イオンビーム分析概論（I）（HEIS，MEIS，LEIS）　第2回

ㅪタ㧔⻠⟵㧕

ࠗࠝࡦࡆ࡯ࡓಽᨆ᭎⺰㧔I㧕㧔HEIS, MEIS, LEIS㧕㧔╙ 2 ࿁㧕

╣Ꮉ ⮍* ࠦࡌ࡞ࠦ⑼⎇ ޥ651-2271 ␹ᚭᏒ⷏඙㜞Ⴆบ 1-5-5 *_{[email protected]} 㧔2007 ᐕ 5 ᦬ 28 ᣣฃℂ㧕 ࠗࠝࡦࡆ࡯ࡓಽᨆ᭎⺰㧔I㧕ߣߒߡ㧘ࠗࠝࡦᢔੂో⥸ߩ౉㐷⊛ߥౝኈࠍ⚫੺ߔࠆ㧚ࠗࠝࡦᢔੂಽ ᨆࠍℂ⸃ߔࠆߚ߼ߦᔅⷐߥ 5 ߟߩၮᧄ⊛ߥ᭎ᔨߩ߁ߜ߆ࠄ㧘ࠞࠗࡀࡑ࠹ࠖ࠶ࠢ࿃ሶ㧘ᢔੂᢿ㕙Ⓧ㧘 㒖ᱛ⢻㧘ࠛࡀ࡞ࠡ࡯ࠬ࠻࡜ࠣ࡝ࡦࠣ㧘ߦߟ޿ߡ╙৻࿁ࠃࠅ߽⹦⚦ߦ⺑᣿ߔࠆ㧚

Introduction to Ion Beam Analysis (I) (HEIS, MEIS, LEIS) (2)

K. Sasakawa*

Kobelco Research Institute, Inc., 1-5-5, Nishi-ku, Takatsukadai, Kobe, Hyogo 651-2271, Japan *_{[email protected]}

(Received: May 28, 2007)

As an introduction of the ion beam analysis, I will introduce the elementary aspects of ion scattering analysis method of HEIS, MEIS and LEIS. I will explain these four important concepts, kinematic factor, scattering cross section, stopping power, and energy struggling.

1. _ߪߓ߼ߦ

ㅪタߩ╙ 1 ࿁⋡ߪ㧘ᦨೋߦࠗࠝࡦࡆ࡯ࡓࠍ↪޿ߚ ฦ⒳ಽᨆᴺߩ↪⺆ߣ᭎⇛ࠍ◲නߦ⚫੺ߒߚ㧔ߎߎߢ㧘 MEIS ࠍ Middle Energy Ion Scattering ߣߒߚ߇㧘

Middle_{ߪᱴߤ૶ࠊࠇߡ޿ߥ޿ߩߢ Medium ߦ⸓ᱜߔ} ࠆ㧚㧕㧚ߘߩ޽ߣ㧘ࠗࠝࡦᢔੂಽᨆߩ‛ℂ⊛ߥၮ␆ߣ ߥࠆ᭎ᔨࠍ◲නߦ⺑᣿ߒߚ߇㧘ᧄㅪタߩડ↹ߩᗧ࿑ ߢ޽ࠆ㧘ޟೋᔃ⠪ߦ߽ࠊ߆ࠆޠ㧘ޟᢎ⑼ᦠߦタߞߡ޿ߥ ޿ޠ㧘ߣ޿߁ౝኈߦߪ߶ߤ㆙ߊ㧘ᢿ ⊛ߥ⸥ㅀߦߥߞ ߡ޿ߚࠃ߁ߢ޽ࠆ㧚 ߘߎߢ㧘ࠗࠝࡦᢔੂಽᨆߩၮᧄ᭎ᔨࠍ㧘ౣᐲ㧘╙ 2࿁ߣ╙ 3 ࿁ߦಽߌߡࠊ߆ࠅ߿ߔߊ⹦⚦ߦ⺑᣿ߔࠆ ߎߣߦߔࠆ㧚╙ 2 ࿁ߢߪࠞࠗࡀࡑ࠹ࠖ࠶ࠢ࿃ሶ 㧔Kinematic Factor ߪ᳿߹ߞߚᣣᧄ⺆⸶߇ήߊ㧘╙ 1 ࿁ߢߪᒢᕈᢔੂ࿃ሶߣ⸶ߒߚ߇㧘Ḱ᜚ߔߴ߈߽ߩ߇ ⷗ᒰߚࠄߥ޿ߩߢ Kinematic ߩࠞ࠲ࠞ࠽⴫⸥ߣ Factor _{ߩ๺⸶ߢ޽ࠆ࿃ሶࠍวࠊߖߚࠞࠗࡀࡑ࠹ࠖ࠶} ࠢ࿃ሶߦᄌᦝߔࠆ㧚෻〡ߩ Kinematic Factor ߪ෻〡ᢔ ੂ࿃ሶߣ⸶ߒߚ߇㧘ߎࠇߪ෻〡ߩࠞࠗࡀࡑ࠹ࠖ࠶ࠢ ࿃ሶߦᄌᦝߔࠆ㧚㧕ߣᢔੂᢿ㕙Ⓧߣ㒖ᱛ⢻ࠍਛᔃߦ㧘 ╙ 3 ࿁ߢߪ㒖ᱛ⢻ߩℂ⺰ߣࠛࡀ࡞ࠡ࡯ࠬ࠻࡜ࠣ࡝ࡦ ࠣߣ࠴ࡖࡀ࡝ࡦࠣࠍਛᔃߦ⸃⺑ߔࠆ㧚ߥ߅㧘⺑᣿ߩ ㇺว਄㧘╙ 1 ࿁ߩၮᧄ᭎ᔨߩ⺑᣿߅ࠃ߮ Q&A ߢ㊀ ⷐߣᕁࠊࠇࠆౝኈߦߟ޿ߡߪ㧘ߘߩ߹߹㧘߽ߒߊߪ ୃᱜߒߡ૶↪ߔࠆ㧚 2. _{ࠗࠝࡦᢔੂಽᨆߩၮ␆} 2.1. ࠞࠗࡀࡑ࠹ࠖ࠶ࠢ࿃ሶ㧔Kinematic Factor㧕 ࠗࠝࡦᢔੂಽᨆߢߪ㧘ᢔੂߐࠇߚࠗࠝࡦߩㆇേࠛ ࡀ࡞ࠡ࡯߆ࠄ㧘ᮡ⊛ේሶߩ⒳㘃ࠍ್೎ߔࠆ㧚ߎߩᢔ ੂߐࠇߚࠗࠝࡦߩㆇേࠛࡀ࡞ࠡ࡯ߩᄢ߈ߐࠍ᳿߼ࠆ ߩ߇ࠞࠗࡀࡑ࠹ࠖ࠶ࠢ࿃ሶ K ߢ޽ࠆ㧚޿߹㧘࿑ 1 ߦ ␜ߔࠃ߁ߦ㧘ࠛࡀ࡞ࠡ࡯E0㧘⾰㊂ M1ߩ౉኿☸ሶ߇㧘 㕒ᱛߒߚ⾰㊂ M2ߩᮡ⊛ේሶߦⴣ⓭ߒ㧘ࠛࡀ࡞ࠡ࡯ E1ߢᢔੂⷺTᣇะߦᢔੂߐࠇ㧘⾰㊂ M2ߩᮡ⊛☸ሶ߇ ࠛࡀ࡞ࠡ࡯E2ߢ෻〡ⷺIᣇะߦ෻〡ߐࠇࠆ႐วࠍ⠨

߃ࠆ㧚 ᢔੂߐࠇߚ☸ሶߩㆇേࠛࡀ࡞ࠡ࡯E1ߪ㧘౉኿☸ሶ ߩㆇേࠛࡀ࡞ࠡ࡯E0ߣ⾰㊂ M1㧘ᮡ⊛ේሶߩ⾰㊂ M㧞 ߣᢔੂⷺT߆ࠄ㧘ㆇേࠛࡀ࡞ࠡ࡯ߣㆇേ㊂ߩ଻ሽೣߦ ࠃࠅ⸘▚ߔࠆߎߣ߇ߢ߈ࠆ㧚ᢔੂ☸ሶߩㆇേࠛࡀ࡞ ࠡ࡯E1ߩ౉኿☸ሶߩㆇേࠛࡀ࡞ࠡ࡯E0ߦኻߔࠆᲧ ߪࠞࠗࡀࡑ࠹ࠖ࠶ࠢ࿃ሶߣ๭߫ࠇ㧘ᰴᑼߢ޽ࠄࠊߐ ࠇࠆ[1]㧚





2 1 2 1 2 1 2 2 1 2 2 0 1 sin cos » » ¼ º « « ¬ ª    M M M M M E E K T T (1) ߎߩࠃ߁ߦ㧘ࠞࠗࡀࡑ࠹ࠖ࠶ࠢ࿃ሶߪ㧘ᾖ኿☸ሶߩ ⾰㊂ M1㧘ᮡ⊛ේሶߩ⾰㊂ M2㧘߅ࠃ߮ᢔੂⷺTߩ㑐ᢙ ߢ޽ࠆ㧚 ࠞࠗࡀࡑ࠹ࠖ࠶ࠢ࿃ሶࠍᮡ⊛ේሶߩ⾰㊂ߦኻߒߡ ࡊࡠ࠶࠻ߒߚ߽ߩࠍ࿑ 2 ߦ␜ߔ㧚౉኿ࠗࠝࡦߪ He ߢᢔੂⷺߪ 170qߣߒߚ㧚ࠞࠗࡀࡑ࠹ࠖ࠶ࠢ࿃ሶߪᮡ ⊛ේሶߩ⾰㊂ 5 ߢ┙ߜ਄߇ࠅ㧘න⺞ߦჇᄢߔࠆ㧚ߘ ߩᦛ✢ߩ௑߈ߪᮡ⊛ේሶߩ⾰㊂߇ᄢ߈ߊߥࠆߦߒߚ ߇ߞߡዊߐߊߥࠆߎߣ߇ࠊ߆ࠆ㧚ᦛ✢ߩ௑߈ߪ㧘ᮡ ⊛ේሶ⾰㊂ߦኻߔࠆࠞࠗࡀࡑ࠹ࠖ࠶ࠢ࿃ሶߩᄌൻ₸ ߢ޽ࠅ㧘⾰㊂߇ዊߐ޿㗔ၞߢᦛ✢ߩ௑߈߇ᄢ߈޿ߎ ߣ߆ࠄ㧘⾰㊂߇ዊߐ޿߶ߤ⾰㊂ߩ㆑޿ࠍ⼂೎ߒ߿ߔ ޿㧘ߔߥࠊߜర⚛ࠍ⼂೎ߒ߿ߔ޿ߎߣ߇ࠊ߆ࠆ㧚 ߘࠇߢߪ㧘ߤߩߊࠄ޿ߩ⾰㊂Ꮕ߹ߢ⷗ಽߌࠄࠇࠆ ߆ౕ૕⊛ߦ⺞ߴߡߺࠃ߁㧚RBS ߩౖဳ⊛ߥ᷹ቯ᧦ઙ㧘 ߔߥࠊߜ౉኿ࠗࠝࡦߪ He+_{㧘౉኿ࠛࡀ࡞ࠡ࡯ߪ 2} MeV㧘ᢔੂⷺߪ 170qߣߔࠆ㧚ߎߩ႐วߩ㧘ᢔੂࠗࠝ ࡦߩࠛࡀ࡞ࠡ࡯ߩᮡ⊛ේሶ⾰㊂ଐሽᕈߪ㧘࿑ 2 ߣᒻ ⁁ߪหߓߢ❑ゲߩࠞࠗࡀࡑ࠹ࠖ࠶ࠢ࿃ሶ K ߦ 2 MeV ࠍដߌߚ߽ߩߦߥࠆ㧚ᮡ⊛ේሶߩ⾰㊂߇ 1 Ⴧ߃ߚߣ ߈ߩᢔੂࠗࠝࡦߩࠛࡀ࡞ࠡ࡯ߩჇಽࠍᮡ⊛ේሶߩ⾰ ㊂ߦኻߒߡࡊࡠ࠶࠻ߒߚ߽ߩࠍ࿑ 3 ߦ␜ߔ㧚He ࠗࠝ ࡦߩᬌ಴ߦ↪޿ࠄࠇࠆඨዉ૕ᬌ಴ེߩࠛࡀ࡞ࠡ࡯ಽ ⸃⢻ࠍ 15 keV ߢ޽ࠆߣ઒ቯߔࠆ㧚ߘ߁ߔࠆߣࠛࡀ࡞ ࠡ࡯ಽ⸃⢻ߪ㧘⾰㊂ 38 ߩᮡ⊛ේሶߦࠃߞߡᢔੂߐࠇ ߚࠗࠝࡦߩࠛࡀ࡞ࠡ࡯ߣ㧘⾰㊂ 39 ߩᮡ⊛ේሶߦࠃߞ ߡᢔੂߐࠇߚࠗࠝࡦߩࠛࡀ࡞ࠡ࡯ߣߩᏅߦ⋧ᒰߔࠆ ߎߣ߆ࠄ㧘⾰㊂ 40 ߊࠄ޿߹ߢߥࠄ⾰㊂ᢙ 1 ߩ㆑޿ࠍ ⷗ಽߌࠄࠇࠆน⢻ᕈ߇޽ࠆߎߣ߇ࠊ߆ࠆ㧚ర⚛ߩ⼂ ೎߇น⢻߆ߤ߁߆ߪ㧘ฦర⚛ߩᐔဋේሶ㊂߿ห૏૕ ಽᏓ߆ࠄផቯߢ߈ࠆ㧚ߒ߆ߒߥ߇ࠄ㧘ᢔੂࠗࠝࡦߩ ࠛࡀ࡞ࠡ࡯ߪ㧘ᮡ⊛ర⚛ߩ⾰㊂ߛߌߢߥߊ㧘ሽ࿷ᷓ ߐߦࠃߞߡ߽ᄌൻߔࠆߚ߼㧘ర⚛ߩ⼂೎߇น⢻߆ߤ ߁߆㧘ߐࠄߦߪ㧘ߤߩࠃ߁ߥᷓߐᣇะߩᖱႎ߇ᓧࠄ ࠇࠆ߆ߪ㧘ᗐቯߐࠇࠆ⹜ᢱ᭴ㅧ߆ࠄ⸘▚ߒߚࠬࡍࠢ E₀ E_䋱 E_䋲 M₁ M_䋲 M_䋲 㱔 㱢 M₁

Fig. 1. Schematic diagram of elastic collision between a pro-jectile of mass M1, energy E0 and a target mass M2 which is initially at rest. After the collision, projectile of mass M1 is scattered in direction of angle _T with energy E1, and target particles of mass M2 are recoiled in direction of angle I with energy E2. 㪇 㪇㪅㪈 㪇㪅㪉 㪇㪅㪊 㪇㪅㪋 㪇㪅㪌 㪇㪅㪍 㪇㪅㪎 㪇㪅㪏 㪇㪅㪐 㪈 㪇 㪌㪇 㪈㪇㪇 㪈㪌㪇 㪉㪇㪇 㪉㪌㪇 㪤㪸㫊㫊㩷㫆㪽㩷㫋㪸㫉㪾㪼㫋㩷㪸㫋㫆㫄㩷㪤㪉 㪢㫀 㫅㪼㫄㪸 㫋㫀㪺㩷 㪝㪸 㪺㫋 㫆㫉 㩷㪢

Fig. 2. Kinematic factor K [Eq. (1)] of He projectile at a scat-tering angle of
=170q as a function of the target mass M2.

㪇 㪈㪇 㪉㪇 㪊㪇 㪋㪇 㪌㪇 㪍㪇 㪎㪇 㪏㪇 㪇 㪈㪇 㪉㪇 㪊㪇 㪋㪇 㪌㪇 㪤㪸㫊㫊㩷㫆㪽㩷㫋㪸㫉㪾㪼㫋㩷㪸㫋㫆㫄㩷㪤㪉 㪜㫅 㪼㫉 㪾㫐 㩷㫆㪽㩷㫊 㪺㪸㫋 㫋㪼 㫉㪼 㪻㩷㪟㪼㩷㫇 㪼㫉 㩷㫋 㪸㫉 㪾㪼㫋 㫄㪸㫊 㫊㩷㪻㫀 㪽㪽㪼 㫉㪼㫅 㪺㪼 㩷㩿㫂 㪼㪭 㪀

Fig. 3. Energy of scattered He projectile per target mass dif-ference at a scattering angle of
=170° and a incident energy of 2 MeV as a function of the target mass M2.

࠻࡞㧔ࠪࡒࡘ࡟࡯࡚ࠪࡦࠬࡍࠢ࠻࡞㧕߆ࠄ್ᢿߔࠆ ߎߣ߇ᔅⷐߦߥࠆ㧚 ᾖ኿ࠗࠝࡦߩࠛࡀ࡞ࠡ࡯߇㜞޿߶ߤ㧘න૏⾰㊂Ꮕ ޽ߚࠅߩࠛࡀ࡞ࠡ࡯ߪ㜞ߊߥࠆߚ߼㧘ᬌ಴♽ߩࠛࡀ ࡞ࠡ࡯ಽ⸃⢻߇หߓߢ޽ࠇ߫㧘ᾖ኿ࠗࠝࡦߩࠛࡀ࡞ ࠡ࡯ࠍ㜞ߊߒߚ߶߁߇ర⚛㑆ߩ⼂೎ߪኈᤃߦߥࠆ㧚 એ਄ߩࠃ߁ߦ㧘ㅢᏱߩ RBS ಽᨆߩ᧦ઙߢߪ12_C, 14_N, 16_O, 19_F ߥߤߩシర⚛ߪኈᤃߦ⼂೎ߢ߈㧘16_O ߣ18_O ߥߤߩห૏૕߽ኈᤃߦ⼂೎ߔࠆߎߣ߇ߢ߈ࠆ㧚ේሶ ⇟ภ߇㜞ߊߥࠆߣ⼂೎ߒ㔍ߊߥࠆ߇㧘㊀ర⚛ߢ߽⾰ ㊂߇චಽ㔌ࠇߡ޿ࠇ߫⼂೎ߢ߈ࠆߩߪ޿߁߹ߢ߽ߥ ޿㧚 ౉኿ࠗࠝࡦߩ⒳㘃ࠍᄌ߃ࠆߣࠞࠗࡀࡑ࠹ࠖ࠶ࠢ࿃ ሶߩᮡ⊛ේሶ⾰㊂ଐሽᕈߪᄌࠊࠆ㧚౉኿ࠗࠝࡦࠍ H, He߅ࠃ߮ Ne ߣߒߚ႐ว㧘ࠞࠗࡀࡑ࠹ࠖ࠶ࠢ࿃ሶߩ ᮡ⊛ේሶ⾰㊂ଐሽᕈߪ࿑ 4 ߩࠃ߁ߦߥࠆ㧚౉኿ࠗࠝ ࡦߦ H ࠍ↪޿ߚ႐ว㧘ᮡ⊛ේሶ⾰㊂ߦࠃࠆࠞࠗࡀࡑ ࠹ࠖ࠶ࠢ࿃ሶߩᄌൻߪૐ⾰㊂஥ߢ㧘He ߩ႐วࠃࠅ߽ ᄌൻ₸߇ᄢ߈ߊߥࠆߎߣ߇ࠊ߆ࠆ㧚ߎࠇߦኻߒߡ㧘 ౉኿ࠗࠝࡦߦ Ne ࠍ↪޿ࠆߣ㧘He ࠗࠝࡦࠍ↪޿ߚ႐ วࠃࠅ߽㜞⾰㊂஥ߢࠞࠗࡀࡑ࠹ࠖ࠶ࠢ࿃ሶߩᄌൻ₸ ߇ᄢ߈ߊߥࠆߎߣ߇ࠊ߆ࠆ㧚ᢔੂߐࠇߚ Ne ࠍ He ߣ หߓࠛࡀ࡞ࠡ࡯ಽ⸃⢻ߢᬌ಴ߢ߈ࠇ߫㧘㜞⾰㊂ᢙ஥ ߩర⚛ߩ⼂೎߇ኈᤃߦߥࠆ╫ߢ޽ࠆ㧚 ᢔੂⷺߩᄢ߈ߐߦࠃߞߡ߽ࠞࠗࡀࡑ࠹ࠖ࠶ࠢ࿃ሶ ߩᮡ⊛ේሶ⾰㊂ଐሽᕈߪᄌࠊࠆ㧚౉኿ࠗࠝࡦࠍ He ߣߒ㧘ᢔੂⷺࠍ 170q, 100q߅ࠃ߮ 50qߦߒߚ႐ว㧘ࠞ ࠗࡀࡑ࠹ࠖ࠶ࠢ࿃ሶߩᮡ⊛ේሶ⾰㊂ଐሽᕈߪ࿑ 5 ߩ ࠃ߁ߦߥࠆ㧚ᢔੂⷺ߇ዊߐߊߥࠆߦߒߚ߇޿㧘㜞⾰ ㊂㗔ၞߦ߅޿ߡ㧘ࠞࠗࡀࡑ࠹ࠖ࠶ࠢ࿃ሶߩ⾰㊂ߦኻ ߔࠆᄌൻ₸ߪዊߐߊߥࠆߎߣ߇ࠊ߆ࠆ㧚ߎߩࠃ߁ߦ㧘 ᾖ኿ߔࠆࠗࠝࡦߩ⒳㘃ߣࠛࡀ࡞ࠡ࡯߇หߓߢ޽ࠇ߫㧘 ᢔੂⷺࠍᄢ߈ߊߒߚᣇ߇㜞⾰㊂㗔ၞߦ߅޿ߡర⚛ࠍ ⼂೎ߒ߿ߔߊߥࠆߎߣ߇ࠊ߆ࠆ㧚 ߎߩࠃ߁ߦ㧘ᮡ⊛ේሶߩ⾰㊂ߩ⼂೎ߒ߿ߔߐߪ㧘 ᬌ಴♽ߩࠛࡀ࡞ࠡ࡯ಽ⸃⢻ߪ߽ߜࠈࠎ㧘౉኿ࠗࠝࡦ ߩ⾰㊂㧘ࠛࡀ࡞ࠡ࡯㧘߅ࠃ߮ᢔੂⷺߦࠃߞߡᄌࠊࠆ ߎߣ߇ࠊ߆ࠆ㧚ㅢᏱߩ RBS ߩ᧦ઙߢߪ㧘⋧ኻ⊛ߦシ ޿ర⚛ߪ⼂೎ߒ߿ߔ޿߇㧘ర⚛߇㊀ߊߥࠆߦᓥߞߡ ⼂೎ߒ㔍ߊߥࠆ㧚㊀޿ర⚛ࠍ⼂೎ߒ߿ߔߊߔࠆߚ߼ ߩᜰ㊎ߣߒߡ㧘౉኿ࠗࠝࡦߦ⾰㊂߇ᄢ߈޿ర⚛ࠍ↪ ޿ࠆ㧘౉኿ࠛࡀ࡞ࠡ࡯ࠍ㜞ߊߔࠆ㧘ᢔੂⷺࠍᄢ߈ߊ ߔࠆ㧘ߥߤ߇޽ߍࠄࠇࠆ㧚㜞ࠛࡀ࡞ࠡ࡯߿ਛࠛࡀ࡞ ࠡ࡯ߩᓟᣇᢔੂಽᨆߢߪ㧘⾰㊂ᢙߩᄢ߈޿౉኿ࠗࠝ ࡦߪᱴߤ૶ࠊࠇߡ޿ߥ޿ࠃ߁ߢ޽ࠆ߇㧘ૐࠛࡀ࡞ ࠡ࡯ߩᓟᣇᢔੂಽᨆߢߪ㧘Ne ߿ Ar ߥߤߩ㊀޿ర⚛ ߽౉኿ࠗࠝࡦߣߒߡ૶ࠊࠇ㧘ࠃࠅ㊀޿ర⚛߇⼂೎ߒ ߿ߔߊߥࠆߣ޿߁ႎ๔߇޽ࠆ[4->2]㧚 ߎߎ߹ߢߪ㧘౉኿☸ሶ߇ᮡ⊛ේሶߦࠃߞߡᢔੂߐ ࠇࠆ႐วߦߟ޿ߡߺߡ߈ߚ㧚ᰴߦ㧘౉኿ࠗࠝࡦߦࠃߞ ߡᢔੂߐࠇߚᮡ⊛ේሶ߇ߤ߁ߥࠆ߆ࠍߺߡߺࠃ߁㧚 ౉኿ࠗࠝࡦߦࠃߞߡᢔੂߐࠇߚᮡ⊛ේሶߪ෻〡ේሶ ߹ߚߪ෻〡☸ሶߣ๭߫ࠇࠆ㧚౉኿ࠗࠝࡦ M1ߦࠃߞ ߡ෻〡ߐࠇߚᮡ⊛ේሶ M2ߪ෻〡ߦࠃߞߡㆇേࠛࡀ ࡞ࠡ࡯ࠍᓧࠆ㧚౉኿ࠗࠝࡦߩࠛࡀ࡞ࠡ࡯E0ߣ෻〡☸ ሶߩࠛࡀ࡞ࠡ࡯E2ߩᲧࠍ෻〡ߩࠞࠗࡀࡑ࠹ࠖ࠶ࠢ࿃ ሶ Kr㧔ᷝ߃ሼߩ㨞ߪ recoil ߩ㗡ᢥሼ㧕ߣ๭߱㧚෻〡 ߩࠞࠗࡀࡑ࠹ࠖ࠶ࠢ࿃ሶ Krߪᰴᑼߢ޽ࠄࠊߐࠇࠆ [2->3]_㧚 㪇㪅㪇 㪇㪅㪈 㪇㪅㪉 㪇㪅㪊 㪇㪅㪋 㪇㪅㪌 㪇㪅㪍 㪇㪅㪎 㪇㪅㪏 㪇㪅㪐 㪈㪅㪇 㪇 㪌㪇 㪈㪇㪇 㪈㪌㪇 㪉㪇㪇 㪉㪌㪇 㪤㪸㫊㫊㩷㫆㪽㩷㫋㪸㫉㪾㪼㫋㩷㪸㫋㫆㫄㩷㪤㪉 㪢㫀㫅㪼 㫄㪸㫋 㫀㪺 㩷㪽㪸㪺㫋 㫆㫉 㩷㪢 㪥㪼 㪟 㪟㪼

Fig. 4. Kinematic factor K [Eq. (1)] at a scattering angle of

=170° as a function of the target mass M2 for the projectile of H, He and Ne. 㪇 㪇㪅㪈 㪇㪅㪉 㪇㪅㪊 㪇㪅㪋 㪇㪅㪌 㪇㪅㪍 㪇㪅㪎 㪇㪅㪏 㪇㪅㪐 㪈 㪇 㪌㪇 㪈㪇㪇 㪈㪌㪇 㪉㪇㪇 㪉㪌㪇 㪤㪸㫊㫊㩷㫆㪽㩷㫋㪸㫉㪾㪼㫋㩷㪸㫋㫆㫄㩷㪤㪉 㪢㫀 㫅㪼 㫄 㪸㫋 㫀㪺 㩷㪽㪸㪺 㫋㫆 㫉㩷㪢 㪌㪇㫦 㪈㪇㪇㫦 㪈㪎㪇㫦

Fig. 5. Kinematic factor K [Eq. (1)] of 4_{He projectile as a} func-tion of the target mass M2 at scattering angles of
=50°, 100° and 170°.





2 2I 1 2 2 1 0 2 r cos 4 M M M M E E K  (2) ᾖ኿ࠗࠝࡦ⒳ߣߒߡ He, N ߅ࠃ߮ Cl ࠍ↪޿ߚ႐ว ߩ Krߩᮡ⊛ේሶ⾰㊂ଐሽᕈࠍ࿑ 6 ߦ␜ߔ㧚෻〡ᢔੂ ⷺI 㧔࿑ 1 ෳᾖ㧕ߪ 30qߣߒߚ㧚෻〡ߩࠞࠗࡀࡑ࠹ࠖ࠶ ࠢ࿃ሶ Krߪ⾰㊂ 1 ߢ┙ߜ਄߇ࠅ㧘ᾖ኿ࠗࠝࡦߩ⾰㊂ ߣᮡ⊛ේሶߩ⾰㊂߇หߓߦߥߞߚߣ߈ᦨᄢߦߥࠅ㧘 ᮡ⊛ේሶߩ⾰㊂߇ᾖ኿ࠗࠝࡦߩ⾰㊂ࠍ⿧߃ࠆߣዊߐ ߊߥࠆ㧚 ࿑ 6 ߦ␜ߐࠇߡ޿ࠆࠃ߁ߦ㧘᳓⚛ේሶߦኻߔࠆ Kr ߪ㧘N ߿ Cl ࠃࠅ߽ He ࠗࠝࡦߩᣇ߇ᄢ߈޿㧚ᮡ⊛ේ ሶߩ⾰㊂ᢙ 7 ߹ߢߪ He ࠗࠝࡦᾖ኿ߩ Kr߇ᦨ߽ᄢ߈ ߊ㧘⾰㊂ᢙ 8 ߆ࠄ 21 ߹ߢߪ N ࠗࠝࡦᾖ኿ߩ Kr߇ᦨ ߽ᄢ߈ߊ㧘⾰㊂ᢙ 23 એ਄ߢߪ Cl ࠗࠝࡦᾖ኿ߩ Kr ߇ᦨ߽ᄢ߈޿㧚 ᳓⚛ේሶ߇ He ࠗࠝࡦᾖ኿ߦࠃࠆ෻〡ᢔੂࠍ೑↪ ߒߡಽᨆߐࠇߡ޿ࠆߎߣߪࠃߊ⍮ࠄࠇߡ޿ࠆ㧚ߒ߆ ߒߥ߇ࠄ㧘Li, Be, B ߥߤߩర⚛߇ He ࠗࠝࡦᾖ኿ߦ ࠃࠆ෻〡ᢔੂࠍ೑↪ߒߡಽᨆߐࠇߚߣ޿߁⹤ߪ⡞߆ ߥ޿㧚࿑ 6 ߆ࠄࠊ߆ࠆࠃ߁ߦ㧘He ࠗࠝࡦᾖ኿ߩ႐ว ߢ߽ Li, Be, B ╬ߩ෻〡ߩࠞࠗࡀࡑ࠹ࠖ࠶ࠢ࿃ሶߪ H ߩߘࠇࠃࠅᄢ߈޿㧚ߘࠇߦ߽߆߆ࠊࠄߕ Li, Be, B ߥ ߤߩర⚛߇ He ࠗࠝࡦᾖ኿ߦࠃࠆ෻〡ᢔੂߢಽᨆߐ ࠇߡ޿ߥ޿ߩߪߥߗߛࠈ߁߆㧚೨࿁ߩ⸃⺑⸥੐ߩ Q&Aߢ㧘෻〡☸ሶߩᬌ಴ߦߪ㧘෻〡☸ሶߣหߓᣇะ ߦᢔੂߐࠇߡߊࠆᾖ኿ࠗࠝࡦߣಽ㔌ߒߥߌࠇ߫ߥࠄ ߥ޿߇㧘Li, Be, B ߥߤߩ෻〡☸ሶࠍㅘㆊߐߖߎࠇࠄ ߩ☸ሶߣหߓᣇะߦᢔੂߐࠇߡߊࠆ He ࠗࠝࡦࠍᱛ ߼ࠆᣇᴺ߇ή޿ߣ޿߁⺑᣿ࠍߒߚ㧚ߎߩߎߣࠍ߽߁ ዋߒቯ㊂⊛ߦᬌ⸛ߔࠆ㧚 ߹ߕ᳓⚛ࠍಽᨆߔࠆ႐วߦߟ޿ߡᬌ⸛ߔࠆ㧚2 MeVߩ He ࠗࠝࡦࠍᾖ኿ߔࠇ߫㧘30qᣇะߦ෻〡ߐࠇ ߚ᳓⚛߇ᓧࠆࠛࡀ࡞ࠡ࡯ߪ Kr߇ 0.48 ߢ޽ࠆ߆ࠄ 0.96 MeVߣߥࠆ㧚৻ᣇ㧘ᾖ኿ߒߚ He ࠗࠝࡦ߇ 30qᣇะ ߦᢔੂߐࠇࠆߣ߈ߩࠛࡀ࡞ࠡ࡯ߪ㧘ᇦ⾰ߩ⚵ᚑߦ ࠃߞߡ⇣ߥࠆ߇㧘ࠃߊ⺞ߴࠄࠇࠆ὇⚛᧚ᢱߩࠃ߁ߥ シ޿ర⚛ߢ޽ߞߡ߽ࠞࠗࡀࡑ࠹ࠖ࠶ࠢ࿃ሶߪ 0.9 એ ਄ߢ޽ࠅ㧘߽ߣߩࠛࡀ࡞ࠡ࡯ߣᄢ߈ߊᄌࠊࠄߥ޿㧚 ߒߚ߇ߞߡ㧘᳓⚛ࠍಽᨆߔࠆߚ߼ߦߪ㧘2 MeV ߩ He ࠍᱛ߼ߡ 1 MeV ߩ᳓⚛ࠍㅢߔ⤑ࠍඨዉ૕ᬌ಴ེߩ ೨ߦ⸳⟎ߔࠆߎߣ߇ᔅⷐߣߥࠆ㧚He ࠍᱛ߼ࠆ⤑ߣߒ ߡ Al ▗ࠍ↪޿ࠆ႐วࠍ⠨߃ࠃ߁㧚Al ਛߦ߅ߌࠆ 2 MeV_{ߩ He ߩ㘧⒟ߪ 6.8 P㨙ߢ޽ࠆߩߦኻߒ㧘1 MeV} ߩ᳓⚛ߩ㘧⒟ߪ 14.3 P㨙ߢ޽ࠆ[5->4]㧚ߒߚ߇ߞߡ㧘 ෘߐ 7 P㨙ߩ Al ▗ࠍ⹜ᢱߣᬌ಴ེߩ㑆ߦ⸳⟎ߔࠇ߫㧘 ᳓⚛ߛߌࠍᬌ಴ߔࠆߎߣ߇ߢ߈ࠆ㧚 ߎߩ᳓⚛ಽᨆߦ߅޿ߡ㧘ታ㓙ߦ㧘෻〡ߐࠇߡ⹜ᢱ ߆ࠄ㘧߮಴ߔ᳓⚛ේሶߩᢙߣ㧘೨ᣇߦᢔੂߐࠇߡߊ ࠆ He ࠗࠝࡦߩᢙߪߤ߁ߥߞߡ޿ࠆߛࠈ߁߆㧚὇⚛ ᧚ᢱਛߩ᳓⚛ࠍಽᨆߔࠆ႐วࠍᗐቯߒࠃ߁㧚ᬌ಴ེ ߪㅢᏱ㧘ᢔੂⷺ 30qߩ૏⟎ߦ⸳⟎ߐࠇࠆ㧚2 MeV ߩ He ࠗࠝࡦࠍ὇⚛ߦᾖ኿ߒߚ႐วߩᢔੂᢿ㕙Ⓧߪ 1_u10-23 _cm2_/sr ߢ޽ࠅ㧘᳓⚛ߩ෻〡ᢔੂᢿ㕙Ⓧߪ 3u10-25 _cm2_{/srߢ޽ࠆ㧚ߒߚ߇ߞߡ㧘ߎߩ᧦ઙߢ㧘He} ࠗࠝࡦ߇὇⚛ߦࠃߞߡᢔੂߐࠇࠆ⏕₸ߪ㧘᳓⚛߇ He ࠗࠝࡦߦࠃߞߡ෻〡ߐࠇࠆ⏕₸ࠃࠅ 33 ୚ᄢ߈޿㧚ߒ ߚ߇ߞߡ㧘὇⚛᧚ᢱਛߩ᳓⚛Ớᐲ߇ 10 at㧑ߩ႐วߦ ߪ㧘ᢔੂ He ߩᒝᐲߪ෻〡᳓⚛ߩ⚂ 330 ୚ߦߥࠆ㧚 వ߶ߤ⺑᣿ߒߚࠃ߁ߦ㧘Al ▗ਛߦ߅ߌࠆ He ߣ᳓⚛ ߩ㘧⒟ߩᏅࠍ೑↪ߔࠆߎߣߦࠃߞߡ㧘He ߩ 1/330 ߩ ᒝᐲߒ߆ߥ޿᳓⚛ࠍᬌ಴ߔࠆߎߣ߇ߢ߈ࠆߩߢ޽ࠆ㧚 หߓࠃ߁ߦ㜞ࠛࡀ࡞ࠡ࡯ߩ He ࠗࠝࡦࠍᾖ኿ߒߡ㧘 ᳓⚛એᄖߩర⚛ࠍಽᨆߔࠆߎߣߪߢ߈ߥ޿ߛࠈ߁߆㧚 ࠪ࡝ࠦࡦਛߩࡎ࠙⚛ߦߟ޿ߡ⺞ߴߡߺࠃ߁㧚2 MeV ߩ He ࠗࠝࡦࠍᾖ኿ߒߚ႐ว㧘30qᣇะߦ෻〡ߐࠇߚ B ߇ᓧࠆࠛࡀ࡞ࠡ࡯ߪ෻〡ߩࠞࠗࡀࡑ࠹ࠖ࠶ࠢ࿃ሶ ߇ 0.6 ߢ޽ࠆ߆ࠄ 1.2 MeV ߣߥࠆ㧚ᾖ኿ߒߚ He ࠗࠝ ࡦ߇ࠪ࡝ࠦࡦේሶߦࠃߞߡ 30qᣇะߦᢔੂߐࠇߚߣ ߈ߩࠛࡀ࡞ࠡ࡯ߪ㧘1.9 MeV એ਄ߢ޽ࠆ㧚ߎߎߢ㧘 1.9 MeVߩ He ߣ 1.2 MeV ߩ B ࠍ⼂೎ߢ߈ࠇ߫㧘᳓ ⚛ߣห᭽ߦ෻〡ᢔੂߢಽᨆߢ߈ࠆߎߣߦߥࠆ㧚ߒ߆ ߒߥ߇ࠄ㧘ᓟߩ┨ߢ⺑᣿ߔࠆࠃ߁ߦ㧘ᇦ⾰ߩ㒖ᱛ⢻ ߪ㧘౉኿☸ሶߩේሶ⇟ภ߇ᄢ߈޿߶ߤᄢ߈ߊߥࠆ㧘 ౉኿☸ሶߩࠛࡀ࡞ࠡ࡯߇㜞޿߶ߤᄢ߈ߊߥࠆߩߢ㧘 ෻〡 B ߣหߓᣇะߦᢔੂߐࠇߚ He ࠗࠝࡦࠍᱛ߼ߡ㧘 㪇㪅㪇 㪇㪅㪈 㪇㪅㪉 㪇㪅㪊 㪇㪅㪋 㪇㪅㪌 㪇㪅㪍 㪇㪅㪎 㪇㪅㪏 㪇㪅㪐 㪈㪅㪇 㪇 㪉㪇 㪋㪇 㪍㪇 㪏㪇 㪈㪇㪇 㪤㪸㫊㫊㩷㫆㪽㩷㫋㪸㫉㪾㪼㫋㩷㪸㫋㫆㫄㩷㪤㪉 㪜㫃 㪸㫊 㫋㫀㪺㩷 㫉㪼 㪺㫆 㫀㫃㩷 㪽㪸 㪺㫋 㫆㫉 㩷㪢 㫉 㪟㪼 㪚㫃 㪥

Fig. 6. Recoil kinematic factor Kr [Eq. (2)] at a recoil angle of

 =30° as a function of the target mass M2 for the projectile of 4_He, 14_{N and} 35_Cl.

෻〡 B ߩߺㅘㆊߔࠆࠃ߁ߥ‛⾰ߪሽ࿷ߒߥ޿ߩߢ㧘 He_{ࠗࠝࡦߦࠃࠆ෻〡☸ሶᬌ಴ᴺߢߪ㧘᳓⚛ߪᬌ಴ߢ} ߈ࠆ߇㧘He ࠃࠅ㊀޿ర⚛ߪ㧘ㅢᏱߩඨዉ૕ᬌ಴ེࠍ ૶߁㒢ࠅᬌ಴ߢ߈ߥ޿ߩߢ޽ࠆ㧚 એ਄ߩ⺑᣿߆ࠄ㧘ಽᨆኻ⽎ర⚛ࠃࠅ߽㊀޿ర⚛ࠍ ౉኿☸ሶߣߒߡ૶߃߫㧘෻〡☸ሶಽᨆᴺߦࠃߞߡ᳓ ⚛એᄖߩర⚛߇ಽᨆߢ߈ࠆߢ޽ࠈ߁ߎߣ߇੍ᗐߢ߈ ࠆ㧚ᄢဳߩടㅦེࠍ↪޿ߡ㧘ᢙ MeV એ਄ߩ㜞ࠛࡀ ࡞ࠡ࡯ߩႮ⚛߿㊄ߩࠗࠝࡦࠍᾖ኿ߒ㧘シర⚛ࠍ෻〡 ߦࠃߞߡ࿕૕⴫㕙߆ࠄ㘧߮಴ߐߖ㧘ㆡᒰߥ⭯⤑ࠍ↪ ޿ߡ೨ᣇߦᢔੂߒߡ߈ߚ౉኿☸ሶࠍᱛ߼㧘ඨዉ૕ᬌ ಴ེࠍ↪޿ߡ RBS ࠃࠅ߽㜞޿ᗵᐲߢಽᨆߔࠆߎߣ ߇ߢ߈ࠆ㧚 2.2. ᢔੂᢿ㕙Ⓧ ࠗࠝࡦᢔੂಽᨆߢߪ㧘ᢔੂߐࠇߚࠗࠝࡦߩᒝᐲ߆ ࠄ㧘ᮡ⊛ේሶߩỚᐲ߇ࠊ߆ࠆ㧚ᢔੂߐࠇߚࠗࠝࡦߩ ᒝᐲߣᾖ኿ࠗࠝࡦߩᒝᐲࠍ⚿߮ߟߌߡ޿ࠆߩ߇ᢔੂ ᢿ㕙Ⓧߢ޽ࠆ㧚ࠗࠝࡦᢔੂߦ߅ߌࠆᢔੂᢿ㕙Ⓧߪ㧘 ᢔੂ☸ሶᢙࠍන૏㕙Ⓧ޽ߚࠅߩᾖ኿☸ሶᢙߢഀߞߚ ߽ߩߢ㧘ᮡ⊛☸ሶߩᄢ߈ߐࠍ෻ᤋߒ㧘㕙Ⓧߩᰴరࠍ ᜬߟ㧚ᢔੂߐࠇߚࠗࠝࡦߩ߁ߜߢ㧘․ቯߩᣇะߩන ૏┙૕ⷺ:ࠍㅢㆊߒߚࠗࠝࡦߩᒝᐲࠍᾖ኿☸ሶᢙߢ ഀߞߚ߽ߩ߇㧘ᓸಽᢔੂᢿ㕙Ⓧߢ޽ࠆ㧚 ࠗࠝࡦᢔੂ߇㧘ᾖ኿ࠗࠝࡦߩේሶᩭߣᮡ⊛ේሶߩ ේሶᩭߣߩ㑆ߩࠢ࡯ࡠࡦࡐ࠹ࡦࠪࡖ࡞ߦࠃࠆᢔੂߢ ޽ࠆߣߺߥߖࠆ႐ว㧘ᓸಽᢔੂᢿ㕙Ⓧߪ㧘ฎౖജቇ ߦࠃߞߡ⸘▚ߢ߈ࠆ㧚ߘࠇ߇ᰴߦ␜ߔ࡜ࠩࡈࠜ࡯࠼ ߩᑼߢ޽ࠆ㧚





>

@

^

`





>

@

^

₂

`

12 2 1 2 2 1 2 2 1 4 2 2 2 1 sin 1 cos sin 1 sin 4 4 T T T T V M M M M E e Z Z d d    ¸¸¹ · ¨¨© § : ₍₃₎ ߎߎߢ E ߪ౉኿ࠗࠝࡦߩࠛࡀ࡞ࠡ࡯㧘Z1ߪ౉኿ࠗࠝ ࡦߩේሶ⇟ภ㧘Z2ߪᮡ⊛ේሶߩේሶ⇟ภ㧘Tߪᢔੂ ⷺߢ޽ࠆ[1]㧚ߎߩᑼ߇␜ߒߡ޿ࠆࠃ߁ߦ㧘ᓸಽᢔੂ ᢿ㕙Ⓧߪ㧘౉኿ࠗࠝࡦߩේሶ⇟ภߩ 2 ਸ਼㧘ᮡ⊛ේሶ ߩේሶ⇟ภߩ 2 ਸ਼ߦᲧ଀ߒ㧘౉኿ࠗࠝࡦߩࠛࡀ࡞ ࠡ࡯ߩ 2 ਸ਼ߦ෻Ყ଀ߔࠆ㧚

2 MeV_{㧘1 MeV ߅ࠃ߮ 0.5 MeV ߩ He ࠗࠝࡦࠍᾖ}

኿ߒ㧘ᢔੂⷺ 170qߩ႐วߩᓸಽᢔੂᢿ㕙Ⓧࠍᮡ⊛ේ ሶߩේሶ⇟ภߦኻߒߡࡊࡠ࠶࠻ߒߚ߽ߩࠍ࿑ 7 ߦ␜ ߔ㧚ᢔੂᢿ㕙Ⓧ߇ᮡ⊛ේሶߩේሶ⇟ภߦኻߒߡᜰᢙ 㑐ᢙ⊛ߦჇᄢߒ㧘ᾖ኿ࠗࠝࡦߩࠛࡀ࡞ࠡ࡯߇ૐ޿߶ ߤᢔੂᢿ㕙Ⓧ߇ᄢ߈޿ߎߣ߇␜ߐࠇߡ޿ࠆ㧚ߐࠄߦ㧘 ❑ゲߩᢔੂᢿ㕙Ⓧߩᜰᢙㇱಽߪ -23 ߢ㧘ߎࠇߪ㧘ේ ሶᩭߩᢿ㕙Ⓧߦㄭ޿୯ߢ޽ࠆ㧚ߎߩᢔੂᢿ㕙Ⓧߩ୯ ߆ࠄ㧘㜞ࠛࡀ࡞ࠡ࡯ࠗࠝࡦᢔੂ߇㧘ᾖ኿ࠗࠝࡦߩේ ሶᩭߣᮡ⊛ේሶߩේሶᩭߩ㑆ߩᢔੂ⃻⽎ࠍ೑↪ߒߡ ޿ࠆߣ޿߁ߎߣࠍታᗵߔࠆߎߣ߇ߢ߈ࠆ㧚 ᓸಽᢔੂᢿ㕙Ⓧ߇ᮡ⊛ේሶߩේሶ⇟ภߩ 2 ਸ਼ߦᲧ ଀ߔࠆߚ߼㧘ߚߣ߃߫⓸ൻ࠲ࡦࠣࠬ࠹ࡦ㧔WN㧕ࠍ RBSߢಽᨆߔࠆߣ㧘W ߣ N ߣߢߪේሶ⇟ภ߇ 10 ୚ એ਄㆑߁ߚ߼ᢔੂᢿ㕙Ⓧߪ 100 ୚એ਄㆑߁㧚ߘߩߚ ߼㧘W ߣ Nߩࠬࡍࠢ࠻࡞ࠍหᤨߦ⴫␜ߔࠆߦߪ SIMS ߣหߓࠃ߁ߦ❑ゲࠍኻᢙ⴫␜ߦߒߥߌࠇ߫ߥ޿ߩߢ ޽ࠆ㧚 ᓸಽᢔੂᢿ㕙Ⓧߩᮡ⊛ේሶ⇟ภଐሽᕈࠍ޿ߊߟ߆ ߩᢔੂⷺߦኻߒߡࡊࡠ࠶࠻ߒߚ߽ߩࠍ࿑ 8 ߦ␜ߔ㧚 ᢔੂⷺ߇ዊߐߊߥࠆߦᓥߞߡ㧘ᢔੂᢿ㕙Ⓧߪᄢ߈ߊ ߥࠅ㧘ᢔੂⷺ 50qߢߪ 170qߩ 10 ୚ߊࠄ޿ᄢ߈ߊߥࠆ㧚 ᢔੂᢿ㕙Ⓧߪ౉኿ࠗࠝࡦߩࠛࡀ࡞ࠡ࡯ߩ 2 ਸ਼ߦ෻ Ყ଀ߔࠆߚ߼㧘౉኿ࠗࠝࡦߩࠛࡀ࡞ࠡ࡯ࠍ 2 MeV ߆ ࠄ 500 keV ߹ߢਅߍࠆߣᢔੂᢿ㕙Ⓧߪ 16 ୚ߦߥࠆ㧚 ࡜ࠩࡈࠜ࡯࠼ߩᢿ㕙Ⓧߩᑼߪ㧘౉኿ࠗࠝࡦߣᮡ⊛ ේሶߩේሶᩭߩᢔੂߦ߅ߌࠆࡐ࠹ࡦࠪࡖ࡞߇㧘ේሶ ᩭߩࠢ࡯ࡠࡦࡐ࠹ࡦࠪࡖ࡞ߢ⸥ㅀߢ߈ࠆߣߩ઒ቯߩ ߽ߣߦዉ಴ߐࠇߚ߽ߩߢ޽ࠆ㧚ߒ߆ߒߥ߇ࠄ㧘ߎߩ ઒ቯߪ㧘ᢔੂ߇ේሶᩭߩㄭறߢ↢ߓࠆ႐วߦߪᚑ┙ ߔࠆ߇㧘ᮡ⊛ේሶߩේሶ⇟ภ߇㜞޿႐ว߿ⴣ⓭ࠛࡀ ࡞ࠡ࡯߇ૐ޿႐วߩࠃ߁ߦᢔੂ߇ේሶᩭ߆ࠄ㔌ࠇߚ ႐ᚲߢ↢ߓࠆ႐วߦߪᚑ┙ߒߥ޿㧚ߘࠇߪ㧘ౝᲖ㔚 ሶߦࠃߞߡේሶᩭߩࠢ࡯ࡠࡦࡐ࠹ࡦࠪࡖ࡞߇ㆤ⭁ߐ ࠇࠆߚ߼ߢ޽ࠆ㧚ߎߩࠃ߁ߥ႐วߦߪ࡜ࠩࡈࠜ࡯࠼ ߩᢔੂᢿ㕙Ⓧߦኻߔࠆ⵬ᱜ߇ᔅⷐߦߥࠆ㧚L’Ecuyer 㪇㪅㪇㪜㪂㪇㪇 㪉㪅㪇㪜㪄㪉㪊 㪋㪅㪇㪜㪄㪉㪊 㪍㪅㪇㪜㪄㪉㪊 㪏㪅㪇㪜㪄㪉㪊 㪈㪅㪇㪜㪄㪉㪉 㪇 㪉㪇 㪋㪇 㪍㪇 㪏㪇 㪈㪇㪇 㪘㫋㫆㫄㫀㪺㩷㫅㫌㫄㪹㪼㫉㩷㫆㪽㩷㫋㪸㫉㪾㪼㫋㩷㪸㫋㫆㫄㩷㪱㪉 㪪㪺㪸 㫋㫋 㪼㫉 㫀㫅㪾 㩷㪺㫉 㫆㫊㫊 㩷㫊 㪼㪺㫋 㫀㫆 㫅㩷㩿 㪺㫄 㪉 㪆㫊 㫉㪀 㪇㪅㪌㩷㪤㪼㪭 㪉㩷㪤㪼㪭 㪈㩷㪤㪼㪭

Fig. 7. Rutherford differential scattering cross section d /d [Eq. (3)] of 4_{He projectile at a scattering angle of
=170° as a} function of the target atomic number Z2 at the incident kinetic energy of 0.5, 1 and 2 MeV.

ࠄߪ㧘ᰴߩࠃ߁ߥ⵬ᱜᑼࠍឭ᩺ߒߡ޿ࠆ[2->3]

 

E Z Z F F 3 4 2 1 SC 049 . 0 1 T V V ₍₄₎ ߎߎߢV(T)ߪ࡜ࠩࡈࠜ࡯࠼ߩᢔੂᢿ㕙Ⓧ㧘VSCߪ⵬ᱜ ߐࠇߚᢔੂᢿ㕙Ⓧߢ޽ࠆ㧚౉኿☸ሶ߇ He ߩ႐วߩ ⵬ᱜଥᢙ F ࠍᮡ⊛ේሶ⇟ภߦኻߒߡࡊࡠ࠶࠻ߒߚ߽ ߩࠍ࿑ 9 ߦ␜ߔ㧚ᑼ(4)ߦ␜ߐࠇߡ޿ࠆࠃ߁ߦ㧘⵬ᱜ ଥᢙ F ߪᮡ⊛ේሶ⇟ภ߇ᄢ߈޿߶ߤ㧘౉኿☸ሶߩࠛ ࡀ࡞ࠡ࡯߇ૐ޿߶ߤ㧘1 ࠃࠅዊߐߊߥࠆ㧚࿑ 9 ߦ␜ ߐࠇߡ޿ࠆࠃ߁ߦ㧘0.25 MeV ߩ He ࠍ㊀ర⚛ߦᾖ኿ ߒߚ႐วߦߪ 10%એ਄ߩ⵬ᱜ߇ᔅⷐߦߥࠆ㧚2 MeV ߩ He ࠍᾖ኿ߒߚ႐ว㧘ᢔੂᢿ㕙Ⓧߩ⺋Ꮕߪᦨᄢߢ ߽ 2㧑⒟ᐲߢ޽ࠆ㧚ߒ߆ߒߥ߇ࠄ㧘ߎߩ࠺࡯࠲ࠍ߽ߞ ߡ㧘2 MeV ߩ He ࠗࠝࡦࠍ↪޿ߚ RBS ಽᨆߢߪ⵬ᱜ ߒߥߊߡ߽ 2㧑એౝߩ⺋Ꮕߢಽᨆߢ߈ࠆߣ⠨߃ߡߪ ޿ߌߥ޿㧚⴫㕙ߦሽ࿷ߒߡ޿ࠆේሶߦࠃࠆᢔੂߪ㧘 ౉኿ࠗࠝࡦߩࠛࡀ࡞ࠡ࡯ߢᢔੂᢿ㕙Ⓧࠍ⸘▚ߔࠇ߫ ࠃ޿߇㧘ᷓ޿㗔ၞߦሽ࿷ߔࠆේሶߦࠃࠆᢔੂߩ႐ว ߦߪ㧘ᢔੂᤨߩ౉኿ࠗࠝࡦߩࠛࡀ࡞ࠡ࡯ߪᷓߐߦᔕ ߓߡૐਅߒߡ޿ࠆߎߣࠍ⠨ᘦߒߥߌࠇ߫ߥࠄߥ޿㧚 ౉኿ᤨߩࠛࡀ࡞ࠡ࡯߇ 2 MeV ߢ߽㧘ᢔੂᤨߩࠛࡀ࡞ ࠡ࡯߇ 1.0 MeV ߹ߢૐਅߒߡ޿ࠆߣ㧘ᢔੂᢿ㕙Ⓧߩ ⵬ᱜଥᢙߪ⚂ 4㧑ߦߥࠆ㧚 ᢔੂᢿ㕙Ⓧ߇࡜ࠩࡈࠜ࡯࠼ߩᑼ߆ࠄߪߕࠇࠆ᧦ઙ ߇ઁߦ߽޽ࠆ㧚ߘࠇߪᢔੂⷺ߇ዊߐ޿႐วߢ޽ࠆ㧚 RBS _{ߢߪ 170q೨ᓟߩᢔੂⷺࠍ↪޿ࠆߎߣ߇ᄙ޿߇㧘} ᷓߐᣇะಽ⸃⢻ࠍ਄ߍࠆߚ߼ߦ㧘90q޽ࠆ޿ߪߘࠇએ ਅߩᢔੂⷺࠍ↪޿ࠆߎߣ߇޽ࠆ㧚ᢔੂⷺ߇ዊߐߊߥ ࠆߣ㧘౉኿ࠗࠝࡦߣᮡ⊛ේሶߩᦨㄭធ〒㔌߇㐳ߊߥ ࠆߚ߼㧘ㆤ⭁ߩᓇ㗀߇ήⷞߢ߈ߥߊߥࠆ㧚Andersen ࠄߦࠃࠆ⵬ᱜଥᢙߩ⸘▚⚿ᨐࠍ࿑ 10 ߦ␜ߔ㧚ㆤ⭁ല ᨐ߇ᄢ߈޿ᮡ⊛ේሶߢ޽ࠆ Au ߦኻߒߡ㧘౉኿ He ࠗࠝࡦߩࠛࡀ࡞ࠡ࡯߇ 2 MeV, 1 MeV, 0.5 MeV㧘߅ࠃ ߮ 0.25 MeV ߩ႐วߩᢔੂᢿ㕙Ⓧߩ࡜ࠩࡈࠜ࡯࠼ߩ ୯߆ࠄߩ⵬ᱜଥᢙߩᢔੂⷺଐሽᕈࠍ␜ߒߚ㧚ᢔੂⷺ ߇ᄢ߈޿႐ว㧘ᢔੂᢿ㕙Ⓧߪ L’Ecuyer ࠄߩ୯ߦ৻⥌ ߔࠆ㧚RBS ߩౖဳ⊛ߥಽᨆ᧦ઙ㧔2 MeV, He, 170q㧕 ߩ႐วߦߪ⵬ᱜߪਇⷐߢ޽ࠆ߇㧘ᷓߐᣇะಽ⸃⢻ࠍ ਄ߍࠆߚ߼ߦਛࠛࡀ࡞ࠡ࡯ࠗࠝࡦᢔੂߢ↪޿ࠄࠇࠆ ߎߣ߇޽ࠆᢔੂⷺ 50qߩ႐ว㧘0.5 MeV ߢߪ L’Ecuyer ߩ⵬ᱜଥᢙࠃࠅ߽ 1%ߊࠄ޿ዊߐ޿୯ߦߥࠅ㧘0.25 MeVߢߪ L’Ecuyer ߩ⵬ᱜଥᢙࠃࠅ߽ 3㧑ߊࠄ޿ዊߐ ޿୯ߦߥࠆ㧚 ᰴߦ෻〡ᢔੂߩᢔੂᢿ㕙Ⓧߦߟ޿ߡ⺑᣿ߔࠆ㧚෻ 〡ᢔੂߦ߅޿ߡ߽ᰴߦ␜ߔ࡜ࠩࡈࠜ࡯࠼ߩᑼ߇޽ࠆ㧚 ౉኿ࠗࠝࡦߩࠛࡀ࡞ࠡ࡯߇ૐ޿႐ว߿㧘ᮡ⊛ේሶߩ ේሶ⇟ภ߇㜞޿႐วߦߪ㧘ᓟᣇᢔੂߩ႐วߣห᭽ߦ㧘 ෻〡ᢔੂߦ߅޿ߡ߽ㆤ⭁ߦኻߔࠆ⵬ᱜ߇ᔅⷐߢ޽ࠆ㧚 㪇㪅㪇㪜㪂㪇㪇 㪉㪅㪇㪜㪄㪉㪊 㪋㪅㪇㪜㪄㪉㪊 㪍㪅㪇㪜㪄㪉㪊 㪏㪅㪇㪜㪄㪉㪊 㪈㪅㪇㪜㪄㪉㪉 㪇 㪉㪇 㪋㪇 㪍㪇 㪏㪇 㪈㪇㪇 㪘㫋㫆㫄㫀㪺㩷㫅㫌㫄㪹㪼㫉㩷㫆㪽㩷㫋㪸㫉㪾㪼㫋㩷㪸㫋㫆㫄㩷㪱㪉 㪪㪺㪸㫋 㫋㪼㫉 㫀㫅㪾 㩷㪺 㫉㫆 㫊㫊 㩷㫊 㪼㪺㫋 㫀㫆 㫅㩷 㩿㪺㫄 㪉 㪆㫊 㫉㪀 㪌㪇㫦 㪍㪇㫦 㪏㪇㫦 㪈㪇㪇㫦 㪈㪎㪇㫦

Fig. 8. Rutherford differential scattering cross section d /d [Eq. (3)] of He projectile as a function of the target atomic number Z2 at an incident kinetic energy of 2 MeV for various scattering angles. 㪇㪅㪏㪉 㪇㪅㪏㪋 㪇㪅㪏㪍 㪇㪅㪏㪏 㪇㪅㪐㪇 㪇㪅㪐㪉 㪇㪅㪐㪋 㪇㪅㪐㪍 㪇㪅㪐㪏 㪈㪅㪇㪇 㪇 㪉㪇 㪋㪇 㪍㪇 㪏㪇 㪈㪇㪇 㪘㫋㫆㫄㫀㪺㩷㫅㫌㫄㪹㪼㫉㩷㫆㪽㩷㫋㪸㫉㪾㪼㫋㩷㪸㫋㫆㫄㩷㪱㪉 㪚㫆 㫉㫉 㪼㪺㫋 㫀㫆 㫅㩷 㪽㪸 㪺㫋 㫆㫉 㩷㪝 㩷㩿㪣 㩾㪜 㪺㫌㫐 㪼㫉 㪀 㪉㩷㪤㪼㪭 㪇㪅㪉㪌㩷㪤㪼㪭 㪇㪅㪌㩷㪤㪼㪭 㪈㩷㪤㪼㪭

Fig. 9. Correction factors F [Eq. (4)] for the Rutherford cross section of He projectile at a scattering angle of
=170° as a function of the target atomic number Z2 for a variety of inci-dent kinetic energies.

㪇㪅㪎㪍 㪇㪅㪎㪏 㪇㪅㪏㪇 㪇㪅㪏㪉 㪇㪅㪏㪋 㪇㪅㪏㪍 㪇㪅㪏㪏 㪇㪅㪐㪇 㪇㪅㪐㪉 㪇㪅㪐㪋 㪇㪅㪐㪍 㪇㪅㪐㪏 㪈㪅㪇㪇 㪇 㪌㪇 㪈㪇㪇 㪈㪌㪇 㪪㪺㪸㫋㫋㪼㫉㫀㫅㪾㩷㪸㫅㪾㫃㪼㩷㱔䋨㪻㪼㪾㫉㪼㪼㪀 㪚㫆 㫉㫉 㪼㪺 㫋㫀㫆 㫅㩷 㪽㪸 㪺㫋 㫆㫉 㩷㪝 㩷㩿㪘 㫅㪻㪼 㫉㫊 㪼㫅㪀 㪇㪅㪉㪌㩷㪤㪼㪭 㪇㪅㪌㩷㪤㪼㪭 㪈㩷㪤㪼㪭 㪉㩷㪤㪼㪭

Fig. 10. Correction factors F [Eq. (4)] for the Rutherford cross section of He backscattered from gold as a function of scatter-ing angle
at a variety of incident kinetic energies.





>

@

> @





T V 2 ₃ 2 2 2 1 2 1 7 ERD R cos keV 2 10 0731 . 2 E M M M Z Z _ u

>

mb/sr

@

(5) ߎߎߢߪ㧘෻〡ᢔੂߩߥ߆ߢᦨ᳢߽↪⊛ߦ૶ࠊࠇ ߡ޿ࠆ᳓⚛ಽᨆࠍߣࠅ޽ߍࠆ㧚෻〡ᢔੂߦࠃࠆ᳓⚛ ಽᨆߩౖဳ⊛ߥ᧦ઙ㧘2 MeV ߩ He ࠗࠝࡦࠍᾖ኿ߒ ᢔੂⷺ 30qߢᬌ಴ߔࠆ႐วߩ෻〡ᢔੂᢿ㕙Ⓧߪ㧘࡜ ࠩࡈࠜ࡯࠼ߩᑼ(5)߆ࠄ⸘▚ߔࠆߣ 2u10-25 _cm2_/sr ߣ ߥࠆ㧚ߣߎࠈ߇ห᭽ߩ᧦ઙߢታ㛎⊛ߦ᳞߼ߚ෻〡ᢔ ੂᢿ㕙Ⓧߩ୯ߣߒߡ㧘3u10-25 _cm2_/sr ޽ࠆ޿ߪߘࠇએ ਄ߩ୯߇ႎ๔ߐࠇߡ޿ࠆ㧚ߎߩ႐วߩਇ৻⥌ߪ㧘ታ 㛎࠺࡯࠲ߩᣇ߇ᄢ߈ߥ୯ߦߥߞߡ߅ࠅ㧘ౝᲖ㔚ሶߦ ࠃࠆㆤ⭁ߣߪ⇣ߥࠆ⃻⽎ߦࠃࠆ߽ߩߢ޽ࠆ㧚1 MeV ࠃࠅ㜞޿ࠛࡀ࡞ࠡ࡯ߩ He ࠗࠝࡦ߇᳓⚛ේሶߣⴣ⓭ ߔࠆ႐วߦߪ㧘ේሶᩭߩࠢ࡯ࡠࡦ㓚ოࠍ⓭߈ᛮߌࠆ ߎߣߦࠃߞߡ㧘෻〡ᢔੂᢿ㕙Ⓧ߇࡜ࠩࡈࠜ࡯࠼ߩᑼ ߦᓥࠊߥߊߥࠆߩߢ޽ࠆ㧚⹦⚦ߪ╙ 3 ࿁ߢ⚫੺ߒߚ ޿㧚 2.3. _㒖ᱛ⢻ ৻⥸ߦ㧘޽ࠆࠛࡀ࡞ࠡ࡯ࠍ߽ߞߚࠗࠝࡦߪ㧘ᇦ⾰ ਛࠍㅢㆊߔࠆ㓙ߦߘߩࠛࡀ࡞ࠡ࡯ߩ৻ㇱ߹ߚߪోㇱ ࠍᄬ߁㧚ߘߩᄬ߁ࠛࡀ࡞ࠡ࡯ߩᄢ߈ߐߪᇦ⾰ࠍㅢㆊ ߒߚ〒㔌ߦᔕߓߡᄌൻߔࠆ㧚ᇦ⾰ߦ౉኿ߒߚࠗࠝࡦ ߇ᇦ⾰ਛߢᄬ߁ࠛࡀ࡞ࠡ࡯ߣᇦ⾰ਛࠍㅢㆊߒߚ〒㔌 ࠍ㑐ଥઃߌࠆ᭎ᔨ߇ࠛࡀ࡞ࠡ࡯៊ᄬ㧔energy loss㧕߹ ߚߪ㒖ᱛ⢻㧔stopping power㧕ߢ޽ࠆ㧚ㅢᏱ㧘ࠛࡀ࡞ ࠡ࡯៊ᄬߪ dE/dx㧔න૏⿛ⴕ㐳޽ߚࠅߦᄬ߁ࠛࡀ࡞ ࠡ࡯㧕ߢቯ⟵ߐࠇ㧘න૏ߣߒߡߪ㧘ߚߣ߃߫ eV/nm㧘 MeV/mm _{ߥߤߢ޽ࠄࠊߐࠇࠆ㧚ㅢᏱ㧘㒖ᱛ⢻ߪ} (1/N)u(dE/dx)߹ߚߪ(1/U)u(dE/dx)ߢቯ⟵ߐࠇࠆ㧚ߎߎ ߢ N ߪේሶኒᐲ㧔atoms/cm3_{㧕㧘Uߪ⾰㊂ኒᐲ㧔g/cm}3 㧕 ߢ޽ࠆ㧚㒖ᱛ⢻ߩන૏ߣߒߡߪ㧘ߚߣ߃߫ eV/(1015 atoms/cm2₎ 㧘keV/(mg/cm2₎ ߥߤߢ޽ࠄࠊߐࠇࠆ㧚㒖ᱛ ⢻ߪ㒖ᱛᢿ㕙Ⓧ㧔stopping cross section㧕ߣ߽⒓ߐࠇ ߡ޿ࠆ㧚ផᅑߐࠇࠆන૏♽ߦߟ޿ߡߪᓟߢ⺑᣿ߔࠆ㧚

ᇦ⾰ਛߦᾖ኿ߐࠇߚࠗࠝࡦߪ㧘ᇦ⾰ਛߢᒢᕈᢔੂ ߽ߒߊߪ㕖ᒢᕈᢔੂࠃߞߡࠛࡀ࡞ࠡ࡯ࠍᄬ߁㧚ᒢᕈ

ᢔੂߦࠃࠆ㒖ᱛ⢻ߪᩭ⊛㒖ᱛ⢻ Sn㧔nuclear stopping

power_{㧕㧘㕖ᒢᕈᢔੂߦࠃࠆࠛࡀ࡞ࠡ࡯៊ᄬߪ㔚ሶ⊛}

㒖ᱛ⢻ Se㧔electronic stopping power㧕ߣ๭߫ࠇࠆ㧚㜞 ࠛࡀ࡞ࠡ࡯߿ਛࠛࡀ࡞ࠡ࡯ࠗࠝࡦᢔੂߦ߅޿ߡߪ㧘 㔚ሶ⊛㒖ᱛ⢻ߦࠃࠆࠛࡀ࡞ࠡ࡯៊ᄬ߇ఝ൓ߢ㧘ૐࠛ ࡀ࡞ࠡ࡯ࠗࠝࡦᢔੂߦ߅޿ߡߪ㧘ᩭ⊛㒖ᱛ⢻ߦࠃࠆ ࠛࡀ࡞ࠡ࡯៊ᄬ߇ఝ൓ߢ޽ࠆ㧚 ࠗࠝࡦᢔੂಽᨆߦ߅ߌࠆࠛࡀ࡞ࠡ࡯៊ᄬߣᷓߐߩ 㑐ଥࠍᮨᑼ⊛ߦ࿑ 11 ߦ␜ߔ㧚ࠛࡀ࡞ࠡ࡯E0ߢ౉኿ ߒߚࠗࠝࡦߪ⌕⋡ේሶߦⴣ⓭ߔࠆ߹ߢߦᇦ⾰ਛߢࠛ ࡀ࡞ࠡ࡯'Einࠍᄬ߁㧚ߎߩߣ߈ᄬ߁ࠛࡀ࡞ࠡ࡯ߪᇦ ⾰ߩ⚵ᚑ㧘ኒᐲ㧘߅ࠃ߮ㅢㆊ〒㔌ߦࠃߞߡ᳿߹ࠆ㧚 ᮡ⊛ේሶߦࠞࠗࡀࡑ࠹ࠖ࠶ࠢ࿃ሶ K ߢᢔੂߐࠇࠆߣ㧘 ᢔੂ⋥ᓟߩᢔੂࠗࠝࡦߩࠛࡀ࡞ࠡ࡯ߪ K(E0-'Ein)ߣ ߥࠆ㧚ߘߎ߆ࠄߐࠄߦ⌀ⓨਛߦ㘧߮಴ߔ߹ߢߦᇦ⾰ ਛߢࠛࡀ࡞ࠡ࡯'Eout ࠍᄬ߁㧚ߎߩ៊ᄬࠛࡀ࡞ࠡ࡯ 㧔K'Ein+'Eout㧕߆ࠄ㧘ᮡ⊛ේሶ߇ሽ࿷ߒߡ޿ߚᷓߐ ߇⸘▚ߐࠇࠆ㧚ߎߩࠃ߁ߦ㧘‛⾰ਛߦ߅ߌࠆࠗࠝࡦ ߩࠛࡀ࡞ࠡ࡯៊ᄬ߇㧘ࠗࠝࡦᢔੂಽᨆߦ߅޿ߡ㧘ᷓ ߐᣇะಽᨆߩ߽ߣߦߥߞߡ޿ࠆ㧚 ࠗࠝࡦ߇ᇦ⾰ਛߢᄬ߁ࠛࡀ࡞ࠡ࡯ߩᄢ߈ߐߪ㧘ᇦ ⾰ߩ⚵ᚑߦࠃߞߡ⇣ߥࠆ㧚ᇦ⾰ਛߦ߅ߌࠆࠗࠝࡦߩ ࠛࡀ࡞ࠡ࡯៊ᄬࠍ㧘න૏⿛ⴕ㐳޽ߚࠅߩࠛࡀ࡞ࠡ࡯ ߢ޽ࠄࠊߒߚ߽ߩ߇㒖ᱛ⢻ߢ޽ࠆ㧚ᇦ⾰ߩන૏ᷓߐ ߪ㧘㐳ߐߢ⴫ߔ႐วߣන૏㕙Ⓧ޽ߚࠅߩ‛⾰㊂ߢ⴫ ߔ႐ว߇޽ࠆ㧚න૏㕙Ⓧ޽ߚࠅߩ‛⾰㊂ߪ㧘㐳ߐߣ ኒᐲߩⓍ㧘ߔߥࠊߜ㕙ኒᐲߢ޽ࠆ㧚ߎߩ㕙ኒᐲߪ૶ ࠊࠇࠆන૏♽ߦࠃߞߡ⇣ߥࠅ㧘㐳ߐ㧔cm㧕ߣ㊀㊂ኒ ᐲ㧔g/cm3_{㧕ߩⓍߪ㊀㊂㕙ኒᐲ㧔g/cm}2_{㧕㧘㐳ߐ㧔cm㧕} ߣ ේ ሶ ኒ ᐲ 㧔 atoms/cm3_{㧕 ߩ Ⓧ ߪ ේ ሶ 㕙 ኒ ᐲ} 㧔atoms/cm2_{㧕ߣߥࠆ㧚ࠗࠝࡦᢔੂߩේℂ߿ℂ⺰ࠍ⸥} ㅀߔࠆ႐วߪߤߩන૏♽ߢ߽ߣߊߦ໧㗴ߥ޿߇㧘ታ 㓙ߦᷓߐᣇะಽᨆߩ⸃ᨆࠍߔࠆ႐ว߿㧘ߘߩ⚿ᨐࠍ ᱜߒߊ↪޿ࠆߚ߼ߦߪ㧘ේሶ㕙ኒᐲ㧔atoms/cm2_㧕޽ ߚࠅߩ୯ߢ޽ࠄࠊߐࠇߚ㒖ᱛ⢻ [eV/(atoms/cm2_{)] ߩ} ᛒ޿ߦᘠࠇߡ߅ߊᔅⷐ߇޽ࠆ㧚 He ࠗࠝࡦߦኻߔࠆ㔚ሶ⊛㒖ᱛ⢻ Seߩ୯ࠍ⸘▚ߔ ࠆߚ߼ߦ㧘Andersen ߣ Ziegler ߦࠃࠅਈ߃ࠄࠇߚ⚻㛎 ᑼࠍᑼ(6)ߦ␜ߔ[6->5]㧚ߎߎߢ SLowߪૐࠛࡀ࡞ࠡ࡯ 㗔ၞߩ㔚ሶ⊛㒖ᱛ⢻㧘SHighߪ㜞ࠛࡀ࡞ࠡ࡯㗔ၞߩ㔚 ሶ⊛㒖ᱛ⢻ߢ޽ࠆ㧚E ߪ He ࠗࠝࡦߩࠛࡀ࡞ࠡ࡯㧘 A1߆ࠄ A5ߪᮡ⊛ర⚛Ფߦਈ߃ࠄࠇߚቯᢙߢ޽ࠆ㧚౉ ኿☸ሶߩㅦᐲࠍᮡ⊛ේሶߩଔ㔚ሶߩㅦᐲߣᲧセߒߡ㧘 E₀ 㰱Ein

㰱Eout E=K(E0-㰱Ein)- 㰱Eout

Fig. 11. Shematic diagram showing relation between the en-ergy loss and the depth of target atoms in ion scattering analy-sis.

౉኿☸ሶߩㅦᐲ߇ㆃ޿႐วࠍ Low㧘ㅦ޿႐วࠍ High ߣߒߡ޿ࠆ㧚 High Low e 1 1 1 S S S  (6-1) 2 1 Low A E A S (6-2) ¸¸¹ · ¨¨© § _{ AE} E A E A S 3 4 ₅ High ln 1 (6-3) Si_{ਛߦ߅ߌࠆ He ࠗࠝࡦߩ㒖ᱛ⢻ࠍ࿑ 12 ߦ␜ߔ㧚} ᮮゲߪᾖ኿ࠗࠝࡦߩࠛࡀ࡞ࠡ࡯㧘❑ゲߪන૏㕙ኒᐲ ޽ߚࠅߩ㒖ᱛ⢻ [eV/(1015_atoms/cm2_)] ߢ޽ࠆ㧚ታ㓙 ߦᑼ(6)ࠍ↪޿ߡ㔚ሶ⊛㒖ᱛ⢻ࠍ⸘▚ߔࠆߣ߈ߦ SLow ߿ SHighࠍᗧ⼂ߔࠆᔅⷐߪߥ޿߇㧘࿑ߦߪ S ߣߣ߽ߦ

SLowߣ SHigh߽ࡊࡠ࠶࠻ߒߚ㧚SLowߪૐࠛࡀ࡞ࠡ࡯஥

ߦ߅ߌࠆ Seߩẋㄭ✢ߦߥߞߡ޿ࠆߎߣ߆ࠄૐࠛࡀ࡞ ࠡ࡯㗔ၞߦ߅ߌࠆ㔚ሶ⊛㒖ᱛ⢻ࠍ㧘SHighߪ㜞ࠛࡀ࡞ ࠡ࡯஥ߦ߅ߌࠆ Seߩẋㄭ✢ߦߥߞߡ޿ࠆߎߣ߆ࠄ㧘 㜞ࠛࡀ࡞ࠡ࡯㗔ၞߦ߅ߌࠆ㔚ሶ⊛㒖ᱛ⢻ࠍᡰ㈩ߒߡ ޿ࠆᑼߢ޽ࠆߎߣ߇ࠊ߆ࠆ㧚࿑ 12 ߦߪᩭ⊛㒖ᱛ⢻ Sn߽␜ߒߚ㧚ᩭ⊛㒖ᱛ⢻ߪ Krypton-Carbon ࡐ࠹ࡦ ࠪࡖ࡞ࠍ઒ቯߒߡዉ಴ߐࠇߚᑼ[6->5]߆ࠄ⸘▚ߒߚ ߽ߩߢ޽ࠆ㧚 H_{ࠗࠝࡦ߇ Si ߿ Au ߦ౉኿ߒߚ႐ว㧘߅ࠃ߮㧘He} ࠗࠝࡦ߇ Si ߿ Au ߦ౉኿ߒߚ႐วߩ㧘㔚ሶ⊛㒖ᱛ⢻ ߩࠛࡀ࡞ࠡ࡯ଐሽᕈࠍ࿑ 13 ߦ␜ߔ㧚H ࠗࠝࡦߩ㒖ᱛ ⢻ߩ⸘▚ߦߪㆡ↪▸࿐߇ 1 MeV ߹ߢߩ⚻㛎ᑼ[6->5] ࠍ㧘He ࠗࠝࡦߩ㒖ᱛ⢻ߩ⸘▚ߦߪㆡ↪▸࿐߇ 10 MeV߹ߢߩᑼ(6)ࠍ↪޿ߚ㧚H ࠗࠝࡦᾖ኿ߩ႐ว㧘Si ߩ㒖ᱛ⢻ߩᦨᄢ୯ߪ 25 eV/(1015 _atoms/cm2₎ 㧘Au ߩߘ ࠇߪ 46 eV/(1015 _atoms/cm2_{)㧚He ࠗࠝࡦᾖ኿ߩ႐ว㧘} Si_{ߩ㒖ᱛ⢻ߩᦨᄢ୯ߪ 73 eV/(10}15 _atoms/cm2₎

㧘Au ߩ ߘࠇߪ 125 eV/(1015 _atoms/cm2_{)ߢ޽ࠆ㧚He ࠗࠝࡦߦ} ኻߔࠆ㒖ᱛ⢻ߪ㧘H ߦኻߔࠆ㒖ᱛ⢻ࠃࠅ߽ᦨᄢߢ⚂ 3୚ᄢ߈޿㧚Si ߣ Au ߩᲧセߢߪ㧘Au ߩ㒖ᱛ⢻߇ Si ߩߘࠇࠃࠅ 2 ୚ᒙᄢ߈޿ߣ޿߁ߎߣ߇ࠊ߆ࠆ㧚 ᷓߐᣇะಽ⸃⢻ߪ㧘᷹ቯࠪࠬ࠹ࡓߩࠛࡀ࡞ࠡ࡯ಽ ⸃⢻߇หߓߢ޽ࠇ߫㧘㒖ᱛ⢻߇ᄢ߈޿߶ߤ⦟޿㧚଀ ߃߫ Si ࠍಽᨆߔࠆ႐ว㧘2 MeV ߣᢙ 100 keV ߩ He ࠗࠝࡦߣߢߪ㒖ᱛ⢻ߪ 1.5 ୚ߊࠄ޿⇣ߥࠆߚ߼㧘ห ߓࠛࡀ࡞ࠡ࡯ಽ⸃⢻ߩᬌ಴ེߢߪ㧘ᢙ 100 keV ߩ He ࠗࠝࡦࠍ↪޿ߚ߶߁߇㧘⦟޿ᷓߐಽ⸃⢻ߩࠬࡍࠢ࠻ ࡞߇ᓧࠄࠇࠆ㧚 ߹ߚ㧘MeV 㗔ၞߢߪ㧘᳓⚛ࠗࠝࡦߪ He ࠗࠝࡦࠃ ࠅ߽㒖ᱛ⢻߇ዊߐ޿ߎߣ߆ࠄ㧘หߓࠛࡀ࡞ࠡ࡯ಽ⸃ ⢻ߩᬌ಴ེߢಽᨆߒߚ႐ว㧘He ࠗࠝࡦࠍᾖ኿ߒߚᣇ ߇㜞޿ᷓߐಽ⸃⢻ߩࠬࡍࠢ࠻࡞߇ᓧࠄࠇࠆ㧚ߒ߆ߒ ߥ߇ࠄ㧘᳓⚛ࠗࠝࡦߪ㒖ᱛ⢻߇ዊߐ޿ߚ߼ He ࠗࠝ ࡦࠃࠅ߽ㅘㆊ⢻߇㜞޿ߎߣ߆ࠄ㧘1 Pm ࠍ⿥߃ࠆ⤑ߩ ಽᨆ߇น⢻ߢ޽ࠆߣ޿߁೑ὐ߇޽ࠆ㧚 ౖဳ⊛ߥࠗࠝࡦᢔੂߩ᧦ઙߦ߅޿ߡ㧘㒖ᱛ⢻߇ర ⚛ߦࠃߞߡߤߩࠃ߁ߦᄌൻߔࠆ߆ࠍ࿑ 14 ߦ␜ߔ㧚ේ ሶ⇟ภߩჇᄢߣߣ߽ߦ㒖ᱛ⢻߇ᄢ߈ߊߥࠆ௑ะߦ޽ ࠆ߇㧘ේሶ⇟ภߦኻߒߡන⺞ߦߪᄌൻߒߡ޿ߥ޿㧚 ߎߎ߹ߢ⺑᣿ߒߡ߈ߚ㒖ᱛ⢻ߦ㑐ߔࠆ⸥ㅀߪ㧘ߔ ߴߡ㧘ᇦ⾰߇න৻ర⚛߆ࠄߥࠆ႐วߢ޽ࠆ㧚ᇦ⾰߇ ⶄᢙߩర⚛߆ࠄ᭴ᚑߐࠇ㧘⒳ޘߩ⚿ว᭽ᑼࠍ฽߻႐ ว㧘㒖ᱛ⢻ߪߤߩࠃ߁ߦߒߡ᳞߼ࠄࠇࠆߩ߆㧚ߎߩ ࠃ߁ߥᇦ⾰ߩ㒖ᱛ⢻ߪ㧘ᮡ⊛ේሶߣ౉኿ࠗࠝࡦߩ⋧ ੕૞↪ߪᮡ⊛ේሶߩ߹ࠊࠅߩⅣႺߦଐሽߒߥ޿ߣ઒ ቯߒ㧘᭴ᚑర⚛ߩ㒖ᱛ⢻ߩ✢ᒻ⚿วߢ޽ࠄࠊߔߎߣ ߇ߢ߈ࠆߣ޿߁ Bragg ೣߦࠃࠅ⸘▚ߐࠇࠆ㧚 㪇 㪌㪇 㪈㪇㪇 㪈㪌㪇 㪈㪇 㪈㪇㪇 㪈㪇㪇㪇 㪈㪇㪇㪇㪇 㪟㪼㩷㫀㫆㫅㩷㪼㫅㪼㫉㪾㫐㩷㩿㫂㪼㪭㪀 㪪㫋 㫆㫇㫇㫀 㫅㪾㩷 㫇㫆 㫎㪼㫉 㩿㪼㪭 㪆㩿㪈㫏 㪈㪇 㪈㪌 㪸㫋 㫆㫄 㫊㪆㪺㫄 㪉 㪀㪀 㪪㪼 㪪㪟㫀㪾㪿 㪪㪣㫆㫎 㪪㫅

Fig. 12. He ion energy dependence of an electronic stopping power Se and a nuclear stopping power Sn for Si target.

㪇 㪉㪇 㪋㪇 㪍㪇 㪏㪇 㪈㪇㪇 㪈㪉㪇 㪈㪋㪇 㪈㪇 㪈㪇㪇 㪈㪇㪇㪇 㪈㪇㪇㪇㪇 㪜㫅㪼㫉㪾㫐㩷㩿㫂㪼㪭㪀 㪪㫋 㫆㫇㫇㫀 㫅㪾 㩷㫇 㫆㫎 㪼㫉 㩿㪼 㪭㪆㩿㪈㫏㪈㪇 㪈㪌 㪸㫋 㫆㫄 㫊㪆 㪺㫄 㪉 㪀㪀 㪪㫀㪃㩷㪟㪼 㪘㫌㪃㩷㪟 㪪㫀㪃㩷㪟 㪘㫌㪃㩷㪟㪼

Fig. 13. Energy dependence of the stopping power of Si and Au target for the projectile of H and He.

i iS

C

S 6 (7)

ߎߎߢ Ciߪర⚛ i ߩේሶỚᐲ㧘Siߪర⚛ i ߩ㒖ᱛ

⢻ߢ޽ࠆ㧚Baglin ߣ Ziegler ߪ 2 MeV ߩ He ࠗࠝࡦࠍ ⒳ޘߩ⚐‛⾰ߣൻว‛㧔RhSi, HfSi, SiO2, Al2O3, Si3N4, AlN, W2N3, SiC, ࡔ࡜࠾ࡦ, ߅ࠃ߮ ࠕ࠺࠾ࡦ㧕ߦᾖ኿ ߒߡ㒖ᱛ⢻ࠍታ㛎⊛ߦ᳿ቯߒ㧘᷹ቯ⺋Ꮕߩ▸࿐ౝ㧔⚂ 2%㧕ߢ Bragg ೣ߇ᚑࠅ┙ߟߣႎ๔ߒߡ޿ࠆ[7->6]㧚 ߒ߆ߒߥ߇ࠄ㧘Boutard ࠄߪ⒳ޘߩ὇ൻ᳓⚛ߩ㒖ᱛ⢻ ࠍ⹦⚦ߦ⺞ߴ㧘὇ൻ᳓⚛᧚ᢱߢߪ Bragg ೣߢ⸘▚ߒ ߚ㒖ᱛ⢻߇ታ㓙ࠃࠅ߽ 30㧑⒟ᐲૐߊ⷗Ⓧ߽ࠆ႐ว ߇޽ࠅ㧘ߘߩේ࿃ߣߒߡ㧘⚿ว᭽ᑼ㧔sp2_{߿ sp}3_ߥߤ㧕 ߦࠃࠆ㒖ᱛ⢻ߩ㆑޿߇⠨߃ࠄࠇߡ޿ࠆ[8->7]㧚 [Q&A] Q. _{න૏㐳ߐߩ㒖ᱛ⢻ߣන૏㕙ኒᐲߩ㒖ᱛ⢻ߩ㑐ଥ} ߇ࠃߊࠊ߆ࠄߥ޿㧚 A. _{ࠪ࡝ࠦࡦࠍ଀ߦߒߡ㧘ෘߐߩන૏ߦߟ޿ߡ⺑᣿ߔ} ࠆ㧚ࠪ࡝ࠦࡦߩ㊀㊂ኒᐲߪ 2.33 g/cm3_{ߢ޽ࠆ㧚ෘߐ 1} cm_{ߩࠪ࡝ࠦࡦߩ㕙ኒᐲ㧔න૏㕙Ⓧ޽ߚࠅߩ㊀ߐ㧕ߪ㧘} ㊀㊂ኒᐲߦෘߐࠍដߌߡ㧘2.33 g/cm2_{ߣߥࠆ㧚ߎߎߦ㧘} ෘߐ 1 cm ߩࠪ࡝ࠦࡦߣ㧘㕙ኒᐲ 2.33 g/cm2_ߩࠪ࡝ࠦ ࡦߪ╬ଔߢ޽ࠆ㧚ห᭽ߦ㧘ෘߐ 100 nm ߩࠪ࡝ࠦࡦߩ 㕙 ኒ ᐲ ߪ 㧘 ㊀ ㊂ ኒ ᐲ ߦ ෘ ߐ ࠍ ដ ߌ ߡ 2.33u10-5 g/cm2_{=23.3 Pg/cm}2_{ߣߥࠅ㧘ෘߐ 100 nm ߩࠪ࡝ࠦࡦߣ} 㕙ኒᐲ 23.3 Pg/cm2_{ߩࠪ࡝ࠦࡦߪ╬ଔߢ޽ࠆ㧚} ࠗࠝࡦᢔੂߢߪ㊀㊂ኒᐲࠃࠅ߽ේሶᢙኒᐲ߇ࠃߊ ↪޿ࠄࠇࠆ㧚ࠪ࡝ࠦࡦߩේሶᢙኒᐲߪ 5u1022 at-oms/cm3_{ߢ޽ࠆ߆ࠄ㧘ෘߐ 1 cm ߩࠪ࡝ࠦࡦߪ㕙ኒᐲ} 5_u1022 _atoms/cm2_{ߩࠪ࡝ࠦࡦߣ╬ଔߢ޽ࠅ㧘ෘߐ 1 nm} ߩࠪ࡝ࠦࡦߪ 5u1015 _atoms/cm2_{ߩࠪ࡝ࠦࡦߣ╬ଔߢ} ޽ࠆ㧚ࠛࡀ࡞ࠡ࡯៊ᄬࠍ޽ࠄࠊߔ႐วߦࠃߊ↪޿ࠄ ࠇࠆන૏㕙ኒᐲߪ 1u1015 _atoms/cm2 ߢ㧘ߎࠇߪ㧘ࠪ ࡝ࠦࡦߢ޽ࠇ߫ෘߐ 0.2 nm ߦ⋧ᒰߔࠆ㧚 2 MeV_{ߩ He ࠗࠝࡦߦኻߔࠆࠪ࡝ࠦࡦߩ㒖ᱛ⢻ࠍ} න૏㕙ኒᐲߢ޽ࠄࠊߔߣ 48 eV/(1015 _atoms/cm2_{) ߢ} ޽ࠆ㧚න૏㐳ߐߩ㒖ᱛ⢻ߪ㧘ߎࠇߦේሶᢙኒᐲ 㧔5u1022 _atoms/cm3_{㧕ࠍ߆ߌߡ㧘240 eV/nm ߣ᳞߼ࠄ} ࠇࠆ㧚ࠪ࡝ࠦࡦන⚿᥏ߩ႐วߦߪ㧘ኒᐲ߇ਇᄌߢ޽ ࠆߣߺߥߖࠆߩߢ㧘㕙ኒᐲߣෘߐ㧔㐳ߐ㧕ߪ 1 ኻ 1 ߦኻᔕߔࠆߩߢ㧘㒖ᱛ⢻ࠍන૏㐳ߐߢ޽ࠄࠊߒߡ߽ න૏㕙ኒᐲߢ޽ࠄࠊߒߡ߽໧㗴ߪή޿㧚ߣߎࠈ߇㧘 ⚵ᚑ߇หߓߢ߽ኒᐲ߇⇣ߥࠆ႐วߦߪ㧘㒖ᱛ⢻ߦ↪ ޿ࠆන૏♽ߩ⦟ุ߇᣿ࠄ߆ߦߥࠆ㧚ߚߣ߃߫᳓⚛ࡈ ࡝࡯ߩࠕࡕ࡞ࡈࠔࠬࠞ࡯ࡏࡦߢߪ㧘ኒᐲ 2 ߩ߽ߩ߽ ޽ࠇ߫ኒᐲ 2.4 ߩ߽ߩ߽޽ࠆ㧚2 MeV ߩ He ࠗࠝࡦߦ ኻߔࠆ὇⚛ߩ㒖ᱛ⢻ࠍන૏㕙ኒᐲߢ޽ࠄࠊߔߣ 27 eV/(1015 _atoms/cm2_{)ߢ޽ࠆ㧚ߎࠇࠍන૏㐳ߐߩ㒖ᱛ⢻} ߦᄌ឵ߔࠆߣ㧘ኒᐲ 2 ߩ႐วߪ 270 eV/nmߣߥࠆ߇㧘 ኒᐲ 2.4 ߩ႐วߪ 318 eV/nm ߣߥࠅ㧘ኒᐲߦࠃߞߡ 㒖ᱛ⢻ߩ୯߇㆑ߞߡߊࠆ㧚ࠗࠝࡦᢔੂࠬࡍࠢ࠻࡞ߩ ࠛࡀ࡞ࠡ࡯ࠬࠤ࡯࡞ࠍෘߐࠬࠤ࡯࡞ߦᄌ឵ߔࠆ႐ว㧘 න૏㕙ኒᐲߩ㒖ᱛ⢻ࠍ૶߃߫ෘߐߪ৻⟵⊛ߦ᳿߼ࠄ ࠇࠆ㧚ߚߛߒ㧘ෘߐߩ⴫␜ߪ㕙ኒᐲߦߥࠆߚ߼ࠊ߆ ࠅߦߊ޿㧚ߎࠇߦኻߒ㧘න૏㐳ߐߩ㒖ᱛ⢻ࠍ૶ߞߡ ෘߐࠬࠤ࡯࡞ߦᄌ឵ߔࠇ߫ෘߐࠍࡔ࡯࠻࡞න૏ߢ⴫ ␜ߢ߈ࠆߩߢࠊ߆ࠅ߿ߔ޿㧚ߚߛߒ㧘ኒᐲ߇ਇ᣿ߩ ႐วߪන૏㐳ߐߩ㒖ᱛ⢻߇૶߃ߥ޿ߎߣߦߥࠆ㧚 એ਄ߩߎߣ߆ࠄ㧘ࠗࠝࡦᢔੂಽᨆߢߪ㧘ㅢᏱ㧘න ૏㕙ኒᐲߢ޽ࠄࠊߐࠇߚ㒖ᱛ⢻߇↪޿ࠄࠇߡ޿ࠆ㧚 ߘߩߚ߼㧘ࠬࡍࠢ࠻࡞⸃ᨆߦࠃߞߡᓧࠄࠇࠆᷓߐᣇ ะಽᏓߩᷓߐߩࠬࠤ࡯࡞ߪ㧘߹ߕ㧘㕙ኒᐲߢ޽ࠄࠊ ߐࠇࠆ㧚㕙ኒᐲߢ޽ࠄࠊߐࠇߚᷓߐᣇะಽᏓࠍ㐳ߐ ߩන૏ߢ޽ࠄࠊߔߚ߼ߦߪ㧘⚵ᚑ߇⇣ߥࠆጀߏߣߦ ኒᐲࠍ᳿߼ߡ㐳ߐߦᄌ឵ߔࠆߎߣ߇ᔅⷐߦߥࠆߩߢ ޽ࠆ㧚 2.4. ࠛࡀ࡞ࠡ࡯ࠬ࠻࡜ࠣ࡝ࡦࠣ ౉኿ࠗࠝࡦ߇‛⾰ਛࠍㅘㆊߔࠆߣ߈㧘‛⾰ਛࠍ⒖ േߒߥ߇ࠄᓢޘߦࠛࡀ࡞ࠡ࡯ࠍᄬ߁ߩߢ޽ࠆ߇㧘ᄬ ߁ࠛࡀ࡞ࠡ࡯ߦߪᐢ߇ࠅ߇↢ߓࠆ㧚ߎࠇߪ㧘‛⾰ਛ ࠍㅢㆊߔࠆ㓙ߦ↢ߓࠆࠛࡀ࡞ࠡ࡯៊ᄬߪ㧘ߘࠇߙࠇ ⁛┙ߒߚⴣ⓭ㆊ⒟ߢ↢ߓࠆߚ߼ߢ޽ࠆߣ⠨߃ࠄࠇߡ ޿ࠆ㧚ห৻ߩ౉኿ࠛࡀ࡞ࠡ࡯ߢห৻ߩෘߐߛߌㅘㆊ ߒߡ߽㧘ᄬ߁ࠛࡀ࡞ࠡ࡯ߪ޽ࠆᐔဋ୯ߩ߹ࠊࠅߦಽ Ꮣߔࠆ㧚ߎߩ⃻⽎ߪࠛࡀ࡞ࠡ࡯ࠬ࠻࡜ࠣ࡝ࡦࠣߣ๭ ߫ࠇࠆ㧚 㪇 㪉㪇 㪋㪇 㪍㪇 㪏㪇 㪈㪇㪇 㪈㪉㪇 㪈㪋㪇 㪈㪍㪇 㪈㪏㪇 㪉㪇㪇 㪇 㪉㪇 㪋㪇 㪍㪇 㪏㪇 㪈㪇㪇 㪘㫋㫆㫄㫀㪺㩷㫅㫌㫄㪹㪼㫉㩷㫆㪽㩷㫋㪸㫉㪾㪼㫋㩷㪸㫋㫆㫄㩷㪱㪉 㪪㫋 㫆㫇 㫇㫀 㫅㪾㩷㫇㫆㫎 㪼㫉 㩿㪼 㪭㪆 㪈㫏 㪈㪇 㪈㪌 㪸㫋 㫆㫄 㫊㪆 㪺㫄 㪉 㪀 㪵 㪉㩷㪤㪼㪭 㪈㩷㪤㪼㪭

Fig. 14. Stopping power of He projectile to all elements for the projectile energy of 1 and 2 MeV.

ࠛࡀ࡞ࠡ࡯ࠬ࠻࡜ࠣ࡝ࡦࠣߪ Bohr ߦࠃߞߡߪߓ ߼ߡ⸘▚ߐࠇ㧘ᰴߩᑼߢ޽ࠄࠊߐࠇߡ޿ࠆ[1]㧚

 

Ze2 2Z₂Nt 1 2 B 4S : (8) ߎߎߢ N ߪᮡ⊛‛⾰ߩේሶኒᐲ㧔atoms/cm3 㧕㧘t ߪᮡ ⊛‛⾰ߩෘߐ(cm)ߢ޽ࠆ㧚Nt ߪ㕙ኒᐲ㧔atoms/cm2_㧕 ࠍ޽ࠄࠊߔ㧚:B2ߪࠛࡀ࡞ࠡ࡯៊ᄬߩࠁࠄ߉ߩ 2 ਸ਼ ᐔဋߔߥࠊߜಽᢔߢ޽ࠅ㧘:BߪᮡḰ஍Ꮕߢ޽ࠆ㧚ࠛ ࡀ࡞ࠡ࡯ಽ⸃⢻GE ߪㅢᏱ㧘ඨ୯᏷㧔FWHM㧕ߢ޽ࠄ ࠊߐࠇࠆߩߢ㧘ࠟ࠙ࠬಽᏓߦ߅ߌࠆඨ୯᏷ߣಽᢔߩ 㑐ଥ㧔FWHM=2V(2ln2)1/2_{|2.35V㧕߆ࠄ㧘ඨ୯᏷ߢ޽} ࠄࠊߒߚࠛࡀ࡞ࠡ࡯ࠬ࠻࡜ࠣ࡝ࡦࠣߪ 2.35:Bߣߥ ࠆ㧚Bohr ߩࠛࡀ࡞ࠡ࡯ࠬ࠻࡜ࠣ࡝ࡦࠣߩᑼߪ㧘౉኿ ࠗࠝࡦߣᮡ⊛ේሶߩේሶ⇟ภ߅ࠃ߮ෘߐߦଐሽߒ㧘 ౉኿ࠗࠝࡦߩࠛࡀ࡞ࠡ࡯ߦߪଐሽߒߥ޿ߎߣࠍ␜ߒ ߡ޿ࠆ㧚Bohr ߪᮡ⊛ේሶਛߩ㔚ሶߪ㕒ᱛߒߡ߅ࠅ㧘 ᾖ኿☸ሶߪቢోߦࠗࠝࡦൻߒߡ޿ࠆߣ޿߁⁁ᘒࠍ઒ ቯߒߡࠛࡀ࡞ࠡ࡯ࠬ࠻࡜ࠣ࡝ࡦࠣߩᑼࠍዉ޿ߚ㧚ߘ ߩߚ߼㧘ߎߩࠃ߁ߥ⁁ᘒ߇ㄭૃ⊛ߦᚑࠅ┙ߟ㜞ࠛࡀ ࡞ࠡ࡯㗔ၞ㧔RBS ࠃࠅᦝߦ㜞޿ࠛࡀ࡞ࠡ࡯㗔ၞ㧕ߢ ߪታ㛎⚿ᨐߣว߁߇㧘RBS ߢㅢᏱ૶ࠊࠇࠆ 2 MeV એ ਅߩࠛࡀ࡞ࠡ࡯㗔ၞߢߪታ㓙ࠃࠅ߽ᄢ߈ߊ⷗Ⓧ߽ࠆ ߎߣߦߥࠆ㧚 Heࠗࠝࡦࠍ Si ߦᾖ኿ߒߚ႐วߩ Bohr ߩࠛࡀ࡞ ࠡ࡯ࠬ࠻࡜ࠣ࡝ࡦࠣࠍᷓߐߦኻߒߡࡊࡠ࠶࠻ߒߚ߽ ߩࠍ࿑ 15 ߦ␜ߔ㧚ඨዉ૕ᬌ಴ེߩࠛࡀ࡞ࠡ࡯ಽ⸃⢻ 㧔~15 keV㧕ߣ╬ଔߥෘߐߪ 500 nm ⒟ᐲߢ޽ࠆ㧚ታ 㓙ߩࠬ࠻࡜ࠣ࡝ࡦࠣߪߎࠇࠃࠅዊߐ޿ߩߢ㧘ඨዉ૕ ᬌ಴ེࠍ↪޿ࠆ㜞ࠛࡀ࡞ࠡ࡯ࠗࠝࡦᢔੂߢߪ㧘ࠛࡀ ࡞ࠡ࡯ࠬ࠻࡜ࠣ࡝ࡦࠣߩᓇ㗀ߪᲧセ⊛ዊߐ޿㧚

Lindhard_{ߣ Schrff㧘Bonderup ߣ Hvelplund ࠄߩℂ} ⺰⊛ᬌ⸛߿⒳ޘߩታ㛎࠺࡯࠲ࠍ〯߹߃ߡ㧘Chu ߪ㧘 ታ㛎࠺࡯࠲ࠍࠃߊ⺑᣿ߢ߈ࠆℂ⺰⸘▚ࠍⴕ޿㧘ߐࠄ ߦ Yang ࠄߪ౏⴫ߐࠇߡ޿ࠆታ㛎⚿ᨐࠍᢛℂߒߡ Chu_{ߩࡕ࠺࡞ࠍ߽ߣߦࡈࠖ࠶࠹ࠖࡦࠣ㑐ᢙࠍឭ᩺ߒ} ߡ޿ࠆ㧚ࠛࡀ࡞ࠡ࡯ࠬ࠻࡜ࠣ࡝ࡦࠣߪਛࠛࡀ࡞ࠡ࡯ ࠗࠝࡦᢔੂߦ߅޿ߡᷓߐᣇะಽ⸃⢻ߩᡰ㈩ⷐ࿃ߦ ߥߞߡ޿ࠆ㧚⹦⚦ߪᰴ࿁⺑᣿ߔࠆ੍ቯߢ޽ࠆ㧚 3. _߅ࠊࠅߦ ╙ 2 ࿁ߩ੹࿁ߪ㧘5 ߟߩၮᧄ᭎ᔨߩ߁ߜ࠴ࡖࡀ࡝ ࡦࠣࠍ㒰ߊ 4 ߟߦߟ޿ߡ㧘࿑ࠍᄙߊߒߡℂ⸃ߒ߿ߔ ߊߒߚߟ߽ࠅߢ޽ࠆ㧚╙ 3 ࿁ߪ㧘㒖ᱛ⢻ߩℂ⺰ߣࠛ ࡀ࡞ࠡ࡯ࠬ࠻࡜ࠣ࡝ࡦࠣࠍ⵬⿷ߔࠆߣߣ߽ߦ㧘࠴ࡖ ࡀ࡝ࡦࠣࠍ⹦ߒߊ⺑᣿ߔࠆ੍ቯߢ޽ࠆ㧚ߥ߅㧘╩⠪ ߩᵻቇࠁ߃ߦ㑆㆑ߞߚ⸥ㅀ߽ᄙޘ޽ࠈ߁߆ߣᕁ߁߇ ߏኈ⿔㗿޿ߚ޿㧚 4. ෳ⠨ᢥ₂

[1] W. K. Chu, J. W. Mayer, and M. A. Nicolet, in Back-scattering Spectrometry, Academic Press (1978). [2] H. H. Brongersma, N. Hazewindus, J. M. van

Nieuwland, A. M. M. Otten, and A. J. Smets, Rev. Sci. Instrum. 49, 707 (1978).

[3] L. C. Feldman and J. W. Mayer, in Fundamentals of Surface and Thin Film Analysis, Elsevier Science Publishing (1986).

[4] Handbook of Modern Ion Beam Materials Analysis, ed. by J. R. Tesmer and M. Nastasi, Materials Re-search Society (1995).

[5] M. Mayer, SIMNRA User’s Guide, MaxPlanck Insti-tut für Plasmaphysik (1997-2002).

[6] J. E. E. Baglin and J. F. Ziegler, J. Appl. Phys. 45,

1413 (1974).

[7] D. Boutard, W. Moller, and B. M. U. Schertzer, Phys. Rev. B 38, 2988 (1988). 㪇 㪌 㪈㪇 㪈㪌 㪉㪇 㪉㪌 㪇 㪉㪇㪇 㪋㪇㪇 㪍㪇㪇 㪏㪇㪇 㪈㪇㪇㪇 㪛㪼㫇㫋㪿㩷㩿㫅㫄㪀 㪙㫆㪿㫉 㩷㪼㫅㪼 㫉㪾 㫐㩷 㫊㫋 㫉㪸 㪾㪾 㫃㫀㫅 㪾㩷 㩿㫂 㪼㪭㪀

Fig. 15. Depth dependence of the Bohr energy straggling of He projectile irradiated to Si target.