環境配慮型高機能性薄膜材料の作製

Professor

Dep1. of 'v[echanical Science and Professor of Mechanical Science and Professor

2013:1!'-9

H

20

II

Receiwd:

20

2013

We developed three kinds of functional thin-film materials from an conscious point of view.

(1)

Indium-tin oxide (ITO) films, widely utilized as transparent conductive layers. haw been from the depletion of indium. In order to develop alternative materials, we investigated the changes in the electrical and properties of ITO films the heat treatment conditions and production conditions.

(2)

diamond films were synthesized by using mode-converted microwave plasma CVD with methane and trimethylborate as a reactant and a dopant agent, respectively. The film thickness of 6 pm was obtained at the carrier gas flow rate of

3

seem. The electrical resistivity of the boron-doped diamond films decreased with increase in carrier gas flow rate.

(3)

Indium. nitride OnN) exhibits adsorprion- induced electrochromism, which is feasible for applications to smart windows. We investigated electrochromic durability of the InN films deposited by glancing-angle reactive evaporation, and found that the degradation of the electrochromic property of the lnN films is ascribable to the irrewrsible t ransforrnation of In in1 o indium hycl roxidc.

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