ࡦ࠻ᚑ㐳ߒߚޕ X ✢ 2T-Z᷹ቯߢᓧࠄࠇࠆඨ୯

PHOTON ENERGY (eV) WAVELENGTH (nm)

P L I N T E N S IT Y ( a rb . u n its ) 400 350

InxGa1-xN x=

0.08 0.027 0.032 0.06

0.02 164meV

107meV 118meV 159meV 162meV FWHM 37meV 293KHe-Cd 325nm

450

GaN

2.8 3.0 3.2 3.4 3.6 2.6

0.14 310meV

࿑

4

m㕙

InGaN

ࠛࡇ࠲ࠠࠪࡖ࡞⭯⤑ߩ ቶ᷷PLࠬࡍࠢ࠻࡞

㪊㪅㩷⥄┙GaNၮ᧼਄߳ߩ㕖ᭂᕈm㕙InGaN⭯⤑ߩMOVPEᚑ㐳

㩷c㕙⊒శ⚛ሶߦ߅޿ߡಽᭂ㔚႐߇ユ኿ㆫ⒖⏕₸ࠍૐਅߐߖࠆ໧㗴ࠍ

1996

ᐕߦឭ⿠ߒߚᚒޘߪޔa,m㕙╬

ߩ㕖ᭂᕈ㕙߳ߩ⚿᥏ᚑ㐳ߣ᧚ᢱ⹏ଔࠍⴕߞߡ߈ߡ޿ࠆޕᧄᐕߪޔૐォ૏ኒᐲ⥄┙cޔm㕙ၮ᧼߳᦭ᯏ㊄ ዻൻቇ᳇⋧ࠛࡇ࠲ࠠࠪ࡯㧔

MOVPE

㧕ᴺߦࠃࠅ

InGaN

⭯⤑ࠍᚑ㐳ߒޔ⚿᥏ᕈ߿⴫㕙ᒻᘒޔ

In

ߩขࠅㄟߺ ല₸ߩᄌൻ╬ࠍቯ㊂ൻߒߚޕ

GaN

ࡎࡕࠛࡇ࠲ࠠࠪࡖ࡞ጀߦᒁ߈⛯߈ᚑ㐳ߒߚ

200-300nm

⒟ᐲߩ

In

x

Ga

1-x

N

⭯⤑㧔

0.02

҅

x

҅

0.14

㧕ߪޔ଀ߣߒߡ

x=0.08

ߩ

⹜ᢱߩ

X

✢ㅒᩰሶⓨ㑆ࡑ࠶ࡇࡦ᷹ࠣቯ⚿ᨐࠍ

࿑

3(a),

࿑

3(b)

ߦ␜ߔࠃ߁ߦޔ

GaN

ߦࠦࡅ࡯࡟

ߘߎߢޔᵄ㐳POߣPOߢ⊒ᝄ

ߔࠆO㕙.&࠙ࠚࡂߩశቇ೑ᓧ․ᕈߩ 㕙ౝ⇣ᣇᕈࠍ᷹ቯߒߚޕ଀߃߫ޔ POߩ.&࠙ࠚࡂߢߪޔ࿑

5(a),

࿑

5(b)

ߦ␜ߔࠃ߁ߦޔCゲࠬ࠻࡜ࠗࡊߩᣇ߇ 㨏ゲࠬ࠻࡜ࠗࡊࠃࠅ߽㨪OG8⒟

㜞ࠛࡀ࡞ࠡ࡯஥ߦ⊒శ߇᷹ⷰߐࠇߚޕ

߹ߚޔ࿑

5(c)

ߦ␜ߔࠃ߁ߦޔ⺃ዉ᡼

಴ߔࠆߒ߈޿ࡄࡢ࡯ኒᐲ㧔2_VJ㧕߇ޔC ゲࠬ࠻࡜ࠗࡊߩᣇ߇㨏ゲࠬ࠻࡜ࠗࡊ ࠃࠅ߽⧯ᐓ㜞߆ߞߚޕ޿ߕࠇߩ㈩⟎

ߢ߽⊒శߪ6'஍ᵄߒߡ߅ࠅޔEゲࠬ࠻

࡜ࠗࡊߩ႐วߪ'ӆEޔCゲࠬ࠻࡜ࠗࡊ ߩ႐วߪ'Eߦ஍శߐࠇߡ޿ࠆߎߣ ߇ಽ߆ࠆޕฦޘߩࠬ࠻࡜ࠗࡊᣇะߢ ᱜ๧ߩ೑ᓧଥᢙࠍ᷹ቯߒߚߣߎࠈޔE

ࠬ࠻࡜ࠗࡊ㈩⟎ߢEOޔCࠬ࠻࡜ࠗ

ࡊ㈩⟎ߢEOߢ޽ࠅ೨⠪ߩᣇ߇ᄢ ߈ ߆ ߞ ߚ ޕ ᓧ ࠄ ࠇ ߚ ⚿ ᨐ ߪ ޔ ᱡ +P)C0)C039ߦ߅ߌࠆశቇㆫ⒖ㆬᛯ

ೣߦࠃࠅ⺑᣿ߢ߈ޔO㕙+P)C0.&ߢߪޔ Eゲߦᐔⴕߥ౒ᝄེࠍ૞⵾ߒߚ.&ߩ ᣇ߇Cゲߦᐔⴕߥ߽ߩࠃࠅ߽,_VJ߇ૐ

ᷫߔࠆߎߣࠍ␜ໂߒߚޕ

3.0 3.2 3.4

//a-axis L=500Pm P=1.0MW/cm²

420 400 380 360

//c-axis

293K

WAVELENGTH (nm)

PHOTON ENERGY (eV)

ASE INTENSITY (arb. units)

0.02 1.0

0.006

10^-3 10^-2 10^-1 10⁰ //a-axis //c-axis

INTEGRATED INT. (arb. units)

EXCITATION POWER DENSITY (MW/cm²)

E=2.9 E=2.2

Iinteg㺘P

E

E₌₁ m-plane In_0.05Ga_0.95N / GaN

MQW LD

E//c

EAc cw surface PL (a)

(b) 0.67 (c) 0.320.4

0.060.2

0.430.65 0.27

0.020.1

GaN

Pth

3.0 3.2 3.4

//a-axis L=500Pm P=1.0MW/cm²

420 400 380 360

//c-axis

293K

WAVELENGTH (nm)

PHOTON ENERGY (eV)

ASE INTENSITY (arb. units)

0.02 1.0

0.006

10^-3 10^-2 10^-1 10⁰ //a-axis //c-axis

INTEGRATED INT. (arb. units)

EXCITATION POWER DENSITY (MW/cm²)

E=2.9 E=2.2

Iinteg㺘P

E

Iinteg㺘P

E

E₌₁ m-plane In_0.05Ga_0.95N / GaN

MQW LD

E//c

EAc cw surface PL (a)

(b) 0.67 (c) 0.320.4

0.060.2

0.430.65 0.27

0.020.1

GaN

Pth

࿑5

(a)(b)ᵄ㐳400nmߢ⊒ᝄߔࠆm㕙LD࠙ࠚࡂߩჇ᏷⥄ὼ᡼಴

㧔Amplified spontaneous emission: ASE㧕ࠬࡍࠢ࠻࡞ߣ(c)Ⓧಽ ᒝᐲߩബ⿠ࡄࡢ࡯ኒᐲ㧔P㧕ଐሽᕈ

䇼⎇ⓥᵴേႎ๔䇽㩷 㩷 㩷 㩷 㩷 ⴫⇇㕙෻ᔕ೙ᓮ䊶ၮ᧼૞⵾⎇ⓥㇱ㩷

䋨

2008

䋮

1

䌾㪉㪇㪇㪏䋮

12

䋩㩷

ᢎ ᝼㩷 㪑㩷 ⑔ጊඳਯ㩷 ಎ ᢎ ᝼㩷 㪑㩷 ᄢႦ㩷 ⺈㩷 ഥ ᢎ㩷 㪑㩷 ዊ⇗⑲๺㩷 㪡 㪪 㪧 㪪 ⎇ ⓥ ຬ㩷 䋺㩷 㪱㪸㪿㫉㪸㩷㪭㪸㫊㪿㪸㪼㫀㩷

↥ቇቭㅪ៤⎇ⓥຬ㩷 䋺㩷 㪟㫆㫊㫊㪼㫀㫅㩷㪢㪿㫆㫊㫉㫆㪸㪹㪸㪻㫀㩷

౒ ห ⎇ ⓥ ຬ㩷 㪑㩷 ೨↰৻ᄦ㪃㩷 ᳰ↰㩷 ᅑ㩷 ቇ ㇱ ቇ ↢㩷 㪑㩷 ᾢ↰ᥓⴕ䋬᧖ᳯ৻ኼ㩷

㩷 㩷 㩷 㩷

⑔ጊ⎇ⓥቶ䈪䈲䋬ൻቇᾲജቇ䉕ቇℂ䈫䈜䉎㜞᷷ൻቇ෻ᔕ႐䈮䈍䈔䉎㊄ዻ䊶ήᯏ♽᧚ᢱ䈱ഃ⵾䈍䉋䈶᧚ᢱ 䊒䊨䉶䉲䊮䉫䈱ၮ⋚䈪䈅䉎㜞᷷Ⲣ૕䈱ᾲ‛ᕈ䈱ᣂ䈚䈇᷹ቯᴺ䈱㐿⊒䉕ⴕ䈦䈩䈇䉎䋮੹ᐕᐲ䈲䋬⓸ൻ䉝䊦䊚䊆䉡 䊛න⚿᥏⭯⤑䈱↢ᚑᯏ᭴䈱⸃᣿䉕ⴕ䈦䈢䋮䉁䈢䋬㕒⏛႐䉕㊀⇥䈚䈢㔚⏛ᶋㆆᴺ䉕㜞᷷Ⲣ૕䈱ᾲ‛ᕈ᷹ቯ䈣 䈔䈪䈲䈭䈒䊘䊷䊤䉴䉲䊥䉮䊮૞⵾䈱෻ᔕ႐䈫䈚䈩䉅ᔕ↪䈚䋬ဋ৻ᩭ↢ᚑ䈮䉋䉎᳇ᵃᚑ㐳䉕⹜䉂䈢䋮䉁䈢䋬⏛ᕈᒻ

⁁⸥ᙘว㊄⤑䈱૞⵾䈍䉋䈶 㪠㪫㪦 ਛ䈱䉟䊮䉳䉡䊛䈱૶↪㊂ૐᷫ䉕⋡⊛䈫䈜䉎⎇ⓥ䉕ⴕ䈦䈢䋮㪉㪇㪇㪏 ᐕ䈱⎇ⓥᵴ

േ䈲䋬એਅ䈱䉋䈉䈮᭎᜝䈘䉏䉎䋮㩷 㩷 㩷

㪈㪅㩷 㜞᷷ൻቇ෻ᔕ႐䉕↪䈇䈢AlNන⚿᥏ᚑ㐳䋨䉰䊐䉜䉟䉝⓸ൻᴺ䋩㩷

⓸ᰴ਎ઍ䈱శḮ䈫䈚䈩ᵈ⋡䈘䉏䉎⚡ᄖ⊒శ⚛ሶ䈲䋬᏷ᐢ䈇↪ㅜ䋨ⰯశἮ䈱ઍᦧ䋬㜞ኒᐲ DVD䋬↢ൻቇ↪

䊧䊷䉱䊷䋬శ⸅ᇦ䈮䉋䉎౏ኂ‛⾰䈱ಽ⸃䋬He-Cd 䊧䊷䉱䊷䉇᳓㌁Ἦ䈱ઍᦧ䋩䈏ᦼᓙ䈘䉏䈩䈇䉎䋮䈖䈱⚡ᄖ⊒

శ⚛ሶ䈲䋬䊪䉟䊄䉩䊞䉾䊒ඨዉ૕䈫๭䈳䉏䉎⓸ൻ‛䋨AlN 䉇 GaN䋩䉕ਥᚑಽ䈫䈜䉎ඨዉ૕䈎䉌䈭䉎䋮䈖䈱䉋䈉䈭

⚡ᄖ⊒శ⚛ሶ䈱⊒శല₸䉕㘧べ⊛䈮ᡷༀ䈜䉎ၮ᧼᧚ᢱ䈫䈚䈩න⚿᥏⓸ൻ䉝䊦䊚䊆䉡䊛䋨AlN䋩䈲ᦨㆡ䈪䈅䉍䋬

⃻࿷䋬࿖ౝᄖ䈪ỗ䈚䈇㐿⊒┹੎䈮ᤴ䈘䉏䈩䈇䉎䋮ᒰ⎇ⓥቶ䈪䈲䋬㜞᷷䈮䈍䈔䉎 㪘㫃㪥㪄㪘㫃_㪉㪦_㪊㪄㪚㪄㪚㪦㪄㪥_㪉♽⋧቟

ቯ࿑䉕䊒䊨䉶䉴ේℂ䈫䈚䈩↪䈇䈢䉰䊐䉜䉟䉝⓸ൻᴺ䈮䉋䉎න⚿᥏ 㪘㫃㪥 ⭯⤑䈱૞⵾䉕ⴕ䈦䈩䈇䉎䋮䈖䈱⋧቟ቯ࿑

䉕↪䈇䈩ㆡಾ䈭෻ᔕ᧦ઙਅ䈪ᰴ䈱⓸ൻ෻ᔕ䋺㪘㫃_㪉㪦_㪊㩿㫊㪀㪂㪊㪚㩿㫊㪀㩷 㪂㪥_㪉㩿㪾㪀㪔㪉㪘㫃㪥㩿㫊㪀㪂㪊㪚㪦㩿㪾㪀䋬䉕ㅴⴕ䈘䈞䉎䈫䋬䉰䊐䉜 䉟䉝ၮ᧼䋨䌣㕙㩿㪇㪇㪇㪈㪀㕙䋩⴫㕙䈎䉌⓸ൻ䈏ㅴⴕ䈚䋬න⚿᥏ 㪘㫃㪥 ⭯⤑䉕ᓧ䉎䈖䈫䈏䈪䈐䉎䋮䈖䈱⭯⤑䈱ᢿ㕙ⷰኤ䈎䉌䋬 㪘㫃㪥 ⭯⤑䈱ਅㇱ䈮㐳ᣇᒻ䈱ⓨሹ䈏ᒻᚑ䈚䈩䈇䉎䈖䈫䈏ಽ䈎䈦䈢䋮䈖䈱䈖䈫䈎䉌䋬ᧄ⎇ⓥ䈮䈍䈔䉎⓸ൻ᧦ઙ䈪䈲䋬

࿑ 㪈 䈮␜䈜䉋䈉䈮䋬㪘㫃㪥㪆㪘㫃_㪉㪦_㪊⇇㕙䈎䉌 㪘㫃^㪊㪂䈍䉋䈶 㪦^㪉㪄䉟䉥䊮䈏 㪘㫃㪥 ⤑ౝ䉕ᄖᣇ᜛ᢔ䈚䋬㪘㫃_㪉㪦_㪊஥⇇㕙䈮 㪍 ⷺᒻ 䈱ⓨሹ䉕ᒻᚑ䈚䈢䉅䈱䈫⠨䈋䉌䉏䉎䋮䈖䈱䉋䈉䈮䋬䉰䊐䉜䉟䉝䈱⓸ൻ෻ᔕ䈲䋬㪘㫃㪥 ⤑ਛ䉕 㪘㫃^㪊㪂䈫 㪦^㪉㪄䈏ᄖᣇ᜛ᢔ䈜 䉎䈖䈫䈮䉋䈦䈩ㅴⴕ䈜䉎䋮䈖䉏䈮ၮ䈨䈐䋬㩿㪈㪀㪘㫃㪥 ⤑ਛ䈱 㪘㫃^㪊㪂䈫 㪦^㪉㪄䉟䉥䊮䈱᜛ᢔ䋬䈠䈱⚿ᨐ↢䈛䈢䋨㪉䋩㪘㫃㪥㪆㪘㫃_㪉㪦_㪊

⇇㕙䈱ⓨሹ↢ᚑ䈮䉋䉎⇇㕙Ⓧ䈱ᷫዋ䋬䉁䈢หᤨ䈮⿠䈖䉎䋬㩿㪊㪀㪘㫃㪥 ⴫㕙䈎䉌 㪘㫃㪥 䈱ᾲಽ⸃䋬䈫䈇䈉 㪊 䈧䈱⃻⽎䉕

⠨ᘦ䈚䈢 㪘㫃㪥 ⤑ᚑ㐳䊝䊂䊦䉕᭴▽䈚䈢䋮㩷

Al

₂

O

₃

AlN N

₂

-CO

Al

₂

O

₃

AlN

^2Al3+3O

2-N

₂

-CO

2Al³⁺ 3O

2-Al

₂

O

₃

AlN

^2Al

3+ 3O

2-N

₂

-CO

Al

₂

O

₃

AlN N

₂

-CO

Al

₂

O

₃

AlN

^2Al3+3O

2-N

₂

-CO

Al

₂

O

₃

AlN

^2Al3+3O

2-N

₂

-CO

2Al³⁺ 3O

2-Al

₂

O

₃

AlN

^2Al

3+ 3O

2-N

₂

-CO

Al

₂

O

₃

AlN

^2Al

3+ 3O

2-N

₂

-CO

㩷

࿑ 㪈㩷 䉰䊐䉜䉟䉝⓸ൻ䊝䊂䊦㩷

㪉㪅㩷 㕒⏛႐䈫㔚⏛ᶋㆆ䈫䊧䊷䉱䊷๟ᦼടᾲᴺ䉕⚵䉂ว䉒䈞䈢㊄ዻⲢ૕䈱ᣂ䈚䈇ᾲ‛ᕈ᷹ቯᴺ䈱㐿⊒㩷

㩷 ඨዉ૕䈱න⚿᥏⵾ㅧ䊒䊨䉶䉴䋬⿥⠴ᾲว㊄䈱♖ኒ㍌ㅧ䈅䉎䈇䈲ṁធಽ㊁䈭䈬㜞᷷䈎䈧ൻቇᵴᕈ䈭Ⲣ૕䈏 㑐ਈ䈜䉎㜞ઃടଔ୯⚛᧚⵾ㅧ䊒䊨䉶䉴䈮䈫䈦䈩䊒䊨䉶䉴䉲䊚䊠䊧䊷䉲䊢䊮䈱♖ᐲ䉕Ꮐฝ䈜䉎ᾲ‛ᕈ䊂䊷䉺䉕ᢛ

஻䈜䉎䈖䈫䈏ᔅⷐ䈪䈅䉍䋬䈠䈱㜞♖ᐲ᷹ቯᴺ䈱㐿⊒䈲㊀ⷐ⺖㗴䈪䈅䉎䋮ᒰ⎇ⓥቶ䈏ਛᩭᯏ㑐䈫䈚䈩㐿⊒ਛ䈱 ᾲ‛ᕈ⸘᷹䉲䉴䊁䊛䋨JST㩷 వ┵⸘᷹ಽᨆᛛⴚ䊶ᯏེ㐿⊒੐ᬺ㩷 䇸㜞ᐲ䉅䈱䈨䈒䉍ᡰេ-⿥㜞᷷ᾲ‛ᕈ⸘᷹䉲䉴 䊁䊛䈱㐿⊒䇹㩷 䋩䈲䋬㔚⏛ᶋㆆᴺ䈮㕒⏛႐䉕㊀⇥䈜䉎䈖䈫䈮䉋䈦䈩䋬ᶋㆆ䈜䉎㜞᷷Ⲣ૕䈱ᝄേ䈫ኻᵹ䉕ᛥ೙䊶೙

ᓮ䈚䋬Ⲣ૕䈱ᾲવዉ₸䋬Ყᾲ䋬᡼኿₸䋬⴫㕙ᒛജ䋬ኒᐲ䉕㜞♖ᐲ䈮᷹ቯ䈜䉎䉅䈱䈪䋬⚛᧚↥ᬺ䈻䈱⽸₂䈫ห

ᤨ䈮㜞᷷Ⲣ૕䈱‛ℂ䈻䈱ᣂ䈚䈇ᚺ䉕㐿䈔䉎䉅䈱䈪䈅䉎䋮ඨዉ૕෸䈶㊄ዻ䊶ว㊄╬䈱Ⲣ૕䉕㜞๟ᵄ䉮䉟䊦ౝ䈪 㔚⏛ᶋㆆ䈘䈞䉎䈫䋬ᶧṢ䈮䈲ኻᵹ䋨ᶋജኻᵹ䊶䊙䊤䊮䉯䊆ኻᵹ䊶㔚⏛ᵹ૕ജቇ⊛ኻᵹ䈱ⶄวᵹ䋩䈏ሽ࿷䈜䉎䋮䈖 䈱ᶧṢ䈮䈘䉌䈮ᢙ䊁䉴䊤䈱㕒⏛႐䉕㊀⇥䈜䉎䈫ᶧṢ䈮䊨䊷䊧䊮䉿ജ䈏૞↪䈚䋬ᝄേ䉇ኻᵹ䈏ᛥ೙䈘䉏䉎䋮ᧄ⎇

ⓥ㐿⊒䈪䈲䋬ᦨᄢ 㪈㪇㩷㪫 䈱㕒⏛႐䉕ශട䈜䉎䈖䈫䈏䈪䈐䉎⿥વዉ⏛⍹ౝ䈪ᝄേ䈫ኻᵹ䉕೙ᓮ䈚䈢ᶧṢ䈮ኻ䈚ฦ

⒳䈱ᾲ‛ᕈ䉕⸘᷹䈜䉎䉲䉴䊁䊛䉕᭴▽䈜䉎䈖䈫䉕ᦨ⚳⊛䈭⋡⊛䈫䈚䈩䈇䉎䋮੹ᐕᐲ䈲䋬᷷ᐲ᷹ቯ䈮㑐䈚䋬㩿㪈㪀න

⦡᡼኿᷷ᐲ⸘䉕↪䈇䈢᷷ᐲ᷹ቯ䉕ⴕ䈇 㪧㫃㪸㫅㪺㫂 䈱ᑼ䈮ᓥ䈦䈢᷷ᐲ⵬ᱜ䉕ⴕ䈉䋬㩿㪉㪀ടᾲ䊧䊷䉱䊷䈱ᵄ㐳䈫ᐓᷤ

䈚䈭䈇᷹ቯᵄ㐳䉕᦭䈜䉎᡼኿᷷ᐲ⸘䈪᷹ቯ䉕ⴕ䈉䋬㩿㪊㪀᷷ᐲ᷹ቯ▸࿐䉕ㆡಾ䈮⸳ቯ䈜䉎䈖䈫䈮䉋䉍᡼኿᷷ᐲ⸘

䈱᷷ᐲಽ⸃⢻䉕䈅䈕䉎䋬㩿㪋㪀๟ᵄᢙ․ᕈಽᨆེ䉕↪䈇䈩᷷ᐲᝄ᏷䈫૏⋧Ꮕ䉕䈠䈱႐᷹ቯ䈜䉎䋬╬䈱ᡷ⦟䉕ⴕ䈉 䈖䈫䈪䉲䊥䉮䊮Ⲣ૕䈱ᾲኈ㊂䈍䉋䈶ᾲવዉ₸䈱᷹ቯ♖ᐲ䉕㘧べ⊛䈮ะ਄䈘䈞䉎੐䈮ᚑഞ䈚䈢䋮

㪊㪅㩷 㕒⏛႐䉕㊀⇥䈚䈢㔚⏛ᶋㆆᴺ䈮䉋䉎᳇ᵃಽᢔဳ䊘䊷䊤䉴䉲䊥䉮䊮䈱૞⵾

㩷 䈇䉒䉉䉎䊨䊷䉺䉴ဳ䊘䊷䊤䉴䉲䊥䉮䊮䈲䋬Ⲣ૕䈫࿕૕䈱䉧䉴䈱ṁ⸃ᐲᏅ䈮䉋䈦䈩↢䈛䈢᳇ᵃ䈏䋬㍌ဳౝ䈪䈱৻

ᣇะಝ࿕䈮䉋䉍䋬ಝ࿕ᣇะ䈻㐳䈒િ䈶䉎䈖䈫䈮䉋䈦䈩䊧䊮䉮䊮⁁䈱ⓨሹ䉕ᒻᚑ䈚䈢䉅䈱䈪䈅䉎䋮ᧄ⎇ⓥ䈪䈲䋬㔚

⏛ᶋㆆᴺ䉕↪䈇䈩䉲䊥䉮䊮ᶧṢ䉕㕖ធ⸅䈮଻ᜬ䈚䋬䈘䉌䈮㕒⏛႐䉕㊀⇥䈜䉎䈖䈫䈪ᶧṢౝㇱ䈱ᵹ䉏䉕ᛥ೙䈚䈢

⁁ᘒ䈎䉌䈱᳇ᵃᒻᚑ䉕⹜䉂䈢䋮࿑

2

䈲

0.1MPa

䈱

H

2䉧䉴䈫ᐔⴧ䈜䉎䉲䊥䉮䊮ਛ䈱᳓⚛ṁ⸃ᐲ䈱᷷ᐲଐሽᕈ䉕

␜䈚䈢䉅䈱䈪䈅䉎䋮ᧄታ㛎ᚻᴺ䈪䈲䋬ㆊ಄ළ䉲䊥䉮䊮Ⲣ૕䉕ኈᤃ䈮ᓧ䉎䈖䈫䈏䈪䈐䉎䈱䈪䋬⿒⎕✢䈪࿐䈦䈢ㆊ಄

ළ㗔ၞ䈱ㆊ㘻๺ᐲ䉕೑↪䈚䈢᳇ᵃ↢ᚑ䊒䊨䉶䉴䉕⠨᩺䈚䈩⹜ⴕ䈚䈢䋮䈠䈱⚿ᨐ䋬

50%H

2

-Ar

㔓࿐᳇䈪䉲䊥䉮䊮 䉕ṁ⸃䊶଻ᜬᓟ䈮䋬ᓢ಄䈚䈢႐ว䈲ᄢ䈐䈭ਛⓨᒻ⁁䈱䉲䊥䉮䊮䈏ᓧ䉌䉏䈢䈱䈮ኻ䈚䋬

100K

ㆊ಄ළᓟ䈮ᕆ಄䈚 䈢႐ว䈮䈲䋬࿑

3

䈮␜䈜䉋䈉䈮ᓸ⚦䈭᳇ᵃ䈏ಽᢔ䈚䈢䊘䊷䊤䉴䉲䊥䉮䊮䉕ᓧ䉎䈖䈫䈏䈪䈐䈢䋮ᧄ⎇ⓥ䈱ᚻᴺ䉕↪

䈇䉏䈳䋬䊨䊷䉺䉴ဳ䈪䈲䈭䈇᳇ᵃಽᢔဳ䈱䊘䊷䊤䉴䉲䊥䉮䊮䉕ᓧ䉎䈖䈫䈏䈪䈐䉎䈖䈫䈏ಽ䈎䉎䋮᳇ᵃ䈱ᚑ㐳䈲䋬 ㆊ಄ළᐲ䈫಄ළㅦᐲ䈮ᄢ䈐䈒ଐሽ䈜䉎䉅䈱䈫⠨䈋䉌䉏䉎䋮੹ᓟ䋬䈘䉌䈮ㆊ಄ළᐲ䉕ᄌ䈋䈩᳇ᵃ䈱↢ᚑᯏ᭴䈮䈧 䈇䈩⹦⚦䈮ᬌ⸛䈜䉎੍ቯ䈪䈅䉎

.

ㆊ಄ළ㗔ၞ䈱 ㆊ㘻๺ᐲ䉕೑↪

ㆊ಄ළ㗔ၞ䈱 ㆊ㘻๺ᐲ䉕೑↪

ㆊ಄ළ㗔ၞ䈱 ㆊ㘻๺ᐲ䉕೑↪

㩷

㩷 㩷 㩷 㩷 ࿑

2㩷 H

2䉧䉴䋨0.1MPa䋩䈫ᐔⴧ䈜䉎䉲䊥䉮䊮ਛ䈱㩷 㩷 㩷 㩷 㩷 㩷 㩷 㩷 㩷 㩷 ࿑

3㩷 ᳇ᵃಽᢔဳ䊘䊷䊤䉴䉲䊥䉮䊮

㩷 㩷 㩷 㩷 㩷 㩷 㩷 ᳓⚛ṁ⸃ᐲ䈱᷷ᐲଐሽᕈ㩷 㩷 㩷 㩷 㩷 㩷 㩷 㩷 㩷 㩷 㩷 㩷 㩷 㩷 㩷 㩷 㩷 㩷 㩷 㩷 㩷 㩷 䋨100Kㆊ಄ළᓟ䈮ᕆ಄䈚䈢႐ว䋩

0 100 200 300 400 0

20 40 60

Temperature, T / K

Magnetization, M / emu࡮g-1

0.05 T 4 T

1073 K-3.6 ks

࿑4 Ni44.7

Co

7.4

Mn

39.1

Sn

8.8ว㊄⤑

ߩᾲ⏛ൻᦛ✢㧚 4.㩷Ni-Co-Mn-Sn䊜䉺⏛ᕈᒻ⁁⸥ᙘว㊄䈱⭯⤑ൻ䈫⏛᳇․ᕈ䈱⹏ଔ

Ni-Mn-X (X = In, Sn, Sb)

♽ᒻ⁁⸥ᙘว㊄䈲䋬ᒝ⏛ᕈ䉥䊷䉴䊁䊅䉟䊃⋧䈎䉌䊐䉢䊥⏛ᕈ䈅䉎䈇䈲෻ᒝ⏛ᕈ䊙 䊦䊁䊮䉰䉟䊃⋧䈻ᄌᘒ䈜䉎䈢䉄䋬⏛႐ශട䈮઻䈉ㅒᄌᘒ䉕೑↪䈚䈢ᒻ⁁⸥ᙘലᨐ䋨䊜䉺⏛ᕈᒻ⁁⸥ᙘലᨐ䋩䈏 ᦼᓙ䈘䉏䉎䋮ᧄ⎇ⓥ䈪䈲䋬

Ni-Co-Mn-Sn

䊜䉺⏛ᕈᒻ⁁⸥ᙘว㊄䉕⭯⤑

ൻ䈚䋬䈠䈱⏛᳇․ᕈ䉕⺞ᩏ䈚䈢䋮૞⵾䈘䉏䈢

Ni

44.7

Co

7.4

Mn

39.1

Sn

8.8ว㊄ 䉴䊌䉾䉺⤑䈲䋬

873 ~ 1273 K

䈪

3.6 ks

㑆䈱ᾲಣℂ䈏ᣉ䈘䉏䈢䋮

X

✢᭴

ㅧ⸃ᨆ䉋䉍䋬ᧂᾲಣℂ⤑䈪䈲㕖᥏⾰᭴ㅧ䉕␜䈚䋬

973 K

એ਄䈱ᾲಣℂ

䈪䈲

Heusler

᭴ㅧ䉕᦭䈜䉎⚿᥏⾰䈫䈭䉍䋬

1073 K

એ਄䈪䈲䊙䊦䊁䊮䉰

䉟䊃᭴ㅧ䉅⏕⹺䈘䉏䈢䋮

1073 K

䈱ᾲಣℂ⤑䈮䈍䈔䉎ᾲ⏛ൻᦛ✢䉕࿑4

䈮␜䈜䋮

0.05 T

䈱ૐ⏛႐䈪䈲䋬䊙䊦䊁䊮䉰䉟䊃ᄌᘒ㐿ᆎ᷷ᐲ䋨M_s䋩䈲

308 K

䋬䉨䊠䊥䊷᷷ᐲ䋨T_C䋩䈲

380 K

䈪䈅䈦䈢䋮䉁䈢䋬

4 T

䈱⏛႐ශട䈮઻

䈇M_s᷷ᐲ䈏

20 K

⒟ᐲૐਅ䈜䉎䈖䈫䈏䉒䈎䈦䈢䋮

5.㩷 ᒝ⏛ᕈᒻ⁁⸥ᙘว㊄Ni-Mn-Ga䉴䊌䉾䉺⤑䉕↪䈇䈢䋲ᰴరశቇ䉴䉨䊞䊅䈱㐿⊒

Ni

2

MnGa

ว㊄䈲ᒝ⏛ᕈ䈫ᒻ⁁⸥ᙘലᨐ䈱

2

䈧䈱ᯏ⢻䉕᦭䈚䋬⭯⤑ൻ䈮䉋䉍䊙䉟䉪䊨䊙䉲䊮↪䉝䉪䉼䊠䉣䊷䉺

᧚ᢱ䈻䈱ᔕ↪䈏ᦼᓙ䈘䉏䉎䋮ᒰ⎇ⓥ䉫䊦䊷䊒䈪䈲䋬

Ni-Mn-Ga

ว㊄䉴䊌䉾䉺⤑䉕૞⵾䈚䋬᷷ᐲ䈍䉋䈶⏛႐ᄌൻ 䈮઻䈉ᒻ⁁⸥ᙘലᨐ䈱⊒⃻䉕ႎ๔䈚䈩䈇䉎䋮ᧄ⎇ⓥ䈪䈲䋬ᧄว㊄⤑䉕೑↪䈚䈢

2

ᰴరశቇ䉴䉨䊞䊅䉕䉦䊷䊦䉴 䊦䊷䉣⎇ⓥ䉶䊮䉺䊷䋨䊄䉟䉿䋩䈫౒ห䈪㐿⊒䈚䋬䈠䈱േ૞․ᕈ䉕

⹏ଔ䈚䈢䋮శቇ䉴䉨䊞䊅䈲䋬ᐔⴕ䈮㈩⟎䈚䈢

2

ᨎ䈱䉮䈱ሼဳ䈱 ว㊄⤑䈫䋬䈠䈱వ┵ਛᄩㇱ䈮ขઃ䈔䈢㏜䈎䉌䈭䉎䋨࿑ 5 (a)䋩䋮

᳗ਭ⏛⍹䈮䉋䉎⏛᳇ജ䈫䈠䉏䈮෻⊒䈜䉎ᒻ⁁࿁ᓳജ䈮䉋䉍૞

േ䈚䈢䋮⇣䈭䉎䊌䊦䉴㔚ᵹ䉕

2

ᨎ䈱ว㊄⤑䈮䈠䉏䈡䉏ශട䈚䈢 ႐ว䋬୘䇱䈱⤑䈲⇣䈭䉎േ䈐䉕␜䈚䋬

2

ᰴర⊛䈮శ䉕஍ะ䈘䈞 䉎䈖䈫䈏䈪䈐䈢䋨Fig. 2 (b)䋩䋮䉁䈢䋬

100 Hz

એਅ䈱๟ᵄᢙ䈪䈲䋬

60

㫦એ਄䈱ᄢ䈐䈭⿛ᩏⷺᐲ䉕␜䈜䈖䈫䈏䉒䈎䈦䈢䋮

6.㩷 䉮䊮䊎䊅䊃䊥䉝䊦䉴䊌䉾䉺ᴺ䈮䉋䉎TiᷝടITO⭯⤑䈱૞⵾

⃻ⴕ䈱䊐䊤䉾䊃䊌䊈䊦䊂䉞䉴䊒䊧䉟䋨

FPD

䋩↪

ITO

䉺䊷䉭䉾䊃䈲ዉ㔚ᕈ䋬శㅘㆊᕈ䋬䉣䉾䉼䊮䉫․ᕈ䈎䉌

In

2

O

3

- 10 mass%SnO

2䈏ਥ䈮೑↪䈘䉏䈩䈇䉎䋮

ITO

⵾ㅧ䈮䈍䈔䉎

In

૶↪ේන૏䉕ૐᷫ䈜䉎䈮䈲䋬

In

2

O

3㊂䉕ૐᷫ䈚䈩 䉅ᓥ᧪䈫ห╬䈱․ᕈ䉕⛽ᜬ䈜䉎ᣂⷙ⚵ᚑ䈱㐿⊒䈏ᔅⷐ䈪䈅䉎䋮ᧄ⎇ⓥ䈪䈲䋬䉮䊮䊎䊅䊃䊥䉝䊦䉴䊌䉾䉺ᴺ䈮䉋䉍

௑ᢳ⚵ᚑ䉕᦭䈜䉎

Ti

ᷝട

ITO

⭯⤑䉕૞⵾䈚䈢䋮

Ti

ᷝട

ITO

⭯⤑䈲䋬

ITO (In

2

O

3

- 10 mass% SnO

2

)

䈍䉋䈶⚐

Ti

䉺䊷䉭䉾䊃䉕หᤨ䈮䉴䊌䉾䉺䈚䈩䋬䉧䊤䉴ၮ᧼਄䈮ᚑ⤑䈘䉏䈢䋮䉴䊌䉾䉺䉧䉴䈮䈲䉝䊦䉯䊮㵥㉄⚛ᷙว䉧䉴䉕↪

䈇䋬䈠䈱ᵹ㊂Ყ

(Q(Ar)/Q(O

2

))

䉕

50/(0 ~ 0.3)

䈫ᄌൻ䈘䈞䈢䋮Q(Ar)/Q(O₂

) = 50/0

䈱⭯⤑䈲Ớ䈇Ἧ⦡䉕๒䈚䈢䋮 䈖䉏䈲䋬㉄⚛䈫䈱ⷫ๺ജ䈏ᒝ䈇

Ti

䈮䉋䉍

ITO

䈱৻ㇱ䈏ㆶర䈘䉏䋬㤥⦡䈱ૐ⚖㉄ൻ‛䈏↢ᚑ䈚䈢䈢䉄䈫⠨䈋䉌 䉏䉎䋮䉁䈢䋬㉄⚛ᷝട䈮઻䈇⦡๧䈏⭯䈒䈭䈦䈢䋮

Ti

ᷝട㊂䈱ዋ䈭䈇႐ว䈮䈲䋬ዉ㔚₸䈏Q(Ar)/Q(O2

) = 50/0.2

䈪㜞䈒䈭䉍䋬

Ti

ᷝട㊂䈱ᄙ䈇႐ว䈪䈲Q(O2

)

䈱Ⴧട䈮઻䈇ᄢ䈐䈒ૐਅ䈜䉎䈖䈫䈏䉒䈎䈦䈢䋮

࿑5 (a) Ni-Mn-Ga⤑ࠍ↪޿ߚ

2

ᰴరశቇ

ࠬࠠࡖ࠽ߣ

(b)

࡟࡯ࠩ࡯శߩ゠〔㧚 2 mm

(a)

22°

60°

(b)

ޣ⎇ⓥᵴേႎ๔ޤ ᦭ᯏ䊅䊉⚿᥏⑼ቇᛛⴚ㩷 ነ㒝⎇ⓥㇱ㐷

䋨㪉㪇㪇㪏㪅㪈ޯ㪉㪇㪇㪏㪅㪈㪉䋩ᴾ

ᢎ ᝼䋺ਛ⷏౎㇢㩷

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