』 こ 80
11: : 「
885 890 895 910 915
915 920 925 930 935 940 945
垣ギ
940 045 950 955 960 965 970 975 1 5
1 0 5 0 20 15 10 5 0
970 975 980 985 990 - 995 1000 1005 Wavelength (A!
Fig. 3.1-5 VUV spectra from neon discharges.
Ｎ卜ｏ．
■受●¨＞●２ ゆせ卜．
Ｎゆ呻ＸＮ一ンＯＺ ０重一．
ｒｎ専ＸＮン●Ｚ
∞︶．ゆ０∞＞● ゛ＮＮい０せＸＮン●Ｚ ︵︶ＮＯ・
００■
．
００∞．
００呻
．
Ｎ∞．
００■
．トト．００寸︶ＸＮ＞¨０
︵●●．Ｔせ
．Ｎ．ｒ望こＸＮンｏ２ ００︒
Ｎ∞呻ＸＮ＞０
︸せ．０▼＾Ｎ＞０ ●︶．
∞璧▼＾Ｎ一●Ｚ 注ｏ
＾Ｘじ．
トトい¨０ ︹３．ｏ零３．８︐Ｎ
．一面Ｉ←賛Ｎ一ＯＺ ｏ゛．
娘冒鷲Ｎ●２ 卜∞．
∞︹喜愛Ｎ¨ｏ い０．
︐０一翼劇一●Ｚ
‐ 59‐
せ︶０．卜００゛一＞０ ヽい．ＴＯｒ¨＞０
∝Ｎ卜．哺斜Ｏｒａトョ
●．
●︶●ｒ¨＞０
︶︒め西０゛一＞●２ ︵ＯＮ中∝ゆ
ぃ
︐■卜．中にい︶ＸＮ＞¨０２
■︐０．卜０〇一¨＞０ 一Ｎび．中Ｏｏ︐一＞０
一ＯＦＥＯ崎Ｎヽ０５００
ｏ 一︶︶ゝ００︺¨ ｒＯ．
一一ふＸＮ≧覇
卜●． Ｎ寸じＸＮ＞¨ＯＺ 卜Ｎ︺．
ふＩＮ＞３Ｚ
︒
２ ０
１ ５
︲ ０５¨０４３２１０
５ ︒
1005 1010 1015 1020 1025
1050 1055
1065 1070 1075 1080 1035 1090 1095
1125 1130 tJfj"",;tlJln
,utfnu 1150
Fig. 3.1-6 VW spectra from neon discharges.
1155
Ｎ００︒
Ｎ●ゆＸＮン●Ｚ Ｏ． ＮＯ哺ＸＮ中＞● Ｘド．
ＨＩＮ＞豊 ぬＨ．
Ｔ一●ＸＮ＞●２ 卜一︺．
０呻ゆＸ∝＞●
︵︶●．一ゆゆ％Ｎ＞●２
．００．市崎ＸＮ¨＞ＯＺ︸ おＮ．一０ゆｘＮ＞一〇 せｒｍ︒一ⅨおＸＮ＞¨０ ゆ卜●．■ⅨＩＮ＞¨０
０００．
ゆ一ＸＮ＞一〇
1095 1100 1105 1110 1115 1120 1125
一あ． Ｎ卜りＸＮ＞ＯＺ
︺Ｆ． Ｎ卜●ＸＮ＞０
⌒∞．
００疇
パ盗６︸ｘＮ＞ｏ２ Ｎ■．∞０面糞Ｎ＞０ ＯＮｎ︒一Ｘ︶ゆＸＮ＞●２
⌒Ｎ︵盟ｗ︐Ｎ●ＯＸＮ＞●２ 雨卜．
ＦＯわＸＮゝｂ
卜ｒ一面ＸＮ卜●Ｚ
‐ 60‐
4 3 2 1 0 20 15 10 5 0
1155 1160 1165 1170 1175 1180 1185
1185 1190 1195 1200 1205 1210 . 1215
1215 1220 1225 1230 1235 1240 1245
︵ｏＥｏ崎Ｎヽｏ︺Ｅョ００
ｏ Ｏ一︶︑だＯＥ●一一
8 6 4 2 0 4 3 2 1
Ol― W ― r
1240 1245 1250 1255 1260 1265 1270 1275 4
3 2 1 0
2260 2265 2230 2285 2290 2295
ぃ●００．せ卜一中︶一〇
●卜．ゆ∞ＯＸＮ一′ヽ ︷０卜一．
一卜︶゛
．
卜∞０．
ゆ卜゛ｒ
．
中゛卜．
ｎ卜゛︸
言Ｘ沼︺．
一トロ︶
ぃ
０●∝．
一卜︶︶ ︵Ｎ卜一．哺︶Ｎ︶
．
Ｎ︹０．●゛Ｎ゛︶８ゝＪ 崚劇．０〇一受●一＞●Ｚ
●０．︶０一翼一＞●Ｚ
寸一． Ｔ〇一質０¨しＺ Ｎ∞． ０００■０¨＞●Ｚ
︵ＮＯ卜●．ゆ゛Ｎ︶
．Ｎ∞●●．ゆ︺Ｎｒ︸鸞こ︹Ｊ Ｒ．撃︐ｏ≧ｚ ０００．︶Ｎ呻ＸＯ＞一ｏＺ
卜．ＯＮＯＸＮ＞０
０∞．０卜ＮＮ＞０ 整一．
Ｎ卜ＯＸモ＞●Ｚ ＯＮゆ．
一あわＸ曽＞０２ ●卜．●０ゆ×せ＞●
Ｎ一．﹂にＮ＞０
ヽ馬ＦＥＮＮ＞０ Ｎせ︒ 一一ＯＸ呻＞●２
Wavelength (A)
Fig.3.1-7 VUV spectra from neon discharges.
‐ 61‐
1 5 1 0 5 0 100
80 60 4A 2A
E o
tr() R 3 0 D 2+,
5 z a 8 r s
o
3 r o
+,' 6 0
6 4 E 4 0
30 20 1 0 0 1 4 1 2 1 0 8 6 4 2 0
Wavelength (A)
Fig. 3.2-1 VW spectra from argon discharges.
︵∞︶．重高 ︲
．一０．島あ︺＞︼０
∞０卜．
００め一＞ＸＯＬ
′
″ア
００．０ゆ＞●Ｚ
素 調 虫
︵一●．卜い０＞ｏ２ 嗜ｒ．
０∞ｏ一＞Ｘ﹄く ｒａ．
∞＞一●２
゛せ︶︒
﹂●＞一ＯＺ
∞ＮＯＮ．一一ハ﹀
︶０． ０卜０一０
355 360 365 370 375 380 385 390
せ一．゛●■¨＞● ＯＮ．
００■¨＞●
′′
０．
゛●せ¨＞●
︶・漱あご●．菫じ≧０ ●．
０００¨＞０２ せ一．
０崚０中＞Ｘ﹄く
∞ＦＮ．
●０＞一ＯＺ
︶寸． 卜●０＞τ
∞さ雨．
一∞００
︶０． ０卜０一●Ｚ
375 380 385 390 395 400 405 ０■．０曽せ＞く ｏ一あ．
●．コミくく１⁚Ｉ 卜００．
０一導こＣく
ぃ哺劇ゆ．０゛せ︺＞¨０ ︵呻ロト．０︐寸 ｒｏ．
一員寸＞Ｘ﹄く
415 420 425 430 435 440 445 450
００．り∞せ
︷﹁０事一〇０何¨ＯＥＤＶく
Ｊお．ｏ卜で５﹄く
︹卜・●卜せ
︒露●．ｎ導≧く
︷め卜一．ＮＯせ
ごい０一．ＮＯ■︶＞く ●ＮＮ．
一●せ︼＞ｏ ００．０卜せ一電嘔く ゆゆぶｏ寸＞く
460 465 470 475 480 435 490 495
８．ｏ等
︵﹁里ｏｏｃ¨ｏコ▼く ． 曾８．零
．０中０．一０でヽ■０■．一●●
．せ０一．一０マ．一■一．一０で︶︶ ︵∞●・卜●０．００．卜●ゆ︶υ
市鴇．
８ ８¨需鶏黎
・ ａ
編 露 ¨¨ ｍ ヽ
せヽｏ●≡﹄く′
ブレ
０ゆ．
ゆ０せ＞く
485 490 495 500 505 510 515 520
‐ 62‐
卜．一尋り電嘔く
︵０銀゛．
一製ゆ
ぃ
卜∞せｒ︐
∞哺
ざ●∞Ｏ．螢お︸０ 卜ＯＮ．
一〇ｎ︻ゝ¨
一一． 卜Ｎりヽ電く
０■ｏＮＯ≡≫ぃく ｏ︺．一Ｎ面ヽ三く 笠マ．Ｏｒ●電嘔く
︵卜∝・●︶嗜ぃ重Ｎ．∞︺一︶ ２ ︒ １ ５ ︲ ０ ５ ０ ２ ５
２ ０
１ ５
︲ ０５０ ６ ０
５ ︒
４ ︒
３ ０
２ ０
１ ０︒ ７ ０
６ ︒
５ ０
４ ０
３ ０
２ ０００ ４２０８６４２０ 一１ １１１
︵ｏＥｏ崎Ｎヽｏ一ｃコ００
ｏ Ｏｒ︶︑だｏＥＯ︺Ｃ¨ ００・一〇０一をく︑
ｏＦ．一あゆ電嘔く 卜．０∞ｎ電だく ＮＯ．轟ゆ嘔く ０卜．ｎじ＞﹄く
︸∞Ｎ．■卜ゆ０ ＯＮ∞．
●一●＞一〇
●■雙︶＞¨０
００略︐００ゆ¨ハ︶ Ｏｏ．綸高面¨＞﹄く ０甲． 一●一電嘔く 鍵．螢郡︻≧ ＮＯ．
∞∞ｏ電Ｃく リト． 一ゆ一電任く
510 515
580 590
610 615
616 620 625 630 635 640 645
Wav el eng t h( A)
Fi g。3. 2. 2 VUV s pec t r a■ om ar gon di s c har ges .
∞ヽ印Ｄ＞﹄く 世り．●一一てく
・碗課野確 ︒ん
●０．一り＞¨０︑︑
卜． 一哺一︼ヽ■ごヽ
︶０．
コ町電てく
卜．一尋哺電くく
︵●銀︶∞り
ぃ
卜∞呻゛∞Ｏｎ
ぃ●．∞ゆ︶一〇 卜●Ｎ．
●０り¨＞Ｌ一 ●︺ｏｏ．２３一一Ｘ﹄く
卜．一喜●ヽてく
ｒこ
︵斜．量をくだ︒３●
一卜ヽ卜一一ぶ■ヽ一≡Ｃく
ゆ．Ｄ∞●＞﹄く ＯＮ．一Ｈ●一電てく
００． ６３●ヽ三く め卜．︹雨●＞０
︵哺寸．Ｎｒ
．Ｎせ︒Ｎ一︸ＸＮ＞一〇 一３． 一Ｆ一︵一●霊轟３■コτく ３・撃゛︵Ｆ覇８■３τ
‐ 63‐
０●．一卜０︵つｏ一ｏｏＣ一ｏＤ︶Ｌｑ
︵０一め．Ｔｎ一．０■一．︶一一 ぃで一め．すい０ぃ００Ｎ．一い０ ぃで０．ｒｎＯ．Ｔ︶．一ｎ一︶
︵ｒ︸０●．ｏ■９¨¨Ｘ﹄く 卜一． 重Ｘ二電Ｃく
ｒ． 中で０ ３．琶蔓く百．吾
︵卜ヽ卜一０．
一●．
卜一一電嘔く
０︶．一りヽ三く
650 655 660 665 670
635 640
８ ︒
６ ０
４ ０
２ ００
２ ５
２ ０
１ ５
︲ ０５０
３ ０
２ ５
２ ０
１ ５０５０２０８６４２０
３ ０
２ ５
２ ︒
１ ５
︲ ０５０
︵ｏＥｏ哺Ｎヽｏ一Ｅ一〇Ｏ
ｏ Ｏｒ︶ゝ００一Ｅ一
685 690 695
710 715 720
Wavelength (A)
Fig.3.2-3 VW spectra from argon discharges.
665 670 675
一哺一．０︐卜ざ一．一Ｔ卜︺﹂こく Ｎ゛．０︐卜電く
●Ｎ︒
︵３卜＞﹄く ＮＯ． ０一ＸＮ¨＞Ｘ﹄く
ゆ０．ゆ０卜＞﹄く
り一ヽ﹁．
●●卜電てく
︶●．０∞０＞く
お湯・卜 Ｌ続識ユ
690 695 700
ゴ ト ・ ・ 菱 多 税
ｍＮ． ｏ９＞く
︹卜寸Ｆ．トト●
ごう０．トト●︸ ００．０卜０︵■聖０●ｇｏＣＤＹく
Ｎｒ．
●ト ︵い０．０︐卜．一一．一▼卜︸ 一Ｎりじ・一゛卜ご●■一Ｔ卜︺０ ▼︶じ
哺Ｎ卜ヽてく
710 715 720 725 730 735 740 745
ｏｏ■９瞳Ｆ≡＞●
ドｒご轟め¨
゛一ｏ． 一う０︶●Ｎ＞３ 雙一． 卜●卜一＞﹄く
∞せ︶．
い０卜＞¨
一６３．劇一トン０
萎 ７
卜●．
●卜＞０
００．
一●卜電嘔く
735 740 745 750 755 760 765 770
Ⅱ 64‐
︵０゛︒︵Ｘド．Ｏｒ．＾覇卜︶＞一〇 Ｏｒ卜．
卜卜﹂ごＶ
ヽ．８卜≡むｚ
せ︶． ０︹高ＸＮ¨＞Ｘ﹄く ００寸．
０トト一＞ＯＺ
︵せ卜︐．一島一一ヽｒ一０．一ュ一０︶一ヽ０︶
∞せｒ．
ｎ●卜＞一
０００．
ＮＯ卜＞０
ブレ
︹麗い．ＴＯトン０ ４ ０ ３ ０ ２ ０ １ ０ ０ ２ ５
２ ０
１ ５５０ ・ ０８６４２０ ４２０８６４２０ ０８６４２０
ＴＥＯＲヽｏョｏｏ
ｏ ９︶ぉ¨ｏ一ｏ
810 815 320 825 830 835
765 770 775 780 785 790
785 790 795 800 805 810 815 820
840 845
835 840 845 850 855 860
Wa v e : e ng t h( A)
F i g .3 。2 ‐4 V UV s p e c tta to m a r g o n d i s c h a r g e s .
疇．
卜一尋箕αヽ■く
０賛ｏ︒
●■せ愛Ｎ≧く
卜００．
り重▼員ヽＣく
●∞卜．
●０¨ｔ″﹂
０せ︒
﹂●く
●せぶ二賽∝
●︶一．
０∞∞
劇り．
０﹄く
︶∞卜．
∞卜∞
●． ｎ卜∞¨しく ヽ一．一一一Ｉ●ヽＣく ００︶︒ロト∞く
860 865 870 875 880 885 800 895
︵一一一．００．一Φ●．一●一 り０ぃ ０卜●．一●０ぃ
●００メＸ望ｗ
Ｊｏｏ．資一ご一０・
曾翠じ０
００．ＴＯ∞＞く
︵０︐︒︵轟卜．●゛．０こ卜︶＞一〇
●︐卜．卜卜＞一〇 でや卜．
０︶寸ＸＮ＞一〇
Ｎむ︒●む贅Ｎ＞一〇
︵０斜・０∞．●０●．一∞︸
︷Ｎ守卜．一餃ごＮ■Ｎ¨０
Ｎめ●．●．Ｎ一卜．Ｎ∞り︶
︷０一・卜Ｎ．Ｎゆ●．ヽＮ︶ヽ■どヽ
︸Ｏｒ．
ＮＮゝ任く ︹あ腑︐
︵覇∞＞く
一０．一Ｎ喜颯Ｎ＞Ｘ﹄く い０卜．望あ＞くｌ
濃 霧 梁 ／
ＯＮ●．０︶一翼Ｎ＞一〇
・ 65‐
︵０一一．一０■．゛０．０一■
ぼ０●． 一一マ︶●Ｎ０
∞マロ
トＤせＸＮ電電く
︵︸０一■．
せ００． 一一■゛ご昌二︸
．
０す０３０●．
一ハＮＯ．０９３０ ０り０．
Ω受Ｎヽ三く ｏ一．
卜重徴ヽてく
螢葛．
一重烹Ｎ＞﹄く 卜０一．
Ｄヽ磯Ｎヽ三く ０卜．
００〇一♂Ｌ
Ｏ■． 卜∞∞﹄く
●せ︒
●Ｖ一Ｎ＞電く
８ ８ ５ 蜘 颯 鮒
６ ０５ ︒４ ︒３ ︒２ ０
１ ００ １ ６
︲ ４
・ ２
・ ０８６４２０ ・ ０８６４２０ ０ ０５ ０
０ ０
５ ︒
０ ０
５ ００ ３ ０ ２ ０ １ ０ ０
３２２１１
︵ｏＥＯ崎Ｎヽｏ一Ｅコ００
ｏ ＯＴ︸︑まりＥｏ一
91o 915
985 990 995 v↓
: : t l ei l l 『 ( A) 1011 1015 102,
Fi g。3。2‐ 5 VUV s pec t r a hm ar gon di s c har ges 。 910
935
ＯＮＯ．
トト０¨０ ００．
●∞寸ＸＮ
︵ワ理●ｏ●一ｏ⊃Ｖくノ′
卜ゆ．Ｎ卜０卜ゝＪヽ■■
960
︶蝋国．
一０せｘＮ一＞０２
︵●卜︺．Ｎりで お轟●０︒Ｎりせ︶ｘＮ＞く
︵０一●．●０せぃ︐ＮＯ．▲ス︶マ ０で．９尊︐Ｖ一０
∞マ．卜里百徴一＞﹄く ︵卜・一卜せ
ごう０．Ｄ卜せ︸Ｎ＞Ъく 呻卜． ０■０の︑Ｊ
︹あい．
０卜一賢ＮヽＣく ︵︐卜．
０︸●ｒ
．
０００．
０︶●︶
．∞０一．螢ス手︶０ 卜●．
︶０一Ｘα＞﹄く ＮＯ■．一うせづＮ●●９ヽ︶Ｎ一〇
︵０卜一．甲００
．
せＤ．Ｆ００︶︼Ｚ
＾冨卜．
め●ｏ一
‐ 66¨
ＮＮ卜．ゆＮ●︶﹂︑Ｊ ＮＯ︒ 卜０●ｒ．
■０︒
０一０︐一買︶
一Ｎい︒一ＯｏＦ一＞０ 呻︐０．卜●●︸¨＞０
︵︶卜一．
●︶０︶
．
０●．
０゛●Ｔ
．∞ゆ．一あわｒ︸０
150 100 50 0 1 120 100 30 60 20 0
1010 1015 1020 1025 1030
1035 1040 1045 1050 1055 1060 1065 1070
1060 1065 1070 1075 1080 1085 1090
1085 1090 1005 1100 1105 1110 1115 1120
⌒ＯＥｏゆＮヽｏ一Ｅ５０ｏ
・ ＯＴ︶ゝＯＥ●一
30 25 20 15 10 5 0 120 100 80 60 4 0 20 0
3 2 1 0
1110 1115 1120 1125 1130 1135 1140 1145
Wav e: engt h( A)
F ig . 3 .2 ‐6 V UV s p e c ta to m a r g o n d is c h a r g e S .
寸゛一．卜００︶一＞０
ＮＯ．卜０●︶ＸＸ高ё︶０ ∝●．
０一■●一＞Ｘ﹄く 卜●Ｎ．●０哺ＸＮ¨ゝＬ一
︵ＯＮ゛．
ゆ
．
卜∞■一．
６り
ぃｒＯ螢０．∞０崎︺ＸＮ一〇 卜．一島鷲Ｎ電てく
卜ＯＮ．
００ゆＸＮ一ゝＥ¨ ＮＯ．
０喘Ｘ︼＞Ｘ﹄く ∞寸．︹璽市Ｎヽ嘔くニ
轟 望 ガ
Ｔ●．ユⅨ薔ｘＮ＞一〇
ゆ卜●．
菫部ｘＮ＞一〇
︵Ｍわ．
ｏゆじｘＮ＞︼０
卜．
ｒ●哺製一ヽ■く
０．
∞寸りＸＮ電Ｃく
め卜．
重ＸＴＮ電Ｃく
ｒ●Ｎ．一●ＤＸＮ＞¨０ ∞●．
∞ゆ哺ＸＮヽ■く
重一．
一哺哺翼Ｎ電嘔く
‐ 67‐
1 6 1 4 1 2 1 0 8 6 4 2 0 2
0
1135 1140 1145 1150 1155 1160 1165 1170
︵ｏＥＯ崎ＮヽｏＥ５００
ｏ ＯＦ︶︑ＯＬｏ︺¨
00 80 60 40 20 0 00 80 60 4 0 2 0 0 4 3 2 1 0
1160 1165 1170 1175 1180 1185 1190 1191
1185 1190 1195 1200 1205 1210 ′ 1215 1220
1210 1215 1220 1225 1230 1235 1240 1245
1245 1250 1255 1260 1265 1270 1275
wav e: engt h( A)
F i g 。3 . 2 口7 V UV s p e c t r a t o m a r g o n d i s c h a r g e s .
呻一．０︹あＩ¨＞Ｘ﹄く ゆ卜．
●一哺涎Ｎ一″︐一
∞中． 菫ＨＹＯ﹂０
０●︒一あＸＯ＞一〇
︺Ｎ︒
モト哺ＸＮ一ハ︶ ＯＮ．
一︹富ＹＯ¨０ め．己わＸＮ一０
．０００．■卜︶≡０
︐卜．●∞ゆＸＮ¨′ヽ せ︶︒
︵ЖあＩＯ¨＞Ｘ﹄く ＾●卜●．
一卜一一
ぃ
卜∞●．
ｎ卜中ｒ
．
︶゛卜．
呻卜︶ｒ
．
●０●．
Ｄ卜︶ｒ
．
００Ｎ．
哺卜︶︶ ．Ｎ∞●一．ゆ︐製゛︶メこ¨Ｊ ６Ｎ∞．
ｏ２ＹＮ＞一〇
０●．
∞００ＸＮ＞一〇
００．
００呻ＸＮ一ゝ■ごヽ ００り．
０００ＸＮ一ハ﹀
●︸．Ⅸ薔ｘＮ電てく 卜゛∞．
一綺ＮｒヽこＺ ｎ３●．
Ｎ世ＮＦ＞Ｚ
ＯＮ∞︒︵ＯＸＮ＞一〇
０■．
０●ＯＸＮ＞¨０
＾Ｎ卜一．
Ｄ︶Ｎ゛
ぃ
Ｎ∞０●．
●︶Ｎ︸一８熱Ｊ ＯＮ︒
せめＯＸＮ＞しく ゆｏ．螢ＸアＮヽＣく
゛０︒一Ｎむ翼＞Ｘ﹄く
ＤＦ一ゆＯＸＮ﹂′３ヽ
●． ０００ＸＮゝ■どヽ
ざせ．Ｎ︐３ｘせ＞一〇 ∞Ｎ．卜？Ｎ≡﹄くノ 卜●．
卜００ＸＮヽ■ど︑
∞卜．ＯＮＯＸＮ＞０
‐ 68…
6 4 2 0
ＴＥｏＲヽｏ讐ョｏｏЪ二ぉ¨ｏｏ一Ｅ ●Ｎ︐
００卜ＸＮヽ′３ヽ ＮＯ．
●りＯＸ寸¨＞Ｘ﹄く ゆ０． 哺０卜ＸＮ≫Ъく ０■Ｒ．００卜ＸＮ電嘔く
２ １ ０ ３２１０８６４２０
２ ５
２ ０
１ ５
︲ ０５０
1275 1280 1285 1290 1295 1300 1305
1310 1315 1320
1335 1340 1345 1350 1355 1360 1365
1360 1365 1370 1375 1380 1385 1390 1395
1390 1395 1400 1405 141A 7415 1r.z0 1/'25 Wavelength (A)
Fig. 3.2-8 VUV spectra from argon discharges.
卜一． 菫ＩＮ一電任く ＯＮ． ０己薫倒¨﹄く
゛∞．︶むＯＸＮく
︷Ｎ一ｒ一●翼Ｎヽ■くュ 雲一．ΣＴＮ¨﹄く︸ 卜■． 卜●●ＸＮ¨′３ヽ 艶劇． 卜ＯｘＮく ゆ●． 卜●●貫Ｎゝ■ど︑
︺●．
一Ｎむ澪０＞Ｘ﹄く ﹂にむ卜．一翠︺０
Ｎ∞哺．
゛あ０一０
ｏせ︒
重Ｗ＞く い０．
●０■ＸＯヽ■ど︑ 覆．∞●ｘＮ＞く
゛０■Ｎｏｏ︺ｍ 卜∞．専愛＞く
ＯＮ．
゛０■Ｘ＞く ０■．０一尋愛＞﹄く Ｄ︐ｏ．
０■冒＾０ヽ■く ｏｏ︐ 壼耳薇ヽ三く 卜●０︒
呻一ｅ髯ヽ■く
﹂Ｅｂ卜．呻００︐０
Ｎめい︒一ュい︶０ 卜一．Ｎ●哺髯０電嘔く
一２３．ＮＯＩ電くく
トロ．
＾ＸＯｘＮく
ｒ●． ０∞ＯＸＮヽしく
∝︶卜■．
卜哺寸ＸＯ一ヽ■ピ︑
︹覆．●一●ｘＮ＞く
︶０モ．
Ｎ一０︐ｍ
‐ 69‐
００．０∞せ糞∞
︵﹁０一一覇●暉¨ＯＣコＹく
Ｆ︶．ｎＮ卜ｘＮ＞﹄く ︶︸．哺Ｎ卜ＸＮ︑Ｃく
︵０■．０卜● ０卜一．０卜︶︸Ｘヽく
︵ゆ一．●一ト ０一．●︐卜︺糞Ｎ﹂′３ヽ Ｎｒ∞．０︺卜ＸＮ電Ｃく
∞０．
０卜せ賢０く
ぶ４刊０ １引可＝﹁４ ︲引﹁０ ︲１
５ ︲
４ ︲︲
３２１０
・ ・２
・ ｏ０
０ ・ ８
０ ・ ６
０ ・４
０ ・ ２０２
︵ｏＥＯ崎Ｎヽｏコ００
ｏ Ｏｒ︸ゝＯＬｏ¨
1430 1440 1445 1 0 1455
1455 1460 1465 1470 1475 1480 1485
1485 1490
1515 1520
1530 1535 1540 1545 1550 1555 1560 1565
Wave: engt h( A)
Fig.3.2-9 VUV spectra from argon discharges.
む員．
０∞卜Ｘ∝一＞０ 寸．ＯｒｎＸ電く せｒ． ０∞糞寸¨＞Ｘ﹄く
詈: ヽ
≧ 8
0 1 ‐
>
0
０●■．
０トトＸＮ¨ン●Ｚ
り０．卜●卜％Ｎくく
０︲
５０５０５０
２２１１ ｏＯ．誂再ｘＮ電嘔く
卜０．゛Ｏｍ％０ヽＣく いぶ．
Ｄｏ一螢＞く 雙一．卜一卜ＸＮ電嘔く
００． 一お卜ｘＮ一＞いく
‐ 70‐
3.2. Identification of Ml lines of Al, Aro Ti and Fe
3.2.1. Introduction
Forbidden lines arising from magnetic dipole (M1) transitions of highly charged ions are interesting in diagnostic applications of magnetically confined fusion plasmas in addition to spectroscopic studies of the atomic struchre. These Ml lines are generated by electron transitions in ns2np* (*: I to 5) ground and nsnp (n:2,3) excited configurations between the fine structure states of highly charged ions. The wavelength of the Ml line is longer than that of an allowed (El) line in the same ionization stage. Some of the forbidden lines in highly charged ions of medium-Z impurities are emitted in the visible reglon. Spatial intensity profile and the Doppler broadening of such forbidden lines can be easily measured with the visible spectroscopy, which does not require any vacuum system and allows the use of optical fibers.
Several Ml transitions of highly charged ions have been studied in laboratory and astronomy plasmas 1371. The first measurement of the Ml transition in a fusion experimental device was made in the Princeton Large Torus tokamak t38]. Since then, many observations of the Ml lines from I\gh-Z elements larger than Z:21have been done in magretically confined plasmas to measure the wavelengths, impurity densities, ion temperatures and radial intensity profiles rnainly in the visible region 137 461. Although the Ml transitions with elements smaller than ZF28 have been also obserued from astronomy plasmas such as solar corona, nebula and several kinds of stars by using satellites in the visible and VUV region l:47-50l,the data quality from them are not quite enough, e.g., for the accurate determination of wavelength. Recently, the studies on the Ml transitions including argon (Z:18) have been extensively done in the Electron Beam Ion Trap (EBIT) t5l-55]. However, the data are rnainly limited to the visible range, because the intensity of
‐ 71‐
Ml lines from the EBIT is very weak and a long exposure time is required to take a good signal to noise ratio.
In the Large Helical Device (LID), to the contrary, argon discharges with high purity have been successfully operated without any instability and the argon emissions have been observed with strong intensities. Many Ml transitions of higNy charged argon ions were fonnd and identified in such argon discharges by analyzrng their Doppler broadening, temporal behavior and spatial intensity distribution [56]. Furthermore, the Ml transitions from metallic elements have been also observed by iqjecting the impurity pellet t571. The study on the Ml transition has bee,lr done not only in the visible region, but also in the VW region using a 3m normal incidence spectrometer, since those lines are very bright. The wavelengths of the argon Ml transitions are accurately determined in the visible and VUV ranges.
h this section, the wavelengths of the Ml transitions carefully determined from aluminurrU argon, titanium and iron spectral lines are presented and compared with previous experimental and theoretical works. Some of lines are newly identified in the present study.
3.2.2. Instrumentation
Vacuum ultraviolet (VW) spectra have been measured by using a space-resolved VW systern, which consists of a 3m normal incidence spectometer with a l200grooves/mm grating, charged-coupled device (CCD) detector (I024xl024pixels, l3pmxl3pm/pixel) and a pat of mirrors for view-angle adjustment [58, 59]. Extreme ultraviolet (EW) spectra have also been measured using a flat-field EUV spectrometer with the CCD detector t60].
Visible spectra have been measured using a 50cm Czerny-Turner type spectrometer (Chromex model 500is) equipped with CCD detector (l024x256pixels, 26ymx26prn/pixel).
Low-resolution l00grooves/mm gratings were selected for monitoring a wider spectral band.
High-resolution visible spectra have bee,n measured using a 1.33m Czerny-Turner tlpe
‐ 72‐
spectrometer equipped with an l8OOgrooves/mm grating and CCD detector t6ll. The visible emission was collected by a focusing lens and transmitted by optical fibers with a core diameter of 100pm. The fibers installed on the diagnostic port were a:raRged vertically for meas,rring vertical distributions of the LHD plasma poloidal cross-soction with a spatial resolution of 50 mm. The end of the fibers at the other side was coupled on the entrance slit of the visible spectrometer.
3。2。3. I dent i r l c at i on of Ml t r ans i t i ons
(a) Arx 2s22p$ (F.tlke) (blArx z*zf(oJlksl
却 ︵ンこ＝ 情 ︐３＝
冨
崎