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Production and Property of Functional Thin Films

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Academic year: 2023

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Research Contents

Production and Property of Functional Thin Films

We're studying about the various properties of the functional thin films like transparent conductive films and the ferromagnetic multilayer films. We produced these thin films by pulse electrodeposition method, sputtering method and vacuum evaporation.

Figure 1 shows a schematic diagram of the Co-Cu ferromagnetic multilayer film produced by pulse electrodeposition method.

Figure 2 shows the transparent conductive film produced by RF sputtering method.

We're possible to measure electric resistance and magnetic properties of these films at low temperature.

Available Facilities and Equipment RF sputter deposition system

VSM (Micro Sense) Cryostat

Production and Property of Functional Thin Films

Name HOGA Takeshi E-mail [email protected] Status Associate Professor

Affiliations IEICE (The Institute of Electronics, Information and Communication Engineers) and JIM (The Japan Institute of Metals and Materials)

Keywords Functional Thin Film,Electric Resistance,Magnetic Property

Technical Support Skills

・ Preparation of functional thin films

・ Electric resistance measurement of thin films at low temperature

・ Magnetic property measurement of thin films

Tsuruoka National College of Technology Department of Creative Engineering,Course of Electric and Electronic Engineering

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