L.Li, W.Huang, L.Li, B.Jin, H.Li, and T.Zhai, “Submillimeter 2D Bi2Se3 Flakes toward High‐Performance Infrared Photodetection at Optical Communication Wavelength,”

Advanced Functional Materials, 1802707 (2018).

[5] X.Zhang, S. Yang, H. Zhou, J. Liang, H. Liu, H. Xia,X. Zhu, Y. Jiang, Q. Zhang, W. Hu, X.

Zhuang,H.Liu,W.Hu, X.Wang, and A. Pan, “Perovskite–Erbium Silicate Nanosheet Hybrid Waveguide Photodetectors at the Near‐Infrared Telecommunication Band, ” Advanced Materials 29, 1604431 (2017).

[6] Z.Xie, Y. Lefier, M.A.Suarez, M. Mivell, R.Salut, J.M Merolla, and T. Grosjean, “Doubly resonant photonic antenna for single infrared quantum dot imaging at telecommunication wavelengths,” Nano letters 17, pp. 2152-2158 (2017).

[7] P. Ma, N. Flöry, Y. Salamin, B. Baeuerle, A. Emboras, A. Josten, T. Taniguchi, K.

Watanabe,L. Novotny, and J. Leuthold, “Fast MoTe2 Waveguide Photodetector with High Sensitivity at Telecommunication Wavelengths” ACS Photonics 5,5, 1846-1852 (2018).

[8] M.Yan, P.L. Luo , K.Iwakuni, G. Millot, T.W Hänsch and N. Picqué “Mid-infrared dual-comb spectroscopy with electro-optic modulators,” Light: Science & Applications 6, 10, e17076 (2017).

[9] F. Rothmayr, A. Pfenning, C. Kistner1, J. Koeth, G. Knebl, A. Schade, S. Krueger, L.

Worschech, F.Hartmann, and S. Höfling, “Mid-infrared GaSb-based resonant tunneling diode photodetectors for gas sensing applications,” Applied Physics Letters 112, 161107 (2018).

[10] Q.He, M.Lou, C.Zheng, W.Ye, Y.Wang and F.K. Tittel, “Repetitively Mode-Locked Cavity-Enhanced Absorption Spectroscopy (RML-CEAS) for Near-Infrared Gas Sensing,”

Sensors 17, 2792 (2017).

[11] J.Sun, K.K Choi, E.DeCuir, K.Olver and R. Fu, “Design and fabrication of resonator-quantum well infrared photodetector for SF 6 gas sensor application,” Journal of Micro/Nanolithography, MEMS, and MOEMS 16, 034504 (2017).

[12] R.Chen, J.Wang, Y.Xia and L.Xiang, “Near infrared light enhanced room-temperature NO2 gas sensing by hierarchical ZnO nanorods functionalized with PbS quantum dots,” Sensors and Actuators B: Chemical 255, 2538-2545 (2018).

[13] A.Harrer, R. Szedlak, B.Schwarz, H.Moser, T. Zederbauer, D.MacFarland, H.Detz, A.M. Andrews, W.Schrenk, B.Lendl and G.Strasser “Mid-infrared surface transmitting and detecting quantum cascade device for gas-sensing,” Scientific reports 6 21795 (2016).

[14] M.Nikodem and Gerard Wysocki “A comprehensive review of one-dimensional metal-oxide nanostructure photodetectors.” Sensors, 9, 6504-6529 (2009).

[15] A. Kuze, H. Suto, M. Nakajima, and T. Hamazaki, “Thermal and near infrared sensor for carbon observation Fourier-transform spectrometer on the Greenhouse Gases Observing Satellite for greenhouse gases monitoring,” Applied Optics 48, 6716 (2009).

[16] M. W. Sigrist, R. Bartlome, D. Marinov, J. M. Rey, D. E. Vogler, and H. Wachter, “Trace gas monitoring with infrared laser-based detection schemes,” Applied Physics B-Lasers and Optics 90, 289 (2008).

[17] Ü.Sakoğlu, J. S.Tyo, M. M. Hayat, S.Raghavan, and S.Krishna, “Spectrally adaptive infrared photodetectors with bias-tunable quantum dots,” JOSA B 21, pp.7-17 (2004).

[18] E.Gaston, J. M. Frías, P.J. Cullen, C.P. O'Donnell and A.A. Gowen, “Prediction of polyphenol oxidase activity using visible near-infrared hyperspectral imaging on mushroom (Agaricus bisporus) caps,” Journal of agricultural and food chemistry 58, 6226-6233 (2010).

[19] S.L.Troyan, V.Kianzad, S.L. Gibbs-Strauss, S. Gioux, A.Matsui, R.Oketokoun, L.Ngo, A.

Khamene, F.Azar amd J.V. Frangioni, “The FLARE™ intraoperative near-infrared fluorescence imaging system: a first-in-human clinical trial in breast cancer sentinel lymph node mapping,”

Annals of surgical oncology 16, pp.2943-2952 (2009).

[20] S. Lee , W. Lim, D. Jo, J.Seok Jung, S. Kim, G. Jo, J.J Min, E. Y. Choi and H. Hyun,

“Near-infrared fluorescent sorbitol probe for tumor diagnosis in vivo,” Journal of Industrial and Engineering Chemistry 64, 80-84 (2018).

[21] S.Gioux, H.S.Choi, J.V. Frangioni “The clinical use of indocyanine green as a near‐infrared fluorescent contrast agent for image‐guided oncologic surgery,” Journal of surgical oncology 104, pp.323-332 (2011).

[22] A.L. Vahrmeijer, M.Hutteman, J.R. van der Vorst, C. J. H. van de Velde and J. V. Frangioni

“Image-guided cancer surgery using near-infrared fluorescence,” Nature reviews Clinical oncology10, 507 (2013).

[23] A. A. Gowen, C. P. O'Donnell, P. J. Cullen, G. Downey, and J. M. Frias, “Hyperspectral imaging–

an emerging process analytical tool for food quality and safety control,” Trends in Food Science & Technology 18, 590 (2007).

[24] J. V. Frangioni, “In vivo near-infrared fluorescence imaging,” Current Opinion in Chemical Biology 7, 626 (2003).

[25] R.H.Fowler, “The Analysis of Photoelectric Sensitivity Curves for Clean Metals at Various Temperatures,” Physical Review 38, pp.45-56 (1931).

[26] S. M. Sze, Physics of Semiconductor Devices (Wiley, New York, 1981).

[27] C.Scales,I.Breukelaar, and P.Berini “Surface-plasmon Schottky contact detector based on a symmetric metal stripe in silicon,” Opt.Letter 35, pp. 529–531 (2009)

[28] M.Kimata, T.Ozeki,M.Nunoshita and S.Ito “PtSi Schottky-barrier infrared FPAs with CSD readout,” SPIE Proceedings 3179, pp. 212–223 (1997)

[29] M.Kimata, M.Ueno, H.Yagi, T. Shiraishi, M. Kawai,K. Endo, Y. Kosasayama, T.Sone,T.Ozeki, and N.Tsubouchi “PtSi Schottky-barrier infrared focal plane arrays,” Opto-Electronics Review 6, pp.

1–10 (1998)

[30] M.Casalino, L.Sirleto, L.Moretti, M.Gioffrè, G.Coppola and I.Rendina, “Silicon resonant cavity enhanced photodetector based on the internal photoemission effectat 1.55 μm: Fabrication and characterization,” Applied Physics Letters 92, 251104 (2008).

[31] M.Casalino, L.Sirleto, L.Moretti and I.Rendina, “A silicon compatible resonant cavity enhanced photodetector working at 1.55 μm,” Semicond. Sci. Technol.23, pp. 075001 (2008).

[32] M.Casalino, L.Sirleto, M.Iodice, N.Saffioti, M.Gioffrè, I. Rendina and G. Coppola, “Cu/p-Si Schottky barrier-based near infrared photodetector integrated with a silicon-on-insulator waveguide” Applied Physics Letters 96, 241112 (2010).

[33] S.Zhu, S., M.B.Yu, G.Q.Lo and D.L. Kwong, “Near-infrared waveguide-based nickel silicide Schottky-barrier photodetector for optical communications” Applied Physics Letters 92, 081103 (2008).

[34] A. Akbari and P. Berini, “Schottky contact surface-plasmon detector integrated with an asymmetric metal stripe waveguide” Applied Physics Letters 95, 021104 (2009).

[35] A. Akbari, R.N. Tait and P. Berini, “Surface plasmon waveguide Schottky detector,” Optics Express 18, pp. 8505- 8514 (2010)

[36] I. Goykhman, B.Desiatov, J.Khurgin, J.Shappir and U.Levy, “Locally Oxidized Silicon Surface-Plasmon Schottky Detector for Telecom Regime,” NanoLetter 11, pp. 2219–2224(2011).

[37] M. W. Knight, H. Sobhani, P. Nordlander, and N. J. Halas, “Photodetection with Active Optical Antennas,” Science 332, pp. 702-704 (2011)

[38] A. Sobhani, M. W. Knight, Y. Wang, B. Zheng, N. S. King, L. V. Brown, Z. Fang, P.

Nordlander, and N. J. Halas,“Narrowband photodetection in the near-infrared with a plasmon-induced hot electron device,”Nature Communications, Vol. 4, Art. No. 1643 (2013) [39] T. Aihara, K. Nakagawa, M. Fukuhara, Y. L. Yu, K. Yamaguchi, and M. Fukuda, “Optical

frequency signal detection through surface plasmon polaritons,” Applied Physics Letters 99, 043111 (2011)

[40] W. J. Chen, T. Kan, Y. Ajiki, K. Matsumoto, and I. Shimoyama, “NIR spectrometer using a Schottky photodetector enhanced by grating-based SPR,” Optics Express 24, pp.

25797-25804 (2016)

[41] M. W. Knight, Y. M. Wang, A. S. Urban, A. Sobhani, B. Y. Zheng, P. Nordlander, and N. J. Halas,

“Embedding plasmonic nanostructure diodes enhances hot electron emission,” Nano Letters 13, 1687 (2013).

[42] M. Fukuda, T. Aihara, K. Yamaguchi, Y. Y. Ling, K. Miyaji, and M. Tohyama, “Light detection enhanced by surface plasmon resonance in metal film,” Applied Physics Letters 96, 15 (2010).

[43] T. P. White and K. R. Catchpole, “Plasmon-enhanced internal photoemission for photovoltaics: theoretical efficiency limits,” Applied Physics Letters 101, 4 (2012).

[44] M. A. Nazirzadeh, F. B. Atar, B. B. Turgut, and A. K. Okyay, “Random sized plasmonic nanoantennas on Silicon for low-cost broad-band near-infrared photodetection,” Scientific Reports 4, 5 (2014).

[45] J. Bingi and V. M. Murukeshan, “Plasmonic nanopillar coupled two-dimensional random medium for broadband light trapping and harvesting,”Journal of Nanophotonics 9 (2015).

[46] W.L.Barnes,A.Dereux, T.W.Ebbesen, “Surface Plasmon subwavelength optics,” Nature 424,pp 824-830(2003)

[47] W.Su,G.Zheng, and X.Li, “Design of a highly sensitive surface plasmon resonance sensor using aluminum-based diffractiongrating,” Optics Communications 285,pp.4603–4607(2012)

[48] S. R. J. Brueck, V. Diadiuk, T. Jones, and W. Lenth, “Enhanced quantum efficiency internal photoemission detectors by grating coupling to surface plasma waves,” Applied Physics letters 46, pp.915-917(1985)

[49] O.Kudoh, K.Uda, Y.Ikushima, and M. Kamoshida, “Impurity Profiles within a Shallow p‐n Junction by a New Differential Spreading Resistance Method,” Journal of The Electrochemical Society123, pp.1751-1754 (1976).

[50] T. Kan, K. Matsumoto, I. Shimoyama, “Tunable Gold-Coated Polymer Gratings for Surface Plasmon Resonance Coupling and Scanning,” J. Micromech. Microeng. 20, 085032 (2010) [51] A. D. Rakic´, A. B. Djurisˇic´, J. M. Elazar, and M. L. Majewski, “Optical properties of

metallic films for vertical-cavity optoelectronic devices,” Applied Optics 37, 5271 (1998) [52] S.R.Forrest, “Ultrathin organic films grown by organic molecular beam deposition and related

techniques,” Chemical reviews,97, 1793-1896 (1997)

[53] M. Hirade, H. Nakanotani, M. Yahiro, and C. Adachi, ACS Applied Materials & Interfaces 3, 80 (2011).

[54] S. K. Cheung and N. W. Cheung, Applied Physics Letters 49, 85 (1986).

[55] G. Schider, J. R. Krenn, A. Hohenau, H. Ditlbacher, A. Leitner, F. R. Aussenegg, W. L.

Schaich, I. Puscasu, B. Monacelli, and G. Boreman, Physical Review B 68, 155427 (2003).

[56] https://www.comsol.jp/

[57] M. A. Ordal, R. J. Bell, R. W. Alexander, L. L. Long, and M. R. Querry, Applied Optics 26, 744 (1987).

[58] http://www.mmc.or.jp/business/nmems/

[59] Y. Han, J. A. Huang, X. Y. Liu, X. J. Zhang, J. X. Shi, and C. C. Yan:

“Polarization-independent broadband plasmonic absorber based on a silicon-nanowire array decorated by gold nanoparticles at the optical regime”, Optics Express 24, pp. 9178-9186 (2016)

[60] G. J. Matt, T. Fromherz, M.Bednorz, S.Zamiri, G.Goncalves, C. Lungenschmied, D.Meissner,H.Sitter, N. S. Sariciftci, C. J. Brabec and G. Bauer, “Fullerene Sensitized Silicon for Near- to Mid-Infrared Light Detection,” Advanced Materials 22, pp. 647-650 (2010) [61] M. Riedl, Optical Design Fundamentals for Infrared Systems, Second Edition, SPIE Press,

Bellingham, WA (2001).

[62] https://www.silvaco.com/products/tcad.html

[63] J.M.Shannon, “CONTROL OF SCHOTTKY BARRIER HEIGHT USING HIGHLY DOPED SURFACE LAYERS,” Solid-State Electronics 19, pp. 537-543 (1976)

[64] C.R.Crowell, “RICHARDSON CONSTANT AND TUNNELING EFFECTIVE MASS FOR THERMIONIC AND THERMIONIC-FIELD EMISSION IN SCHOTTKY BARRIER DIODES,” Solid-State Electronics 12, pp. 55-59 (1968)

[65] G.P. Ru, R.L. Van Meirhaeghe, S. Forment, Y.L. Jiang,X.P. Qu, S. Zhu and B.Z. Li, “Voltage dependence of effective barrier height reduction in inhomogeneous Schottky diodes,” Solid-State Electronics 49, pp. 606-611 (2005)

[66] S.Asha,V.Singh, T.L.Bougher and B.A.Cola,“A carbon nanotube optical rectenna,”Nature Nanotechnology, Vol. 10, Art. No. 1027 (2015)

[67] https://www.hamamatsu.com/resources/pdf/ssd/s2506-02_etc_kpin1048j.pdf

[68] P. Schiebener, J. Straub, J. Sengers, and J. Gallagher, “Refractive index of water and steam as function of wavelength, temperature and density,” J. Phys. Chem. Ref. Data 19, pp. 677-717 (1990).

本論文に関係して出版した論文

[1] Yoshiharu Ajiki, Tetsuo Kan, Masayuki Yahiro, Akiko Hamada, Junji Adachi, Chihaya Adachi, Kiyoshi Matsumoto and Isao Shimoyama, “Silicon based near infrared photodetector using

self-assembled organic crystalline nano-pillars,” Applied Physics Letters, vol. 108, article no. 151102,

(2016) (査読付き学術論文、第3章に関連)(入学前出版)

[2] 安食嘉晴, 菅 哲朗、“Au/Siナノアンテナを用いた近赤外光シリコン光検出器”、電気学会

論文誌E(センサ・マイクロマシン部門誌), vol. 132, no. 11, pp. 387-392, (2017) (査読付き学術論文、第4 章に関連)(入学前出版)

[3] Yoshiharu Ajiki,Tetsuo Kan, Kiyoshi Matsumoto, and Isao Shimoyama, “Electrically Detectable SPR Sensor by Combining a Gold Grating and a Silicon Photodiode ” Applied Physics Express,vol.11, article no. 022001(2018)

(査読付き学術論文、第2章に関連)(入学後投稿・出版)

[4] Yoshiharu Ajiki, Tetsuo Kan, “Schottky barrier modulation for electronic shutter operation of Si based IR photodetector”, The18th International Conference on Nanotechnology (IEEE Nano),T33, Cork, Ireland, 23-26 ,July, 2018

(査読付き国際会議論文、第5章に関連)(入学後投稿・出版)

[5] Yoshiharu Ajiki, Tetsuo Kan, Masayuki Yahiro, Akiko Hamada, Junji Adachi, Chihaya Adachi, Kiyoshi Matsumoto and Isao Shimoyama, “Near infrared photo-detector using self-assembled formation of organic crystalline nanopillar arrays,” The 27th IEEE International Conference on Micro Electro Mechanical Systems (MEMS2014), San Francisco, USA, (2014 )

(査読付き国際会議論文、第3章に関連)(入学前出版)

[6] Yoshiharu Ajiki, Tetsuo Kan, Kiyoshi Matsumoto, and Isao Shimoyama, “SPR photo diode detector using transportation phenomenon of photon and electron coupling,” The 16th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers2011), Beijing, China, 5-9 ( 2011) (査読付き国際会議論文、第3章に関連)(入学前出版)

ドキュメント内 ナノアンテナ構造体を用いた (ページ 113-128)