ྠᏛ⣖せ ➨ 54 ᕳ㸦2018㸧
InP(111)A ⾲㠃㔜ᒙࡢ⦆
Relaxation of the first bilayer of InP(111)A surface
ᇼᑿྜྷᕬ*ࠊᰆཎ῟ྖ**ࠊ㧗᱓㞝***
Yoshimi Horio*, Junji Yuhara**, Yuji Takakuwa***
Summary
Surface structure of InP(111)A is investigated by reflection high-energy electron diffraction (RHEED) rocking curves and first principles calculations. In this study, we use Ar ion sputtering and low-temperature annealing as a cleaning treatment that yields a (1×1) surface structure. RHEED rocking curves reveal that the interatomic distance of the top surface bilayer reduces as if the surface were under compressive stress. We perform first principles calculations based on a 2×2 unit cell to obtain a stable structure. The calculated results suggest that the top compressed bilayer is necessary for the surface energy minimization in structures missing In (or P) atoms. Taking into account of electron counting rule, it is concluded that InP(111)A-(1×1) surface structure comprises randomly distributed In vacancies with compressed bilayer .
࣮࣮࢟࣡ࢻ㸸ᑕ㧗㏿㟁ᏊᅇᢡࠊInP(111)ࠊ➨୍ཎ⌮ィ⟬ࠊ⾲㠃ᵓ㐀 Keywords㸸 RHEED, InP(111), first principles calculation, surface structure
㸬ࡣࡌࡵ
Ϫ-Ϭ᪘ྜ≀༙ᑟయࡢ InP(111)⾲㠃ࡣ࣊ࢸ࢚ࣟࣆࢱ
࢟ࢩࣕࣝᇶᯈࡋ࡚ࠊගࢹࣂࢫࠊග㞟✚ᅇ㊰ࠊ㉸㧗
㏿㟁Ꮚࢹࣂࢫࡢᙧᡂ⏝࠸ࡽࢀࠊࢿࢵࢺ࣮࣡ࢡ♫
ࡣ㔜せ࡞ᮦᩱ࡛࠶ࡿࠋࢹࣂࢫࡢᚤ⣽క࠸ࠊ InP(111)ࡢ⾲㠃ᵓ㐀ࢆ▱ࡿࡇࡣᛂ⏝ⓗほⅬࡢࡳ࡞ࡽ
ࡎᏛ⾡ⓗほⅬࡽࡶ㔜せ࡛࠶ࡿࡀࠊពእࡑࡢ⾲㠃ᵓ 㐀ࡢヲ⣽࡞ሗ࿌ࡣᑡ࡞࠸ࡢࡀ⌧≧࡛࠶ࡿࠋ
InP(111) ௨ እ ࡢ Ϫ - Ϭ ᪘ ྜ ≀ ༙ ᑟ య ࡛ ࠶ ࡿ GaAs(111)
1,2)ࠊ InSb(111)
3,4)ࠊInAs(111)
5)ࠊ GaP(111)
6)࡞
ࡶ㟁Ꮚࢹࣂࢫࡋ࡚⏝࠸ࡽࢀ࡚࠸ࡿࠋࡇࢀࡽࡢ⾲㠃
ࡶᴟᛶࢆ᭷ࡋࠊࡑࡢ⾲㠃ᵓ㐀ࡣ⤌ᡂࠊ⤖ᬗ᪉ࠊ ᗘ
࡞౫Ꮡࡋ࡚ᵝࠎ࡞⾲㠃ᵓᡂࢆ♧ࡍࠋ≉Ϫ᪘ඖ
⣲ࡀ⾲㠃࡛⤊➃ࡍࡿ A ⾲㠃࡛ࡣ(2×2)⾲㠃㉸ᵓ㐀ࡀ⌧ࢀ
ࡿࡇࡀ▱ࡽࢀ࡚࠾ࡾࠊࡑࡢᵓ㐀ࡣ 2 ಸ࿘ᮇ࡛⾲㠃ࡢ
Ϫ᪘ཎᏊࡀḞዴࡋࡓᵓ㐀ࡋ࡚ㄆࡵࡽࢀ࡚࠸ࡿࠋࡑࢀ
ࡣ࢚ࣞࢡࢺࣟࣥ࢝࢘ࣥࢸࣥࢢ๎
7)ࢆ‶ࡓࡍᵓᡂ⾲
㠃࡛࠶ࡾࠊṧࡉࢀࡓ⾲㠃ࡢϪ᪘ཎᏊ㝶ࡍࡿࢲࣥࢢ
ࣜࣥࢢ࣎ࣥࢻෆࡢ㟁Ꮚࡣ࡚➨ 2 ᒙࡢϬ᪘ཎᏊ⛣ື
ࡋࠊ⤖ྜᡭෆࡣ 2 ಶࡢ㟁Ꮚࡀ⣡ࡉࢀ࡚Ᏻᐃࡍࡿ
ࡶࡢ࡛࠶ࡿࠋ➨୍ཎ⌮ィ⟬ࢆ⏝࠸ࡓ⾲㠃࢚ࢿࣝࢠ࣮
ࡽࡶϪ᪘ཎᏊࡢḞ㝗ࣔࢹࣝࡀ᭱ࡶᏳᐃࡋࡓ⾲㠃ᵓᡂ
࡛࠶ࡿࡇࡀ▱ࡽࢀ࡚࠸ࡿࠋࡑࡢ㝿ࠊ⾲㠃ࡢϪ᪘ཎᏊ ᒙࡀ➨ 2 ᒙ┠ࡢϬ᪘ཎᏊᒙྥࡗ࡚ᆶ┤᪉ྥᅽ⦰
ࡉࢀࡓᵓ㐀ࢆࡿࡇࡀሗ࿌ࡉࢀ࡚࠸ࡿࠋ
ࡋࡋ࡞ࡀࡽࠊInP(111)⾲㠃㛵ࡋ࡚ࡣప⼥Ⅼᮦᩱ࡛
࠶ࡾࠊ InP(111) ࡢΎί⾲㠃ࡢసᡂࡣ㏻ᖖࡢ㧗 ຍ⇕ἲ࡛
ࡣᅔ㞴࡞ࡓࡵࠊࡑࡢ⾲㠃ᵓ㐀ࡘ࠸࡚ࡢሗ࿌ࡣࡢ Ϫ - Ϭ᪘ྜ≀༙ᑟయẚ࡚ᴟࡵ࡚ᑡ࡞࠸ࡢࡀ⌧≧
ᛮࢃࢀࡿࠋ 2003 ᖺ Li ࡽࡣ᭷ᶵ㔠ᒓᏛẼ┦࢚ࣆࢱ࢟
ࢩ࣮㸦 MOVPE 㸧ࡼࡾᡂ㛗ࡉࡏࡓ InP(111)A 㠃㸦 In ཎ
㸨
ྠᏛᕤᏛ㒊㟁Ẽ㟁ᏊᕤᏛ⛉
㸨㸨
ྡྂᒇᏛᏛ㝔ᕤᏛ◊✲⛉
㸨㸨㸨
ᮾᏛከඖ≀㉁⛉Ꮫ◊✲ᡤ
Ꮚࡀ᭱⾲㠃ฟࡿ⾲㠃㸧࠾࠸࡚ࠊࡑࡢࢽ࣮ࣝ ᗘ
ࡀ 400Υ࡛ࡣ(2×2)⾲㠃㉸ᵓ㐀ࡀ⌧ࢀࠊࡑࢀࡼࡾప ࡢ
250 Υࡢࢽ࣮ࣝ ᗘ࡛ࡣ (ξ͵×ξ͵)R͵Ͳ
ι⾲㠃㉸ᵓ㐀ࡀ⌧
ࢀࡿࡇࢆ㉮ᰝࢺࣥࢿࣝ㢧ᚤ㙾㸦STM㸧ప㏿㟁Ꮚᅇ ᢡࢆ⏝࠸࡚ほᐹࡋ࡚࠸ࡿ
8)ࠋ 2008 ᖺ Akiyama ࡽࡣࡑ
ࢀࡽࡢ⾲㠃ᵓᡂࡘ࠸࡚ ab-initio ィ⟬ࢆ⾜࠸ࠊỈ⣲ཎ Ꮚࡼࡾࣃࢵࢩ࣮࣋ࢺࡉࢀࡓ⾲㠃ࢲࣥࢢࣜࣥࢢ࣎ࣥࢻ ࡢᙺࡢ㔜せᛶࢆሗ࿌ࡋ࡚࠸ࡿ
9)ࠋ
ᮏ◊✲࡛ࡣᕷ㈍ࡢ㙾㠃◊☻ࡉࢀࡓ InP(111)A 㠃ࡢ࢘
࢙ࣁ࣮ࢆ Ar ࢜ࣥࢫࣃࢵࢱࣜࣥࢢ 200Υ⛬ᗘࡢప
ࢽ࣮ࣝࢆే⏝ࡍࡿࡇࡼࡾ InP(111)A ⾲㠃ࡢΎί
ࢆヨࡳࡓࡇࢁࠊ(1×1)⾲㠃ࡀ⌧ࢀࡓࠋࢽ࣮ࣝ ᗘ
ࢆẚ㍑ⓗ㧗 ࡢ 500 Υ⛬ᗘࡲ࡛ୖࡆࡿ (2×2) ⾲㠃ࡢฟ
⌧ࢆほᐹࡋࡓࡀࠊIn ࢻࣟࢵࣉࣞࢵࢺࡢᙧᡂࡀᠱᛕࡉࢀ
ࡿࡓࡵࡇࡇ࡛ࡣ InP(111)A-(1×1) ⾲㠃ࢆᑐ㇟ࡋࡓࠋ
ᑕ㧗㏿㟁Ꮚᅇᢡ㸦RHEED㸧ࡢࣟࢵ࢟ࣥࢢ᭤⥺
10)➨୍
ཎ⌮ィ⟬
11,12)ࡽࡇࡢ⾲㠃ࡢᵓ㐀ゎᯒࢆ⾜ࡗࡓࡇࢁࠊ
ࡢϪ-Ϭ᪘ྜ≀༙ᑟయ
1-6)ࡢ(111)A ⾲㠃⌧ࢀࡿ
(2×2) ᵓᡂ⾲㠃ྠᵝࠊ⾲㠃㔜ᒙࡢᅽ⦰⦆⾲
㠃ཎᏊࡢḞ㝗ࡀᏑᅾࡍࡿࡇࢆぢฟࡋࡓࡢ࡛ሗ࿌ࡍࡿࠋ 㸬ᐇ㦂᪉ἲ
⏝࠸ࡓヨᩱࡣ InP(111)A 㠃࡛࠶ࡾࠊᕷ㈍ࡢ༢⤖ᬗ࢙࢘
ࣁ࣮㸦 MTI corp. 〇ࠊ N ᆺࠊࣥࢻ࣮ࣉ㸧ࢆ 0.5 4 15mm
3ษ᩿ࡋ࡚⏝ࡋࡓࠋ㉸㧗┿✵୰࡛ࡢ⾲㠃Ύίࡘ
࠸࡚ࡣࠊ୍⯡⏝࠸ࡽࢀࡿ 1000 Υ௨ୖࡢ㧗 ຍ⇕ἲࡀ 㐺⏝࡛ࡁ࡞࠸ࠋࡑࢀࡣࠊ InP ࡣప⼥Ⅼ࡛㧗࠸Ẽᅽࢆ᭷
ࡍࡿࡓࡵ࡛࠶ࡿࠋ 200 Υ⛬ᗘࡢຍ⇕ࡽ P ཎᏊࡀⓎࡋ ጞࡵࡿࡓࡵࠊ⾲㠃ࡣ 200nm ⛬ᗘࡢ In ࡢࢻࣟࢵࣉࣞ
ࢵࢺࡀᙧᡂࡉࢀጞࡵࠊ 500 Υ⛬ᗘࡢຍ⇕࡛ࡣࡑࢀࡽࡢྜ
యࡼࡾᩘȣm ⛬ᗘ௨ୖࡢࢧࢬᡂ㛗ࡍࡿᵝᏊࡀ SEM ࡛ほᐹࡉࢀࡓࠋࡇࡢࡼ࠺㧗 ຍ⇕࡛⾲㠃ởᰁ≀
ࢆ㝖ཤࡋࡼ࠺ࡍࢀࡤࠊ⾲㠃⤌ᡂࡸᙧែኚࢆཬࡰ
ࡍࠋࡑࡇ࡛ࠊᮏ◊✲࡛ࡣ Ar ࢜ࣥࢫࣃࢵࢱࣜࣥࢢ
200Υ⛬ᗘࡢప ࢽ࣮ࣝࡼࡗ࡚Ύίࢆヨࡳࡓࠋࡇ ࡢࡼ࠺࡞ప ຍ⇕࡛ࡶ Ar ࢜ࣥࢫࣃࢵࢱࣜࣥࢢ࡛Ⲩࢀ
ࡓ⾲㠃ࢆಟྍ⬟࡛࠶ࡿࡇࡣ RHEED ᅗᙧࡢࡑࡢሙ ほᐹࡽ☜ㄆࡉࢀࡿࠋࡍ࡞ࢃࡕࠊࢹࣇ࣮ࣗࢬ࡞ᅇᢡ ᅗᙧࡢࣂࢵࢡࢢࣛࣥࢻࡽᩚᩘḟࡢᅇᢡᩬⅬࡀฟ⌧ࡋ ጞࡵࡿᵝᏊࡀᩘ⛊⛬ᗘࡢ㛫☜ㄆ࡛ࡁࡿࠋࡇࢀࡣ In ཬ ࡧ P ཎᏊࡢẚ㍑ⓗࡁ࡞⾲㠃ᣑᩓࢆ♧၀ࡍࡿࡶࡢ⪃
࠼ࡽࢀࡿࠋࢽ࣮ࣝ ᗘࢆ 500 Υ⛬ᗘୖࡆࡿ (2×2)
㉸ᵓ㐀ࡀฟ⌧ࡍࡿሙྜࡶ࠶ࡗࡓࡀࠊࡑࡢሙྜࡣྠ
In ࢻࣟࢵࣉࣞࢵࢺࡶᙧᡂࡉࢀ࡚࠸ࡿࡇࡀᠱᛕࡉࢀ
ࡿࡓࡵࠊᮏ◊✲࡛ࡣప ࢽ࣮࡛ࣝᙧᡂࡉࢀࡿ(1×1)⾲
㠃ᵓ㐀ࢆᑐ㇟ᐇ㦂ࢆ⾜ࡗࡓࠋ (2×2) ⾲㠃 (1×1) ⾲㠃ࡢ
ฟ⌧ࡢ㐪࠸ࡀࢽ࣮ࣝ ᗘࡔࡅࡼࡿࡶࡢࠊᡈ࠸ࡣ Ύί㐣⛬ࡸΎίࡢᒚṔࠊᡈ࠸ࡣ┿✵⎔ቃࡶ౫Ꮡ ࡍࡿࡣุ᫂ࡋ࡚࠸࡞࠸ࡢࡀ⌧≧࡛࠶ࡿࠋ
RHEED ࡢධᑕ㟁Ꮚ࢚ࢿࣝࢠ࣮ࡣ 10keV ࡋࠊᅇᢡ㟁
Ꮚᙉᗘࡢධᑕどᑕゅ౫Ꮡᛶ࡛࠶ࡿࣟࢵ࢟ࣥࢢ᭤⥺ࡣ [11 ʹത ] ᑐ ⛠ ධ ᑕ ᪉ ࠾ ࡼ ࡧ ࡑ ࢀ ࡽ ͷǤͷ
ιࡎ ࡽ ࡋ ࡓ
one-beam ධᑕ᪉࡛ ᐃࡋࡓࠋ
㸬ィ⟬᪉ἲ
ᐇ㦂࡛ᚓࡽࢀࡿᅇᢡ㟁Ꮚࡢࣟࢵ࢟ࣥࢢ᭤⥺ィ⟬
ࡽᚓࡽࢀࡿࣟࢵ࢟ࣥࢢ᭤⥺ࢆẚ㍑ࡍࡿࡇ࡛ᵓ㐀ࣔ
ࢹࣝࢆ᥈⣴ࡋࡓࠋࡲࡓࠊ࢚ࢿࣝࢠ࣮ⓗᏳᐃᵓ㐀ྰ
ࡘ࠸࡚ࡣ➨୍ཎ⌮ィ⟬ࡼࡾ᳨ドࡋࡓࠋࡇࢀࡽィ
⟬ࡢヲ⣽ࡘ࠸࡚ࡣ 3.1 ⠇࠾ࡼࡧ 3.2 ⠇࡛㏙ࡿࠋ
ᅇᢡ㟁Ꮚᙉᗘࡢィ⟬
ࣟࢵ࢟ࣥࢢ᭤⥺ࡢィ⟬ࡣ࣐ࣝࢳࢫࣛࢫືຊᏛⓗ⌮
ㄽ
13)ࢆ⏝࠸࡚⾜ࡗࡓࠋ⤖ᬗ࣏ࢸࣥࢩࣕࣝࡣ Doyle
Turner ࡢᩘ್
14)ࢆ⏝࠸࡚ィ⟬ࡋࠊ྾ࢆ⾲ࡍᩘ࣏ࢸ
ࣥࢩࣕࣝࡣᐇᩘ࣏ࢸࣥࢩࣕࣝࡢ 10 㸣ࡋࡓࠋ⤖ᬗࢆ⾲
㠃ᖹ⾜ 0.1ύཌ࡛ࢫࣛࢫࡋ࡚ྛࢫࣛࢫෆ࡛ࢩࣗࣞ
࣮ࢹ࣮ࣥ࢞᪉⛬ᘧࢆゎࡃࡀࠊ༑ศ᮰ࡍࡿ 100 ύࡢ῝
ࡉࡲ࡛ィ⟬ࢆᐇ⾜ࡋࡓࠋ᱁Ꮚືࢆ⾲ࡍࢹࣂᅉᏊࡣ
⾲㠃࡛ B=2 ࠊෆ㒊ࡣ B=1 ࡋࡓࠋ⪃៖ࡋࡓࣟࢵࢻᩘࡣ (0 0)ࠊ(s1/2 s1/2)ࠊ(s1 s1)ࠊ(s3/2 s3/2)ࠊ (s2 s 2) ࡢ 9 ࡘ࡛࠶ࡿ㸦」ྕྠ㡰㸧ࠋࡇࡇ࡛㉸᱁Ꮚࣟࢵࢻࡀ 4 ࡘྵࡲࢀ࡚࠸ࡿࡀࠊᑐ㇟ࡍࡿヨᩱࡣ(1×1)⾲㠃ࡢࡓࡵࠊ
㉸᱁Ꮚࣟࢵࢻࡣ㛵ࡏࡎࠊᐇ㉁ⓗ 5 ࡘࡢᩚᩘḟࣟࢵ
ࢻࢆࡢࡳ⪃៖ࡋࡓࡇ࡞ࡿࠋ
➨୍ཎ⌮ィ⟬
➨୍ཎ⌮ィ⟬࡛ࡣᐦᗘỗ㛵ᩘ⌮ㄽ㸦 DFT 㸧ࢆ⏝࠸ࠊ⾲
㠃࢚ࢿࣝࢠ࣮ࡀ᭱ࡶపࡃ࡞ࡿᵓ㐀ࢆ᥈⣴ࡋࡓࠋ⏝ࡉ
ࢀࡓࢯࣇࢺࡣ VASP4.6
11)࡛࠶ࡾࠊࡇࡢィ⟬ࡣ㟁Ꮚ
࢜ࣥࡢ┦స⏝ࢆグ㏙ࡍࡿࡓࡵ PAW ἲࢆ⏝࠸
12)ࠊィ
⟬యࡣ୍⯡໙㓄㏆ఝ㸦 GGA 㸧ࡀ㐺⏝ࡉࢀ࡚࠸ࡿ
15)ࠋ
࢝ࢵࢺ࢜ࣇ࢚ࢿࣝࢠ࣮ࡣ 400eV ࡛࠶ࡿࠋィ⟬ࡣ 2×2 ༢
⥙ෆࡢཎᏊࢆ 10 bilayer ࡲ࡛⪃៖ࡋࡓࡀࠊ⾲㠃ࡽ 6
bilayer ࡣ⮬⏤ືࡅࡿ≧ែࡋࠊࡑࡢୗࡢ 4 bilayer ࡣ
ࣂࣝࢡࡢཎᏊ⨨ᅛᐃࡋࡓࠋ⾲㠃ࡢ 6 bilayer ෆࡢཎ Ꮚ⨨ࢆ࠸ࢁ࠸ࢁືࡋࠊ᭱ࡶ࢚ࢿࣝࢠ࣮ࡢపࡃ࡞ࡿ
᭱㐺Ᏻᐃᵓ㐀ࢆồࡵࡓࠋ 㸬ᐇ㦂ཬࡧィ⟬⤖ᯝ⪃ᐹ
ᑐ㇟ࡍࡿヨᩱ⾲㠃ࡣ InP(111)A 㠃ࡢ (1×1) ⾲㠃ᵓ㐀
࡛࠶ࡿࡓࡵࠊ㠃ෆ᪉ྥࡢཎᏊ⦆ࢆ⪃࠼ࡎࠊ㠃┤᪉ྥ
ࡢࡳࡢ⦆ࢆᐃࡋࡓࠋFig. 1 ⌮ⓗ InP(111)A ⾲ 㠃ࢆ (a) ┿ୖࡽࠊ (b) ┿ᶓࡽ═ࡵࡓཎᏊᵓ㐀ࢆ♧ࡍࠋ Fig. 1(a)ࡢኴ࠸▮༳ࡣᐇ㦂 ᐃࡋࡓ㟁Ꮚ⥺ࡢධᑕ᪉ࠊ ࡍ࡞ࢃࡕᑐ⛠ධᑕ᪉࡛࠶ࡿ ሾͳͳʹതሿ ධᑕ᪉ࡑࢀ
ࡽ ͷǤͷ
ιࡎࡽࡋࡓ one beam ධᑕ᪉ࢆ♧ࡍࠋࡑࢀࡒࢀࡢ
ධᑕ᪉ࡢ RHEED ᅗᙧࡑࡢࢩ࣑࣮ࣗࣞࢩࣙࣥᅗᙧ
ࢆ Fig. 2(a),(b)♧ࡍࠋFig. 2(a),(b)ࡢどᩳゅࡣࡑࢀࡒࢀ
͵ǤͶ
ι ͵Ǥͷ
ι࡛࠶ࡿࠋࢩ࣑࣮ࣗࣞࢩࣙࣥᅗᙧᐇ㦂 RHEED ᅗᙧࡣࡼࡃᑐᛂࡋ࡚࠸ࡿࡇࡀࢃࡿࠋ࡞࠾ィ⟬ࢩ
࣑࣮ࣗࣞࢩࣙࣥࡣᅇᢡᩬⅬࡢࡳ࡞ࡽࡎࠊ⳥ụ⥺ࡶᥥ
ࢀ࡚࠸ࡿࠋࡲࡓࠊ⾲㠃Ἴඹ㬆㸦SWR㸧㡿ᇦࡣᨺ≀⥺
≧ࡢᖏ࡛♧ࡉࢀ࡚࠸ࡿࠋ
5+((' ࣟࢵ࢟ࣥࢢ᭤⥺ࡼࡿᵓ㐀ゎᯒ
InP(111)A-(1×1)⾲㠃ࡢᵓ㐀ゎᯒࡣࠊ ሾͳͳʹതሿ ᪉ one
beam ᪉࡛ࡢࣟࢵ࢟ࣥࢢ᭤⥺ࡢᐇ㦂⤖ᯝィ⟬⤖ᯝ
ࡢẚ㍑ࡽホ౯ࡋࡓࠋὀ┠ࡋࡓᅇᢡᙉᗘࡣࠊ ሾͳͳʹതሿ ධ ᑕ᪉࡛ࡣ㙾㠃ᑕࡢ 0 0 ᅇᢡᩬⅬࢧࢻ⌧ࢀࡿ
1 1 ᅇᢡᩬⅬ࡛࠶ࡾࠊone beam ධᑕ᪉࡛ࡣ 0 0 ᅇᢡᩬ
Ⅼ࡛࠶ࡿࠋ
Fig. 1(b)♧ࡍࡼ࠺ࠊ⾲㠃➨㸯ᒙࡢ In ཎᏊᒙࡢ㧗ࡉ
ࢆ➨ 2 ᒙࡢ P ཎᏊᒙ㏆࡙ࡅࡓࡁࡢィ⟬ࣟࢵ࢟ࣥࢢ
᭤⥺ࢆᐇ㦂ࣟࢵ࢟ࣥࢢ᭤⥺ẚ㍑ࡍࡿࠋ⾲㠃➨ 1 ᒙࡢ In ᒙ➨ 2 ᒙࡢ P ᒙࢆࡲࡵ࡚⾲㠃➨ 1 㔜ᒙࡪ ࡀ㸦➨ 1 ࡣᚋ␎ࡍ㸧ࠊࡇࡇ࡛ࡣᵓ㐀⦆ࡋ࡚ࡇࡢ⾲
㠃㔜ᒙෆࡢ㛫㝸㸦 Fig. 1(b) ෆࡢ d ࡛♧ࡍ㛫㝸㸧ࢆᅽ⦰
⦆ࡉࡏࡓࠋࡍ࡞ࢃࡕࠊィ⟬ࡣ⦆ࡢ࡞࠸⌮ⓗ⾲㠃 ᵓ㐀㸦ࣂࣝࢡᵓ㐀ࢆษ᩿ࡋࡓࡲࡲࡢ⾲㠃㸧ࡢ d=0.85 ύ
ࡽࠊ0.2ύ้ࡳ࡛ d=0.05ύࡲ࡛㔜ᒙෆࡢ㛫㝸ࢆ⦰ࡵ
ࡓࡁࡢィ⟬⤖ᯝࢆᐇ㦂⤖ᯝẚ㍑ࡋ࡚ Fig. 3 ♧ࡍࠋ Fig. 3(a)ࡣ ሾͳͳʹതሿ ධᑕ᪉ࡢ 0 0 1 1 ᅇᢡᙉᗘࡢࣟࢵ
࢟ࣥࢢ᭤⥺ࢆ㔜ࡡ࡚♧ࡍࠋ 0 0 ᅇᢡᙉᗘࡢࣟࢵ࢟ࣥࢢ᭤
⥺࡛ࡣ㟁Ꮚࡢከ㔜ᩓࡢᙳ㡪࡛ࣈࣛࢵࢢᑕᑐᛂࡋ
࡞࠸」㞧࡞ࣆ࣮ࢡࢆ♧ࡋࠊᵓ㐀⦆ࡢ⛬ᗘࡼࡾࣉࣟ
ࣇࣝࡣ࡞ࡾኚࡍࡿࠋ࡞࠾ࠊどᑕゅ ʹǤ
ι㹼 ͵ǤͶ
ιࡢ ᙳࡢ㡿ᇦࡣෆ㒊ᖹᆒ㟁ࢆ 13V ᐃࡋࡓ ͳͳ ཬࡧ ͳതͳത
ࣟࢵࢻ㛵ࡍࡿ SWR 㡿ᇦ࡛࠶ࡾࠊࡑࡢ㡿ᇦ➃࡛ᐇ㦂ࡢ 0 0 ᅇᢡᙉᗘࡢࣟࢵ࢟ࣥࢢ᭤⥺ࣆ࣮ࢡࡀ⌧ࢀ࡚࠸ࡿⅬ ࡀ≉ᚩⓗ࡛࠶ࡿࠋ
ᵓ㐀⦆ࡢ࡞࠸⌮⾲㠃ᵓ㐀㸦 d=0.85 ύ㸧ࡣ᭱ୗ㒊
♧ࡍᐇ㦂⤖ᯝࢆࡃ⌧ࡋ࡞࠸ࡇࡀࢃࡿࠋࡋࡋ
࡞ࡀࡽࠊ d=0.25 ύࡲ࡛㔜ᒙෆࡢ㛫㝸ࢆ⦰ࡵࡿẚ㍑ⓗ
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ᐇ㦂⤖ᯝࡢᑐᛂࡣࡼࡃ࡞ࡿࡇࡀࢃࡿࠋࡋࡋ࡞
ࡀࡽヲ⣽═ࡵࢀࡤࠊィ⟬ࣟࢵ࢟ࣥࢢ᭤⥺ࡣ ʹǤͷ
ι㏆ࡢ
ࣆ࣮ࢡࡀࢲࣈࣝࣆ࣮ࢡ࡞ࡗ࡚࠸ࡿⅬ࡛ᐇ㦂⤖ᯝ
␗࡞ࡿࠋࡇࡢ┦㐪Ⅼࡣ⾲㠃Ḟ㝗ཎᏊࢆᐃࡍࡿࡇ
࡛ᐇ㦂⤖ᯝࢆࡼࡃ⌧࡛ࡁࡿࡇࡀぢฟࡉࢀࡓࠋࡇࢀ
ࡘ࠸࡚ࡣ 4.3 ⠇࡛㏙ࡿࠋ
୍᪉ࠊ Fig. 3(b) ࡣ one beam ᪉ࡢ 0 0 ᅇᢡᙉᗘࡢࣟࢵ
࢟ࣥࢢ᭤⥺ࢆ♧ࡍࠋᅗᯟୖ㒊♧ࡍࣈࣛࢵࢢᑕ⨨
ᑐᛂࡍࡿゅᗘ࡛つ๎ⓗ࡞ࣆ࣮ࢡࡀ⌧ࢀࡿࡀࠊᵓ㐀⦆
ࡢ⛬ᗘࡼࡾ┦ᑐᙉᗘࡣኚࡍࡿࠋ333 ࣆ࣮ࢡ 444
ࣆ࣮ࢡࡢᙉᗘẚࡣ d=0.25 ύ௨ୗ࡛ᐇ㦂⤖ᯝࡢᑐᛂࡣ ẚ㍑ⓗࡼࡃ࡞ࡿࡓࡵࠊone beam ᪉࠾࠸࡚ࡶ⾲㠃
㔜ᒙෆࡢᅽ⦰⦆ࡢᏑᅾࡀ♧၀ࡉࢀࡿࠋ
➨୍ཎ⌮ィ⟬ࡼࡿᵓ㐀ゎᯒ
Fig. 4 ࡣ➨୍ཎ⌮ィ⟬ࡽᑟࢀࡓ᭱㐺ᵓ㐀ࢆ♧ࡍ
ࡶࡢ࡛ࠊྛཎᏊᒙࡢ㧗ࡉ⨨ࢆࣂ࣮ࢢࣛࣇ࡛⾲♧ࡋࡓࠋ
⾲㠃ࡽ➨ 4 㔜ᒙ㸦8 ཎᏊᒙ㸧ࡲ࡛♧ࡉࢀ࡚࠸ࡿࡀࠊ ࡑࢀࡒࢀࡢࣂ࣮ࡢ㛗ࡉࡣ 2×2 ༢⥙ෆࡢཎᏊᩘࢆ♧ࡋࠊ Ḟ㝗ࡀ࡞ࡅࢀࡤ㸲ಶ࡞ࡿࠋ Fig. 4(a)ࡣึᮇ᮲௳ࡋ࡚
⾲㠃㔜ᒙෆࡢ㛫㝸ࡀ d=0.85 ύࡢ⌮⾲㠃ᵓ㐀࡛࠶ࡿࠋ ࡇࡢḞ㝗ࡢ࡞࠸⾲㠃ࡢ᭱㐺ᵓ㐀ࢆ➨୍ཎ⌮ィ⟬ࡽ
ᑟ࠸ࡓࡶࡢࡀ Fig. 4(b) ࡛࠶ࡿࠋ Fig. 4(b) ࡣึᮇ≧ែࡢ
Fig. 4(a)ࢇኚ࡞ࡃ d=0.82ύ࡞ࡗࡓࠋࡇࡇ
࡛ᅗ୰ࡢグྕ A 㹼 D ࡣ 2×2 ༢⥙ෆࡢ 4 ࡘࡢྛ In ཎᏊ
ࢆᣦࡋࠊグྕ E㹼H ࡣ➨ 2 ᒙࡢ㸲ࡘࡢྛ P ཎᏊࢆᣦࡍࠋ
ࡇࢁࡀࠊ Fig. 4(a) ࡢ᭱⾲㠃ࡢ In ཎᏊࢆ 2×2 ༢⥙
ࡘࡁ 1 ಶᢤࡁྲྀࡗࡓ㸦グྕ A ࡛♧ࡉࢀࡿ In ཎᏊࢆྲྀࡾ
㝖࠸ࡓ㸧Ḟ㝗⾲㠃ࢆึᮇ᮲௳ࡋ࡚᭱㐺ᵓ㐀ࢆồࡵࡿ
ࠊFig. 4(c)♧ࡉࢀࡿࡼ࠺ d=0.10ύࡢࡁ࡞ᅽ⦰⦆
ࡀ⏕ࡌࡿࡇࡀࢃࡿࠋཝᐦࡣグྕ H ࡛♧ࡉࢀࡿ
P ཎᏊࡣࡢ 3 ࡘࡢ P ཎᏊࡼࡾࡶᴟഹୗࡀࡿࡀࠊࡇࡇ
࡛ࡣࡓࡿ⾲㠃㔜ᒙෆࡢ㛫㝸ὀ┠ࡍࡿࠋࡇࡢሙྜ
ࡢ In ࡢḞ㝗ྜࡣ 25㸣┦ᙜࡍࡿࠋ
ྠᵝ⾲㠃➨ 2 ᒙࡢグྕ F ࡛♧ࡉࢀࡿ P ཎᏊࢆ 2×2 ༢⥙ࡘࡁ 1 ಶᢤࡁྲྀࡗࡓḞ㝗⾲㠃ࠊࡍ࡞ࢃࡕ P ࡢ Ḟ㝗ྜ 25 㸣ࢆึᮇ᮲௳ࡋ࡚᭱㐺ᵓ㐀ࢆồࡵࡿࠊ
Fig. 4(d)♧ࡍࡼ࠺ d=0.25ύ࡞ࡾࠊࡸࡣࡾ P Ḟ㝗ࡢ
ሙྜࡶࡓࡿ⾲㠃㔜ᒙࡣࡁࡃᅽ⦰⦆ࡉࢀࡿࡇ
ࡀࢃࡿࠋ
ࡇࡢࡼ࠺Ḟ㝗ࢆᐃࡍࡿᚲࡎࡓࡿ⾲㠃㔜ᒙ ࡢ㛫㝸ࡣᅽ⦰⦆ࡍࡿࡇࡀ࢚ࢿࣝࢠ࣮ィ⟬ࡽᚓࡽ
ࢀࡓࠋࡇࡇ࡛ࡣ♧ࡋ࡚࠸࡞࠸ࡀࠊࡇࡢࡼ࠺࡞ᅽ⦰⦆
ࡀ⏕ࡌࡿഴྥࡣ 2×2 ༢⥙ෆ 3 ಶࡢḞ㝗ཎᏊࢆᐃ ࡋ࡚ࡶ㸦Ḟ㝗ྜ 75 㸣㸧ྠᵝ⏕ࡌࠊࡲࡓ 3×3 ༢⥙
ෆ 1ಶࡢḞ㝗ཎᏊࢆᐃࡋࡓሙྜ 㸦Ḟ㝗ྜ⣙ 10㸣㸧
ࡶྠᵝ࡞ᅽ⦰⦆ࡀ⏕ࡌࡿࡇࡀࢃࡗࡓࠋ
௨ୖࡢࡇࡽࠊ RHEED ࣟࢵ࢟ࣥࢢ᭤⥺ࡢゎᯒࡽ
ᚓࡽࢀࡓᅽ⦰⦆ࡀ➨୍ཎ⌮ィ⟬ࡽࡶࡰྠᵝᨭ ᣢࡉࢀࡿࡇࡀࢃࡗࡓࠋࡇࢀࡣࣟࢵ࢟ࣥࢢ᭤⥺ࡢゎ ᯒࡢಙ㢗ᛶࢆࡅࡿࡶࡢ࡛࠶ࡿࠋ㏫ࠊᅽ⦰⦆ࡀ Ꮡᅾࡍࡿࡇࡣ⾲㠃Ḟ㝗ࡀᏑᅾࡍࡿࡇࢆពࡍࡿࡓ
ࡵࠊ Fig. 3 ♧ࡍィ⟬ࣟࢵ࢟ࣥࢢ᭤⥺ࡣ᭦Ḟ㝗ྜ
ࡶ⪃៖ࡋࡓゎᯒࢆࡍࡁ࡛࠶ࡿࠋࡇࢀࡘ࠸࡚ࡣ 4.3 ⠇
࡛㏙ࡿࠋ
Ḟ㝗ྜࢆ⪃៖ࡋࡓᵓ㐀ゎᯒ
➨୍ཎ⌮ィ⟬ࡽᚓࡽࢀࡓᅽ⦰⦆ࡢ್ࠊࡍ࡞ࢃࡕ In Ḟ㝗ࡢሙྜࡢ d=0.10 ύ㸦 Fig. 4(c) 㸧ᡈ࠸ࡣ P Ḟ㝗ࡢሙ
ྜࡢ d=0.25ύ㸦Fig. 4(d)㸧ࢆ⏝࠸ࠊḞ㝗ྜࢆ࠸ࢁ࠸ࢁ
ኚ࠼࡚ࣟࢵ࢟ࣥࢢ᭤⥺ࢆィ⟬ࡋࡓࡇࢁࠊ In Ḟ㝗ཬࡧ P Ḟ㝗࠸ࡎࢀࡢ⾲㠃࠾࠸࡚ࡶ ሾͳͳʹതሿ ධᑕࡢィ⟬ࣟࢵ࢟
ࣥࢢ᭤⥺⌧ࢀࡓࢲࣈࣝࣆ࣮ࢡ㸦 Fig. 3(a) ࡢ d=0.25 ύ࡛
ࡢどᑕゅ ʹǤͷ
ι㏆ࡢࣆ࣮ࢡ㸧ࡀᐇ㦂⤖ᯝࡢࡼ࠺࡞ࢩࣥࢢ
ࣝࣆ࣮ࢡኚࡍࡿࡇࡀࢃࡗࡓࠋᐇ㦂ࣟࢵ࢟ࣥࢢ
᭤⥺ࢆ᭱ࡶࡼࡃ⌧ࡍࡿḞ㝗ྜࢆ᥈⣴ࡋࡓࡇࢁࠊ In Ḟ㝗⾲㠃࡛ࡣࡑࡢḞ㝗ྜࢆ 30 㸣ࠊ P Ḟ㝗⾲㠃࡛ࡣ ࡑࡢḞ㝗ྜࢆ 50㸣ࡋࡓሙྜ࡛࠶ࡾࠊࡑࢀࡒࢀࡢ⤖
ᯝࢆ Fig. 5 Fig. 6 ♧ࡍࠋ࠸ࡎࢀࡢཎᏊḞ㝗ࡶᐇ㦂⤖
ᯝࢆኚࡼࡃ⌧ࡍࡿࡇࡀࢃࡗࡓࠋࡇࡇ࡛ࠊḞ㝗 ཎᏊࡀᏑᅾࡍࢀࡤࡑࡢ࿘ࡾࡢཎᏊࡶᙜ↛࡞ࡀࡽ㠃ෆ⦆
ࢆཷࡅࡿࠋࡋࡋ࡞ࡀࡽࠊᐇ㦂 RHEED ᅗᙧࡀ(1×1) ᵓ㐀࡛࠶ࡿࡇࢆ⪃࠼ࢀࡤࠊ⾲㠃ᏑᅾࡍࡿḞ㝗ࡣࣛ
ࣥࢲ࣒Ꮡᅾࡋࠊࡑࡢ࿘ࡾࡢ㠃ෆཎᏊኚࡣᖹᆒࡉ
ࢀ࡚㠃ෆኚࡀ࡞࠸ࡶࡢᐃ࡛ࡁࡿࠋࡑࡢࡓࡵࠊ㠃 )LJDLVGHSWKSRVLWLRQRIVXUIDFHWKUHHELOD\HUVIRU
EXON WUXQFDWHG VXUIDFH E F DQG G DUH HQHUJ\
PLQLPL]HGVXUIDFHVWUXFWXUHVIRUEXONWHUPLQDWHG,Q UHPRYHGDQG3UHPRYHGVXUIDFHVLQ[XQLWUHVSHFWLYHO\
ZKLFKDUHFDOFXODWHGE\ILUVWSULQFLSOHVFDOFXODWLRQ
ෆཎᏊኚ࡞ࡋࡢィ⟬ࣟࢵ࢟ࣥࢢ᭤⥺ࡀᐇ㦂⤖ᯝࢆࡼ
ࡃ⌧࡛ࡁࡓࡶࡢ⪃࠼ࡽࢀࡿࠋṧᛕ࡞ࡀࡽࠊࡇࡢࣟ
ࢵ࢟ࣥࢢ᭤⥺ࡢゎᯒࡽࡔࡅ࡛ In Ḟ㝗 P Ḟ㝗ࡢࡕ
ࡽࡢḞ㝗ࡀᐇ㝿ࡢ⾲㠃ᵓ㐀࡞ࡢ㆑ูࡣᅔ㞴࡛࠶ࡿࠋ
ࡢϪ - Ϭ᪘ྜ≀༙ᑟయࡢ (111)A ⾲㠃⌧ࢀࡿ
(2×2)ᵓᡂ⾲㠃࡛ࡣ 2×2 ༢⥙࠶ࡓࡾࠊ1 ಶࡢϪ᪘ཎ
Ꮚࡀ࿘ᮇⓗḞዴࡍࡿࡇࡼࡾ࢚ࣞࢡࢺࣟࣥ࢝࢘ࣥ
ࢸࣥࢢ๎
7)ࢆ‶ࡓࡋࠊᏳᐃࡍࡿࡇࡀ᪤ሗ࿌ࡉࢀ
࡚࠸ࡿ
1-6)ࠋࡑࡢࡼ࠺࡞ព࡛ InP(111)A ࠾࠸࡚ࡶ In ཎᏊࡢḞ㝗ࢆᐃࡍࡿࡇࡀ⾲㠃ࡢᏳᐃࢆࡶࡓࡽࡍ
ࡶࡢ⪃࠼ࡽࢀࡿࠋࡲࡓࠊ Fig. 5 ࡢィ⟬ࣟࢵ࢟ࣥࢢ᭤⥺
ࡣ In ࡢḞ㝗ྜࢆ 30㸣ᐃࡋࡓࡶࡢ࡛࠶ࡾࠊୖ㏙ࡢ
ࡢϪ - Ϭ᪘ྜ≀༙ᑟయࡢ (111)A-(2×2) ⾲㠃⌧ࢀࡿ
25㸣ࡢḞ㝗ྜ㏆࠸್࡞ࡗ࡚࠸ࡿࠋ
ᮏ◊✲࡛ࡣప ࢽ࣮࡛ࣝ⌧ࢀࡿ (1×1) ⾲㠃ᵓ㐀ࢆゎ
ᯒࡋࡓࠋప ࡛࠶ࡿࡀᨾḞ㝗ࡀ 2 ಸ࿘ᮇ࡛つ๎ⓗ
㓄ิࡍࡿࡢᚲせ࡞⇕࢚ࢿࣝࢠ࣮ࡀ༑ศ࡞᮲௳࡛࠶
ࡗࡓࡓࡵࠊḞ㝗ࡀࣛࣥࢲ࣒㓄⨨ࡋࡓ(1×1)⾲㠃ࡢᙧ ᡂ␃ࡲࡗࡓࡼ࠺⪃࠼ࡽࢀࡿࠋࡋࡋ࡞ࡀࡽࠊࢽ
࣮ࣝ ᗘࢆୖࡆࢀࡤ In ࢻࣟࢵࣉࣞࢵࢺࡢᙧᡂࢆಁ㐍ࡉ ࡏࠊ⾲㠃ࡢᖹᆠᛶࡸ⤌ᡂࢆኚࡉࡏࡿ༴㝤ᛶࢆక࠺ࠋ ᮏ◊✲࡛᥇⏝ࡋࡓ Ar ࢫࣃࢵࢱࣜࣥࢢప ࢽ࣮ࣝ
ἲ࡛ᚓࡓ⾲㠃ࡣࠊ Li ࡽࡢ MOVPE ࢆ⏝࠸ࡓᡂ㛗⾲㠃
ࡣΎί⾲㠃ࡢసᡂ᪉ἲࡀ␗࡞ࡿࡓࡵࠊྠ୍⾲㠃ᵓ㐀ࢆ
ྲྀࡽ࡞࠸ྍ⬟ᛶࡀ࠶ࡿࠋ Li ࡽࡢሗ࿌࡛ࡣప ࢽ࣮ࣝ
࡛ࡣ P ཎᏊࡢ୕㔞యࡀ྾╔ࡋࡓ(ξ͵×ξ͵)⾲㠃ࡢฟ⌧ࡀ ሗ࿌ࡉࢀ࡚࠸ࡿ
8)ࡀࠊࡇࡢᵓ㐀ࡘ࠸࡚ࡶᚋࡢ᳨ウㄢ 㢟࡛࠶ࡿࠋ
㸬ࡲࡵ
ᡃࠎࡣ InP(111)A-(1×1) ⾲㠃ᵓ㐀ࢆ RHEED ࣟࢵ࢟ࣥ
ࢢ᭤⥺➨୍ཎ⌮ィ⟬ࡽゎᯒࡋࡓࠋ RHEED ࣟࢵ࢟ࣥ
ࢢ᭤⥺ࡢゎᯒࡽ⾲㠃㔜ᒙෆࡢ㛫㝸ࡣ 0.85 ύࡽ
0.25ύ௨ୗ 0.6ύ௨ୖࡢᅽ⦰⦆ࡀᏑᅾࡍࡿࡇࢆ
♧ࡋࡓࠋ
୍᪉ࠊ➨୍ཎ⌮ィ⟬ࡽ⾲㠃Ḟ㝗ࡢᏑᅾࡀ⾲㠃➨ 1
㔜ᒙࡢᅽ⦰⦆ࢆᘬࡁ㉳ࡇࡍࡇࡀ♧ࡉࢀࠊࡇࡢᅽ
⦰⦆ࡢ್ࡣࣟࢵ࢟ࣥࢢ᭤⥺ࡢゎᯒࡽᚓࡽࢀࡓ್
ࡰྠ⛬ᗘ࡛࠶ࡿࡇࡀࢃࡗࡓࠋࣟࢵ࢟ࣥࢢ᭤⥺ࡢ ゎᯒ࠾࠸࡚ࠊ In Ḟ㝗ࡢሙྜࡣ d=0.1ύࠊḞ㝗ྜ 30㸣
ࢆࠊ P Ḟ㝗ࡢሙྜࡣ d=0.25 ύࠊḞ㝗ྜ 50 㸣ࢆᐃࡋ ࡓሙྜࠊᐇ㦂⤖ᯝࢆࡼࡃ⌧࡛ࡁࡿࡇࡽࡇࡢࡼ࠺
࡞Ḟ㝗ཎᏊࡀ⾲㠃ࣛࣥࢲ࣒Ꮡᅾࡍࡿࡇࡀ᫂ࡽ
࡞ࡗࡓࠋࡋࡋ࡞ࡀࡽ In Ḟ㝗 P Ḟ㝗ࢆ㆑ูࡍࡿ
ࡇࡣ࡛ࡁ࡞ࡗࡓࠋ
ࡢከࡃࡢϪ-Ϭ᪘ྜ≀༙ᑟయࡢ(111)A-(2×2)⾲㠃
࡛ࡣϪ᪘ཎᏊࡢḞ㝗ࡀᏑᅾࡋࠊᅽ⦰⦆ࡉࢀ࡚࠸ࡿࡇ
ࡀሗ࿌ࡉࢀ࡚࠸ࡿ
1-6)ࠋྠᵝ InP(111)A-(2×2)⾲㠃
࠾࠸࡚ࡶϪ᪘ཎᏊࡢ In ࡢḞ㝗ࡀ࢚ࣞࢡࢺࣟࣥ࢝࢘ࣥࢸ
ࣥࢢ๎ࢆ‶ࡓࡍࡇ࡛⾲㠃ࡢᏳᐃࡀゎ㔘࡛ࡁࡿࠋ ࡑࡇ࡛ࠊᮏ◊✲࡛ᑐ㇟ࡋࡓ InP(111)A-(1×1) ⾲㠃࠾
࠸࡚ࡶࠊP ཎᏊ࡛ࡣ࡞ࡃ In ཎᏊࡀ 30㸣⛬ᗘࣛࣥࢲ࣒
Ḟዴࡋࠊྠ⾲㠃㔜ᒙࡢᅽ⦰⦆ࢆకࡗ࡚࠸ࡿࡶ
ࡢ⪃࠼ࡽࢀࡿࠋࡇࡇ࡛ࡣ♧ࡋ࡚࠸࡞࠸ࡀࠊ⾲㠃Ύί
๓Ύίᚋ࡛ In ࡢ࣮࢜ࢪ࢙㟁Ꮚᙉᗘࡀ P ẚ࡚
┦ᑐⓗῶᑡࡍࡿࡇࡽࡶ♧၀ࡉࢀࡿࠋ
ࡋࡋ࡞ࡀࡽࠊ 500 Υ⛬ᗘࡢẚ㍑ⓗ㧗࠸ ᗘ࡛ࢽ࣮
ࣝࢆࡍࠊ P ཎᏊࡢ⬺㞳ࡼࡾ┦ᑐⓗ⾲㠃㏆ഐࡣ In
ࣜࢵࢳ࡞ࡾࠊ In ࢻࣟࢵࣉࣞࢵࢺࡀᙧᡂࡉࢀࡿ࠸࠺
ᐇࢆ⪃࠼ࡿࠊ P Ḟ㝗ࡀ⾲㠃Ꮡᅾࡋ࡚ࡶᛮ㆟࡛ࡣ
࡞࠸ࠋࡇࡢⅬࡘ࠸࡚ࡣᚋࡢㄢ㢟࡛࠶ࡿࡀࠊ࠸ࡎࢀ
࠾࠸࡚ࡶ⾲㠃㔜ᒙࡢᅽ⦰⦆ࡢᏑᅾࡣ STM ほᐹࡔ ࡅ࡛ࡣศᯒᅔ㞴࡛࠶ࡿࡀࠊᮏศᯒᡭἲࡼࡾึࡵ࡚ࡑ
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