䝥䝸䞁䝖㓄⥺ᯈ䛾ᑠᚄ䝗䝸䝹ຍᕤ䛻㛵䛩䜛◊✲ 㻌

(1)

䝥

䝥䝸䞁䝖㓄⥺ᯈ䛾ᑠᚄ䝗䝸䝹ຍᕤ䛻㛵䛩䜛◊✲ 㻌

2014 ᖺ 7 ᭶

బ ⸨ ᓫ ᘯ

(2)

┠ ┠ḟ

➨1❶ ⥴ㄽ ... 1

1㸬1 ◊✲ࡢ⫼ᬒ࡜┠ⓗ ... 1

1㸬1㸬1 ࣉࣜࣥࢺ㓄⥺ᯈࡢṔྐ࡜ᢏ⾡ືྥ ... 2

1㸬1㸬2 ࣉࣜࣥࢺ㓄⥺ᯈࡢศ㢮࡜ᵓ㐀 ... 3

1㸬1㸬3 ࣉࣜࣥࢺ㓄⥺ᯈࡢᵓᡂᮦᩱ ... 5

1㸬2 ࢻࣜࣝຍᕤ࡟㛵ࡍࡿᚑ᮶ࡢ◊✲ ... 6

1㸬2㸬1 㣗࠸௜ࡁ᫬ࡢࢻࣜࣝඛ➃ࡢᣲື ... 7

1㸬2㸬2 ᑠᚄࢻࣜࣝຍᕤ࡟㛵ࡍࡿ◊✲ ... 8

1㸬3 ࣉࣜࣥࢺ㓄⥺ᯈࡢࢻࣜࣝຍᕤ ... 9

1㸬3㸬1 ࣉࣜࣥࢺ㓄⥺ᯈࡢຍᕤ✰ရ఩ ... 9

1㸬3㸬2 ࣉࣜࣥࢺ㓄⥺ᯈ⏝ࢻࣜࣝࡢ⣲ᮦ ... 10

1㸬3㸬3 ࣉࣜࣥࢺ㓄⥺ᯈࡢࢻࣜࣝຍᕤἲ ... 10

1㸬3㸬4 ࢚ࣥࢺ࣮ࣜࢩ࣮ࢺ࡟ࡘ࠸࡚ ... 11

1㸬4 ᮏ◊✲ࡢ┠ⓗ࡜ㄽᩥࡢᴫせ ... 12

➨2❶ ࣉࣜࣥࢺ㓄⥺ᯈࡢࢻࣜࣝຍᕤ≉ᛶ ... 14

2㸬1 ⥴ゝ ... 14

2㸬2 ᐇ㦂᪉ἲ࠾ࡼࡧᐇ㦂᮲௳ ... 14

2㸬2㸬1 ຍᕤ⿦⨨ ... 14

2㸬2㸬2 ຍᕤ⌧㇟ホ౯᪉ἲ ... 16

2㸬2㸬3 ຍᕤ✰ရ఩ホ౯᪉ἲ ... 18

2㸬2㸬4 ᐇ㦂᮲௳ ... 20

2㸬3 ᐇ㦂⤖ᯝ࠾ࡼࡧ⪃ᐹ ... 20

(3)

2㸬3㸬1 ✰ຍᕤ୰ࡢษ๐ຊ ... 20

2㸬3㸬2 ษࡾࡃࡎ᤼ฟ≧ἣ ... 22

2㸬3㸬3 ษࡾࡃࡎᙧ≧ ... 24

2㸬3㸬4 ᕤලᦶ⪖࡟ཬࡰࡍษ๐㏿ᗘࡢᙳ㡪 ... 24

2㸬3㸬5 ✰ᚄ࡟ཬࡰࡍࢻࣜࣝᦶ⪖㔞ࡢᙳ㡪 ... 25

2㸬3㸬6 ࢻࣜࣝࡢ᭤ࡀࡾ ... 26

2㸬3㸬7 ✰ቨ㠃⢒ࡉ ... 27

2㸬3㸬8 ✰ቨ㠃⢒ࡉ࡟ཬࡰࡍࢻࣜࣝࢥ࣮ࢸ࢕ࣥࢢࡢᙳ㡪 ... 28

2㸬3㸬9 ✰ቨ㠃⢒ࡉ࡟ཬࡰࡍ⿕๐ᮦ ᗘࡢᙳ㡪 ... 30

2㸬4 ⤖ゝ ... 32

➨ ➨3❶ ࣉࣜࣥࢺ㓄⥺ᯈࡢຍᕤ≉ᛶ࡟ཬࡰࡍ࢚ࣥࢺ࣮ࣜࢩ࣮ࢺࡢᙳ㡪 ... 33

3㸬1 ⥴ゝ ... 33

3㸬2 ᐇ㦂᪉ἲ࠾ࡼࡧᐇ㦂᮲௳ ... 33

3㸬3 ᐇ㦂⤖ᯝ࠾ࡼࡧ⪃ᐹ ... 35

3㸬3㸬1 ࢚ࣥࢺ࣮ࣜࢩ࣮ࢺࡢຠᯝ ... 35

3㸬3㸬2 ✰఩⨨⢭ᗘ࡟ཬࡰࡍ࢚ࣥࢺ࣮ࣜࢩ࣮ࢺࡢ⾲㠃⢒ࡉࡢᙳ㡪 ... 37

3㸬3㸬3 ຍᕤ≉ᛶ࡟ཬࡰࡍ࢚ࣥࢺ࣮ࣜࢩ࣮ࢺࡢ࢔࣑ࣝࢽ࣒࢘ᮦᩱࡢᙳ㡪 ... 38

3㸬3㸬4 ຍᕤ≉ᛶ࡟ཬࡰࡍ࢚ࣥࢺ࣮ࣜࢩ࣮ࢺࡢ࢔࣑ࣝࢽ࣒࢘ᯈཌࡢᙳ㡪 ... 43

3㸬4 ⤖ゝ ... 46

➨4❶ ✰఩⨨⢭ᗘ࡟ཬࡰࡍ࢚ࣥࢺ࣮ࣜࢩ࣮ࢺᶞ⬡≉ᛶࡢᙳ㡪 ... 47

4㸬1 ⥴ゝ ... 47

4㸬2 ᐇ㦂᪉ἲ࠾ࡼࡧ࢚ࣥࢺ࣮ࣜࢩ࣮ࢺࡢᶞ⬡≉ᛶ ... 48

4㸬2㸬1 ຍᕤᶵ࠾ࡼࡧᐇ㦂᮲௳ ... 48

4㸬2㸬2 ຍᕤ✰ရ఩ホ౯ヨ㦂᪉ἲ ... 49

(4)

4㸬2㸬3 ຍᕤ≉ᛶホ౯ヨ㦂᪉ἲ ... 49

4㸬2㸬4 ࢚ࣥࢺ࣮ࣜࢩ࣮ࢺࡢᶞ⬡≉ᛶ ... 53

4㸬2㸬4㸬1 ࢚ࣥࢺ࣮ࣜࢩ࣮ࢺᶞ⬡㒊ࡢ◳ࡉ ... 53

4㸬2㸬4㸬2 ࢚ࣥࢺ࣮ࣜࢩ࣮ࢺᶞ⬡㒊ࡢ⇕⁐ゎ≉ᛶ ... 54

4㸬2㸬4㸬3 ࢚ࣥࢺ࣮ࣜࢩ࣮ࢺᶞ⬡㒊ࡢ₶⁥≉ᛶ ... 55

4㸬3 ᐇ㦂⤖ᯝ࠾ࡼࡧ⪃ᐹ ... 58

4㸬3㸬1 ✰఩⨨⢭ᗘ࡟ཬࡰࡍwax㓄ྜ๭ྜࡢᙳ㡪 ... 58

4㸬3㸬2 ✰఩⨨⢭ᗘ࡟ཬࡰࡍ࢚ࣥࢺ࣮ࣜࢩ࣮ࢺᶞ⬡ᮦᩱࡢᙳ㡪 ... 60

4㸬3㸬3 ✰఩⨨⢭ᗘ࡟ཬࡰࡍᐇ㦂᮲௳࠾ࡼࡧ࢚ࣥࢺ࣮ࣜࢩ࣮ࢺᶞ⬡ᮦᩱࡢᙳ㡪 ... 60

4㸬3㸬4 ࢚ࣥࢺ࣮ࣜࢩ࣮ࢺຍᕤ୰ࡢᶞ⬡㒊⾲㠃≧ែ ... 65

4㸬3㸬5 ࢚ࣥࢺ࣮ࣜࢩ࣮ࢺຍᕤ୰ࡢࢻࣜࣝඛ➃ᣲື ... 68

4㸬3㸬6 ࢚ࣥࢺ࣮ࣜࢩ࣮ࢺຍᕤ୰ࡢษ๐ຊ ... 71

4㸬4 ⤖ゝ ... 72

➨ ➨5❶ ✰ቨ㠃⢒ࡉ࡟ཬࡰࡍ࢚ࣥࢺ࣮ࣜࢩ࣮ࢺᶞ⬡≉ᛶࡢᙳ㡪 ... 74

5㸬1 ⥴ゝ ... 74

5㸬2 ᐇ㦂᪉ἲ࠾ࡼࡧᐇ㦂᮲௳ ... 74

5㸬3 ᐇ㦂⤖ᯝ࠾ࡼࡧ⪃ᐹ ... 76

5㸬3㸬1 ✰ቨ㠃⢒ࡉ࡟ཬࡰࡍ࢚ࣥࢺ࣮ࣜࢩ࣮ࢺᶞ⬡ᮦᩱࡢᙳ㡪 ... 76

5㸬3㸬2 ຍᕤᚋࡢࢻࣜࣝࣇ࣮ࣝࢺ㒊 ... 77

5㸬3㸬3 ࢻࣜࣝࣇ࣮ࣝࢺ㒊࡟௜╔ࡍࡿᶞ⬡ࡢຠᯝ ... 79

5㸬3㸬4 ㈏㏻┤ᚋࡢࢻࣜࣝลඛ ᗘ ... 81

5㸬3㸬5 ࢚ࣥࢺ࣮ࣜࢩ࣮ࢺࡢ₶⁥࣭෭༷ᛶ⬟ࡢᣢ⥆ᛶ ... 82

5㸬3㸬6 wax⣔ᶞ⬡௜ࡁ࢚ࣥࢺ࣮ࣜࢩ࣮ࢺࡢ✰ቨ㠃⢒ࡉࡢᨵၿ ... 84

5㸬3㸬6㸬1 ✰ቨ㠃⢒ࡉ࡟ཬࡰࡍప⼥Ⅼᶞ⬡ῧຍ㔞ࡢᙳ㡪 ... 84

5㸬3㸬6㸬2 ✰ቨ㠃⢒ࡉ࡟ཬࡰࡍᶞ⬡ᕳ௜ࡁᛶࡢᙳ㡪 ... 85

(5)

5㸬4 ⤖ゝ ... 87

➨ ➨6❶ ᅇ㌿᣺ࢀࡢ࠶ࡿᑠᚄࢻࣜࣝࡢຍᕤᣲື ... 89

6㸬1 ⥴ゝ ... 89

6㸬2 ồᚰ⌧㇟ ... 91

6㸬3 ゎᯒ᪉ἲ࠾ࡼࡧᐇ㦂᪉ἲ ... 93

6㸬3㸬1 ゎᯒ᪉ἲ ... 93

6㸬3㸬1㸬1 ゎᯒࣔࢹࣝ࠾ࡼࡧゎᯒ᮲௳ ... 94

6㸬3㸬1㸬2 ࣓ࢵࢩࣗࢧ࢖ࢬ࡟ࡘ࠸࡚ ... 98

6㸬3㸬2 ᐇ㦂᪉ἲ ... 100

6㸬4 ゎᯒ⤖ᯝ࠾ࡼࡧᐇ㦂⤖ᯝ ... 101

6㸬4㸬1 ࢻࣜࣝඛ➃⛣ື㌶㊧࠾ࡼࡧษ๐ຊ࡟ཬࡰࡍึᮇษࢀลྥࡁࡢᙳ㡪 ... 101

6㸬4㸬2 ࢻࣜࣝඛ➃⛣ື㌶㊧࠾ࡼࡧษ๐ຊ࡟ཬࡰࡍ⿕๐ᮦᮦᩱࡢᙳ㡪 ... 104

6㸬4㸬3 ồᚰᛶ࡟ཬࡰࡍ㏦ࡾ㔞ࡢᙳ㡪 ... 106

6㸬4㸬4 ồᚰᛶ࡟ཬࡰࡍࢻࣜࣝ୰ᚰ㍈ࡢഴࡁࡢᙳ㡪 ... 108

6㸬4㸬5 ồᚰᛶ࡟ཬࡰࡍࢻࣜࣝඛ➃ゅࡢᙳ㡪 ... 110

6㸬4㸬6 ồᚰᛶ࡟ཬࡰࡍࢻࣜࣝ๛ᛶࡢᙳ㡪 ... 111

6㸬5 ồᚰᛶ࡟㛵ࡍࡿ⪃ᐹ ... 113

6㸬5㸬1 ồᚰᛶ࡟ཬࡰࡍᕤලඛ➃ᙧ≧ࡢᙳ㡪 ... 113

6㸬5㸬2 ⛣ື᢬ᢠࡢ୺㍈ᅇ㌿୰ᚰ᪉ྥᡂศ࡜ồᚰᛶࡢ㛵ಀ ... 116

6㸬6 ⤖ゝ ... 118

➨7❶ ⤖ㄽ ... 119

ཧ⪃ᩥ⊩ ... 122

㛵㐃ሗ࿌ ... 126

ㅰ㎡ ... 128

(6)

1

➨

➨ 1 ❶ ⥴ ㄽ

1.1 ◊ ✲ ࡢ ⫼ ᬒ ࡜ ┠ ⓗ

㏆ ᖺ ࡢ ⏕ ά ࡣ ㍺㏦ ᶵ ჾ 㸪 ᝟ ሗ ᶵ ჾ 㸪 ་ ⒪ ᶵ ჾ ࡞ ࡝ ࡢ Ⓨ ᒎ ࡟ ࡜ ࡶ ࡞ ࡗ ࡚ 㸪

᪥ ࠎ ㇏ ࠿ ࡛ ౽ ฼ ࡟ ࡞ ࡗ ࡚ ࠸ ࡿ 㸬ࡑ ࢀ ࡽ ࡢ ᶵ ჾ ࡟ ࡣ 㸪ᑠ ᆺ ໬ ࡸ 㧗 ᶵ ⬟ ໬ ࡀ ồ

ࡵ ࡽ ࢀ 㸪ࡑ ࡢ ⤖ ᯝ 㸪ᮦ ᩱ ࡢ ከ ᵝ ໬ ࡸ ᦚ ㍕ ࡍ ࡿ 㒊 ရ ࡢ ᑠ ᆺ ໬ ࡀ 㐍 ࡳ 㸪〇㐀 ᢏ

⾡ ࣭ ຍ ᕤ ᢏ ⾡ ࡟ 㧗 ᗘ ໬ ࣭ ᚤ ⣽ ໬ ࡀ せ ồ ࡉ ࢀ ࡿ 㸬ࡑ ࡢ ୰ ࡛ 㸪ࣔ ࣀ ࡙ ࡃ ࡾ ࡢ 㔜せ ࡞ ᕤ ⛬ ࡢ ୍ ࡘ ࡛ ࠶ ࡿ ᑠ ᚄ ✰ ຍ ᕤ ࡟ ࡣ 㸪ࡼ ࡾ ࣞ ࣋ ࣝ ࡢ 㧗 ࠸ ✰ ࢆ ຍ ᕤ ࡍ ࡿ ᢏ

⾡ ࡀ ồ ࡵ ࡽ ࢀ ࡚ ࠸ ࡿ 㸬

ࡑ ࡢ ࡼ ࠺ ࡞ ୰ 㸪✰ ຍ ᕤ ࡟ ᑐ ࡋ ࡚ ᵝ ࠎ ࡞ ✰ ຍ ᕤ ἲ ࡀ ᥦ ᱌ ࡉ ࢀ ࡚ ࠸ ࡿ 㸬᭱ ࡶ

୍ ⯡ ⓗ ࡞ ࢻ ࣜ ࣝ ࢆ ౑ ࠺ ษ ๐ ຍ ᕤ ࠿ ࡽ 㸪ࣞ ࣮ ࢨ ࢆ ౑ ࠺ ࢚ ࢿ ࣝ ࢠ ࣮ ຍ ᕤ 㸪ᨺ 㟁

⌧ ㇟ ࢆ ฼ ⏝ ࡍ ࡿ ᨺ 㟁 ຍ ᕤ 㸪㔠 ᆺ ࢆ ౑ ࠺ ࣉ ࣞ ࢫ ຍ ᕤ 㸪࣐ ࢫ ࢡ ࢆ ౑ ࠺ ࢚ ࢵ ࢳ ࣥ ࢢ ຍ ᕤ ࡜ ከ ✀ ከ ᵝ ࡛ ࠶ ࡿ^{1 - 1 )}㸬ࡑ ࡢ ୰ ࡛ ࡶ ࢻ ࣜ ࣝ ຍ ᕤ ࡣ 㸪⏕ ⏘ ᛶ ࡜ ✰ ရ ఩ ࡢ ୧ ᪉ ࢆ ‶ ㊊ ࡛ ࡁ ࡿ ᪉ ἲ ࡛ ࠶ ࡿ 㸬

ࢻ ࣜ ࣝ ࡟ ࡼ ࡿ ษ ๐ ຍ ᕤ ࡢ ୰ ࡟ ࡣ 㸪㟁 Ꮚ ᶵ ჾ ࡟ ᦚ ㍕ ࡉ ࢀ ࡿ ࣉ ࣜ ࣥ ࢺ 㓄 ⥺ ᯈ ࡢ ✰ ຍ ᕤ ࡀ ࠶ ࡿ 㸬ࣉ ࣜ ࣥ ࢺ 㓄 ⥺ ᯈ ࡣ ㏻ ᖖ ࡢ 㔠 ᒓ ᮦ ᩱ ࡜ ␗ ࡞ ࡾ 」 ྜ ᮦ ᩱ ࡛ ࠶

ࡿ ࡓ ࡵ 㸪✰ ຍ ᕤ ᫬ ࡟ ษ ࡾ ࡃ ࡎ ᤼ ฟ ୙ Ⰻ ࡞ ࡝ ࡀ ⏕ ࡌ ࡸ ࡍ ࠸ 㸬ࡋ ࠿ ࡋ 㸪࠶ ࡲ ࡾ

◊ ✲ ࡀ 㐍 ࢇ ࡛ ࠸ ࡞ ࠸ 㸬ࣉ ࣜ ࣥ ࢺ 㓄 ⥺ ᯈ ࡢ ✰ ຍ ᕤ ࡣ 㸪┤ ᚄ50㹼300μm㸪L/D=10 ௨ ୖ 㸦L㸸 ✰ ῝ ࡉ 㸪D㸸 ✰ ᚄ 㸧 ࡢ ᑠ ᚄ ῝ ✰ ຍ ᕤ ࡛ 㸪㧗㏿ ࡛ ຍ ᕤ ࡍ ࡿ ᢏ ⾡ ࡀ ᚲ せ ࡜ ࡉ ࢀ ࡚ ࠸ ࡿ 㸬ࡲ ࡓ 㸪࢚ ࣥ ࢪ ࣥ ࡢ ⇞ ᩱ ᄇ ᑕ ࣀ ࢬ ࣝ 㸪໬ ⧄ ⣲ ᮦ 〇㐀 ⏝ ࣀ ࢬ ࣝ 㸪་ ⒪ ⏝ ᶵ ჾ ࡢ ࣀ ࢬ ࣝ ࡞ ࡝ ࡢ 〇 ရ ࡟ ࠾ ࠸ ࡚ ࡶ 㸪㧗 ⢭ ᗘ 㸪㧗 ရ ఩ 㸪ప ࢥ ࢫ ࢺ 㸪ᑠ ᚄ ໬ ࡢ せ ồ ࡀ ࡲ ࡍ ࡲ ࡍ 㧗 ࡲ ࡗ ࡚ ࠸ ࡿ 㸬 ࡋ ࠿ ࡋ 㸪ᑠ ᚄ ✰ ຍ ᕤ ࡣ 㸪ᕤ ල ᚄ ࡟ ᑐ ࡍ ࡿ ᅇ ㌿ ᣺ ࢀ ࡢ ẚ ࡀ ኱ ࡁ ࡃ ࡞ ࡿ ࡓ ࡵ 㸪✺ Ⓨ ⓗ ࡞ ᕤ ල ᢡ ᦆ ࡸ ຍ ᕤ ⢭ ᗘ ࡢ ᝏ ໬ ࡞ ࡝ ࡢ ㄢ㢟 ࡀ ࠶ ࡿ 㸬

ࡑ ࡇ ࡛ 㸪ᮏ ◊ ✲ ࡛ ࡣ ࣉ ࣜ ࣥ ࢺ 㓄 ⥺ ᯈ ࡢ ✰ ࡢ 㧗 ရ ఩ ໬ ࢆ ┠ ⓗ ࡜ ࡋ ࡓ ᑠ ᚄ ࢻ

ࣜ ࣝ ຍ ᕤ ᢏ ⾡ ࡜ ᑠ ᚄ ࢻ ࣜ ࣝ ຍ ᕤ ࡢ ㄢ㢟 ࡢ ୍ ࡘ ࡛ ࠶ ࡿ ᅇ ㌿ ᣺ ࢀ ࡘ ࠸ ࡚ ◊ ✲

ࢆ ⾜ ࡗ ࡓ 㸬௨ ୗ 㸪ࣉ ࣜ ࣥ ࢺ 㓄 ⥺ ᯈ ࡜ ᑠ ᚄ ✰ ຍ ᕤ ࡢ ᢏ ⾡ ື ྥ ࡜ ㏆ ᖺ ࡲ ࡛ ࡢ ◊

✲ ෆ ᐜ ࡟ ࡘ ࠸ ࡚ ㏙ ࡭ ࡿ 㸬

(7)

2 1.1.1 ࣉࣉ ࣜ ࣥ ࢺ 㓄 ⥺ ᯈ ࡢ Ṕ ྐ ࡜ ᢏ ⾡ ື ྥ

ࣉ ࣜ ࣥ ࢺ 㓄 ⥺ ᯈ 㸦Printed Wiring Boards㸧 ࡜ ࡣ 㸪㟁 Ẽ ⓗ ⤯ ⦕ ᯈ ࡢ ⾲㠃 ࡲ ࡓ ࡣ ⾲㠃 ࡜ ࡑ ࡢ ෆ 㒊 ࡟ ᑟ 㟁 ᛶ ᮦ ᩱ ࡛ ᅇ ㊰ ࣃ ࢱ ࣮ ࣥ ࢆ ᙧ ᡂ ࡋ ࡓ ࡶ ࡢ ࡛ ࠶ ࡾ 㸪 ᐃ ࡵ ࡽ ࢀ ࡓ ᶵ Ე ຍ ᕤ ࡸ ⾲㠃 ฎ ⌮ ࢆ ⤊ ࠼ ࡓ ≧ ែ 㸪࠸ ࢃ ࡺ ࡿ 㟁 Ꮚ 㒊 ရ ࢆ ᐇ ⿦ ࡍ

ࡿ ┤ ๓ ࡢ ≧ ែ ࡢ ࡶ ࡢ ࢆ ᣦ ࡍ 㸬 ࡑ ࡢ ࣉ ࣜ ࣥ ࢺ 㓄 ⥺ ᯈ ࡟ IC(Integrated Circuit) ࢳ ࢵ ࣉ ࡞ ࡝ ࡢ 㟁 Ꮚ 㒊 ရ ࢆ ᐇ ⿦ ࡋ 㸪 ࡣ ࢇ ࡔ ௜ ࡅ ࡋ ࡓ ࡶ ࡢ ࡀ ࣉ ࣜ ࣥ ࢺ ᇶ ᯈ 㸦Printed Circuit Boards㸧 ࡜ ࿧ ࡤ ࢀ ࡿ ࡶ ࡢ ࡛ ࠶ ࡿ 㸬

ࣉ ࣜ ࣥ ࢺ 㓄 ⥺ ᯈ ࡣ 㸪 ᅗ 1-1 ࡟ ♧ ࡍ ࡼ ࠺ ࡟ 1943 ᖺ ࡟ 㛤 Ⓨ ࡉ ࢀ 㸪 ⌧ ᅾ ࡟ ⮳

ࡿ ࡲ ࡛ 㧗 ᶵ ⬟ ໬ ࡋ ࡚ ࡁ ࡓ 㸬ࡑ ࡢ ⤖ ᯝ 㸪㟁 Ꮚ ᶵ ჾ ࡸ ࣔ ࢪ ࣗ ࣮ ࣝ ࡢ ᑠ ᆺ ໬ 㸪㧗 ᛶ ⬟ ໬ ࡀ 㐍 ࢇ ࡔ 㸬ࣉ ࣜ ࣥ ࢺ 㓄 ⥺ ᯈ ࡣ 㸪㌟㏆ ࡞ ࡜ ࡇ ࢁ ࡛ ࡣ ᦠ ᖏ 㟁ヰ㸪ࣃ ࢯ ࢥ

ࣥ 㸪 ᾮ ᬗ ࢸ ࣞ ࣅ 㸪 ⮬ ື ㌴㸪㏻ ಙ ᶵ ჾ ࡞ ࡝ ࡟ ᦚ ㍕ ࡉ ࢀ ࡚ ࠸ ࡿ 㸬

ࣉ ࣜ ࣥ ࢺ 㓄 ⥺ ᯈ ࡣ 㸪༙ ᑟ య ࣃ ࢵ ࢣ ࣮ ࢪ ࡸ 㟁 Ꮚ 㒊 ရ ࢆ ᐇ ⿦ ࡍ ࡿ ᇶ ᯈ ࡛ ࠶ ࡿ

ୡ ⏺ ึ ࡢ ࣉ ࣜ ࣥ ࢺ 㓄 ⥺ ᯈ ࢆ

ⱥ ᅜ ࡢ Paul Eisler ༤ ኈ ࡀ 㛤 Ⓨ ࡋ ≉ チ ྲྀ ᚓ ^{1 - 2 )} 1943 ᖺ

ࢺ ࣛ ࣥ ࢪ ࢫ ࢱ ࡢ 〇 ရ ໬ ࡟ ࡼ ࡾ

୧ 㠃 ࣉ ࣜ ࣥ ࢺ 㓄 ⥺ ᯈ ࡀ ᐇ ⏝ ໬ 1950 ᖺ ௦

⡿ ᅜ ࡢ Hazeltyne ♫ ࡀ

ከ ᒙ ࣉ ࣜ ࣥ ࢺ 㓄 ⥺ ᯈ ࡢ ≉ チ ࢆ ྲྀ ᚓ 1961 ᖺ

ࣉ ࣜ ࣥ ࢺ 㓄 ⥺ ᯈ ࡀ IC ࢆ ᥋ ⥆ ࡍ ࡿ ᪉ ᘧ ࡜ ࡋ ࡚

ᖜ ᗈ ࡃ ౑ ࢃ ࢀ ࡿ 1970 ᖺ ௦

኱ ᆺ ࢥ ࣥ ࣆ ࣗ ࣮ ࢱ ྥ ࡅ ࡟ 46 ᒙ ࡢ

ࣉ ࣜ ࣥ ࢺ 㓄 ⥺ ᯈ ࡀ 㛤 Ⓨ ࡉ ࢀ ࡿ ^{1 - 3 )} 1988ᖺ

ᅗ 1-1 ࣉ ࣜ ࣥ ࢺ 㓄 ⥺ ᯈ ࡢ Ṕ ྐ

(8)

3

ࡓ ࡵ 㸪ࣉ ࣜ ࣥ ࢺ 㓄 ⥺ ᯈ ࡢ ຍ ᕤ ᢏ ⾡ ࡣ 㸪ᦚ ㍕ ࡍ ࡿ ༙ ᑟ య ࡸ 㟁 Ꮚ 㒊 ရ ࡢ ᑠ ᆺ ໬

࡜ ࡜ ࡶ ࡟ 㐍 Ṍ ࡋ ࡚ ࡁ ࡓ 㸬᭱ ㏆ ࡢ ༙ ᑟ య ࣃ ࢵ ࢣ ࣮ ࢪ ࡣ 㸪⊃ ࣆ ࢵ ࢳ ࡢ BGA(Ball Grid Array)ࡀ ୺ ὶ ࡟ ࡞ ࡗ ࡚ ࠸ ࡿ 㸬㟁 ὶ 㔞 ࡢ ቑ ຍ ࡸ ྛ ✀ ࢖ ࣥ ࢱ ࣮ ࣇ ࢙ ࣮ ࢫ 㸪 ࢹ ࣮ ࢱ ࣅ ࢵ ࢺ ᩘ ࡢ ቑ ຍ ࡟ ࡼ ࡾ 㸪௒ ᚋ ࡶ ࡉ ࡽ ࡟ 㓄 ⥺ ࣡ ࢖ ࣖ ࡢ ⊃ ࣆ ࢵ ࢳ ໬ ࡀ 㐍

ࡴ ࡜ ᛮ ࢃ ࢀ ࡿ 㸬 ࡲ ࡓ 㸪 ࢹ ࣮ ࢱ ㌿㏦㏿ ᗘ ࡀ ௒ ᚋ 5 ᖺ 㛫 ࡛ 10GHz ࠿ ࡽ 20GHz

࡟ ㏆ ࡙ ࡃ ࡜ ぢ ࡽ ࢀ ࡚ ࠸ ࡿ 㸬ࡇ ࡢ ࡼ ࠺ ࡞ 㧗 ࿘ Ἴ ᇦ ࡢ 㟁 Ẽ ಙ ྕ ࡣ ῶ ⾶ ࡀ ኱ ࡁ ࡃ

࡞ ࡿ ࡓ ࡵ 㸪 ఏ ㏦ ≉ ᛶ ࡢ Ⰻ ࠸ ప ㄏ㟁 ⋡ ࡢ ࣉ ࣜ ࣥ ࢺ 㓄 ⥺ ᯈ ࡀ 㛤 Ⓨ ࡉ ࢀ ࡚ ࠸ ࡿ 㸬 ࡇ ࡢ ࡼ ࠺ ࡟ 㸪㏆ ᖺ ࡛ ࡣ 㓄 ⥺ ࣃ ࢱ ࣮ ࣥ ࡢ ⊃ ࣆ ࢵ ࢳ ໬ ࡸ ᪂ ࡋ ࠸ ࣉ ࣜ ࣥ ࢺ 㓄 ⥺ ᯈ

ᮦ ᩱ ࡢ 㛤 Ⓨ ࡟ ࡜ ࡶ ࡞ ࠸ 㸪ࣉ ࣜ ࣥ ࢺ 㓄 ⥺ ᯈ ࡟ 㧗 ⢭ ᗘ ࡟ ✰ ࠶ ࡅ ࢆ ⾜ ࠺ ຍ ᕤ ᢏ ⾡ ࡀ ồ ࡵ ࡽ ࢀ ࡚ ࠸ ࡿ 㸬

1.1.2 ࣉࣉ ࣜ ࣥ ࢺ 㓄 ⥺ ᯈ ࡢ ศ 㢮 ࡜ ᵓ 㐀

ࣉ ࣜ ࣥ ࢺ 㓄 ⥺ ᯈ ࡟ ࡣ 㸪⤯ ⦕ ᯈ ࡀ ᭤ ࡀ ࡾ ࡸ ࡍ ࠸ ࡶ ࡢ ࡜ ᭤ ࡀ ࡾ ࡟ ࡃ ࠸ ࡶ ࡢ ࡀ

࠶ ࡿ 㸬๓ ⪅ ࢆ ࣜ ࢪ ࢵ ࢻ ࣉ ࣜ ࣥ ࢺ 㓄 ⥺ ᯈ 㸪ᚋ ⪅ ࢆ ࣇ ࣞ ࢟ ࢩ ࣈ ࣝ ࣉ ࣜ ࣥ ࢺ 㓄 ⥺ ᯈ ࡜ ࿧ ࢇ ࡛ ࠸ ࡿ 㸬

ࣜ ࢪ ࢵ ࢻ ࣉ ࣜ ࣥ ࢺ 㓄 ⥺ ᯈ ࡣ 㸪ᅗ 1-2 ࡟ ♧ ࡍ ࡼ ࠺ ࡟ ⣬ ࡸ ࢞ ࣛ ࢫ ࢡ ࣟ ࢫ ࡞ ࡝ ࡢ ࢩ ࣮ ࢺ ࡟ ᶞ ⬡ ࢆ ྵ ᾐ ࡉ ࡏ 㸪ᩘ ᯛ 㔜 ࡡ ࡚ ◳ ㉁ ໬ ࡋ ࡓ ࡶ ࡢ ࢆ ⤯ ⦕ ᯈ ࡜ ࡋ 㸪ࡑ

ࢀ ࡟ 㖡 ⟩ ࢆ ㈞ ࡾ ௜ ࡅ ࡓ ࡶ ࡢ ࡛ ࠶ ࡿ 㸬㏻ ᖖ ࣉ ࣜ ࣥ ࢺ 㓄 ⥺ ᯈ ࡜ ࠸ ࠼ ࡤ 㸪ࣜ ࢪ ࢵ ࢻ ࣉ ࣜ ࣥ ࢺ 㓄 ⥺ ᯈ ࡢ ࡇ ࡜ ࡛ ࠶ ࡾ 㸪ᕷ ሙ ࡛ ከ ࡃ ౑ ⏝ ࡉ ࢀ ࡚ ࠸ ࡿ 㸬ࣇ ࣞ ࢟ ࢩ ࣈ

ࣝ ࣉ ࣜ ࣥ ࢺ 㓄 ⥺ ᯈ ࡣ 㸪࣏ ࣜ ࢚ ࢫ ࢸ ࣝ ࣇ ࢕ ࣝ ࣒ ࡸ ࣏ ࣜ ࢖ ࣑ ࢻ ࣇ ࢕ ࣝ ࣒ ࢆ ⤯ ⦕

ᮦ ᩱ ࡜ ࡋ ࡚ ࠸ ࡿ ࡓ ࡵ 㸪ᰂ ㌾ ᛶ ࡀ 㧗 ࡃ 㸪ᢡ ࡾ ᭤ ࡆ ࡓ ࡾ 㸪ࡡ ࡌ ࡗ ࡓ ࡾ ࡍ ࡿ ࡇ ࡜ ࡀ ᐜ ᫆ ࡛ ࠶ ࡿ 㸬ࣇ ࣞ ࢟ ࢩ ࣈ ࣝ ࣉ ࣜ ࣥ ࢺ 㓄 ⥺ ᯈ ࡣ ୺ ࡟ ᦠ ᖏ 㟁ヰ㸪ࢹ ࢕ ࢪ ࢱ ࣝ

ᅗ 1-2 ୧ 㠃 ࣉ ࣜ ࣥ ࢺ 㓄 ⥺ ᯈ ࡢ ᵓ 㐀

㖡⟩ ࢞ࣛࢫࢡࣟࢫ

ᶞ⬡

(9)

4

ᅗ 1-3 ᦠ ᖏ 㟁ヰ ࡢ ࢫ ࣝ ࣮ ࣍ ࣮ ࣝ ᅗ 1-4 ከ ᒙ ᯈ ࡢ ᩿ 㠃

࢝ ࣓ ࣛ 㸪ࣃ ࢯ ࢥ ࣥ ࡞ ࡝ ࡟ ౑ ⏝ ࡉ ࢀ ࡚ ࠸ ࡿ 㸬ᮏ ◊ ✲ ࡛ ࡣ 㸪ࣇ ࣞ ࢟ ࢩ ࣈ ࣝ ࣉ ࣜ

ࣥ ࢺ 㓄 ⥺ ᯈ ࡜ ẚ ㍑ ࡋ ࡚ ✰ ቨ 㠃 ⢒ ࡉ ࡢ ᝏ ໬ ࡞ ࡝ 㸪ᢏ ⾡ ⓗ ࡞ ㄢ㢟 ࡢ ከ ࠸ ࣜ ࢪ ࢵ ࢻ ࣉ ࣜ ࣥ ࢺ 㓄 ⥺ ᯈ ࢆ ᑐ ㇟ ࡜ ࡋ 㸪 ௨ ୗ ࡇ ࡢ 㓄 ⥺ ᯈ ࢆ ࣉ ࣜ ࣥ ࢺ 㓄 ⥺ ᯈ ࡜ ࿧ ࡪ 㸬

ࣉ ࣜ ࣥ ࢺ 㓄 ⥺ ᯈ ࡣ 㸪⤯ ⦕ ᯈ ࡢ ∦ 㠃 ࡢ ࡳ 㖡 ⟩ ࢆ ᙇ ࡾ ௜ ࡅ ࡓ ∦ 㠃 ࣉ ࣜ ࣥ ࢺ 㓄

⥺ ᯈ 㸪୧ 㠃 ࡟ 㖡 ⟩ ࢆ ᙇ ࡾ ௜ ࡅ ࡓ ୧ 㠃 ࣉ ࣜ ࣥ ࢺ 㓄 ⥺ ᯈ 㸪ࡑ ࢀ ࢆ 」 ᩘ ᯛ 㔜 ࡡ ྜ

ࢃ ࡏ ࡓ ከ ᒙ ࣉ ࣜ ࣥ ࢺ 㓄 ⥺ ᯈ ࡟ ศ 㢮 ࡉ ࢀ ࡿ 㸬

∦ 㠃 ࣉ ࣜ ࣥ ࢺ 㓄 ⥺ ᯈ ࡣ 㸪∦ ഃ ࡢ 㖡 ⟩ ࢆ ࢚ ࢵ ࢳ ࣥ ࢢ ࡛ 㑅 ᢥ ⓗ ࡟ ⁐ ゎ ࡋ 㸪ᚲ せ ࡞ ᅇ ㊰ ࣃ ࢱ ࣮ ࣥ ࢆ ᙧ ᡂ ࡍ ࡿ 㸬㓄 ⥺ ࡀ ∦ 㠃 ࡔ ࡅ ࡛ ࠶ ࡿ ࡓ ࡵ 㸪」㞧 ࡞ ᅇ ㊰ ࣃ ࢱ ࣮ ࣥ ࡣ ᵓ ᡂ ࡛ ࡁ ࡞ ࠸ ࡀ 㸪 ༢ ⣧ ࡞ ࡶ ࡢ ࢆ Ᏻ ౯ ࡟ ࡘ ࡃ ࡿ ࡇ ࡜ ࡀ ࡛ ࡁ ࡿ 㸬

୧ 㠃 ࣉ ࣜ ࣥ ࢺ 㓄 ⥺ ᯈ ࡣ 㸪⤯ ⦕ ᯈ ࡢ ୧ 㠃 ࡟ ᅇ ㊰ ࣃ ࢱ ࣮ ࣥ ࢆ ᙧ ᡂ ࡋ 㸪୧ 㠃 ࡢ 㓄 ⥺ ࡛ ❧ య ஺ ᕪ ࡍ ࡿ ࡇ ࡜ ࡀ ࡛ ࡁ ࡿ ࡓ ࡵ 㸪∦ 㠃 ࡟ ẚ ࡭ ࡚ ࡼ ࡾ ᐦ ᗘ ࡢ 㧗 ࠸ 㓄 ⥺ ࡀ ྍ ⬟ ࡟ ࡞ ࡿ 㸬୧ 㠃 ࣉ ࣜ ࣥ ࢺ 㓄 ⥺ ᯈ ࡢ ሙ ྜ 㸪⾲ ⿬ ࢆ 㟁 Ẽ ⓗ ࡟ ᥋ ⥆ ࡍ ࡿ ᚲ せ ࡀ ࠶ ࡾ 㸪ࡇ ࡢ ᥋ ⥆ ᪉ ἲ ࡜ ࡋ ࡚ ࡣ 㸪㔠 ᒓ ࡢ ࢪ ࣕ ࣥ ࣃ ⥺ ࡛ ᥋ ⥆ ࡍ ࡿ ᪉ ἲ 㸪ࡣ ࡜

┠ ࡛ ᥋ ⥆ ࡍ ࡿ ᪉ ἲ 㸪ᑟ 㟁 ᛶ ࣌ ࣮ ࢫ ࢺ ࡛ ᥋ ⥆ ࡍ ࡿ ᪉ ἲ 㸪࠾ ࡼ ࡧ ࡵ ࡗ ࡁ ࡛ ᥋ ⥆ ࡍ ࡿ ᪉ ἲ ࡀ ࠶ ࡾ 㸪㏆ ᖺ ࡛ ࡣ ᅗ 1-3 ࡟ ♧ ࡍ ࡼ ࠺ ࡟ 㸪ࡵ ࡗ ࡁ ࡛ ᥋ ⥆ ࡍ ࡿ ᪉ ἲ㸦 ࡵ ࡗ ࡁ ࢫ ࣝ ࣮ ࣍ ࣮ ࣝ ἲ 㸧ࡀ ୺ ὶ ࡜ ࡞ ࡗ ࡚ ࠸ ࡿ 㸬ࡇ ࡢ ᪉ ἲ ࡣ 㸪✰ ࡢ ෆ ቨ 㠃 ࡟ ᑟ 㟁 ᛶ ࡢ 㧗 ࠸ 㖡 ࡵ ࡗ ࡁ ࢆ ᪋ ࡋ 㸪⾲ ⿬ ࡢ ᅇ ㊰ ࣃ ࢱ ࣮ ࣥ ࢆ ୍ య ࡛ ᙧ ᡂ ࡍ ࡿ ᪉ ἲ ࡛ 㸪 ಙ 㢗 ᛶ ࡀ 㧗 ࠸ 㸬ࡵ ࡗ ࡁ ࢫ ࣝ ࣮ ࣍ ࣮ ࣝ ἲ ࡟ ⏝ ࠸ ࡿ ⤯ ⦕ ᯈ ࡢ ᮦ ᩱ ࡣ 㸪ࡵ ࡗ ࡁ ࡜

┦ ᛶ ࡢ Ⰻ ࠸ ࡶ ࡢ ࢆ ⏝ ࠸ ࡿ ࡀ 㸪⣬ ᇶ ᮦ ࡣ ୙ 㐺 ᙜ ࡛ 㸪୺ ࡟ ࢞ ࣛ ࢫ ᕸ 㸪ࡲ ࡓ ࡣ ࢞

ࣛ ࢫ ୙ ⧊ ᕸ ᇶ ᮦ ࡀ ⏝ ࠸ ࡽ ࢀ ࡚ ࠸ ࡿ 㸬

㏆ ᖺ 㸪༙ ᑟ య ⣲ Ꮚ ࡢ 㧗㞟 ✚ ໬ ࡟ ࡼ ࡾ LSI ࡢ 㧗 ᛶ ⬟ ໬ ࡸ ᑠ ᆺ ໬ 㸪࠾ ࡼ ࡧ 㒊 ရ ࡢ ࣜ ࣮ ࢻ ᩘ ࡢ ቑ ຍ ࡟ ࡼ ࡗ ࡚ ᥋ ⥆ ࡍ ࡿ 㓄 ⥺ 㔞 ࡣ 㣕㌍ ⓗ ࡟ ቑ ࠼ ࡚ ࠸ ࡿ 㸬ࡇ ࡢ

ᣑ኱ᅗ

ࢫ࣮࣮ࣝ࣍ࣝ

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5

ࡓ ࡵ 㸪⤯ ⦕ ᯈ ࡢ ୧ 㠃㓄 ⥺ ࡔ ࡅ ࡛ ࡣ ࡞ ࡃ 㸪ෆ 㒊 ࡟ ࡶ 㓄 ⥺ ࢆ ⾜ ࠺ ከ ᒙ ࣉ ࣜ ࣥ ࢺ 㓄 ⥺ ᯈ 㸦 ᅗ 1-4㸧 ࡢ せ ồ ࡀ ኱ ࡁ ࡃ ࡞ ࡗ ࡚ ࠸ ࡿ 㸬 ከ ᒙ ࣉ ࣜ ࣥ ࢺ 㓄 ⥺ ᯈ ࡟ ࡣ 㸪

ࡵ ࡗ ࡁ ࢫ ࣝ ࣮ ࣍ ࣮ ࣝ ከ ᒙ ࣉ ࣜ ࣥ ࢺ 㓄 ⥺ ᯈ ࡜ ࣅ ࣝ ࢻ ࢔ ࢵ ࣉ ከ ᒙ ࣉ ࣜ ࣥ ࢺ 㓄

⥺ ᯈ ࡢ 2 ✀ 㢮 ࡀ ࠶ ࡿ 㸬ࡵ ࡗ ࡁ ࢫ ࣝ ࣮ ࣍ ࣮ ࣝ ከ ᒙ ࣉ ࣜ ࣥ ࢺ 㓄 ⥺ ᯈ ࡢ 〇㐀 ᕤ ⛬ ࡣ 㸪ࣃ ࢱ ࣮ ࣥ ࡢ ᙧ ᡂ ࡉ ࢀ ࡓ ୧ 㠃 ࣉ ࣜ ࣥ ࢺ 㓄 ⥺ ᯈ ࢆ ࣉ ࣜ ࣉ ࣞ ࢢ ࡜ ࿧ ࡤ ࢀ ࡿ ᥋

╔ ࢩ ࣮ ࢺ ࡛ ᚲ せ ᩘ ࢆ ✚ ᒙ ᥋ ╔ ࡋ 㸪1 ᯛ ࡢ ᯈ ࡟ ࡍ ࡿ 㸬 ࡇ ࢀ ࡟ ✰ ࢆ ࠶ ࡅ 㸪 ✰ ቨ 㠃 ࡟ ࢫ ࣝ ࣮ ࣍ ࣮ ࣝ ࡵ ࡗ ࡁ ࢆ ᪋ ࡍ 㸬ࡇ ࡢ ࡼ ࠺ ࡞ ࡵ ࡗ ࡁ ࢫ ࣝ ࣮ ࣍ ࣮ ࣝ ከ ᒙ ࣉ ࣜ

ࣥ ࢺ 㓄 ⥺ ᯈ ࡣ 㸪ከ ᒙ ᯈ ࡢ ᇶ ᮏ ࡜ ࡋ ࡚ ᗈ ࡃ ᑟ ධ ࡉ ࢀ ࡚ ࠸ ࡿ 㸬ࣅ ࣝ ࢻ ࢔ ࢵ ࣉ ከ ᒙ ࣉ ࣜ ࣥ ࢺ 㓄 ⥺ ᯈ ࡣ 㸪ࢥ ࢔ ࡜ ࡞ ࡿ ࣉ ࣜ ࣥ ࢺ 㓄 ⥺ ᯈ ࡢ ୖ ࡟ ⤯ ⦕ ᒙ ࢆ స ࡾ 㸪ࡇ ࡢ ⾲㠃 ࡟ ᅇ ㊰ ࣃ ࢱ ࣮ ࣥ ࢆ ᙧ ᡂ ࡋ 㸪ᅇ ㊰ ࣃ ࢱ ࣮ ࣥ ࡜ ⤯ ⦕ ᒙ ࢆ ᥋ ⥆ ࡍ ࡿ ࡓ ࡵ ࡟

ࣅ ࢔ ࡜ ࿧ ࡤ ࢀ ࡿ ᚤ ⣽ ࡞ ✰ ࢆ ࠶ ࡅ 㸪ࡵ ࡗ ࡁ ࡛ ᥋ ⥆ ࡍ ࡿ ᒙ ࢆ ⧞ ࡾ ㏉ ࡋ ✚ ࡳ ୖ ࡆ ᙧ ᡂ ࡉ ࢀ ࡓ ࡶ ࡢ ࠶ ࡿ 㸬 ࡇ ࡢ ᪉ ᘧ ࡣ 㸪 ࣅ ࢔ ࡢ ✵ 㛫 ࢆ ᑠ ࡉ ࡃ ࡍ ࡿ ࡇ ࡜ ࡟ ࡼ ࡾ 㸪

ࣅ ࢔ ࡢ ᚄ 㸪 ࣛ ࢖ ࣥ ᖜ 㸪㛫㝸 ࡢ ᚤ ⣽ ໬ ࡀ ᅗ ࢀ 㸪㧗 ᐦ ᗘ 㓄 ⥺ ࢆ ྍ ⬟ ࡟ ࡍ ࡿ 㸬

1.1.3 ࣉࣉ ࣜ ࣥ ࢺ 㓄 ⥺ ᯈ ࡢ ᵓ ᡂ ᮦ ᩱ

ࣉ ࣜ ࣥ ࢺ 㓄 ⥺ ᯈ ࡣ 㖡 ⟩ 㸪࢞ ࣛ ࢫ ࢡ ࣟ ࢫ 㸪ᶞ ⬡ ࡛ ᵓ ᡂ ࡉ ࢀ ࡓ ࡶ ࡢ ࡛ 㸪≀ ᛶ

್ ࡀ ኱ ࡁ ࡃ ␗ ࡞ ࡿ ࡶ ࡢ ࡢ 㞟 ࡲ ࡾ ࡛ ࠶ ࡿ 㸬

㖡 ⟩ ࡟ ࡣ 㟁ゎ㖡 ࡀ ⏝ ࠸ ࡽ ࢀ 㸪 ཌ ࡉ ࡣ 0.005㹼0.070mm ⛬ ᗘ ࡛ 㸪 ᥋ ╔ ๣ ࡟

ࡼ ࡾ ᇶ ᮦ ࡟ ㈞ ࡾ ௜ ࡅ ࡽ ࢀ ࡿ 㸬 ࢞ ࣛ ࢫ ࢡ ࣟ ࢫ ࡣ 㸪 ᅗ 1-5 ࡟ ♧ ࡍ ࡼ ࠺ ࡟ ┤ ᚄ

0.005㹼0.015mm ⛬ ᗘ ࡢ ࢞ ࣛ ࢫ ⧄ ⥔ ࢆ ᩘ ⓒ ᮏ ࡼ ࡾ ࠶ ࢃ ࡏ ࡓ ࣖ ࣮ ࣥ ࡜ ࿧ ࡤ ࢀ

ࡿ ⣒ ࢆ ⦪ ⣒ ࡜ ᶓ ⣒ ࡟ ࡋ 㸪ࡑ ࢀ ࢆ ⧊ ࡾ ㎸ ࢇ ࡔ ࢩ ࣮ ࢺ ≧ ࡢ ࡶ ࡢ ࡛ ࠶ ࡿ 㸬୺ ᡂ ศ

(a) 㺔㺼㺵㺛⧄ ⥔ ᖹ ⧊ ࡉ ࢀ ࡓ 㺔㺼㺵㺛㺖㺹㺛 (b) ᒙ ≧ ࡟ ࡞ ࡗ ࡓ 㺔㺼㺵㺛㺖㺹㺛 ࡢ ᩿ 㠃

ᅗ 1-5 ࢞ ࣛ ࢫ ࢡ ࣟ ࢫ

ᶞ⬡

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6

ࡣ ࢩ ࣜ ࢝ 㸪࢔ ࣝ ࣑ ࢼ ࠾ ࡼ ࡧ ࣍ ࢘ ⣲ ࡞ ࡝ ࢆ ྵ ࡴ 㖔 ▼ ࡛ ࠶ ࡿ 㸬ࣉ ࣜ ࣥ ࢺ 㓄 ⥺ ᯈ

࡟ ࡣ 㸪〇㐀㐣 ⛬ ୰ ࡟ ࡣ ࢇ ࡔ ௜ ࡅ ࡸ ࡵ ࡗ ࡁ ᕤ ⛬ ࡞ ࡝ ࡀ ࠶ ࡿ ࡇ ࡜ ࠿ ࡽ ⪏ ⇕ ᛶ ࡸ

⪏ ⸆ ရ ᛶ ࡀ ồ ࡵ ࡽ ࢀ ࡿ 㸬ࡑ ࡢ ࡓ ࡵ 㸪ྵ ᾐ ࡍ ࡿ ᶞ ⬡ ࡟ ࡣ 㸪㧗 ࡛ ࡶ 㟁 Ẽ ≉ ᛶ

࡟ ኚ ໬ ࡀ ࡞ ࡃ 㸪௚ ࡢ ᮦ ᩱ ࡜ ࡢ ᐦ ╔ ᛶ ࡀ Ⰻ ዲ ࡞ ࣇ ࢙ ࣀ ࣮ ࣝ ᶞ ⬡ ࡸ ࢚ ࣏ ࢟ ࢩ ᶞ

⬡ ࡞ ࡝ ࡢ ⇕ ◳ ໬ ᛶ ᶞ ⬡ ࡀ ౑ ࢃ ࢀ ࡚ ࠸ ࡿ 㸬

㏆ ᖺ ࡛ ࡣ 㸪〇 ရ ࡢ ᑠ ᆺ ໬ ࣭ 㧗 ᛶ ⬟ ໬ ࡟ ࡜ ࡶ ࡞ ࠸ 㸪ࣉ ࣜ ࣥ ࢺ 㓄 ⥺ ᯈ ࡟ せ ồ ࡉ ࢀ ࡿ ᮦ ᩱ ≉ ᛶ ࡀ 㧗 ⪏ ⇕ ᛶ 㸪 ప ⇕ ⭾ ᙇ ᛶ ࠾ ࡼ ࡧ 㧗 ᙎ ᛶ ࡜ ࡞ ࡗ ࡚ ࠸ ࡿ ^{1 - 4 )}㸬 ࡇ ࡢ せ ồ ࢆ ‶ ㊊ ࡍ ࡿ ࡓ ࡵ ࡟ ࡣ 㸪ᶞ ⬡ ୰ ࡟ ࢩ ࣜ ࢝ ࡸ Ỉ 㓟 ໬ ࢔ ࣝ ࣑ ࢽ ࢘ ࣒ ࡞ ࡝ ࡢ ↓ ᶵ ࣇ ࢕ ࣛ ࢆ 㓄 ྜ ࡍ ࡿ ᪉ ἲ ࡀ ୍ ⯡ ⓗ ࡛ ࠶ ࡿ 㸬ࡋ ࠿ ࡋ 㸪࢞ ࣛ ࢫ ⧄ ⥔ ࡸ ࢩ ࣜ

࢝ ࡣ ࢻ ࣜ ࣝ ࡢ ࢔ ࣈ ࣞ ࢩ ࣈ ᦶ ⪖ ࡢ ୺ せ ᅉ ࡜ ࡞ ࡾ 㸪Ỉ 㓟 ໬ ࢔ ࣝ ࣑ ࢽ ࢘ ࣒ ࡸ 㖡 ⟩ ࡣ ษ ࡾ ࡃ ࡎ ᤼ ฟ ୙ Ⰻ ࡢ せ ᅉ ࡜ ࡞ ࡿ ^{1 - 5 )}ࡓ ࡵ 㸪⿕ ๐ ᮦ ࡢ ຍ ᕤ ᛶ ᨵ ၿ ࡀ ᮃ ࡲ ࢀ

࡚ ࠸ ࡿ 㸬

1.2 ࢻ ࢻ ࣜ ࣝ ຍ ᕤ ࡟ 㛵 ࡍ ࡿ ᚑ ᮶ ࡢ ◊ ✲

ࢻ ࣜ ࣝ ຍ ᕤ ࡣ 㸪୺ ࡟ ࣎ ࣮ ࣝ ┙ 㸪᪕ ┙ 㸪ࣇ ࣛ ࢖ ࢫ ┙ 㸪࣐ ࢩ ࢽ ࣥ ࢢ ࢭ ࣥ ࢱ ࡞

࡝ ࡟ ࢻ ࣜ ࣝ ࢆ ྲྀ ௜ ࡅ 㸪ᅇ ㌿㐠 ື ࡟ ࡼ ࡾ ᕤ స ≀ ࡟ ✰ ࢆ ࠶ ࡅ ࡿ ษ ๐ స ᴗ ࡢ ࡇ ࡜

࡛ ࠶ ࡿ 㸬 ࢻ ࣜ ࣝ ࡢ ᙧ ≧ ࡣ 㸪2 ࡘ ࡢ ษ ࢀ ล ࢆ ࡶ ࡘ ࡡ ࡌ ࢀ ࢻ ࣜ ࣝ 㸦 ࢶ ࢖ ࢫ ࢺ ࢻ

ࣜ ࣝ 㸧 ࡀ ୍ ⯡ ⓗ ࡛ 㸪 ୺ ࡜ ࡋ ࡚ 㧗㏿ ᗘ ᕤ ල 㗰 ࡲ ࡓ ࡣ ㉸ ◳ ࡛ స ࡽ ࢀ ࡚ ࠸ ࡿ 㸬 ࢻ ࣜ ࣝ ඛ ➃ ࡢ ࢳ ࢮ ࣝ ࢚ ࢵ ࢪ 㒊 ࡛ ࡣ 㸪ࡍ ࡃ ࠸ ゅ ࡀ ㈇ ࡛ 㸪ษ ๐ ㏿ ᗘ ࡀ 0 ࡟ ㏆ ࡃ 㸪ษ ๐ ࡜ ࠸ ࠺ ࡼ ࡾ ࡶ ᢲ ࡋ ㎸ ࡴ ≧ ែ ࡟ ࡞ ࡿ ࡓ ࡵ 㸪ຍ ᕤ ⢭ ᗘ ࡀ ᝏ ࡃ ࡞ ࡾ ࡸ ࡍ

࠸ 㸬ࡲ ࡓ 㸪✰ ࡀ ῝ ࡃ ࡞ ࡿ ࡯ ࡝ ษ ࡾ ࡃ ࡎ ࡢ ᤼ ฟ ࡀ ᅔ 㞴 ࡟ ࡞ ࡾ 㸪࠿ ࡘ ษ ๐ Ἔ ๣

࡟ ࡼ ࡿ ෭ ༷ స ⏝ ࡀ ప ୗ ࡋ 㸪ᕤ ල ᦶ ⪖ ࡸ ᕤ ල ᢡ ᦆ ࡢ ཎ ᅉ ࡜ ࡞ ࡿ ࡇ ࡜ ࡀ ▱ ࡽ ࢀ

࡚ ࠸ ࡿ 㸬ࡇ ࡢ ࡼ ࠺ ࡟ ࢻ ࣜ ࣝ ຍ ᕤ ࡣ 㸪㧗 ရ ఩ ࠿ ࡘ ຠ ⋡ ⓗ ࡟ ຍ ᕤ ࢆ ⾜ ࠺ ࡇ ࡜ ࡣ 㞴 ࡋ ࠸ ሙ ྜ ࡀ ࠶ ࡿ ࡀ 㸪ከ ࡃ ࡢ 㒊 ရ ࡛ ᚲ せ ࡜ ࡉ ࢀ ࡚ ࠸ ࡿ ࡇ ࡜ ࠿ ࡽ 㸪ᚑ ᮶ ࠿ ࡽ

ᩘ ከ ࡃ ࡢ ◊ ✲ ࡀ ሗ ࿌ ࡉ ࢀ ࡚ ࠸ ࡿ 㸬௨ ୗ ࡟ ᮏ ㄽ ᩥ ࡛ ᑐ ㇟ ࡜ ࡋ ࡚ ࠸ ࡿ ࢻ ࣜ ࣝ ඛ

➃ ࡢ 㣗 ࠸ ௜ ࡁ ᫬ ࡟ ࠾ ࡅ ࡿ ᣲ ື ࡜ ᑠ ᚄ ࢻ ࣜ ࣝ ຍ ᕤ ᢏ ⾡ ඲ ⯡ ࡟ 㛵㐃 ࡋ ࡓ ◊ ✲

ࢆ ㏙ ࡭ ࡿ 㸬

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7

1.2.1 㣗㣗 ࠸ ௜ ࡁ ᫬ ࡢ ࢻ ࣜ ࣝ ඛ ➃ ࡢ ᣲ ື

ࢻ ࣜ ࣝ ඛ ➃ ࡀ ⿕ ๐ ᮦ ࡟ ᥋ ゐ ࡋ ࡓ ┤ ᚋ ࡢ ᣲ ື ࡟ ࡘ ࠸ ࡚ 㸪 ὠ ᯞ ࡽ ^{1 - 6 )}㸪 ⸨ ஭

ࡽ 1 - 7 ) 1 - 8 )㸪 బ ஂ 㛫 ࡽ ^{1 - 9 )}㸪 ຍ ⸨ ࡽ ^{1 - 1 0 )}㸪 ❑ ⏣ ࡽ ^{1 - 1 1 )}࡞ ࡝ ᩘ ከ ࡃ ࡢ ◊ ✲ ࡀ ⾜ ࢃ

ࢀ ࡚ ࠸ ࡿ 㸬ࡇ ࢀ ࡽ ࡢ ◊ ✲ ࡛ ࡣ 㸪ࢻ ࣜ ࣝ ඛ ➃ ࡀ ⿕ ๐ ᮦ ࡟ 㣗 ࠸ ௜ ࠸ ࡓ ┤ ᚋ 㸪ᅗ 1-6 ࡟ ♧ ࡍ ࡼ ࠺ ࡞ ኱ ࡁ ࡞ ୸ ࡳ ࢆ ࡶ ࡗ ࡓ ወ ᩘ ከ ゅ ᙧ ࡟ Ṍ ⾜ ࡍ ࡿ ⌧ ㇟ ࡀ Ⓨ ⏕ ࡍ

ࡿ ࡜ ሗ ࿌ ࡉ ࢀ ࡚ ࠸ ࡿ 㸬Ṍ ⾜ ⌧ ㇟ ࡣ 㸪✰ ࡢ ┿ ෇ ᗘ ࡞ ࡝ ࡢ ຍ ᕤ ⢭ ᗘ ࡣ ࡶ ࡜ ࡼ ࡾ

ࣛ ࢖ ࣇ ࣜ ࣥ ࢢ ࡟ ࡶ ᙳ 㡪 ࢆ ཬ ࡰ ࡋ 㸪῝ ✰ ຍ ᕤ ࡜ ࡶ ࡞ ࢀ ࡤ ✰ ࡢ ᭤ ࡀ ࡾ ࡸ ᕤ ල ᢡ ᦆ ࡟ ࡘ ࡞ ࡀ ࡾ ࠿ ࡡ ࡞ ࠸ ^{1 - 1 2 )}㸬 ࡇ ࡢ ࡼ ࠺ ࡞ Ṍ ⾜ ⌧ ㇟ ࡟ ࡘ ࠸ ࡚ ࡣ 㸪 ⮬ ບ ᣺ ື ࡢ

୍ ✀ ࡜ ぢ ࡞ ࡋ 㸪⌧ ㇟ゎ ᫂ ࡟ ྥ ࡅ ࡚ ◊ ✲ ࡀ 㐍 ࡵ ࡽ ࢀ ࡚ ࡁ ࡓ 㸬ࡑ ࡢ ୰ ࡛ 㸪ᕤ ල ඛ ➃ ᙧ ≧ ࡟ ╔ ┠ ࡋ ࡓ ⸨ ஭ ࡽ ^{1 - 7 )}࠾ ࡼ ࡧ బ ஂ 㛫 ࡽ ^{1 - 9 )}ࡢ ◊ ✲ ࡛ ࡣ 㸪2 ࡘ ࡢ ࢳ ࢮ

ࣝ ࢚ ࢵ ࢪ ࡢ ࢥ ࣮ ࢼ ࣮ ࢆ ᅇ ㌿ ୰ ᚰ ࡜ ࡋ ࡚ ࢻ ࣜ ࣝ ࡀ ஺ ஫ ࡟ ᣺ ࢀ ࡲ ࢃ ࡿ ࡜ ㄝ ᫂ ࡉ ࢀ ࡚ ࠸ ࡿ 㸬ࡉ ࡽ ࡟ 㸪Ṍ ⾜ ⌧ ㇟ ࢆ ᢚ ไ ࡍ ࡿ ࡓ ࡵ ࡟ ࡣ 㸪㧗 ๛ ᛶ ࡢ ࢻ ࣜ ࣝ ࡛ ᚤ ᑠ ㏦ ࡾ ࡟ ࡍ ࡿ 㸪ࡲ ࡓ ࡣ ࢳ ࢮ ࣝ ࢚ ࢵ ࢪ 㛗 ࡉ ࢆ 㛗 ࡃ ࡍ ࡿ ࡞ ࡝ ᵝ ࠎ ࡞ ⪃ ᐹ ࡀ ࡞ ࡉ

ࢀ ࡚ ࠸ ࡿ ࡀ 㸪Ṍ ⾜ ⌧ ㇟ ࡢ ᢚ ไ ࡟ ࡘ ࠸ ࡚ ⤫ ୍ ⓗ ࡞ ぢゎ ࡣ ࡞ ࡃ 㸪ᮍ ࡔ ୙ ᫂ ࡞ Ⅼ ࡀ ከ ࠸ 㸬

୍ ᪉ 㸪㏆ ᖺ ࢻ ࣜ ࣝ ࡢ ᑠ ᚄ ໬ ࡟ ࡜ ࡶ ࡞ ࠸ ࢻ ࣜ ࣝ ᚄ ࡟ ᑐ ࡍ ࡿ ᅇ ㌿ ᣺ ࢀ ࡢ ẚ ࡀ

኱ ࡁ ࡃ ࡞ ࡾ 㸪ຍ ᕤ ᣲ ື ࡟ ཬ ࡰ ࡍ ᅇ ㌿ ᣺ ࢀ ࡢ ᙳ 㡪 ࡀ ↓ ど ࡛ ࡁ ࡞ ࡃ ࡞ ࡗ ࡚ ࠸ ࡿ 㸬 ࡋ ࠿ ࡋ 㸪ࡇ ࢀ ࡽ ࡢ ◊ ✲ ࡛ ࡣ 㸪ᅇ ㌿ ᣺ ࢀ ࡀ ࢻ ࣜ ࣝ ඛ ➃ ࡢ ຍ ᕤ ᣲ ື ࡟ ཬ ࡰ ࡍ ᙳ 㡪 ࡣ ᫂ ࡽ ࠿ ࡟ ࡉ ࢀ ࡚ ࠸ ࡞ ࠸ 㸬 ࡑ ࡢ ࡼ ࠺ ࡞ ୰ 㸪 Ώ 㑓 ࡽ 1 - 1 3 ) 1 - 1 4 )ࡢ ◊ ✲ ࡛ ࡣ 㸪 ᅇ ㌿ ᣺ ࢀ ࡢ ࠶ ࡿ ࢻ ࣜ ࣝ ࡀ ⿕ ๐ ᮦ ࡟ 㣗 ࠸ ௜ ࠸ ࡓ ┤ ᚋ ࠿ ࡽ ᚎ ࠎ ࡟ ࢻ ࣜ ࣝ ඛ ➃

㸦ฟ඾㸸⩝Ⓩⱱ஧㸸ᶵᲔຍᕤࡢ࣏࣡ࣥ࢖ࣥࢺࣞࢵࢫࣥ㸪࡛࠿∧ᢏ⬟ࣈࢵࢡࢫս㸪(ᰴ)኱Ἑฟ∧㸪(2000),111㸧

ᅗ 1-6 ࢻ ࣜ ࣝ ඛ ➃ 㣗 ࠸ ௜ ࡁ ┤ ᚋ ࡢ ✰ ᗏ 㠃

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8

ࡀ ᅇ ㌿ ୰ ᚰ ࡟ ཰ ᮰ ࡋ ࡚ ࠸ ࡃ ⌧ ㇟㸪࠸ ࢃ ࡺ ࡿ ồ ᚰ ⌧ ㇟ ࢆ 㧗㏿ ᗘ ࢝ ࣓ ࣛ ࡛ ほ ᐹ ࡋ ࡚ ࠸ ࡿ 㸬 ࡲ ࡓ 㸪 ᱝ ⏣ ࡽ ^{1 - 1 5 )}ࡢ ◊ ✲ ࡛ ࡣ 㸪 ࢻ ࣜ ࣝ ࢆ ඛ ➃ ࡀ ෇ 㗹 ≧ ࡢ ୸ Წ ࡟

⨨ ࡁ ᥮ ࠼ 㸪ồ ᚰ ⌧ ㇟ ࡟ ࡘ ࠸ ࡚ ᩘ ᘧ ࣔ ࢹ ࣝ ࢆ ᥦ ᱌ ࡋ 㸪ᐇ 㦂 ࡟ ࡼ ࡾ ࡑ ࡢ ᳨ ド ࢆ

⾜ ࡗ ࡚ ࠸ ࡿ 㸬ࡋ ࠿ ࡋ 㸪ᐇ 㝿 ࡢ ࢻ ࣜ ࣝ ඛ ➃ ࡟ ࡣ ษ ࢀ ล ࡸ ࢳ ࢮ ࣝ ࢚ ࢵ ࢪ ࡞ ࡝ ࡀ Ꮡ ᅾ ࡋ ࡚ ࠾ ࡾ 㸪 ࡇ ࢀ ࡽ ࡢ ᙳ 㡪 ࡲ ࡛ ࡣ ᳨ ウ ࡉ ࢀ ࡚ ࠸ ࡞ ࠸ 㸬

1.2.2 ᑠᑠ ᚄ ࢻ ࣜ ࣝ ຍ ᕤ ࡟ 㛵 ࡍ ࡿ ◊ ✲

ᚑ ᮶ ࠿ ࡽ ⾜ ࢃ ࢀ ࡚ ࡁ ࡓ ᑠ ᚄ ࢻ ࣜ ࣝ ຍ ᕤ ࡟ 㛵 ࡍ ࡿ ◊ ✲ ࢆ ኱ ู ࡍ ࡿ ࡜ 㸪ḟ ࡢ

ࡼ ࠺ ࡟ ࡞ ࡿ 㸬

ձ ᑠ ᚄ ࢻ ࣜ ࣝ ࡢ ຍ ᕤ ᣲ ື ࡟ 㛵 ࡍ ࡿ ◊ ✲ 1 - 1 3 ) 1 - 1 6 )

ղ ᑠ ᚄ ࢻ ࣜ ࣝ ຍ ᕤ ࡢ ຍ ᕤ ≉ ᛶ ࡟ ཬ ࡰ ࡍ ⿕ ๐ ᮦ ࡢ ᙳ 㡪 1 - 1 7 ) 1 - 1 8 )

ճ ࣉ ࣜ ࣥ ࢺ 㓄 ⥺ ᯈ ≉ ᭷ ࡢ ຍ ᕤ ⌧ ㇟ ࡢ ゎ ᫂ 1 - 5 ) 1 - 1 3 ) 1 - 1 9 ) 1 - 2 0 ) 1 - 2 1 ) 1 - 2 2 )

մ ᑠ ᚄ ࢻ ࣜ ࣝ ຍ ᕤ ⏝ ࡢ ຍ ᕤ ⿦ ⨨ ࡸ ᢡ ᦆ 㜵 Ṇ ࢩ ࢫ ࢸ ࣒ ࡢ 㛤 Ⓨ 1 - 2 3 ) 1 - 2 4 ) 1 - 2 5 )

յ ᑠ ᚄ ࢻ ࣜ ࣝ ࡢ ඛ ➃ ᙧ ≧ ࡸ ⾲㠃 ᨵ ㉁ ࡟ ࡼ ࡿ ✰ ࡢ 㧗 ရ ఩ ໬ 1 - 2 6 ) 1 - 2 7 ) 1 - 2 8 ) 1 - 2 9 )

ࡇ ࢀ ࡽ ࡢ ◊ ✲ ࡟ ࡼ ࡾ 㸪ᑠ ᚄ ࢻ ࣜ ࣝ ຍ ᕤ ࡢ ᢏ ⾡ ࡀ 㐍 Ṍ ࡋ 㸪ࡑ ࢀ ࡟ ࡜ ࡶ ࡞ ࠸ ᕷ ሙ ࡢ せ ồ ࡶ 㧗 ᗘ ໬ 㸪」㞧 ໬ ࡋ ࡚ ࡁ ࡓ 㸬

ձ ࡣ 㸪୺ ࡟ ࢫ ࣛ ࢫ ࢺ ࡸ ࢺ ࣝ ࢡ ࡜ ࠸ ࡗ ࡓ ษ ๐ ຊ ࢆ ᐃ ࡍ ࡿ ࡇ ࡜ ࡛ ຍ ᕤ ⌧ ㇟ ࡢ ゎ ᫂ ࢆ ⾜ ࡗ ࡚ ࠸ ࡿ ࡶ ࡢ ࡛ ࠶ ࡿ 㸬ղ ࡣ 㸪㏻ ᖖ ࡢ ኱ ᚄ ࢻ ࣜ ࣝ ࡛ ࡣ ᙳ 㡪 ࡢ ᑡ ࡞

࠸ ⿕ ๐ ᮦ ⤖ ᬗ ⢏ ࢧ ࢖ ࢬ ࡢ ᙳ 㡪 ࡸ ẕ ᮦ ࡟ ᙳ 㡪 ࡢ ࡞ ࠸ ⠊ ᅖ ෆ ࡛ ࡢ ᮦ ᩱ ῧ ຍ ࡟

࡜ ࡶ ࡞ ࠺ ⿕ ๐ ᛶ ᨵ ၿ ࡞ ࡝ ࡟ ࡘ ࠸ ࡚ ㏙ ࡭ ࡚ ࠸ ࡿ 㸬㉸㧗㏿ ࢫ ࣆ ࣥ ࢻ ࣝ ᦚ ㍕ ࡢ ᶵ Ე ࡛ ຍ ᕤ ࢆ ⾜ ࠺ ճ ࡛ ࡣ 㸪ࣉ ࣜ ࣥ ࢺ ᇶ ᯈ ≉ ᭷ ࡢ ࢞ ࣛ ࢫ ࢡ ࣟ ࢫ ࡢ ᙳ 㡪 ࡢ ゎ ᫂ ࡸ ษ ๐ ຊ࣭ษ ๐ ᗘ ィ ࡟ ࡼ ࡿ ✰ ຍ ᕤ ⌧ ㇟ ࡢ ゎ ᫂ ࡞ ࡝ ࡀ ⾜ ࢃ ࢀ ࡚ ࠸ ࡿ 㸬ࡲ ࡓ 㸪 ᚤ ⣽ ຍ ᕤ ࢆ ⾜ ࠺ ୖ ࡛ 㸪 ຍ ᕤ ⿦ ⨨ ࡸ ࿘ ㎶ ෬ ල ࡀ ຍ ᕤ ࡟ ୚ ࠼ ࡿ ᙳ 㡪 ࡣ ኱ ࡁ ࠸ 㸬 ࡑ ࡢ ࡼ ࠺ ࡞ ୰ ࡛ 㸪մ ࡢ ᑠ ᚄ ࢻ ࣜ ࣝ ຍ ᕤ ⏝ ⿦ ⨨ ࡢ 㛤 Ⓨ ࡶ 㐍 ࢇ ࡛ ࠸ ࡿ 㸬ල య ⓗ

࡟ ࡣ 㸪ᑠ ᚄ ࢻ ࣜ ࣝ ࡢ ኱ ࡁ ࡞ ㄢ㢟 ࡢ 㸯 ࡘ ࡛ ࠶ ࡿ ᕤ ල ᢡ ᦆ ᛶ ᨵ ၿ ࡢ ࡓ ࡵ ࡢ ᢡ ᦆ 㜵 Ṇ ࢩ ࢫ ࢸ ࣒ ࡢ 㛤 Ⓨ ࡛ ࠶ ࡿ 㸬ࡇ ࢀ ࡽ ࡣ 㸪୺ ࡟ ษ ๐ ຊ ࢆ ࣔ ࢽ ࢱ ࣜ ࣥ ࢢ ࡍ ࡿ ࡇ

࡜ ࡛ ␗ ᖖ ್ ࡟ ࡞ ࡗ ࡓ ሙ ྜ ࡟ ຍ ᕤ ࢆ ೵ Ṇ ࡍ ࡿ ࢩ ࢫ ࢸ ࣒ ࡛ ࠶ ࡿ 㸬᭱ ᚋ ࡟ 㸪୺ ࡟ ᕤ ල ࣓ ࣮ ࢝ ࣮ ࡀ ୺ య ࡜ ࡞ ࡗ ࡚ ◊ ✲ 㛤 Ⓨ ࡀ 㐍 ࡵ ࡽ ࢀ ࡚ ࡁ ࡓ յ ࡢ ◊ ✲ ࡶ ⾜ ࡞

ࢃ ࢀ ࡚ ࠸ ࡿ 㸬ࡇ ࢀ ࡽ ࡢ ◊ ✲ ࡛ ࡣ 㸪ᑠ ᚄ ࢻ ࣜ ࣝ ຍ ᕤ ࡟ 㐺 ࡋ ࡓ ࢻ ࣜ ࣝ ඛ ➃ ᙧ ≧ ࡀ ᥦ ᱌ ࡉ ࢀ ࡚ ࠾ ࡾ 㸪㏆ ᖺ ࡛ ࡣ L/D=100 ⛬ ᗘ ࡢ ✰ ຍ ᕤ ࡲ ࡛ ⾜ ࢃ ࢀ ࡿ ࡼ ࠺ ࡟ ࡞

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9

ࡗ ࡚ ࠸ ࡿ 㸬ࡲ ࡓ 㸪ᑠ ᚄ ࢻ ࣜ ࣝ ࡢ ⾲㠃 ᨵ ㉁ ࢆ ⾜ ࠺ ࡇ ࡜ ࡛ ษ ๐ ᛶ ࢆ ᨵ ၿ ࡍ ࡿ ᡭ ἲ ࡶ ᳨ ウ ࡉ ࢀ ࡚ ࠸ ࡿ 㸬

ࡇ ࡢ ࡼ ࠺ ࡟ ᕤ ල ᢡ ᦆ ᛶ ࡢ ᨵ ၿ 㸪ຍ ᕤ ⢭ ᗘ ࡢ ྥ ୖ 㸪✰ ቨ 㠃 ရ ఩ ࡢ ᨵ ၿ ࢆ ┠

ⓗ ࡟ ᵝ ࠎ ࡞ ᪉ 㠃 ࠿ ࡽ ᑠ ᚄ ࢻ ࣜ ࣝ ࡟ 㛵 ࡍ ࡿ ◊ ✲ ࡀ 㐍 ࡵ ࡽ ࢀ ࡚ ࡁ ࡓ 㸬 ࡋ ࠿ ࡋ 㸪

᭱ ㏆ ࡛ ࡣ ࣉ ࣜ ࣥ ࢺ 㓄 ⥺ ᯈ ࡢ ✰ ࡢ ᑠ ᚄ ໬ 㸪᪂ ࡋ ࠸ ࣉ ࣜ ࣥ ࢺ 㓄 ⥺ ᯈ ᮦ ᩱ ࡢ 㛤 Ⓨ

࡞ ࡝ ࡟ ࡼ ࡾ ࡉ ࡽ ࡞ ࡿ ◊ ✲ ࡀ ᚲ せ ࡜ ࡞ ࡗ ࡚ ࠸ ࡿ 㸬

1.3 ࣉ ࣉ ࣜ ࣥ ࢺ 㓄 ⥺ ᯈ ࡢ ࢻ ࣜ ࣝ ຍ ᕤ

1.3.1 ࣉ ࣜ ࣥ ࢺ 㓄 ⥺ ᯈ ࡢ ຍ ᕤ ✰ ရ ఩

ࣉ ࣜ ࣥ ࢺ 㓄 ⥺ ᯈ ࡟ ࡣ 㸪ୖ ㏙ ࡢ ࡼ ࠺ ࡟ ࢫ ࣝ ࣮ ࣍ ࣮ ࣝ ຍ ᕤ ᚋ ࡟ ᑟ ㏻ ⏝ ࡢ ࡵ ࡗ ࡁ ฎ ⌮ ࡀ ᪋ ࡉ ࢀ ࡿ 㸬ࢻ ࣜ ࣝ ຍ ᕤ ቨ 㠃 ࡢ พ ฝ ࡀ ኱ ࡁ ࠸ ሙ ྜ 㸪 ᗘ ኚ ື ࡢ ࠶ ࡿ

౑ ⏝ ⎔ ቃ ୗ ࡛ ࡣ 㸪พ ฝ ࡀ ㉳ Ⅼ ࡜ ࡞ ࡾ ட ⿣ ࡀ 㐍 ᒎ ࡍ ࡿ 㸬ࡑ ࡢ ⤖ ᯝ 㸪᩿ ⥺ ࡢ ཎ ᅉ ࡟ ࡞ ࡿ 㸬ࡲ ࡓ 㸪ࣉ ࣜ ࣥ ࢺ 㓄 ⥺ ᯈ ࡢ ࢻ ࣜ ࣝ ຍ ᕤ ࡣ 㸪⏕ ⏘ ᛶ ྥ ୖ ࢆ ┠ ⓗ ࡟ 」

ᩘ ᯛ 㔜 ࡡ ࡚ ྠ ᫬ ࡟ ㈏㏻ ✰ ࢆ ຍ ᕤ ࡍ ࡿ ࡓ ࡵ 㸪 ✰ ῝ ࡉ ࡶ ῝ ࡃ 㸪L/D ࡀ 10㹼20

࡟ ࡶ ࡞ ࡾ 㸪㣗 ࠸ ௜ ࡁ ᫬ ࡢ ఩ ⨨ ࡎ ࢀ ࡀ ຍ ᕤ ⢭ ᗘ ࡟ ኱ ࡁ ࡃ ᙳ 㡪 ࢆ ཬ ࡰ ࡍ 㸬௨ ୖ ࡢ ࡇ ࡜ ࠿ ࡽ 㸪୍ ⯡ ⓗ ࡟ ࣉ ࣜ ࣥ ࢺ 㓄 ⥺ ᯈ ࡢ ຍ ᕤ ✰ ࡟ ồ ࡵ ࡽ ࢀ ࡿ ရ ఩ ࡣ ཝ ࡋ ࡃ 㸪

✰ ఩ ⨨ ⢭ ᗘ ࡜ ✰ ቨ 㠃 ⢒ ࡉ ࡀ ཷ ὀ ඛ ࡢ ௙ ᵝ ᭩ ࡞ ࡝ ࡟ つ ᐃ ࡉ ࢀ ࡚ ࠸ ࡿ 㸬ࡉ ࡽ ࡟ 㸪 1.1.3 㡯 ࡛ ㏙ ࡭ ࡓ ࡼ ࠺ ࡟ ࢞ ࣛ ࢫ ᕸ ࡞ ࡝ ࡢ ᇶ ᮦ ࡟ ᶞ ⬡ ࢆ ྵ ᾐ ࡋ ࡓ 」 ྜ ᮦ ᩱ ࡛

࠶ ࡿ ࣉ ࣜ ࣥ ࢺ 㓄 ⥺ ᯈ ࡣ 㸪ษ ࡾ ࡃ ࡎ ࡢ ᤼ ฟ ୙ Ⰻ 㸪⇕ ఏ ᑟ ⋡ ࡢ ప ࠸ ᶞ ⬡ ࡟ ࡼ ࡿ ษ ๐ ᗘ ࡢ ୖ ᪼ ࡞ ࡝ ࡀ ᠱ ᛕ ࡉ ࢀ ࡿ 㸬≉ ࡟ ✰ ຍ ᕤ ᫬ ࡢ ษ ๐ ᗘ ࡀ ⤯ ⦕ ᮦ ᩱ ࡢ

࢞ ࣛ ࢫ ㌿ ⛣ ᗘ ࡛ ࠶ ࡿ ⣙ 200Υ ࢆ ㉸ ࠼ ࡿ ሙ ྜ 㸪 ✰ ቨ 㠃 ရ ఩ ࡢ ప ୗ ࢆ ᣍ ࡃ ༴ 㝤 ᛶ ࡀ ࠶ ࡿ 㸬ࡲ ࡓ 㸪ᕤ ල ๛ ᛶ ࡀ ప ࠸ ࡓ ࡵ 㸪㣗 ࠸ ௜ ࡁ ᫬ ࡢ ᗙ ᒅ ࡸ ຍ ᕤ ୰ ࡢ ࢻ

ࣜ ࣝ ᭤ ࡀ ࡾ ^{1 - 1 2 )}࡞ ࡝ ࡀ Ⓨ ⏕ ࡍ ࡿ ࡜ ຍ ᕤ ⢭ ᗘ ࡟ ኱ ࡁ ࡞ ᙳ 㡪 ࢆ ཬ ࡰ ࡍ 㸬ࡑ ࡢ ᑐ

⟇ ࡜ ࡋ ࡚ 㸪 ୺ ㍈ ᅇ ㌿㏿ ᗘ ࡢ 㧗㏿ ໬ 㸪 ᕤ ල ࡢ ᙧ ≧ ࡸ ࢥ ࣮ ࢸ ࢕ ࣥ ࢢ ᮦ ࡢ ᨵ Ⰻ 㸪 ຍ ᕤ ⏝ ⿵ ຓ ࢩ ࣮ ࢺ 㸪࠸ ࢃ ࡺ ࡿ ࢚ ࣥ ࢺ ࣜ ࣮ ࢩ ࣮ ࢺ ࡢ 㧗 ᶵ ⬟ ໬ 㸪㉸㡢 Ἴ ᣺ ື ࢆ

⏝ ࠸ ࡓ ຍ ᕤ ἲ ࡞ ࡝ ࡀ ᥦ ᱌ ࡉ ࢀ ࡚ ࠸ ࡿ ࡀ ࡑ ࢀ ࡽ ࡢ ࡉ ࡽ ࡞ ࡿ 㧗 ᗘ ໬ ࡀ ồ ࡵ ࡽ

ࢀ ࡚ ࠸ ࡿ 㸬

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10

1.3.2 ࣉࣉ ࣜ ࣥ ࢺ 㓄 ⥺ ᯈ ⏝ ࢻ ࣜ ࣝ ࡢ ⣲ ᮦ

ࣉ ࣜ ࣥ ࢺ 㓄 ⥺ ᯈ ࡣ 㟁 Ꮚ ᶵ ჾ ࡟ ᦚ ㍕ ࡉ ࢀ ࡿ ࡇ ࡜ ࠿ ࡽ 㸪✰ ຍ ᕤ ୰ ࡟ ษ ๐ Ἔ ࢆ

౑ ⏝ ࡛ ࡁ ࡞ ࠸ 㸬ࡑ ࡢ ࡓ ࡵ 㸪ࢻ ࣜ ࣝ ⣲ ᮦ ࡟ ࡣ 㧗 ◳ ࡉ ࡜ ⪏ ᦶ ⪖ ᛶ ࡟ ඃ ࢀ ࡓ ㉸

◳ ࡀ ୍ ⯡ ⓗ ࡟ ⏝ ࠸ ࡽ ࢀ ࡿ 㸬

㉸ ◳ ࡢ ୺ ࡞ ᡂ ศ ࡣ 㸪ࢱ ࣥ ࢢ ࢫ ࢸ ࣥ ࢝ ࣮ ࣂ ࢖ ࢻ ࡜ ࢥ ࣂ ࣝ ࢺ ࡛ 㸪ᚲ せ ࡟ ᛂ ࡌ

࡚ ࢳ ࢱ ࣥ ࢝ ࣮ ࣂ ࢖ ࢻ 㸪ࢱ ࣥ ࢱ ࣝ 㸪ࢽ ࢜ ࣈ ࡀ ῧ ຍ ࡉ ࢀ ࡿ 㸬㏆ ᖺ ࡛ ࡣ 㸪 ࢱ ࣥ ࢢ ࢫ ࢸ ࣥ ࢝ ࣮ ࣂ ࢖ ࢻ ࡢ ⢏ Ꮚ ᚤ ⣽ ໬ ࡟ ࡼ ࡾ ᖹ ᆒ ⢏ ᚄ ࡀ 0.3μm ⛬ ᗘ ࡜ ࡞ ࡾ 㸪◳ ࡉ

࡜ ᢠ ᢡ ຊ ࡢ ୧ ≉ ᛶ ࡢ ྥ ୖ ࡀ 㐍 ࢇ ࡛ ࠸ ࡿ 㸬

1.3.3 ࣉ ࣜ ࣥ ࢺ 㓄 ⥺ ᯈ ࡢ ࢻ ࣜ ࣝ ຍ ᕤ ἲ

ࣉ ࣜ ࣥ ࢺ 㓄 ⥺ ᯈ ࡢ ✰ ຍ ᕤ ࡣ 㸪୍ ⯡ ⓗ ࡟ ᑓ ⏝ ຍ ᕤ ᶵ ࡛ ⾜ ࢃ ࢀ ࡚ ࠸ ࡿ 㸬ࡇ

ࢀ ࡣ 㸪 ᅗ 1-7 ࡟ ♧ ࡍ ࡼ ࠺ ࡟ NC ࣇ ࣛ ࢖ ࢫ ┙ ࡜ ྠ ࡌ ᵓ 㐀 ࡛ 㸪 ࣋ ࢵ ࢻ ࡜ ࢥ ࣛ ࣒

࡟ ྲྀ ࡾ ௜ ࡅ ࡽ ࢀ ࡓ 3 ㍈ ࡢ ࢧ ࣮ ࣎ ࣔ ࣮ ࢱ ࡛ ࢸ ࣮ ࣈ ࣝ ࡜ ୺ ㍈ ࢆ ື ࠿ ࡋ 㸪z ㍈ ࡟ ࡣ ࢫ ࣆ ࣥ ࢻ ࣝ ࡀ ᦚ ㍕ ࡉ ࢀ ࡚ ࠸ ࡿ 㸬

᭱ ㏆ ࡛ ࡣ 㸪⏕ ⏘ ຠ ⋡ ࡜ ຍ ᕤ ⢭ ᗘ ࡢ ྥ ୖ ࢆ ┠ ⓗ ࡟ z ㍈ ࡢ ࡳ ࣜ ࢽ ࢔ ࣔ ࣮ ࢱ 㥑

ື ࡜ ࡞ ࡗ ࡚ ࠸ ࡿ 㸬 ࡉ ࡽ ࡟ 㸪 ྠ ᫬ ࡟ 」 ᩘ ࡢ ᇶ ᯈ ࢆ ຍ ᕤ ࡛ ࡁ ࡿ ࡼ ࠺ ࡟ 4㹼6 ㍈

⛬ ᗘ ࡢ ከ ㍈ ࢫ ࣆ ࣥ ࢻ ࣝ ࣊ ࢵ ࢻ ࢆ ᦚ ㍕ ࡋ ࡚ ࠸ ࡿ ࡶ ࡢ ࡶ ࠶ ࡿ 㸬ࡲ ࡓ 㧗㏿ ຍ ᕤ ࢆ ᐇ ⌧ ࡍ ࡿ ࡓ ࡵ 㸪㏆ ᖺ ࡛ ࡣ ᅇ ㌿㏿ ᗘ ࡀ ẖ ศ ⣙ 35 ୓ ᅇ ㌿ ࡢ ຍ ᕤ ᶵ ࡶ ㈍ ኎ ࡉ ࢀ

࡚ ࠸ ࡿ 㸬

୍ ⯡ ⓗ ࡞ 㔠 ᒓ ຍ ᕤ ⏝ ࡢ ᶵ Ე ࡜ ␗ ࡞ ࡿ Ⅼ ࡣ 㸪ຍ ᕤ ἲ ࡜ ୺ ㍈ ඛ ➃ ࡢ ᵓ 㐀 ࡟ ࠶

ࡿ 㸬 ᅗ 1-8 ࡟ ♧ ࡍ ࡼ ࠺ ࡟ ⿕ ๐ ᮦ ࡛ ࠶ ࡿ ࣉ ࣜ ࣥ ࢺ 㓄 ⥺ ᯈ ࢆ 」 ᩘ ᯛ 㔜 ࡡ ࡓ ᚋ 㸪 ࡑ ࡢ ୖ 㠃 ࡟ ࢚ ࣥ ࢺ ࣜ ࣮ ࢩ ࣮ ࢺ ࡜ ࿧ ࡤ ࢀ ࡿ 㣗 ࠸ ௜ ࡁ ᛶ ྥ ୖ ࢆ ┠ ⓗ ࡟ ࡋ ࡓ ⿵

ຓ ᮦ ࢆ ࢭ ࢵ ࢺ ࡋ 㸪ࣉ ࣜ ࣥ ࢺ 㓄 ⥺ ᯈ ࡢ ୗ 㠃 ࡟ ࡣ ᤞ ࡚ ᮦ ࡜ ࡋ ࡚ ࣂ ࢵ ࢡ ࢔ ࢵ ࣉ ࣎

࣮ ࢻ ࢆ ࢭ ࢵ ࢺ ࡍ ࡿ 㸬ࡇ ࢀ ࡽ ࡢ ᾋ ࡁ ࢆ ᢚ ࠼ ࡿ ࡓ ࡵ 㸪ᶵ Ე ࡟ ࡣ ᅗ 1-9 ࡟ ♧ ࡍ ࣉ

ࣞ ࢵ ࢩ ࣕ ࣮ ࣇ ࢵ ࢺ ࡜ ࿧ ࡤ ࢀ ࡿ ᶵ ᵓ ࡀ ྲྀ ࡾ ௜ ࡅ ࡽ ࢀ ࡚ ࠸ ࡿ 㸬 ࡇ ࢀ ࡣ 㸪 ᅗ 1-9

࡟ ♧ ࡍ ࡼ ࠺ ࡟ ඛ ➃ ࣈ ࢵ ࢩ ࣗ ࡛ ⿕ ๐ ᮦ ࢆ ୖ ࠿ ࡽ ୗ ᪉ ྥ ࡟ ᢚ ࠼ ࡞ ࡀ ࡽ ࢻ ࣜ ࣝ ຍ ᕤ ࡋ 㸪ࡉ ࡽ ࡟ ຍ ᕤ ୰ ษ ࡾ ࡃ ࡎ ࢆ 㞟 ሻ ᶵ ࡛ ྾ ᘬ ࡍ ࡿ ᵓ 㐀 ࡛ ࠶ ࡿ 㸬ᙧ ≧ ࡢ ␗

࡞ ࡿ ඛ ➃ ࣈ ࢵ ࢩ ࣗ ࡣ 㸪 ᕤ ල ᚄ ࡟ ᛂ ࡌ ࡚ ⮬ ື ஺ ᥮ ࡛ ࡁ ࡿ 㸬

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11

z

x y

㸦ฟ඾㸸ὠᆏⱥኵ㸸≉㞟㟁Ꮚᅇ㊰ᇶᯈࡢࢻ࣭࣮ࣜࣝࣝࢱຍᕤධ㛛㸪JPCA NEWS March2010㸧

ᅗ 1-7 ࣉ ࣜ ࣥ ࢺ ᇶ ᯈ ✰ ຍ ᕤ ᶵ ࡢ ᵓ 㐀

ᅗ1-8 ࣉࣜࣥࢺ㓄⥺ᯈࡢࢭࢵࢸ࢕ࣥࢢ ᅗ1-9 ࣉࣜࣥࢺᇶᯈຍᕤᶵࡢ୺㍈㒊

1.3.4 ࢚࢚ ࣥ ࢺ ࣜ ࣮ ࢩ ࣮ ࢺ ࡟ ࡘ ࠸ ࡚

࢚ ࣥ ࢺ ࣜ ࣮ ࢩ ࣮ ࢺ ࡟ ồ ࡵ ࡽ ࢀ ࡿ ᮲ ௳ ࡣ 㸪 ୺ ࡟ ḟ ࡢ 4 Ⅼ ࡛ ࠶ ࡿ 㸬 ձ Ⰻ ዲ ࡞ 㣗 ࠸ ௜ ࡁ ᛶ ࢆ ᭷ ࡍ ࡿ ࡇ ࡜ 㸬

ղ ✰ ቨ 㠃 ⢒ ࡉ ࢆ ప ῶ ࡉ ࡏ ࡿ ࡇ ࡜ 㸬 ճ ᕤ ල ᑑ ࿨ ࢆ ᘏ ࡤ ࡍ ࡇ ࡜ 㸬

մ ࣉ ࣜ ࣥ ࢺ 㓄 ⥺ ᯈ ࡢ 㔜 ࡡ ᯛ ᩘ ࢆ ቑ ࡸ ࡏ ࡿ ࡇ ࡜ 㸬

࢚ ࣥ ࢺ ࣜ ࣮ ࢩ ࣮ ࢺ ࡣ 㸪ୖ ㏙ ࡢ ձ 㹼 մ ࡢ ᮲ ௳ ࢆ ‶ ࡓ ࡍ ࡓ ࡵ ࡟ 㸪㏆ ᖺ 㸪࢔ ࣝ

࣑ ࢽ ࢘ ࣒ ᯈ ࡢ ୖ 㠃 ࡟ ᶞ ⬡ ࢆ ሬ ᕸ ࡋ ࡓ ࡶ ࡢ ࡀ ᬑ ཬ ࡋ ࡚ ࠸ ࡿ 㸬₶ ⁥ ࡸ ෭ ༷ ࡢ ᶵ

⬟ ࢆ ࡶ ࡓ ࡏ ࡓ ᶞ ⬡ ࡣ 㸪࢔ ࣝ ࣑ ࢽ ࢘ ࣒ ࡢ ษ ࡾ ࡃ ࡎ ࡜ ࡜ ࡶ ࡟ ࢻ ࣜ ࣝ ࡟ ᕳ ࡁ ௜ ࡁ 㸪

ࢻࣜࣝ

ᶞ⬡

㺏㺷㺮㺤㺑㺯㺒㺻㺢㺶㺎㺚㺎㺢

㺨㺼㺍㺖㺏㺍㺪㺽㺬㺼㺎㺢㺼

ࢻࣜࣝ

ຍᕤᶵࢸ࣮ࣈࣝ

㺪㺽㺶㺻㺢㓄⥺ᯈ

㺪㺽㺸㺍㺚㺊㺎㺪㺍㺢

ඛ➃ࣈࢵࢩࣗ

x z

x

x x y y

y

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12

ษ ๐ Ἔ ࡜ ྠ ᵝ ࡢ ຠ ᯝ ࢆ Ⓨ ᥹ ࡍ ࡿ ࡜ ⪃ ࠼ ࡽ ࢀ ࡚ ࠸ ࡿ 㸬〇㐀 ⌧ ሙ ࡛ ࡣ 㸪 ┤ ᚄ

0.2mm ௨ ୗ ࡢ ࢻ ࣜ ࣝ ࡟ ࡘ ࠸ ࡚ ୺ ࡟ ᶞ ⬡ ௜ ࡁ ࢚ ࣥ ࢺ ࣜ ࣮ ࢩ ࣮ ࢺ ࡀ ౑ ⏝ ࡉ ࢀ

࡚ ࠸ ࡿ 㸬

ࡋ ࠿ ࡋ 㸪ᶞ ⬡ ௜ ࡁ ࢚ ࣥ ࢺ ࣜ ࣮ ࢩ ࣮ ࢺ ࡢ ᶞ ⬡ ᮦ ᩱ ࡟ 㛵 ࡍ ࡿ ⣔ ⤫ ❧ ࡚ ࡓ ◊ ✲ ࡣ ࡞ ࡃ 㸪 ຍ ᕤ ရ ఩ ࡟ ཬ ࡰ ࡍ ᶞ ⬡ ࡢ ᙳ 㡪 ࡣ ᫂ ࡽ ࠿ ࡟ ࡉ ࢀ ࡚ ࠸ ࡞ ࠸ 㸬 ࡉ ࡽ ࡟ 㸪 ᅜ ෆ ࡛ ౑ ⏝ ࡉ ࢀ ࡿ ᶞ ⬡ ࡣ 㸪✰ ෆ ࡟ ṧ Ꮡ ࡢ ྍ ⬟ ᛶ ࡀ ప ࠸ Ỉ ⁐ ᛶ ᶞ ⬡ ࡛ ࡞ ࡅ ࢀ ࡤ ࡞ ࡽ ࡞ ࠸ ࡜ ࠸ ࠺ Ⅼ ࠿ ࡽ 㑅 ᐃ ࡉ ࢀ ࡿ ᶞ ⬡ ࡶ 㝈 ࡽ ࢀ ࡚ ࠾ ࡾ 㸪≉ チ ࡢ ⦡ ࡾ ࡶ ࠶

ࡿ ࡇ ࡜ ࠿ ࡽ ࢚ ࣥ ࢺ ࣜ ࣮ ࢩ ࣮ ࢺ ࡢ 㛤 Ⓨ ࡟ 㐜 ࢀ ࡀ ฟ ࡚ ࠸ ࡿ 㸬

1.4

ᮏ ᮏ ◊ ✲ ࡢ ┠ ⓗ ࡜ ㄽ ᩥ ࡢ ᴫ せ

ࣉ ࣜ ࣥ ࢺ 㓄 ⥺ ᯈ ᮦ ᩱ ࡀ ⏘ ᴗ ࡢ Ⓨ ᒎ ࡟ ࡜ ࡶ ࡞ ࠸ 㞴 ຍ ᕤ ໬ ࡋ 㸪ࡉ ࡽ ࡟ ຍ ᕤ ࡉ

ࢀ ࡿ ✰ ࡢ ᑠ ᚄ ໬ ࡢ せ ᮃ ࡀ 㧗 ࡲ ࡿ ୰ ࡛ 㸪ຍ ᕤ ✰ ࡢ 㧗 ရ ఩ ໬ ࡀ ồ ࡵ ࡽ ࢀ ࡚ ࠸ ࡿ 㸬 ࡇ ࡢ ࡼ ࠺ ࡞ せ ồ ࢆ ‶ ㊊ ࡍ ࡿ ࡓ ࡵ ࡟ ࡣ 㸪ࢻ ࣜ ࣝ 㸪࢚ ࣥ ࢺ ࣜ ࣮ ࢩ ࣮ ࢺ 㸪ᕤ స ᶵ Ე ࡞ ࡝ ࡢ 㧗 ᛶ ⬟ ໬ ࢆ ᅗ ࡿ ࡜ ࡜ ࡶ ࡟ 㸪ᑠ ᚄ ࢻ ࣜ ࣝ ຍ ᕤ ࡢ ⌧ ㇟ゎ ᫂ ࡀ ୙ ྍ Ḟ ࡛

࠶ ࡿ 㸬

ࡑ ࡇ ࡛ ᮏ ◊ ✲ ࡛ ࡣ 㸪ึ ࡵ ࡟ ࣉ ࣜ ࣥ ࢺ 㓄 ⥺ ᯈ ࡢ ᑠ ᚄ ࢻ ࣜ ࣝ ࡢ ຍ ᕤ ≉ ᛶ ࡟ ࡘ

࠸ ࡚ ㏙ ࡭ 㸪ࡑ ࡢ ᚋ ㏆ ᖺ ᛴ ㏿ ࡟ ᬑ ཬ ࡋ ࡚ ࠸ ࡿ ᶞ ⬡ ௜ ࡁ ࢚ ࣥ ࢺ ࣜ ࣮ ࢩ ࣮ ࢺ ࡢ ຠ ᯝ ࢆ ᳨ ド ࡋ 㸪ᶞ ⬡ ࡜ ຍ ᕤ ရ ఩ ࡢ 㛵 ಀ ࡟ ࡘ ࠸ ࡚ ㄪ ࡭ ࡚ ࠸ ࡿ 㸬ࡉ ࡽ ࡟ ࡣ 㸪ຍ ᕤ

⢭ ᗘ ྥ ୖ ࢆ ┠ ⓗ ࡟ ᑠ ᚄ ࢻ ࣜ ࣝ ࡢ ຍ ᕤ ᣲ ື ࡢ ゎ ᫂ ࢆ ⾜ ࡗ ࡚ ࠸ ࡿ 㸬≉ ࡟ 㸪㣗 ࠸

௜ ࡁ ᫬ ࡢ ຍ ᕤ ᣲ ື ࡟ ཬ ࡰ ࡍ ᅇ ㌿ ᣺ ࢀ ࡢ ᙳ 㡪 ࢆ ゎ ᯒ ࡜ ᐇ 㦂 ࠿ ࡽ ᫂ ࡽ ࠿ ࡟ ࡋ

࡚ ࠸ ࡿ 㸬

௨ ୖ ࡢ ෆ ᐜ ࡟ ࡘ ࠸ ࡚ 㸪 ᮏ ㄽ ᩥ ࡛ ࡣ 7 ❶ ࡟ ศ ࡅ ࡚ ㏙ ࡭ ࡚ ࠾ ࡾ 㸪 ྛ ❶ ࡢ ᴫ せ ࡣ ௨ ୗ ࡢ ࡜ ࠾ ࡾ ࡛ ࠶ ࡿ 㸬

➨ 1 ❶ ࡛ ࡣ 㸪⥴ ㄽ ࡜ ࡋ ࡚ ᑠ ᚄ ࢻ ࣜ ࣝ ࡜ ࣉ ࣜ ࣥ ࢺ 㓄 ⥺ ᯈ ࡟ 㛵㐃 ࡋ ࡓ ᢏ ⾡ ື

ྥ ࠿ ࡽ ㏆ ᖺ ࡲ ࡛ ࡢ ◊ ✲ ෆ ᐜ ࡟ ࡘ ࠸ ࡚ ᴫ ᣓ ࡋ ࡚ ࠸ ࡿ 㸬ࡲ ࡓ 㸪ᑠ ᚄ ࢻ ࣜ ࣝ ຍ ᕤ ࡢ ᚲ せ ᛶ ࢆ ♧ ࡍ ࡇ ࡜ ࡛ 㸪 ᮏ ◊ ✲ ࡢ ⫼ ᬒ ࠾ ࡼ ࡧ ┠ ⓗ ࢆ ㏙ ࡭ ࡚ ࠸ ࡿ 㸬

➨ 2 ❶ ࡛ ࡣ 㸪 ࣉ ࣜ ࣥ ࢺ 㓄 ⥺ ᯈ ࡢ ࢻ ࣜ ࣝ ຍ ᕤ ≉ ᛶ ࡟ ࡘ ࠸ ࡚ 㸪ㄪ ࡭ ࡚ ࠸ ࡿ 㸬

୺ ࡟ ຍ ᕤ ୰ ࡢ ษ ๐ ຊ ࡜ ࢻ ࣜ ࣝ ࡢ ᣲ ື ࢆ ษ ๐ ᢬ ᢠ ࢭ ࣥ ࢧ 㸪㧗㏿ ᗘ ࢝ ࣓ ࣛ ࢆ ⏝

࠸ ࡚ ゎ ᫂ ࡋ 㸪ษ ๐ ᮲ ௳ ࡀ ຍ ᕤ ᚋ ࡢ ✰ ఩ ⨨ ⢭ ᗘ 㸪✰ ቨ 㠃 ⢒ ࡉ ࡟ ཬ ࡰ ࡍ ᙳ 㡪 ࢆ ㄪ ࡭ ࡚ ࠸ ࡿ 㸬

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13

➨ 3 ❶ ࡛ ࡣ 㸪࢔ ࣝ ࣑ ࢽ ࢘ ࣒ 〇 ࢚ ࣥ ࢺ ࣜ ࣮ ࢩ ࣮ ࢺ ࡢ ຍ ᕤ ᛶ ࡟ ཬ ࡰ ࡍ ᮦ ᩱ ≉ ᛶ ࡢ ᙳ 㡪 ࢆ ᫂ ࡽ ࠿ ࡟ ࡋ ࡚ ࠸ ࡿ 㸬࢔ ࣝ ࣑ ࢽ ࢘ ࣒ ᮦ ᩱ ࡀ ࢻ ࣜ ࣝ ࡬ ࡢ ษ ࡾ ࡃ ࡎ ᕳ ࡁ ௜ ࡁ ᛶ ࡟ ཬ ࡰ ࡍ ᙳ 㡪㸪ࢻ ࣜ ࣝ 㣗 ࠸ ௜ ࡁ ᫬ ࡢ ษ ๐ ຊ ࡟ ཬ ࡰ ࡍ ࢔ ࣝ ࣑ ࢽ ࢘ ࣒

ᮦ ᩱ ࡢ ᙳ 㡪 ࡟ ࡘ ࠸ ࡚ ㄪ ࡭ 㸪ࡑ ࡢ ⤖ ᯝ ࠿ ࡽ ࢔ ࣝ ࣑ ࢽ ࢘ ࣒ 〇 ࢚ ࣥ ࢺ ࣜ ࣮ ࢩ ࣮ ࢺ ࡢ ᮦ ᩱ ≉ ᛶ ࡀ ຍ ᕤ ⢭ ᗘ ࡟ ཬ ࡰ ࡍ ᙳ 㡪 ࡟ ࡘ ࠸ ࡚ ⪃ ᐹ ࡋ ࡚ ࠸ ࡿ 㸬

➨ 4 ❶ ࡛ ࡣ 㸪ᶞ ⬡ ௜ ࡁ ࢚ ࣥ ࢺ ࣜ ࣮ ࢩ ࣮ ࢺ ࢆ ⏝ ࠸ ࡓ ࣉ ࣜ ࣥ ࢺ 㓄 ⥺ ᯈ ✰ ຍ ᕤ

᫬ ࡢ ✰ ఩ ⨨ ⢭ ᗘ ࡟ ཬ ࡰ ࡍ ᶞ ⬡ ≉ ᛶ ࡢ ᙳ 㡪 ࢆ ᫂ ࡽ ࠿ ࡟ ࡋ ࡚ ࠸ ࡿ 㸬≉ ᛶ ࡢ ␗ ࡞

ࡿ 2 ✀ 㢮 ࡢ ᶞ ⬡ ௜ ࡁ ࢚ ࣥ ࢺ ࣜ ࣮ ࢩ ࣮ ࢺ ࡜ ࢔ ࣝ ࣑ ࢽ ࢘ ࣒ 〇 ࢚ ࣥ ࢺ ࣜ ࣮ ࢩ ࣮ ࢺ ࢆ ⏝ ࠸ ࡚ 㸪ษ ๐ ᢬ ᢠ ࢭ ࣥ ࢧ 㸪㧗㏿ ᗘ ࢝ ࣓ ࣛ ࡞ ࡝ ࢆ ౑ ࡗ ࡚ ຍ ᕤ ୰ ࡢ ษ ๐ ຊ

ࡸ ษ ࡾ ࡃ ࡎ ᤼ ฟ ᛶ ࡢ ホ ౯ ࢆ ⾜ ࠺ ࡜ ࡜ ࡶ ࡟ 㸪ຍ ᕤ ᚋ ࡢ ࣉ ࣜ ࣥ ࢺ 㓄 ⥺ ᯈ ࡢ ✰ ఩

⨨ ⢭ ᗘ ࢆ ホ ౯ ࡍ ࡿ ࡇ ࡜ ࡟ ࡼ ࡾ 㸪ࣉ ࣜ ࣥ ࢺ 㓄 ⥺ ᯈ ࡢ ✰ ఩ ⨨ ⢭ ᗘ ࡟ ཬ ࡰ ࡍ ᶞ ⬡

≉ ᛶ ࡢ ᙳ 㡪 ࡟ ࡘ ࠸ ࡚ ⪃ ᐹ ࡋ ࡚ ࠸ ࡿ 㸬

➨ 5 ❶ ࡛ ࡣ 㸪ᶞ ⬡ ௜ ࡁ ࢚ ࣥ ࢺ ࣜ ࣮ ࢩ ࣮ ࢺ ࢆ ⏝ ࠸ ࡓ ࣉ ࣜ ࣥ ࢺ 㓄 ⥺ ᯈ ✰ ຍ ᕤ

᫬ ࡢ ✰ ቨ 㠃 ⢒ ࡉ ࡟ ཬ ࡰ ࡍ ᶞ ⬡ ≉ ᛶ ࡢ ᙳ 㡪 ࢆ ᫂ ࡽ ࠿ ࡟ ࡋ ࡚ ࠸ ࡿ 㸬≉ ᛶ ࡢ ␗ ࡞

ࡿ 2 ✀ 㢮 ࡢ ᶞ ⬡ ௜ ࡁ ࢚ ࣥ ࢺ ࣜ ࣮ ࢩ ࣮ ࢺ ࡜ ࢔ ࣝ ࣑ ࢽ ࢘ ࣒ 〇 ࢚ ࣥ ࢺ ࣜ ࣮ ࢩ ࣮ ࢺ ࢆ ⏝ ࠸ ࡚ 㸪ຍ ᕤ ᚋ ࡢ ࣉ ࣜ ࣥ ࢺ 㓄 ⥺ ᯈ ࡢ ✰ ቨ 㠃 ⢒ ࡉ ࢆ ホ ౯ ࡍ ࡿ ࡇ ࡜ ࡛ 㸪ࣉ

ࣜ ࣥ ࢺ 㓄 ⥺ ᯈ ࡢ ✰ ቨ 㠃 ⢒ ࡉ ࡟ ཬ ࡰ ࡍ ᶞ ⬡ ≉ ᛶ ࡢ ᙳ 㡪 ࡟ ࡘ ࠸ ࡚ ⪃ ᐹ ࡋ ࡚ ࠸

ࡿ 㸬

➨ 6 ❶ ࡛ ࡣ 㸪ࣉ ࣜ ࣥ ࢺ 㓄 ⥺ ᯈ ⏝ ᑟ ㏻ ✰ ࡢ ࡉ ࡽ ࡞ ࡿ 㧗 ⢭ ᗘ ໬ ࢆ ┠ ⓗ ࡟ 㸪ᑠ ᚄ ࢻ ࣜ ࣝ ຍ ᕤ ࡢ ㄢ㢟 ࡢ ୍ ࡘ ࡛ ࠶ ࡿ ᅇ ㌿ ᣺ ࢀ ࡢ Ⓨ ⏕ ࡀ ࢻ ࣜ ࣝ 㣗 ࠸ ௜ ࡁ ᫬ ࡢ ᣲ ື ࡟ ཬ ࡰ ࡍ ᙳ 㡪 ࢆ ᫂ ࡽ ࠿ ࡟ ࡋ ࡚ ࠸ ࡿ 㸬≉ ࡟ 㸪㣗 ࠸ ௜ ࡁ ᫬ ࡢ ษ ࢀ ล ࡢ ྥ ࡁ

࡟ ࡼ ࡾ ᣲ ື ࡀ ␗ ࡞ ࡿ ࡇ ࡜ ࢆ ㏙ ࡭ ࡚ ࠸ ࡿ 㸬

➨ 7 ❶ ࡣ 㸪 ⤖ ㄽ ࡜ ࡋ ࡚ ➨ 2 ❶ ࠿ ࡽ ➨ 6 ❶ ࡲ ࡛ ࢆ ࡲ ࡜ ࡵ ࡚ ࠸ ࡿ 㸬

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14

➨

➨ 2❶ ࣉ ࣜ ࣥ ࢺ 㓄 ⥺ ᯈ ࡢ ࢻ ࣜ ࣝ ຍ ᕤ ≉ ᛶ

2.1 ⥴ ゝ

ࣉ ࣜ ࣥ ࢺ 㓄 ⥺ ᯈ ࡢ ࢻ ࣜ ࣝ ຍ ᕤ ࡛ ࡣ 㸪⿕ ๐ ᮦ ࡀ ࢞ ࣛ ࢫ ⧄ ⥔ 㸪ᶞ ⬡ ࠾ ࡼ ࡧ 㖡

⟩ ࢆ ྵ ࢇ ࡔ 」 ྜ ᮦ ᩱ ࡛ ࠶ ࡿ ࡓ ࡵ 㸪ຍ ᕤ ⌧ ㇟ ࡣ ୍ ⯡ ⓗ ࡞ 㔠 ᒓ ࡢ ࢻ ࣜ ࣝ ຍ ᕤ ࡜ ẚ ㍑ ࡋ ࡚ 」㞧 ࡛ ࠶ ࡿ ^{2 - 1 )}㸬 ࡑ ࡇ ࡛ ᮏ ❶ ࡛ ࡣ 㸪 ࡲ ࡎ 㧗㏿ ᗘ ࢝ ࣓ ࣛ ࢆ ⏝ ࠸ ࡓ ษ

ࡾ ࡃ ࡎ ࡢ ᤼ ฟ ≧ ἣ ࡢ ほ ᐹ ࡜ ษ ๐ ᢬ ᢠ ࢭ ࣥ ࢧ ࢆ ⏝ ࠸ ࡓ ษ ๐ ຊ ᐃ ࢆ ⾜ ࠺ ࡇ

࡜ ࡛ 㸪ࣉ ࣜ ࣥ ࢺ 㓄 ⥺ ᯈ ࡢ ຍ ᕤ ≉ ᛶ ࢆ ㄪ ࡭ ࡓ 㸬ࡘ ࡂ ࡟ 㸪ຍ ᕤ ᚋ ࡢ ✰ ఩ ⨨ ⢭ ᗘ

ࡸ ✰ ቨ 㠃 ⢒ ࡉ ࢆ ᐃ ࡍ ࡿ ࡇ ࡜ ࡛ 㸪ຍ ᕤ ✰ ≉ ᛶ ࡟ ཬ ࡰ ࡍ ᐇ 㦂 ᮲ ௳ ࡞ ࡝ ࡢ ᙳ 㡪

ࢆ ᫂ ࡽ ࠿ ࡟ ࡋ ࡓ 㸬

2.2 ᐇ 㦂 ᪉ ἲ ࠾ ࡼ ࡧ ᐇ 㦂 ᮲ ௳

2.2.1

^{ຍ ᕤ ⿦ ⨨}

ᐇ 㦂 ࡟ ౑ ⏝ ࡋ ࡓ ຍ ᕤ ᶵ ࡣ 㸪ࣉ ࣜ ࣥ ࢺ 㓄 ⥺ ᯈ ✰ ຍ ᕤ ᑓ ⏝ ᶵ㸦 ᪥ ❧ ࣅ ࢔ ࣓ ࢝ ࢽ ࢡ ࢫ(ᰴ)㸸ND-1V211㸧 ࡛ ࠶ ࡾ 㸪 ᅗ 2-1(a)࡟ ♧ ࡍ ࡼ ࠺ ࡟ ࣃ ࢯ ࢥ ࣥ ࡟ ࡼ ࡿ ไ ᚚ 㒊 ࡜ ᶵ Ე 㒊 ࡟ ศ ࠿ ࢀ ࡚ ࠸ ࡿ 㸬 ࡲ ࡓ 㸪 ᅗ 2-1(b) ࡟ ♧ ࡍ ࡼ ࠺ ࡟ 㸪 ຍ ᕤ ᶵ ࡣ ⮬ ື ᕤ ල ஺ ᥮ ⿦ ⨨ ࡟ ࡼ ࡿ ᕤ ල ࡢ ⮬ ື ஺ ᥮ ࡀ ⾜ ࠼ 㸪୍ ⯡ ࡢ ᕤ స ᶵ Ე ࡜ ྠ ᵝ

(a) ຍᕤᶵእほ (b) ຍᕤ㒊

ࢻࣜࣝ

ຍᕤࢸ࣮ࣈࣝ

୺㍈

ࣉࣜࣥࢺ㓄⥺ᯈ

ᅗ 2-1ࣉࣜࣥࢺ㓄⥺ᯈ✰ຍᕤᶵ

ᶵᲔ㒊 ไᚚ㒊

(20)

15

⾲ 2-1 ࣉࣜࣥࢺ㓄⥺ᯈ✰ຍᕤᶵࡢ௙ᵝ

ຍ ᕤ ⠊ ᅖ 690mm×535mm

CNC ⿦ ⨨ H࣭MARK30

XY ㍈ ᪩ ㏦ ࡾ ㏿ ᗘ 50,000 mm/min Z ㍈㏦ ࡾ ㏿ ᗘ 101㹼12,700 mm/min Z ㍈ ୖ ᪼ ㏿ ᗘ 101㹼25,400 mm/min XY ㍈ ఩ ⨨ Ỵ ࡵ ศ ゎ ⬟ 0.0005 mm

XY ㍈ ఩ ⨨ Ỵ ࡵ ⢭ ᗘ ±0.005 mm

୺ ㍈ ᅇ ㌿㏿ ᗘ 30,000㹼300,000 min^{- 1}

౑ ⏝ ࢻ ࣜ ࣝ ᚄ 0.1㹼6.35 mm

࡟ ຍ ᕤ ࢸ ࣮ ࣈ ࣝ ୖ ࡟ ⿕ ๐ ᮦ ࢆ ࢭ ࢵ ࢺ ࡋ 㸪୺ ㍈ ࡛ ᕤ ල ࢆ ᅇ ㌿ ࡉ ࡏ ࡿ ࡇ ࡜ ࡛ ✰

࠶ ࡅ ࢆ ⾜ ࠺ 㸬

࡞ ࠾ 㸪ຍ ᕤ ᶵ ࡢ x ࠾ ࡼ ࡧ y㍈ ࡣ 㸪࣎ ࣮ ࣝ ࡡ ࡌ ࡟ ࡼ ࡿ ࢧ ࣮ ࣎ ࣔ ࣮ ࢱ 㥑 ື ࡛ 㸪 z ㍈ ࡢ ࡳ ⏕ ⏘ ᛶ ྥ ୖ ࡢ ࡓ ࡵ ࣜ ࢽ ࢔ ࣔ ࣮ ࢱ 㥑 ື ࡛ ࠶ ࡿ 㸬 ୺ ㍈ ࡟ ࡣ 㸪 ᭱ 㧗 ᅇ ㌿

㏿ ᗘ 300,000min^{- 1}ࡢ ࣈ ࣛ ࢩ ࣞ ࢫ DC ࣔ ࣮ ࢱ ࡀ ᦚ ㍕ ࡉ ࢀ ࡚ ࠾ ࡾ 㸪 ↝ ௜ ࡁ 㜵 Ṇ

࡜ ⇕ ኚ ఩ ᢚ ไ ࡢ ┠ ⓗ ࡛ ࢫ ࣆ ࣥ ࢻ ࣝ ࡢ ⟂ య ࡀ ෭ ༷ ࡉ ࢀ ࡚ ࠸ ࡿ 㸬⾲ 2-1 ࡣ 㸪ຍ ᕤ ᶵ ࡢ ௙ ᵝ ࢆ ♧ ࡍ 㸬

ᅗ 2-2 ࡣ 㸪ࣉ ࣜ ࣥ ࢺ 㓄 ⥺ ᯈ ࡟ ✰ ຍ ᕤ ࢆ ⾜ ࠺ ሙ ྜ ࡢ ࢭ ࢵ ࢸ ࢕ ࣥ ࢢ ᪉ ἲ ࢆ ♧ ᅗ 2-2 ࣉࣜࣥࢺ㓄⥺ᯈࡢ✰ຍᕤἲ

࢚ࣥࢺ࣮ࣜࢩ࣮ࢺ

nᯛࡢࣉࣜࣥࢺ㓄⥺ᯈ

ࣂࢵࢡ࢔ࢵࣉ࣮࣎ࢻ ᑠᚄࢻࣜࣝ

(21)

16

(a) ຍᕤ๓ (b) ຍᕤ୰

ࡋ ࡚ ࠸ ࡿ 㸬 ࣉ ࣜ ࣥ ࢺ 㓄 ⥺ ᯈ ࡢ ✰ ຍ ᕤ ࡣ 㸪1.3.3 㡯 ࡛ ㏙ ࡭ ࡓ ࡼ ࠺ ࡟ ⏕ ⏘ ᛶ ྥ

ୖ ࡢ ࡓ ࡵ ࣉ ࣜ ࣥ ࢺ 㓄 ⥺ ᯈ ࢆ 」 ᩘ ᯛ 㔜 ࡡ 㸪᭱ ୖ 㠃 ࡟ ࢔ ࣝ ࣑ ࢽ ࢘ ࣒ 〇 ࡢ ࢚ ࣥ ࢺ

ࣜ ࣮ ࢩ ࣮ ࢺ ࡜ ࿧ ࡤ ࢀ ࡿ ຍ ᕤ ⏝ ⿵ ຓ ࢩ ࣮ ࢺ ࢆ ࡢ ࡏ 㸪᭱ ୗ 㠃 ࡟ ᤞ ࡚ ᯈ ࡜ ࡋ ࡚ ࣋

࣮ ࢡ ࣛ ࢖ ࢺ 〇 ࡢ ࣂ ࢵ ࢡ ࢔ ࢵ ࣉ ࣎ ࣮ ࢻ ࢆ ࢭ ࢵ ࢺ ࡋ ࡚ ຍ ᕤ ࡉ ࢀ ࡿ ^{2 - 2 )}㸬⿕ ๐ ᮦ ࡣ 㸪 ࣉ ࣜ ࣥ ࢺ 㓄 ⥺ ᯈ ࡢ ୧ ➃ 2 ⟠ ᡤ ࡛ ࢸ ࣮ ࣈ ࣝ ୖ ࡟ ࣎ ࣝ ࢺ ᅛ ᐃ ࡉ ࢀ ࡚ ࠸ ࡿ 㸬

࡞ ࠾ 㸪୍ ⯡ ࡟ ࣉ ࣞ ࢵ ࢩ ࣕ ࣮ ࣇ ࢵ ࢺ ࡜ ࿧ ࡤ ࢀ ࡿ ⿕ ๐ ᮦ ᾋ ࡁ ୖ ࡀ ࡾ 㜵 Ṇ ⿦ ⨨ ࢆ

౑ ࡗ ࡚ ຍ ᕤ ࡍ ࡿ 㸬ᅗ 2-3 ࡣ 㸪ࣉ ࣞ ࢵ ࢩ ࣕ ࣮ ࣇ ࢵ ࢺ ࢆ ⏝ ࠸ ࡓ ✰ ຍ ᕤ ࢆ ♧ ࡋ ࡚

࠸ ࡿ 㸬 ຍ ᕤ ๓ ࡣ 㸪 ᅗ 2-3 (a)ࡢ ࡼ ࠺ ࡟ ࣉ ࣞ ࢵ ࢩ ࣕ ࣮ ࣇ ࢵ ࢺ ࡀ ࣉ ࣜ ࣥ ࢺ 㓄 ⥺ ᯈ ࠿ ࡽ ᾋ ࠸ ࡚ ࠸ ࡿ ≧ ែ ࡛ ࠶ ࡾ 㸪ຍ ᕤ ࢆ ⾜ ࠺ 㝿 ࡟ ࣉ ࣞ ࢵ ࢩ ࣕ ࣮ ࣇ ࢵ ࢺ ࡢ ඛ ➃

࡟ ࠶ ࡿ ࣈ ࢵ ࢩ ࣗ ࡀ ⿕ ๐ ᮦ ࢆ ୖ ࠿ ࡽ ᢲ ࡉ ࠼ ࡘ ࡅ 㸪ࡑ ࡢ ࣈ ࢵ ࢩ ࣗ ࡢ ✰ ࠿ ࡽ ᅇ ㌿ ࡋ ࡓ ࢻ ࣜ ࣝ ࡀ ฟ ࡚ ࡃ ࡿ ᵓ 㐀 ࡟ ࡞ ࡗ ࡚ ࠸ ࡿ 㸦 ᅗ 2-3(b)㸧㸬 ࡲ ࡓ 㸪 ࣉ ࣞ ࢵ ࢩ ࣕ

࣮ ࣇ ࢵ ࢺ ࡣ 㞟 ሻ ᶵ ࡜ ࡘ ࡞ ࡀ ࡗ ࡚ ࠸ ࡿ ࡓ ࡵ 㸪ຍ ᕤ ࡋ ࡞ ࡀ ࡽ ษ ࡾ ࡃ ࡎ ࢆ ྾ ᘬ ࡍ

ࡿ ࡇ ࡜ ࡀ ྍ ⬟ ࡛ ࠶ ࡿ 㸬

2.2.2

ຍຍ ᕤ ⌧ ㇟ホ ౯ ᪉ ἲ

ࣉ ࣜ ࣥ ࢺ 㓄 ⥺ ᯈ ࡢ ✰ ຍ ᕤ ࡣ 㸪ࢻ ࣜ ࣝ ࡀ ᑠ ᚄ ࡛ ࠿ ࡘ ୖ ㏙ ࡢ ࡼ ࠺ ࡟ ࣉ ࣞ ࢵ ࢩ

ࣕ ࣮ ࣇ ࢵ ࢺ ࡛ そ ࢃ ࢀ ࡿ ࡓ ࡵ 㸪ຍ ᕤ ୰ ࡢ ⌧ ㇟ ࢆ ┤ ᥋ 㸪どぬ ⓗ ࡟ ᢕ ᥱ ࡍ ࡿ ࡇ ࡜ ࡀ ᅔ 㞴 ࡛ ࠶ ࡿ 㸬ࡑ ࡇ ࡛ 㸪ຍ ᕤ ⌧ ㇟ ࢆ ホ ౯ ࡍ ࡿ ࡓ ࡵ 㸪ษ ๐ ᢬ ᢠ ࢭ ࣥ ࢧ ࡟ ࡼ ࡿ ຍ ᕤ ୰ ࡢ ษ ๐ ຊ ᐃ ࡜ 㸪㧗㏿ ᗘ ࢝ ࣓ ࣛ ࡟ ࡼ ࡿ ษ ࡾ ࡃ ࡎ ᤼ ฟ ≧ ἣ ࡢ ほ ᐹ ࢆ ⾜ ࡗ ࡓ 㸬

ᅗ 2-3 ࣉࣞࢵࢩ࣮ࣕࣇࢵࢺࢆ⏝࠸ࡓ✰ຍᕤ

ࢻࣜࣝ

㺪㺽㺶㺻㺢㓄⥺ᯈ

㺪㺽㺸㺍㺚㺊㺎㺪㺍㺢

ඛ➃ࣈࢵࢩࣗ

ຍᕤᶵࢸ࣮ࣈࣝ

(22)

17

ᅗ 2-4(a)ࡣ 㸪ษ ๐ ຊ ᐃ ࡢ ὶ ࢀ ࢆ ♧ ࡍ 㸬࡞ ࠾ 㸪ࣉ ࣜ ࣥ ࢺ 㓄 ⥺ ᯈ ࡣ ᅗ 2-4(b)

࡟ ♧ ࡍ ษ ๐ ᢬ ᢠ ࢭ ࣥ ࢧ ୖ ࡟ ࢭ ࢵ ࢺ ࡉ ࢀ ࡚ ✰ ຍ ᕤ ࡀ ⾜ ࢃ ࢀ ࡿ 㸬ษ ๐ ᢬ ᢠ ࢭ ࣥ ࢧ ࡣ 㸪xyz᪉ ྥ ࡢ 3ᡂ ศ㸦 ओ ᪥ ᮏ ࢟ ࢫ ࣛ ࣮ 〇㸸ࣉ ࣞ ࢫ ࣇ ࢛ ࣮ ࢫ ࢭ ࣥ ࢧ 9317B㸧

࡜ ࢺ ࣝ ࢡ㸦 ओ ᪥ ᮏ ࢟ ࢫ ࣛ ࣮ 〇㸸 ࣜ ࢔ ࢡ ࢩ ࣙ ࣥ ࢺ ࣝ ࢡ ࢭ ࣥ ࢧ 9329A㸧ࢆ ィ

࡛ ࡁ ࡿ ᅽ 㟁 ⣲ Ꮚ ࢱ ࢖ ࣉ ࡢ ࡶ ࡢ ࡛ ࠶ ࡿ 㸬 ᐃ ࡣ 㸪ຊ ࡢ ኚ ໬ ࡟ ࡼ ࡾ ⏕ ࡌ ࡓ 㟁 ఩ ᕪ ࢆ ࢔ ࣥ ࣉ ࡛ ቑ ᖜ ࡋ 㸪 ࡑ ࢀ ࢆ ࣞ ࢥ ࣮ ࢲ ࡛ グ㘓 ࡍ ࡿ ᪉ ἲ ࡜ ࡋ ࡓ 㸬

✰ ෆ ࡟ ࠾ ࡅ ࡿ ษ ࡾ ࡃ ࡎ ᤼ ฟ ≧ ἣ ࡣ 㸪ࣉ ࣜ ࣥ ࢺ 㓄 ⥺ ᯈ ࡀ ㏱ ᫂ ࡛ ࡞ ࠸ ࡓ ࡵ ほ ᐹ ࡛ ࡁ ࡞ ࠸ 㸬 ࡑ ࡇ ࡛ 㸪 ᅗ 2-5 ࡟ ♧ ࡍ ࡼ ࠺ ࡟ 㸪 ↓ Ⰽ ㏱ ᫂ ࡞ PET ᶞ ⬡ ࢆ ࣉ ࣜ

(a) ษ๐ຊ ᐃࡢὶࢀ (b) ษ๐᢬ᢠࢭࣥࢧ

PET ᶞ⬡

ᅗ 2-4 ษ๐ຊࡢ ᐃ ษ๐᢬ᢠࢭࣥࢧ

࢔ࣥࣉ

ᅗ 2-5 㧗㏿ᗘ࣓࢝ࣛ࡟ࡼࡿษࡾࡃࡎ᤼ฟ≧ἣࡢ᧜ᙳ᪉ἲ

(23)

18

⾲ 2-2㻌㧗㏿ᗘ䜹䝯䝷䛾᧜ᙳ᮲௳

䝣䝺䞊䝮䝺䞊䝖 8000䝁䝬䠋s

䝅䝱䝑䝍䞊䝇䝢䞊䝗 20μs

䝖䝸䜺䝉䞁䝍䝖䝸䜺

ග※ 䝯䝍䝹䝝䝷䜲䝗䝷䞁䝥2ⅉ

ࣥ ࢺ 㓄 ⥺ ᯈ ࡢ ᭱ ୖ 㠃 ࡟ ᩜ ࡁ 㸪 ✰ ຍ ᕤ ࡍ ࡿ ≧ ἣ ࢆ PET ᶞ ⬡ ഃ 㠃 ࠿ ࡽ 㧗㏿ ᗘ

࢝ ࣓ ࣛ 㸦(ᰴ)ࢼ ࢵ ࢡ 〇㸸MEMRECAM fx-K5㸧 ࡛ ᧜ ᙳ ࡋ ࡓ 㸬 ࡞ ࠾ 㸪PET ᶞ ⬡ ࡣ ࣉ ࣜ ࣥ ࢺ 㓄 ⥺ ᯈ ᶞ ⬡ 㒊 ࡜ ྠ ➼ ࡢ ࢞ ࣛ ࢫ ㌿ ⛣ Ⅼ㸦 ௨ ୗ 㸪Tg㸧ࢆ ࡶ ࡘ ࡶ ࡢ ࡜ ࡋ ࡓ 㸬⾲ 2-2 ࡣ 㸪㧗㏿ ᗘ ࢝ ࣓ ࣛ ࡢ ᧜ ᙳ ᮲ ௳ ࢆ ♧ ࡍ 㸬

2.2.3

^ຍຍ ᕤ ✰ ရ ఩ ホ ౯ ᪉ ἲ

ຍ ᕤ ✰ ရ ఩ ホ ౯ ヨ㦂 ࡣ 㸪ᅗ 2-6 ࡟ ♧ ࡍ 10 ⾜ 10 ิ ࡢ 100 ✰ ຍ ᕤ ࢆ 1 ࡘ ࡢ ࣈ ࣟ ࢵ ࢡ ࡜ ࡋ 㸪 ࡑ ࢀ ࢆ 10 ࣈ ࣟ ࢵ ࢡ ࡢ ィ 1000 ✰ ຍ ᕤ ࢆ ᐃ ࣆ ࢵ ࢳ ࡛ ⾜ ࠸ 㸪

඲ ᩘ ࡢ ✰ ఩ ⨨ ⢭ ᗘ ᐃ ࡜ ᅗ ୰ ㉥ ୸ ༳ ࡢ 1000 ✰ ࡈ ࡜ ࡢ ✰ ቨ 㠃 ⢒ ࡉ ᐃ ࢆ ⾜ ࡗ ࡓ 㸬

✰ ఩ ⨨ ࡣ 㸪CNC ⏬ ീ ᐃ ᶵ㸦 ओ ࢽ ࢥ ࣥ ࢖ ࣥ ࢫ ࢸ ࢵ ࢡ 〇㸸NEXIV VM-250㸧

࡛ ✰ ࡢ ࢚ ࢵ ࢪ ࢆ ග ࡢ ᫂ ᬯ ࡟ ࡼ ࡾ 180 Ⅼ ᳨ ฟ ࡋ 㸪ࡑ ࡢ ୰ ᚰ ᗙ ᶆ ࡜ ࡋ ࡓ 㸬✰ ቨ 㠃 ⢒ ࡉ ࡟ ࡘ ࠸ ࡚ ࡣ 㸪ᅗ 2-7 ࡟ ♧ ࡍ ࡼ ࠺ ࡟ ຍ ᕤ ᚋ ࡢ ࣉ ࣜ ࣥ ࢺ 㓄 ⥺ ᯈ ࢆ ✰ ୰ ᚰ

ᅗ 2-6 ຍᕤࣉࣟࢢ࣒ࣛ࠾ࡼࡧຍᕤ✰ရ఩ホ౯⟠ᡤ

✰ ቨ㠃

⢒ ࡉ ᐃ

⟠ ᡤ 10

⾜

10ิ

1ࣈࣟࢵࢡ 2ࣈࣟࢵࢡ 9ࣈࣟࢵࢡ 10ࣈࣟࢵࢡ

(24)

19

ᅗ 2-7 ࢫ࣮࣮ࣝ࣍ࣝࡢ✰ቨ㠃⢒ࡉホ౯ἲ ษ᩿⟠ᡤ

✰ቨ㠃 ⤯⦕ᮦᩱ

✰ቨ㠃⢒ࡉ

⾲ 2-3 ᐇ㦂᮲௳

ᐇ㦂᮲௳ձ ᐇ㦂᮲௳ղ

ࢻࣜࣝ ᕤලᚄȭ0.3

ล㛗5mm

ᕤලᚄȭ0.15 ล㛗2.5mm

᪥❧໬ᡂᕤᴗ〇 ᆺ␒㸸MCL-E-67 㖡⟩35μm㸪⤯⦕ᮦ1.0mm

㔜ࡡᯛᩘ3ᯛ

᪥❧໬ᡂᕤᴗ〇 ᆺ␒㸸MCL-E-679F

㖡⟩18μm㸪⤯⦕ᮦ1.0mm

㔜ࡡᯛᩘ2ᯛ

࢚ࣥࢺ࣮ࣜࢩ࣮ࢺ ࢔࣑ࣝࢽ࣒࢘(A1050-H18)

࢔࣑ࣝࢽ࣒࢘ཌ 0.15mm

࢔࣑ࣝࢽ࣒࢘ྜ㔠 (A3003-H18)

࢔࣑ࣝࢽ࣒࢘ཌ 0.12mm

ᶞ⬡ཌ 0.04mm

ᅇ㌿㏿ᗘ 160,000min^-1 300,000min^-1

㏦ࡾ㔞 19μm/rev 8μm/rev

ࣉࣜࣥࢺ㓄⥺ᯈࡢษ᩿㠃 ✰ቨ㠃พฝࡢࢥࣥࢱ࣮ᅗ

✰ቨ㠃ࡢ᩿㠃᭤⥺

(25)

20

ࡲ ࡛ ༙ ᚄ ᪉ ྥ ࡟ ษ ᩿ ࡋ 㸪◊ ☻ ᚋ 㸪༙ ෇ ⟄ 㒊 ศ ࢆ ࣞ ࣮ ࢨ 㢧 ᚤ 㙾㸦 ओ ࢟ ࣮ ࢚ ࣥ ࢫ 〇㸸VK-9510㸧 ࡛ 3 ḟ ඖ ⓗ ࡟ 㠀 ᥋ ゐ ᐃ ࡋ ࡓ 㸬 ࡞ ࠾ 㸪 ✰ ቨ 㠃 ⢒ ࡉ ࡣ ✰ ࡢ

༙ ෇ ⟄ 㒊 ศ ࢆ 㧗 ࡉ ᪉ ྥ ࡢ ࢥ ࣥ ࢱ ࣮ ᅗ ࡛ ホ ౯ ࡍ ࡿ ᪉ ἲ ࡜ 㸪 ✰ ᗏ 㠃 ࡢ ୍ ᩿ 㠃㸦 ᅗ ୰ ࢥ ࣥ ࢱ ࣮ ᅗ ෆ ࡢ Ⅼ ⥺ 㒊㸧ࡢ ࡳ ᩿ 㠃 ᭤ ⥺ ࡢ Peak-to-peak ࡛ ホ ౯ ࡍ ࡿ ᪉ ἲ ࡢ 2 ࡘ ࡜ ࡋ ࡓ 㸬

2.2.4

^ᐇ^{ᐇ 㦂 ᮲ ௳}

ᐇ 㦂 ࡣ 㸪࢔ ࣝ ࣑ ࢽ ࢘ ࣒ 〇 ࡢ ࢚ ࣥ ࢺ ࣜ ࣮ ࢩ ࣮ ࢺ ࢆ ⏝ ࠸ ࡓ ᐇ 㦂 ᮲ ௳ ࡜ ᶞ ⬡ ௜ ࡁ ࢚ ࣥ ࢺ ࣜ ࣮ ࢩ ࣮ ࢺ ࢆ ⏝ ࠸ ࡓ ሙ ྜ ࡛ ⾜ ࡗ ࡓ 㸬ࢻ ࣜ ࣝ ᚄ ࡣ ࢔ ࣝ ࣑ ࢽ ࢘ ࣒ 〇 ࢚

ࣥ ࢺ ࣜ ࣮ ࢩ ࣮ ࢺ ࡢ ሙ ྜ ࢆ ȭ0.3㸪ᶞ ⬡ ௜ ࡁ ࢚ ࣥ ࢺ ࣜ ࣮ ࢩ ࣮ ࢺ ࡢ ሙ ྜ ࢆ ȭ0.15

࡜ ࡋ ࡓ 㸬๓ ⪅ ࢆ ᐇ 㦂 ᮲ ௳ ձ 㸪ᚋ ⪅ ࢆ ᐇ 㦂 ᮲ ௳ ղ ࡜ ࿧ ࡪ 㸬⾲ 2-3 ࡟ ᐇ 㦂 ᮲ ௳ ࡢ ヲ ⣽ ࢆ ♧ ࡍ 㸬 ࡞ ࠾ 㸪 ྛ ᮲ ௳ ࡣ ᕤ ල ࣓ ࣮ ࢝ ࣮ ࡢ ᥎ ዡ ᮲ ௳ ࡛ ࠶ ࡿ ^{2 - 3 )}㸬

2.3 ᐇ 㦂 ⤖ ᯝ ࠾ ࡼ ࡧ ⪃ ᐹ

2.3.1 ✰ ຍ ᕤ ୰ ࡢ ษ ๐ ຊ

⿕ ๐ ᮦ ࡣ 㸪 ⤯ ⦕ 㒊 ࡟ ࢞ ࣛ ࢫ ࢡ ࣟ ࢫ ᒙ ࡜ ᶞ ⬡ ᒙ ࡢ ࠶ ࡿ ୧ 㠃㖡 ⟩ ௜ ࡁ ࣉ ࣜ

ࣥ ࢺ 㓄 ⥺ ᯈ ࡜ ࡋ ࡓ 㸬 ᅗ 2-8 ࡣ 㸪⿕ ๐ ᮦ ࡢ ᶍ ᘧ ᅗ ࢆ ♧ ࡍ 㸬 ⤯ ⦕ 㒊 ࡟ ࡣ 㸪 ᅗ 2-8(a)࡟ ♧ ࡍ ᖹ ⧊ ࡾ ≧ ࡢ ࢞ ࣛ ࢫ ⧄ ⥔ ࡢ ᮰ ࢆ 4 ᒙ 㔜 ࡡ 㸪 ࡑ ࢀ ࡟ ᅗ 2-8(b)࡟ ♧ ࡍ ࡼ ࠺ ࡟ ࢚ ࣏ ࢟ ࢩ ᶞ ⬡ ࢆ ୺ ཎ ᩱ ࡜ ࡍ ࡿ ᶞ ⬡ ࡀ ඘ ሸ ࡉ ࢀ ࡚ ࠸ ࡿ 㸬

ᐇ 㦂 ࡣ 㸪ᅗ 2-9 ࡟ ♧ ࡍ ࡼ ࠺ ࡟ ୖ ࠿ ࡽ ࢚ ࣥ ࢺ ࣜ ࣮ ࢩ ࣮ ࢺ 㸪2 ᯛ ࡢ ࣉ ࣜ ࣥ ࢺ 㓄 ⥺ ᯈ 㸪 ࣂ ࢵ ࢡ ࢔ ࢵ ࣉ ࣎ ࣮ ࢻ ࡢ 㡰 ࡟ 㔜 ࡡ 㸪ࣉ ࣜ ࣥ ࢺ 㓄 ⥺ ᯈ ࡢ 㔜 ࡡ ᯛ ᩘ ௨ እ ࡣ ⾲ 2-3 ࡢ ᐇ 㦂 ᮲ ௳ ձ ࡛ ຍ ᕤ ࡋ ࡓ 㸬ࡑ ࡢ ሙ ྜ ࡢ ࢻ ࣜ ࣝ ࡟ స ⏝ ࡍ ࡿ ࢫ ࣛ ࢫ ࢺ

࡜ ࢺ ࣝ ࢡ ࡢ ィ ࢆ ⾜ ࡗ ࡓ 㸬 ࡞ ࠾ 㸪 ᐃ ࢹ ࣮ ࢱ ࡟ 3kHzࡢ ࣟ ࣮ ࣃ ࢫ ࣇ ࢕ ࣝ ࢱ

ࢆ ࠿ ࡅ ࡿ ࡇ ࡜ ࡛ ษ ๐ ຊ Ἴ ᙧ ࡟ ᙳ 㡪 ࡢ ࡞ ࠸ ⠊ ᅖ ࡢ ࣀ ࢖ ࢬ ࢆ 㝖 ཤ ࡋ ࡓ 㸬 ᅗ 2-9

ࡼ ࡾ 㸪 ࢫ ࣛ ࢫ ࢺ ࡣ ࢚ ࣥ ࢺ ࣜ ࣮ ࢩ ࣮ ࢺ ࡢ ୗ ࡟ ࠶ ࡿ 1 ᯛ ┠ ୖ ᒙ ࡢ 㖡 ⟩ ࡛ ᭱ ࡶ

኱ ࡁ ࡃ ࡞ ࡾ 㸪⤯ ⦕ 㒊 ຍ ᕤ ᫬ ࡢ 4 ࣨ ᡤ ࡛ ୖ ᪼ ࡋ ࡚ ࠸ ࡿ 㸬ࡇ ࢀ ࡣ ࢞ ࣛ ࢫ ࢡ ࣟ ࢫ

ࢆ ຍ ᕤ ࡍ ࡿ ࡇ ࡜ ࡟ ࡼ ࡿ ࡶ ࡢ ࡜ ⪃ ࠼ ࡽ ࢀ ࡿ 㸬ࢺ ࣝ ࢡ ࡣ ࣂ ࢵ ࢡ ࢔ ࢵ ࣉ ࣎ ࣮ ࢻ ୖ 㠃 ࡟ ࠶ ࡿ 2 ᯛ ┠ ௨ 㝆 ࡛ ᣺ ື ᣺ ᖜ ࡀ ቑ ኱ ࡋ 㸪2 ᯛ ┠ ୗ ᒙ ࡢ 㖡 ⟩ ࡛ ᭱ ࡶ ኱ ࡁ ࡃ

࡞ ࡗ ࡚ ࠸ ࡿ 㸬ࡇ ࢀ ࡽ ࡢ ࢺ ࣝ ࢡ ࡢ ኚ ື ࡸ ቑ ຍ ࡣ 㸪✰ ࡀ ῝ ࡃ ࡞ ࡾ ษ ࡾ ࡃ ࡎ ࡢ ᤼

(26)

21

(a) ࢞ ࣛ ࢫ ࢡ ࣟ ࢫ (b) ୧ 㠃㖡 ⟩ ௜ ࡁ ࣉ ࣜ ࣥ ࢺ 㓄 ⥺ ᯈ

ᅗ 2-8 ᐇ㦂࡟౑ࡗࡓࣉࣜࣥࢺ㓄⥺ᯈ

E/S 㖡⟩ 㻌㻌㻌㻌㻌 ⤯⦕㒊㻌㻌㻌㻌㻌㻌㖡⟩ 㻌㻌㻌㻌㻌 ⤯⦕㒊㻌㻌㻌㻌㻌㻌㖡⟩B/B

0 0.3 0.6 0.9 1.2 1.4 1.6 1.9 2.1 ຍᕤ῝ࡉ mm

㻙㻜㻚㻝㻜㻚㻜㻜㻚㻝

㻌

䝖䝹䜽㻔㻺䞉㼙㻕

㻙㻝㻚㻜㻜㻚㻜㻝㻚㻜㻞㻚㻜

㻌

䝇䝷䝇䝖 ຊ䠄㻺䠅

ᅗ 2-9 ✰ຍᕤ୰ࡢࢫࣛࢫࢺ࡜ࢺࣝࢡ

N

㻜㻜

N ࣭ m

ࢺࣝࢡN࣭m ࢫࣛࢫࢺN

㖡⟩

ᶞ⬡

⤯

⦕㒊

2 1

0 -1

1 0.5 0 -0.5 -1

ୖ

㠃 ୗ

㠃

(27)

22 ฟ ୙ Ⰻ ࡀ ⏕ ࡌ ࡓ ⤖ ᯝ ࡜ ⪃ ࠼ ࡽ ࢀ ࡿ 㸬

ᅗ 2-9 ࡢ ⤖ ᯝ ࠿ ࡽ 㸪ษ ๐ ຊ ࡟ ཬ ࡰ ࡍ 㖡 ⟩ ࡢ ษ ࡾ ࡃ ࡎ ࡢ ᙳ 㡪 ࡀ ኱ ࡁ ࠸ ࡇ ࡜ ࡀ ࢃ ࠿ ࡗ ࡓ 㸬ࡑ ࡇ ࡛ 㸪ࡑ ࡢ ヲ ⣽ ࢆ ㄪ ࡭ ࡿ ࡓ ࡵ 㸪ࣉ ࣜ ࣥ ࢺ 㓄 ⥺ ᯈ ࡢ 㖡 ⟩ 㒊 ࡢ

ࡳ ࢆ ࢚ ࢵ ࢳ ࣥ ࢢ ࡟ ࡼ ࡾ 㝖 ཤ ࡋ ࡓ ࡶ ࡢ㸦 ௨ ୗ 㸪㖡 ⟩ ࡞ ࡋ ࡜ ࿧ ࡪ 㸧࡜ ㏻ ᖖ ࡢ ୧ 㠃㖡 ⟩ ௜ ࡁ ࣉ ࣜ ࣥ ࢺ 㓄 ⥺ ᯈ㸦 ௨ ୗ 㸪㖡 ⟩ ࠶ ࡾ ࡜ ࿧ ࡪ 㸧ࡢ ຍ ᕤ ≉ ᛶ ࡢ 㐪 ࠸ ࡟ ࡘ ࠸ ࡚ ㄪ ࡭ ࡓ 㸬ᐇ 㦂 ᮲ ௳ ࡣ ղ ࡛ 㸪ࢺ ࣝ ࢡ ࢆ ẚ ㍑ ࡋ ࡓ ⤖ ᯝ ࢆ ᅗ 2-10 ࡟ ♧ ࡍ 㸬

࡞ ࠾ 㸪 ຍ ᕤ ࡟ ౑ ⏝ ࡋ ࡓ ࢻ ࣜ ࣝ ࡣ 㸪 ᅗ ୰ ࡟ ♧ ࡍ 2000 ✰ ຍ ᕤ ᚋ ࡢ ᦶ ⪖ ࡋ ࡓ ࢻ

ࣜ ࣝ ࡛ ࠶ ࡿ 㸬 ᅗ 2-10 ࡼ ࡾ 㸪⿕ ๐ ᮦ ࡀ 㖡 ⟩ ࡞ ࡋ ࡢ ሙ ྜ 㸪 ࢺ ࣝ ࢡ ࡣ ✰ ࡢ ῝ ࡉ

࡜ ࡜ ࡶ ࡟ ᚎ ࠎ ࡟ ቑ ኱ ࡋ ࡚ ࠸ ࡿ ࡇ ࡜ ࡀ ࢃ ࠿ ࡿ 㸬୍ ᪉ 㸪⿕ ๐ ᮦ ࡀ 㖡 ⟩ ࠶ ࡾ ࡢ ሙ

ྜ 㸪㖡 ⟩ ࡞ ࡋ ࡛ ࡣ ࡳ ࡽ ࢀ ࡞ ࠿ ࡗ ࡓ ኱ ࡁ ࡞ ኚ ື ࡀ ຍ ᕤ ῝ ࡉ ⣙ 1mm௨ 㝆 ࡢ 2 ᒙ ┠ ࡛ Ⓨ ⏕ ࡋ ࡓ 㸬 ຍ ᕤ ῝ ࡉ ⣙ 1mmࡼ ࡾ ๓ ࡢ 1 ᒙ ┠ ࡢ 㖡 ⟩ ࡛ ኱ ࡁ ࡞ ࢺ ࣝ ࢡ ࡀ ᳨ ฟ ࡉ ࢀ ࡞ ࠿ ࡗ ࡓ ࡇ ࡜ ࠿ ࡽ 㸪 ࢺ ࣝ ࢡ ࡢ ኱ ࡁ ࡞ ኚ ື ࡣ 㖡 ⟩ ࡢ ษ ࡾ ࡃ ࡎ ᤼ ฟ ୙ Ⰻ ࡟ ࡼ ࡿ ࡶ ࡢ ࡜ ⪃ ࠼ ࡽ ࢀ ࡿ 㸬

2.3.2 ษษ ࡾ ࡃ ࡎ ᤼ ฟ ≧ ἣ

ࣉ ࣜ ࣥ ࢺ 㓄 ⥺ ᯈ ✰ ຍ ᕤ ᫬ ࡢ ✰ ෆ ࡛ ࡢ ษ ࡾ ࡃ ࡎ ᤼ ฟ ≧ ἣ ࢆ ほ ᐹ ࡋ ࡓ 㸬 ᅗ 2-11 ࡣ 㸪㖡 ⟩ ࠶ ࡾ ࡜ 㖡 ⟩ ࡞ ࡋ ࢆ ᅗ 2-5 ࡛ ㄝ ᫂ ࡋ ࡓ ᪉ ἲ ࡛ ㏱ ᫂ ࡞PETᶞ ⬡ ഃ 㠃 ࡼ ࡾ ᧜ ᙳ ࡋ ࡓ ෗ ┿ ࢆ ♧ ࡍ 㸬 ᅗ 2-11 ࡼ ࡾ 㸪㖡 ⟩ ࡞ ࡋ ࢆ ຍ ᕤ ࡋ ࡓ ሙ ྜ 㸪 ษ

ࡾ ࡃ ࡎ ࡀ ワ ࡲ ࡗ ࡚ ࠸ ࡿ ࡶ ࡢ ࡢ ෆ ቨ ⢒ ࡉ ࡬ ࡢ ᙳ 㡪 ࡣ ᑡ ࡞ ࠸ ࡀ 㸪㖡 ⟩ ࠶ ࡾ ࡣ

㻜㻚㻜㻜㻚㻝㻜㻚㻞㻜㻚㻟㻜㻚㻠㻜㻚㻡㻜㻚㻢㻜㻚㻣

㻙㻜㻚㻞㻙㻜㻚㻝㻜㻚㻜㻜㻚㻝㻜㻚㻞

᫬㛫㻔㻿㻕

㻌

㻌㖡⟩䛺䛧㻌㖡⟩䛒䜚

ษ๐䝖䝹䜽㻔㻺䞉㼙㼙㻕

ᅗ 2-10 ࢺࣝࢡ࡟ཬࡰࡍ㖡⟩ࡢᙳ㡪

s

N ࣭ m

0 0.3 0.6 0.9 1.2 1.5 1.8 2.1 ຍᕤ῝ࡉ mm

0.2 0.1

0 -0.1 -0.2

ࢺࣝࢡ N࣭m

㖡⟩࡞ࡋ 㖡⟩࠶ࡾ

(28)

23

㖡 ⟩ ࡢ ษ ࡾ ࡃ ࡎ ࡀ ෆ ቨ ࢆ ⢒ ࡃ ࡋ ࡚ ࠸ ࡿ ᵝ Ꮚ ࡀ ࢃ ࠿ ࡿ 㸬㖡 ⟩ ࠶ ࡾ ࢆ ຍ ᕤ ࡍ

ࡿ ≧ ἣ ࢆ 㧗㏿ ᗘ ࢝ ࣓ ࣛ ࡛ ᧜ ᙳ ࡋ ࡓ ື ⏬ ࡛ ☜ ㄆ ࡍ ࡿ ࡜ 㸪 ✰ ෆ ࡛ ワ ࡲ ࡗ ࡓ ⤯

⦕ ᮦ ᩱ ࡢ ษ ࡾ ࡃ ࡎ ࢆ 㖡 ⟩ ࡢ ษ ࡾ ࡃ ࡎ ࡀ ᢲ ࡋ ୖ ࡆ ࡼ ࠺ ࡜ ࡋ ࡚ ✰ ቨ 㠃 ࢆ Ⲩ ࡽ ࡋ ࡚ ࠸ ࡿ ࡇ ࡜ ࡀ ࢃ ࠿ ࡗ ࡓ 㸬ࡇ ࡢ ࡇ ࡜ ࡀ 㸪 ๓ 㡯 ࡛ ㏙ ࡭ ࡓ ኱ ࡁ ࡞ ࢺ ࣝ ࢡ ኚ ື Ⓨ

⏕ ࡢ ⌮ ⏤ ࡜ ⪃ ࠼ ࡽ ࢀ ࡿ 㸬 ࡲ ࡓ 㸪㖡 ⟩ ࡢ ษ ࡾ ࡃ ࡎ ࡣ ⤯ ⦕ ᮦ ᩱ ࡢ ษ ࡾ ࡃ ࡎ ࡜ ẚ

㍑ ࡋ ࡚ ษ ๐ ᗘ ࡀ ୖ ᪼ ࡋ ࡸ ࡍ ࠸ ࡓ ࡵ 㸪㧗 ࡟ ࡞ ࡗ ࡓ 㖡 ⟩ ࡢ ษ ࡾ ࡃ ࡎ ࡀ ✰ ቨ 㠃 ࡟ ࢲ ࣓ ࣮ ࢪ ࢆ ୚ ࠼ ࡓ ࡶ ࡢ ࡜ ⪃ ࠼ ࡽ ࢀ ࡿ 㸬

(a) 㖡⟩࡞ࡋ (b) 㖡⟩࠶ࡾ

(a) 㖡 ⟩ ࡞ ࡋ (b) 㖡 ⟩ ࠶ ࡾ

(a) ຍᕤึᮇ (b) 3000✰ຍᕤᚋ ᅗ 2-11 ษࡾࡃࡎ᤼ฟ≧ἣ

PETୖ㠃

ࣉࣜࣥࢺ㓄⥺ᯈ PET

PETୖ㠃

ᅗ 2-12 ࣉࣜࣥࢺ㓄⥺ᯈࡢษࡾࡃࡎ

࢚ࣥࢺ࣮ࣜࢩ࣮ࢺ 㖡⟩

⤯⦕ᮦᩱ

⤯⦕㒊ࡢሢ

⤯⦕ᮦᩱࡢ ษࡾࡃࡎ

㖡⟩ࡢ ษࡾࡃࡎ

(29)

24 2.3.3 ษษ ࡾ ࡃ ࡎ ᙧ ≧

ࣉ ࣞ ࢵ ࢩ ࣕ ࣮ ࣇ ࢵ ࢺ ࡜ ྾ ሻ ᶵ 㛫 ࡢ ࣍ ࣮ ࢫ ෆ ࡟ ࣇ ࢕ ࣝ ࢱ ࢆ タ ⨨ ࡋ 㸪྾ ᘬ ᫬

࡟ ྾ ࠸ ୖ ࡆ ࡽ ࢀ ࡓ ษ ࡾ ࡃ ࡎ ࢆ ᥇ ྲྀ ࡋ ࡓ 㸬ษ ࡾ ࡃ ࡎ ࡣ 㸪ᐇ 㦂 ᮲ ௳ ձ ࡛ ⾜ ࡗ ࡓ ሙ ྜ ࡢ ຍ ᕤ ึ ᮇ ࡜ 3000 ✰ ຍ ᕤ ᚋ ࡢ ࡶ ࡢ ࡛ ࠶ ࡿ 㸬ษ ࡾ ࡃ ࡎ ࢆ ᅗ 2-12 ࡟ ♧ ࡍ 㸬 ᅗ 2-12 ࡼ ࡾ 㸪 ຍ ᕤ ึ ᮇ ࡣ ࢔ ࣝ ࣑ ࢽ ࢘ ࣒ ࡢ ࢚ ࣥ ࢺ ࣜ ࣮ ࢩ ࣮ ࢺ 㸪㖡 ⟩ 㸪 ⤯ ⦕

ᮦ ᩱ ࡢ ࡽ ࡏ ࢇ ≧ ษ ࡾ ࡃ ࡎ ࡀ ☜ ㄆ ࡛ ࡁ ࡿ 㸬 ࡋ ࠿ ࡋ 㸪3000 ✰ ຍ ᕤ ᚋ ࡢ ษ ࡾ ࡃ ࡎ ࡛ ࡣ 㸪 ⤯ ⦕ ᮦ ᩱ ࡢ ษ ࡾ ࡃ ࡎ ࡀ ᑠ ࡉ ࡞ ሢ ࡜ ࡞ ࡗ ࡚ ࠸ ࡿ ࡇ ࡜ ࡀ ☜ ㄆ ࡛ ࡁ ࡿ 㸬 ࡇ ࢀ ࡣ 㸪ࢻ ࣜ ࣝ ᦶ ⪖ ࡟ ࡼ ࡾ ษ ๐ ᛶ ࡀ ᝏ ໬ ࡋ 㸪ࡑ ࡢ ⤖ ᯝ 㸪๓ 㡯 ࡛ ♧ ࡋ ࡓ ษ ࡾ ࡃ ࡎ ワ ࡾ ࡟ ࡼ ࡾ 㸪 ✰ ෆ ࡛ ษ ࡾ ࡃ ࡎ ࡢ ᙧ ែ ࡀ ኚ ໬ ࡋ ࡓ ࡶ ࡢ ࡜ ⪃ ࠼ ࡽ ࢀ ࡿ 㸬

2.3.4 ᕤ ල ᦶ ⪖ ࡟ ཬ ࡰ ࡍ ษ ๐ ㏿ ᗘ ࡢ ᙳ 㡪

ᅗ 2-13 ࡣ 㸪 ࣉ ࣜ ࣥ ࢺ 㓄 ⥺ ᯈ ✰ ຍ ᕤ ᫬ ࡟ ࠾ ࡅ ࡿ ษ ๐ ㏿ ᗘ ࡜ ࢻ ࣜ ࣝ ㏨ ࡆ 㠃 ᦶ ⪖ ᖜ ࡢ 㛵 ಀ ࢆ ♧ ࡍ 㸬 ࡞ ࠾ 㸪 ᐇ 㦂 ᮲ ௳ ࡣ ᅗ ୰ ࡢ ᮲ ௳ ࡜ ࡋ 㸪1 ᅇ ㌿ ᙜ ࡓ ࡾ ࡢ

㏦ ࡾ 㔞 ࡣ ᅛ ᐃ ࡋ ࡚ ࠸ ࡿ 㸬ᅗ 2-13 ࠿ ࡽ 㸪ษ ๐ ㏿ ᗘ V=185m/min ࡀ ᭱ ࡶ ㏨ ࡆ 㠃 ᦶ ⪖ ᖜ ࡀ ᑠ ࡉ ࡃ ࡞ ࡗ ࡚ ࠾ ࡾ 㸪ᐇ 㦂 ࢆ ⾜ ࡗ ࡓ ⠊ ᅖ ࡛ ࡣ ㏨ ࡆ 㠃 ᦶ ⪖ ࡟ ᑐ ࡋ ࡚ ᭱

0 10 20 30 40 50

0 50 100 150 200 250 300

㏨ࡆ㠃ᦶ⪖ᖜμm

ษ๐㏿ᗘ m/min

ᐇ㦂᮲௳

ᕤලᚄ㻌 φ0.3

䝥䝸䞁䝖㓄⥺ᯈ 0.1t-10Sheets

㏦䜚㔞㻌 40μm/rev

ᅗ 2-13 ᕤලᦶ⪖࡜ษ๐㏿ᗘࡢ㛵ಀ ᦶ⪖㔞

(30)

25

(a) ㏨ࡆ㠃ᦶ⪖≧ἣ ^{㏨ࡆ㠃ࢩࣙࣝࢲ㒊}

(b) ㏨ࡆ㠃࡜ࡍࡃ࠸㠃ࡢᦶ⪖≧ἣ

㐺 ࡞ ษ ๐ ㏿ ᗘ ࡜ ࠸ ࠼ ࡿ 㸬 ᅗ 2-14 ࡣ 㸪 ࢻ ࣜ ࣝ ㏨ ࡆ 㠃 ࡢ ᦶ ⪖ ≧ ែ ࢆ 㟁 Ꮚ 㢧 ᚤ 㙾㸦(ᰴ)᪥ ❧ ࣁ ࢖ ࢸ ࢡ 〇: S-3500H㸧 ࡛ ほ ᐹ ࡋ ࡓ ෗ ┿ ࢆ ♧ ࡍ 㸬 ࡞ ࠾ 㸪 ᕤ ල ᦶ

⪖ ࡢ ほ ᐹ ⟠ ᡤ ࡣ ᅗ ୰ ࡟ ♧ ࡋ ࡓ ࢻ ࣜ ࣝ ࣔ ࢹ ࣝ ࡢ 㟷 Ⰽ 㒊 ࡛ ࠶ ࡿ 㸬ᅗ 2-14ࡼ ࡾ 㸪

㏨ ࡆ 㠃 ࢩ ࣙ ࣝ ࢲ 㒊 ࡢ ᦶ ⪖ 㔞 ࡣ 㸪V=61m/min ࡢ ప ษ ๐ ㏿ ᗘ ࡛ ᑠ ࡉ ࡃ 㸪

V=282m/min ࡢ 㧗 ษ ๐ ㏿ ᗘ ࡛ ኱ ࡁ ࠸ 㸬 ࡲ ࡓ 㸪 ᦶ ⪖ ࡢ ᙧ ែ ࡟ ࡶ ኚ ໬ ࡀ ぢ ࡽ ࢀ

ࡿ 㸬V=61m/min ࡢ ప ษ ๐ ㏿ ᗘ ࡛ ࡣ 㸪࢞ ࣛ ࢫ ⧄ ⥔ ࡢ ษ ๐ ࡟ ࡼ ࡿ ᚤ ᑠ ࡞ ࢳ ࢵ ࣆ

ࣥ ࢢ ࡢ ⣼ ✚ ࡟ ࡼ ࡾ ᦶ ⪖ ࡀ 㐍⾜ ࡋ ࡚ ࠸ ࡿ 㸬 ୍ ᪉ 㸪V=282m/min ࡢ 㧗 ษ ๐ ㏿ ᗘ

࡛ ࡣ 㸪 ࢔ ࣈ ࣞ ࢩ ࣈ ࡞ ࡍ ࡁ ࡜ ࡾ ᦶ ⪖ ࡟ ࡼ ࡾ 㐍⾜ ࡋ ࡚ ࠸ ࡿ 㸬

2.3.5 ✰✰ ᚄ ࡟ ཬ ࡰ ࡍ ࢻ ࣜ ࣝ ᦶ ⪖ 㔞 ࡢ ᙳ 㡪

ᅗ 2-15 ࡣ 㸪 ᐇ 㦂 ᮲ ௳ ձ ࡛ 10000 ✰ ຍ ᕤ ࡋ ࡓ ᚋ 㸪 ࢻ ࣜ ࣝ ࢩ ࣙ ࣝ ࢲ 㒊 ࡢ ᦶ

⪖ 㔞 ࡜ ຍ ᕤ ✰ ࡢ ✰ ᚄ ࢆ ィ ࡋ ࡓ ⤖ ᯝ ࢆ ♧ ࡍ 㸬 ᅗ 2-15 ࡼ ࡾ 㸪 ࢩ ࣙ ࣝ ࢲ 㒊 ࡢ ᦶ ⪖ ࡣ 500 ✰ ࡲ ࡛ ึ ᮇ ᦶ ⪖ ࡛ ࠶ ࡾ 㸪ࡑ ࡢ ᚋ ẚ ㍑ ⓗ ࡺ ࡿ ࠸ ഴ ࡁ ࡛ ᦶ ⪖ ࡀ 㐍⾜ ࡋ ࡚ ࠾ ࡾ 㸪 ᐃ ᖖ ᦶ ⪖ 㡿 ᇦ ࡟ ධ ࡗ ࡚ ࠸ ࡿ ࡇ ࡜ ࡀ ࢃ ࠿ ࡿ 㸬 ࡑ ࢀ ࡟ ᑐ ࡋ ✰ ᚄ ࡣ 㸪

(a) ㏨ࡆ㠃ᦶ⪖≧ἣ ㏨ࡆ㠃ࢩࣙࣝࢲ㒊

V=61m/min V=174m/min V=282m/min

ᅗ 2-14 ྛษ๐㏿ᗘ࡟࠾ࡅࡿࢻࣜࣝᦶ⪖ࡢᵝᏊ (b) ㏨ࡆ㠃࡜ࡍࡃ࠸㠃ࡢᦶ⪖≧ἣ

V=61m/min V=174m/min V=282m/min

㏨ࡆ㠃

ࡍࡃ࠸㠃

㏨ࡆ㠃

ࡍࡃ࠸㠃

㏨ࡆ㠃

ࡍࡃ࠸㠃

(31)

26

ຍ ᕤ ึ ᮇ ࡛ ᅇ ㌿ ᣺ ࢀ ࡞ ࡝ ࡢ ᙳ 㡪 ࡟ ࡼ ࡾ 0.308mm ࡜ ኱ ࡁ ࡃ 㸪 ࡑ ࡢ ᚋ 㸪 ┤ ⥺

ⓗ ࡟ ᑠ ࡉ ࡃ ࡞ ࡗ ࡚ ࠸ ࡿ 㸬௒ ᅇ ィ ࡋ ࡓ ࢩ ࣙ ࣝ ࢲ 㒊 ࡢ ᦶ ⪖ ࡀ ✰ ᚄ ࡟ ᙳ 㡪 ࢆ ཬ

ࡰ ࡍ ࡇ ࡜ ࡀ ࢃ ࠿ ࡗ ࡓ 㸬

2.3.6 ࢻࢻ ࣜ ࣝ ࡢ ᭤ ࡀ ࡾ

ᐇ 㦂 ᮲ ௳ ձ ࡛ 10000 ✰ ࡢ ຍ ᕤ ࢆ ⾜ ࡗ ࡓ 㝿㸪 ࣉ ࣜ ࣥ ࢺ 㓄 ⥺ ᯈ 1 ᯛ ┠ 㸪2 ᯛ

┠ 㸪3 ᯛ ┠ ࡢ ྠ ࡌ ⟠ ᡤ ࡢ ✰ ఩ ⨨ ⢭ ᗘ ࢆ ᐃ ࡋ ࡓ 㸬 ࡞ ࠾ 㸪3 ᯛ ࡢ ࡑ ࢀ ࡒ ࢀ ࡢ ᇶ ‽ ࡜ ࡞ ࡿ ✰ ࢆ ȭ3㸪ᕤ ල 㛗 3mmࡢ 㧗 ๛ ᛶ ࢻ ࣜ ࣝ ࡛ 2 ࠿ ᡤ ࢫ ࢸ ࢵ ࣉ ຍ ᕤ ࡋ 㸪 ࡑ ࡢ ✰ ࡛ ᗙ ᶆ ⣔ ࢆ స ᡂ ᚋ 㸪ࡑ ࢀ ࡒ ࢀ ࡢ ࣉ ࣜ ࣥ ࢺ 㓄 ⥺ ᯈ ࡢ ࣉ ࣟ ࢢ ࣛ ࣒ ್ ࠿ ࡽ ࡢ ࡎ ࢀ 㔞 ࢆ ィ ࡋ ࡓ 㸬 ᅗ 2-16 ࡣ 㸪 ࣉ ࣜ ࣥ ࢺ 㓄 ⥺ ᯈ ྛ ᒙ ࡛ ࡢ ✰ ఩ ⨨ ⢭ ᗘ ࢆ

♧ ࡍ 㸬 ᅗ 2-16 ࡼ ࡾ 㸪㔜 ࡡ ࡓ ࣉ ࣜ ࣥ ࢺ 㓄 ⥺ ᯈ ࡢ 1 ᯛ ┠ ࡣ ✰ ఩ ⨨ ⢭ ᗘ ࡀ Ⰻ ዲ

࡛ ࠶ ࡾ 㸪2 ᯛ ┠ 㸪3 ᯛ ┠ ࡜ ࡞ ࡿ ࡟ ࡜ ࡶ ࡞ ࠸ 㸪⢭ ᗘ ࡀ ᚎ ࠎ ࡟ ᝏ ໬ ࡋ ࡚ ࠸ ࡿ 㸬1 ᯛ ┠ 㸪2 ᯛ ┠ 㸪3 ᯛ ┠ ࡢ ✰ ఩ ⨨ ࡢ ࡎ ࢀ ࡣ 㸪 ࢻ ࣜ ࣝ ࡢ ᭤ ࡀ ࡾ ࡟ ᑐ ᛂ ࡋ ࡚ ࠸ ࡿ

ࡶ ࡢ ࡜ ⪃ ࠼ ࡽ ࢀ ࡿ 㸬ࡲ ࡓ 㸪ࡇ ࡢ ⤖ ᯝ ࡼ ࡾ 㸪ࢻ ࣜ ࣝ ࡢ ᭤ ࡀ ࡾ ᪉ ࡀ ⥺ ᙧ ࡛ ࡞ ࠸ ࡇ ࡜ ࡀ ࢃ ࠿ ࡿ 㸬ࡇ ࢀ ࡣ ࠊຍ ᕤ ୰ ࡟ ⤯ ⦕ ᮦ ᩱ ෆ ࡢ ࢞ ࣛ ࢫ ࢡ ࣟ ࢫ ࡢ ⢒ ᐦ 㸪ษ ๐ ຊ ࡢ ࢔ ࣥ ࣂ ࣛ ࣥ ࢫ ࠾ ࡼ ࡧ ษ ࡾ ࡃ ࡎ ワ ࡾ ࡟ ࡼ ࡾ 㸪㠀 ⥺ ᙧ ⓗ ࡞ ࢻ ࣜ ࣝ ࡢ ᭤ ࡀ ࡾ ࡀ ⏕ ࡌ ࡓ ࡓ ࡵ ࡜ ⪃ ࠼ ࡽ ࢀ ࡿ 㸬ࡲ ࡓ 㸪✰ ఩ ⨨ ⢭ ᗘ ࡣ ຍ ᕤ ✰ ᩘ ࡢ ቑ ຍ ࡟ ࡜ ࡶ ࡞

ᅗ 2-15 ✰ᚄ࡜ࢻࣜࣝᦶ⪖㔞ࡢ㛵ಀ

ᦶ⪖㔞

✰ᚄ ᦶ⪖㔞

(32)

27 㻙㻝㻞㻜㻙㻤㻜㻙㻠㻜㻜㻠㻜㻤㻜㻝㻞㻜㻙㻝㻞㻜

㻙㻤㻜㻙㻠㻜㻜㻠㻜㻤㻜㻝㻞㻜

䐠䐡䐟

㻙㻝㻜㻜㻙㻢㻜㻙㻞㻜㻞㻜㻢㻜㻝㻜㻜

㻌

㼅㻌㻭㼤㼕㼟㻌㻔䃛㼙㻕

㼄㻌㻭㼤㼕㼟㻌㻔䃛㼙㻕

࠸ ᝏ ໬ ࡋ ࡚ ࠸ ࡿ 㸬ࡇ ࢀ ࡣ 㸪✰ ຍ ᕤ ᩘ ࡢ ቑ ຍ ࡟ ࡜ ࡶ ࡞ ࠺ ࢻ ࣜ ࣝ ᦶ ⪖ ࡢ 㐍⾜ ࡀ 㸪

✰ ᭤ ࡀ ࡾ 㔞 ࡟ ᙳ 㡪 ࡋ ࡓ ࡶ ࡢ ࡜ ⪃ ࠼ ࡽ ࢀ ࡿ 㸬

2.3.7 ✰ ቨ 㠃 ⢒ ࡉ

ᐇ 㦂 ᮲ ௳ ձ ࡛ 3000 ✰ ຍ ᕤ ᚋ 㸪 ࣉ ࣜ ࣥ ࢺ 㓄 ⥺ ᯈ ࡢ ✰ ቨ 㠃 ࡟ 㖡 ࡵ ࡗ ࡁ ࢆ ᪋ ࡋ 㸪ᶞ ⬡ ࡟ ᇙ ࡵ ㎸ ࢇ ࡔ ≧ ែ ࡛ ༙ ᚄ ᪉ ྥ ࡟ ✰ ୰ ᚰ ࡲ ࡛ ◊ ☻ ࡍ ࡿ 㸬ᅗ 2-17 ࡣ 㸪 ࡑ ࡢ ✰ ᩿ 㠃 ࡢ ࢚ ࢵ ࢪ ࢆ ほ ᐹ ࡋ ࡓ ෗ ┿ ࢆ ♧ ࡍ 㸬࡞ ࠾ 㸪ᅗ ࡢ ᕥ ഃ ࡀ ࢻ ࣜ ࣝ ධ ཱྀ

ഃ 㸦 ࣉ ࣜ ࣥ ࢺ 㓄 ⥺ ᯈ ࡢ ୖ 㠃㸧 ࡛ 㸪 ྑ ഃ ࡀ ฟ ཱྀ ഃ 㸦 ࣉ ࣜ ࣥ ࢺ 㓄 ⥺ ᯈ ࡢ ୗ 㠃㸧

࡛ ࠶ ࡿ 㸬ᅗ 2-17 ࡼ ࡾ 㸪1 ᯛ ┠ ࠾ ࡼ ࡧ 2 ᯛ ┠ ࡢ ࣉ ࣜ ࣥ ࢺ 㓄 ⥺ ᯈ ࡢ ✰ ቨ 㠃 ࡀ ࡃ

ࡰ ࢇ ࡛ ࠾ ࡾ 㸪 ୗ 㠃 ࡟ ㏆ ࡙ ࡃ ࡯ ࡝ ࡃ ࡰ ࡳ ࡀ ᑠ ࡉ ࡃ ࡞ ࡗ ࡚ ࠸ ࡿ 㸬2.3.2 㡯 ࡛ ほ ᐹ ࡋ ࡓ ⤖ ᯝ ࠿ ࡽ 㸪ࡇ ࡢ ࡼ ࠺ ࡞ ࡃ ࡰ ࡳ ࡣ 㸪ࡼ ࡾ ከ ࡃ ࡢ 㖡 ⟩ ࡢ ษ ࡾ ࡃ ࡎ ࡀ ㏻㐣 ࡍ ࡿ 1 ᯛ ┠ ࡜ 2 ᯛ ┠ ࡢ ࣉ ࣜ ࣥ ࢺ 㓄 ⥺ ᯈ ࡟ ࠾ ࠸ ࡚ ษ ࡾ ࡃ ࡎ ワ ࡾ ࡟ ࡼ ࡾ Ⓨ ⏕

㻙㻝㻞㻜㻙㻤㻜㻙㻠㻜㻜㻠㻜㻤㻜㻝㻞㻜㻙㻝㻞㻜

䐠䐡

䐟

㻌

㻙㻝㻞㻜㻙㻤㻜㻙㻠㻜㻜㻠㻜㻤㻜㻝㻞㻜㻙㻝㻞㻜

䐠䐡䐟

㻌

1hit 5000hit

10000hit

ᅗ 2-16 ࣉࣜࣥࢺ㓄⥺ᯈྛᒙ࡛ࡢ✰఩⨨⢭ᗘ ձ1 ᯛ ┠

ղ2 ᯛ ┠ ճ3 ᯛ ┠ x μm

y μm

x μm

y μm

x μm

y μm

(33)

28

ࡋ ࡓ ࡶ ࡢ ࡜ ⪃ ࠼ ࡽ ࢀ ࡿ 㸬

ᅗ 2-18 ࡣ 㸪2 ᯛ ┠ ࡢ ࣉ ࣜ ࣥ ࢺ 㓄 ⥺ ᯈ ࡢ ✰ ࢆ ᣑ ኱ ࡋ ࡓ ࡶ ࡢ ࡛ ࠶ ࡿ 㸬ᅗ ୰ ࡢ 㸪

✰ ᩿ 㠃 ࡢ ࡃ ࡰ ࢇ ࡛ ࠸ ࡿ ⟠ ᡤ ࡣ ࢚ ࣏ ࢟ ࢩ ᶞ ⬡ ᒙ ࡛ ࠶ ࡾ 㸪ࡃ ࡰ ࡳ ࡢ ᑡ ࡞ ࠸ ⟠ ᡤ ࡀ ࢞ ࣛ ࢫ ࢡ ࣟ ࢫ ᒙ ࡛ ࠶ ࡿ 㸬࢚ ࣏ ࢟ ࢩ ᶞ ⬡ ᒙ ࡢ ࡃ ࡰ ࡳ ࡣ 㸪⤯ ⦕ ᮦ ᩱ ෆ ࡢ ◳ ࡉ ࡢ 㐪 ࠸ ࡸ ⇕ ࡟ ࡼ ࡿ ᮦ ᩱ ㌾ ໬ ᛶ ࡀ ᙳ 㡪 ࡋ ࡓ ࡶ ࡢ ࡜ ⪃ ࠼ ࡽ ࢀ ࡿ 㸬

2.3.8 ✰ ቨ 㠃 ⢒ ࡉ ࡟ ཬ ࡰ ࡍ ࢻ ࣜ ࣝ ࢥ ࣮ ࢸ ࢕ ࣥ ࢢ ࡢ ᙳ 㡪

DLC㸦Diamond Like Carbon㸧ࢆ ࢥ ࣮ ࢸ ࢕ ࣥ ࢢ ࡋ ࡓ ࢻ ࣜ ࣝ ࡜ ࣀ ࣥ ࢥ ࣮ ࢸ ࢕

ࣥ ࢢ ࢻ ࣜ ࣝ ࢆ ⏝ ࠸ ࡚ ᐇ 㦂 ᮲ ௳ ղ ࡛ ຍ ᕤ ࢆ ⾜ ࡗ ࡓ 㸬ຍ ᕤ ᚋ ࡢ ✰ ቨ 㠃 ᐃ ⤖ ᯝ ࡢ ࢥ ࣥ ࢱ ࣮ ᅗ ࢆ ᅗ 2-19(a)࡟ 㸪 ✰ ቨ ᗏ 㠃 ࡢ ⾲㠃 ⢒ ࡉ ࢆ ᅗ 2-19(b)࡟ ♧ ࡍ 㸬

࡞ ࠾ 㸪ࢥ ࣥ ࢱ ࣮ ᅗ ࡣ ᅗ 2-19(a)୰ ࡟ ♧ ࡍ ࡼ ࠺ ࡟ ✰ ᩿ 㠃 ࢆ ୖ ࠿ ࡽ ほ ᐹ ࡋ ࡓ ሙ ྜ ᅗ 2-18 2ᯛ┠ࡢࣉࣜࣥࢺ㓄⥺ᯈຍᕤᚋࡢ᩿㠃

࢚࣏࢟ࢩᶞ⬡ᒙ

ᅗ 2-17 ࣉࣜࣥࢺ㓄⥺ᯈࡢຍᕤᚋࡢ✰᩿㠃 ࢻࣜࣝຍᕤ᪉ྥ

0.3mm

0.3mm 1ᯛᯛ┠ 2ᯛᯛ┠ 3ᯛᯛ┠

(34)

29

(a) ࢥࣥࢱ࣮ᅗ

(b) ⾲㠃⢒ࡉ 0

5 10 15 20

1000 2000 3000

✰ቨ㠃⢒ࡉμm

ຍᕤ✰ᩘ

DLC coat Non coat

ᅗ 2-19 ࢻࣜࣝࢥ࣮ࢸ࢕ࣥࢢࡢ㐪࠸࡟ࡼࡿ✰ቨ㠃ࢥࣥࢱ࣮ᅗ࡜✰ቨ㠃⢒ࡉ 60μm 40μm 20μm 0μm

䝥䝸䞁䝖㓄⥺ᯈ䛾ᑠᚄ䝗䝸䝹ຍᕤ䛻㛵䛩䜛◊✲ 㻌

䝥