サブスレッショルド領域で動作する断熱的論理回路の消費エネルギー解析

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Title サブスレッショルド領域で動作する断熱的論理回路の消費_{エネルギー解析( 本文(Fulltext) )} Author(s) 加藤, 和成 Report No.(Doctoral Degree) 博士(工学) 工博甲第501号 Issue Date 2016-03-25 Type 博士論文 Version ETD URL http://hdl.handle.net/20.500.12099/54560 ※この資料の著作権は、各資料の著者・学協会・出版社等に帰属します。

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Analysis of Energy Consumption for Adiabatic

Logic Circuit Operating in Sub-Threshold Region

2016

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3 ᭶

ຍ⸨ ࿴ᡂ

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ᒱ㜧኱Ꮫ ᕤᏛ◊✲⛉ 㟁Ꮚ᝟ሗࢩࢫࢸ࣒ᕤᏛᑓᨷ

᝟ሗࢩࢫࢸ࣒ᕤᏛㅮᗙ

2016

ᖺ

3 ᭶

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ᒱ㜧኱Ꮫ ᕤᏛ◊✲⛉ 㟁Ꮚ᝟ሗࢩࢫࢸ࣒ᕤᏛᑓᨷ

᝟ሗࢩࢫࢸ࣒ᕤᏛㅮᗙ

2016

ᖺ

3 ᭶

せ᪨

ᮏㄽᩥ࡛ࡣ㸪ࢧࣈࢫࣞࢵࢩࣙࣝࢻ㡿ᇦ࡛ືసࡍࡿ᩿⇕ⓗㄽ⌮ᅇ㊰࡟ࡼࡾᵓᡂࡋࡓᇶ ᮏㄽ⌮ᅇ㊰㸪4_{×4-bit ஌⟬ჾࡢࢩ࣑࣮ࣗࣞࢩࣙࣥ㸪LSI ᐇ⿦࡜ࡑࡢ ᐃ⤖ᯝ㸪ࡑࡋ࡚} ࢧࣈࢫࣞࢵࢩࣙࣝࢻ᩿⇕ⓗㄽ⌮ᅇ㊰ࡢᾘ㈝࢚ࢿࣝࢠ࣮ࡢᩘ⌮ࣔࢹࣝ໬ࢆ♧ࡍ㸬௨ୗ ࡟せ⣙ࢆ♧ࡍ㸬 1. ࢧࣈࢫࣞࢵࢩࣙࣝࢻᅇ㊰࡜᩿⇕ⓗㄽ⌮ᅇ㊰ࢆ⤌ࡳྜࢃࡏࡓ㸪ࢧࣈࢫࣞࢵࢩࣙࣝ ࢻ᩿⇕ⓗㄽ⌮ᅇ㊰ࡢᥦ᱌ࢆ⾜࠺㸬ᥦ᱌ࡋࡓࢧࣈࢫࣞࢵࢩࣙࣝࢻ᩿⇕ⓗㄽ⌮ᅇ㊰ ࡣ㸪2 ┦ࡢ࿘ᮇἼ㟁※࡟ࡼࡾ㥑ືࡉࢀࡿ㸬୍᪉ࡢ㟁※ࡢ᣺ᖜࢆ௚᪉ࡢ 1/2㸪࿘ Ἴᩘࢆ 2 ಸ࡜ࡍࡿࡇ࡜࡛㸪2 ࡘࡢ㟁※ࡢ㟁఩ᕪࡀᑠࡉࡃ࡞ࡿ᫬㛫ࢆ㛗ࡃࡍࡿࡇ ࡜࡟ࡼࡾ㸪₃ࢀ㟁ὶ࡟ࡼࡿᾘ㈝࢚ࢿࣝࢠ࣮ࡢపῶࡀྍ⬟࡜࡞ࡗ࡚࠸ࡿ㸬 2. ᥦ᱌ࡋࡓࢧࣈࢫࣞࢵࢩࣙࣝࢻ᩿⇕ⓗㄽ⌮ᅇ㊰࡜ᚑ᮶ࡢ CMOS ㄽ⌮ᅇ㊰㸪ࢧࣈ ࢫࣞࢵࢩࣙࣝࢻ㡿ᇦ࡛ືసࡉࡏࡓ CMOS ㄽ⌮ᅇ㊰㸪ࢧࣈࢫࣞࢵࢩࣙࣝࢻ㡿ᇦ ࡛ືసࡉࡏࡓᚑ᮶ࡢ᩿⇕ⓗㄽ⌮ᅇ㊰ࡢᛶ⬟ࢆẚ㍑ࡍࡿࡓࡵ㸪0.18 μm CMOS ࣉࣟࢭࢫᢏ⾡ࢆ⏝࠸࡚㸪NAND㸪XOR㸪༙ຍ⟬ჾ㸪඲ຍ⟬ჾ㸪4_{×4-bit ஌⟬ჾ} ࢆタィࡋ㸪SPICE ࢩ࣑࣮ࣗࣞࢩࣙࣥࢆ⾜࠺㸬ࢩ࣑࣮ࣗࣞࢩࣙࣥ⤖ᯝ࠿ࡽ㸪ᥦ᱌ ࡋࡓࢧࣈࢫࣞࢵࢩࣙࣝࢻ᩿⇕ⓗㄽ⌮ᅇ㊰ࡣᚑ᮶ࡢᅇ㊰࡜ẚ㍑ࡋ࡚㸪₃ࢀ㟁ὶ࡟ ࡼࡿᾘ㈝࢚ࢿࣝࢠ࣮ࡀపῶࡉࢀࡿࡇ࡜ࢆ♧ࡍ㸬 3. 4×4-bit ஌⟬ჾࡢ LSI ࢳࢵࣉࡢ〇㐀ࢆ⾜࠸㸪ືస᳨ド࡜㸪ᾘ㈝࢚ࢿࣝࢠ࣮ࡢ ᐃࢆ⾜࠺㸬 ᐃ⤖ᯝ࠿ࡽ㸪ᐇ㝿ࡢ LSI ࢳࢵࣉ࡟࠾࠸࡚ࡶ㸪ࢩ࣑࣮ࣗࣞࢩࣙࣥ࡜

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vi ྠᵝ࡟㸪ᚑ᮶ᅇ㊰ࡼࡾࡶᥦ᱌ࡋࡓࢧࣈࢫࣞࢵࢩࣙࣝࢻ᩿⇕ⓗㄽ⌮ᅇ㊰ࡣ㸪₃ࢀ 㟁ὶ࡟ࡼࡿᾘ㈝࢚ࢿࣝࢠ࣮ࡀపῶࡉࢀࡿࡇ࡜ࢆ♧ࡍ㸬 4. ࢩ࣑࣮ࣗࣞࢩࣙࣥ㸪LSI ࢳࢵࣉࡢ ᐃ⤖ᯝ࠿ࡽ㸪ࢧࣈࢫࣞࢵࢩࣙࣝࢻ᩿⇕ⓗㄽ ⌮ᅇ㊰ࡢᾘ㈝࢚ࢿࣝࢠ࣮ࡣ㸪ᚑ᮶ᅇ㊰ࡢࡼ࠺࡞ RC ➼౯ᅇ㊰࠿ࡽᑟฟࡋࡓᾘ㈝ ࢚ࢿࣝࢠ࣮ᩘ⌮ࣔࢹࣝ࡜ࡣ␗࡞ࡗࡓ≉ᛶࢆᣢࡗ࡚࠸ࡿࡇ࡜ࢆ♧ࡍ㸬ⴭ⪅ࡣ㸪ࢧ ࣈࢫࣞࢵࢩࣙࣝࢻ᩿⇕ⓗㄽ⌮ᅇ㊰ࡢᾘ㈝࢚ࢿࣝࢠ࣮≉ᛶࢆ㏆ఝ࡛ࡁࡿ᪂ࡓ࡞ᾘ ㈝࢚ࢿࣝࢠ࣮ᩘ⌮ࣔࢹࣝࢆᥦ᱌ࡍࡿ㸬 ࣮࣮࢟࣡ࢻ: ࢚ࢿࣝࢠ࣮ࣁ࣮࣋ࢫࢸ࢕ࣥࢢ, ᩿⇕ⓗㄽ⌮, ࢧࣈࢫࣞࢵࢩࣙࣝࢻ㡿ᇦ, ஌⟬ჾ, SPICE ࢩ࣑࣮ࣗࣞࢩࣙࣥ, ᾘ㈝࢚ࢿࣝࢠ࣮ᩘ⌮ࣔࢹࣝ.

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1.1 _{⫼ᬒ . . . .} 1 1.1.1 _{࢚ࢿࣝࢠ࣮ࣁ࣮࣋ࢫࢸ࢕ࣥࢢ . . . .} 1 1.2 _{┠ⓗ . . . .} 2 1.3 _{ㄽᩥᵓᡂ . . . .} 4 ➨ 2 ❶ ᩿⇕ⓗㄽ⌮ᅇ㊰ 5 2.1 _{᩿⇕ⓗㄽ⌮ᅇ㊰ࡢప㟁ຊ໬ཎ⌮ . . . .} 5 2.2 _{ᚑ᮶ࡢ᩿⇕ⓗㄽ⌮ᅇ㊰ . . . .} 8 2.2.1 _{ECRL . . . .} 8 2.2.2 _{2N2N2P . . . 10} 2.2.3 _{PFAL . . . 12} 2.2.4 _{SAL . . . 14} 2.2.5 _{2PC2AL . . . 16} ➨ 3 ❶ ࢧࣈࢫࣞࢵࢩࣙࣝࢻᅇ㊰ 19 3.1 _{ࢧࣈࢫࣞࢵࢩࣙࣝࢻ㡿ᇦ . . . 19} 3.2 _{ࢧࣈࢫࣞࢵࢩࣙࣝࢻᅇ㊰ࡢᾘ㈝࢚ࢿࣝࢠ࣮ . . . 20} ➨ 4 ❶ ࢧࣈࢫࣞࢵࢩࣙࣝࢻ᩿⇕ⓗㄽ⌮ᅇ㊰ 23 4.1 _{࢖ࣥࣂ࣮ࢱࡢືస . . . 23} 4.2 _{ᇶᮏᅇ㊰ . . . 32} 4.2.1 _{NAND . . . 32} 4.2.2 _{XOR . . . 35} 4.2.3 _{༙ຍ⟬ჾ . . . 38} 4.2.4 _{඲ຍ⟬ჾ . . . 41} vii

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viii 4.3 _{ᥦ᱌ᅇ㊰ࡢࢫ࣮࢟ࣗ⪏ᛶ . . . 44} ➨ 5 ❶ ᛂ⏝ᅇ㊰–4_{×4-bit ஌⟬ჾ} 47 5.1 _{ࢩ࣑࣮ࣗࣞࢩࣙࣥ⤖ᯝ . . . 47} 5.2 _{LSI ᐇ⿦ . . . 51} 5.2.1 _{ࣞ࢖࢔࢘ࢺ . . . 51} 5.2.2 _{ᐃᶵჾ . . . 52} 5.2.3 _{ᐃ⤖ᯝ . . . 54} ➨ 6 ❶ ᾘ㈝࢚ࢿࣝࢠ࣮ࡢᩘ⌮ࣔࢹࣝ໬ 59 6.1 CMOS ㄽ⌮ᅇ㊰ࡢᾘ㈝࢚ࢿࣝࢠ࣮せᅉ _{. . . 60} 6.2 _{ᚑ᮶ࡢ㟼ⓗ CMOS ㄽ⌮ᅇ㊰ࡢᾘ㈝࢚ࢿࣝࢠ࣮ᩘ⌮ࣔࢹࣝ . . . 63} 6.2.1 _{ᚑ᮶ࡢ CMOS ㄽ⌮ᅇ㊰ࡢືⓗ࢚ࢿࣝࢠ࣮ࡢᑟฟ . . . 63} 6.2.2 _{ᚑ᮶ࡢ CMOS ㄽ⌮ᅇ㊰ࡢ㟼ⓗ࢚ࢿࣝࢠ࣮ࡢᑟฟ . . . 68} 6.2.3 ᚑ᮶ࡢ CMOS ㄽ⌮ᅇ㊰ࡢᾘ㈝࢚ࢿࣝࢠ࣮ᩘ⌮ࣔࢹࣝ࡜ SPICE ࢩ࣑࣮ࣗࣞࢩࣙࣥࡢẚ㍑ . . . 71 6.3 _{᩿⇕ⓗㄽ⌮ᅇ㊰ࡢᾘ㈝࢚ࢿࣝࢠ࣮ᩘ⌮ࣔࢹࣝ . . . 72} 6.3.1 _{᩿⇕ⓗㄽ⌮ᅇ㊰ࡢືⓗ࢚ࢿࣝࢠ࣮ࡢᑟฟ . . . 72} 6.3.2 ᩿⇕ⓗㄽ⌮ᅇ㊰ࡢᾘ㈝࢚ࢿࣝࢠ࣮ᩘ⌮ࣔࢹࣝ࡜ SPICE ࢩ࣑ࣗ ࣮ࣞࢩࣙࣥࡢẚ㍑ . . . 77 6.4 _{ࢧࣈࢫࣞࢵࢩࣙࣝࢻ᩿⇕ⓗㄽ⌮ᅇ㊰ࡢᾘ㈝࢚ࢿࣝࢠ࣮ᩘ⌮ࣔࢹࣝ . . . 79} 6.4.1 _{ࢧࣈࢫࣞࢵࢩࣙࣝࢻ᩿⇕ⓗㄽ⌮ᅇ㊰ࡢືⓗ࢚ࢿࣝࢠ࣮ . . . 79} 6.4.2 _{ࢧࣈࢫࣞࢵࢩࣙࣝࢻ᩿⇕ⓗㄽ⌮ᅇ㊰ࡢ㟼ⓗ࢚ࢿࣝࢠ࣮ . . . 79} 6.4.3 ᥦ᱌ࡋࡓᾘ㈝࢚ࢿࣝࢠ࣮ᩘ⌮ࣔࢹࣝ࡜ SPICE ࢩ࣑࣮ࣗࣞࢩࣙ ࣥࡢẚ㍑ . . . 88 ➨ 7 ❶ ࡲ࡜ࡵ࡜௒ᚋࡢㄢ㢟 91 7.1 _{ࡲ࡜ࡵ . . . 91} 7.2 ௒ᚋࡢㄢ㢟 _{. . . 92} ㅰ㎡ 93 ཧ⪃ᩥ⊩ 95

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2.3 ECRL ࢖ࣥࣂ࣮ࢱࡢືసἼᙧ (࿘Ἴᩘ:1MHz). _{. . . .} 9 2.4 2N2N2P ࢖ࣥࣂ࣮ࢱᅇ㊰ᅗ. _{. . . 10} 2.5 2N2N2P ࢖ࣥࣂ࣮ࢱࡢືసἼᙧ (࿘Ἴᩘ:1MHz). _{. . . 11} 2.6 PFAL ࢖ࣥࣂ࣮ࢱᅇ㊰ᅗ. _{. . . 12} 2.7 PFAL ࢖ࣥࣂ࣮ࢱࡢືసἼᙧ (࿘Ἴᩘ:1MHz). _{. . . 13} 2.8 SAL ࢖ࣥࣂ࣮ࢱᅇ㊰ᅗ. _{. . . 14} 2.9 SAL ࢖ࣥࣂ࣮ࢱࡢືసἼᙧ (࿘Ἴᩘ:1MHz)._{. . . 15} 2.10 2PC2AL ࢖ࣥࣂ࣮ࢱᅇ㊰ᅗ. . . 16 2.11 2PC2AL ࢖ࣥࣂ࣮ࢱࡢືసἼᙧ (࿘Ἴᩘ:1MHz). _{. . . 17} 3.1 _{0.18 μmCMOS ࣉࣟࢭࢫࡼࡾᚓࡓ㸪L/W ẚ㸪1.0 μm/1.0 μm ࡢ NMOS} ࢺࣛࣥࢪࢫࢱࡢ Id–Vgs≉ᛶ. . . 20 3.2 ᐃ᱁㟁ᅽ (1.8V) ࡛ືసࡉࡏࡓ࢖ࣥࣂ࣮ࢱ࡜㸪ࢧࣈࢫࣞࢵࢩࣙࣝࢻ㡿 ᇦ (0.5V) ࡛ືసࡉࡏࡓ࢖ࣥࣂ࣮ࢱࡢᾘ㈝࢚ࢿࣝࢠ࣮ࡢẚ㍑. . . 21 4.1 _{ࢧࣈࢫࣞࢵࢩࣙࣝࢻ᩿⇕ⓗㄽ⌮ᅇ㊰ࡢ࢖ࣥࣂ࣮ࢱࡢᅇ㊰ᅗ. . . 24} 4.2 ࢧࣈࢫࣞࢵࢩࣙࣝࢻ᩿⇕ⓗㄽ⌮ᅇ㊰ࡢ࢖ࣥࣂ࣮ࢱࡢືసἼᙧ (࿘Ἴᩘ 1kHz). . . 24 4.3 ࢧࣈࢫࣞࢵࢩࣙࣝࢻ㡿ᇦ࡛ືసࡉࡏࡓ ECRL ࢖ࣥࣂ࣮ࢱࡢືసἼᙧ (࿘Ἴᩘ 1kHz). . . 25 4.4 ࢧࣈࢫࣞࢵࢩࣙࣝࢻ㡿ᇦ࡛ືసࡉࡏࡓ 2N2N2P ࢖ࣥࣂ࣮ࢱࡢືసἼ ᙧ (࿘Ἴᩘ 1kHz). . . 26 4.5 ࢧࣈࢫࣞࢵࢩࣙࣝࢻ㡿ᇦ࡛ືసࡉࡏࡓ PFAL ࢖ࣥࣂ࣮ࢱࡢືసἼᙧ (࿘Ἴᩘ 1kHz). . . 27 ix

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x 4.6 ࢧࣈࢫࣞࢵࢩࣙࣝࢻ㡿ᇦ࡛ືసࡉࡏࡓ SAL ࢖ࣥࣂ࣮ࢱࡢືసἼᙧ (࿘ Ἴᩘ 1kHz). . . 28 4.7 ࢧࣈࢫࣞࢵࢩࣙࣝࢻ㡿ᇦ࡛ືసࡉࡏࡓ 2PC2AL ࢖ࣥࣂ࣮ࢱࡢືసἼ ᙧ (࿘Ἴᩘ 1kHz). . . 29 4.8 ࢧࣈࢫࣞࢵࢩࣙࣝࢻ㡿ᇦ࡛ືసࡉࡏࡓᚑ᮶ࡢ᩿⇕ⓗㄽ⌮ᅇ㊰ (2N2N2P,

ECRL, PFAL, SAL, 2PC2AL) ࡜ᥦ᱌ࡋࡓࢧࣈࢫࣞࢵࢩࣙࣝࢻ᩿⇕ⓗ ㄽ⌮ᅇ㊰ࡢᾘ㈝࢚ࢿࣝࢠ࣮ࡢẚ㍑. . . 31 4.9 _{ᥦ᱌ࡋࡓࢧࣈࢫࣞࢵࢩࣙࣝࢻ᩿⇕ⓗㄽ⌮ NAND ᅇ㊰ᅗ . . . 32} 4.10 ᥦ᱌ࡋࡓࢧࣈࢫࣞࢵࢩࣙࣝࢻ᩿⇕ⓗㄽ⌮ NAND ࡢືసἼᙧ (࿘Ἴᩘ 1kHz) _{. . . 33} 4.11 ᚑ᮶ࡢ CMOS ㄽ⌮㸪ࢧࣈࢫࣞࢵࢩࣙࣝࢻ㡿ᇦ࡛ࡢ CMOS ㄽ⌮㸪ࢧࣈ ࢫࣞࢵࢩࣙࣝࢻ㡿ᇦ࡛ࡢ 2PC2AL㸪ᥦ᱌ࡋࡓࢧࣈࢫࣞࢵࢩࣙࣝࢻ᩿⇕ ⓗㄽ⌮ࡢ NAND ࡢᾘ㈝࢚ࢿࣝࢠ࣮ࡢẚ㍑. . . 34 4.12 ᥦ᱌ࡋࡓࢧࣈࢫࣞࢵࢩࣙࣝࢻ᩿⇕ⓗㄽ⌮ XOR ᅇ㊰ᅗ _{. . . 35} 4.13 ᥦ᱌ࡋࡓࢧࣈࢫࣞࢵࢩࣙࣝࢻ᩿⇕ⓗㄽ⌮ XOR ࡢືసἼᙧ (࿘Ἴᩘ 1kHz) 36 4.14 ᚑ᮶ࡢ CMOS ㄽ⌮㸪ࢧࣈࢫࣞࢵࢩࣙࣝࢻ㡿ᇦ࡛ࡢ CMOS ㄽ⌮㸪ࢧࣈ ࢫࣞࢵࢩࣙࣝࢻ㡿ᇦ࡛ࡢ 2PC2AL㸪ᥦ᱌ࡋࡓࢧࣈࢫࣞࢵࢩࣙࣝࢻ᩿⇕ ⓗㄽ⌮ࡢ XOR ࡢᾘ㈝࢚ࢿࣝࢠ࣮ࡢẚ㍑. . . 37 4.15 ᥦ᱌ࡋࡓࢧࣈࢫࣞࢵࢩࣙࣝࢻ᩿⇕ⓗㄽ⌮༙ຍ⟬ჾᅇ㊰ᅗ_{. . . 38} 4.16 ᥦ᱌ࡋࡓࢧࣈࢫࣞࢵࢩࣙࣝࢻ᩿⇕ⓗㄽ⌮༙ຍ⟬ჾࡢືసἼᙧ (࿘Ἴᩘ 1kHz) _{. . . 39} 4.17 ᚑ᮶ࡢ CMOS ㄽ⌮㸪ࢧࣈࢫࣞࢵࢩࣙࣝࢻ㡿ᇦ࡛ࡢ CMOS ㄽ⌮㸪ࢧࣈ ࢫࣞࢵࢩࣙࣝࢻ㡿ᇦ࡛ࡢ 2PC2AL㸪ᥦ᱌ࡋࡓࢧࣈࢫࣞࢵࢩࣙࣝࢻ᩿⇕ ⓗㄽ⌮ࡢ༙ຍ⟬ჾࡢᾘ㈝࢚ࢿࣝࢠ࣮ࡢẚ㍑. . . 40 4.18 ᥦ᱌ࡋࡓࢧࣈࢫࣞࢵࢩࣙࣝࢻ᩿⇕ⓗㄽ⌮඲ຍ⟬ჾᅇ㊰ᅗ_{. . . 41} 4.19 ᥦ᱌ࡋࡓࢧࣈࢫࣞࢵࢩࣙࣝࢻ᩿⇕ⓗㄽ⌮඲ຍ⟬ჾࡢືసἼᙧ (࿘Ἴᩘ 1kHz) _{. . . 42} 4.20 ᚑ᮶ࡢ CMOS ㄽ⌮㸪ࢧࣈࢫࣞࢵࢩࣙࣝࢻ㡿ᇦ࡛ࡢ CMOS ㄽ⌮㸪ࢧࣈ ࢫࣞࢵࢩࣙࣝࢻ㡿ᇦ࡛ࡢ 2PC2AL㸪ᥦ᱌ࡋࡓࢧࣈࢫࣞࢵࢩࣙࣝࢻ᩿⇕ ⓗㄽ⌮ࡢ඲ຍ⟬ჾࡢᾘ㈝࢚ࢿࣝࢠ࣮ࡢẚ㍑. . . 43 4.21 2PC2AL-NAND ࡢࢫ࣮࢟ࣗࡀ⏕ࡌ࡚࠸࡞࠸࡜ࡁࡢືసἼᙧ (㯮) ࡜㸪 ࢫ࣮࢟ࣗࡀ⏕ࡌࡓ࡜ࡁࡢືసἼᙧ (⥳). . . 46

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ຊἼᙧ (ືస࿘Ἴᩘ 1kHz). . . 49 5.3 SPICE ࢩ࣑࣮ࣗࣞࢩࣙࣥ࠿ࡽᚓࡓᥦ᱌᪉ἲ࡟ࡼࡿ 4×4-bit ஌⟬ჾ࡜ᚑ ᮶ࡢ 4_{×4-bit ஌⟬ჾࡢᾘ㈝࢚ࢿࣝࢠ࣮ẚ㍑. . . 50} 5.4 4×4-bit ஌⟬ჾࡢࣞ࢖࢔࢘ࢺ. . . 51 5.5 LSI ࢳࢵࣉ⏬ീ. _{. . . 52} 5.6 _{ᐃ୰ࡢ LSI. . . 52} 5.7 LSI ᐃᶵჾ. _{. . . 53} 5.8 _{ᐃᶵჾࡢ᥋⥆ᅗ. . . 53} 5.9 LSI ᐇ⿦ࡋࡓ 4×4-bit ஌⟬ჾࡢ㢧ᚤ㙾෗┿. . . 54

5.10 LSI ᐇ⿦ࡋࡓ 4×4-bit ஌⟬ჾࡢືసἼᙧ (࿘Ἴᩘ 1kHz, ⦪㍈:5V/div, ᶓ㍈:1ms/div, in1–in4:ධຊಙྕ, p0–p7:ฟຊಙྕ). . . 55 5.11 LSI ᐇ⿦ࡋࡓ 4×4-bit ஌⟬ჾࡢᾘ㈝࢚ࢿࣝࢠ࣮ẚ㍑. . . 57 5.12 ࣉ࣮ࣟࣈࡢᐤ⏕ᡂศࢆ⪃៖ࡋࡓ 4×4-bit ஌⟬ჾࡢᅇ㊰ᅗ. . . 57 6.1 ᚑ᮶ࡢ CMOS ㄽ⌮࢖ࣥࣂ࣮ࢱࡢືⓗ࢚ࢿࣝࢠ࣮㸪㟼ⓗ࢚ࢿࣝࢠ࣮㸪㈏㏻㟁ὶ࡟ࡼࡿ࢚ࢿࣝࢠ࣮. . . 60 6.2 _{ᨺ㟁ືస᫬ࡢ CMOS ࢖ࣥࣂ࣮ࢱࡢ RC ➼౯ᅇ㊰. . . 62} 6.3 (a) ඘㟁ືస᫬ࡢ CMOS ࢖ࣥࣂ࣮ࢱࡢ RC ➼౯ᅇ㊰ (b) 㟁※_VP CࡢἼ ᙧ. . . 63 6.4 (a) ᨺ㟁ືస᫬ࡢ CMOS ࢖ࣥࣂ࣮ࢱࡢ RC ➼౯ᅇ㊰ (b)_V_{P C}_{ࡢἼᙧ. . . 65} 6.5 _{(a) 0 < t < 2τ ࡲ࡛ࡢ࢖ࣥࣂ࣮ࢱࡢ≧ែ. (b) 2τ < t < 4τ ࡲ࡛ࡢ࢖ࣥ} ࣂ࣮ࢱࡢ≧ែ. . . 68 6.6 _{ᚑ᮶ࡢ CMOS ㄽ⌮࢖ࣥࣂ࣮ࢱࡢືసἼᙧ. . . 69} 6.7 ᚑ᮶ࡢ CMOS ㄽ⌮࢖ࣥࣂ࣮ࢱࡢ SPICE ࢩ࣑࣮ࣗࣞࢩࣙࣥ࠿ࡽᚓࡓᾘ ㈝࢚ࢿࣝࢠ࣮࡜㸪ᘧ (3.1) ࢆ⏝࠸࡚ồࡵࡓᾘ㈝࢚ࢿࣝࢠ࣮ࡢẚ㍑. . . . 71 6.8 (a) ඘㟁ືస᫬ࡢ࢖ࣥࣂ࣮ࢱࡢ RC ➼౯ᅇ㊰ (b) 㟁※_VP CࡢἼᙧ. . . . 72 6.9 (a) ᨺ㟁ືస᫬ࡢ࢖ࣥࣂ࣮ࢱࡢ RC ➼౯ᅇ㊰ (b) 㟁※_V_{P C}_{ࡢἼᙧ. . . . 74}

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xii 6.10 ᥦ᱌ࡋࡓ᩿⇕ⓗㄽ⌮࢖ࣥࣂ࣮ࢱࡢ SPICE ࢩ࣑࣮ࣗࣞࢩࣙࣥ࠿ࡽᚓࡓ ᾘ㈝࢚ࢿࣝࢠ࣮࡜㸪ᘧ (6.8) ࢆ⏝࠸࡚ồࡵࡓᾘ㈝࢚ࢿࣝࢠ࣮ࡢẚ㍑. . . 77 6.11 (a) ࢧ࢖ࣥἼ (b) 2PC2AL (c) ᥦ᱌᪉ἲࡢ᩿⇕ⓗㄽ⌮ᅇ㊰ࡢ㟁※Ἴᙧ. 80 6.12 (a) 0 < t < 2τ ࡲ࡛ࡢ࢖ࣥࣂ࣮ࢱࡢ≧ែ. (b) 2τ < t < 4τ ࡲ࡛ࡢ࢖ࣥ ࣂ࣮ࢱࡢ≧ែ. . . 81 6.13 Vdsnࢆኚ໬ࡉࡏࡓ࡜ࡁࡢ㸪NMOS ࢺࣛࣥࢪࢫࢱࡢ Ids− Vgs≉ᛶ. . . . 82 6.14 ࢧ࢖ࣥἼ࢖ࣥࣂ࣮ࢱࡢືసἼᙧ. _{. . . 83} 6.15 2PC2AL ࢖ࣥࣂ࣮ࢱࡢືసἼᙧ. _{. . . 85} 6.16 ᥦ᱌࢖ࣥࣂ࣮ࢱࡢືసἼᙧ. _{. . . 87} 6.17 ᥦ᱌࢖ࣥࣂ࣮ࢱࡢ᪂ࡓ࡞ᾘ㈝࢚ࢿࣝࢠ࣮ᩘ⌮ࣔࢹࣝ࡜㸪SPICE ࢩ࣑ࣗ ࣮ࣞࢩࣙࣥ࠿ࡽᚓࡓᾘ㈝࢚ࢿࣝࢠ࣮ࡢẚ㍑. . . 88

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4.2 2PC2AL-NAND ࡢࢫ࣮࢟ࣗࡀ⏕ࡌ࡚࠸࡞࠸࡜ࡁࡢᾘ㈝࢚ࢿࣝࢠ࣮࡜㸪 ࢫ࣮࢟ࣗࡀ⏕ࡌࡓ࡜ࡁࡢᾘ㈝࢚ࢿࣝࢠ࣮. . . 44

5.1 ᚑ᮶ CMOS ㄽ⌮㸪ࢧࣈࢫࣞࢵࢩࣙࣝࢻ CMOS ㄽ⌮㸪2PC2AL㸪ᥦ᱌

᪉ἲࡢ㟁※㟁ᅽࡢࣃ࣓࣮ࣛࢱ. . . 48 5.2 ᐇ⿦ࡋࡓ 4_{×4-bit ஌⟬ჾ LSI ࢳࢵࣉࡢࣃ࣓࣮ࣛࢱ . . . 54}

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ᮏ❶࡛ࡣ㸪ᮏㄽᩥࡢ⫼ᬒ࡜┠ⓗࢆ㏙࡭ࡿ㸬⫼ᬒ࡛ࡣ㸪ᮏㄽᩥࡢㄢ㢟࡛࠶ࡿࢧࣈࢫ ࣞࢵࢩࣙࣝࢻ㡿ᇦ࡛ືసࡍࡿ᩿⇕ⓗㄽ⌮ᅇ㊰ࡢᛂ⏝ඛ࡜ࡋ࡚㸪࢚ࢿࣝࢠ࣮ࣁ࣮࣋ࢫ ࢸ࢕ࣥࢢᢏ⾡࡟ࡘ࠸࡚㏙࡭ࡿ㸬ࡑࡢᚋ㸪ᮏㄽᩥࡢ┠ⓗ࡜㸪ㄽᩥᵓᡂ࡟ࡘ࠸࡚㏙࡭ࡿ㸬

1.1 ⫼ᬒ

1.1.1 ࢚ࢿࣝࢠ࣮ࣁ࣮࣋ࢫࢸ࢕ࣥࢢ

⎔ቃ୰࡟Ꮡᅾࡍࡿᵝࠎ࡞࢚ࢿࣝࢠ࣮ࢆ཰✭ࡋ᭷ຠ࡞㟁ຊ࡜ࡋ࡚฼⏝ࡍࡿᢏ⾡ࢆ࢚ ࢿࣝࢠ࣮ࣁ࣮࣋ࢫࢸ࢕ࣥࢢ࡜࠸࠺㸬ࣁ࣮࣋ࢫࢸ࢕ࣥࢢ (harvesting) ࡜ࡣ “཰✭” ࡜࠸ ࠺ព࿡ࡢⱥㄒ࡛㸪energy harvesting ࡣ࢚ࢿࣝࢠ࣮ࢆ㞟ࡵࡿࡇ࡜ࢆព࿡ࡋ࡚࠸ࡿ㸬 ࢚ࢿࣝࢠ࣮ࣁ࣮࣋ࢫࢸ࢕ࣥࢢࡢ࢚ࢿࣝࢠ࣮※࡜ࡋ࡚㸪ග㸪㟁☢Ἴ㸪᣺ື㸪⇕࡞࡝ ࡀ࠶ࡿ㸬ึᮇࡢ࢚ࢿࣝࢠ࣮ࣁ࣮࣋ࢫࢸ࢕ࣥࢢᢏ⾡ࡣ㸪⇕㟁ኚ᥮ࢆ⏝࠸ࡓࡶࡢ࡛࠶ࡿ㸬 1822 ᖺ㸪Thomas Johann Seebeck ࡣ 2 ࡘࡢ␗࡞ࡿ㔠ᒓࢆ᥋ྜࡍࡿ࡜㸪㟁ᅽࡀⓎ⏕ࡋ㸪㟁ὶࡀὶࢀࡿࡇ࡜ࢆⓎぢࡋࡓ [1]㸬1839 ᖺ࡟ࡣ㸪ග㉳㟁ຊຠᯝࡢ◊✲࡛ Alexandre Edmont Becquerel ࡀ㸪㟁ゎᾮ࡟ᾐࡋࡓⷧ࠸ሷ໬㖟࡛そࡗࡓⓑ㔠㟁ᴟ࡟ගࢆᙜ࡚ࡿࡇ ࡜࡛㟁ὶࡀὶࢀࡿࡇ࡜ࢆⓎぢࡋࡓ [2]㸬ࡲࡓ 1880 ᖺ㸪Pierre ࡜ Jacques Curie ࡟ࡼࡗ ࡚㸪Ỉᬗ࡞࡝ࡢ⤖ᬗ࡟ᅽຊࢆຍ࠼ࡿ࡜⾲㠃࡟㟁Ⲵࡀ⏕ࡌࡿ⌧㇟ࢆⓎぢࡋࡓ [1]㸬 ࡇࢀࡽࡢ࢚ࢿࣝࢠ࣮ࣁ࣮࣋ࢫࢸ࢕ࣥࢢᢏ⾡࡛ᚓࡽࢀࡿ㟁ຊࡣ μW–mW ࣞ࣋ࣝࡢᑠ ࡉ࡞㟁ຊ࡛࠶ࡿࡀ㸪⎔ቃ୰ࡢ࢚ࢿࣝࢠ࣮ࡀᏑᅾࡍࡿ㝈ࡾ㸪㟁ụࡢ஺᥮㸪඘㟁㸪⇞ᩱ ࡢ⿵⤥ࢆࡍࡿࡇ࡜࡞ࡃ㸪㛗ᮇ㛫࡟ࢃࡓࡾ㟁ຊࢆ౪⤥ࡍࡿࡇ࡜ࡀྍ⬟࡜࡞ࡿࡓࡵ㸪࣡ ࢖ࣖࣞࢫࢭࣥࢧࢿࢵࢺ࣮࣡ࢡ㸪ᇙࡵ㎸ࡳᆺࡢ་⒪ᶵჾ㸪㌷஦┘どࢩࢫࢸ࣒㸪ィ⟬ჾ㸪 1

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2 1.2. ┠ⓗ

⭎᫬ィ㸪↓⥺࣊ࢵࢻࢭࢵࢺ࡞࡝㸪ᑠᆺࡢ㟁Ꮚᶵჾࡢࡓࡵࡢ⊂❧ࡋࡓ㟁※࡜ࡋ࡚ࡢ฼ ⏝ࡀᮇᚅࡉࢀ࡚࠸ࡿ㸬

㏆ᖺ࡛ࡣ㸪⎔ቃ୰ࡢ᣺ື࠿ࡽ࢚ࢿࣝࢠ࣮ࢆᚓࡿࡇ࡜ࡀྍ⬟࡞ MEMS (Micro Electro Mechanical Systems) ࢆ⏝࠸ࡓࢹࣂ࢖ࢫࡶⓎ⾲ࡉࢀ࡚࠸ࡿ [3]㸬ࡲࡓ㸪Rocha ࡽࡀᥦ ᱌ࡋࡓ㸪ᅽ㟁⣲Ꮚࢆ⤌ࡳ㎸ࢇࡔ㠐ࡣ㸪ே㛫ࡢṌ⾜ࡢ㝿ࡢᅽຊࡢኚ໬࠿ࡽ㸪51mJ ࡢ㟁 ຊࢆᚓࡿࡇ࡜ࡀྍ⬟࡛࠶ࡿ [5]㸬⇕࢚ࢿࣝࢠ࣮ࢆ฼⏝ࡍࡿࡶࡢ࡛ࡣ㸪⬻Ἴࣔࢪ࣮ࣗࣝ ࡢࡓࡵࡢ⊂❧ࡋࡓ㟁※࡜ࡋ࡚㸪1 cm2࠶ࡓࡾ 18 μW ࡢ㟁ຊࢆ౪⤥ࡍࡿᑠᆺࡢ⇕㟁ኚ ᥮ჾࡀ㛤Ⓨࡉࢀ࡚࠸ࡿ [4]㸬 ๓㏙ࡋࡓᢏ⾡࡛ᚓࡽࢀࡿ㟁ຊࡣ㸪㟁ὶ㸪㟁ᅽ್ࡀኚືࡍࡿ஺ὶ࡛࠶ࡿࡓࡵ㸪㟁Ꮚ ᶵჾࡢ㟁※࡜ࡋ࡚฼⏝ࡍࡿ࡟ࡣ┤ὶ㟁※࡬ࡢኚ᥮ࡀᚲせ࡛࠶ࡿ㸬ࡋ࠿ࡋ㸪┤ὶ㟁※ ࡬ࡢኚ᥮ࢆࡍࡿ࡜ࡁ㸪㟁ຊࡢᦆኻࡀ⏕ࡌ࡚ࡋࡲ࠺㸬ࡇࡢၥ㢟ⅬࢆゎỴࡍࡿ࡟ࡣ㸪㟁 ※ᅇ㊰ᢏ⾡ࡢపᾘ㈝㟁ຊ໬㸪㧗ຠ⋡໬㸪ࡲࡓࡣ㸪஺ὶ㟁※࡛㥑ືྍ⬟࡞㟁Ꮚᅇ㊰ࢆ ⏝࠸ࡿࡇ࡜ࡀᚲせ࡛࠶ࡿ㸬ࡲࡓ㸪ᚓࡽࢀࡿ㟁ὶ㸪㟁ᅽࡢ್ࡀ࡜࡚ࡶᑠࡉ࠸ࡓࡵ㸪࢚ ࢿࣝࢠ࣮ࣁ࣮࣋ࢫࢸ࢕ࣥࢢᢏ⾡ࢆ⏝࠸࡚㥑ືࡍࡿᅇ㊰ࡣ㸪ప㟁ᅽ㸪ప㟁ὶ࡛ࡢືస ࡀྍ⬟࡛࠶ࡿᚲせࡀ࠶ࡿ㸬

1.2 ┠ⓗ

࢚ࢿࣝࢠ࣮ࣁ࣮࣋ࢫࢸ࢕ࣥࢢᢏ⾡ࢆ⏝࠸࡚཰✭ࡋࡓ࢚ࢿࣝࢠ࣮ࢆ㸪㟁Ꮚᅇ㊰ࡢ㟁 ※࡜ࡋ࡚ຠ⋡ⓗ࡟฼⏝ࡍࡿ㝿ࡢၥ㢟ⅬࡢゎỴ⟇࡜ࡋ࡚㸪2 ࡘࡢᅇ㊰ᢏ⾡ࡀᏑᅾࡍࡿ㸬 ࡦ࡜ࡘࡣ᩿⇕ⓗㄽ⌮ᅇ㊰㸪ࡶ࠺ࡦ࡜ࡘࡣࢧࣈࢫࣞࢵࢩࣙࣝࢻᅇ㊰࡛࠶ࡿ㸬᩿⇕ⓗㄽ ⌮ᅇ㊰ࡣ㟁※࡜ࡋ࡚┤ὶ㟁※࡛ࡣ࡞ࡃ㸪஺ὶ㟁※ࢆ⏝࠸࡚ᅇ㊰ࢆ㥑ືࡍࡿᢏ⾡࡛࠶ ࡿ㸬஺ὶ㟁※ࢆ⏝࠸ࡿࡇ࡜࡛ㄽ⌮ᅇ㊰ࡢฟຊࣞ࣋ࣝࢆࡺࡗࡃࡾ࡜ኚ໬ࡉࡏࡿࡇ࡜࡟ ࡼࡾ㸪ฟຊࡢ㑄⛣࡟ࡼࡿ㟁ຊࡢᦆኻࢆపῶࡉࡏࡿࡇ࡜ࡀྍ⬟࡜࡞ࡗ࡚࠸ࡿ㸬ࡇࢀࡲ ࡛࡟᩿⇕ⓗㄽ⌮ࢆ⏝࠸ࡓᵝࠎ࡞ᅇ㊰ࡀᥦ᱌ࡉࢀ࡚࠾ࡾ㸪ᚑ᮶ࡢ㟼ⓗ CMOS ㄽ⌮ࡼࡾ ࡶ኱ᖜ࡟ᾘ㈝࢚ࢿࣝࢠ࣮ࢆ๐ῶ࡛ࡁࡿࡇ࡜ࡀ♧ࡉࢀ࡚࠸ࡿ [7]– [11]㸬ࢧࣈࢫࣞࢵࢩࣙ ࣝࢻᅇ㊰ࡣ㟁※࡜ࡋ࡚㸪MOSFET ࡢ㜈್㟁ᅽࡼࡾࡶప࠸㟁ᅽࢆ⏝࠸ࡓᅇ㊰࡛࠶ࡿ㸬 ᚑ᮶ࡢ CMOS ㄽ⌮ᅇ㊰࡛ࡣ㟁※㟁ᅽࢆ MOSFET ࡢ㜈್㟁ᅽࡼࡾ㧗ࡃタᐃࡋ࡚࠾ࡾ㸪 MOSFET ࡣ㣬࿴㡿ᇦ࡛ືసࡋ࡚࠸ࡿ㸬ࡋ࠿ࡋࠊMOSFET ࡣ㜈್㟁ᅽ௨ୗࡢࢧࣈࢫ ࣞࢵࢩࣙࣝࢻ㡿ᇦ࡟࠾࠸࡚ࡶ㸪ࢻࣞ࢖ࣥࢯ࣮ࢫ㛫࡟㟁ὶࡣὶࢀ࡚࠸ࡿࡓࡵ㸪ㄽ⌮ᅇ ㊰࡜ࡋ࡚㥑ືࡉࡏࡿࡇ࡜ࡀྍ⬟࡛࠶ࡿ㸬ᚑ᮶ࡼࡾࡶప࠸㟁ᅽ࡟ࡼࡾᅇ㊰ࢆ㥑ືࡍࡿ ࡓࡵ㸪ᾘ㈝࢚ࢿࣝࢠ࣮ࢆపῶࡉࡏࡿࡇ࡜ࡀྍ⬟࡜࡞ࡗ࡚࠸ࡿ [12]㸬ࡇࢀࡲ࡛࡟ࢧࣈ

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×8-bit ᱆ୖࡆಖᏑ஌⟬ჾࡢࢧࣈࢫࣞࢵ ࢩࣙࣝࢻ㡿ᇦ࡛ࡢືసࡢࢩ࣑࣮ࣗࣞࢩࣙࣥ⤖ᯝࡀ♧ࡉࢀࡓ㸬 ᩿⇕ⓗㄽ⌮ᅇ㊰㸪ࢧࣈࢫࣞࢵࢩࣙࣝࢻᅇ㊰ࡣ࡜ࡶ࡟ᅇ㊰ࡢືస㏿ᗘࡀ㐜ࡃ࡞ࡿ࡜ ࠸࠺ḞⅬࢆ᭷ࡋ࡚࠸ࡿࡓࡵ㸪ࡇࢀࡽ 2 ࡘࢆ⤌ࡳྜࢃࡏࡓࢧࣈࢫࣞࢵࢩࣙࣝࢻ᩿⇕ⓗ ㄽ⌮ᅇ㊰ࡢືస㏿ᗘࡣ㸪ᚑ᮶ᅇ㊰࡜ẚ㍑ࡋ࡚㐜ࡃ࡞ࡗ࡚ࡋࡲ࠺㸬ᚑ᮶ᅇ㊰࡛ࡣᾘ㈝ ࢚ࢿࣝࢠ࣮ࡢ༨ࡵࡿ๭ྜ࡜ࡋ࡚㸪ฟຊࡢ㑄⛣࡟క࠺඘ᨺ㟁㟁ὶ࡟ࡼࡿ࢚ࢿࣝࢠ࣮ࡀ ኱㒊ศ࡛࠶ࡿࡓࡵ㸪MOSFET ࡢ₃ࢀ㟁ὶ࡟ࡼࡿ࢚ࢿࣝࢠ࣮ࡣ⪃៖ࡉࢀ࡚࠸࡞࠿ࡗ ࡓ㸬ࡋ࠿ࡋ㸪ᅇ㊰ࡢືసࡀ㐜ࡃ࡞ࡿ࡜㸪ᾘ㈝࢚ࢿࣝࢠ࣮࡟࠾ࡅࡿ₃ࢀ㟁ὶ࡟ࡼࡿ࢚ ࢿࣝࢠ࣮ࡢ๭ྜࡀ኱ࡁࡃ࡞ࡗ࡚ࡃࡿࡓࡵ㸪ࡇࡕࡽࡢపῶࡶ⪃៖ࡍࡿᚲせࡀฟ࡚ࡃࡿ㸬 ̭ᮏㄽᩥ࡛ࡣ㸪᪂ࡓ࡞ࢧࣈࢫࣞࢵࢩࣙࣝࢻ᩿⇕ⓗㄽ⌮ᅇ㊰ࡢᥦ᱌ࢆࡍࡿ㸬ᥦ᱌ࡍࡿ ࢧࣈࢫࣞࢵࢩࣙࣝࢻ᩿⇕ⓗㄽ⌮ᅇ㊰ࡣ㸪2 ┦ࡢ࿘ᮇἼ㟁※࡟ࡼࡾ㥑ືࡍࡿ㸬୍᪉ࡢ 㟁※ࡢ᣺ᖜࢆ௚᪉ࡢ 1/2㸪࿘Ἴᩘࢆ 2 ಸ࡜ࡍࡿࡇ࡜࡛㸪2 ࡘࡢ㟁※ࡀྠ㟁఩࡜࡞ࡿ᫬ 㛫ࡀ㛗ࡃ࡞ࡿࡼ࠺࡟ືసࡉࡏࡿࡇ࡜ࡀྍ⬟࡜࡞ࡾ㸪⤖ᯝ࡜ࡋ࡚ᅇ㊰ࡢ₃ࢀ㟁ὶ࡟ࡼ ࡿ࢚ࢿࣝࢠ࣮ࢆపῶࡉࡏࡿࡇ࡜ࡀ࡛ࡁࡿ㸬ᥦ᱌᪉ἲ࡟ࡼࡾ㸪NAND㸪XOR㸪༙ຍ⟬ ჾ㸪඲ຍ⟬ჾࡢᇶᮏᅇ㊰࡜㸪4_{×4-bit ஌⟬ჾࢆタィࡋ㸪0.18 μm CMOS ࣉࣟࢭࢫᢏ⾡} ࢆ⏝࠸ࡓ SPICE ࢩ࣑࣮ࣗࣞࢩࣙࣥࢆ⾜࠺㸬ࡲࡓ LSI ࢳࢵࣉࡢ〇㐀ࢆ⾜࠸㸪ࡑࡢ ᐃ ࠿ࡽࢧࣈࢫࣞࢵࢩࣙࣝࢻ᩿⇕ⓗㄽ⌮ᅇ㊰ࡢືస᳨ド࡜㸪ᾘ㈝࢚ࢿࣝࢠ࣮ゎᯒࢆ⾜࠺㸬 ᥦ᱌ࡍࡿࢧࣈࢫࣞࢵࢩࣙࣝࢻ᩿⇕ⓗㄽ⌮࡟ࡼࡿ 4_{×4-bit ஌⟬ჾࡣ㸪ᚑ᮶ࡢ CMOS ㄽ} ⌮ᅇ㊰㸪ࢧࣈࢫࣞࢵࢩࣙࣝࢻ CMOS ㄽ⌮ᅇ㊰㸪ࢧࣈࢫࣞࢵࢩࣙࣝࢻ㡿ᇦ࡛ືసࡉࡏ ࡓᚑ᮶ࡢ᩿⇕ⓗㄽ⌮ᅇ㊰ࡼࡾࡶ㸪పᾘ㈝㟁ຊ࡜࡞ࡿࡇ࡜ࢆ♧ࡍ㸬ࡲࡓ㸪ࢩ࣑࣮ࣗࣞ ࢩࣙࣥ㸪LSI ࢳࢵࣉࡢ ᐃ⤖ᯝ࠿ࡽ㸪ࢧࣈࢫࣞࢵࢩࣙࣝࢻ᩿⇕ⓗㄽ⌮ᅇ㊰ࡢᾘ㈝࢚ ࢿࣝࢠ࣮ࡀ㸪ᚑ᮶ࡢ CMOS ㄽ⌮ᅇ㊰㸪᩿⇕ⓗㄽ⌮ᅇ㊰ࡢࡼ࠺࡟ RC ➼౯ᅇ㊰ࢆ⏝࠸ ࡚ᑟฟࡋࡓᩘ⌮ࣔࢹࣝ࡜ࡣ␗࡞ࡿ≉ᛶࢆᣢࡗ࡚࠸ࡿࡇ࡜ࢆ♧ࡋ㸪ࢧࣈࢫࣞࢵࢩࣙࣝ ࢻ᩿⇕ⓗㄽ⌮ᅇ㊰ࡢᾘ㈝࢚ࢿࣝࢠ࣮≉ᛶࢆᐇ⌧ࡍࡿ᪂ࡓ࡞ᩘ⌮ࣔࢹࣝࡢᥦ᱌ࢆ⾜࠺㸬

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4 1.3. ㄽᩥᵓᡂ

1.3 ㄽᩥᵓᡂ

ᮏㄽᩥࡢ❶ᵓᡂࢆ௨ୗ࡟♧ࡍ㸬➨ 1 ❶࡛ࡣᗎㄽ࡜ࡋ࡚㸪ᮏ◊✲ࡢ⫼ᬒ࡜┠ⓗ㸪ࡑ ࡋ࡚ㄽᩥࡢᵓᡂࢆ♧ࡍ㸬➨ 2 ❶࡛ࡣ CMOS ㄽ⌮ᅇ㊰ࡢపᾘ㈝㟁ຊ໬ᢏ⾡࡛࠶ࡿ᩿⇕ ⓗㄽ⌮ᅇ㊰࡟ࡘ࠸࡚㸪ᇶᮏⓗ࡞ప㟁ຊ໬ࡢཎ⌮࡜㸪ᚑ᮶ࡢ᩿⇕ⓗㄽ⌮ᅇ㊰࡛ᵓᡂࡋ ࡓ࢖ࣥࣂ࣮ࢱࡢືసࢆ♧ࡍ㸬➨ 3 ❶ࡣࡶ࠺ࡦ࡜ࡘࡢప㟁ຊ໬ᢏ⾡࡛࠶ࡿࢧࣈࢫࣞࢵ ࢩࣙࣝࢻᅇ㊰࡟ࡘ࠸࡚ㄝ᫂ࢆࡍࡿ㸬➨ 4 ❶ࡣᥦ᱌ࡋࡓࢧࣈࢫࣞࢵࢩࣙࣝࢻ᩿⇕ⓗㄽ ⌮ᅇ㊰ࡢゎᯒ࡜ࢩ࣑࣮ࣗࣞࢩࣙࣥࢆ♧ࡍ㸬ᇶᮏᅇ㊰ࡢ NAND㸪XOR㸪༙ຍ⟬ჾ㸪඲ ຍ⟬ჾ࡟࠾࠸࡚㸪ᚑ᮶ CMOS ㄽ⌮㸪ࢧࣈࢫࣞࢵࢩࣙࣝࢻᅇ㊰㸪ࢧࣈࢫࣞࢵࢩࣙࣝࢻ 㡿ᇦ࡛ືసࡉࡏࡓᚑ᮶ࡢ᩿⇕ⓗㄽ⌮ᅇ㊰㸪ࡑࡋ࡚ᥦ᱌ࡋࡓࢧࣈࢫࣞࢵࢩࣙࣝࢻ᩿⇕ ⓗㄽ⌮ᅇ㊰ࡢࢩ࣑࣮ࣗࣞࢩࣙࣥࢆ⾜࠸㸪ᛶ⬟ࡢẚ㍑ࢆ⾜࠺㸬➨ 5 ❶࡛ࡣ㸪ᥦ᱌ࡋࡓ ࢧࣈࢫࣞࢵࢩࣙࣝࢻ᩿⇕ⓗㄽ⌮ᅇ㊰࡟ࡼࡾᵓᡂࡋࡓ 4_{×4-bit ஌⟬ჾࡢࢩ࣑࣮ࣗࣞࢩࣙ} ࣥ࡜㸪ᐇ⿦ࡋࡓ LSI ࡢ ᐃࡢ⤖ᯝࢆ♧ࡍ㸬➨ 6 ❶࡛ࡣ㸪ᚑ᮶ࡢ CMOS ㄽ⌮ᅇ㊰ࡢᾘ ㈝࢚ࢿࣝࢠ࣮ᩘ⌮ࣔࢹࣝ࡟ࡘ࠸࡚㸪ࡑࡢᑟฟ㐣⛬ࢆ♧ࡍ㸬ࡲࡓ㸪ࢧࣈࢫࣞࢵࢩࣙࣝ ࢻ᩿⇕ⓗㄽ⌮ᅇ㊰ࡢᾘ㈝࢚ࢿࣝࢠ࣮ࡢ≉ᛶࢆ㸪ᚑ᮶ࡢᾘ㈝࢚ࢿࣝࢠ࣮ᩘ⌮ࣔࢹ࡛ࣝ ࡣ⾲⌧࡛ࡁ࡚࠸࡞࠸ࡇ࡜ࢆ♧ࡋ㸪᪂ࡓ࡞ࢧࣈࢫࣞࢵࢩࣙࣝࢻ᩿⇕ⓗㄽ⌮ᅇ㊰ࡢᾘ㈝ ࢚ࢿࣝࢠ࣮ࡢᩘ⌮ࣔࢹࣝࢆ♧ࡍ㸬➨ 7 ❶ࡣࡲ࡜ࡵ࡛࠶ࡿ㸬

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ᮏ❶࡛ࡣ㸪CMOS ㄽ⌮ᅇ㊰ࡢపᾘ㈝㟁ຊ໬ᢏ⾡ࡢ 1 ࡘ࡛࠶ࡿ᩿⇕ⓗㄽ⌮ᅇ㊰࡟ࡘ ࠸࡚㸪ᇶᮏⓗ࡞ప㟁ຊ໬ࡢཎ⌮ࢆㄝ᫂ࢆࡍࡿ㸬ࡲࡓ㸪ᚑ᮶ࡢ᩿⇕ⓗㄽ⌮ᅇ㊰࡜ࡋ࡚ 2N2N2P㸪ECRL㸪PFAL㸪SAL㸪2PC2AL ࡢືసࢆ⤂௓ࢆࡍࡿ㸬

2.1 ᩿⇕ⓗㄽ⌮ᅇ㊰ࡢప㟁ຊ໬ཎ⌮

᩿⇕ⓗㄽ⌮ᅇ㊰ࡣ㟁※㟁ᅽ࡜ࡋ࡚࿘ᮇἼ㟁※ࢆ⏝࠸࡚㸪ධຊࡢࢫ࢖ࢵࢳࣥࢢࢆ㟁 ※㟁ᅽࡀ 0V ࡢ࡜ࡁ࡟⾜࠸㸪࠿ࡘ㟁※㟁ᅽࢆࡺࡗࡃࡾ࡜ኚ໬ࡉࡏࡿࡇ࡜࡛ᅇ㊰ࡢ඘ ᨺ㟁㟁ὶ࡟ࡼࡿᾘ㈝࢚ࢿࣝࢠ࣮ࢆపῶࡉࡏࡓᅇ㊰࡛࠶ࡿ㸬 MOSFET ࢆ⌮᝿ⓗ࡞ࢫ࢖ࢵࢳ࡜┤ิ࡟᥋⥆ࡉࢀࡓ᢬ᢠ࡜ࡳ࡞ࡍ࡜㸪CMOS ㄽ⌮ ᅇ㊰ࡣᅗ 2.1 ࡢᅇ㊰ᅗࡢࡼ࠺࡞ RC ➼౯ᅇ㊰࡛⾲ࡍࡇ࡜ࡀ࡛ࡁࡿ㸬ᚑ᮶ࡢ CMOS ㄽ ⌮࡛ࡣ㸪ᅗ 2.1(a) ࡢࡼ࠺࡟౪⤥㟁ᅽࡣ┤ὶ࡛࠶ࡿ㸬ᅗ 2.1(a) ࡟࠾࠸࡚㸪ࢫ࢖ࢵࢳ ࡀ࢜ࣥࡍࡿ࡜㸪᢬ᢠࢆ㏻ࡋ࡚ᛴ⃭࡟㟁ὶࡀὶࢀࡿ㸬ࡑࡋ࡚㸪Q = CLVDD ࡢ㟁Ⲵ ࡀ᢬ᢠ CL࡟඘㟁ࡉࢀࡿ㸬ࡇࡢ඘㟁ືస࡛㟁※࠿ࡽ౪⤥ࡉࢀࡿ࢚ࢿࣝࢠ࣮ࡢ⥲㔞ࡣ Esupply = QVDD = CLVDD2 ࡛࠶ࡿ㸬ࡇࡢ࠺ࡕ㸪༙ศࡣ᢬ᢠ࡛ᾘ㈝ࡉࢀ㸪ࡶ࠺༙ศࡣ ᐜ㔞࡟⵳࠼ࡽࢀࡿ㸬ࡺ࠼࡟㸪඘㟁ືస࡟࠾ࡅࡿᾘ㈝࢚ࢿࣝࢠ࣮ࡣ Echarge = 1 2CLV 2 DD. (2.1) ࡜⾲ࡉࢀࡿ㸬ᨺ㟁ືస࡛ࡣ㸪ᐜ㔞࡟⵳࠼ࡽࢀࡓ㟁Ⲵࡀ㸪NMOS ࢆ㏻ࡋ࡚ࢢࣛࣥࢻ ࡟ᨺ㟁ࡉࢀࡿࡓࡵ㸪඘㟁ືస࡜ྠ㔞ࡢ࢚ࢿࣝࢠ࣮ࡀᾘ㈝ࡉࢀࡿ㸬௨ୖࡼࡾ㸪ᚑ᮶ࡢ CMOS ࢖ࣥࣂ࣮ࢱࡀ㸯ᅇࡢ඘ᨺ㟁ືసࢆࡍࡿ࡜ࡁ࡟ᾘ㈝ࡉࢀࡿ࢚ࢿࣝࢠ࣮ࡢ⥲㔞ࡣ 5

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6 2.1. ᩿⇕ⓗㄽ⌮ᅇ㊰ࡢప㟁ຊ໬ཎ⌮ 㻔㼂㻕㻔㻭㻕㻔㼟㼑㼏㻕 VDD VDD Istatic VR Vc R CL Istatic 㻔㼟㼑㼏㻕 (a) 㟼ⓗ CMOS ㄽ⌮ 㻔㼂㻕㻔㻭㻕㻔㼟㼑㼏㻕㻔㼟㼑㼏㻕 Iadiabatic Vp R Vp Vc VR CL Iadiabatic T (b) ᩿⇕ⓗㄽ⌮ ᅗ 2.1: ᚑ᮶ࡢ㟼ⓗ CMOS ㄽ⌮࡜᩿⇕ⓗㄽ⌮࡟ࡼࡿ㸪㟁※㟁ᅽ࡜㟁ὶࡢẚ㍑. ௨ୗࡢᘧ࡛ồࡵࡿࡇ࡜ࡀ࡛ࡁࡿ㸬

Ecmos = Echarge+ Edischarge

= 1 2CLV 2 DD+ 1 2CLV 2 DD = CLVDD2 . (2.2) ୍᪉㸪᩿⇕ⓗㄽ⌮ᅇ㊰࡛ࡣ౪⤥㟁※࡜ࡋ࡚㸪ࣛࣥࣉἼ㟁※ࡢࡼ࠺࡞ᚎࠎ࡟㟁ᅽࡀ ኚ໬ࡍࡿ㟁※ࢆ⏝࠸ࡿ㸬ᅗ 2.1(b) ࡟᩿⇕ືసࢆࡋ࡚࠸ࡿㄽ⌮ᅇ㊰ࡢ RC ➼౯ᅇ㊰ࢆ ♧ࡍ㸬ࣛࣥࣉἼ㟁※ࢆ⏝࠸ࡿ࡜㸪㟁※㟁ᅽࡀ Vpࡢࡼ࠺࡟ኚ໬ࡋࡓ࡜ࡁࡢ㐣Ώ㟁ὶࡣ Iadiabaticࡢࡼ࠺࡟࡞ࡾ㸪ᚑ᮶ࡢ CMOS ㄽ⌮ࡢ࡜ࡁ࡜ẚ㍑ࡋ࡚ᑠࡉࡃ࡞ࡿ㸬ࡘࡲࡾ㸪ࣛ ࣥࣉἼ㟁※ࢆ⏝࠸ࡿࡇ࡜࡛࢖ࣥࣂ࣮ࢱࡢ඘ᨺ㟁ືస࡟࠾ࡅࡿᾘ㈝࢚ࢿࣝࢠ࣮ࢆపῶ ࡉࡏࡿࡇ࡜ࡀ࡛ࡁࡿ㸬࿘ᮇ T (࿘Ἴᩘ f = 1/T ) ࡢࣛࣥࣉἼ㟁※ࢆ⏝࠸࡚࢖ࣥࣂ࣮ࢱ ࢆ㥑ືࡍࡿ࡜㸪ᾘ㈝㟁ຊࡣ P = Etotal T = CLVDD2 f ࡜ࡳ࡞ࡏࡿ㸬ࡇࡢ࡜ࡁ㸪࢖ࣥࣂ࣮ ࢱ࡛ᾘ㈝ࡉࢀࡿ࢚ࢿࣝࢠ࣮ࡣ௨ୗࡢᘧ࡛⾲ࡉࢀࡿ㸬 Eadiabatic = ξP T = ξI2RT = ξCLR T CLV 2 DD. (2.3)

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8 2.2. ᚑ᮶ࡢ᩿⇕ⓗㄽ⌮ᅇ㊰

2.2 ᚑ᮶ࡢ᩿⇕ⓗㄽ⌮ᅇ㊰

ࡇࡇ࡛ࡣ㸪ᚑ᮶ࡢ᩿⇕ⓗㄽ⌮ᅇ㊰࡜ࡋ࡚㸪ECRL [6]㸪2N2N2P [7]㸪PFAL [8]㸪SAL [9]㸪2PC2AL [11] ࡢᅇ㊰ᵓᡂ࡜ືస࡟ࡘ࠸࡚㏙࡭ࡿ㸬

V

PC

ina

_inb

outb

outa

M1

M2

M3

_M4

ᅗ 2.2: ECRL ࢖ࣥࣂ࣮ࢱᅇ㊰ᅗ.

2.2.1 ECRL

ᅗ 2.2 ࡟ ECRL ࢖ࣥࣂ࣮ࢱࡢᅇ㊰ᅗࢆ♧ࡍ㸬ࡲࡓ㸪ᅗ 2.3 ࡟ SPICE ࢩ࣑࣮ࣗࣞࢩࣙ ࣥ࠿ࡽᚓࡓ㸪࿘Ἴᩘࡀ 1MHz ࡢ࡜ࡁࡢືసἼᙧࢆ♧ࡍ㸬ᾘ㈝࢚ࢿࣝࢠ࣮ࢆపῶࡉࡏ ࡿࡓࡵ࡟㸪ྎᙧἼࢆ⏝࠸࡚࠸ࡿ㸬ධຊ in ࡀ “High”㸪inb ࡀ “Low” ࡢ࡜ࡁ㸪M3 ࡀ࢜ ࣥࡍࡿࡓࡵ outa ࡣ “Low” ࡜࡞ࡾ㸪M2 ࡀ࢜ࣇ≧ែ࡜࡞ࡿࡓࡵ㸪㟁※ VDD ࡀ 0 ࠿ࡽ 1.8V ࡲ࡛ୖ᪼ࡍࡿࡢ࡟ྜࢃࡏ࡚㸪㈇Ⲵᐜ㔞ࡀ඘㟁ࡉࢀ outb ࡀ “High” ࡜࡞ࡿ㸬VDD ࡀ 1.8V ࡟฿㐩ࡍࡿ࡜㸪ฟຊࡣಖᣢࡉࢀࡿ㸬VDDࡀୗ㝆ࡋጞࡵࡿ࡜ಖᣢ≧ែࡀ⤊஢ ࡋ㸪outb ࡣ VDD࡟ᚑ࠸ୗ㝆ࡍࡿ㸬ࡇࡢ࡜ࡁ㸪㈇Ⲵᐜ㔞࡟඘㟁ࡉࢀࡓ㟁Ⲵࡀ㟁※࡟ᅇ ཰ࡉࢀ㸪࢚ࢿࣝࢠ࣮ࡢࣜ࢝ࣂࣜࡀ㉳ࡇࡿ㸬outa ࡛ࡣ㸪࢟ࣕࣃࢩࢱࣥࢫ࢝ࢵࣉࣜࣥࢢ ࡟ࡼࡾ㸪ฟຊ㟁ᅽࡀ 0V ௨ୗ࡟࡞ࡗ࡚࠾ࡾ㸪VDDࡀ 0V ࡢ㛫࡟㸪inb ࡀ “High” ࡲ࡛ୖ ᪼ࡋ㸪ḟࡢࢧ࢖ࢡࣝࡢ‽ഛࢆ⾜࠺㸬

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0

1

2 V

DD

0

1

2 in

a

in

b

0

1

2 out

a

0

1

2

3

4

5 [

×10

-6

]

0

1

2 out

b

time [sec]

ᅗ 2.3: ECRL ࢖ࣥࣂ࣮ࢱࡢືసἼᙧ (࿘Ἴᩘ:1MHz).

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10 2.2. ᚑ᮶ࡢ᩿⇕ⓗㄽ⌮ᅇ㊰

V

PC

ina

_inb

outb

outa

M1

M2

M3

M4

M5

M6

ᅗ 2.4: 2N2N2P ࢖ࣥࣂ࣮ࢱᅇ㊰ᅗ.

2.2.2 2N2N2P

ᅗ 2.4 ࡟ᅇ㊰ᅗࢆ♧ࡍ㸬ࡲࡓᅗ 2.5 ࡟࿘Ἴᩘࡀ 1kHz ࡢ࡜ࡁࡢ㸪2N2N2P ࢖ࣥࣂ࣮ ࢱࡢືసἼᙧࢆ♧ࡍ㸬ECRL ࡜ྠᵝ࡟ྎᙧἼ࡟ࡼࡾ㥑ືࡉࢀ࡚࠾ࡾ㸪ᕪືㄽ⌮ࡀ⏝ ࠸ࡽࢀ࡚࠸ࡿ㸬ࡑࡢࡓࡵ㸪ධຊ࡜ࡋ࡚ ina ࡜┦⿵ⓗ࡞ධຊ inb ࡀᚲせ࡛࠶ࡿ㸬ECRL ࡟ 2 ࡘࡢ NMOS ࢆ஺ᕪ⤖ྜ࡟࡞ࡿࡼ࠺࡟㏣ຍࡍࡿࡇ࡜࡛㸪ࣜ࢝ࣂࣜࡢᮇ㛫࡟ฟຊࡀ ࣇ࣮ࣟࢸ࢕ࣥࢢ≧ែ࡟࡞ࡽ࡞࠸ࡼ࠺࡟࡞ࡗ࡚࠾ࡾ㸪࢟ࣕࣃࢩࢱࣥࢫ࢝ࢵࣉࣜࣥࢢ࡟ ࡼࡿฟຊ㟁ᅽࡢ㝆ୗࡀᑠࡉࡃ࡞ࡗ࡚࠸ࡿ㸬

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0

1

2 V

DD

0

1

2 in

a

in

b

0

1

2 out

a

0

1

2

3

4

5 [

×10

-6

]

0

1

2 out

b

time [sec]

ᅗ 2.5: 2N2N2P ࢖ࣥࣂ࣮ࢱࡢືసἼᙧ (࿘Ἴᩘ:1MHz).

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12 2.2. ᚑ᮶ࡢ᩿⇕ⓗㄽ⌮ᅇ㊰

V

PC

ina

inb

outb

outa

M1

M2

M3

M4

M5

M6

ᅗ 2.6: PFAL ࢖ࣥࣂ࣮ࢱᅇ㊰ᅗ.

2.2.3 PFAL

ᅗ 2.6 ࡟ PFAL ࢖ࣥࣂ࣮ࢱࡢᅇ㊰ᅗࢆ♧ࡍ㸬PFAL ࢖ࣥࣂ࣮ࢱࡣ 2 ࡘࡢ PMOS ࢺ ࣛࣥࢪࢫࢱ࡜ 2 ࡘࡢ NMOS ࢺࣛࣥࢪࢫࢱ࡟ࡼࡾᵓᡂࡉࢀࡓࣛࢵࢳᵓ㐀࡟࡞ࡗ࡚࠸ࡿ㸬 ࡲࡓ㸪PMOS ࡟୪ิ࡟ NMOS ࡀ᥋⥆ࡉࢀ࡚࠸ࡿࡓࡵ㸪㈇Ⲵᐜ㔞ࡀ඘㟁ࡉࢀࡿ࡜ࡁ㸪 ᢬ᢠࡀᑠࡉࡃ࡞ࡿࡓࡵ㸪ECRL ࡼࡾࡶᾘ㈝࢚ࢿࣝࢠ࣮ࡀᑠࡉࡃ࡞ࡿ㸬

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0

1

2 V

DD

0

1

2 in

a

in

b

0

1

2 out

a

0

1

2

3

4

5 [

×10

-6

]

0

1

2 out

b

time [sec]

ᅗ 2.7: PFAL ࢖ࣥࣂ࣮ࢱࡢືసἼᙧ (࿘Ἴᩘ:1MHz).

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14 2.2. ᚑ᮶ࡢ᩿⇕ⓗㄽ⌮ᅇ㊰ VPC0 outb outa M1 M2 M4 M5 M3 M7 M9 M6 M8 M10 M11 M12 VPC1 VPC6 inb ina VPC6 VPC1 VPC5 _V_PC5 ᅗ 2.8: SAL ࢖ࣥࣂ࣮ࢱᅇ㊰ᅗ.

2.2.4 SAL

SAL ࡣ᩿⇕ㄽ⌮ᢏ⾡ࢆᚑ᮶ࡢపᾘ㈝㟁ຊࡢࡓࡵࡔࡅ࡛࡞ࡃ㸪ᬯྕゎㄞࡢᡭἲ࡛࠶ ࡿࢧ࢖ࢻࢳࣕࢿࣝᨷᧁ࡬ࡢᑐ⟇ࡢࡓࡵࡢᅇ㊰࡛࠶ࡿ㸬ᅗ 2.8 ࡟ SAL ࢖ࣥࣂ࣮ࢱࡢᅇ ㊰ᅗࢆ㸪ᅗ 2.9 ࡟ SPICE ࢩ࣑࣮ࣗࣞࢩࣙࣥ࠿ࡽᚓࡓ࿘Ἴᩘࡀ 1MHz ࡢ࡜ࡁࡢືసἼ ᙧࢆ♧ࡍ㸬SAL ࡣḟࡢ 3 ࡘࡢ୺せ㒊㒊࡟ࡼࡾᵓᡂࡉࢀࡿ㸬1 ࡘ┠ࡣ㸪ฟຊࢆᵓᡂࡍࡿ 2 ࡘࡢᶵ⬟ࣈࣟࢵࢡ㸬2 ࡘ┠ࡣ㸪ฟຊ➃ࡀࣇ࣮ࣟࢸ࢕ࣥࢢ≧ែ࡟࡞ࡽ࡞ࡼ࠺࡟᥋⥆ࡉ ࢀࡓ㸪M1, M2 ࡢࢡࣟࢫ࢝ࢵࣉࣜࣥࢢࡉࢀࡓ 2 ࡘࡢ PMOS ࡜㸪M7, M8 ࡢࢡࣟࢫ࢝ࢵ ࣉࣜࣥࢢࡉࢀࡓ 2 ࡘࡢ NMOS ࡟ࡼࡿࣛࢵࢳ㒊㸬ࡇࡢࣛࢵࢳ㒊࡟ࡼࡾ㸪ධຊࡀ “Low” ࡟࡞ࡗࡓ࡜ࡁࡶฟຊࡢ≧ែࡀಖࡓࢀࡿ㸬ࡑࡋ࡚ 3 ࡘ┠ࡣᶵ⬟ࣈࣟࢵࢡࡢ㈇Ⲵᐜ㔞࡟ ඘㟁ࡉࢀࡓ㟁Ⲵࢆ㸪᩿⇕ⓗ࡟ᨺ㟁ࡉࡏࡿࡓࡵࡢ㸪M3–M6, M9–M12 ࡢࣃࢫࢺࣛࣥࢪ ࢫࢱ㒊࡛࠶ࡿ㸬

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0

1 V

pc0

0

1

2 V

pc 1

0

1

2 V

pc5

0

1

2 V

pc 6

0

1

2 in

a

in

b

0

1

2 out

a

0

1

2

3

4

5 [

×10

-6

]

0

1

2 out

b

time [sec]

ᅗ 2.9: SAL ࢖ࣥࣂ࣮ࢱࡢືసἼᙧ (࿘Ἴᩘ:1MHz).

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16 2.2. ᚑ᮶ࡢ᩿⇕ⓗㄽ⌮ᅇ㊰

out

M1

M2

in

V

PC

V

PC ᅗ 2.10: 2PC2AL ࢖ࣥࣂ࣮ࢱᅇ㊰ᅗ.

2.2.5 2PC2AL

2PC2AL ࡢᅇ㊰ᅗࢆᅗ 2.10 ࡟㸪࿘Ἴᩘࡀ 1MHz ࡢ࡜ࡁࡢືసἼᙧࢆᅗ 2.11 ࡟♧ ࡍ㸬2PC2AL ࡣ VP C࡜ VP Cࡢ 2 ࡘࡢ࿘ᮇἼ㟁※ࢆ⏝࠸࡚㥑ືࡍࡿ㸬ࡑࢀࡒࢀࡢ㟁※ ࡣ 0 < VP C < VDD/2㸪VDD/2 < VP C < VDD࡜࡞ࡗ࡚࠸ࡿ㸬MOS ࡢ᥋⥆ࡣᚑ᮶ࡢ㟼 ⓗ CMOS ㄽ⌮࡜ྠᵝ࡜࡞ࡗ࡚࠸ࡿ㸬

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0

1

2 V

PC

V

PC B

0

1

2 in

0

1

2 out

ᅗ 2.11: 2PC2AL ࢖ࣥࣂ࣮ࢱࡢືసἼᙧ (࿘Ἴᩘ:1MHz).

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ᮏ❶࡛ࡣ㸪ࡶ࠺ࡦ࡜ࡘࡢపᾘ㈝㟁ຊ໬ᢏ⾡࡛࠶ࡿࢧࣈࢫࣞࢵࢩࣙࣝࢻᅇ㊰࡟ࡘ࠸ ࡚㏙࡭ࡿ㸬ࡲࡎ㸪MOS ࢺࣛࣥࢪࢫࢱࡢࢧࣈࢫࣞࢵࢩࣙࣝࢻ㡿ᇦ࡟ࡘ࠸࡚ㄝ᫂ࡋ㸪ࡑ ࡢ࠶࡜ࢧࣈࢫࣞࢵࢩࣙࣝࢻ㡿ᇦ࡛ືసࡍࡿ࢖ࣥࣂ࣮ࢱࡢᾘ㈝࢚ࢿࣝࢠ࣮ࢆ♧ࡍ㸬

3.1 ࢧࣈࢫࣞࢵࢩࣙࣝࢻ㡿ᇦ

ᅗ 3.1 ࡟㸪0.18 μm CMOS ࣉࣟࢭࢫࢆ⏝࠸ࡓ SPICE ࢩ࣑࣮ࣗࣞࢩࣙࣥ࠿ࡽᚓࡓ㸪 NMOS ࢺࣛࣥࢪࢫࢱࡢ Id–Vgs ≉ᛶࢆ♧ࡍ㸬ࡇࡢ࡜ࡁࡢࢺࣛࣥࢪࢫࢱࡢ L/W ẚࡣ 1.0 μm/1.0 μm ࡜ࡋࡓ㸬⥺ᙧ⾲♧ࢆࡋࡓᅗ 3.1(a) ࡛ࡣ㸪ࢤ࣮ࢺ–ࢯ࣮ࢫ㛫㟁ᅽ Vgsࡀ MOS ࢺࣛࣥࢪࢫࢱࡢ㜈್㟁ᅽ Vtࡼࡾࡶప࠸࡜ࡁ㸪ࢻࣞ࢖ࣥ㟁ὶ Idࡣὶࢀ࡚࠸࡞࠸ ࡼ࠺࡟ぢ࠼ࡿࡀ㸪ᑐᩘ⾲♧ࢆࡋࡓᅗ 3.1(b) ࢆࡳࡿ࡜㸪㜈್㟁ᅽ௨ୗࡢ㡿ᇦ࡛ࡶ㸪ࢃ ࡎ࠿࡟㟁ὶࡀὶࢀ࡚࠸ࡿࡇ࡜ࡀศ࠿ࡿ㸬ࡇࡢࢤ࣮ࢺ–ࢯ࣮ࢫ㛫㟁ᅽࡀ㸪㜈್㟁ᅽࡼࡾ ࡶప࠸㡿ᇦࡣ㸪“ࢧࣈࢫࣞࢵࢩࣙࣝࢻ㡿ᇦ”㸪ࡲࡓࡣ “ᙅ཯㌿㡿ᇦ” ࡜࿧ࡤࢀ࡚࠸ࡿ㸬 ᙉ཯㌿㡿ᇦ࡛ࡣ㸪ࢻࣞ࢖ࣥ㟁ὶࡣࢻࣜࣇࢺ㟁ὶࡀ୺࡛࠶ࡿࡀ㸪ࢧࣈࢫࣞࢵࢩࣙࣝࢻ 㡿ᇦ࡛ࡣ㸪₃ࢀ㟁ὶࡀ୺࡞ᡂศ࡜࡞ࡿ㸬ࢧࣈࢫࣞࢵࢩࣙࣝࢻ㡿ᇦ࡛ࡢࢻࣞ࢖ࣥ㟁ὶ ࡣ㸪ࢤ࣮ࢺ–ࢯ࣮ࢫ㛫㟁ᅽࡀ኱ࡁࡃ࡞ࡿ࡟ࡘࢀ㸪ᣦᩘ㛵ᩘⓗ࡟ቑຍࡋ࡚࠸ࡃ㸬 ࢧࣈࢫࣞࢵࢩࣙࣝࢻ㡿ᇦ࡟࠾࠸࡚㸪ࢺࣛࣥࢪࢫࢱࡣ nA–μA ࣞ࣋ࣝࡢᴟᚤᑠ࡞㟁 ὶ࡛ືసࡍࡿࡓࡵ㸪ࡑࡢᾘ㈝࢚ࢿࣝࢠ࣮ࡣᴟࡵ࡚ᑠࡉࡃ࡞ࡿ㸬ࡋ࠿ࡋ㸪㐜ᘏ᫬㛫ࡣ 㟁ὶࡢ኱ࡁࡉ࡟཯ẚ౛ࡍࡿࡓࡵ㸪ᅇ㊰ࡢືసࡣ㐜ࡃ࡞ࡗ࡚ࡋࡲ࠺㸬ࡋࡓࡀࡗ࡚㸪ࢧ ࣈࢫࣞࢵࢩࣙࣝࢻ㡿ᇦ࡛ࡢືసࡣ㸪పᾘ㈝࢚ࢿࣝࢠ࣮ࡢไ⣙ࡀ㧗ࡃ㸪ືస㏿ᗘ࡬ࡢ せồࡀప࠸ࢹࣂ࢖ࢫ࡬ࡢᛂ⏝ࡀᮃࡲࡋ࠸㸬 19

(35)

20 3.2. ࢧࣈࢫࣞࢵࢩࣙࣝࢻᅇ㊰ࡢᾘ㈝࢚ࢿࣝࢠ࣮ 0 0.5 1 1.5 0 2 4 6 8 [×10-5 ] Id [A] Vgs[V] (a)linear 0 1 2 100 101 102 103 104 105 106 107 108 Id [n A] Vgs[V] (b) log ᅗ 3.1: 0.18 μmCMOS ࣉࣟࢭࢫࡼࡾᚓࡓ㸪L/W ẚ㸪1.0 μm/1.0 μm ࡢ NMOS ࢺࣛ ࣥࢪࢫࢱࡢ Id–Vgs≉ᛶ.

3.2 ࢧࣈࢫࣞࢵࢩࣙࣝࢻᅇ㊰ࡢᾘ㈝࢚ࢿࣝࢠ࣮

ᚑ᮶ࡢ CMOS ㄽ⌮ᅇ㊰ࡢᾘ㈝࢚ࢿࣝࢠ࣮ࡣ௨ୗࡢᘧ࡛⾲ࡍࡇ࡜ࡀ࡛ࡁࡿ㸬 Wcmos = αCLVDD2 + VDDIsubT + VDDIsctsc (3.1) α ࡣࢫ࢖ࢵࢳࣥࢢ☜⋡㸪CLࡣᅇ㊰ࡢ㈇Ⲵᐜ㔞㸪VDDࡣ㟁※㟁ᅽ㸪Isubࡣࢧࣈࢫࣞࢵ ࢩࣙࣝࢻ㟁ὶ㸪T ࡣ 1 ࢧ࢖ࢡࣝࡢ࿘ᮇ㸪Iscࡣ㈏㏻㟁ὶ㸪tscࡣࢫ࢖ࢵࢳࣥࢢࡢ࡜ࡁ࡟ PMOS㸪NMOS ࡀ୧᪉࢜ࣥࡋ࡚࠸ࡿ᫬㛫࡛࠶ࡿ㸬ࡇࡢᘧ࡟ࡘ࠸࡚ࡢヲ⣽ࡣ㸪➨ 6 ❶ ࡟♧ࡍ㸬ᘧ (3.1) ࠿ࡽ㸪඲࡚ࡢ㡯࡟㟁※㟁ᅽ VDDࡀᏑᅾࡋ࡚࠸ࡿࡓࡵ㸪ᐃ᱁㟁ᅽࡼ ࡾࡶప࠸㟁※㟁ᅽࢆ⏝࠸ࡿࢧࣈࢫࣞࢵࢩࣙࣝࢻᅇ㊰࡛ࡣᾘ㈝࢚ࢿࣝࢠ࣮ࢆపῶ࡛ࡁ ࡿࡇ࡜ࡀศ࠿ࡿ㸬ᅗ 3.2 ࡟ᐃ᱁㟁ᅽ (1.8V) ࡛ືసࡉࡏࡓ࢖ࣥࣂ࣮ࢱ࡜㸪ࢧࣈࢫࣞࢵ ࢩࣙࣝࢻ㡿ᇦ (0.5V) ࡛ືసࡉࡏࡓ࢖ࣥࣂ࣮ࢱࡢᾘ㈝࢚ࢿࣝࢠ࣮ࡢẚ㍑ࢆ♧ࡍ㸬ᐃ᱁ 㟁ᅽືసࡢ࢖ࣥࣂ࣮ࢱ࡜ẚ㍑ࡋ࡚㸪ࢧࣈࢫࣞࢵࢩࣙࣝࢻ㡿ᇦ࡛ືసࡉࡏࡓ࢖ࣥࣂ࣮ ࢱࡣపᾘ㈝࢚ࢿࣝࢠ࣮࡜࡞ࡗ࡚࠸ࡿࡇ࡜ࡀศ࠿ࡿ㸬ࡲࡓ㸪ືసྍ⬟࡞࿘Ἴᩘࡣ㸪ᐃ ᱁㟁ᅽືసࡢሙྜࡀ 1GHz ࡲ࡛࡞ࡢ࡟ᑐࡋ㸪ࢧࣈࢫࣞࢵࢩࣙࣝࢻ㡿ᇦ࡛ືసࡉࡏࡓ ሙྜࡣ 500kHz ࡲ࡛࡜㸪పࡃ࡞ࡗ࡚࠸ࡿ㸬

(36)

10

0

10

1

10

2

10

3

10

4

10

5

10

6

10

7

10

8

10

9

10

0

10

1

10

2

10

3

10

4

frequency [Hz]

e

n

e

rgy [fJ

/c

yc

le

]

ࢧࣈࢫࣞࢵࢩࣙࣝࢻ㡿ᇦ(0.5V)

ᐃ᱁㟁ᅽ(1.8V)

ᅗ 3.2: ᐃ᱁㟁ᅽ (1.8V) ࡛ືసࡉࡏࡓ࢖ࣥࣂ࣮ࢱ࡜㸪ࢧࣈࢫࣞࢵࢩࣙࣝࢻ㡿ᇦ (0.5V) ࡛ືసࡉࡏࡓ࢖ࣥࣂ࣮ࢱࡢᾘ㈝࢚ࢿࣝࢠ࣮ࡢẚ㍑.

(37)

(38)

ᮏ❶࡛ࡣ㸪᪂ࡓ࡞ࢧࣈࢫࣞࢵࢩࣙࣝࢻ᩿⇕ⓗㄽ⌮ᅇ㊰ࢆᥦ᱌ࡍࡿ㸬ᥦ᱌ࡍࡿࢧࣈ ࢫࣞࢵࢩࣙࣝࢻ᩿⇕ⓗㄽ⌮ᅇ㊰ࡣ㸪2 ┦ࡢ࿘ᮇἼ㟁※࡟ࡼࡾ㥑ືࡍࡿ㸬୍᪉ࡢ㟁※ ࡢ᣺ᖜࢆ௚᪉ࡢ 1/2㸪࿘Ἴᩘ 2 ಸ࡜ࡍࡿࡇ࡜࡛㸪2 ࡘࡢ㟁※ࡀྠ㟁఩࡜࡞ࡿ᫬㛫ࡀ㛗 ࡃ࡞ࡿࡼ࠺࡟ືసࡉࡏࡿࡇ࡜ࡀྍ⬟࡜࡞ࡾ㸪⤖ᯝ࡜ࡋ࡚ᅇ㊰ࡢ㟼ⓗ࢚ࢿࣝࢠ࣮ࢆప ῶࡉࡏࡿࡇ࡜ࡀ࡛ࡁࡿ㸬ࡲࡓ㸪ᅇ㊰ᵓᡂࡣᚑ᮶ࡢ CMOS ㄽ⌮࡜ྠᵝ࡞ࡢ࡛㸪㟁※ࢆ ษࡾ࠿࠼ࡿࡢࡳ࡛㥑ືࡀྍ⬟࡜࡞ࡿ㸬ᥦ᱌᪉ἲ࡟ࡼࡾ NAND㸪XOR㸪༙ຍ⟬ჾ㸪඲ ຍ⟬ჾࢆタィࡋ㸪0.18 μm CMOS ࣉࣟࢭࢫࢆ⏝࠸࡚ SPICE ࢩ࣑࣮ࣗࣞࢩࣙࣥࢆ⾜ ࠸㸪ືస᳨ド࡜㸪ᾘ㈝࢚ࢿࣝࢠ࣮ゎᯒࢆ⾜࠺㸬

4.1 ࢖ࣥࣂ࣮ࢱࡢືస

ᅗ 4.1 ࡟ࢧࣈࢫࣞࢵࢩࣙࣝࢻ᩿⇕ⓗㄽ⌮ᅇ㊰࡛ᵓᡂࡋࡓ࢖ࣥࣂ࣮ࢱࡢᅇ㊰ᅗ㸪ᅗ 4.2 ࡟࿘Ἴᩘࡀ 1kHz ࡢ࡜ࡁࡢືసἼᙧࢆ♧ࡍ㸬MOS ࢺࣛࣥࢪࢫࢱࡢ᥋⥆ࡣᚑ᮶ࡢ CMOS ࢖ࣥࣂ࣮ࢱ࡜ྠᵝ࡛࠶ࡿࡀ㸪PMOS ࡢࢯ࣮ࢫ࡜ NMOS ࡢࢯ࣮ࢫ࡟ࡑࢀࡒࢀ㸪

࿘ᮇἼ㟁※ VP C࡜ VP Cࡀ᥋⥆ࡉࢀ࡚࠸ࡿ㸬ࡲࡓ㸪PMOS㸪NMOS ࡢࣂࣝࢡ➃Ꮚࡣ ᥋ᆅࡉࢀ࡚࠸ࡿ㸬ᅗ 4.2 ࡟♧ࡍࡼ࠺࡟㸪VP Cࡢ࿘Ἴᩘࡣ㸪VP Cࡢ 2 ಸ࡜࡞ࡗ࡚࠾ࡾ㸪 ࡲࡓ VP Cࡢ᣺ᖜࡣ㸪VP Cࡢ 1/2 ࡟タᐃࡋ࡚࠸ࡿ㸬ධຊಙྕࡢษࡾ᭰࠼ࡣ VP C࡜ VP C ࡀྠ㟁఩࡜࡞ࡗ࡚࠸ࡿ༊㛫࡛⾜࠺㸬 ධຊࡀ “High” ࡢ࡜ࡁ㸪M1 ࡣ࢜ࣇࡋ M2 ࡣ࢜ࣥࡍࡿࡢ࡛㸪ฟຊ࡟ࡣ “Low” ࡜ࡋ࡚ VP Cࡢ㟁ᅽࡀฟຊࡉࢀࡿ㸬ධຊࡀ “Low” ࡢ࡜ࡁࡣ㸪M1 ࡀ࢜ࣥࡋ M2 ࡣ࢜ࣇࡍࡿࡢ ࡛㸪ฟຊࡣ “High” ࡜࡞ࡾ VP Cࡢ㟁ᅽࡀฟຊࡉࢀࡿ㸬 23

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24 4.1. ࢖ࣥࣂ࣮ࢱࡢືస

M1

M2

OUT

IN

V

pc

V

pc ᅗ 4.1: ࢧࣈࢫࣞࢵࢩࣙࣝࢻ᩿⇕ⓗㄽ⌮ᅇ㊰ࡢ࢖ࣥࣂ࣮ࢱࡢᅇ㊰ᅗ.

0

0.1

0.2

0.3

0.4

0.5

0.6 Vp

c

Vp

cb

0

0.2

0.4

0.6 Vi

n

0

0.001

0.002

0

0.1

0.2

0.3

0.4

0.5

0.6 Vo

u

t

time [s]

ᅗ 4.2: ࢧࣈࢫࣞࢵࢩࣙࣝࢻ᩿⇕ⓗㄽ⌮ᅇ㊰ࡢ࢖ࣥࣂ࣮ࢱࡢືసἼᙧ (࿘Ἴᩘ 1kHz).

(40)

0

0.2 in

b

0

0.2

0.4 ou

ta

0

0.001

0.002

0.003

0.004

0.005

0

0.2

0.4 ou

tb

time [sec]

ᅗ 4.3: ࢧࣈࢫࣞࢵࢩࣙࣝࢻ㡿ᇦ࡛ືసࡉࡏࡓ ECRL ࢖ࣥࣂ࣮ࢱࡢືసἼᙧ (࿘Ἴᩘ 1kHz). ᚑ᮶ࡢ᩿⇕ⓗㄽ⌮ᅇ㊰㸪2N2N2P㸪ECRL㸪PFAL㸪SAL㸪2PC2AL ࡛ᵓᡂࡋࡓ࢖ࣥ ࣂ࣮ࢱࢆࢧࣈࢫࣞࢵࢩࣙࣝࢻ㡿ᇦ࡛ືసࡉࡏࡓ࡜ࡁࡢᛶ⬟࡜㸪ᥦ᱌ࡋࡓࢧࣈࢫࣞࢵࢩࣙ ࣝࢻ᩿⇕ⓗㄽ⌮ᅇ㊰࡛ᵓᡂࡋࡓ࢖ࣥࣂ࣮ࢱࡢᛶ⬟ࢆẚ㍑ࡋࡓ㸬ᅗ 4.3–4.7 ࡟ SPICE ࢩ࣑࣮ࣗࣞࢩࣙࣥ࠿ࡽᚓࡓ㸪ECRL㸪2N2N2P㸪PRAL㸪SAL㸪2PC2AL ࡛ᵓᡂࡋࡓ ࢖ࣥࣂ࣮ࢱࡢືసἼᙧࢆࡑࢀࡒࢀ♧ࡍ㸬඲࡚ࡢᅇ㊰ࡀ㸪ṇࡋࡃືసࢆࡋ࡚࠸ࡿ㸬ࡇ ࡢࡇ࡜࠿ࡽ㸪ࢧࣈࢫࣞࢵࢩࣙࣝࢻ㡿ᇦ࡟࠾࠸࡚ࡶ㸪᩿⇕ⓗㄽ⌮ᅇ㊰ࡀṇࡋࡃືసࢆ ࡍࡿࡇ࡜ࡀศ࠿ࡿ㸬

(41)

26 4.1. ࢖ࣥࣂ࣮ࢱࡢືస

0

0.2

0.4 V

DD

0

0.2

0.4 in

a

in

b

0

0.2

0.4 ou

ta

0

0.001

0.002

0.003

0.004

0.005

0

0.2

0.4 ou

tb

time [sec]

ᅗ 4.4: ࢧࣈࢫࣞࢵࢩࣙࣝࢻ㡿ᇦ࡛ືసࡉࡏࡓ 2N2N2P ࢖ࣥࣂ࣮ࢱࡢືసἼᙧ (࿘Ἴ ᩘ 1kHz).

(42)

0

0.2

0.4 V

PC

0

0.2

0.4 in

a

in

b

0

0.2

0.4 ou

ta

0

0.001

0.002

0.003

0.004

0.005

0

0.2

0.4 ou

tb

time [sec]

ᅗ 4.5: ࢧࣈࢫࣞࢵࢩࣙࣝࢻ㡿ᇦ࡛ືసࡉࡏࡓ PFAL ࢖ࣥࣂ࣮ࢱࡢືసἼᙧ (࿘Ἴᩘ 1kHz).

(43)

28 4.1. ࢖ࣥࣂ࣮ࢱࡢືస

0

0.2

0.4 V

pc 0

0

0.2

0.4 V

pc 1

0

0.2

0.4 V

pc 5

0

0.2

0.4 V

pc 6

0

0.2

0.4 in

a

in

b

0

0.2

0.4 out

a

0

0.001

0.002

0.003

0.004

0.005

0

0.2

0.4 out

b

time [sec]

ᅗ 4.6: ࢧࣈࢫࣞࢵࢩࣙࣝࢻ㡿ᇦ࡛ືసࡉࡏࡓ SAL ࢖ࣥࣂ࣮ࢱࡢືసἼᙧ (࿘Ἴᩘ 1kHz).

(44)

0

0.2

0.4 V

PC

V

PCB

0

0.2

0.4 in

0

0.2

0.4 ou

t

ᅗ 4.7: ࢧࣈࢫࣞࢵࢩࣙࣝࢻ㡿ᇦ࡛ືసࡉࡏࡓ 2PC2AL ࢖ࣥࣂ࣮ࢱࡢືసἼᙧ (࿘Ἴ ᩘ 1kHz).

(45)

30 4.1. ࢖ࣥࣂ࣮ࢱࡢືస ⾲ 4.1 ࡟ࢧࣈࢫࣞࢵࢩࣙࣝࢻ㡿ᇦ࡛ືసࡉࡏࡓ᩿⇕ⓗㄽ⌮ᅇ㊰࡜ᥦ᱌᪉ἲࡢ㸪㟁 ※ᩘ㸪࢖ࣥࣂ࣮ࢱࡢࢺࣛࣥࢪࢫࢱᩘ㸪1kHz ࡛ࡢᾘ㈝࢚ࢿࣝࢠ࣮ࡢẚ㍑ࢆ♧ࡍ㸬ᥦ᱌ ࡋࡓࢧࣈࢫࣞࢵࢩࣙࣝࢻ᩿⇕ⓗㄽ⌮ᅇ㊰࢖ࣥࣂ࣮ࢱࡣ㸪ᚑ᮶ࡢ᩿⇕ⓗㄽ⌮ᅇ㊰࡜ẚ ㍑ࡋ࡚㸪ࢧࣈࢫࣞࢵࢩࣙࣝࢻ㡿ᇦ࡛ࡢືస࡛㸪᭱ࡶప࠸ᾘ㈝࢚ࢿࣝࢠ࣮≉ᛶࢆ♧ࡋ ࡚࠸ࡿ㸬ࡲࡓ㸪ࢺࣛࣥࢪࢫࢱᩘ㸪ᚲせ࡞㟁※ࡢᩘ࠿ࡽࡳ࡚ࡶ㸪ᥦ᱌ࡋࡓࢧࣈࢫࣞࢵ ࢩࣙࣝࢻ᩿⇕ⓗㄽ⌮ᅇ㊰ࡣ㸪ᚑ᮶ࡢ᩿⇕ⓗㄽ⌮ᅇ㊰ࡼࡾࡶඃࢀ࡚࠸ࡿ࡜ゝ࠼ࡿ㸬 ᅗ 4.8 ࡟ࢧࣈࢫࣞࢵࢩࣙࣝࢻ㡿ᇦ࡛ືసࡉࡏࡓᚑ᮶ࡢ᩿⇕ⓗㄽ⌮ᅇ㊰࢖ࣥࣂ࣮ࢱ ࡜㸪ᥦ᱌ࡋࡓࢧࣈࢫࣞࢵࢩࣙࣝࢻ᩿⇕ⓗㄽ⌮ᅇ㊰࢖ࣥࣂ࣮ࢱࡢᾘ㈝࢚ࢿࣝࢠ࣮ࡢ࿘ Ἴᩘ≉ᛶࡢẚ㍑ࢆ♧ࡍ㸬඲࡚ࡢᅇ㊰࡟࠾࠸࡚㸪⣙ 1kHz ࡲ࡛ࡢ࿘Ἴᩘࡀప࠸༊㛫࡛ ࡣ㸪࿘Ἴᩘࡀ㧗ࡃ࡞ࡿ࡯࡝ᾘ㈝࢚ࢿࣝࢠ࣮ࡀᑠࡉࡃ࡞ࡗ࡚࠸ࡿ㸬ࡇࡢ༊㛫ࡣ㟼ⓗ࢚ ࢿࣝࢠ࣮ࡀ୺࡞せ⣲࡜࡞ࡗ࡚࠸ࡿ㸬ᑐࡋ࡚ 1kHz ௨ୖࡢ༊㛫࡛ࡣᾘ㈝࢚ࢿࣝࢠ࣮ࡀ㸪 ࿘Ἴᩘ࡜࡜ࡶ࡟ୖ᪼ࡋ࡚࠸ࡿ㸬ࡇࡢ༊㛫ࡣືⓗ࢚ࢿࣝࢠ࣮ࡀ୺࡞せ⣲࡜࡞ࡗ࡚࠸ࡿ㸬 ᥦ᱌ࡋࡓࢧࣈࢫࣞࢵࢩࣙࣝࢻ᩿⇕ⓗㄽ⌮ᅇ㊰ࡣ㸪࿘Ἴᩘࡀ 1kHz ௨ୗࡢ༊㛫࡟࠾࠸ ࡚᭱ࡶᾘ㈝࢚ࢿࣝࢠ࣮ࡀᑠࡉࡃ࡞ࡗ࡚࠸ࡿ㸬ࡘࡲࡾ㸪᭱ࡶ㟼ⓗ࢚ࢿࣝࢠ࣮ࡀపῶ࡛ ࡁ࡚࠸ࡿ࡜࠸࠺ࡇ࡜ࢆ♧ࡋ࡚࠸ࡿ㸬⾲ 4.1: ࢧࣈࢫࣞࢵࢩࣙࣝࢻ㡿ᇦ࡛ືసࡉࡏࡓ᩿⇕ⓗㄽ⌮ᅇ㊰ࡢ㟁※ᩘ࡜㸪࢖ࣥࣂ࣮ ࢱࡢࢺࣛࣥࢪࢫࢱᩘ㸪1kHz ࡛ࡢᾘ㈝࢚ࢿࣝࢠ࣮ࡢẚ㍑.

ECRL 2N2N2P PFAL SAL 2PC2AL proposed

㟁※ᩘ 1 1 1 4 2 2

ࢺࣛࣥࢪࢫࢱᩘ 4 6 6 12 2 2

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10

0

10

1

10

2

10

3

10

4

10

5

10

-2

10

-1

10

0

10

1

10

2

10

3

frequency [Hz]

en

er

g

y

[

fJ

/cy

cle

]

2N2N2P

ECRL

PFAL

SAL

2PC2AL

proposed

ᅗ 4.8: ࢧࣈࢫࣞࢵࢩࣙࣝࢻ㡿ᇦ࡛ືసࡉࡏࡓᚑ᮶ࡢ᩿⇕ⓗㄽ⌮ᅇ㊰ (2N2N2P, ECRL, PFAL, SAL, 2PC2AL) ࡜ᥦ᱌ࡋࡓࢧࣈࢫࣞࢵࢩࣙࣝࢻ᩿⇕ⓗㄽ⌮ᅇ㊰ࡢᾘ㈝࢚ࢿࣝ ࢠ࣮ࡢẚ㍑.

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32 4.2. ᇶᮏᅇ㊰

4.2 ᇶᮏᅇ㊰

ᥦ᱌ࡋࡓࢧࣈࢫࣞࢵࢩࣙࣝࢻ᩿⇕ⓗㄽ⌮ᅇ㊰࡛㸪NAND㸪XOR㸪༙ຍ⟬ჾ㸪඲ຍ ⟬ჾࢆᵓᡂࡋ㸪0.18 μm CMOS ࣉࣟࢭࢫࢆ⏝࠸࡚ SPICE ࢩ࣑࣮ࣗࣞࢩࣙࣥࢆ⾜ࡗ ࡓ㸬ࢧࣈࢫࣞࢵࢩࣙࣝࢻ㡿ᇦ࡛ືసࡉࡏࡓ CMOS ㄽ⌮ᅇ㊰㸪ࢧࣈࢫࣞࢵࢩࣙࣝࢻ㡿 ᇦ࡛ືసࡉࡏࡓ 2PC2AL ᅇ㊰࡛ᵓᡂࡋࡓᅇ㊰࡜㸪ᛶ⬟ࢆẚ㍑ࡍࡿ㸬

㼕㼚㻝

㼕㼚㻞

㼂㼜㼏

㻹㻝

㻹㻟

㻹㻞

㻹㻠

㼛㼡㼠

ᅗ 4.9: ᥦ᱌ࡋࡓࢧࣈࢫࣞࢵࢩࣙࣝࢻ᩿⇕ⓗㄽ⌮ NAND ᅇ㊰ᅗ

4.2.1 NAND

ᥦ᱌ࡋࡓࢧࣈࢫࣞࢵࢩࣙࣝࢻ᩿⇕ⓗㄽ⌮ NAND ࡢᅇ㊰ᅗࢆᅗ 4.9 ࡟♧ࡍ㸬ࢺࣛࣥ ࢪࢫࢱࡢ᥋⥆ࡣ㸪ᚑ᮶ࡢ NAND ࡜ྠᵝ࡛࠶ࡿࡀ㸪M1㸪M2 ࡢࢯ࣮ࢫ࡟ VP C㸪M4 ࡢ ࢯ࣮ࢫ VP Cࡢ࿘ᮇἼ㟁※ࢆ᥋⥆ࡋ࡚࠸ࡿ㸬SPICE ࢩ࣑࣮ࣗࣞࢩࣙࣥࡼࡾᚓࡓ㸪ᥦ᱌ ࡋࡓࢧࣈࢫࣞࢵࢩࣙࣝࢻ᩿⇕ⓗㄽ⌮ NAND ࡢືసἼᙧࢆᅗ 4.10 ࡟♧ࡋࡓ㸬࿘Ἴᩘࡣ 1kHz ࡛࠶ࡿ㸬NAND ࡜ࡋ࡚㸪ṇࡋࡃືసࢆࡋ࡚࠸ࡿࡇ࡜ࡀศ࠿ࡿ㸬ᚑ᮶ࡢ NAND

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0

0.2 in1

0

0.2

0.4

0.6 in2

0

0.001

0.002

0.003

0

0.2

0.4

0.6 ou

t

time[sec]

ᅗ 4.10: ᥦ᱌ࡋࡓࢧࣈࢫࣞࢵࢩࣙࣝࢻ᩿⇕ⓗㄽ⌮ NAND ࡢືసἼᙧ (࿘Ἴᩘ 1kHz) ࡜㸪ᥦ᱌ࡋࡓࢧࣈࢫࣞࢵࢩࣙࣝࢻ᩿⇕ⓗㄽ⌮ NAND ࡢᾘ㈝࢚ࢿࣝࢠ࣮ࡢẚ㍑ࢆᅗ 4.11 ࡟♧ࡋࡓ㸬ᥦ᱌ࡋࡓࢧࣈࢫࣞࢵࢩࣙࣝࢻ᩿⇕ⓗㄽ⌮ NAND ࡣ㸪ᚑ᮶ࡢ NAND ࡼࡾࡶప࠸ᾘ㈝࢚ࢿࣝࢠ࣮≉ᛶࢆ♧ࡋ࡚࠸ࡿ㸬

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34 4.2. ᇶᮏᅇ㊰

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7

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0

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1

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10

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10

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10

8

frequency[Hz]

en

er

g

y

[f

J/

cy

cle

]

static CMOS

sub-V

_t

CMOS

sub-V

_t

2PC2AL

proposed

ᅗ 4.11: ᚑ᮶ࡢ CMOS ㄽ⌮㸪ࢧࣈࢫࣞࢵࢩࣙࣝࢻ㡿ᇦ࡛ࡢ CMOS ㄽ⌮㸪ࢧࣈࢫࣞࢵ ࢩࣙࣝࢻ㡿ᇦ࡛ࡢ 2PC2AL㸪ᥦ᱌ࡋࡓࢧࣈࢫࣞࢵࢩࣙࣝࢻ᩿⇕ⓗㄽ⌮ࡢ NAND ࡢᾘ ㈝࢚ࢿࣝࢠ࣮ࡢẚ㍑.

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in1 in2 in1b in2b in1b _in1 in2b _in2 Vpc M2 M3 M4 M5 M6 M7 M8 out ᅗ 4.12: ᥦ᱌ࡋࡓࢧࣈࢫࣞࢵࢩࣙࣝࢻ᩿⇕ⓗㄽ⌮ XOR ᅇ㊰ᅗ

4.2.2 XOR

ᅗ 4.12 ࡟ᥦ᱌ࡋࡓࢧࣈࢫࣞࢵࢩࣙࣝࢻ᩿⇕ⓗㄽ⌮ XOR ࡢᅇ㊰ᅗࢆ♧ࡍ㸬8 ಶࡢ ࢺࣛࣥࢪࢫࢱ࡛ᵓᡂࡉࢀࡓ┦⿵ CMOS ᆺࡢ XOR ࡛࠶ࡿ㸬ᅗ࡟ࡣ♧ࡉࢀ࡚࠸࡞࠸ࡀ㸪 ධຊ in1 ࡜ in2 ࢆ཯㌿ࡉࡏࡿࡓࡵ࡟᭦࡟ 4 ࡘࡢࢺࣛࣥࢪࢫࢱࢆ౑⏝ࡋ࡚࠾ࡾ㸪ࢺࣛࣥ ࢪࢫࢱᩘࡣྜィ 12 ಶ࡜࡞ࡿ㸬SPICE ࢩ࣑࣮ࣗࣞࢩࣙࣥ࡟ࡼࡾᚓࡓ㸪࿘Ἴᩘࡀ 1kHz ࡢ࡜ࡁࡢᥦ᱌ࡋࡓࢧࣈࢫࣞࢵࢩࣙࣝࢻ᩿⇕ⓗㄽ⌮ XOR ࡢືసἼᙧࢆᅗ 4.13 ࡟♧ࡍ㸬 XOR ࡜ࡋ࡚ṇࡋࡃືసࢆࡋ࡚࠸ࡿࡇ࡜ࡀศ࠿ࡿ㸬ᥦ᱌ࡋࡓࢧࣈࢫࣞࢵࢩࣙࣝࢻ᩿⇕ ⓗㄽ⌮ XOR ࡜ᚑ᮶ࡢ XOR ࡢᾘ㈝࢚ࢿࣝࢠ࣮ࡢẚ㍑ࢆᅗ 4.14 ࡟♧ࡍ㸬ᥦ᱌ࡋࡓࢧ ࣈࢫࣞࢵࢩࣙࣝࢻ᩿⇕ⓗㄽ⌮ XOR ࡣᚑ᮶ࡢ XOR ࡼࡾࡶᾘ㈝࢚ࢿࣝࢠ࣮ࡀᑠࡉࡃ࡞ ࡿࡇ࡜ࡀศ࠿ࡗࡓ㸬

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36 4.2. ᇶᮏᅇ㊰

0

0.2

0.4

0.6 V

pc

V

pc b

0

0.2

0.4

0.6 in1

0

0.2

0.4

0.6 in2

0

0.001

0.002

0.003

0

0.2

0.4

0.6 out

time[sec]

ᅗ 4.13: ᥦ᱌ࡋࡓࢧࣈࢫࣞࢵࢩࣙࣝࢻ᩿⇕ⓗㄽ⌮ XOR ࡢືసἼᙧ (࿘Ἴᩘ 1kHz)

(52)

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0

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7

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1

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10

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frequency[Hz]

e

n

er

gy

[fJ

/c

yc

le

]

static CMOS

sub-V

_t

CMOS

sub-V

_t

2PC2AL

proposed

ᅗ 4.14: ᚑ᮶ࡢ CMOS ㄽ⌮㸪ࢧࣈࢫࣞࢵࢩࣙࣝࢻ㡿ᇦ࡛ࡢ CMOS ㄽ⌮㸪ࢧࣈࢫࣞࢵ ࢩࣙࣝࢻ㡿ᇦ࡛ࡢ 2PC2AL㸪ᥦ᱌ࡋࡓࢧࣈࢫࣞࢵࢩࣙࣝࢻ᩿⇕ⓗㄽ⌮ࡢ XOR ࡢᾘ ㈝࢚ࢿࣝࢠ࣮ࡢẚ㍑.

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38 4.2. ᇶᮏᅇ㊰

in1

in2

S=in1+in2

Cout

ᅗ 4.15: ᥦ᱌ࡋࡓࢧࣈࢫࣞࢵࢩࣙࣝࢻ᩿⇕ⓗㄽ⌮༙ຍ⟬ჾᅇ㊰ᅗ

4.2.3 ༙ຍ⟬ჾ

ᅗ 4.15 ࡟㸪ᥦ᱌ࡋࡓࢧࣈࢫࣞࢵࢩࣙࣝࢻ᩿⇕ⓗㄽ⌮༙ຍ⟬ჾࡢᅇ㊰ᅗࢆ♧ࡍ㸬XOR ࡜ NAND㸪࢖ࣥࣂ࣮ࢱࢆ⏝࠸࡚ᐇ⌧ࡋ࡚࠾ࡾ㸪ࡑࢀࡒࢀࡢᅇ㊰ࡣ௨๓࡟♧ࡋࡓࡶࡢ ࢆ౑⏝ࡋࡓ㸬ᅗ 4.16 ࡟ SPICE ࢩ࣑࣮ࣗࣞࢩࣙࣥ࠿ࡽᚓࡓ㸪ᥦ᱌ࡋࡓࢧࣈࢫࣞࢵࢩࣙ ࣝࢻ᩿⇕ⓗㄽ⌮༙ຍ⟬ჾࡢືసἼᙧࢆ♧ࡍ㸬ືస࿘Ἴᩘࡣ 1kHz ࡛࠶ࡿ㸬༙ຍ⟬ჾ࡜ ࡋ࡚ṇࡋࡃືసࢆࡋ࡚࠸ࡿ㸬ᅗ 4.17 ࡟ᥦ᱌ࡋࡓࢧࣈࢫࣞࢵࢩࣙࣝࢻ᩿⇕ⓗㄽ⌮༙ຍ ⟬ჾ࡜㸪ᚑ᮶ࡢ༙ຍ⟬ჾࡢᾘ㈝࢚ࢿࣝࢠ࣮ࡢẚ㍑ࢆ♧ࡍ㸬ᥦ᱌ࡋࡓࢧࣈࢫࣞࢵࢩࣙ ࣝࢻ᩿⇕ⓗㄽ⌮༙ຍ⟬ჾࡣᚑ᮶ࡢ༙ຍ⟬ჾࡼࡾࡶ㸪పᾘ㈝㟁ຊ≉ᛶࢆ᭷ࡍࡿࡇ࡜ࡀ ♧ࡉࢀ࡚࠸ࡿ㸬

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0

0.2

0.4

0.6 V

pc

V

pc b

0

0.2

0.4

0.6 in1

0

0.2

0.4

0.6 in2

0

0.2

0.4

0.6 S

0

0.001

0.002

0.003

0

0.2

0.4

0.6 co

u

t

time[sec]

ᅗ 4.16: ᥦ᱌ࡋࡓࢧࣈࢫࣞࢵࢩࣙࣝࢻ᩿⇕ⓗㄽ⌮༙ຍ⟬ჾࡢືసἼᙧ (࿘Ἴᩘ 1kHz)

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40 4.2. ᇶᮏᅇ㊰

10

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1

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10

5

10

6

10

7

10

8

frequency[Hz]

e

n

er

gy

[fJ

/c

yc

le

]

static CMOS

sub-V

_t

CMOS

sub-V

_t

2PC2AL

proposed

ᅗ 4.17: ᚑ᮶ࡢ CMOS ㄽ⌮㸪ࢧࣈࢫࣞࢵࢩࣙࣝࢻ㡿ᇦ࡛ࡢ CMOS ㄽ⌮㸪ࢧࣈࢫࣞࢵ ࢩࣙࣝࢻ㡿ᇦ࡛ࡢ 2PC2AL㸪ᥦ᱌ࡋࡓࢧࣈࢫࣞࢵࢩࣙࣝࢻ᩿⇕ⓗㄽ⌮ࡢ༙ຍ⟬ჾࡢ ᾘ㈝࢚ࢿࣝࢠ࣮ࡢẚ㍑.

(56)

㻯㼕㼚

ᅗ 4.18: ᥦ᱌ࡋࡓࢧࣈࢫࣞࢵࢩࣙࣝࢻ᩿⇕ⓗㄽ⌮඲ຍ⟬ჾᅇ㊰ᅗ

4.2.4 ඲ຍ⟬ჾ

ᥦ᱌ࡋࡓࢧࣈࢫࣞࢵࢩࣙࣝࢻ᩿⇕ⓗㄽ⌮඲ຍ⟬ჾࡢᅇ㊰ᅗࢆ㸪ᅗ 4.18 ࡟♧ࡍ㸬ᥦ ᱌ࡋࡓ඲ຍ⟬ჾࡣ㸪2 ࡘࡢ XOR ࡜ 3 ࡘࡢ NAND ᅇ㊰࡛ᵓᡂࡉࢀ࡚࠸ࡿ㸬ᅗ 4.19 ࡟ SPICE ࢩ࣑࣮ࣗࣞࢩࣙࣥ࡟ࡼࡿ㸪ᥦ᱌ࡋࡓࢧࣈࢫࣞࢵࢩࣙࣝࢻ᩿⇕ⓗㄽ⌮඲ຍ⟬ჾ ࡢືసἼᙧࢆ♧ࡍ㸬ືస࿘Ἴᩘࡣ 1kHz ࡛࠶ࡿ㸬඲ຍ⟬ჾ࡜ࡋ࡚ṇࡋࡃືసࢆࡋ࡚࠸ ࡿࡇ࡜ࡀศ࠿ࡿ㸬ᅗ 4.20 ࡟ᥦ᱌ࡋࡓࢧࣈࢫࣞࢵࢩࣙࣝࢻ᩿⇕ⓗㄽ⌮඲ຍ⟬ჾ࡜㸪ᚑ ᮶ࡢ඲ຍ⟬ჾࡢᾘ㈝࢚ࢿࣝࢠ࣮ࡢẚ㍑ࢆ♧ࡍ㸬ᥦ᱌ࡋࡓࢧࣈࢫࣞࢵࢩࣙࣝࢻ᩿⇕ⓗ ㄽ⌮඲ຍ⟬ჾࡣ㸪ᚑ᮶ࡢ඲ຍ⟬ჾࡼࡾࡶᾘ㈝࢚ࢿࣝࢠ࣮ࡀᑠࡉࡃ࡞ࡿࡇ࡜ࡀ♧ࡉࢀ ࡚࠸ࡿ㸬

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42 4.2. ᇶᮏᅇ㊰

0

0.2

0.4

0.6 V

pc

V

pc b

0

0.2

0.4

0.6 in1

0

0.2

0.4

0.6 in2

0

0.2

0.4

0.6 ci

n

0

0.2

0.4

0.6 S

0 0.001 0.002 0.003 0.004 0.005

0

0.2

0.4

0.6 cout

time[sec]

ᅗ 4.19: ᥦ᱌ࡋࡓࢧࣈࢫࣞࢵࢩࣙࣝࢻ᩿⇕ⓗㄽ⌮඲ຍ⟬ჾࡢືసἼᙧ (࿘Ἴᩘ 1kHz)

(58)

10

0

10

1

10

2

10

3

10

4

10

5

10

6

10

7

10

0

10

1

10

2

10

3

10

4

10

5

10

6

10

7

10

8

frequency[Hz]

e

n

er

gy

[fJ

/c

yc

le

]

static CMOS

sub-V

_t

CMOS

sub-V

_t

CMOS

proposed

ᅗ 4.20: ᚑ᮶ࡢ CMOS ㄽ⌮㸪ࢧࣈࢫࣞࢵࢩࣙࣝࢻ㡿ᇦ࡛ࡢ CMOS ㄽ⌮㸪ࢧࣈࢫࣞࢵ ࢩࣙࣝࢻ㡿ᇦ࡛ࡢ 2PC2AL㸪ᥦ᱌ࡋࡓࢧࣈࢫࣞࢵࢩࣙࣝࢻ᩿⇕ⓗㄽ⌮ࡢ඲ຍ⟬ჾࡢ ᾘ㈝࢚ࢿࣝࢠ࣮ࡢẚ㍑.

(59)

44 4.3. ᥦ᱌ᅇ㊰ࡢࢫ࣮࢟ࣗ⪏ᛶ

4.3 ᥦ᱌ᅇ㊰ࡢࢫ࣮࢟ࣗ⪏ᛶ

ࡇࡇ࡛ࡣᥦ᱌ࡋࡓࢧࣈࢫࣞࢵࢩࣙࣝࢻ᩿⇕ⓗㄽ⌮ᅇ㊰ࡢࢫ࣮࢟ࣗ⪏ᛶࢆ♧ࡍ㸬᩿⇕ ⓗㄽ⌮ᅇ㊰ࡣ㟁※㟁ᅽ࡟࿘ᮇἼ㟁※ࡀ⏝࠸ࡽࢀ࡚࠾ࡾ㸪ᅇ㊰ࢆᏳᐃࡋ࡚ືసࡉࡏࡿ ࡓࡵ㸪ࡲࡓపᾘ㈝࢚ࢿࣝࢠ࣮ࢆᐇ⌧ࡍࡿࡓࡵ࡟ࡣ㸪ㄽ⌮ᅇ㊰࡟༳ຍࡉࢀࡿ㟁ᅽࡀ 0V ࡢ࡜ࡁ࡟ࢫ࢖ࢵࢳࣥࢢࢆ⾜࠺ࡇ࡜ࡀ㔜せ࡛࠶ࡿ㸬ᅇ㊰ࡢࣃࢫࡢ㛗ࡉࡢ㐪࠸࡞࡝࡟ࡼࡗ ࡚㸪࿘ᮇἼ㟁※࡟ᑐࡋ࡚ධຊಙྕࡀࡎࢀ࡚ࡋࡲ࠺ࢫ࣮࢟ࣗࡀ⏕ࡌࡓሙྜ㸪ࢫ࢖ࢵࢳࣥ ࢢࡢࢱ࢖࣑ࣥࢢࡀࡎࢀ࡚ࡋࡲ࠸㸪ᅇ㊰ࡢㄗືసࡸᾘ㈝࢚ࢿࣝࢠ࣮ࡢୖ᪼࡞࡝ࡀ㉳ࡇ ࡿ㸬ࡑࡢࡓࡵ㸪ᚑ᮶ࡢ᩿⇕ⓗㄽ⌮ᅇ㊰࡛ࡣ㸪Ᏻᐃࡋࡓືసࢆ⥔ᣢࡍࡿࡓࡵ࿘ᮇἼ㟁 ※࡜ධຊಙྕࡢྠᮇࢆ࡜ࡿᚲせࡀ࠶ࡿ㸬ᅗ 4.21 ࡟㸪ᚑ᮶ࡢ᩿⇕ⓗㄽ⌮ᅇ㊰ 2PC2AL ࡛ᵓᡂࡋࡓ NAND ᅇ㊰ࡢࢫ࣮࢟ࣗࡀ⏕ࡌ࡚࠸࡞࠸ሙྜࡢືసἼᙧ࡜ࢫ࣮࢟ࣗࡀ⏕ࡌ ࡓሙྜࡢືసἼᙧࢆ♧ࡍ㸬ᅇ㊰ᵓᡂࡣᅗ 4.9 ࡜ྠᵝ࡛࠶ࡿ㸬ືస࿘Ἴᩘࡣ 1kHz ࡛࠶ ࡿ㸬ࢫ࣮࢟ࣗࡀ⏕ࡌ࡚࠸࡞࠸࡜ࡁࡢࢫ࢖ࢵࢳࣥࢢࡢࢱ࢖࣑ࣥࢢࡣ㸪ㄽ⌮ᅇ㊰ࡢ㟁ᅽ ࡀ 0V ࡜࡞ࡿ࡜ࡁ࡛࠶ࡿࡓࡵ㸪VP C࡜ VP Cࡀྠ㟁఩࡜࡞ࡿ㸪0.3V ࡢ࡜ࡁ࡛࠶ࡿ㸬ࢫ ࣮࢟ࣗࡀ⏕ࡌࡓ࡜ࡁࡢධຊಙྕࡢࡎࢀࡣ㸪IN1 ࡀ 0.125ms 㐍ࡳ㸪IN2 ࡀ 0.125ms 㐜 ࢀ࡜ࡋࡓ㸬ࢫ࣮࢟ࣗࡀ⏕ࡌࡓ࡜ࡁࡢฟຊἼᙧࡣ㸪ࢫ࣮࢟ࣗࡀ⏕ࡌ࡚࠸࡞࠸࡜ࡁ࡜ẚ ㍑ࡋ࡚ṍࢇ࡛ࡋࡲࡗ࡚࠸ࡿ㸬 ḟ࡟㸪ᥦ᱌ࡋࡓ㥑ື᪉ἲ࡟ࡼࡿ NAND ᅇ㊰ࡢືసἼᙧࢆᅗ 4.22 ࡟♧ࡍ㸬ືస࿘Ἴ ᩘࡣ 1kHz㸪ࢫ࣮࢟ࣗࡀ⏕ࡌࡓ࡜ࡁࡢ࿘ᮇἼ㟁※࡟ᑐࡍࡿධຊಙྕࡢࡎࢀࡣ 2PC2AL ࡢ࡜ࡁ࡜ྠᵝ࡛࠶ࡿ㸬ᥦ᱌ࡋࡓࢧࣈࢫࣞࢵࢩࣙࣝࢻ᩿⇕ⓗㄽ⌮ᅇ㊰ࡣ㸪VP C࡜ VP C ࡀྠ㟁఩࡜࡞ࡿ᫬㛫ࡀ㛗ࡃ࡞ࡗ࡚࠸ࡿࡓࡵ㸪ࢫ࣮࢟ࣗࡀ⏕ࡌࡓሙྜ࡛ࡶ㸪ṍࡴࡇ࡜࡞ ࡃࢫ࣮࢟ࣗࡀ⏕ࡌ࡚࠸࡞࠸࡜ࡁ࡜࡯ࡰྠࡌືసἼᙧࢆ♧ࡋ࡚࠸ࡿ㸬ࡇࡢࡇ࡜࠿ࡽᥦ ᱌ࡋࡓࢧࣈࢫࣞࢵࢩࣙࣝࢻ᩿⇕ⓗㄽ⌮ᅇ㊰ࡣࢫ࣮࢟ࣗࡀ⏕ࡌࡓሙྜ࡛ࡶᏳᐃࡋࡓືస ࢆࡍࡿ࡜ゝ࠼ࡿ㸬ࡲࡓ㸪ࡑࢀࡒࢀࡢ࡜ࡁࡢᾘ㈝࢚ࢿࣝࢠ࣮ࢆ⾲ 4.2 ࡟♧ࡍ㸬2PC2AL-⾲ 4.2: 2PC2AL-NAND ࡢࢫ࣮࢟ࣗࡀ⏕ࡌ࡚࠸࡞࠸࡜ࡁࡢᾘ㈝࢚ࢿࣝࢠ࣮࡜㸪ࢫ ࣮࢟ࣗࡀ⏕ࡌࡓ࡜ࡁࡢᾘ㈝࢚ࢿࣝࢠ࣮. 2PC2AL proposed ࢫ࣮࢟ࣗ࡞ࡋ 0.35f[J] 0.28f[J] ࢫ࣮࢟ࣗ࠶ࡾ 2.18f[J] 0.28f[J]

(60)

(61)

46 4.3. ᥦ᱌ᅇ㊰ࡢࢫ࣮࢟ࣗ⪏ᛶ

0

0.1

0.2

0.3

0.4

0.5

0.6 V

PC

V

PC B

0

0.2

0.4

0.6 IN

1

0

0.2

0.4

0.6 IN

2

0

0.001

0.002

0

0.1

0.2

0.3

0.4

0.5

0.6 OU

T

time [sec]

ᅗ 4.21: 2PC2AL-NAND ࡢࢫ࣮࢟ࣗࡀ⏕ࡌ࡚࠸࡞࠸࡜ࡁࡢືసἼᙧ (㯮) ࡜㸪ࢫ࣮࢟ࣗ ࡀ⏕ࡌࡓ࡜ࡁࡢືసἼᙧ (⥳).

0

0.1

0.2

0.3

0.4

0.5

0.6 V

PC

V

PC B

0

0.2

0.4

0.6 IN

1

0

0.2

0.4

0.6 IN

2

0

0.001

0.002

0

0.1

0.2

0.3

0.4

0.5

0.6 OU

T

time [sec]

ᅗ 4.22: ᥦ᱌-NAND ࡢࢫ࣮࢟ࣗࡀ⏕ࡌ࡚࠸࡞࠸࡜ࡁࡢືసἼᙧ (㯮) ࡜㸪ࢫ࣮࢟ࣗ ࡀ⏕ࡌࡓ࡜ࡁࡢືసἼᙧ (⥳).

(62)

ᛂ⏝ᅇ㊰࡜ࡋ࡚ 4×4-bit ஌⟬ჾࢆタィࡋ㸪ࢧࣈࢫࣞࢵࢩࣙࣝࢻ㡿ᇦ࡛ࡢ CMOS ㄽ ⌮㸪ࢧࣈࢫࣞࢵࢩࣙࣝࢻ㡿ᇦ࡛ືసࡉࡏࡓ 2PC2AL㸪ᥦ᱌᪉ἲ࡟ࡼࡾ㥑ືࡋࡓ࡜ࡁ ࡢ㸪࣏ࢫࢺࣞ࢖࢔࢘ࢺࢩ࣑࣮ࣗࣞࢩࣙࣥࡢ⤖ᯝ࡜ LSI ࡢ ᐃ⤖ᯝࢆ♧ࡍ㸬

5.1 ࢩ࣑࣮ࣗࣞࢩࣙࣥ⤖ᯝ

ࢩ࣑࣮ࣗࣞࢩࣙࣥࡢࡓࡵ࡟ᵓᡂࡋࡓ㸪4_{×4-bit ஌⟬ჾࡢᅇ㊰ᅗࢆᅗ 5.1 ࡟♧ࡍ㸬ࡇ} ࡢ 4_{×4-bit ஌⟬ჾࡣ 16 ಶࡢ AND㸪8 ಶࡢ඲ຍ⟬ჾ㸪4 ಶࡢ༙ຍ⟬ჾ࠿ࡽᵓᡂࡉࢀ࡚} ࠸ࡿ㸬a0–a3ࡣẚ஌ᩘ㸪b0–b3ࡣ஌ᩘࢆ⾲ࡍධຊ➃Ꮚ㸪p0–p7ࡣ✚ࡢฟຊࢆ⾲ࡍฟຊ➃ Ꮚ࡛࠶ࡿ㸬࿘Ἴᩘࡀ 1kHz ࡢ࡜ࡁࡢືసἼᙧࢆᅗ 5.2 ࡟♧ࡍ㸬஌⟬ჾ࡜ࡋ࡚ṇࡋࡃື సࢆࡋ࡚࠸ࡿࡇ࡜ࡀศ࠿ࡿ㸬5.3 ࡟ 4_{×4-bit ஌⟬ჾࡢᾘ㈝࢚ࢿࣝࢠ࣮ࡢẚ㍑ࢆ♧ࡍ㸬} ࡑࢀࡒࢀࡢᅇ㊰ࡢ㟁※㟁ᅽࡢࣃ࣓࣮ࣛࢱࢆ⾲ 5.1 ࡟♧ࡍ㸬Vbpࡣ PMOS ࡢᇶᯈ㟁ᅽ㸪 Vbnࡣ NMOS ࡢᇶᯈ㟁ᅽ࡛࠶ࡿ㸬ᥦ᱌᪉ἲ࡟ࡼࡿ 4×4-bit ஌⟬ჾࡢᾘ㈝࢚ࢿࣝࢠ࣮ ࡣ㸪ᚑ᮶ࡢ 4_{×4-bit ஌⟬ჾ࡜ẚ㍑ࡋ࡚᭱ࡶᑠࡉࡃ࡞ࡿࡇ࡜ࡀศ࠿ࡗࡓ㸬} 47

(63)

48 5.1. ࢩ࣑࣮ࣗࣞࢩࣙࣥ⤖ᯝ

a0

b0

_a0

b1

a1

b0

a1

b1

a2

b0

a2

b1

a3

b0

a3

b1

a3

b2

a3

b3

a2

b3

a2

b2

a1

b2

a0

b3

a1

b3

a0

HA

FA

p0

p1

p2

p3

p4

p5

p6

p7

ᅗ 5.1: ᥦ᱌᪉ἲ࡟ࡼࡿ 4×4-bit ஌⟬ჾࡢᅇ㊰ᅗ.

⾲ 5.1: ᚑ᮶ CMOS ㄽ⌮㸪ࢧࣈࢫࣞࢵࢩࣙࣝࢻ CMOS ㄽ⌮㸪2PC2AL㸪ᥦ᱌᪉ἲࡢ 㟁※㟁ᅽࡢࣃ࣓࣮ࣛࢱ.

static CMOS _sub-Vt CMOS 2PC2AL proposed

VP C 1.8[V]DC 0.6[V]DC 0.3–0.6[V]AC 0–0.6[V]AC

VP C GND GND 0–0.3[V]AC 0–0.3[V]AC

Vbp 1.8[V]DC GND GND GND

Vbn GND GND GND GND

(64)

0 0.2 0.4 Vpc Vpc b 0 0.2 0.4 a0 , b 0 0 0.2 0.4 a1, b1 0 0.2 0.4 a2 , b 2 0 0.2 0.4 a3 , b 3 0 0.2 0.4 p0 0 0.2 0.4 p1 0 0.2 0.4 p2 0 0.2 0.4 p6 0 0.2 0.4 p3 0 0.2 0.4 p4 0 0.2 0.4 p5 0 0.002 0.004 0.006 0.008 0.01 0 0.2 0.4 p7 time[sec] ᅗ 5.2: SPICE ࢩ࣑࣮ࣗࣞࢩࣙࣥ࠿ࡽᚓࡓᥦ᱌᪉ἲ࡟ࡼࡿ 4_{×4-bit ஌⟬ჾࡢฟຊἼᙧ} (ືస࿘Ἴᩘ 1kHz).

(65)

50 5.1. ࢩ࣑࣮ࣗࣞࢩࣙࣥ⤖ᯝ

10

0

10

1

10

2

10

3

10

4

10

5

10

-3

10

-2

10

-1

10

0

10

1

10

2

10

3

10

4

10

5

frequency [Hz]

e

n

er

g

y

[

n

J/

cy

c

le]

static CMOS

sub-V

_t

CMOS

sub-V

_t

2PC2AL

proposed

ᅗ 5.3: SPICE ࢩ࣑࣮ࣗࣞࢩࣙࣥ࠿ࡽᚓࡓᥦ᱌᪉ἲ࡟ࡼࡿ 4_{×4-bit ஌⟬ჾ࡜ᚑ᮶ࡢ} 4×4-bit ஌⟬ჾࡢᾘ㈝࢚ࢿࣝࢠ࣮ẚ㍑.

(66)

5.2.1 ࣞ࢖࢔࢘ࢺ

タィࡋࡓ 4_{×4-bit ஌⟬ჾࡢࣞ࢖࢔࢘ࢺࢆᅗ 5.4 ࡟♧ࡍ㸬}

NDA ࡟᢬ゐࡍࡿࡓࡵ࡟㠀බ㛤

(67)

52 5.2. LSI ᐇ⿦ ᅗ 5.5: LSI ࢳࢵࣉ⏬ീ. ᅗ 5.6: ᐃ୰ࡢ LSI.

5.2.2 ᐃᶵჾ

ᮏ◊✲࡛〇సࡋࡓ LSI ࡣᮾி኱Ꮫ኱つᶍ㞟✚ࢩࢫࢸ࣒タィᩍ⫱◊✲ࢭࣥࢱ࣮ࢆ㏻ ࡋ㸪࣮࣒ࣟᰴᘧ఍♫㸪ฝ∧༳ๅᰴᘧ఍♫ࡢ༠ຊ࡛⾜ࢃࢀࡓࡶࡢ࡛࠶ࡿ㸬ᅗ 5.5㸪5.6 ࡟ LSI ࢳࢵࣉࡢ෗┿㸪 ᐃ୰ࡢ LSI ࡢ෗┿ࢆ♧ࡍ㸬ᅗ 5.7 ࡟ LSI ᐃ࡟౑⏝ࡋࡓᶵ ჾ㸪ᅗ 5.8 ᐃᶵჾࡢ᥋⥆ᅗࢆ♧ࡍ㸬ධຊಙྕ㸪㟁※㟁ᅽࡣࣇ࢓ࣥࢡࢩࣙࣥࢪ࢙ࢿ ࣮ࣞࢱࢆ⏝࠸࡚⏕ᡂࡋ㸪ࢹࢪࢱࣝ࢜ࢩࣟࢫࢥ࣮ࣉ࡟ࡼࡾ㸪ฟຊἼᙧࢆྲྀᚓࡋࡓ㸬ࡲ ࡓ㸪ప㟁ὶ࣓࣮ࢱࢆ⏝࠸࡚ᚓࡓ㟁ὶ್࠿ࡽ㸪ḟࡢᘧࡼࡾ 1 ࢧ࢖ࢡࣝ࠶ࡓࡾࡢᾘ㈝࢚ ࢿࣝࢠ࣮ࢆồࡵࡓ㸬 E = Ivpc×VP Cpeak f (5.1) Ivpcࡣప㟁ὶ࣓࣮ࢱ࠿ࡽᚓࡓ㟁ὶ್㸪VP Cpeakࡣ㟁※㟁ᅽ㸪f ࡣືస࿘Ἴᩘ࡛࠶ࡿ㸬

(68)

ᅗ 5.7: LSI ᐃᶵჾ.

DUT

Function Generator (VPC,VPC,input) Digital Oscilloscope (output)

6

ᅗ 5.8: ᐃᶵჾࡢ᥋⥆ᅗ.

(69)

54 5.2. LSI ᐇ⿦

5.2.3 ᐃ⤖ᯝ

ᅗ 5.9 ࡟ᐇ⿦ࡋࡓ 4_{×4-bit ஌⟬ჾ LSI ࡢ㢧ᚤ㙾෗┿ࢆ♧ࡍ㸬⾲ 5.2 ࡟ᐇ⿦ࡋࡓ LSI}

ࡢࣃ࣓࣮ࣛࢱࢆ♧ࡍ㸬஌⟬ჾࡢ㠃✚ࡣ 193_{×123.7 μm}2࡜࡞ࡗࡓ㸬

ᅗ 5.9: LSI ᐇ⿦ࡋࡓ 4×4-bit ஌⟬ჾࡢ㢧ᚤ㙾෗┿.

⾲ 5.2: ᐇ⿦ࡋࡓ 4_{×4-bit ஌⟬ჾ LSI ࢳࢵࣉࡢࣃ࣓࣮ࣛࢱ}

Technology _{0.18 μm CMOS process} core size 193.4(W)×123.7(H) μm2

Transistor No. 424

(70)

ᅗ 5.10: LSI ᐇ⿦ࡋࡓ 4_{×4-bit ஌⟬ჾࡢືసἼᙧ (࿘Ἴᩘ 1kHz, ⦪㍈:5V/div, ᶓ} ㍈:1ms/div, in1–in4:ධຊಙྕ, p0–p7:ฟຊಙྕ).

࿘Ἴᩘࡀ 1kHz ࡢ࡜ࡁࡢ஌⟬ჾࡢືసἼᙧࢆᅗ 5.10 ࡟♧ࡍ㸬ࡇࡢᅗ࠿ࡽ㸪஌⟬ჾ ࡀṇࡋࡃືసࡋ࡚࠸ࡿࡇ࡜ࡀศ࠿ࡿ㸬

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56 5.2. LSI ᐇ⿦ ᥦ᱌ࡋࡓ 4_{×4-bit ஌⟬ჾ࡜ᚑ᮶ࡢ 4×4-bit ஌⟬ჾࡢ 1 ࢧ࢖ࢡࣝ࠶ࡓࡾࡢᾘ㈝࢚ࢿ} ࣝࢠ࣮ࡢẚ㍑ࢆᅗ 5.11 ࡟♧ࡍ㸬㉥࠸⥺ࡣ㸪LSI ࡢ ᐃ࠿ࡽᚓࡓᾘ㈝࢚ࢿࣝࢠ࣮࡛࠶ ࡿ㸬ᅗ 5.11 ࡼࡾ㸪LSI ࡢ ᐃ࡟ࡼࡾᚓࡓᾘ㈝࢚ࢿࣝࢠ࣮ࡣ㸪ࢩ࣑࣮ࣗࣞࢩࣙࣥ࠿ࡽ ᚓࡓᾘ㈝࢚ࢿࣝࢠ࣮ࡼࡾࡶ⣙ 10 ಸ኱ࡁ࡞್࡜࡞ࡗ࡚࠸ࡿ㸬ࡇࢀࡣ㸪LSI ᐃࡢ࡜ࡁ ࡟ࡣ㸪 ᐃ࡟⏝࠸ࡿࢣ࣮ࣈࣝ㸪 ᐃᇶᯈ࡞࡝ࡢᐤ⏕ᡂศࡀྵࡲࢀ࡚࠸ࡿࡓࡵ࡜⪃࠼ ࡽࢀࡿ㸬ࡇࡢᐤ⏕ᡂศࡢᙳ㡪ࢆ☜ㄆࡍࡿࡓࡵ࡟㸪 ᐃࢣ࣮ࣈࣝ㸪 ᐃᇶᯈࡢᐤ⏕ᡂ ศࢆ⪃៖ࡋࡓ 4_{×4-bit ஌⟬ჾࡢࢩ࣑࣮ࣗࣞࢩࣙࣥࢆ⾜࠺㸬ᅗ 5.12 ࡟ࢩ࣑࣮ࣗࣞࢩࣙ} ࣥࡋࡓᅇ㊰ᅗࢆ♧ࡍ㸬ᐤ⏕ᡂศ࡜ࡋ࡚㸪30kΩ ࡢ᢬ᢠ࡜ 20pF ࡢࢥࣥࢹࣥࢧࢆ㟁※࡜ ୪ิ࡟᥋⥆ࡋࡓ㸬ᅗ 5.11 ࡟࠾࠸࡚㸪㟷࠸⥺ࡣᐤ⏕ᡂศࢆ⪃៖ࡋࡓ 4_{×4-bit ஌⟬ჾࡢ} ࢩ࣑࣮ࣗࣞࢩࣙࣥ࠿ࡽᚓࡓᾘ㈝࢚ࢿࣝࢠ࣮࡛࠶ࡿ㸬ࡇࡢࢩ࣑࣮ࣗࣞࢩࣙࣥࡢ⤖ᯝࡣ㸪 LSI ᐃࡢ⤖ᯝ࡜୍⮴ࡋࡓ㸬ࡇࡢࡇ࡜࠿ࡽ㸪LSI ᐃࡢ⤖ᯝࡣ㸪 ᐃ࡟⏝࠸ࡓࢣ࣮ࣈ ࣝ㸪 ᐃᇶᯈࡢᐤ⏕ᡂศࡢᙳ㡪ࢆྵࢇ࡛࠸ࡿ࡜⪃࠼ࡽࢀࡿ㸬ᅗ 5.11 ࡟࠾࠸࡚㸪㯮࠸ ⥺ࡣ LSI ᐃࡢ⤖ᯝ࠿ࡽ㸪ᐤ⏕ᡂศࡢᾘ㈝࢚ࢿࣝࢠ࣮ࢆ㝖࠸ࡓᾘ㈝࢚ࢿࣝࢠ࣮ࢆ♧ ࡋ࡚࠸ࡿ㸬ࡲࡓ㸪ᥦ᱌᪉ἲ࡟ࡼࡿ 4×4-bit ஌⟬ჾࡣ㸪ᚑ᮶ࡢ 4×4-bit ஌⟬ჾࡼࡾࡶ㸪 ᾘ㈝࢚ࢿࣝࢠ࣮ࡀᑠࡉࡃ࡞ࡿࡇ࡜ࡀศ࠿ࡗࡓ㸬

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10

0

10

1

10

2

10

3

10

4

10

5

10

6

10

7

10

-3

10

-2

10

-1

10

0

10

1

10

2

frequency [Hz]

en

er

g

y

[

n

J/

cy

proposed (LSI)

proposed (simulation)

proposed+probe (simulation)

static CMOS (LSI)

static CMOS (simulation)

static CMOS+probe (simulation)

sub-V

_t

CMOS (LSI)

sub-V

_t

CMOS (simulation)

sub-V

_t

CMOS+probe (simulation)

ᅗ 5.11: LSI ᐇ⿦ࡋࡓ 4×4-bit ஌⟬ჾࡢᾘ㈝࢚ࢿࣝࢠ࣮ẚ㍑.

IN

V

_pc

20p[F]

30k[ ]

V

_pcb

OUT

8

8 20p[F]

30k[ ]

Multiplier

ᅗ 5.12: ࣉ࣮ࣟࣈࡢᐤ⏕ᡂศࢆ⪃៖ࡋࡓ 4_{×4-bit ஌⟬ჾࡢᅇ㊰ᅗ.}

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CMOS ㄽ⌮ᅇ㊰ࡢᾘ㈝࢚ࢿࣝࢠ࣮ࡣ SPICE ࢩ࣑࣮ࣗࣞࢩࣙࣥࢆ⾜࠺ࡇ࡜࡟ࡼࡾ㸪㏆ఝⓗ࡞್ࢆồࡵࡿࡇ࡜ࡀ࡛ࡁࡿ㸬SPICE ࢩ࣑࣮ࣗࣞࢩ࡛ࣙࣥࡣ≀ᛶ࡟ᇶ࡙࠸ࡓᘧ ࠿ࡽᾘ㈝࢚ࢿࣝࢠ࣮ࡀồࡵࡽࢀ࡚࠸ࡿࡀ㸪ࡇࢀࡣࣃ࣓࣮ࣛࢱᩘࡀከࡃ㸪㠀ᖖ࡟」㞧 ࡞ᘧ࡜࡞ࡗ࡚࠾ࡾ㸪ࡑࡢᘧ࠿ࡽ࡝ࡢࣃ࣓࣮ࣛࢱࡀᾘ㈝࢚ࢿࣝࢠ࣮ࡢ≉ᛶ࡟㛵୚ࡋ࡚ ࠸ࡿ࠿ࢆศᯒࡍࡿࡢࡣ㠀ᖖ࡟ᅔ㞴࡛࠶ࡿ㸬ࡋ࠿ࡋ㸪ᚑ᮶ࡼࡾ CMOS ㄽ⌮ᅇ㊰ࡢᾘ㈝ ࢚ࢿࣝࢠ࣮ࡣ RC ➼౯ᅇ㊰࡜㸪ࢺࣛࣥࢪࢫࢱࡢ㟁ὶᘧࢆ⏝࠸ࡓᩘ⌮ࣔࢹࣝ࡟ࡼࡾィ ⟬ࡍࡿࡇ࡜ࡀ࡛ࡁࡿ㸬ᾘ㈝࢚ࢿࣝࢠ࣮ᩘ⌮ࣔࢹࣝࡣࣃ࣓࣮ࣛࢱᩘࡀᑡ࡞ࡃ⡆⣲࡞ᙧ ࡜࡞ࡗ࡚࠾ࡾ㸪ᾘ㈝࢚ࢿࣝࢠ࣮≉ᛶ࡟࡝ࡢࣃ࣓࣮ࣛࢱࡀ኱ࡁࡃ㛵୚ࡋ࡚࠸ࡿࡢ࠿ࢆ ᐜ᫆࡟▱ࡿࡇ࡜ࡀ࡛ࡁࡿࡓࡵ㸪ᅇ㊰タィࡢ㸪᭱ึࡢ╔᝿ࢆᚓࡿ㝿࡟㔜ᐆࡍࡿ㸬ࡲࡓ㸪 SPICE ࢩ࣑࣮ࣗࣞࢩࣙࣥ࡟ࡣࢺࣛࣥࢪࢫࢱࣔࢹࣝࡀᚲせ࡛࠶ࡾ㸪඲࡚ࡢࢺࣛࣥࢪࢫ ࢱ࡛ࢩ࣑࣮ࣗࣞࢩࣙࣥࡀྍ⬟࡞ࢃࡅ࡛ࡣ࡞࠸㸬ᾘ㈝࢚ࢿࣝࢠ࣮ᩘ⌮ࣔࢹࣝࢆ౑⏝ࡍ ࡿࡇ࡜࡛㸪ࡑࡢࡼ࠺࡞ሙྜ࡛ࡶᾘ㈝࢚ࢿࣝࢠ࣮≉ᛶࢆᚓࡿࡇ࡜ࡀྍ⬟࡜࡞ࡿ㸬 ᚑ᮶ࡢ CMOS ㄽ⌮ᅇ㊰ࡢᾘ㈝࢚ࢿࣝࢠ࣮ᩘ⌮ࣔࢹࣝࡣ㸪ᐇ㝿ࡢᾘ㈝࢚ࢿࣝࢠ࣮≉ ᛶࢆṇ☜࡟⾲⌧ࡋ࡚࠸ࡿ㸬ࡋ࠿ࡋ㸪ᥦ᱌ࡋࡓࢧࣈࢫࣞࢵࢩࣙࣝࢻ᩿⇕ⓗㄽ⌮ᅇ㊰ࡢ ᾘ㈝࢚ࢿࣝࢠ࣮≉ᛶࡣ㸪ᚑ᮶ࡢᩘ⌮ࣔࢹࣝ࠿ࡽᚓࡓᾘ㈝࢚ࢿࣝࢠ࣮≉ᛶ࡜ࡣ␗࡞ࡿ ≉ᛶ࡜࡞ࡿࡇ࡜ࡀศ࠿ࡗࡓ㸬ᮏ❶࡛ࡣ㸪ࡲࡎ CMOS ㄽ⌮ᅇ㊰ࡢᾘ㈝࢚ࢿࣝࢠ࣮ࡀ࡝ ࡢࡼ࠺࡞せᅉ࡛ᵓᡂࡉࢀ࡚࠸ࡿ࠿ࢆㄝ᫂ࡋ㸪ᚑ᮶ࡢ CMOS ㄽ⌮ᅇ㊰㸪᩿⇕ⓗㄽ⌮ᅇ ㊰ࡢᾘ㈝࢚ࢿࣝࢠ࣮ᩘ⌮ࣔࢹࣝࢆ♧ࡍ㸬ḟ࡟ࢧࣈࢫࣞࢵࢩࣙࣝࢻ᩿⇕ⓗㄽ⌮ᅇ㊰ࡢ ᾘ㈝࢚ࢿࣝࢠ࣮≉ᛶࡀ㸪ᚑ᮶ࡢᾘ㈝࢚ࢿࣝࢠ࣮ᩘ⌮ࣔࢹࣝࡢ≉ᛶ࡜␗࡞ࡗ࡚࠸ࡿࡇ ࡜ࢆ♧ࡋ㸪ᚑ᮶ࡢᾘ㈝࢚ࢿࣝࢠ࣮ᩘ⌮ࣔࢹࣝࢆᨵⰋࡋ㸪ࢧࣈࢫࣞࢵࢩࣙࣝࢻ᩿⇕ⓗ ㄽ⌮ᅇ㊰ࡢᾘ㈝࢚ࢿࣝࢠ࣮ࢆ㏆ఝ࡛ࡁࡿ᪂ࡓ࡞ᩘ⌮ࣔࢹࣝࢆᥦ᱌ࡍࡿ㸬 59

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60 6.1. CMOS ㄽ⌮ᅇ㊰ࡢᾘ㈝࢚ࢿࣝࢠ࣮せᅉ

V

dd

M1

M2

V

in

V

out

඘ᨺ㟁㟁ὶ

࣮ࣜࢡ㟁ὶ

㈏㏻㟁ὶ

ᅗ 6.1: ᚑ᮶ࡢ CMOS ㄽ⌮࢖ࣥࣂ࣮ࢱࡢືⓗ࢚ࢿࣝࢠ࣮㸪㟼ⓗ࢚ࢿࣝࢠ࣮㸪㈏㏻㟁 ὶ࡟ࡼࡿ࢚ࢿࣝࢠ࣮.

6.1 CMOS

ㄽ⌮ᅇ㊰ࡢᾘ㈝࢚ࢿࣝࢠ࣮せᅉ

ᅗ 6.1 ࡟ᚑ᮶ࡢ CMOS ㄽ⌮࢖ࣥࣂ࣮ࢱࢆ♧ࡍ㸬ㄽ⌮ᅇ㊰ࡢᾘ㈝࢚ࢿࣝࢠ࣮ࡣ㸪3 ࡘࡢせ⣲࡛ᵓᡂࡉࢀ࡚࠸ࡿ㸬඘ᨺ㟁㟁ὶ࡟ࡼࡿᾘ㈝࢚ࢿࣝࢠ࣮㸪₃ࢀ㟁ὶ࡟ࡼࡿᾘ ㈝࢚ࢿࣝࢠ࣮㸪ࡑࡋ࡚㈏㏻㟁ὶ࡟ࡼࡿᾘ㈝࢚ࢿࣝࢠ࣮࡛࠶ࡿ㸬 ࡲࡎ㸪඘ᨺ㟁㟁ὶ࡟ࡼࡿᾘ㈝࢚ࢿࣝࢠ࣮ࢆㄝ᫂ࡍࡿ㸬ᅗ 6.1 ࡟♧ࡋࡓ࢖ࣥࣂ࣮ࢱ࡟ ࠾࠸࡚㸪ධຊ Vinࡀ “High” ࠿ࡽ “Low” ࡟࡞ࡗࡓ࡜ࡁ㸪M1 ࡀ࢜ࣥࡋ㸪M2 ࡀ࢜ࣇࡍ ࡿ㸬ࡇࡢ࡜ࡁࡢᾘ㈝࢚ࢿࣝࢠ࣮ࢆ⪃࠼ࡿ࡜㸪࢜ࣥ≧ែࡢ M1 ࢆ㏻ࡋ࡚㈇Ⲵᐜ㔞࡬ὶࢀ ࡿ඘㟁㟁ὶ࡟ࡼࡾ㸪࢚ࢿࣝࢠ࣮ࡀᾘ㈝ࡉࢀࡿ㸬ࡲࡓ㸪ධຊ Vinࡀ “Low” ࠿ࡽ “High” ࡜࡞ࡿ࡜㸪M1 ࡀ࢜ࣇࡋ㸪M2 ࡀ࢜ࣥࡍࡿ㸬඘㟁ືస࡟ࡼࡾ㸪㈇Ⲵᐜ㔞࡟⵳࠼ࡽࢀࡓ 㟁Ⲵࡀ NMOS ࢆ㏻ࡋ࡚ࢢࣛࣥࢻ࡟ὶࢀࡿ㝿࡟ࡶ࢚ࢿࣝࢠ࣮ࡀᾘ㈝ࡉࢀࡿ㸬ࡇࡢ඘ᨺ 㟁㟁ὶ࡟ࡼࡿᾘ㈝࢚ࢿࣝࢠ࣮ࡣືⓗ࢚ࢿࣝࢠ࣮࡜ࡶ࿧ࡤࢀ࡚࠾ࡾ㸪௨ୗࡢᘧ࡛⾲ࡉ ࢀࡿ㸬 Wdynamic = αCLVDD2 (6.1)