⛉Ꮫィ ⏝ CMOS 䜹䝯䝷䛾≉ᚩ䛸௒ᚋ

┠ḟ 䞉๓⨨䛝

䞉⛉Ꮫィ 䜲䝯䞊䝆䞁䜾⏝䜹䝯䝷 䞉䡏 CMOS 䜹䝯䝷䛾ヲ⣽≉ᛶ

䞉⛉Ꮫィ ⏝䜹䝯䝷䛾 S/N 䞉䡏 CMOS 䜹䝯䝷䛾௒ᚋ 䞉䜎䛸䜑

ḟୡ௦䜲䝯䞊䝆䞁䜾䜢ᢸ䛖

⛉Ꮫィ ⏝ CMOS 䜹䝯䝷䛾≉ᚩ䛸௒ᚋ

䝅䝇䝔䝮஦ᴗ㒊㻌 ᮡୗ㻌 ㈈㻌

➨㻝㻜ᅇᏛ㝿㡿ᇦ䛻䛚䛡䜛ศᏊ䜲䝯䞊䝆䞁䜾䝣䜷䞊䝷䝮 㻞㻥

㻯㻹㻻㻿䜹䝯䝷䛾ᛶ⬟ྥୖ䛜ⴭ䛧䛔䚹䛣䜜䛿䚸㻯㻹㻻㻿䝥䝻䝉 䝇䛾㐍໬䛻䜘䜛䚹㻌

㻌

䡏㻯㻹㻻㻿䜹䝯䝷䛸࿧䜀䜜䜛⛉Ꮫィ ศ㔝ྥ䛡䛾䜹䝯䝷䛾 ᬑཬ䛜ጞ䜎䛳䛶䛔䜛䚹㻌

㻌

⛉Ꮫィ ⏝䜹䝯䝷䛸䛿䛹䛖䛔䛳䛯䜒䛾䛛䠛ᚲせ䛸䛥䜜䜛 せ⣲䛿䠛㻌

㻌

๓⨨䛝

Ᏹᐂ⯟✵◊✲㛤Ⓨᶵᵓ≉ู㈨ᩱ䚷㻶㻭㼄㻭㻙㻿㻼㻙㻝㻡㻙㻜㻞㻜 㻟㻜

⛉

⛉Ꮫィ 䜲䝯䞊䝆䞁䜾䛻ᚲせ䛺せ⣲㻌

㧗ᛶ⬟㻌 ప䝜䜲䝈㻌 㧗ឤᗘ㻌 㧗㏿ᛶ㻌 ᐃ㔞ᛶ㻌

⥺ᙧᛶ㻌

✵㛫ᆒ୍ᛶ䠄ᅛᐃ䝜䜲䝈䚸ឤᗘ୙ᆒ୍ᛶ䠅㻌

෌⌧ᛶ㻌

 ᗘᏳᐃᛶ㻌

⤒᫬ኚ໬䠄ຎ໬䠅䛜䛺䛔㻌 㻌

ධᑕ䛧䛶䛟䜛䝣䜷䝖䞁䛾ᣲື䜢䛔䛛䛻ṇ☜䛻෌⌧䛷䛝䜛䛛

⛉Ꮫィ 䜲䝯䞊䝆䞁䜾⏝䜹䝯䝷

➨㻝㻜ᅇᏛ㝿㡿ᇦ䛻䛚䛡䜛ศᏊ䜲䝯䞊䝆䞁䜾䝣䜷䞊䝷䝮 㻟㻝

㻯

㻯㻯㻰䝉䞁䝃䛸㻯㻹㻻㻿䝉䞁䝃䛾㐪䛔㻌

CCD CMOS

⏬⣲䛿䝣䜷䝖䝎䜲䜸䞊䝗䛸㟁Ⲵ䜢䛯䜑 䜛ᐜჾ䠄䝞䜿䝒䠅䛛䜙ᵓᡂ㻌

㟁Ⲵ䛿䝞䜿䝒䝸䝺䞊᪉ᘧ䛷㐠䜀䜜䚸

⏬⣲䛿䝣䜷䝖䝎䜲䜸䞊䝗䛸㟁Ⲵ䜢㟁ᅽ䛻 ኚ᥮䛩䜛䜰䞁䝥䛛䜙ᵓᡂ㻌

ྛ⏬⣲䛾㟁ᅽ䛿䝇䜲䝑䝏䜢㡰ḟษ䜚᭰

1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9

1 Frame readout time

䝉

䝉䞁䝃䛾ᇶᮏ㻌

CMOS CCD

㻹㻻㻿䜻䝱䝟䝅䝍䞊䜢ᇶᮏᵓ㐀䛸䛩䜛⏬

⣲䛜㻞ḟඖⓗ䛻㓄ิ䛧䛯䜒䛾㻌

✵ஈᒙෆ䛷ගᏊ䠄䝣䜷䝖䞁䠅䛛䜙㟁Ꮚ䠄䜶 䝺䜽䝖䝻䞁䠅䛻ኚ᥮䠄ග㟁ኚ᥮䠅㻌

⵳✚䛧䛯㟁Ⲵ䜢㟁ᅽ䛸䛧䛶ฟຊ䛩䜛Ⅽ 䛾ኚ᥮㒊ศ䜢ᣢ䛴㻌

㻌 㻌

Ᏹᐂ⯟✵◊✲㛤Ⓨᶵᵓ≉ู㈨ᩱ䚷㻶㻭㼄㻭㻙㻿㻼㻙㻝㻡㻙㻜㻞㻜 㻟㻞

㼟㼟㻯㻹㻻㻿䛾Ⓩሙ㻌

㻯㻯㻰䜹䝯䝷䛾ᛶ⬟䝖䝷䜲䜰䞁䜾䝹㻌 䛭䜜䛮䜜䛾ᛶ⬟䛿䝖䝺䞊䝗 䜸䝣䛾㛵ಀ㻌

㻌 㻌

ज़ࡇ

ᚐ΂ࡇ ǹȔȸȉ

ज़ࡇ

ᚐ΂ࡇ ǹȔȸȉ

CCD sCMOS

㧗ឤᗘ䚸㧗ゎീᗘ䚸㧗㏿ᛶ䜢ྠ᫬䛻 ᐇ⌧㻌

䝜䜲䝈䝺䝧䝹䛿ᩘ㟁Ꮚ䠄㻝䡚㻟㼑㻙䠅⛬ᗘ㻌 㻠㻜㻜୓⏬⣲䜽䝷䝇䛷㻝㻜㻜㼒㼜㼟䜢ᐇ⌧㻌

⛉Ꮫィ ศ㔝䛷䜒㻯㻯㻰䛛䜙䜒⨨䛝᥮

䛘䛜㐍䜣䛷䛔䜛㻌 㻌

㻯

㻯㻹㻻㻿䝉䞁䝃䛾ᢏ⾡㐍Ṍ㻌

1

1

2 3 4 5 6 7 8 9

4 7 1 Frame readout time

$' $' $' CDS CDS CDS

2 5 8

3 6 9

ྛิẖ䛻㻯㻰㻿䜰䞁䝥䠄䝜䜲䝈䜻䝱䞁䝉䝹ᅇ

㊰䠅䚸㻭㻛㻰䝁䞁䝞䞊䝍䜢䝉䞁䝃ෆ䛻ᐇ⿦㻌 䜹䝷䝮䜰䞁䝥䚸䜹䝷䝮㻭㻰㻯㻌

㉸୪ิฎ⌮䛻䜘䛳䛶㧗㏿໬䛸ప䝜䜲䝈໬䜢

ྠ᫬䛻ᐇ⌧㻌

㻝㻷㻌㼤㻌㻝㻷䛾䝉䞁䝃䜢㻟㻜䝣䝺䞊䝮㻛⛊䛷 ㄞ䜏ฟ䛻ᚲせ䛺⏬⣲䜽䝻䝑䜽䛿㻌

9 㻯㻯㻰䛾ሙྜ䛷䛚䜘䛭㻟㻡㻹㻴㼦㻌 9 䜹䝷䝮㻭㻰㻯ᦚ㍕䛾㻯㻹㻻㻿䛾ሙྜ

䛷㻟㻡㻷㻴㼦㻌 㻌

㻌 㻌

➨㻝㻜ᅇᏛ㝿㡿ᇦ䛻䛚䛡䜛ศᏊ䜲䝯䞊䝆䞁䜾䝣䜷䞊䝷䝮 㻟㻟

㻱㻹㻙㻯㻯㻰䛻䜘䜛ቑಸ౛㻌

㼄㻌㻞㻌

㼄㻌㻝㻜㻌

㼄㻌㻡㻜㻜㻌 㼄㻌㻡㻜㻌

㻱

㻱㻹㻙㻯㻯㻰䛾ཎ⌮㻌

Normal CCD

Image area

Storage area

Serial register

Out put

Impact Ionization Gate 2GS

Gate 1

e e

e e e

e e e

EM CCD

Image area

Storage area

Serial register Multiplication register Electron Multiplication

i

ቑಸ䝺䝆䝇䝍䛻㧗㟁ᅽ䜢

༳ຍ䛧䜲䞁䝟䜽䝖䜲䜸䞁໬

⌧㇟䜢ᘬ䛝㉳䛣䛩஦䛷㟁 Ꮚ䜢ቑಸ㻌

༳ຍ㟁ᅽ䜢䝁䞁䝖䝻䞊䝹䛩 䜛஦䛷㻱㻹䝀䜲䞁䜢㻝㻜㻜㻜ಸ

⛬ᗘ䜎䛷ୖ䛢䜛஦䛜䛷䛝 䜛㻌

ㄞ䜏ฟ䛧䝜䜲䝈䛜௜ຍ䛥䜜 䜛๓䛻ቑಸ䛧䛶䛔䜛䛾䛷䚸 ᐇ㉁䛾ㄞ䜏ฟ䛧䝜䜲䝈䛜 㻝㻛㻳㼍㼕㼚䛻䛺䜛㻌

ቑಸ㐣⛬䛾⤫ィⓗཎ⌮䛻 䜘䛳䛶㐣๫䝜䜲䝈䠄䜶䜽䝉䝇 䝜䜲䝈䠅䛜ಙྕศ䛻㔜␚䛥 䜜䜛㻌 䋻ቑಸ䜖䜙䛞㻌 㻌

㻌 䠢䠠䠝䛷Ⓨ⏕

䛩䜛䝜䜲䝈 䠡䠩䝀䜲䞁

䠪 (e-)

䠢䠠䠝䝜䜲䝈䜢䜲䝯䞊䝆㒊 䛾䡁䠉䛷᥮⟬䛩䜛䛸

䠪䠋䠣 (e-)

䛸㻌 䠍䠋䠣ಸ䛻ᑠ䛥䛟䛷䛝䜛䚹

䠣

Ᏹᐂ⯟✵◊✲㛤Ⓨᶵᵓ≉ู㈨ᩱ䚷㻶㻭㼄㻭㻙㻿㻼㻙㻝㻡㻙㻜㻞㻜 㻟㻠

䛭

䛭䜜䛮䜜䛾䜹䝯䝷䛾≉ᛶ㻌

EMCCD

⫼㠃↷ᑕ໬䛻䜘䜛㧗䛔㔞Ꮚຠ

⋡䊻㻥㻜䠂௨ୖ㻌

㟁Ꮚቑಸ䛻䜘䜛㧗䛔䝀䜲䞁䊻 ㄞ䜏ฟ䛧䝜䜲䝈䛜᭱䜒ప䛔 䠄㻌㻜㻚㻞㼑㻙㻬㻡㻜㻜㼤㻌㻱㻹㻌㼓㼍㼕㼚䠅㻌

≉Ṧᢏ⾡䛜ᚲせ䠄㧗෭༷䚸㧗 㟁ᅽ㥑ື䠅㻌

ቑಸ㐣⛬䛾⤫ィⓗཎ⌮䛻䜘䜛 㐣๫䝜䜲䝈䠄䜶䜽䝉䝇䝜䜲䝈䠅䛾 㔜␚㻌

⫼㠃໬ฎ⌮䛻䜘䜛ឤᗘ୙ᆒ୍

ᛶ䠄ᅛᐃ䝜䜲䝈䠅䛜Ꮡᅾ㻌 㻌

㻌 㻌

䛭

䛭䜜䛮䜜䛾䜹䝯䝷䛾≉ᛶ㻌

CCD

☜❧䛥䜜䛯Ᏻᐃ䛧䛯ᢏ⾡㻌 㟁Ⲵ㟁ᅽኚ᥮䛜༢୍䛾䜰䞁䝥㻌㻌 䛷⾜䜟䜜䜛㻌

䊻㧗䛔✵㛫ᆒ୍ᛶ㻌 䝅䝸䜰䝹ㄞ䜏ฟ䛧㻌

䊻䝇䝢䞊䝗䛻㝈⏺㻌 㻌 䠄㻟㻜䡚㻠㻜㻹㼜㼕㼤㻛㼟㼑㼏䠅㻌 ప䛔ㄞ䜏ฟ䛧䝜䜲䝈㻌

䊻㻢䡚㻝㻜㼑㻙㻌 㧗෭༷䛜ྍ⬟㻌

䊻ᴟ䜑䛶ప䛔ᬯ㟁ὶ㻌 㧗䛔㔞Ꮚຠ⋡㻌

䊻䝣䝻䞁䝖↷ᑕ䛷㻣㻜㻑⛬ᗘ㻌 㻌

㻌

➨㻝㻜ᅇᏛ㝿㡿ᇦ䛻䛚䛡䜛ศᏊ䜲䝯䞊䝆䞁䜾䝣䜷䞊䝷䝮 㻟㻡

䡏 CMOS 䜹䝯䝷䛾ヲ⣽≉ᛶ 䛭

䛭䜜䛮䜜䛾䜹䝯䝷䛾≉ᛶ㻌

CMOS

᭱᪂ᢏ⾡㻌

ิ୪ิㄞ䜏ฟ䛧㻌

䊻㧗㏿ᛶ䛸ప䝜䜲䝈䜢ྠ᫬䛻 ᐇ⌧䠄㻠㻜㻜㻹䡚

㻡㻜㻜㼜㼕㼤㻛㼟㼑㼏䠅㻌 䜘䜚ప䛔ㄞ䜏ฟ䛧䝜䜲䝈㻌

䊻㻝䡚㻞㼑㻙㻌㼞㼙㼟㻌 㧗䛔㔞Ꮚຠ⋡㻌

䊻䝣䝻䞁䝖↷ᑕ䛷㻣㻜㻑⛬ᗘ㻌

ྛ⏬⣲䚸䜹䝷䝮ẖ䛻䜰䞁䝥㻌 䊻⏬⣲ẖ䚸䜹䝷䝮ẖ䛻䜘䜛䜀

䜙䛴䛝䠄✵㛫୙ᆒ୍ᛶ䠅㻌 㻌

㻌 㻌

Ᏹᐂ⯟✵◊✲㛤Ⓨᶵᵓ≉ู㈨ᩱ䚷㻶㻭㼄㻭㻙㻿㻼㻙㻝㻡㻙㻜㻞㻜 㻟㻢

ㄞ

ㄞฟ䝜䜲䝈䛾≉ᛶ㻌

䡏CMOS䛸CCD䛾䝜䜲䝈ศᕸ౛

䡏CMOS䛷䛿䚸ྛ⏬⣲ẖ䛻䜰䞁䝥䛜᭷䜚䚸䝞䝷䝒䜻䛜䛒 䜛䚹⤯ᑐ್䛿ᑠ䛥䛔䚹

CCD䛿䚸㏻ᖖ䠍⣲Ꮚ䛻䠍䜰䞁䝥䛾䛯䜑⏬⣲ẖ䛾䝞䝷䝒䜻 䛿ᑠ䛥䛔䛜䚸䡏CMOS䜘䜚኱䛝䛺್䚹㻌

0 0.2 0.4 0.6 0.8 1

0 2 4 6 8 10 12

Frequency [a,u.]

Readout noise [e]

Readout noise distribution

sCMOS CCD

0 0.2 0.4 0.6 0.8 1

0 2 4 6 8 10 12

Frequency [a,u.]

Readout noise [e]

Readout noise distribution

sCMOS CCD

䡏㻯㻹㻻㻿䜹䝯䝷௙ᵝ౛㻌

➨㻝㻜ᅇᏛ㝿㡿ᇦ䛻䛚䛡䜛ศᏊ䜲䝯䞊䝆䞁䜾䝣䜷䞊䝷䝮 㻟㻣

ㄞฟ䝜䜲䝈䛾≉ᛶ㻌

SKRWRQVSL[HO

䡏 CMOS CCD

ㄞฟ䝜䜲䝈䛾≉ᛶ㻌

SKRWRQVSL[HO

䡏 CMOS CCD

Ᏹᐂ⯟✵◊✲㛤Ⓨᶵᵓ≉ู㈨ᩱ䚷㻶㻭㼄㻭㻙㻿㻼㻙㻝㻡㻙㻜㻞㻜 㻟㻤

ㄞฟ䝜䜲䝈䛾≉ᛶ㻌

SKRWRQVSL[HO

䡏 CMOS CCD

ㄞฟ䝜䜲䝈䛾≉ᛶ㻌

SKRWRQVSL[HO

䡏 CMOS CCD

➨㻝㻜ᅇᏛ㝿㡿ᇦ䛻䛚䛡䜛ศᏊ䜲䝯䞊䝆䞁䜾䝣䜷䞊䝷䝮 㻟㻥

ࣟ

࣮ࣟࣜࣥࢢ ࢩ

ࢩࣕࢵࢱࡢࡳ

ࢢ

ࢢ࣮ࣟࣂࣝ

ࢩ

ࢩࣕࢵࢱᦚ㍕

ㄞฟࣀ࢖ࢬ

HOHFWRUQVUPV 㸯㸬㸲 㸰㸬㸵

㔞Ꮚຠ⋡㸦㸣㸧

ࢢࣛࣇཧ↷ 㸵㸰 㸴㸮

ࣇ࣮࣒࣮ࣞࣞࢺ 㸯 㸮㸬㸳

ṧീ ࡞ࡋ ᑠ᭷

CMOS䛿䚸䝻䞊䝸䞁䜾䝅䝱䝑䝍䛜ᇶᮏ

CMOS䛷䛿䚸ᶵ⬟㏣ຍ䛿⏬⣲䜈Tr䜢ቑ䜔䛩䛣䛸䛷ᐇ⌧

㻌 㻌 㻌 э䜾䝻䞊䝞䝹䝅䝱䝑䝍䛿䚸Tr䜢㏣ຍ䛧䛶ᐇ⌧䛧䛶䛔䜛䛯䜑 㻌 㻌 㻌 㻌 㻌 㛤ཱྀ⋡䛜ୗ䛜䜚䚸㔞Ꮚຠ⋡䛿ୗ䛜䜛䚹

㻌

㟢

㟢ග䞉ㄞฟ᪉ᘧ㻌

㟢

㟢ග䞉ㄞฟ᪉ᘧ㻌

䖃䝻䞊䝸䞁䜾䝅䝱䝑䝍 㻌 㡰ḟ㟢ග

㻌 㟢ග㛤ጞ᫬㛫䛜䠍⏬㠃୰䛷␗

䛺䜛䚹

㻌 䡏CMOS䛷䛿䚸Ỉᖹ䠍䝷䜲䞁䛿ྠ

᫬㟢ග䚹

⣲Ꮚ䛾㟢ගཬ䜃㟁Ⲵㄞฟ᪉ᘧ㻌

䖃䜾䝻䞊䝞䝹䝅䝱䝑䝍 㻌 ྠ᫬㟢ග

㻌 ඲⏬㠃ྠ᫬㟢ග䜢⾜䛖

Ᏹᐂ⯟✵◊✲㛤Ⓨᶵᵓ≉ู㈨ᩱ䚷㻶㻭㼄㻭㻙㻿㻼㻙㻝㻡㻙㻜㻞㻜 㻠㻜

⛉Ꮫィ ⏝䜹䝯䝷䛾 S/N

㔞

㔞 Ꮚ

ຠ

ຠ

⋡ 协 协 㸣 卐 卐

Ἴ Ἴ㛗QP

ศ

ศගឤᗘ≉ᛶ

ࢢ࣮ࣟࣂࣝ

ࢩࣕࢵࢱ

࣮ࣟࣜࣥࢢ ࢩࣕࢵࢱ

䝻䞊䝸䞁䜾䝅䝱䝑䝍᪉ᘧ䛿䚸㧗㔞Ꮚຠ⋡䚸ప䝜䜲䝈 䛻䜘䜚䚸ప↷ᗘ䛷䛾᧜ᙳ䛻ඃ䜜䛶䛔䜛

㟢ග䞉ㄞฟ᪉ᘧ㻌

➨㻝㻜ᅇᏛ㝿㡿ᇦ䛻䛚䛡䜛ศᏊ䜲䝯䞊䝆䞁䜾䝣䜷䞊䝷䝮 㻠㻝

㻿

㻿㻛㻺ẚ䠄㻿㻺㻾䠅䛸䛿㻌

㻽㻱㻦㻌 㔞Ꮚຠ⋡㻌

㻿㻦㻌㻌 ධᑕ䝣䜷䝖䞁ᩘ㻌䠄㼜㼔㼛㼠㼛㼚㻛㼜㼕㼤㼑㼘䠅㻌

㻲㻦㻌 䝜䜲䝈䝣䜯䜽䝍䞊䠄㻩㻌㻝㻌㼒㼛㼞㻌㻯㻯㻰㻛㼟㻯㻹㻻㻿㻌㼍㼚㼐㻌䌮㻞㻌㼒㼛㼞㻌㻱㻹㻙㻯㻯㻰䠅㻌 㻺_㼞㻦㻌㻌 ㄞ䜏ฟ䛧䝜䜲䝈䠄㼞㼙㼟䠅㻌

㻹㻦㻌 㻱㻹㻌㻳㼍㼕㼚㻌㻔㻩㻝㻌㼒㼛㼞㻌㻯㻯㻰㻌㻛㻌㻯㻹㻻㻿㻕㻌 㻵_㼎㻦㻌㻌㻌㻌 ⫼ᬒග䠄䝞䝑䜽䜾䝷䞁䝗䠅㻌

ֱ㻌 䝅䝵䝑䝖䝜䜲䝈 ֱ㻌 ㄞฟ䝜䜲䝈

䝕

䝕䝆䝍䝹䜹䝯䝷䛾ಙྕ䛾ὶ䜜㻌

ග䠄㻼㼔㼛㼠㼛㼚䠅㻌㼚䠅䠅

㟁ᅽ㻌

㻲㻰㻭㻌 䜰䞁䝥㻌

㻭㻛㻰䝁䞁䝞䞊䝍㻌

䝕䝆䝍䝹㻌㻵㻛㻲㻌 㼑㻙㻌

㻯㻯㻰㻌 㻼㻯㻌

䝺䞁䝈㻌

⿕෗య㻌

㻲㻳㻌 䝪䞊䝗㻌 㟁Ꮚ䜢㟁ᅽ䛻

ኚ᥮㻌

䜰䝘䝻䜾䜢䝕䝆䝍䝹 䛻ኚ᥮㻌

䜲䝯䞊䝆䜢⾲♧㻌 ග㟁ኚ᥮㻌

ㄞฟ䛧䝜䜲䝈䠄㻺㼞䠅㻌

䝉䞁䝃㟁Ⲵ㟁ᅽ䜰䞁䝥䠄㻲㻰㻭䠅䚸㟁Ꮚᅇ㊰ୖ

䛷㔜␚䛥䜜䜛䝜䜲䝈㻌

ධᑕ䝣䜷䝖䞁ᩘ䛻ᑐ 䛩䜛ฟຊ㟁Ꮚᩘ䛾

๭ྜ䜢䠂䛷⾲䛩䚹 㔞Ꮚຠ⋡䠄QE䠅

㼑㻙㻌 㼤㻌㻳㻌

㻱㻹㻙㻯㻯㻰㻌

㟁Ꮚቑಸ䝀䜲䞁

౛㻌G=1000

1ಶ䛾㟁Ꮚ䛜ᖹᆒ1000ಶ䛻 EM䝀䜲䞁䠄G䠅

㟁Ꮚቑಸ㻌

㟁Ꮚቑಸ㐣⛬䛻䜘䛳䛶⤫ィⓗ䛻௜

ຍ䛥䜜䜛䝜䜲䝈ᅉᏊ䛷䚸䝀䜲䞁䛜㻡㻜 ಸ௨ୖ䛷䛒䜜䜀䜋䜌㻝㻚㻠䛷୍ᐃ䛾್

䛸䛺䜛㻌

䜶䜽䝉䝇䝜䜲䝈䝣䜯䜽䝍䞊䠄㻲䠅㻌 Ᏹᐂ⯟✵◊✲㛤Ⓨᶵᵓ≉ู㈨ᩱ䚷㻶㻭㼄㻭㻙㻿㻼㻙㻝㻡㻙㻜㻞㻜 㻠㻞

┦ᑐ㻿㻺㻾䠄㻾㼑㼘㼍㼠㼕㼢㼑㻌㻿㻺㻾㻌㻦㻌㼞㻿㻺㻾䠅㻌

㻾㼑㼘㼍㼠㼕㼢㼑㻌㻿㻺㻾㻌㻔㼞㻿㻺㻾㻕㻌

ධᑕ䝣䜷䝖䞁ᩘ䠄㼜㼔㼛㼠㼛㼚㼟㻛㼜㼕㼤㼑㼘䠅㻌

3HUIHFW 4(

4(

⌮᝿ⓗ䛺䜹䝯䝷䛻ᑐ䛩䜛┦ᑐ್䛸䛧䛶䝥䝻䝑䝖

4(䛜䛻䛺䜛䛸U615䛿䛻䛺䜛䚹

ィ

ィ ⏝㏵䛻⌮᝿ⓗ䛺䜹䝯䝷䛸䛿㻌

ග䠄㻼㼔㼛㼠㼛㼚䠅㻌㼚䠅䠅

㟁ᅽ㻌

㻲㻰㻭㻌 䜰䞁䝥㻌

㻭㻛㻰䝁䞁䝞䞊䝍㻌

䝕䝆䝍䝹㻌㻵㻛㻲㻌 㼑㻙㻌

㻯㻯㻰㻌 㻼㻯㻌

䝺䞁䝈㻌

⿕෗య㻌

㻲㻳㻌 䝪䞊䝗㻌 㟁Ꮚ䜢㟁ᅽ䛻

ኚ᥮㻌

䜰䝘䝻䜾䜢䝕䝆䝍䝹 䛻ኚ᥮㻌

䜲䝯䞊䝆䜢⾲♧㻌 ග㟁ኚ᥮㻌

ㄞฟ䛧䝜䜲䝈䠄㻺㼞䠅㻌

䝉䞁䝃㟁Ⲵ㟁ᅽ䜰䞁䝥䠄㻲㻰㻭䠅䚸㟁Ꮚᅇ㊰ୖ

䛷㔜␚䛥䜜䜛䝜䜲䝈㻌

ධᑕ䝣䜷䝖䞁ᩘ䛻ᑐ 䛩䜛ฟຊ㟁Ꮚᩘ䛾

๭ྜ䜢䠂䛷⾲䛩䚹 㔞Ꮚຠ⋡䠄QE䠅

0 e-

100 %

䝣䜷䝖䞁䛾ᣲື䜢ᛅᐇ䛻෌⌧䛷䛝䜛䜹䝯䝷

➨㻝㻜ᅇᏛ㝿㡿ᇦ䛻䛚䛡䜛ศᏊ䜲䝯䞊䝆䞁䜾䝣䜷䞊䝷䝮 㻠㻟

䜹

䜹䝯䝷௙ᵝ౛㻌

䝉䞁䝃㻌 䜲䞁䝍䞊䝷䜲䞁㻯㻯㻰㻌 ⫼㠃↷ᑕᆺ㻱㻹㻙㻯㻯㻰㻌 㼟㻯㻹㻻㻿㻌

䜹䝯䝷ྡ㻌 㻻㻾㻯㻭㻙㻾㻞㻌㻌 㻵㼙㼍㼓㻱㻹㻌㼤㻞㻌 㻻㻾㻯㻭㻌㻲㼘㼍㼟㼔㻠㻚㻜㻌㻌㼂㻞㻌

⏬⣲ᩘ㻌 㻝㻜㻞㻠㻌㼤㻌㻝㻟㻠㻠㻌 㻡㻝㻞㻌㼤㻌㻡㻝㻞㻌 㻞㻜㻠㻤㻌㼤㻌㻞㻜㻠㻤㻌

⏬⣲䝃䜲䝈㻌 㻢㻚㻠㻡㻌㽀㼙㻌㼤㻌㻢㻚㻠㻡㻌㽀㼙㻌 㻝㻢㻌㽀㼙㻌㼤㻌㻝㻢㻌㽀㼙㻌 㻢㻚㻡㻌㽀㼙㻌㼤㻌㻢㻚㻡㻌㽀㼙㻌

㻽㻱㻌㻔㻌㻬㻢㻡㻜㻌㼚㼙㻕㻌 㻡㻤㻌㻑㻌 㻥㻜㻌㻑㻌 㻣㻞㻌㻑㻌㻌

䝣䝺䞊䝮䝺䞊䝖㻌 㻝㻤㻌㼒㼜㼟㻌㻛㻌㻤㻌㼒㼜㼟㻌 㻣㻜㻌㼒㼜㼟㻌 㻝㻜㻜㻌㼒㼜㼟㻌㻛㻌㻟㻜㻌㼒㼜㼟㻌 ㄞ䜏ฟ䛧䝜䜲䝈㻌

䠄㻺㼞㻌㻦㻌㼞㼙㼟䠅㻌 㻝㻜㻌㼑㻙㻌㻛㻌㻢㻌㼑㻙㻌 㻨㻌㻜㻚㻞㻌㼑㻙㻌㻔㻹㻌㻩㻌㻡㻜㻜㻕㻌 㻝㻚㻥㻌㼑㻙㻌㻛㻌㻝㻚㻟㻌㼑㻙㻌 䜶䜽䝉䝇䝜䜲䝈䝣䜯

䜽䝍䞊㻌㻔㻲_㼚㻕㻌 㻝㻌 䌮㻞㻌 ^㻝㻌

ᐇຠⓗ䛺㔞Ꮚຠ⋡䠄㻱㼒㼒㼑㼏㼠㼕㼢㼑㻌㻽㻱䠅㻌

‡ ㄞ䜏ฟ䛧䝜䜲䝈䛿༑ศᑠ䛥䛔䛸௬ᐃ㻌

615IRU&&'V&026 615IRU(0&&'

3 4(

3 4(

3 615 4(

u u u

3 4(

) 3 4(

3 4(

0 )

3 4(

615 0

HII

u

u u

u u

u u

4(

) 4(

4(

(0&&'䛾ᐇຠⓗ䛺㔞Ꮚຠ⋡䛿䜶䜽䝉䝇䝜䜲䝈䛻䜘 䜛䝜䜲䝈ቑຍ䛻䜘䛳䛶༙ศ䠄䠅䛻䛺䜛

(0&&'䛾U615䛿௨ୖ䛻䛿䛺䜙䛺䛔

Ᏹᐂ⯟✵◊✲㛤Ⓨᶵᵓ≉ู㈨ᩱ䚷㻶㻭㼄㻭㻙㻿㻼㻙㻝㻡㻙㻜㻞㻜 㻠㻠

䜹

䜹䝯䝷䛾䝫䝆䝅䝵䝙䞁䜾㻌

ධᑕ䝣䜷䝖䞁

࣓࢝ࣛ㏿ᗘRU㧗ゎീᗘ EMCCD

Scientific CMOS CCD

┦

┦ᑐ㻿㻺㻾䠄㻾㼑㼘㼍㼠㼕㼢㼑㻌㻿㻺㻾㻌㻦㻌㼞㻿㻺㻾䠅㻌

㻾㼑㼘㼍㼠㼕㼢㼑㻌㻿㻺㻾㻌

ධᑕ䝣䜷䝖䞁ᩘ䠄㼜㼔㼛㼠㼛㼚㼟㻛㼜㼕㼤㼑㼘䠅㻌

3HUIHFW

V&026)ODVKISV 25&$5&&'

,PDJ(0;(0&&' V&026)ODVKISV ,PDJ(0;%7&&'PRGH

Ȝ 㻌㻩㻌㻢㻡㻜㻌㼚㼙㻌

⫼ᬒග䛺䛧㻌 ᴟప↷ᗘ ୍⯡ⓗ࡞⺯ග࢖࣓࣮ࢪࣥࢢ

➨㻝㻜ᅇᏛ㝿㡿ᇦ䛻䛚䛡䜛ศᏊ䜲䝯䞊䝆䞁䜾䝣䜷䞊䝷䝮 㻠㻡

ᑕᑕᑕᑕᑕᑕධᑕᑕᑕᑕᑕධᑕᑕᑕᑕᑕᑕᑕᑕᑕᑕᑕᑕᑕᑕᑕᑕᑕᑕᑕᑕᑕᑕᑕᑕᑕᑕᑕᑕᑕᑕධᑕᑕᑕᑕᑕᑕᑕᑕᑕᑕᑕᑕᑕᑕᑕᑕධᑕᑕᑕᑕᑕᑕᑕᑕᑕᑕᑕᑕᑕᑕᑕᑕᑕᑕᑕᑕᑕᑕᑕᑕᑕᑕᑕᑕᑕᑕᑕධᑕᑕᑕᑕᑕᑕᑕᑕධᑕධᑕᑕᑕᑕᑕධᑕධᑕᑕᑕᑕᑕᑕᑕධᑕᑕᑕᑕධධධධධධධධධධධධධධධධධධධධධධධධධධධධධධධධධධධධධධධධධධධධධධධධධධධධධධධධධධධධධධධධධධධධධධධධධධධධධධධධධධධධධධධධධධධධධධධධ䜷䜷䜷䜷䜷䜷䝣䜷䜷䜷䜷䜷䝣䜷䜷䝣䜷䜷䜷䝣䜷䜷䝣䜷䜷䝣䜷䜷䜷䜷䝣䜷䝣䜷䜷䜷䝣䜷䜷䝣䜷䝣䜷䝣䜷䝣䜷䝣䜷䝣䝣䝣䝣䝣䝣䝣䝣䝣䝣䝣䝣䝣䝣䝣䝣䝣䝣䝣䝣䝣䝣䝣䝣䝣䝣䝣䞁䞁䞁䞁䞁䞁䝖䞁䞁䞁䞁䞁䞁䞁䞁䞁䞁䝖䞁䞁䞁䞁䞁䞁䞁䞁䞁䞁䞁䞁䞁䞁䞁䞁䞁䞁䞁䞁䞁䞁䝖䞁䝖䞁䞁䞁䞁䝖䞁䞁䝖䞁䝖䞁䞁䝖䞁䝖䞁䝖䞁䝖䞁䞁䝖䝖䝖䝖䝖䝖䝖䝖䝖䝖䝖䝖䝖䝖䝖䝖䝖

࢝

࣓࢝

࣓࢝

࣓࢝

࢝

࣓࢝

࣓࢝

࢝

࣓࢝

࢝

࣓࣓࢝

࣓࢝

࣓࢝

࣓࢝

࣓࣓࢝

࣓࣓࢝

࣓࢝

࣓࣓࢝

࣓࢝

࣓࢝

࣓࢝

࣓࢝

࣓࢝

࢝

࣓࢝

࣓࢝

࣓࢝

࣓࢝

࢝

࣓࢝

࢝

࣓࢝

࣓࣓࣓࢝

࣓࢝

࢝

࢝

࣓࢝

࣓࢝

࣓࢝

࢝

࣓࣓࢝

࢝

࣓࣓࢝

࣓࢝

࣓࣓࣓࣓࢝

࣓࣓࣓࢝

࢝

࢝

࢝

࣓࣓࢝

࢝

࣓࢝

࢝

࣓࢝

࢝ ࣛࣛ㏿ࣛ㏿ࣛ㏿ࣛ㏿ࣛ㏿ࣛ㏿ࣛ㏿ࣛ㏿ࣛ㏿ࣛ㏿ࣛ㏿ࣛ㏿ࣛ㏿ࣛ㏿ࣛ㏿ࣛ㏿ࣛ㏿ࣛ㏿ࣛ㏿ࣛ㏿ࣛ㏿ࣛࣛ㏿ࣛ㏿ࣛ㏿ࣛ㏿ࣛ㏿ࣛ㏿ࣛࣛ㏿ࣛ㏿ࣛ㏿ࣛࣛ㏿ࣛ㏿ࣛ㏿ࣛ㏿ࣛ㏿ࣛࣛࣛ㏿ࣛ㏿ࣛࣛࣛ㏿㏿㏿㏿㏿㏿㏿㏿㏿㏿㏿㏿ᗘᗘᗘᗘᗘᗘᗘᗘᗘᗘᗘᗘᗘᗘᗘᗘᗘᗘᗘᗘᗘᗘᗘᗘᗘᗘᗘᗘᗘᗘᗘᗘᗘᗘᗘᗘᗘᗘᗘᗘᗘᗘᗘᗘᗘᗘᗘᗘᗘᗘRRURURRURURRURURRURURURRRURURRRURURRURURURURRRRRRURURRRUU㧗ゎ㧗ゎ㧗ゎ㧗ゎ㧗ゎ㧗ゎ㧗ゎ㧗ゎ㧗ゎ㧗ゎ㧗㧗ゎ㧗ゎ㧗ゎ㧗ゎ㧗ゎ㧗ゎ㧗㧗ゎ㧗ゎ㧗ゎ㧗ゎ㧗ゎ㧗ゎ㧗ゎ㧗㧗ゎ㧗ゎ㧗ゎ㧗ゎゎゎゎゎゎゎゎゎゎゎീᗘീᗘീᗘീᗘീᗘീᗘീᗘീᗘീᗘീᗘീᗘീᗘീᗘീᗘീᗘീᗘീᗘീᗘീᗘീᗘീᗘീᗘീᗘീᗘീᗘീᗘീᗘീᗘീᗘീᗘീᗘീᗘീᗘീീീᗘീᗘീᗘᗘᗘ E

E E E E E E E E EM EM EM EM EM EM EM EMMMMM EM EMMMM EM EM EMM EM EM EMM EM EM EMM E CCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCDCCCCCDD DDDDDDDDDDDDDDDDDDDDDDDDDDDD

S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S

Sccccccccccccccccccccccccccccccccccccccciiiiiiiiiiiiiiiiiiiiiieeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeennnnnnnnnnnnnnnnnnnnnnnnnnnnnttttttttttttttttttttttttttttttiiiiiiiiiiiiiiiiiiiiiiiifffffffffffffffffffffffffffffiiiiiiiiiiiiiiiiiiiiiiiiicccccccccccccccccccccccccccccccccccccccc CCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCCMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMOOOOOOOOOOOOOOOOOOOOOOOOOOOOOOOOOOOOOOOOOOOOOOOOOOOOOOSSSSSSSSSSSSSSSSSSSSSSSSSSSSSSSSSSSSSSSSSSSSSSS CC

CC CC CC CC CC CC CC CC CC CC CC CC CC CC CC CC CCC CC CC CC CC CC CC CC CC CC CC CCC CC CC CC CC C CC CC CC CC CCC CC CC CC CC CC CC C CC CC C C C CC CCC CC C CC CCC C CC CC CC CCC CC CC CCDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDD CC CCC CC C CC CC CC CC CC CCC CC C CC CC CC CC CCCDDDDDDDDDD

㻯

㻯㻹㻻㻿䛾ㄢ㢟㻌

⏬⣲ᩘ

ㄞ䜏ฟ䛧䝜䜲䝈䠄㼑㻙䠅㻌 0.85 Median

1.51 rms

0.5%⛬ᗘ

⏬⣲ẖ䛾䜀䜙䛴䛝㻌 9 䝜䜲䝈㻌

9 䝀䜲䞁䠄ឤᗘ䠅㻌 㻌

㻌

䡏 CMOS 䜹䝯䝷䛾௒ᚋ

Ᏹᐂ⯟✵◊✲㛤Ⓨᶵᵓ≉ู㈨ᩱ䚷㻶㻭㼄㻭㻙㻿㻼㻙㻝㻡㻙㻜㻞㻜 㻠㻢

䜎䛸䜑

䖃 CCD 䜹䝯䝷䛻௦䜟䜚䚸⛉Ꮫィ ⏝䛻䡏 CMOS 䜹䝯䝷䛜ᬑཬ 䛧ጞ䜑䛶䛔䜛䚹

䖃䡏 CMOS 䜹䝯䝷䛾≉ᚩ䛿䚸ప䝜䜲䝈䚸㧗㏿ㄞฟ䚹

䖃 EM-CCD 䜹䝯䝷䛿䚸㠀ᖖ䛻ᬯ䛔㡿ᇦ䠄ᩘ䝣䜷䝖䞁䠋⏬⣲௨

ୗ䠅䛷䛿䚸䝯䝸䝑䝖䛜䛒䜛䛜䚸䛭䛾௚䛾㡿ᇦ䛷䛿䚸䡏 CMOS 䜹 䝯䝷䛾 S/N 䛜Ⰻ䛔䚹

䖃௒ᚋ䚸䜘䜚⌮᝿ⓗ䛺䜹䝯䝷䜢┠ᣦ䛧㛤Ⓨ䜢⥆䛡䛶䛔䜛䚹

㻾㼑㼘㼍㼠㼕㼢㼑㻌㻿㻺㻾㻌

ධᑕࣇ࢛ࢺࣥᩘ㸦SKRWRQVSL[HO㸧

25&$5&&'

V&026)ODVKISV ,PDJ(0;%7&&'02'(

,PDJ(0;(0&&'

௒

௒ᚋ䛾㻯㻹㻻㻿䛾᪉ྥᛶ㻌

᭦䛺䜛䝜䜲䝈䛾పῶ㻌

9 ⏬⣲ẖ䛾䜀䜙䛴䛝䛾పῶ㻌 9 㻝㼑㻙㻌㼞㼙㼟௨ୗ䛾ᐇ⌧㻌 㻌

㻌

㔞Ꮚຠ⋡䛾ྥୖ㻌 㻌

ᅛᐃ䝟䝍䞁䝜䜲䝈䛾పῶ㻌㻌 㻌

㻌

䜘䜚⌮᝿ⓗ䛺䜹䝯䝷䛻㏆䛵䛡䚸䝣䜷䝖䞁䛾ᣲື䜢ṇ☜䛻෌⌧䛷䛝䜛䜹䝯䝷㻌㻌 㻌

➨㻝㻜ᅇᏛ㝿㡿ᇦ䛻䛚䛡䜛ศᏊ䜲䝯䞊䝆䞁䜾䝣䜷䞊䝷䝮 㻠㻣

䛤

䛤Ύ⫈䛒䜚䛜䛸䛖䛤䛦䛔䜎䛧䛯䚹

᭱ᚋ䛻

䞉὾ᯇ䝩䝖䝙䜽䝇ᰴᘧ఍♫䛷䛿䚸䛣䜜䜎䛷㏙䜉䛯 䡏 CMOS 䜹䝯䝷䚸 EM-CCD 䜹䝯䝷䚸 CCD 䜹䝯䝷䜢䝷䜲䞁 䝘䝑䝥䛧䛶䛔䜎䛩䚹

䞉䝕䝰ᶵ䜢‽ഛ䛧䛶䛚䜚䜎䛩䛾䛷䚸䛤せᮃ䛜䛒䜜 䜀䛤㐃⤡㢪䛔䜎䛩䚹

䞉 URL

www.hamamatsu.com

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