䝬䜲䜽䝻ὶయ䝕䝞䜲䝇ෆ䛾ὶ䜜䛚䜘䜃ศᏊ 䛾ィ 

䝬䜲䜽䝻ὶయ䝕䝞䜲䝇ෆ䛾ὶ䜜䛚䜘䜃ศᏊ 䛾ィ 

ᮾி኱Ꮫ኱Ꮫ㝔ᕤᏛ⣔◊✲⛉ᛂ⏝໬Ꮫᑓᨷ

໭᳃◊✲ᐊ ≉௵෸ᩍᤵ ᮡ஭ ᗣᙪ

➨6ᅇ䛂Ꮫ㝿㡿ᇦ䛻䛚䛡䜛ศᏊ䜲䝯䞊䝆䞁䜾䝣䜷䞊䝷䝮䛃䠄2010.11.8䠅

ෆᐜ

䠍䠊䝬䜲䜽䝻䞉䝘䝜໬Ꮫ䝅䝇䝔䝮 䞉 䝬䜲䜽䝻໬Ꮫ䝅䝇䝔䝮 䞉 ⇕䝺䞁䝈㢧ᚤ㙾 䞉 ᣑᙇ䝘䝜✵㛫

䠎䠊䝬䜲䜽䝻ὶື䛾ྍど໬ィ  䞉 䝬䜲䜽䝻ྥὶ

䞉 䝬䜲䜽䝻ᾮ⁲䝁䝷䜲䝎䞊

䠏䠊4኱Ꮫ䝘䝜䞉䝬䜲䜽䝻䝣䜯䝤䝸䜿䞊䝅䝵䞁䝁䞁䝋䞊䝅䜰䝮

໬Ꮫᶵჾ䛾༢⣧䛺䝭䝙䝏䝳䜰໬ ?

༢⣧䛺

㉸ᑠᆺ໬

⏺㠃ᙇຊ 䠚㔜ຊ ప䝺䜲䝜䝹䝈ᩘ䠙ᒙὶ 㧗ẚ⏺㠃✚S/V

ᵓ⠏䛧䛶䛝䛯䝬䜲䜽䝻㧗ᗘᇶ┙ᢏ⾡䞉᪉ἲㄽ

䝭䜽䝻༢఩᧯స䠄MUO䠅䛾ᩚ⌮䞉య⣔໬

+

┦ྜὶ ┦ศ㞳

ศᏊ㍺㏦䞉⁐፹ᢳฟ ΰྜ䞉཯ᛂ

Ẽᾮศ㞳

䜺䝇྾཰䞉⃰⦰

Ẽᾮ཯ᛂ

┦ྜὶ ⵨Ⓨ䞉⃰⦰

ẼἻ㝖ཤ

จ⦰

⵨␃

䜹䝷䝮ศ㞳 ⭷ศ㞳 ศᏊᤕᤊ䞉ᅛ┦ᢳฟ

ຍ⇕ ⣽⬊ᇵ㣴 ᾮᾮ

Ẽᾮ

ᅛᾮ

䛭䛾௚

㐃⥆ὶ໬Ꮫ䝥䝻䝉䝇䠄CFCP䠅 䝬䜲䜽䝻ከ┦ὶ䛻䜘䜛MUO䛾⮬⏤䛺⤌ྜ䛫

䞉་⒪䞉デ᩿

䞉⎔ቃศᯒ 䞉䝞䜲䜸ศᯒ 䞉ぬ㓰๣ศᯒ

䛥䜎䛦䜎䛺䝬䜲䜽䝻໬Ꮫ䝥䝻䝉䝇䛾ᐇ⌧

䞉་⸆ရྜᡂ 䞉໬⢝ရྜᡂ 䞉ᚤ⢏Ꮚྜᡂ

⎔ቃỈ୰䛾㔜㔠ᒓởᰁศᯒ

7 cm

ศᯒ᫬㛫 䠖 3 䡚4 ᫬㛫 → 50 ⛊

ヨᩱ䞉⸆ရ㔞䠖 1 kg → 1 g䠄༑൨ศ䛾୍䠅

ឤᗘ 䠖 1000ಸ㧗ឤᗘ

䛴䜎䜚䚸஭ᡞỈ䛾䝠⣲䛷䜒⡆༢䛻ศᯒྍ

ᢠ䜺䞁๣⏕⏘⿦⨨

ྜᡂ໬Ꮫ䜈䛾ᛂ⏝

⏕⏘⬟ຊ30䝖䞁䠋ᖺ䛿ྠ䛨䟿 20m

2m

䝀䝹〇㐀䝬䜲䜽䝻໬Ꮫ䝥䝷䞁䝖

10kg䠋᭶䠄⸆๣䛸䛧䛶඘ศ䛺⏕⏘䟿䠅

䞉┬䝇䝨䞊䝇

䞉┬䜶䝛䝹䜼䞊 䞉ప䝁䝇䝖䠄タഛ⥔ᣢ䠅

䞉䝸䝇䜽పῶ䠄ẘᛶ䞉⇿Ⓨ䠅

䞉䜸䞁䝕䝬䞁䝗⏕⏘

⇕䝺䞁䝈㢧ᚤ㙾䠄TLM䠅䛾ཎ⌮䛸ᛶ⬟

䝣䜱䝹䝍䞊 䝢䞁䝩䞊䝹

ບ㉳ග 䝥䝻䞊䝤ග

⇕䝺䞁䝈

཰᮰

ᑐ≀䝺䞁䝈

ヨᩱ

1~100m

㏱㐣ග㔞ቑຍ

䝣䜷䝖䝎䜲䜸䞊䝗

ಙྕ=ΔI ҃⇕䝺䞁䝈䛾ᗘ҃⃰ᗘ

Ⓨ⇕

d=1m

ᛶ⬟

ศᏊᩘ䛾ᮇᚅ್䠄ศᏊ䠅

⇕䝺䞁䝈ಙྕᙉᗘ䠄௵ព༢఩䠅

Sample: Lead(II)-porphyrin

0 0.5 1 1.5 2 2.5 3 3.5 Detection volume䠖7fL

ཎ⌮

ᖜ150m™῝ࡉ100mࡢ࣐࢖ࢡࣟࢳࣕࢿࣝ

㠀⺯ගᛶศᏊ䜢༢୍䝺䝧䝹䛷᳨ฟ䛷䛝䜛䛿䛨䜑䛶䛾᪉ἲ

1 2 3 4 5 6 7

0

Anal.Chem. 73, 2112-2116 (2001).

1 m䝏䝱䝛䝹䛷䛾༢୍ศᏊ䠄䝘䝜⢏Ꮚ䠅᳨ฟ

䝏䝱䝛䝹䝃䜲䝈

: ᖜ1µm 㽢῝䛥1µm

䝰䝕䝹ヨᩱ

: 0.9 pM 䝫䝸䝇䝏䝺䞁Ỉ⁐ᾮ(⢏ᚄ䠖130nm, = 10⁹ M^-1cm^-1)

ಙྕἼᙧ ᳨㔞⥺

䠄V䠅

100 80 60 40 20 0

⇕䝺䞁䝈ಙྕᙉᗘ

10 8 6 4 2 0

᫬㛫㻔⛊㻕

60 50 40 30 20 10 0

䜹䜴䞁䝖ᩘ㻌䠄䝟䝹䝇㻌/㻌ศ䠅

1500 1000 500 0

⃰ᗘ㻔fM㻕 㻌㻌ᐇ㦂್

㻌䝏䝱䝛䝹䜢㏻㐣䛩䜛⢏Ꮚᩘ

䝏䝱䝛䝹ෆ䛾⢏Ꮚ䜢䜋䜌඲䛶䜹䜴䞁䝖䛩䜛䛣䛸䛻ᡂຌ

ᐇ㦂䝒䞊䝹

↓䛧

䝘䝜䝔䜽

㻯㻺㼀

,

䝘䝜⢏Ꮚ

㻹㻱㻹㻿㻌㻌㻌㻌㻌㻌㻌㻌㻌

䝬䜲䜽䝻໬Ꮫ䝏䝑䝥

䝃䜲䝈㝵ᒙ䛸ᣑᙇ䝘䝜✵㛫

㼪㽐 㻝

㼚㼙 㽀㼙 㼙㼙 㼙

㻝㻜 㻝㻜㻜 㻝 㻝㻜 㻝㻜㻜 㻝 㻝㻜 㻝㻜㻜 㻝 㻝㻜

䞉᪩䛔䜶䝛䝹䜼䞊䞉ศᏊ㍺㏦

䞉㔜ຊ䍾⏺㠃ᙇຊ 䞉ప䝺䜲䝜䝹䝈ᩘ 㻏㻌㻔ᒙὶ㻕 䞉㻷㼚㼛㼣㼚㻌㼎㼡㼠㻌㼟㼠㼞㼍㼚㼓㼑㻌㼍㼞㼑㼍 䝘䝜ὶయ≉ᛶ䠛䞉

䝘䝜ὶయᵓ㐀䠛䞉

཯ᛂ≉ᛶ䠛䞉

㼁㼚㼗㼚㼛㼣㼚㻌㼍㼞㼑㼍䞉

䞉ᐇ⏝໬

᪂䛧䛔◊✲ሙ䞉

䜺䝷䝇ᶵჾ

䝔䜽䝜䝻䝆䞊

ヨ㦂⟶

⾲㠃䞉⏺㠃ᙇຊ

㟁Ẽ஧㔜ᒙຊ

Van der Waalsຊ

ሷᇶ

,

䝍䞁䝟䜽

,

㧗ศᏊ

DNA

⣽⬊ ⤌⧊ ே

༢୍ศᏊ 䜽䝷䝇䝍䞊 จ⦰⣔ὶయ ⁐ᾮ

ᣑᙇ䝘䝜✵㛫

䝥䝻䝖䞁㟁Ⲵศᕸ

άᛶ໬䜶䝛䝹䜼䞊 ᅇ㌿䞉୪㐍㐠ື

NMR䛻䜘䜛ᣑᙇ䝘䝜✵㛫䛾ỈศᏊ㐠ືᛶホ౯

800nm

800nm

850nm ୪㐍ᡂศ

䛾䜏ᢚไ

㟁Ⲵศᕸᒁᅾ໬

㧗䛔䝥䝻䝖䞁⛣ືᗘ

䝘䝜䝫䜰

1 nm 40 nm 200 nm 800 nm 10 m ᣑᙇ䝘䝜✵㛫 䝬䜲䜽䝻✵㛫

S

B

ᵓ㐀 ᅛయ

ᾮయ

ᵝ

ᅇ㌿䞉୪㐍㐠ື ୧᪉ไ㝈

ไ㝈䛺䛧

䝥䝻䝖䞁஺᥮㏿ᗘ 㠀ᖖ䛻㏿䛔

㐜䛔

ᾮయᵝ ୪㐍ไ㝈

㏿䛔

S

_a

S

_a

S

B

S

_P

S

P

S

_a

ቨ㠃

~50 nm

䝥䝻䝖䞁

⛣ື

䜎䛸䜑

䜺䝷䝇⾲㠃 䝞䝹䜽┦

䝥䝻䝖䞁

⛣ື┦

~ 50nm

2007ᖺ2᭶ྕ ྾╔┦

䞉ỈศᏊ䜸䞊䝎䝸䞁䜾

Angew.Chem.Int.Ed 2007

䞉⢓ᗘୖ᪼䠄4ಸ䠅

Anal.Chem.2002

䞉ㄏ㟁⋡పୗ䠄1/7ಸ䠅

Anal.Chem.2002

䞉໬Ꮫ཯ᛂᛶኚ໬

Anal.Bioanal.Chem2008

䞉䝥䝻䝖䞁⛣ືᗘ䛾ቑ

኱䠄20ಸ, NMR ᐃ)

Angew.Chem.Int.Ed 2007

ぢฟ䛧䛯ຠᯝ䞉⌧㇟

ᣑᙇ䝘䝜✵㛫ෆ䛾Ỉ

ᣑᙇ䝘䝜✵㛫ὶయᕤᏛ䛾๰ᡂ

ෆᐜ

䠍䠊䝬䜲䜽䝻䞉䝘䝜໬Ꮫ䝅䝇䝔䝮 䞉 䝬䜲䜽䝻໬Ꮫ䝅䝇䝔䝮 䞉 ⇕䝺䞁䝈㢧ᚤ㙾 䞉 ᣑᙇ䝘䝜✵㛫

䠎䠊䝬䜲䜽䝻ὶື䛾ྍど໬ィ  䞉 䝬䜲䜽䝻ྥὶ

䞉 䝬䜲䜽䝻ᾮ⁲䝁䝷䜲䝎䞊

䠏䠊4኱Ꮫ䝘䝜䞉䝬䜲䜽䝻䝣䜯䝤䝸䜿䞊䝅䝵䞁䝁䞁䝋䞊䝅䜰䝮

䝬䜲䜽䝻ྥὶ

≀⌮ⓗຊ ࣐ࢡࣟ㸦1 m㸧 ࣐࢖ࢡࣟ㸦100 µm 㸧 Re(័ᛶຊ䠋⢓ᛶຊ) ~10³䛷஘ὶ㑄⛣ 10¹- 10^-1䠄ᒙὶ䠅

Bo(ᾋຊ䠋⏺㠃ᙇຊ) ~10⁴ ~10^-4

⃿䜜ᛶ䛾ᙳ㡪 ⾲㠃䛛䜙1 mm ✵㛫඲య

࣐࢖ࢡࣟ✵㛫ࡢ≀⌮≉ᛶ

Ỉ

┦

Ỉ

┦ Ἔ

┦

Ἔ

┦ Ἔ

⁲

~cm

Ỉ

┦

Ỉ

┦ Ἔ

┦

Ἔ

┦

~µm

࣐ࢡࣟከ┦ὶ࡜࣐࢖ࢡࣟከ┦ὶࡢ≉ᚩ

Ᏻᐃ࡞㐃⥆ὶᖹ⾜ྥὶ ᅔ㞴

Ᏻᐃ࡞㐃⥆ὶᖹ⾜㡰ὶ ᐇ⌧

Ᏻᐃ࡞㐃⥆ὶᖹ⾜ྥὶ

Ỉ

┦

Ỉ

┦ Ἔ

┦

Ἔ

┦

~µm

Ỉ

┦

Ỉ

┦ Ỉ

┦

Ἔ

┦ Ỉ

┦

Ỉ

┦ Ἔ

┦

Ἔ

┦ ᾮ ᾮ

⏺ 㠃

ᾮ ᾮ

⏺ 㠃

࣐࢖ࢡࣟྥὶ

~µm

⏺㠃ᙇຊ

⢓ᛶ㸦పࣞ࢖ࣀࣝࢬᩘ㸧 Ỉ

┦

Ỉ

┦ Ἔ

┦

Ἔ

┦

␯ Ỉ

⾲ 㠃 ぶ

Ỉ

⾲ 㠃

࣐ࢡࣟࡢྥὶ

ᨭ㓄ⓗᅉᏊ 㔜ຊ 㸦ᐦᗘᕪ㸧

Ỉ

┦

Ỉ

┦ Ἔ

┦

Ἔ

┦ Ἔ

⁲

䝬䜲䜽䝻ྥὶᙧᡂ

~cm

࣐࢖ࢡࣟὶ㊰

ᑟධᏍ

ぶỈᛶ

␯Ỉᛶ 㸦࢜ࢡࢱࢹࢩࣝࢩࣛࣥಟ㣭㸧

ᾮᾮ⏺㠃

Ỉ┦ Ἔ┦

䝟䝍䞊䝙䞁䜾ಟ㣭䛻䜘䜛 䝬䜲䜽䝻ྥὶ䛾ᐇ⌧

Ỉ┦ Ἔ┦

䝟䝍䞊䝙䞁䜾ಟ㣭䝬䜲䜽䝻䝏䝑䝥

ぶỈ⾲㠃

␯Ỉ⾲㠃

70 mm

20 mm 300 µm

῝ࡉ: 200 µm

స〇䛧䛯䝟䝍䞊䝙䞁䜾ಟ㣭䝬䜲䜽䝻䝏䝑䝥

Ᏻᐃᖹ⾜䝬䜲䜽䝻ྥὶ

Ỉ

Ỉ Ỉ

㓑㓟ࣈࢳࣝ 㓑㓟ࣈࢳࣝ

㓑㓟ࣈࢳࣝ

300 µm

20 mm Ỉ┦ ⺯ගᚤ⢏ᏊศᩓỈ㸦㉥Ⰽ㸧 Ἔ┦ ⬡⁐ᛶࣇࣝ࢜ࣞࢭ࢖ࣥ⁐ᾮ㸦⥳Ⰽ㸧

Ỉ-䜸䜽䝍䝜䞊䝹䝬䜲䜽䝻ྥὶ

Ỉ┦ ㉥Ⰽ⺯ගᚤ⢏ᏊศᩓỈ

Ἔ┦ ⥳Ⰽ⺯ගᚤ⢏Ꮚศᩓ䜸䜽䝍䝜䞊䝹⁐ᾮ

㐃⥆ὶᏳᐃᖹ⾜ྥὶࢆᐇ⌧

࣐࢖ࢡࣟ✵㛫࡛ᐇ⌧

Ỉ 㸦1.0 µl/min)

࢜ࢡࢱࣀ࣮ࣝ

㸦1.0 µl/min)

0 1 2 3 4 5 㓑㓟䝤䝏䝹ὶ㔞(µl/min)

Ỉὶ㔞

(µl/min)

0 -5 10 5 20

15

ಟ㣭

ಟ㣭

䝬䜲䜽䝻㡰ὶ

䝬䜲䜽䝻ྥὶ

Ỉ

┦

Ἔ

┦ Ỉ

┦ Ἔ

┦

ᮍಟ㣭

䝬䜲䜽䝻ྥὶ⏕ᡂ᮲௳

ᾮᾮ⏺㠃䛻䛚䛡䜛ᅽຊ䛾㔮ྜ䛔

Ἔ┦ Ỉ┦

␯Ỉ⾲㠃 ぶỈ⾲㠃

䝬䜲䜽䝻ྥὶ┦ศ㞳䛾≀⌮ⓗ䝯䜹䝙䝈䝮

䝬䜲䜽䝻ྥὶ୰䛾ᅽຊ

Ἔ┦

Ỉ┦

P_atm

P_atm

P_atm

䝏䝱䝛䝹఩⨨

ᅽຊ

ᅽຊᕪ

ࣛࣉࣛࢫᅽ 㸦⏺㠃ᙇຊ㸧 ᅽຊᕪ

Ỉ┦ᅽຊ

Ἔ┦ᅽຊ

ᅽຊᕪ䛸䝷䝥䝷䝇ᅽ䛸䛾㔮䜚ྜ䛔

␯Ỉ⾲㠃 ぶỈ⾲㠃 ␯Ỉ⾲㠃 ぶỈ⾲㠃

Ἔ┦ Ỉ┦

Ỉ┦䛜Ἔ┦ഃ䜈ὶ䜜ฟ䜛ሙྜ Ἔ┦䛜Ỉ┦ഃ䜈ὶ䜜ฟ䜛ሙྜ

Ἔ┦ Ỉ┦

ࣛࣉࣛࢫᅽ

ᅽຊᕪ ࣛࣉࣛࢫᅽ ᅽຊᕪ

R

sin(–90˚)

= d 㸸⏺㠃ᙇຊ R㸸᭤⋡༙ᚄ

㸸᥋ゐゅ

d㸸ࢳࣕࢿࣝ῝ࡉ

䝲䞁䜾䞉䝷䝥䝷䝇䛾ᘧ

PLaplacc=

๓㐍᥋ゐゅ ^{๓㐍᥋ゐゅ}

Ἔ┦ Ỉ┦

␯Ỉ⾲㠃 ぶỈ⾲㠃

ࣛࣉࣛࢫᅽ

(PLaplace)

ᅽຊᕪ

R d

sin(2–90˚)

- d < ^PLaplace<sin(1–90˚) d

䝬䜲䜽䝻ྥὶ┦ศ㞳ὶ㔞᮲௳

0 0.1 0.2 0.3 0.4 0.5 ࢺ࢚ࣝࣥὶ㔞(µl/min) 0

10 20 50

Ỉὶ㔞(µl/min)

30 40

Ỉ-䝖䝹䜶䞁

(25Υ)

Ỉ⢓ᗘ 㸸0.890 mPa·s ࢺ࢚ࣝࣥ⢓ᗘ 㸸0.549 mPa·s

⏺㠃ᙇຊ 㸸35.4 mN/m

0 2 4 6 8 10

✵Ẽὶ㔞(µl/min) 0

10 20 30

Ỉὶ㔞(µl/min)

Ỉ-✵Ẽ

(25Υ)

Ỉ⢓ᗘ 㸸0.890 mPa·s

✵Ẽ⢓ᗘ 㸸0.000 mPa·s

⏺㠃ᙇຊ 㸸72.0 mN/m 40

7 cm

3 cm

ᖜ

: 100 µm

῝ࡉ

: 25 µm

ྜὶ㒊

: 500 µm

Ỉ┦

␯Ỉ⾲㠃

ぶỈ⾲㠃 Ἔ┦

⺯ග⢏Ꮚ

⺯ගᚤ⢏Ꮚ

㧗㏿ᗘ࣓࢝ࣛ

㠃 㧗

㧗㏿䝬䜲䜽䝻PIVἲ䛻䜘䜛㏿ᗘศᕸィ 

Vaq= 0.2 µl/min V_org= 0.1 µl/min

Ỉ 㓑㓟䝤䝏䝹

䝬䜲䜽䝻ྥὶ

100 µm

ቨ㠃 ቨ㠃

Ỉ┦

Ἔ┦

䝬䜲䜽䝻ྥὶ୰ὶ㏿ศᕸ

-3.0 0.0 3.0

ὶ㏿(mm/s) 0

20 40 60

yᗙᶆ(µm)

ቨ㠃

ᾮᾮ

⏺㠃

Ỉ┦

0

Ἔ┦

y

x

ᐇ㦂 ゎᯒゎ

ᐇ㦂 ゎᯒゎ

Ỉὶ㔞 㸸0.2 µl/min

ࢺ࢚ࣝࣥὶ㔞 㸸0.1 µl/min

Ỉὶ㔞 㸸0.1 µl/min ࢺ࢚ࣝࣥὶ㔞 㸸0.9 µl/min

-3.0 0.0 3.0

ὶ㏿(mm/s) 0

20 40 60

yᗙᶆ(µm)

ቨ㠃

ᾮᾮ

⏺㠃

V_aq= 0.1 µl/min Vorg= 1.3 µl/min

120 µm

 ὶ

Ỉ 㓑㓟䝤䝏䝹

ቨ㠃

ቨ㠃

࣮ࣝࣉὶ

 ὶ

䝬䜲䜽䝻ྥὶ୰ᾮᾮ⏺㠃㏆ഐ䛾≉␗ὶ䜜

㏻ᖖࡢᐇ㦂ࢧ࢖ࢬ࡛ࡣほᐹ࡛ࡁ࡞࠸ὶయ≉ᛶࡀ࣐࢖ࢡࣟ✵㛫࡛㢧ᅾ໬

ᖹ⾜ὶ⥺

0.0 0.5 1.0 1.5

㓑㓟ࣈࢳࣝὶ㔞(µl/min) 0.0

0.1 0.2 0.3 0.4 0.5

Ỉὶ㔞(µl/min)

ෆᐜ

䠍䠊䝬䜲䜽䝻䞉䝘䝜໬Ꮫ䝅䝇䝔䝮 䞉 䝬䜲䜽䝻໬Ꮫ䝅䝇䝔䝮 䞉 ⇕䝺䞁䝈㢧ᚤ㙾 䞉 ᣑᙇ䝘䝜✵㛫

䠎䠊䝬䜲䜽䝻ὶື䛾ྍど໬ィ  䞉 䝬䜲䜽䝻ྥὶ

䞉 䝬䜲䜽䝻ᾮ⁲䝁䝷䜲䝎䞊

䠏䠊4኱Ꮫ䝘䝜䞉䝬䜲䜽䝻䝣䜯䝤䝸䜿䞊䝅䝵䞁䝁䞁䝋䞊䝅䜰䝮

1 M. Joanicot et al., Science (2005)

Ỉ

M. Tokeshi et al., Anal. Chem.(2002)

ᚑ᮶䛾䝬䜲䜽䝻ὶయ䝥䝻䝉䝇

ᾮ⁲䛾⏕ᡂ䞉ྜ୍䛾䜏

Ἔ୰ᾮ⁲

¹

䠋Ẽ୰ᾮ⁲

²

ΰྜ䚸཯ᛂ䚸ᢳฟ䛺䛹

」㞧䛺໬Ꮫ䝥䝻䝉䝇䛾㞟✚໬

ᾮ⁲䝥䝻䝉䝇 ᖹ⾜ὶ䝥䝻䝉䝇

Ỉ Ỉ

Ἔ

Ỉ Ỉ

Ἔ Ἔ 䝬䜲䜽䝻✵㛫䛾䝇䜿䞊䝹ຠᯝ䛾䜏䜢฼⏝

䝞䝑䝏䝥䝻䝉䝇䛾㞟✚໬

2 K. Hosokawa et al., Anal. Chem.(1999)

Ẽయ

ᾮ⁲䛾ຍ㏿䛻䜘䜛㐠ື䜶䝛䝹䜼䞊䛾✵㛫ⓗ㞟୰

ᾮ⁲䛾⾪✺䛻䜘䜛㐠ື䜶䝛䝹䜼䞊䛾᫬㛫ⓗ㞟୰

✵㛫䠋᫬㛫ⓗ㞟୰䛻䜘䜛᪂䛧䛔䝬䜲䜽䝻໬Ꮫ䝥䝻䝉䝇䛾ᐇ⌧

䝬䜲䜽䝻ᾮ⁲䝁䝷䜲䝎䞊

ᾮ⁲ ᶆⓗ

3 cm

7 cm

䝬䜲䜽䝻໬Ꮫ䝏䝑䝥

ຍ㏿ ⾪✺

ᶆⓗ

•

ᾮ⁲

•

㐃⥆ὶ

•

⣽⬊ ➼

䝬䜲䜽䝻䝏䝱䝛䝹(~ 100 m)

ᅽຊ

Ẽᾮ䝷䝥䝷䝇ᅽ䛻䜘䜛ᾮయไᚚ

Ẽᾮ䝷䝥䝷䝇ᅽ

䝬䜲䜽䝻✵㛫䛷䛿᱆㐪䛔䛻኱䛝䛔

-2cos

PLP= r

: ⾲㠃ᙇຊ : ᥋ゐゅ

r: ὶ㊰༙ᚄ

䝏䝱䝛䝹ᵓ㐀䛸⾲㠃⃿䜜ᛶ䛻䜘䜛䝞䝹䝤ᶵ⬟

␯Ỉಟ㣭

ᾮయ

PLP r

Ẽయ

䝷䝥䝷䝇䝞䝹䝤 䝏䝱䝛䝹ୖ㠃

䝏䝱䝛䝹ᗏ㠃

P_LP P_IN

ᾮయ

Ẽయ

PLP>< PIN

3 cm

7 cm

㉮⾜㌶㐨 ᾮ⁲䝷䞁䝏䝱䞊

⾪✺䝏䝱䞁䝞䞊

䝬䜲䜽䝻ᾮ⁲䝁䝷䜲䝎䞊䝏䝑䝥

ᾮ⁲䝷䞁䝏䝱䞊

P_IN< P_LP

ᾮయᑟධ

ᖜ

70 µm

ୖ㠃ᅗ ᩿㠃ᅗ

PIN

␯Ỉಟ㣭䠄䝣䝑⣲䝫䝸䝬䞊䠅 ᥋ゐゅ䠖

117

PLP

ᖜ

50 µm

䝷䝥䝷䝇䝞䝹䝤 Ẽయ

P_LP: 8 kPa

ୖ㠃 ᗏ㠃

῝䛥

30 µm

῝䛥

10 µm

ᾮ⁲䝷䞁䝏䝱䞊䛻䛚䛡䜛ືస

ᾮయᑟධ

P_IN< P_LP P_IN< P_LP

ᾮ⁲⏕ᡂ

PIN> PLP

Ẽయ

㽢 ᾮ⁲Ⓨᑕ

ᾮయ

P_LP PIN

Ẽయ

P_LP PIN

䝷䝥䝷䝇

䝞䝹䝤 㟼Ṇಖᣢ

Ⓨᑕ ຍ㏿

ᅽຊ䝁䞁䝖䝻䞊䝷

䝏䝑䝥

㢧ᚤ㙾䝅䝇䝔䝮

⣧Ỉ

PC

3᪉䝞䝹䝤

኱Ẽᅽ㛤ᨺ

ᅽ⦰

✵Ẽ ᅽຊ 䝞䝑䝣䜯䞊

༳ຍ䝀䞊䝆ᅽ

PIN

ᐇ㦂䝅䝇䝔䝮

•

᧜ᙳ䠖

~ 20,000 fps

•

㟢ග᫬㛫䠖

~ 1/100,000⛊

㧗㏿ᗘ䜹䝯䝷

᧜ᙳ᮲௳

ᅽ⦰✵Ẽ

80 kPa

ᾮ⁲䝷䞁䝏䝱䞊

䝷䝥䝷䝇 䝞䝹䝤

㽢

Ⓨᑕ

1/12ಸ㏿

䝇䝻䞊෌⏕

ᾮ⁲䛾Ⓨᑕ䛸ຍ㏿

ᙎ୸

ᾮ⁲ 䝷䝥䝷䝇 䝞䝹䝤

1/100ಸ㏿

䝇䝻䞊෌⏕

1 mm 1 mm

•

᧜ᙳ䠖

5,000 fps

•

㟢ග᫬㛫䠖

1/40,000⛊

80 kPa ༳ຍ᫬䛾Ⓨᑕ㏿ᗘ䠖 920 mm/s

ᾮ⁲Ⓨᑕ䛸ຍ㏿

ᚑ᮶䛾Ἔ୰Ỉ⁲䠄10 mm/s䠅䛾10

²

ಸ䛾㏿ᗘ䚸10

⁴

ಸ䛾㐠ື䜶䝛䝹䜼䞊䜢㐩ᡂ

ᾮ⁲㏿ᗘ(mm/s)

᫬㛫

(ms)

ຍ㏿

ຍ㏿ᗘ䠖

2,300 m/s²

䠄230 G䠅 ῶ㏿

䝃䞁䝥䝸䞁䜾䝺䞊䝖

5,000 Hz

㻜

㻟㻜㻜 㻢㻜㻜 㻥㻜㻜 㻝㻞㻜㻜

㻜 㻡 㻝㻜 㻝㻡

Ⓨᑕ

➼㏿

ᾮ⁲㐠ື䛾㧗㏿ྍど໬ィ 

ᅽຊ䝁䞁䝖䝻䞊䝷

䝏䝑䝥

㢧ᚤ㙾䝅䝇䝔䝮

⣧Ỉ

PC

3᪉䝞䝹䝤

኱Ẽᅽ㛤ᨺ

ᅽ⦰

✵Ẽ ᅽຊ 䝞䝑䝣䜯䞊

༳ຍ䝀䞊䝆ᅽP

IN

㧗㏿ᗘ䜹䝯䝷

500 µm

← ᾮ⁲䝷䞁䝏䝱䞊 ⾪✺䝏䝱䞁䝞䞊→

䝬䜲䜽䝻䝏䝱䝛䝹

ᙎ୸ᾮ⁲

„

ᾮ⁲䛾⤊➃㏿ᗘィ  ᅽຊ䠖

50, 100, 150, 200 kPa

ィ ಸ⋡䠖

4ಸ

᧜ീ㏿ᗘ䠖

~20,000 fps

᧜ീ㡿ᇦ䠖

5.0 mm x 0.6 mm

0 1 2 3 4 5 6

0 5 10 15 20

᫬㛫

t (ms)

ᾮ⁲఩⨨x (mm)

ᾮ⁲⤊➃㏿ᗘ䛾ྍど໬ィ 

x = 0.27 t –0.045

⤊➃㏿ᗘ

270 mm/s

༳ຍᅽຊ䠖100 kPa

x

500 µm

← ᾮ⁲䝷䞁䝏䝱䞊 ⾪✺䝏䝱䞁䝞䞊→

䝬䜲䜽䝻䝏䝱䝛䝹

ᙎ୸ᾮ⁲

0 100 200 300 400 500 600

0 50 100 150 200 250

ᾮ⁲⤊➃㏿ᗘ䛾ᅽຊ౫Ꮡᛶ

༳ຍᅽຊ

P_IN(kPa)

ᾮ⁲⤊➃㏿ᗘ(mm/s)

3 cm

7 cm

㉮⾜㌶㐨 ᾮ⁲䝷䞁䝏䝱䞊

⾪✺䝏䝱䞁䝞䞊

䝬䜲䜽䝻ᾮ⁲䝁䝷䜲䝎䞊䝏䝑䝥 ⾪✺䝏䝱䞁䝞䞊

ୖ㠃ᅗ ᩿㠃ᅗ

ᖜ

70 m

῝䛥

30 m

῝䛥

10 m

ᖜ

100 m

PLP

䝏䝱䞁䝞䞊 䝃䜲䝗䝏䝱䝛䝹

PLP

Ẽయ

Ẽయ

ᶆⓗᾮ⁲ ୖ㠃 ᗏ㠃

PLPୖ: 8 kPa P_LPᕥྑ: 3 kPa

␯Ỉಟ㣭

䠄䝣䝑⣲䝫䝸䝬䞊䠅

⾪✺䝏䝱䞁䝞䞊䛻䛚䛡䜛ືస

⾪✺๓

PLP

㎿㏿Ẽయ㝖ཤ 㟼Ṇಖᣢ

⾪✺

㽢

⾪✺ᚋ

㟼Ṇಖᣢ

PLP

ᙎ୸ᾮ⁲

ᶆⓗᾮ⁲

㎿㏿Ẽయ㝖ཤ

PLP

1 mm ᾮ⁲䝷䞁䝏䝱䞊

⾪✺䝏䝱䞁䝞䞊

ᅽ⦰✵Ẽ

80 kPa

䝷䝥䝷䝇 䝞䝹䝤

㽢

Ⓨᑕ 㽢

ᾮ⁲ᧁ䛱㎸䜏㒊䛾タィ ᾮ⁲䛾⾪✺

1/8ಸ㏿

䝇䝻䞊෌⏕

䝏䝱䞁䝞䞊 䝃䜲䝗䝏䝱䝛䝹

ᶆⓗᾮ⁲

1/80ಸ㏿

䝇䝻䞊෌⏕

•

᧜ᙳ䠖

10,000 fps

•

㟢ග᫬㛫䠖

1/100,000⛊

100 m

䝣䝹䜸䝺䝉䜲䞁䠄0.25 nL䠅

80 kPa

⣧Ỉ䠄2.5 nL䠅

⺯ගほᐹ

య✚ẚ1:10䛾ᚤ㔞ᾮ⁲㛫㎿㏿ΰྜ

⣧Ỉ

ᐇ㏿ᗘ䛷䛾෌⏕

䝣䝹䜸䝺䝉䜲䞁

(0.25 nL) 80 kPa

⣧Ỉ䠄2.5 nL䠅

100 m ᐇ㏿ᗘ䛷䛾෌⏕

య✚ẚ 10:1 䛾ᚤ㔞ᾮ⁲㛫㎿㏿ΰྜ

⺯ගほᐹ

⾪✺

䝏䝱䞁䝞䞊

0 0.2 0.4 0.6 0.8 1

0 600 1200 1800

఩⨨ 䠄µm䠅

⺯ගᙉᗘ䠄つ᱁໬䠅

0.55 s 1.65 s

0 s

0 1800 µm

య✚ẚ 10:1 䛾ᚤ㔞ᾮ⁲㛫㎿㏿ΰྜ

0 0.1 0.2 0.3

0 4 8 12

ΰྜ᫬㛫䛾ホ౯

ᣑᩓ

→3,000⛊

య✚ẚ1:10䛾ᚤ㔞ᾮ⁲㛫䛾㎿㏿䠄ᚑ᮶䛾6,000ಸ௨ୖ䠅ΰྜ䜢㐩ᡂ

⺯ගศᕸ䛾ᶆ‽೫ᕪ

= < ( I- < I > )²>^{1/2 I:}< I^{ྛ⏬⣲䛾⺯ගᙉᗘ}>: ඲⏬⣲䛾ᖹᆒ⺯ගᙉᗘ T_90%: 90䠂ΰྜ䛻ᚲせ䛺᫬㛫 T90%: 0.1 x t=0

䛸䛺䜛᫬㛫

*A. D. Stroock et al., Science (2002)

ᚲせΰྜ᫬㛫䛾ᐃ⩏*

1:10ΰྜ䠄20 kPa䠅 1:10ΰྜ䠄80 kPa䠅 10:1ΰྜ䠄20 kPa䠅 10:1ΰྜ䠄80 kPa䠅

T90%

0.5 ⛊ 1.8 ⛊ 2.3 ⛊4.8 ⛊

᫬㛫䠄⛊䠅

⺯ගศᕸ䛾ᶆ‽೫ᕪ

ᾮ⁲㧗㏿⾪✺᫬䛾ෆ㒊ὶືゎᯒ

ÆP_a 1 mm

70 µm

100 µm 1 mm

100 µm

⣧Ỉᾮ⁲

⣧Ỉᾮ⁲

ᅽ⦰✵Ẽ

40 kPa

᧜ᙳ䠖2000 fps 1/200ಸ㏿ 䝇䝻䞊෌⏕

᧜ᙳ䠖2000 fps 1/2000ಸ㏿ 䝇䝻䞊෌⏕

⣧Ỉᾮ⁲

⣧Ỉᾮ⁲

䠄1 µm ⺯ග⢏Ꮚ䠅

0 0.2 0.4 0.6 0.8

0 1 2 3 4

᫬㛫

t (ms)

ᾮ⁲ඛ➃఩⨨x (mm)

x = 0.20 t - 0.0071

ᶆⓗᾮ⁲

ᙎ୸

ᾮ⁲

⾪✺ᾮ⁲䛾ᾐධ㏿ᗘ

ྠ୍ᚄᾮ⁲䛾㧗㏿⾪✺䛻䜘䜛ᾐධ

x

ᾮ⁲㏿ᗘ䠖120 mm/s

ᾐධ㏿ᗘ䠖200 mm/s

ᮾி኱Ꮫ ᮡ஭ ᗣᙪ

4 ኱Ꮫ䝘䝜䞉䝬䜲䜽䝻䝣䜯䝤䝸䜿䞊䝅䝵䞁䝁䞁 䝋䞊䝅䜰䝮

ୡ⏺䛾䝘䝜䝬䜲䜽䝻㛵㐃ᣐⅬ

MIT, Microsystems Technology Laboratories Cornell Univ.,

Cornell nanoscale Science and Fabrication Facility

Penn State Univ., Nanofabrication Facility (250m²: class10)

Georgia Tech., Microelectronics Research Laboratory (9000m²+2000m²:building) North Carolina State Univ., Triangle National Lithography Center (700m²)

UCSB, Nanotech Fabrication Facility (1200m²) Stanford, Stanford NanoFabrication Facility (975m²:class100)

UC Berkeley, Berkeley Sensor and Actuator Center Helsinki Univ., Micronova Center for Micro and Nanotechnologies (2500m²) MiNaLab,

National laboratory for advanced

micro and nano technology (1400m²) KTH

London Center for Nanotechnology

IMEC (8000m², 1750m²: class1)

ETH

MINATEC, (10000m²)

Nanyang Technological University, Micro Fabrication Laboratory HKUST,

The Institute of Micro System

National Taiwan Univ.

National Nano Lab

Tohoku Univ., Venture Business Laboratory IMTEK,

University of Freiburg

ɭမӲ׎Ể Ὁ ἁἼὊὅἽὊἲ Ὁ இέᇢь߻

Ὁ ᚘยᚨͳ

ửͳảẺἜἠἰỶἁἿਗໜ࢟঺

ί ὸϋỊἁἼὊὅἽὊἲờẲẪỊ࡫ཋỉ࠿᩿ᆢ

ୡ⏺䛾䝘䝜䝬䜲䜽䝻ᣐⅬ䛾ศᕸ≧ἣ

4኱Ꮫ䝁䞁䝋䞊䝅䜰䝮

2008. 3 4኱Ꮫ䝘䝜䞉䝬䜲䜽䝻䝣䜯䝤䝸䜿䞊䝅䝵䞁䝁䞁䝋䞊䝅䜰䝮Ⓨ㊊䠄ᖿ஦ᰯ䠖ᮾி኱Ꮫ䠅

2009. 1

ᕝᓮᕷ䛸䛾㐃ᦠ༠ຊ䛻㛵䛩䜛ྜព䠄4Ꮫ㒊㛗䛸ᕝᓮᕷ㛗䛻䜘䜛グ⪅఍ぢ䠅

2009. 3

ᕝᓮᕷ䛻◊✲ᐊ㛤タ䠄4኱Ꮫ㛗䛻䜘䜛グ⪅఍ぢ䠅

┿ቨ฼᫂

៞᠕⩏ሿ኱Ꮫ

⌮ᕤᏛ㒊㛗 ᶫᮏ࿘ྖ᪩✄⏣኱Ꮫ

⌮ᕤᏛ⾡㝔㛗 㜿㒊Ꮥኵ ᕝᓮᕷ㛗 ᯇᮏὒ୍㑻 ᮾி኱Ꮫ

๪Ꮫ㛗 ᒸᓮ ೺ ᮾிᕤᴗ኱Ꮫ

⌮ᕤᏛ◊✲⛉

໭᳃Ṋᙪ ᕤᏛ⣔㛗 ᮾி኱Ꮫ ᕤᏛ⣔๪◊✲⛉㛗

Ᏻす♸୍㑻 ⓑ஭ඞᙪ ᑠᐑᒣᏹ ఀ㈡೺୍

៞᠕⩏ሿ኱Ꮫ᪩✄⏣኱Ꮫ ᮾி኱Ꮫ ᮾிᕤᴗ኱Ꮫ

ሿ㛗 ⥲㛗 ⥲㛗 Ꮫ㛗

◊✲ᐊ䠖

᪂ᕝᓮ 䛛䜟䛥䛝᪂⏘ᴗ๰㐀䝉䞁䝍䞊䠄KBIC䠅 102/104ྕᐊ䠄~300 m²䠅 Nanotechnology

INNOVATION City, Kawasaki

Nanotechnology Science City, Tsukuba

2009.2.16 2009.1.27

䝘䝜䞉䝬䜲䜽䝻ᕤᏛ

䝘䝜䝣䜷䝖䝙䜽䝇

MEMS/NEMS

䝬䜲䜽䝻䞉䝘䝜໬Ꮫ 䝘䝜䞉䝞䜲䜸

䝘䝜䞉䝬䜲䜽䝻 䝣䜯䝤䝸䜿䞊䝅䝵䞁

䝁䞁䝋䞊䝅䜰䝮

ேᕤ䝘䝜✵㛫ᕤᏛඹ㏻ᇶ♏

•

ᴟ㝈䝘䝜ຍᕤᢏ⾡

•

䝘䝜ὶయຊᏛ

•

䝘䝜ᵓ㐀ຊᏛ

•

䝘䝜໬Ꮫ཯ᛂㄽ

•

䝘䝜⏕࿨໬Ꮫ

↓③㉸㧗㏿

⾑ᾮデ᩿

䝕䝇䜽䝖䝑䝥

໬Ꮫ䝥䝷䞁䝖

⮬ື㌴䝉䞁䝃

㉸㧗ᐦᗘ䠠䠲䠠

䝘䝜䞉䝬䜲䜽䝻䝣䜯䝤䝸䜿䞊䝅䝵䞁䝁䞁䝋䞊䝅䜰䝮

⤌⧊ᵓᡂ

ᕝᓮᕷ ⱝᡭ◊✲⪅

Ꮫ⏕

ⱝᡭ◊✲⪅

Ꮫ⏕

䝘䝜䞉䝬䜲䜽䝻 䝣䜯䝤䝸䜿䞊䝅䝵䞁 䝁䞁䝋䞊䝅䜰䝮

ⱝᡭ◊✲⪅

Ꮫ⏕

ⱝᡭ◊✲⪅

Ꮫ⏕

ᮾிᕤᴗ኱Ꮫ ᮾி኱Ꮫ

•

ᆅᇦ⏘ᴗ⏺ㄪᩚ

•

᪋タᘓタ

៞᠕⩏ሿ኱Ꮫ

᪩✄⏣኱Ꮫ

ேᕤ䝘䝜✵㛫ᕤᏛ䝁䜰

•

ඹ㏻ᇶ┙ᕤᏛ◊✲

•

Ꮫ⾡ᩍ⫱஺ὶ

•

⏘Ꮫබ㐃ᦠ䝸䜶䝌䞁

•

᝟ሗⓎಙ

•

ᅜ㝿䝛䝑䝖䝽䞊䜽ᵓ⠏

•

タഛ฼⏝䞉⊂⮬◊✲

•

ඹྠ◊✲䞉ᡂᯝᒎ㛤

⏘ᴗ䝙䞊䝈

䝁䞁䝋䞊䝅䜰䝮஦ᴗ䛾䠐䛴䛾ᰕ

1. ◊✲஦ᴗ

1.2 䝣䜯䜴䞁䝎䝸䞊䝛䝑䝖䝽䞊䜽ᙧᡂ

Ꮫෆ◊✲⪅බເ䞉ᨭ᥼

1.1 ඹ㏻ㄢ㢟䛾䝁䜰◊✲㒊㛛 2. ᩍ⫱஦ᴗ

2.2 ኱Ꮫ㝔䛻䛚䛡䜛ᩍ⫱༠ຊ

ಟኈ䞉༤ኈᏛ⏕஺ὶ䞉༢఩஫᥮

2.1 ⏘ᴗ⏺䞉䜰䜹䝕䝭䜰䛾ධ㛛䛛䜙㧗ᗘᩍ⫱

3. ⏘Ꮫ㐃ᦠ஦ᴗ

3.2 䜲䞁䝍䞊䝣䜵䞊䝇஦ᴗ䛻䜘䜛seed䠉need 䝬䝑䝏䞁䜾 3.1 ᆅᇦ⏘Ꮫ㐃ᦠ䛻䜘䜛ᐇ⏝໬ಁ㐍

4. ᗈሗᬑཬ஦ᴗ 4.2 ඹྠ◊✲䛾᥎㐍

4.1 䝩䞊䝮䝨䞊䝆䛺䛹䛻䜘䜛ᢏ⾡බ㛤ಁ㐍

ᣐⅬᙧᡂ䛻䜘䜚ᮇᚅ䛥䜜䜛ຠᯝ

ศ㔝䞉⤌⧊䜢㉸䛘䛯⼥ྜ䞉ேᮦ⫱ᡂ䞉ୡ⏺ⓗᣐⅬ

䝘䝜ගᏛ䞉໬Ꮫ䞉NEMS䞉䝞䜲䜸 䛺䛹䛾⼥ྜ䛸᪂Ꮫ⾡๰ᡂ

䜶䝛䝹䜼䞊/⎔ቃ㈇Ⲵ䜢

⪃៖䛧䛯䜲䝜䝧䞊䝔䜱䝤䛺

⎔ቃᢏ⾡య⣔

᪂䝕䝞䜲䝇䛾ᥦ᱌䛸 ᪂⏘ᴗ๰ฟ

䝥䝻䝉䝇↔䝕䝞䜲䝇↔ 〇ရ ᢏ⾡䝣䜱䞊䝗䝞䝑䜽䛜᭷ຠ䛺

䝃䝇䝔䜲䝘䝤䝹䛺䝅䝇䝔䝮໬ᢏ⾡ ᮾி኱Ꮫ ᮾிᕤᴗ኱Ꮫ

៞᠕⩏ሿ኱Ꮫ ᪩✄⏣኱Ꮫ

⏘ᴗ⏺䜋䛛

•ඹྠ◊✲

•ᡂᯝᒎ㛤

⮬἞య䞉ᨻᗓ

•タഛᩚഛ

•ᨭ᥼άື

䝘䝜䞉䝬䜲䜽䝻 䝕䝞䜲䝇ᢏ⾡

㛤Ⓨ◊✲ᣐⅬ 䞉◊✲ᣐⅬ 䞉᪂⏘ᴗ 䞉ேᮦ⫱ᡂ

᪂䝕䝞䜲䝇䛻䜘䜛᪂䛧䛔♫఍⏕ά䛾䜲䝯䞊䝆

⏕⏘䞉䝻䝆䝇䝔䜱䝑䜽ኚ㠉䛻䜘䜛

⮬↛⎔ቃ䞉㒔ᕷ⎔ቃᨵၿ

ே䛜ື䛟♫఍䛛䜙᝟ሗ䛜ື䛟♫఍䠖 䜶䝛䝹䜼䞊ᾘ㈝పῶ䛸䝃䞊䝡䝇䛾㉁ⓗኚ໬

༠ㄪ䛸➇த䠖᪂䛧䛔◊✲ᣐⅬయไ

ㅰ㎡

ᮾி኱Ꮫ኱Ꮫ㝔ᕤᏛ⣔◊✲⛉ᛂ⏝໬Ꮫᑓᨷ ᩍᤵ ໭᳃ Ṋᙪ ඛ⏕

ᮾி኱Ꮫ኱Ꮫ㝔ᕤᏛ⣔◊✲⛉ᛂ⏝໬Ꮫᑓᨷ 䠄⌧䠖 䠄㈈䠅㟁ຊ୰ኸ◊✲ᡤ䠅

㟷⏣ ᪂ ༤ኈ

ᮾி኱Ꮫ኱Ꮫ㝔ᕤᏛ⣔◊✲⛉ᛂ⏝໬Ꮫᑓᨷ 䠄⌧䠖 䠄ᰴ䠅䝅䝱䞊䝥䠅

㧗ᶫ ඞె ༤ኈ