本文 Thesis 総合研究大学院大学学術情報リポジトリ A1914本文

☞ ✁✂✄☎☞✆✝✞✟✠✡☛✌✍✎✏✑✒

✽✓ ✚✔

✕✖✗✘✙✛

✮✜✑✒✢✙✣✢✙

✞✾✤✥✦✧✌✍★✩✙✑✒✩

✌✍★✩✙✪✫

✬✭

₂₈

✯✠

✗

₂₀₁₆

✯✠✛

i

✪

1

^✕✁

………..……….1

1.1

^{✂✄☎✆✝✞}

……….………..……….1

1.2

^{✛✟✠✡☛☞}

………..……….…….6

1.3

^{✍✌✎✏✑✒✓}

………...……….7

1.4

☎✆✻✔✖✗✘✙✚✜✢✣✤✥✦✍✌✎✏✑✒✓

………..….……….8

1.5

^{✼✧★✩✼✫✏✑✒✓}

………...……….11

1.5.1

^{✼✧★✩✼✬✭✮✼✬✯✰✱✲✳✴}

………...……….11

1.5.2

^{✼✧★✩✵✶}

………...……….11

1.6

^✷✸✠✹

………....……….15

2

✺✽✾✿❀ ❁❂❃❄ ❅❆❇❈ ❉❊❋

.……….…….……….17

2.1

✍✌✎●❍✰✻✓✡✣✤✥✦✭

_6N8

✦✰■❏❑

₁

✯✡▲▼

………..……….17

2.2

^{✣✤✥✦❍✡}

RRR

^{✭✼◆❖P◗✯✡❘❙}

………...……….20

2.2.1 RRR

^❘❙❚❯

………...……….20

2.2.2 RRR

^❘❙❱❲

………..………. ………..………..21

2.3

✖✗✏❳❨✢❩❬❭❪■❑❫❴✡

_Q

❵✰❛✡●❍✡

_RRR

✡❜❝

……..……….24

2.3.1

^{❩❬❭❪■❑❫❴✡}

Q

^❵✡❞❡

………..……..……….24

✭

₁

✯

_Q

❵✡❡✩❚❯

………..………..………...24

✭

₂

✯ ❢❣❤✐❥❲✏✑✒✓

………..……..…………..……….29

✭

₃

✯ ❡✩✻✔

_Q

❵✰

_RRR

✡❜❝

………..……..……….30

2.3.2

^{❩❬❭❪■❑❫❴✡}

Q

^❵✡❘❙

………..….……….…….33

2.3.3 Q

❵✏✑✒✓❞❡❵✰❘❙❵✡▲▼

………...…………..……….35

2.4

✖✗❦✏❧✢♠❯♥❦✰♦♣qrs♥❦✡❜❝

………..……..……….36

2.5

^✷✸✠✹

……….. ………..………..………….……….38

3

✺✽t✉❇✈✇①✺✽✾✿❀❁②③④❇❂⑤ ⑥⑦❉❊❋

……….39

3.1

■❏⑧⑨❑⑩❪❶✡✶❷

………..………..……….39

3.1.1

■❏⑧⑨❑⑩❪❶✡✶❷

………..………..……….39

3.1.2

■❏⑧⑨❑⑩❪❶✡❸❹❺❻

………..………41

✭

₁

✯ ■❏⑧⑨❑⑩❪❶❼❽✡❾❿✭

_RF

✼➀➁❾➂✯

………..………41

✭

₂

✯ ■❏⑧⑨❑⑩❪❶✡❸❹➃➀

……….…..………41

✭

₃

✯ ✍➄✌✎✏➁❾➅➆✢

_RF

✼➀✏❧✢➇➈❿

………...…..………43

3.2

■❏⑧⑨❑⑩❪❶✡❸❹➉➊

………..………44

3.2.1

^❸❹➉➊

………..……….………..………44

3.2.2

❸❹➋➌➍✗➎➏✘✡➄✌✎➐➑➒➓✡♥➒❘❙

………..………46

ii

3.3

^{✍✌✎✡✖✼➀➉➊}

………..……….………..………48

3.3.1

❣✗✏❳❨✢✖✼➀➉➊

………..……….……..………48

✭

₁

✯ ➉➊✵➓

………..………...………48

✭

₂

✯ ✖✼➀➉➊❱❲

………..………...……..………49

3.3.2

✖✗✏❳❨✢✖✼➀➉➊

………..………….…………..………51

✭

₁

✯ ➉➊✵➓

………..………...…..………51

✭

₂

✯ ✖✼➀➉➊❱❲

………..………...………53

3.4

^✷✸✠✹

………..………56

4

✺✽✾✿❀❁②③④❇☞ ✁✂✄

……….……57

4.1

^{✒✼➀➉➊☎➓}

………..………57

4.2

^{✒✼➀➉➊✆☛}

………..………63

4.3

^{✒✼➀➉➊❚❯}

………..………66

4.3.1

^➉➊✝✞

………..………66

4.3.2

✍✌✼✧✍✥✡❘❙❵✏✑✒✓

………..…66

4.3.3

✮✼✬✡❘❙❵✏✑✒✓

………..………66

4.3.4

✟✠✡☛✌✎✏✠✑✡✓✔❚

………..………68

4.3.5

^{⑧✠⑩✕✖❪■}

………..………68

4.4

✟✠✡☛✌✎✏✠✑✡❱❲

………..70

4.4.1 RF

^{✗❬❑r✘}

………..…..70

4.4.2

^✍✌✎✡

VSWR

^❘❙➋➌

RF

^{✼➀✼➎◗}

………...70

4.4.3

^➉➊✙✣

………..72

4.5

★✚✛✜◗➋➌✮✼✬✜✡❘❙❵

………..…78

4.5.1 PMT

^{✩➀r✘✰}

RF

^{r✘✡❜❝}

………..……78

4.5.2

★✚✛✜◗✰✍✌✼✧✍✥✡❜❝

………..……79

4.5.3

^{★✚✛✜◗✰}

RF

^{✗❬❑✢✡❜❝}

………...…………81

4.5.4

★✚✛✜◗✰✍✌✎✤✥➒➓✡❜❝

………..……82

4.6

✖✗✏❳❨✢★✚✛✜◗➋➌✮✼✬✜✰❣✗✘✡✦➊❵✰✡▲▼

_{……..………84}

4.6.1

^{★✚✛✜◗✡▲▼}

………..………84

✭

₁

✯ ✧✩★✩✪✫✬✻✔★✚✛✜◗✡▲▼

……….…84

✭

₂

✯ ★✚✛✭✡✫✬✻✔★✚✛✜◗✡▲▼

……….…87

4.6.2

^{✮✼✬✜✡▲▼}

………..…………89

4.7

^{✗✥✥➍✏❧✢✮✯}

………..………91

4.7.1 RF

✼➀➇➈✏❧✢✗✥✥➍✰❸✰✵✡❸✰➃➀✡❜❝

………91

4.7.2

✍✌✎✱✲✰✙✚✗✥✡❜❝

………..……92

4.7.3

✳❙✜✢✴✬✌❑✶✷✘✡✸✹❬✺✕✻✽✰✗✥✡❜❝

…………..………93

4.8

^✷✸✠✹

………..…………96

iii

5

^✮✁

……….………….……….………….……97

5.1

^❱✟

……….………..………..…97

5.2

^✷✸✠✹

………....……….98

✶

……….………99

☛✁

_1.

❿✦✂◗✡❡✩

………...……….…100

☛✁

_2.

❿✄☎◗✡❡✩

……….………101

1

1.

^✕

1.1

^{✪✁✂✄☎✆}

✛ ✟✠✘ ✛✝❣ ✦✂✼✫ ✞✏✟ ❪■✏ ❳✒✓ ✣✼✧✍ ✥❦✪ ✠✢✥ ✘✡☛☞ ✌✍✘ ✎✢

✼➀❥◗✪✼✜

_Q

❵✡✒✢☞✏✒✪☛☞✰✻✓✝✑✒❣✗✘✙✚✻✓✒✢✰✓✔✪✝✖✗

20 K

➏✥✘✙✚✜✢✣✤✥✦✵✍✌✎✡✂✄☎✆✏✑✒✓✖✗✢✘

✼✫✞✏✟❪■✘✛✝

_{duty cycle}

✡✖✒✗❬❑✙✚✡✙✚✏✛❣✗✘✙✚✜✢❣✦✂✍✌

✎✬✜✒✢➆✢✬✝

duty cycle

^{✡✣✒✗❬❑✙✚✣}

CW

✡✙✚✏✛✝❫❴✤✘✥✦✢✧★

✕❬❿✬✩✫✰☞✢✔✔✝❣✦✂✍✌✎✪✭✜✩✒✮✝✯✦✂✍✌✎✬✜✒✢➆✓✒✢✘✻

✰ ✻✯✦✂ ✍✌✎ ✛✱✖ ✗✲✡❸ ❹✣✳ ✙✴✶ ✡➑✰ ✢❣✦✂ ✍✌✎ ✰▲▼ ✻✓☎➓ ✡ ✷

✒❦✣✵✸➋➌✙✚✹✜✬✏✒✜✢✺✬✻✽✘✎✢✘✓➆✾✘✼✫✞✏✟❪■✛✝❻✿☞❀

❁✜✍✌❂✏✜✒✢➆✓❃✔✬✝❄❅✛✝➄❆✝❇❈✝❉✳✴✼➎☎➓❊✡❋●❍■✣❏❑

✲ ✻✜➅➆ ✢✖✸ ✹❬✺✕ ▲▼✍ ✌❂✡◆ ☛✬✣ ✾❖ ✓❳P◗ ☞✢✆ ❘✬❙❚ ➅➆✓ ✒✢ ✘

❯❍■✲✻✜➅➆✢✏✎✔P✝✍✌❂✡▲▼❦✣✖★✚✛✜❦✬❱✫✰☞❖✓✒✢

✓✡❧❲☞❳✝❨❩❬❭❪✬❏❑❫✜❴❨✏✗❏❵❶✞❪■

_X

✛✭

_PXR

✯✭✰✻✓✸✹❬

✺✕❛❜▼■❏⑧ ⑨✼✫✞✏ ✟❪■✪✸ ❝✻✔

_[1-1]

✘✓✡✍✌❂✛❞ ✛✒❀✜✫ ❡❀✂✄

❢✼✫✛✻✜✂✄❣❤✭

_LEBRA

✯✡

_PXR

✭✘✎✢✼✫✞✏✟❪■

_[1-2]

✬✐✏☞❖✓✒✢✘

✠

_1-1

✏

_LEBRA

✡

_PXR

✪✜✒✓❥❦✻✔❧⑩♠♥✡♦❜❦✝➒♣❦➋➌qr❦✪✼✜

_[1-

3]

^✘♦❜❦✛s❥❦t✏⑧❵✕✧✠✑✉✈✕❶✪✇①✻✓❥❦➅➆✝➒♣❦✛⑧❵✕✧✠✑

❥❦❯✭

Diffraction Enhance Imaging method

✯✏❧P❥❦➅➆✝qr❦✛②❦③④✏❧ P➒♣❦✰✢♦❜❦✪⑤✻⑥✒✔②❦✘✎✢✘⑦❣✡

_X

✛✭⑧⑨

_X

✛✯❧P

_PXR

✭⑩⑨

_X

✛✯✡❚✬✝✟✠❶❏❑❶✡❶✒♦❜②❦✬✽✢➆✢✘❫❷☞➋➌❸❷☞✏➒♣✡❹❖✓✒

✢

_PXR

✛❺✥✬❉❣✏✣✒✔✔✏❻☞✒✛✜✘❼❽☞②❦✪✽✢➆✢✰✒❲❾➆✔✻✽✪

❿✑✘➀➁●✘✘➂➅➆✢✥➃✡➄➅➆✛

_X

✛♦❜❝s✬❻☞✒✔✔✏♦❜✟✠❶❏❑❶

②❦✪✽✢✓✰✛➇✻✘✎✢✬✝qr❦✛✟✠❶❏❑❶✡❾➆✔②❦✰☞✢✘✸✹❬✺✕❛

❜▼■❏⑧⑨✼✫✞✏✟❪■✛

_LEBRA

✡

_PXR

✭✪✐✏◗✏❻☞✒➈✚❸❷✘❼❽☞②❦

✬ ✽✢➆✢ ❧❲✏ ✼✫➉ ✕✷✡✒ ✼✬❦ ✣➊➋ ✏❤➓ ✘❃✢❧ ❲✏▲ ▼❦✪ ✠❖✔☎ ➓ ✘

✎✢✘✓✡✍✌❂✡➌➍✠➋➌➎✡❬✠✪✠

_1-2

➋➌✠

_1-3

✏✼✜✘✓✡✍✌❂✡➏⑧➐✛

➉✕✷✤❷✡➑➒✛

_{5.1 m}

➓

_{2.4 m}

➏✥✘✎✢✘✍✌✎✏✑✒✓✛✝➏⑧➐✡▲➅✒

_X

➔✠

→✡❚✬➣✾✻✒✬✝➉✕✷✌★↔✈✕✌✎✠✏❧✢➉✕✷↕✣✵✸✻➙✥✬✸➛➅➆✓✝

C

➔✠→✬➜❙➅➆✓✒✢✘☛✍✰✜✢

_PXR

✗❏❵✕⑩✕➋➌➝☛✰☞✢✍✌❂✡✴✬✌

❑✶✷✏❳❨✢✗❏❵✕⑩✕✪❤

_1-1

➋➌❤

_1-2

✏❛➆➞➆✼✜✘✓✡✍✌❂✡✱➟✛✝■

❏⑧❑❶✖✠❧P➁❾➅➆✢

_RF

✼➀✪✴✬➅➠✢✓✰✘✏✢✻✓✍✌✎✡✍✌✼✧✍✥

✪✣➡✜✢✰♦✏✝➄✌✎✘✼✫➉✕✷✡✸✹❬✺✕✪✖➢➅➠✢✓✰✘✝★✩➅➆✢✼✫

➉ ✕✷✬➉ ✕✷➤ ✠✉✰ ➥➦✻✔ ➧✏✆ ✥✜✢ ★✚✛ ✜✪✖➄ ✜✢✓ ✰✘✎ ✢✘➅✢ ✏ ✍

2

✌✎●❍✡❤➑❖P✬✸❍▲➅➡☞✢✖✗

_{20 K}

➏✥✘✙✚➅➠✢✓✰✏❧P✝✍✌✎❼✘

✡✼➀➇➈✬➄❻✻✓✸✹❬✺✕✻✽

_V

✬✣➡☞✢✡✘✝✍✌✎✘✛❧P✣✒➉✕✷✸✹

❬ ✺✕✬✽ ✢➆✝ ➄✌✎ ✘✛❾✚ ✸✹❬ ✺✕☛ ❄✾✘ ➉✕✷✸ ✹❬✺ ✕✪✖ ➄✘❃✢ ✓ ✰

✘✎✢✘✍✌✎✡✸✹❬✺✕✻✽✰✴✬✌❑✶✷✡✗❬❑✢✡❜❝✪✠

_1-4

✏✼✜✘❛✻✓

➉✕✷✼✬

_I

✬

_{0 A}

✰

_{1 A}

✡✙✚✘✡✙✚✗✥

_{20 K}

➋➌

_{300 K}

✡✍➄✌✎✘✡✸✹❬✺

✕✻✽✪✠

_1-5

✏✼✜✘✠

_1-4

➋➌✠

_1-5

✏✼✜

_V

✛✟✭

_1-1

✯✰✢✟✭

_1-4

✯✏❧P❤➅➆

✢

_[1-4]

✘

✔ ✻✝

_{P in}

✝

_{R sh}

✝

_τ

✝

_L

✛❤

_1-2

✏✁✂➅➆✓✒✢✗❏❵✕⑩✕✪✜✒✔✘

_M

✝

_C

✝

_{T po}

✝

_n

✛❛➆➞➆✴✬✌❑✶✷✏❳❨✢✏✄◗✝❚❴✲❱✚❂✡☎❪✉✞✠✑✝✼➀✼➎◗✝q❛

❛s✘✎✢✘✠

_1-4

✛✝q❛✜✢✏✆➆✓✏✒✜✢

_RF

✼➀➉✕✷✸✹❬✺✕✡❻✫✪✼✻

✓✒✢✘q❛❛s✛✝❤

_1-2

✏✼➅➆✢✍✌✎➋➌➄✌✎❛➆➞➆✡✝✞❸❷

_{t f}

✝

_{L =1.3 m}

➋➌✎➅

_6m

✰✜✢✂r✎⑦➎❸❷

_{0.024 µs}

✬✸➛➅➆✝q❛❸❷✛

_{0.346 µs}

✪✭✜✻

✔✘➅✢✏☎❪✉✞✠✑

_C

✏✑✒✓✛✝■❏⑧❑❶✖✠✡

_RF

✗❬❑✢

₃

✠

_s

✡✡☛❼✘

_V

✬❜☞✜✢❧❲✏

_{1 dB}

✪➜❙✻✔✘✾✔✠

_1-5

✡❡✩✏✭✜✻✔

_V

✛✠

_1-4

✘✌✍✻✔❵

✬✭✜➅➆✓✒✢✘✠

_1-5

❧P✝✍➄✌✎✪

_{300 K}

✭❣✗✯✰✢

_{20 K}

✏❸❹✻✙✚✜✢✰

✸✹❬✺✕✻✽✬✣➡☞✢✓✰✬❍✰✢✘✴✬✌❑✶✷✘✡☛☞✓✰✛✝

_RF

✼➀➇➈✡❻

☞ ✒✍➄✌ ✎✱✲ ✪❸❹ ✜✢✺✏ ❧❖✓ ✏❤✻ ✓✑✑ ✒✑✓✰ ✘✎✢ ✘✓✡ ④✓✛✂ r ✎

❼✰▲▼✻✓✔✕☞✏✒❃✒✍➄✌✎❼✘✡

_RF

✼➀➇➈✬✝❸✰✵✡❸✰➃➀✪✥❛✢

✰✝✍➄✌✎❼✡✗✥✬✥➍✏✖✒✝✲➃✬✗✘✓✻✾❲✔✔✘✎✢✘

_{30 K}

✙✥✏☞✢✰

✍✌✎❼✘✡✍✌✼✧✍✥

_{E acc}

✛✗✥✥➍✰♦✏✚✻➡✖➢✻✓✻✾❲✘

✓➆✾✘✛✜✛■❏⑧⑨✼✫✞✏✟❪■✏✭✜✜✢✖✗✘

_RF

✼➀➇➈✡❻☞✒✣✤✥

✦✵✍✌✎✡☎✆✪✺❖✓❃✔✘☞❳

_{J. Guo}

❊✏❧P✖✗✘❣✦✂✍✌✎✏✒✼➀✪➁❾

✻✣qr✱✲✪❘❖✔✢✣✛✎✢✬

_[1-5]

✝✮✼✬✣★✚✛✜✡✢✣✛✤✔✓✘✎✢✘

✥✦

✧ ★✩

✧ ★✩

, (1-1)

(1-2)

★

✰

★

❃

_(1-3)

✪

_(1-4)

3

✠

1-1 17.5 keV

^✡

PXR

✘❥❦✻✔❧⑩♠♥✟➑

✭❃✯♦❜❦✝✭❳✯➒♣❦✝✭✁✯qr❦

_[1-3].

✠

_1-2

✸✹❬✺✕❛❜▼■❏⑧⑨✼✫✞✏✟❪■✡➌➍✠

_.

✠

_1-3

✸✹❬✺✕❛❜▼■❏⑧⑨✼✫✞✏✟❪■✡➎✡❬✠

_.

✼✂✄☎✆

✼✂✄☎✆

✼✂✄☎✆

✼✂✄☎✆

✍✝✞

_PXR

✩✠✡

✤✝✞

✄☎✆

☛☞✌

✎✏✡

✑✒✓✔✕✖☞

✚✗✘✙✛✜✢

_C

✣ ✾✥✦✼✧

☛★☎✖☎✪

20 K 20 K

Accelerating structure

Injector

Decelerating structure

Beam dump

PXR

5148 mm

2 4 0 0 m m

4

❤

_1-1

☛✍✰✜✢

_X

✛✗❏❵✕⑩✕

_.

Variable energy range 5

^❃

50 keV

Beam current (average) 50 µA

Beam current (peak) 1.0 A

Number of photon >10 ⁹ 1/s

❤

_1-2

✴✬✌❑✶✷✏❳❨✢✗❏❵✕⑩✕

_.

Input power ( C =1.0dB) 100 MW

Beam energy (ring) 75 MeV

Incident energy 5 MeV

Emitted energy 8.5 MeV

Beam pulse width 3.5 µs

Structure length L 1.3 m

Filling time t f 0.16 µs

Resonance frequency f 5712 MHz

RF pulse width τ p 2.0 µs

Repetition rate 50 Hz

Operating temperature T 20 K

Unloaded Q factor Q 0 53,000

Shunt impedance R sh 354 MΩ/m

Attenuation constant τ 0.054

✠

_1-4

✍✌✎❼✘✡✸✹❬✺✕✻✽

_.

✭

_C : -1.0 dB, Beam energy: 75 MeV, RF pulse width: 2.0 µs, RF repetition: 50 Hz.

^✯

0

20

40

60

80

0 1 2 3

B ea m en er g y ( M eV )

Time (µs)

5

✠

_1-5

✍➄✌✎✘✡✸✹❬✺✕✻✽✭

_{C = -1.0 dB}

✯

_.

0

20

40

60

80

0 0.5 1 1.5 2 2.5

B ea m en er g y ( M eV )

L, Length of structure (m)

20 K(I = 0 A)

300 K(I = 0 A)

20 K(I = 1 A)

300 K(I = 1 A)

Accelerating Decelerating

6

1.2

^{✛✁ ❇✪✁}

✓➆✾✘✛✜✛✝➂✖✡■❏⑧⑨✼✫✞✏✟❪■✡✦✟✲❴❨✓✝✍✌✎✵✸✏❴❨✔✍

✌✎❍✸✘✎✢✦✡✖✗t✲➉➊✣✍✌✎✡➉➊➋➌✂✄✏☎P➅✆✘❃✔

[1-6, 1-7, 1-8]

^✘

✛✂✄✡☛☞✛✝✖✗✏❳❨✢✣✤✥✦✵✍✌✎✡✙✚✪✦☞✜✢✓✰➋➌✝✖✗✏❳❨✢

✦✵✍✌✎✡✱✲✪❽✢✰✏✜✢✓✰✡

₂

✑✘✎✢✘✓➆✢✡☛✍✪✝➂✜✢✔✔✝✙➢

✡➉➊❊✪✦❣✻✔✘

₂

✬✙✞✏❼✠✡✡☛✪✖✗✢✘

✖✗✏❳❨✢✣✤✥✦❍✡t✲✂✄

✌ ✍✎☞✏❣✦✂✍✌✎❍✰✻✓✏✜➅➆✢✤✥✬

_99.99

❃✘✎✢✑✒●✦✭■❏❑

₁

✯

✰✝➅✢✏✣✤✥☞✓✫✍✌❂✜✏☎✆➅➆✔✦❍✭✤✥

_99.99998%

✝✙➢

_6N8

✦✯

[1-9]

^✡

2

✔✕✡✣✤✥✦✡✖✗❖P▲✭

RRR Residual Resistivity Ratio

^{✯✪❘❙✻✝}

RRR

✡❍✸✣❿③④✘✙✲✪❽✢✰✏✜✢✘

✚

_6N8

✦➋➌■❏❑

₁

❍✘✵✸✻✔

_{TM 010}

➎✕→❩❬❭❪■❑❫❴✡

_Q

❵✭

_{20 K}

✯

_{/ Q}

❵✭

_{300 K}

✯✰❛✡●❍✡

_RRR

✡❜❝✪✦➊☞✏✜✔✝❫❴✡

_Q

❵✰

_RRR

✡❜❝✪

❽✢✰✏✻✝❣✗✰✢

_{20 K}

✏❸❹✻✔❸✡✍✌✎✗❏❵✕⑩✕✭

_Q

❵✝✌✢✠❶❖P

✭

_{R sh}

✯✝➄✣❙s✭✤ ✯✯✪❡✩✜✢✘

✥ ❸ ❹✏✖ ❲♦♣ qrs ✡♥❦ ✏✑✒ ✓✝✣ ✤✥✦ ✡❿ ✄☎◗ ✡✠✹ ❵✰✢ ❡✩✻ ✔❞

❡❵✬✵✸✜✢✍✌✎❍✘✎✢

_6N8

✦❍✘✵✸✻✔✶❑❶❫❴✡✦➊❵✪▲▼✻✝✵

✸ ✜✢✍ ✌✎✡ ♦♣qr s➋➌ ♠❯✡ ✗✥✫ ✬✏❞❡ ❵✪✭ ✜✘❃ ✢✓✰✪ ✦✰✔ ✢✘

✍✌✎✡✖✗✧★✡✶✩✰✖✗✏❳❨✢✣qr✱✲✂✄

✪ ✍✌✎✪❸❹✜✢■❏⑧⑨❑⑩❪❶✡❸❹✲➃✪✂✄✜✢✘

✫ ✖✗✏❳❨✢✍✌✎✡✣qr✱✲✪❘❙✻✝✙✚✗✥

_{20 K}

✏❳✒✓■❏⑧❑❶✖✠✼

➀✪➁❾✘❃✢✓✰✪✦✰✔✢✘

✖✗✏❳❨✢✍✌✎✡✒✼➀➉➊

✭ ✖✗✏❳❨✢✟✠✡☛✌✎✏✠✑✱✲✪❣✗✡✡✕⑩✰▲▼✧☞✜✢✘

✮ ★✚✛✜✯✮✼✬✡✗❬❑✢✣✍✌✼✧✍✥✘✙✲✪❘❙✜✢✘

7

1.3

^{②③④✾✍ ✁}

➉ ✕✷✪ ✍✌✜ ✢✍✌✎ ✛✍✌ ❂✟➃ ✡✂☛ ☎➓✡✄ ✑✘✎ ✢✘⑦ ❣✡✓✺ r▼✍ ✌✎

✛✝❾✩➀❱✚❫❴✭✙➢✝❾✩☎☎✉❏✕❫❴✯➋➌✍✌❫❴✰✢✶➂➅➆✓✒✢✘☎✉

❏✕❫❴✘✛✝☎✘✂r✎✐✛r➎✕→

_{TE 10}

✭

Transverse Electric field

^{✯✰✍✌➎✕→✘}

✎✢✆✘✂r✎➎✕→

_{TM 01}

✭

Transverse Magnetic field

✯✡❃⑧■✖r✡➎✕→♥✝➋➌

⑧✠❩✕➤✠❑❹✚✬✺✞➆✢✘✍✌❫❴✘✛➉✕✷✍✌✬✺✞➆✢✡✘✝❫❴❼✏✛✎✢

✍ ❙✡✸✹ ❬✺✕ ✬☛✠ ➅➆✢✬ ✝✓✡ ✸✹❬ ✺✕✛ ❫❴✤✘ ✧★✕ ❬➇➈ ✰✻✓✬ ✹ ➅

➆✓✻✾❲✘✟✭

_1-5

✯✏✼✜❧❲✏✍✌✼✧✍✥✡

₂

✡✏▲☞✻❫❴✤✘✡✧★✕❬➇➈

✬✏✒✜✢✡✘✝✑✒✡❣ ✦✂✍✌✎✘✛s ✌✎✡ ✸✹❬✺✕✬✬✹➅➆✓✻ ✾❲

_[1-10]

✘

✓ ✡✔✔❯ ✡✏✑ ✰▲▼ ✻✣✒✼ ◆✦✂ ✥✪✼ ✜✦✵ ✡❫❴✘ ✎❖✓ ✎✍✌ ✼✧✍✥ ✬ ✣

➡ ☞✢✰❫ ❴✤✘ ✡✧★ ✕❬➇➈ ✬✱✔ ✓✏✒ ✻✝✸ ✹❬✺✕ ❥◗✬ ✒❦✜ ✢✰♦✏ ❫ ❴

✤✡❸❹✬✩✫✰☞✢✘✓✡✔✔✝✓➆✾✘❣✗✘✙✚➅➆✢❣✦✂✍✌✎✘✝✣✒✼✧✍

✥✬➝☛☞✙✚✏✛

duty cycle

✡▲➅✒✗❬❑✙✚✏✓✢➆✓❳P✝✣✒✼✧✍✥✘

_CW

✙✚✬➝☛☞✙✚✏✛❄❅✹➀☞✏✂✄☎✆➅➆✓❃✔✯✦✂✍✌✎✬✭✜➅➆✓✒✢✘

✔✔✕✖

_{P c}

✗✘✙✚✛✜✖

_L

✗✢✣✤✥✦✖

_{V c}

✗✢✣✧★✩

_{E acc}

✗✢✣✧✪✫✭✕✮✯✰

✟✱✍✌ ✎✏❜ ✜✢✂ ☞✂✄✰ ✻✓✝ ❣✦✂ ✍✌✎ ✘✛✣✼ ✧✍✌ ✏❜✜ ✢✂✄✬ ✲ ✳

✢➆✢✘✣✼✧✲➃✡✓✧✬❽✢✰✏☞❖✓❳✢✮✝✼✧★✩✼✬✏❧P✴✓✪✵❨✓✒✢✘

❛✡✔✔✼✧★✩✏✓✒✜✢✮✼✬✡✖➄✡✂✄✎✺✞➆✓✒✢✘✯✦✂✍✌✎✘✛✝✥✖

✻ ✔❧❲✏ ✟❑❶ ✣☎➓ ✡✒❃➅ ✬✩✫ ✰☞❖ ✓❳P ✝✓➆✢ ✡✖➄ ✬✲➃ ✍❦✏✑ ☞ ✬

✢✓✰✎✶➡✝✂✄✴✷✰☞❖✓✒✢✘✍✌✎❤➑✡✆❿✪✸✺✢✔✔✏❫❴✡❍✸✝❤➑

③④✣✻✼✏❜✜✢✂✄✬✽✆✏✺✞➆✓❳P✝✓➆✢✡✂✄➂❲✏❧P✍✌✎

_Q

❵✣✍

✌✼✧✡❴✥✬❙❚➅➆✓✒✢✘✾✿✡✍✌✎❺❻✡✍☞✪❤

_1-3

✏✼✜

[1-11, 1-12]

^✘

❤

_1-3

✾✿✡❣✦✂✍✌✎✰✯✦✂✍✌✎✡✍☞

_.

Project STF2 (KEK) X-FEL (SP-8)

Conductivity Superconductivity Normal conductivity

Operation temperature K 2 303

Accelerating Gradient MV/m 31.5 50

Frequency MHz 1300 5712

Pulse Width µs 1000 2.5

Repetition Rate Hz 5 60

Required RF Power MW 0.2 107 (SLED)

Number of cell per Cavity 9 100

Number of Cavity 14 128

Length per Cavity m

^❃

1 1.8

Q 0

^❃

10 ⁶ 8000

Accelerating Mode 2/π 2/3π

8

1.4

^✂✄✻ ✺✽✁✂✄☎❁❂❃❄❅②③④✾✍ ✁

❤

_1-4

✏✛✂✄✏✜✒✔✍✌✎✡✂☛❤❞✗❏❵✕⑩✕✪✼✜✘

_{20 K}

✏❳❨✢✗❏❵✕

⑩✕✭

_{Q 0}

✝✌✢✠❶❖P

_{R sh}

✝➄✣❙s

_τ

✯✛✝

_{300 K}

✡★✩✘

₂

✣➁✼✳✙♦♣➎✕→✆

✛✟✕→✘✎✢

SUPERFISH[1-13]

✏❧P❡✩➅➆✔❵✰✢✝

₂

✬✘✼✜❩❬❭❪■❑✡

_Q

❵❘❙❱❲✪☞✝✻✓

_{Q 0}

➋➌

_{R sh}

✛♦✏▲

_5.2

✄✝

_τ

✛

_{300 K}

▲

_1/5.2

✄✰☞❖✓✒✢✘

✍✎☞☞

_C

➔✠→✍✌✎✰▲▼✻✓✡☛❑■✟↕

_{2 a}

✬✒❃➡☞❖✓✒✢✬✝✴✬✌❑✶✷

✏❳✒✓✸✹❬✺✕✻✽✬☎❸❷✘✍❙✏✞✝✜✢✔✔✏✝✞❸❷

_{t f}

✪☎➡✜✢✓✰✣➉

✕✷✠✖✕✴✶✰✻✓❛✡❧❲✏❤❞➅➆✔✘✛✍✌✎✛

_2/3

✡➎✕→✡☛❙✼✧✓✺r▼

✍✌✎✘✎✢✘⑦❣✡❙✼✧▼✍✌✎✘✛✝✍❫❴✡✍✌✼✧✍✥✬✍❙✰☞✢❧❲✏✡☛

❑■✟↕✪♥❦➅➠✢✬✝☛❙✼✧▼✍✌✎✘✛✝✡☛❑■✟↕✬✍❙✡❷✌✘▲➅➡☞❖

✓❳P✝✛✍✌✎✘✛

_{37.5 µm}

❷✌✘▲➅➡☞❖✓✒✢✘

_SUPERFISH

✘❡✩✻✔

_No35

✎❬✡✼✙❍✏✪✠

_1-6

✏✼✜✘

✛✍✌✎✭✠

_1-7

✯✛✡✠❑■✰❑❃✕➏✕✭✠

_1-8

✯✪➅✑✚✞➠✔

₇₄

✒✡✍✌❫❴✰

2

✒✡❾✩☎☎✉❏✕❫❴✰✢☞P✝✟✎✛✓

_{1.3 m}

✰☞✢✘✛✍✌✎✡✂☞✵❷✔➏✪✠

1-9

✏✼✜✘✡☛❑■✰❑❃✕➏✕✡●❍✏✛

_6N8

✦✬✜✒✢➆✝❾✩☎☎✉❏✕❫❴✡

●❍✏✛■❏❑

₁

❍✬✜✒✢➆✔✘✡☛❑■✰❑❃✕➏✕➋➌❾✩☎☎❧❏✕❫❴✛✝➤

⑧ ✕➎✠→ ➔⑧❶ ✪✜✒ ✔✯✹✇ ✖✗✏ ❧✢✘ ✙✍✔ ✘✚➑✏ ❺✥✬ ❖✓✒ ✢✘✘✙ ❸ ✏

✛ ✜☛✍✔ ✏✭✻ ✔✘✙ ✢✪✏✜ ✻✝✍ ✔✤✛ ✥✦✻ ✼✰✟❬ ✟✕❬ ✏❧✢ ❤➑✧❃ ✎ ✳

✪✺❲✘♠❯✹✥✛★

₂

✩

_m

✝❤➑✪✥✛✡☛❑■✡

_R

❽✬✾✒✣➅✪➅

_{Rz 0.4}

✩

_m

✙➢✘

✎P✝✫➑❽✬

_{Rz 0.4}

✩

_m

✙➢✘✎✢✘✓➆✢✡✍✔✛✗✥✰✬✥✬✎④➅➆✔✭❼✘✺

✞➆✝✍✔➅➆✔✎✡✛✮❻✡✭❼✘✇✯✻✒✎➅➆✢✘✍✔➅➆✔✡☛❑■✰❑❃✕➏✕

✛

₂₅

✰➏✥✮✑✱✲✏✠✑✡✳✓✴✵✶✚➅➆✓✝

₃

✑✡✍✌❫❴✬✵✸➅➆✢✘❛✡✤

✓➆✢✡✍✌❫❴➋➌❾✩☎☎✉❏✕❫❴✪✼✫➉✕✷✷✶✭✙➢✝

_EBW

✯✏✓✶✚✜✢✘

❛✻✓❾✩☎☎✉❏✕❫❴✏➉✕✷✸✕❶✜✹❏✠✧✪

_TIG

✷✶✻✔✤✝

_EBW

✶✚❽❄

✺✏❤➓➅➆✔

_RF

✼★✕✽✕✪✼★✕✏✠✑✻✓✛✍✌✎✬✾➂✜✢✘

❣✦✂✍✌❫❴✡✶✚✏✛✝✴✵✶✚

[1-14, 1-15, 1-16]

^✝✼✿

[1-17]

^{✝✔❲☛❨✡✒✮➆}

✰✡✝❯✘✶✚➅➆✢✓✰✬✍✎☞✘✎✢✬✝✼✿❯✬✜✒✢➆✢✓✰✬✶✒✘✼✿❯✛❯

✡ ✶✚❚❯ ✡❧❲ ✏✣✗ ✘✡✶✚ ✘✛✑ ➡✝❣ ✗✘✺ ❲✡✘✶ ✚❸✏ ❿♥✘ ✬✥✦☞ ✒ ✔

✔✘✎✢✘✼✿✡➧✝✼✿❫➀✬✥✦✢✓✰✏❧P❫❴♠❯✬♥❦✻♦♣qrs✬♥❦✜✢

✬✝✟✠❶✖✕❬❀➃✘✎✢✡✘➒♣❁❹✜✼★✕✏✠✑✪➝☛✰✻☞✒✘✓➆✬❣✗✘✙

✚✜✢✍✌✎✡✶✚✏❳✒✓✼✿❯✬✡❂➅➆✢✾✒✡④✓✘✎✢✘

✛✍✌✎✡✙✚✏✛✝✙✚✗✥✛✖✗

_{20 K}

✘✎✢✡✘✝

_Q

❵✡❴✥✪❙❚✘❃✢✖✗❫

➀ ✡✖➄✡ ❥❲✡ ✎✢✣ ✗✘✡✶ ✚✬❄ ✾✻✒ ✰✸✺ ✢➆✢✘ ✴✵✶ ✚✛❢ ✔✏✑✪ ✜ ✒

✮ ❅✫✡✴ ✵✏❧ P✶✚ ➅➆✢✡ ✘✶✚ ➑✡✇ ①✲✬ ❶➡✝s ✶✚t ✛✍➃ ❦✻✶❆ ❖ P

✬✖➄✜✢✰✸✺✢➆✢✽✏❳✒✓✎✝

_Q

❵✡❴✥✛❙❚✘❃✢✘✓➆✢✡④✓✏❧P✛✍

9

✌✎✡✶✚✏✛✴✵✶✚✬✜✒✢➆✔✘

❤

_1-4

✍✌✎✡✂☛❤❞✗❏❵✕⑩✕

_.

✬ ✎✁

✛✢✣✤✂

❃ ✄☎✆ ✝✞✟ ✠✡

_6N8

✺ ☛

☞✌✍

❃ ✏✑✒ ✓✡✔ ✕✖

₁

☛

RRR 2,000 300

✗ ✥✘✧✪✙✚✜✗

✢✣✢✣✤

_2/3

✦✢✣✤

✹✧★✜✩

_{f MHz 5712}

✹✧✪✭

_{T K 20}

✫✥

_{L m 1.3}

✢✣✘✙✩

_N

✭

₇₄

✮✯✰✱✲✳

_{2a mm 13.2625}

✴

_16.0000

Q 0 (300K) 9,940

Q 0 (20K) 53,280 52,780

✵✶✷✸✻✼

_{R sh (300 K) MΩ/m 66}

✵✶✷✸✻✼

_{R sh (20 K) MΩ/m 354 350}

✽✾✘✩

_{τ (300 K) Np 0.290}

✽✾✘✩

_{τ (20 K) Np 0.054 0.055}

✿✣✭

_{v g /c % 2.7}

✠

1-6 SUPERFISH

^{✘❡✩✻✔}

No35

^{✎❬✡✼✙❍✏}

.

10

✠

_1-7

✍✌✎➌☛✠✭♠❯⑩➒

_mm

✯

_.

✠

_{1-8 (a)}

✡☛❑■✝

_(b)

❑❃✕➏✕

_.

✠

_1-9

✛✍✌✎✡✂☞✵❷✔➏

_.

✘ ✁✛ ✘ ✁✛ ✘ ✁✛

✍✝✍✂✢

₇₄

✟✄✣

✭☎✆

_6N8

✺

✢❃✝✆

_99.99998%

✣

✞✠✡☛✌✒☎✍✂

✭☎✆☞✌✭✺✑✒✔✎

✢❃✝✆

_99.99%

✣

✎✠✡☛✌✒☎✍✂

✭☎✆☞✌✭✺✑✒✔✎

✢❃✝✆

_99.99%

✣

EBW EBW EBW EBW

(a) (b)

11

1.5

^{✼ ✁ ✂✾✍ ✁}

1.5.1

✼✧★✩✼✬✭✮✼✬✯✰✱✲✳✴

✪❫✘✏✑✼✱❷✏✄✍✜✢✼✔✪✥➍➅➠✓✒➡❸✝✜▲✼✬✬✬➆✝✠

_1-10

✏✼✜

❧❲☞❱❲✬✽✢➆✢✘✼✔✏✴✻✓⑩❁✏✏✍✻✓✒➡✼✬✪✮✼✬✭

dark current

^✯✝

✘✒✛✎✢✼✔✘➦☎✼✬✬✆✏✜✢✬✝✓➆✬✱✲✳✴✭

_breakdown

✯✘✎✢✘✮✼✬✛✝

✟✠✡☛✌✎✏✠✑✬✓✆✘✒☞✒✟✝✞✠✏✜▲★✼✭

micro discharge

^{✯✰❃✡➆✢☛}

✓❙☞☞✌✰☞✢✘✜▲★✼✛✝✂✏✼✫✡➦✆☞☞★✩✝❤➑✰✢✡✍❊✡✜✓✫✭

_micro-

particle

^✯✡✎➒✣❤➑✏✖❖✓✒✢✏❢☞☞✑❑❍✫✡★✩❊✬✲✳✢➆✢

[1-18, 1-19, 1-

20]

✘✏✑❤➑❧P★✩✻✔✼✧★✩✼✫✛✮✼✬✰✻✓✒❘➅➆✢✬✝✍✌✎❼✘✼✫➉

✕ ✷✛❛✡ ✍✌✏ ➝☛☞ ✸✹❬✺ ✕✪✼ ✧★✩ ✼✫✏ ✔❖✓✻ ✾❲✡ ✘✝✼ ✫➉✕✷ ✡ ✣

✼ ✧✍✌✏ ✮✼✬ ✜✡✖ ➄✬➝☛ ✰☞✢ ✘✍✎ ☞✏✯ ✦✂✍✌ ✎❍✰ ✻✓✜ ✒✢➆✢ ✏ ⑨

❧ ✣⑩✠✑ ❑✶✠ ✰✢✆ ✥✜✢✮ ✼✬✜ ✛✗✥ ✏✘✙ ✻✝✖✗ ➢✘✛ ✮✼✬ ✜✬❻☞ ➡ ☞

✢✰✒❲✢✣

[1-21, 1-22]

✬✎P✝✖✗✘✙✚✜✢✛✍✌✎✘✛✮✼✬✜✡✒✢☞✖➄✬❙

❚✘❃✢✘✾✔✼✧★✩✼✫✬✍✌✎❼✤✏➥➦✜✢✰★✚✛✪✆✥✜✢✓✰✰✢✝✰★✚

✛✜✏✛✇✶☞❜❝✬✎✢✘❛✡❯✏✎✮✼✬✛✝✼✫➉✕✷✡✍✌✏➝☛☞✸✹❬✺✕✪

✔❖✓✻✾❲✓✰✣➔❪■✑❏✕✠→✏✍✏❧✢➥➦✽✘✡t④✦➊✲✡✮✯✣

wakefield

✪⑥❃✖✓✜❀➃✲✡✎✢✓✰✬✗✢➆✓✒✢

_[1-23]

✘

✠

_1-10

✼✬

_-

✼✔✱✲

_[1-18].

1.5.2

^{✼✧★✩✵✶}

✪❫❳✏➓✰➆✔✏✑❤➑✰✢✛✝❿✼✫✝✼✧★✩✼✫✝✙✼✫☞✝✬★✩➅➆✢✘❛

✡ ★✩◗✣ ★✩➅ ➆✢➧ ✡✙✚✸ ✹❬✺ ✕✛✛ ➃❳✏ ✼✫✡✙ ✱✻✓ ✒✔✸ ✹❬✺✕ ☛ ➒

✣❺✺❜s✘✜✾✢✘★✼✟✷✏❳✒✓✛✼✧★✩✼✫✬✂✏✮✯✻✓✒✢✘✼✧★✩✼✬

✛✏✑❤➑✰✢✡❶✠✹❬✟✷✏❧❖✓✆✥✻✝④✟☞✏✛

Fowler-Nordheim

^{✡✟✪✐✏}

✼✬✇✥

_{j F (A/m}

2 ₎

✛❤➑✼✧✍✥

_E

✭

_V/m

✯✰❺✺❜s✢✭

_eV

✯✡✆✪❿✑✟✭

_1-6

✯✘❤

➅➆✢✘❶✠✹❬✟✷✛✼✧✍✥✬✒❃➡☞✢✰❤➑✡✸✶✠✌✢❬✴✤✬✣➡☞P✝✼✧

Micro discharge

12

★✩✼✫✬★✩➅➆✣✜➡☞✢✭✠

_1-11

✯✘

✧ ❃✼❄

✭ ✯

✠

_1-11

✼✫✡✼✧★✩✡ ✟✠

_[1-18].

✏✑❤➑ ✛④✳ ☞✏✫ ✺✰☞❖ ✓❳✢ ✮✜▲ ➦✖✬ ✙✱✻✝ ✓✡➦ ✖✏❧ P✏❢☞ ✏ ✜

▲★✼✬✥✦✓❤➑✼✧✍✥✬✏✒✜✢✘✏✒✻✔✏❢☞☞❤➑✼✧✍✥

_{E m}

✰④✳☞☞✼

✧✍✥✛✼✧✏✄❝s

_β

✪✜✒✓✟✭

_1-7

✯✘❤➅➆✢✘✼✧✏✄❝s

_β

✰✜▲➦✖✡❜❝

✪✠

_1-12

✏✼✜✘

_β

✛✜▲➦✖✡✒❃➅✣✘☞✏✘✙✻✓✒✢✓✰✬❍✰✢✘

✭

13

✠

_1-12

✼✧✏✄❝s

_β

✰✜▲➦✖✡❜❝

_[1-23].

✼✧★✩✏✼ ✜✢➑✠✪

_{A e}

✰✜✢✰✝✟✭

_1-6

✯✰✢✝✼✧★✩✼✬

_{I F}

✛✟✭

_1-8

✯✏

❤➅➆✢✘

✧ ❃✼❄

✭ ✯

✏✑❤➑✘✡✜✺☞☞

_RF

✼✧✪

_{E 0 sin ωt}

✰✜✢✰✝✫✟✼✧★✩✼✬ ✛✟✭

_1-9

✯✏

✼✜❧❲✏❸❷✫✟✘❤➅➆✢✘

_T

✛

_RF

✼✧✡q❙✰✜✢✘

✧ ❃✼❄

✭ ✯

➅✢✏✠❍❞❡✪✆➡✰✟✭

_1-10

✯✡❧❲✏❤➅➆✢✘

✧ ❃✼❄

✭ ✯

I F

^✝

E

^{✝✢✰✟✭}

1-11

^{✯✏✼✜❜❝✭}

Fowler-Nordheim plot

^✯❧P✝

β

^{✛✜✔✢➆✢✘✓}

✡✁➃☞✪✠

_1-13

✏✼✜✘

✭ ✯

14

✠

_{1-13 S}

➔✠→

₇

✎❬✍✌✎✘✽✢➆✔

Fowler-Nordheim plot

^✡✍☞

[1-23].

15

1.6

^{✎ ✁}

[1-1] I. Sato, et al., “Developments of Coherent X-ray source based in cryogenic electron

linac.” Proceedings of the 11th Annual Meeting of Particle Accelerator Society of

Japan (2014).

[1-2] I. Sato, et al., “

❞✛✒❀✼✫✛✘✍✌❂✡✟☞✰✂✄❞②

.” Proceedings of the 27th

Linear Accelerator Meeting in Japan (2002).

[1-3]

^❨❩❬

, “

^{✟✟✕✈✠❶⑩⑨}

X

^{✛✡❏❑❫✜}

”, OHO’12, 10

^✬

(2012).

[1-4]

^✔✂✄☎

, “

^{✍✌✎✯✍➃❛✆}

”, OHO’02, 5

^✬

(2002).

[1-5] G. Jiquan, et al., “Cryogenic RF Material Testing with a High-Q Copper Cavity.”

American Institute of Physics Conference Series, 2010, pp. 330-335.

[1-6] A. Iino et al., “PROPERTY TEST OF THE CRYOGENIC QFACTOR FOR HIGH

PURITY COPPER.” Proceedings of the 12th Annual Meeting of Particle

Accelerator Society of Japan (2015).

[1-7] A. Iino et al., “PROPERTY TEST OF THE Q-FACTOR FOR HIGH-PURITY

COPPER AT THE TEMPERATURE OF 20K.” Proc. of IPAC2016. (2016).

[1-8] A. Iino et al., “High-Power Test of C-band Accelerating Structure at 20 K.”

Proceedings of the 13th Annual Meeting of Particle Accelerator Society of Japan

(2016).

[1-9]

^{✑✛✝✞❊}

, ”

✓✫✍✌❂✜✦❍✸✝✓✫✍✌❂✜✦✎➋➌✓✫✍✌❂✜✦✎✡✵❷

❚❯✝✚➌✏✝✓✫✍✌❂

_”,

✱☎

2011-236484 (2011.11.24)

[1-10]

^✼✠✡☛

, “

^{✯✦✂✍✌❫❴}

”, OHO’15, 7

^✬

(2015).

[1-11]

^✍☞✌✏

, “

^{✯✦✂❫❴✡✐✷}

”, OHO’14, 5

^✬

(2014).

[1-12] T. Sakurai, et al., “High power RF conditioning of C-band disk-loaded type

accelerating structure.” Proceedings of the 11th Annual Meeting of Particle

Accelerator Society of Japan (2014).

[1-13] K. Halbach, and R. F. Holsinger. “SUPERFISH-a computer program for

evaluation of RF cavities with cylindrical symmetry.” Particle Accelerators 7.4

(1976) 213-222.

[1-14] I. Kawakatsu, and K. Seiji. “Study on Diffusion Bonding of Metals.” Journal of

the Japan Institute of Metals 40 (1976) 96-103.

[1-15] Y. Fukaya, et al., “Diffusion Bonding of Copper Machined Ultra Finely: Study on

Diffusion Bonding of Copper (Report 1)." Quarterly Journal of the Japan Welding

Society 15.3 (1997) 467-475.

[1-16] Y. Higashi, et al., “Study on High-precision Diffusion Bonding for X-band

Accelerator Structure.” KEK Report 00-2 (2000).

[1-17] J. Tanaka, et al., “On Electroforming of Disk-loaded Waveguide of Linear

16

Accelerator”, Appl. Phys. in Japan, 31.2 (1962) 146-154.

[1-18]

^{✚❩ ✁}

, “

^{✣qr★✼✰❤➑}

”, OHO’90, 8

^✬

(1990).

[1-19] K. H. Bayliss, R. V. Latham, “An analysis of field-induced hot-electron emission

from metal-insulator microstructures on broad-area high-voltage electrodes.”

Proc. R. Soc. London, A403 (1986) 285-311.

[1-20] R. P. Little, W. T. Whitney. “Electron emission preceding electrical breakdown in

vacuum.” Journal of Applied Physics 34 (1963) 2430-2432.

[1-21] R. Klein, L. B. Leder, “Temperature Dependence of Electron Emission in the Field

Emission Region” Phys. Rev. 124 (1961) 1046-1049.

[1-22] R. Klein, L. B. Leder, “Field Emission from Niobium in the Normal and

Superconducting States” Phys. Rev. 124 (1961) 1050-1052.

[1-23] J. W. Wang, G. A. Loew, “Field emission and RF breakdown in high gradient room

temperature linac structures.” Talk given at, SLAC-PUB-7684 (1997).

17

2.

^☞ ✁✂✄ ☎✆✝ ✞✟✠ ✡☛✌ ✍✎

✛✬✘✛✝✾✮✛✍✌✎✡✍✌❫❴❍✰✻✓✜✒✢

_6N8

✦✰❣✗✘✙✚✜✢✍✌✎❍✏

✍✎☞✏✜✒✢➆✢■❏❑

₁

✡✖✗❖P▲✭

_RRR

✯✪▲▼✻✔✘✣✏✛✍✌✎✘✛✝✙✚

✗✥

_{20 K}

✘

_Q

❵➋➌

_{R sh}

✬✣➡✝✏✬✖➡☞✢✓✰✬✱➟✘✎✢✬✝

_6N8

✦❍❫❴✡

₂₀

K

^✘✡

Q

❵✛❣✗▲✑✄✏☞✢✡✰✪❽✢✰✏✜✢✰♦✏

_RRR

✡✒✒✏❧❖✓

_{20 K}

✘✡

Q

❵✏✝✡❧❲☞✒✒✬✩✢✡✰✪✓➆✢✡❍✸✪✜✒✓✦➊☞✏✧☞✻✔✘✾✤✏❿❜

✮✣❿✄☎✏❧✢✍✌❫❴✡♠❯♥❦✏✖✒♦♣qrs✬♥❦✜✢✬✝

_{300 K}

✰✢

_{20 K}

✲

✡ ✗✥♥❦ ✏✖❲ ♦♣q rs✡♥ ❦✜✪ ❞❡➋ ➌✦➊ ❧P✜✔ ✝✗✥ ♥❦✏ ❧✢♠❯ ➋ ➌

♦♣qrs♥❦✡✫✬❵✪✜❙✻✔✘

2.1

②③④✓❆①✻✁❇❂❃❄❅✔

_6N8

❅①✺✕✖

₁

❃❇✗✘

✍✎☞✏✍✌✎●❍✏✛✝✣✒✼◆❖P◗✣❿✦✂✲✝✪❫❳✘✡✖✑❑★✩✱✲❊✬✜

✔✢ ➆✢ ✬✝ ❣ ✦✂ ✍✌ ✎ ❍✸ ✰✻ ✓✛ ❞ ✍✏ ✑ ✵✡ ✣✤ ✥✦ ❍ ✘✎ ✢■ ❏❑

₁

✭ ✤✥

99.99%

^✯

[2-1]

✬✙➡✜✒✢➆✓✒✢✘✛✍✌✎❍✘✎✢

_6N8

✦✛✖✗✘❾➆✔✼◆☞✲✚

✪✼✜❧❲☎✆➅➆✔❍✸✘✎✢✘✓➆✢✡❍✸✏✑✒✓✝✍✌✎❍✰✻✓✡✒✽✰✢▲▼

✜✢✭❤

_2-1

✯✘✛✬✘✤✏✼✜❧❲✏

_RRR

✬✣✒

_6N8

✦✡❚✬■❏❑

₁

✰▲▼✻✓✖✗

✘✼◆✦✂✰❿✦✂✬✣➡✝❣✗❸✰▲▼✻✔✖✗✘✡

_Q

❵✬

₁

✌➏✥✣✒✘✻✰✻☞✬

✢

_6N8

✦❍✛✤✥✬✣✒✔✔✛✢✰➡✝■❏❑

₁

❍✰▲▼✻✵✜✍✔✲✣☎P✢✒✬✻✻

✒✰✸✺✢➆✢✘✟❑❶✡➑✘

_6N8

✦❍✡❚✬

₁₀

✄➏✥✣✒✓✰✎✻✽✘✎✢✘✛✍✌

✎ ✡✍✌❫ ❴✡✶ ✚✘✛ ✝✖✗❫ ➀✪✎ ❖✰✎ ✖➄✡ ❙❚✘❃ ✢✶✚ ✝❯✘ ✎✢✴✵ ✶ ✚

❯✪✜✒✢✘➏✥✛☛❽

_[2-2]

☞✬✢✝✤✥✬✣✒✟✝✶✚✲✬❶✒✓✰✬✢✣➅➆✓✒✢

✡✘✝✴✵✶✚✘✛

_6N8

✦❍✡❚✬■❏❑

₁

❧P✎✶✚✲✬❾➆✓✒✢✰✸✺✢➆✢✘

✓➆✢

₂

✔✕✡❍✸✡➂❍✪❤

_2-2

✏✼✜

_[2-3]

✘✣✤✥✦✡

_RRR

✛✝✣✤☛✤t✡❲✘

S

^✝

As

^✝

Fe

^✝

P

❊✡✮✯✪✒❃➡✵❨✢✓✰✬✢✣➅➆✓✒✢

_[1-6]

✘✑✒●✦✡❍✸➅➆✡

❍✕✏✑✒✓✛✝✥➉❍✭✑✒●✦✯✪✦●◆✬❳

_{1293 K}

➓

_{1800 sec}

✧★✡✤✏✸❪✼✠

✑✝➅➆✒✩✻✝✠

_2-1

✡■❏❑✪❙✼✢✕❶✏✑❖✓❱✫✓✡✒❃➅➋➌✑❑✸✖✌✶☛

✕✭❍✸❳✏❶❏❪✉➅➆✔✑❑➂❍✯✏❧P■❏❑✪❙➅➆✢

_[2-4]

✘☛✤t✬❻☞➡☞✢

➏✝✦●✧★✏❧P❱✫✓✬➂✎✻✝✒●☞✝✣✤✑❑➂❍✬❻☞✒➏✝✦●✧★✘✆✥✜

✢✸✖✌✶☛✕✬➄❻✻✝✬✟☞➅➆✰☞✢✘✾✎✬✟☞➅➆✪✤✜✢❍✸✬✭

_{Class 1}

✯

✏❍✕➅➆✢✘✷✸✠✹

_[2-4]

✏✁✂➅➆✓✒✢

_6N8

✦✰■❏❑

₁

✡❃■✖✒✩❱❲✪✠

_2-

2

^{✏✼✜✘➉✸✡✵✸✔➏✛✝}✿❷✰❿❷✱❷✰❸❷✍✔✘✎✢✘✒✮➆✡❍✸✎✭

_Class1

✯

✏❍✕➅➆✢✬✝

_6N8

✦✡❚✬❱✫✓✡➂✎✬❶❄☞❱❲✬✽✢➆✓✒✢✘✓✡➂✎✲✡

✒✒✏✑✒✓✛✝

_6N8

✦✛■❏❑

₁

✰▲▼✻☛✤t✜✬

_1/100

⑨✕➤✕❻☞✒✓✰✬✖✲

✻ ✓✒✢✰ ✸✺✢ ➆✢✘ ✓✡❧❲ ✏✖✗ ✏❳❨ ✢✍✌ ✎✡❍✸ ✰✻✓ ✳✜✏ ✴✵☛❨ ✬ ✔

18

✒✬✝✛✍✌✎❍✏✛❁✝✟✑✘✎❖✔

_6N8

✦✬✜✒✢➆✔✘

❤

_2-1

✍✌✎❍✸✰✻✓✡■❏❑

₁

✰

_6N8

✦✡▲▼

✣ ✁✂

_6N8

✺ ✄☎✆

₁

✭✝

_{99.99998% 99.99%}

✼✞✠✡☛☞

_20K

❃ ✌

_○

✦✠✡☛☞

_20K

❃ ✌

_○

✘✍✎✏☛ ✌

_○

✢✑✒✓☛

_○

✔✕✖✗☛

_○

✪✙

_{○ ○}

✚✛✜

_H

☞✤✥✧

_ppm

❃

_○

☞

_0.2

❃

_○

☞

_N/A

❃

❤

_{2-2 6N8}

❍✰■❏❑

₁

❍✡✤✥➋➌☛✤t✣✤✜✡✍★❤✭⑩➒

_ppm

✯

_[2-3].

✵✩✫ ✬✮✯✰✱✲✳ ✴✶✷✸

✹✻

_6N8

✺ ✄☎✆

₁

✭✝

_{99.99998 99.99}

✽✭✾✿❀

Ag 0.083 (< 15)

As < 0.01 (< 5)

Cr 0.005 N/A

Fe 0.017 (<10)

S 0.033 8

Si 0.043 (< 5)

Sn < 0.01 (< 2)

Sb < 0.002 (< 4)

Bi < 0.001 (<1)

Ni < 0.001 (< 5)

Pb < 0.001 4

P N/A 2

O 0.5 2

H 0.2 N/A

Other < 0.005 N/A

19

✠

_2-1

✑✒●✦✡

_ASTM-F68

■❏❑✪❙✼✢✕❶

_[2-4].

✠

_{2-2 6N8}

✦✰■❏❑

₁

✡❃■✖✒✩ ✭

_{ASTM F68}

✯

_[2-4].

6N8

^✺

✑✒✔

₁

20

2.2

^{❂❃❄❅❆❇}

RRR

^{✔ ❃ ✁✂❃❇✄☎}

2.2.1 RRR

^❘❙❚❯

✛❘❙✛✝

_6N8

✦❍✰■❏❑

₁

❍ ✏✑✒✓ ✦❣✻ ✔✘✳❍✸✰ ✎✏✪❫ ❳✘

₃₀₀

✆✝

500

^✆✝

700

^✆✝

900

^{✆✘❛➆➞➆}

3

❸❷✡✟✏✕❬③④✪❣✻✔✎✡✰✟✏✕❬✚③④✡

✎✡✪❘❙✻✔✘

_RRR

✡❘❙❵✏✑✒✓✛✝✟

_(2-1)

❧P✝✱✖✗✭

_{4 K}

✯✰❣✗✭

_{300 K}

✯

✘❘❙✻✔✼✔❵❧P❛➆➞➆✡✼◆❖P◗✝✪✜✔❡✩✻✔✘✛❘❙✘✛✝✶❆❖P✪✖

➄✜✢✔✔✏✤➐✫❯✪✜✒✝✖✼✔✞✕❑❵✕⑩✭

Keithley Model 2401

^{✯✰✽✟❭❬❶}

❵✕⑩✕✭

Keithley Model 2182A

✯✰✡➅✑✚✞➠✏❧✢✡❬⑩➎✕→✘❞❘✻❿✖✼➀

✡✮✯✪✖➄✻✔✘✛❘❙✡❘❙✵➓✠✪✪✠

_2-3

✏✼✻✝✠

_2-4

✏■❏⑧⑨❑⑩❪❶❼

✡❘❙✵➓✠➋➌➉✸✡✠✪✪✼✜✘■❏⑧⑨❑⑩❪❶❼✏✡➃☛✞✕✷✪☞❾✻✝❘❙➉

✸✪

_{4 K}

✾✘❸❹✜✢✘✸❍❸❷✬✌➎✻➉✸✰❛✡q✺✗✥✬✓❙✻✔✤✝✟✕⑩✕✘

✍❿✻✡➃☛✞✕✷✪◆❦➅➠✢✘❛✡✤✎➍✗✌✥✬

_{2 min/K}

➏✥✏☞✢❧❲✏✟✕⑩

✕✘✭✍✍❿✻✝➍✗➎➏✘

_{4 K}

✰✢

_{300 K}

✾✘✡✼◆❖P◗

_ρ

✡✦➊❵✪✽✔✘✾✔

RRR10,000

➏✥✡✱✖✗✘✣✒✼◆✦✂✲✪✼✜➉✸✏❳✒✓✎✱✖✗❸✏s✎

_nV

✰✸

❍☞✼✔❘❙✏✥✪✽✢➆✢❧❲✏✝✼✬✪

_{1 A}

✝➉✸➏⑧➐✪✑➑

_{1 mm}

➓

_{1 mm}

✝✎➅

100 mm

^{✏➜❙✻✔✘✟}

(2-1)

^{➋➌✤✖✡✟}

(2-9)

^❧P✝

RRR10,000

^✡

4 K

^{✘✡✫✟✒✓✺}

➏

_ℓ

✛

_{0.4 mm}

➏✥✏☞P✝➏⑧➐❥❲✡✮✯✪✵❨✢❀➃✲✬✸✺✢➆✢✬✝

_RRR5,000

➏ ✥✘✎➆ ✡✱✖ ✗✘✎ ✸❍☞✹ ✥✘❘ ❙✘❃ ✢✰✸ ✺✢➆✢ ✘✷✸ ✰✻✓ ✟❬↔✏ ✕ ✷

✘ ✡✙✚✪ ☞✏✲ ✳✢✰ ✝✮❊✡ ★✩✘ ✛➏⑧ ➐❥❲ ✬✟✰✆ ✝✮✯ ➅➆☞ ✒✓✰✛ ✗ ✢

➆✓✒✢

_[2-5]

✘

✠

_2-3

✣✤✥✦✡✼◆❖P◗

_ρ

✡❘❙✵➓✠✪

_.

Nanovolt meter

Current source

Temperature monitor

Temperature controller

Cryostat

Vacuum pump

21

✠

_2-4

✭

_a

✯✼✢✠➔✕❼✡❘❙✵➓✠➋➌✝✭

_b

✯❤➓✟✑✡✣✤✥✦❍➉✸

_.

2.2.2 RRR

^❘❙❱❲

✼◆❖P◗✝✡✗✥✘✙✲✪✠

_2-5

✏✼✜✘✣✏

_{300 K}

✰

_{20 K}

✘✡✼◆❖P◗✡▲

ρ (300 K)/ ρ (20 K)

^{✡✟✏✕❬③④✗✥}

( Ta )

^{✘✙✲✡❘❙❱❲✪✠}

2-6

^{✏✼✜✘✠}

2-6

^❧P✝

✍✌✎✶✚✗✥✘✎✢

₉₀₀

✆✘✟✏✕❬✻✔➉✸✡

_{ρ (300 K)/ ρ (20 K)}

✏✑✒✓✛✝■❏❑

₁

✘✛

₃₀₀

➏✥✬✽✢➆✝

_6N8

✦✘✛✾✒

₁₂₀₀

➏✥✬✽✢➆✔✘

_6N8

✦✘✛✝

_Ta

✬

₇₀₀

✆

✡❸✝

_{ρ (300 K)/ ρ (20 K)}

✬✾✎✣✒❱❲✰☞❖✔✘■❏❑

₁

✘✛✝

_Ta

✬

₅₀₀

✆✰✢

₇₀₀

✆

✡✡☛✘

_RRR

✛✎✾P♥✞✢☞✒❱❲✰☞❖✔✘✰✓✔✘✟✭

_2-1

✯❧P✝

_RRR

✛

_{300 K}

➋➌

_{4.2 K}

✘✡✼◆❖P◗✡▲✪✼✜✘✭✗✘✎✢

_{300 K}

✘✛✼◆❖P✡✂✲✛✹✟✟✠

✘✎P✝

_RRR

✏❧✢✒✒✛✟➆☞✒✓✰✛✗✢➆✓✒✢✘✱✖✗

_{4.2 K}

✘✛✝✹✟✟✠✡

✮✯✪✑✺✘❃✢❧❲✏☞P✝☛✤t✖✫ ✁✭✽ ✁✝✚➒✝❱✫✓✧❊✯✣❤➑✵✂✬

✼◆❖P✡✂☛✲✰☞✢✓✰✰✢✝✟✏✕❬③④✗✥✬

₇₀₀

✆➏✥✾✘✛✝✗✥✬✣✒✟

1A

Soldered

connection _(Delta ^{Volt meter} _mode)

❃

_a

✄

Insulator

(Kapton film)

Four-terminal

method

Heater Copper block

Cryostat

He

He

He

He

❃

_b

✄

Specime

n

Soldered connection

22

✝❫➀✟ ✏❧P✖✫ ✁✬➄❻✻✓

_RRR

✬✒❃➡☞❖✔✰✸✺✢➆✢✘✣✗✏☞✢✟✝

❱✫➂✎✛☞➅➆✢✬✝✱✏✟✏✕❬③④✗

₉₀₀

✆✪❣✻✔

_6N8

✦❍✡➉✸✛☛✺✘❍✰

✢➡✢✒✓➂✎✭

grain growth

^{✯✻✓✒✔✭✠}

2-7

✯✘✓✡❧❲✏❱✫✬❃✒❦✜✢✰✒✿

✡✓✧✏✰✰✢❫➀✬✏✺✢✰✢✣➅➆✓✒✢✓✰✰✢

_[2-6]

✝

_RRR

✡➄❻✡❥❲✬✣➆✓

✻✾❖✔✡✘✛☞✒✰✰✸✺✢➆✢✘

✓ ➆✾✘ ✖✗✔ ❧❲✏④ ✟☞✏ ✛✖✫ ✁✣ ❤➑✵✂ ✡✮✯ ✬✮✦ ✘✎➆✡ ✝❍✸ ✤✥

✏▲☞✻

_RRR

✛✣➡☞✢✬✝✥✖✡➏⑧➐❥❲✣☛✤t✡✔✕✏❧P✼◆❖P✲✡✮✯✬

❢☞✢✓✰✬✗✢➆✓✒✢✘✾✔✝✱✖✗✘✡✼◆❖P◗✡✍☛✩⑤✛✝

_6N8

✦✘✛

_{1.1 %}

➏✥✘✎P✝■❏❑

₁

✘✛

_{0.4 %}

➏✥✘✎❖✔✡✘

_RRR

✡❘❙✁⑤✬❻☞✰❖✔✬✝

_RRR

✬✣✒✟✝❘❙✁⑤✬✒❃➡☞✢✓✰✭

_RRR

✂

_10,000

✘✛✓★

_{20 %}

✯✬✢✣➅➆✓✒✢❊

[2-3]

^✝

RRR

✏✑✒✓✆❽➅➆✓✒☞✒✽✬✖❖✓❳P✄✤✡✂✄❱✫✘✎✢✘

✠

_2-5

✼◆❖P◗

_ρ

✡✗✥✘✙✲

_.

✠

_{2-6 ρ (300 K)/ ρ (20 K)}

✡✟✏✕❬✗✥✘✙✲

_.

0

500

1000

1500

2000

0 200 400 600 800 1000

ρ (3 0 0 K )/ ρ (2 0 K )

Ta (

^☎

)

6N8

Class 1

1.E-12

1.E-11

1.E-10

1.E-09

1.E-08

1.E-07

1 10 100

D C r es is ti v it y ( Ω

✆

m )

Temperature (K)

Class 1 (as-grown)

Class 1 (Ta= 300

^☎

)

Class 1 (Ta= 500

^☎

)

Class 1 (Ta= 700

^☎

)

Class 1 (Ta= 900

^☎

)

6N8 (as-grown)

6N8 (Ta= 300

^☎

)

6N8 (Ta= 500

^☎

)

6N8 (Ta= 700

^☎

)

6N8 (Ta= 900

^☎

)

Class 1

6N8

Annealing condition : 3 hour

Vacuum furnance : 10 ^-3 Pa

Ta : annealing temperature

1 10 100 300

23

✠

_{2-7 900}

✆✘✟✏✕❬③④✻✔

_6N8

✦➉✸✰❯✡➉✸✰✡▲▼

_.

Class 1 (900

^✄

)

6N8 (900

^✄

)

6N8 (700

^✄

)

24

2.3

^{✺✽✾✿❀❁☞ ✁✂✺✖✄☎✾✆❁}

Q

^{✝①✞❇✓❆❇}

RRR

^❇✟✠

✙✚✗✥✪❣✗✰✢✖✗✏✜✢✰✍✌✎✡

_Q

❵✛✏✒✜✢✬✝✍✌✎●❍✡✱✖✗✘✖

✗❖P✭✼◆❖P✯✡▲➅✒➏✥✪✼✜✌s✘✎✢

_RRR

✰✖✗✏❳❨✢

_{TM 010}

➎✕→✡

❩❬❭❪■❑❫❴

_Q

❵✡❜❝✏✑✒✓❞❡✰✦➊❧P✜✔✓✝

_RRR

✏✴✜✢

_{Q 0}

✭

_{20 K}

✯

_/

Q 0

^✭

20 K

✯✡❴✥✪❽✢✰✏✜✢✘

2.3.1

^{❩❬❭❪■❑❫❴✡}

Q

^❵✡❞❡

✭

₁

✯

_Q

❵✡❡✩❚❯

Q

❵✛✍✌❫❴✡✸✹❬✺✕➇➈✡❻☞➅✪✼✜✬✝✱✏✍✌❫❴❼✘➇➈➅➆✢✸✹

❬✺✕✭

_{P 0}

✯✡✑✪✴✷✰✻✔

_Q

❵✛

_{Q 0}

✰❙✡➅➆✝⑩✤☞✍✌➎✕→✘✎✢

_{TM 010}

❩❬

❭❪■❑❫❴✡✙✚✏

_{Q 0}

✛✣✟✘❤➅➆✢

_{[2-7, 2-8]}

✘

☛ ✭ ✯

✭ ✯

✭ ✯

✓✓✘✝

_{R s}

❤➑❖P✝✌

₀

✼✳◗✝✍ ❤✐❃➅✝

_r

❩❬❭❪■❑❫❴✎↕✝

_{L p}

❩❬❭

❪■❑❫❴✎➅✝✏ ✼◆✦✂✥✝✑ ✼◆❖P✘✎✢✘✟✭

_2-2

✯❧P✝❩❬❭❪■❑❫❴

✡

_{Q 0}

✛❤➑❖P

_{R s}

➋➌♦♣qrs✒

₀

❧P✜❙➅➆✢✺✬❍✰✢✘✰✓✔✘✍✌❥◗✪

✼✜✌✢✠❶❖P

_{R sh}

✛✝✟✭

_2-5

✯❧P❤➅➆✢✬✝

_{R sh}

✛✒

₀

✡

_1/2

✡✏▲☞✜✢✔✔✝

✒

₀

✪➝☛✙✥✏✣➡✜✢✓✰✛❄✾✻➡☞✒✘

✭ ✯

❩❬❭❪■❑❫❴✡

_{Q 0}

✪✣➡✜✢✔✔✏✛✝❤➑❖P

_{R s}

✪▲➅➡✜✢✓✰✬✾✎➣✾

✻✒✰✸✺✢➆✢✘✟✭

_2-4

✯❧P✝❤➑❖P

_{R s}

✛✼◆❖P◗

_ρ

✡

_1/2

✡✏▲☞✜✢✓✰✬

❍✰✢✘❛✻✓✼◆❖P◗

_ρ

✛

Matthiessen

✡❯✓✏❧P✝✹✟✟✠✏✖✲✻✗✥✏✘✙

✜✢

_{ρ L}

✰✝✂✏☛✤t❅✫✭❛✡❯✏✽ ✁✝✛ ✁✭✚➒✯✝✠✔ ✁✣❱✫✓✧❊✡

✖✫ ✁✣❤➑✵✂✯✏✖✲✻✗✥✏✘✙✻☞✒

_{ρ i}

✏❍❨✢➆✝✍➂❍✛✍❡☞✘✎✢

_[2-

10]

^{✘✓✡❜❝✟✪✟✭}

2-6

^{✯✏✼✜✘}

✭ ✯

✙✥✡✓✰✰✢✍✌✎❼✤✡❤➑❖P

_{R s}

✪✖➡✜✢✏✛✝✹✟✟✠✬▲➅➡☞✢✖✗✘✍

25

✌✎✪✙✚✜✢✓✰✰❍✸✤✥✪✣➡✜✢✓✰✬✤❥✘✎✢✓✰✬❍✰✢✘

✼ ✁✂✄

_ρ

❋☎✆✝✞✟✠

_ℓ

✡ ☛☞✌✍ ❋✼ ✎✏✄

_σ

● ✑✒ ✓✔✓✟✭

_2-9

✯➋➌✟✭

_2-

10

✯✪✜✒✓✬✕✖✗ ✘✙✙✚❋

_T

✗✥✝

_{k B}

❭❬❃❃✠❙s✝

_{m e}

✼✫✚✜✝

_{τ e}

✛✍❸

❷✝

_n

s✇✥✝

_e

✼◆●✜✝

_{v f}

✹✜❬↔✌✥✰✜✢✘

✭ ✯

✭ ✯

✭ ✯

NIST (National Institute of Standards and Technology)

^{✡✢✣✤✓✌☞✥}

RRR50

^❋

RRR100

^❋

RRR150

^❋

RRR300

^❋

RRR500

^❋

RRR3,100

✦ ✾✧★✩✦ ✪✎✏✄

_κ

✦ ✫✬✭✮✯

[10, 11]

^{✰ ✱}

2-8

^{✡ ✲✳✘❍}

RRR3,100

^{✦ ✪✎✏✄}

κ

✦ ✭✮✯ ✍✴✵✶✷

₁₁

● ✑✸✹✖❋✒✦ ✺

✦ ✭✮✯ ✍✴✵✶✷

₁₀

● ✑✸✹✖✗ ✘✻✴✵✽✿❀✖✌❋✾✧★✩❍✧★

_99.999%

✻✦ ✪✎✏✄✦

❁❂❄✰ ✱

_2-9

✡ ✲✳

_[2-12]

✘✱

_2-8

✡ ✲✤✓✥✪✎✏✄✦ ✫✬❄❀❅❆✳✥❀❋✱

_2-9

✦ ❇❈

✮❉❊■❏✦ ✧★

_5N

✚❑✥✾✧★✩✦ ✪✎✏✄❍

_Cu1

❋

_Cu3

✻✍ ❋

_RRR50

▲▼

_RRR100

✚✦

✫✬❄❀● ◆❖P✖✌ ☞✥✙❀◗ ❘▲ ✥✘

26

✠

_{2-8 (a)}

✾✧★✩✦✪✎✏✄

_κ

✎ ❋

_κ

✰ ●✡ ✬✕✖✗ ✁✂❄✄

(b)

^{✼ ✎✏✄}

σ

^❋

(c)

^{✼ ✁✂✄}

ρ

^❋

(d)

^{☎✆✝✞✟✠}

ℓ .

1.E+02

1.E+03

1.E+04

1.E+05

1 10 100

κ (W m -1 K -1 )

Temperature (K)

RRR 50

RRR100

RRR150

RRR300

RRR500

RRR3100

1.E+07

1.E+08

1.E+09

1.E+10

1.E+11

1.E+12

1 10 100

σ (1 /Ω m )

Temperature (T)

RRR 50

RRR100

RRR150

RRR300

RRR500

RRR3100

1.E-12

1.E-11

1.E-10

1.E-09

1.E-08

1.E-07

1 10 100

ρ (Ω m )

Temperature (T)

RRR 50

RRR100

RRR150

RRR300

RRR500

RRR3100

1.E-08

1.E-07

1.E-06

1.E-05

1.E-04

1.E-03

1 10 100

l (m )

Temperature (T)

RRR 50

RRR100

RRR150

RRR300

RRR500

RRR3100

(b)

(a)

(c)

(d)

27

✠

_2-9

✣✤✥✦✡❿✦✂◗❘❙✡✕⑩

_[2-12].

Cu1

^{❃ ✳}

2 mm

✟✁✂✄✣☎✆✝✞✠✣✡☛☞✌✍✖

Cu2

^{❃ ✳}

2 mm

✟✁✂✄✣☎✆✝✞✠✣✡☞✌ ✪✘✎✕

₅₅₀

✏✑

₃

✚✒✍✖

Cu3

^{❃ ✳}

1 mm

✟✁✂✄✣☎✆✝✞✠✣✡☛☞✌✍

_.

✓✔✕✖

_Q

❄✦ ✬✕✰ ✗✘✦ ✙✛✚✟✜✗ ✘✱

_2-8

✡ ✲✖✗ ✪✎✏✄

_κ

✦ ✫✬✭✮✯● ✑❋

✟✭

_2-7

✯✏✼✜

Wiedemann-Franz

✢✰ ●✡ ✣✤✥▲ ▼ ✦✥✧✚✦ ✥★★✩✦✼ ✎✏✄

_σ

✰ ✬✕✖✗ ✘✒✦ ●✼ ✎✏✄

_σ

● ✑❋✫❍

_2-11

✻✦ ❍✬✭✮✯✭❉✦ ✰✱✫✰ ✹☞✌ ✼ ✎✏✄

σ

^{✡ ❋✲✳✥✴✳✁✂}

R s

^{✰ ✬✕✖❋✟✭}

2-2

^{✯● ✑}

Q 0

✰ ✵✶✗ ✘✣✤✥✚✦ ✴✳✁✂

_{R s}

✍✷✦

✴ ✸ ✹✺ ✦ ✻ ✼✰✽ ✾ ❋❖ ❂ ❀✖ ✜✌ ✖ ✧ ☞ ❋ ✫❍

_2-4

✻◗✿ ✑ ❀✗ ✖ ◆ ✖ ✥ ✙ ❀◗❁▼✓✌ ☞ ✥ ✘✫

❍

_2-11

✻✡ ✲✤✓✥

G.E.H.Reuter

▼ ◗ ❂❄✖✗ ❏❅✫

_[2-13]

✡ ✍ ❋❆❇✴✸✡❈✾✥✼❉✦ ✬❊

■❏✰ ❑✳✭✮❍❑✳✭✮ ✯✭❉✻✎ ❍ ✬✭✮❍❍ ✬✭✮✯✭❉✻✡ ✖✗ ▲▼✦ ✫◗ ❑ ✥◗ ❋❍

✬✭✮✯✭❉✚✍ ✩✰◆❖P◆✦ ❆❇✡ ❈☞✌ ✷✦✴✸✹✺◗ ◗✙✥✥★★✩✚❘❙❚❄❀● ◆

❖P✳✥✙❀◗ ❯❱✦ ✶✷✚❲❳✤✓✌ ☞✥✘❖❨❀✖✌

E. H. Sondheimer

^{◗ ❲❳✖✗✩❋❩✎}

❬✦ ✤✥✚✦ ✴✳✁✂

_{R s}

❀✼ ✎✏✄

_σ

✦✰✱✰✱

_2-10

✡ ✲✳

_[2-14]

✘

28

✭

_{2 11}

✯

❃

specular reflection

^✁

❃

diffusion reflection

^✁

✠

2-10 3600 MHz

✘❤➑❖P✡✦➊❵➋➌❞❡❵✟✛

_[2-14].

✦➊❵

_:

✝

_:

✦

_,

✂

_:

✺

_,

✄

_:

✻

_.

(

^☎

)

❤✐✏❳❨✢✼✫✵✂★✩✪✴✵☞✚✰✻✔❞❡❵✟✛

_.

(

^✆

)

❤✐✏❳❨✢✼✫✵✂★✩✪✚➑☞✚✰✻✔❞❡❵✟✛

_.

29

✭

₂

✯❢❣❤✐❥❲✏✑✒✓

✼❉✦ ☎✆✝✞✟✠

_ℓ

◗ ✴✸❋✤

_δ

● ✑●☞✦✥ ✁✚✍ ❋

_RF

✼✼ ✡● ✑✂✄✗ ✴✳✼❉✍

✴✸✴✚✬❊✤✓✼ ✎✏✡ ☎✆✳✥✦ ✚❋✼ ✎✏✄ ✏ ◗ ✝✞✳✥❀✴✳✁✂

_{R s}

✍ ✟✤◆✖

✥✠✱

_2-11

❍

_a

✻❍✘✙✦ ✡☛✰ ✴✸✹✺❀☞☞✘✖▲ ✖✣✤✥✚✍

_RF

✼✌ ✡● ✑✂✄✗ ✴✳✼❉✦

☎✆✝✞✟✠

_ℓ

◗✴✸❋✤

_δ

● ✑✍❘✡ ✎◆✖ ✑❋❖✏✦ ✴✳✼❉◗ ✩✴✏✑✎✒✳✥● ☞✡✖

✥✘✙✦ ● ☞✡ ✴✳✼❉✦☎✆✝✞✟✠

_ℓ

◗ ✴✸❋✤❅● ✑✎◆✖✥❀✴✳✼✓✑✦ ☎✆✍ ✖✔☞

✡ ✕✖✖❖❂❀✖✥✠✱

_2-11

❍

_b

✻❍✘✙✦ ✡☛✰ ✷✦✴✸✹✺❀☞☞✘✧✗☎✆✝✞✟✠

_ℓ

❀✴✸❋

✤

_δ

✦ ✰✱✰ ✱

_2-7

✡ ✲✳✘

_RRR

◗ ✾☞✗ ✘❋✤✥✚✦ ☎✆✝✞✟✠

_ℓ

◗ ✴✸❋✤❅✦✞✟✰

✱◗ ✞✙◆✖ ✥✘✖❈✴✸❋✤

_δ

✍ ✫❍

_2-12

✻✚✴✤✓❋✚✛❱✰

_{5712 MHz}

❀✖✼ ✁✂✄

_ρ

✡ ☛

☞✌ ✍✱

_2-8

❍

_c

✻✦ ✫✬❄✰ ✹☞✌ ✬✕✖✗ ✘

✭ ✯

✠

_2-11

✏✑❤➑✘✡✼✫✵✂

✭

_a

✯❤✐❥❲

_,

✭

_b

✯❢❣❤✐❥❲

_.

❃✜✢✣✤✄

✥✦✧★✩✪

copper

classical skin depth δ

e

(a)

RF

vacuum

❃✫✬✢✣✤✄

R s =

^{✭✮✯✰✱✦✧★✩✲}

classical skin depth δ

copper

e

(b)

RF

vacuum