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Deposition of Films with Low Dielectric Constant by Plasma-Enhanced Chemical Vapor Deposition

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Deposition of Films with Low Dielectric Constant by Plasma‑Enhanced Chemical Vapor Deposition

著者 Lubguban Jorge A.Jr journal or

publication title

博士学位論文要旨 論文内容の要旨および論文審査 結果の要旨/金沢大学大学院自然科学研究科

volume 平成13年6月

page range 60‑62

year 2001‑06‑01

URL http://hdl.handle.net/2297/16329

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