ミニチュアマルクス発生装置の開発とマイクロプラズマジェットへの応用

(1)

ࡒ࠾࠴ࡘࠕࡑ࡞ࠢࠬ⊒↢ⵝ⟎ߩ㐿⊒ߣ

ࡑࠗࠢࡠࡊ࡜࠭ࡑࠫࠚ࠶࠻߳ߩᔕ↪

਄

㊁

ፏ

ኼ

1

㧘૒ਭᎹ

⾆ᔒ

_㧘⑺

_ጊ

_㓷

_⵨

_㧘ᶉ

_ᐔ

_㓉

_↵

_㧘

ൎ

ᧁ

ᷕ

_㧘⑺

_ጊ

_⑲

_ౖ

㧔_{2008 ᐕ 6 ᦬ 28 ᣣฃઃ; 2008 ᐕ 9 ᦬ 8 ᣣฃℂ㧕}

Development of Miniaturized Marx Generator and Its Application to

Micro-Plasma Jet

Takahisa UENO*

,1

_{, Takashi SAKUGAWA, Masahiro AKIYAMA, Takao NAMIHIRA**,}

Sunao KATSUKI and Hidenori AKIYAMA*

(Received June 26, 2008; Accepted September 8, 2008)

The micro-plasma jet has been used in various fields such as materials processing, chemical analysis,

short-wavelength light source, and biomaterials treatment. The miniaturized electric power generator has been

requested to produce these plasmas in the micro-scale area, because the present large size generator limits the use of

these small plasmas. Under such background, a miniaturized Marx generator which has Bipolar Junction Transistors

(BJTs) as closing switches has been developed to generate micro-plasma jet. In the miniaturized Marx generator, BJTs

were operated in avalanche mode to obtain a faster switching speed with nanosecond regime. In this paper, three kinds

of BJTs which have different collector current are evaluated as closing switch, and the micro-plasma jet is generated

by the miniaturized Marx generator. The generator is able to output -2.5kV voltage, 38ns pulse-width by series BJTs

for cutting load current. It has been found that the dependence of length of micro-plasma jet was different from load

current.

1. ߪߓ߼ߦ ㄭᐕ㧘ࡊ࡜࠭ࡑࠍ೑↪ߒߚᛛⴚߪ߼ߑ߹ߒ޿⊒ዷࠍㆀߍ㧘 ฦ⒳⭯⤑ߩ૞ᚑ߿ࠛ࠶࠴ࡦࠣߣ޿ߞߚ↥ᬺߩၮ⋚ᛛⴚߣߒ ߡᔅⷐਇนᰳߥ߽ߩߦߥߞߡ޿ࠆ㧚৻⥸⊛ߦߘࠇࠄߩࡊ࡜࠭ ࡑߦߪᄢኈ㊂߆ߟဋ৻ߢ޽ࠆߎߣ߇ⷐ᳞ߐࠇߡ޿ࠆ㧚৻ᣇ㧘 ࡊ࡜࠭ࡑߩᄢኈ㊂ൻߣߪㅒߦ㧘ᓸዊⓨ㑆ߦ߅ߌࠆࡑࠗࠢࡠࡊ ࡜࠭ࡑ߽㧘ᄢ߈ߥ⴫㕙Ⓧ_{/૕Ⓧ㧔S/V㧕Ყߦ⿠࿃ߔࠆ㜞ല₸ߥ} ࡒࠢࡠ෻ᔕ႐ᒻᚑ߿㜞ኒᐲᇦ⾰ਛߦ߅ߌࠆࡊ࡜࠭ࡑߩᣂߚ ߥ‛ᕈ⊒ជ╬1, 2)㧘ߘߩᣂⷙᕈߦࠃࠅᵈ⋡ࠍ㓸߼㧘ᄙߊߩ⎇ⓥ ߇ផㅴߐࠇࠆࠃ߁ߦߥߞߡ߈ߡ޿ࠆ3-5)㧚ߥ߆ߢ߽㧘ࠟࠬᵹߦ ࠃࠅࡑࠗࠢࡠࡊ࡜࠭ࡑࠍࠫࠚ࠶࠻⁁ߦྃ኿ߔࠆࡑࠗࠢࡠࡊ ࡜࠭ࡑࠫࠚ࠶࠻ߪ㧘ߘߩ⊒↢ㇱߣ෻ᔕㇱ߇⁛┙ߒߡ޿ࠆߚ߼㧘 ೙ᓮᕈߩኈᤃߐ߿ዪᚲ⊛ߥ㜞޿෻ᔕᕈߣ޿ߞߚ․ᓽࠍᜬߞ ߡ߅ࠅ㧘ࡑࠗࠢࡠࡊ࡜࠭ࡑߩታ↪ൻࠍㅴ߼ࠆ߽ߩߣߒߡᵈ⋡ ࠍ㓸߼ߡ޿ࠆ㧚ࡑࠗࠢࡠࡊ࡜࠭ࡑࠍࡄ࡞ࠬߢ↢ᚑߔࠆߚ߼ߩ 㔚Ḯߦߪ㧘᡼㔚ࠍ㐿ᆎߢ߈ࠆࠃ߁ߥ㜞㔚࿶ߩ⊒↢ߣࡄ࡞ࠬ⊒ ↢ߩߚ߼ߩ㜞ㅦߥࠬࠗ࠶࠴ࡦࠣ⚛ሶ߇ᔅⷐߢ޽ࠆ㧚ᓸዊߥኸ ᴺߢ޽ࠆࡊ࡜࠭ࡑߦല₸⦟ߊࠛࡀ࡞ࠡ࡯ࠍㅍࠅㄟ߻ߚ߼㧘 ᭽ޘߥᔕ↪ߦ૶߁ߚ߼ߦߪ㧘㔚Ḯ߽ߢ߈ࠆ㒢ࠅዊߐߊߔࠆᔅ ⷐ߇޽ࠆ㧚 ዊဳൻࠍታ⃻ߔࠆߚ߼ߦߪ㧘ᓥ᧪↪޿ࠄࠇߡ߈ߚࠡࡖ࠶ࡊ ࠬࠗ࠶࠴ߢߪߥߊ㧘ඨዉ૕ࠬࠗ࠶࠴ࠍ૶↪ߔࠆߎߣ߇ㆡᒰߢ ޽ࠆ㧚⪺⠪ࠄߪ㧘ࡑ࡞ࠢࠬ⊒↢ⵝ⟎ߩࠡࡖ࠶ࡊࠬࠗ࠶࠴ߦ޽ ߚࠆㇱಽࠍඨዉ૕⚛ሶߢ޽ࠆࡃࠗࡐ࡯࡜ធว࠻࡜ࡦࠫࠬ࠲ 㧔_{Bipolar Junction Transistor㧦BJT㧕ߦ⟎߈឵߃ߚࡒ࠾࠴ࡘࠕ} ࠠ࡯ࡢ࡯࠼㧦ࡑ࡞ࠢࠬ⊒↢ⵝ⟎㧘ࡃࠗࡐ࡯࡜ធว࠻࡜ࡦࠫࠬ

࠲㧘㒠ફ⃻⽎㧘ࡑࠗࠢࡠࡊ࡜࠭ࡑࠫࠚ࠶࠻

* ᄢಽᎿᬺ㜞╬ኾ㐷ቇᩞ㔚᳇㔚ሶᎿቇ⑼870-0152 ᄢಽᏒ ᄢሼ’_{1666 ⇟࿾}

Department of Electrical and Electronics Engineering, Oita National College of Technology, Maki 1666, Oita 870-0152, Japan

** ᾢᧄᄢቇࡃࠗࠝࠛ࡟ࠢ࠻࡝ࠢࠬ⎇ⓥ࠮ࡦ࠲࡯㧔860-8555 ᾢ ᧄᏒ㤥㜬_2-39-1㧕

Bioelectrics Research Center, Kumamoto University, Kurokami 1-39-1, Kumamoto 860-8555, Japan

***ᾢᧄᄢቇ⥄ὼ⑼ቇ⎇ⓥ⑼㧔860-8555 ᾢᧄᏒ㤥㜬 2-39-1㧕 Graduate School of Science and Technology, Kumamoto University, Kurokami 1-39-1, Kumamoto 860-8555, Japan

1 _{[email protected]}

(2)

ࡒ࠾࠴ࡘࠕࡑ࡞ࠢࠬ⊒↢ⵝ⟎ߩ㐿⊒ߣࡑࠗࠢࡠࡊ࡜࠭ࡑࠫࠚ࠶࠻߳ߩᔕ↪㧔਄㊁ࠄ㧕 ࡑ࡞ࠢࠬ⊒↢ⵝ⟎ߩ㐿⊒ࠍⴕߞߡ߈ߚ㧚వⴕ⎇ⓥߦࠃࠅ㧘ᦨ ᄢ㔚࿶ᵄ㜞୯_{-2.5kV㧘㔚࿶┙ߜਅ߇ࠅᤨ㑆 3 ns ߩ಴ജࠍᓧߚ} 6)_{㧚ߎߩⵝ⟎ߪ}_{BJT ߩ㒠ફ⃻⽎㧔ࠕࡃ࡜ࡦࠪࠚࡉ࡟ࠗࠢ࠳࠙} ࡦ㧕ࠍ↪޿ߡ޿ࠆ㧚_{BJT ߩㅢᏱ⁁ᘒߢߩ૶↪ߢߪ㧘IGBT ߿} SIT ߣ޿ߞߚઁߩᄢኈ㊂ඨዉ૕⚛ሶߣᲧセߒߡ㧘⠴㔚࿶߿ࠬ ࠗ࠶࠴ࡦࠣㅦᐲ╬ߩࠬࠗ࠶࠴ࡦࠣ․ᕈߦ߅ߌࠆఝ૏ᕈߪᱴ ߤᜬߞߡ޿ߥ޿߇㧘_{BJT ߦ㒠ફ⃻⽎ࠍ⊒↢ߐߖࠆߎߣߢ㧘࠽} ࡁ⑽ࠝ࡯࠳ߩࠬࠗ࠶࠴ࡦࠣ߇น⢻ߣߥࠅ㧘┙ߜ਄߇ࠅߩ㜞ㅦ ߥࡄ࡞ࠬࠍ಴ജߔࠆߎߣ߇ߢ߈ࠆ㧚 ߒ߆ߒߥ߇ࠄ㧘㒠ફ⃻⽎ߦߪ㧘_{BJT ߩࠦ࡟ࠢ࠲㧙ࠛࡒ࠶࠲} 㑆ߦ㒠ફ㔚࿶એ਄ߩ㔚࿶ࠍශടߐߖߥߌࠇ߫ߥࠄߕ㧘Ꮢ⽼ߩ BJT ߩ࠺࡯࠲ࠪ࡯࠻߆ࠄ㧘ߘߩ․ᕈࠍᛠីߔࠆߎߣߪ࿎㔍ߢ ޽ࠅ㧘᣿ࠄ߆ߦߐࠇߡ޿ߥ޿㧚㒠ફ․ᕈࠍ⸃᣿ߔࠆߎߣߢ㧘 ಴ജ㔚࿶ߩჇട㧘៊ᄬߩᷫዋ㧘┙ߜਅ߇ࠅᤨ㑆ߩᷫዋߣ޿ߞ ߚⵝ⟎ߩᕈ⢻ߩะ਄ࠍ࿑ࠆߎߣ߇ߢ߈ࠆ㧚 ߘߎߢ㧘ᧄ⎇ⓥߢߪ㧘ࡒ࠾࠴ࡘࠕࡑ࡞ࠢࠬ⊒↢ⵝ⟎㐿⊒ߩ ৻Ⅳߣߒߡޔࠬࠗ࠶࠴ࡦࠣ⚛ሶߣߒߡ↪޿ߚ_{BJT ߩ㒠ફ⃻⽎} ߦ㑐ߔࠆ․ᕈ⹜㛎ࠍⴕߞߚ㧚ߘߩᓟ㧘․ᕈ⹜㛎⚿ᨐࠍ෻ᤋߒ ߚࡒ࠾࠴ࡘࠕࡑ࡞ࠢࠬ⊒↢ⵝ⟎ࠍ⵾૞ߒޔࡑࠗࠢࡠࡊ࡜࠭ࡑ ࠫࠚ࠶࠻ߩ↢ᚑࠍ⹜ߺߚ㧚 2. ࡒ࠾࠴ࡘࠕࡑ࡞ࠢࠬ⊒↢ⵝ⟎ ࡑ࡞ࠢࠬ⊒↢ⵝ⟎ߣߪ㧘ల㔚ᛶ᛫ࠍ੺ߒߡਗ೉ߦల㔚ߐ ࠇߚⶄᢙߩࠦࡦ࠺ࡦࠨࠍ⍴⛊ࠬࠗ࠶࠴ࠍࠝࡦߔࠆ੐ߢ⍍ᤨ ߦ⋥೉߳ធ⛯ᄌ឵ߔࠆޕ៊ᄬ߇ߥ޿႐วߩ಴ജߪޟࠦࡦ࠺ࡦ ࠨߩ୘ᢙࠦࡦ࠺ࡦࠨߩల㔚㔚࿶ޠߦߡ▚಴ߐࠇࠆ㔚࿶ᵄ㜞 ୯ࠍ᦭ߒ㧘ૐ޿ల㔚㔚࿶ߦߡᲧセ⊛ኈᤃߦ㜞㔚࿶ࠍ⊒↢ߐߖ ࠆߎߣ߇น⢻ߢ޽ࠆ㧚ࡑ࡞ࠢࠬ⊒↢ⵝ⟎ߩ⍴⛊ࠬࠗ࠶࠴ߣߒ ߡߪޔㅢᏱ⥄Ꮖ᡼㔚ဳߩࠡࡖ࠶ࡊࠬࠗ࠶࠴߇ណ↪ߐࠇߡ޿ࠆ㧚 ߒ߆ߒߥ߇ࠄ㧘↥ᬺᔕ↪ࠍ⋡ᜰߒߚࡑࠗࠢࡠࡊ࡜࠭ࡑࠫࠚ࠶ ࠻↪ࡑ࡞ࠢࠬ⊒↢ⵝ⟎ߣߒߡߪ㧘ዊဳൻߦട߃ߡ㐳ኼ๮ൻ߇ ᔅ㗇ⷐઙߣߒߡ᜼ߍࠄࠇࠆߚ߼㧘᡼㔚ࠡࡖ࠶ࡊࠬࠗ࠶࠴ߩ૶ ↪ߪ࿎㔍ߢ޽ࠆޕߘߎߢ㧘ࡑ࡞ࠢࠬ⊒↢ⵝ⟎ߩ⍴⛊ࠬࠗ࠶࠴ ߣߒߡ㧘࿑_{1 ߦ␜ߔࠃ߁ߦ BJT ࠍㆡ↪ߒߚ㧚} BJT ߩㅢᏱ⁁ᘒߦ߅ߌࠆࠬࠗ࠶࠴ࡦࠣㅦᐲߪㆃ޿ߚ߼㧘㜞 ㅦߥ┙ߜ਄߇ࠅࠍ⋡ᜰߒߚࡄ࡞ࠬࡄࡢ࡯ߩ⊒↢ߦߪਇㆡߢ ޽ࠆ㧚ߘߩߚ߼㧘ᧄ⊒↢ⵝ⟎ߢߪ_{BJT ߩࠦ࡟ࠢ࠲́ࠛࡒ࠶࠲} 㑆ߩ㒠ફ⃻⽎ࠍ೑↪ߔࠆߎߣߢ㧘㜞ㅦ࠲࡯ࡦࠝࡦࠍታ⃻ߒߡ ޿ࠆ㧚ߔߥࠊߜ_{BJT ߩࠦ࡟ࠢ࠲㧙ࠛࡒ࠶࠲㑆ߦ㒠ફ㔚࿶એ਄} ߩ㔚࿶ࠍශടߔࠆߎߣߢ㧘㒠ફࠍ↢ߓߐߖ㧘㜞ㅦߥࠦ࡟ࠢ࠲ 㧙ࠛࡒ࠶࠲㑆ߩዉㅢࠍ⍴⛊ࠬࠗ࠶࠴ߣߒߡ೑↪ߔࠆߎߣߢ ޽ࠆ㧚ߎߩᤨ㧘_{BJT ߳ߩ㔚ᵹࠍ೙㒢ߖߕߦᵹߒ⛯ߌࠆߣ㧘⚛} ሶߪ⎕უߦ⥋ࠆ߇㧘ߘߩ㔚ᵹࠍ೙㒢ߔࠆߎߣߢ቟ቯߒߚ➅ࠅ ㄰ߒേ૞߇น⢻ߢ޽ࠆ㧚 +VDC Trigger Vout R BJT C FET ࿑_{1 ዊဳࡑ࡞ࠢࠬ⊒↢ⵝ⟎ߩ࿁〝࿑}

Fig. 1 Circuit diagram of Miniaturized Marx generator. 3. BJT ߩ㒠ફ․ᕈ 3.1 㒠ફ․ᕈ⹜㛎࿁〝 BJT ߩ㒠ફ⃻⽎ࠍ⿠ߎߐߖࠆߚ߼ߦߪ㧘ࠦ࡟ࠢ࠲㧙ࠛࡒ࠶ ࠲㑆ߦ㒠ફ㔚࿶ࠍශടߔࠆߣ޿ߞߚ․ᱶߥᣇᴺߢ޽ࠆ߇᡿ ߦ㧘㒠ફ․ᕈߪࡔ࡯ࠞߩ࠺࡯࠲ࠪ࡯࠻߆ࠄߢߪ⺒ߺขࠆߎߣ ߇ᭂ߼ߡ࿎㔍ߢ޽ࠆ㧚ߘߎߢ㧘Ꮢ⽼ߐࠇߡ޿ࠆ_{BJT ߩ㒠ફ․} ᕈߩᛠីࠍⴕߞߚ㧚࿑_{2 ߦ BJT ߩኈ㊂ᄌൻߦኻߔࠆ㒠ફ․ᕈ} ᛠីߩߚ߼ߩ⹜㛎࿁〝ࠍ␜ߔ㧚੹࿁㧘_{2SC2655, 2SC5076,} 2SC50007)_ߩ_{3 ⒳㘃ߩ BJT ࠍ⹜㛎ߦ↪޿ߚ㧚ߎࠇࠄߩ BJT ߪ} ࠦ࡟ࠢ࠲㧙ࠛࡒ࠶࠲㑆ߩቯᩰ㔚࿶߇╬ߒߊ㧘ቯᩰࠦ࡟ࠢ࠲㔚 ᵹ߇ߘࠇߙࠇ㧘_{2, 5, 10A ߣ⇣ߥࠆ㧚⹜㛎ߢߪ⋥ᵹ㔚Ḯ߆ࠄߩ} ශട㔚࿶㧔_V_ch㧕ࠍ㔚࿶਄᣹₸_{1 V/sec ߦߡჇടߐߖ㧘ల㔚ᛶ} ᛫_(R_ch_{=20kǡ)ࠍㅢߒ㧘ࠦ࡟ࠢ࠲㧙ࠛࡒ࠶࠲㑆ߩࠦࡦ࠺ࡦࠨࠍ} ల㔚ߔࠆ㧚ల㔚߇ቢੌߒߚߩߜ㧘ାภ⊒↢ེ_{(33220A,Agilent)} ߆ࠄ_{BJT ߩࡌ࡯ࠬ߳ TTL ାภࠍㅍࠅ㧘㒠ફࠍ↢ߓߐߖࠆ㧚} ߎߩᤨ㧘ࠦࡦ࠺ࡦࠨኈ㊂ࠍ_{0.1uF ߆ࠄ 1uF ߹ߢᄌൻߐߖࠦ࡟} ࠢ࠲㧙ࠛࡒ࠶࠲㑆ߩ㔚࿶_(V_C_{)෸߮ࠦ࡟ࠢ࠲㔚ᵹ(Ic)ࠍ⸘᷹ߒ} ߚ㧚㔚࿶㔚ᵹߩ᷹ቯᯏེߦߪ㧘ࠝࠪࡠࠬࠦ࡯ࡊ_(TDS3034B, Tektronix)㧘㜞࿶ࡊࡠ࡯ࡉ(PHV641, PMK)㧘ࠞ࡟ࡦ࠻ࡕ࠾࠲ (Model 2877, Pearson, Electronics)ࠍߘࠇߙࠇ૶↪ߒߚ㧚

࿑_{2 㒠ફ․ᕈ⹜㛎࿁〝} Fig. 2 Evaluation circuit of BJT. 3.2 ṳࠇ㔚ᵹ․ᕈ ࿑_{3 ߦ BJT 2SC2655 ࠍ⹜㛎࿁〝ߦ૶↪ߒ㧘Vch ࠍჇടߐߖ} ߚᤨߩ_{Vc ߩᄌൻࠍ⴫ߔ㧚Vch ߇ 165V ߦ㆐ߔࠆ߹ߢߪ㧘Vc} ߣߩ㑐ଥߪᱜᲧ଀ࠍ␜ߒ㧘_{Vch㧩Vc ߣߥࠆ㧚ߒ߆ߒ㧘Vch ߇} 165V ࠍ⿥߃ࠆߣ㧘VchҁVc ߣߥࠅ㧘㔚૏Ꮕ߇↢ߓࠆ㧚ߎߩ 㔚૏Ꮕߪ㧘_{BJT ߇ࠝࡈ⁁ᘒߦ߽㑐ࠊࠄߕ㧘ࠦ࡟ࠢ࠲㧙ࠛࡒ࠶} ࠲㑆ߦᵹࠇࠆ㔚ᵹ㧘හߜ_{BJT ߩṳࠇ㔚ᵹߦࠃߞߡ↢ߓࠆ߽ߩ} ߣ⠨߃ࠄࠇࠆ㧚 ߟ߹ࠅ㧘ᧄ_{BJT ߦട߃ࠄࠇࠆ㔚࿶߇ 165V ࠍ⿥߃ࠆߣࠦ࡟} ࠢ࠲㧙ࠛࡒ࠶࠲㑆ߦṳࠇ㔚ᵹ߇↢ߓ㧘ߘߩ㔚ᵹ୯ߪ㧘_{Vch ߦ} ミニチュアマルクス発生装置の開発とマイクロプラズマジェットへの応用（上野崇寿ら） 217 (27)

(3)

ଐሽߔࠆ㧚ઁߩ_{2 ⒳㘃ߩ BJT ߦ߅޿ߡߪ㧘Vch=200V ߩᤨ߆} ࠄṳࠇ㔚ᵹ߇↢ߓࠆ㧚ṳࠇ㔚ᵹߪࠛࡀ࡞ࠡ࡯ല₸ߩૐਅߣߥ ࠆߩߢ㧘ߢ߈ࠆ㒢ࠅዊߐ޿ᣇ߇ᅢ߹ߒ޿㧚ᓥߞߡ㧘_2SC2655 ࠍ૶↪ߔࠆ႐ว㧘ṳࠇ㔚ᵹ߇ዊߐߊޔ⏕ታߦ㒠ફ⃻⽎ࠍ⿠ߎ ߔߎߣ߇น⢻ߥ㔚࿶㧘හߜ_{Vch㧩Vc҈165㨪175V ߢ㒠ફ⃻⽎} ࠍ⿠ߎߐߖࠆߎߣ߇ㆡᒰߢ޽ࠆ㧚 ࿑_{3 V}_chᄌൻᤨߩ_{Vc ․ᕈ} Fig. 3 Dependence of Vc on Vch(2SC2655). 3.3 ࠬࠗ࠶࠴ࡦࠣᤨߩ㔚࿶㔚ᵹᵄᒻ BJT 2SC2655 ߩࠬࠗ࠶࠴ࡦࠣᤨߩ Vc ෸߮ Ic ߩᵄᒻࠍ࿑ 4 ߦ␜ߔ㧚 ࿑_{4(a)ߣ(b)ߪޔߘࠇߙࠇ Vc ߇ 50V ߣ 140V ߦ߅ߌࠆ㔚࿶࡮} 㔚ᵹᵄᒻߢ޽ࠆ㧚ߎߩᤨ㧘ࠦࡦ࠺ࡦࠨኈ㊂ߪ޿ߕࠇ߽ _0.1uF ߣߒߚ㧚࿑ _{4(a)ߩᵄᒻߦ߅޿ߡ㧘Vc ߩ┙ߜਅ߇ࠅᤨ㑆ߪ⚂} 0.5us㧘Ic ߩᦨᄢ୯ߪ 6A ߢ޽ߞߚ㧚ߎࠇߪቯᏱ⁁ᘒߦ߅ߌࠆ ቯᩰࠦ࡟ࠢ࠲㔚ᵹߩ_{3 ୚ߦ޽ߚࠆ㧚ߥ߅㧘┙ߜਅ߇ࠅᤨ㑆ߣ} ߪ㔚࿶ᦨᄢ୯ߩ_{90㧑߆ࠄ 10㧑ߦⷐߔࠆࠬࠗ࠶࠴ࡦࠣᤨ㑆ߣ} ቯ⟵ߔࠆ㧚࿑_{4(b)ߩᵄᒻߢߪ㧘Vc ߩ┙ߜਅ߇ࠅᤨ㑆ߪ⚂0.1us㧘} Ic ߩᦨᄢ୯ߪ 90A ߢ޽ߞߚ㧚Vc㧩140V ߩᤨߩᵄᒻߪ㧘50V ߩ႐วߣᲧセߒߡ㧘㔚࿶ߩ┙ߜਅ߇ࠅ㧘㔚ᵹࡄ࡞ࠬ᏷౒ߦᭂ ߼ߡ⍴ߊߥߞߡ߅ࠅ㧘㔚ᵹ_{Ic ߩᦨᄢ୯߽Ⴧടߒߡ޿ࠆߎߣ߇} ಽ߆ࠆ㧚࿑_{5 ߦ BJT 2SC500 ߩ Vc ࠍ 140V㧘160V㧘180V ߣ} ᄌൻߐߖߚᤨߩ_{Ic ߩᵄᒻࠍ␜ߔ㧚} Vc㧩140V ߩ Ic ᵄᒻߢߪ㧘t=0 ߆ࠄ㔚ᵹ߇ᵹࠇᆎ߼ t=0.17us ߩᤨࠍႺߦߒߡ_{Ic ߩᤨ㑆ᄌൻ₸ di/dt ߇ᄢ߈ߊჇടߒߡ޿ࠆ} ߎߣ߇ુ߃ࠆ㧚_{Vc㧩160V ߢߪ t=0.05us㧘Vc㧩180V ߦ߅޿} ߡߪ㧘ᭂ߼ߡ⍴ߊ_{t=0.01us ߩᤨ㧘di/dt ߩᄢ߈ߥჇട߇⷗ࠄࠇ} ߚ㧚ࠃߞߡ_{Vc ࠍჇടߔࠆߎߣߢ㧘di/dt ߇ᄌൻߔࠆ߹ߢߩᤨ} 㑆߇ᷫዋߒ㧘㔚ᵹࡄ࡞ࠬ᏷߇⍴ߊᵄ㜞୯ߩᄢ߈ߥ㔚ᵹࡄ࡞ࠬ ࠍᓧࠆߎߣ߇ߢ߈ࠆ㧚 3.4 㔚ᵹ․ᕈ BJT 2SC2655 ࠍ↪޿ߚᤨߩ Vc ᄌൻᤨߩ㔚ᵹ․ᕈࠍ࿑ 6 ߦ ␜ߔ㧚ࠦࡦ࠺ࡦࠨኈ㊂ࠍ_{0.1uF ߆ࠄ 1uF ߹ߢᄌൻߐߖ㧘Vc} ᄌൻߦኻߔࠆ_{Ic ߩᦨᄢ୯ࠍࡊࡠ࠶࠻ߒߚ㧚㒠ફ⁁ᘒߦ߅ߌࠆ} Ic ߇ᷫ⴮ᝄേᵄᒻࠍ␜ߒ㧘C ߩᐔᣇᩮ෸߮ Vc ߦᲧ଀ߔࠆߎ ߣ߆ࠄ㧘_{Ic ߣ Vc ߩ㑐ଥߪਅᑼߦᓥ߁㧚} c c c

V

_L

C

I

(1) C ߪ⹜㛎࿁〝ߦ߅ߌࠆࠦࡦ࠺ࡦࠨኈ㊂㧘Lc ߪ࿁〝ࠗࡦ࠳ࠢ ࠲ࡦࠬࠍ⴫ߔ㧚 ᰴߦ_{BJT ߩ⒳㘃ߦኻߔࠆ㔚ᵹ․ᕈࠍ࿑ 7 ߦ␜ߔ㧚ㅢᏱ⁁ᘒ} ߦ߅޿ߡߪ㧘ฦ_{BJT ߩ Ic ߪቯᩰㅢࠅߢ޽ࠅ㧘ߘߩᦨᄢ୯ߣ} ᦨዊ୯ߣߩ㑆ߢ_{5 ୚ߩ㆑޿߇⷗ࠄࠇࠆ㧚ߒ߆ߒ㧘㒠ફ⁁ᘒߦ} ߅޿ߡ㧘㆑޿ߪήߊ㧘_{Ic ߪ߶߷ห୯ߣߥࠆ㧚ߟ߹ࠅ㧘㒠ફ⁁} ᘒߦ߅ߌࠆ_{Ic ߩᦨᄢ୯ߪ㧘BJT ߩ⒳㘃ߦࠃࠄߕหߓߢ޽ࠅ㧘} BJT ࠬࠗ࠶࠴ࡦࠣᤨߩࠗࡦࡇ࡯࠳ࡦࠬ߇⹜㛎࿁〝ߩ࿁〝ࠗࡦ ࡇ࡯࠳ࡦࠬࠃࠅᭂ߼ߡዊߐ޿ߎߣࠍ␜ߒߡ޿ࠆ㧚ߎߩߎߣߪ㧘 ᑼ_{(1)߆ࠄߢ߽ห᭽ߦ⺑᣿߇น⢻ߢ޽ࠆ㧚} ᓥߞߡ㧘㒠ફ⁁ᘒߦ߅ߌࠆ_{Ic ߩᦨᄢ୯ߪ㧘BJT ߩࠬࠗ࠶࠴} ࡦࠣᤨߩࠗࡦࡇ࡯࠳ࡦࠬ߇ᭂ߼ߡዊߐ޿ߚ߼㧘࿁〝ࠗࡦࡇ࡯ ࠳ࡦࠬߦࠃߞߡ৻ᗧߦቯ߹ࠆߣ޿߃ࠆ㧚 (a) ㅢᏱ⁁ᘒ (b)㒠ફ⁁ᘒ ࿑_{4 BJT ࠬࠗ࠶࠴ࡦࠣᤨߩ Vc ෸߮ Ic ᵄᒻ}

Fig. 4 Capacitor voltage waveform (Vc) and collector current waveform (Ic). (a) When BJT was operated in normal mode. (b) When BJT was operated in avalanche mode.

(4)

ࡒ࠾࠴ࡘࠕࡑ࡞ࠢࠬ⊒↢ⵝ⟎ߩ㐿⊒ߣࡑࠗࠢࡠࡊ࡜࠭ࡑࠫࠚ࠶࠻߳ߩᔕ↪㧔਄㊁ࠄ㧕

࿑_{5 Vc ᄌൻᤨߩ Ic ᵄᒻ}

Fig. 5 Collector current waveform for three different Vc (2SC5000, C=0.100uF).

࿑_{6 ࠦࡦ࠺ࡦࠨኈ㊂ᄌൻᤨߩ㔚ᵹ․ᕈ} Fig. 6 Current characteristic as a function of Vc.

࿑_{7 ฦ⒳ BJT ߦࠃࠆ㔚ᵹ․ᕈ}

Fig. 7 Comparison of the current characteristic as a function of Vc. 3.5 ࠬࠗ࠶࠴ࡦࠣᤨ㑆․ᕈ ࿑_{8 ߦ BJT 2SC2655 ࠍᄌൻߐߖߚߣ߈ߩࠬࠗ࠶࠴ࡦࠣᤨ㑆} ․ᕈࠍ␜ߔ㧚ㅢᏱ⁁ᘒߢߪ㧘_{Vc ෸߮ C ߩჇടߦ઻޿㧘ࠬࠗ} ࠶࠴ࡦࠣᤨ㑆߽Ⴧᄢߔࠆ㧚ߎߩᤨߩ㔚⩄㊂ߪ_{Vc ߣ C ߣߩⓍ} ߢ⴫ߐࠇࠆߩߢ㧘㔚⩄㊂ߦᲧ଀ߒߡࠬࠗ࠶࠴ࡦࠣᤨ㑆߽Ⴧട ߔࠆߣ⸒߃ࠆ㧚㒠ફ⁁ᘒߦ߅޿ߡߪ㧘_{C ߦᓥߞߡࠬࠗ࠶࠴ࡦࠣᤨ㑆߽Ⴧട} ߒߡ޿ࠆ߇㧘_{Vc ߇Ⴧടߔࠆߣࠬࠗ࠶࠴ࡦࠣᤨ㑆ߪᷫዋߒߡ޿} ࠆߎߣ߇ࠊ߆ࠆ㧚ߎࠇߪ㧘_{Vc ߩჇടߦࠃߞߡㅢᏱ⁁ᘒ߆ࠄ㒠} ફ⁁ᘒ߳⒖ⴕߔࠆᤨ㑆߇ᷫዋߔࠆߣ޿߁㧘_{3.3 ߩ⎇ⓥ⚿ᨐߣ} ৻⥌ߔࠆ㧚 ⛯޿ߡ㧘_{3 ⒳㘃ߩ BJT ࠍ૶↪ߒ㧘C ࠍห৻ߣߒߚ႐วߩࠬ} ࠗ࠶࠴ࡦࠣᤨ㑆ߩᄌൻࠍ࿑ _{9 ߦ␜ߔ㧚ㅢᏱ⁁ᘒߦ߅޿ߡߪ㧘} ቯᩰࠦ࡟ࠢ࠲㔚ᵹߩ୯߇ᄢ߈޿߶ߤ㧘ࠬࠗ࠶࠴ࡦࠣㅦᐲߪᣧ ߊߥߞߡ޿ࠆ㧚৻ᣇ㧘㒠ફ⁁ᘒߦ߅޿ߡߪ㧘ߘߩ௑ะߪㅒォ ߒ㧘ቯᩰࠦ࡟ࠢ࠲㔚ᵹߩዊߐ޿߶ߤࠬࠗ࠶࠴ࡦࠣᤨ㑆ߪᷫዋ ߔࠆ௑ะߦ޽ࠆߚ߼㧘ቯᩰࠦ࡟ࠢ࠲㔚ᵹ߇ᦨ߽ዊߐ޿ 2SC2655 ߩࠬࠗ࠶࠴ࡦࠣㅦᐲ߇ᣧߊߥߞߡ޿ࠆߎߣ߇ુ߃ࠆ㧚 ࿑_{8ࠦࡦ࠺ࡦࠨኈ㊂ᄌൻᤨߩࠬࠗ࠶࠴ࡦࠣᤨ㑆․ᕈ} Fig.8 Switching time characteristic as a function of Vc.

࿑_{9 ฦ⒳ BJT ߦࠃࠆࠬࠗ࠶࠴ࡦࠣᤨ㑆․ᕈ}

Fig. 9 Comparison of the switching time characteristic as a function of Vc.

(5)

4. ቯࡄ࡞ࠬ᏷ࡒ࠾࠴ࡘࠕࡑ࡞ࠢࠬ⊒↢ⵝ⟎ߩ㐿⊒ ਄ㅀߩ⚿ᨐߦၮߠ߈㧘_{BJT 2SC2655 ࠍ⍴⛊ࠬࠗ࠶࠴ߣߒߡ} ណ↪ߒߚࡒ࠾࠴ࡘࠕࡑ࡞ࠢࠬ⊒↢ⵝ⟎ߩ㐿⊒ࠍⴕߞߚ㧚੹࿁㧘 ⊒↢ེߩ಴ജㇱಽߦ㧘Ბᢙߦᔕߓߚ_{BJT ࠍ⋥೉ធ⛯ߒ㧘⽶⩄} ߦࠃࠄߕ৻ቯߩࡄ࡞ࠬ᏷ࠍ಴ജߔࠆߎߣ߇น⢻ߥ࿁〝ࠍ૞ ᚑߒߚ㧚࿑_{10 ߦߘߩ࿁〝᭴ᚑࠍ␜ߔ㧚࿁〝ߪ 14 Ბ᭴ᚑߣߒ㧘} ฦᲑߦ߅ߌࠆࠦࡦ࠺ࡦࠨኈ㊂ߪ_{0.1uF ߣߒߚ㧚಴ജㇱߦߪ㧘} ⊒↢ེߩᲑᢙಽߦ޽ߚࠆ_{14 ୘ߩ BJT ࠍ⋥೉ធ⛯ߒߡ޿ࠆ㧚} ⊒↢ེߩ಴ജ߇ᦨᄢߦ㆐ߒߚ⍍㑆㧘⋥೉ធ⛯ߒߚ_{BJT ߢ᭴ᚑ} ߐࠇߚࠢࡠ࡯ࠫࡦࠣࠬࠗ࠶࠴߇ࠝࡦߔࠆߚ߼㧘ᒝ೙⊛ߦ⽶⩄ ߳ߩࠛࡀ࡞ࠡ࡯ࠍᒁ߈ᛮ߈㧘ᢙච࠽ࡁ⑽ࠝ࡯࠳ߩቯࡄ࡞ࠬࠍ ⽶⩄ߦ಴ജߔࠆߎߣ߇ߢ߈ࠆ㧚 ࿑_{11 ߦߪ㧘⵾૞ߒߚዊဳࡑ࡞ࠢࠬ⊒↢ⵝ⟎ࠍల㔚㔚࿶ 18} 0V ߣߒ⽶⩄ࠍ㐿᡼ߣߒߡേ૞ߐߖߚ႐วߩ಴ജᵄᒻࠍ␜ߔ㧚 ᦨዊ୯_{-2.5kV ߩᵄ㜞୯෸߮ࡄ࡞ࠬߩඨ୯ో᏷ 35ns ࠍ᦭ߔࠆ} ࡄ࡞ࠬ㔚࿶߇ᓧࠄࠇߡ޿ࠆߎߣ߇⏕⹺ߐࠇࠆ㧚߹ߚ㧘ߎߩ႐ วߩ㔚࿶೑↪₸ߪ_{99%ߢ޽ߞߚ㧚} ࿑_{10 ዊဳࡑ࡞ࠢࠬ⊒↢ⵝ⟎ߩ࿁〝࿑}

Fig. 10 Circuit diagram of Miniaturized Marx generator.

࿑_{11 ዊဳࡑ࡞ࠢࠬ⊒↢ⵝ⟎಴ജᵄᒻ(⽶⩄㐿᡼)} Fig. 11 Output voltage of Miniaturized Marx generator. 5. ࡑࠗࠢࡠࡊ࡜࠭ࡑࠫࠚ࠶࠻ߩ↢ᚑ 㐿⊒ߒߚࡒ࠾࠴ࡘࠕࡑ࡞ࠢࠬ⊒↢ⵝ⟎ࠍ↪޿ߡࡑࠗࠢࡠ ࡊ࡜࠭ࡑࠫࠚ࠶࠻ߩ↢ᚑࠍ⹜ߺߚ㧚ߘߩ࡝ࠕࠢ࠲ߩᒻ⁁ࠍ࿑ 12 ߦ␜ߔ㧚࡝ࠕࠢ࠲ᒻ⁁ߪࡍࡦဳߣߒ㧘⋥ᓘ 1mm ߩ࠮࡜ࡒ ࠶ࠢ࠴ࡘ࡯ࡉౝਛᔃㇱߦ⋥ᓘ_{0.025mm ߩ࠲ࡦࠣࠬ࠹ࡦ✢ࠍ} 㔚ᭂߣߒߡ㈩⟎ߒ㧘಴ญߩ㌃ᐔ᧼ߣߩ㑆ߦዊဳࡑ࡞ࠢࠬ⊒↢ ⵝ⟎ࠍធ⛯ߒߚ㧚ࡍࡦౝߦߪᵹ㊂_{2.5L/min ߩⓨ᳇ࠍᵹߒ㧘ࡊ} ࡜࠭ࡑߪ㌃ᐔ᧼ߦⓨߌߚ⋥ᓘ_{1mm ߩⓣࠃࠅᄢ᳇ਛߦ᡼಴ߐ} ࠇࠆ㧚 ቯࡄ࡞ࠬ᏷ߩ⁁ᘒߢߩࠫࠚ࠶࠻ߩ᭽ሶࠍ࿑_{13(a)㧘⋥೉ࠬࠗ} ࠶࠴ࠍᄖߒߚ⁁ᘒߢߩࠫࠚ࠶࠻ߩ᭽ሶࠍ࿑_{13(b)ߣ(c)ߦ␜ߔ㧚} ᠟ᓇߦߪࠞࡔ࡜_{(D40, Nikon)ࠍ૶↪ߒ㧘ࠪࡖ࠶࠲࡯ᤨ㑆ࠍ 30} ⑽ߣߒߚ㧚࿑_{13(a)ߩ਄ㇱߢߪ࠴ࡘ࡯ࡉౝߢߩ᡼㔚ߦࠃࠆ⊕⦡} ߇߆ߞߚ⊒శ߇ߺࠄࠇ㧘ਅㇱߦߪ⿒ߺ߇߆ߞߚ᡼㔚߇ߺࠄࠇ ࠆ߇㧘ߘߩિ߮ߪዊߐ޿㧚৻ᣇ㧘⋥೉ࠬࠗ࠶࠴ࠍᄖߒ㧘⽶⩄ ߳ߩࠛࡀ࡞ࠡ࡯ߩᒁᛮ߈ࠍήߊߒߚ႐ว㧘ࡊ࡜࠭ࡑߩિ㐳߇ ⏕⹺ߢ߈ࠆ_{(࿑ 13(b))㧚⦡෻ォߒߚ࿑ 13(c)߆ࠄߘߩિ㐳߇ࠃࠅ} 㞲᣿ߦⷞ⹺ߢ߈ࠆ㧚ߎߩᤨߩࡊ࡜࠭ࡑࠫࠚ࠶࠻ߩ㐳ߐߪ⚂㧟 mm ߢ޽ߞߚ㧚 ⛯޿ߡ㔚࿶㔚ᵹᵄᒻࠍ࿑_{14㧘15 ߦ␜ߔ㧚࿑ 14 ߪ⋥೉ࠬࠗ} ࠶࠴ࠍធ⛯ߒᒝ೙⊛ߦ⽶⩄߳ߩࠛࡀ࡞ࠡ࡯ࠍᒁ߈ᛮ޿ߚ⁁ ᘒߢ޽ࠅ㧘ᦨዊᵄ㜞୯_{-2.5kV,-2.1A㧘ࡄ࡞ࠬඨ୯ో᏷ 38ns ߩ} 㔚࿶㔚ᵹ౒ߦ᏷ߩ⍴޿ࡄ࡞ࠬࠍ಴ജߒߡ޿ࠆ㧚⋥೉ࠬࠗ࠶࠴ ࠍᄖߒߚ႐วߢߪ㧘ᦨዊᵄ㜞୯_{-2.5kV㧘ࡄ࡞ࠬߩඨ୯ో᏷ 40} ns ߩ㔚࿶ࡄ࡞ࠬ߇⊒↢ߒߚ⍍㑆ߦ㧘㔚ᵹ߇-2.1A ߦ㆐ߒ㧘ߘ ߩᓟ㧘㔚ᵹߪ✭߿߆ߦᷫዋߔࠆ㧚ߎߩ႐วߩ㔚ᵹࡄ࡞ࠬߩඨ ୯ో᏷ߪ_{28us ߢ޽ࠆ㧚} ᦨዊᵄ㜞୯ߦ㆐ߒߚ⍍㑆㧘හߜ᡼㔚߇⿠ߎߞߚ⍍㑆ߦ⽶⩄ ߳ߩ㔚ᵹࠍᒝ೙⊛ߦㆤᢿߒߚ႐ว㧘ࡊ࡜࠭ࡑࠫࠚ࠶࠻ߩિ߮ ߪዊߐߊ㧘෻ኻߦ⽶⩄߳ߩ㔚ᵹࠍㅪ⛯ߒߡਈ߃ࠆߎߣߢ㧘ߘ ߩિ㐳߇⏕⹺ߢ߈ࠆ㧚 ᓥߞߡ㧘ࡊ࡜࠭ࡑࠫࠚ࠶࠻ߩિ߮ߪ㧘᡼㔚ߦ㆐ߒߚᓟߩ㔚 ᵹߦ⿠࿃ߒ㧘ߘߩ㔚ᵹ୯ߦࠃߞߡિ߮߇ᄌൻߒߡ޿ࠆߣᕁࠊ ࠇࠆ㧚 ࿑_{12 ࡑࠗࠢࡠࡊ࡜࠭ࡑࠫࠚ࠶࠻࡝ࠕࠢ࠲౮⌀} Fig.12 Photograph of micro-plasma jet reactor.

(6)

ࡒ࠾࠴ࡘࠕࡑ࡞ࠢࠬ⊒↢ⵝ⟎ߩ㐿⊒ߣࡑࠗࠢࡠࡊ࡜࠭ࡑࠫࠚ࠶࠻߳ߩᔕ↪㧔਄㊁ࠄ㧕

(a)⋥೉ BJT ᦭ (b) ⋥೉ BJT ή (c)⦡෻ォ ࿑_{13 ࡑࠗࠢࡠࡊ࡜࠭ࡑࠫࠚ࠶࠻౮⌀㧘⦡෻ォ࿑}

Fig. 13 Photograph of micro-plasma jet.

࿑_{14 ࡝ࠕࠢ࠲㔚࿶㔚ᵹᵄᒻ(⋥೉ BJT ᦭)}

Fig. 14 Voltage and current waveforms of micro-plasma jet reactor (with series BJT).

6. ߹ߣ߼ ࡒ࠾࠴ࡘࠕࡑ࡞ࠢࠬ⊒↢ⵝ⟎ߩ㐿⊒ਗ߮ߦࡑࠗࠢࡠࡊ࡜ ࠭ࡑࠫࠚ࠶࠻ߩ↢ᚑࠍⴕߞߚ㧚వⴕ⎇ⓥߦߡ㐿⊒ߒߚ㧘_BJT ࠍណ↪ߒߚࡒ࠾࠴ࡘࠕࡑ࡞ࠢࠬ⊒↢ⵝ⟎ࠍࡑࠗࠢࡠࡊ࡜࠭ ࡑࠫࠚ࠶࠻ߩ↢ᚑߦ↪޿ࠆ႐ว㧘ࠛࡀ࡞ࠡ࡯ኈ㊂ߩჇട߇ᔅ ⷐߣߥࠆ㧚ߘߎߢኈ㊂Ⴧടࠍ⋡⊛ߣߒߡ㧘ቯᩰࠦ࡟ࠢ࠲㔚ᵹ ߇⇣ߥࠆ_{3 ⒳㘃ߩ BJT ߩ․ᕈ⹜㛎ࠍⴕ޿㧘ㅢᏱ⁁ᘒߣ㒠ફ⁁} ᘒߣߩ㑆ߢࠬࠗ࠶࠴ࡦࠣߩ․ᕈ߇ᄢ߈ߊᄌൻߔࠆߎߣࠍ⏕ ⹺ߒߚ㧚㒠ફ⁁ᘒߦ߅޿ߡߪቯᩰࠦ࡟ࠢ࠲㔚ᵹߦࠃࠄߕ㧘ᵹ ࠇࠆ㔚ᵹ߇߶߷ห৻ߣߥࠅ㧘ࠬࠗ࠶࠴ࡦࠣᤨ㑆ߪቯᩰࠦ࡟ࠢ ࠲㔚ᵹ߇ᄢ߈޿߶ߤ⍴ߊߥࠆ㧚ߎࠇߪࠬࠗ࠶࠴ࡦࠣᤨߩࠗࡦ ࡇ࡯࠳ࡦࠬߩᄢዊ߇㑐ଥߒߡ߅ࠅ㧘㒠ફ⁁ᘒߦ߅޿ߡߪ࿁〝 ࠗࡦࡇ࡯࠳ࡦࠬ߇ᡰ㈩⊛ߦߥࠆߚ߼ߢ޽ࠆߣᕁࠊࠇࠆ㧚ᓥߞ ߡ㧘੹࿁⹜㛎ߒߚ_{3 ⒳㘃ߩౝ㧘ࠬࠗ࠶࠴ࡦࠣᤨ㑆߇ᦨ߽ዊߐ} ޿_{BJT 2SC2655 ߇ዊဳࡑ࡞ࠢࠬ⊒↢ⵝ⟎ߦะ޿ߡ޿ࠆߣ⸒} ߃ࠆ㧚 ᰴߦ․ᕈ⹜㛎ߩ⚿ᨐࠍ߽ߣߦ㧘_{2SC2655 ࠍ૶ߞߚቯࡄ࡞ࠬ} ᏷ߩ಴ജ߽น⢻ߥዊဳࡑ࡞ࠢࠬ⊒↢ⵝ⟎ࠍ㐿⊒ߒ㧘ࡊ࡜࠭ࡑ ࠫࠚ࠶࠻↢ᚑࠍ⹜ߺߚ㧚ߘߩ⚿ᨐ㧘ࡊ࡜࠭ࡑࠫࠚ࠶࠻ߩિ߮ ߪ㧘᡼㔚ߦ㆐ߒߚᓟߩ㔚ᵹߦࠃߞߡᄌൻߔࠆߎߣ߇್ߞߚ㧚 ੹ᓟߪ㧘⋥ᵹ㔚Ḯ߿໡↪๟ᵄᢙ㔚Ḯ╬ߩᣢሽ㔚ࠍ↪޿ߚࡑ ࠗࠢࡠࡊ࡜࠭ࡑࠫࠚ࠶࠻↢ᚑ․ᕈߩᲧセ߿ࡒ࠾࠴ࡘࠕࡑ࡞ ࠢࠬ⊒↢ⵝ⟎ࠍ↢૕߿᧚ᢱടᎿߣ޿ߞߚ᭽ޘߥᔕ↪ಽ㊁ߦ ㆡ↪ߔࠆ੍ቯߢ޽ࠆ㧚 ෳ⠨ᢥ₂

1) K. Tachibana: Journal of Plasma and Fusion Research, 76 (2000) 435

2) K. Tachibana: Journal of Plasma and Fusion Research, 80 (2004) 825

3) K. Terashima, T. Ito, H. Fujiwara, K. Katahira, A. Kono, J/ Wang, M. Aramaki and T. Ichiki: Journal of Plasma and Fusion Research, 80 (2004) 845

4) T. Namihira, S. Tsukamoto, D. Wang, S. Katsuki, R. Hackam, K. Okamoto, H. Akiyama: IEEE Transactions on Plasma Science, 28 (2000)109

5) ⑺ጊ⑲ౖ:O plus E, 26 (2004)1324

6) T. Heeren, T. Ueno, D. Wang, T. Namihira, S. Katsuki, H. Akiyama: IEEE Transactions on Plasma Science, 33 (2005) 1205

7) Toshiba Semiconductor Corporation: Datasheet for 2SC2655/5076/5000

࿑_{15 ዊဳࡑ࡞ࠢࠬ⊒↢ⵝ⟎಴ജᵄᒻ(⋥೉ BJT ή)} Fig. 15 Voltage and current waveforms of micro-plasma jet

reactor (non series BJT).

Electrode Plasma

Tube

1mm