宇宙航空研究開発機構

(1)

JAXA Research and Development Report

Mechanical Properties Degradation and its Prediction Methods of Polyimide Films Exposed to Space Environment

Hiroyuki SHIMAMURA*¹ and Takashi NAKAMURA*²

Electronic Devices and Materials Group, Aerospace Research and Development Directorate

*² 北海道大学大学院工学研究科機械宇宙工学専攻

*¹ 研究開発本部電子部品・デバイス・材料グループ

Division of Mechanical and Space Engineering, Graduated School of Engineering, Hokkaido University

宇宙航空研究開発機構研究開発報告

2011 年1 月

January 2011

宇宙航空研究開発機構

Japan Aerospace Exploration Agency

宇宙環境曝露によるポリイミドフィルムの機械特性劣化とその予測法

島村宏之*

¹

，中村孝*

²

(2)

1. ᐨ⺰...7

1.1.

䈲䈛䉄䈮

... 7

1.2.

ቝቮⅣႺ࿃ሶ䈮䉋䉎㜞ಽሶ᧚ᢱ䈱ഠൻ

... 8

1.2.1.

ේሶ⁁㉄⚛... 8

1.2.1.1.

ේሶ⁁㉄⚛ⅣႺ... 8

1.2.1.2.

ේሶ⁁㉄⚛䈮䉋䉎㜞ಽሶ᧚ᢱ䈱ഠൻ... 9

1.2.2.

⚡ᄖ✢... 13

1.2.2.1.

⚡ᄖ✢ⅣႺ... 13

1.2.2.2.

⚡ᄖ✢䈮䉋䉎㜞ಽሶ᧚ᢱ䈱ഠൻ

... 14

1.2.3.

᡼኿✢... 17

1.2.3.1.

᡼኿✢ⅣႺ... 17

1.2.3.2.

᡼኿✢䈮䉋䉎㜞ಽሶ᧚ᢱ䈱ഠൻ

... 17

1.2.4.

ᾲ䉰䉟䉪䊦෸䈶ᾲ⽶⩄

... 19

1.2.4.1.

ᾲⅣႺ

... 19

1.2.4.2.

ᾲ䉰䉟䉪䊦෸䈶ᾲ⽶⩄䈮䉋䉎㜞ಽሶ᧚ᢱ䈱ഠൻ... 19

1.2.5.

㜞⌀ⓨ... 20

1.2.5.1.

⌀ⓨⅣႺ... 20

1.2.5.2.

㜞⌀ⓨ෸䈶䉮䊮䉺䊚䊈䊷䉲䊢䊮䈮䉋䉎㜞ಽሶ᧚ᢱ䈱ഠൻ

... 21

1.3.

䊘䊥䉟䊚䊄䊐䉞䊦䊛䈱․ᕈ䈫ቝቮᯏ䈻䈱ㆡ↪

... 24

1.3.1.

䊘䊥䉟䊚䊄䊐䉞䊦䊛䈱․ᕈ... 24

1.3.2.

ᾲ೙ᓮ᧚䈻䈱ㆡ↪... 25

1.3.3.

ቝቮ⤑᭴ㅧ‛᭴ㅧ᧚䈻䈱ㆡ↪䈫⺖㗴... 27

1.4.

ᧄ⎇ⓥ䈱⋡⊛... 29

1.5.

ᧄ⺰ᢥ䈱᭴ᚑ... 29

2. ゠㆏਄᧚ᢱᦑ㔺ታ㛎䋨SM/SEEDታ㛎䋩...31

2.1.

✜⸒

... 31

2.2.

ታ㛎ᣇᴺ

... 31

2.2.1.

䉰䊮䊒䊦

... 31

2.2.2.

ᒛജ⽶⩄ᯏ᭴

... 33

2.2.3. SM/MPAC&SEED

ታ㛎

... 34

2.2.4.

⹏ଔᣇᴺ

... 36

(3)

2.2.4.2.

⾰㊂᷹ቯ... 36

2.2.4.3.

෻ᔕല₸⸘▚

... 36

2.2.4.4.

⤑ෘ⸘▚... 36

2.2.4.5.

ᒁᒛ⹜㛎... 37

2.2.4.6.

ᦑ㔺㕙ᒻᘒ⹏ଔ... 37

2.2.4.7.

⎕㕙ⷰኤ... 41

2.3.

⹏ଔ⚿ᨐ

... 41

2.3.1.

ᄖⷰ

... 41

2.3.2.

⾰㊂ᷫዋ㊂... 41

2.3.3.

෻ᔕല₸

... 42

2.3.4.

⤑ෘᷫዋ㊂... 43

2.3.5.

ᒁᒛ․ᕈ

... 43

2.3.6.

ᦑ㔺㕙ᒻᘒ... 44

2.3.7.

⎕㕙᭽⋧

... 49

2.4.

䉮䊮䉺䊚䊈䊷䉲䊢䊮䈱ᚑಽ䈫ᓇ㗀... 50

2.4.1.

䉮䊮䉺䊚䊈䊷䉲䊢䊮䈱ᚑಽ

... 50

2.4.2.

䉮䊮䉺䊚䊈䊷䉲䊢䊮ઃ⌕䈱ᓇ㗀

... 52

2.4.2.1.

⾰㊂Ⴧട... 52

2.4.2.2.

ේሶ⁁㉄⚛଻⼔ጀ

... 52

2.4.2.3.

ᦑ㔺㕙䈮ⷰኤ䈘䉏䈢ዪᚲ⊛䈮ᷓ䈇ⓣ䋨Hole䋩䈱ᒻᚑ... 52

2.5.

⚿⸒

... 53

3. ࿾਄ᮨᡆ⹜㛎 ...54

3.1.

✜⸒

... 54

3.2.

ታ㛎ᣇᴺ

... 54

3.2.1.

䉰䊮䊒䊦

... 54

3.2.2.

ᒛജ⽶⩄ᯏ᭴

... 54

3.2.3.

࿾਄ᮨᡆ⹜㛎

... 55

3.2.3.1.

⌀ⓨⶄวⅣႺ⹜㛎⸳஻... 55

3.2.3.2.

⚡ᄖ✢ᾖ኿ⵝ⟎... 58

3.2.3.3.

ේሶ⁁㉄⚛ᾖ኿⹜㛎᧦ઙ

... 60

3.2.3.4.

⚡ᄖ✢ᾖ኿⹜㛎᧦ઙ

... 60

3.2.3.5.

㔚ሶ✢ᾖ኿⹜㛎᧦ઙ

... 60

3.2.4.

⹏ଔᣇᴺ

... 61

(4)

3.2.4.2.

⾰㊂᷹ቯ... 61

3.2.4.3.

෻ᔕല₸⸘▚

... 61

3.2.4.4.

⤑ෘ⸘▚... 61

3.2.4.5.

ᒁᒛ⹜㛎... 61

3.2.4.6.

ᾖ኿㕙ᒻᘒ⹏ଔ... 62

3.2.4.7.

⎕㕙ⷰኤ... 62

3.3.

⹏ଔ⚿ᨐ

... 63

3.3.1.

ᄖⷰ

... 63

3.3.2.

⾰㊂ᷫዋ㊂... 63

3.3.3.

෻ᔕല₸

... 64

3.3.4.

⤑ෘᷫዋ㊂... 65

3.3.5.

ᒁᒛ․ᕈ

... 66

3.3.6.

ᾖ኿㕙ᒻᘒ... 69

3.3.7.

⎕㕙᭽⋧

... 75

3.4.

⚿⸒

... 77

4. ቝቮⅣႺᦑ㔺䈮䉋䉎䊘䊥䉟䊚䊄䊐䉞䊦䊛䈱ᯏ᪾․ᕈഠൻ...78

4.1.

✜⸒

... 78

4.2.

䈐ⵚㅴዷ᜼േ

... 78

4.3.

ᯏ᪾․ᕈഠൻ䈱ਥⷐ࿃䈫䊜䉦䊆䉵䊛

... 81

4.4.

ቝቮⅣႺᦑ㔺ਛ䈱ᒁᒛᔕജ䈱ᓇ㗀

... 83

4.5.

⚿⸒

... 83

5. ේሶ⁁㉄⚛䈮䉋䉎䉮䊷䊁䉞䊮䉫ઃ䊘䊥䉟䊚䊄䊐䉞䊦䊛䈱ᯏ᪾․ᕈഠൻ...85

5.1.

✜⸒

... 85

5.2.

ታ㛎ᣇᴺ

... 85

5.2.1.

䉰䊮䊒䊦

... 85

5.2.2.

ේሶ⁁㉄⚛ᾖ኿⹜㛎

... 85

5.2.3.

⹏ଔᣇᴺ

... 86

5.2.3.1.

ᄖⷰⷰኤ... 86

5.2.3.2.

⾰㊂᷹ቯ... 86

(5)

5.2.3.4.

ᒁᒛ⹜㛎... 86

5.2.3.5.

ᾖ኿㕙ⷰኤ... 86

5.2.3.6.

⎕㕙ⷰኤ... 86

5.3.

⹏ଔ⚿ᨐ

... 87

5.3.1.

ᄖⷰ

... 87

5.3.2.

⾰㊂ᷫዋ㊂... 87

5.3.3.

෻ᔕല₸

... 88

5.3.4.

ᒁᒛ․ᕈ

... 89

5.3.5.

ᾖ኿㕙ᒻᘒ... 90

5.3.6.

⎕㕙᭽⋧

... 92

5.4.

䈐ⵚㅴዷ᜼േ

... 95

5.5.

ᯏ᪾․ᕈ䈮ኻ䈜䉎

Undercut cavity

䈱ᓇ㗀

... 95

5.6.

⚿⸒

... 96

6. ⎕უജቇ䈮䉋䉎ᒝᐲഠൻ੍᷹ ...97

6.1.

✜⸒

... 97

6.2.

⎕უ㕤ᕈ⹏ଔ... 97

6.2.1.

ታ㛎ᣇᴺ

... 97

6.2.1.1.

䉰䊮䊒䊦

... 97

6.2.1.2.

ᓸዊᰳ㒱䈱ዉ౉... 97

6.2.1.3. ⹏ଔᣇᴺ... 99

6.2.1.3.1.

ᒁᒛ⹜㛎

... 99

6.2.1.3.2.

⴫㕙ⷰኤ

... 99

6.2.1.3.3.

⎕㕙ⷰኤ

... 99

6.2.1.3.4.

⎕უ㕤ᕈ୯⸘▚

... 99

6.2.2.

⹏ଔ⚿ᨐ

... 100

6.2.2.1.

ᒁᒛ․ᕈ... 100

6.2.2.2.

⴫㕙᭽⋧... 100

6.2.2.3.

⎕㕙᭽⋧... 101

6.2.2.4.

⎕უ㕤ᕈ୯... 101

6.3.

⎕უ⿠ὐ䈫䈭䉎ᰳ㒱ኸᴺ䈫ේሶ⁁㉄⚛䊐䊦䉣䊮䉴䈱㑐ଥ

... 103

6.3.1.

䊚䊤䊷ㇱኸᴺ䈫ේሶ⁁㉄⚛䊐䊦䉣䊮䉴䈱㑐ଥ

... 103

6.3.2. Undercut cavity

ኸᴺ䈫ේሶ⁁㉄⚛䊐䊦䉣䊮䉴䈱㑐ଥ

... 107

(6)

6.4.1.

⎕უജቇ䈮ၮ䈨䈒ᒁᒛᒝ䈘▚಴ᚻ㗅

... 108

6.4.1.1. Flight-PI

䇮

AO-PI

䈱ᒁᒛᒝ䈘▚಴ᚻ㗅

... 108

6.4.1.2. AO-ITO/PI

䈱ᒁᒛᒝ䈘▚಴ᚻ㗅...111

6.4.2.

⎕უജቇ⊛ᚻᴺ䈱᦭ലᕈ...116

6.5.

੹ᓟ䈱ዷ㐿

...118

6.6.

⚿⸒

...119

7. ✚᜝...121

APPENDIX...124

1.

ᄢ᳇ኒᐲ䈱㜞ᐲ䈫ᄥ㓁ᵴേ䈮䉋䉎ᄌൻ

... 124

2.

ᄢ᳇᷷ᐲ䈱㜞ᐲᄌൻ

... 125

3.

ේሶ⁁㉄⚛౉኿ⷺ䈫䊐䊤䉾䉪䉴䈱㑐ଥ

... 126

4.

䉲䊞䊃䊦䉫䊨䊷

... 127

5.

ේሶ⁁㉄⚛䈫㜞ಽሶ᧚ᢱ䈱෻ᔕ⚻〝... 128

6.

ฦ⒳㜞ಽሶ᧚ᢱ䈱෻ᔕല₸

Ey... 129

7.

䊘䊥䉟䊚䊄䈮䈍䈔䉎ේሶ⁁㉄⚛䈱౉኿ⷺ䈫෻ᔕല₸

Ey

䈱㑐ଥ

... 130

8.

䊘䊥䉟䊚䊄䈮䈍䈔䉎ේሶ⁁㉄⚛䈱䉣䊈䊦䉩䊷෸䈶䉰䊮䊒䊦᷷ᐲ䈫෻ᔕല₸

Ey

䈱㑐ଥ

... 131

9. AM0

෸䈶࿾਄䈮䈍䈔䉎ᄥ㓁శ䉴䊕䉪䊃䊦ಽᏓ䈱Ყセ... 132

10.UV

䈫㜞ಽሶ᧚ᢱ䈱෻ᔕ

... 133

11.

㜞ಽሶ᧚ᢱ䈱⚿วಽ⸃䉣䊈䊦䉩䊷䈫శ䈱ᵄ㐳䈱㑐ଥ

... 134

12.UV

䈮䉋䉎ഠൻ䈱࿁ᓳ

... 135

13.

৻ᰴቝቮ✢䋨䊋䊮䉝䊧䊮Ꮺ䇮㌁ᴡቝቮ✢䇮ᄥ㓁ቝቮ✢䋩

... 136

14.

ฦ⒳㜞ಽሶ᧚ᢱ䈱⠴᡼኿✢ᕈ... 139

15.

᡼኿✢ഠൻ䈮ኻ䈜䉎᷷ᐲ䈱ᓇ㗀

... 141

16.

᡼኿✢ഠൻ䈮ኻ䈜䉎✢⾰䈱ᓇ㗀

... 142

17.

㉄⚛ⅣႺ䈮䈍䈔䉎᡼኿✢ഠൻ... 143

18.

᡼኿✢䈮䉋䉎ഠൻ䈱࿁ᓳ... 144

19.

ๆ෼✢㊂䈱੍᷹

... 145

20. 4

ᨎⓍጀ෸䈶නጀ䊘䊥䉟䊚䊄䊐䉞䊦䊛䈱ᔕജ–䈵䈝䉂ᦛ✢

... 146

21.

ᭂ୯⛔⸘䉕↪䈇䈢ᦨᄢೋᦼ䉪䊤䉾䉪㐳䈘

a0max

䈱▚಴ᚻ㗅

... 147

22.

䊘䊥䊙䊷䉝䉾䉲䊠㒰෰೨ᓟ䈮䈍䈔䉎ේሶ⁁㉄⚛ᾖ኿㕙䈱Ყセ... 149

23.

ቝቮⅣႺᦑ㔺ਛ෸䈶ේሶ⁁㉄⚛ᾖ኿⹜㛎ਛ䈮䈍䈔䉎ᒁᒛᔕജ䈱ᄌൻ

... 150

24.Undercut cavity

᏷

Wuc

䈱Ⴧട䈮઻䈉䉮䊷䊁䉞䊮䉫ઃ

UPILEX-S

䈱ᒁᒛᒝ䈘੍᷹✢䈱ᄌൻ

... 151

REFERENCES...152

(7)

* ᐔᚑ22ᐕ11᦬4ᣣฃઃ (Received 4 November 2010)

*1⎇ⓥ㐿⊒ᧄㇱ㔚ሶㇱຠ࡮࠺ࡃࠗࠬ࡮᧚ᢱࠣ࡞࡯ࡊ

Electronic Devices and Materials Group, Aerospace Research and Development Directorate

*2

ർᶏ㆏ᄢቇᄢቇ㒮Ꮏቇ⎇ⓥ⑼㩷 ᯏ᪾ቝቮᎿቇኾ᡹

ፉ᧛㩷 ብਯ^*1䇮ਛ᧛㩷 ቁ^*2

Mechanical Properties Degradation and its Prediction Methods of Polyimide Films Exposed to Space Environment^䋪

Hiroyuki SHIMAMURA^*1 and Takashi NAKAMURA^*2

Abstract

The mechanical properties of polyimide (PI) films, which were exposed to the space environment in the SM/SEED (Service Module/Space Environment Exposure Device) experiment, were evaluated with tensile tests.

Additionally, PI films irradiated by atomic oxygen (AO), ultraviolet, and electron beam using ground facilities were similarly evaluated. Through comparison of these PI films’ results, it was revealed that AO was the main space environmental factor degrading the mechanical properties of the PI films. Tensile strength and elongation of the PI films reduced concomitantly with increased AO fluence (F_AO). The PI films expressed rough surfaces because of AO erosion and ruptured from the rough surfaces. In addition, their surface roughness increased as the F_AO increased. These facts suggest that the degradation of mechanical properties is attributable to the increase in surface roughness. The mechanical properties of ITO (Indium Tin Oxide)-coated PI films (ITO/PI films) irradiated by AO were also evaluated. Generally, ITO/PI films have a high durability to AO erosion because ITO coating blocks AO.

Therefore, ITO/PI film surfaces remain smooth even after AO irradiation. Tensile strength and elongation of the ITO/PI films, however, reduced with F_AO increasing, marking higher degradation than the case of non-coated PI films. The AO-irradiated ITO/PI films have many undercut cavities at defect sites of their ITO coatings and ruptured from the undercut cavities. The undercut cavity developed as F_AO increased, leading to significant degradation of the mechanical properties. The relationship between F_AO and tensile strength in PI and ITO/PI films was predicted with fracture mechanics. The predicted results almost corresponded with the experimental results.

The evaluation indicated that fracture mechanics is an effective approach for strength deterioration analysis of PI films exposed to the space environment.

᭎ⷐ㩷

SM/SEED

䋨

Service Module/Space Environment Exposure Device

䋩ታ㛎䈮䉋䉍ታቝቮⅣႺ䈮ᦑ㔺䈚䈢䊘䊥䉟䊚䊄䋨

PI: Polyimide

䋩䊐䉞䊦䊛䈱ᯏ᪾․ᕈ䉕ᒁᒛ⹜㛎䈮䉋䉍⹏ଔ䈚䈢䇯䉁䈢䇮࿾਄⸳஻䉕↪䈇䈩ේሶ⁁㉄⚛䋨

AO:

Atomic Oxygen

䋩䇮⚡ᄖ✢䇮㔚ሶ✢䉕ᾖ኿䈚䈢

PI

䊐䉞䊦䊛䈮䈧䈇䈩䉅ห᭽䈱⹏ଔ䉕ⴕ䈦䈢䇯䈖䉏䉌⹏ଔ⚿ᨐ䈱Ყ セ䈎䉌䇮

PI

䊐䉞䊦䊛䈱ᒁᒛᒝ䈘䊶િ䈶䈮ᓇ㗀䉕ਈ䈋䉎ቝቮⅣႺ࿃ሶ䈲

AO

䈪䈅䉍䇮

AO

䊐䊦䉣䊮䉴䋨

F_AO

䋩䈱Ⴧട䈮

઻䈇

PI

䊐䉞䊦䊛䈱ᒁᒛᒝ䈘䊶િ䈶䈲ૐਅ䈜䉎䈖䈫䈏᣿䉌䈎䈫䈭䈦䈢䇯䈖䈱⚿ᨐ䈲䇮

AO

䈱ᶐ㘩䈮䉋䉍ᒻᚑ䈘䉏䈢☻䈇

㕙䈏⎕უ䈱⿠ὐ䈫䈭䉍䇮

F_AO

䈱Ⴧട䈮઻䈇䈠䈱⴫㕙☻䈘䈏ᄢ䈐䈒䈭䉎䈢䉄䈣䈫⠨䈋䉌䉏䉎䇯䈘䉌䈮䇮ᧄ⎇ⓥ䈪䈲䇮

(8)

AO

䈮ኻ䈜䉎⠴ᕈ䈱㜞䈇

ITO

䋨

Indium Tin Oxide

䋩䉮䊷䊁䉞䊮䉫ઃ

PI

䊐䉞䊦䊛䋨

ITO/PI

䊐䉞䊦䊛䋩䈮ኻ䈚䈩䉅ห᭽䈱

⹏ଔ䉕ታᣉ䈚䈢䇯

ITO

䉮䊷䊁䉞䊮䉫䈏

AO

䉕䊑䊨䉾䉪䈜䉎䈖䈫䈮䉋䉍䇮

ITO/PI

䊐䉞䊦䊛⴫㕙䈪䈲

AO

䈮䉋䉎ᶐ㘩䈏↢

䈛䈭䈇䇯䈠䈱䈢䉄䇮

AO

ᾖ኿ᓟ䈮䈍䈇䈩䉅䇮

ITO/PI

䊐䉞䊦䊛䈲ᐔမ䈭㕙䉕⛽ᜬ䈚䈩䈇䉎䇯䈚䈎䈚䇮

ITO/PI

䊐䉞䊦䊛䈱 ᒁᒛᒝ䈘䊶િ䈶䈲

F_AO

䈱Ⴧട䈮઻䈇ૐਅ䈚䇮䈠䈱ૐਅ䈱⒟ᐲ䈲䉮䊷䊁䉞䊮䉫䈱䈭䈇

PI

䊐䉞䊦䊛䈫Ყセ䈚䈩ᄢ䈐䈎䈦䈢䇯䈖䉏䈲䇮

ITO

䉮䊷䊁䉞䊮䉫䈱ᰳ㒱ㇱ䈮ᒻᚑ䈘䉏䈢

Undercut cavity

䈏⎕უ䈱⿠ὐ䈫䈚䈩૞↪䈚䇮䈠䈱ᷓ䈘䈏

F_AO

䈱Ⴧട䈮઻䈇ᄢ䈐䈒䈭䉎䈖䈫䈏ේ࿃䈣䈫⠨䈋䉌䉏䉎䇯⎕უജቇ䉕↪䈇䈩䇮

PI

䊐䉞䊦䊛෸䈶

ITO/PI

䊐䉞䊦䊛䈮䈍䈔䉎 ᒁᒛᒝ䈘䈱ૐਅ䈫

F_AO

䈱㑐ଥ䉕੍᷹䈚䈢䈫䈖䉐䇮੍᷹⚿ᨐ䈲ታ㛎୯䈫䈾䈿৻⥌䈚䈢䇯䈜䈭䉒䈤䇮

PI

䊐䉞䊦䊛䈱ቝቮ

ⅣႺᦑ㔺䈮䉋䉎ᒝᐲഠൻ⹏ଔ䈮ኻ䈜䉎⎕უജቇ⊛ᚻᴺ䈱᦭ലᕈ䈏␜䈘䉏䈢䇯

Keywords: SM/MPAC&SEED

䇮ේሶ⁁㉄⚛䇮䊘䊥䉟䊚䊄䊐䉞䊦䊛䇮ᯏ᪾․ᕈ䇮⎕უജቇ

(9)

Nomenclature

U^density,^g/cm²

UK density of Kapton H, 1.42 g/cm²

'd_AO average erosion depth by atomic oxygen, m 'l crosshead travel distance, mm

'm mass loss, g

'm_K mass loss of Kapton H, g

't_AO thickness loss by atomic oxygen erosion, m 2W specimen width, mm

2a_m width of mirror region, m A exposure area, cm²

A_K exposure area of Kapton H, cm²

A_d defect area, m²

A_m area of mirror region, m²

A_uc area of undercut cavity, m² C constant

E_y erosion yield, cm³/atom

E_yK erosion yield of Kapton H, 3.0E-24 cm³/atom

F tensile load, N

F_AO atomic oxygen fluence, atoms/cm² F_UV ultraviolet fluence, ESD

G strain energy release rate, J/m² (crack extension force, N/m) G_c crack extension resistance, N/m

K stress intensity factor, MPam^1/2

K_I the mode I stress intensity factor, MPam^1/2

K_{I max} the mode I maximum stress intensity factor, MPam^1/2 K_c fracture toughness, MPam^1/2

L predicted length, m

R crack extension resistance, N/m RSm mean width of the roughness profile elements, m Ra arithmetic mean deviation of the roughness profile, m Rp_i maximum peak height in sampling length, m

Rpm mean peak height of the roughness profile, m Rv maximum valley depth of the roughness profile, m Rv_i maximum valley depth in sampling length, m Rvm mean valley depth of the roughness profile, m

T return period

TD total dose, kGy

(10)

T_g glass transition temperature, °C W_uc width of undercut cavity, m

Xs_i width of the roughness profile elements, m

a crack length

a₀ initial crack length, m

a_0max maximum initial crack length, m b_m depth of mirror region, m

d_uc depth of undercut cavity, m f(x) deviation from mean line, m

h Planck's constant, 6.626E-34 Js

h_c cone height, m

l₀ gauge length, mm

ln evaluation length, m

lr sampling length, m

m Weibull modulus

r_m radius of mirror region, m

t specimen thickness, m

t thickness t₀ initial specimen thickness, m

t_AO thickness of AO-PI, m

t_EB thickness loss of EB-PI, m t_Flight thickness of Flight-PI, m

t_UV thickness of UV-PI, m

x X-axial distance, m

y reduced variate

I eccentric angle of semi-elliptical crack, °

_S solar absorptance

surface energy, J/m²

infrared emittance

strain, %

_N normal infrared emittance wavelength

Poisson's ratio

light frequency, s^-1

stress, MPa

_B breaking strength, MPa diameter

(11)

Abbreviation ADEOS Advanced Earth Observing Satellite ADEOS-II Advanced Earth Observing Satellite-II

ADXPS Angle-Dependent X-ray Photoelectron Spectroscopy

AFM Atomic Force Microscope

AM0 Air Mass 0

AO Atomic Oxygen

ASTM American Society for Testing and Materials CME Coronal Mass Ejection

CTA Cellulose triacetate

CVCM Collected Volatile Condensable Material

EB Electron Beam

EPMA Electron Probe Micro-Analysis

ESD Equivalent solar days, 1 ESD=1.02E7 J/m² (=200–400 nm) EWF Essential Work of Fracture

F-OSR Flexible Optical Solar Reflector GEO Geostationary Earth Orbit

ISS International Space Station

ITO Indium Tin Oxide

JAXA Japan Aerospace Exploration Agency JIS Japanese Industrial Standards LDEF Long Duration Exposure Facility LEO Low Earth Orbit

MD Machine direction

MISSE 2 Materials International Space Station Experiment 2

MLI Multi-Layer Insulation

NUV Near Ultraviolet

PEEK Poly-ether-ether-ketone PES Polyethersulfone PI Polyimide QCM Quartz Crystal Microbalance RF Radio-frequency

RH Relative humidity

SAA South Atlantic Anomaly

SEES Space Environment and Effects System

SEM Scanning Electron Microscope

SM Service Module

SM/MPAC&SEED Service Module/Micro-Particles Capturer and Space Environment Exposure Device

(12)

TD Transverse direction TEM Transmission Electron Microscope

TML Total Mass Loss

UV Ultraviolet

VUV Vacuum Ultraviolet

X-ETFE Cross-linked ethylene-tetrafluoroethylene XPS X-ray Photoelectron Spectroscopy

(13)

㪈㪅 ᐨ⺰㩷㪈㪅㪈㪅䈲䈛䉄䈮㩷

ੱᎿⴡᤊ䇮ቝቮ䉴䊁䊷䉲䊢䊮╬䇮㐳ᦼ䈮ਗ਼䉍ቝቮⓨ㑆䉕゠㆏㘧ⴕ䈜䉎ੱᎿ᭴ㅧ‛䉕✚⒓䈚䈩ቝቮᯏ䈫䈇䈉䇯ో

䈩䈱ቝቮᯏ䈲ቝቮャㅍᯏ䋨䊨䉬䉾䊃䇮䉴䊕䊷䉴䉲䊞䊃䊦╬䋩䈮៞タ䈘䉏䇮ᛂ䈤਄䈕䉌䉏䉎䇯䈜䈭䉒䈤䇮ቝቮᯏ䈱⸳⸘

਄䇮䈠䈱㊀㊂䈏ቝቮャㅍᯏ䈱ᛂ䈤਄䈕⢻ജౝ䈮෼䉁䉎䈖䈫䈏⛘ኻ᧦ઙ䈫䈭䉎䇯䉋䈦䈩䇮ቝቮᯏ↪᧚ᢱ䈲䉁䈝シ㊂䈪䈅䉎䈖䈫䈏ⷐ᳞䈘䉏䇮ട䈋䈩↪ㅜ䈮ᔕ䈛䈢᭽䇱䈭․ᕈ䈏ᔅⷐ䈫䈭䉎䇯

㊄ዻ䉇䉶䊤䊚䉾䉪䉴䈫Ყセ䈚䈩䇮㜞ಽሶ᧚ᢱ䈲シ㊂䈪䈅䉎䇯䈘䉌䈮䇮㜞ಽሶ᧚ᢱ䈲ᚑᒻടᎿᕈ䈏㜞䈒䇮㜞ᢿᾲ䇮㜞⛘✼䇮㜞㕤ᕈ╬䈱ఝ䉏䈢․ᕈ䉕᦭䈚䈩䈇䉎䇯䈠䈱䈢䉄䇮ቝቮᯏ䈮䈲❫⛽ᒝൻⶄว᧚䇮ធ⌕೷䇮ᾲ೙ᓮ᧚䇮ⵍ ⷒ೷䇮Ⴃᢱ䈭䈬䇮ᐢ▸࿐䈮䉒䈢䉍㜞ಽሶ᧚ᢱ䈏↪䈇䉌䉏䈩䈇䉎

[1–6]

䇯ઍ⴫⊛䈭ቝቮᯏ↪㜞ಽሶ᧚ᢱ䈫䈚䈩䊘䊥䉟䊚䊄䋨

PI: Polyimide

䋩䈏᜼䈕䉌䉏䉎䇯

PI

䈲㜞ಽሶ᧚ᢱ䈱ਛ䈪䉅․䈮⠴ᾲᕈ䇮⠴ቝቮⅣႺᕈ䇮Ყᒝᐲ䇮ኸᴺ቟ቯᕈ 䈮ఝ䉏䇮ਥ䈮⤑᧚䋨䊐䉞䊦䊛䇮䉲䊷䊃䋩䈫䈚䈩૶↪䈘䉏䉎䇯

PI

䊐䉞䊦䊛䈲䇮ቝቮⅣႺ䈮⋥ធᦑ㔺䈘䉏䉎ᾲ೙ᓮ᧚䈮ㆡ

↪䈘䉏䉎ઁ䇮ቝቮⓨ㑆䈪િዷ䊶ዷ㐿䈜䉎ቝቮ⤑᭴ㅧ‛䋨䊐䊧䉨䉲䊑䊦ᄥ㓁㔚ᳰ䊌䊄䊦䇮ᄢဳ䉝䊮䊁䊅䇮䉸䊷䊤䊷䉶䉟䊦䇮䉰䊮䉲䉢䊷䊄╬䋩䈻Ⓧᭂ⊛䈮ᵴ↪䈘䉏䈩䈇䉎

[4–8]

䇯

ቝቮⓨ㑆䈮䈲䇮⚡ᄖ✢䋨

UV: Ultraviolet

䋩䇮᡼኿✢䇮ᾲ䉰䉟䉪䊦䊶ᾲ⽶⩄䇮㜞⌀ⓨ╬䇮㜞ಽሶ᧚ᢱ䈱ᕈ⢻䉕ૐਅ 䈘䈞䉎ᄙ䈒䈱ⅣႺ࿃ሶ䈏ሽ࿷䈜䉎

[1–8]

䇯䉁䈢䇮㜞ᐲ

200–600 km

䈱ૐ࿾⃿゠㆏䋨

LEO: Low Earth Orbit

䋩ⅣႺ䈪䈲䇮

ේሶ⁁㉄⚛䋨

AO: Atomic Oxygen

䋩䉅㜞ಽሶ᧚ᢱ䈱ᕈ⢻䉕⪺䈚䈒ഠൻ䈘䈞䉎ⅣႺ࿃ሶ䈫䈚䈩⠨ᘦ䈜䉎ᔅⷐ䈏䈅䉎䇯

⴫

1-1

䈮ቝቮⅣႺ࿃ሶ䈫㜞ಽሶ᧚ᢱ䈱ഠൻ䈮䈧䈇䈩䉁䈫䉄䉎

[6, 8]

䇯ା㗬ᕈ䈱㜞䈇ቝቮᯏ䉕⸳⸘䈜䉎䈮䈲䇮ฦቝ ቮⅣႺ࿃ሶ䈏㜞ಽሶ᧚ᢱ䈮ਈ䈋䉎ᓇ㗀䈮䈧䈇䈩චಽ䈮ℂ⸃䈚䇮䊚䉾䉲䊢䊮ᦼ㑆䈮䈍䈔䉎ᕈ⢻ഠൻ䈱⒟ᐲ䉕ᱜ⏕

䈮⷗Ⓧ䉅䉎ᔅⷐ䈏䈅䉎䇯

ᧄ┨䈪䈲䇮ቝቮⅣႺ࿃ሶ䈮䉋䉎㜞ಽሶ᧚ᢱ䈱ഠൻ䈮䈧䈇䈩᭎ⷐ䉕ㅀ䈼䉎䇯䉁䈢䇮ઍ⴫⊛䈭ቝቮᯏ↪㜞ಽሶ

᧚ᢱ䈪䈅䉎

PI

䊐䉞䊦䊛䈱․ᕈ䉕䉁䈫䉄䉎䇯䈠䈚䈩䇮

PI

䊐䉞䊦䊛䈱ᾲ೙ᓮ᧚෸䈶ቝቮ⤑᭴ㅧ‛᭴ㅧ᧚䈻䈱ㆡ↪䈮䈧䈇䈩⺑᣿䈜䉎䈫౒䈮䇮ቝቮ⤑᭴ㅧ‛᭴ㅧ᧚䈻䈱ㆡ↪䈮䈧䈇䈩䈲⺖㗴䉕ᜰ៰䈜䉎䇯ᦨᓟ䈮䇮ᧄ⎇ⓥ䈱⋡⊛෸䈶 ᧄ⺰ᢥ䈱᭴ᚑ䉕␜䈜䇯

⴫

1-1

ቝቮⅣႺ࿃ሶ䈫㜞ಽሶ᧚ᢱഠൻ

[6, 8]

ቝቮⅣႺ࿃ሶ 㜞ಽሶ᧚ᢱഠൻ

ේሶ⁁㉄⚛ ㉄ൻಽ⸃

ᶐ㘩

⾰㊂ᷫዋ䇮⴫㕙ᒻᘒᄌൻ䇮ᄌ⦡

⚡ᄖ✢ ಽ⸃

ૐಽሶൻ䇮᨞ᯅ

ᄌ⦡䇮⣀ൻ

᡼኿✢ ಽ⸃

ૐಽሶൻ䇮᨞ᯅ

ᄌ⦡䇮⣀ൻ

ᾲ䉰䉟䉪䊦䊶ᾲ⽶⩄

ૐ᷷㸢⣀ൻ 㜞᷷㸢エൻ

ᾲ䈵䈝䉂

ᒻ⁁ᄌൻ䇮䉪䊤䉾䉪䇮೸㔌

㜞⌀ⓨ ᷝട‛䈱ើ⊒

⣀ൻ

䉝䉡䊃䉧䉴䈱᡼಴

䉮䊮䉺䊚䊈䊷䉲䊢䊮䈱ઃ⌕

ᄌ⦡䇮

AO

଻⼔ጀ

(14)

㪈㪅㪉㪅 ቝቮⅣႺ࿃ሶ䈮䉋䉎㜞ಽሶ᧚ᢱ䈱ഠൻ㩷㪈㪅㪉㪅㪈㪅 ේሶ⁁㉄⚛㩷

㪈㪅㪉㪅㪈㪅㪈㪅 ේሶ⁁㉄⚛ⅣႺ㪲㪐㵨㪉㪋㪴㩷

AO

䈲䇮ᄢ᳇ਛ䈱㉄⚛ಽሶ䋨

O₂

䋩䈏ᄥ㓁䈎䉌᡼኿䈘䉏䉎㜞䉣䊈䊦䉩䊷䈱

UV

䈮䉋䉍శ⸃㔌䈜䉎䈖䈫䈪↢ᚑ䈜䉎䇯

O

O h

O2 Qo

䋨

1-1

䋩

䈖䈖䈪䇮

h

䈲䊒䊤䊮䉪ቯᢙ䋨

6.626E-34 Js

䋩䇮

䈲శ䈱ᝄേᢙ䋨

s^-1

䋩䈪䈅䉍䇮

h

䈲

UV

䈱䉣䊈䊦䉩䊷䉕⴫䈜䇯

O₂

䈱⸃㔌䉣䊈䊦䉩䊷䈲

5.12 eV

䈪䈅䉎䈎䉌䇮ᵄ㐳

243 nm

એਅ䈱

UV

䈮䉋䉍

O₂

䈲

AO

䈮ಽ⸃䈜䉎

[14, 20, 22, 23]

䇯

LEO

Ⅳ Ⴚ䈮䈍䈇䈩䇮䈾䈫䉖䈬䈱

AO

䈲ၮᐩ⁁ᘒ䋨

³P

䋩䈪䈅䉎

[14, 23]

䇯

LEO

䈮䈍䈔䉎☸ሶ䈱ᐔဋ⥄↱ⴕ⒟䈲⚂

10⁸ m

䈫㕖 Ᏹ䈮ᄢ䈐䈇䈢䉄䇮

AO

䈏ౣ⚿ว䈚

O₂

䉕↢ᚑ䈜䉎⏕₸䇮䉁䈢䇮

AO

䈫

O₂

䈏⚿ว䈚䉥䉹䊮䋨

O₃

䋩䉕↢ᚑ䈜䉎⏕₸䈲ૐ䈇䈫⠨䈋䉌䉏䉎

[14, 23]

䇯䈭䈍䇮ᄢ᳇ᚑಽ䈮㉄⚛䉕฽䉃Ἣᤊ䇮㊄ᤊ╬䈱ⅣႺ䈮䈍䈇䈩䉅

AO

䈲↢ᚑ䈘䉏䉎

[25–27]

䇯

㜞ᐲ

200–600 km

䈱

LEO

ⅣႺ䈪䈲䇮

AO

䈏ᄢ᳇䈱ਥᚑಽ䈪䈅䉎䋨࿑

1-1

䋩䋨

Appendix 1.

䋩

[19]

䇯

AO

䈲

LEO

ⅣႺ 䈮䈍䈔䉎ᄢ᳇䈱⚂

80%

䉕භ䉄䉎䈏䇮䈠䈱ኒᐲ䈲

10⁷–10⁹ atoms/cm³

⒟ᐲ䈪䈅䉎䇯䈚䈎䈚䇮ቝቮᯏ䈲䈖䈱Ꮧ⭯䈭

AO

䈱ਛ䉕㜞ㅦ䋨⚂

8 km/s

䋩䈪๟࿁䈜䉎䈢䉄䇮ቝቮᯏ䈱ㅴⴕᣇะ䈮ኻ䈚䈩ု⋥䈭㕙䋨

RAM

㕙䋩䈮䈲

10¹³–10¹⁵ atoms/cm²·s

䈱

AO

䈏ⴣ⓭䈜䉎䇯

RAM

㕙䈮ⴣ⓭䈜䉎න૏ᤨ㑆ᒰ䈢䉍䈱

AO

䈱☸ሶᢙ䋨

10¹³–10¹⁵ atoms/cm²

䋩䈲䇮

࿕૕⴫㕙䈱ේሶኒᐲ䈮඘ᢜ䈜䉎୯䈪䈅䉎䇯

AO

䈱ኒᐲ䇮䊐䊤䉾䉪䉴䈱㜞ᐲ䈫ᄥ㓁ᵴേ䈮䉋䉎ᄌൻ䉕࿑

1-2

䈮␜䈜

[19]

䇯ᄥ㓁ᵴേ䈲

AO

䈱ኒᐲ෸䈶䊐䊤䉾䉪䉴䈮ᒝ䈒ᓇ㗀䈜䉎䇯ᄥ㓁ᵴേ䈱ᭂᄢᦼ䈫ᭂዊᦼ䈪䈲䇮

LEO

ⅣႺ䈮䈍䈔䉎

AO

䈱ኒᐲ䈲

1–3

ᩴᄌേ䈜䉎䇯䉁䈢䇮

11

ᐕ๟ᦼ䈱ᄥ㓁ᵴേ䈱ᄌേ䈮઻䈇䇮

AO

䈱ኒᐲ䈲Ⴧട䊶ᷫዋ䈱๟ᦼ䉕

␜䈜䇯

LEO

ⅣႺ䈮䈍䈔䉎

AO

䈱᷷ᐲ䈲⚂

1000 K

䈪䈅䉎䋨

Appendix 2.

䋩䇯䈖䈱䈫䈐䈱

AO

䈱ᾲㆇേ䉣䊈䊦䉩䊷䈲⚂

0.1 eV

䈪䈅䉍䇮䊙䉪䉴䉡䉢䊦䊶䊗䊦䉿䊙䊮ಽᏓ䈮ᓥ䈉

[14, 23]

䇯ቝቮᯏ䈫

AO

䈱⋧ኻㅦᐲ䈏⚂

8 km/s

䈪䈅䉎႐ว䇮䈖䈱ᾲ ㆇേ䈮䉋䉍䇮

AO

䈱ⴣ⓭䉣䊈䊦䉩䊷䈲⚂

5 eV

䉕䊏䊷䉪䈫䈚䈢ಽᏓ䉕᦭䈜䉎䋨࿑

1-3

䋩

[19]

䇯䉁䈢䇮

AO

䈱౉኿ⷺ䈏ቝ ቮᯏ䈱ㅴⴕᣇะ䈮ኻ䈚䈩

90 °

એ਄䈅䉎႐ว䈮䈍䈇䈩䉅䇮

AO

䈱ᾲㆇേ䈮䉋䉍ቝቮᯏ䈫

AO

䈱ⴣ⓭䈏↢䈛䉎䋨

Appendix 3.

䋩䇯

࿑

1-1

ฦ⒳ᄢ᳇ᚑಽኒᐲ䈱㜞ᐲᄌൻ

[19]

(15)

࿑

1-2 AO

䈱ኒᐲ෸䈶䊐䊤䉾䉪䉴䈱㜞ᐲ䈫ᄥ㓁ᵴേ䈮䉋䉎ᄌൻ

[19]

࿑

1-3

㜞ᐲ

400 km

䈮䈍䈔䉎

AO

䈱䉣䊈䊦䉩䊷ಽᏓ

[19]

㪈㪅㪉㪅㪈㪅㪉㪅 ේሶ⁁㉄⚛䈮䉋䉎㜞ಽሶ᧚ᢱ䈱ഠൻ㪲㪈㪈㵨㪉㪋㪃㩷㪉㪏㵨㪊㪈㪴㩷

AO

䈮䉋䉎㜞ಽሶ᧚ᢱ䈱ഠൻ䈲䇮

LEO

ⅣႺ䈮⋥ធᦑ㔺䈚䈢㜞ಽሶ᧚ᢱ䉕䉴䊕䊷䉴䉲䊞䊃䊦䈮䉋䉍࿁෼䈜䉎䈖䈫䈏น⢻䈫䈭䈦䈢䈖䈫䈪㗼࿷ൻ䈚䈢

[32]

䇯䈠䉏એ㒠䇮⒳䇱䈱㜞ಽሶ᧚ᢱ䈮ኻ䈚䇮䉴䊕䊷䉴䉲䊞䊃䊦䉇࿖㓙ቝቮ䉴䊁䊷䉲䊢䊮䋨

ISS: International Space Station

䋩䉕೑↪䈚䈢゠㆏਄᧚ᢱᦑ㔺ታ㛎䉇࿾਄⸳஻䉕↪䈇䈢

AO

ᾖ኿⹜㛎䈏ታ ᣉ䈘䉏䇮

AO

䈮䉋䉎㜞ಽሶ᧚ᢱ䈱ഠൻ䈮䈧䈇䈩⋓䉖䈮⎇ⓥ䈘䉏䈩䈇䉎䇯

⚂

5 eV

䈱䉣䊈䊦䉩䊷䉕᦭䈜䉎

AO

䈲䇮㜞ಽሶ᧚ᢱ⴫㕙䈮䈍䈇䈩᭽䇱䈭ൻቇ⊛෸䈶‛ℂ⊛⃻⽎䉕ᒁ⿠䈜䋨࿑

1-4

䋩

[28]

䇯ਥⷐ䈭⃻⽎䈫䈚䈩䇸䉲䊞䊃䊦䉫䊨䊷䇹䈫䇸ᶐ㘩䇹䈏᜼䈕䉌䉏䉎䇯䉲䊞䊃䊦䉫䊨䊷䈮䈧䈇䈩䈲䇮

Appendix 4.

䉕ෳ

ᾖ䈘䉏䈢䈇䇯એਅ䇮

AO

䈮䉋䉎㜞ಽሶ᧚ᢱ䈱ᶐ㘩䈮䈧䈇䈩⺑᣿䈜䉎䇯

AO

䈱ⴣ⓭䉣䊈䊦䉩䊷䋨⚂

5 eV

䋩䈲䇮‛ℂ⊛䈭䉴䊌䉾䉺䊥䊮䉫䈱䈚䈐䈇୯䋨⚂

40 eV

䋩䉋䉍ዊ䈘䈇䇯䈜䈭䉒䈤䇮

AO

䈮

䉋䉎ᶐ㘩䈲න䈭䉎‛ℂ⊛䈭䉴䊌䉾䉺䊥䊮䉫䈮䉋䉎䉅䈱䈪䈲䈭䈇䇯

AO

䈫㜞ಽሶ᧚ᢱ䈏ⴣ⓭䈜䉎䈫䇮㜞ಽሶ὇ൻ᳓⚛

(16)

㎮䈏㉄ൻ䊶ಽ⸃䈘䉏䇮ᦨ⚳⊛䈮ើ⊒ᕈ䈱ಽ⸃↢ᚑ‛䈏↢䈛䉎䋨

Appendix 5.

䋩䇯䈠䈱⚿ᨐ䇮㜞ಽሶ᧚ᢱ䈲ᶐ㘩䈘䉏䇮

⾰㊂ᷫዋ䈏↢䈛䉎䇯

AO

䈱ᶐ㘩䈮䉋䉎㜞ಽሶ᧚ᢱ䈱⾰㊂ᄌൻ䈮㑐䈜䉎↰Ꮉ䉌䈱⚿ᨐ䉕࿑

1-5

䈮␜䈜

[33–35]

䇯↰Ꮉ䉌䈲᳓᥏ᝄേሶ 䋨

QCM: Quartz Crystal Microbalance

䋩䈮ႣᏓ䈚䈢

PI

䈮ኻ䈚䈩

AO

ᾖ኿䉕ⴕ䈇䇮

QCM

䈱๟ᵄᢙᄌൻ䉋䉍

PI

䈱⾰㊂ ᄌൻ䉕⸘᷹䈚䈢䇯

QCM

䈱๟ᵄᢙჇട䊶ᷫዋ䈲䇮ႣᏓ䈚䈢

PI

䈱⾰㊂ᷫዋ䊶Ⴧട䈮䈠䉏䈡䉏ኻᔕ䈜䉎䇯࿑

1-5

䈎䉌 ಽ䈎䉎䉋䈉䈮䇮

AO

ᾖ኿⋥ᓟ䈮䈲䇮

PI

⴫㕙䈮㉄⚛䈏ๆ⌕䈜䉎䈖䈫䈮䉋䉎⾰㊂Ⴧട䈏⷗䉌䉏䉎䈏䇮䈠䈱ᓟ䈲㉄ൻ䊶ಽ

⸃䈏ㅴⴕ䈚䇮⾰㊂䈲ᷫዋ䈚⛯䈔䉎䇯䈧䉁䉍䇮

LEO

ⅣႺ䈮ᦑ㔺䈘䉏䈢㜞ಽሶ᧚ᢱ䈱⡺ෘ䈲䇮ᦑ㔺ᦼ㑆䈱Ⴧട䈮઻

䈇ᓢ䇱䈮ዊ䈘䈒䈭䉎䇯䈠䈚䈩䇮ᦨ⚳⊛䈮㜞ಽሶ᧚ᢱ䈲ᶖᄬ䈜䉎䇯⡺ෘᷫዋ䈲⠴⩄㊀䈱ૐਅ䉕ᗧ๧䈚䇮․䈮ቝቮ

⤑᭴ㅧ‛᭴ㅧ᧚䈮૶↪䈜䉎㜞ಽሶ䊐䉞䊦䊛䈪䈲ᄢ䈐䈭໧㗴䈫䈭䉎䇯

AO

䈱ᶐ㘩䈮䉋䉍㜞ಽሶ᧚ᢱ䈱⴫㕙ᒻᘒ䈲ᄢ䈐䈒ᄌൻ䈜䉎䇯

LEO

ⅣႺᦑ㔺ᓟ䈱

PI

෸䈶䊁䊐䊨䊮⴫㕙䈱㔚ሶ㗼 ᓸ㏜䋨

SEM: Scanning Electron Microscope

䋩౮⌀䉕࿑

1-6

䈮␜䈜

[14, 23, 24]

䇯࿑

1-6

䈎䉌ಽ䈎䉎䉋䈉䈮䇮

AO

䈱ᶐ㘩䉕ฃ䈔䈢㜞ಽሶ᧚ᢱ⴫㕙䈮䈲䇮䉮䊷䊮⁁䈱ᓸዊ⓭⿠䈏ήᢙ䈮ᒻᚑ䈘䉏䉎䇯䉮䊷䊮䈱వ┵䈲

AO

䈱౉኿ᣇะ䉕ะ 䈐䇮䈠䈱㜞䈘䈲

AO

䊐䊦䉣䊮䉴䋨

F_AO, atoms/cm²

䋩䈱Ⴧട䈮઻䈇ᄢ䈐䈒䈭䉎䈖䈫䈏䇮゠㆏਄᧚ᢱᦑ㔺ታ㛎䇮࿾਄⸳஻

䈮䉋䉎

AO

ᾖ኿⹜㛎䇮⸘▚䉲䊚䊠䊧䊷䉲䊢䊮╬䈮䉋䉍⏕⹺䈘䉏䈩䈇䉎

[36–39]

䇯䉁䈢䇮䈖䈱䉋䈉䈭⴫㕙ᒻᘒ䈱ᒻᚑ䊜䉦䊆䉵䊛䈮䈧䈇䈩䈲䇮㜞ಽሶ᧚ᢱ⴫㕙䈮䈍䈔䉎᭴ㅧ䉁䈢䈲⚵ᚑ䈱ਇဋ৻ᕈ䈮⿠࿃䈜䉎䈫䈇䈉䊝䊂䊦䈏ឭ᩺䈘䉏䈩䈇䉎

[40]

䇯

AO

䈮䉋䉎⴫㕙ᒻᘒ䈱ᄌൻ䈲䇮㜞ಽሶ᧚ᢱ䈱ᾲశቇ․ᕈ䋨ᄥ㓁శๆ෼₸䋨

_S: Solar absorptance

䋩䇮⿒ᄖ

᡼኿₸䋨

: Infrared emittance

䋩䋩䈮ᒝ䈒ᓇ㗀䈜䉎䇯ቝቮᯏᄖო䈮⾍ઃ䈜䉎ᾲ೙ᓮ᧚䈮ㆡ↪䈘䉏䉎㜞ಽሶ䊐䉞䊦䊛䈮䈫䈦䈩䇮ᾲశቇ․ᕈ䈱ഠൻ䈲㊀ⷐ䈭໧㗴䈫䈭䉎䇯

AO

䈮䉋䉎㉄ൻ䊶ಽ⸃䉕ฃ䈔䉎㗔ၞ䈲ᭂ⴫㕙䈱䉂䈣䈫⠨䈋䉌䉏䈩䈇䉎䇯

AO

ᾖ኿䈚䈢

PI

෸䈶䊘䊥䉴䉼䊧䊮䈮䈧䈇䈩䇮

AO

ᾖ኿㕙䈮ᒻᚑ䈘䉏䈢㉄ൻጀ䉕ⷺᐲଐሽ

X

✢శ㔚ሶಽశ䋨

ADXPS: Angle-Dependent X-ray Photoelectron Spectroscopy

䋩䈮䉋䉍⸘᷹䈚䈢⚿ᨐ䇮㉄ൻጀ䈱ෘ䈘䈲ᢙ

nm

䈪䈅䈦䈢

[22]

䇯䉁䈢䇮

Si

䉡䉢䊊䈮䈧䈇䈩䈲䇮⴫㕙᷷ᐲ 䈏㜞䈒䈭䉎䈾䈬

AO

䈮䉋䉍ᒻᚑ䈘䉏䉎

SiO₂

ጀ䈏ෘ䈒䈭䉎

[41, 42]

䇯䈚䈎䈚䇮

493 K

䈮䈍䈔䉎

SiO₂

ጀ䈱ෘ䈘䈲⚂

2 nm

䈪䈅䉍䇮᧚ᢱ䈏㜞᷷䈪䈅䉎႐ว䈮䈍䈇䈩䉅

AO

䈫䈱෻ᔕ䈲ᭂ⴫㕙䈱䉂䈪↢䈛䉎䇯

䈭䈍䇮㜞ಽሶ᧚ᢱ䈮ⴣ⓭䈚䈢

AO

䈱ో䈩䈏෻ᔕ䈜䉎䉒䈔䈪䈲䈭䈇䇯㜞ಽሶ᧚ᢱ䈮ⴣ⓭䈚䈢

AO

䈱৻ㇱ䈲෻ᔕ 䈞䈝䇮ઁ䈱

AO

䈫⚿ว䈚䈩㉄⚛ಽሶ䉕ᒻᚑ䈜䉎䈎䇮䉁䈢䈲䇮㕖ᒢᕈᢔੂ䈜䉎䇯㜞ಽሶ᧚ᢱ䈲䇮ᢔੂ䈚䈢

AO

䈪䉅 ᶐ㘩䈘䉏䉎䈖䈫䈏ႎ๔䈘䉏䈩䈇䉎

[43]

䇯

AO

䈫᧚ᢱ䈫䈱෻ᔕ₸䉕⴫䈜ᜰᮡ䈫䈚䈩䇮෻ᔕല₸䋨

E_y, cm³/atom

䋩䈏ᐢ䈒↪䈇䉌䉏䈩䈇䉎䇯䈖䈱୯䈲䇮

1

䈧䈱

AO

䈮䉋䉍䉧䉴ൻ䈚䈩ᄬ䉒䉏䉎૕Ⓧ䉕ᗧ๧䈚䈩䈍䉍䇮એਅ䈱ᑼ䈪⴫䈘䉏䉎䇯

AO

y A F

E m U

'

_䋨

_1-2

_䋩

ߎߎߢޔ'mߪ⾰㊂ᷫዋ㊂㧔g㧕ޔAߪᦑ㔺㕙Ⓧ㧔cm²㧕ޔUߪኒᐲ㧔g/cm³㧕ߢ޽ࠆޕ৻⥸ߦޔ゠㆏਄᧚ᢱᦑ

㔺ታ㛎䉁䈢䈲࿾਄⸳஻䉕↪䈇䈢

AO

ᾖ኿⹜㛎೨ᓟ䈪䈱⾰㊂䉕Ყセ䈚䇮⾰㊂ᷫዋ㊂'

m߆ࠄ㧔1-2㧕ᑼࠍ↪޿ߡ E_y߇⸘▚ߐࠇࠆޕฦ⒳㜞ಽሶ᧚ᢱߩE_yࠍAppendix 6.ߦ␜ߔޕ߹ߚޔAO

䈱౉኿ⷺ䇮

AO

䈱䉣䊈䊦䉩䊷䇮䉰䊮䊒䊦᷷ᐲ䈏

PI

䈱

E_y

䈮ਈ䈋䉎ᓇ㗀䈮䈧䈇䈩

Appendix 7.ޔ8.ߦㅀߴࠆޕ

㜞ಽሶ᧚ᢱ䈮⠴

AO

ᕈ䉕ઃਈ䈜䉎ᚻᴺ䈫䈚䈩䈲䇮⴫㕙䈮ήᯏ᧚ᢱ䉕䉮䊷䊁䉞䊮䉫䈜䉎ᚻᴺ

[44–47]

䇮⴫㕙䈮⠴

AO

ᕈ䈱㜞䈇ේሶ䋨

F

䇮

P

╬䋩䉕ዉ౉䈚ᡷ⾰䈜䉎ᚻᴺ

[48, 49]

䇮

AO

䈫෻ᔕ䈜䉎䈖䈫䈮䉋䉍⠴

AO

⤑䉕⴫㕙䈮ᒻᚑ䈜䉎

ේሶ䋨

Si

╬䋩䉕ᷝട䈜䉎ᚻᴺ

[50–54]

䈏᜼䈕䉌䉏䉎䇯䈠䈱ਛ䈪䇮ᦨ䉅㗫❥䈮ㆡ↪䈘䉏䉎ᚻᴺ䈲ήᯏ᧚ᢱ䈱䉮䊷䊁䉞

䊮䉫䈪䈅䉎䇯৻⥸䈮䇮䉴䊌䉾䉺䉁䈢䈲⌀ⓨ⫳⌕䈮䉋䉍䇮

ITO

䋨

ITO: Indium Tin Oxide

䋩䇮

SiO₂

䇮

Ge

䇮

Al

╬䈱䉮䊷䊁䉞䊮

(17)

䉫䋨

t=

ᢙ

10

䌾ᢙ

100 nm

䋩䉕㜞ಽሶ᧚ᢱ⴫㕙䈮ႣᏓ䈜䉎䇯ᦑ㔺㕙䈮ήᯏ᧚ᢱ䉕䉮䊷䊁䉞䊮䉫䈜䉎䈖䈫䈮䉋䉍䇮

E_y

䈲 ᄢ䈐䈒ૐਅ䈜䉎䈏䇮䉮䊷䊁䉞䊮䉫䈱ᰳ㒱ㇱ䋨䉮䊷䊁䉞䊮䉫䈏ᣉ䈘䉏䈩䈇䈭䈇㗔ၞ䋩䈮䈍䈇䈩䈲䇮ਅ࿾䈱㜞ಽሶ᧚ᢱ 䈏

AO

䈱ᶐ㘩䉕ฃ䈔䉎

[55, 56]

䇯䈖䈱⃻⽎䉕

Undercut

䈫๭䈹䇯

Undercut

䈱⸃⺑࿑䉕࿑

1-7

䈮␜䈜

[30]

䇯ᰳ㒱ㇱ䉋䉍 ଚ౉䈚䈢

AO

෸䈶ౝㇱ䈪ᢔੂ䈚䈢

AO

䈮䉋䉍ਅ࿾䈱㜞ಽሶ᧚ᢱ䈲ᶐ㘩䈘䉏䇮ᷓ䈇ⓣ䋨

Undercut cavity

䋩䈏ᒻᚑ䈘䉏䉎䇯

LEO

ⅣႺᦑ㔺ᓟ䈱

Al

䉮䊷䊁䉞䊮䉫ઃ

PI

䊐䉞䊦䊛⴫㕙䈱

SEM

౮⌀䉕࿑

1-8

䈮␜䈜

[14, 23, 24]

䇯ᦑ㔺ᓟ䈮

Al

䉮䊷䊁䉞䊮䉫䉕㒰෰䈚䈢䈫䈖䉐䇮ਅ࿾䈱

PI

䊐䉞䊦䊛䈮䈲ᄙ䈒䈱

Undercut cavity

䈏ᒻᚑ䈘䉏䈩䈇䈢䇯㜞ಽሶ䊐䉞䊦䊛䈪䈲䇮

Undercut cavity

䈏ⵚ䈔䊶⎕ᢿ䈱⿠ὐ䈫䈭䉎䈖䈫䈮䉋䉍䇮ᒝᐲ䈏ᄢ䈐䈒ૐਅ䈜䉎น⢻ᕈ䈏䈅䉎䇯䈘䉌䈮䇮㐳ᦼ 㑆

LEO

ⅣႺ䈮ᦑ䈘䉏䈢႐ว䇮

Undercut cavity

䈲ᓢ䇱䈮ᐢ䈏䉍䇮⎕䉏䊶䉄䈒䉏╬䈱៊்䈏↢䈛䉎䇯࿑

1-9

䈲䇮

ISS

䈱ᄥ㓁㔚ᳰ䊌䊄䊦┵㕙䈮૶↪䈘䉏䈢ਔ㕙

Al

䉮䊷䊁䉞䊮䉫ઃ

PI

䊐䉞䊦䊛䋨

t=25.4 m

䋩䈱ᄖⷰ౮⌀䈪䈅䉎䇯

LEO

Ⅳ Ⴚ䈮⚂

1

ᐕ㑆ᦑ㔺䈘䉏䈢⚿ᨐ䇮

AO

䈱

Undercut

䈮䉋䉍ਔ㕙

Al

䉮䊷䊁䉞䊮䉫ઃ

PI

䊐䉞䊦䊛䈲ỗ䈚䈒⎕៊䈚䈢

[57–59]

䇯

O

N₂ NO2*

NO2

h

O deexcitation

“glow”

CO H2O ROH

O diffusion

RO* -OH ROR’ ROH

࿑

1-4 AO

䈫㜞ಽሶ᧚ᢱ⴫㕙䈱෻ᔕ

[28]

࿑

1-5 AO

ᾖ኿䈮䉋䉎

PI

䈱⾰㊂ᷫዋ

[33–35]

(18)

(a) (b)

࿑

1-6 LEO

ⅣႺ䈮ᦑ㔺䈚䈢䋨

a

䋩

PI

෸䈶䋨

b

䋩䊁䊐䊨䊮⴫㕙䈱

SEM

౮⌀

[14, 23, 24]

O

AO-Resistant Cover or Coating Pinhole Caused

by Defect

Substrate

Cavity Eroded by Multiple AO Entries Nonreactive

Collision

Reactive Collision

࿑

1-7 Undercut

䈱⸃⺑࿑

[30]

࿑

1-8 LEO

ⅣႺ䈮ᦑ㔺䈚䈢

Al

䉮䊷䊁䉞䊮䉫ઃ

PI

䊐䉞䊦䊛⴫㕙䈱

SEM

౮⌀

䋨Ꮐ

: Al

䉮䊷䊁䉞䊮䉫㒰෰೨䇮ฝ

: Al

䉮䊷䊁䉞䊮䉫㒰෰ᓟ䋩

[14, 23, 24]

(19)

࿑

1-9 ISS

ᄥ㓁㔚ᳰ䊌䊄䊦┵㕙䈮૶↪䈘䉏䈢ਔ㕙

Al

䉮䊷䊁䉞䊮䉫ઃ

PI

䊐䉞䊦䊛䈱⎕៊

[57–59]

㪈㪅㪉㪅㪉㪅 ⚡ᄖ✢㩷

㪈㪅㪉㪅㪉㪅㪈㪅 ⚡ᄖ✢ⅣႺ㪲㪐㪃㩷㪈㪈㵨㪈㪏㪃㩷㪍㪇㵨㪍㪉㪴㩷

ᄥ㓁᡼኿䉣䊈䊦䉩䊷䈱ᄢㇱಽ䈲ᵄ㐳

150 nm–10 m

䈱㔚⏛ᵄ䈫䈚䈩᡼኿䈘䉏䉎䇯ᄢ᳇࿤ᄖ䋨

AM0: Air Mass 0

䋩䈮䈍䈔䉎ᄥ㓁శ䉴䊕䉪䊃䊦䉕࿑

1-10

䈮␜䈜

[63]

䇯

AM0

䈮䈍䈇䈩䇮ᄥ㓁శ䈱ᒝᐲ䈲ᵄ㐳⚂

200 nm

䈎䉌㜞䈒䈭䉍䇮 ᵄ㐳⚂

500 nm

䈮䊏䊷䉪䉕᦭䈜䉎䇯

AM0

෸䈶࿾਄䈮䈍䈔䉎ᄥ㓁శ䉴䊕䉪䊃䊦ಽᏓ䈱Ყセ䉕

Appendix 9.

䈮␜䈜䇯

࿾⃿ᄢ᳇⴫㕙䈮ု⋥䈮౉኿䈜䉎ᄥ㓁శ䉣䊈䊦䉩䊷䈲ᄥ㓁ቯᢙ䈫䈚䈩⍮䉌䉏䈩䈍䉍䇮⚂

1366 W/m²

䈪䈅䉎

[63]

䇯 ᄥ㓁ቯᢙ䈲৻ቯ䈪䈲䈭䈒ᄌേ䈜䉎䇯ᄥ㓁ቯᢙ䈱ᄌേ䈮䈲䇮࿾⃿䈱౏ォ゠㆏䈏ᬦ౞䈪䈅䉍䇮࿾⃿䈫ᄥ㓁䈫䈱〒㔌䈏ᄌൻ䈜䉎䈖䈫䈮⿠࿃䈜䉎ᐕ㑆๟ᦼᄌേ䋨

±3.3%

䋩䈫䇮

11

ᐕ๟ᦼ䈱ᄥ㓁ᵴേ䈱ᄌേ䈮઻䈉శ౉ജᄌേ䋨

±0.1%

䋩䈏䈅䉎

[60]

䇯䈭䈍䇮㜞ᐲ䈮઻䈉ᄥ㓁ቯᢙ䈱ᄌൻ䈲䈾䈫䉖䈬䈭䈇䇯

AM0

ᄥ㓁శ䉴䊕䉪䊃䊦䈱ฦᵄ㐳ၞ䈮䈍䈔䉎䊐䊤䉾䉪䉴䊧䊔䊦䉕⴫

1-2

䈮␜䈜

[63]

䇯৻⥸䈮䇮ᵄ㐳䈏

4–400 nm

䈱 శ䉕

UV

䈫๭䈹

[14]

䇯䉁䈢䇮ᵄ㐳

200–400 nm

䉕ㄭ⚡ᄖ✢䋨

NUV: Near Ultraviolet

䋩䇮ᵄ㐳

200 nm

એਅ䉕⌀ⓨ⚡ᄖ

✢䋨

VUV: Vacuum Ultraviolet

䋩䈮ಽ㘃䈜䉎䇯⴫

1-2

䈎䉌ಽ䈎䉎䉋䈉䈮䇮ᄥ㓁శ䈮䈍䈔䉎

UV

䋨

400.5

䋩䈱ᒝᐲ䈲䇮 ᄥ㓁ቯᢙ䈱⚂

8%

䈪䈅䉎䇯

⴫

1-2 AM0

ᄥ㓁శ䉴䊕䉪䊃䊦䈱ฦᵄ㐳ၞ䈮䈍䈔䉎䊐䊤䉾䉪䉴䊧䊔䊦

[63]

Wavelength Range, nm Integrated solar irradiance in wavelength range, W/m²

Percent of Solar Constant within wavelength range, %

120.5 3.12E-4 2.28E-5

200.5 0.104 7.65E-3

250.5 2.12 0.155

400.5 107.43 7.86

2500 1320.43 96.66

1.0E6 1366.1 100

(20)

࿑

1-10 AM0

ᄥ㓁శ䉴䊕䉪䊃䊦

[63]

㪈㪅㪉㪅㪉㪅㪉㪅 ⚡ᄖ✢䈮䉋䉎㜞ಽሶ᧚ᢱ䈱ഠൻ㪲㪈㪈㵨㪈㪏㪃㩷㪊㪈㪃㩷㪍㪈㪃㩷㪍㪉㪴㩷

UV

䈫㜞ಽሶ᧚ᢱ䈱෻ᔕ䉕એਅ䈮␜䈜䇯

o

h RH

RH Q

䋨

1-3

䋩

oR H

RH

䋨

1-4

䋩

UV

䈱䊐䉤䊃䊮䉣䊈䊦䉩䊷䋨

h

䋩䉕ๆ෼䈚䈢ಽሶ䈲ബ⿠⁁ᘒ䈮ㆫ⒖䈜䉎䇯䈠䈚䈩䇮ബ⿠⁁ᘒ䈱ಽሶ䈏లಽ䈭䉣䊈䊦䉩䊷䉕᦭䈚䈩䈇䈢䈫䈐䇮⚿ว䈲ಽ⸃䈚䇮䊤䉳䉦䊦䈏↢䈛䉎䋨

Appendix 10.

䋩

[61]

䇯࿑

1-11

䈎䉌ಽ䈎䉎䉋䈉䈮䇮㜞ಽሶ᧚ ᢱ䈮䈍䈇䈩ਥⷐ䈭⚿ว䈱䈾䈫䉖䈬䈏

UV

䈮䉋䉍ಽ⸃䈘䉏䉎䋨

Appendix 11.

䋩

[31]

䇯ಽ⸃෻ᔕ䈮䉋䈦䈩↢䈛䈢䊤䉳䉦䊦䈲䇮ಽሶ㑆ㆇേ䈮䉋䉍੕䈇䈮ㄭធ䈜䉎䈫෻ᔕ䈚䇮᨞ᯅ╬䈱ಽሶ⚿ว⁁ᘒᄌൻ䈏↢䈛䉎䇯ಽሶ⚿ว⁁ᘒ䈱ᄌൻ䈲䇮㜞ಽሶ᧚ᢱ䈱ᄌ⦡䇮⣀ൻ䈱ේ࿃䈫䈭䉎䇯

᨞ᯅ

ETFE

䋨

X-ETFE: Cross-linked ethylene-tetrafluoroethylene

䋩䋨

Raychem Spec 55/

䋩䈱

UV

ᾖ኿䈮䉋䉎ᄖⷰᄌ ൻ䉕⴫

1-3

䈮␜䈜

[64]

䇯

X-ETFE

䈲⠴ᾲᕈ䇮⠴䉪䊥䊷䊒ᕈ䇮⠴䉝䊷䉪䊃䊤䉾䉨䊮䉫ᕈ䈮ఝ䉏䇮ቝቮᯏ↪㔚✢ⵍⷒ᧚ 䈫䈚䈩㗫❥䈮૶↪䈘䉏䈩䈇䉎䇯䈭䈍䇮

UV

䊐䊦䉣䊮䉴䋨

F_UV, ESD

䋩䈱න૏䈪䈅䉎

ESD

䈱ᗧ๧䈲

Equivalent solar days

䈪䈅䉎䇯

1 ESD

䈲

AM0

ᄥ㓁శ䈱

1

ᣣಽ䈱ᾖ኿㊂䈮⋧ᒰ䈚䇮ᵄ㐳

200–400 nm

䈪䈲

1 ESD=1.02 kJ/cm²

䈪䈅䉎䇯

⴫

1-3

䈎䉌ಽ䈎䉎䉋䈉䈮䇮

UV

ᾖ኿䈮䉋䉍

X-ETFE

䈲⨥⦡䈮ᄌൻ䈚䇮

F_UV

䈱Ⴧട䈮઻䈇⨥⦡䈲Ớ䈒䈭䉎䇯䉁䈢䇮ᾖ኿

ਛ䈱䉰䊮䊒䊦᷷ᐲ䈏㜞䈇䈾䈬⌕⦡䈏ᒝ䈇䇯䈖䉏䈲䇮㜞᷷䈪䈅䉎䈾䈬

UV

䈮䉋䉎ಽሶ㎮ಾᢿ䈪↢䈛䈢䊤䉳䉦䊦䈱᜛

ᢔ䈏㗼⪺䈮䈭䉍䇮⚿ว⁁ᘒ䈱ᄌൻ䈏ଦㅴ䈘䉏䉎䈢䉄䈣䈫⠨䈋䉌䉏䉎䇯⴫

1-3

䈮␜䈚䈢

X-ETFE

䈱

_S

ᄌൻ䉕࿑

1-12

䈮␜䈜

[64]

䇯

F_UV

䈱Ⴧട䇮䈧䉁䉍

X-ETFE

䈱⦡䈏Ớ䈒䈭䉎䈮ᓥ䈇

_S

䈲Ⴧട䈜䉎䇯䈭䈍䇮⌀ⓨਛ䈪

UV

ᾖ኿䈚䈢ᓟ䇮䉰䊮䊒䊦䉕ᄢ᳇ᦑ㔺䈜䉎䈫䇮

UV

䈮䉋䉎⌕⦡䈏ᶖ䈋䇮

UV

ᾖ኿೨䈱ᄖⷰ䈮ᚯ䉎⃻⽎䈏ႎ๔䈘䉏䈩䈇䉎

[61, 65, 66]

䇯䈖䉏䉕࿁ᓳ⃻⽎䈫๭䈹䇯࿁ᓳ⃻⽎䈮䈧䈇䈩䈲

Appendix 12.

䈮ㅀ䈼䉎䇯

䈾䈫䉖䈬䈱㜞ಽሶ᧚ᢱ䈪䈲䇮౉኿䈚䈢

UV

䈱

95%

䈏⴫㕙䈎䉌ᷓ䈘

300 nm

એౝ䈪ๆ෼䈘䉏䉎

[14]

䇯䈧䉁䉍䇮

UV

䈮䉋䉎ಽሶ㎮䈱ಾᢿ䉇᨞ᯅ䈲ᭂ⴫㕙䈱䉂䈪↢䈛䇮᧚ᢱౝㇱ䈮䈍䈔䉎ಽሶ⚿ว⁁ᘒ䈱ᄌൻ䈲䈾䈫䉖䈬䈭䈇䇯䈚䈎䈚䇮

UV

䈮䉋䉍⴫㕙䈮ᒻᚑ䈘䉏䈢⣀ൻጀ䈲䉪䊤䉾䉪⊒↢䈱ේ࿃䈫䈭䉍䇮㜞ಽሶ䊐䉞䊦䊛䈱ᯏ᪾․ᕈ䉕ᄢ䈐䈒ഠൻ䈘䈞䉎น⢻ᕈ䈏䈅䉎䇯

PEEK

䋨

PEEK: Poly-ether-ether-ketone

䋩䊐䉞䊦䊛䈱

UV

ᾖ኿䈮䉋䉎⎕ᢿિ䈶䈱ᄌൻ䉕࿑

1-13

䈮

␜䈜

[67]

䇯䉁䈢䇮ᒁᒛ⹜㛎ᓟ䈮䈍䈔䉎

PEEK

䈱

UV

ᾖ኿㕙䉕࿑

1-14

䈮␜䈜

[67]

䇯

UV

ᾖ኿䈮䉋䉍

PEEK

䊐䉞䊦䊛

(21)

䈱⎕ᢿિ䈶䈲ᄢ䈐䈒ഠൻ䈚䇮

UV

ᾖ኿㕙䈮䈲ήᢙ䈱䉪䊤䉾䉪䈏⏕⹺䈘䉏䈢䇯

⴫

1-3 UV

ᾖ኿䈮䉋䉎

X-ETFE

䈱ᄖⷰᄌൻ

[64]

࿑

1-11

㜞ಽሶ᧚ᢱ䈱⚿วಽ⸃䉣䊈䊦䉩䊷䈫శ䈱ᵄ㐳䈱㑐ଥ

[31]

(22)

࿑

1-12 UV

ᾖ኿䈮䉋䉎

X-ETFE

䈱

_S

ᄌൻ

[64]

࿑

1-13 UV

ᾖ኿䈮䉋䉎

PEEK

䊐䉞䊦䊛䈱⎕ᢿિ䈶䈱ᄌൻ

[67]

࿑

1-14 UV

ᾖ኿䈚䈢

PEEK

䊐䉞䊦䊛䈱ᒁᒛ⹜㛎ᓟ䈱⴫㕙䋨

F_UV: 2.04E3 J/cm²

䋩

[67]

(23)

㪈㪅㪉㪅㪊㪅 ᡼኿✢㩷

㪈㪅㪉㪅㪊㪅㪈㪅 ᡼኿✢ⅣႺ㪲㪐㪃㩷㪈㪈㵨㪈㪏㪃㩷㪍㪏㵨㪎㪈㪴㩷

ቝቮⅣႺ䈮䈍䈔䉎ฦ⒳᡼኿✢䈱䉣䊈䊦䉩䊷䈫䊐䊤䉾䉪䉴䈱㑐ଥ䉕࿑

1-15

䈮␜䈜

[16]

䇯ቝቮⅣႺ䈪䈲䇮᭽䇱䈭

᡼኿✢䈏㜞䈇䉣䊈䊦䉩䊷⁁ᘒ䈪ⶄว䈚䈩ሽ࿷䈜䉎䇯ቝቮ᡼኿✢䈲䈠䈱⿠Ḯ䈫࿾⃿䈫䈱૏⟎㑐ଥ䈮䉋䈦䈩䇮᡼኿

✢Ꮺ䋨䊋䊮䉝䊧䊮Ꮺ䋩䇮㌁ᴡቝቮ✢䇮ᄥ㓁ቝቮ✢䈱

3

⒳㘃䈮ᄢ೎䈘䉏䉎䇯䈖䉏䉌䉕৻ᰴቝቮ✢䈫๭䈹䇯䈖䈱৻ᰴቝ ቮ✢䈏ቝቮᯏ䈱ო╬䈮ⴣ⓭䈚䇮ේሶᩭ䉕⎕უ䈚䈩⊒↢䈚䈢㓁ሶ䇮ਛᕈሶ╬䉕ੑᰴቝቮ✢䈫๭䈹䇯ቝቮᯏ䈮૶↪

䈚䈢㜞ಽሶ᧚ᢱ䈮ኻ䈚䇮․䈮ᓇ㗀䉕ਈ䈋䉎䈱䈲৻ᰴቝቮ✢䈪䈅䉎䇯৻ᰴቝቮ✢䋨䊋䊮䉝䊧䊮Ꮺ䇮㌁ᴡቝቮ✢䇮ᄥ 㓁ቝቮ✢䋩䈱⹦⚦䈮䈧䈇䈩䈲

Appendix 13.

䉕ෳᾖ䈘䉏䈢䈇䇯

࿑

1-15

ቝቮⅣႺ䈮䈍䈔䉎ฦ⒳᡼኿✢䈱䉣䊈䊦䉩䊷䈫䊐䊤䉾䉪䉴䈱㑐ଥ

[16]

㪈㪅㪉㪅㪊㪅㪉㪅 ᡼኿✢䈮䉋䉎㜞ಽሶ᧚ᢱ䈱ഠൻ㪲㪈㪉㪃㩷㪈㪋㵨㪈㪏㪃㩷㪎㪉㵨㪎㪏㪴㩷

᡼኿✢䈫㜞ಽሶ᧚ᢱ䈱⋧੕૞↪䈱ೋᦼᲑ㓏䈮䈧䈇䈩࿑

1-16

䈮␜䈜

[74]

䇯㜞ಽሶ᧚ᢱ䈮᡼኿✢䈏ᾖ኿䈘䉏䉎䈫䇮䈠䈱䉣䊈䊦䉩䊷䈲᧚ᢱਛ䈮ๆ෼䈘䉏䇮䉮䊮䊒䊃䊮ᢔੂ䇮శ㔚ሶ᡼಴䇮㔚ሶኻ↢ᚑ╬䈱ㆊ⒟䉕⚻䈩䇮ಽሶ䈱㔚㔌䉁䈢䈲ബ⿠䈏↢䈛䉎䇯䈠䈚䈩䇮㜞ಽሶ᧚ᢱ䈱ౝㇱ䈮䈲䇮෻ᔕᵴᕈ⒳䈪䈅䉎䉟䉥䊮䉇䊤䉳䉦䊦䈏↢ᚑ䈘䉏䉎䇯㜞 ಽሶ᧚ᢱਛ䈪䈱䉣䊈䊦䉩䊷ๆ෼䈱઀ᣇ䈲᡼኿✢䈱⒳㘃䈮䉋䈦䈩⇣䈭䉎䈏䇮䈇䈝䉏䈱᡼኿✢䈮䈍䈇䈩䉅ᦨ⚳⊛

䈮䈲䉟䉥䊮䉇䊤䉳䉦䊦䈏↢ᚑ䈘䉏䉎䇯

䉟䉥䊮䇮䊤䉳䉦䊦╬䈱෻ᔕᵴᕈ⒳䈲᭽䇱䈭ൻቇ෻ᔕ䉕ᒁ⿠䈜䇯෻ᔕᵴᕈ⒳䈏↢ᚑ䈚䈢ᓟ䈮ᒁ⛯䈐⿠䈖䉎෻ᔕ 䉕࿑

1-17

䈮␜䈜

[73]

䇯᡼኿✢䉕ฃ䈔䈢㜞ಽሶ᧚ᢱ䈪䈲䇮

1.2.2.2.

䈪␜䈚䈢

UV

䈱႐ว䈫ห᭽䇮ಽሶ㎮䈱ಾᢿ䉇᨞

ᯅ䈏↢䈛䇮ಽሶ⚿ว⁁ᘒ䈏ᄌൻ䈜䉎䇯䈠䈱⚿ᨐ䇮ᾲశቇ․ᕈ䇮ᯏ᪾․ᕈ╬䈏ഠൻ䈜䉎䇯

䈭䈍䇮

UV

䈮䉋䉎ಽሶ⚿ว⁁ᘒ䈱ᄌൻ䈲⴫㕙䈱䉂䈪↢䈛䉎䈱䈮ኻ䈚䇮᡼኿✢䈲᧚ᢱౝㇱ䈱ಽሶ⚿ว䉕ᄌൻ䈘䈞䉎䇯䈠䈱䈢䉄䇮

UV

䈫Ყセ䈚䇮᡼኿✢䈲㜞ಽሶ᧚ᢱ䈱ᯏ᪾․ᕈ䈮ᄢ䈐䈭ᓇ㗀䉕ਈ䈋䉎䇯ฦ⒳㜞ಽሶ᧚ᢱ䈱⠴᡼

኿✢ᕈ䉕

Appendix 14.

䈮␜䈜䇯৻⥸䈮䇮⧐㚅ᣖ㜞ಽሶ䈲⠴᡼኿✢ᕈ䈏㜞䈇

[79, 80]

䇯䈠䉏䈲䇮౒ᓎ䈚䈢

㔚ሶ䈮䉋䉍䇮ๆ෼䈚䈢᡼኿✢䉣䊈䊦䉩䊷䈏㕖ዪ࿷ൻ䈚䇮శ䉇ᾲ䉣䊈䊦䉩䊷䈫䈚䈩♽ᄖ䈮᡼಴䈘䉏䉎䈢䉄䈪䈅䉎䇯

᡼኿✢ഠൻ䈮ኻ䈜䉎᷷ᐲ䇮✢⾰䈱ᓇ㗀╬䈮䈧䈇䈩䈲

Appendix 15.–19.

䉕ෳᾖ䈘䉏䈢䈇䇯

(24)

࿑

1-16

᡼኿✢䈫㜞ಽሶ᧚ᢱ䈱⋧੕૞↪䈱ೋᦼᲑ㓏

[74]

࿑

1-17

᡼኿✢ᾖ኿䈮䉋䉍↢䈛䉎㜞ಽሶ᧚ᢱ䈱ൻቇ෻ᔕ

[73]

(25)

㪈㪅㪉㪅㪋㪅 ᾲ䉰䉟䉪䊦෸䈶ᾲ⽶⩄㩷㪈㪅㪉㪅㪋㪅㪈㪅 ᾲⅣႺ㪲㪉㪃㩷㪐㪃㩷㪈㪈㪃㩷㪈㪊㪃㩷㪈㪍㵨㪈㪏㪴㩷

࿾⃿ㄭற䉕㘧ⴕ䈜䉎ቝቮᯏ䈲䇮ᄥ㓁䈎䉌䈱䉣䊈䊦䉩䊷᡼኿䋨ᄥ㓁᡼኿䋩䇮࿾⃿෸䈶䈠䈱ᄢ᳇䈮䉋䉎ᄥ㓁᡼኿

䈱෻኿ᚑಽ䋨࿾⃿䉝䊦䊔䊄䋩䇮䈠䈚䈩䇮࿾⃿⥄り䈎䉌䈱ᾲ᡼኿䋨⿒ᄖ᡼኿䋩䈮䉋䉎ᾲ⽶⩄䉕ฃ䈔䉎䇯ฦᾲ౉ജ䈱ᒝ 䈘䈲䇮ᄥ㓁᡼኿䈏⚂

1.37 kW/m²

䇮࿾⃿䉝䊦䊔䊄䈏⚂

0.4 kW/m²

䋨ᄥ㓁᡼኿䈱⚂

30%

䋩䇮⿒ᄖ᡼኿䈏⚂

0.24 kW/m²

䈪䈅䉎䇯䈖䉏䉌ᄢ䈐䈭ᾲ౉ജ䈏䈅䉎৻ᣇ䇮ቝቮⓨ㑆䈲

2.7 K

䈱䊍䊷䊃䉲䊮䉪䈪䈅䉎䈢䉄䇮ᣣᾖਛ䈫࿾⃿䈱㒶䈮౉䉎ᣣ㒶ਛ䈫䈪䈲ቝቮᯏ䈮䈍䈔䉎ᾲ෼ᡰ䈏ᄢ䈐䈒⇣䈭䉎䇯䈠䈱⚿ᨐ䇮࿾⃿䉕๟࿁䈜䉎ቝቮᯏ䈲

+200 °C

䈎䉌

-150 °C

䈱ᭂ䉄䈩㜞ᝄ᏷䈭ᾲ䉰䉟䉪䊦䉕ฃ䈔䉎䇯

LEO

䉕๟࿁䈜䉎ቝቮᯏ䈲䇮࿾⃿䉕⚂

90–100

ಽ䈪

1

๟䈚䇮

1

๟࿁Ფ䈮࿾⃿䈱㒶䈮౉䉎䇯ቝቮᯏ䈱ኼ๮䉕

10

ᐕ 䈫䈚䈢႐ว䇮⚂

55,000

࿁䈱ᾲ䉰䉟䉪䊦䉕ฃ䈔䉎䈖䈫䈫䈭䉎䇯䉁䈢䇮㜞ᐲ⚂

35,786 km

䈱㕒ᱛ࿾⃿゠㆏䋨

GEO:

Geostationary Earth Orbit

䋩䉕๟࿁䈜䉎ቝቮᯏ䈲䇮࿾⃿䉕⚂

1

ᣣ䈪

1

๟䈚䇮

1

ᐕ㑆䈮⚂

90

ᣣ㑆࿾⃿䈱㒶䈮౉䉎䈢䉄䇮

10

ᐕ㑆䈪⚂

900

࿁䈱ᾲ䉰䉟䉪䊦䉕ฃ䈔䉎䇯

㪈㪅㪉㪅㪋㪅㪉㪅 ᾲ䉰䉟䉪䊦෸䈶ᾲ⽶⩄䈮䉋䉎㜞ಽሶ᧚ᢱ䈱ഠൻ㪲㪉㪃㩷㪈㪋㪃㩷㪈㪍㵨㪈㪏㪴㩷

৻⥸䈮䇮㜞ಽሶ᧚ᢱ䈱ᯏ᪾․ᕈ䈲᷷ᐲ䈱ᓇ㗀䉕ᒝ䈒ฃ䈔䇮ૐ᷷䈪䈲⣀ൻ䇮㜞᷷䈪䈲エൻ䈏↢䈛䉎䇯

PI

䊐䉞䊦䊛䈮䈍䈔䉎ᔕജ㵨䈵䈝䉂ᦛ✢䈱᷷ᐲᄌൻ䉕࿑

1-18

䈮␜䈜

[81]

䇯࿑

1-18

䉋䉍䇮

PI

䊐䉞䊦䊛䈱ᒁᒛᒝ䈘䊶િ䈶䇮ᒢᕈ

₸╬䈏⹜㛎᷷ᐲ䈮ଐሽ䈚䈩ᄢ䈐䈒ᄌൻ䈜䉎䈖䈫䈏ಽ䈎䉎䇯

ቝቮⓨ㑆䈱㜞ᝄ᏷䈭ᾲ䉰䉟䉪䊦෸䈶㐳ᦼ㑆䈱ᾲ⽶⩄䈮䉋䉍䇮ᾲ⤘ᒛଥᢙ䈱⇣䈭䉎᧚ᢱ䈱⇇㕙䈮䈲ᾲ䈵䈝䉂䈏⫾Ⓧ䈘䉏䉎䇯❫⛽ᒝൻⶄว᧚䈪䈲䇮❫⛽䈫᮸⢽䈱⇇㕙䈮ᾲ䈵䈝䉂䈏↢䈛䉎䇯❫⛽ᒝൻⶄว᧚䈮䈍䈇䈩䇮ᾲ䈵䈝䉂䈱⫾Ⓧ䈲䉪䊤䉾䉪䉇ጀ㑆೸㔌䈱ේ࿃䈫䈭䉍䇮ᒝᐲ䉕ᄢ䈐䈒ૐਅ䈘䈞䉎น⢻ᕈ䈏䈅䉎

[82–83]

䇯䉁䈢䇮䉮䊷䊁䉞䊮䉫䉇䊕䉟䊮䊃╬䉕ᣉ䈚䈢᧚ᢱ䈮䈍䈇䈩䉅䇮ၮ᧼䈫䈱ᾲ⤘ᒛଥᢙ䈱Ꮕ⇣䈎䉌⇇㕙䈮ᾲ䈵䈝䉂䈏↢䈛䉎䇯䈠䈚䈩䇮ᾲ 䈵䈝䉂䈏⫾Ⓧ䈘䉏䉎䈫䇮䉪䊤䉾䉪䉇೸㔌䈏↢䈛䉎䇯

Al

ၮ᧼䈮ႣᏓ䈚䈢⊕⦡Ⴃᢱ䋨

Z-93-C55

䋩䈱㜞᷷ᦑ㔺䋨

350 °C

䇮

518 h

䇮⌀ⓨਛ䋩ᓟ䈮䈍䈔䉎⴫㕙౮⌀䉕࿑

1-19

䈮␜䈜

[85]

䇯㜞᷷ᦑ㔺䈮䉋䉍⊕⦡Ⴃᢱ䈱⴫㕙䈮䈲ήᢙ䈱䉪䊤䉾䉪䈏 ⊒ ↢ 䈚䈢䇯䉁䈢䇮 ❫ ⛽ᒝ ൻ ⶄ ว ᧚䈱 ၮ ᧼ 䈮 ႣᏓ 䈚䈢 ⊕ ⦡Ⴃ ᢱ 䋨

Z-93-C55

䋩䈮 ኻ 䈚䇮ᾲ 䉰䉟䉪䊦 ⹜ 㛎䋨

-100–+277 °C

䇮

8

䉰䉟䉪䊦䋩䉕ታᣉ䈚䈢⚿ᨐ䉕࿑

1-20

䈮␜䈜

[86]

䇯ᾲ䉰䉟䉪䊦䈮䉋䉍䇮⊕⦡Ⴃᢱ䈱ᄢㇱಽ䈏ၮ᧼

䈎䉌೸㔌䈚䈢䇯

࿑

1-18 PI

䊐䉞䊦䊛䈮䈍䈔䉎ᔕജ㵨䈵䈝䉂ᦛ✢䈱᷷ᐲᄌൻ

[81]

(26)

࿑

1-19

㜞᷷ᦑ㔺䋨

350 °C

䇮

518 h

䇮⌀ⓨਛ䋩ᓟ䈮䈍䈔䉎⊕⦡Ⴃᢱ䋨

Z-93-C55

䇮

Al

ၮ᧼䋩䈱⴫㕙

[85]

࿑

1-20

ᾲ䉰䉟䉪䊦⹜㛎䋨

-100–+277 °C

䇮

8

䉰䉟䉪䊦䋩䈮䉋䉎⊕⦡Ⴃᢱ䋨

Z-93-C55

䇮ⶄว᧚ၮ᧼䋩䈱೸㔌䋨Ꮐ

:

ᾲ䉰䉟䉪䊦⹜㛎೨䇮ฝ

:

ᾲ䉰䉟䉪䊦⹜㛎ᓟ䋩

[86]

㪈㪅㪉㪅㪌㪅㜞⌀ⓨ㩷

㪈㪅㪉㪅㪌㪅㪈㪅 ⌀ⓨⅣႺ㪲㪉㪃㩷㪐㪃㩷㪈㪈㵨㪈㪊㪃㩷㪈㪌㵨㪈㪏㪃㩷㪏㪎㪃㩷㪏㪏㪴㩷

᳇࿶䈱㜞ᐲᄌൻ䉕࿑

1-21

䈮␜䈜

[88]

䇯࿾਄䈪⚂

1.013×10⁵ Pa

䈪䈅䉎᳇࿶䈲䇮㜞ᐲ䈏㜞䈒䈭䉎䈮ᓥ䈇ᜰᢙ㑐ᢙ

⊛䈮ᷫዋ䈜䉎䇯

LEO

ⅣႺ䈮䈍䈔䉎᳇࿶䈲

10^-4–10^-7 Pa

䈪䈅䉎䇯

GEO

ⅣႺ䈱᳇࿶䈲

10^-13 Pa

䇮ᖺᤊ㑆ⓨ㑆䈪䈲

10^-14 Pa

એਅ䈮㆐䈜䉎䈫⠨䈋䉌䉏䈩䈇䉎

[11]

䇯

࿑

1-21

᳇࿶䈱㜞ᐲᄌൻ

[88]

宇宙航空研究開発機構

宇宙航空研究開発機構研究開発報告

宇宙航空研究開発機構

宇宙環境曝露によるポリイミドフィルムの機械特性劣化とその予測法

島村 宏之*

，中村 孝*

䈲䈛䉄䈮

ቝቮⅣႺ࿃ሶ䈮䉋䉎㜞ಽሶ᧚ᢱ䈱ഠൻ

ේሶ⁁㉄⚛... 8

ේሶ⁁㉄⚛ⅣႺ... 8

ේሶ⁁㉄⚛䈮䉋䉎㜞ಽሶ᧚ᢱ䈱ഠൻ... 9

⚡ᄖ✢... 13

⚡ᄖ✢ⅣႺ... 13

⚡ᄖ✢䈮䉋䉎㜞ಽሶ᧚ᢱ䈱ഠൻ

᡼኿✢... 17

᡼኿✢ⅣႺ... 17

᡼኿✢䈮䉋䉎㜞ಽሶ᧚ᢱ䈱ഠൻ

ᾲ䉰䉟䉪䊦෸䈶ᾲ⽶⩄

ᾲⅣႺ

ᾲ䉰䉟䉪䊦෸䈶ᾲ⽶⩄䈮䉋䉎㜞ಽሶ᧚ᢱ䈱ഠൻ... 19

㜞⌀ⓨ... 20

⌀ⓨⅣႺ... 20

㜞⌀ⓨ෸䈶䉮䊮䉺䊚䊈䊷䉲䊢䊮䈮䉋䉎㜞ಽሶ᧚ᢱ䈱ഠൻ

䊘䊥䉟䊚䊄䊐䉞䊦䊛䈱․ᕈ䈫ቝቮᯏ䈻䈱ㆡ↪

䊘䊥䉟䊚䊄䊐䉞䊦䊛䈱․ᕈ... 24

ᾲ೙ᓮ᧚䈻䈱ㆡ↪... 25

ቝቮ⤑᭴ㅧ‛᭴ㅧ᧚䈻䈱ㆡ↪䈫⺖㗴... 27

ᧄ⎇ⓥ䈱⋡⊛... 29

ᧄ⺰ᢥ䈱᭴ᚑ... 29

✜⸒

ታ㛎ᣇᴺ

䉰䊮䊒䊦

ᒛജ⽶⩄ᯏ᭴

ታ㛎

⹏ଔᣇᴺ

⾰㊂᷹ቯ... 36

෻ᔕല₸⸘▚

⤑ෘ⸘▚... 36

ᒁᒛ⹜㛎... 37

ᦑ㔺㕙ᒻᘒ⹏ଔ... 37

⎕㕙ⷰኤ... 41

⹏ଔ⚿ᨐ

ᄖⷰ

⾰㊂ᷫዋ㊂... 41

෻ᔕല₸

⤑ෘᷫዋ㊂... 43

ᒁᒛ․ᕈ

ᦑ㔺㕙ᒻᘒ... 44

⎕㕙᭽⋧

䉮䊮䉺䊚䊈䊷䉲䊢䊮䈱ᚑಽ䈫ᓇ㗀... 50

䉮䊮䉺䊚䊈䊷䉲䊢䊮䈱ᚑಽ

䉮䊮䉺䊚䊈䊷䉲䊢䊮ઃ⌕䈱ᓇ㗀

⾰㊂Ⴧട... 52

ේሶ⁁㉄⚛଻⼔ጀ

ᦑ㔺㕙䈮ⷰኤ䈘䉏䈢ዪᚲ⊛䈮ᷓ䈇ⓣ䋨Hole䋩䈱ᒻᚑ... 52

⚿⸒

✜⸒

ታ㛎ᣇᴺ

䉰䊮䊒䊦

ᒛജ⽶⩄ᯏ᭴

࿾਄ᮨᡆ⹜㛎

⌀ⓨⶄวⅣႺ⹜㛎⸳஻... 55

⚡ᄖ✢ᾖ኿ⵝ⟎... 58

ේሶ⁁㉄⚛ᾖ኿⹜㛎᧦ઙ

⚡ᄖ✢ᾖ኿⹜㛎᧦ઙ

㔚ሶ✢ᾖ኿⹜㛎᧦ઙ

⹏ଔᣇᴺ

⾰㊂᷹ቯ... 61

෻ᔕല₸⸘▚

⤑ෘ⸘▚... 61

ᒁᒛ⹜㛎... 61

ᾖ኿㕙ᒻᘒ⹏ଔ... 62

⎕㕙ⷰኤ... 62

⹏ଔ⚿ᨐ

ᄖⷰ

⾰㊂ᷫዋ㊂... 63

෻ᔕല₸

⤑ෘᷫዋ㊂... 65

ᒁᒛ․ᕈ

ᾖ኿㕙ᒻᘒ... 69

島村宏之*

，中村孝*