ᣧⒷ↰ᄢቇᄢቇ㒮 వㅴℂᎿቇ⎇ⓥ⑼
ඳ㩷 ჻㩷 ⺰㩷 ᢥ㩷 㩷 ⷐ
⺰ ᢥ 㗴 ⋡
㔚ሶ㗼ᓸ㏜↪㜞ノᐲන⦡㔚ሶḮߩ⎇ⓥ
Studies of Highly-Bright and
Monochromatic Electron Sources for Electron Microscopy
↳ ⺧ ⠪
ᄢ᎑ ථ
Takashi OHSHIMA
2013 ᐕ 5
㔚 ሶ 㗼 ᓸ ㏜ ޔ ․ ߦ ૐ ട ㅦ ߩ ᩏ ဳ 㔚 ሶ 㗼 ᓸ ㏜ (㧿 㧱 㧹 : S c a n n i n g E l e c t r o n M i c r o s c o p y )ߪ ޔ⹜ ᢱ ߳ ߩ ࠳ ࡔ ࠫ ߇ ዋ ߥ ߊ ޔ߆ ߟ 㔚 ሶ ߣ ⊒ ↢ 㔚 ሶ ߩ ㊂ ߇ ߟ ࠅ
߁ ᧦ ઙ ߇ ࠆ ߚ ߦ Ꮺ 㔚 ߒ ᤃ ⛘ ✼ ߢ ߽ ․ ߥ 㕙 ಣ ℂ ࠍ ᣉ ߐ ߕ ߦ ⷰ ኤ น ⢻ ߢ ࠅ ޔඨ ዉ ߿ ↢ ߩ ಽ ㊁ ߥ ߤ ޔᐢ ಽ ㊁ ߢ ↪ ߥ ‛ ߣ ߥ ߞ ߡ ࠆ ޕૐ ട ㅦ S E M ߩ ᦨ 㜞 ಽ ⸃ ⢻ ࠍ ࠆ ߽ ߩ ߪ 㔚 ሶ Ḯ ߢ ࠅ ޔ ․ ߦ ޔ ノ ᐲ ߇ 㜞 ߣ 㔚 ሶ ߩ ࠛ ࡀ ࡞
ࠡ ಽ Ꮣ ߇ ⁜ ޔ ߔ ߥ ࠊ ߜ න ⦡ ᕈ ߇ ⦟ ߎ ߣ ߇ ㊀ ⷐ ߢ ࠆ ޕ ᧄ ⺰ ᢥ ߪ ޔS E M ะ ߌ ߦ ノ ᐲ ߇ 㜞 ߊ ߆ ߟ න ⦡ ᕈ ߇ ⦟ ߣ ᦼ ᓙ ߐ ࠇ ࠆ ⒳ ޘ ߩ 㔚 ሶ Ḯ ࠍ 㜞 ᕈ ⢻ ൻ ߔ ࠆ ᣇ ᑼ ߩ ᬌ ⸛ ޔ ᧚ ᢱ ត ⚝ ޔ ታ ⸽ ታ 㛎 ߥ ߤ ࠍ ⴕ ߞ ߚ ⚿ ᨐ ߢ ࠆ ޕ
ᧄ ⺰ ᢥ ߪ ో ㇱ ߢ 5 ┨ ߆ ࠄ ᭴ ᚑ ߐ ࠇ ߡ ߅ ࠅ ޔ ฦ ┨ ߩ ⷐ ߪ ᰴ ߩ ߣ ߅ ࠅ ߢ ࠆ ޕ
╙ 㧝 ┨ ߢ ߪ ޔ ᧄ ⺰ ᢥ ో ߩ ✜ ⸒ ߣ ߒ ߡ ޔ ૐ ട ㅦ S E M ߩ ↪ ᕈ ߣ ߎ ߩ ߚ ߩ 㔚 ሶ శ ቇ ᛛ ⴚ ࠍ ୄ ⍑ ߒ ޔ ਥ ߦ ࠊ ࠇ ߡ ࠆ 㜞 ノ ᐲ න ⦡ 㔚 ሶ Ḯ ߢ ࠆ C F E 㔚 ሶ Ḯ ߣ S E 㔚 ሶ Ḯ ߩ ⷐ ߦ ߟ ߡ ㅀ ߴ ޔߐ ࠄ ߦ ᧄ ⺰ ᢥ ߢ ᬌ ⸛ ߒ ߚ ޔ 㡆 ࠻ ࡦ ࡀ ࡞ ᣇ ᑼ ޔ ૐ 㑐 ᢙ S Eޔ శ ബ 㔚 ሶ Ḯ ߩ ᣇ ᑼ ߩ ਃ ⒳ 㘃 ߩ 㔚 ሶ Ḯ ޔ ߅ ࠃ ߮ ޔ ઁ ߦ ᬌ ⸛ ߐ ࠇ ߡ ࠆ ࠽ ࡁ 㔚 ሶ Ḯ ߿ ㊀ 㔚 ሶ ♽ ߩ 㔚 ሶ Ḯ ߦ ߟ ߡ ⸃ ⺑ ߔ ࠆ ޕ
╙ 㧞 ┨ ߦ ߅ ߡ ߪ ޔ 㡆 ࠻ ࡦ ࡀ ࡞ ല ᨐ ࠍ ࠛ ࡀ ࡞ ࠡ ࡈ ࠖ ࡞ ࠲ ߣ ߒ ߡ ↪ ߡ 㔚 ሶ Ḯ ࠍ න ⦡ ൻ ߒ ࠃ ߁ ߣ ߩ ⌕ ᗐ ߆ ࠄ ޔ ℂ ⺰ ⊛ ߦ 㡆 ࠻ ࡦ ࡀ ࡞ ല ᨐ ࠍ ᦨ ㆡ ൻ ߒ ߿ ߔ ඨ ዉ ⭯ ⤑ ♽ ߦ ⌕ ⋡ ߒ ߚ ޕ ߎ ߩ ታ ߩ ߚ ߩ ᭴ ㅧ ࠍ ᬌ ⸛ ߒ ޔ 㔚 ⇇ 㔚 ሶ Ḯ ߩ ♽ ࠍ ㆬ ࠎ ߛ ޕ ߔ ߥ ࠊ ߜ ޔ 㡆 ࠻ ࡦ ࡀ ࡞ ߦ ᔅ ⷐ ߥ ޔ 㓚 ო ጀ ߣ ᚭ ጀ ࠍ 㔚 ሶ Ḯ 㕙 ߦ ޔ ߐ ࠄ ߦ ߽ ߁ ৻ ߟ ߩ 㓚 ო ጀ ࠍ 㔚 ⇇ 㓸 ਛ ߒ ߡ ⭯ ߊ ߥ ߞ ߚ ⌀ ⓨ Ḱ ࠍ ↪ ࠆ ᭴ ᚑ ߢ ࠆ ޕ ℂ ⺰ ⊛ ߦ ታ น ⢻ ᕈ ࠍ ᬌ ⸛ ߔ ࠆ ߚ ߦ ޔ ࡕ ࠺ ࡞ ߦ ࠃ ࠅ ৻ ᰴ ర ߩ ᵄ േ 㑐 ᢙ ࠍ ⸘ ▚ ߒ ߡ 㔚 ሶ ߩ ㅘ ㆊ ₸ ࠍ ⸘ ▚ ᯏ ࠪ ࡒ ࡘ ࠪ ࡚ ࡦ ߢ ᳞ ߚ ޕ 㓚 ო ጀ ߣ ᚭ ጀ ߩ ᧚ ᢱ ߣ ߒ ߡ ޔA l A s / G a A sޔ ߮ S i O2/ S i ࠍ ᬌ ⸛ ߒ ߚ ⚿ ᨐ ޔG a A s ♽ ߢ න ⦡ ൻ ߩ น ⢻ ᕈ ߇ 㜞 ߎ ߣ ޔ 㡆 ᧦ ઙ ߢ ߪ 㓚 ო ጀ ߇ ή ႐ ว ߩ 㔚 ⇇ ࠃ ࠅ ߽ ㅘ ㆊ ⏕ ₸ ߇ 㜞 ⚿ ᨐ ࠍ ᓧ ߚ ޕ ࠛ ࡀ ࡞ ࠡ ߣ ߒ ߡ ᾲ ࠛ ࡀ ࡞ ࠡ ߩ ࠝ ࠳ ߢ Ḱ ߇ ࡏ ࠤ ࠆ ߣ ߒ ߡ 3 0 m e V ߣ Ⓧ ߽ ߞ ߚ ޕ ߹ ߚ ޔ 㡆 ࠻ ࡦ ࡀ ࡞ ല ᨐ ߩ ߚ ߦ ߪ G a A s ߩ વ ዉ Ꮺ ߩ 㔚 ሶ ࠍ ߐ ߖ ࠆ ᔅ ⷐ ߇ ࠆ ߇ ޔ ଔ 㔚 ሶ Ꮺ ߩ 㔚 ሶ ߇ ᄢ ㊂ ߦ ࠅ ߎ ࠇ ߇ ⸘ ᷹ ߩ ㇎ 㝷 ߦ ߥ ࠆ น ⢻ ᕈ ߇ ࠆ ߎ ߣ ޔ ߎ ࠇ ࠍ 㒐 ߋ ߦ ߪ n ဳ ਇ ⚐ ‛ ߩ Ớ ᐲ ࠍ Ⴧ ߿ ߔ ᔅ ⷐ ߇ ࠆ ߎ ߣ ࠍ ੍ ᗐ ߒ ߚ ޕ
ᰴ ߦ ޔ ߎ ߩ ♽ ߆ ࠄ ߩ 㡆 ࠻ ࡦ ࡀ ࡞ 㔚 ሶ ߩ ේ ℂ ታ ⸽ ߔ ࠆ ߚ ߩ ታ 㛎 ᬌ ⸛ ࠍ ⴕ ߞ ߚ ޕ ߹ ߕ ޔM B E ᴺ ߢ ᩰ ሶ ࠍ ᚑ 㐳 ߔ ࠆ ߚ ߦ ޔ ㊎ ߪ G a A s ၮ ᧼ ߦ ࡎ ࠻ ࠰ ࠣ
ࡈ ࠖ ߢ ࠛ ࠶ ࠴ ࡦ ࠣ ߒ ߡ ᒻ ᚑ ߒ ߚ 㜞 ߐ ᢙ Ǵ 㨙 ߩ ጊ ᒻ ߣ ߒ ޔ ߓ ࠂ ߁ ߏ ⁁ ߩ ᒁ 㔚
ᭂ ࠍ ㄭ ઃ ߌ ߡ 㔚 ሶ ߐ ߖ ࠆ ᣇ ᴺ ࠍ 㐿 ⊒ ߒ ߚ ޕ ߎ ߩ ߚ ߩ 㔚 ሶ ㌂ ࠍ ⹜ ߒ ޔ ᚲ ᦸ ߩ 㔚 ሶ Ḯ ߆ ࠄ 㔚 ሶ ࡆ ࡓ ࠍ ᒁ ߈ ߔ ߎ ߣ ߦ ᚑ ഞ ߒ ߚ ޕ ᰴ ߦ ޔG a A s ㊎ ߿ 㕙 ߦ
ᩰ ሶ ࠍ ᚑ 㐳 ߒ ߚ ㊎ ߆ ࠄ ߒ ߚ 㔚 ሶ ࡆ ࡓ ߩ ࠛ ࡀ ࡞ ࠡ ࠍ ⹏ ଔ ߒ ࠃ ߁ ߣ ߒ ߚ ߇ ޔ
㕙 ㉄ ൻ ⤑ ߿ 㕙 Ḱ ߦ F e r m iḰ ߩ ࡇ ࡦ ⇐ ߥ ߤ ߩ ᓇ 㗀 ߢ ߁ ߹ ߊ ᷹ ࠇ ߥ ߇ ࠊ ߆ ࠅ ޔ 㕙 ᷡ ᵺ ൻ ޔ ࠕ ࠾ ࡞ ޔS ߦ ࠃ ࠆ 㕙 ࡄ ࠶ ࠪ ࡌ ࠪ ࡚ ࡦ ࠍ ⴕ ౣ ᕈ ߩ
N o . 1
ࠆ ࠛ ࡀ ࡞ ࠡ ಽ Ꮣ ߇ ᓧ ࠄ ࠇ ࠆ ࠃ ߁ ߦ ߥ ߞ ߚ ޕߎ ߩ ⚿ ᨐ ޔᦨ ዊ ߢ ඨ ୯ 0 . 2 e V ⒟ ᐲ ߩ න ⦡ ᕈ ߇ ⏕ ߐ ࠇ ߚ ޕ 㡆 ࠻ ࡦ ࡀ ࡞ ല ᨐ ߩ ⸽ ߣ ߒ ߡ ㊂ ሶ ᚭ ߩ ࠨ ࡉ ࡃ ࡦ ࠼
᭴ ㅧ ߦ ⌕ ⋡ ߒ ޔ ਇ ⚐ ‛ ࠍ ේ ሶ ጀ ࠼ ࡊ ߒ ߚ ࠛ ࡒ ࠶ ࠲ ߢ ߪ ⢋ ᭴ ㅧ ߇ ޔn - p ធ ว ࠍ ࠅ ࡃ ࡦ ࠼ 㑆 ࠻ ࡦ ࡀ ࡞ ࠍ ↪ ߒ ߚ ޔn ဳ Ǭ ࠼ ࡊ G a A s / p+- G a A s ᭴ ㅧ ࠛ ࡒ ࠶ ࠲ ߢ ߪ ࠃ ࠅ ⍎ ߦ ࠨ ࡉ ࡃ ࡦ ࠼ 㑆 㓒 ߦ ߞ ߚ ࠛ ࡀ ࡞ ࠡ 㑆 㓒 ߆ ࠄ ߩ 㔚 ሶ ࠛ ࡒ ࠶ ࠪ ࡚ ࡦ ߇ ⏕
ߐ ࠇ ߚ ޕ
╙ 㧟 ┨ ߪ ޔS E 㔚 ሶ Ḯ ߩ න ⦡ ൻ ߩ ⹜ ߺ ߣ ߒ ߡ ޔ ૐ 㑐 ᢙ ൻ ᢔ Ḯ ߩ ⎇ ⓥ ߢ ࠆ ޕ ߎ ߩ S E 㔚 ሶ Ḯ ߩ න ⦡ ᕈ ߪ ၮ ᧄ ⊛ ߦ ᾲ 㔚 ሶ ߢ ߹ ࠆ ߩ ߢ ޔ ᦨ ዊ ࠛ ࡀ ࡞ ࠡ
ߪ ᷷ ᐲ ߦ Ყ ߔ ࠆ ޕ ߚ ߛ ߒ ޔ ߘ ߩ ߹ ߹ േ ᷷ ᐲ ࠍ ਅ ߍ ࠆ ߣ 㜞 ࠛ ࡀ ࡞ ࠡ ߩ 㔚 ሶ ߩ ㊂ ߇ ᷫ ࠆ ߩ ߢ 㔚 ᵹ ߇ ᷫ ߞ ߡ ߒ ߹ ߃ ߥ ޕ ߎ ࠇ ࠍ ⸃ ߔ ࠆ ߦ ߪ 㑐 ᢙ ࠍ ਅ ߍ ࠆ ᔅ ⷐ ߇ ࠆ ޕ ᓥ ߞ ߡ ޔ ૐ ᷷ േ ߐ ߖ ࠆ ߚ ߦ ߪ ޔ ࠃ ࠅ 㑐 ᢙ ߩ ૐ ๆ ⌕ ᭴ ㅧ ࠍ ޔ ૐ ᷷ ߢ ᒻ ᚑ ߔ ࠆ ᧚ ᢱ ߇ ᔅ ⷐ ߣ ߥ ࠆ ޕ ߎ ߩ ᧚ ᢱ ߦ ᳞ ࠄ ࠇ ࠆ ߎ ߣ ߪ ޔ వ ߩ S E 㔚 ሶ Ḯ ߩ ▵ ߢ ⸃ ⺑ ߒ ߚ ࠃ ߁ ߦ ޔW 㕙 ߦ 㑐 ᢙ ߩ ૐ ๆ ⌕ ᭴ ㅧ ࠍ ᒻ ᚑ ߔ ࠆ ߎ ߣ ޔ ߮ ޔ ᢔ Ḯ ߆ ࠄ W 㕙 ࠍ ᢔ ߒ ߡ ㊎ వ ┵ ߹ ߢ ቯ ߦ ଏ ⛎ ߐ ࠇ ࠆ ߎ ߣ ߇ ᔅ ⷐ ߣ ߥ ࠆ ޕ ߎ ߩ ࠃ ߁ ߥ ᝄ ࠆ ⥰ ߪ ࠪ ࡒ ࡘ ࠪ ࡚ ࡦ ߢ ో ߡ ੍ ᗐ ߔ ࠆ ߎ ߣ ߪ ࿎ 㔍 ߥ ߚ ޔ ታ 㛎 ߢ ត ߔ ᔅ ⷐ ߇ ࠆ ޕ ߎ ߩ ߚ ߦ ࠆ ㊄ ዻ ర ⚛ M ߣ W ߇ O ߹ ߚ ߪ N ࠍ ߒ ߡ ࠆ ⒟ ᐲ ᄢ ߈ ߥ ࠳ ࠗ ࡐ ࡞ ࡕ ࡔ ࡦ ࠻ ߇ ੍ ᗐ ߐ ࠇ ࠆ ޔI V ᣖ ޔㆫ ⒖ ㊄ ዻ ޔ ࠕ ࡞ ࠞ 㘃 ߩ ㉄ ൻ ‛ ߮ ⓸ ൻ ‛ ߆ ࠄ ߃ ࠄ ߮ ޔ ߐ ߹ ߑ ߹ ߥ ᧚ ᢱ ࠍ ⹜ ߒ ߚ ߣ ߎ ࠈ ޔ S c - O / W ߣ ޔB a - O / W ߇ ߘ ࠇ ߙ ࠇ ߣ ߒ ߡ ᓧ ࠄ ࠇ ޔᓥ ᧪ ࠃ ࠅ ߽ ⁜ ࠛ ࡀ ࡞ ࠡ ಽ Ꮣ ߇ ᓧ ࠄ ࠇ ߡ ࠆ ޕ ታ 㓙 ߦ ߪ ቯ ᕈ ߩ ὐ ߢ Z r- O / W ࠍ ߃ ࠆ ߽ ߩ ߪ ᓧ ࠄ ࠇ ߥ ߆ ߞ ߚ ޕ
㔚 ሶ ߩ ࠛ ࡀ ࡞ ࠡ ಽ Ꮣ ࠍ ⚦ ߦ ࠆ ߣ ޔ3 ⒳ 㘃 ߩ 㔚 ሶ Ḯ ో ߡ ߦ ߅ ߡ ૐ 㔚
⇇ ᧦ ઙ ߢ ߪ S c h o t t k y 㔚 ሶ ߩ ࡕ ࠺ ࡞ ߣ ⇣ ߥ ࠅ ޔ ߽ 3 9 - 1 9 %⒟ ᐲ ⁜ ߎ ߣ ߇ ࠊ ߆ ߞ ߚ ޕZ r- O / W ߩ ႐ ว ޔᓥ ᧪ ࡕ ࠺ ࡞ ߢ ߪ 0 . 3 8 e V ߦ ኻ ߒ ߡ ታ ᷹ ߢ ߪ 0 . 2 3 e V ߣ ߥ ߞ ߡ ࠆ ޕ ታ 㛎 ⚿ ᨐ ࠍ ⺑ ߔ ࠆ ߚ ߦ ᓥ ᧪ ࠊ ࠇ ߡ ߈ ߚ ⥄ ↱ 㔚 ሶ ࡕ ࠺ ࡞ ߆ ࠄ ޔ ࠃ ࠅ ♖ ኒ ߥ ࡃ ࡦ ࠼ ᭴ ㅧ ࠍ ᤋ ߒ ߚ ല ⾰ ㊂ ㄭ ૃ ࠍ ข ࠅ ࠇ ߚ ࡕ ࠺ ࡞ ࠍ ⠨ ᩺ ߒ ߚ ޕ 㔚 ሶ ߔ ࠆ ႐ ว ߩ ⷺ ᐲ 㒢 ࠍ ⸳ ߌ ࠆ ߎ ߣ ߢ ታ 㛎 ⚿ ᨐ ࠍ ⦟ ߊ ⺑ ߢ ߈ ࠆ ߎ ߣ ߇ ࠊ ߆ ߞ ߚ ޕ
╙ ┨ ߪ ޔઁ ߩ ߟ ߩ 㔚 ሶ Ḯ ߣ ⇣ ߥ ࠅ ޔᐔ 㕙 ⁁ ߩ ) C # U 㕙 ߦ % U 1 ࠍ ๆ ⌕ ߐ ߖ ޔ ߎ ࠇ ߦ ബ శ ࠍ ߒ ߡ 㔚 ሶ ࠍ ߐ ߖ ࠆ ޔ⽶ ߩ 㔚 ሶ ⷫ ജ㧔 0 ' # 㧕ࠍ ↪ ߚ శ ബ
ᣇ ᑼ ࠍ ᬌ ⸛ ߒ ߚ ޕ
න ⦡ ᕈ ߩ ⹏ ଔ ߩ ߚ ߦ ޔ ) C # U ߣ 5 K ࠍ ข ࠅ ߍ ޔ 㕙 ߦ % U 1 ๆ ⌕ ߐ ߖ ߡ శ ബ ߢ ߐ ࠇ ࠆ 㔚 ሶ ✢ ߩ ࠛ ࡀ ࡞ ࠡ ಽ Ꮣ ࠍ ᷹ ቯ ߒ ߚ ޕ ߎ ߩ ⚿ ᨐ ޔ ) C # U ߪ 㑐 ᢙ ߩ ૐ ਅ ߩ ⒟ ᐲ ߢ ߆ ࠄ G 8 ߣ ޔ ߎ ࠇ ߹ ߢ ߦ ή න ⦡ ᧦ ઙ ߇ ࠆ ߎ ߣ ޔ ߹ ߚ ޔ G 8 ߩ ႐ ว ߪ ޔࠛ ࡀ ࡞ ࠡ ಽ Ꮣ ߪ ᾲ 㔚 ሶ ߩ ߽ ߩ ߣ ৻ ⥌ ߒ ޔߘ ߩ ᷷ ᐲ ߪ ͠
⒟ ᐲ ߣ ޔ ಄ ᾲ 㔚 ሶ 㧔 % Q N F 6 J G T O K Q P K E ' O K U U K Q P 㧕 ߣ ߴ ࠆ ߽ ߩ ߢ ߞ ߚ ޕ N o . 2
৻ ᣇ ޔ 5 K ߪ න ⦡ ᕈ ߇ ߣ ⁜ ᧦ ઙ ߇ ࠆ ߇ ޔ ᤨ 㑆 ߣ ߣ ߽ ߦ ࡇ ࠢ ᒻ ⁁ ߇ ᄌ ࠆ ޔ ㊂ ሶ ല ₸ ߇ ૐ ╬ ߩ 㗴 ߇ ࠆ ߎ ߣ ߇ ࠊ ߆ ߞ ߚ ޕ
ᰴ ߦ ޔ ߎ ߩ 㔚 ሶ Ḯ ࠍ 5 ' / ߩ 㔚 ሶ ㌂ ߦ ᔕ ↪ ߔ ࠆ ߚ ߩ ᬌ ⸛ ࠍ ⴕ ߞ ߚ ޕ ߹ ߕ ޔ ബ శ ࠍ ᦨ ዊ ߦ ⛉ ࠆ ߚ ߦ శ ࠺ ࠖ ࠬ ࠢ ᛛ ⴚ ࠍ ᔕ ↪ ߒ ޔ 㕙 Ꮕ ᱜ ߐ ࠇ ߚ 㕖 㕙 ࡦ
࠭ ࠍ ↪ ޔ ࠞ ࠰ ࠼ ߪ ) C # U ⭯ ⤑ ࠍ ࠟ ࠬ ߦ ធ ⌕ ߒ ߚ ߽ ߩ ࠍ ↪ ޔ 㔚 ሶ ߔ ࠆ ) C # U 㕙 ߩ ⵣ ߆ ࠄ ബ శ ࠍ ߔ ࠆ ߎ ߣ ߢ ޔ㓸 శ ࡦ ࠭ ࠍ ᦨ ㆡ ߥ ⟎ ߹ ߢ ㄭ ߠ ߌ ޔ
࿁ ᛬ 㒢 ⇇ ߩ Ǵ 㨙 ⒟ ᐲ ߦ ߢ ߈ ࠆ ߎ ߣ ࠍ ⏕ ߆ ߚ ޕ ߎ ࠇ ࠍ ↪ ߡ ⌀ ⓨ ታ 㛎 ⵝ ⟎ ਛ ߢ ) C # U ࡎ ࠻ ࠞ ࠰ ࠼ ߆ ࠄ ߩ 㔚 ሶ ✢ ࠍ ⸘ ᷹ ߒ ߚ ߣ ߎ ࠈ ޔ⁜ ▸ ࿐ ߦ ߒ ߡ ࠆ ߇ ࠊ ߆ ߞ ߚ ޕ ⸘ ▚ ᯏ ࠪ ࡒ ࡘ ࠪ ࡚ ࡦ ⚿ ᨐ ߣ Ყ セ ߒ ߡ ޔ ࿕ ߆ ࠄ 㔚 ሶ ߔ ࠆ 㓙 ߦ r 㧣 q એ ౝ ߦ 㓸 ਛ ߒ ߡ ࠆ ߇ ࠊ ߆ ߞ ߚ ޕ ߎ ߩ ⚿ ᨐ ߆ ࠄ ޔ ノ ᐲ ߇ 㜞 㔚 ሶ Ḯ ߇ ੍ ᗐ ߐ ࠇ ߚ ޕ
ᰴ ߦ ޔ ታ 㓙 ߦ 㔚 ሶ ㌂ ࠍ ⹜ ߒ ߡ ૐ ട ㅦ 5 ' / ߦ タ ߒ ޔ 5 ' / ࠍ ᓧ ߚ ߣ ߎ ࠈ ޔ ಽ
⸃ ⢻ Ǵ 㨙 ⒟ ᐲ ߣ ޔ੍ ᗐ ࠃ ࠅ ߽ ߪ ࠆ ߆ ߦ ૐ ߇ ࠊ ߆ ߞ ߚ ޕߎ ߩ ේ ࿃ ߣ ߒ ߡ ߪ ޔ 㔚 ሶ ߩ శ Ḯ ߇ ᦼ ᓙ ࠃ ࠅ ߪ ࠆ ߆ ߦ ᄢ ߈ ߊ ߥ ߞ ߡ ࠆ ߎ ߣ ޔ ⷺ ߽ ᐢ ߇ ߞ ߡ ࠆ ߇ ࠊ ߆ ߞ ߚ ޕ
⸥ 㗴 ὐ ߩ ኻ ╷ ߣ ߒ ߡ ޔ 㕙 ᷡ ᵺ ൻ ࠍ ᬌ ⸛ ߒ ޔ ේ ሶ ⁁ ᳓ ⚛ ࠢ ࠾ ࡦ ࠣ ࠍ ⴕ ߁ ߣ ޔ ㊂ ሶ ല ₸ ߇ 㧞 㧑 ⒟ ᐲ ߣ ᩴ ㆑ ߦ ᡷ ༀ ߐ ࠇ ࠆ ߎ ߣ ޔ 0 ' # ᵴ ᕈ ൻ ߢ ㅪ ⛯ ߒ ߡ 㔚 ᵹ ߢ ߈ ࠆ ᤨ 㑆 ߇ ᑧ ߮ ޔ ߐ ࠄ ߦ % U ߩ ➅ ࠅ ߒ ⫳ ⌕ ߢ ౣ ↢ ߔ ࠆ ߎ ߣ ޔ % U ⫳ ⌕ ㊂ ࠍ 㧥 / . ಽ ߦ Ⴧ ߿ ߔ ߣ ㅪ ⛯ ᤨ 㑆 ߇ ᤨ 㑆 㧔 ᷫ 㧕 ߹ ߢ િ ߮ ࠆ ߎ ߣ ࠍ ⏕ ߒ ߚ ޕ ߎ ߩ ේ ሶ ⁁ ᳓ ⚛ ࠢ ࠾ ࡦ ࠣ ᯏ ᭴ ࠍ ⹜ 㔚 ሶ ㌂ ߦ ⸳ ߌ ࠆ ߎ ߣ ߢ ޔ ಽ ⸃ ⢻ P O ߦ ᡷ ༀ ߒ ߚ ޕ ߎ ߩ ߣ ߈ ߩ శ Ḯ ࠨ ࠗ ࠭ ߪ 㧡 Ǵ 㨙 ⒟ ᐲ ߢ ߞ ߚ ޕ
0 ' # 㔚 ሶ Ḯ ߩ ノ ᐲ ഠ ൻ ේ ࿃ ࠍ ᬌ ⸛ ߔ ࠆ ߚ ߦ ޔ ⹏ ଔ ⵝ ⟎ ࠍ ⹜ ߒ ޔ శ Ḯ ࠨ ࠗ ࠭ ߣ 㔚 ሶ ࡆ ࡓ ᐢ ߇ ࠅ ࠍ ࠽ ࠗ ࡈ ࠛ ࠶ ࠫ ᴺ ߢ ᷹ ቯ ߒ ߚ ޕ 㕙 ᷡ ᵺ ൻ ᧦ ઙ ޔ ࠞ ࠰ ࠼ ߩ ਇ ⚐ ‛ Ớ ᐲ ᧦ ઙ ࠍ ᄌ ߃ ߚ ⚿ ᨐ ޔ ਇ ⚐ ‛ Ớ ᐲ ߇ 㜞 ႐ ว 㧔 Z E O 㧕ޔ శ Ḯ ࠨ ࠗ
࠭ Ǵ 㨙 ޔ ⷺ 㔚 ᵹ ኒ ᐲ O # U T 㧔 ട ㅦ M 8 㧕ޔ ᦨ 㜞 ߩ ノ ᐲ Z # U T E O ߇ ᓧ ࠄ ࠇ ߚ ޕ ߎ ߩ ୯ ߪ . C $ 㔚 ሶ Ḯ ߩ ߦ ߥ ߞ ߚ ߇ ޔ ⴕ ߩ 5 ' 㔚 ሶ Ḯ ࠃ ࠅ ᩴ ⒟ ᐲ ૐ ୯ ߢ ࠆ ޕ߹ ߚ ޔノ ᐲ ߩ ഠ ൻ ේ ࿃ ߪ ) C # U 㕙 ߩ ⓨ 㑆 㔚 ⩄ ല ᨐ ߢ ࠅ ޔ ߎ ࠇ ࠍ ⸃ ᶖ ߔ ࠆ ߚ ߦ ߪ ޔ ਇ ⚐ ‛ Ớ ᐲ ࠍ 㜞 ߡ 㕙 ⓨ ਲ ጀ ࠍ ⭯ ߊ ߔ ࠆ ߎ ߣ ޔ ߽ ߒ ߊ ߪ ޔ ബ శ ࠍ ࡄ ࡞ ࠬ ൻ ߒ ߡ ޔ 㕙 ߦ ߚ ߹ ߞ ߚ 㔚 ⩄ ࠍ ᛮ ߊ ᤨ 㑆 ࠍ ࠆ ߇ ല ߢ
ࠆ ߎ ߣ ߇ ࠄ ߆ ߣ ߥ ߞ ߚ ޕ
╙ ┨ ߪ ⸥ ਃ ⒳ 㘃 ߩ 㔚 ሶ Ḯ ᬌ ⸛ ߩ ⚿ ᨐ ࠍ ✚ ߒ ޔ ߐ ࠄ ߦ 㜞 ノ ᐲ න ⦡ 㔚 ሶ Ḯ ⎇
ⓥ ߩ ᓟ ߩ ⺖ 㗴 ߦ ߟ ߡ ㅀ ߴ ߚ ޕ ߎ ࠇ ࠄ ࠃ ࠅ ޔ ᓟ ߩ ᧚ ᢱ ⎇ ⓥ ߥ ߤ ߩ ㅴ ᱠ ߦ ࠃ ࠆ ᣂ ߒ 㔚 ሶ Ḯ ޔ 㔚 ሶ ㌂ ޔ 㔚 ሶ ✢ ᔕ ↪ ⵝ ⟎ ࠍ ታ ߔ ࠆ ߚ ߦ ⾗ ߔ ࠆ ߽ ߩ ߢ ࠆ ߣ ⚿
⺰ ߒ ߚ ޕ
N o . 3
㧺㨛
ᣧⒷ↰ᄢቇ ඳ჻㧔Ꮏቇ㧕 ቇ↳⺧ ⎇ⓥᬺ❣ᦠ
᳁ฬ ᄢ᎑ ථ ශ
㧔㧞㧜㧝㧟ᐕ 㧠 㧕
⒳㘃 㗴ฬޔ ⊒⊒ⴕឝタฬޔ ⊒⊒ⴕᐕޔ ㅪฬ⠪㧔↳⺧⠪㧕
⺰ ᢥ ٤㧦ਥ╩
Ԙ"Electron Beam Brightness from Negative-Electron-Affinity Photocathodes for Scanning Electron Microscopy Application", T. Ohshima and M. Kudo, Jpn. J. Appl. Phys. 43 (2004) 8335.
ԙ"NEA photocathode for SEM application", T. Ohshima, Microelec. Eng. 67.68 (2003) 951.
Ԛ"Study of Energy Distribution of Schottky Emitted Electrons and its Theoretical Analysis using Effective Mass Approximation", T. Ohshima and H. Nishiyama, Jpn. J. Appl. Phys. 42 (2003) 6564.
ԛ"Resonant tunneling electron beam source using GaAs/AlAs/GaAs field emitter", T. Ohshima, T. Mishima, M. Okamoto and K. Kuroda, Appl. Surf. Sci. 111 (1997) 170.
Ԝ"Proposal of Monochromatic Electron Beam Source Using Resonant Tunneling Effect", T.
Ohshima, M. Okamoto and K. Kuroda, Jpn. J. Appl. Phys. 34 (1995) L1390.
"Status of the high brightness polarized electron source using transmission photocathode", N.
Yamamoto, X.G. Jin, A. Mano, T. Ujihara, Y. Takeda, S. Okumi, T. Nakanishi, T. Yasue, T.
Koshikawa, T. Ohshima, T. Saka and H. Horinaka, J. Phys.: Conference Series, 298 (2011)
#012017.
"Real time magnetic imaging by spin-polarized low energy electron microscopy with highly spin-polarized and high brightness electron gun", M. Suzuki, M. Hashimoto, T. Yasue, T.
Koshikawa, Y. Nakagawa, T. Konomi, A. Mano, N. Yamamoto, M. Kuwahara, M. Yamamoto, S. Okumi, T. Nakanishi, X.G. Jin, T. Ujihara, Y. Takeda, T. Kohashi, T. Ohshima, T. Saka, T.
Kato, and H. Horinaka, Appl. Phys. Express, 3 (2010) #026601.
"High brightness and high polarization electron source using transmission photocathode with GaAs-GaAsP superlattice layers" N. Yamamoto, T. Nakanishi, A. Mano, Y. Nakagawa, S.
Okumi, M. Yamamoto, T. Konomi, X. Jin, T. Ujihara, Y. Takeda, T. Ohshima, T. Saka, T.
Kato, H. Horinaka, T. Yasue, T. Koshikawa and M. Kuwahara, , J. Appl. Phys. 103 (2008) 064905.
“Laser Focusing System for High Brightness Polarized Electron Source for SPLEEM”, A. Mano, N. Yamamoto, K. Tamagaki, S. Okumi, M. Yamamoto, M. Kuwahara, R. Sakai, T. Morino, A.
Utsu, T. Nakanishi, and T. Ohshima, AIP Conference Proceedings. 915 (2007) 1081.
“Miniaturized electron-gun for a High-Resolution scanning electron microscope using non-evaporable getter pump”, S. Katagiri and T. Ohshima, Microelec. Eng. 83 (2006) 1058.
ޟ࡚ࠪ࠶࠻ࠠ㔚ሶḮߦࠃࠆ㔚ሶࡆࡓߩ⁜ࠛࡀ࡞ࠡൻޠ㧘ጊ⧷ ᄢ᎑ථ ຠ↰ඳ ਯ㧘ᔕ↪‛ℂ 71 (2002) 438.
“Monochromatic Electron Emitters using Heavy-Fermion Materials”, H. Nishiyama, T. Ohshima and M.Okamoto, Jpn. J. Appl. Phys. 38 (1999) 6066.
㧺㨛
ᣧⒷ↰ᄢቇ ඳ჻㧔Ꮏቇ㧕 ቇ↳⺧ ⎇ⓥᬺ❣ᦠ
⒳㘃 㗴ฬޔ ⊒⊒ⴕឝタฬޔ ⊒⊒ⴕᐕޔ ㅪฬ⠪㧔↳⺧⠪㧕
⻠Ṷ
“Highly bright and monochromatic electron sources for scanning electron microscopy” T.
Ohshima and T. Ogashiwa, 53rd International Field Emission symposium, (2012/05/21-25)
“High Brightness and Highly Polarized Electron Beam for Real-time Measurement in SPLEEM”, M. Kuwahara, A. Mano, Y. Nakagawa, S. Okumi, T. Nakanishi, M. Suzuki, M. Hashimoto, T.
Yasue, T. Koshikawa, X.G. Jin, N. Yamamoto, T. Ujihara, Y. Takeda, M. Yamamoto, T.
Ohshima, T. Kohashi, T. Saka, T. Kato and H. Horinaka, 7th Int. Symp. on Atomic Level Characterizations for New Materials and Devices (ALC'09), (2009/12/06-11)
SPLEEM㑐ㅪߩ⻠Ṷઁ㧡ઙ
ޟ࡚ࠪ࠶࠻ࠠ㔚ሶߩࠛࡀ࡞ࠡಽᏓߣല⾰㊂ㄭૃࡕ࠺࡞ޠ, ᄢ᎑ ථ, ጊ ⧷,
╙3࿁⩄㔚☸ሶశቇࠪࡦࡐࠫ࠙ࡓ, (2003/09/19)
ޟNEAࡎ࠻ࠞ࠰࠼ߩノᐲߩᬌ⸛ޠ, ᄢ᎑ ථ, Ꮏ⮮ ⌀, ╙㧡㧜࿁ᔕ↪‛ℂቇ㑐ଥㅪว⻠
Ṷળ, (2003/03/27)
“NEA photocathode for SEM application”, T. Ohshima, 28th Micro- and Nano-Engineering (MNE2002), (2002/09/16-20)
ޟ㧺㧱㧭ࡎ࠻ࠞ࠰࠼ߩSEMᔕ↪ߩᬌ⸛ޠ, ᄢ᎑ ථ, ╙㧠㧥࿁ᔕ↪‛ℂቇ㑐ଥㅪว⻠Ṷ ળ, (2002/03/27)
ޟశബᣇᑼߦࠃࠆᭂන⦡㔚ሶḮߩᬌ⸛ޠ, ᄢ᎑ ථ, ᣣᧄቇⴚᝄ⥝ળ ⩄㔚☸ሶࡆࡓߩ Ꮏᬺ߳ߩᔕ↪╙132ᆔຬળ ╙㧝㧠㧥࿁⎇ⓥળ, (2000/05/11)
ޟ㧿㨕ࠍ↪ߚ㧺㧱㧭ࡎ࠻ࠞ࠰࠼ߩ㔚ሶߩోࠛࡀ࡞ࠡಽᏓޠ, ᄢ᎑ ථ,╙㧠㧣࿁
ᔕ↪‛ℂቇ㑐ଥㅪว⻠Ṷળ, (2000/03/28)
ޟࠛࡀ࡞ࠡߩ⁜࡚ࠪ࠶࠻ࠠ㔚ሶḮߩ⎇ⓥޠ, ጊ ⧷, ᄢ᎑ ථ, ຠ↰ ඳਯ,ᣣ ᧄ㔚ሶ㗼ᓸ㏜ቇળ╙㧠㧠࿁ࠪࡦࡐࠫ࠙ࡓ, (1999/11/17)
ޟ㧺㧱㧭ࡎ࠻ࠞ࠰࠼ߩ㔚ሶߩోࠛࡀ࡞ࠡಽᏓޠ, ᄢ᎑ ථ, ╙㧢㧜࿁ᔕ↪‛ℂቇ
⇇ቇⴚ⻠Ṷળ, (1999/09/01)
ޟ㧔㧮㨍㧘㧿㨞㧘㧯㨍㧕㧛㧻㧛㨃 ࡚ࠪ࠶࠻ࠠ㔚ሶḮߩ㔚ሶ․ᕈޠ, ጊ ⧷, ᄢ
᎑ ථ, ╙㧠㧢࿁ᔕ↪‛ℂቇ㑐ଥㅪว⻠Ṷળ, (1999/03/28)
“Tungsten Schottky Emitters with Reservoirs of Metal Oxide or Nitride”, H. Nishiyama and T.
Ohshima, 2nd. International Vacuum Electron Sources Conference (IVESC ‘98), (1998/07/07-10)
“Resonant Tunneling Electron Beam Source Using GaAs/AlAs/GaAs Field Emitter”, T. Ohshima, T. Mishima and M. Okamoto, International Vacuum Electron Sources Conference (IVESC-96) (1996/07/01-04)
ޟǬ࠼ࡊ㨚㧗㧳㨍㧭㨟㧛㧼㧗㧳㨍㧭㨟ࡈࠖ࡞࠼ࠛࡒ࠶࠲߆ࠄߩ㔚ሶޠ, ᄢ
᎑ ථ, ਃፉ ⟵, ጊ ⧷, ╙㧠㧟࿁ ᔕ↪‛ℂቇ㑐ଥㅪว⻠Ṷળ, (1996/03/26)
㧺㨛
ᣧⒷ↰ᄢቇ ඳ჻㧔Ꮏቇ㧕 ቇ↳⺧ ⎇ⓥᬺ❣ᦠ
⒳㘃 㗴ฬޔ ⊒⊒ⴕឝタฬޔ ⊒⊒ⴕᐕޔ ㅪฬ⠪㧔↳⺧⠪㧕
ߘߩઁ
⺰ᢥ ߘߩઁ
․ ⸵ 㗿
ޟ㧳㨍㧭㨟ࡈࠖ࡞࠼ࠛࡒ࠶࠲ߩ㔚ሶ․ᕈޠ, ᄢ᎑ ථ, ਃፉ ⟵, ጟᧄ ㇌, ᣣᧄ ቇ ⴚ ᝄ ⥝ ળ ⌀ ⓨ ࡑ ࠗ ࠢ ࡠ ࠛ ࠢ ࠻ ࡠ ࠾ ࠢ ࠬ ╙ 㧝 㧡 㧤 ᆔ ຬ ળ ╙ 㧝 㧝 ࿁ ⎇ ⓥ ળ, (1995/12/19)
ޟSࡄ࠶ࠪࡌ࡚ࠪࡦಣℂGaAsࡈࠖ࡞࠼ࠛࡒ࠶࠲ߩ㔚ሶ․ᕈޠᄢ᎑ථ, ਃፉ ⟵, 㤥↰ ൎᐢ, ╙㧡㧢࿁ᔕ↪‛ℂቇળቇⴚ⻠Ṷળ, (1995/08/26)
ޟGaAs/AlAsᩰሶⵍⷒࠍᜬߟGaAsࡈࠖ࡞࠼ࠛࡒ࠶࠲߆ࠄߩ㔚ሶޠᄢ᎑ථ, ਃፉ
⟵, 㤥↰ ൎᐢ, ╙42࿁ᔕ↪‛ℂቇ㑐ଥㅪว⻠Ṷળ, (1995/03/26-29)
ޟ㡆࠻ࡦࡀ࡞ലᨐࠍ↪ߚන⦡㔚ሶ✢Ḯߩឭ᩺ޠ, ᄢ᎑ ථ, ጟᧄ ㇌, 㤥↰ ൎᐢ, ╙ 㧡㧡࿁ᔕ↪‛ℂቇળቇⴚ⻠Ṷળ, (1994/09/19-22)
"Electron Detection Performance of Diamond Avalanche Diode", H. Morishita, T.
Ohshima, M. Hatano, Y. Iwakaji, O. Maida and T. Ito, , J. Vac. Sci. Technol. B, 228 (2010) 1169.
"Stabilization of a tungsten <310> cold field emitter" K. Kasuya, S. Katagiri, T. Ohshima and S.
Kokubo, J. Vac. Sci. Technol. B, 28 (2010) L55.
“Alignment of CS2 in intense nano-second laser fields probed by pulsed gas electron diffraction”, K. Hoshina, K. Yamanouchi, T. Ohshima, Y. Ose, and H. Todokoro, J. Chem. Phys. 118, (2003) 6211.
“Direct observation of molecular alignment in an intense laser field by pulsed gas electron diffraction II: analysis of anisotropic diffraction image”, K. Hoshina, K. Yamanouchi, T.
Ohshima, Y. Ose, and H. Todokoro, Chem. Phys. Lett. 353 (2002) 33.
"High speed Si PBT with buried single crystal silicide electrode by MBE", T. Ohshima, N.
Nakamura, K. Nakagawa, K. Yamaguchi and M. Miyao, IEDM Technical Digest, (1991) 33.
"Self-aligned NiSi2 electrode fabrication by MBE and its application to etched-groove Permeable Base Transistor (PBT)", T. Ohshima, K. Nakagawa, N. Nakamura and Y. Shiraki, J. Crystal Growth 95 (1988) 490.
․㗿 ޟశബ㔚ሶ✢Ḯ߅ࠃ߮㔚ሶ✢ᔕ↪ⵝ⟎ޠޔᄢ᎑ථޔຠ↰ඳਯޔᚭᚲ⑲
↵ޔේᖗ
శബ㔚ሶḮߩ㑐ㅪ․⸵ઁ ઙ
․㗿ᐔ ޟᾲᢔ⛎ဳ㔚ሶḮ㔚ሶ✢⊒↢ᣇᴺ߅ࠃ߮㔚ሶ✢ᔕ↪ⵝ⟎ޠޔᄢ᎑ථޔ
ጊ⧷
න⦡ൻ 5' 㔚ሶḮߩ㑐ㅪ․⸵ઁ ઙ
․㗿ᐔ ޟ㔚ሶ✢Ḯ߮ߘࠇࠍ↪ߚ㔚ሶ✢ᔕ↪ⵝ⟎ߣ㔚ሶⵝ⟎ޠޔᄢ᎑ථޔ㤥
↰ൎᐢޔశᑝޔਛᎹᷡޔਃፉ⟵ޔᲧ⇐㑆ஜਯޔጟᧄ㇌ޔችየᱜା
㡆࠻ࡦࡀ࡞න⦡㔚ሶḮߩ㑐ㅪ․⸵ઁ ઙ
