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誘導結合プラズマ発光分析法によるファインセラミック中不純物の分析

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川崎製鉄技報

KAWASAKI STEEL GIHO Vol.21 (1989) No.2

誘導結合プラズマ発光分析法によるファインセラミック中不純物の分析

Determination of Impurities in Fine Ceramics by Inductively Coupled Plasma Atomic Emission Spectrometry

岡 野 輝 雄(Teruo Okano) 藤 本 京 子 (Kyoko Fujimoto) 松 村 泰 治 (Yasuharu Matsumura) 針間矢 宣一(Sen-ichi Harimaya)

要旨 : ファインセラミック中不純物の分析に誘導結合プラズマ発光分析法(ICP 発光分析法)を適 用し,多元素同時定量可能な分析法を確立した。窒化ホウ素と窒化アルミニウムは酸加圧 分解で,ジルコニアはアルカリ融解法により分解した。アルカリ融剤を多量に含むジルコ ニア試料溶液の測定には,マイクロインジェクション法とバックグラウンド補正を併用し て,試料導入系での詰りを抑制するとともに,検量線の一元化を図った。いずれの方法も 0.001%ないしは ppm レベルまでの微量分析法としてファインセラミックスの原料および 製品の品質管理に活用されている。 Synopsis :

ICP-AES has been applied to the simultaneous determination of impurities in fine ceramics. Boron nitride and aluminum nitride were digested by acid pressure decomposition in Teflon vessels. Zirconium oxide was decomposed by fusion with the mixture of sodium carbonate and sodium borate. A micro-injection technique enables the measurement of these high salt containing solutions without clogging, and permits the use of a single calibration curve with background correction. The proposed method, whose lower limit of determination is as low as ppm concentrations, is useful for the quality control of raw materials and products.

(c)JFE Steel Corporation, 2003

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