ࢩࣥࢢࣝ࢖࣋ࣥࢺຠᯝゎᯒ࡟࠾ࡅࡿ࢖࢚࢜ࣥࢿࣝࢠ࣮࡜᰾✀ࡢᙳ㡪

ç 3.2.6-2. NASA f ,N! + , MESSENGER¸ÊSRAM#1 SEU 40s

MRED䜢⏝䛔䛶SEUⓎ0s䜢W䛩䜛䛻䛒䛯‹䚸ç 3.2.6-3 䛻䛩䜘䛖䛻䚸SRAM#1 䛾య±(Sensitive volume, 2×2×2.25μm³)䛸䛭䛾ୖ㒊䛻఩⨨䛩䜛èº䛾 È୍䛺L䜢,ᐃ䛧䛯䚹SEU Ⓨ0s䛾ィ⟬ᡭἲ䛿䚸àÕ 䛾(4) SEUⓎ0sWXἲ䛷ÕÙ䜛䚹

(b) 㔜䜲䜸䞁ຍ㏿j䛻䜘䜛SEU

SEUı䛻ᑐ䛩䜛䚸ìᑕ䜲䜸䞁䛾2㢮䛸䜶䝛䝹䜼䞊䛾ᙳ㡪䜢ㄪÙ䜛䛯䜑䛻䚸LBNL, TAMU, NSCL 䛷䚸㧗0⏺㟁Ⲵ䜢ᣢ䛴SRAM#1䛾SEU¹_䜢⾜䛳䛯䚹౑⏝䛧䛯䜲䜸䞁䛾᰾2䛸LET䜢

⾲3.2.6-1䛻♧䛩

(c) SEU⪏ᛶ䛾⪃ᐹ

ୖ㏙䛾ᐃ್䛻ᑐ䛧䛶䚸MRED 䜢⏝䛔 䛶SRAM䛾ᛂYZ䛻䛚䛡䜛(1)ධᑕ䜲䜸 䞁䛻䜘䜛┤᥋䛾㟁6䚸(2)䜽䞊䝻䞁78䛻䜘 䜛ཎᏊ㌿a䛻䜘䜛9᥋㟁6䚸(3)᰾཯ᛂ⏕

ᡂè䛻䜘䜛9᥋㟁6䛾ྛ཯ᛂ䝥䝻䝉䝇䜢䝅 䝭䝳䝺䞊䝅䝵䞁䛧䛶䚸SEU㠃✚䜢@䜑䛶ẚ

㍑䜢⾜䛳䛯䚹䛭䛾⤖ᯝ䚸ᅗ3.2.6-4䛻♧䛩䜘 䛖䛻䚸MREDW್䛿㔜䜲䜸䞁↷ᑕ¹_್

䛸䜘䛔୍;䜢j䛯䚹䛣䜜䛻䜘䜚䚸SEE 䛾W

w䠅Geant4䛿㻌 Z>36䛾᰾཯ᛂ䝥䝻䝉䝇䜢ィ⟬䛷䛝䛺䛔䚹

⾲3.2.6-1. SRAM#1䛾SEU¹_䛻⏝䛔䜙䜜䛯䜲䜸䞁

ᅗ 3.2.6-3. MRED 䛻䜘䜛䝅䝭䝳䝺䞊䝅䝵䞁䛷,ᐃ䛧 䛯ᛂYZ䛸ୖ㒊䝔䝸䜰䝹䛾ᵓᡂ

┤ ᥋㟁6䛜 ᨭ 㓄ⓗ䛺䜲䜸䞁 Ar(387MeV),K r(665MeV), Xe(162MeV) Au(2GeV)

ᅗ3.2.6-4. 䜲䜸䞁䜶䝛䝹䜼䞊䛷ศ㢮䛧䛯SEU 㠃✚

䛻䛿᰾཯ᛂ䜢ྵ䜑䛯Ô⣽䛺è

ð䝕䝹䛜ຠ䛷䛒䜛䛣䛸䛜¹䛛䛳 䛯䚹䜎䛯䚸ç 3.2.6-1䛻䛩䝕䞊 䝍䜢¸䛳䛶䚸Kä㟁6䛜ᨭ¥ⓗ

䛺䜲䜸䞁䛻ᑐ䛧䛶Œ’ SRAM#1 䛾0⏺㟁÷䛿 1.02pC䚸9ä㟁 6䛷䛿0⏺㟁÷䛿0.7Þ1.02pC 䛸Ỵᐃ䛧䛯䚹9ä㟁6䛾0⏺㟁

÷䛻䛜䛒䜛Á䛿䚸䝅䞁䝥䝹 䛺య±䜢,ᐃ䛧䛶䛔䜛䛣䛸䚸

ཬ䜃Geant4䛜á䛴䝅䝇GG䜱䝑䜽䛺·H䛻䜘䜛䜒

䛾䛷䛒䜛䚹

(3) 0⏺㟁÷1 SRAM䛾SEU

(a) SEUı䛾ᐃ

0⏺㟁÷1䛾0.5μm 256Kbit SRAM (SRAM#3) 䛻ᑐ䛧䛶䚸132䛾䜲䜸䞁2䜢↷ᑕ䛧䛶 SEU䜢ᐃ䛧䛯䚹

0⏺㟁÷1䛾SRAM#3䛷䛿9ä㟁6䛿ẚ㍑

ⓗ¤䛺䛔䛜䚸LET 䛜 10MeVcm²/mg Öø䛷䛿䚸 SEUı䛿᰾2䛸䝹䞊䛻 䛧䛶䛔䜛䛣䛸

䛜¹䛛䜛䠄ç3.2.6-5}↷䠅䚹䜎䛯䚸䝹䞊䜲䜸䞁䛷䛿䚸ı䛿䜲䜸䞁ìᑕI䛾ຍ䛻క䛔

¤䛩䜛䚹

(b) MRED䛻䜘䜛䝅䝭í䝺䞊䝅î䞁

MRED 䜢⏝䛔䛶 SEU ı䜢䝅䝭í䝺䞊䝅î 䞁䛩䜛䛻Œ䛯‹䚸SRAM#3 䛾ᵓ㐀䜢Í䛾䜘䛖䛻, ᐃ 䛧 䛯 䚹య±䛿ç 3.2.6-6 䛻䛩 䜘 䛖 䛻 5.05×5.05×2.0μm³䛸䛧䛯䚹䛭䛾㟁÷J°ຠs䛿 ç3.2.6-5䛻䛩BNL䝕䞊䝍䛻䛚䛡䜛 SEU 䝇 䝺 䝑 䝅î䞊 䝹 䝗 LET 7.5MeV-cm²/mg 䛛 䜙 32MeV-cm²/mg䛻ᑐᛂ䛩䜛䜘䛖䛻䚸య±䜢୰

í䛛䜙➃䛻ྥ䛛䛳䛶 10 ž7䛻䛡䛶䚸୰í䛾ຠ

s䛿 100%䛸,ᐃ䛧䛯䚹ୖ㒊䛾L䛿䚸SiO2L䛸䛭䛾㒊䛻䛒䜛Û䜰䛻ь䛩䜛䝍䞁䜾䝇G䞁L›䛡 䜢,ᐃ䛧䛯䚹

ୖÕ䛾䝕䞊䝍䛻ᑐ䛧䚸MRED䜢⏝䛔䛶SEUı䜢ィ⟬䛧䛯⤖ᯝ䜢䚸ç3.2.6-7,ç3.2.6-8 䛻䛩䚹䛣䛾W䛿䚸SRAM#3䛾•², ᵓ㐀, 䝥䝻䝉䝇᝟ሗ䜢õ:n䛻^䛳䛯䛜䚸ìᑕI30 ᗘ䠄ç䛺䛧䠅, 45ᗘ䠄ç3.2.6-8䠅䛷ᆅୖ¹_䝕䞊䝍䛸䜘䛔୍;䜢䛧䛯䚹

ç 3.2.6-5. 0⏺㟁÷1 SRAM#3 䛾

SEUı

⾲3.2.6-2. 0⏺㟁÷1SRAM#3䛻↷ᑕ䛥䜜䛯䜲䜸䞁

ç 3.2.6-6. SRAM#3 䛾䝅䝭í䝺䞊䝅î䞁䛻 䛚䛡䜛య±䛸ୖ㒊L䛾ᵓᡂ

(4) SEU40s WghiXv

(2),(a)”¡ÕÙ䛯䚸SRAM#1䛾SEUⓎ0s䛾ᩘ್ィ⟬䛻䛴䛔䛶ÕÙ䜛䚹䝫䜲䞁䝖䛿䚸య±

䛻ÒJ䛥䜜䜛䝹䞊䛾ィ⟬䜢MRED䛷^䛖䛣䛸䛻䛒䜛䚹

୍Š䛻䚸SEUⓎ0s䛿SEUⓎ0ı䛻Ᏹᐂƒ9䛾㔜䜲䜸䞁䝷䝑䜽䝇䜢䛛䛡䛶ᑐ㇟䛸䛺䜛ì ᑕ䝹䞊E %9䛷±䛩䜛䛣䛸䛷/䜙䜜䜛䛜䚸䛣䛣䛷䛿㟁6䝹䞊䛾☜sᐦᗘ㛵ᩘ䜘‹

SEUⓎ0s䜢@䜑䜛䚹 䛣䛣䛷䚸

E0:㻌 㻌 㻌 㻌 㻌 㻌 㻌 㻌 SRAM䛾య±䛻ìᑕ䛩䜛㔜䜲䜸䞁䛾䝹䞊 E: 㻌 㻌 㻌 㻌 㻌 㻌 㻌 㻌 య±䛻ÒJ䛥䜜䜛㟁6䝹䞊

P(E0):㻌 㻌 㻌 㻌 㻌CREAM96䛻䜘䜛㔜䜲䜸䞁䝷䝑䜽䝇䚹䛯›䛧䚸`Ꮚ°Z,ìᑕ䝹䞊E0,

>఩䛿[particles/cm²/second/steradian/MeV]

MREDz(E0,E):MRED 䛻䜘‹ィ⟬䛥䜜䜛䚸㟁6䝹䞊E 䛜Ⓨ0䛩䜛䛸䛝䛾㐃ü☜sᐦᗘ

㛵ᩘ䚸䛯›䛧`Ꮚ°Z,ìᑕ䝹䞊E0

πρ

2:㻌 㻌 㻌 㻌 㻌 㻌 ᑐ㇟ı

䛸䛩䜛䛸䛝䚸ìᑕ䝹䞊䛾᭱᭱ú䜢䛭䜜ë䜜Emax, Emin䛸䛧䛶䚸䛒䜙Q䜛`Ꮚ°䛾㔜䜲䜸䞁 䛜X఩䛛䜙ᑐ㇟ı

πρ

²䛻ìᑕ䛩䜛¬Á䛻䚸䛭䛾㟁6䝹䞊䛾ᚤ䛿Í䛾䜘䛖䛻⾲䜛䚹

∑∫

₌

^{Φ ⋅}

=

⁹²

1

0 0

0 2

2 ^max

min

) , ( )

( ) 4

(

z E

E z

E MRED

z

E E dE

dE E

dR π ρ

^{㻌 㻌 㻌 㻌 㻌}<1>

䛣䛾䛸䛝䚸SEU 䛜Ⓨ0䛩䜛0⏺㟁÷ Qc 䛻ᑐᛂ䛩䜛㟁6䝹䞊䜢 Ed 䛸䛧䛶䚸SEU Ⓨ0s R(Ed)䛿ᘧ<1>䜢⏝䛔䛶䝹䞊E䛷±䛩䜛䛣䛸䛻䜘‹Í䛾䜘䛖䛻⾲䜛䚹

∫

^∞

=

Ed

d

dE

E dE dR E

R ( )

)

(

㻌 㻌 㻌 㻌 㻌 㻌 㻌 㻌 㻌 㻌 㻌 㻌 㻌 㻌 㻌 㻌 㻌 㻌 㻌 㻌 㻌 㻌 㻌 㻌 㻌<2>

<1>ᘧ䜢ィ⟬ᶵ䛷ຠs䜘˜ᩘ್ィ⟬䛩䜛䛯䜑䛻䚸Öø䛾ኚᩘኚì䜢^䛖䚹

E0(

r

)-Emin (Emax/Emin)^r䛸䛩䜛䛸 E0=EminR

r

^-S䚸E0=EmaxR

r

- 䛻ᑐᛂ䛩䜛䚹䛯›䛧䚸 Emin, Emax䛿CREAM96䛛䜙㑅µ䛷䛚‹䚸Emax䛿20GeV/nucleon䛷䛒䜛䚹

n ( E0)dr/dE0 䛸䛩䜛䛸

ç3.2.6-7. âìᑕI䛾SRAM#3ı

┤᥋㟁㞳

㛫᥋㟁㞳

┤᥋㟁㞳㸩 ࢡ࣮ࣟࣥᩓ஘

㧗 ࢚ ࢿ ࣝ ࢠ ࣮ ࡛ ࡣ Geant4ࡣ㛫᥋㟁㞳࡟

ᑐࡋ୙ṇ☜࡞ண 

ç3.2.6-8. ìᑕI45ᗘ䛾SRAM#3ı

㧗 ࢚ ࢿ ࣝ ࢠ ࣮ ࡛ ࡣ ࠊ Geant4 ࡣ㛫᥋㟁㞳࡟ᑐ ࡋ୙ṇ☜࡞ண 

∑

₌

∫ ⎟ ⎟

⎠

⎞

⎜ ⎜

⎝

⎛ ⎟⎟ ⋅

⎠

⎜⎜ ⎞

⎝

=

⁹²

⎛ Φ

1

1

0 0

0 2 0

2

( ( ), )

)) ( (

)) ( 4 (

) (

z

z

z

MRED E r E

r E n

r dr E

dE E

dR π ρ

ḟ࡟ࠊ

r

^ࡢ✚ศࢆNศ๭ࡢ࿴࡛㏆ఝࡍࡿ࡜

∑ ∑

= =

⎟ ⎟

⎠

⎞

⎜ ⎜

⎝

⎛ ⎟⎟ ⋅

⎠

⎜⎜ ⎞

⎝

=

⁹²

⎛ Φ

1

0

1 0

0 2

2

) ), ( )) (

( (

)) ( ( 4

) (

z

i z N

i i

i z z

E r E r MRED

E n

r E N

dE E

dR π ρ

^z

ࡇࡇ࡛

1 ,...., 0 2 ,

1

2 + ≈ = −

=

_z

z z

i

i N

N i N r i

ࡉࡽ࡟ィ⟬ࡢຠ⋡ࢆୖࡆࡿࡓࡵ࡟ࠊධᑕ࢖࢜ࣥ⥲ᩘࢆN࡜ࡍࡿ࡜ࠊඖ⣲ẖ࡟␗࡞ࡿⓎぢⓗ

㑅ᢥ☜⋡(Heuristic selection probability) Pzࢆᑟධࡋ࡚ḟࡢࡼ࠺࡟᭩ࡅࡿࠋ

∑∑

= =

⎟⎟⋅

⎠

⎜⎜ ⎞

⎝

⎛

⋅

= ⁹² Φ

1

0

1 0

0 2

2

) ), ( )) (

( (

)) ( ( 4

) (

z

i z N

p

i z i

i

z MRED E r E

r E n p

r E N

dE E

dR

π ρ

^z

(5) ⤖ㄽ㻌

• ୍Íìᑕ䜲䜸䞁䛾LET›䛡䛷䛿䚸䝕䝞䜲䝇䛾SEUı䛾Uྥ䜢䛩䛾䛻T䚹

• LET䛜—䛨䛷䜒䚸᰾2䛸䝹䞊䛜3䛺䜛䛸䚸3䛺䜛SRAM䛾SEUı䜢&䚹

• MRED䝧 䞊 䝇 䛾 䝅 䝭í䝺 䞊 䝅î䞁 䛻 䜘 䜛SEUⓎ0 s䛿 䚸NASAf , & 䝭 䝑 䝅î䞁 MESSENGER䛾&್䛸䜘˜୍;䛧䛶䛔䜛䚹䜲䜸䞁9䛾᰾཯ᛂ䜢ྵ䜎䛺䛔IRPP䛻䜘䜛SEUⓎ 0W䛿䚸ᐇ್䜘‹2䛔䚹

• 䜲䜸䞁9䛾᰾཯ᛂ䛿䚸0⏺㟁÷䛾䛝䛔䝕䝞䜲䝇䛾SEUⓎ0W䛻ᙳ㡪䚹`Ꮚ°䛾䛝 䛔⣲䜢య±䛻ྵ䜐༙ᑟయ䛷䛿ºÚ䚹

• SEUⓎ0W䛾Öᗘ䛿䚸䝕䝞䜲䝇䛾ᵓ㐀䜔•²䛺ª䛾Ô⣽᝟ሗ䛻 䛩䜛䛜䚸ẚ㍑ⓗU䛔

㏆Ÿ䛷䜒䛛䛺‹䜘䛔SEUⓎ0W䛜.⬟䚹

• SEUⓎ0W 䛻 䛒䛯‹䚸 ᆅ ୖ¹ _䛾 ↷ ᑕ 䜲 䜸 䞁 䝹䞊 䛿 䚸40MeV/uÖ ø䛷T䚹

100MeV/u䛷䛿䚸9ä㟁6䛜SEUı䛻䛝䛺ᙳ㡪䜢䛘䜛䚹

• 0⏺㟁÷1䛜ú䛥䛔᭱᪂䝕䝞䜲䝇䛷䛿䚸SEUⓎ0W䛻Œ䛯‹䚸ìᑕ䜲䜸䞁䛾2㢮䛸䜶䝛䝹 䜼䞊䛜LET䛻®䜟䜛䞊䝟䝷䝯䞊䝍䛸䛺䜛䚹

• 䜲䜸䞁9䛾᰾཯ᛂ䛿䚸SEU◊✲䛾ୖ䛷V䛸䛺䜛ᇶᮏ䝯䜹䝙䝈䝮䛷䛒䜛䚹

(6) ⪃ᐹ

௒ᚋ䛾㧗䜶䝛䝹䜼䞊᰾཯ᛂ䝥䝻䝉䝇䛾䝅䝭䝳䝺䞊䝅䝵䞁L䞊䝹㛤Ⓨ䛻䜘䜛䚸SEUⓎ⏕W䛾Öᗘ

ྥୖ䜢W䛧䛯䛔䚹

3.2.7 ༢Ⰽ࢚ࢿࣝࢠ࣮୰ᛶᏊ※ࢆ⏝࠸ࡓSRAMࡢ1-10MeV୰ᛶᏊ㉳ᅉࡢࢩࣥࢢࣝ ࢖࣋ࣥ

ࢺ ࢔ࢵࣉࢭࢵࢺ

ᩥ⊩ Single Event Upsets Induced by 1–10 MeV Neutrons in Static-RAMs Using Mono-Energetic Neutron Sources

IEEE Transaction on Nuclear Science, Vol. 54, No. 6, pp. 2149- 2155, Dec. 2007.

Ú J. Baggio, D. Lambert, V. Ferlet-Cavrois, P. Paillet, C. Marcandella, and O.

Duhamel

ᑐ㇟䝕䝞䜲䝇 SRAM

ᐇ_タŽ 4 MV Van de Graaff ຍ㏿jtCEA/DIF, Bruyères le châtel, France SAMES ຍ㏿jtCEA/CVA, Valduc, France

↷ᑕ⥺2ཬ䜃 䝹䞊䛾%

2.5, 4, 6,ཬ䜃14 MeV>?䝹䞊୰ᛶᏊ

>Ⓨ⌧㇟䛿

±⟬⥺1ຠᯝ䛾%

>Ⓨ⌧㇟

ᐇ_䛿ㄽ䛾% ᐇ_䠄ཬ䜃ㄽ䠅

(1) せX

1Þ10MeV䛾୰ᛶᏊ䛻ᑐ䛩䜛SRAM䛾䝅䞁䜾䝹䜲䝧䞁䝖䜰䝑䝥䝉䝑䝖(SEU)ᗘ䜢2.5䚸4䚸6ཬ

䜃 14MeV 䛾>?䝹䞊䝇S䜽䝖䝹୰ᛶᏊà䜢Ü⏝䛧䛶ㄪᰝ䛧䛯䚹0.25μm 䜘‹ᚤ⣽䛺䝞䝹䜽

CMOS䝥䝻䝉䝇䛷䛿䚸4Þ6MeV䛾䝹䞊䛾୰ᛶᏊ䛻ᑐ䛧䛶䜒ẚ㍑ⓗ㧗䛔SEUᗘ䜢á䛴䚹

(n, α)཯ᛂ䛾α•ᏊST䛾SEU䛸õ䛘䜙䜜䜛䚹¿À୰ᛶᏊ䛾¬Á䚸䛣䛾䝹䞊BC䛾୰ᛶᏊ䛾

SER䛻ᑐ䛩䜛Ds䛿10%䜢ú䛘䜛䚹

(2) ™Y

¿À୰ᛶᏊ䛾䝹䞊䝇S䜽䝖䝹䛿Z䝹䞊䛛䜙ᩘ GeV䛾BC䛻ཬ䜃䚸¿[ᗘ䚸É㧗䛻 䜘‹䝇S䜽䝖䝹䛿ኚ໬䛩䜛䠄ç3.2.7-1䠅[1][2]䚹䜎䛯䚸SEU䛻㛵䛩䜛\Í䜲䜸䞁䛾≉ᛶ䠄䝹䞊䚸 䜲䜸䞁2䠅䛿䝕䝞䜲䝇ᵓᡂᮦᩱ䚸୰ᛶᏊ䝹䞊䚸᰾཯ᛂ䛾䝍䜲䝥䛻 䛩䜛䠄⾲ 3.2.7-1䠅䚹4䛘

‰BPSGL9]^d䛾䝩䜴⣲(B)䛸Z୰ᛶᏊ䛜䚸¹⁰B(n, α)⁷Li཯ᛂ䜢S䛣䛩䛯䜑䚸SEUᗘ䛜ୖ䛜 䜛[3]䚹BPSG䜢¸¹䛺䛔᭱㏆䛾SRAM䛷䛿SEU䛾ƪ䛿10MeVÖୖ䛾㧗䝹䞊୰ᛶᏊS T䛷䛒䜛䛸䛥䜜䚸䛭䛾䝹䞊 ᛶ䛿P್

䝹䞊EthÞ10MeV䛾Weibull㛵ᩘ䛷⾲

⾲3.2.7-1. Si, Oࡢ᰾཯ᛂࡢࢱ࢖ࣉ

ᅗ3.2.7-1. ⎔ቃ୰ᛶᏊࡢࢫ࣌ࢡࢺࣝ[1][2]

⌧䛷䛝䜛䚹䛧䛛䛧᭱㏆䛾◊✲䛷䛿䚸0.18μm䛾SRAM䛷EthÞ3.5MeV[4]䛸䛺䛳䛶䛚‹䚸ᚤ⣽໬䛛䜙 W_䛥䜜䜛0⏺㟁÷1Qc䛾¤䛸`a䛧䛺䛔䚹䛣䛾䛯䜑JESD89E±b(JESD89A) [5]䛷䛿䚸᭱

㏆䛾䝕䝞䜲䝇䛻ᑐ䛧䛶Eth=1Þ10MeV䛸䛧䛶䛔䜛䚹

(3) ᐇ_䝉䝑䝖䜰䝑䝥㻌

(a) >?䝹䞊୰ᛶᏊ䛾Ⓨ0

>?䝹䞊୰ᛶᏊ↷ᑕ¹_䛿cᅜ CEA/DIF䛾4MV Van de Graaff ຍ㏿

j䛸CEA/CVA䛾SAMESຍ㏿j[6]䜢Ü

⏝䛧䛯䚹ç 3.2.7-2 䛻d䜲䜸䞁䛾ຍ㏿

䝹䞊䚸䝍䞊é䝑䝖2䚸᰾཯ᛂ䜢䜎䛸䜑䛯䚹

୰ᛶᏊ䝷䝑䜽䝇䛿3E4Þ1E9 n/cm²/s䛾 BC䚹䝷䝑䜽䝇ᐃ䛿 SAMES 䛷䛿α• Ꮚô䜴䞁䝍䚸㝧Ꮚô䜴䞁䝍䜢Ü⏝䠄Öᗘ5%䠅䚸

Van de Graaffຍ㏿j䛷䛿୰ᛶᏊ䜢BF3ô䜴䞁䝍䠄Öᗘ8%֐䠅䛷ィ䛧䛯䚹DUT䛾䛝䛥䛸 䝍䞊é䝑䝖䛛䜙䛾e6䜢õ:䛩䜛䛸 20°䛻ᑐ䛧䛶 100keV ֐䛻J䜎䛳䛶䛚‹䚸T䛻>?䝹 䞊䛸ò䛘䜛䚹

Z୰ᛶᏊ䛾ᙳ㡪䝏䜵䝑䜽䛾䛯䜑䚸CdMf䛾þ䛷SEU䜢ᐃ䛧䛯[5]䚹䝽䞊䝇䝖䞊䝇䛷䛿Cd 䛾þ䛷30%䛾H䜢0䛨䛶䛚‹䚸ᐃ䛧䛯 SEU䛾༙䛜Z୰ᛶᏊ䛾ᙳ㡪䛷䛒䜛䛣䛸䜢䛧䛶䛔䜛䚹 Z୰ᛶᏊ䛾ᙳ㡪䜢•㑊䛩䜛䛯䜑䚸CdMf䛷#䛻DUT䜢+䛳䛶SEU¹_䜢^䛳䛯䚹

(b) ᑐ㇟䝕䝞䜲䝇

䝞䝹䜽CMOS SRAM䛷䛒‹䠄⾲3.2.7-2䠅䚸all“0”䚸all“1”ཬ䜃checkerboard䛾䝕䞊䝍䝟䝍䞊䞁 䜢⏝䛔䚸䝇䝍G䜱䝑䜽ð䞊䝗䛷 SEU ¹_䜢^䛳䛯䚹䝟䝍䞊䞁9䛾ºÚ䛺H䛿ㄆ䜑䜙䜜䛺䛛䛳䛯䚹

10MeV%g䛾୰ᛶᏊ䛷䛿䚸G䝇䝖䛷/䜙䜜䜛䝷䞊ᩘ䛿ᩘT䛛䜙ᩘh䚹୰ᛶᏊST䛾 SEU 䛷䛒

䜛䛣䛸䜢☜ㄆ䛩䜛䛯䜑䚸i) Runà䛻3•Read䜢^䛔䚸䛾Û䝑䝖཯㌿䛷䛒䜛䛣䛸䜢䝏䜵䝑䜽䚸ii)Û䞊 䝮䛾þ䛷o›—䛨©9›䛡 SEU ¹_䜢^䛔䚸ᐃ䝕䞊䝍䛻㟁ï䝜䜲䝈➼䛾せT䛜㛵䛧䛶䛔 䛺䛔䛣䛸䜢☜ㄆ䛧䛯䚹

¹_䛿䛶É㟁ê䛷^䛔䚸⾲/Ä䛛䜙୰ᛶᏊ䜢 ìᑕ䛥䛯䚹ã$䛾ᐇ_䛷䛿䚸SEU ı䛿⾲Ä䛸 Ä䛸䛷Ó䛺H䛜ㄆ䜑䜙䜜䛯䚹䛣䜜䛿䝟䝑䝅䝧䞊䝅î 䞁ᵓᡂèº䛾c⣲䛾䛯䜑䛸õ䛘䜙䜜䛶䛚‹䚸䝹 䞊(i50MeV)䛷ºÚ䚹

(4) ᐇ_⤖ᯝ㻌

(a) 䝹䞊 ᛶ

ç3.2.7-3,4䛻5䛴䛾䝕䝞䜲䝇䛻ᑐ䛧䛶/䜙䜜䛯SEUı(XS)䜢⾲Ä↷ᑕ䛸Ä↷ᑕ䛾XS 䛾ᖹÈ್䜢䛧䛯䠄50䚸100MeV 㝧 Ꮚ↷ᑕ䛾 XS 䜒ç䠅䚹¹_䝕䝞䜲䝇䛾୰䛷᭱䜒C䛔 A1(0.45μm)䛾¬Á䚸XS(14MeV) / XS(4MeV)Þ10䛻ᑐ䛧XS(14MeV) / XS(2.5MeV)Þ1800

ᅗ3.2.7-2. ༢Ⰽ୰ᛶᏊ※

⾲3.2.7-2. ヨ㦂ࢹࣂ࢖ࢫ(SRAM)

¡¢‹10MeV%g SEUˆšDE䛻¤䛩䜛(JESD89) 䚹0.18μm䛾䝕䝞䜲䝇䛿ª䜜䜒—䛨

ື䜢䛧䚸4䚸6MeV䛷䛿䚸A2䚸B1-3䛿14MeVÖୖ䛾XS䛸—䛨䜸䞊䝎䞊䛻䛒䜛 ( XS(14MeV) / XS(4MeV)-1.3Þ2)䚹P್䝹䞊䛿2.5MeV䛾ᐃ䛛䜙‘Õ䛻Î䛷䛝䚸䛣䛣䛷SEUᗘ 䛿—䜽䝍ᩘh¤䛧䚸0.25μmÖø䛾䝕䝞䜲䝇䛻ᑐ䛧䛶Eth䛜2-3MeV䛻㏆˜䛺䛳䛯䛣䛸䜢䛧䛶 䛔䜛䚹

(b) Iᗘ ᛶ

2.5䚸4䚸6䚸14䚸180MeV䛷ᐇ᪋䛧䛯⾲/Äìᑕ䛾SEUᐃ䛷䛿䚸ºÚ䛺㐪䛔䛜ㄆ䜑䜙䜜䚸୰

ᛶᏊ䝹䞊䛜ø䛜䜛䛸䚸F/Bẚ (Front / Back Ratio) 䛿㧗˜䛺䜛䠄⾲ 3.2.7-3䠅䚹䝟䝑䝅䝧䞊 䝅î䞁d䛾c⣲`Ꮚ䛿50MeV%g䛾⾲Äìᑕ䛾SEU-XS䛻ຠᯝ䜢䜒䛯䜙䛩[7][8]䚹䝞䝹䜽䝕䝞䜲 䝇䛾¬Á䚸⾲Ä↷ᑕ䛷䛿䛻䝽䞊䝇䝖䞊䝇䛾⤖ᯝ䜢䛩䚹

(5) ð䞁Gô䝹䝻䝅䝭í䝺䞊䝅î䞁

୰ᛶᏊST䛾SEUィ⟬ྥ䛝䛻㛤Ⓨ䛧䛯 ð䞁Gô䝹䝻䝧䞊䝇䛾䝅䝭í䝺䞊䝍䞊MC

DASIE[9][10]䜢⏝䛔䛶óô䝙䝈䝮䛾◊✲䜢^䛳䛯䚹䝅䝭í䝺䞊䝍䞊᭱᪂b䛷䛿Si䛸SiO2䛾'X䜢ྵ

m䚸SERィ⟬䛻క䛖᰾཯ᛂ䛾¿ã䜢j䛩䚹

Œせ䛺䝕䝞䜲䝇䛾䝟䝷ó䞊䝍䛿ᛂYZయ±(SV)䛸0⏺㟁÷1 Qc 䛷䛒䜛䚹B1 䛷䛿䛭䜜ë䜜 0.28μm³䚸8fC䚸A2 䛷䛿 0.123μm³䚸3fC䚹SV 䛿䝗䝺䜲䞁䛾⾲Ä䛸㟁÷J°YZ䜢ྵ䜐KXయ (RPP)䛷ᐃk䛥䜜䜛䚹SV䛾ୖ䛻5μm䛾SiO2d䛜䛒䜛䚹

ç3.2.7-5䛿B1䛸A2䛾SEU-XS䛻䛴䛔䛶䝅䝭í䝺䞊䝅î䞁್䛸ᐇ_್䜢ẚ㍑䛧䛯䜒䛾䛷䚸Þ ç3.2.7-3. 0.25,0.45μmSRAM 䛾 SEU

ı㻌

ç3.2.7-4. 0.18μmSRAM䛾SEUı

⾲3.2.7-3. SEU᩿㠃✚ࡢF/Bẚ

ç3.2.7-5. 䝅䝭í䝺䞊䝅î䞁䛸ᐇ_್䛾ẚ㍑

§䝹䞊YZ䛷䜘䛔୍;䜢䛧䛶䛔䜛䚹䛣䛾⤖ᯝ䛛䜙0.25μm ཬ䜃0.18μm 䝕䝞䜲䝇䛾EthÞ

3MeV 䛸䛧䛯䚹0.25μm 䛾 2MeV 䛾⤖ᯝ䛿䚸ð䞁Gô䝹䝻䛻䜘䜛䜲䝧䞁䝖ᩘ䛜T䛷䛺˜䚸䛣䜜䛜

2.5MeV䛻䛚䛡䜛䝅䝭í䝺䞊䝅î䞁್䛸ᐇ_್䛾‹6䛾`T䛷䛒䜛䛸õ䛘䜙䜜䜛䚹䜎䛯䚸0.18μm 䛾¬

Á䜒䛒䜎‹ 䛔୍;䛷䛿䛺䛔䠄Eth㏆l›䛛䜙௙X䛜þ䛔䠅䚹

4MeV䛾⤖ᯝ䛿ᛶ཯ᛂ䛻ST䛩䜛཯mSiཬ䜃O (n,α)཯ᛂ䛻ST䛩䜛Heཬ䜃C䜲䜸䞁䛜䚸 䜎䛯6MeV䛷䛿Al䜲䜸䞁䛜¹n䛛䛺䛜䜙D䛧䛶䛚‹Si (n,p)཯ᛂ䛾no䛜ㄆ䜑䜙䜜䜛䠄ç3.2.7-6䚸 7䠅䚹䛧䛛䛧䚸䛣䛾཯ᛂ䛷0䛨䛯㝧Ꮚ䛿0.25μm䝕䝞䜲䝇䛻SEU䜢S䛣䛩䛣䛸䛿䛷䛝䛺䛔䚹14MeV䛷 䛿ᛶ཯ᛂ䚸Oᛶ䛾(n,α)ཬ䜃(n,p)཯ᛂ䛜䛚䛣‹䚸䛩Ù䛶䛾¹_䝕䝞䜲䝇䛻䛴䛔䛶䚸14MeV 䛾

SEUı䛿100MeV 䛾ı䛸—➼䛛䛭䜜䜘‹䛝䛺್䛷䛒䜛䚹14MeV䛷䛿ᛶ཯ᛂ䛸(n,α)

཯ᛂ䛜SEU䛻ᙳ㡪䜢䛘䜛䚹୍X䚸100MeV䛷䛿Li䚸Be䚸B䚸F䚸Ne䚸Na➼䛾䜲䜸䞁䛜0䛨䛶䛚‹䚸

᰾%R཯ᛂ䛜S䛝䛶䛔䜛䛣䛸䛜䛛䜛䚹⾲3.2.7-1䛾཯ᛂ䛾P್䝹䞊䜢õ䛘䜛䛸䚸2MeV䛷S 䛣䜛SEU䛿O䛸Si䛾ᛶ཯ᛂ䛷0䛨䜛཯m᰾䛻䜘䛳䛶䛾m0䛨䜛䚹䛣䛾䜘䛖䛺\͕Ꮚ䛿300keV

%g䛷䛒䛳䛶䜒☜s䛿䛔䛜0.18μm䝕䝞䜲䝇䛾Û䝑䝖཯㌿䜢S䛣䛧䛖䜛䠄ç3.2.7-7䠅䚹

(6) ᭱᪂䛾䝞䝹䜽ཬ䜃SOI䝕䝞䜲䝇䛾SER䝖䝺䞁䝗

᭱᪂䛾䝞䝹䜽䝕䝞䜲䝇䚸㒊ƒpSOIཬ䜃#ƒpSOI䝕䝞䜲䝇䛾䝹䞊୰ᛶᏊ䛻ᑐ䛩 䜛SEUᗘ䛻㛵㐃䛧䛯èⓗóô䝙䝈䝮䛾䛻‡Ò䛾䝅䝭í䝺䞊䝅î䞁L䞊䝹䜢Ü⏝䛩䜛䚹

(a) 䝞䝹䜽䝕䝞䜲䝇

ç3.2.7-6䚸7䛻䜘䜜‰䚸0.18μm䛻ᑐ䛧䛶 XS 䛻ø䜑䜛α•Ꮚ䛾ᩘ䛜Ú䛧˜ຍ䛧䛶䛔䜛䚹 䛣䜜䛿4-100MeV䛷ㄆ䜑䜙䜜䚸0⏺㟁÷1Qc 䛾¤䛾ຠᯝ䛜⌧䜜䛯䜒䛾䛸õ䛘䜙䜜䜛䚹ᚤ⣽

໬䛻క䛖Qc䛾¤ຠᯝ䜢ㄪÙ䜛䛯䜑130nm䛸 90nm 䛾䝅䝭í䝺䞊䝅î䞁䜢ᐇ᪋䛧䛯䚹䝕䝞䜲䝇 䝟䝷ó䞊䝍䛿 130nm 䛻ᑐ䛧䛶ᛂYZయ±

0.07μm³䚸Qc=2fC䚸90nm 䛿 0.03μm³䚸1fC䚹 ç3.2.7-8䛿90nm䛻ᑐ䛧䛶SEU䜢S䛣䛩\

Í䜲䜸䞁䛾’䛷䛒䜛䚹0.18μm 䛾䝕䞊䝍䛸ẚ ç3.2.7-6. 0.25μmSRAM䛾SEU䛻D䛩 䜛\Í䜲䜸䞁䛾’

ç3.2.7-7. 0.18μmSRAM䛾SEU䛻D䛩 䜛\Í䜲䜸䞁䛾’

ᅗ3.2.7-8. 90nm SRAMࡢSEU࡟ᐤ୚ࡍࡿ

஧ḟ࢖࢜ࣥࡢศᕸ

Ù䜛䛸䚸4-100MeV 䛾䛷䛿䚸α•Ꮚ䛾D䛜yq䛷䛒‹䚸㝧ᏊST䛾䜲䝧䞁䝖䜒⌧䜜䛶䛔䜛䚹 0.18μm䜘‹ᚤ⣽䛺䝞䝹䜽䝕䝞䜲䝇䛷䛿2-6MeV䛾୰ᛶᏊ䛾D䛿2䛸䛧䛶(n,α)཯ᛂ䚸(n,p)཯ᛂ 䛾P್䝹䞊䛻䜘䛳䛶Ỵ䜑䜙䜜䛶䛔䜛䚹

(b) SOI䝕䝞䜲䝇

ᆅୖ¿À䛷䛿䚸SOI䛾䝍䜲䝥䠄PD䛛FD䛛䠅䜔 h䝕䜱䞊䝍䜲(BT)䛾þ䛻 䛧䚸—䜽䝍 5Þ50 䛾⪏ᛶྥୖ䛜ㄆ䜑䜙䜜䛶䛔䜛[11][12]䚹䛧䛛䛧D 0䝞䜲䝫䞊䝷䛾䛯䜑䚸(n,α)䜔(n,p)཯ᛂ䛻䜘䜛 α•Ꮚ䜔㝧Ꮚ䛾䜘䛖䛺LET•Ꮚ䛾¬Á䛷䜒䚸0

⏺㟁÷1䜢ú䛘䜛䛣䛸䛜䛒䜛䚹

⾲3.2.7-4䛻䝕䝞䜲䝇䝟䝷ó䞊䝍䜢䜎䛸䜑䛯䚹䛣䛾 䝕䝞䜲䝇䛿䛣䜜䜎䛷ᐇ_䞉䝅䝭í䝺䞊䝅î䞁œÄ䛛䜙 Ô䛧˜◊✲䛧䛶䛝䛯[12]䚹BT䛾 »䛻䜘‹䚸 䝹䞊BC䛷PD䚸FD 䛸䜒䛻SEU ᗘ䛜Ú䛧˜

ø䛩䜛䠄ç 3.2.7-9䠅䚹ᛂYZయ±䛾䛸䝞 䜲䝫䞊䝷䛾ø䛜(䜢r䛧䚸FD-SOI䠄BT

‹䠅䛿Ǖ⏝䛔䛯 SOI 䝕䝞䜲䝇䛾୰䛷᭱䜒䛔 ᗘ䛸䛺䛳䛶䛔䜛䚹䝞䜲䝫䞊䝷䛾ᢚไ䛻䜘‹䚸

యⓗ䛺SEUᗘ䛜1ø䛧䚸1-10MeVYZ䛾D䜒ø䛩䜛䚹8MeV%g䛷䛾SEU-XS䛾

¤䛿BT䛒‹䛾PDཬ䜃FD-SOI䛷ㄆ䜑䜙䜜䜛䚹

α•Ꮚ䛾䜘䛖䛺d䜲䜸䞁䛻ᑐ䛩䜛ᗘ䛜0⏺㟁÷1䛾ຍ䛻䜘䛳䛶Ú䛧˜¤䛧䛶䛔䜛䠄ç 3.2.7-10䚸ç3.2.7-11䠅䚹䛣䜜䛿ç3.2.7-9䛾4-6MeV୰ᛶᏊ䛾D䛜¤䛧䛶䛔䜛䛣䛸䛻ᑐᛂ䛩䜛䚹 䛣䛾ᖹsZ䛿୍㒊(n,α)཯ᛂ䛻䜘䜛䜒䛾䛷䛒䜛䛜䚸α•Ꮚ䛾D䛜䛳䛯䛯䜑䛻䚸䛣䛾YZ䛷䛾 SEU ᗘ䛿ø䛧䛶䛔䜛䚹

䜎䛯䚸SOI 䝕䝞䜲䝇䛷䛿ᛂYZ䜢C䜐 SiO2䜢ᵓᡂ䛩䜛c⣲`Ꮚ䛾᰾཯ᛂ䛜2䛯䜛せT䛷䛒 䜛䛣䛸䛜¹䛛䜛䚹—ᵝ䛾⤖ᯝ䛜PD-SOI䛷䜒/䜙䜜䛶䛔䜛䚹

ᅗ3.2.7-9. SOIࢹࣂ࢖ࢫࡢSEU᩿㠃✚

⾲3.2.7-4. SOIࢹࣂ࢖ࢫࡢࣃ࣓࣮ࣛࢱ

ç3.2.7-10. BT‹0.2μm FD-SOI SRAM 䛾SEU䛻D䛩䜛\Í䜲䜸䞁䛾’㻌

ç3.2.7-11. BTþ䛧0.2μm FD-SOI SRAM 䛾SEU䛻D䛩䜛\Í䜲䜸䞁䛾’

ドキュメント内 JAXA Repository AIREX: 最新デバイスの耐放射線性強化技術に関する検討委員会: 平成20年度成果報告書 (ページ 55-84)