JIEDI（JAXA Ion Engine Development Initiatives）

イオン加速グリッド耐久認定用数値解析

JIEDI（JAXA Ion Engine Development Initiatives）

ツールの研究開発ワークショップ論文集

宇宙科学研究本部 船木 一幸 編

2010年2月

宇宙航空研究開発機構

Japan Aerospace Exploration Agency

宇宙航空研究開発機構研究開発報告

JAXA Research and Development Report

船木 一幸・國中 均・篠原 育・嶋 英志 

JIEDI-1 ツールの開発（イオンエンジングリッド損耗評価コードの改良）

  ・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・

1 中野 正勝・ 梶村 好宏・船木 一幸

粒子法によるイオンエンジングリッド損耗解析

 ・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・

10 宮坂 武志・安里 勝雄・小林 勉・柴田 悠基

低エネルギー Xe 原子による炭素スパッタリングの分子動力学シュミレーション

 ・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・

21 村本 哲也・剣持 貴弘・百武 徹・西田 迪雄

低エネルギーカーボンスパッタリングに関する Xe 蓄積効果

 ・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・

26 剣持 貴弘・和田 元・百武 徹・村本 哲也・西田 迪雄

イオンエンジンにおけるビーム中和電子の粒子解析

・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・

32 臼井英之・鐘ヶ江将詩

レーザートムソン散乱法による小型マイクロ波放電型イオンエンジンにおけるプラズマ状態の測定

 ・・・・・・・・・・・・・・・

39 山本 直嗣・富田 健太郎・真島 周・山崎 尚人・近藤 慎也

鶴 哲平・中島 秀紀・内野 喜一郎

イメージスキャナを用いた平板Ｃ／Ｃグリッド孔径の統計的分析

 ・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・

47 豊田 康裕・西山 和孝・國中 均

多チャンネル QCM を用いたディファレンシャル・スパッタリングの計測

  ・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・

53 西村 太一郎・小泉 宏之・國中 均・山極 芳樹

可視化イオンエンジンによるイオン抽出系評価

 ・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・

60

中山 宜典・中野 正勝

ᗎ ᩥ

㏆ᖺࠊ㟁Ẽ࢚ࢿࣝࢠ࣮ࢆ⏝࠸࡚᥎㐍๣ࢆຍ㏿ࡍࡿ㟁Ẽ᥎㐍ࣟࢣࢵࢺࡢ㛤Ⓨࡀᛴࣆࢵࢳ࡛㐍ࢇ࡛࠾ࡾࠊከᩘࡢ㟼 Ṇ⾨ᫍࡢ༡໭㛫㌶㐨ไᚚ➼࡟⏝࠸ࡽࢀࡿ࡜ඹ࡟ࠊ ᝨᫍ᥈ᰝᶵࡢ㌶㐨㛫㑄⛣⏝୺࢚ࣥࢪࣥ࡜ࡋ࡚ࡶὀ┠ࡉࢀ࡚࠸ࡿࠋ 㟁Ẽ᥎㐍ࣟࢣࢵࢺࡢ୰࡛᭱ࡶ㧗࠸᥎㐍ᛶ⬟ࢆ㄂ࡿ࢖࢚࢜ࣥࣥࢪࣥࡣࠊ໬Ꮫ᥎㐍࡟ẚ࡭࡚ࠊࡑࡢ᥎ຊࡣⴭࡋࡃᑠࡉ

࠸ࡀࠊẚ᥎ຊࡀ㠀ᖖ࡟㧗࠸ࡢࡀ≉ᚩ࡛࠶ࡿࠋ࢖࢚࢜ࣥࣥࢪࣥࢆ㸯ᖺ࠿ࡽᩘᖺࡢ㛗ᮇ㛫⏝࠸ࡿ஦࡛ࠊ㟼Ṇ⾨ᫍࡢ࣌

࢖࣮ࣟࢻ⋡ྥୖࡸ㛗ᑑ࿨໬ࡀྍ⬟࡟࡞ࡾࠊࡲࡓࠊᑠᝨᫍ᥈ᰝᶵࠕࡣࡸࡪࡉ࡛ࠖࡢᐇ⦼ࡀ♧ࡍࡼ࠺࡟ࠊᝨᫍ᥈ᰝᶵ ࡢపࢥࢫࢺ໬࣭࣑ࢵࢩࣙࣥᮇ㛫▷⦰໬ࡀྍ⬟࡜࡞ࡿࠋ

ከᵝ࡞Ᏹᐂ࣑ࢵࢩࣙࣥ࡟ᛂࡌ࡚ᵝࠎ࡞௙ᵝࡢ࢖࢚࢜ࣥࣥࢪࣥࡀᚲせ࡜࡞ࡿࡀࠊ࢖࢚࢜ࣥࣥࢪࣥࡢ㛤Ⓨ࣭ホ౯࡟

ᚲせ࡞ᮇ㛫ࡣᩘᖺ࡜㛗ࡃࠊࡇࡢ஦ᐇࡣࠊྛ✀࣑ࢵࢩࣙࣥ࡬ࡢ࢖࢚࢜ࣥࣥࢪࣥࡢ㏿ࡸ࠿࡞ᢞධࢆጉࡆ࡚࠸ࡿࠋ≉࡟ࠊ

࢖࢚࢜ࣥࣥࢪࣥࡢ⪏ஂᛶホ౯࡟ࡣ

1

୓᫬㛫㸦⣙

1.1

ᖺ㸧௨ୖ࡜㛗࠸ᮇ㛫ࡀᚲせ࡜ࡉࢀࡿࡓࡵࠊ⪏ஂᛶホ౯ࡣ࢖࢜

࢚ࣥࣥࢪࣥ㛤Ⓨᮇ㛫ࡢ኱㒊ศࢆ༨ࡵࡿ࡜࠸࠺ࡇ࡜ࡀ⌮ゎ࡛ࡁࡿࠋࡶࡋࡶ⪏ஂホ౯ࡢ୍㒊ࢆᩘ್ⓗ࡞ゎᯒ࡟ࡺࡔࡡ

ࡿ஦ࡀ࡛ࡁࢀࡤࠊ࢖࢚࢜ࣥࣥࢪࣥࡢ㛤Ⓨᮇ㛫ࢆ኱ᖜ࡟▷⦰ࡍࡿࡇ࡜ࡀྍ⬟࡛࠶ࢁ࠺ࠋࡇࡢࡼ࠺࡟ࠊ࢖࢚࢜ࣥࣥࢪ

ࣥࡢᩘ್ⓗ࡞ᑑ࿨ホ౯ࢶ࣮ࣝ࡬ᐤࡏࡽࢀࡿᮇᚅࡣ኱ࡁ࠸ࠋࡇࡢࡓࡵࠊJAXA ࡛ࡣࠊ࢖࢚࢜ࣥࣥࢪࣥࢢࣜࢵࢻ㒊ࡢ

ᩘ್⪏ஂᛶホ౯

(JAXA Ion Engine Development Initiative, JIEDI)ࢶ࣮ࣝࡢ◊✲㛤Ⓨࢆᐇ᪋ࡋ࡚࠸ࡿࠋ

JIEDI

ࢶ࣮࡛ࣝࡣࠊ㐣ཤࡢ㢮ఝ◊✲࡜ࡣ␗࡞ࡾࠊᩘ್ࢶ࣮ࣝࡢ᏶ᡂᗘࢆᐇ⏝ྍ⬟࡞ࣞ࣋ࣝࡲ࡛㧗ࡵ࡚ࠊ࢖࢜ࣥ

࢚ࣥࢪࣥᐇᶵࡢタィࡸ⪏ஂᛶホ౯࡟ᛂ⏝ࡍࡿࡇ࡜ࢆ┠ᣦࡋ࡚࠸ࡿࠋ

2006-2007

ᖺᗘ࡟ᐇ᪋ࡋࡓࠕ࢖࢜ࣥຍ㏿ࢢࣜ

ࢵࢻ⪏ஂㄆᐃ⏝ᩘ್ゎᯒࢶ࣮ࣝࡢ◊✲㛤Ⓨ࣮࣡ࢡࢩࣙࢵࣉ࡛ࠖࡣࠊ㸲ࡘࡢ◊✲㛤Ⓨࢸ࣮࣐㸸 Ѹ㧗㏿࡞࢖࢚࢜ࣥࣥࢪࣥࢢࣜࢵࢻᦆ⪖ゎᯒࢶ࣮ࣝࡢ◊✲㛤Ⓨ

Ѹ࢖࢚࢜ࣥࣥࢪࣥࣅ࣮࣒ࣞࢵࢺゎᯒ࡟࠾ࡅࡿᩘ್ゎᯒண ⢭ᗘࡢホ౯ Ѹప࢚ࢿࣝࢠ࢟ࢭࣀࣥ࢖࢜ࣥ࡟ࡼࡿࢫࣃࢵࢱࣜࣥࢢ⌧㇟ࡢゎ᫂࡜ࣔࢹࣜࣥࢢ Ѹ࢖࢚࢜ࣥࣥࢪࣥࢢࣜࢵࢻゎᯒࢶ᳨࣮ࣝドࡢࡓࡵࡢᐇ㦂◊✲

ࢆ㑅ᐃࡋࠊࡇࢀࡽㄢ㢟࡟㔜Ⅼⓗ࡟ྲྀࡾ⤌ࡴࡇ࡜࡟࡞ࡗࡓࠋ

JIEDI

ࢶ࣮ࣝࡢ◊✲㛤Ⓨࡣࠊᅜෆࡢ኱Ꮫ➼◊✲ᶵ㛵ࡢ ༠ຊࢆᚓ࡞ࡀࡽ

JAXA

᝟ሗ࣭ィ⟬ᕤᏛࢭࣥࢱ࣮࡜

JAXA

Ᏹᐂ⛉Ꮫ◊✲ᮏ㒊ࡀඹྠ࡛㐍ࡵ࡚࠾ࡾࠊ2011 ᖺᮎࡢ

JIEDI

ࢶ࣮ࣝ᏶ᡂࢆ┠ᣦࡋ࡚࠸ࡿࠋ

ᮏㄽᩥ㞟ࡣࠊ

JIEDI

ࢶ࣮ࣝࡢ◊✲㛤Ⓨ࡜㛵㐃◊✲ㄢ㢟࡟ࡘ࠸࡚ࡢࡇࢀࡲ࡛ࡢᡂᯝࢆࠊྜィ㸷⦅ࡢㄽᩥ࡜ࡋ࡚ࡲ

࡜ࡵࡓࡶࡢ࡛࠶ࡿࠋᮏㄽᩥ㞟ࡀࠊ

JIEDI

ࢶ࣮ࣝࡢ᏶ᡂࡢࡓࡵࠊࡑࡋ࡚ࠊᅜෆ࢖࢚࢜ࣥࣥࢪࣥ◊✲ࢥ࣑ࣗࢽࢸ࢕࣮

ࡢ᭦࡞ࡿⓎᒎࡢࡓࡵࡢ୍ຓ࡜࡞ࢀࡤᖾ࠸࡛࠶ࡿࠋ

JAXA

Ᏹᐂ⛉Ꮫ◊✲ᮏ㒊

⯪ᮌ୍ᖾ ᅧ୰ ᆒ

JAXA

᝟ሗ࣭ィ⟬ᕤᏛࢭࣥࢱ࣮

⠛ཎ ⫱

ᔱ ⱥᚿ

JIEDI-1 ࢶ࣮ࣝࡢ㛤Ⓨ㸦࢖࢚࢜ࣥࣥࢪࣥࢢࣜࢵࢻᦆ⪖ホ౯ࢥ࣮ࢻࡢᨵⰋ㸧

୰㔝ṇ຾

¹

㸪Ლᮧዲᏹ

²

㸪⯪ᮌ୍ᖾ

³

Abstract㸸

Key words㸸

ࡣࡌࡵ࡟

1 Tokyo Metropolitan College of Industrial Technology

2 Kyushu University (Presently, Kyoto University)

JIEDI-1 ࢶ࣮ࣝࡢ㛤Ⓨ㸦࢖࢚࢜ࣥࣥࢪࣥࢢࣜࢵࢻᦆ⪖ホ౯ࢥ࣮ࢻࡢᨵⰋ㸧

୰㔝ṇ຾

¹

㸪Ლᮧዲᏹ

²

㸪⯪ᮌ୍ᖾ

³

Development of the JIEDI-1 tool : improvements to the grid erosion evaluation code developed in 2007

By

Masakatsu NAKANO¹, Yoshihiro KAJIMURA² and Ikkoh FUNAKI³

Abstract㸸Improvements have been made to the grid erosion evaluation code (JIEDI-1) to achieve robust convergence and to enhance the accuracies of grid life estimations. The major improved features of the code are 1) the use of Newton-Raphson method and the ICCG solver, 2) modifications of the inlet boundary conditions, 3) incorporation of the differential sputtering yield and redeposition effect of the grid material, and 4) solution-adaptive mesh generation. The last feature is realized by the commercial mesh generation software

“pro-STAR”. Numerical code prediction of grid mass loss showed good agreement with that of P10 ion engine life test, with robust convergence and improved simulation time by a factor of 3~4 in comparison with the previous code.

Key words㸸Ion engine , Grid erosion, P10, JIEDI-1, JIEDI tool, Life test

1. ࡣࡌࡵ࡟

࢖࢚࢜ࣥࣥࢪࣥࡣ᥎㐍๣ࢆࣉࣛࢬ࣐໬ࡉࡏ㸪࢖࢜ࣥࢆ㟼㟁ຍ㏿ࡍࡿࡇ࡜࡛᥎㐍ຊࢆᚓࡿᏱᐂ⏝ࡢࣟࢣࢵࢺ࢚ࣥ

ࢪ࡛ࣥ࠶ࡿ

^1,2)

㸬௚ࡢࣟࢣࢵࢺ࢚ࣥࢪࣥࡼࡾࡶ᥎㐍๣ᾘ㈝㔞ࡀᑡ࡞࠸Ⅼࢆ≉ᚩ࡜ࡋ㸪῝Ᏹᐂ᥈ᰝᶵࡢ୺᥎㐍ࡸᆅ⌫

࿘ᅇ⾨ᫍࡢ㌶㐨࣭ጼໃไᚚ࡟⏝࠸ࡽࢀࡿࡀ㸪᥎ຊࡀᴟࡵ࡚ప࠸ࡓࡵ࡟ᩘ༓࠿ࡽᩘ୓᫬㛫࡟ࡶཬࡪ㛗᫬㛫ࡢసືࡀ せồࡉࢀࡿ㸬࢖࢚࢜ࣥࣥࢪࣥࡣᾏእࢆ୰ᚰ࡟᪤࡟

100

ྎࢆ㉺࠼ࡿᦚ㍕ᐇ⦼ࡀ࠶ࡿࡀ㸪ᶵ✀ࡈ࡜࡟ᐇ᫬㛫ᑑ࿨ホ౯ ヨ㦂ࢆ⤒࡚ᦚ㍕࡟⮳ࡗ࡚࠸ࡿ㸬ᑠᝨᫍ᥈ᰝᶵࡣࡸࡪࡉᦚ㍕ࡢ

P10

࢖࢚࢜ࣥࣥࢪ࡛ࣥࡣ

18,000

᫬㛫࡟ரࡿᑑ࿨

ホ౯ヨ㦂ࢆ⾜ࡗࡓ

³⁾

㸬ࡇࡢࡼ࠺࡟㸪࢖࢚࢜ࣥࣥࢪ࡛ࣥࡣ㛤Ⓨᮇ㛫ࡢከࡃࢆᑑ࿨ホ౯ヨ㦂࡟㈝ࡸࡉࡡࡤ࡞ࡽࡎ㸪ᨵ Ⰻࢆྵࡵࡓ᪂ᶵ✀㛤Ⓨࡀ㐍ࡳ࡟ࡃ࠸㸬᭦࡞ࡿ㛗᫬㛫సືࡀ㐩ᡂ࡛ࡁࢀࡤ㸪ࡼࡾᗈ⠊ᅖ࡟ரࡿ῝Ᏹᐂ᥈ᰝࡸ⾨ᫍࡢ 㛗ᑑ࿨໬ࡀᮇᚅ࡛ࡁࡿࡀ㸪సື᫬㛫ࡢ㛗ᮇ໬࡟క࠸ᚲせ࡞ᑑ࿨ホ౯ヨ㦂ࡶ㛗ᮇ໬ࡍࡿࡇ࡜࠿ࡽྛ✀࣑ࢵࢩࣙࣥ࡬

ࡢࢱ࢖࣒࣮ࣜ࡞࢖࢚࢜ࣥࣥࢪࣥࡢᢞධࡀጉࡆࡽࢀ࡚࠸ࡿ࡜ゝ࠼ࡼ࠺

.

ࡇࡢᑑ࿨ホ౯ヨ㦂ࢆᩘ್ゎᯒ࡟ࡼࡗ࡚௦᭰ࡍࡿヨࡳࡀ㏆ᖺᅜෆእ࡛⢭ຊⓗ࡟㐍ࡵࡽࢀ࡚࠾ࡾ㸪Ᏹᐂ⯟✵◊✲㛤

Ⓨᶵᵓ࡟ࡼࡿ࢖࢜ࣥຍ㏿ࢢࣜࢵࢻ⪏ஂㄆᐃ⏝ᩘ್ゎᯒ

JIEDI (JAXA Ion Engine Development Initiative)

ࢶ࣮

ࣝࡢ◊✲㛤Ⓨࡶࡑࡢ୍ࡘ࡛࠶ࡿ

^{4, 5)}

㸬ᮏ✏࡛㏙࡭ࡿ

JIEDI-1

ࢶ࣮ࣝࡣ

JIEDI

ࢶ࣮ࣝ㛤Ⓨࡢ➨୍ẁ㝵ࡢࡶࡢ࡛࠶

ࡾ㸪ከᏍ࠿ࡽ࡞ࡿ࢖࢚࢜ࣥࣥࢪࣥຍ㏿㒊ࡢ୍Ꮝ࡟╔┠ࡋ㸪ࡑࡇ࡛ᘬࡁ㉳ࡇࡉࢀࡿࢢࣜࢵࢻᦆ⪖ࢆゎᯒࡍࡿࡇ࡜࡛

࢖࢜ࣥຍ㏿⣔ࡢᑑ࿨ࢆホ౯ࡍࡿࡇ࡜ࢆ┠ⓗ࡜ࡋ࡚㛤Ⓨࡀ⾜ࢃࢀ࡚࠸ࡿ㸬

࢖࢚࢜ࣥࣥࢪࣥࡢᵓᡂせ⣲ࡢ୰࡛㸪࢖࢜ࣥຍ㏿⣔ࡣ㸪༳ຍࡋࡓ㟁ᅽᕪ࡟ࡼࡾ࢖࢜ࣥࢆຍ㏿ࡍࡿࡶࡢ࡛㸪ࣉࣛࢬ

࣐⏕ᡂ㒊࡜࡜ࡶ࡟࢖࢚࢜ࣥࣥࢪࣥࢆᵓᡂࡍࡿ㔜せ࡞せ⣲࡛࠶ࡿ㸬ࡇࡢຍ㏿⣔ࡢ୰࡛㟁఩ࡀప࠸ຍ㏿ࢢࣜࢵࢻࡸῶ

㏿ࢢࣜࢵࢻ࡟ࡣ㸪ຍ㏿㏵୰ࡢ࢖࢜ࣥ࡜୰ᛶ⢏Ꮚ࡜ࡢ㛫ࡢ⾪✺࡛⏕ᡂࡋࡓ࢖࢜ࣥࡸ୰ᛶ⢏Ꮚࡀ⾪✺ࡋ㸪ࢫࣃࢵࢱᦆ

⪖ࡀ㉳ࡇࡿࡇ࡜ࡀ▱ࡽࢀ࡚࠸ࡿ

(ᅗ1)㸬ࡇࢀࡣ┤ὶᨺ㟁᪉ᘧࡸ࣐࢖ࢡࣟἼᨺ㟁᪉ᘧ࡞࡝ࡢࣉࣛࢬ࣐⏕ᡂἲࢆၥࢃࡎ

㉳ࡇࡿ⌧㇟࡛࠶ࡾ㸪࢖࢚࢜ࣥࣥࢪࣥ࡟࠾ࡅࡿᑑ࿨ไ㝈せᅉࡢ୍ࡘ࡛࠶ࡿ㸬

࢖࢚࢜ࣥࣥࢪࣥࡢຍ㏿⣔ࢆホ౯ࡍࡿࢥ࣮ࢻࡣ

2

ḟඖ㍈ᑐ⛠ࡢࡶࡢ࠿ࡽ3 ḟඖࡢࡶࡢࡲ࡛ከࡃࡀ㛤Ⓨࡉࢀ࡚࠸ࡿ

6-12)

㸬ゎᯒᡭἲ࡜ࡋ࡚ࡣ㸪ຍ㏿⣔ࡢ㟁఩ศᕸ࡜࢖࢜ࣥ㌶㐨ࢆ཯᚟ィ⟬࡟ࡼࡾ⮬ᕫ↓㡻╔࡟ồࡵࡿࡶࡢ࡛㸪࢖࢜ࣥࢆ

⢏Ꮚ࡜ࡋ࡚ᢅ࠺࠿

(PIC

ἲ)㸪ὶࢀࢆᣢࡘࣅ࣮࣒࡜ࡋ࡚ᢅ࠺࠿ (flux-tube ἲ㸪

streamline-PIC

ἲ)࡟኱ูࡉࢀࡿࡶ

ࡢࡢ㸪ゎᯒᡭἲ࡜ࡋ࡚ࡣ☜❧ࡋࡓẁ㝵࡟࠶ࡿ㸬୍᪉࡛㸪࢖࢚࢜ࣥࣥࢪࣥࢢࣜࢵࢻࡢᦆ⪖ホ౯ࢆᑐ㇟࡜ࡋࡓゎᯒࡣ 㝈ࡽࢀ࡚࠾ࡾ㸪ᦆ⪖ཎᅉ࡜࡞ࡿ⢏Ꮚ࡜ࡋ࡚ࡶ㟁Ⲵ஺᥮࢖࢜ࣥࡢࡳࢆᢅࡗࡓࡶࡢࡀከ࠸㸬

2007

ᖺᗘ࡟㛤Ⓨࡉࢀࡓࢥ

࣮ࢻ࡛ࡣ㸪㟁Ⲵ஺᥮⾪✺࡟ຍ࠼㸪⾪✺ࡢ㝿࡟⏕ᡂࡍࡿ୰ᛶ⢏Ꮚࡸᙎᛶ⾪✺࡞࡝ࡢᙳ㡪ࢆྵࢇࡔᮏ᱁ⓗ࡞ゎᯒࡀึ

ࡵ࡚⾜ࢃࢀࡓࡀ

⁵⁾

㸪୰࿴㟁Ꮚ㏫ὶࡸࢢࣜࢵࢻࡢᵓ㐀◚ቯ࡞࡝ࡢຍ㏿ࢢࣜࢵࢻ⣔ࡢᑑ࿨ไ㝈せᅉࢆホ౯ࡍࡿ࡟ࡣ㸪 ィ⟬ࡢࣟࣂࢫࢺ໬ࡸ⢭ᗘࡢྥୖࡀㄢ㢟࡛࠶ࡗࡓ㸬

ᮏ◊✲࡛ࡣ㸪

2007

ᖺᗘ࡟ᵓ⠏ࡋࡓࢥ࣮ࢻ࡟ᨵⰋࢆ⾜࠺ࡇ࡜࡛ࢶ࣮ࣝࡢ᏶ᡂᗘࢆ㧗ࡵࡓ㸬ලయⓗ࡞ᨵⰋⅬ࡜ࡋ࡚

ࡣ㸪1) ࣏࢔ࢯࣥ᪉⛬ᘧࡢồゎ࡟࠾ࡅࡿ

Newton-Raphson

ἲ࡜

ICCG

ἲࡢᑟධ࡟ࡼࡿ཰᮰ᛶࡢྥୖ࡜㧗㏿໬ࡢ

Xe+

Xe+

Xe+

X_e

┤᥋⾪✺

㟁Ⲵ஺᥮ࠊᙎᛶ⾪✺

࢖࢜ࣥࠊ୰ᛶ⢏Ꮚ

㟁Ⲵ஺᥮࢖࢜ࣥ

෌௜╔

ࢫࢡ࣮ࣜࣥࢢࣜࢵࢻ ຍ㏿ࢢࣜࢵࢻ ࢹ࢕ࢭࣝࢢࣜࢵࢻ

࢖࢜ࣥ

ࢩ࣮ࢫ ᨺ㟁ᐊ

ࣉࣛࢬ࣐

୰࿴ࣉࣛࢬ࣐

ࢢࣜࢵࢻᮦ

1500 V 300 V 0 V

ᅗ

1

࢖࢚࢜ࣥࣥࢪࣥࢢࣜࢵࢻࡢᦆ⪖࣓࢝ࢽࢬ࣒

x y

z

ࢫࢡ࣮ࣜࣥࢢࣜࢵࢻ㟁఩

IV

ຍ㏿ࢢࣜࢵࢻ㟁఩

I_D

ࢹ࢕ࢭࣝࢢࣜࢵࢻ㟁఩

IG

30 㼻

r

_s

r

_a

r

_d

l

_g

t

_s

t

_a

l

_d

t

_d

l

_e

ᅗ

2 JIEDI-1

ࢥ࣮ࢻ࡟࠾ࡅࡿゎᯒ㡿ᇦ࡜グྕࡢㄝ᫂

ᐇ⌧㸪

2)

୺ὶ࢖࢜ࣥࣅ࣮࣒ὶධቃ⏺᮲௳ࡢ☜❧㸪

3)

ᚤศࢫࣃࢵࢱ⋡㸦ࢢࣜࢵࢻ⾲㠃࡬ࡢධᑕゅ࡜ࢫࣃࢵࢱ⋡ࡢ 㛵ಀ㸧࡜ᦆ⪖ࡋ࡚ᨺฟࡉࢀࡓࢢࣜࢵࢻᮦࡢ෌௜╔ィ⟬࡬ࡢᑐᛂ㸪4) 㧗⢭ᗘゎ㐺ྜゎᯒ࣓ࢵࢩࣗࡢ฼⏝

(pro-STAR

ࡢ౑⏝

)࡛࠶ࡿ㸬ᮏ✏࡛ࡣ㸪P10

࢖࢚࢜ࣥࣥࢪࣥࡢ⪏ஂᛶ⬟ヨ㦂⤖ᯝ࡜ẚ㍑ࡍࡿࡇ࡜࡛ࢥ࣮ࢻ᳨ドࢆ

⾜࠺࡜࡜ࡶ࡟㸪཰᮰ᛶࡸィ⟬᫬㛫࡞࡝ࡢホ౯ࢆేࡏ࡚⾜ࡗࡓࡢ࡛㸪ࡑࢀࡽ࡟ࡘ࠸࡚グࡍࡶࡢ࡜ࡍࡿ㸬

2. ィ⟬ࣔࢹࣝࡢᨵⰋ

2.1. ィ⟬ࡢᴫせ

ࢢࣜࢵࢻᦆ⪖ィ⟬ࡢヲ⣽࡟ࡘ࠸࡚ࡣ

2007

ᖺᗘࡢሗ࿌᭩

¹³⁾

࡟グࡉࢀ࡚࠸ࡿࡓࡵ㸪ࡇࡇ࡛ࡣᴫせࢆ⡆₩࡟グࡍ࡜

ඹ࡟ᨵⰋⅬࢆୗ⥺࡛♧ࡍࡶࡢ࡜ࡍࡿ㸬

1)

ධຊࣃ࣓࣮ࣛࢱ࡟ᑐᛂࡋ࡚㸪ึᮇ࣓ࢵࢩࣗࢆᵓ⠏ࡍࡿ (pro-STAR ࡢ౑⏝

)㸬 2)

⮬⏤ศᏊὶィ⟬࡟ࡼࡾࢢࣜࢵࢻ㛫ࡢ୰ᛶ⢏Ꮚศᕸࢆồࡵࡿ㸬

3)

㟁఩ศᕸ࡜୺ὶ࢖࢜ࣥࣅ࣮࣒ศᕸࢆ⧞㏉ࡋィ⟬࡟ࡼࡾ⮬ᕫ↓㡻╔࡟ồࡵࡿ㸬(Poisson ᪉⛬ᘧồゎࡢᨵⰋ

)㸬 4)

୰ᛶ⢏Ꮚ࡜୺ὶ࢖࢜ࣥࣅ࣮࣒㛫ࡢ⾪✺ࢆホ౯ࡋ㸪ࢢࣜࢵࢻᦆ⪖ࢆࡶࡓࡽࡍ࢖࢜ࣥ࡜୰ᛶ⢏Ꮚࢆ㏣㊧ࡍࡿ㸬

5)

ࢢࣜࢵࢻ࡟⾪✺ࡍࡿ⢏Ꮚὶ᮰㸪࢚ࢿࣝࢠ࣮ཬࡧ⾪✺ゅ࠿ࡽᚤศࢫࣃࢵࢱ⋡ࢆ⏝࠸࡚ᦆ⪖⢏Ꮚࡢ㣕ᩓ᪉ྥࢆỴ

ᐃࡍࡿ࡜ྠ᫬࡟ࢫࣃࢵࢱ⋡ࢆホ౯ࡍࡿ㸬

6)

ᦆ⪖⢏Ꮚࡢ㌶㐨ࢆ㏣㊧ࡋ㸪෌௜╔⋡࠿ࡽࢢࣜࢵࢻ࡬ࡢሁ✚⋡ࢆồࡵࡿ㸬

7)

ᦆ⪖⋡࡜ሁ✚⋡ࡢᕪ࠿ࡽ୍ᐃ᫬㛫ᚋࡢࢢࣜࢵࢻᙧ≧ࢆ

pro-STAR

࡟ࡼࡾồࡵ㸪ᚲせ᫬㛫࡟࡞ࡿࡲ࡛

2)

࡟ᡠ

ࡿࡇ࡜ࢆ⧞ࡾ㏉ࡍ㸬

2007

ᖺᗘࣔࢹࣝ࠿ࡽኚ᭦ࡉࢀࡓ⟠ᡤ࡟ࡘ࠸࡚௨ୗ࡟ㄝ᫂ࢆຍ࠼ࡿ㸬ゎᯒ㡿ᇦࡣ

2007

ᖺᗘࣔࢹࣝ࡜ྠࡌᅗ2 ࡟

♧ࡉࢀࡿ

30°60°90°ᗘࡢ┤ゅ୕ゅᰕ㡿ᇦ࡛࠶ࡿ㸬ᅗ2

࡟ࡣᮏ✏࡛౑⏝ࡉࢀࡿグྕࡢᗄఱᙧ≧ࡢᐃ⩏ࡶ♧ࡍ㸬

2.2. ࣏࢔ࢯࣥ᪉⛬ᘧࡢồゎ

㟁఩

I

ࡣ㸪࢖࢜ࣥ࡜㟁Ꮚࡢ㟁Ⲵᐦᗘࢆ

Ui, Ue

࡜ࡋ࡚㸪࣏࢔ࢯࣥ᪉⛬ᘧ

’I=

㻙㻔U

i

㻙U

e) /H

࠿ࡽỴᐃࡉࢀࡿ㸬ࢫࢡ࣮ࣜࣥࢢࣜࢵࢻ࠿ࡽຍ㏿ࢢࣜࢵࢻ࡟ரࡿ✵㛫㟁Ⲵไ㝈㡿ᇦ࡟࠾࠸࡚㟁Ꮚᐦᗘࡣ

0

࡜⪃࠼࡚

ࡼ࠸ࡀ㸪ᨺ㟁ᐊࡸຍ㏿ࢢࣜࢵࢻୗὶ࡛ࡣ㟁ᏊࡀᏑᅾࡍࡿࡓࡵ㸪ྑ㎶ࡢ㟁Ꮚᐦᗘࢆホ౯ࡋ࡞ࡃ࡚ࡣ࡞ࡽ࡞࠸㸬ࡑࡇ

࡛㸪㟁Ꮚᐦᗘࡣ㟁Ꮚ ᗘ

Te [eV]ࡢ࣎ࣝࢶ࣐ࣥࡢ㛵ಀᘧ࡛୚࠼ࡽࢀࡿࡶࡢ࡜ࡋ࡚㸪ᒁᡤ㟁఩I

࡜ୗὶࣉࣛࢬ࣐㟁఩

I_’

࡜ࡢ㟁఩ᕪ࠿ࡽḟࡢࡼ࠺࡟ィ⟬ࡍࡿ㸬

Ue=Ue’exp(㻔II’/Te)

࢖࢜ࣥࡢᐦᗘࡣ୺ὶࡢ࢖࢜ࣥࣅ࣮࣒ࡢ㌶㐨ࢆゎࡃ㝿࡟ྜࢃࡏ࡚ồࡵࡽࢀࡿ㸬

ࡇࡢ࣏࢔ࢯࣥ᪉⛬ᘧࡣ᭷㝈せ⣲ἲ࡟ࡼࡾ㸪

K

ࢆᣑ኱ಀᩘ⾜ิ㸪

F

ࢆ࣎ࣝࢶ࣐ࣥࡢ㛵ಀᘧ࡟㉳ᅉࡍࡿ

exp

㡯ࢆྵ

ࡴ㠀⥺ᙧ࣋ࢡࢺࣝ㛵ᩘ࡜ࡋ࡚

KI= F (I)

࡜᭩ࡃࡇ࡜ࡀ࡛ࡁࡿ㸬

Newton-Raphson

ἲࢆ⏝࠸㸪ྑ㎶ࢆ

1

ḟࡲ࡛ᒎ㛤ࡍࡿࡇ࡜࡟ࡼࡾ

K (I'I)=F (I'I)ҸFIG'I 'I=

㻙㻌 㻔

K 㻙㻌G )^㻙1

㻔

KI 㻙㻌F )

࠿ࡽ㟁఩ࢆಟṇࡋ࡚࠸ࡃ㸬⾜ิゎἲ࡟ࡣ୙᏶඲ࢥࣞࢫ࣮࢟ศゎ๓ฎ⌮௜ࡁඹᙺ໙㓄ἲ

(ICCG

ἲ)ࢆ⏝࠸ࡓ㸬

2.3. ࢖࢜ࣥࣅ࣮࣒㌶㐨ィ⟬࡜ὶධ᮲௳

࢖࢜ࣥࣅ࣮࣒ࡢ㌶㐨ࡣ㐠ື᪉⛬ᘧ

Mvv’v = 㻙q’I

ࢆゎࡃࡇ࡜࡟ࡼࡾỴᐃࡋࡓ㸬ࡇࡇ࡛㸪

M

ࡣ࢖࢜ࣥࡢ

㉁㔞㸪

v

ࡣ࢖࢜ࣥࡢ㏿ᗘ࣋ࢡࢺࣝ㸪

q

ࡣ࢖࢜ࣥࡢ㟁 Ⲵ࡛࠶ࡿ㸬୰ᛶཎᏊ㸦

Xe

ཎᏊࡸࢢࣜࢵࢻᮦ)ࢆ㏣㊧

ࡍࡿ㝿࡟ࡣྑ㎶ࢆ

0

࡜ࡋ࡚ィ⟬ࡍࡿ㸬

୺ὶ࢖࢜ࣥࣅ࣮࣒ࡣୖὶቃ⏺࠿ࡽὶධࡉࡏࡿࡀ㸪

ὶධ㏿ᗘ

uinlet

࡞ࡽࡧ࡟ୖὶቃ⏺࡟࠾ࡅࡿࣉࣛࢬ࣐

ᐦᗘ

n’

ࡣࢫࢡ࣮ࣜࣥࢢࣜࢵࢻ௜㏆࡟ࢩ࣮ࢫࡀᙧᡂ ࡉࢀ࡚࠸ࡿࡇ࡜࠿ࡽḟࡢࡼ࠺࡟Ỵᐃࡋࡓ 㸦ᅗ

3

ཧ↷㸧 㸬

ࡍ࡞ࢃࡕ㸪ࢩ࣮ࢫࡀᙧᡂࡉࢀࡿ࡟ࡣ㸪࣮࣒࣎᮲௳

࠿ࡽᨺ㟁ᐊࣉࣛࢬ࣐㟁఩࠿ࡽࢩ࣮ࢫ➃ࡲ࡛࡟

I = Te /2 [eV]௨ୖࡢ㟁఩㝆ୗࡀᚲせ࡞ࡢ࡛㸪࣮࣒࣎㏿ᗘࢆ uB= (eTe/m i )^0.5

࡜ࡋ࡚㸪ࣉࣛࢬ࣐ᐦᗘࢆ

n’

㸪ࢩ࣮ࢫ➃ࡢ㟁఩ᐦᗘࢆ

ne

࡜ࡍࢀࡤ

ne = n_’exp(㸫I/T_e) = n_’exp(㸫0.5)

ࡀᡂࡾ❧ࡘ㸬ୖὶቃ⏺࠿ࡽὶධࡍࡿ࢖࢜ࣥࡢ㟁ὶᐦᗘ

Ji

ࡣࢩ࣮ࢫ➃࡛ࡶྠ୍࡛࠶ࡾ㸪ࣉࣛࢬ࣐ࡢ‽୰ᛶ࠿ࡽ

Ji/e = n’

™

uinlet (ୖὶቃ⏺) = ni

™

uB (ࢩ࣮ࢫ➃) = ne

™

uB (ࢩ࣮ࢫ➃)

࡛࡞ࡅࢀࡤ࡞ࡽ࡞࠸㸬ࡇࡢᘧࢆゎࡃࡇ࡜࡛㸪

uinlet = exp(㸫0.5)™uB

n’=Ji

™exp(0.5)/

e/uB

࡜࡞ࡿ㸬

2007

ᖺᗘࡢࢥ࣮ࢻ࡛ࡣ࢖࢜ࣥࡢὶධ㏿ᗘࢆ⇕㏿ᗘ࡛୚࠼࡚࠸ࡓࡀ㸪⇕㏿ᗘࡀ࣮࣒࣎㏿ᗘࡼࡾࡶᑠࡉ࠸ࡓࡵ㸪ୖ

ὶቃ⏺࡟࠾ࡅࡿࣉࣛࢬ࣐ᐦᗘࡀ኱ࡁࡃ࡞ࡗ࡚࠸ࡓ㸬ࡑࡢ⤖ᯝ㸪ࢹࣂ࢖㛗ࡀᑠࡉࡃ࡞ࡾ㸪ᚲせ࡞࣓ࢵࢩࣗᩘࡀከࡃ

࡞ࡗ࡚࠸ࡓ㸬௒ᅇࡢቃ⏺᮲௳ࡢᨵⰋ࡟ࡼࡾᚲせ࡞᥋Ⅼᩘࢆ

20 %⛬ᗘ๐ῶࡍࡿࡇ࡜ࡀྍ⬟࡛࠶ࡿ㸬࡞࠾㸪ቃ⏺᮲௳

ࢆኚ࠼ࡓࡇ࡜࡟ࡼࡿࣅ࣮࣒㌶㐨ࡸࢢࣜࢵࢻᦆ⪖࡟୚࠼ࡿᙳ㡪ࡣぢࡽࢀ࡚࠸࡞࠸㸬

2.4. ᚤศࢫࣃࢵࢱ⋡࡜෌௜╔ࣔࢹࣝ

ࢢࣜࢵࢻ⾲㠃࡟࠾ࡅࡿᦆ⪖㔞ࡣ㸪ࢢࣜࢵࢻ࡬ࡢධᑕ⢏Ꮚࡢὶ᮰ࢆ

*

㸪ࢫࣃࢵࢱ⋡ࢆ

Y

㸪ࢢࣜࢵࢻ࡬ࡢධᑕ࢚ࢿ

ࣝࢠ࣮ࢆ

E

㸪ධᑕゅᗘࢆ

T

࡜ࡋ࡚㸪

*g = *

™

Y (E,T )

ࡢ⥲࿴ࢆྲྀࡿࡇ࡜࡛୚࠼ࡽࢀࡿ㸬ධᑕཎᏊࡢᩘ࡟ᑐࡋ࡚࡝ࢀࡔࡅࡢࢢࣜࢵࢻཎᏊࡀ㣕ࡧฟࡍ࠿ࢆ♧ࡍࢫࣃࢵࢱ⋡

ࡣᩥ⊩್

^14-16)

࡞࡝࠿ࡽ୚࠼ࡿࡇ࡜ࡀ࡛ࡁࡿ㸬

୍᪉࡛㸪ࢫࣃࢵࢱࡉࢀࡓࢢࣜࢵࢻᮦᩱࡣᵝࠎ࡞᪉ྥ࡬ᨺฟࡉࢀ㸪௚ࡢࢢࣜࢵࢻ⾲㠃࡟㐩ࡍࡿࡶࡢࡶ࠶ࡿ㸬ࢢࣜ

ࢵࢻ⾲㠃࡟㐩ࡋࡓཎᏊࡢከࡃࡣ㸦

C/C

࡛ࡣ

78%࡜ࡢሗ࿌¹⁷⁾

࠶ࡾ㸧௜╔㸦෌௜╔㸧ࡍࡿࡇ࡜࠿ࡽ㸪ࢫࣃࢵࢱᦆ⪖ࡢ ホ౯ࡢ㝿࡟ࡣ༢⣧࡞ࢫࣃࢵࢱ㔞ࡔࡅ࡛ࡣ࡞ࡃ㸪ࡇࡢ෌௜╔㔞ࢆῶࡌࡓ್࡛ホ౯ࡋ࡞ࡃ࡚ࡣ࡞ࡽ࡞࠸㸬ࡑࡢࡓࡵ࡟

ࡣ㸪ᦆ⪖ࡉࢀࡓཎᏊࡢ㣕ᩓ᪉ྥࢆồࡵ㸪࡝ࡇ࡟෌௜╔ࡍࡿࡢ࠿ࢆ㏣㊧ࡍࡿᚲせࡀ࠶ࡿ㸬

ὶ᮰

*

ࢆᣢࡘධᑕ⢏Ꮚ࡟ࡼࡗ࡚㸪ࢢࣜࢵࢻ࠿ࡽぢ࡚(

T_p, I_p)

᪉ྥ࡬㣕ᩓࡉࢀࡿ㔞ࡣ㸪ᚤศࢫࣃࢵࢱ⋡

dY

ࢆ⏝

࠸࡚

d*gTpIp= *

™

dY (E,TT_p,I_p)

࡜᭩ࡅࡿ㸬ࢢࣜࢵࢻ࡬ධᑕࡍࡿ࢖࢜ࣥ࡜୰ᛶ⢏Ꮚࡢ඲࡚࡟ࡘ࠸࡚࿴ࢆྲྀࡿࡇ࡜࡛㸪ࢢࣜࢵࢻ࠿ࡽぢ࡚(

T_p,I_p)

᪉ྥ

࡟㣕ᩓࡍࡿὶ᮰ࡣ

*gTpIp= 6d*gTpIp

࡜ồࡵࡿࡇ࡜ࡀ࡛ࡁࡿ㸬

ୖὶቃ⏺

ࢩ࣮ࢫ㠃

u_inlet uB

n_i=n_e n_’

ࢫࢡ࣮ࣜࣥࢢࣜࢵࢻ

୰ᚰ㍈

ຍ㏿ࢢࣜࢵࢻ

ᅗ

3 ୖὶቃ⏺᮲௳

ࢥ࣮ࢻ࡟࠾࠸࡚ࡣ㸪ࢢࣜࢵࢻ⾲㠃࡟ᑐᛂࡍࡿせ⣲㠃࡟ࡘ࠸࡚㸪ࡑࢀࢆそ࠺ࡼ࠺࡞௬᝿ⓗ࡞༙⌫ࢆ᝿ᐃࡋ㸪༙⌫

⾲㠃ࢆ➼❧యゅࡢࣃࢿࣝ࡟ศ๭ࡋ࡚ࣃࢿࣝẖ࡟㣕ᩓ㔞ࢆグ᠈ࡍࡿ㸬୺ὶ࢖࢜ࣥ㸪㟁Ⲵ஺᥮࢖࢜ࣥ㸪ᙎᛶᩓ஘࢖࢜

ࣥ㸪ࡑࢀࡽ࡜ྠ᫬࡟⏕ᡂࡍࡿ୰ᛶ⢏Ꮚࡢࢢࣜࢵࢻ࡬ࡢ⾪✺࡟ࡼࡿ㣕ᩓ㔞ࢆࡑࢀࡒࢀồࡵ࡚࿴ࢆྲྀࡿࡇ࡜࡛㸪ࢢࣜ

ࢵࢻୖࡢ≉ᐃࡢሙᡤ࠿ࡽྛ᪉ྥ࡟㣕ᩓࡍࡿࢢࣜࢵࢻᮦࡢὶ᮰ࡀィ⟬࡛ࡁࡿ㸬

ࡑࡢᚋ㸪ศ๭ࡉࢀࡓ❧యゅࡢ୰ᚰ᪉ྥ࡟ྥࡅ࡚ὶ᮰

*gTpIp

ࢆᣢࡘࢢࣜࢵࢻᮦࣅ࣮࣒ࢆᨺฟࡍࡿ㸬㌶㐨ࡢ㏣㊧᪉ ἲࡣ୰ᛶ⢏Ꮚ㌶㐨ィ⟬࡜ྠࡌ࡛࠶ࡿ㸬ࣅ࣮࣒ࡀ௚ࡢࢢࣜࢵࢻ࡟⾪✺ࡋࡓሙྜ࡟ࡣ㸪෌௜╔⋡

Is

ࢆ᥃ࡅࡿࡇ࡜࡛௜

╔㔞

I s

™

* gTpIp

ࡀồࡲࡿ㸬

௨ୖ࡟ࡼࡾ㸪ࢢࣜࢵࢻ⾲㠃࡟࠾ࡅࡿᦆ⪖⋡࡜෌௜╔⋡ࡀồࡲࡗࡓࡢ࡛㸪ᦆ⪖⋡࠿ࡽ෌௜╔⋡ࢆᘬ࠸ࡓṇ࿡ࡢᦆ

⪖⋡࡟㐺ᙜ࡞᫬㛫ᖜࢆ࠿ࡅࡿࡇ࡜࡛ࢢࣜࢵࢻ⾲㠃ࡢ㉁㔞ኚ໬࠿ࡽయ✚ኚ໬㸪᥋Ⅼࡢ఩⨨ኚ໬ࡢ㡰࡛㸪ᦆ⪖࡟ࡼࡿ

ࢢࣜࢵࢻᙧ≧ࡢኚ໬ࡀィ⟬࡛ࡁࡿ㸬

2.5. 㧗⢭ᗘゎ㐺ྜ࣓ࢵࢩࣗࢯࣇࢺ࡬ࡢᑐᛂ

᫖ᖺࡲ࡛ࡢࢥ࣮ࢻ࡛ࡣ➹⪅ࡀసᡂࡋࡓ࣓ࢵࢩࣗ⏕ᡂࢯࣇࢺࢆ⏝࠸࡚ゎᯒ࣓ࢵࢩࣗࢆᵓ⠏ࡋ࡚࠸ࡓࡀ㸪ᕷ㈍ࢯࣇ

ࢺ࢙࢘࢔࡟ᑐᛂࡍࢀࡤ⢭ᗘ࡞ࡽࡧ࡟౑࠸຾ᡭࡀྥୖࡍࡿ㸬ࡑࡇ࡛(ᰴ

)ࢩ࣮ࢹ࢕࣭࢔ࢲࣉࢥ࣭ࢪࣕࣃࣥ (CDAJ)ࡀ

㈍኎ࡍࡿỗ⏝⇕ὶయゎᯒࢯࣇࢺ࢙࢘࢔ࠕSTAR-CDࠖࡢᶆ‽ࣉ࣏ࣜࢫࢺࣉࣟࢭࢵࢧࠕ

pro-STARࠖࢆ⏝࠸࡚ゎ㐺ྜ

࣓ࢵࢩࣗᵓ⠏ࢆ⾜࠺ࡇ࡜࡜ࡋࡓ㸬࣓ࢵࢩࣗᵓ⠏࡟࠾࠸࡚ࡣ㸪ࢢࣜࢵࢻࡢᏍᚄ㸪ཌࡉ㸪㛫㝸㸪ࢢࣜࢵࢻศ๭ᩘࢆᣦ ᐃࡍࡿࡇ࡜࡟ࡼࡾ㸪⮬ືⓗ࡟ึᮇゎᯒ࣓ࢵࢩࣗࢆᵓ⠏ࡍࡿ࣐ࢡࣟࢆ㛤Ⓨࡋࡓ㸬⌧ᅾ㸪ࢢࣜࢵࢻゎᯒࢥ࣮ࢻ࠿ࡽฟ ຊࡉࢀࡓࢢࣜࢵࢻ⾲㠃ࡢ᥋Ⅼ⛣ືࢹ࣮ࢱࢆᇶ࡟ࡋ࡚㸪ᦆ⪖ࢆ཯ᫎࡋࡓ࣓ࢵࢩࣗࢆ෌ᵓ⠏࡛ࡁࡿࡼ࠺࣐ࢡࣟࡢ㛤Ⓨ

సᴗࢆ㐍ࡵ࡚࠸ࡿ㸬࡞࠾㸪௒ᖺᗘࡣ

pro-STAR

ࢆ౑⏝ࡋࡓࡀ㸪௚ࡢࢯࣇࢺ࢙࢘࢔࡛ࡶฟຊ࡜ධຊࢹ࣮ࢱࡢࢥࣥࣂ

࣮ࢱࢆసᡂࡍࡿࡇ࡜࡛ᑐᛂࡀྍ⬟࡞௙ᵝ࡜࡞ࡗ࡚࠸ࡿ㸬

0 hr 4,000 hr 8,000 hr 12,000 hr

16,000 hr 20,000 hr 24,000 hr 28,000 hr

ᅗ

4 P10

ࢢࣜࢵࢻࡢᙧ≧ኚ໬࡜ᦆ⪖ᙉᗘண 

(ᨺฟཎᏊᩘ/m²

ѿs)

㧗⢭ᗘゎ㐺ྜ࣓ࢵࢩࣗࢯࣇࢺ࡬ࡢᑐᛂ

0 hr 4,000 hr 8,000 hr 12,000 hr

16,000 hr 20,000 hr 24,000 hr 28,000 hr

ᅗ

4 μ10

ࢢࣜࢵࢻࡢᙧ≧ኚ໬࡜ᦆ⪖ᙉᗘண 

(ᨺฟཎᏊᩘ/m²

ѿs)

3. ィ⟬౛

ȣ10 EM2 ࡢ

C/C

ࢢࣜࢵࢻຍ㏿⣔

^18,19)

࡟ࡘ࠸࡚ᦆ⪖ࢆィ⟬ࡋ㸪ᐇ㦂⤖ᯝ࡜ẚ㍑ࡍࡿࡇ࡜࡛ࢥ࣮ࢻࡢጇᙜᛶࢆホ ౯ࡋࡓ㸬ࢫࢡ࣮ࣜࣥࢢࣜࢵࢻ㸪ຍ㏿ࢢࣜࢵࢻ㸪ῶ㏿ࢢࣜࢵࢻࡢᏍᚄࡣ

3.0 mm, 1.8 mm, 2.5 mm㸪ྛࢢࣜࢵࢻࡢ

ᖜࢆ

1.0 mm, 1.0 mm, 1.0 mm㸪㛫㝸ࢆ0.35 mm, 0.5 mm

࡜ࡋ㸪ࢫࢡ࣮ࣜࣥࢢࣜࢵࢻࡢ㛤ཱྀẚࢆ

0.67

࡜ࡋ࡚㸪

᥋Ⅼᩘ

23,107,

せ⣲ᩘ

20,025

ࡢ࣓ࢵࢩࣗࢆ⏝࠸࡚ィ⟬ࡋࡓ㸬࣓ࢵࢩࣗᵓ⠏࡟࠾࠸࡚ࡣ㸪せ⣲ࡢ㍈᪉ྥ㛫㝸ࢆᨺ

㟁ᐊཬࡧ୰࿴㡿ᇦ࡛ࢹࣂ࢖㛗௨ୗ࡟࡞ࡿࡼ࠺࡟ࡋࡓ㸬

࢖࢜ࣥࣅ࣮࣒ཬࡧ୰ᛶ⢏Ꮚὶ᮰ࢆỴᐃࡍࡿࡓࡵࡢసື᮲௳࡜ࡋ࡚つ᱁໬ࣃ࣮ࣅ࢔ࣥࢫ㸦NP/H㸧ࡢ್ࢆ 0.62™

10^㻙㻥A/V^1.5

㸦

le= (lg2+rs2)^1/2

ࢆ⏝࠸ࡓ㸧࡜ࡋ㸪᥎㐍๣฼⏝ຠ⋡ࢆ

83 %࡜ࡋࡓ㸬ࢫࢡ࣮ࣜࣥࢢࣜࢵࢻ㟁ᅽࡣ1,500 V㸪

ຍ㏿ࢢࣜࢵࢻ㟁ᅽࡣ 㻙300V㸪ᨺ㟁ᐊࡢࣉࣛࢬ࣐㟁఩ࡣ

30 V

ࡔࡅࢫࢡ࣮ࣜࣥࢢࣜࢵࢻ㟁ᅽࡼࡾࡶ㧗࠸

1,530 V

࡜ ࡋࡓ㸬ᨺ㟁ᐊ࠾ࡼࡧୗὶࡢ୰࿴㡿ᇦࡢ㟁Ꮚ ᗘࡣ

6 eV

࡜ࡋ㸪୰ᛶ⢏Ꮚ㸪࢖࢜ࣥ㸪ࢢࣜࢵࢻࡢྛ ᗘࡣ

373 K

࡜ ࡋࡓ㸬ᨺ㟁ᐊ࡟ධᑕࡍࡿ࢖࢜ࣥࡢᐦᗘ࡜㏿ᗘࡣ

2.3

⠇࡟ᚑࡗ࡚୚࠼㸪୰ᛶ⢏Ꮚࡢ㏿ᗘࡣ⇕㏿ᗘ࡛୚࠼ࡿ࡜࡜ࡶ࡟㸪

NP/H

࡜᥎㐍๣฼⏝ຠ⋡࠿ࡽồࡵࡓ୰ᛶ⢏Ꮚὶ᮰ࡼࡾ୰ᛶ⢏ᏊᐦᗘࢆỴᐃࡋࡓ㸬ࡲࡓ㸪ୗὶ࡟࠾ࡅࡿ୰࿴ࣉࣛࢬ

࣐ࡢᐦᗘࡣ㸪ୖὶቃ⏺࡟࠾ࡅࡿ࢖࢜ࣥὶ᮰࡟ࢫࢡ࣮ࣜࣥࢢࣜࢵࢻ㛤ཱྀẚࢆ᥃ࡅࡓࡶࡢࢆ↓㝈㐲ࡢ࢖࢜ࣥࣅ࣮࣒ࡢ

㏿ᗘ (2

eIs/M )^0.5

࡛㝖ࡍࡿࡇ࡜࡛ồࡵ࡚࠸ࡿ㸬

᥎㐍๣࡛࠶ࡿ

Xe⁺

㻙Xe 㛫ࡢ㟁Ⲵ஺᥮⾪✺᩿㠃✚ࡣ

Vce= (17.35㻙2.34™log(v))²

™10

^㻙20 m²

ࢆ୚࠼㸪ᙎᛶᩓ஘ࡣ

Hard Sphere

ࣔࢹࣝ (V

els = 21.0™10^㻙20 m²)ࢆ⏝࠸ࡓ㸬ୖὶቃ⏺ࡼࡾධᑕࡉࡏࡿ୺ὶ࢖࢜ࣥࣅ࣮࣒ࡢᮏᩘࡣ୍ᵝ

࡞㛫㝸࡛

56,651

ᮏ㸦1 せ⣲࠶ࡓࡾ

276

ᮏࡀ㏻㐣㸧ࢆ୚࠼㸪ࢫࣃࢵࢱィ⟬ࡢࡓࡵ࡟ྛせ⣲࠿ࡽὶฟࡉࡏࡿ㟁Ⲵ஺

᥮࢖࢜ࣥ࡜୰ᛶ⢏Ꮚ㸪ᙎᛶ⾪✺࢖࢜ࣥ࡜⾪✺ࢆཷࡅࡓ୰ᛶ⢏Ꮚࡢᩘࡣせ⣲࠶ࡓࡾࡑࢀࡒࢀ

32

࣌࢔㸦ྜィ

128

ಶ㸧

࡜ࡋࡓ㸬ࡇࢀࡽ⢏ᏊࡢฟⓎ఩⨨ࡣࣛࣥࢲ࣒࡟Ỵᐃࡋ㸪஘ᩘࡢ⏕ᡂ࡟ࡣ࣓ࣝࢭࣥࢾࢶ࢖ࢫࢱ (MT19937) ࢆ⏝࠸ࡓ㸬

࡞࠾㸪

2

౯࢖࢜ࣥࡢ๭ྜࡣ↓ど࡛ࡁࡿࡶࡢ࡜ࡋ࡚ィ⟬࡟ࡣྵࢇ࡛࠸࡞࠸㸬

⌧ᅾࡢ࡜ࡇࢁ

C/C

ࡢᚤศࢫࣃࢵࢱ⋡࡜ࡋ࡚฼⏝ྍ⬟࡞ࢹ࣮ࢱ࣮࣋ࢫࡀᏑᅾࡋ࡞࠸ࡓࡵ

²⁰⁾

㸪ࢫࣃࢵࢱ⋡ࢆᩥ⊩

14,16)

ࡢ

Williams

ࡽࡢࢹ࣮ࢱࢆ⏝࠸࡚ィ⟬ࡋࡓᚋ㸪ࢢࣜࢵࢻ⾲㠃࠿ࡽἲ⥺᪉ྥ࡟ぢࡿ✵㛫ࢆ

64

ಶࡢ➼❧యゅ࡟ศ

๭ࡋ࡚ᆒ➼࡞㔜ࡳ

(1/64) ࢆ୚࠼࡚ࢢࣜࢵࢻ⾲㠃ᮦࡢ㣕ᩓ⋡࡜ࡋࡓ㸬ࡲࡓ㸪෌௜╔⋡ࡣᩥ⊩¹⁷⁾

࠿ࡽ

0.78

࡜୚࠼ࡿ

Accel grid mass change [mg/hole]

Accumulated operation time [hrs]

Redeposition factor = 0.78

No redeposition

Experiment

0 10000 20000 30000

-1.5 -1 -0.5 0

ᅗ5 ࣐࢖ࢡࣟἼ࢖࢚࢜ࣥࣥࢪࣥ

P10

ࢢࣜࢵࢻ

1Ꮝ࠶

ࡓࡾࡢ㉁㔞ኚ໬

1.E-04 1.E-03 1.E-02 1.E-01 1.E+00 1.E+01 1.E+02

0 50 100 150 200 250

Maximum |'I| [V]

Iteration number

ᅗ

6 㟁఩ィ⟬࡟࠾ࡅࡿṧᕪࡢኚ໬౛

ࡶࡢ࡜ࡋ㸪௜╔ሙᡤ࡟ࡼࡽ࡞࠸ࡶࡢ࡜ࡋࡓ㸬ࢢࣜࢵࢻᙧ≧ࡢ᭦᪂࡟࠶ࡓࡾ㸪᫬㛫้ࡳࡣ᫖ᖺᗘࡢ⤖ᯝࡶ㋃ࡲ࠼

't

= 2,000 hrs

࡜ࡋࡓ㸬ྛ᫬㛫ࢫࢸࢵࣉẖࡢࢢࣜࢵࢻ㉁㔞ᦆ⪖㔞࠿ࡽ

C/C

ࡢẚ㔜ࢆ

1.7

࡜ࡋ࡚ࢢࣜࢵࢻࡢయ✚ኚ໬

ࢆồࡵ㸪᥋Ⅼࢆ⛣ືࡉࡏ࡚ᦆ⪖ᚋࡢ࣓ࢵࢩࣗࢆ෌ᵓ⠏ࡋࡓ㸬

ᅗ

4

࡟ࢢࣜࢵࢻ⾲㠃ᙧ≧࡜ᦆ⪖ᙉᗘศᕸࢆ♧ࡍ㸬ᕥ࠿ࡽࢫࢡ࣮ࣜࣥࢢࣜࢵࢻ㸪ຍ㏿ࢢࣜࢵࢻ㸪ῶ㏿ࢢࣜࢵࢻࡢ 㡰࡛࠶ࡿ㸬సື㛤ጞ࠿ࡽ

28,000

᫬㛫ᚋࡲ࡛

4,000

᫬㛫ࡈ࡜࡟♧ࡋ࡚࠾ࡾ㸪ᦆ⪖ᙉᗘࡣ༢఩᫬㛫࡟༢఩㠃✚࠿ࡽ

ᨺฟࡉࢀࡿཎᏊᩘ࡛Ⰽศࡅࡉࢀ࡚࠸ࡿ㸬 ྛࢢࣜࢵࢻࡢ୰࡛᭱ࡶᦆ⪖⋡ࡀ㧗࠸ࡢࡣຍ㏿ࢢࣜࢵࢻୗὶෆቨ㒊࡛࠶ࡾ㸪

⤒㐣᫬㛫࡜ඹ࡟ຍ㏿ࢢࣜࢵࢻෆᚄࡀቑຍࡋ࡚࠸ࡿࡇ࡜ࡀศ࠿ࡿ㸬ຍ㏿ࢢࣜࢵࢻෆቨୗὶഃࡀ⃭ࡋࡃᦆ⪖ࢆཷࡅࡿ

࡜࠸࠺⤖ᯝࡣᐇ㦂⤖ᯝ࡜୍⮴ࡋ࡚࠸ࡿ㸬

ィ⟬࡟ࡼࡗ࡚ᚓࡽࢀࡓຍ㏿ࢢࣜࢵࢻ㟁ὶࡣసື┤ᚋ࡛

0.65 PA

࡛࠶ࡗࡓ㸬ࡑࡢෆヂࡣ㟁Ⲵ஺᥮⾪✺࡟ࡼࡿ࢖࢜

ࣥࡀ 0.52 PA ࡛࠶ࡾ㸪ᙎᛶᩓ஘࢖࢜ࣥ࡟ࡼࡿࡶࡢࡀ

0.13 PA

࡛࠶ࡗࡓ㸬㟁Ⲵ஺᥮࢖࢜ࣥࡢ๭ྜࡀ㧗࠸ࡶࡢࡢᙎ ᛶᩓ஘࡟ࡼࡿ࢖࢜ࣥࡶ඲యࡢ

20 %ࢆ༨ࡵࡿࡇ࡜࠿ࡽ㸪ࡇࡢ⤖ᯝࡣ㸪㟁Ⲵ஺᥮⾪✺࡟ຍ࠼࡚ᙎᛶ⾪✺ࢆࣔࢹࣝ໬ࡍ

ࡿᚲせࡀ࠶ࡿࡇ࡜ࢆ♧ࡋ࡚࠸ࡿ㸬ࡲࡓ㸪ࡇࡢ㟁ὶ್࡟Ꮝᩘ

800

ಶࢆ࠿ࡅࡿࡇ࡜࡛ࢢࣜࢵࢻ㟁ὶࢆホ౯ࡍࡿ࡜

0.52 mA

࡛࠶ࡗࡓ㸬⯪ᮌࡽࡢᐇ㦂

³⁾

࡛ࡣຍ㏿ࢢࣜࢵࢻ㟁ὶ್ࡣ

0.5s0.05 mA

࡜ሗ࿌ࡉࢀ࡚࠾ࡾ㸪ᐃ㔞ⓗ࡟ࡶࡼ࠸୍

⮴ࢆ♧ࡋ࡚࠸ࡿ㸬

ᅗ

5

࡟ຍ㏿ࢢࣜࢵࢻࡢ㉁㔞ኚ໬ࢆᐇ⥺㸦෌௜╔⋡ 0.78㸧࡛♧ࡍ࡜࡜ࡶ࡟㸪෌௜╔࡞ࡋࢆ᝿ᐃࡋ࡚ィ⟬ࡋࡓ⤖

ᯝ㸦no redeposition㸧ࢆ◚⥺࡛♧ࡍ㸬෌௜╔ࡢᙳ㡪ࢆྵࢇ࡛ィ⟬ࡋࡓࡶࡢࡢ᪉ࡀ㸪ᐇ㦂ࢹ࣮ࢱ(ᩥ⊩

18

ࡢ

Fig.7)

࡜ࡼ࠸୍⮴ࢆ♧ࡋ࡚࠸ࡿ㸬 ࡞࠾㸪ᮏィ⟬࡛ࡣࢫࣃࢵࢱࡉࢀࡓࢢࣜࢵࢻᮦᩱࡀ඲࡚ࡢ᪉ྥ࡟ᆒ୍࡟㣕ᩓࡍࡿ࡜࠸࠺

⡆᫆໬ࡉࢀࡓࣔࢹ࡛ࣝィ⟬ࡋ࡚࠸ࡿࡀ㸪⌧ᅾⓒṊࡽ࡟ࡼࡾ㛤Ⓨࡉࢀ࡚࠸ࡿᚤศࢫࣃࢵࢱ⋡ࣔࢹࣝࡢᑟධ࡟ࡼࡾ௒

ᚋ᭦࡞ࡿィ⟬⢭ᗘࡢྥୖࡀᅗࡽࢀࡿ࡛࠶ࢁ࠺

²¹⁾

㸬

ᅗ

6

ࡣ࣏࢔ࢯࣥ᪉⛬ᘧồゎ࡟࠾ࡅࡿ࢖ࢱ࣮ࣞࢩࣙࣥࡈ࡜ࡢṧᕪ㸦㟁఩ಟṇ㔞ࡢ᭱኱್㸧ࡢኚ໬ࡢ

1

౛࡛࠶ࡿ㸬 ṧᕪࡣ࢖ࢱ࣮ࣞࢩࣙࣥࡈ࡜࡟༢ㄪ࡟ῶᑡࡋ࡚࠾ࡾ㸪

250

ᅇ๓ᚋ࡛

10^-3 [V]

௨ୗ࡟ࡲ࡛ῶᑡࡍࡿ㸬ࡇࡢᏳᐃࡋࡓ㟁

఩ࡢ཰᮰ࡣ

Newton-Raphson

ἲࡢ᥇⏝࡟ࡼࡾࡶࡓࡽࡉࢀࡓ࡜⪃࠼ࡽࢀࡿ㸬ࡲࡓ㸪ィ⟬᫬㛫ࡣ

2007

ᖺᗘసᡂࡢࢥ

࣮ࢻ࡜ẚ࡭࡚

3㹼5

ಸ⛬ྥୖࡋࡓ㸬ࡇࢀࡣ

Newton-Raphson

ἲ࡟ࡼࡿ཰᮰ᛶࡢྥୖ࡜ඹ࡟㸪ୖὶቃ⏺᮲௳ࡢᨵⰋ

࡟ࡼࡿ࣓ࢵࢩࣗᩘࡢ๐ῶ㸦

2007

ᖺࢥ࣮ࢻẚ࡛

20 %⛬ᗘ㸧࡞ࡽࡧ࡟ICCG

ࡢ᥇⏝࡟ࡼࡿ⾜ิィ⟬ࡢ㧗㏿໬ࡀ⥲ྜ

ⓗ࡟ᐤ୚ࡋࡓࡶࡢ࡜⪃࠼ࡽࢀࡿ㸬

4. ࡲ࡜ࡵ

2007

ᖺᗘ࡟㛤Ⓨࡋࡓࢢࣜࢵࢻᦆ⪖ゎᯒࢥ࣮ࢻࡢᛶ⬟ྥୖࢆ┠ᣦࡋᨵⰋࢆ᪋ࡋࡓ㸬ලయⓗ࡟ࡣ

1)

Newton-Raphson

ἲ࡜

ICCG

ἲࡢᑟධ࡟ࡼࡿ࣏࢔ࢯࣥ᪉⛬ᘧồゎࡢ཰᮰ᛶࡢྥୖ࡜㧗㏿໬㸪

2)

࢖࢜ࣥࣅ࣮࣒ὶ

ධቃ⏺ࡢᨵⰋ࡟ࡼࡿ࣓ࢵࢩࣗᩘ๐ῶ㸪

3)

ᚤศࢫࣃࢵࢱ⋡࡜෌௜╔ィ⟬ࡢྲྀࡾ㎸ࡳ㸪

4)

㧗⢭ᗘゎ㐺ྜ࣓ࢵࢩࣗࡢ ᵓ⠏ (pro-STAR ࡢ౑⏝)࡛࠶ࡿ㸬

P10

࢖࢚࢜ࣥࣥࢪࣥࡢᐇ㦂ࢹ࣮ࢱࢆ⏝࠸ࡓࢥ࣮ࢻ᳨ドࡢ⤖ᯝ㸪㟁఩ィ⟬ࡢ㧗࠸

཰᮰ᛶ࡜㧗㏿໬ࡢᐇ⌧ࢆ☜ㄆࡍࡿ࡜࡜ࡶ࡟㸪 ᚤศࢫࣃࢵࢱ⋡࡜෌௜╔ࣔࢹࣝࡢᑟධ࡟ࡼࡗ࡚ᐇ㦂್ࢆࡼࡾࡼࡃ෌

⌧ࡍࡿ⤖ᯝࢆᚓࡓ㸬ࡲࡓ㸪

pro-STAR

ࢆ⏝࠸ࡿࡇ࡜࡛㧗⢭ᗘゎ㐺ྜ࣓ࢵࢩࣗᵓ⠏సᴗࡀࢫ࣒࣮ࢬ࡟࡞ࡗࡓ㸬ヲ⣽

࡞ᚤศࢫࣃࢵࢱ⋡ࢹ࣮ࢱ࣮࣋ࢫࡢᵓ⠏ࡸ࣓ࢵࢩࣗ෌ᵓ⠏࣐ࢡࣟࡢᨵⰋసᴗ࡞࡝௒ᚋࡢㄢ㢟ࡣ࠶ࡿࡶࡢࡢ㸪 ࢖࢜ࣥ

࢚ࣥࢪࣥࡢ㛤Ⓨ࡟༑ศ౑⏝ྍ⬟࡞⪏ஂᛶ⬟ㄆᐃ⏝ࢩ࣑࣮ࣗࣞࢩࣙࣥࢥ࣮ࢻࡢ㛤Ⓨ࡟ᡂຌࡋࡓ㸬

ㅰ㎡

࢖࢜ࣥຍ㏿ࢢࣜࢵࢻ⪏ஂㄆᐃ⏝ᩘ್ゎᯒ

JIEDI (JAXA Ion Engine Development Initiatives)ࢶ࣮ࣝࡢ◊✲㛤Ⓨࢆᨭ

᥼ࡋ࡚ࡃࡔࡉࡗࡓ

JAXA

᝟ሗࢩࢫࢸ࣒㒊㸪JAXA ᝟ሗ࣭ィ⟬ᕤᏛ

(JEDI)ࢭࣥࢱ࣮㸪࠾ࡼࡧ㸪㛗ᒸ⛉Ꮫᢏ⾡኱Ꮫ࣭

Ⳣ஭ගಙẶ 㸪ࢫࢱࢵࣇࢧ࣮ࣅࢫ࣭∾㔝ᾈྖẶ 㸪㛵㐃ࡢⓙᵝ࡬ឤㅰࡢពࢆ⾲ࡋࡲࡍ㸬

ཧ⪃ᩥ⊩

[1]

Ⲩᕝ⩏༤, ᅧ୰ᆒ, ୰ᒣᐅ඾, すᒣ࿴Ꮥ㸪

“࢖࢚࢜ࣥࣥࢪࣥ࡟ࡼࡿືຊ⯟⾜͇,

ࢥࣟࢼ♫, 2006, ➨

1

❶.

[2]

ᰩᮌᜤ୍㸪Ⲩᕝ⩏༤⦅㸪 ͆㟁Ẽ᥎㐍ࣟࢣࢵࢺධ㛛͇ 㸪ᮾி኱Ꮫฟ∧఍㸪2003.

[3]

ᅧ୰ ᆒ, ᇼෆᗣ⏨, すᒣ࿴Ꮥ, ⯪ᮌ୍ᖾ, ΎỈᖾኵ, ᒣ⏣ဴဢ㸪

“ࡣࡸࡪࡉᦚ㍕࣐࢖ࢡࣟἼᨺ㟁ᘧ࢖࢚࢜ࣥࣥ

ࢪࣥ”, ᪥ᮏ⯟✵ᏱᐂᏛ఍ㄅ, 53 (2005), pp. 203-210㸬

[4]

ᅧ୰ ᆒ㸪

“࢖࢜ࣥຍ㏿ࢢࣜࢵࢻ⪏ஂㄆᐃ⏝ᩘ್ゎᯒJIEDI (JAXA' s Ion Engine Development Initiatives)

ࢶ࣮ࣝࡢ◊✲㛤Ⓨ”, ࢖࢜ࣥຍ㏿ࢢࣜࢵࢻ⪏ஂㄆᐃ⏝ᩘ್ゎᯒ

JIEDI (JAXA's Ion Engine Development Initiatives)

ࢶ࣮ࣝࡢ◊✲㛤Ⓨ࣮࣡ࢡࢩࣙࢵࣉ

2006

ᖺᗘሗ࿌᭩㸪JAXA-SP-06-019, 2007, pp. 5-9.

[5]

⯪ᮌ୍ᖾ㸪୰㔝ṇ຾㸪୰ᒣᐅ඾㸪Ლᮧዲᏹ㸪 ͆JIEDI ࢶ࣮ࣝ㛤Ⓨୖࡢㄢ㢟࡜

2007

ᖺᗘࡢάື᪉㔪

”

㸪࢖࢜ࣥ

ຍ㏿ࢢࣜࢵࢻ⪏ஂㄆᐃ⏝ᩘ್ゎᯒ

JIEDI (JAXA Ion Engine Development Initiatives)

ࢶ࣮ࣝࡢ◊✲㛤Ⓨ࣮࣡ࢡࢩ

ࣙࢵࣉ

2006

ᖺᗘሗ࿌᭩㸪

JAXA-SP-06-019, pp.75-81.

[6] Emhoff, J., W. and Boyd, I. D., “NEXT Ion Optics Modeling of Total Thruster Performance,” 41^st AIAA/ASME/SAE/ASEE joint Propulsion Conference & Exhibit, Tucson, Arizona, July 2005.

[7] Farnell, C. C., Williams, J. D., and Wilbur, P. J., “NEXT Ion Optics Simulation Via ffx,” AIAA 2003-4869, 39^th AIAA/ASME/SAE/ASEE Joint Propulsion Conference, Huntsville, AL, July 2003.

[8] Nakayama, Y. and Wilbur, P. J., “Numerical Simulation of Ion Beam Optics for Many-grid Systems,”

AIAA Journal of Propulsion and Power, Vol. 19, No. 4, 2001, pp. 607.613.

[9] Okawa, Y. and Takegahara, H., “Particle Simulation on Ion Beam Extraction Phenomena in an Ion Thruster,” 26^th International Electric Propulsion Conference, IEPC 99-162, Oct. 1999.

[10] Wang. J., Polk. J., Brophy J. and Katz, I., “Three-Dimensional Particle Simulations of Ion-Optics Plasma Flow and Grid Erosion,” Journal of Propulsion and Power, Vol. 19, No. 6, pp.1192-1199.

[11] Wang, J., Caoy, Y., Kafafyy, R., Martinezz, R. and Williams, J., “Ion Impingement Limits of Sub-Scale Ion Optics: Comparison of Simulation and Experiment,” AIAA 2006-4999, 42^nd AIAA/ASME/SAE/ASEE Joint Propulsion Conference & Exhibit, 9-12 July 2006, Sacramento, California.

[12]

୰㔝ṇ຾, Ⲩᕝ⩏༤, ͆࢖࢚࢜ࣥࣥࢪࣥࡢࢢࣜࢵࢻ⪏ஂᛶ⬟ィ⟬͇, ᪥ᮏ⯟✵ᏱᐂᏛ఍ㄽᩥ㞟 48(2000),

pp.111-117.

[13]

୰㔝ṇ຾㸪“࢖࢚࢜ࣥࣥࢪࣥࡢࢢࣜࢵࢻᦆ⪖ホ౯ࢥ࣮ࢻࡢᨵⰋ”㸪࢖࢜ࣥຍ㏿ࢢࣜࢵࢻ⪏ஂㄆᐃ⏝ᩘ್ゎᯒ

JIEDI (JAXA Ion Engine Development Initiatives)

ࢶ࣮ࣝࡢ◊✲㛤Ⓨ࣮࣡ࢡࢩࣙࢵࣉ

2006

ᖺᗘሗ࿌᭩㸪

JAXA-SP-06-019, pp.47-53.

[14] Williams, J. D., Johnson M. L. and Williams, D. D., “Differential Sputtering Behavior of Pyrolytic Graphite and Carbon-Carbon Composite Under Xenon Bombardment,” AIAA 2004-3788, 40^th AIAA/ASME/SAE/ASEE Joint Propulsion Conference and Exhibit, 11-14 July 2004, Fort Lauderdale, Florida.

[15] Yamamura, Y. and Tahara, H., “Energy Dependence of Ion-Induced Sputtering Yields from Monatomic Solids at Normal Incidence,” Atomic Data and Nuclear Tables, Vol.62, No.2, 1996, pp.149-253.

[16] Zoerb, K. A., Williams, J. D., Williams D. D. and Yalin, A. P., “Differential Sputtering Yields of Refractory Metals by Xenon, Krypton, and Argon Ion Bombardment at Normal and Oblique Incidences,”

IEPC-2005-293, 29^th International Electric Propulsion Conference, Princeton University, October 31-Novermber 4, 2005.

[17] Marker, C. L., Clemons, L. A., Banks, B. A., Miller, S., Snyder, A., Hung, C., Karniotis C. A. and Waters, D. L., “Transport of Sputtered Carbon During Ground-Based Life Testing of Ion Thrusters,”

NASA/TM-2005-213798, June 2005.

[18] Funaki, I., Kuninaka, H., Toki, K., Shimizu, Y., Nishiyama K. and Horiuchi, Y., “Verification Tests of Carbon-Carbon Composite Grids for Microwave Discharge Ion Thruster,” Journal of Propulsion and Power, Vol.18. No.1, pp.169-175.

[19] Funaki, I., Kuninaka H. and Toki, K., “Plasma Characterization of a 10-cm Diameter Microwave Discharge Ion Thruster,” Journal of Propulsion and Power, Vol. 20, No. 4, pp.718-727.

[20]

኱ᕝᜤᚿ㸪᪩ᕝᖾ⏨㸪໭ᮧṇ἞㸪“ࢢࣜࢵࢻᦆ⪖ホ౯ヨ㦂ᢏ⾡ࡢ⌧≧͇ 㸪࢖࢜ࣥຍ㏿ࢢࣜࢵࢻ⪏ஂㄆᐃ⏝ᩘ್

ゎᯒ

JIEDI (JAXA Ion Engine Development Initiatives)ࢶ࣮ࣝࡢ◊✲㛤Ⓨ࣮࣡ࢡࢩࣙࢵࣉ2006

ᖺᗘሗ࿌᭩㸪

JAXA-SP-06-019, pp.13-19.

[21]

ⓒṊᚭ㸪す⏣㏔㞝㸪๢ᣢ㈗ᘯ㸪ᮧᮏဴஓ㸪 ͆࢖࢚࢜ࣥࣥࢪࣥຍ㏿ࢢࣜࢵࢻ࡟࠾ࡅࡿࢫࣃࢵࢱࣜࣥࢢゎᯒ࡟ྥ

ࡅ࡚”㸪࢖࢜ࣥຍ㏿ࢢࣜࢵࢻ⪏ஂㄆᐃ⏝ᩘ್ゎᯒ

JIEDI (JAXA Ion Engine Development Initiatives)ࢶ࣮ࣝࡢ◊✲

㛤Ⓨ࣮࣡ࢡࢩࣙࢵࣉ

2006

ᖺᗘሗ࿌᭩㸪JAXA-SP-06-019, pp.59-63.

⢏Ꮚἲ࡟ࡼࡿ࢖࢚࢜ࣥࣥࢪࣥࢢࣜࢵࢻᦆ⪖ゎᯒ ᐑᆏ Ṋᚿ

^㸨

㸪Ᏻ㔛 ຾㞝

^㸨

㸪ᑠᯘ ຮ

^㸨

㸪ᰘ⏣ ᝆᇶ

^㸨

Abstract㸸

Key words㸸

ࡣࡌࡵ࡟

⢏Ꮚἲ࡟ࡼࡿ࢖࢚࢜ࣥࣥࢪࣥࢢࣜࢵࢻᦆ⪖ゎᯒ ᐑᆏ Ṋᚿ

^㸨

㸪Ᏻ㔛 ຾㞝

^㸨

㸪ᑠᯘ ຮ

^㸨

㸪ᰘ⏣ ᝆᇶ

^㸨

Analyses of Grid Erosion for an Ion Engine Using Particle Simulations

By

Takeshi MIYASAKA^㸨, Katuo ASATO^㸨, Tsutomu KOBAYASHI^㸨, and Yuuki SHIBATA^㸨

Abstract㸸PIC codes are suitable to evaluate numerical models for JIEDI tools. We have developed a hybrid-PIC code taking account of the charge exchange ions. In the present study, for the purpose of analyzing more realistic flows, the code was extended to allow elastic scattering ions and neutrals and to treat electrons as particles. Using the full-PIC code, we performed 3-dimensional analyses of the standard problem derived from the experiments using the uniform upstream and downstream conditions. As a result, the validity of the code was basically confirmed by the evaluation of energy flux distribution to the accelerator grid and the comparison between the results of ion-impingements current and the experiments.

Key words㸸Electric Propulsion, Ion Engine, Particle Simulation, Grid Erosion, JIEDI

1. ࡣࡌࡵ࡟

㏆ᖺࡢ࢖࢚࢜ࣥࣥࢪ࣑ࣥࢵࢩࣙࣥࡢ㛗ᮇ㛫໬࡟క࠸㸪ᐇ᫬㛫࡛ࡢ⪏ஂヨ㦂࡟௦ࢃࡿᩘ್ゎᯒ࡟ࡼࡿ⪏ஂホ౯ࡢ ᚲせᛶࡀ㧗ࡲࡗ࡚ࡁ࡚࠾ࡾ㸪࢖࢜ࣥຍ㏿ࢢࣜࢵࢻ⪏ஂㄆᐃ⏝ᩘ್ゎᯒ

JIEDI(JAXA Ion Engine Development

Initiatives)ࢶ࣮ࣝࡢ◊✲㛤Ⓨࡀ㛤ጞࡉࢀࡓ[1]㸬ࡑࡢᐇ⏝ᛶࢆ⪃៖ࡍࢀࡤ㸪⪏ஂㄆᐃ⏝ࢶ࣮ࣝ࡟᭱ࡶせồࡉࢀࡿⅬ

࡜ࡋ࡚ホ౯⢭ᗘ࡟ຍ࠼࡚ࡑࡢ㎿㏿ᛶࡀᣲࡆࡽࢀࡿ㸬࢖࢚࢜ࣥࣥࢪࣥࡢゎᯒ࡟࠾࠸࡚㸪ࡇࢀࡲ࡛࡟ᵝࠎ࡞ࣔࢹࣝࢆ

㐺⏝ࡋࡓࢥ࣮ࢻࡀ⏝࠸ࡽࢀ࡚ࡁࡓࡀ[2-11]㸪ࢢࣜࢵࢻᦆ⪖ࢆ㎿㏿࠿ࡘ඘ศ࡞⢭ᗘ࡛ᤊ࠼ࡽࢀ࡚ࡁࡓࡶࡢ࡜ࡋ࡚㸪

࢖࢜ࣥࣅ࣮࣒࡟

Flux-tube(FT)ἲࢆ㐺⏝ࡋ㟁ᏊศᕸࢆBoltzmann

ศᕸ࠿ࡽồࡵࡿ୰㔝ࡽ࡟ࡼࡗ࡚㛤Ⓨࡉࢀࡓゎ ᯒࢥ࣮ࢻࢆᣲࡆࡿࡇ࡜ࡀ࡛ࡁࡿ

[6, 7]㸬ࡑࡇ࡛㸪⌧ᅾJIEDI

ࢶ࣮ࣝࡣࡇࡢ”୰㔝ࢥ࣮ࢻ”ࢆᇶ࡟㛤Ⓨࡀ㐍ࡵࡽࢀ࡚࠸

ࡿ㸬ࡋ࠿ࡋ㸪ࢥ࣮ࢻࡣ࢖࢜ࣥ㸪㟁Ꮚ࡜ࡶ࡟⢏Ꮚ࡜ࡋ࡚࡛ࡣ࡞ࡃ㸪ὶࢀ࣭ศᕸࢆࣔࢹࣝ໬ࡋ࡚ᢅ࠺ࡓࡵ㸪ୖὶࢩ࣮

ࢫ㡿ᇦ㸪ୗὶ୰࿴㡿ᇦ࡟࠾࠸࡚⡆༢໬ࡉࢀࡓ᮲௳ࢆ㐺⏝ࡍࡿࡇ࡜࡟࡞ࡿ㸬≉࡟㸪኱ᕝࡽࡢ㸰ḟඖゎᯒ

[8]࠿ࡽ♧၀

ࡉࢀࡿࡼ࠺࡟᏶඲࡟

Maxwell

ศᕸ࡟ᚑࡗ࡚࠸࡞࠸ࡇ࡜ࡀண᝿ࡉࢀࡿୖὶࢩ࣮ࢫ㡿ᇦࡀゎᯒ⤖ᯝ࡬୚࠼ࡿᙳ㡪ࡣ

↓ど࡛ࡁ࡞࠸ྍ⬟ᛶࡀ⪃࠼ࡽࢀ㸪⢏Ꮚࣞ࣋ࣝࡢゎᯒ࡟ࡼࡿቃ⏺᮲௳㸪㟁Ꮚࣔࢹࣝホ౯ࡀ㔜せ࡟࡞ࡗ࡚ࡃࡿ㸬ࡋࡓ

ࡀࡗ࡚㸪

Flux-tube㸪Boltzmann

ศᕸࡢ㐺⏝࡟ࡼࡿࣔࢹࣝ໬࡟ࡼࡗ࡚ᐃ㔞ᛶࡀ㔜どࡉࢀࡿᦆ⪖ゎᯒ࡬୚࠼ࡿᙳ㡪࣭

ಙ㢗ᛶࡢホ౯ࢆᐇ᪋ࡍࡿࡇ࡜ࡣ㸪ࢶ࣮ࣝ㛤Ⓨ㐣⛬࡛ᚲせ࡞せ⣲࡛࠶ࡿ࡜࠸࠼ࡿ㸬

ᡃࠎࡢࢢ࣮ࣝࣉ࡛ࡣ㸪ࡇࢀࡽࡢホ౯࡟ࡘ࠸࡚ࣔࢹࣝ໬ࡢᑡ࡞࠸⢏Ꮚࢥ࣮ࢻࢆ⏝࠸࡚⾜࠺ࡇ࡜ࢆ┠ⓗ࡟ࢥ࣮ࢻ㛤

Ⓨ࣭ゎᯒࢆ㐍ࡵ࡚࠸ࡿ㸬࢖࣭࢜ࣥ㟁Ꮚ࡜ࡶ࡟⢏Ꮚ࡜ࡋ࡚ᢅ࠺ࢥ࣮ࢻ࡜ࡋ࡚ࡣ

Full-PIC

ࢥ࣮ࢻࡀᣲࡆࡽࢀࡿ㸬ࡋ

࠿ࡋ㸪ࡇࢀࡲ࡛ࡢ࢖࢚࢜ࣥࣥࢪࣥゎᯒ࡛ࡣ㸪࢖࢜ࣥ̿㟁Ꮚ㛫ࡢ㉁㔞ࡢ኱ࡁ࡞㐪࠸࠿ࡽ㸪㟁Ꮚࡣ

Boltzmann

ศᕸ

࠿ࡽồࡵࡿ

Hybrid-PIC

ࢥ࣮ࢻࡀ୺࡛࠶ࡾ㸪

Full-PIC

ἲࢆ⏝࠸࡚࢖࢚࢜ࣥࣥࢪࣥゎᯒࡀ⾜ࢃࢀࡓ౛ࡣඛ࡟㏙࡭ࡓ

኱ᕝࡽ࡟ࡼࡿ㸰ḟඖ໬ゎᯒࢆྵࡵ㠀ᖖ࡟ᑡ࡞ࡃ㸪㸱ḟඖゎᯒ࡟฿ࡗ࡚ࡣ࡯࡜ࢇ࡝⾜ࢃࢀ࡚࠸࡞࠸ࡢࡀ⌧≧࡛࠶ࡿ

[3, 8, 9]㸬

ࡑࡇ࡛㸪ᡃࠎࡣ㸪㸱ḟඖ

Full-PIC

ࢥ࣮ࢻ࡟ࡼࡿ

JIEDI

ࢶ࣮ࣝࡢ᭱⤊ⓗ࡞⢭ᗘ᳨ドཬࡧୖὶࢩ࣮ࢫ㸪ୗὶ୰࿴

㡿ᇦ࡟࠾ࡅࡿቃ⏺᮲௳➼ࡢᥦ᱌ࢆ

2010

ᖺࡲ࡛࡟⾜࠺ࡇ࡜ࢆ┠ᶆ࡟㸪Full-PIC ࢥ࣮ࢻࡢ㛤Ⓨ࣭ゎᯒࢆ㛤ጞࡋࡓ㸬 ᮏᖺᗘ࡛ࡣࡲࡎ㸱ḟඖ

Full-PIC

ࢥ࣮ࢻᮏయࡢ㛤Ⓨࢆ⾜࠸㸪᪩ᕝ࡟ࡼࡗ࡚⾜ࢃࢀࡓᐇ㦂[10]ࡢ᮲௳ୗ࡛ゎᯒࢆ⾜࠺

ࡇ࡜࡛㸪ࢥ࣮ࢻࡢጇᙜᛶࡢ᳨ドࢆヨࡳࡓ㸬ཧ↷ࡍࡿᐇ㦂ࡣ᥎㐍๣฼⏝ຠ⋡ࡀపࡃ࢔ࢡࢭࣝࢢࣜࢵࢻ㟁ὶࡢᣲືࡀ

᫂☜࡟ほᐹ࡛ࡁࡿࡇ࡜࠿ࡽ㸪ᦆ⪖ホ౯ࢥ࣮ࢻࡢ᳨ド࡜ࡋ࡚㐺ࡋ࡚࠸ࡿ࡜࠸࠼ࡿ㸬ࡲࡓ㸪➨୍ẁ㝵࡜ࡋ࡚ィ⟬㈇Ⲵ

ࢆపῶࡍࡿ┠ⓗ࡛㟁Ꮚ㉁㔞ࢆ࢖࢜ࣥ㉁㔞࡜➼ࡋࡃタᐃࡋ㸪ᇶᮏⓗ࡞ጇᙜᛶホ౯ࢆ⾜ࡗ࡚࠸ࡿ㸬ホ౯ࡣ㸪࢔ࢡࢭࣝ

ࢢࣜࢵࢻ㟁ὶ㸭ࣅ࣮࣒㟁ὶẚ㸪࢔ࢡࢭࣝࢢࣜࢵࢻୗὶ㠃࡬ࡢ࢖࢜ࣥ⾪✺ศᕸ࡟ࡘ࠸࡚⾜ࢃࢀࡓ㸬ࡲࡓ㸪ࡇࢀࡽࡢ ゎᯒࡣ␗࡞ࡿ୰࿴㟁Ꮚ᮲௳࡟ࡘ࠸࡚⾜ࢃࢀ㸪୰࿴㟁Ꮚ᮲௳ࡢタᐃࡢᙳ㡪࡟ࡘ࠸࡚ࡶㄪ࡭ࡽࢀࡓ㸬ࢢࣜࢵࢻ㠃⾪✺

㸰ḟඖศᕸࢆᤊ࠼ࡿࡓࡵ࡟ࡣ㸱ḟඖࢥ࣮ࢻࡀ୙ྍḞ࡛࠶ࡿࡀ㸪ᮏゎᯒࡢᵝ࡟

Full-PIC

ࢥ࣮ࢻࢆ⏝࠸࡚⾜ࡗࡓ౛

ࡣ࡯࡜ࢇ࡝ሗ࿌ࡉࢀ࡚࠾ࡽࡎ㸪ᚋ㏙ࡍࡿࡼ࠺࡟ᐇ㦂࡜ྠᵝ࡞ศᕸࡀᚓࡽࢀࡓࡇ࡜ࡣ㸪௒ᖺᗘࡢព⩏ࡢ࠶ࡿᡂᯝ࡜

ࡋ࡚ᣲࡆࡽࢀࡿ㸬

᭱ᚋ࡟ᮏሗ࿌ࡢᴫせࢆグࡍ㸬ᮏሗ࿌࡛ࡣ㸪㸱ḟඖ

Full-PIC

ࢥ࣮ࢻࢆసᡂࡋࡲࡎࡑࡢጇᙜᛶホ౯ࡢࡓࡵ࡟⾜ࡗ ࡓᶆ‽ၥ㢟ゎᯒ㸧ࡢ⤖ᯝ࡟ࡘ࠸࡚ሗ࿌ࡍࡿ㸬ᮏゎᯒ࡛⏝࠸ࡓᶆ‽ၥ㢟ࡣ㸪᪩ᕝࡢᐇ㦂⤖ᯝ

[10]ࢆᇶ࡟タᐃࡉࢀࡓ

ࡶࡢ࡛࠶ࡿ㸬ᮏࢥ࣮ࢻ࡛ࡣ㸪ࡲࡎ

DSMC(Direct Simulation Monte Carlo)ἲ࡟ࡼࡗ࡚୰ᛶ⢏Ꮚศᕸࢆồࡵ㸪ᚓࡽ

ࢀࡓ୰ᛶ⢏Ꮚศᕸ࡟ᑐࡋ࡚

Full-PIC

ἲ࡟ࡼࡿ࢖࣭࢜ࣥ㟁Ꮚ㐠ື࠾ࡼࡧ୰ᛶ⢏Ꮚ㸫࢖࢜ࣥ㛫ࡢ㟁Ⲵ஺᥮࣭ᙎᛶ⾪

✺ゎᯒࢆ⾜࠺ࡇ࡜࡛࢔ࢡࢭࣝࢢࣜࢵࢻ࡟⾪✺ࡍࡿ࢖࣭࢜ࣥ୰ᛶ⢏Ꮚࢆホ౯ࡋ࡚࠸ࡿ㸬

2. ᩘ್ゎᯒἲ

ᮏゎᯒࢥ࣮ࢻࡣ㸪୰ᛶ⢏Ꮚ㸪࢖࢜ࣥ࠾ࡼࡧ㟁Ꮚࢆࡍ࡭࡚⢏Ꮚ࡜ࡋ࡚ᢅࡗ࡚࠸ࡿ㸬ࡋ࠿ࡋ㸪ᮏゎᯒ᮲௳࡛࠶ࡿᶆ

‽ၥ㢟࡛ࡣ᥎㐍๣฼⏝ຠ⋡ࡀప࠸ࡇ࡜࠿ࡽ[10]㸪୰ᛶ⢏Ꮚᐦᗘࡀ࢖࣭࢜ࣥ㟁Ꮚࡢᐦᗘ࡟ẚ࡭㸱᱆⛬ᗘ㧗ࡃ࡞ࡗ࡚

࠸ࡿ㸬ࡋࡓࡀࡗ࡚㸪࢖࢜ࣥࣅ࣮࣒ゎᯒ࡜ྠ᫬࡟୰ᛶ⢏Ꮚ㐠ືࢆᢅ࠺࡟ࡣ㠀ᖖ࡟ከࡃࡢࢸࢫࢺ⢏Ꮚࡀᚲせ࡛ィ⟬᫬

㛫ࡀ⭾኱࡟࡞ࡗ࡚⌧ᐇⓗ࡛࡞࠸㸬ࡑࡇ࡛㸪ᮏゎᯒ࡛ࡣࡲࡎ୰ᛶ⢏Ꮚ㐠ືࡢࡳࢆゎᯒࡋ㸪ࡑࡢ⤖ᯝ࠿ࡽᚓࡽࢀࡓ୰

ᛶ⢏Ꮚᐦᗘศᕸࢆ⏝࠸࡚࢖࢜ࣥࣅ࣮࣒ゎᯒࢆ⾜ࡗ࡚࠸ࡿ㸬ࡇࢀࡽࡢィ⟬࡟ࡘ࠸࡚཰᮰ゎࢆồࡵࡿࡲ࡛ࡢὶࢀࢆᅗ 㸯ࡢࣇ࣮ࣟࢳ࣮ࣕࢺ࡟ࡲ࡜ࡵ࡚࠸ࡿ㸬཰᮰ゎࡀồࡵࡽࢀࡓᚋ㸪ᘬࡁ⥆ࡁࢢࣜࢵࢻ⾪✺⢏Ꮚࡢࢧࣥࣉࣝ཰㞟ࡢࡓࡵ

ࡢゎᯒࡀ⾜ࢃࢀࡿ㸬௨ୗ࡟ᮏゎᯒἲࡢヲ⣽ࢆ㏙࡭ࡿ㸬

ᅗ㸯 ᮏゎᯒࡢᐃᖖゎྲྀᚓࡲ࡛ࡢࣇ࣮ࣟࢳ࣮ࣕࢺ

2.1. ィ⟬㡿ᇦ

ᮏゎᯒ࡛⏝࠸ࡓ

3

ḟඖィ⟬㡿ᇦཬࡧゎᯒ᮲௳ࡢᴫ␎ࢆᅗ㸰࡟♧ࡍ㸬ᮏゎᯒ࡛ᢅ࠺ᶆ‽ၥ㢟ࡣ㸪࢟ࢭࣀࣥࢆ᥎㐍

๣࡜ࡍࡿ

2

ᯛࢢࣜࢵࢻࡢ࢖࢚࢜ࣥࣥࢪࣥࢆ᝿ᐃࡋ࡚࠸ࡿ[10, 11]㸬ᮏゎᯒ࡛ࡣࡍ࡭࡚ࡢィ⟬ࢆ㏻ࡌࢢࣜࢵࢻᙧ≧ࡣ

ึᮇࡢࡲࡲᅛᐃࡉࢀ࡚࠸ࡿࡀ㸪௒ᚋࡢᦆ⪖㐍⾜ࢆ⪃៖ࡋࡓゎᯒ᫬ࡢ」㞧࡞ࢢࣜࢵࢻᙧ≧࡟ᑐᛂࡍࡿ┠ⓗ࡛㸪┤஺

᱁Ꮚࢆ᥇⏝ࡋ࡚࠸ࡿ㸬ࡑࡇ࡛㸪㛗᪉㡿ᇦ࡛ᑐ⛠ቃ⏺᮲௳ࡀ୚࠼ࡽࢀࡿ᭱ࡶᑠࡉ࡞

x-y

㠃ࡢィ⟬㡿ᇦ࡜ࡋ࡚ᅗ㸰(a)

࡟♧ࡍᐇ⥺ࡢ㡿ᇦࢆ⏝࠸࡚࠸ࡿ㸬ࡓࡔࡋ㸪㟁఩ゎᯒ࡟ࡘ࠸࡚ࡣ

FEM

ἲ࡟ࡼࡿゎᯒࡢࡋ᫆ࡉࢆඃඛࡋ࡚◚⥺࡛ᅖ

ࡲࢀࡓ㸰ಸࡢ኱ࡁࡉࡢ㡿ᇦ࡛⾜ࡗ࡚࠸ࡿ㸬ࡲࡓ㸪ୖὶቃ⏺఩⨨㸪ୗὶቃ⏺఩⨨ࡢᙳ㡪ࢆῶࡽࡍࡓࡵ㸪኱ࡁ࡞㡿ᇦ

ࢆタᐃࡋ࡚࠸ࡿ㸬ࡲࡓ㸪Ἴ⥺ࡢ㡿ᇦࡢィ⟬᱁Ꮚࡣ㸪 x × y × z =

22™39™160

࡜ࡋ࡚࠸ࡿ㸬

x-y

㠃ࡢ᱁Ꮚࡣ➼㛫㝸

࡟㓄⨨ࡉࢀ࡚࠸ࡿࡀ㸪z ᪉ྥ࡟ࡣᨺ㟁ᐊ࠾ࡼࡧ୰࿴㡿ᇦ࡟࠾ࡅࡿࢹࣂ࢖㛗ࢆᇶ‽࡟୙➼㛫㝸࡟タᐃࡉࢀ࡚࠸ࡿ㸬

ୖὶ㒊ࡢ᱁Ꮚ㛫㝸Ǽz=0.13 mm ࡣᮏゎᯒ᮲௳୰ࡢ᭱ᑠࡢࢹࣂ࢖㛗(Ȝ

D, p),min

㸦= 0.10mm㸧⛬ᗘ࡛࠶ࡾ㸪ୗὶ㒊ࡣǼ

z = 0.40 mm

࡜(Ȝ

D,exit)min

㸦㸻0.75 mm㸧ࡼࡾࡶ▷ࡃタᐃࡉࢀ࡚࠸ࡿ㸦ᅗ㸱ཧ↷㸧 㸬

2.2. ୰ᛶ⢏Ꮚゎᯒ

୰ᛶ⢏Ꮚ㐠ືゎᯒࡣ

DSMC

ἲࢆ⏝࠸࡚⾜ࢃࢀࡓ㸬ᮏゎᯒ࡛ࡢィ⟬᮲௳ୗ࡛ࡣࢡࢾ࣮ࢭࣥᩘࡀࡍ࡭࡚ࡢ㡿ᇦ࡛

༑ศ࡟኱ࡁ࠸ࡇ࡜࠿ࡽ⾪✺ࡣ⪃៖ࡋ࡚࠸࡞࠸㸬୰ᛶ⢏Ꮚᐦᗘࡣ㸪௨ୗࡢ㸱ࡘࡢゎᯒ࠿ࡽᚓࡽࢀࡓᐦᗘࢆ㊊ࡋྜࢃ

ࡏࡿࡇ࡜࡟ࡼࡾồࡵࡽࢀ࡚࠸ࡿ㸸

(1)

ᨺ㟁ᐊ࠿ࡽࡢ୰ᛶ⢏Ꮚὶධ㸸ᨺ㟁ᐊ࠿ࡽィ⟬㡿ᇦ࡬ὶධࡍࡿ୰ᛶ⢏Ꮚ࡟㛵ࡍࡿゎᯒ㸬ᮏゎᯒ࡛ࡣ㸪ୖὶ㡿ᇦ

࡟ᩘᐦᗘ

1.6™10¹⁹

ࡢ

Maxwell

ศᕸࢆタᐃࡋゎᯒࢆ⾜ࡗࡓ㸬

(2)

ࢫࢡ࣮ࣜࣥࢢࣜࢵࢻ࠿ࡽࡢ୰ᛶ⢏Ꮚᨺฟ㸸ࢫࢡ࣮ࣜࣥࢢࣜࢵࢻୖὶ㠃࡬ࡢ⾪✺࢖࢜ࣥὶ᮰࡟┦ᙜࡍࡿ୰ᛶ⢏

Ꮚὶ᮰ࢆࢢࣜࢵࢻ⾲㠃࠿ࡽᨺฟࡉࡏゎᯒࢆ⾜ࡗࡓ㸬

(3)

ṧ␃୰ᛶ⢏Ꮚࡢὶධ㸸ୗὶ㠃࠿ࡽὶධࡍࡿࢳࣕࣥࣂ࣮ෆṧ␃୰ᛶ⢏Ꮚ࡟㛵ࡍࡿゎᯒ㸬ᐇ㦂[10]ࡢ┿✵ᵴෆᅽຊ

࡟┦ᙜࡍࡿ୰ᛶ⢏Ꮚᐦᗘࡢ

Maxwell

ศᕸࢆୗὶ㡿ᇦ࡟タᐃࡋゎᯒࢆ⾜ࡗࡓ㸬

ࡑࡢ௚ࡢቃ⏺᮲௳࡜ࡋ࡚ࡣ㸪y ࡢୖ᪉ቃ⏺ࢆ㝖ࡃᑐ⛠㠃࡛ࡣ㙾㠃཯ᑕ᮲௳ࢆ୚࠼㸪ࢢࣜࢵࢻ㠃࡟ࡣࢢࣜࢵࢻ  ᗘ࡟ᑐᛂࡋࡓᣑᩓ཯ᑕ᮲௳ࢆ୚࠼࡚࠸ࡿ㸬

y

ࡢୖ᪉ቃ⏺㠃࡛ࡣ㸪ᑐ⛠⥺

C

࡟ᑐࡍࡿᑐ⛠᮲௳ࢆ㐺⏝ࡋ࡚࠸ࡿ㸬

60㼻 C

y

x

11 㟁఩ゎᯒ㡿ᇦ

⢏Ꮚゎᯒ 㡿ᇦ

(a)x-y

㠃

(b) z-x

㠃

ᅗ㸰 ィ⟬㡿ᇦ࡜ゎᯒ᮲௳

ᅗ㸱 ィ⟬᱁Ꮚ㸦

z-x

㠃㸧

2.3.

࢖࢜ࣥࣅ࣮࣒ゎᯒ

2.3.1. PIC

ἲ࡟ࡼࡿゎᯒ

㟁Ꮚཬࡧ࢖࢜ࣥࡢ㐠ືࡣ

PIC

ἲࢆ⏝࠸࡚ゎᯒࡉࢀ࡚࠸ࡿ

[12]㸬㟁Ꮚཬࡧ࢖࢜ࣥࡢࢸࢫࢺ⢏Ꮚࡣࡑࢀࡒࢀ㐠ື᪉

⛬ᘧ࡟ᚑࡗ࡚㐠ືࡉࡏ࡚࠸ࡿ㸬ᮏゎᯒࡣ㸱ḟඖゎᯒࡢࡓࡵィ⟬᫬㛫ࡀ⭾኱࡟࡞ࡿࡇ࡜࠿ࡽ㸪ୖ㏙ࡋࡓࡼ࠺࡟ࢹࣂ

࢖㛗ࢆᇶ‽࡟ྍ⬟࡞㝈ࡾᗈ࠸᱁Ꮚ㛫㝸ࢆタᐃࡋ㸪᫬㛫㛫㝸ࡶࡑࡢ᱁Ꮚ㛫㝸ࢆᇶ࡟Ỵᐃࡋ࡚࠸ࡿ㸬ࡑࡢࡓࡵィ⟬᫬

㛫ᙉ࠸㈇Ⲵࢆ࠿ࡅ࡞࠸⛬ᗘ࡟᫬㛫⢭ᗘࢆ㧗ࡵࡿ┠ⓗ࡛᫬㛫✚ศࡣ㸪㏻ᖖ

PIC

ἲ࡟⏝࠸ࡽࢀࡿ

leap-flog

ἲ࡛ࡣ࡞

ࡃ㸲ḟ⢭ᗘ࡛࠶ࡿ

Runge-Kutta-Gill

ἲࢆ⏝࠸࡚⾜ࡗ࡚࠸ࡿ㸬ࡇࡇ࡛㸪ィ⟬᫬㛫▷⦰ࡢࡓࡵ㟁Ꮚ㉁㔞ࡣ࢖࢜ࣥ㉁

㔞࡜➼ࡋ࠸࡜ࡋࡓ㸬ᮏࢥ࣮ࢻࡣᅛᐃࡉࢀࡓࢢࣜࢵࢻᙧ≧࡟ᑐࡋ࡚ᐃᖖሙࢆồࡵࡿࡶࡢ࡛࠶ࡿࡇ࡜࠿ࡽ㉁㔞ẚࢆ

1

࡜ࡋ࡚࠸ࡿࡀ[3]㸪௒ᚋ㉁㔞ẚࢆኚ࠼ࡓሙྜࡢ᳨ウࡀᚲせ࡛࠶ࡿ࡜⪃࠼࡚࠸ࡿ㸬

ୖὶ㡿ᇦ࡟࠾࠸࡚㟁Ꮚཬࡧ࢖࢜ࣥࢆ୍ᵝ࡟

Maxwell

ศᕸ࡛୚࠼࡚࠸ࡿ㸬ࡇࡇ࡛㸪㟁Ꮚ࡜࢖࢜ࣥࡢᩘᐦᗘࡣ➼ࡋ ࡃ㸪タᐃࡋࡓ࢖࢜ࣥࣅ࣮࣒㟁ὶࡀᚓࡽࢀࡿࡼ࠺࡟Ỵᐃࡋ࡚࠸ࡿ㸬ୗὶ㡿ᇦ࡛ࡢ୰࿴㟁Ꮚᐦᗘࡶୖὶ㡿ᇦ࡜ྠᵝ࡟

୍ᵝ࡟

Maxwell

ศᕸ࡛୚࠼࡚࠸ࡿ㸬 ᚋ㏙ࡍࡿࡼ࠺࡟ᮏゎᯒ࡛ࡣࡇࡢ୰࿴㟁Ꮚᐦᗘࢆ㸱ࡘࡢ␗࡞ࡿホ౯ἲ࠿ࡽタᐃ

ࡋ㸪ࡑࡢᙳ㡪ࢆホ౯ࡋ࡚࠸ࡿ㸬

ྛ᱁ᏊⅬ࡟࠾ࡅࡿ㟁఩ I ࡣḟࡢ

Poisson

ᘧࢆ

FEM

ἲ࡟ࡼࡗ࡚ゎࡃࡇ࡜࡟ࡼࡾồࡵ࡚࠸ࡿ㸸

_{i e}

. (1)

0

2 e n n ࠉࠉࠉࠉ

’

I H

ࡇࡇ࡛㸪n

ine

ࡣࡑࢀࡒࢀྛ᱁ᏊⅬ࡟࠾ࡅࡿ࢖࢜ࣥ㸪㟁Ꮚࡢᩘᐦᗘࢆ⾲ࡋ࡚࠸ࡿ㸬せ⣲ࡣ㸯ḟᅄ㠃యせ⣲ࢆ᥇⏝

ࡋ࡚࠾ࡾ㸪㸰ḟ⢭ᗘ┦ᙜ௨ୖࡢ✵㛫⢭ᗘࡀᚓࡽࢀ࡚࠸ࡿࡀ㸪௒ᚋࡣࡼࡾᐃ㔞ⓗ࡞ホ౯ࢆ⾜࠺ࡓࡵ࡟ィ⟬᫬㛫ࢆ⪃

៖ࡋ࡞ࡀࡽ᭦࡞ࡿ㧗ḟせ⣲ࡢᑟධࡢ᳨ウࢆ⾜࠺ᚲせࡀ࠶ࡿࡶࡢ࡜⪃࠼࡚࠸ࡿ㸬ྛࢢࣜࢵࢻୖ࠾ࡼࡧὶධ㠃࡛ࡣᅗ 㸰࡟୚࠼ࡿᵝ࡟㟁఩ࢆᅛᐃࡋ࡚୚࠼࡚࠸ࡿ㸬ୗὶቃ⏺࡛ࡣ㸪୰࿴㟁Ꮚࢆ୍ᵝ࡟୚࠼ࡿࡓࡵ࡟㟁఩ࢆ ࡜タᐃࡋ࡚

࠸ࡿ㸬

ࡲࡓ㸪᫬㛫㛫㝸Ǽ

t

ࡣ࢖࢜ࣥ㏿ᗘ࡜᱁Ꮚ㛫㝸࠿ࡽỴᐃࡋ࡚࠸ࡿࡀ㸪ᮏゎᯒ࡛⏝࠸ࡽࢀࡓǼ

t =1.3×10^-8 s

ࡣᮏゎᯒ ᮲௳࡟࠾ࡅࡿࣉࣛࢬ࣐࿘Ἴᩘ࡟㛵ࡍࡿไ㝈᮲௳

't˜Z_p,max 0.221

ࢆ‶ࡓࡍࡇ࡜ࡀ☜࠿ࡵࡽࢀ࡚࠸ࡿ㸬

2.3.2.

࢖࢜ࣥ㸫୰ᛶ⢏Ꮚ⾪✺

୰ᛶ⢏Ꮚ࡜࢖࢜ࣥ࡜ࡢ㟁Ⲵ஺᥮࡟ࡼࡿ㟁Ⲵ஺᥮ィ⟬ࡣ

PIC

ἲ࡛ィ⟬ࡉࢀࡿࢸࢫࢺ࢖࢜ࣥ⢏Ꮚ࡟ᑐࡋ࡚⾜ࢃࢀ

ࡿ㸬ඛ࡟㏙࡭ࡓࡼ࠺࡟㸪ᮏゎᯒ࡛ࡣ୰ᛶ⢏Ꮚࡣྛࢭࣝୖ࡛ࡢᐦᗘࡢᙧ࡛୚࠼ࡽࢀ࡚࠸ࡿࡢ࡛㸪᏶඲࡞⢏Ꮚ⾪✺ࣔ

ࢹ࡛ࣝࡣ࡞࠸ࡀ㸪 ௨ୗ࡟♧ࡍࡼ࠺࡞ࣔࣥࢸ࢝ࣝࣟⓗ࡟ྛ࢖࢜ࣥ⢏Ꮚ࡟ᑐࡍࡿ⾪✺ุᐃࢆ஘ᩘࢆ⏝࠸࡚⾜ࡗ࡚࠸ࡿ㸸

P

_CEX

n

_n

v V

_CEX

' t 㸪

P

_ELS

n

_n

v V

_ELS

' t

. (2)

ࡇࡇ࡛㸪Ȫ

_CEX

㸪Ȫ

_ELS

ࡣࡑࢀࡒࢀ㟁Ⲵ஺᥮⾪✺᩿㠃✚㸪ᙎᛶ⾪✺᩿㠃✚ࢆ㸪

v

ࡣ┦ᑐ㏿ᗘࢆ⾲ࡍ㸬ࡇࢀࡽࡢᘧ࡟࠾

࠸࡚㸪⡆༢ࡢࡓࡵ୰ᛶ⢏Ꮚ㏿ᗘࡣ

0

࡜࠾࠸࡚࠸ࡿ㸬

ࢭࣝෆࡢྛ࢖࢜ࣥ⢏Ꮚ࡟㛵ࡍࡿ஘ᩘ R ࡟ᑐࡋ࡚㸪⾪✺ࡣୗグࡢࡼ࠺࡟ุ᩿ࡉࢀࡿ㸸

0 ӊ R ӊ P

CEX

ࡢሙྜ 㸸㟁Ⲵ஺᥮⾪✺

ELS CEX

CEX

R P P

P ӊ ࡢሙྜ 㸸ᙎᛶ⾪✺

ELS

1

CEX

P R ӊ

P ^ࡢሙྜ

㸸⾪✺↓ࡋ

ࡇࡇ࡛㸪⾪✺࡟ࡼࡾ⏕ᡂࡉࢀࡓ㟁Ⲵ஺᥮࢖࢜ࣥࡢึ㏿ࡣ

0

࡜ࡋ࡚࠸ࡿ㸬ࡲࡓ㸪㟁Ⲵ஺᥮㸪ᙎᛶ⾪✺ࡀ⾜ࢃࢀࡓሙ

ྜ࡟ࡣ㸪⾪✺࢖࢜ࣥ఩⨨࡟ࢸࢫࢺ୰ᛶ⢏Ꮚࢆຍ࠼࡚࠸ࡿ㸬ࡇࢀࡽࡢࢸࢫࢺ୰ᛶ⢏Ꮚࡣ㸪⫼ᬒࡢ୰ᛶ⢏Ꮚ࡜␗࡞ࡾ㸪

࢖࣭࢜ࣥ㟁Ꮚࡢሙྜ࡜ྠᵝ࡟⢏Ꮚⓗ࡟㐠ືࡀ㏣㊧ࡉࢀ࡚࠸ࡿ㸬ᅗ㸯ࡢࣇ࣮ࣟࢳ࣮ࣕࢺ࡛⢏Ꮚ㐠ື࡟࢖࢜ࣥ㸪㟁Ꮚ

࡟ຍ࠼࡚♧ࡉࢀ࡚࠸ࡿࠕ୰ᛶ⢏Ꮚࠖ࡜ࡣࡇࡢ⢏Ꮚࡢࡇ࡜ࢆᣦࡋ࡚࠸ࡿ㸬ࡇࡢ⢏Ꮚࡢึ㏿ࡣ⾪✺๓ࡢ࢖࢜ࣥ㏿ᗘ࡜

ྠࡌ࡟୚࠼ࡽࢀ࡚࠸ࡿ㸬

3.

ゎᯒ⤖ᯝ

3.1

୰ᛶ⢏Ꮚゎᯒ⤖ᯝ

ࡲࡎ㸪୰ᛶ⢏Ꮚゎᯒࡢ⤖ᯝᚓࡽࢀࡓ

y 0

㠃࡛ࡢ୰ᛶ⢏Ꮚᐦᗘศᕸࢆᅗ㸲࡟♧ࡍ㸬ᮏゎᯒ࡛ࡣᙜึ㸪ࢳࣕࣥࣂ

࣮ෆṧ␃୰ᛶ⢏Ꮚ࡟ࡘ࠸࡚㸪

(i)ṧ␃୰ᛶ⢏Ꮚᐦᗘࢆィ⟬㡿ᇦ࡟୍ᚊ࡟ຍ࠼ࡓሙྜ㸪(ii)ᮏゎᯒࡢᵝ࡟ୗὶ㡿ᇦࡢᐦ

ᗘ࡜ࡋ࡚୚࠼ࡓሙྜ㸪(iii)⪃៖ࡋ࡞࠸ሙྜ㸪ࡢ㸱ࢣ࣮ࢫࡢᐦᗘศᕸࡢ㐪࠸ࡀࢢࣜࢵࢻ⾪✺࢖࢜ࣥศᕸ࡬୚࠼ࡿᙳ 㡪ࢆホ౯ࡍࡿࡇ࡜ࢆᛕ㢌࡟࠾࠸࡚㸪๓❶࡛㏙࡭ࡓࡼ࠺࡞(1)࠿ࡽ(3)࠿ࡽᚓࡽࢀࡿ㸱ࡘࡢゎᯒ⤖ᯝࢆ㊊ࡋྜࢃࡏࡿ᪉ ἲࢆ᥇⏝ࡋࡓ㸬ࡋ࠿ࡋ㸪ᮏゎᯒ࡛⏝࠸ࡓࢢࣜࢵࢻᙧ≧ࡣ㸪౛࠼ࡤ᫖ᖺᗘࡢሗ࿌

[14]࡛ᢅࡗࡓMuses-C

ࢱ࢖ࣉ࡜ẚ

࡭࡚ࡑࡢ㛤ཱྀẚࡀ኱ࡁ࠸ࡇ࡜࠿ࡽ୰ᛶ⢏Ꮚᐦᗘศᕸ࡬ཬࡰࡍᙳ㡪ࡀᑠࡉࡃୗὶ㡿ᇦࡢᐦᗘࡣୖὶ㡿ᇦࡢ1 ᱆⛬ᗘ ࡋ࠿పୗࡋ࡚࠸࡞࠸ࡇ࡜࡟ຍ࠼㸪ୖὶ㡿ᇦࡢ୰ᛶᐦᗘ᮲௳⮬యࡀ኱ࡁࡃ㸪ୗὶቃ⏺࡟࠾ࡅࡿṧ␃୰ᛶ⢏Ꮚ࡟ࡼࡿ

ᐦᗘቑຍࡣ

4㸣⛬ᗘ࡟␃ࡲࡗࡓ㸬ࡑࡇ࡛㸪ᮏሗ࿌ࡢ࢖࢜ࣥࣅ࣮࣒ゎᯒࡣ(ii)ࡢ㸯ࢣ࣮ࢫࡢࡳ࡟ࡘ࠸࡚⾜ࢃࢀࡓ㸬ࡓ

ࡔࡋ㸪

(ii)ࡢࡼ࠺࡟タᐃࡋࡓሙྜ㸪ṧ␃୰ᛶ⢏Ꮚࡢࡳ࡟ࡼࡿศᕸࡣ㸪ᨺ㟁ᐊ୰ᛶ⢏Ꮚ࡟ࡼࡿศᕸ࡜ྠᵝ࡟ࢢࣜࢵࢻ

ᙧ≧ࡢᙳ㡪ࢆཷࡅ࡚࠸ࡿ⤖ᯝࡀᤊ࠼ࡽࢀ࡚࠾ࡾ㸪

Muses-C

ࡢࡼ࠺࡞㛤ཱྀẚࡢࢢࣜࢵࢻࡢሙྜ࡟࠾࠸࡚ࡣ㸪ࡼࡾᐃ 㔞ⓗ࡞ࢢࣜࢵࢻᦆ⪖ホ౯ࡢࡓࡵ࡟ࡣ㸪ṧ␃୰ᛶ⢏Ꮚᐦᗘࢆ୍ᚊ࡟ຍ࠼ࡿࡢ࡛ࡣ࡞ࡃ㸪

(ii)ࡢᵝ࡞ᢅ࠸ࢆࡍࡿࡇ࡜࡛

ࡼࡾᐇ㝿ⓗ࡞ศᕸࢆᚓࡿᚲせࡀ࠶ࡿ࡜⪃࠼࡚࠸ࡿ㸬

ᅗ㸲 ୰ᛶ⢏Ꮚᩘᐦᗘศᕸ㸦J

b=100ȝA

ゎᯒ⏝㸧

3.2

࢖࢜ࣥࣅ࣮࣒ゎᯒ⤖ᯝ

3.2.1 ୰࿴㟁Ꮚ᮲௳౫Ꮡᛶ㹙J b=100ȣA㹛

ࡲࡎ㸪ୖグࡢ୰ᛶ⢏Ꮚᐦᗘศᕸࢆ⏝࠸࡚⾜ࢃࢀࡓ࢖࢜ࣥࣅ࣮࣒㟁ὶ

J b

ࡀ

100ȣA

ࡢሙྜࡢࣅ࣮࣒ゎᯒ⤖ᯝ࡟ࡘ

࠸᳨࡚ウࡍࡿ㸬ୗὶ㡿ᇦ࡛タᐃࡍࡿ୰࿴㟁Ꮚᐦᗘࡣ㸪ὶฟ㠃࡟࠾ࡅࡿ࢖࢜ࣥᐦᗘศᕸࢆᖹᆒࡋ࡚ồࡵࡽࢀࡓ㸬ࡇ ࡢ࢖࢜ࣥᐦᗘศᕸࡣὶฟ㠃୍࡛ᵝ࡛ࡣ࡞࠸ࡓࡵ㸪࡝ࡢࡼ࠺࡟ᖹᆒࢆホ౯ࡍࡿ࠿࡟ࡼࡗ࡚ᚓࡽࢀࡿ್ࡣ␗࡞ࡗ࡚ࡃ

ࡿ㸬ᮏゎᯒ࡛ࡣ㸪ࡇࡢ୰࿴㟁Ꮚᐦᗘࡀ୚࠼ࡿᙳ㡪ࢆホ౯ࡍࡿࡓࡵ⾲㸯࡟♧ࡍࡼ࠺࡞㸱ࡘࡢホ౯᪉ἲࢆ⏝࠸㸪ྛホ

౯ἲ࠿ࡽᚓࡽࢀࡓ㸱ࡘࡢ␗࡞ࡿ㟁Ꮚᐦᗘࢆ⏝࠸࡚ゎᯒࢆ⾜ࡗࡓ㸬

⾲㸯 ୗὶ㡿ᇦ㟁Ꮚᩘᐦᗘ᮲௳㸦J b=100ȝA㸧

&DVH D E F

ᑟฟᣦ㔪 ୗὶ㠃࢖࢜ࣥᐦᗘ᭱኱್

ࡢ್༙ࡲ࡛ࡢ㡿ᇦ࡛ᖹᆒ

ୗὶ㠃࢖࢜ࣥᐦᗘ᭱኱್

ࡢ ್ࡲ࡛ࡢ㡿ᇦ࡛ᖹᆒ

ୗὶ㠃ࡍ࡭࡚ࡢ㡿ᇦ

࡛ᖹᆒ

ὶฟ㡿ᇦ㟁Ꮚᐦᗘ ™P ™P ™P

࢖࢜ࣥࣅ࣮࣒㟁ὶ್࡟ࡼࡾィ⟬᫬㛫ࡣ␗࡞ࡿࡀ㸪

J b=100 ǍA

ࡢሙྜ࡟ࡣCPU Intel®Xenon®3.0GHz ࡛

23000 step

ࡲ࡛ゎᯒࡋ⣙

53

᫬㛫ࢆせࡋࡓ㸬ࡇࡇ࡛㸪ᐃᖖゎࡀᚓࡽࢀࡿࡢࡣ

3000 step

⛬ᗘ࡛࠶ࡿ㸬ṧࡾࡢ

step

ࡣ㸪࢔

ࢡࢭࣝࢢࣜࢵࢻ࡬ࡢࢸࢫࢺ⢏Ꮚࡢ⾪✺ࢧࣥࣉࣝ཰㞟࡟⏝࠸ࡽࢀࡓࡶࡢ࡛࠶ࡿ㸬

ࡲࡎ㸪

Case (a)ࡢሙྜࡢゎᯒ⤖ᯝࢆᅗ㸳࠿ࡽᅗ㸵࡟♧ࡍ㸬ᅗ㸲࡟ࡣy = 0

ࡢ㠃ୖࡢ㟁఩ࡢ

z-x

㠃ศᕸࢆ㸪ᅗ㸳㸪

ᅗ㸴࡟ࡣࡑࢀࡒࢀ࢖࢜ࣥ࠾ࡼࡧ㟁Ꮚศᕸࢆ♧ࡍ㸬ᅗ㸲࡟࠾࠸࡚࢔ࢡࢭࣝࢢࣜࢵࢻୗὶ㡿ᇦ࡛㟁఩ࡢ㧗࠸࡜ࡇࢁࡀ

☜ㄆ࡛ࡁࡿ㸬ᅗ㸳࠿ࡽࡣ㸪㯮࡛⾲ࡉࢀࡿ࢖࢜ࣥࣅ࣮࣒ࡀᮏ᮲௳ୗ࡛ࡣ࢔ࢡࢭࣝࢢࣜࢵࢻ࡟┤᥋⾪✺ࡋ࡚࠸࡞࠸ᵝ Ꮚࡀ☜ㄆ࡛ࡁࡿ㸬ࡲࡓ㸪㟁Ⲵ஺᥮࢖࢜ࣥࡣ୺࡟ࢫࢡ࣮ࣜࣥࢢࣜࢵࢻୗὶ௨㝆ࡢ㡿ᇦ࡛Ꮡᅾࡋ࡚࠸ࡿࡢ࡟ᑐࡋ㸪ᙎ ᛶ⾪✺ࡋࡓ࢖࢜ࣥࡣୖὶ㡿ᇦ࡟࠾࠸࡚ࡶከࡃ⌧ࢀ࡚࠸ࡿ㸬ᅗ㸴ࡢ㟁Ꮚศᕸᅗ࠿ࡽ㸪࢖࢜ࣥࣅ࣮࣒ᨺฟ㠃ࡀࢫࢡࣜ

࣮ࣥࢢࣜࢵࢻ㏆ഐ࡟Ꮡᅾࡋ࡚࠸ࡿᵝᏊࡀ᫂☜࡟☜ㄆ࡛ࡁࡿ㸬ࡲࡓ㸪୰࿴㟁Ꮚࡣ㟁఩ศᕸ࡟ᛂࡌ࡚ศᕸࡋ࡚࠸ࡿᵝ Ꮚࡀᤊ࠼ࡽࢀ࡚࠸ࡿ㸬ࡇࢀࡽࡢ⤖ᯝࡣ㸪ୖ࣭ୗὶ㡿ᇦ࡛

Maxwell

ศᕸࢆ௬ᐃࡍࡿ

Hybrid

ࢥ࣮ࢻ࡟࠾࠸࡚㸪㟁Ꮚ

ࢆ

Boltzmann

ศᕸ࡛୚࠼࡚࠸ࡿࡇ࡜ࡢጇᙜᛶࢆ♧ࡋ࡚࠸ࡿ㸬

ᅗ㸳 㟁఩ศᕸ㸦J_b=100ȝA

, Case (a)

^㸧

ᅗ㸴 ࢖࢜ࣥศᕸ㸦J_b=100ȝA

, Case (a)

^㸧

ᅗ㸵 㟁Ꮚศᕸ㸦J_b=100ȝA

, Case (a)

^㸧

ḟ࡟㸪࢔ࢡࢭࣝࢢࣜࢵࢻ࡟⾪✺ࡍࡿ࢖࢜ࣥὶ᮰࡬୚࠼ࡿୗὶ୰࿴㟁Ꮚᐦᗘࡢᙳ㡪࡟ࡘ࠸࡚ホ౯ࢆ⾜ࡗࡓ㸬ᅗ㸶

࠿ࡽᅗ㸯㸮࡟ࡣ㸪సᡂࡋࡓᮏゎᯒࢥ࣮ࢻࡢ㸱ḟඖᛶ࡟ࡘ࠸࡚ࡢጇᙜᛶࡢ☜ㄆࢆ୺┠ⓗ࡜ࡋ࡚㸪㸰ᯛࢢࣜࢵࢻࡢሙ

ྜ࡟᭱ࡶ㸱ḟඖᛶࡀᙉࡃ⾲ࢀࡿࢢࣜࢵࢻୗὶ㠃࡬ࡢ࢖࢜ࣥὶ᮰ศᕸࢆ♧ࡋࡓ㸬ࡇࡢᅗ࡟ࡣ୰࿴㟁Ꮚ᮲௳࡜ࡋ࡚

Case (a)࡜Case (c)ࡢ㸰ࡘࢆ⏝࠸ࡓሙྜࡢ⤖ᯝࡀ♧ࡉࢀ࡚࠸ࡿ㸬ࡇࢀࡽ㸰ࡘࡢࢣ࣮ࢫ࡛࣮࢝ࣛࣂ࣮ࡣඹ㏻ࡢࡶࡢ

ࡀ⏝࠸ࡽࢀ࡚࠸ࡿ㸬Case (a)ࡢሙྜ࡟ࡣ㸪సືᚋࡢࢢࣜࢵࢻ㠃࡟ほᐹࡉࢀࡿ

Pits&Grooves

ࡢᦆ⪖ࣃࢱ࣮ࣥ࡟ఝ ࡓศᕸࡀほᐹ࡛ࡁࡓ㸬ࡋ࠿ࡋ

,୰࿴㟁Ꮚᐦᗘࡢప࠸Case (c)ࡢሙྜ࡟ࡣ⦆ࡸ࠿࡞ศᕸࡢࡳࡀ☜ㄆ࡛ࡁࡓ㸬ḟ࡟ࢢࣜ

ࢵࢻୗὶ㠃ࡢᦆ⪖࡟ࡘ࠸࡚ᐃᛶⓗ࡞ホ౯ࢆ⾜ࡗࡓ㸬ᦆ⪖ࡢᐃ㔞ホ౯࡟ࡣࢫࣃࢵࢱࣜࣥࢢ⋡㸪෌௜╔⋡➼ࡀᚲせ࡛

࠶ࡿࡀ㸪ࡇࢀࡽࡢヲ⣽࡞ホ౯ᘧ࡟ࡘ࠸࡚ࡣⓒṊࡽࡢ◊✲

[13]ࡀ⌧ᅾ㐍⾜୰࡛࠶ࡿ㸬ࡲࡓ㸪ᅗ㸷࡟♧ࡍୗὶ㠃࡬ࡢ

⾪✺࢖࢜ࣥ⢏Ꮚࡢ࢚ࢿࣝࢠ࣮ศᕸ࡛ࡣ࡝ࡢࢣ࣮ࢫ࡟࠾࠸࡚ࡶ

130eV

⛬ᗘ௨ୖࡢ⢏Ꮚࡀ࡯࡜ࢇ࡝࡛࠶ࡿࡇ࡜࠿ࡽ㸪 ࢥ࣮ࢻࡢᇶᮏⓗ࡞ጇᙜᛶホ౯ࢆ୺┠ⓗ࡜ࡋ࡚࠸ࡿᮏሗ࿌࡛ࡣ㸪ᦆ⪖⋡ࡀ࢚ࢿࣝࢠ࣮ὶ᮰࡟ẚ౛ࡍࡿࡶࡢ࡜ࡋ࡚࢚

&DVHD &DVHF

ᅗ㸶 ࢔ࢡࢭࣝࢢࣜࢵࢻୗὶ㠃࡬⾪✺ࡍࡿ࢖࢜ࣥࡢᩘὶ᮰ᐦᗘศᕸ㸦Jb=100ȝA㸧

ᅗ㸷 ࢔ࢡࢭࣝࢢࣜࢵࢻୗὶ㠃࡬⾪✺ࡍࡿ⢏Ꮚࡢ࢚ࢿࣝࢠ࣮ศᕸ㸦Jb=100ȝA㸧

&&DVHD &DVHF

ᅗ㸯㸮 ࢔ࢡࢭࣝࢢࣜࢵࢻୗὶ㠃࡬⾪✺ࡍࡿ࢖࢜ࣥࡢ࢚ࢿࣝࢠ࣮ὶ᮰ᐦᗘศᕸ㸦J_b=100ȝA㸧

ࢿࣝࢠ࣮ὶ᮰⤖ᯝ࠿ࡽᦆ⪖࡟ࡘ࠸࡚ࡢ⡆᫆ⓗ࡞ホ౯ࢆ⾜ࡗࡓ㸬ᅗ㸷࡟࠾࠸࡚㸪࢖࢜ࣥ⢏Ꮚࡢ࢚ࢿࣝࢠ࣮ࡀࡍ࡭࡚

ࡢࢣ࣮ࢫ࡛

200 eV

㏆ഐ࡟㞟୰ࡋ࡚࠸ࡿᵝᏊࡀㄆࡵࡽࢀࡿ㸬ࡲࡓ㸪୰࿴㟁Ꮚᐦᗘࡀపࡃ࡞ࡿ࡟ࡘࢀ࡚ࡑࡢࣆ࣮ࢡ ࡀ⦆ࡸ࠿࡟࡞ࡾ㸪ࡑࡢ್ࡶୖὶഃ࡟⛣ືࡋ࡚࠸ࡿ㸬ࡇࡢ࢚ࢿࣝࢠ࣮㞟୰ࡢ⌮⏤࡟ࡼࡾ㸪ᅗ㸯㸮ࡢ࢚ࢿࣝࢠ࣮ὶ᮰ ศᕸࡣ㸪ᅗ㸶࡟♧ࡉࢀࡿᩘὶ᮰ࡢሙྜ࡜ྠᵝ࡞ศᕸࢆ♧ࡋ࡚࠸ࡿࡀ㸪

Case (a)࡟࠾࠸࡚ࡣᩘὶ᮰ศᕸࡼࡾࡶ”Pits”

ࡢ㒊ศࡀࡼࡾ᫂☜࡟⌧ࢀ࡚࠸ࡿ㸬ᅗ㸯㸯࡟ࡣ࢔ࢡࢭࣝࢢࣜࢵࢻෆቨ㟁ὶཬࡧୗὶ㠃㟁ὶࡢࣅ࣮࣒㟁ὶẚࢆ㉳ᅉู

࡟♧ࡋࡓ㸬ෆቨ㟁ὶẚࡣ㸪ᐇ㦂್

[10]࡜࡯ࡰྠᵝ࡞್ࢆ♧ࡋ㸪ୗὶ㠃㟁ὶẚࡣഹ࠿࡟ప࠸್࡜࡞ࡗ࡚࠸ࡿ㸬ࡲࡓ㸪

ෆቨ㸪ୗὶ㠃࡜ࡶ

Total

ࡢ㟁ὶẚࡢ࡯࡜ࢇ࡝ࡀ㟁Ⲵ஺᥮࢖࢜ࣥ࡟ࡼࡿࡶࡢ࡛࠶ࡾ୰࿴㟁Ꮚᐦᗘ࡜࡜ࡶ࡟㧗ࡃ࡞ࡗ

࡚࠸ࡿࡀ㸪ୗὶ㡿ᇦࡢᙳ㡪ࢆཷࡅࡸࡍ࠸ୗὶ㠃㟁ὶẚ࡟࠾࠸࡚ࡑࡢഴྥࡣᙉࡃ⌧ࢀ࡚࠸ࡿ㸬ࡲࡓ㸪࢖࢜ࣥࣅ࣮࣒

㡿ᇦࢆᇶ࡟ࡋ࡚୰࿴㟁Ꮚ᮲௳ࢆồࡵࡓ

Case (a)࡜Case (b)ࡢ㛫࡛ࡣ࠶ࡲࡾ㐪࠸ࡀぢࡽࢀ࡞࠸ࡀ㸪ὶฟ㠃඲య࡛ᖹ

ᆒࢆ࡜ࡗࡓ

Case (c)࡜ࡣ኱ࡁࡃ␗࡞ࡗ࡚࠸ࡿ㸬ᮏゎᯒ࡛ࡣ࢖࢜ࣥࣅ࣮࣒ࡀὶฟ㠃඲యࡲ࡛ᣑࡀࡾࡁࡗ࡚࠸࡞࠸㡿

ᇦࢆᢅࡗ࡚࠸ࡿࡓࡵ㸪ὶฟ㠃ࡢ୰࿴㟁Ꮚศᕸࡣ࢖࢜ࣥࣅ࣮࣒㡿ᇦ࡛࠶ࡿ࢖࢜ࣥࡢ㧗ᐦᗘ㡿ᇦࢆᇶ‽࡟ࡍࡿ᪉ࡀጇ ᙜ࡛࠶ࡿ࡜⪃࠼ࡽࢀࡿࡇ࡜ࡸ㸪

Case(a)࡜Case(b)ࡢ㛫ࡢ㐪࠸ࡀഹ࠿࡛࠶ࡿࡇ࡜࠿ࡽḟ⠇࡛ࡣCase (a)ࡢሙྜ࡟ࡘ

࠸࡚ホ౯ࢆ㐍ࡵ࡚࠸ࡿ㸬ࡓࡔࡋ㸪ࡇࡢ୰࿴㟁Ꮚศᕸ᮲௳ࡣ㸪ᮏゎᯒ࠿ࡽࡶ᫂ࡽ࠿࡞ࡼ࠺࡟࢖࢜ࣥࡢࢢࣜࢵࢻ⾪✺

㐣⛬࡬୚࠼ࡿᙳ㡪ࡀ኱ࡁ࠸ࡓࡵ㸪ୗὶ㠃࡛㟁఩ࢆ୍ᐃ㸦= 0V㸧࡛୚࠼ࡿࡇ࡜ࡢጇᙜᛶࡶྵࡵ௒ᚋࡢ᳨ウࡀᚲせ࡛

࠶ࡿ࡜⪃࠼࡚࠸ࡿ㸬

ᅗ㸯㸯 ࢔ࢡࢭࣝࢢࣜࢵࢻෆቨ㟁ὶ࠾ࡼࡧୗὶ㠃㟁ὶࡢࣅ࣮࣒㟁ὶẚࡢὶฟ㡿ᇦ㟁Ꮚᐦᗘ౫Ꮡᛶ㸦Jb=100ȝA㸧

3.2.2 ࢔ࢡࢭࣝࢢࣜࢵࢻ⾪✺࡟࠾ࡅࡿࣅ࣮࣒㟁ὶ౫Ꮡᛶ

᭱ᚋ࡟㸪୰࿴㟁Ꮚ᮲௳ࢆ

Case (a)࡛୚࠼ࡓሙྜࡢ࢔ࢡࢭࣝࢢࣜࢵࢻ㟁ὶ㸫ࣅ࣮࣒㟁ὶẚ࡟ࡘ࠸࡚ࣅ࣮࣒㟁ὶࢆ

ኚ໬ࡉࡏࡓሙྜࡢ⤖ᯝࢆᅗ㸯㸰࡟♧ࡋࡓ㸬ෆቨ㟁ὶẚ㸪ୗὶ㠃㟁ὶẚ࡜ࡶ࡟୰㟁ὶ㡿ᇦ㸦100㹼200ȣA㸧࡛ࡣ㸪

ᐇ㦂್

[10]࡜࡯ࡰྠᵝ࡞್ࢆ♧ࡋ࡚࠸ࡿ㸬ࡋ࠿ࡋ㸪≉࡟ෆቨ㟁ὶẚࡣ㸪ప㟁ὶ㸦50ȣA㸧࠾ࡼࡧ㧗㟁ὶ㸦197ȣA

㹼㸧᫬࡟ᐇ㦂࡟ぢࡽࢀࡿࡼ࠺࡞ᛴ⃭࡞ୖ᪼ࢆᤊ࠼ࡽࢀ࡞࠿ࡗࡓ㸬ࡲࡓ㸪ୗὶ㟁ὶẚࡣࡑࡢ໙㓄ࡢ࣮ࣔࢻࡀ୰㟁ὶ ᇦ࡛㸰ࡘ࡟ศ࠿ࢀ࡚࠸ࡿࡀ㸪ࡑࡢ୙㐃⥆Ⅼࡣゎᯒ್ࡢ᪉ࡀࡼࡾ㧗㟁ὶഃ࡟఩⨨ࡋ࡚࠸ࡿ㸬㉳ᅉู࡛ࡳࡿ࡜࡝ࡕࡽ

ࡢ㟁ὶ࡜ࡶ㟁Ⲵ஺᥮࢖࢜ࣥ࡟ࡼࡿࡶࡢࡀ୺࡛࠶ࡿࡀ㸪ୗὶ㠃㟁ὶ࡟࠾࠸࡚ࡣᙎᛶ⾪✺࢖࢜ࣥ࡟ࡼࡿ๭ྜࡀࡍ࡭࡚

2㸣௨ୗ࡛࠶ࡿࡢ࡟ᑐࡋ࡚㸪ෆቨ㟁ὶ࡛ࡣ233ȣA

ࡢሙྜ࡟

12㸣࡜࡞ࡗ࡚࠾ࡾࡑࡢᐃ㔞ホ౯᫬࡟ࡣ↓ど࡛ࡁ࡞࠸

㔞࡜࡞ࡗ࡚࠸ࡿ㸬ࡲࡓ㸪㧗㟁ὶ᫬࡟ࣅ࣮࣒㟁ὶࡢ᣺ືࡀࡳࡽࢀࡓࡀ㸪௒ᚋࡢࢥ࣮ࢻࡢ㧗⢭ᗘ໬㐣⛬࡟࠾࠸࡚ࡇࡢ

᣺ືࡣࡑࡢᣦ㔪࡜࡞ࡿࡶࡢ࡛࠶ࡿ࡜⪃࠼࡚࠸ࡿ㸬

ࡲࡓ㸪ᅗ㸯㸰࡟ࡣ୰ᛶ⢏Ꮚࡢ⾪✺ࢆホ౯ࡍࡿ┠ⓗ࡛ࡑࡢὶ᮰࡜ࣅ࣮࣒࢖࢜ࣥ࡜ࡢὶ᮰ẚ࡟ࡘ࠸࡚㟁ὶẚ࡜ྠᵝ

࡟♧ࡋ࡚࠸ࡿ㸬ࡇࡢ⤖ᯝ࠿ࡽୗὶ㠃࡛ࡣ୰ᛶ⢏Ꮚࡢᙳ㡪ࡣṤ࡝↓ど࡛ࡁࡿࡇ࡜ࡀࢃ࠿ࡿࡀ㸪ෆቨ࡟ࡘ࠸࡚ࡣ࢖࢜

ࣥࡢ⣙

40㸣௨ୖࡢὶ᮰ࡀᚓࡽࢀ࡚࠾ࡾᐃ㔞ホ౯࡟࠾࠸࡚୰ᛶ⢏Ꮚ⾪✺ࡀ↓ど࡛ࡁ࡞࠸ࡇ࡜ࢆ♧ࡋ࡚࠸ࡿ㸬ࡲࡓ㸪

ࡇࢀࡽࡢ⾪✺୰ᛶ⢏Ꮚࡢ࡯࡜ࢇ࡝ࡣᙎᛶ⾪✺⢏Ꮚ࡛࠶ࡿ㸬

࢔ࢡࢭࣝࢢࣜࢵࢻෆቨ㟁ὶẚ ࢔ࢡࢭࣝࢢࣜࢵࢻୗὶ㠃㟁ὶẚ ᅗ㸯㸰 ࢔ࢡࢭࣝࢢࣜࢵࢻෆቨ㟁ὶ࠾ࡼࡧୗὶ㠃㟁ὶࡢࣅ࣮࣒㟁ὶẚࡢࣅ࣮࣒㟁ὶ౫Ꮡᛶ㸦Case (a)㸧

4. ࡲ࡜ࡵཬࡧ௒ᚋࡢィ⏬

㸱ḟඖ

Full-PIC

ࢥ࣮ࢻ࡟ࡼࡿ

JIEDI

ࢶ࣮ࣝࡢ᭱⤊ⓗ࡞⢭ᗘ᳨ドཬࡧୖὶࢩ࣮ࢫ㸪ୗὶ୰࿴㡿ᇦ࡟࠾ࡅࡿቃ⏺

᮲௳➼ࡢᥦ᱌ࢆ

2010

ᖺࡲ࡛࡟⾜࠺ࡇ࡜ࢆ┠ᶆ࡟㸪ᮏᖺᗘ࡛ࡣࡲࡎࢥ࣮ࢻᮏయࡢ㛤Ⓨࢆ⾜࠸㸪᪩ᕝ࡟ࡼࡗ࡚⾜ࢃ

ࢀࡓᐇ㦂[10]㸦ᶆ‽ၥ㢟㸧ࡢ᮲௳ୗ࡛ゎᯒࢆ⾜࠺ࡇ࡜࡛㸪ࢥ࣮ࢻࡢጇᙜᛶࡢ᳨ドࢆヨࡳࡓ㸬

ᮏゎᯒ࡛ࡣ㸪ホ౯ࡢ➨୍ẁ㝵࡜ࡋ࡚㸪ィ⟬㈇Ⲵࢆపῶࡍࡿ┠ⓗ࡛㟁Ꮚ㉁㔞ࢆ࢖࢜ࣥ㉁㔞࡜➼ࡋࡃタᐃࡋ㸪⢏Ꮚ ᮲௳࡜ࡋ࡚ୖὶ㸪ୗὶ㡿ᇦ࡟

Maxwell

ศᕸࢆ௬ᐃࡍࡿ࡜࠸࠺⡆༢໬ࡋࡓ᮲௳ࢆ⏝࠸ࡓ࡟ࡶ㛵ࢃࡽࡎ㸪࢔ࢡࢭࣝࢢ

ࣜࢵࢻ㟁ὶ㸭ࣅ࣮࣒㟁ὶẚ࡟ࡘ࠸࡚ᐇ㦂್࡜㏆࠸್ࡀᚓࡽࢀ㸪ࡲࡓ㸪࢔ࢡࢭࣝࢢࣜࢵࢻୗὶ㠃࡬ࡢ࢖࢜ࣥ⾪✺ศ ᕸ࡟ࡘ࠸࡚㸰ᯛࢢࣜࢵࢻ࢚ࣥࢪࣥ࡟≉ᚩⓗ࡞㸰ḟඖศᕸࡀᤊ࠼ࡽࢀࡓ㸬ࡇࡢࡼ࠺࡟㸱ᐇ㦂್࡜ࡢᐃ㔞ⓗ࡞Ⰻ࠸୍

⮴ࡔࡅ࡛࡞ࡃ㸪㸱ḟඖ

Full-PIC

ࢥ࣮ࢻ࡟ࡼࡗ࡚≉ᚩⓗ࡞㸰ḟඖศᕸࡀᤊ࠼ࡽࢀࡓࡇ࡜ࡣ㸪ᮏࢥ࣮ࢻࡢጇᙜᛶࢆ

♧ࡍࡔࡅ࡛࡞ࡃ㸪 ௒ᚋࡢ࢖࢚࢜ࣥࣥࢪࣥゎᯒ࡟࠾࠸࡚Full-PIC ࢥ࣮ࢻ࡟ࡼࡿヲ⣽࡞ᦆ⪖ホ౯࡬ࡢ㸱ḟඖFull-PIC