㔚ሶ㗼ᓸ㏜↪㜞ノᐲන⦡㔚ሶḮߩ⎇ⓥ
Studies of Highly-Bright and
Monochromatic Electron Sources for Electron Microscopy
2013 ᐕ 7
ᣧⒷ↰ᄢቇᄢቇ㒮 వㅴℂᎿቇ⎇ⓥ⑼
ᄢ᎑ ථ
Takashi OHSHIMA
╙㧝┨ ✜ ⺰ xxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxx 㧝㧚㧝 ✜⸒ xxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxx 㧝㧚㧞 ⎇ⓥߩᱧผxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxx 㧝㧚㧟 㧿㧱㧹ߩಽ⸃⢻xxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxx 㧝㧚㧠 ታ↪ߣߥߞߡࠆ㔚ሶḮxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxx 㧝㧚㧠㧚㧝 %(' 㔚ሶḮ xxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxx 㧝㧚㧠㧚㧞 ᾲ㔚ሶxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxx 㧝㧚㧠㧚㧟 5' 㔚ሶḮ xxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxx 㧝㧚㧡 ᧄ⺰ᢥߢᛒ߁㔚ሶḮxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxx 㧝㧚㧢 ߘߩઁ⎇ⓥਛߩ㜞ノᐲ㔚ሶḮxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxx
╙㧝┨ߩෳ⠨ᢥ₂ xxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxx
╙㧞┨ 㔚⇇㔚ሶḮߩ㡆࠻ࡦࡀ࡞ߦࠃࠆන⦡ൻxxxxxxxxxxxxxxxxxxxxxxxx 㧞㧚㧝 ✜⸒ xxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxx 㧞㧚㧞 㡆࠻ࡦࡀ࡞㔚ሶߦࠃࠆන⦡㔚ሶḮߩឭ᩺xxxxxxxxxxxxxxxxxxxxxx 㧞㧚㧞㧚㧝 㡆࠻ࡦࡀ࡞㔚ሶߩේℂxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxx 㧞㧚㧞㧚㧞 ᣇᑼߩᬌ⸛xxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxx 㧞㧚㧞㧚㧟 㡆࠻ࡦࡀ࡞ലᨐߦࠃࠆ㔚ሶ․ᕈߩ੍᷹ xxxxxxxxxxxxxxxxxx 㧞㧚㧞㧚㧠 )C#U ߆ࠄߩ㔚ሶߩ⸘▚ xxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxx 㧞㧚㧞㧚㧡 ⚿⺰xxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxx 㧞㧚㧟 )C#U ߆ࠄߩ㔚⇇ታ㛎 xxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxx 㧞㧚㧟㧚㧝 ࠛࡒ࠶࠲ᒻᚑᣇᴺxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxx 㧞㧚㧟㧚㧞 㔚ሶታ㛎xxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxx 㧞㧚㧟㧚㧟 ⚿⺰xxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxx 㧞㧚㧠 ᩰሶ߆ࠄߩ㔚ሶߩࠛࡀ࡞ࠡಽᏓ᷹ቯxxxxxxxxxxxxxxxxxxxxxxxx 㧞㧚㧠㧚㧝 ࡊࡠࡉ㔚ᵹขࠅߒⵝ⟎xxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxx 㧞㧚㧠㧚㧞 ࠛࡒ࠶࠲ߩࠢ࠾ࡦࠣߣ㔚ሶ✢ᒁ߈ߒxxxxxxxxxxxxxxxxxxxx 㧞㧚㧠㧚㧟 ࠛࡀ࡞ࠡಽᏓ᷹ቯ⚿ᨐxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxx 㧞㧚㧠㧚㧠 ⚿⺰xxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxx 㧞㧚㧡 )C#U㕙ߩ 5 ࡄ࠶ࠪࡌ࡚ࠪࡦߦࠃࠆ㔚ሶ․ᕈ xxxxxxxxxxxxxxxxx 㧞㧚㧡㧚㧝 5 ߦࠃࠆ㕙ಣℂ xxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxx 㧞㧚㧡㧚㧞 ࠛࡒ࠶࡚ࠪࡦታ㛎xxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxx 㧞㧚㧡㧚㧟 ࠛࡀ࡞ࠡಽᏓ᷹ቯ⚿ᨐxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxx 㧞㧚㧡㧚㧠 ⚿⺰xxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxx 㧞㧚㧢 ࡃࡦ࠼㑆࠻ࡦࡀ࡞ലᨐߦࠃࠆ PR ធว )C#U ࠛࡒ࠶࠲ xxxxxxxxxxxxxxxxx
㧞㧚㧢㧚㧟 ࡇࠢಽ㔌ߣ⠨ኤxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxx 㧞㧚㧢㧚㧠 ⚿⺰xxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxx 㧞㧚㧣 ⚿ ⸒ xxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxx
╙㧞┨ߩෳ⠨ᢥ₂ xxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxx
╙㧟┨ 5' 㔚ሶḮߩૐ㑐ᢙൻߦࠃࠆන⦡ൻ xxxxxxxxxxxxxxxxxxxxxxxxxxxx 㧟㧚㧝 ✜ ⸒ xxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxx 㧟㧚㧞 ේℂ xxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxx 㧟㧚㧞㧚㧝 ᭴ㅧxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxx 㧟㧚㧞㧚㧞 ࠛࡀ࡞ࠡxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxx 㧟㧚㧞㧚㧞 㑐ᢙxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxx 㧟㧚㧟 න⦡ൻߩታ㛎⊛ᬌ⸛xxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxx 㧟㧚㧠 ࠛࡀ࡞ࠡಽᏓߩ⚦ߥ᷹ቯxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxx 㧟㧚㧠㧚㧝 㜞ಽ⸃⢻ࠕ࠽ࠗࠩxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxx 㧟㧚㧠㧚㧞 ࠛࡀ࡞ࠡಽᏓxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxx 㧟㧚㧠㧚㧟 ⚿⺰xxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxx 㧟㧚㧡 ࠛࡀ࡞ࠡಽᏓߩᬌ⸛xxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxx 㧟㧚㧡㧚㧝 ⥄↱㔚ሶࡕ࠺࡞xxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxx 㧟㧚㧡㧚㧞 ࡕ࠺࡞ߩᬌ⸛xxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxx 㧟㧚㧡㧚㧟 ല⾰㊂ߩ㆑ߦࠃࠆ㔚ሶߩㅘㆊ₸xxxxxxxxxxxxxxxxxxxxxxxxx 㧟㧚㧡㧚㧠 ല⾰㊂ㄭૃߦࠃࠆන⚐ߥ㔚ሶࡕ࠺࡞xxxxxxxxxxxxxxxxxxx 㧟㧚㧡㧚㧡 ᷹ቯ୯ߣߩᲧセᬌ⸛xxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxx 㧟㧚㧡㧚㧢 㔚ሶߩࠃࠅ♖ኒߥࡕ࠺࡞ߩᬌ⸛xxxxxxxxxxxxxxxxxxxxxxxxx 㧟㧚㧡㧚㧣 ⚿⺰xxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxx 㧟㧚㧢 ⚿⸒ xxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxx
╙㧟┨ߩෳ⠨ᢥ₂ xxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxx
╙㧠┨ శബ㔚ሶḮxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxx 㧠㧚㧝 ✜ ⸒ xxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxx 㧠㧚㧞 0'# 㔚ሶḮߩේℂ xxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxx 㧠㧚㧞㧚㧝 㔚ሶⷫജxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxx 㧠㧚㧞㧚㧞 න⦡ᕈxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxx 㧠㧚㧞㧚㧟 㔚ሶߩⷺxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxx 㧠㧚㧞㧚㧠 ⓨ㑆㔚⩄ലᨐxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxx 㧠㧚㧟 න⦡ᕈߩၮ␆ᬌ⸛xxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxx 㧠㧚㧟㧚㧝 ታ㛎ᣇᴺxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxx
㧠㧚㧟㧚㧠 ⚿⺰xxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxx 㧠㧚㧠 0'# 㔚ሶḮߩࡐࠗࡦ࠻࠰ࠬൻ xxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxx 㧠㧚㧠㧚㧝 ബశቇ♽ߣࠞ࠰࠼ᣇᑼxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxx 㧠㧚㧠㧚㧞 ࡐࠗࡦ࠻࠰ࠬൻߦࠃࠆ㔚ሶታ㛎xxxxxxxxxxxxxxxxxxxxxxx 㧠㧚㧠㧚㧟 㔚ሶ㌂ߩశቇ♽xxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxx 㧠㧚㧠㧚㧠 ⚿⺰xxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxx 㧠㧚㧡 0'# 㔚ሶ㌂ߩ⹜ߣ 5'/ ߳ߩタ xxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxx 㧠㧚㧡㧚㧝 ᭴ᚑxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxx 㧠㧚㧡㧚㧞 ᷹ቯ⚿ᨐߣ⠨ኤxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxx 㧠㧚㧡㧚㧟 ⚿⺰xxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxx 㧠㧚㧢 㕙ࠢ࠾ࡦࠣᣇᴺߩᬌ⸛xxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxx 㧠㧚㧢㧚㧝 ࡎ࠻ࠞ࠰࠼ߩ㕙ಣℂxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxx 㧠㧚㧢㧚㧞 ේሶ⁁᳓⚛ࠢ࠾ࡦࠣxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxx 㧠㧚㧢㧚㧟 ታ㛎ᣇᴺxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxx 㧠㧚㧢㧚㧠 ടᾲࠢ࠾ࡦࠣ⚿ᨐxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxx 㧠㧚㧢㧚㧡 ේሶ⁁᳓⚛ࠢ࠾ࡦࠣ⚿ᨐxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxx 㧠㧚㧢㧚㧢 5'/ ㆡ↪⚿ᨐ xxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxx 㧠㧚㧢㧚㧣 ⚿⺰xxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxx 㧠㧚㧣 0'# ࡎ࠻ࠞ࠰࠼ߩノᐲߩᬌ⸛ xxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxx 㧠㧚㧣㧚㧝 ታ㛎ᣇᴺxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxx 㧠㧚㧣㧚㧞 ノᐲߩ⹏ଔ⚿ᨐxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxx 㧠㧚㧣㧚㧟 㔚ሶࡆࡓᐢ߇ࠅߩ⹏ଔ⚿ᨐxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxx 㧠㧚㧣㧚㧠 ⓨ㑆㔚⩄ലᨐߩ⹏ଔ⚿ᨐxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxx 㧠㧚㧣㧚㧡 ⠨ኤxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxx 㧠㧚㧣㧚㧡 ⚿⺰xxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxx 㧠㧚㧤 ⚿⸒ xxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxx
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╙㧡┨ ✚ว⚿⺰ xxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxx 㧡㧚㧝 ᧄ⺰ᢥߩ⚿ᨐⷐxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxx 㧡㧚㧞 ᓟߩ⺖㗴xxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxx 㧡㧚㧟 ✚ว⚿⺰ xxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxx
╙㧡┨ߩෳ⠨ᢥ₂ xxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxx
⻢ㄉ
ᬺ❣ࠬ࠻
╙㧝┨ ✜ ⺰ 㩷
㧝㧚㧝 ✜⸒
㔚ሶ㗼ᓸ㏜㧔Electron Microscope㧕ߪ㔚ሶࡆࡓࠍ↪ࠆߎߣߢޔశቇ㗼ᓸ㏜ߢ ߪ߃ߥዊߐߥ‛ߩⷰኤ߇น⢻ߢࠅޔߐ߹ߑ߹ߥಽ㊁ߩ⎇ⓥ㐿⊒ㅧ႐ߥ ߤᄙߊߩ႐ߢ↪ߐࠇޔ␠ળࠍᡰ߃ࠆၮ⋚ᛛⴚߩ৻ߟߣߥߞߡࠆޕ⇇ߩ㔚ሶ㗼ᓸ
㏜ߩᏒ႐ߪ⚻ᷣߩᅢਇᴫߦࠃࠅᵄ߇ࠆ߇߅߅ߨᐕޘჇടߒޔ2017ᐕߦߪ43ం࠼
࡞⒟ᐲߩᏒ႐߇ㄟ߹ࠇߡࠆ[1]ޕߎߩਛߢޔᩏဳ㔚ሶ㗼ᓸ㏜㧔SEM: Scanning Electron Microscope㧕ߪޔඨዉߣߘߩ㑐ㅪ᧚ᢱޔᶧ᥏ޔ㋕㍑ޔ㊄ዻޔ⥄േゞޔᯏ
᪾ޔൻቇޔ⮎ޔൻ♆ຠޔ㔚ሶㇱຠޔේ᧚ᢱߥߤߩᐢಽ㊁ߢ↪ߐࠇߡ߅ࠅޔᦨᣂ ߢߪ࠽ࡁ࠹ࠢࡁࡠࠫಽ㊁ߦ߅ߌࠆ⎇ⓥ㐿⊒ޔ᧚ᢱᬌ⸽ޔ⹏ଔޔ㓚⸃ᨆޔ߅ࠃ߮ຠ
⾰▤ℂߣߞߚᐢ㔛ⷐߦ╵߃ߡࠆޕ․ߦޔᓸዊߥޔ࠽ࡁࡔ࠻࡞ࠨࠗ࠭ߢޔ⭯
ޔუࠇᤃ⹜ᢱޔߚߣ߃߫ඨዉ࠺ࡃࠗࠬ߿ࡃࠗࠝ⹜ᢱޔ㜞ಽሶޔ࠽ࡁ᧚ᢱߩⷰኤ ะߌߦߪޔ㜞ಽ⸃⢻ߢ߆ߟ㔚ሶ✢ߩࠛࡀ࡞ࠡࠍૐߊޔᢙkeV߆ࠄ1keVએਅߦ ᛥ߃ߚޔࠊࠁࠆૐടㅦSEMߩ࠾࠭߇㜞߹ߞߡࠆޕࠛࡀ࡞ࠡ߇ዊߐߣ 㔚ሶ✢ߦࠃࠆ⹜ᢱ߳ߩ࠳ࡔࠫ߇ᛥ߃ࠄࠇࠆߎߣޔ߹ߚޔ⛘✼᧚ᢱߦኻߒߡᏪ㔚ࠍ ᛥߔࠆ᧦ઙ߇ૐടㅦၞߦࠆߎߣ߇ਥߥὐߢࠆ(࿑1.1ෳᾖ)ޕߎߩ⋡⊛ߢࠊ ࠇࠆ㔚ሶḮߪޔ㜞ノᐲߢ߆ߟ㔚ሶࡆࡓਛߩ㔚ሶߩࠛࡀ࡞ࠡ߇ߘࠈߞߡࠆޔߔߥ ࠊߜޔන⦡ߩ㔚ሶḮߢࠆޕ╩⠪ߪޔૐടㅦSEMߩಽ⸃⢻ะߩߚߩ㎛ߣߒߡޔ න⦡㔚ሶḮߩ⎇ⓥࠍⴕߞߡ߈ߚޕ
ੑᰴ㔚ሶ
㔚ሶ
䉣䊈䊦䉩䊷
Yield䋱
En 100 nm
5 kV 1 kV
Si
㔚ሶ
(a) (b)
࿑䋱䋮䋱㩷 ૐടㅦ㔚ሶ䈱․ᓽ㩷
㩿㪸㪀㩷 ੑᰴ㔚ሶ⊒↢㊂䋨㪰㫀㪼㫃㪻䋩䈫䉣䊈䊦䉩䊷䈱㑐ଥ䇮䉣䊈䊦䉩䊷㪜㫅 䈪䈲䉎㔚ሶ䈫䉎㔚ሶ㊂䈏ห䈛䈮 䈭䉎䈢䉄䇮Ꮺ㔚䈏ㅴ䉁䈭䈇䇯㪜㫅 䈲᧚ᢱ䈮䉋䉍⇣䈭䉎䈏䇮㪈㩷㫂㪭 ઃㄭ䈮䈅䉎㩷
㩿㪹㪀㩷 ࿕㩿㪪㫀㪀ਛ䈪䈱㔚ሶ䈱゠䈱Ყセ㩿㪤㫆㫅㫋㪼㪄㪚㪸㫉㫃㫆 ⸘▚㪀䇮䋱㫂㪭 䈲 㪈㪇㫅㫄 એਅ
ᧄ⺰ᢥߢߪޔᓥ᧪߆ࠄࠆޔ㔚⇇㧔CFE: Cold Field Emission㧕㔚ሶḮޔ߮ޔ Schottky㧔SE: Schottky Emission㧕㔚ሶḮࠍࠃࠅන⦡ൻߔࠆߚߩᬌ⸛ࠍⴕߞ ߚޕߐࠄߦޔߎࠇ߹ߢSEMߦㆡ↪ߐࠇߥ߆ߞߚޔశബᣇᑼ㔚ሶḮࠍᔕ↪ߔࠆߚ
ߦޔߎߩ㔚ሶḮߩන⦡ᕈߩ⹏ଔߣ㜞ノᐲൻߩᬌ⸛ࠍⴕߞߚޕᧄ⺰ಽߪޔߎࠇࠄ3⒳㘃 ߩ㔚ሶḮߩ᭴ᗐޔ⹜ޔ⹏ଔ⸃ᨆ⚿ᨐߥߤࠍ߹ߣߚ߽ߩߢࠆޕ
㧝㧚㧞 ⎇ⓥߩᱧผ
㔚ሶ㗼ᓸ㏜ߩᱧผߪޔ1931ᐕMax Knoll ߣ Ernst Ruska ߦࠃࠆㅘㆊဳ㔚ሶ㗼ᓸ
㏜㧔TEM: Transmission Electron Microscope㧕ߩ⊒ߦᆎ߹ࠆ[2]ޕၮᧄ⊛ߦశቇ㗼 ᓸ㏜ࠍ㔚ሶߦ⟎߈឵߃ߚ᭴ㅧߢࠅ㧔࿑1.2 a㧕ޔశḮߢࠆ㔚ሶḮ߆ࠄขࠅߒߚ㔚 ሶࡆࡓࠍ⹜ᢱߩⷰኤ㗔ၞߦᾖߒޔߎߎ߆ࠄㅘㆊߒߡ߈ߚ㔚ሶ✢ࠍࡦ࠭ࠍ↪ߚ
ᄢ⚿♽ߦࠃߞߡ㓸᧤ߒޔⰯశ᧼ߦ⹜ᢱߩᄢࠍᓧࠆ߽ߩߢࠆޕߢߪᢙ⊖
ਁ߽ߩᄢ߇น⢻ߢࠅޔ⚿᥏ߩᩰሶ߿ᩰሶᰳ㒱߽นⷞൻߐࠇߡࠆޕ⹜ᢱߪ㔚 ሶ߇ㅘㆊߢ߈ࠆ⒟ᐲߦ⭯߽ߩࠍ↪ࠆᔅⷐ߇ࠆޕ৻ᣇޔᩏဳ㔚ሶ㗼ᓸ㏜㧔SEM:
Scanning Electron Microscope㧕ߪޔశḮ߆ࠄߩ㔚ሶࡆࡓࠍ᧤ߐߖߡ⹜ᢱ㕙ߩ
৻ὐߦᾖߒޔߎߩ⟎ࠍᩏߒߡ⊒↢ߔࠆੑᰴ㔚ሶߩᒝᐲࠍࠆ߽ߩߢޔశḮߣ⹜
ᢱߩ㑆ߦ❗ዊ⚿♽߇ࠆߎߣ߇৻ߟߩ․ᓽߢࠆޕᱧผ⊛ߦߪޔKnollࠄߦࠃࠅ 1934ᐕ㗃ޔ㔚ሶࡦ࠭ࠍ↪ߡὶὐࠍᬌེ㕙ߦ⚿߮ޔࠦࠗ࡞ࠍ↪ߚ⏛⇇ߢ
ᩏߒޔߎߩାภࠍࡉ࠙ࡦ▤ߢᩏାภߣหᦼߐߖߡๆ㔚ᵹߦࠃࠆࠍ␜ߔࠆ ߣ߁ේℂᬌ⸽߇ߥߐࠇߡࠆ߇ޔታ↪ߦߪ⒟㆙߆ߞߚޕ
Winnelt Anode Filament (Cathode)
Ⱟశ䉴䉪䊥䊷䊮 ᾖ♽䊧䊮䉵
ᄢ䊧䊮䉵 Sample
䋭ᢙ10䌫䌾1000kV
Anode
Filament
(Cathode) -10kV Lens L
Lens M
Ⱟశ᧼ Amp.
Filter
䍪䍅䍖䍚䍮䍶
⸥㍳ⵝ⟎
Sample
Winnelt
శ㔚▤
(a) TEM (b) ೋᦼ䈱SEM
࿑䋱䋮䋲 㔚ሶ㗼ᓸ㏜䈱᭴ᚑ
ߘߩᓟޔ㔚ሶࡦ࠭ߦࠃࠆ❗ዊశቇ♽ߢ㔚ሶࡆࡓࠍࠨࡉࡒࠢࡠࡦ߹ߢ⛉ࠇࠆࠃ߁ ߦߥࠅޔߐࠄߦᓸᒙߥੑᰴ㔚ሶࠍ৻ᐲⰯశ᧼ߦᒰߡߡశߦᄌ឵ߒޔߎߩశࠍశ㔚ሶ
Ⴧ▤ߢ᷹ቯߔࠆߣ߁㜞ㅦߢ㜞ᗵᐲߥᬌᚻᴺ[4]߇㐿⊒ߐࠇߡ߈ߚޕߎࠇࠍᔕ↪ߒߚ
‛߇SEMߩᆎ߹ࠅߣ⸒ࠊࠇޔᮨᑼ࿑ࠍ࿑1.2 bߦ␜ߔ[3]ޕ1942ᐕߦRCAߦߡ Zworykinࠄߦࠃࠅᦨೋߦ⹜ߺࠄࠇߚߣߐࠇޔ㔚ሶḮߪਅߦࠅޔ᧤ߒߚ㔚ሶࡆ
ࡓߩవߩ⹜ᢱࠍേ߆ߒޔࡈࠔࠢࠪࡒ⸥㍳ⵝ⟎ࠍߞߡ⸥㍳ߒߡߚޕ₸ߪ8000
ޔಽ⸃⢻50nmߢࠆޕᒰᤨߩ㗴ߪޔⰯశ᧼ߩᱷశᤨ㑆߇㐳ߊㅦࠬࠠࡖࡦ߇ߢ ߈ߥ߆ߞߚߎߣޔߐࠄߦࡆࡓࠍ㜞ㅦߢᱜ⏕ߦᩏߔࠆ㔚ሶ࿁〝߇㔍ߒߥߤࠅޔ ታ↪ߩSEM߇㐿⊒ߐࠇߚߩߪߐࠄߦㆃࠇߡ1965ᐕߣࠊࠇߡࠆޕߎࠇࠄߩ㔚ሶ
✢ᯏེߦ↪ࠄࠇߡࠆ㔚ሶḮߪWࡈࠖࡔࡦ࠻ࠍ↪ߚᾲ㔚ሶḮߢࠆޕಽ⸃⢻
ߪޔ㔚ሶࡦ࠭߿㔚ሶ㌂ߩᡷ⦟ߢ⋡ⷡߒߊㅴߺޔ․ߦ1968ᐕߦߪCrewe╬ߦࠃࠅ㔚
⇇㧔FE㧦 Field Emission㧕㔚ሶḮࠍタߒߚ㔚ሶ㌂߇ឭ໒ߐࠇ[5]ޔ↹ᦼ⊛ߥಽ
⸃⢻ᡷༀߦ⥋ߞߚ[6]ޕᓥ᧪ߩᾲ㔚ሶߣߔࠆߚߦCFE㧔Cold Field Emission㧕 㔚ሶḮߣ߽߫ࠇࠆޕ1972ᐕߦߪߎߩCFE㔚ሶḮࠍタߒߚSEM߇ຠߣߒߡታ
↪ൻߐࠇޔಽ⸃⢻5 nm (ടㅦ25 kV)ߣޔᄢ߈ߥㅴᱠ߇ᓧࠄࠇߚޕㄭᐕߢߪޔടㅦ߇ 㧝kV೨ᓟߩૐടㅦߣ߫ࠇࠆ㗔ၞ߇ᄙ↪ߐࠇࠆࠃ߁ߦߥߞߡ᧪ߚޕਥߥේ࿃ߩ৻ߟ ߣߒߡޔඨዉ↥ᬺߩㅴዷߦޔ㔚ሶ✢ߦࠃࠆSi⚿᥏߳ߩᰳ㒱ࠍᦨዊ㒢ߦߒޔSiO2
ߥߤߩ⛘✼ߩᏪ㔚ࠍᦨዊ㒢ߦߒߡᓸ⚦ߥࡄ࠲ࡦࠍ᷹ⷰߔࠆߦߪૐടㅦSEM߇ᦨ
߽ㆡߒߡࠆߎߣ߇ߍࠄࠇࠆޕߎߩߚޔSEMߩᛛⴚ㐿⊒߽ㅴߺޔ2011ᐕߦߪട ㅦ30kVߢ0.4nmޔടㅦ1kVߢ1.2nmߩಽ⸃⢻߇ᓧࠄࠇࠆ߹ߢߦߥߞߚޕ
㜞ಽ⸃⢻ൻߦߪᄙߊߩᛛⴚ㐿⊒ߩᱧผ߇ࠅޔ߃߫ޔ࠽ࡁࡔ࠻࡞ࠝ࠳ߩ ᝄേࠍᛥ߃ࠆᯏ᪾ᛛⴚޔᱜ⏕ߥࡆࡓࠦࡦ࠻ࡠ࡞ࠍⴕ߁㔚ሶ࿁〝ᛛⴚޔੑᰴ㔚ሶࠍ ᬌߔࠆࡦࠨᛛⴚޔ㜞ಽ⸃⢻ߩ㔚ሶࡦ࠭ࠍታߔࠆ㔚ሶశቇޔ㔚ሶࡆࡓࠍᢔ
ੂߒߚࠅ㔚ሶḮࠍഠൻߐߖࠆࠟࠬಽሶࠍឃ㒰ߔࠆ⌀ⓨᛛⴚߥߤޔߤࠇ߇ᰳߌߡߡ߽
ಽ⸃⢻ߩㅴᱠߪή߆ߞߚޕߒ߆ߒޔᦨ㜞ಽ⸃⢻ࠍߡࠆ߽ߩߪ㔚ሶḮߩ‛ℂ․ᕈ ߇ᦨ߽㊀ⷐߢߞߚߣߞߡ߽ㆊ⸒ߢߪߥޕᰴߦޔߎߩಽ⸃⢻ࠍࠆࡈࠔࠢ࠲
ߦߟߡ⺑ߔࠆޕ
㧝㧚㧟 㧿㧱㧹ߩಽ⸃⢻
ߩSEMߩၮᧄ᭴ㅧࠍ࿑1.3ߦ␜ߔޕ㔚ሶḮ߆ࠄࠆ㔚ሶࡆࡓߪ⊒ᢔߒߡ
ࠆߩߢޔࠦࡦ࠺ࡦࠨࡦ࠭ߦࠃࠅࡆࡓࠍ㓸ߡ߅ࠅޔߎߎߢࡆࡓ㔚ᵹ㊂ࠍࠆޕ ኻ‛ࡦ࠭ߪ⹜ᢱߦዊߐߥὶὐࠍ⚿߽߱ߩߢޔಽ⸃⢻ࠍߡࠆޕ߹ߚޔߎߩኻ
‛ࡦ࠭ߦߪᦨㆡߥ㔚ሶࡆࡓߩ㐿߈ⷺߩ᧦ઙ߇ࠅޔߎࠇࠍㅜਛߦ⛉ࠅࠍࠇߡ
ቯߔࠆޕᄙߊߩ႐วޔ㊄ዻ᧼ߦⶄᢙߩᓘߩ⇣ߥࠆⓣࠍߌߚ߽ߩࠍ⟎߈ޔ↪ㅜߦࠃࠅ
⛉ࠅߩᓘࠍㆬࠎߢ↪ࠄࠇࠆޕ㔚ሶࡆࡓߩὶὐ⟎ߪㅜਛߦ⟎ߚะེ߆ࠄߩ㔚
⏛⇇ߦࠃࠅ᳓ᐔ⒖േߒ⹜ᢱ㕙ࠍᩏߔࠆޕ⹜ᢱ㕙߆ࠄ⊒↢ߔࠆੑᰴ㔚ሶߩ㊂ࠍ ᬌེߢ㔚᳇ାภߦᄌ߃ߡޔߎߩᒝᐲࠍᩏାภߦࠃࠅࡕ࠾࠲ߦ␜ߔࠆߎߣߢ
㕙ߩᒻ⁁ࠍ⍮ࠆߎߣ߇ߢ߈ࠆޕߎࠇࠍSEMߣࠎߢࠆޕ 㔚ሶḮ
㔚ሶḮ 䉮䊮䊂䊮䉰
䉮䊮䊂䊮䉰 䊧䊮䉵 䊧䊮䉵
ኻ‛䊧䊮䉵 ኻ‛䊧䊮䉵
ะེ
ะེ
ੑᰴ㔚ሶᬌེ
ੑᰴ㔚ሶᬌེ
⛉䉍⛉䉍
䊝䊆䉺䊝䊆䉺 㔚ሶḮ 㔚ሶḮ 䉮䊮䊂䊮䉰
䉮䊮䊂䊮䉰 䊧䊮䉵 䊧䊮䉵
ኻ‛䊧䊮䉵 ኻ‛䊧䊮䉵
ะེ
ะེ
ੑᰴ㔚ሶᬌེ
ੑᰴ㔚ሶᬌེ
⛉䉍⛉䉍
䊝䊆䉺䊝䊆䉺
࿑䋱䋮䋳 ઍ䈱SEM䈱ၮᧄ᭴ᚑ
శቇߩࠕ࠽ࡠࠫ߆ࠄޔ㔚ሶߩశḮ߇ࠅޔߎߎ߆ࠄߩࡆࡓࠍࠦࡦ࠺ࡦࠨࡦ࠭
߿ኻ‛ࡦ࠭╬ߩ㔚ሶశቇ♽ߦࠃߞߡޔᓸዊߥὶὐߦ᧤ߐߖࠆߣ߽⺑ߐࠇࠆޕห
᭽ߦߒߡಽ⸃⢻ࠍ⼏⺰ߔࠆ㓙ߦߪޔࡦ࠭Ꮕ߇↪ࠄࠇࠆޕ㔚ሶࡆࡓ߇శߣᦨ߽
⇣ߥࠆὐߪޔ㔚ሶ✢ߩᵄ㐳ߪนⷞశࠃࠅߪࠆ߆ߦ⍴ߎߣޔ㔚⇇߿⏛⇇ߢᦛߍࠆߎߣ ߇ߢ߈ࠆޔ߮ޔ‛⾰ߣߩ⋧↪߇ᒝߩߢߒߚ㕙ઃㄭߢࠛࡀ࡞ࠡࠍᄬ
ߚߊߐࠎߩੑᰴ㔚ሶࠍ⊒↢ߐߖࠆߎߣߢࠆޕ
㔚ሶߩᵄ㐳ߪએਅߩᑼߢߐࠇޔታ↪⊛ߥSEMߩࠛࡀ࡞ࠡ1 kV߆ࠄ30 kVߢ ߪ0.1 nmࠃࠅߪࠆ߆ߦዊߐޕ
] [ ] [ / 16 .
1 E eV nm
eV m
h
e
O | (1-1)
ߒ߆ߒޔSEMߦ߅ߡޔಽ⸃⢻ߪߎߩᵄ㐳0.1 nmߩࠝ࠳ߦߪ㆐ߒߡߥޕ ߎࠇߪޔ㔚ሶశቇ♽ߩࡦ࠭ߩᏅ߇ᄢ߈ޔࡊࡠࡉ㔚ሶ✢߇⹜ᢱౝߦߞߡᐢ ߇ࠆߚߦੑᰴ㔚ሶߩ⊒↢㗔ၞ߇ࠆ⒟ᐲߩᄢ߈ߐࠍᜬߞߡࠆߎߣߥߤߦࠃࠆޕ․
ߦޔ㔚ሶࡦ࠭ߪゲኻ⒓ߩ㔚⇇ߣ⏛⇇ߢᒻᚑߔࠆߚߦޔᕁߩ߹߹ߦᏅࠍዊߐߊ ߢ߈ߥ߇శቇࡦ࠭ߣᄢ߈ߊ⇣ߥࠆὐߢࠆޕߎߩ㔚ሶశቇ♽ߩᏅߩ․ᓽߦ㑐 ߒߡߪᧄ▵ߩᓟඨߢ⺑ߔࠆޕ
SEMߩಽ⸃⢻ࠍ㜞ߊߔࠆߦߪޔࡊࡠࡉ㔚ሶ✢ࠍ߆ߦ⚦ᓘ߹ߢ⛉ࠅㄟࠆ߆ ߢࠆ߇ޔߎࠇࠍߡࠆߩߪޔᄢ߈ߊಽߌߡޔ㔚ሶḮߣޔ㔚ሶశቇ♽ߢࠆޕ㔚 ሶశቇ♽ߪਥߦ㔚ሶࡦ࠭ߢ᭴ᚑߐࠇߡ߅ࠅޔ㔚ሶḮ߆ࠄ⊒ߒߚ㔚ሶ✢ߪᚲቯߩశḮ ࠨࠗ࠭ࠍᜬߞߡ߅ࠅޔࡦ࠭ߦࠃࠅߎࠇࠍㆡᒰߥᄢ߈ߐߦ❗ዊߒߡ⹜ᢱ㕙ߦ⚿ߔ ࠆޕ৻ᣇޔࡦ࠭ߦߪᏅ߇ࠅޔὶὐࠍࠆࠨࠗ࠭એਅߦߔࠆ߇ߢ߈ߥޕߎߩ
Ꮕߦߪᓟㅀߔࠆ߇㐿߈ⷺଐሽᕈ߇ࠅޔᦨㆡߥ㐿߈ⷺǩ߇ሽߔࠆޕᓥߞߡ㜞ಽ⸃
⢻ࠍᓧࠆߚߦ㊀ⷐߥㇱຠߣߒߡޔ⛉ࠅࠍ⟎߈ޔߎߩⷺᐲࠍᦨㆡൻߒߡࠆޕߎߩⷺ
ᐲ㒢߇ࠆߚߦޔ㔚ሶḮ߆ࠄߒߚ㔚ሶߩ߁ߜ⹜ᢱߦ㆐ߔࠆ߽ߩߪޔᭂ⁜
ⷺᐲ▸࿐ߩ߽ߩߒ߆ࠊࠇߥޕߎߩ㔚ᵹ㊂߇ዋߥߣᬌེߢାภ߇ᓧࠄࠇߥߊ ߥࠆߩߢޔSEMߦߔࠆߎߣ߿ޔὶὐวࠊߖ߇࿎㔍ߣߥߞߡߊࠆޕߒߚ߇ߞߡޔㅢ Ᏹߩ㜞ಽ⸃⢻SEMߢߪ㔚ሶḮߩᜬߞߡࠆノᐲߣ߁ዤᐲ߇ߥࠆߴߊᄢ߈߇ⷐ
᳞ߐࠇࠆޕ
ノᐲ
㔚ሶḮߩノᐲ(Ǫ)ߪޔSEMߩᦨ㜞ಽ⸃⢻ࠍ߶߷ቯߒߡࠆ㊀ⷐߥࡄࡔ࠲ߢ
ࠅޔߎߩⷐࠍ࿑1.4ߦ␜ߔޕߒߚ㔚ሶߩ߁ߜ㔚ሶ✢ߣߒߡ↪ߔࠆㇱಽࠍࡊࡠ
ࡉߣ߮ޔߎߩ㔚ᵹ㊂ࠍࡊࡠࡉ㔚ᵹ IPߣ߱ޕశḮ߆ࠄߒߚ㔚ሶ✢ߩ߁ߜޔ
ࠆ┙ⷺ(ǡ)ਛߦߤࠇ߶ߤߩ㔚ᵹ߇ᓧࠄࠇࠆ߆߇ޔⷺ㔚ᵹኒᐲ(J = IP/ǡ)ߢࠅޔ ߎࠇࠍశḮߩ㕙Ⓧ(S)ߢഀߞߚ୯߇ノᐲߢࠆޕߔࠆ㐿߈ⷺ(ǩS)ߣశḮߩ⋥ᓘ(dS) ࠍ↪ߡਅᑼ߇↪ࠄࠇࠆޕ
2 2
2 S( S /2)
P P
d I S
I
D E S
: (1-2)
ߥ߅ޔࡊࡠࡉ㔚ሶߩ㐿߈ⷺߪടㅦߦᲧߒߡዊߐߊߥࠆߩߢޔߎߩノᐲߪ․ቯߩ ടㅦߩ႐วߢࠆޕߎߩଐሽᕈࠍߥߊߔߚߦノᐲࠍടㅦߢഀߞߚ឵▚ノᐲ߽↪ࠄ ࠇߡࠆޕߎߩ឵▚ノᐲߪޔ㔚ሶ㌂߆ࠄߒߚᓟߦടㅦߒߚࠅᷫㅦߒߚࠅߒߡ߽
ሽߐࠇࠆޕ⸒឵߃ࠇ߫ޔޘߩ㔚ሶ߇ࠛࡀ࡞ࠡሽߒߡㆇേߒߡࠆߣ߈ߦߪノ ᐲߪਇᄌߢࠆޕ
S
: IP
DS
㔚ሶḮ
(a)శḮ (b)ⷺ㔚ᵹኒᐲ
㔚ሶ✢
శḮ
dS
࿑䋱䋮䋴 ノᐲ䈱⺑࿑
వㅀߩࠃ߁ߦࠆᄢ߈ߐߩశḮࠍ㔚ሶశቇ♽ߦࠃߞߡᚲᦸߩࠨࠗ࠭ߦ᧤ߐߖࠆ 㓙ߦޔ㔚ሶశቇ♽ߩ⚂ߦࠃࠅኻ‛ࡦ࠭߆ࠄ⹜ᢱߦ⛉ࠅㄟ㓙ߦᦨㆡߥࡆࡓ㐿߈
ⷺᐲǩopt߇ࠆޕߎߩߚޔ㔚ሶḮ߆ࠄ⊒↢ߔࠆ㔚ሶࡆࡓߩ߁ߜ㒢ࠄࠇߚ┙ⷺ(ǡ)
ౝߩ㔚ሶߒ߆↪ߢ߈ߥޕ㔚ሶశቇ♽ߦࠃࠅశḮࠍ M 㧔M<1㧕ߦߒߡ⹜ᢱߦᾖ
ߔࠆߣޔ㔚ሶḮߩขࠅㄟߺⷺߪǩoptMޔ┙ⷺߪǸǩopt2M2ߣߥࠆޕశḮᓘ߇ᄢ ߈႐วޔಽ⸃⢻ࠍ⦟ߊߒࠃ߁ߣߔࠆߣޔMࠍዊߐߊߔࠆᔅⷐ߇ࠆޕߎߩ⚿ᨐޔ㔚 ሶḮߩขࠅㄟߺ߽ⷺዊߐߊߥࠆߩߢޔ↪ߢ߈ࠆ㔚ሶߩ㊂߇ᷫߞߡߊࠆޕ㔚ሶᢙ߇ዋ ߥߊߥߞߡߒ߹߁ߣޔᬌེߩࠥࠗࡦࠍߍࠆߩߢࡁࠗ࠭߇⋡┙ߟࠃ߁ߦߥࠅޔߒ߹
ߦߪࠍᒻᚑߒߚࠅޔὶὐࠍ⺞ᢛߔࠆߎߣ߇࿎㔍ߣߥࠅޔSEM ߇ᓧߦߊߊߥߞ ߡߊࠆޕᓥߞߡޔߥࠆߴߊዊߐߥశḮᓘߢޔ⁜┙ⷺߢ߽ᄢ㔚ᵹߢࠆߎߣ߇ᦸ߹
ࠇࠆޕߎࠇࠍᢙ୯ൻߒߚ߽ߩ߇ノᐲߢࠆޕߥ߅ޔߎߩノᐲ㒢ߪޔSEM ߩࠝࡍ
࠲ߢࠆੱ㑆߇SEMࠍⷰኤߒߥ߇ࠄὶὐวࠊߖࠍⴕ߁ߚߦޔㆡᐲߥ㔚ሶ✢
㊂߇ᔅⷐߢࠆⷐ⺧߆ࠄߢ߈ߚߣ߽⸒߃ޔⵝ⟎ߩㅴᱠߣߦၮḰ߇ᄌࠊߞߡߊน⢻
ᕈ߽⠨߃ࠄࠇࠆޕ
శḮࠨࠗ࠭
ታ㓙ߩశḮߩࠨࠗ࠭ߦ㑐ߒߡߪޔࠊࠇߡࠆ㔚ሶḮߦࠃࠅੑ⒳㘃ࠆޕ৻ߟ ߪታశḮߣ߫ࠇࠆ߽ߩߢࠆޕWࡈࠖࡔࡦ࠻߿LaB6㔚ሶ㌂ߩࠃ߁ߥᾲ㔚ሶ
ߩ㔚ሶ㌂ߢߪޔ࿑1.5 aߩࠃ߁ߦ࠙ࠚࡀ࡞࠻㧔Wehnelt cylinder㧕ߦࠃࠅ㔚ሶḮߩ㔚 ሶ㗔ၞࠍ㒢ߒޔߐࠄߦߘߩࡦ࠭ലᨐߦࠃࠅ⋥ਅߩⓨ㑆ਛߦ㔚ሶࠍ⛉ࠅߎߎߦ
ࠢࡠࠬࠝࡃࠍᒻᚑߔࠆޕߎࠇ߇㔚ሶࡆࡓߩశḮߣߥࠆߩߢޔታశḮߣ߫ࠇࠆޕ 㔚ሶḮ㕙ߦߪᒝ㔚⇇ࠍ߆ߌߥߩߢޔߔࠆ㔚ሶ✢ߪⓨ㑆㔚⩄㒢㔚ᵹߣ߫
ࠇޔ࿕ਛߩ㔚ሶ߇⌀ⓨਛߦߔࠆ㓙ߦߔߢߦ⌀ⓨਛߦࠆ㔚ሶߩᓇ㗀ࠍฃߌࠆޕ ߎߩࠃ߁ߥ㔚ሶḮߪ㔀㖸߇ዊߐߣ߁․㐳ߩ㕙ޔࠢࡠࠬࠝࡃᓘߪ1Ǵmߩࠝ
࠳ߢࠅノᐲߪዊߐޕ
䉝䊉䊷䊄 䉡䉢䊈䊦䊃
㔚ሶḮ
㔚ሶ✢
䉪䊨䉴䉥䊷䊋䊷 ታశḮ
䉝䊉䊷䊄
CFE㔚ሶḮ
ᗐశḮ
(a) ⓨ㑆㔚⩄㒢 (b) ⓨ㑆㔚⩄㒢䈭䈚
r
~100 nm
~3 nm
(c) ᗐశḮ
㔚ሶḮ
㔚ሶ✢
࿑䋱䋮䋵 㔚ሶశḮ䈱䉺䉟䊒
ߎࠇߦኻߒߡޔCFE߿SEߥߤߩ㜞ノᐲߥ㔚ሶḮߢߪޔ࿑1.5 bߩࠃ߁ߦ㔚ሶḮ
㕙ߦࠕࡁ࠼߆ࠄ⋥ធ㜞㔚⇇ࠍශടߒߡ㔚ሶߔࠆޕߎߩߚޔߒߚ㔚ሶߪㅦ
߿߆ߦ㔚⇇ߢടㅦߐࠇߡ㔌ࠇߡⴕߊߚޔⓨ㑆㔚⩄㒢ߩή♽ߢࠆޕߎߩ႐วޔ
࿑1.5 cߩࠃ߁ߦ㔚ሶḮవ┵ㇱಽߢޔߒߚ㔚ሶߩ゠ࠍߐ߆ߩ߷ߞߡߚߤࠆߣޔ
ߚ߆߽W㊎ߩౝㇱߦዊߐశḮ߇ࠅޔߘߎ߆ࠄ㔚ሶߒߡࠆࠃ߁ߦ߃ࠆޕ ߎߩߚޔవ߶ߤߩታశḮߦኻߒߡޔᗐశḮߣ߫ࠇࠆޕCFE 㔚ሶḮߩ႐วవ┵
ᦛ₸ඨᓘ߇100 nmߩࠝ࠳ߢࠆߩߦኻߒߡᗐశḮߩ⋥ᓘ߇3 nm⒟ᐲߣ⸒ࠊ ࠇߡࠆ[16][22]ޕታశḮࠍࠆ㔚ሶḮߩ 1/300ߩࠨࠗ࠭ߢࠅޔ㕙Ⓧߦߒߡ5ᩴዊ ߐޕᒝ㔚⇇ߢ㊎⁁ߩవ┵߆ࠄߔࠆ㔚ሶḮߩノᐲ߇㜞ߩߪߎߩశḮࠨࠗ࠭߇
ᩴ㆑ߦዊߐߎߣߦ࿃ߒߡࠆޕߥ߅ޔߎߩᗐశḮࠍታ㛎⊛ߦ⹏ଔߔࠆߎߣߪ ኈᤃߢߪߥޕ⋥ធ⊛ߥᣇᴺߪޔTEM ߩࠃ߁ߥᄢశቇ♽ߩࠆⵝ⟎ߦ⚵ߺㄟߺޔ శḮߩᄢࠍࠆߎߣߢࠅޔߎߩߣ߈㔚ሶ㌂ߪᏅ߇චಽዊߐߊߥࠆࠃ߁ߦᵈᗧ ߔࠆᔅⷐ߇ࠆޕ߶߆ߦߪޔ㔚ሶ✢ߩᐓᷤᕈࠍ↪ߒߡ⹏ଔߔࠆᣇᴺ߽ࠆ߇ޔߘࠇ ߦᔕߓߚᕈ⢻ߩశቇ♽ࠍḰߔࠆᔅⷐ߇ࠆޕ
㩷
Ꮕ
ㅢᏱޔSEMߢᡰ㈩⊛ߣߥࠆ߽ߩߪޔ㕙Ꮕޔ⦡Ꮕޔ࿁᛬Ꮕߩ㧟ߟߢࠆޕ ᓧࠄࠇࠆࡊࡠࡉᓘdߪశḮࠍశቇ♽ߢ❗ዊߒߚᓘdssߣฦᏅߩੑਸ਼ᐔᣇᩮߢ
ߐࠇࠆ[7]ޕ
2 2 2 2
C S D
ss d d d
d
d (1-2)
ߘࠇߙࠇޔdD ߪ࿁᛬ᏅޔdS ߪ㕙ᏅޔdC ߪ⦡Ꮕߢࠆޕ
࿁᛬Ꮕߪޔశߩ႐วߣห᭽ޔ㔚ሶߩᵄߩᕈ⾰ߦ࿃ߔࠆ߽ߩߢޔ㐿߈ⷺǩ߇ᄢ߈
߶ߤߘࠇߦᲧߒߡዊߐߊߥࠆޕ D
61O .
D 0
d (1-3)
ߎࠇߦኻߒߡޔ㕙Ꮕߣ⦡Ꮕߪశߣᖱ߇⇣ߥࠆޕ㔚ሶࡦ࠭ߢߪޔ࿑1.6 a ߦ␜ߔࠃ߁ߦޔㅢㆊߔࠆ㔚ሶߦኻߒߡޔਛᔃゲ߆ࠄ㔌ࠇࠆߦᓥࡦ࠭↪߇ᄢ߈ߊ ߥࠅὶὐ〒㔌߇⍴ߊߥࠆߣ߁ᕈ⾰߇ࠆޕߎߩ⚿ᨐޔోߩ㔚ሶࡆࡓߩὶὐ߇߷
ߌޔdsߩᄢ߈ߐࠍᜬߟޕߎࠇ߇㕙Ꮕߢࠅޔᐞቇ⊛ߦ㕙ᏅଥᢙCsߣޔD ߩ3ਸ਼ߦᲧߔࠆޕ
3
2 5 1 .
0 SD
S C
d u (1-4)
৻ᣇޔ⦡Ꮕߪޔ㔚ሶࡆࡓߩࠛࡀ࡞ࠡಽᏓߦ࿃ߒߚ߽ߩߢޔ࿑1.6 bߦ␜ߔ ࠃ߁ߦޔㅦᐲߩᄢ߈㔚ሶ߶ߤ㔚⏛⇇ߦࠃࠆ゠ߩᦛ߇ࠅ߇ዊߐߊߥࠆߩߢޔὶὐ߇
㆙ߊߥࠆޕߎߩ⚿ᨐޔోߩ㔚ሶࡆࡓߩὶὐ߇߷ߌޔdcߩᄢ߈ߐࠍᜬߟޕߎߩ႐วޔ
Ꮕ㊂ߪ⦡ᏅଥᢙCc߅ࠃ߮ޔǩߦᲧߔࠆߣหᤨߦޔࠛࡀ࡞ࠡಽᏓߦ߽Ყߔ ࠆޕ
E D C E
dC 0.5u C ' (1-5)
ടㅦE߇ಽᲣߦࠆߚޔEߩዊߐૐടㅦSEMߦߣߞߡߪߎߩ⦡Ꮕ߇ᡰ㈩⊛
ߣߥࠆޕߎߎߢӠEߪ㔚ሶߩࠛࡀ࡞ࠡಽᏓߩඨ୯ࠍ↪ߡࠆޕ
ߎࠇࠄߩ⚿ᨐޔ࿑1.6 cߩࠃ߁ߦోᏅߩᦨዊ୯߇ޔǩߩᦨㆡ୯ߣߥࠆޕߎߩ႐ว ߪޔૐടㅦߢ⦡Ꮕ߇ᡰ㈩⊛ߣߥߞߡࠆ႐วߢࠆޕ㜞ಽ⸃⢻ൻߦߪᏅଥᢙࠍዊ ߐߊߔࠆᔅⷐ߇ࠅޔߎࠇࠍߡࠆߩ߇㔚ሶࡦ࠭ߩ᭴ㅧߢࠆޕߎࠇࠄᏅଥ ᢙࠍዊߐߊߔࠆߚߩࡦ࠭ᛛⴚ߇㐿⊒ߐࠇߡ᧪ߡࠆ߇ޔታ↪㜞ಽ⸃⢻ࠍ⁓߁
ࡦ࠭ߢߪޔCc㧘Csߦࡦ࠭ߩὶὐ〒㔌fߩࠝ࠳ߢࠆޕߎߩὶὐ〒㔌ࠍ߆ ߦዊߐߊߔࠆ߆߇㜞ಽ⸃⢻ൻߩ㎛ߢࠅޔߎࠇߪశቇ㗼ᓸ㏜ߣ㘃ૃߒߡࠆޕߒ߆ߒޔ ታ↪ޔὶὐ〒㔌ࠍዊߐߊߔࠆߩߦ߽㒢ᐲ߇ࠆޕߎߩߚޔ⦡Ꮕࠍዊߐߊߒࠃ߁ ߣߔࠆߣޔӠEࠍዊߐߊߔࠆߎߣ߇߈ࠊߡ㊀ⷐߣߥߞߡߊࠆޕ
ߎߩӠEߪ㔚ሶḮߢ߹ߞߡࠆޕߔߥࠊߜޔ⌀ⓨਛߩ㔚ሶߪᢔੂ╬߇ήߌࠇ߫㔚
⏛⇇ߢᦛߍߡ߽㔚⇇ߢടㅦޔᷫㅦߒߡ߽ߘߩࠛࡀ࡞ࠡಽᏓߪᄌࠄߥߩߢޔ㔚ሶḮ ࠍߚߣ߈ߩࠛࡀ࡞ࠡ߇ߘߩ߹߹ࡦ࠭ߦ᧪ࠆߚߢࠆޕᓥߞߡޔࠛࡀ࡞ࠡ
ߩ⁜㔚ሶḮ߇ᔅ㗇ߣߥࠆޕࠛࡀ࡞ࠡߪޔⴕߢࠊࠇߡࠆ߽ߞߣ߽න⦡ߩ CFE㔚ሶḮ߇ඨ୯ߦߒߡ0.3 - 0.4eVߢࠅޔ߹ߚޔᄢ㔚ᵹߩ㔚ሶḮߣߒߡSE㔚 ሶḮߢߪ0.4-0.8eVએߢࠆޕᣂߒ㔚ሶḮߩ⎇ⓥߣߒߡߪޔታ↪⊛ߥノᐲߢࠛࡀ
࡞ࠡ߇ߎࠇࠄࠍਅ࿁ࠆߎߣ߇⋡ᮡߢࠆޕ
㔚ሶ䊧䊮䉵
࿑䋱䋮䋶 SEM䈪ਥ䈮㗴䈫䈭䉎Ꮕ
㔚ሶ゠䈱ᮨᑼ࿑䈪㕙Ꮕ䈱⺑(a)䈶䇮⦡Ꮕ䈱⺑(b)䇮ὐ✢䈲䉣䊈䊦䉩䊷䈱㜞䈇 㔚ሶ✢䉕␜䈜䇯ฦᏅ䈱ⷺᐲଐሽᕈ(䌣)䇮⎕✢䈲䈖䉏䉌3䈧䈱Ꮕ䉕ว䉒䈞䈢ోᏅ䇯
(a)
(c) D
dCs
dCc D
(b)
dD (1k
d
Cc V)d
CsోᏅ
䎕 䎗 䎙
䎔䎛 䎕 䎗 䎙
䎔䎓䎛 䎕
d(nm)
䎓䎑䎓䎓䎔 䎕 䎖 䎗 䎘 䎙 䎚 䎓䎑䎓䎔 䎕 䎖 䎗 䎘 䎙 䎚 䎓䎑䎔
D (rad)
㔚ሶ䊧䊮䉵
㔚ሶ゠
㔚ሶ゠
ᦨዊ
Ꮕᱜᛛⴚ
శߩ႐วߪޔࡦ࠭ߩᒻ⁁ࠍ⥄↱ߦᄌ߃ࠄࠇࠆߚߦޔ㕖㕙ᒻ⁁ߦߒߡ㕙Ꮕ ࠍᱜߒߚ߽ߩ߇ታߐࠇߡࠆޕ߹ߚశߩ႐วߩ⦡Ꮕߪޔࡦ࠭ࠍᒻᚑߔࠆ⎣᧚ ߩዮ᛬₸߇ᵄ㐳ߢ⇣ߥࠆߦ࿃ߒߡࠆߩߢޔዮ᛬₸ߩ㆑߁⎣᧚ޔዮ᛬₸ߩᵄ㐳ಽ ᢔߩ⇣ߥࠆ᧚ᢱޔಳࡦ࠭ߦߥߤߦࠃࠅ⦡Ꮕࠍૐᷫߒߚ⦡ᶖߒࡦ࠭߇น⢻ߢࠆޕ ߎࠇߦኻߒޔ㔚ሶߩ႐วߪޔ⌀ⓨਛߦᐢ߇ࠆゲኻ⒓ߩ㔚⇇߿⏛⇇ߩࡦ࠭ࠍߞߡࠆ ߚߦᏅ߇Ᏹߦᱜߢ㧜ߦߔࠆߎߣ߇ߢ߈ߕޔ߹ߚޔ⦡ᶖߒߦ㊀ⷐߥಳࡦ࠭ࠍන⁛
ߢᓧࠄࠇߥߎߣ߇ℂ⺰⊛ߦ⸽ߐࠇߡࠆ[9]ޕߎߩߚ㔚ሶశቇ♽ߢߪ㕙Ꮕ߿
⦡Ꮕࠍ⊛ߦૐᷫߔࠆ߇ߢ߈ߥ߆ߞߚޕ
ߎߩℂ⺰⊛㒢ߪޔࡦ࠭⇇߇ㅪ⛯⊛ޔ㕒⊛ޔゲኻ⒓ߣ߁᧦ઙਅߢߩ⚿⺰ߢࠅޔ ߎࠇࠄߩ᧦ઙߩߤࠇ߆ࠍ፣ߖ߫ේℂ⊛ߦߪㅒߩ╓ภߩᏅࠍࠇࠆߩߢᛂߜᶖߒ
߁ߎߣ߇ᦼᓙߐࠇࠆ[10]ޕᦨㄭ⣉శࠍᶎ߮ߡࠆᏅᱜᛛⴚߪޔᭂሶ႐ߩࠃ߁ߥ ᄙᭂሶࡦ࠭ࠍ߁ߣ৻ゲᣇะߩ⽶ߩᏅࠍ↢ᚑߢ߈ࠆޕߎࠇࠍࡆࡓㅴⴕᣇะߣု
⋥ߥੑゲಽ߃ޔࠄ߆ߓ⽶ߩᏅࠍߞߡ߅ߊߎߣߢޔኻ‛ࡦ࠭ߢߩ㕙Ꮕ ࠍᛂߜᶖߔߎߣ߇น⢻ߣߥࠆ߽ߩߢޔRoseࠄ߇1970ᐕઍߦឭ᩺ߒߚ߇[11]ޔታ↪ൻ ߪ㐳㑆࿎㔍ߢߞߚޕᦨㄭߩㄝᛛⴚߩㅴᱠߦࠃࠅޔCCDࠞࡔߢᏅߩ᭽ሶࠍ
ࠕ࡞࠲ࠗࡓߢ᷹ቯߒޔPCߢߎߩ⚿ᨐࠍၮߦᄙᭂሶߩࡄࡔ࠲ࠍ⸘▚ߒ⍴ᤨ㑆ߦ ࡈࠖ࠼ࡃ࠶ࠢߢ߈ࠆࠃ߁ߦߥߞߚߚޔTEMߦ⚵ߺㄟ㕙Ꮕᱜེ߇㐿⊒ߐ ࠇޔ㜞ಽ⸃⢻ൻߩᔅ㗇ᛛⴚߣߥߞߡ߈ߡࠆޕ߹ߚޔߎߩᏅᱜᛛⴚࠍSEMߦᔕ
↪ߔࠆ⹜ߺ߇ᆎ߹ߞߡ߅ࠅޔૐടㅦ㧿㧱㧹ߢߪ⦡Ꮕ߇㊀ⷐߣߥࠆߩߢޔ⦡Ꮕߩ
ᱜ߽ឭ᩺ߐࠇߡࠆ[13]ޕ
᧪ޔታ↪⊛ߥ⦡Ꮕᱜ߇㐿⊒ߐࠇࠇ߫ޔ㔚ሶḮߩන⦡ᕈߪߘࠇ߶ߤ㊀ⷞߐࠇߥ ߊߥࠆߣ߽߃ࠆ߇ޔ⦡Ꮕᱜߪ᭴ㅧ߇ⶄ㔀ߢࠅޔⵝ⟎ߣߒߡ㜞ଔޔ߆ߟ࡙ࠩ
ߩⷐ᳞ߦᓥߞߡ৻บߩⵝ⟎ߢ᭽ޘߥടㅦ㔚ߦኻᔕߔࠆߦߪ߆ߥࠅߩ㐿⊒ᐕᢙࠍ ⷐߔࠆߣ⠨߃ࠄࠇࠆޕ߹ߚޔ⦡Ꮕᱜࠍᣉߔߦߒߡ߽ࠄ߆ߓන⦡ᕈߩ⦟㔚ሶ
✢ߩ߶߁߇ࠃࠅലᨐ⊛ߦᱜߢ߈ࠆߩߢޔᒰ㕙ߪන⦡㔚ሶḮߩᔅⷐᕈߪᄌࠊࠄߥߣ
⠨߃ࠄࠇࠆޕߒࠈޔࠅ߿ߔ㕙Ꮕᱜེߣන⦡㔚ሶḮߣߩ⚵ߺวࠊߖߡ㜞ಽ
⸃⢻ߩSEM߇ᦼᓙߐࠇࠆߥߤޔන⦡ߢ㜞ノᐲߩ㔚ሶḮߩⷐ᳞߇㜞߹ߞߡ᧪ࠆߣ੍ᗐ ߐࠇࠆޕ
㧝㧚㧠 ታ↪ߣߥߞߡࠆ㔚ሶḮ
ᧄ▵ߢߪޔ⍮ࠄࠇߡࠆන⦡ߢノᐲߩ㜞㔚ሶḮߢޔࠊࠇߡࠆ߽ߩߦߟ
ߡߘߩේℂޔ․ᕈߥߤࠍ⚫ߔࠆޕ
ޔ㔚ሶ㗼ᓸ㏜↪ߦਥߦࠊࠇߡࠆ㔚ሶḮߪᄢ߈ߊಽߌߡޔߦ␜ߐࠇࠆ㧠⒳
㘃ߩߺߢࠆޕߎࠇࠄߪ↪ㅜߦࠃࠅಽߌࠄࠇߡࠆޕㆊߩᄙߊߩ⎇ⓥ߇ࠆߦ
߽㑐ࠊࠄߕታ↪ൻߐࠇߚ߽ߩߩ⒳㘃߇ዋߥߎߣߪޔ㔚ሶḮ㐿⊒ߩ㔍ߒߐࠍ‛⺆ߞߡ
ࠆߣ߃ࠃ߁ޕ
㧝㧚㧝 ታ↪㔚ሶḮ
㔚ሶḮ ᣇᑼ ノᐲ#UTEO Ӡ'㧔G8㧕 9㊎ 㔚⇇%(' ~2108 0.2 - 0.4
<T19㊎ 5EJQVVM[ 5' 1~5107 0.4 - 0.8 .C$ ᾲ㔚ሶ ~8104 > 1 9 ࡈࠖࡔࡦ࠻ ᾲ㔚ሶ ~8103 > 1
*ノᐲ䈱୯䈲ടㅦ 㪌㫂㪭 䈱႐ว䈱䉅䈱㩷
ノᐲ߿න⦡ᕈᗧᄖߦޔቯᕈޔࡁࠗ࠭ޔൎᚻޔ⚻ᷣᕈߥߤ߽㊀ⷐߣߥࠅޔߤࠇ ߆߇ᰳߌߡ߽ታ↪ߦߪଏߐࠇߥޕ㔚ሶḮߪ᧚ᢱߩ․ᕈ߇ਥߣߥࠅޔోߡࠍḩߚߔ
᧚ᢱ߿↪᧦ઙߪߥ߆ߥ߆ߟ߆ࠄߥߚߣ⠨߃ࠄࠇߡࠆޕߎࠇࠄ㔚ሶḮߩ߁ߜޔ 㜞ಽ⸃⢻SEMߦࠊࠇߡࠆ߽ߩߪޔCFE㔚ሶḮߣޔSE㔚ሶḮߢࠆޕノᐲ߇㜞 ߊޔන⦡ߢࠆ․ᓽࠍᜬߟޕઁߩ2⒳ޔLaB6㔚ሶḮߣWࡈࠖࡔࡦ࠻ߪᾲ㔚ሶ
ߩਛߢ߽ޔⓨ㑆㔚⩄㒢ߩ㗔ၞߢ↪ࠆ߽ߩߢޔノᐲ߇ૐޔశḮࠨࠗ࠭߇ᄢ߈ޔ
ࠛࡀ࡞ࠡ߇ᐢߣޔಽ⸃⢻ߣ߁ὐߢߪὐߪߥ߇ޔ㔚ᵹ߇ᭂߡቯߢޔᲧ セ⊛ଔߣ߁․ᓽ߇ࠅޔ㜞ಽ⸃⢻߇ⷐ᳞ߐࠇߥ᳢↪SEM߿ޔቯᕈ߇㊀ⷐߥ 㔚ሶ✢ឬ↹ⵝ⟎ߥߤߦࠊࠇߡࠆޕ
ᰴߦޔߎࠇࠄߩ㔚ሶḮߩේℂߣ․ᓽࠍ⚫ߔࠆޕ
㧝㧚㧠㧚㧝 %(' 㔚ሶḮ
ᭂߡవ┵߇ውߞߚ㊄ዻߩ㊎ߦ⽶ߩ㔚ࠍ߆ߌࠆߣޔ㔚ሶࠍߔࠆߎߣߪ19
♿߆ࠄ⍮ࠄࠇߡߚޕ20♿ߩೋߩ㗃ߦߥࠅޔFowlerߣNordheimߦࠃࠅޔߎߩ
⽎߇㊂ሶജቇߦࠃࠆ࠻ࡦࡀ࡞ലᨐࠍ⠨߃ࠆߣ߁߹ߊ⺑ߐࠇࠆߎߣ߇␜ߐࠇ ߚ[15][16][17]ޕᐔⴕᐔ᧼ߩࠦࡦ࠺ࡦࠨߩࠃ߁ߥ2ᨎߩ㔚ᭂߦ㔚ࠍ߆ߌߚ႐วߪޔ ဋ৻ߥ㔚⇇ߣߥࠆ߇ޔውߞߚ㊎ߩ႐วޔᐞቇ⊛ߦవ┵ߦߪ5߆ࠄ6ᩴએߩ㔚⇇߇ 㓸ਛߔࠆޕߎߩࠃ߁ߥ႐วޔ࿑1.7ߦ␜ߔࠃ߁ߦޔ㊎వ┵ߢߪ⌀ⓨ㗅ߩࡐ࠹ࡦࠪࡖ
࡞㓚ო߇㊎వ┵ߢ⭯ߊߥࠅޔౝㇱߩ㔚ሶ߇ߎߩ⭯ߊߥߞߚࡐ࠹ࡦࠪࡖ࡞㓚ოਛࠍ࠻ࡦ ࡀ࡞ലᨐߢ⌀ⓨਛߦᛮߌߡࠄࠇࠆࠃ߁ߦߥࠆޕᓐࠄߪޔ৻ᰴరࡐ࠹ࡦࠪࡖ࡞ࡕ࠺࡞
ߢߩᵄേ㑐ᢙࠍ⸘▚ߒޔ⌀ⓨ㗅ߩ㓚ოߩㅘㆊ₸ࠍWKBㄭૃߦࠃߞߡᢙᑼൻߒޔ
㔚ሶ㊂ࠍ᳞ࠆߚߦߪ࿕ਛ߆ࠄ㔚ሶ߇⌀ⓨߣߩ⇇㕙ߦะ߆ߞߡߔࠆ㊂ 㧔supply function) ࠍ⥄↱㔚ሶࡕ࠺࡞߆ࠄ᳞ࠆޕߎߩ⚿ᨐޔᰴᑼߩࠃ߁ߥࠪࡦࡊ࡞
ߥㄭૃᑼࠍዉ߈ߒߚޕ ) exp(
2 / 2 3
B F F
j A B
B
I
I (1-6)
ߎߎߢޔA, Bߪቯᢙߢࠆޕ㔚ᵹIߣߘߩߣ߈ߩ㔚⇇Fߣ߁2ߟߩታ᷹୯ ߆ࠄޔ❑ゲߦLog(I/F2)ޔᮮゲߦ1/Fࠍࡊࡠ࠶࠻ߔࠆߣ⋥✢ߣߥࠆޕߎࠇߪF-Nࡊࡠ
࠶࠻ߣ߫ࠇޔ㊄ዻߩ㔚⇇ߩታ㛎⚿ᨐࠍࠃߊ⺑ߔࠆߎߣ߆ࠄߢ߽ታ㛎ߦ߅
ߡޔ㔚⇇ߩ⏕ᚻᲑߣߒߡ↪ࠄࠇߡࠆޕߥ߅ޔ⥄↱㔚ሶࡕ࠺࡞ߢߪࡈࠚ࡞
ࡒḰࠃࠅ߽ૐࠛࡀ࡞ࠡߦߚߊߐࠎߩ㔚ሶ߇ࠅޔ㔚⇇߇ᒝߊߥࠆߣૐࠛࡀ࡞ࠡ
ߩ㔚ሶߩ⏕₸߇㜞ߊߥࠆߚޔࠃࠅᄙߊߩ㔚ሶ߇ߐࠇࠆޔߎߩലᨐࠍࠇ ߡᱜߒߚ⚿ᨐ߇ฝㄝߩ╙৻㗄ߩಽሶߦߞߚF2ߢࠆޕඨዉߥߤߩࡈࠚ࡞ࡒ㕙
ઃㄭߦࠛࡀ࡞ࠡࠡࡖ࠶ࡊߩࠆࠃ߁ߥ♽ߪߩᛒ߇ᔅⷐߢࠆޕ⚦ߦ㑐ߒߡߪ
╙2┨ߢขࠅᛒ߁ޕߎߩ㔚ሶߪޔFE (Field Emission)⽎ࠍ↪ߒߚFE㔚ሶḮ ߩ৻⒳ߛ߇ޔㄭᐕWߩ㊎ࠍ㜞᷷ߦടᾲߒߡ↪ࠆTFE㧔Thermal Field Emission㧕
߿ޔSE (Schottky Emission) 㔚ሶḮ߽FE㔚ሶḮߣ߫ࠇࠆࠤࠬ߇ࠅޔߎࠇࠄ ߣߔࠆߚߦCFE (Cold Field Emission) 㔚ሶḮߣ⸥ߔࠆ߇ᄙޕ
E
x
⌀ⓨ
䊃䊮䊈䊦ലᨐ䊃䊮䊈䊦ലᨐ
㼺E 0.2䌾0.4 eV
W E
F࿑䋱䋮䋷 㔚⇇䈱ේℂ
CFE㔚ሶḮ߆ࠄߐࠇߚ㔚ሶ✢ߩࠛࡀ࡞ࠡಽᏓߪޔ࠻ࡦࡀ࡞⏕₸ߣFermi ಽᏓ㑐ᢙߢ߹ࠅޔ
>
E k T@
dEd E c d
h d dE m
E P
B 1
exp
/ exp exp
4
3 ¸
¹
¨ ·
©
§
] ]
S (1-7)
ߢߐࠇࠆ[18]ޕߎߎߢޔǮߪFermiࠛࡀ࡞ࠡߢࠆޕ߹ߚޔc, d,Ǯߪᰴߩߣ߅ ࠅߢࠆޕ
°°
°°
°
¯
°°
°°
°
®
I I ]
I I
F y q
y t m d qF
y F v q c m
3 3
, 2 , 2
3 , 2 4
!
!
(1-8)
ߎߎߢޔv(y)㧘t(y)ߪ㊄ዻ㕙ߢߩ㏜ജߦࠃࠆࡐ࠹ࡦࠪࡖ࡞ૐਅࠍ⠨ᘦߦࠇߚ႐ว ߩᱜ㑐ᢙߢࠅޔ✭ᄌേ㑐ᢙߥߚޔቯᢙߣߒߡᛒࠊࠇࠆ[19]ޕታ↪⊛ߥ㔚⇇ߢߪޔ t(y)2 = 1.1ޔv(y) = 0.95 – y2 ߣߐࠇߡࠆ[21]ޕ
ࠛࡀ࡞ࠡಽᏓߪޔࡇࠢ߇㜞ࠛࡀ࡞ࠡߦߞߡ߅ࠅޔૐࠛࡀ࡞ࠡߦะ߆ߞ ߡߥߛࠄ߆ߥ࠹࡞ࠍᒁߊ․ᓽ⊛ߥᒻ⁁ࠍߒߡࠆ[19]ޕⴕߩCFEߩᄙߊߪޔW න⚿᥏ߢޔవ┵߇(310)㕙ߦߥߞߡࠆ߽ߩࠍ↪ߡࠆޕߎࠇߪޔ(310)㕙ߩ㑐 ᢙ߇4.3 eVߣޔઁߩૐᜰᢙ㕙ࠃࠅ߽ૐߩߢޔ㜞ノᐲ߇ᓧࠄࠇࠆߚߢࠆ[23]ޕ ߎߩW(310)CFE㔚ሶḮߩ႐วޔࠛࡀ࡞ࠡಽᏓߩඨ୯ߪޔࠃߊ↪ࠄࠇࠆⷺ
㔚ᵹኒᐲ10㨪30ǴA/srߢߪޔ0.3 - 0.4eV⒟ᐲߢࠆޕ㔚⇇ࠍᒝߊߔࠆߣ⌀ⓨߩ㓚ო ߇⭯ߊߥࠆߩߢ㔚ᵹ߇Ⴧടߔࠆޕߎߩߣ߈ૐࠛࡀ࡞ࠡߩ㔚ሶߩ߇Ⴧടߔࠆߚޔ
ࠛࡀ࡞ࠡߪᓢޘߦᐢ߇ߞߡࠁߊޕߐࠄߦ㔚⇇ࠍᒝߊߒߡ㔚ᵹ߇Ⴧടߔࠆߣޔ⌀ⓨ
ਛߦߚ㔚ሶߩࠢࡠࡦലᨐߦࠃࠅߐࠄߦࠛࡀ࡞ࠡ߇ᐢ߇ࠆޕ߹ߚޔ㔚ᵹࠍ Ⴧടߔࠆߣޔᒁ㔚ᭂߥߤ߆ࠄ㔚ሶⴣ᠄ߦࠃࠆࠟࠬߥߤߩᓇ㗀߇ߞߡ㔚ߢ⎕
៊ߒ߿ߔߥߤߩ㗴߽ࠅޔታ↪ߩ㒢୯ߪᢙචǴA ߩࠝ࠳ߢࠅޔታ↪⊛
ߥࡊࡠࡉ㔚ᵹߪ10 ǴA/sr⒟ᐲߢࠆޕ
r
~100 nm
䉧䉟䉲
⊒ᾲ
(䍪䍆䍵䍰䍻䍢)
㔚ᭂ
W㊎
(b) W㊎ (c) ㊎వ┵
(a) CFE㔚ሶḮ
࿑䋱䋮䋸 CFE㔚ሶḮ䈱⇛࿑
~3 nm
ߎߩ㊎ࠍ㑐ᢙߩૐ᧚ᢱߢ᭴ᚑߔࠇ߫ޔේℂ⊛ߦหߓ㔚ᵹ㊂ߩߢ߽ࠛࡀ࡞
ࠡ߇⁜ߊߥࠆޕ߃߫ޔǾB㧩2 - 2.6eVߩࠕ࡞ࠞ㊄ዻࠍ↪ࠇ߫3ഀએߩන
⦡ൻ߇ᦼᓙߐࠇࠆޕ㑐ᢙ߇ૐ႐วࠃࠅᒙ㔚⇇ߢ㔚ሶߔࠆߩߢޔ⋧ኻ⊛ߦ ૐࠛࡀ࡞ࠡߩ㔚ሶߦኻߔࠆ⌀ⓨ㓚ო߇ෘߊߥࠅޔ߇ᛥ߃ࠄࠇࠆߚߢࠆޕ ߒ߆ߒޔታ↪ߪޔ㔚ሶᤨߩJouleᾲ߿ޔNottinghamലᨐߦࠃࠆ⊒ᾲߢ᷷ᐲ߇
ߔࠆߩߢ[24]ޔ㜞Ⲣὐߩ᧚ᢱߢߥߣუࠇߡߒ߹߁ޕ↪ࠄࠇߡࠆWߪޔ
⚐㊄ዻߩ߁ߜߢⲢὐ߇ᦨ߽㜞᧚ᢱߢࠆޕ
ⴕߩCFE㔚ሶḮߢߪ࿑1.8 aߦ␜ߔࠃ߁ߦޔ㔚ሶḮߣߥࠆW㊎ߪޔ⊒ᾲߦߥ ߞߡࠆWࡈࠖࡔࡦ࠻ߦࡑ࠙ࡦ࠻ߐࠇߡࠆޕᾲ㔚ሶḮߢࠊࠇߡߚWࡈࠖ
ࡔࡦ࠻ߦW㊎ࠍߟߌߚࡐࠗࡦ࠻ࠞ࠰࠼߇ࠅޔߎߎߦන⚿᥏Wࠍ⸳ߌߚߣ߁ ᱧผ߇ࠆޕߎߩ᭴ㅧߢߪޔ⊒ᾲ߳ߩㅢ㔚ടᾲߦࠃࠅ㔚ሶḮࠍ2000 K⒟ᐲߦടᾲ ߒߡޔ㕙ߦઃߚᳪࠇࠍ⫳⊒ߐߖࠆ㕙ᷡᵺൻߣޔࠗࠝࡦⴣ᠄ߥߤߢ࠳ࡔࠫࠍฃ ߌߚ㕙ࠍේሶߩᢔߦࠃࠅࠕ࠾࡞ߒߡᒻ⁁ߩೋᦼൻ߇ߢ߈ࠆߣ߁ὐ߇ࠆޕ
߹ߚޔ㔚⇇㗼ᓸ㏜ߦࠃࠅޔWߪ㨧310㨩㕙߇ᦨ߽㑐ᢙ߇ૐ߇⍮ࠄࠇߡ߅ ࠅޔ㔚ሶḮ↪ߣߒߡߪਥߦ<310>ᣇߩࡠ࠶࠼⁁ߩන⚿᥏Wߩవ┵ࠍࠛ࠶࠴ࡦࠣߒ ߡ㊎⁁ߦߒߡ↪ࠄࠇࠆޕ
೨ㅀߩࠃ߁ߦWߩ(310)㕙ࠍḮߦ↪ࠆCFE㔚ሶḮߪశḮ߇ዊߐߊޔノᐲ߇
ᭂߡ㜞ߚߦޔCrewࠄߦࠃࠅᩏဳㅘㆊ㔚ሶ㗼ᓸ㏜ߦタߐࠇߡ㜞ಽ⸃⢻ߩ
߇ᓧࠄࠇࠆߎߣ߇␜ߐࠇߚ[6]ޕశḮߩᄢ߈ߐࠍⓍ߽ࠆߣޔ㕖Ᏹߦዊߐߊ3 nmߢ
ࠆ[16][22]ޕߎࠇߪޔ࿑1.8 cߦ␜ߔࠃ߁ߦޔ゠߆ࠄߚߤߞߡ߃ࠆ㔚ሶߩశḮߪޔ ታ㓙ߦ㔚ሶߒߡࠆ㕙ߢߪߥߊޔߘߩᅏߦࠆዊߐߥὐޔߔߥࠊߜᗐశḮߣ ߥߞߡࠆߚߢࠆޕ
ߎߎߢᡰ㈩⊛ߥ⽎ߢࠆ࠻ࡦࡀ࡞ലᨐߪޔ㕙⁁ᘒߦᭂߡᢅᗵߢࠅޔᱷ⇐ࠟ
ࠬߩๆ⌕ߦࠃࠅ㔚ᵹ߇ਇቯߦߥࠅޔߎࠇ߇ታ↪ൻߩᄢ߈ߥ㓚ኂߢߞߚޕߎߩ ߚޔ㜞⌀ⓨࠍ⛽ᜬߢ߈ࠆࠃ߁ߥ㔚ሶ㌂᭴ㅧ߇㐿⊒ߐࠇߡޔ1972ᐕߦࠃ߁߿ߊFE 㔚ሶ㌂߇㊂↥ᯏߦタߐࠇߚޕߐࠄߦޔࠅߩⅣႺޔ․ߦ㔚ሶ✢߇ߚߊߐࠎᒰߚࠆᒁ ߈ߒ㔚ᭂ߆ࠄߪޔ㔚ሶബߦࠃࠆࠟࠬ߇ࠅߎࠇ߇ቯᕈߦᡰ㈩⊛ߢࠆߎߣ ߇ࠊ߆ࠅޔ㜞⌀ⓨࠍ⛽ᜬߔࠆᛛⴚ߇㐿⊒ߐࠇ[25]ޔࠃࠅቯൻߒߚCFE㔚ሶ㌂ߪ
ߢ߽ᦨ㜞ಽ⸃⢻ߩSEMߦฃߌ⛮߇ࠇߡࠆޕ
㧝㧚㧠㧚㧞 ᾲ㔚ሶ
ടᾲߒߚ‛߆ࠄ㔚ሶ߇ߐࠇࠆ⽎ߪ⌀ⓨਛߩࡈࠖࡔࡦ࠻߆ࠄߩ৻ᣇะߦ ߩߺᵹࠇࠆ㔚ᵹߣߒߡߛߐࠇޔEdisonലᨐߣ߽߫ࠇߡࠆޕᾲߦࠃࠅ㔚ሶߩ
ࠛࡀ࡞ࠡಽᏓ߇㜞ࠛࡀ࡞ࠡߦ߽ᐢ߇ࠅޔ࿑1.9 aߩࠃ߁ߦޔ⌀ⓨḰࠍ߃ߚ 㔚ሶ߇ߐࠇࠆ߽ߩߢࠆޕታ㓙ߩᾲ㔚ሶߦߪ2ߟߩࡕ࠼߇ሽߔࠆޕ࿑
1.9 bߦ᷷ᐲ৻ቯߩ႐วߩ㔚ᵹኒᐲߣᒁ߈ߒ㔚ߩ㑐ଥࠍ␜ߔޕᒁ߈ߒ㔚
߇ૐ㗔ၞߪޔශട㔚Vߩ3/2ਸ਼ߦᲧߒߡ㔚ᵹ߇Ⴧടߔࠆޕߎߎߢߪޔ㔚ሶ߇࿕
߆ࠄ⌀ⓨਛߦ⣕ߒߚᓟޔ㔚⇇ߢടㅦߐࠇߡ㆙ߑ߆ߞߡࠁߊ߇ޔߎߩ㔚⇇߇Ყセ⊛
ᒙߚߦޔߐࠇߚ㔚ሶߩࠆࡐ࠹ࡦࠪࡖ࡞ߦࠃߞߡᓟ߆ࠄߡߊࠆ㔚ሶߩ
߇㒢ࠍฃߌࠆޕߎࠇߪⓨ㑆㔚⩄㒢㔚ᵹޔࠆߪChild-Langmuir㗔ၞߣ߫ࠇ ࠆޕవㅀߩWࡈࠖࡔࡦ࠻ߣLaB6㔚ሶḮߪߎߩ㗔ၞߢ↪ࠄࠇࠆޕߎߩ߹߹ߢߪ㔚 ሶ߇ᐢ㕙Ⓧ߆ࠄᐢⷺᐲߢߐࠇߡߒ߹߁ߩߢޔࡆࡓࠍ⚦ߊ⛉ࠇߥޕ㔚ሶ㗼 ᓸ㏜ߦ↪ࠆ႐วߪޔWehneltߣ߁㒢㔚ᭂࠍ⸳ߌߎߎࠍᛮߌߚ㔚ሶࠍࠕࡁ࠼ߢ ടㅦߒߡ↪ࠆޕWehneltߩࡦ࠭↪ߢ⋥ਅߦߢ߈ࠆ㔚ሶ✢ߩὶὐ߇శḮߣߥࠆߎ ߣߪవㅀߒߚޕߎߩ㗔ၞߢ↪ࠆ㔚ሶḮߪޔノᐲ߇ૐߊࠛࡀ࡞߽ࠡᐢ߇ޔⓨ㑆 㔚⩄ߦࠃࠆ㔚ሶ㒢߇ࠆߚߦޔࡁࠗ࠭߿㔚ᵹᄌേ߇ዊߐߣ߁ὐ߇ࠆޕ ߐࠄߦ㕙㔚⇇ࠍᒝߊߒߡߊߣޔ㔚ᵹჇട߇߶߷㘻ߔࠆޕߎߩߣ߈ߩ㔚ᵹߪ
᷷ᐲߢ߹ࠅޔ᷷ᐲ㒢㗔ၞߣ߫ࠇޔᰴߩRichardson-Dushmanߩᑼߢߐࠇࠆޕ )
2exp(
T T k
A j
B B R
I (1-9)
ߎߩߣ߈jߪ㔚ᵹኒᐲޔARߪRichardsonቯᢙߢ‛⾰ߦଐሽߔࠆ୯ޔkB ߪBoltzmann ቯᢙ㧔 8.62 x 10-5 [eV/K]㧕ޔǾBߪ㑐ᢙߢࠆޕࠃࠅ⚦ߦߎߩ㗔ၞࠍࠆߣޔ VჇടߦᓥߞߡ㔚ᵹ߇ࠊߕ߆ߕߟჇടߒߡࠆޕߎߩ㔚ᵹჇടߪශടߔࠆ㔚⇇ߦࠃߞ ߡࠞ࠰࠼ߩ߆ߌߩ㑐ᢙ߇ਅ߇ࠆߎߣߦ࿃ߔࠆޕ⌀ⓨਛߩ⥄↱㔚ሶߣ㊄ዻ ߩࡈࠚ࡞ࡒ㕙ߣߩ㑆ߦߪ㑐ᢙߩࡐ࠹ࡦࠪࡖ࡞ࠛࡀ࡞ࠡᏅ߇ࠆ߇ޔ㔚ሶ߇㊄ዻ ߩᭂ㕙ߦㄭߠߊߣޔ㊄ዻਛߩ⥄↱㔚ሶਛߦޔㄭߠߚ㔚ሶߩ㏜ߔߥࠊߜޔᱜߩ㔚
⩄߇ᒻᚑߐࠇࠆߚߦޔ㔚ሶߩࡐ࠹ࡦࠪࡖ࡞߇㕙ߦㄭߠߊ߶ߤਅ߇ࠆޕߎߩ㏜ߦ ࠃࠅߢ߈ߚࠗࡔࠫࡐ࠹ࡦࠪࡖ࡞ߦࠃࠆታല⊛ߥ㑐ᢙૐਅߪSchottkyലᨐߣ
߫ࠇࠆޕ㔚⇇Fࠍශടߒߚ႐วߩ㕙ㄭߊߩࡐ࠹ࡦࠪࡖ࡞Uߪᰴᑼߢߐࠇࠆޕ x
x q F U
4SH0
(1-10)
ߎߎߢqߪ㔚ሶߩ㔚⩄㧔 1.602 x 10-19 [C]㧕ޔǭ0ߪ⌀ⓨߩ⺃㔚₸ޔxߪ〒㔌ࠍ␜ߔޕ
ߎߩߚߦ㔚⇇߇ᒝߊߥࠆߣޔ࿑1.9 aߩ᭽ߦ㔚ሶߦኻߔࠆ⌀ⓨ㗅ߩ㓚ო߇ӠWߛ ߌਅ߇ࠆޕߎࠇߢᑼ(1-2)ߩ㑐ᢙࠍ⟎߈឵߃ࠆߣޔᰴᑼ߇ᓧࠄࠇࠆޕ
¸¸
¹
·
¨¨
©
§
¸¸¹
¨¨ ·
©
§ '
k T
F q T
T k T A
k T W
A j
B B
B R
B B R
0 2
2
exp 4
exp SH
I
I (1-11)
ߎࠇ߇ᚑࠅ┙ߟ႐วޔ㔚ᵹIߩኻᢙ㧔log I 㧕ߣ㔚⇇Fߩᐔᣇᩮࠍࡊࡠ࠶࠻ߔࠆߣ⋥
✢ߦߥࠆޕߎࠇߪSchottkyࡊࡠ࠶࠻ߣ߫ࠇޔታ㛎ߢᓧߚ୯߇⋥✢ߦߩࠆ߇SE 㔚ሶߩᜰᮡߣߥߞߡࠆޕ
ⓨ㑆㔚⩄㒢 Schottky
Vc J
E
x
⌀ⓨ
(a) ᾲ㔚ሶ䈱䊝䊂䊦 W
EF
I
B 'WSchottkyലᨐ
ⓨ㑆㔚⩄㒢
(b) 㔚ᵹJ䋭㔚Vc․ᕈ
࿑䋱䋮䋹 ᾲ㔚ሶ䈱ේℂ࿑
ᾲ㔚ሶߢޔⓨ㑆㔚⩄ലᨐࠍฃߌߥ႐วߩࠛࡀ࡞ࠡಽᏓߪᰴᑼߣߥࠆ [18][19]ޕ
T dE k E E
h dE m E P
B ¸¸¹
¨¨ ·
©
§ ] S exp
) 4
( 3 (1-12)
㊄ዻౝߩ⥄↱㔚ሶࠟࠬߩ߁ߜޔ㨤ᣇะߩㆇേࠛࡀ࡞ࠡ߇⌀ⓨḰߩ㓚ოࠍ߃ߚ㔚 ሶ߇⌀ⓨਛߦߐࠇޔߎࠇࠄߩ㔚ሶߩࠛࡀ࡞ࠡಽᏓߢࠆޕߎߩᑼࠃࠅޔᾲ㔚ሶ
ߩࠛࡀ࡞ࠡಽᏓߩඨ୯ߪ2.45 kBT ߣᓧࠄࠇࠆޕ
㧝㧚㧠㧚㧟 5' 㔚ሶḮ
SE㔚ሶḮߪޔ㨃 <100>ᣇߩ㊎ࠍ↪ޔߎߩ㕙ߦZrߣOࠍๆ⌕ߐߖࠆ᭴ㅧ߇
․ᓽߢࠆ(࿑1.10)ޕ㔚⇇ࠍශടߒߥ߇ࠄ1800 K⒟ᐲߩടᾲߢޔవ┵ߩ(100)㕙߆ࠄ 㔚ሶ߇ᓧࠄࠇࠆޕߎߩ᷷ᐲߪWߩᾲ㔚ሶߩ2000 Kࠃࠅૐߊޔ߹ߚޔ㔚⇇
ߔࠆࠃࠅ߽ᒙ㔚⇇ߢࠆޕߎߩේ࿃ߪޔ(100)㕙ߩߺ㑐ᢙ߇2.8eV⒟ᐲߦૐ ਅߒߡࠆߦ࿃ߔࠆ[27]ޕ㊎వ┵ߩⓨ㑆㔚⩄㒢ߩήSchottky㗔ၞߢ↪ࠆ ߚޔSchottky emissionࠍ⇛ߒߡSE㔚ሶḮߣ߫ࠇߡࠆޕ߹ߚޔߐࠄߦ㔚⇇ࠍ ᒝߊߒߡField Emissionᚑಽ߽ࠆ႐วޔTFE㧔Thermal Field Emission㧕㔚ሶḮ ߣ߱ࠤ߽ࠬࠆޕ
ߎߩ㔚ሶḮߦߪߊߟ߆ߩ࡙࠾ࠢߥ․ᓽ߇ࠆޕ৻ߟߪޔേ᷷ᐲ1800 㧷ઃㄭ ߢߪޔZrߣO߇surfactantߣߒߡW (100)㕙ߩߺࠍቯൻߐߖࠆߢࠆޕߎߩ⚿
ᨐޔㅢᏱWࠍ⌀ⓨਛߢടᾲߔࠆߣ᭽ޘߥૐᜰᢙ㕙ߩࡈࠔ࠶࠻߇ࠇࠆ߇ޔZr-Oߩ
ᢔߦࠃࠅ(100)ߩࡈࠔ࠶࠻ߩߺࠇޔ߶߆ߩᣇߩ㕙߇ᶖᄬߒޔ㊎ߩవߪ߶߷ඨ
ᒻߢవ┵ㇱಽߩߺᐔࠄߢᒻߩ(100)ࡈࠔ࠶࠻߇ࠆߣ߁ᒻ⁁ߣߥߞߡࠆޕ ߐࠄߦߎߩ㕙ߪ⥄Ꮖୃᓳ↪߇ࠅޔ⫳⊒߿ࠗࠝࡦⴣ᠄ߢZrේሶ߇ᄬࠊࠇߡ߽ޔ
⋥ߋߦઁ߆ࠄଏ⛎ߐࠇߡߎߩ᭴ㅧࠍߟߣ߁߇ߍࠄࠇࠆޕߎߩߚޔW㊎వ┵
ࠃࠅ㔌ࠇߚߣߎࠈߦZrߣOࠍ⛎ߔࠆᢔḮࠍ⸳ߌޔߎߎ߆ࠄ᧚ᢱࠍ㕙ᢔߢ
⛎ߔࠆߎߣߢޔ1ᐕએߩ㐳ᦼ㑆ߦࠊߚߞߡቯߥ㔚ሶ߇ᓧࠄࠇޔߒ߆߽㔚ᵹᄌ
േ߇ᭂߡዊߐߣ߁․ᓽࠍᜬߞߡࠆޕߥ߅ޔ(100)㕙ߦߪZr-Oߣ߁ๆ⌕᭴
ㅧ߇ࠅߎࠇ߇㑐ᢙૐਅߩේ࿃ߣߐࠇߡࠆ߇ޔߢ߽ߘߩߒ᭴ㅧߪ⏕
ߢߪߥޕ
వ┵
䋨100䋩 䊐䉜䉶䉾䊃
䉧䉟䉲 䉰䊒䊧䉾䉰
ᢔḮ W㊎
⊒ᾲ
(䍪䍆䍵䍰䍻䍢)
㔚ᭂ
㔚ሶ
Zr, O
ᢔ W
Zr O
(100)㕙 వ┵
䋨100䋩 䊐䉜䉶䉾䊃
䉧䉟䉲 䉰䊒䊧䉾䉰
ᢔḮ W㊎
⊒ᾲ
(䍪䍆䍵䍰䍻䍢)
㔚ᭂ
㔚ሶ
Zr, O
ᢔ W
Zr O
(100)㕙
࿑䋱䋮䋱䋰 SE㔚ሶḮ䈱⇛
(a)ᢿ㕙䇮(b)න⚿᥏䌗㊎వ┵䇮(c)㔚ሶ㕙䈱䊝䊂䊦
(a) (b) (c)
SE㔚ሶḮߩࡊࡠࡉ㔚ᵹ߇ᄢ߈ߣޔ㐳ᦼ㑆ቯߥὐߪCFE㔚ሶḮߢߪਇน⢻
ߥߎߣߢࠅޔߎߩὐߩߚߦᦨㄭᐢߊࠊࠇࠆࠃ߁ߦߥߞߡ᧪ߡࠆޕ․ߦඨዉ
ߩࠗࡦߥߤߦࠅ24ᤨ㑆⥄േߢㆇォߔࠆSEM߿ޔX✢ಽᨆⵝ⟎ࠍ߃ߡᄢ㔚 ᵹߩ㔚ሶࡆࡓࠍ↪ߡ⍴ᤨ㑆ߢర⚛ಽᨆ߇ߢ߈ࠆSEMߢߪ↪ߥ㔚ሶḮߣߥߞߡ
ࠆޕᗐశḮᓘߪᢙචnmߣCFEߩ10⒟ᐲࠅޔノᐲ߇1ᩴ⒟ᐲഠࠆޔࠛࡀ
࡞ࠡ߇CFEߦᲧߴߡᐢߎߣ߇ᰳὐߢࠆޕ
ࠛࡀ࡞ࠡಽᏓߪޔૐ㔚⇇ߢߪⓨ㑆㔚⩄㒢ߩήᾲ㔚ሶߣหߓߢࠆޕታ㓙 ߩ↪᧦ઙߢߪ㊎వ┵߳ߩ㔚⇇ශടߩߚߦ࠻ࡦࡀ࡞ലᨐ߽߈ߡ߅ࠅޔࠛࡀ࡞ࠡ
ಽᏓߩ⺑ߦߪޔߎߩ㔚⇇ᚑಽࠍࠇߚޔᒛSchottkyࡕ࠺࡞߇↪ࠄࠇߡ
ࠆ[28]ޕ
°¿
°¾
½
°¯
°®
¸¸
¹
¨¨ ·
©
§ '
¸¹
¨ ·
©
§ ( )
) exp (
1 ln exp
1
) ( )
ES(
F U
F W E kT
W E
F U dE
E
dJ D
4 / 2 3
) (F C F
U (1-13)
3/4 4 27
/ 0 1
2 (V/m)
10 J 28 . ) 2 4
( | u ޓޓ
m C e
S
! SH .
㧝㧚㧡 ᧄ⺰ᢥߢᛒ߁㔚ሶḮ
ᰴߦޔᧄ⺰ᢥߢᛒ߁㔚ሶḮߩ․ᓽࠍᧄ▵ߢ⚫ߔࠆޕ
╙2┨ߪޔCFE㔚ሶḮߦࠛࡀ࡞ࠡࡈࠖ࡞࠲ࠍ߆ߌߡන⦡ൻߒࠃ߁ߣ߁⹜ߺ ߢࠆޕ㊄ዻߩ㊎ߩ㕙ߦߩේሶ߇ๆ⌕ߔࠆߣේሶߩᜬߞߡࠆ㔚ሶḰࠍߒߡ
㡆࠻ࡦࡀ࡞ലᨐ߇߅߈ޔ㔚ሶ㊂߇ᄌࠊࠆߎߣߪ⍮ࠄࠇߡߚ߇ޔන⦡ൻߩႎ๔ ߪή߆ߞߚޕ৻ᣇޔඨዉᩰሶߩ㊂ሶᚭੑ㊀㓚ო᭴ㅧߢߪޔᚭߣ㓚ოጀࠍᦨㆡ ൻߔࠆߣᚭߩ㊂ሶḰߦ৻⥌ߒߚࠛࡀ࡞ࠡߩߺ߇㜞⏕₸ߢㅘㆊߔࠆߎߣ߇⍮
ࠄࠇߡࠆޕᧄ⎇ⓥߢߪߎߩේℂࠍ㔚ሶߦᔕ↪ߒߡࠛࡀ࡞ࠡࡈࠖ࡞࠲ߣߔࠆ ߎߣࠍᦼᓙߒޔන⦡ൻߩℂ⺰ᬌ⸛ߣේℂታ⸽ታ㛎ࠍⴕߞߚ߽ߩߢࠆޕ
ߎߩߚߦߪޔࡐ࠹ࡦࠪࡖ࡞᭴ㅧࠍ⸳⸘ߔࠆᔅⷐ߇ࠆޕ᧚ᢱߣߒߡWߪߦ ߊߚޔᩰሶ߇ᚑ㐳ߢ߈ࠆGaAsၮ᧼ࠍ↪ޔAlAs/GaAs♽ߩᩰሶࠍ↪ߚޕ ℂ⺰ᬌ⸛ߢߪޔ㡆࠻ࡦࡀ࡞ߦᔅⷐߥᚭጀߣߘߩਔߩ㓚ოጀߛ߇ޔߎࠇࠍ࿑1.11 bߩࠃ߁ߦޔ৻ߟߩ㓚ოߣᚭߪ࿕ਛߦAlAs/GaAs♽ߢ᭴ᚑߒޔ߽߁৻ߟߩ㓚ო ࠍ⌀ⓨߣߔࠆ᭴ㅧࠍ⠨᩺ߒߚ[29]ޕ
㡆࠻ࡦࡀ࡞ലᨐ߇ታ㛎⊛ߦ᷹ⷰߢ߈ࠆᗵ⸅ࠍߟ߆ߚߦޔᢙ୯⸘▚ߦࠃࠅ⌀ⓨ
ߩ㓚ოߪ㊎వ┵ߦ㔚⇇ࠍ߆ߌߡࠅޔౝㇱߩ㓚ოጀߣห⒟ᐲߩ࠻ࡦࡀ࡞⏕₸ߦߔࠆߣ
߁ࡕ࠺࡞ࠍᚑߒߚޕߎߩ⸘▚ߪޔᚻߒ߿ߔ᧚ᢱߣ߁ߎߣߢޔGaAs/AlAs
♽ߣޔSi/SiO2ߩ♽ߢ⸘▚ߒޔ⚿ᨐࠍᲧセߔࠆޕ
ᰴߦߎߩේℂታ⸽ߩߚߩታ㛎ࠍⴕߞߚޕ㔚ሶታ㛎ߩߚߦߪ1ᧄ1ᧄ㊎ࠍ
ߞߡታ㛎ߔࠆᣇᴺߪ㔍ߒߚޔၮ᧼ߦዋߒߕߟ᧦ઙࠍᄌ߃ߡᄙᢙߩ㊎ࠍࠅ㧔࿑
1.11 a㧕ޔᒁ߈ߒ㔚ᭂߩ߶߁ߢߎࠇࠍㆬᛯߔࠆᚻᴺࠍ㐿⊒ߒߚޕߐࠄߦޔGaAs㕙 ߢ㗴ߣߥࠆ㕙㉄ൻ‛߿㕙Ḱߦࠃࠆ㔚⩄ߩ࠻࠶ࡊߥߤࠍ㕙ࡄ࠶ࠪࡌࠪ
࡚ࡦᴺߦࠃࠅ⸃ߒࠛࡀ࡞ࠡಽᏓࠍ᷹ቯߒޔන⦡ᕈ߿㊂ሶᚭߦ࿃ߔࠆࠨࡉࡃࡦ
࠼᭴ㅧࠍ⏕ߔࠆ[30]ޕ
E
⌀ⓨ
㔚ሶ✢
㊂ሶ
ᚭ 㓚ო
x
(a) (b)
㔚ሶ✢
GaAs వ┵䈮ᩰሶ
࿑䋱䋮䋱䋱 㡆䊃䊮䊈䊦㔚ሶḮ
(a)GaAs㊎䈎䉌䈱CFE䈪㕙䈮ᩰሶ䇮(b)䉣䊈䊦䉩䊷᭴ㅧ䇮㡆䊃䊮䊈䊦ലᨐ
㡆䊃䊮䊈䊦ലᨐ
╙㧟┨ߪޔSE㔚ሶḮߩන⦡ൻߩ⹜ߺߣߒߡޔേ᷷ᐲࠍਅߍࠆߚߩޔ㕙ߩૐ
㑐ᢙൻߩ⎇ⓥߢࠆ[31]ޕߎߩSE㔚ሶḮߩන⦡ᕈߪၮᧄ⊛ߦᾲ㔚ሶߢ߹
ࠆߩߢޔᦨዊࠛࡀ࡞ࠡߪ᷷ᐲߦᲧߔࠆޕߚߛߒޔߘߩ߹߹േ᷷ᐲࠍਅߍࠆߣ 㔚ሶಽᏓ߇ᄌࠅޔ㜞ࠛࡀ࡞ࠡ㔚ሶߩ㊂߇ᷫࠆߩߢ㔚ᵹ߇ᷫߞߡߒ߹߃ߥޕ ߎࠇࠍ⸃ߔࠆߦߪ㕙ߩ㑐ᢙࠍਅߍࠆᔅⷐ߇ࠆޕᓥߞߡޔૐ᷷േߐߖࠆߚ
ߦߪޔ㕙ߦๆ⌕ߔࠆ᧚ᢱࠍᄌ߃ޔࠃࠅ㑐ᢙߩૐๆ⌕᭴ㅧࠍޔૐ᷷ߢᒻᚑߔ ࠆ߇ᔅⷐߣߥࠆޕߎߩ᧚ᢱߦ᳞ࠄࠇࠆߎߣߪޔవߩSE㔚ሶḮߩ▵ߢ⸃⺑ߒߚࠃ ߁ߦޔW㕙ߦ㑐ᢙߩૐๆ⌕᭴ㅧࠍᒻᚑߔࠆߎߣޔ߮ޔᢔḮ߆ࠄW㕙 ࠍᢔߒߡ㊎వ┵߹ߢቯߦଏ⛎ߐࠇࠆߎߣ߇ᔅⷐߣߥࠆޕߎߩࠃ߁ߥᝄࠆ⥰ߪࠪ
ࡒࡘ࡚ࠪࡦߢోߡ੍ᗐߔࠆߎߣߪ࿎㔍ߥߚޔታ㛎ߢតߔᔅⷐ߇ࠆޕ
వ┵
䋨100䋩 䊐䉜䉶䉾䊃
න⚿᥏䌗㊎వ┵
㔚ሶ✢
M, O
ᢔ
M O
(100)㕙
(a) (b)
㔚ሶ✢
W
࿑䋱䋮䋱䋲 න⦡SE㔚ሶḮ
(a)ᒻ⁁䈲SE㔚ሶḮ䈫ห䈛䇮(b)㕙ๆ⌕᭴ㅧ䉕ૐ㑐ᢙൻ䈚䇮ૐ᷷േ
ߎߩߚߦޔࠆ㊄ዻర⚛MߣW߇O߹ߚߪNࠍߒߡࠆ⒟ᐲᄢ߈ߥ࠳ࠗࡐ
࡞ࡕࡔࡦ࠻߇੍ᗐߐࠇࠆ♽ޔౕ⊛ߦߪޔIVᣖޔㆫ⒖㊄ዻޔࠕ࡞ࠞ㘃ߩ㉄
ൻ‛߮⓸ൻ‛߆ࠄ߃ࠄ߮ޔߐ߹ߑ߹ߥ᧚ᢱࠍ⹜ߒߚߣߎࠈޔSc-O/WߣޔBa-O/W ߇ߘࠇߙࠇߣߒߡᓧࠄࠇޔࠛࡀ࡞᷹ࠡቯߦࠃࠅන⦡ൻ߇⏕ߐࠇߡ߈ߚ[31]ޕ
ߎࠇࠄߩ㔚ሶḮ߆ࠄߩ㔚ሶ✢ߩ⚦ߥࠛࡀ࡞ࠡಽᏓߪޔૐ㔚⇇᧦ઙߢߪSchottky 㔚ሶߩࡕ࠺࡞ߣ⇣ߥߞߡ߈ߡࠆߎߣ߇ࠊ߆ࠅޔታ㛎⚿ᨐࠍ⺑ߔࠆߚߩℂ⺰
⊛⠨ኤࠍⴕߥߞߚޕᓥ᧪ࠊࠇߡ߈ߚ⥄↱㔚ሶࡕ࠺࡞߆ࠄޔࠃࠅታ㓙ߦㄭࡃࡦ࠼᭴
ㅧߢዉߐࠇࠆޔല⾰㊂ㄭૃࠍขࠅࠇߚࡕ࠺࡞ࠍ⠨᩺ߒߚޕౕ⊛ߦߪޔ㔚ሶ
ߔࠆ႐วߦ࿕ਛߩല⾰㊂ߩ㊀♽߆ࠄ⌀ⓨਛߩ⥄↱㔚ሶߦ⒖ࠆ㓙ߦ㔚ሶߩᵄ 㐳߇ᄌࠊࠆߩߢޔ㕙ㄭறߢߩዮ᛬⽎߇⠨߃ࠄࠇࠆޕߎߩ⚿ᨐޔ㔚ሶߦⷺᐲ
㒢ࠍ⸳ߌࠆߎߣߢታ㛎⚿ᨐߩࠛࡀ࡞ࠡಽᏓࠍ⺑ߔࠆ[32]ޕ
╙4┨ߪޔઁߩ2ߟߩ㔚ሶḮߣ⇣ߥࠅޔᐔ㕙⁁ߩGaAsࠍࡌࠬߣߒޔߎࠇߦബ
శࠍߒߡ㔚ሶࠍߐߖࠆశബᣇᑼࠍᬌ⸛ߒߚޕ
శ㔚ሶߪએ೨߆ࠄ⍮ࠄࠇߡࠆ߇ޔߎߎߢߪ⽶ߩ㔚ሶⷫജ㧔NEA: Negative Electron Affinity㧕ߣ߫ࠇࠆ♽ࠍᬌ⸛ߒߚޕౕ⊛ߦߪޔp+-ဳߩඨዉޔ߃߫
GaAsߩၮ᧼㕙ߦCs-Oࠍๆ⌕ߐߖࠆߣޔ㕙ߩ㑐ᢙ߇ૐߊߥࠅޔ⌀ⓨḰ߇
ౝㇱߩવዉᏪߩᐩࠃࠅ߽ૐߊߥࠆ᧦ઙ߇ࠆߚޔశߢવዉᏪߦബߐࠇߚ㔚ሶ߇ᄖ ㇱ㔚⇇ߥߒߦ⌀ⓨਛߦߐࠇࠆ♽ߢࠆ(࿑1.13 b)ޕ
߹ߕޔන⦡ᕈߩ⏕ߩߚߦޔNEA㔚ሶḮ߆ࠄߒߚ㔚ሶߩࠛࡀ࡞ࠡಽᏓࠍ
♖ኒߦ᷹ቯߒޔᦨዊߢቶ᷷ઃㄭߢߩᾲ㔚ሶߣߥࠆߩߢޔ0.1eVએਅ߽น⢻ߢࠆ ߎߣࠍ⏕߆ࠆޕ᧚ᢱߣߒߡޔGaAsߣSiࠍᲧセ⹏ଔߔࠆޕ
㔚ሶ✢
(a)
䊧䊮䉵 ബశ
䉧䊤䉴 GaAs
Cs-Oๆ⌕ጀ 䊧䊮䉵
ബశ
䉧䊤䉴 GaAs
Cs-Oๆ⌕ጀ
(b)
࿑䋱䋮䋱䋳 శബ㔚ሶḮ
(a)䊘䉟䊮䊃䉸䊷䉴ൻ᭴ㅧ䇮(b)NEA䈮䉋䉎න⦡㔚ሶ
ଔ㔚ሶᏪ
EF E
p-GaAs વዉᏪ
IB 㔚ሶ✢
⌀ⓨ
Feff శ
Cs,O
ᰴߦޔߎߩ㔚ሶḮࠍSEMߦㆡ↪ߔࠆߚߩ㜞ノᐲൻߩᬌ⸛ࠍⴕߞߚޕSEMߩ㔚 ሶ㌂ߦ↪ࠆߦߪޔᒻ⁁߇ᐔ㕙ߢࠅޔߔࠆബశߦࠃࠅ㔚ሶߩశḮ߇߹ࠆߩ ߢޔ߶߆ߩ㔚ሶḮߦᲧߴߡశḮࠨࠗ࠭߇ᩴ㆑ߦᄢ߈ޕߎߩߚߦޔ߹ߕޔബశ ࠍᦨዊߦ⛉ࠆߚߦޔశ࠺ࠖࠬࠢᛛⴚࠍᔕ↪ߒޔ㕙Ꮕᱜߐࠇߚ㕖㕙ࡦ࠭ࠍ
↪ޔࠞ࠰࠼ߪGaAs⭯⤑ࠍࠟࠬߦធ⌕ߒߚ߽ߩࠍ↪ޔ㔚ሶߔࠆGaAs㕙 ߩⵣ߆ࠄബశࠍߔࠆߎߣߢޔ㓸శࡦ࠭ࠍᦨㆡߥ⟎߹ߢㄭߠߌޔ࿁᛬㒢⇇
ߩ1Ǵ㨙⒟ᐲߩബశࠍᓧࠆ㧔࿑1.13 a㧕ޕ
੍ታ㛎ߢߪޔߎߩബశࠍ㓸శߔࠆലᨐߣޔGaAs߆ࠄ㔚ሶߔࠆ㓙ߦ㔚ሶᵄ ߇ዮ᛬ߒߡⷺᐲ߇⁜ߊߥࠆߣ߁ലᨐߦࠃࠅޔSE㔚ሶḮਗߺߩ㜞ノᐲࠍታߔ ࠆ᧦ઙࠍᬌ⸛ߔࠆޕ
ᰴߦޔNEAࡎ࠻ࠞ࠰࠼ߩ㔚ሶ㌂ࠍ⹜ߒޔૐടㅦSEMߦタߒޔSEMࠍᓧ ࠆޕߐࠄߦޔේሶ⁁᳓⚛ߦࠃࠆ㕙ࠢ࠾ࡦࠣᴺࠍᬌ⸛ߒޔߎߩᯏ⢻ࠍ㌂ߦタߒ ߡ㜞ಽ⸃⢻ൻࠍ࿑ࠆޕᦨᓟߦޔࠈࠈߥ᧦ઙߦࠃࠆశḮᓘޔⷺ㔚ᵹኒᐲޔノᐲ ࠍ⹏ଔߒޔߘߩഠൻේ࿃ߣ㕙ಣℂ᧦ઙޔGaAsਛߩⓨ㑆㔚⩄ലᨐߣߩ㑐ଥࠍᬌ⸛ߔ ࠆޕߎߩߚߦGaAsߩਇ⚐‛㜞Ớᐲൻ߿ޔബశߩࡄ࡞ࠬൻߦࠃࠆലᨐࠍ⺞ߴࠆޕ [33][34]ޕ
╙5┨ߪޔߎࠇࠄਃߟߩ┨ߩ⚿ᨐࠍ✚ߒޔߐࠄߦᓟߩዷᦸߦߟߡ⸒ߔࠆޕ
㧝㧚㧢 ߘߩઁ⎇ⓥਛߩ㜞ノᐲ㔚ሶḮ
ᧄ⺰ಽߢᛒ߁㔚ሶḮߩ߶߆ߦᄙᢙߩ㔚ሶḮߩ⎇ⓥ߇ߐࠇߡࠆ߇ޔߘߩਛߢᓥ
᧪ࠃࠅ߽㜞ノᐲൻ߿න⦡ᕈะߩน⢻ᕈ߇ࠅޔ㔚ሶ㗼ᓸ㏜ߩ㜞ᕈ⢻ൻ߇ᦼᓙߐࠇࠆ
߽ߩࠍ⚫ߔࠆޕ
࠽ࡁ㔚ሶḮ
CNT߿නේሶtipޔ࠽ࡁࡠ࠶࠼╬ߩࠃ߁ߦޔᓥ᧪ߪᓧࠄࠇߥ߆ߞߚዊߐߥ᭴ㅧߢޔ ߘߩవ┵ࠍ᭴ᚑߒߡࠆේሶ৻ࠆߪᢙ߆ࠄߐࠇࠆ㔚ሶ✢ࠍ߅߁ߣߔ ࠆ⹜ߺ߇ࠆ[35][36][37]ޕ․ᓽߣߒߡߪޔᒻ⁁߇ዊߐߊ㔚⇇㓸ਛଥᢙ߇ᄢ߈ߩߢޔ ૐᒁ㔚ߢ㔚ሶߔࠆߎߣޔ߅ࠃ߮ޔේሶ1⒟ᐲ߆ࠄߐࠇࠆߩߢᭂߡ ዊߐశḮࠨࠗ࠭߇ᦼᓙߐࠇࠆߎߣޔࠆߪ㔚⇇ߩലᨐߢᭂߡ⁜ⷺࠍᜬߞ ߡࠆߎߣ╬ߢޔߎࠇࠄߩ⚿ᨐޔノᐲߪⴕߩW㊎ߩ10એ߇ᦼᓙߐࠇߡࠆޕ ߎߩߚޔ᧪ޔ࠽ࡁ㔚ሶḮߪ㗼ᓸ㏜ߩ㜞ಽ⸃⢻ൻߩࡉࠢࠬ࡞ߣߥࠆน⢻ᕈ߇
ࠆޕ
ߒ߆ߒޔCNTߥߤߩᭂߡ⚦㊎㊄⁁ߩ߽ߩߪޔW㊎ߥߤߩవ┵ߦ㊄ዻ߿Cߩ⫳
⌕ߢ࿕ቯߒߡ߅ࠅޔWߣCߣߩᔕ߿ޔ㔚ሶ㗼ᓸ㏜ਛߢ⚵ߺ┙ߡࠆߩߢ↢↥ᕈ߇ᖡ
ߥߤߩ㗴߇ߞߚޕ߹ߚޔవ┵ߩ⚛ේሶ৻߆ࠄߩࠛࡒ࠶࡚ࠪࡦࠍ߁႐วޔ ߎࠇ߇უࠇߡᛮߌߡߊߣୃᓳߢ߈ߥߣ߁㗴߇ࠆޕ⚛߆ࠄߥࠆ㔚ሶḮߪ CNTએ೨ߦޔࠟࠬ⁁ࠞࡏࡦ㔚ሶḮߩ⎇ⓥ߇ߐࠇߡ߅ࠅޔߎߩߣ߈ߩ․ᓽߣߒߡޔ 㔚ᵹ࠼ࡈ࠻߿ࡈ࠶ࠞ㔀㖸߇ήߣ߁ὐ߇ࠆ[39]ޕߎࠇߪ᳓⚛ࠟࠬߩๆ⌕
ߦࠃࠆࡊࡠࡉ㔚ᵹᄌൻ߇㊄ዻߩ㊎ࠍߞߚCFE㔚ሶḮߢߪㆱߌࠄࠇߥߚޔ
⚛♽ߩᄢ߈ߥࡔ࠶࠻ߣߒߡᦼᓙߐࠇߚ߽ߩߢࠆޕߒ߆ߒޔ⎬ࠟࠬ⁁ࠞࡏࡦ ߩ႐วߪޔࠗࠝࡦⴣ᠄ߥߤߦࠃࠅᰳ៊ߒߚ㔚ሶḮ㕙ߪୃᓳ߇ߢ߈ߥߩߢޔ⊒↢Ḯ
߿ᒁ㔚ߥߤߩ᧦ઙ߇ᄌࠊࠆޔ႐วߦࠃߞߡߪუࠇࠆߣ߁㗴߇ࠅታ↪ൻߦߪ
⥋ࠄߥ߆ߞߚᱧผ߇ࠆޕ
৻ᣇޔ㊄ዻߩ࠽ࡁ᭴ㅧߢޔW㊎వ┵ߦPdේሶߥߤࠍዋ㊂⟎ߊߣޔዊߐࡇࡒ࠶
࠼᭴ㅧࠍࠅޔუࠇߡ߽ૐ᷷ߢౣ㈩ߒ߿ߔߩߢㇱಽ⊛ߦ⥄Ꮖୃᓳߔࠆߣ߁㔚ሶ Ḯ߇㐿⊒ߐࠇޔߐࠄߦޔࠟࠬಽሶ߇ᒰߚࠅߦߊޔశḮ⟎ߩᄌൻ߇ዊߐߩߢቯ ߦ㔚ሶߔࠆߥߤߩ㝯ജࠆ⽎߇ႎ๔ߐࠇߡ߅ࠅ[35]ޔᓟߩㅴዷ߇ᦼᓙߐࠇࠆޕ
ߥ߅ޔ৻⥸⊛ߦޔታ㛎ߢశḮ߇ዊߐߎߣࠍ⸽ߔࠆߎߣߪ߈ࠊߡ㔍ߒޕSEM ߦタߒߡ⹏ଔߔࠆ႐วߪޔᓥ᧪㔚ሶḮࠍߞߡߒߚⵝ⟎ߩᦨ㜞ಽ⸃⢻ࠍޔᣂߒ
㔚ሶḮࠍタߒߡᦝᣂߔࠆᔅⷐ߇ࠅޔઁߩಽ⸃⢻ഠൻⷐ࿃߇ᄙߩߢ࿎㔍ߥታ㛎ߣ ߥࠆޕዊߐߥశḮߩ႐วޔᐓᷤᕈߢ⹏ଔߔࠆᣇᴺ߇ࠅޔ߃߫ޔᭂߡ⚦CNT ߩ႐วޔN. de Jongࠄ߇ޔ࠽ࠗࡈࠛ࠶ࠫߩᛩᓇߦࠇࠆᐓᷤ❋ߩᢙࠍⷰኤߒޔ⁁
ߩW㊎ߩᗐశḮߣห⒟ᐲߣ߁ႎ๔߇ࠆ[38]ޕߒ߆ߒ⁁ߢߪߎߩᣇᴺߪ߫ࠄߟ ߈߇ᄢ߈ߊޔᱜ⏕ߥߎߣߪ߹ߛࠊ߆ࠄߥߣ⸒߃ࠃ߁ޕ
㔚ሶ㗼ᓸ㏜ߣߒߡታ↪ൻߔࠆߚߦߪޔ࠽ࡁ㔚ሶḮߦะߚ㔚ሶ㌂᭴ㅧ߇ᔅⷐߣ⠨
߃ࠄࠇࠆޕᓥ᧪ߩ㔚ሶḮߪశḮࠨࠗ࠭߇ࠆ⒟ᐲᄢ߈߆ߞߚߩߢޔ㔚ሶశቇ♽ߢశḮ
ࠍ❗ዊߒߡ↪ࠆޕߎߩߚޔ㔚ሶ㌂ߩᏅ߇ࠆ⒟ᐲᄢ߈ߊߣ߽ޔኻ‛ࡦ࠭ߢ
❗ዊߐࠇࠆߩߢಽ⸃⢻ߩ㓚ኂߣߥࠄߥޕߒ߆ߒޔశḮ߇ዊߐߎߣࠍᵴ↪ߔࠆߦߪޔ 㔚ሶశቇ♽ࠍ╬߆ࠄᄢ♽ߣߔࠆᔅⷐ߇ࠅޔ߹ߢήⷞߒߡߚ㔚ሶ㌂ߩᏅ߿
ᝄേ߿㔚Ḯߩ߰ࠄߟ߈ߥߤ߇ᄢ߈ߥ㗴ߣߥࠆޕࠃࠅ߽㔚ሶ㌂ߩᏅߦࠃࠅశḮߩ ࠨࠗ࠭߇ᄢ߈ߊ߃ߡߒ߹߁ߣޔ߽ߪ߿㔚ሶశቇ♽ߢ↪ߢ߈ࠆノᐲߪૐ߽ߩߣߥ ߞߡߒ߹߁ޕᓥߞߡޔ࠽ࡁ᭴ㅧߩశḮࠨࠗ࠭ࠍഠൻߐߖߥᭂૐᏅ㔚ሶ㌂ߩ㐿⊒߿ޔ ૐᝄേޔૐࡁࠗ࠭ᛛⴚߩㅴᱠ߇ߎࠇ߆ࠄߩታ↪ൻߩ⺖㗴ߣ⠨߃ࠄࠇࠆޕ
㊀㔚ሶ♽
․ቯߩࠛࡀ࡞ࠡߦ㔚ሶߩ⁁ᘒኒᐲ߇㓸ਛߒߚޔࠊ߫ޔല⾰㊂ߩ㊀㔚ሶ♽ߩ
᧚ᢱࠍ㔚ሶḮߣߒߚන⦡ൻߩ⹜ߺ߇ࠆޕ㔚ዉ㊄ዻࠍ㊎ߦߒߡ㔚⇇ߐߖࠆߣޔ
વዉォߦࠃࠅࡈࠚ࡞ࡒ㕙ઃㄭߦࠇߚࠛࡀ࡞ࠡߩߘࠈߞߚ㜞⁁ᘒኒᐲ߆ࠄ ߩޔᭂߡන⦡ߩ㔚ሶ߇ታ㛎⊛ߦታ⸽ߐࠇߡࠆ[40]ޕ
ห᭽ߩ⠨߃ߣߒߡߪ㨒㔚ሶࠍᜬߟ᧚ᢱߢߪޔ㔚ሶߩല⾰㊂߇ᭂߡ㊀ߊߥࠆ႐ว ߇ࠅޔߎߩߣ߈ޔ⁜ࠛࡀ࡞ࠡ▸࿐ߦ⁁ᘒ߇߹ߞߡࠆߩߢޔߎߎ߆ࠄ㔚ሶࠍ
ߔࠇ߫න⦡㔚ሶߔࠆߣ߁ࠕࠗ࠺ࠖࠕ߇ࠆ[41]ޕ
ታ↪ߪߎߩࠃ߁ߥᭂන⦡㔚ሶߩߺࠍขࠅߒߡߚ߇ޔታ㓙ߦߪᏱ㔚ዉ߿ઁ
ߩࡃࡦ࠼ߩࠛࡀ࡞ࠡಽᏓߩᐢ㔚ሶ߇ሽߔࠆߚޔㅢᏱߩCFEߣหࠝ࠳ߩ
ࠛࡀ࡞ࠡߩ㔚ሶ߇ਥߣߥߞߡߒ߹߁ޕᓥߞߡޔන⦡㔚ሶߩߺࠍขࠅߔᎿᄦޔ
߃߫ઁߩࡃࡦ࠼ߣߩ㑆ߦࠛࡀ࡞ࠡࠡࡖ࠶ࡊࠍ⸳ߌࠆޔ࠻ࡦࡀ࡞ലᨐߩࠛࡀ࡞ࠡࡈ
ࠖ࡞࠲ࠍ⸳ߌࠆߥߤ߇ᔅⷐߢࠆޕ᧪ޔࠃࠅࠡࡖ࠶ࡊߩᐢ㜞᷷㔚ዉߩᔕ↪
߿ޔᩰሶߥߤ᧚ᢱߩㅴዷߦࠃߞߡߪޔࡃࡦ࠼ߩᓮࠍⴕ߁ߥߤߒߡޔන⦡㔚ሶḮߣ ߒߡߩᬌ⸛߇ߢ߈ࠆࠃ߁ߦߥࠆ߇ᦼᓙߐࠇࠆޕ
એޔ1.3▵ޔ߮ޔ1.4▵ߢ⚫ߒߡ߈ߚ㔚ሶḮ⎇ⓥߪᓟߩ㔚ሶ㗼ᓸ㏜ߩㅴൻߩߚ
ߩ♳ߣߥࠆ߽ߩߣᦼᓙߒߡࠆޕ
╙㧝┨ߩෳ⠨ᢥ₂
[1] WWWߢᏒ႐േะࠍࠆߎߣ߇ߢ߈ࠆޕ߃߫ޔ
http://www.researchandmarkets.com/reports/1870050/the_world_market_for_electron_mi croscopes
[2] ߃߫ޔE. Ruska, "The Development of the Electron Microscope and of Electron Microscopy", Bioscience Reports 7 (1987) 607.
[3] Zworykin VA, Hillier J, Snyder RL: A scanning electron microscope. ASTM Bull 117, 15-23 (1942).
[4] T. E. Everhart and R. F. M. Thornley, "Wide-band detector for micro-microampere low-energy electron currents", J. Scientific Instrum. 37 (1960) 246.
[5] A. V. Crewe, D. N. Eggeberger, J. Wall and L. M. Welter, "Electron Gun Using a Field Emission Source", Rev. Sci. Instrum., 39 (1968) 576.
[6] A. V. Crewe, J. Wall and J. Langmore, "Visibility of Single Atoms", Science 168 (1970) 1338.
[7] M. Sato, “Chap.8 Resolution”, in “Handbook of Charged Particle Optics” Ed. J. Orloff (1977) CRC Press NewYork, p325.
[8] E. W. Plummer and T. N. Rhodin, “Atomic Binding of Transition Metals on Clean Single-Crystal Tungsten Surfaces”, J. Chem. Phys. 49 (1968) 3479
[9] O. Scherzer, “Über einige Fehler von Elektronenlinsen”, Z. Physik 101 (1936) 593.
[10] O. Scherzer, “Sphärische und chromatische Korrektur von Elektronenlinsen”, Optik 2 (1947) 114.
[11] H. Rose, “Berechnung eines elektronenoptischen Apochromat”, Optik 31 (1970) 144, H.
Rose, “Abbildungseigenschaften sphärisch korrigierter elektronenmikroskopischer Achromate", Optik 33 (1971) 1, H. Rose, “Elektronenoptische Aplanate”, Optik 34
(1971) 285, ⵣ సᏆޟᭂሶ♽ߦࠃࠆࡦ࠭Ꮕᱜߦ㑐ߔࠆRoseਃㇱߩో⸶ޠ
ቇᝄ╙132ᆔຬળ ╙169࿁⎇ⓥળ(᧲੩)⾗ᢱ ᐔᚑ17ᐕ729ᣣ.
[12] M. Haider, G. Braunshausen, E. Schwan, "Correction of the spherical aberration of a 200 kV TEM by means of a Hexapole-corrector", Optik 99 (1995) 167.
[13] J. Zach and M. Haider, “Aberration correction in a low voltage SEM by a multipole corrector”, Nucl. Instrum. Meth. A 363 (1995) 316.
[14] S. Uno, K. Honda, N. Nakamura, M. Matsuya and J. Zach, "Aberration correction and its automatic control in scanning electron microscopes", Optik 116 (2005) 438.
