15H02248 研究成果報告書

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(1)１版. 様式Ｃ−１９、Ｆ−１９−１、Ｚ−１９（共通）. 科学研究費助成事業研究成果報告書平成３０年. ６月２７日現在. 機関番号：１２６０８研究種目：基盤研究(A)（一般）研究期間： 2015 ∼ 2017 課題番号：１５Ｈ０２２４８研究課題名（和文）超高速・低消費電力面発光レーザフォトニクス. 研究課題名（英文）High-speed and low power consumption VCSEL photonics. 研究代表者小山二三夫（Koyama, Fumio）東京工業大学・科学技術創成研究院・教授. 研究者番号：３０１７８３９７交付決定額（研究期間全体）：（直接経費）. 33,500,000 円. 研究成果の概要（和文）：面発光レーザは，光インターコネクトなど，高速化が強く求められている．微小光共振器を横方向に集積してその光のフィードバック効果により，その変調帯域を大幅に拡大することを目指した．まずレート方程式モデルにより，小信号変調帯域として，50GHzが得られることを示し，結合共振器の数を増やすことで，小信号変調帯域として，100GHzを越える変調帯域の可能を示した．実際に850nm帯結合共振器デバイスを製作して，小信号変調帯域30GHz，大信号変調48Gbpsを実現した．また，低消費電力を進め，100fJ/bitの低エネルギー動作を実証するとともに外部変調器集積光源を製作し， 1mWを越える光出力を得た．. 研究成果の概要（英文）：We proposed and demonstrated high speed VCSEL photonics using a coupled cavity structure functioning like optical equalization. The small signal analysis based on rate equations was carried out to be over 100GHz by increasing the number of cavities. A 850 nm-band transverse coupled-cavity VCSEL has shown a 3dB bandwidth over 29 GHz, and a single-mode VCSELs exhibits a 30 GHz bandwidth after resonance tuning and large signal modulation up to 48GHz. Energy power consumption can be below 100 fJ/bit. We achieved the lowest power consumption of below 70fJ/bit. We also demonstrated output over 1mW for modulator integrated devices.. 研究分野：光エレクトロニクスキーワード：面発光レーザ光インターコネクトデータセンタ半導体レーザ直接変調外部変調器.

(2) ŧ Ġ ȞȓȕȜ/ȟȓȕȜ/ȠȓȕȜȐÁǥȑ ȕȔƖƠǸĀĢÇOƺœ Ŵů3_ĻƯÜƻMƛ®OŦƥNPȒƛ® ÷ƏK?IÜŪMǝȎǦ¾ǥ¸y| lOŔM_ǩÒ9īǈJ3_Ȕµ6QȒs erMLOū «ǝȎƦƬ ő»bȄñƴJ¯ǤA_NPȒ70Gbps ¬ OýĉǴ¯ǤĶǂ9īǈJ3^Ȓ²ŸǛȃÌ Òb¡Ƣ>C_=KZĎŜOm ICT OōáĮ8]êƱOǖȊJ3_ȔĝƲƧ¾ǥ ¸ưNČ?IPȒ100Tbps bǝ6_ýĉǴŲ Ƿüǲ¯ǤĶǂ9ÜƻNM^HH3_ZO OȒ¨ĦÎǦƎNǲǈĮ9ù?I;_ȎƦƬ ő»¯ǤȒ¾clusȒ¾ LANȒǄƶǹǄ ƶÃ¾ewnl|OýĉǴÒbćƄ A_EYNPȒȎǦĮ[²ŸǛȃÌĮN½` EȆŌƎM¾żĶǂOǸĹ9īǈJ3_Ȕı 9ðƍOĶǂJ3_ȅƍ¾pPȒƕǟȁ Ƨ¾lO£ǈM¾żK?Iƈ4]`Ȓŕ ǢJPsn[{wuwOǄƶ ǹǄƶÃN7<_¾ewnl|TO ǭƈ9ĭǦNǩY]Ì4_ȒǢ4ĎŜ 100Gbps ǝOȎǦÒO~tPý:4ZO OȒ ƄƁĶǂP 10Gbps O¯ǤǦĞNƊV GI4_ȔƖƠĈJPȒ40Gbps Ñ´ ȐTU Berlin MLȑ9øä>Ì4_ZOOȒ Ñ´śbÎæ?EćƈJP 25Gbps 9ǻƉKǉ]Ì4_ȔVEȒȃůŭJOe npN\_ 60Gbps úǗOøä(IBM) Z3_ZOOȒȃůìǠN\_ªÎƎMŸǛ ȃÌ9°5ȔƖƠ«ǃƹPȒȅƍ¾pN ĪĐÁľëbŨōáNǿƟA_=KJȒ¾Ą ƎM d}ylN\^úǗĘöbň¹ ¬NĺýJ:_=KbǉÅ?E(APL 2013, APEX 2014)ȔVEȒàŧMŦǧJȒŨōá N¯ńA_¾OƷǦĞbÉĩ?IƪāǷ 10 .m ƝĞOǝĐõȎǦ¾úǗëǿƟ¾żT KēǸ?E(Optics Express 2014)Ȕ=`]O ƖƠİŠb÷žK?IȒȎǦÒK²ŸǛȃÌ Òb¡ƢA_ǝȎǦȅƍ¾p i|~ lsTēǸA_ƔįNƽGEȔ ȖȔƖƠOƐƎ ¾ǥ¸Nƈ4]`_ǥĚOÔď³p JPȒDOúǗǦĞPȒƳçľÑåŲňKƪ āOŷǫĉǴN\_ĘöÉǻJĥǦ>`_Ȕ řƖƠJPȒ¾ewnl|O£ǈ¾ż J3_ȅƍ¾pNȒôƑōáOpÁ ľëNÎ6IȒĪĐ¾ÁľëbŨōáNǿƟ ?IDO¾O d}ylÐŠN\^ȒD OúǗĘöbýěNĺýA_Ō?4ȎǦú ǗĶǂbƘƢA_ȔřĴűJOúǗǦĞǻƉ PÔď³ŚŊO¾ĄƀĮJPĥǦ>`M4Ȕ VEȒàĴűN\^Ȓȅƍ¾pN¾O ƷǦĞbÉĩ?EĐõOãØõ¾úǗëb qylNǿƟ?ȒĐõÒN\_ȎǦÒ K²ȃñÒN\_²ŸǛȃÌÒOǻƉNĽ ĲA_Ȕ¡ĴűN\_ƅǘƎMúǗǦĞǻƉ bƠŐA_KKZNȒ{esOǒ´bǥ? IOćǐƖƠN\^ 100Gbps ƩOǝȎǦÔ ď³pĕĄOƘƢbƐļ?EȔ. ȗȔƖƠOōű ĚOÔď³pJPȒúǗǦĞPȒ¾K ȃāOƒ¥´ƈN\_ƳçľÑåŲňKƪ āOŷǫĉǴN\_ĘöÉǻJĥǦ>`_Ȕ řƖƠOĄǂƎƀƿPȒpÁľëKPÈ NŌEMÁľëbǿƟA_=KJ¾ęǯN \^ȒDOúǗƀĮb¾ĄƎNÉĩA_ZO J3^ȒǦĞǻƉPŚŊMLOƀĮJĥǦ> `M4ȔƦĊNƮßÁľëbÉĩA_=KJȒ ƳçľÑåŲňOǻƉĵƗNƊV]BȒŷǫ ĉǴN\_ĘöĥǦbZǅ¼J:_=K9 ŘĤ>`_ȔǎOƮßÁľëJPȒȅƍ¾ pÁľë8]pÅÌKPƑ¦A_ ŨōáN¾9ƮßA_Ȕ=OŨōáN¯ńA _¾OƷǦĞPȒï³¢OǥĚO¯ń¾NŮ UIȒƨ ¬VJŹǦ?E¾ȒAMa Fse|J3_=K9a8GI4_Ȕ se|OÐŠN\^ȒǝĐõ¾úǗë OćƄ9ŘĤJ:_Ȕ Â³ƎNPȒ¬OƖƠȈƐbćŎ?EȔ ȕȑƮßÁľëǿƟȅƍ¾pOȎǦÒ ƮßÁľëbƈ4Eȅƍ¾pOúǗ ƀĮOƅǘƎĄǂ÷ƏbƘƢA_KKZNȒ ĪĐƮßÁľëOƦĊÉĩusĶǂO ƘƢȒ %$ %$ Ęƪāǆ´KȎǦúǗƀ ĮOćǐbǁ5ȔȃƙƉqwN\_ ǱÒƂơŦǧN\_ƮßÁľëOǋşbǩ YȒ¾ęǯOƮßÐƃKǪğŒǹMLOǙƀ ĮbŐ]8NA_KKZNȒħŜíȂJ3G EġƮßȉöJOúǗƀĮOǋşbŏNƔ Ĵ?EġƮßȉöN7<_|ōƝĠǋ şbǩYȒȎǦÒOǻƉƠŐKȎǦÒOǏǌ ļǵbƘƢbƐļ?EȔVEȒǱÒƂơŦǧ N\_ĪĐƮßÁľëģİusbƘƢ ?ȒąĆMƮßÁľëÑÓćƄbƐļ?EȔ Ȗȑ²ȌÑȃñÑÓ¾úǗëǿƟ¾żǸĹ ȅƍ¾p8]OȎÐƃƮß9Üƻ8 HȒúǗë8]Oĳ^¾bÉĩ?EǿƟĶǂ bƘƢA_KKZNȒĪĐÒK²ȃñÒN\ ^ȒȎǦÒK²ŸǛȃÌÒO¡ƢbǩYEȔ ćǽNȒúǗëǿƟȅƍ¾pbǆ´?Ȓ ¾úǗëO8]OÅÌbùýA_EYOŦ ǧbţǍA_KKZNȒúǗƀĮbŐ]8N ?ȒȎǦÒOEYOǻƉƠŐbǁGEȔ ȗȑ²ŸǛȃÌÒOǣƠ ¡{esĶǂN\_²ŸǛȃÌÒOǻ ƉNH4IȒƅǘƎMƸċbǁ4Ȓ') OȎǦúǗȐŏĂĶǂO ¹ȑOÜƻĮbŐ ]8NA_KKZNȒ!#*ȐŏĂĶǂ Oƨ ȑO²ŸǛȃÌÒNH4IţǍ?Ȓ ƮßÁľëȅƍ¾pO²ŸǛȃÌÒN H4IćȍƎNţǐ?EȔ ȘȔƖƠİŠ ȕȑƮßÁľëǿƟȅƍ¾pOȎǦÒ ¾ęǯbƈ4EǝȎǦȅƍ¾pćƄO EYȒî NƚAŨōáƮßÁľëȅƍ¾ pOĐ¸ÝúǗƀĮbĳ^¾bâX |ōƝĠbƈ4IǋşbǁGEȔġƮßOś.

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(7) =`]OèȊbǋŰA_EYNȒÊƤO b¾żK?IǿƟÒ?EȔȐî ȑ î NƚA\5NȒÇYI $ bǞ6_Å ÌbćƄA_=K9J:EȔ ȗȑ²ŸǛȃÌÒOǣƠ î NȒƮßÁľëȅƍ¾pOŸǛ ȃÌNH4IȒ©OƖƠũǺKOĮƻŮǡb ƚAȔ ') ƩJPȒÇYI !#* O² ŸǛȃÌÒNİÍ?EȔ � 300��. Power Consumption per Bit��. î PȒǆ´?EƪāŦǧbƚAȔî PȒƮßÁľëN7<_ǾŁA_ÁľëJƍ ƆA_¾ȃŵȐAMaF=`9ƮßǴNČĬ A_ȑOŻĆºbƌM_ǰ×čƃOÔď³ ×čǶNČ?Iƚ?I4_Ȕ¾ȃŵȐAMa FƮßÐƃȑPȒǰ×čǶ×čƃbȎY_ =KJƮßÐƃbȎY_=K9ÜƻJ3^Ȓ ȎǦÒbǩY_=K9J:_Ȕ î Pǰ×čǶ cOÔď³×čǶ OŦǧNČ?IȒǆ´?EƮßÁľë OǢǊǳ»KǬǊǳ»bƚ?I4_ȔǢǊǳ »OÆė8]ȒƮßÐƃK?I. ȏ¬9ł Ć>ÈȔ Oǰ×čǶ×čƃOWb ŔNȎY_=KJȒŔM_ƮßÐƃOùý9 ŘĤJ:_ȔàŒNȒǢǊǳ»8]łĆ>` _ƮßÐƃO ecsȃŵ¶ĂĮ8]Ȓ ȎecsȃŵºJPȒƪāOƼĖÎſN\ ^ȒƍľŲǷO ( )"#!* 9Ɔ@Ȓ ƒČƎNƮßÁľëOky|j ŲǷNǢ ŁA_=KJȒĭŽNƮßÐƃ9ŹđA_= KbŐ]8N?EȔ . 850nm 980nm 1060nm��. UCSB�� NEC�� Tokyo Tech�� NCTU��. Illinois��. 200�� Furukawa��. NCTU�� TUB��. 0��. 10. IBM/ Chalmers��. Furukawa�� TUB��. 100��. with equalization��. 20. TUB�� TUB��. Chalmers�� Chalmers�� FujiXerox/ Tokyo Tech��. 30 40 50 Bit Rate (Gbps)��. 60. 70��. �� î 15 ȎǦȅƍ¾pOÕ±y|ĢEÔ. ŸǛȃÌȔ. șȔ£Mƍǃǘŉ ȐƖƠ«ǃƹ/ƖƠÆĸƹÖRǨŅƖƠƹN PƲȑ . . î úǗëǿƟ OŦǧKȋ ĪǶÄƓ. î ¾úǗëǿƟ¾żOÅÌOŸ¾ƀĮ. 1ȀǓǘŉ2Ȑǌ 5 ȑ 1) Masanori Nakahama, Xiaodong Gu, Takahiro Sakaguchi, Akihiro Matsutani, Moustafa Ahmed, Ahmed Bakry, Fumio Koyama,”Sub-gigahertz beam switching of vertical-cavity surface-emitting laser with transverse coupled cavity, Applied Physics Letters, Vol. 107, No. 7, pp. 071105-1-4, Aug. 2015. šǕŖ^ 2) Shanting Hu, Moustafa Ahmed, Ahmed Bakry, Fumio Koyama,”Low chirp and high-speed operation of transverse coupled cavity VCSEL, Japanese Journal of Applied Physics, vol. 54, no. 9, pp. 090304-1-4, Aug. 2015. šǕŖ^ 3) Xiaodong Gu, Masanori Nakahama, Akihiro Matsutani, Moustafa Ahmed, Ahmed Bakry, Fumio Koyama,” 850nm transverse-coupled-cavity vertical-cavity surface-emitting laser with direct modulation bandwidth of over 30GHz, Applied Physics Express, vol. 8, no. 8, pp. 82702-1-4, Jul. 2015. šǕŖ^ 4) Moustafa Ahmed, Ahmed Bakry, Mohamed S. Alghamdi, Hamed Dalir, Fumio Koyama, “Enhancing the modulation bandwidth of VCSELs to the millimeter-waveband using strong transverse slow-light feedback, OPTICS. !.

(8) 5). EXPRESS, Vol. 23, No. 12, pp. 15365-15371, Jun. 2015. šǕŖ^ Akihiro Matsutani, Fumio Koyama,” “Dry etching of SiC using Ar/F2 plasma and XeF2 plasma, Japanese Journal of Applied Physics,” vol. 54, p. 06GB01, May. 2015. šǕŖ^. 1Ą®ƍǃ2Ȑǌ 20 ȑ 1) Shanting Hu, Fumio Koyama, ”Coupled mode analysis of High-speed Transverse Coupled Cavity VCSEL, 20th MOC 2015, J5, pp. 26-29, Oct. 2015. 2) Hameeda Ragab Ibrahim, Moustafa Ahmed, Fumio Koyama,” Influence of slow-light feedback on noise properties of VCSEL with a transverse coupled cavity, 20th MOC 2015, H3, pp. 26-28, Oct. 2015. 3) Xiaodong Gu, Masanori Nakahama, Akihiro Matsutani, Fumio Koyama,” Over 30 GHz Modulation of 850 nm Transverse Coupled Cavity Vertical-Cavity Surface-Emitting Laser, 41st ECOC 2015, ID: 0803, Sep. 2015. 4) Shanting Hu, Fumio Koyama,” Chirp Reduction and High-speed Operation Utilizing Lateral Optical Feedback of Coupled Cavity VCSEL,” iNOW, 2015. 5) Hameeda R. Ibrahim, Moustafa Ahmed, Fumio Koyama,” Modeling of Dynamics and Intensity Noise of Transverse Coupled Cavity VCSELs, iNOW 2014, TuP15, pp. 60-61, Aug. 2015. 6) Masanori Nakahama, Xiaodong Gu, Takahiro Sakaguchi, Akihiro Matsutani, Fumio Koyama,” Transverse-mode Coupled cavity VCSELs with High Speed Beam Switching, iNOW, ThP1, pp. 119-120, Aug. 2015. 7) Masanori Nakahama, Hiroki Kobayashi, Takahiro Sakaguchi, Akihiro Matsutani, Fumio Koyama,” Transverse-mode Control of Transverse-coupled Cavity VCSELs using Vernier Effect for Boosting Single-mode Power, Compound Semiconductor Week 2015, CSW2015, Tu405.4, pp. 346-347, Jul. 2015. 8) Shanting Hu, Fumio Koyama,” Chirp Reduction and Modulation Bandwidth Enhancement of Transverse Coupled Cavity VCSEL, The 20th OECC2015, JWeC.14, Jul. 2015. 9) Moustafa Ahmed, Ahmed Bakry, Hamed Dalir, Fumio Koyama,” Application of Strong Slow-Light Feedback to Boost the Modulation Bandwidth of VCSELs Beyond 70 GHz, CLEO2015, SM3F.6, May. 2015. 10) Hamed Dalir, Fumio Koyama,” Millimeter-wave Modulation of 850 nm VCSELs for Radio over Fiber Applications, CLEO2015, SF1I.7, May. 2015.. 11). 12) 13). 14) 15). 16). 17). 18). 19). 20). Hameeda Ragab Ibrahim, Mohamed Ahmed, Fumio Koyama,” Modulation Bandwidth Enhancement of Double Transverse Coupled Cavity VCSELs, 21stMOC2016, 13A-7, Oct. 2016. Fumio Koyama,” VCSEL Photonics for Optical Interconnects,” MOC2016, 12C-3, Oct. 2016. Takashi Kondo, Junichiro Hayakawa, Naoki Jogan, Akemi Murakami, Jun Sakurai, Xiaodong Gu, Fumio Koyama,”. Temperature Dependence of Small Signal Response of 850 nm Transverse-Coupled-, 25th ISLC 2016, TuD3, Sep. 2016. Fumio Koyama, ”High speed modulation of transverse coupled cavity VCSELs, 21st. (OECC/PS2016), MD2-1, Jul. 2016. Shanting Hu, Xiaodong Gu, Fumio Koyama, ”Low chirp operation of transverse-coupled-cavity VCSELs, CLEO2016, SF1L.4, Jun. 2016. Hameeda Ibrahim, Fumio Koyama,” Moustafa Ahmed. Large Signal Modultion Analysis Of High-speed Transverse Coupled Cavity VCSELs, The 12th CLEO-PR, 1-4N-6, Aug. 2017. Shanting Hu, Akihiro Matsutani, Fumio Koyama, ”Unidirectional Coupling Of Laterally Coupled VCSEL And Slow Light Modulator/Amplifier, The 12th CLEO-PR, P3-125, Aug. 2017. Shanting Hu, Akihiro Matsutani, Fumio Koyama, ”VCSELs Laterally Coupled with a Slow Light Modulator/Amplifier Showing Unidirectional Coupling, iNOW 2017, WeP, Aug. 2017. Ahmed Mohamed Ahmed Hassan, Moustafa Ahmed Hafez, Masanori Nakahama, Fumio Koyama, “Numerical analysis of Watt-class VCSEL amplifier, The 24th ICO, P14-02, Aug. 2017. Shanting Hu, Xiaodong Gu, Akihiro Matsutani, Fumio Koyama, ”Electro-absorption Modulator Integrated with Transverse Coupled Cavity VCSELs,” The 24th ICO, Tu1J-05, Aug. 2017.. 1DO©2 rƣ http://vcsel-www.pi.titech.ac.jp/index-j.html ȚȔƖƠƭƵ ƖƠ«ǃƹ ĐĔ ¤þȐKOYAMA, FUMIOȑ ŝ§ĕŤýĄƜĄĶǂËİƖƠǼŇĿ ƖƠƹƋÝȝ30178397 (2)ƖƠÆĸƹ òÛ ăŶȐSAKAGUCHI, TAKAHIROȑ ŝ§ĕŤýĄƜĄĶǂËİƖƠǼÏŇ ƖƠƹƋÝȝ70215622.

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