䠄㻝㻞䠅㻵㻵㻵 ᪘ ❅ ໬ ≀ ༙ ᑟ య 䜢⏝ 䛔䛯୰ ᛶ Ꮚ 䜲䝯䞊䝆䞁䜾䝉䞁䝃䞊䛾㻌㛤 Ⓨ 㻌

(1)

㻌㻌

䠄㻝㻞䠅㻵㻵㻵 ᪘ ❅ ໬ ≀ ༙ ᑟ య 䜢⏝ 䛔䛯୰ ᛶ Ꮚ 䜲䝯䞊䝆䞁䜾䝉䞁䝃䞊䛾㻌㛤 Ⓨ 㻌

㻌㟼 ᒸ ኱ Ꮫ 䞉Ꮫ ⾡㝔 ᕤ Ꮫ 㡿 ᇦ 㻌 ୰ 㔝㻌㈗ அ 㻌

㻌㟼 ᒸ ኱ Ꮫ 䞉㟁 Ꮚ ᕤ Ꮫ ◊ ✲ ᡤ 㻌㟷 ᮌ 㻌 ᚭ 䚸୰ ᕝ 㻌 ኸ ஓ 㻌㻌㟼 ᒸ ኱ Ꮫ 䞉኱ Ꮫ 㝔 ⥲ ྜ ⛉ Ꮫ ᢏ ⾡㻌

◊ ✲ ⛉ 㻌

ᒣ ⏣ 㻌 ኟ ᬦ 䚸㧗 ᶫ 㻌 ♸ ྣ 䚸ᆏ ஭ ⏣ 㻌 ᫭ ᖹ 䚸 ኴ ⏣ 㻌 ᝆ ᩯ 㻌

㻌㏆ ␥ ኱ Ꮫ 䞉ཎ Ꮚ ຊ ◊ ✲ ᡤ 㻌 ⱝ ᯘ 㻌 ※ ୍ 㑻㻌㻌

䛆◊ ✲ ⫼ ᬒ 䛇㻌

㻌 ᨺ ᑕ ⥺ 䛾㏱㐣 ᛶ 䜢฼ ⏝ 䛧䛯᳨ ฟ ჾ 䛿ᵝ 䚻䛺ศ 㔝䛷฼ ⏝ 䛥䜜䛶䛚䜚䚸㠀 ◚ ቯ ᳨ ᰝ ⿦ ⨨ 䛺䛹䛾㟂せ䛜ᣑ ኱ 䛧䛶䛔䜛䚹ᨺ ᑕ ⥺ ᳨ ฟ 䛻䛚䛔䛶䚸୰ ᛶ Ꮚ ⥺ 䛻䛴䛔䛶䜒䚸㼄 ⥺ 䛺䛹䛸␗ 䛺䜛㏱

㐣 ᛶ 䜢ᣢ 䛴䛣䛸䛛䜙䚸䝩䞊䝮䝷䞁䝗䝉䜻䝳䝸䝔䜱䛻䛚䛡䜛᰾ ≀ ㉁㍺㏦ ᳨ ᰝ 䚸䝩䜴⣲ ୰ ᛶ Ꮚ ᤕ ⋓

἞ ⒪ 㻔㻮㻺㻯㼀㻕ἲ 䚸㔠 ᒓ ᶵ ჾ 䛾㠀 ◚ ቯ ᳨ ᰝ 䛺䛹ᵝ 䚻䛺ศ 㔝䛷᪂ 䛧䛟ὀ ┠ 䛥䜜䛶䛔䜛䚹䛣䛾䜘䛖䛺୰ ᛶ Ꮚ ⥺ 䛾฼ ⏝ 䛻䛚䛔䛶䚸᳨ ฟ ᢏ ⾡䛿㔜せ䛺ᇶ ┙ ᢏ ⾡䛷䛒䜚㧗 ឤ ᗘ 䛺୰ ᛶ Ꮚ ᳨ ฟ ჾ 䛸䛧䛶 ^㻟㻴㼑䜺䝇䜢⏝ 䛔䛯䜺䝇ィ ᩘ ⟶ 䛜ᗈ 䛟฼ ⏝ 䛥䜜䛶䛔䜛䚹䛧䛛䛧䛺䛜䜙䚸ୡ ⏺ ⓗ 䛺㻴㼑䜺䝇䛾ᯤ Ῥ ၥ 㢟䛻䜘䜚౪ ⤥ 䛜ᅔ 㞴䛻䛺䛳䛶䛝䛶䛚䜚䚸᪂ 䛧䛔୰ ᛶ Ꮚ ᳨ ฟ ᢏ ⾡䛾㛤 Ⓨ 䛜ᮇ ᚅ 䛥䜜䛶䛔䜛䚹ᮏ ◊ ✲ 䛷䛿䚸ḟ ୡ ௦ 䛾୰ ᛶ Ꮚ ᳨ ฟ ჾ 䛸䛧䛶୰ ᛶ Ꮚ ༙ ᑟ య ᳨ ฟ ჾ 䛻╔ ┠ 䛧䚸⇕ ୰ ᛶ Ꮚ ᤕ ⋓ ᩿ 㠃 ✚ 䛜኱ 䛝䛔㻮 ཎ Ꮚ 䜢ྵ 䜐㻮㻳㼍㻺 ༙ ᑟ య 䜢฼ ⏝ 䛧䛯㻮㻳㼍㻺 ⇕ ୰ ᛶ Ꮚ ༙ ᑟ య

᳨ ฟ ჾ 䜢ᥦ ᱌ 䛧䚸㛤 Ⓨ 䜢㐍䜑䛶䛔䜛䚹㻵㻵㻵 ᪘ ❅ ໬ ≀ ༙ ᑟ య 䛷䛒䜛㻮㻳㼍㻺䛿㻳㼍㻺䛾㻳㼍 ཎ Ꮚ 䜢㻮 ཎ Ꮚ 䛻⨨ ᥮ 䛧䛯ᮦ ᩱ 䛷䛒䜚䚸⤖ ᬗ ᡂ 㛗 ᢏ ⾡䛻䜘䜛స 〇䛸䝕䝞䜲䝇స 〇䛜㔜せ䛺ㄢ㢟䛸䛺䛳䛶䛔䜛䚹䛭䛣䛷䚸㻮㻳㼍㻺 ⤖ ᬗ ᡂ 㛗 ᢏ ⾡䛾㛤 Ⓨ 䛻䜘䜚ཌ ⭷ 㻮㻳㼍㻺 ⤖ ᬗ ᡂ 㛗䛾ᐇ ⌧ 䜢┠ ᣦ 䛧䚸㻮㻳㼍㻺 ⇕ ୰ ᛶ Ꮚ ༙ ᑟ య ᳨ ฟ ჾ 䛾㛤 Ⓨ 䜢⾜䛳䛯䚹᪂ つ㻮 ཎ ᩱ 䛸䛧䛶ᥦ ᱌ 䛧䛶䛔䜛䝖䝸䝯䝏䝹䝪䝻䞁䜢⏝ 䛔䛯⤖ ᬗ ᡂ 㛗 ᢏ ⾡䛻䛚䛔䛶䚸ᡂ 㛗䝯䜹䝙䝈䝮ゎ ᯒ 䛻䜘䜚⾲㠃 ྾ ╔ ཎ Ꮚ 䛾⬺ 㞳 ᗘ 䛜㻝㻜㻡㻜䡚㻝㻜㻢㻜䉝䛷㉳䛣䜛䛣䛸䛜᫂ 䜙䛛䛸䛺䜚䚸 ᡂ 㛗 ᗘ 䛾ప ໬ 䛜ཌ ⭷ ໬ ᢏ ⾡䛻㔜せ䛷䛒䜛䛣䛸䛜䜟䛛䛳䛯䚹䛭䛣䛷䚸ྛ ᡂ 㛗 ᗘ 䛷స 〇䛧䛯㻮㻳㼍㻺 ⤖ ᬗ 䜘䜚స 〇䛥䜜䛯䝎䜲䜸䞊䝗䜢⏝ 䛔䛶䚸୰ ᛶ Ꮚ ᳨ ฟ ≉ ᛶ 䛻䛚䛡䜛㻮㻳㼍㻺 ⤖ ᬗ ᡂ 㛗 ᗘ ౫ Ꮡ ᛶ 䜢ホ ౯ 䛧䛯䚹㻌

㻌

䛆ᐇ 㦂 ᪉ ἲ 䛇㻌

ᮏ ◊ ✲ ࡛ ࡣ ࠊBGaN ⤖ ᬗ ᡂ 㛗 ᪉ ἲ ࡟ ᭷ ᶵ 㔠 ᒓ Ẽ ┦ ࢚ ࣆ ࢱ ࢟ ࢩ ࣮(MOVPE)ἲ ࢆ ⏝ ࠸ ࡓ ࠋ III ᪘ ཎ ᩱ ࡢ ๓ 㥑 య ࡟ ࢺ ࣜ ࣓ ࢳ ࣝ ࢞ ࣜ ࢘ ࣒(TMGa)ࠊ ࢺ ࣜ ࣓ ࢳ ࣝ ࣎ ࣟ ࣥ(TMB)ࠊV ᪘ ཎ

ᩱ ࡟ ࡣ NH3 ࢆ ౑ ⏝ ࡋ ࡓ ࠋIII ᪘ ཎ ᩱ ࡜ NH3ࡢ ࢟ ࣕ ࣜ ࢔ ࢞ ࢫ ࡟ ࡣ N2࢞ ࢫ ࢆ ⏝ ࠸ ࡓ ࠋp ᆺ GaN ࢸ ࣥ ࣉ ࣞ ࣮ ࢺ ᇶ ᯈ ୖ ࡟ ᡂ 㛗 ᗘ ࢆ 920 ~ 1080 ^oC ࡜ ኚ ໬ ࡉ ࡏ ࠊ ᡂ 㛗 ᅽ ຊ 1.33 kPa ࡟ ࡚ BGaNᒙ ࢆ 30 ~ 120 min ᡂ 㛗 ࡉ ࡏ ࡓ ࠋࢹ ࣂ ࢖ ࢫ స 〇 ᫬ ࡟ ࡣ ࠊBGaN ᒙ ୖ ࡟ ࠊ ࢥ ࣥ ࢱ ࢡ ࢺ ᒙ ࡜ ࡋ ࡚ n ᆺ GaN ᒙ ࢆ 1.5 min ᡂ 㛗 ࡉ ࡏ ࡓ ࠋ ྛ ཎ ᩱ ࡢ ౪ ⤥ 㔞 ࡣ NH3ὶ 㔞

ࢆ 4.5 10^-2 mol/minࠊTMGa ὶ 㔞 ࢆ 6.9 Pmol/minࠊTMB ὶ 㔞 ࢆ 0.11 Pmol/min ࡛

࠶ ࡗ ࡓ ࠋ ≉ ᛶ ホ ౯ ࡟ ࡣ ࠊ ㉮ ᰝ ᆺ 㟁 Ꮚ 㢧 ᚤ 㙾(SEM)ࠊ ཎ Ꮚ 㛫 ຊ 㢧 ᚤ 㙾(AFM)ࠊX ⥺ ᅇ ᢡ

(2)

(XRD) ᐃ ࢆ ⏝ ࠸ ࡓ ࠋ㻌

ࡲ ࡓ ࠊ స 〇 ࡋ ࡓ BGaN ࢹ ࣂ ࢖ ࢫ ࢆ ⏝ ࠸ ࡚ ࠊ ᐦ ᑒ ᨺ ᑕ ⥺ ※ ࢆ ⏝ ࠸ ࡓD⥺ ↷ ᑕ ࠊ ◊ ✲ ⏝ ཎ Ꮚ ⅔ ࢆ ⏝ ࠸ ࡓ ୰ ᛶ Ꮚ ↷ ᑕ ࡟ ࡚ ᨺ ᑕ ⥺ ᳨ ฟ ≉ ᛶ ホ ౯ ࢆ ⾜ ࡗ ࡓ ࠋ ࢚ ࢿ ࣝ ࢠ ࣮ ࢫ ࣌ ࢡ ࢺ ࣝ ィ ࡟ ࡣ ᨺ ᑕ ⥺ Multi-Channel Analyzer(MCA)ࢩ ࢫ ࢸ ࣒ ࢆ ౑ ⏝ ࡋ ࡓ ࠋ

㻌

䛆⤖ ᯝ 䛚䜘䜃⪃ ᐹ 䛇㻌

ྛ ᡂ 㛗 ᗘ ࡛ స 〇 ࡋ ࡓ BGaN⤖ ᬗ ࡢ ᩿ 㠃 SEM ീ ࢆ ᅗ 1 ࡟ ♧ ࡍ ࠋ ᡂ 㛗 ᗘ 1060 ^oC ௨ ୖ ࡢ ⬺ 㞳㡿 ᇦ ࡛ స 〇 ࡋ ࡓ BGaN ⤖ ᬗ ࡣ ᒙ ୰ ࡟ ከ ࡃ ࡢ ࣎ ࢖ ࢻ ࡀ ᙧ ᡂ ࡉ ࢀ ࡚ ࠸ ࡿ ࡇ ࡜ ࡀ ☜ ㄆ ࡉ ࢀ ࡓ ࠋ ࡇ ࢀ ࡣ ࠊ ᡂ 㛗 ᗘ ࡀ 㧗 ࡟ ࡞ ࡗ ࡓ ࡇ ࡜ ࡛ ⾲㠃 ྾ ╔ ཎ Ꮚ ࡀ ⬺ 㞳 ࡋ ࠊ ᙧ ᡂ ࡉ ࢀ ࡓ ࡜ ⪃ ࠼ ࡽ ࢀ ࡿ ࠋ ᡂ 㛗 ᗘ 1000 ~ 1050 ^oC ࡢ ᣑ ᩓ ᚊ ㏿㡿 ᇦ ࡛ స 〇 ࡉ ࢀ ࡓ BGaN

⤖ ᬗ ࡣ ᒙ ୰ ࡟ ࣎ ࢖ ࢻ ࢆ ྵ ࡲ ࡎ ࠊ ᖹ ᆠ ࡞ ⾲㠃 ࡀ ᙧ ᡂ ࡉ ࢀ ࡚ ࠸ ࡿ ࡇ ࡜ ࡀ ☜ ㄆ ࡉ ࢀ ࡓ ࠋ ᡂ 㛗 ᗘ ࡀ ప ୗ ࡋ ࡓ ࡇ ࡜ ࡛ ⾲㠃 ྾ ╔ ཎ Ꮚ ࡢ ⬺ 㞳 ࢆ ᢚ ไ ࡋ ࠊ ⾲㠃 ᣑ ᩓ ࡟ ࡼ ࡗ ࡚ ཎ Ꮚ ࡀ Ᏻ ᐃ ࡋ

࡚ ᒙ ୰ ࡟ ྲྀ ࡾ ㎸ ࡲ ࢀ ࡓ ࡓ ࡵ ࡜ ⪃ ࠼ ࡽ ࢀ ࡿ ࠋ

ᡂ 㛗 ᗘ 950 ^oC ௨ ୗ ࡢ ᣑ ᩓ ᚊ ㏿㡿 ᇦ ࡛ స 〇 ࡉ ࢀ ࡓ BGaN ⤖ ᬗ ࡣ ᒙ ୰ ࡟ ࣎ ࢖ ࢻ ࡀ ᙧ ᡂ ࡉ ࢀ ࡚ ࠸ ࡞ ࠿ ࡗ ࡓ ࡀ ࠊ ⾲㠃 ࡀ ⢒ 㠃 ໬ ࡉ ࢀ ࡚ ࠸ ࡿ ࡇ ࡜ ࡀ ☜ ㄆ ࡉ ࢀ ࡓ ࠋ ᡂ 㛗 ᗘ ࡀ ప ୗ ࡋ ࡓ ࡇ ࡜ ࡛ ⾲㠃 ྾ ╔ ཎ Ꮚ ࡢ ⬺ 㞳 ࡣ ᢚ ไ ࡉ ࢀ ࡓ ࡀ ࠊ ⾲㠃 ᣑ ᩓ 㛗 ࡀ ▷ ࡃ ࡞ ࡗ ࡓ ࡇ ࡜ ࡜ ᡂ 㛗 ᗘ ࡢ ప ໬ ࡟ ࡼ ࡾ ୙ ⣧ ≀ ࡢ ⬺ 㞳 ࡀ ⾜ ࢃ ࢀ ࡟ ࡃ ࡃ ࡞ ࡗ ࡓ ࡓ ࡵ ࠊ ⭷ ୰ ࡟ ୙ ⣧ ≀ ࡀ ྲྀ ࡾ ㎸

ࡲ ࢀ ࡸ ࡍ ࡃ ࡞ ࡗ ࡓ ࡜ ⪃ ࠼ ࡽ ࢀ ࡿ ࠋ ࡑ ࡢ ⤖ ᯝ ࠊ ࣆ ࢵ ࢺ ࡀ ᙧ ᡂ ࡉ ࢀ ࡚ ࡋ ࡲ ࠸ ࠊ ␗ ࡞ ࡿ 㠃 ᪉

఩ ࡢ ࣇ ࢓ ࢭ ࢵ ࢺ ࡀ Ⓨ ⏕ ࡋ ࠊ Ⲩ ࢀ ࡓ ⾲㠃 ࡀ ᙧ ᡂ ࡉ ࢀ ࡓ ࡜ ⪃ ࠼ ࡽ ࢀ ࡿ ࠋ

ᅗ 1ࠊ ྛ ᗘ 㡿 ᇦ ࡛ ᡂ 㛗 ࡉ ࡏ ࡓ BGaN ⷧ ⭷ ࡢ ᩿ 㠃 SEM ീ(a)ᣑ ᩓ ᚊ ㏿ ప 㡿 ᇦ 㸸

950Υ ࠊ(b)ᣑ ᩓ ᚊ ㏿㧗㡿 ᇦ 㸸1050Υ ࠊ(c)㧗 ⬺ 㞳㡿 ᇦ 㸸1060Υ 㻌

ᅗ 2 ࡟ ྛ ᗘ ࡛ స 〇 ࡋ ࡓ BGaN ⤖ ᬗ ࡢ BNࣔ ࣝ ศ ⋡ ࡜ AFM ᐃ ࡟ ࡼ ࡿ ⾲㠃 ⢒ ࡉ ࡢ RMS್ ࢆ ♧ ࡍ ࠋ ᡂ 㛗 ᗘ 1000 ~ 1050 ^oC ࡢ ᣑ ᩓ ᚊ ㏿㡿 ᇦ ࡛ ࡣ ࠊ ⾲㠃 RMS ್ ࡀ 2 nm

⛬ ᗘ ࡜ ᑠ ࡉ ࡃ ࠊBN ࣔ ࣝ ศ ⋡ ࡶ 1.2 ~ 1.5 %࡜ ᭱ ࡶ 㧗 ࠸ ≉ ᛶ ࢆ ♧ ࡋ ࡓ ࠋ ᡂ 㛗 ᗘ 1060

oC ௨ ୖ ࡢ ⬺ 㞳㡿 ᇦ ࡛ ࡣ ࠊ⾲㠃 RMS ್ ࡣ 2 ~ 3 nm ⛬ ᗘ ࡛ ࠶ ࡗ ࡓ ࡀ BNࣔ ࣝ ศ ⋡ ࡣ 1 %

⛬ ᗘ ࡜ ప ୗ ࡋ ࡚ ࠾ ࡾ ࠊB ࢆ ྵ ࢇ ࡔ ⾲㠃 ྾ ╔ ཎ Ꮚ ࡢ ⬺ 㞳 ࡀ Ⓨ ⏕ ࡋ ࡚ ࠸ ࡿ ࡜ ⪃ ࠼ ࡽ ࢀ ࡿ ࠋ ᡂ 㛗 ᗘ 950 ^oC ௨ ୗ ࡢ ᣑ ᩓ ᚊ ㏿㡿 ᇦ ࡛ ࡣ ⾲㠃 RMS ್ ࡀ 30 nm ௨ ୖ ࡜ ᝏ ໬ ࡋ ࠊBNࣔ

ࣝ ศ ⋡ ࡶ 1 %⛬ ᗘ ࡜ ప ୗ ࡋ ࡓ ࠋ ᡂ 㛗 ᗘ ࡢ ప ୗ ࡟ ࡼ ࡿ ࠊ ⤖ ᬗ ᛶ ࡀ ຎ ໬ ࡋ ࠊBGaN ⤖ ᬗ

୰ ࡢ B ཎ Ꮚ ࡢ ๭ ྜ ࡀ ῶ ᑡ ࡋ ࡓ ࡜ ⪃ ࠼ ࡽ ࢀ ࡿ ࠋࡲ ࡓ ࠊᅗ 1 ࡢ SEMീ ࡟ ♧ ࡉ ࢀ ࡚ ࠸ ࡿ ࡼ

࠺ ࡟ ࠊ ࣆ ࢵ ࢺ ࡀ ᙧ ᡂ ࡉ ࢀ ࠊ ࣇ ࢓ ࢭ ࢵ ࢺ ࡀ Ⓨ ⏕ ࡋ ࡓ ࡇ ࡜ ࡛ ⾲㠃 RMS ್ ࡀ ቑ ኱ ࡋ ࡓ ࡜ ⪃

࠼ ࡽ ࢀ ࡿ ࠋ

(3)

㻌

ᅗ 2ࠊ ྛ ᡂ 㛗 ᗘ ࡛ ᡂ 㛗 ࡋ ࡓ BGaN ⷧ ⭷ ࡢ BNࣔ ࣝ ศ ⋡ ࡜ ⾲㠃

⢒ ࡉ(AFM-RMS)ࡢ 㛵 ಀ

ḟ ࡟ ᡂ 㛗 ࡉ ࡏ ࡓ BGaN⤖ ᬗ ࢆ ⏝ ࠸ ࡚ ୰ ᛶ Ꮚ ᳨ ฟ ࢹ ࣂ ࢖ ࢫ ࢆ స 〇 ࡋ ࠊ≉ ᛶ ホ ౯ ࢆ ⾜ ࡗ ࡓ ࠋ ᅗ 3 ࡟ ྛ ᡂ 㛗 ᗘ ࡛ స 〇 ࡋ ࡓ BGaNࢹ ࣂ ࢖ ࢫ ࡢD⥺ ࢚ ࢿ ࣝ ࢠ ࣮ ࢫ ࣌ ࢡ ࢺ ࣝ ࣆ ࣮ ࢡ ࡢ ༳ ຍ 㟁 ᅽ ౫ Ꮡ ᛶ ࢆ ♧ ࡍ ࠋHechtࡢ ᘧ ࢆ ⏝ ࠸ ࡓ ࣇ ࢕ ࢵ ࢸ ࢕ ࣥ ࢢ ࡟ ࡼ ࡗ ࡚ ⛣ ື ᗘ ᑑ ࿨ ᫬ 㛫 ✚ (PeWe)ࢆ ᑟ ฟ ࡋ ࡓ ࠋᡂ 㛗 ᗘ 1050 ^oC ࡛ స 〇 ࡋ ࡓ BGaN ࢹ ࣂ ࢖ ࢫ ࡀ ᭱ ኱ ್ ࢆ ♧ ࡋ ࡓ ࠋ ᡂ 㛗 ᗘ 1070 ^oC ࡛PeWe✚ ࡀ ప ୗ ࡋ ࡓ ཎ ᅉ ࡣ ࠊ ᡂ 㛗 ᗘ ࡀ 㧗 ໬ ࡋ ࡓ ࡇ ࡜ ࡛ ᒙ ୰

࡟ ከ ࡃ ࡢ ࣎ ࢖ ࢻ ࡀ ᙧ ᡂ ࡉ ࢀ ࡚ ⛣ ື ᗘ ࡀ ప ୗ ࡋ ࡓ ࡓ ࡵ ࡔ ࡜ ⪃ ࠼ ࡽ ࢀ ࡿ ࠋ ࡲ ࡓ ࠊ ᡂ 㛗 ᗘ 1010 ^oC ࡟ ࠾ ࠸ ࡚ ࡶPeWe ✚ ࡀ ప ୗ ࡋ ࡓ ⤖ ᯝ ࡜ ࡞ ࡗ ࡓ ࠋ ᡂ 㛗 ᗘ ࡀ ప ୗ ࡋ ࡓ ࡇ ࡜ ࡛ ୙

⣧ ≀ ࡢ ྲྀ ࡾ ㎸ ࡳ ࡀ ቑ ࠼ ࠊ ⤖ ᬗ ᛶ ࡀ ຎ ໬ ࡋ ࡓ ࡇ ࡜ ࡟ ㉳ ᅉ ࡋ ࡚ ࠸ ࡿ ࡜ ⪃ ࠼ ࡽ ࢀ ࡿ ࠋ

ᅗ 3ࠊ ྛ ᗘ 㡿 ᇦ ࡛ ᡂ 㛗 ࡋ ࡓ BGaN⤖ ᬗ ࢆ ⏝ ࠸ ࡚ స 〇 ࡋ ࡓ ࢲ ࢖ ࢜

࣮ ࢻ ࡢ Ș ⥺ ࢚ ࢿ ࣝ ࢠ ࣮ ࢫ ࣌ ࢡ ࢺ ࣝ ఩ ⨨ ࡢ ༳ ຍ 㟁 ᅽ ౫ Ꮡ ᛶ

⥆ ࠸ ࡚ స 〇 ࡋ ࡓ pin ࢲ ࢖ ࢜ ࣮ ࢻ ࢆ ⏝ ࠸ ࡚ ୰ ᛶ Ꮚ ↷ ᑕ ᐇ 㦂 ࢆ ⾜ ࡗ ࡓ ࠋᅗ 4࡟ ྛ BGaN ࢹ ࣂ ࢖ ࢫ ࡢ 2D ࢚ ࢿ ࣝ ࢠ ࣮ ࢫ ࣌ ࢡ ࢺ ࣝ ᐃ ⤖ ᯝ ࢆ ♧ ࡍ ࠋ ᅗ 4 ࡢ ୰ ᛶ Ꮚ ↷ ᑕ ᫬ ࡟ ࠾ ࡅ ࡿ

200 300 400

0 1 2 3 4 5

Log (Peak channel) [-]

1/V [V^-1]

䖃䚷㻝㻜㻝㻜㻌䉝䖃䚷㻝㻜㻡㻜㻌䉝䖃䚷㻝㻜㻣㻜㻌䉝 P_eW_e㻩㻌㻟㻚㻟㻥㻌㽢㻌㻝㻜^㻙㻡㻌㼏㼙^㻞㻛㼂

P_eW_e㻩㻌㻝㻚㻡㻣㻌㽢㻌㻝㻜^㻙㻡㻌㼏㼙^㻞㻛㼂

P_eW_e㻩㻌㻢㻚㻜㻤㻌㽢㻌㻝㻜^㻙㻢㻌㼏㼙^㻞㻛㼂

(4)

㉥ ᯟ ࡟ ♧ ࡍ 㡿 ᇦ ࡟ ྛ ࢹ ࣂ ࢖ ࢫ ࡟ ࠾ ࠸ ࡚ ୰ ᛶ Ꮚ ᤕ ⋓ ಙ ྕ ࢆ ☜ ㄆ ࡋ ࡓ ࠋBGaN ⤖ ᬗ ࡢ ᵓ 㐀

≉ ᛶ ࡢ 㐪 ࠸ ࡟ ࡼ ࡽ ࡎ ࠊ ୰ ᛶ Ꮚ ಙ ྕ ࡢ ᳨ ฟ ࢆ ᐇ ⌧ ࡋ ࡓ ࠋ ࡲ ࡓ ࠊD⥺ 2.3 MeV ↷ ᑕ ᫬ ࡟ ࠾

࠸ ࡚ ࡶ ྠ ᵝ ࡢ ⠊ ᅖ ࡟ ᤕ ⋓ ಙ ྕ ࢆ ☜ ㄆ ࡋ ࡓ ࠋ ࡇ ࡢ ⤖ ᯝ ࡼ ࡾ ࠊBGaNࢹ ࣂ ࢖ ࢫ ࡟ ࡼ ࡗ ࡚ ᤕ

⋓ ࡉ ࢀ ࡓ ୰ ᛶ Ꮚ ࡣDቯ ኚ ࡟ ࡼ ࡗ ࡚ Ⓨ ⏕ ࡋ ࡓ 2.3 MeV ࡢ ඲ ࢚ ࢿ ࣝ ࢠ ࣮ ࢆ ᳨ ฟ ࡋ ࡚ ࠸ ࡿ ࡇ

࡜ ࡀ ᫂ ࡽ ࠿ ࡜ ࡞ ࡗ ࡓ ࠋ ࡲ ࡓ ࠊ ᡂ 㛗 ᗘ 1050 ^oC ࡛ స 〇 ࡋ ࡓ BGaN ࢹ ࣂ ࢖ ࢫ ࡢD⥺ ᳨ ฟ

ࣆ ࣮ ࢡ ࡀ ᭱ ࡶ ࢩ ࣕ ࣮ ࣉ ࡛ ࠶ ࡗ ࡓ ࠋ ᡂ 㛗 ᗘ ࡀ ᭱ 㐺 ໬ ࡉ ࢀ ࡓ ࡇ ࡜ ࡛ ࠊ ⤖ ᬗ ᛶ ࡀ ྥ ୖ ࡋ ࡚

࠸ ࡿ ࡓ ࡵ ࡔ ࡜ ⪃ ࠼ ࡽ ࢀ ࡿ ࠋ

ᅗ 4ࠊ ྛ ᗘ 㡿 ᇦ ࡛ ᡂ 㛗 ࡋ ࡓ BGaN ⤖ ᬗ ࢆ ⏝ ࠸ ࡚ స 〇 ࡋ ࡓ ࢲ ࢖ ࢜ ࣮ ࢻ ࡢ Ș

⥺(2.3MeV)࠾ ࡼ ࡧ ୰ ᛶ Ꮚ ↷ ᑕ ࡟ ࠾ ࡅ ࡿ 2D ࢚ ࢿ ࣝ ࢠ ࣮ ࢫ ࣌ ࢡ ࢺ ࣝ ᐃ ⤖ ᯝ

ࡇ ࢀ ࡽ ࡢ ⤖ ᯝ ࡼ ࡾ ࠊBGaNࡢ ᵓ 㐀 ≉ ᛶ ࠊ ᨺ ᑕ ⥺ ᳨ ฟ ≉ ᛶ ࡢ ᡂ 㛗 ᗘ ౫ Ꮡ ᛶ ࢆ ᫂ ࡽ ࠿

࡟ ࡋ ࡓ ࠋࡉ ࡽ ࡟ ᚊ ㏿㐣 ⛬ ࡢ ไ ᚚ ࡟ ࡼ ࡗ ࡚ 㧗 ࠸ ᨺ ᑕ ⥺ ᳨ ฟ ≉ ᛶ ࢆ ಖ ᣢ ࡋ ࡓ BGaN ᳨ ฟ ࢹ

ࣂ ࢖ ࢫ ࢆ స 〇 ࡋ ࠊ ୰ ᛶ Ꮚ ᳨ ฟ ࢆ 㐩 ᡂ ࡋ ࡓ ࠋ 㻌

䛆䜎䛸䜑䛇㻌

୰ ᛶ Ꮚ ࢖ ࣓ ࣮ ࢪ ࣥ ࢢ ࢭ ࣥ ࢧ ࣮ ࡢ ᐇ ⌧ ࡟ ྥ ࡅ ࡚ BGaN ⤖ ᬗ ᡂ 㛗 ᢏ ⾡ ࡢ 㛤 Ⓨ ࢆ ⾜ ࡗ ࡓ ࠋ ᣑ ᩓ ᚊ ㏿㡿 ᇦ ࡛ ࡶ ≉ ࡟ 㧗㡿 ᇦ ࡛ స 〇 ࡉ ࢀ ࡓ BGaN ⤖ ᬗ ࡀ ࣎ ࢖ ࢻ ࢆ ྵ ࡲ ࡞ ࠸ ᖹ ᆠ ࡞

⾲㠃 ࢆ ᙧ ᡂ ࡋ ࠊ᭱ ࡶ 㧗 ࠸ BNࣔ ࣝ ศ ⋡ ࢆ ♧ ࡋ ࡓ ࠋస 〇 ࡋ ࡓ BGaN୰ ᛶ ᳨ ฟ ࢹ ࣂ ࢖ ࢫ ࢆ

⏝ ࠸ ࡓ ᨺ ᑕ ⥺ ᳨ ฟ ≉ ᛶ ࡟ ࠾ ࠸ ࡚ ࡣ 㧗 ࠸ ⛣ ື ᗘ ᑑ ࿨ ᫬ 㛫 ✚ ࢆ ♧ ࡋ ࠊ ୰ ᛶ Ꮚ ᳨ ฟ ࢆ ᐇ ⌧ ࡋ ࡓ ࠋ ࡇ ࢀ ࡽ ࡢ ⤖ ᯝ ࡼ ࡾ ࠊBGaN⤖ ᬗ ࢆ ⏝ ࠸ ࡓ ୰ ᛶ Ꮚ ᳨ ฟ ჾ ࡢ ᐇ ⌧ ࡀ ♧ ၀ ࡉ ࢀ ࡓ ࠋ 㻌

㻌㻌

(5)

ᴗ ⦼ ୍ ぴ

2019 ᖺ 㻌 ◊ ✲ Ⓨ ⾲

[1] Yuri Takahashi, Takayuki Maruyama, Natsuki Yamada, Kazushi Ebara, Yuto Ohta, Hisaya Nakagawa, Shigeyoshi Usami, Yoshio Honda, Hiroshi Amano, Kazunobu Kojima, Shigehusa Chichibu, Yoku I noue, Toru Aoki, and Takayuki Nakano,

“Evaluation of BGaN growth temperature dependence and fabrication of neutron semiconductor detectors”, The 9th Asia-Pacific Workshop on Widegap Semiconductors (APWS2019), MoP-GR-12, Okinawa Institute of Science and Technology Graduate University, Okinawa, Japan, November 10 -15 , 2019

(ㄽ ᩥ せ ᪨)ྛ ᡂ 㛗 ᗘ 㡿 ᇦ 䛷స 〇䛧䛯 BGaN ⤖ ᬗ 䜢⏝ 䛔䛯䝎䜲䜸䞊䝗䜢⏝ 䛔䛶䚸ᨺ ᑕ ⥺ ᳨ ฟ ≉ ᛶ ホ ౯ 䜢⾜䛔䚸ᣑ ᩓ ᚊ ㏿㡿 ᇦ 䛾㧗 ᡂ 㛗 ᮲ ௳ 䛻䛶స 〇䛧䛯 BGaN ⤖ ᬗ 䛜⛣ ື ᗘ ᑑ ࿨ ✚ 䛸୰ ᛶ Ꮚ ᳨ ฟ ຠ ⋡ 䛷Ⰻ 䛔⤖ ᯝ 䜢ᚓ 䜙䜜䛯䛣䛸䜢♧ 䛧䛯䚹

[2] T. Nakano, Y. Takahashi, Y. Ohta, N. Yamada, H. Nakagawa, Y. Honda, H. Amano, K.

Shima, K. Kojima, S. F. Chichibu, Y. Inoue, T. Aoki,“Improvement of neutron detection efficiency for BGaN semiconductor detectors”, 2019 IEEE Nuclear Science Symposium (NSS) and Medical Imaging Conference (MIC), R -04-450, Manchester Convention Centre, Manchester, UK, October 26 - November 2 , 2019

(ㄽ ᩥ せ ᪨)BGaN ᡂ 㛗 ᗘ 䛾᭱ 㐺 ໬ 䜢⾜䛔䚸ཌ ⭷ BGaN ⤖ ᬗ 䜢ᐇ ⌧ 䛧䚸䝎䜲䜸䞊䝗䜢 స 〇䛧䛯䛣䛸䛷୰ ᛶ Ꮚ ᳨ ฟ ຠ ⋡ 䛾ྥ ୖ 䜢㐩 ᡂ 䛧䛯䚹

[3] ኴ ⏣ ᝆ ᩯ 䚸㧗 ᶫ ♸ ྣ 䚸୸ ᒣ ㈗ அ 䚸 ᒣ ⏣ ኟ ᬦ 䚸 ୰ ᕝ ኸ ஓ 䚸ᕝ ᓮ ᬂ ஓ 䚸Ᏹ బ ⨾

ⱱ ె 䚸ᮏ ⏣ ၿ ኸ 䚸ኳ 㔝 ᾈ 䚸ᔱ ⣫ ᖹ 䚸ᑠ ᓥ ୍ ಙ 䚸⛛ ∗ 㔜 ⱥ 䚸஭ ୖ ⩼ 䚸㟷 ᮌ ᚭ 䚸

୰ 㔝㈗ அ 䚸“BGaN ⤖ ᬗ ᡂ敞䛻䛚䛡䜛 TMB ὶ 㔞 ౫ Ꮡ ᛶ 䛾᳨ ウ䛚䜘䜃୰ ᛶ⬷᳨ ฟ 䝕䝞䜲䝇䛾స 〇”䚸➨ 80 ᅇ ᛂ ⏝ ≀ ⌮ Ꮫ ఍ ⛅ Ꮨ Ꮫ ⾡ ㅮ ₇ ఍ 䚸20p-PB4-79䚸໭ ᾏ 㐨 ኱ Ꮫ ᮐ ᖠ 䜻䝱䞁䝟䝇䚸2019 ᖺ 9 ᭶ 18‐21 ᪥

(ㄽ ᩥ せ ᪨)BGaN ⤖ ᬗ ᡂ 㛗 ᮲ ௳ 䛻䛚䛡䜛 TMB ౫ Ꮡ ᛶ 䜢ホ ౯ 䛧䛯䜒䛾䛷䚸TMB 䛾ὶ 㔞 ቑ ຍ 䛻క 䛖 BGaN⤖ ᬗ ୰ 䛾 BN 䝰䝹ศ ⋡ ౫ Ꮡ ᛶ 䛾ኚ ໬ 䛸䚸ྛ BGaN ⤖ ᬗ 䜢⏝ 䛔䛯䝎䜲䜸䞊䝗䛾స 〇䛸ᨺ ᑕ ⥺ ᳨ ฟ ≉ ᛶ ホ ౯ 䜢ᐇ ᪋ 䛧䚸TMB ὶ 㔞 ౫ Ꮡ ᛶ 䛻䜘䜛୰ ᛶ Ꮚ ᳨ ฟ ຠ ⋡ 䛾ྥ ୖ 䜢⾜䛳䛯䚹

[4] ୰ 㔝㈗ அ 䚸㟷 ᮌ ᚭ 䚸“BGaN 䜢 ⏝ 䛔䛯୰ ᛶ Ꮚ ༙ ᑟ య ᳨ ฟ ჾ 䛾㛤 Ⓨ”䚸᪥ ᮏ ⤖ ᬗ ᡂ 㛗

Ꮫ ఍ 䝘䝜䜶䝢ศ ⛉ ఍ 䛂➨11ᅇ 䝘䝜ᵓ 㐀䞉䜶䝢䝍䜻䝅䝱䝹ᡂ 㛗 ㅮ ₇ ఍ 䛃䚸Fr-I2䚸ᗈ ᓥ ኱ Ꮫ ᮾ ᗈ ᓥ 䜻䝱䞁䝟䝇 Ꮫ ኈ ఍ 㤋䝺䝉䝥䝅䝵䞁䝩䞊䝹䚸2019 ᖺ 6 ᭶ 13-15 ᪥ 㻌 (ᣍ ᚅ ㅮ ₇) (ㄽ ᩥ せ ᪨)BGaN 䜢⏝ 䛔䛯୰ ᛶ Ꮚ ᳨ ฟ ༙ ᑟ య ᳨ ฟ ჾ 䛻䛴䛔䛶䛾ᣍ ᚅ ㅮ ₇ 䛷䛒䜚䚸䛣䜜䜎䛷䛻⾜䛳䛶䛝䛯 BGaN ⤖ ᬗ ᡂ 㛗 ᢏ ⾡䛾㛤 Ⓨ 䛸䚸స 〇䛧䛯 BGaN ⷧ ⭷ 䜢⏝ 䛔䛯୰

ᛶ Ꮚ ᐃ ᐇ 㦂䛾⤖ ᯝ 䛻䛴䛔䛶䛾Ⓨ ⾲

[5] ኴ ⏣ ᝆ ᩯ 䚸㧗 ᶫ ♸ ྣ 䚸୸ ᒣ ㈗ அ 䚸ᒣ ⏣ ኟ ᬦ 䚸୰ ᕝ ኸ ஓ 䚸ᕝ ᓮ ᬂ ஓ 䚸Ᏹ బ ⨾ ⱱ ె 䚸ᮏ

⏣ ၿ ኸ 䚸 ኳ 㔝 ᾈ 䚸 ᔱ ⣫ ᖹ 䚸 ᑠ ᓥ ୍ ಙ 䚸 ⛛ ∗ 㔜 ⱥ 䚸 ஭ ୖ ⩼ 䚸㟷 ᮌ ᚭ 䚸 ୰ 㔝㈗ அ 䚸

‟BGaN ⤖ ᬗ ᡂ 㛗䛻䛚䛡䜛 TMB ὶ 㔞 ౫ Ꮡ ᛶ 䛾᳨ ウ䛚䜘䜃୰ ᛶ Ꮚ ᳨ ฟ ჾ 䛾㛤 Ⓨ”䚸᪥

ᮏ ⤖ ᬗ ᡂ 㛗 Ꮫ ఍ 䝘䝜䜶䝢ศ ⛉ ఍ 䛂➨ 11 ᅇ 䝘䝜ᵓ 㐀䞉䜶䝢䝍䜻䝅䝱䝹ᡂ 㛗 ㅮ ₇ ఍ 䛃䚸Fr-

(6)

P23 䚸ᗈ ᓥ ኱ Ꮫ ᮾ ᗈ ᓥ 䜻䝱䞁䝟䝇 Ꮫ ኈ ఍ 㤋䝺䝉䝥䝅䝵䞁䝩䞊䝹䚸2019 ᖺ 6 ᭶ 13-15

᪥

(ㄽ ᩥ せ ᪨)BGaN ⤖ ᬗ ᡂ 㛗䛻䛚䛡䜛 TMB ὶ 㔞 ౫ Ꮡ ᛶ 䛻䛴䛔䛶䛾᳨ ウ ⤖ ᯝ 䛷䛒䜚䚸 TMB ὶ 㔞䛾ቑ ຍ 䛻క 䛔 BN 䝰䝹ศ ⋡ 䛜䛹䛾䜘䛖䛻ኚ ໬ 䛩䜛䛛䜢ホ ౯ 䛧䚸BN 䝰䝹ศ ⋡ 1.8%⛬ ᗘ 䛷 B 䛾ྲྀ 䜚㎸䜏䛜㣬 ࿴ 䛩䜛䛣䛸䜢᫂ 䜙䛛䛻䛧䛯䚹䜎䛯䝕䝞䜲䝇䛾స 〇䜒ᐇ ᪋ 䛧䚸䃐⥺ ᳨ ฟ ≉ ᛶ 䛻䛚䛔䛶኱ 䛝䛺ኚ ໬ 䛿ぢ䜙䜜䛺䛔䛣䛸䜢☜ ㄆ䛧䛯䚹

㻌

ᐇ 㦂䞉 ᐃ ⿵ ຓ ⪅

㻌 ୰ ᕝ 㻌 ኸ ஓ 䚸ᒣ ⏣ ኟ ᬦ 䚸㧗 ᶫ ♸ ྣ 䚸ᆏ ஭ ⏣ ᫭ ᖹ 䚸 ኴ ⏣ ᝆ ᩯ 䠄ィ 5 ྡ 䠅

㻌㻌㻌㻌㻌

䠄㻝㻞䠅㻵㻵㻵 ᪘ ❅ ໬ ≀ ༙ ᑟ య 䜢⏝ 䛔䛯୰ ᛶ Ꮚ 䜲䝯䞊䝆䞁䜾䝉䞁䝃䞊䛾㻌 㛤 Ⓨ 㻌

㻌 㻌