ົ ⿵ బ ဨ㸸㧗ᶫ 㯞⾰
Ꮫ 㝔 ⏕㸸బ⸨ ඖఙ, ᑿⓑ ె(~2016.3), ၈ ెⱁ(~2016.3), 㜿ຍ ㉏ぢ, ྥᓥ ኴ(~2016.3),
ᑠ㇂ᕝ ⿱㈗(~2016.3), 㛛⬥ Ⰻ㸪ᮡᮏ ኴᮁ㸪 బ㔝 ᕧᶞ, ከ㈡ ⛸
Ꮫ 㒊 Ꮫ ⏕㸸㜿㒊 ᐶ⏕(~2016.3), ሖ➃ ຬᶞ, ᶫᮏ , ⏣ ⲁ,
Ἠ ኴᚿ, ᑿᓮ ྖ, ⵦ⏣ ಟஂ
◊ ✲ ⏕ : Connor Shane Liston㸦2016.4㹼2016.8㸧
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ᮏ◊✲ศ㔝䛷䛿⾲㠃≀⌮䝥䝻䝉䝇䛻䛴䛔䛶◊✲άື䜢⾜䛳䛶䛔䜛䚹2016 ᖺ䛾◊✲άື䛸䛧䛶䛿䚸௨ୗ䛾䜘 䛖䛻ᴫᣓ䛥䜜䜛䚹㻌
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㻝㻚㻌 Si(001)⾲㠃㓟㐣⛬䛻䛚䛡䜛‽Ᏻᐃ㓟⣲྾╔䛻㛵䛩䜛◊✲㻌
Si⾲㠃䛻䛚䛡䜛㓟⣲྾╔䛿䚸䛭䛾ᚋ䛾㓟⭷ᙧᡂ䛻䛴䛺䛜 䜛㔜せ䛺⣲㐣⛬䛷䛒䜛䚹䛣䜜䜎䛷䛾◊✲䛻䛚䛔䛶䚸Si(111)⾲㠃 䛷䛿‽Ᏻᐃ䛺㓟⣲ศᏊ྾╔䛜Ꮡᅾ䛧䚸䛭䛾྾╔㓟⣲ศᏊ䛾 ᣲື䛜 Si 㓟䛾ᣲື䛻䛝䛺ᙳ㡪䜢䛘䜛䛣䛸䛜ሗ࿌䛥䜜䛶 䛔䜛䚹䛭䜜䛻ᑐ䛧䚸Si(001)⾲㠃䛷䛿ศᏊ≧䛾྾╔㓟⣲䛜ᐇ㦂
ⓗ䛻ほ 䛥䜜䛺䛛䛳䛯䛣䛸䛛䜙䚸㛗䜙䛟‽Ᏻᐃ䛺㓟⣲ศᏊ྾╔
≧ែ䛿Ꮡᅾ䛧䛺䛔䛸⪃䛘䜙䜜䛶䛔䛯䚹䛣䜜䜎䛷ᮏ◊✲ศ㔝䛷㐍 䜑䛶䛝䛯◊✲䛾ᡂᯝ䛿 Si(001)⾲㠃ୖ䛾ศᏊ≧྾╔㓟⣲䛾Ꮡ ᅾ䜢♧၀䛩䜛䜒䛾䛷䛒䛳䛯䛜䚸ᐇ㦂ⓗ䛺ほ 䛜䛺䛥䜜䛶䛔䛺䛔 䛣䛸䛛䜙䚸Ỵᐃᡴ䛻Ḟ䛡䜛≧ἣ䛷䛒䛳䛯䚹䛭䛣䛷䚸ᮏᖺᗘ䛿㧗
㍤ᗘ䛥䜜䛯SPring-8䛾BL23SU㌾X⥺䝡䞊䝮䝷䜲䞁䛻䚸ᮏ◊✲ศ㔝䛷స〇䛧䛯ప 䝬䝙䝢䝳䝺䞊䝍䞊䜢ᣢ 䛱㎸䜏䚸ග㟁Ꮚศග䛻䜘䜛‽Ᏻᐃ㓟⣲䛾ᐇドᐇ㦂䜢⾜䛳䛯䚹ᨺᑕග䛾㧗㍤ᗘ䛺䜙䜃䛻Ᏻᐃ䛧䛯ప ≧ែ
䛷䛾 ᐃ䛜⾜䛘䛯䛣䛸䛻䜘䜚䚸ୡ⏺䛷ึ䜑䛶 Si(001)⾲㠃䛻䛚䛡䜛‽Ᏻᐃ㓟⣲ศᏊ䛾Ꮡᅾ䜢☜ㄆ䛩䜛䛣䛸䛜䛷 䛝䛯䚹ᮏ◊✲䛾୍㒊䛿≀㉁䞉䝕䝞䜲䝇ඹྠ◊✲ᣐⅬ䛾ㄢ㢟䛸䛧䛶᪥ᮏཎᏊຊ◊✲㛤Ⓨᶵᵓ䛸䛾ඹྠ◊✲䛸䛧 䛶ᐇ䛧䛯䚹
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㻞㻚㻌ග㟁Ꮚไᚚ䝥䝷䝈䝬CVD䛻䜘䜛䝖䝷䜲䝪⏝㓟⣲䝗䞊䝥DLC䛾ྜᡂ䛻㛵䛩䜛◊✲㻌
㻌䝎䜲䝲䝰䞁䝗䝷䜲䜽䜹䞊䝪䞁䠄Diamond-like Carbon : DLC䠅䛾ඃ䜜䛯≀⌮ⓗ䛚䜘䜃Ꮫ≉ᛶ䛿sp2/sp3/Hẚ⋡
ᅗ1. O2྾╔Si(001)⾲㠃䛾O 1sග㟁Ꮚ䝇䝨䜽䝖 䝹
metastable O2
䛻౫Ꮡ䛧䛶ᗈ⠊ᅖ䛻ไᚚ䛷䛝䜛䛰䛡䛷䛺䛟䚸㔠ᒓඖ⣲䜔ඹ
᭷⤖ྜඖ⣲䛾 DLC ⭷䜈䛾䝗䞊䝢䞁䜾䛻䜘䜚◳ᗘ䜔ᦶ᧿ಀ
ᩘ䛾ไᚚ䜒ྍ⬟䛷䛒䜛䚹䛣䛾䜘䛖䛺 DLC ⭷䛾≀ᛶไᚚ䛿䝇 䝟䝑䝍䝸䞁䜾䛻䜘䜛≀⌮Ẽ┦ሁ✚ἲ䠄PVD䠅䚸䜒䛧䛟䛿䝥䝷䝈䝬 ບ㉳䛻䜘䜛ᏛẼ┦ሁ✚ἲ䠄CVD䠅䛻䜘䜚䛻⾜䛺䜟䜜䛶䛔 䜛䛜䚸䝖䝷䜲䝪䝻䝆䞊ᛂ⏝䛷ᚲせ䛸䛥䜜䜛పᦶ᧿ಀᩘ䛷㧗◳
ᗘ䛾DLC⭷ྜᡂ䛾䛯䜑䛻䛿䜲䜸䞁ᨭ䛻䜘䜛sp3ᡂศቑຍ 䛜ྍḞ䛸䛥䜜䛶䛔䜛䚹䛹䛱䜙䛾ྜᡂἲ䛻䛚䛔䛶䜒ሁ✚㏿ᗘ
䛿ᩘ༑ nm/min 䛸㐜䛔䛰䛡䛷䛺䛟䚸┿✵ᵴෆቨ㠃䜔㟁ᴟ
➼䛻↴䛜ሁ✚䛧䚸㢖⦾䛺Ύᤲ䛜ྍḞ䛸䛥䜜䛶䛔䜛䚹䛣䜜䜙䛾ၥ㢟䜢ゎỴ䛩䜛䛯䜑䛻䚸ᇶᯈ⾲㠃㏆ഐ䛻ᒁᅾ䛧 䛯䝷䝆䜹䝹⏕ᡂ䜢ྍ⬟䛸䛩䜛ග㟁Ꮚไᚚ䝥䝷䝈䝬 CVD 䛾㛤Ⓨ䜢㐍䜑䛶䛝䛯䚹䛣䛾ᡭἲ䛿⣸እ⥺↷ᑕ䛻䜘䜚ᇶ ᯈ⾲㠃䛛䜙ᨺฟ䛥䜜䛯ග㟁Ꮚ䜢┤ὶᨺ㟁䝥䝷䝈䝬䛾䝖䝸䜺䞊䛸䛧䛶⏝䛩䜛䛯䜑䚸䝥䝷䝈䝬⏕ᡂ㡿ᇦ䛿ᇶᯈ⾲
㠃䛻㝈ᐃ䛥䜜䜛䛰䛡䛷䛺䛟䚸䜾䝻䞊ᨺ㟁㛤ጞ㟁ᅽ䜒పῶ䛷䛝䚸䛥䜙䛻䛿㠃✚ᇶᯈ䛷䜒ᆒ୍䛺䝥䝷䝈䝬⏕ᡂ䛜
ྍ⬟䛷䛒䜛䚹⾲㠃㏆ഐ䛷䛾䝥䝷䝈䝬⏕ᡂ䛻䜘䜚䝷䝆䜹䝹䛿ຠ⋡ⓗ䛻ᇶᯈ䛻฿㐩䛷䛝䜛䛾䛷ሁ✚㏿ᗘ䛜ᩘⓒ
nm/min䛸᪩䛔䛰䛡䛷䛺䛟䚸ᾘ㈝㟁ຊ䛿ᩘW௨ୗ䛸ᑠ䛥䛟䚸┿✵ᵴෆቨ䜔ᑐྥ㟁ᴟ䜈䛾↴ሁ✚䜒䛺䛔䚹
㻌ᮏᖺᗘ䛿PA-PECVD䜢⏝䛔䛶DLC䜢ᡂ㛗䛥䛫䜛㝿䚸ཎᩱ䜺䝇䛾 CH4䛻CO2䜢ΰ䛬䜛䛣䛸䛻䜘䜚䚸㓟⣲䝗䞊 䝥DLC䜢ྜᡂ䛩䜛䛣䛸䛻ᡂຌ䛧䛯䚹୍⯡ⓗ䛻䝥䝷䝈䝬CVDἲ䛷ྜᡂ䛧䛯DLC䛿Ỉ⣲ྵ᭷㔞䛜ከ䛟䛺䜚䚸◳ᗘ
䛜10 GPa௨ୗ䛾㌾䜙䛛䛔DLC䛜䛷䛝䜛ഴྥ䛻䛒䜛䛜䚸㓟⣲䝗䞊䝥DLC䛷䛿㏻ᖖ䛾DLC䛻ẚ䜉䛶Ỉ⣲ྵ᭷
㔞䛜ᑡ䛺䛟䚸◳ᗘ䜒18 GPa䛸䜘䜚◳䛔⭷䛜ᚓ䜙䜜䜛䛣䛸䛜᫂䜙䛛䛸䛺䛳䛯䚹䜎䛯ᮏᡭἲ䛷ྜᡂ䛧䛯DLC䛿㔠ᒓ䛸 䛾ᐦ╔ᛶ䜒㧗䛔䛣䛸䛜ศ䛛䜚䚸⌧ᅾᦶ᧿ಀᩘ ᐃ䛺䛹ᶵᲔⓗ䛺ᛂ⏝䛻ྥ䛡䛶◊✲䜢㐍䜑䛶䛔䜛䚹
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㻌 㻌 㻟㻚㻌 ≀㉁⾲㠃䛚䜘䜃2ḟඖཎᏊᒙ≀㉁䛾ᵓ㐀䛸ᡂ㛗䝥䝻䝉䝇䛾◊✲
㻌≀㉁⾲㠃䜔䜾䝷䝣䜵䞁䚸༢ᒙ䛾 h-BN 䛺䛹䛿䚸2 ḟඖ≉᭷䛾≀ᛶ䜢ᣢ䛱䚸䛭䛾ᛂ⏝䛜ᮇᚅ䛥䜜䛶䛔䜛䚹䛧䛛䛧 䛺䛜䜙䚸ཎᏊᩘಶศ䛾ཌ䛥䛧䛛ᣢ䛯䛺䛔䛯䜑䚸䛭䛾ほᐹ䞉◊✲䛿ᐜ᫆䛷䛿䛺䛔䚹ᮏ◊ศ㔝䛷䛿䚸䛭䛾⾲㠃ᵓ㐀 䜢䚸⡆༢䛛䛴┤᥋ⓗ䛻ほ 䛷䛝䜛䜘䛖䛺᪂䛧䛔⾲㠃ᵓ㐀ゎᯒἲ䛾㛤Ⓨ䜢⾜䛳䛶䛔䜛䚹䛣䜜䜎䛷䛻䚸ື┦㛵⇕
ᩓₔᩓἲ䚸 CMTA-ప㏿㟁Ꮚᅇᢡἲ䚸䝽䜲䝊䞁䝧䝹䜾ᑕ㧗㏿㟁Ꮚᅇᢡἲ䚸䝇䝢䞁೫ᴟ㟁Ꮚᅇᢡἲ䚸䛭䛧 䛶ᵓ㐀䝎䜲䝘䝭䜽䝇䜢ほ 䛷䛝䜛䝇䝖䝸䞊䜽䜹䝯䝷ᑕ㧗㏿㟁Ꮚᅇᢡἲ䜢㛤Ⓨ䛧䛯䚹ᮏᖺ䛿䚸䛭䜜䜙䜢䛳䛶2ḟ ඖ≀㉁⣔䛾ᵓ㐀ゎᯒ䜢⾜䛳䛯䚹
㻌䜎䛯䚸2ḟඖᒙ≧≀㉁䛷䛒䜛䜾䝷䝣䜵䞁䚸h-BN䛾Niᇶᯈୖ䛷䛾ᡂ㛗䝥䝻䝉䝇◊✲䛸䝔䞊䝥㞳䛧䛯MoS2䛾
⾲㠃≧ែ䛾◊✲䜢䚸ග㟁Ꮚ㢧ᚤ㙾䜢⏝䛔䛶⾜䛳䛯䚹ග㟁Ꮚ㢧 ᚤ㙾䛿䚸≀㉁䛾㛵ᩘ䛻ᩄឤ䛺ᡭἲ䛷䛒䜚䚸⾲㠃䜔ཎᏊᒙ
≀㉁䛻㠀ᖖ䛻ᩄឤ䛺ᡭἲ䛷䛒䜛䚹ᡂ㛗䛥䛫䜛ཎᏊᒙ≀㉁䛾ᒙ
ᩘ䜔䝗䝯䜲䞁䛾䝃䜲䝈䛾䝁䞁䝖䝻䞊䝹䛻㛵䛩䜛▱ぢ䜢ᚓ䜛䛣䛸䛜 䛷䛝䛯䚹䜎䛯䚸䝘䝜䝎䜲䝲䝰䞁䝗⢏Ꮚ䛾㟁Ꮚᨺฟᶵᵓ䛾◊✲䜒
⾜䛳䛯䚹䛣䜜䜙䛾◊✲䛾୍㒊䛿䚸≀㉁䞉ᮦᩱ◊✲ᶵᵓ䚸NTT≀ ᛶ⛉Ꮫᇶ♏◊✲ᡤ䚸ᰴᘧ♫䝕䞁䝋䞊䛸䛾ඹྠ◊✲䛸䛧䛶ᐇ
䛥䜜䛯䜒䛾䛷䛒䜛䚹
ᅗ2. ග㟁Ꮚไᚚ䝥䝷䝈䝬CVD䛾ᶍᘧᅗ
ᅗ3. Niᇶᯈୖ䛻ᡂ㛗䛧䛯䜾䝷䝣䜵䞁䛾
ග㟁Ꮚ㢧ᚤ㙾ീ
࠙◊✲άືሗ࿌ࠚ㻌 㔞Ꮚග࢚ࣞࢡࢺࣟࢽࢡࢫ◊✲ศ㔝
䠄2016䠊1䡚2016䠊12䠅㻌ᩍ ᤵ : ⛛∗ 㔜ⱥ
ᩍ ᤵ : ᑠᓥ ୍ಙ
⏘Ꮫᐁ㐃ᦠ◊✲ဨ : ▼㯮 ᚭ
Ẹ㛫➼ඹྠ◊✲ဨ : ᩧ⸨ ┿, ໟ ႐, ᰩᮏ ᾈᖹ
ᢏ⾡⿵బဨ : ఀ⸨ ᬒᏊ, ⨾, 㐲ᒣ ᚿಖ, ⳥ᆅ Ύ JYPE ␃Ꮫ⏕ : Jordan Michael Smith(2016.4㹼2016.8)㻌
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ᮏ◊✲ศ㔝䛷䛿䚸GaN 䜔 AlN䚸ZnO 䜢䛿䛨䜑䛸䛩䜛ᗈ⚗ไᖏᖜ❅≀䞉㓟≀༙ᑟయᮦᩱ䞉䝕䝞䜲䝇䛾◊
✲䜢᥎㐍䛧䛶䛔䜛䚹㉸⮫⏺䜰䞁䝰䝙䜰䜢⏝䛔䜛䝞䝹䜽 GaN ༢⤖ᬗᡂ㛗䚸༢⤖ᬗⷧ⭷䛾䜶䝢䝍䜻䝅䝱䝹ᡂ㛗䜢
㍈䛸䛩䜛㔞Ꮚ䝘䝜ᵓ㐀䛾ᙧᡂ䛸䝕䝞䜲䝇ᵓ⠏䜢⾜䛖䚹䜎䛯䚸䝣䜵䝮䝖⛊䝟䝹䝇ග䜔䝣䜵䝮䝖⛊䝟䝹䝇㟁Ꮚ⥺䜢⏝
䛔䛯᪥ᮏ䛻၏୍䛾㛫✵㛫ศゎศගἲ䛺䛹䛻䜘䛳䛶䚸ᒁᡤⓎග䝎䜲䝘䝭䜽䝇䛾⌮ゎ䛻㛵䛩䜛◊✲䜢⾜䛳䛶䛔 䜛䚹2016ᖺ䛾◊✲άື䛿䚸௨ୗ䛾䜘䛖䛻ᴫᣓ䛥䜜䜛䚹㻌
㻌
1.㻌㓟ᛶ䜰䝰䝜䝃䞊䝬䝹ἲ䛻䜘䜛GaN䝞䝹䜽༢⤖ᬗ⫱ᡂᢏ⾡䛾◊✲䛻㛵䛩䜛◊✲
2014 ᖺ䝜䞊䝧䝹≀⌮Ꮫ㈹䛜❅䜲䞁䝆䜴䝮䜺䝸䜴䝮㟷ⰍⓎග䝎䜲䜸䞊䝗䛻䛘䜙䜜䛯䜢⓶ษ䜚䛻䚸GaN 䛾 㧗࿘Ἴ䞉㧗⪏ᅽ≉ᛶ䜢ά䛛䛧䛯䚸┬䜶䝛ᛶ⬟䛻ඃ䜜䜛䝟䝽䞊䝇䜲䝑䝏䞁䜾⣲Ꮚ䛾㛤Ⓨ䛜ᛴᒎ㛤䛧䛶䛚䜚䚸᪤䛻 NEDOᡓ␎䜲䝜䝧䞊䝅䝵䞁䜔MEXTḟୡ௦༙ᑟయ䝥䝻䝆䜵䜽䝖➼䛜⣲Ꮚ㛤Ⓨ୍⯡䜢᥎㐍䛧䛶䛚䜚䚸ᮏศ㔝䜒୧ 䝥䝻䝆䜵䜽䝖䛻㈉⊩䛧䛶䛔䜛䚹䝟䝽䞊䝕䝞䜲䝇䛾㔞⏘䛻䛿䚸䛂୍䛻䝁䝇䝖䚸䛻ಙ㢗ᛶ䚸୕䚸ᅄ䛜↓䛟䛶䛻ᛶ⬟䛃 䛜㔜せ䛸ゝ䜟䜜䛶䛚䜚䚸䛣䜜䜙䜢ᐇ⌧䛧䛶GaN ⣔䝟䝽䞊䝇䜲䝑䝏䞁䜾⣲Ꮚᕷሙ䜢ᖍᕳ䛩䜛䛯䜑䛻䛿䚸2014ᖺ䝜 䞊䝧䝹≀⌮Ꮫ㈹䛾ཷ㈹ᑐ㇟䛸䛺䛳䛯䛂䝃䝣䜯䜲䝲ᇶᯈୖ䛾㧗㌿ᐦᗘ InGaN/GaN ⣔㔞Ꮚᡞ㟷ⰍⓎග䝎䜲 䜸䞊䝗(LED)䛃䛸䛿䜎䛳䛯䛟㐪䛔䚸䛂ᴟప㌿ᐦᗘ䛷䜚䜒↓䛔㧗ရ㉁䛺㠃✚GaNᇶᯈ䛃䜢䛂Ᏻ౯䛻䛃ᥦ౪䛩䜛 䛣䛸䛜⫢せ䛷䛒䜛䚹ᙜศ㔝䛸୕⳻Ꮫ(ᰴ)䛚䜘䜃(ᰴ)᪥ᮏ〇㗰ᡤ䛿㛗ᖺ䛻䜟䛯䜚୕♫ඹྠ◊✲䜢ᒎ㛤䛧䚸䝝䝻 䝀䞁䜰䞁䝰䝙䜴䝮䜢㖔䛸䛧䛶⏝䛔䜛䛂㓟ᛶ䜰䝰䝜䝃䞊䝬䝹䠄AT䠅ἲ䛃䛻䜘䜛GaN ⫱ᡂ䛾ᇶ♏ᢏ⾡䜢㛤Ⓨ䛧 䛶䛝䛯䚹䛣䜜䜎䛷䛻ෆᚄ20䡚28 mm䛾ᑠᆺ䜸䞊䝖䜽䝺䞊䝤䜢⏝䛔䛶䚸LEDཬ䜃䝺䞊䝄䞊⏝ᇶᯈ⛬ᗘ䛾ရ㉁䜢
᭷䛩䜛GaN༢⤖ᬗ䛾㧗㏿⫱ᡂᢏ⾡䜢㛤Ⓨ䛧䛶䛔䜛䚹2016ᖺ䛿䚸ෆᚄ60 mm 䛾୰ᆺ䜸䞊䝖䜽䝺䞊䝤䜢ᑟධ䛧䚸
┤ᚄ2䜲䞁䝏䛾GaN䜴䜶䝝✀⤖ᬗୖ䜈䛾㉸ཌ⭷GaN䛾⫱ᡂ䛻ᡂຌ䛧䛯䚹ᚋ䛿⫱ᡂ᮲௳䛾᭱㐺䜢⾜䛔䚸
⏕⏘ᛶ䞉ᆺ䛻ྥ䛡䛶䛾ᐇド䜢㐍䜑䜛䚹 㻌
2.㻌㧗ရ㉁GaN༢⤖ᬗᇶᯈ䛾⤯ᑐ㍽ᑕ㔞Ꮚຠ⋡ ᐃἲ䛾㛤Ⓨ
㡯┠ 1 䛷䜒ゐ䜜䛯䜘䛖䛻㏆ᖺ䚸GaN ༢⤖ᬗ⫱ᡂᢏ⾡䛾Ⓨ㐩䛜ⴭ䛧䛟䚸㈏㏻㌿䜔✚ᒙḞ㝗䛸䛔䛳䛯ᵓ㐀ⓗ
⤖ᬗḞ㝗䛜ᴟ䜑䛶పῶ䛥䜜䛴䛴䛒䜛䚹䛣䛾䜘䛖䛺㧗ရ㉁༢⤖ᬗ䛻䛚䛔䛶䛿䚸㏻ᖖ䛾ᡭẁ䛷䛿ィ 䛩䜛䛣䛸䛜䛷 䛝䛺䛔ⅬḞ㝗䛜䚸ග≀ᛶ䜢ᨭ㓄䛩䜛䚹ᙜศ㔝䛿䛣䜜䜎䛷䚸㛫ศゎ䝣䜷䝖䝹䝭䝛䝉䞁䝇䠄TRPL䠅ィ ἲ䛸䚸⟃Ἴ
ᏛୖẊᩍᤵ䛸䛾㐃ᦠ䛻䜘䜛㝧㟁Ꮚᾘ⁛ศග䠄PAS䠅 ᐃ䜢⤌䜏ྜ䜟䛫䚸GaN 䛻䛚䛡䜛䛯䜛㠀㍽ᑕ⤖ྜ
୰ᚰ䠄NRC䠅䛾ṇయ䛜䚸Ga ✵Ꮝ」ྜయ䛷䛒䜛䛣䛸䜢ୡ⏺䛷ึ䜑䛶᫂䜙䛛䛻䛧䛶䛝䛯䚹≉䛻䚸㏆ᖺ䛾㧗ရ㉁GaN ༢⤖ᬗᡂ㛗ᢏ⾡䛾㐍ᒎ䛻䜘䜚䚸㓟ᛶ䜰䝰䝜䝃䞊䝬䝹ᡂ㛗GaNୖ䛻䝝䜲䝗䝷䜲䝗Ẽ┦䜶䝢䝍䜻䝅ἲ䛷GaNᡂ㛗
ᅗ1 GaN䛾(a) PL䛚䜘䜃ODPL䝇䝨䜽䝖䝹䚸 (b) ྾䝇䝨䜽䝖䝹䚸(c) LEE䠄ィ⟬್䠅䚹
PL ODPL
Intensity (normalized)
0.0 0.5 1.0 1.5 2.0
Absorption coefficient
D
(x105 cm-1 )E
abs2.8 3.0 3.2 3.4 3.6 3.8 -0.05
0.00 0.05 0.10 0.95 1.00 1.05
Photon energy (eV)
Light extraction probability
Direct Scattering Edge
(c)
䜢⾜䛖䝝䜲䝤䝸䝑䝗ᡂ㛗ᢏ⾡䛻䜘䜚䚸NRC䛜PAS䛾᳨ฟ㝈⏺䛻㏆䛔1016cm-3䜢ୗᅇ䜛䜘䛖䛺ప⃰ᗘ䛜䛺䛥䜜 䛶䛔䜛䚹䛧䛛䛧䛺䛜䜙䚸䛭䛾䜘䛖䛺㧗ရ㉁GaN༢⤖ᬗ䛻䛚䛔䛶䜒䛺䛚䚸ᐊ 䛻䛚䛡䜛GaN䛾ග≀ᛶ䛿㠀㍽ᑕ
⤖ྜ㐣⛬䛻ᨭ㓄䛥䜜䛶䛔䜛䛯䜑䚸䜘䜚ప⃰ᗘ䛾 NRC 䜢ᐃ㔞ィ 䛩䜛 ᪉ἲ䜢☜❧䛩䜛ᚲせ䛜䛒䜛䚹
䛭䛣䛷ᙜศ㔝䛷䛿䚸㏻ᖖ䛾䝣䜷䝖䝹䝭䝛䝉䞁䝇䠄PL䠅 ᐃ䛻ຍ䛘䚸᪉
䝣䜷䝖䝹䝭䝛䝉䞁䝇䠄ODPL䠅ἲ䜢⏝䛔䛶༙ᑟయ⤖ᬗ䛾ෆ㒊㍽ᑕ㔞Ꮚ
ຠ⋡䠄IQE䠅䜢ィ 䛩䜛᪉ἲ䜢ᥦ䛧䚸ᐇ㝿䛻㧗ရ㉁GaN ༢⤖ᬗ䛾ရ
㉁ホ౯䛜ྍ⬟䛷䛒䜛䛣䛸䜢♧䛧䛯䚹༙ᑟయ༢⤖ᬗ䛿୍⯡䛻ᒅᢡ⋡䛜㧗 䛟䚸༙ᑟయ䛸✵Ẽ䛾⏺㠃䛷ᑕ䛜⏕䛨䜛䛯䜑䚸ගྲྀ䜚ฟ䛧ຠ⋡䠄LEE䠅 䛜ప䛔䚹ᅗ1(a)䛻䚸PL䛸ODPL䜢ẚ㍑䛧䛯⤖ᯝ䜢㍕䛫䜛䚹✚ศ⌫䛻䛶
᪉䚸䛩䛺䜟䛱䚸ヨᩱ䛾➃㠃䜔㠃䛛䜙ᨺ䛯䜜䜛ග䜢ྵ䜑䛶ホ౯䛩 䜛ODPL䛻䛿䚸㏻ᖖ䛾PL䝇䝨䜽䝖䝹䛻䛿ぢ䜙䜜䛺䛔䚸ప䜶䝛䝹䜼䞊ഃ
䛻Ⓨග䝢䞊䜽䛜ほ 䛥䜜䜛䚹྾➃䜶䝛䝹䜼䞊䠷ᅗ 1(b)ཧ↷䠹䜘䜚㧗䛔 䜶䝛䝹䜼䞊䜢ᣢ䛴ගᏊ䛾୍㒊䛿⮬ᕫ྾䛥䜜䜛୍᪉䚸྾➃䜶䝛䝹 䜼䞊䜘䜚ప䛔䜶䝛䝹䜼䞊䜢ᣢ䛴ගᏊ䛿⮬ᕫ྾䛥䜜䛪ヨᩱෆ䜢࿘ᅇ 䛧䛯䛾䛱䛻እ㒊䜈ฟ䛶䛟䜛ྍ⬟ᛶ䛜䛒䜛䛣䛸䛛䜙䚸LEE䛿ᙉ䛔ගᏊ䜶䝛 䝹䜼䞊䠄Ἴ㛗䠅౫Ꮡᛶ䜢ᣢ䛴䠷ᅗ1(c)ཧ↷䠹䚹䛧䛯䛜䛳䛶䚸ィ ྍ⬟䛺㔞 䛷䛒䜛⤯ᑐ㍽ᑕ㔞Ꮚຠ⋡䠄AQE䠅䛛䜙䚸⤖ᬗရ㉁䛻┤᥋䛛䛛䜟䜛 IQE 䜢┤᥋▱䜛䛣䛸䛿䚸୍⯡ⓗ䛻ᅔ㞴䛷䛒䜛䚹䛧䛛䛧䛺䛜䜙䚸ᡃ䚻䛾ᥦ䛩 䜛᪉ἲ䛻౫䜜䜀䚸⡆౽䛺᪉ἲ䛷 LEE 䛾䜶䝛䝹䜼䞊౫Ꮡᛶ䜢⿵ṇ䛩䜛 䛣䛸䛜ྍ⬟䛷䛒䜚䚸AQE䛛䜙IQE䜢▱䜛䛣䛸䛜ྍ⬟䛸䛺䜛䚹䜎䛯䚸ᡃ䚻䛾 ᥦ䛩䜛ィ ᪉ἲ䛿GaN䛻㝈䜙䛪䚸῝⣸እ㡿ᇦ䛷Ⓨග䛩䜛ᮦᩱ䠄䛯䛸
䛘䜀AlGaN䠅䜔䚸❅≀༙ᑟయ௨እ䛾ᮦᩱ䛻䛴䛔䛶䜒㐺⏝䛷䛝䜛䛯䜑䚸
ỗ⏝ᛶ䛜㧗䛔䛸䛔䛘䜛䚹
3.㻌Siῧຍ㧗AlN䝰䝹ศ⋡AlxGa1-xNከ㔜㔞Ꮚᡞ䛾㛫✵㛫ศゎ㝜ᴟ⥺⺯ගศග
⌧ᅾ䚸ᆅ⌫ୖ䛷Ᏻ䛺Ỉ䜢㣧䜑䛺䛔ேཱྀ䛿11൨ே䚸Ύ₩䛺බ⾗⾨⏕䛜ಖ䛯䜜䛶䛔䛺䛔ேཱྀ䛿26൨ே䛷䛒 䜛䚹䛣䛾ே䚻䛻Ᏻ䛺⎔ቃ䜢ᥦ౪䛧䛶ୡ⏺䛻㈉⊩䛷䛝䜛᪉ἲ䛾୍䛴䛻䚸Ἴ㛗260-280nm䛾㧗ຠ⋡DUVᅛయ ග※䜢ప䝁䝇䝖䛷㛤Ⓨ䛩䜛䛜ᣲ䛢䜙䜜䜛䚹䛣䛾⏝㏵䛻㐺䛩䜛་⒪䡡ᾘẘ䡡ẅ⳦⏝ග※䛸䛧䛶䚸䜎䛯䚸㉸㧗ᐦᗘ ගグ㘓䜔ぢ㏻䛧እ㏻ಙ⏝䛾ග※䛸䛧䛶䚸䛥䜙䛻ᆺ䜺䝇䝺䞊䝄䞊䜔ྛ✀ᆺບ㉳ග※䛾ᅛయ䛻䜘䜛ᑠᆺ
䜢┠ᣦ䛧䛶䚸Ἴ㛗300nmྎ䛛䜙200nm䜢ษ䜛⣸እ⥺(UV)䡚DUVග䜢࿊䛩䜛Ⓨග䝎䜲䜸䞊䝗(LED)䜔䝺䞊䝄 䝎䜲䜸䞊䝗䛾㛤Ⓨ䛜ᮃ䜎䜜䛶䛔䜛䚹㧗AlN䝰䝹ศ⋡AlGaN㔞Ꮚᡞ䛿䚸䛭䛾⚗ไᖏᖜ䛜䝬䝑䝏䛩䜛䛣䛸䛛䜙䚸
῝⣸እ⥺LED䛾㔞⏘䛻㐺䛧䛶䛔䜛䚹AlN䝔䞁䝥䝺䞊䝖ୖ䛻Al0.68Ga0.32N / Al0.77Ga0.23Nከ㔜㔞Ꮚᡞ䜢᭷ᶵ 㔠ᒓẼ┦䜶䝢䝍䜻䝅䝱䝹(MOVPE)ᡂ㛗䛥䛫䜛㝿䛻ᡞᒙ䛻㐺㔞䛾Si䜢ῧຍ䛩䜛䛸Ⓨගຠ⋡䛜㧗䛟䛺䜛䛜䚸䛭 䛾≀⌮ⓗせᅉ䛿ゎ᫂䛥䜜䛶䛔䛺䛛䛳䛯䚹ᮏศ㔝䛿䚸ᒙ↓ῧຍ䚸㞀ቨᒙ䛾䜏 Siῧຍ䚸ᡞᒙ䛾䜏Si ῧຍ䚸
ᒙ䛻 Siῧຍ䚸䛾䠐✀㢮䛾㔞Ꮚᡞ䠄୕㔜Ꮫ䛷ᡂ㛗䠅䛾㛫䞉✵㛫ྠศゎ㝜ᴟ⥺⺯ගศගィ 䛸䚸1 ḟ ඖ⮬ᕫ↓᧐╔䝅䝳䝺䝕䜱䞁䜺䞊䝫䜰䝋䞁ゎᯒ䜢⾜䛳䛯䚹䛭䛾⤖ᯝ䚸㠀㍽ᑕ⤖ྜ୰ᚰ(NRC)⃰ᗘ䛾ῶᑡ䜢
ᫎ䛩䜛ᐊ Ⓨගᑑ䛾ቑຍ䛸䚸Si ῧຍᡞᒙ䛾ཎᏊᒙ䝔䝷䝇ᖜ䛾ቑຍ䛻┦㛵䛜䜏䜙䜜䛯䚹䛣䛾⤖ᯝ䛿䚸Si 䝗 䞊䝢䞁䜾※䛸䛺䜛H3SiNH2 䛜ቃ⏺ᒙ䛷ᙧᡂ䛥䜜䜛㝿䛻 NH3䛜ศゎ䛧䛶άᛶ H䜢౪⤥䛧䚸(CH3)3Al䛾ศゎ䜢
ಁ㐍䛩䜛䛣䛸䚸ྠ䛻 Si-N ⤖ྜ䛜ᡂ㛗⾲㠃䛻ྲྀ䜚㎸䜎䜜䛶⾲㠃䜶䝛䝹䜼䞊䛜పୗ䛧䚸䝇䝔䝑䝥䝣䝻䞊ᡂ㛗䛜
ಁ㐍䛥䜜䜛䛻䜘䜚NRC䛾㉳※䛷䛒䜛III᪘✵Ꮝ䠄䛻Al✵Ꮝ䠅⃰ᗘ䛜ῶᑡ䛩䜛䝰䝕䝹䛷ㄝ᫂䛷䛝䜛䚹
4.㻌m㠃AlInNⷧ⭷䝘䝜ᵓ㐀䜢⏝䛔䛯᪂䛧䛔῝⣸እ⥺䡚⥳Ⰽ䛾೫ගග※㛤Ⓨ
ⴥ㟁Ꮚᕤᴗ䞞䛾༠ຊ䜢ᚓ䛶䚸⇕ຊᏛⓗ䛻ΰ䛦䜚䛻䛟䛔AlInNΰᬗ䜢㠀ᴟᛶm㠃䛻MOVPEᡂ㛗䛥䛫䛯
ⷧ⭷䝘䝜ᵓ㐀䜢⺯ග⾲♧⟶(VFD)䛻ᦚ㍕䛩䜛䛣䛸䛻䜘䜚䚸Ἴ㛗 210nm 䛻㏕䜛῝⣸እ⥺(DUV)䛛䜙⥳Ⰽ䜎䛷䛾 ᑠᆺ೫ගග※䜢ᐇ⌧䛧䛯䚹㡯┠3䛻グ䛧䛯䜘䛖䛻䚸Ἴ㛗300nmྎ䛛䜙200nm䜢ษ䜛⣸እ⥺(UV)䡚DUVග䜢
࿊䛩䜛Ⓨග䝎䜲䜸䞊䝗(LED)䜔䝺䞊䝄䝎䜲䜸䞊䝗䛾㛤Ⓨ䛜ᮃ䜎䜜䛶䛔䜛䚹ᙜศ㔝䛿䚸ᮏ㉁ⓗ䛻䛿ΰ䛦䜚䛻䛟䛟⤖
ᬗᡂ㛗䛜ᅔ㞴䛺AlInNΰᬗ䜢䚸2014ᖺ䝜䞊䝧䝹≀⌮Ꮫ㈹䛾ཷ㈹ᑐ㇟䛸䛺䛳䛯c㠃㟷ⰍLED䛸䛿␗䛺䜛⤖ᬗ 㠃䛷䛒䜛䚸㠀ᴟᛶm㠃䛻䜶䝢䝍䜻䝅䝱䝹ᡂ㛗䛥䛫䚸䛭䛾䝘䝜ᵓ㐀䜢VFD䛻ᐇ䛩䜛䛣䛸䛻䜘䛳䛶䚸㠃ෆ䛷┤⥺
೫ග䛥䜜䛯DUVග䜔㟷Ⰽ䚸⥳Ⰽ䛾ග䜢࿊䛩䜛ᑠᆺග※䜢ᐇ⌧䛧䛯䚹Ⓨග䛾ᵝᏊ䜢ᅗ2䛻♧䛩䚹ᮏ◊✲䛷㛤
Ⓨ䛥䜜䛯ග※䛾㧗ຠ⋡䚸ప䝁䝇䝖䚸㧗ಙ㢗ᛶ䛜ᐇ⌧䛷䛝䜜䜀䚸ୡ⏺䛻䛝䛟㈉⊩䛩䜛䜒䛾䛸䛧䛶ᮇᚅ䛷 䛝䜛䚹
㻌
ᅗ䠎㻌m㠃AlInNΰᬗ䜢ᐇ䛧䛯⺯ග⾲♧⟶(VFD)䛾䝫䞁䝏⤮(ୖ)䛸┿(ୗ)䚹DUVග䛿┠䛻ぢ䛘䛺䛔䛾
䛷䚸ྍどග䜢࿊䛩䜛AlInN䜢ᦚ㍕䛧䛯VFD䛾┿䜢㍕䛫䛶䛔䜛䚹 G1
G2
㟁Ꮚ 䝣䜱䝷䝯䞁䝖
㝧ᴟ
m㠃AlInN䝘䝜ᵓ㐀
䠄m㠃GaNᇶᯈୖ䛻⤖ᬗᡂ㛗䛥 䛫䛯䝘䝜ᵓ㐀䠅
ග
ຍ㏿㟁ᅽ
㖟䝨䞊䝇䝖 䜾䝸䝑䝗㟁ᅽ
䝣䜱䝷䝯䞁䝖㟁ᅽ
┿✵
ගྲྀ䜚ฟ䛧❆
InN䝰䝹ศ⋡
30%䛾m㠃 AlInN䜢ᐇ
InN 䝰䝹ศ⋡
23%䛾m㠃 AlInN䜢ᐇ
ᮾ䛷⤖ᬗᡂ㛗䛥䛫䛯c㠃In0.17Ga0.83N䠄❅
䜲䞁䝆䜴䝮䜺䝸䜴䝮䠅䜶䝢䝍䜻䝅䝱䝹ⷧ⭷䜢ᐇ
䛧䛯VFD