高性能微細ワイヤ放電加工実現のための Cu-Zr ワイヤ電極の開発

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Cu–Zr ࣡࢖ࣖࡣD–Cu ࡟ࡼࡿᑟ㟁ᒙ࡜ Cu–Zr ໬

ྜ≀࡟ࡼࡿᙉ໬ᒙ࠿ࡽᡂࡿ࣡࢖࡛ࣖ࠶ࡾ5)_{㸪Zr ῧຍ} 㔞࡟ࡼࡗ࡚ᑟ㟁⋡࡜ᘬᙇᙉᗘࢆኚ໬ࡉࡏࡿࡇ࡜ࡀ ࡛ࡁࡿ㸬ࡲࡓ㸪ࡇࡢCu–Zr ࣡࢖ࣖ࡟㯤㖡ࢆࡵࡗࡁࡋ ࡓ㯤㖡ࡵࡗࡁCu–Zr ࣡࢖ࣖ㸪ள㖄ࢆࡵࡗࡁࡋࡓள㖄 ࡵࡗࡁCu–Zr ࣡࢖ࣖࡶヨసࡋ㸪ᚑ᮶ࡢ࣡࢖ࣖ㟁ᴟ࡜ 㸨ᒸᒣ኱Ꮫ኱Ꮫ㝔⮬↛⛉Ꮫ◊✲⛉㸦ᒸᒣᕷ໭༊ὠᓥ୰3-1-1㸧 㸨㸨 ᪥ᮏ࢞࢖ࢩᰴᘧ఍♫㸦ឡ▱┴༙⏣ᕷ๓₲⏫1 ␒ᆅ㸧 ◊ࠉ✲

ຍᕤᛶ⬟ࢆẚ㍑ࡋࡓ㸬 ࡉࡽ࡟㸪㟁ᴟᾘ⪖㸪ຍᕤ୰ࡢᨺ㟁㟁ὶࣆ࣮ࢡ್ࡢ ศᕸࡸᨺ㟁ศᩓ≧ែ㸪ࡉࡽ࡟࣡࢖ࣖᣲື࡟ࡘ࠸࡚ࡶ ホ౯ࡋ㸪ຍᕤ≉ᛶࡢ㐪࠸ࡢせᅉ࡟ࡘ࠸࡚ࡶ⪃ᐹࡋࡓ㸬  ᐇ㦂᪉ἲ ᐇ㦂⿦⨨ ᐇ 㦂ࡣ⢭ᐦ ࣡࢖ࣖᨺ 㟁ຍ ᕤᶵ㸦Sodick ♫〇 AP200L㸧ࢆ⏝࠸࡚⾜ࡗࡓ㸬ຍᕤᾮ࡟ࡣἜຍᕤᾮ 㸦Sodick ♫〇 VITOL2㸧ࢆ㸪ᕤస≀࡟ࡣཌࡉ 1mm ࡢྜ㔠ᕤල㗰SKD11 ࢆ౑⏝ࡋࡓ㸬࣡࢖ࣖᨺ㟁ຍᕤ ᮲௳࡟ࡘ࠸࡚ࡣ㸪ᙜึᨺ㟁ࣃࣝࢫ࢚ࢿࣝࢠ࣮ࡢ኱ࡁ ࠸᮲௳࡛ࡢຍᕤࡀྍ⬟࡛࠶ࡿࡇ࡜ࢆᮇᚅࡋࡓࡀ㸪ࡑ ࡢࡼ࠺࡞᮲௳࡛ࡣᚋ㏙ࡢࡼ࠺࡟ Cu–Zr ࣡࢖ࣖࡢప ࠸ᘬᙇᙉᗘࡢࡓࡵຍᕤ୰࣡࢖ࣖ㟁ᴟࡀ᩿⥺ࡋ㸪ຍᕤ ࡀ୙ྍ⬟࡛࠶ࡗࡓ㸬ࡑࡇ࡛㸪ᕷ㈍ࡢ┤ᚄ 70ȝP 㯤㖡 ࡵࡗࡁࢫࢳ࣮ࣝ࣡࢖ࣖ Steel(Bs)࡛㕲㗰ᮦᩱࢆຍᕤ ࡍࡿሙྜࡢຍᕤᶵ࣓࣮࣮࢝᥎ዡຍᕤ᮲௳࡟‽ࡌࡓ ຍᕤ᮲௳࡛⤫୍ࡋ࡚㸪┤⥺ຍᕤࢆ⾜ࡗࡓ㝿ࡢຍᕤ㏿ ᗘ࡜ຍᕤ⁁ᖜࢆẚ㍑ࡋࡓ㸬ࡲࡓ㸪ຍᕤ୰ࡢᨺ㟁Ἴᙧ ࢆゎᯒࡍࡿ࡜࡜ࡶ࡟㸪ຍᕤ୰ࡢ࣡࢖ࣖᣲືࡸᨺ㟁Ⓨ ⏕఩⨨ࢆ㧗㏿ᗘ࣓࢝ࣛ࡟ࡼࡾほᐹࡋ㸪ホ౯ࡋࡓ㸬 ࣡࢖ࣖ㟁ᴟ ᮏ◊✲࡟⏝࠸ࡓ┤ᚄ70ȝP (┿෇ᗘ: 1ȝP)ࡢ 6 ✀㢮 ࡢ࣡࢖ࣖ㟁ᴟࡢ᩿㠃ᵓ㐀ࢆ)LJ ࡟ᶍᘧⓗ࡟♧ࡍ㸬 (a)㹼(c)ࡣࡍ࡛࡟ᐇ⏝໬ࡉࢀ࡚࠸ࡿ࣡࢖࡛ࣖ㸪(a)ࡣ ᘬᙇᙉᗘࡢ኱ࡁ࠸ࣆ࢔ࣀ⥺ࢆⰺ⥺࡜ࡋභᅄ㯤㖡ࢆ ࡵࡗࡁࡋࡓSteel(Bs)࣡࢖ࣖ㸪(b)ࡣ Steel(Bs)࣡࢖ࣖ ࡟ࡉࡽ࡟ள㖄ࢆࡵࡗࡁࡋࡓ Steel(Bs, Zn)࣡࢖࡛ࣖ ࠶ࡾ㸪ࡵࡗࡁཌࡣ࡝ࡕࡽࡶ4ȝP ࡛࠶ࡿ㸬(c)ࡣࢱࣥࢢ ࢫࢸࣥ࣡࢖࡛ࣖ࠶ࡿ㸬 ࡑࡋ࡚㸪(d)ࡀ௒ᅇ㛤ⓎࡋࡓCu–Zr ࣡࢖࡛ࣖ࠶ࡿ㸬 )LJD࡟ࡑࡢ࣡࢖᩿ࣖ㠃⤌⧊࡜ )LJE࡟࣡࢖ࣖ 㛗ᡭ᪉ྥ᩿㠃⤌⧊ࡢSEM ෗┿ࢆ♧ࡍ㸬ⓑࡃぢ࠼ࡿ ⧄⥔≧࡟ఙࡧࡓඹᬗ┦࡜㸪㯮ࡃぢ࠼ࡿ⧄⥔≧ࡢ Cu ┦࡜ࡢ஧┦⤌⧊ࡀ⏕ᡂࡋ࡚࠸ࡿ㸬ࡉࡽ࡟ࡇࡢඹᬗ┦ ෆ㒊ࡣ㸪ࢼࣀࢫࢣ࣮ࣝࡢCu ⧄⥔࡜ Zr ໬ྜ≀⧄⥔࠿ ࡽᡂࡿ஧㔜ᵓ㐀࡜࡞ࡗ࡚࠸ࡿ㸬๓⪅ࡢCu ⧄⥔ࡣᑟ 㟁ᛶࢆቑ኱ࡉࡏ㸪୍᪉ᚋ⪅ࡢ Zr ໬ྜ≀┦ࡣࢼࣀ⧄ ⥔ᙉ໬ࡍ࡞ࢃࡕ㸪ᘬᙇᙉᗘࢆྥୖࡉࡏࡿ㸬ࡇࢀࡽࡢ ளඹᬗ㸦hypoeutectic㸧⤌⧊ࡢ≉ᚩ࡟ࡼࡗ࡚ Cu–Zr ࣡࢖ࣖࡢ㧗ᙉᗘ࡜㧗ᑟ㟁⋡ࡣኚ໬ࡍࡿ㸬Cu–Zr ࣡࢖ ࣖࡢ኱ࡁ࡞≉ᚩࡣ7DEOH ࡟♧ࡍ㏻ࡾ㸪ᚑ᮶࣡࢖ࣖ ࡜ẚ㍑ࡍࡿ࡜㸪㧗࠸ᑟ㟁⋡࡜࠶ࡿ⛬ᗘࡢᘬᙇᙉᗘࢆ ᭷ࡍࡿࡇ࡜࡛࠶ࡿ㸬)LJ  ࡣ୺せ࡞㖡ྜ㔠⥺ᮦ࡜ Cu–Zr ࣡࢖ࣖࡢᑟ㟁⋡࡜ᘬᙇᙉᗘࢆẚ㍑ࡋ࡚࠸ࡿ4)_㸬 㖡ྜ㔠⥺ᮦࡢᑟ㟁⋡࡜ᘬᙇᙉᗘࡣ୍⯡࡟୍᪉ࡀ㧗 ࠸࡜ࡶ࠺୍᪉ࡀప࠸ࢺ࣮ࣞࢻ࢜ࣇࡢ㛵ಀ࡜࡞ࡗ࡚ ࠸ࡿ㸬ࡓࡔࡋ㸪Cu–Zr ࣡࢖ࣖࡣ௚ࡢ㖡ྜ㔠⥺ᮦࡀᥥ ࡃ᭤⥺ࡼࡾࡶྑୖ࡟఩⨨ࡍࡿ㸬ࡘࡲࡾᑟ㟁⋡࡜ᘬᙇ ᙉᗘࡀඹ࡟㧗ࡃ࠶ࡿ㖡ྜ㔠࡜࡞ࡗ࡚࠸ࡿ㸬ࡉࡽ࡟ Cu–Zr ࣡࢖ࣖࡣ Zr ࡢῧຍ㔞࡟ࡼࡾࡑࡢᙉᗘ࡜ᑟ㟁 ⋡ࢆ ᐜ᫆࡟ไᚚࡍࡿࡇ࡜ࡀྍ⬟࡛࠶ࡿ㸬

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Fig. 1 Cross sections of wire electrodes

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Cu–Zr ࡢ୰࡛᭱ࡶᑟ㟁⋡ࡢ㧗࠸㸪0.25at%ࡢ Zr ࢆ ῧຍࡋࡓ Cu–0.25Zr ࡣᘬᙇᙉᗘࡀ㏻ᖖࡢ࣡࢖ࣖᨺ 㟁ຍᕤ࡛⏝࠸ࡽࢀࡿ┤ᚄ 200ȝP ⛬ᗘࡢ㯤㖡࣡࢖ࣖ 㟁ᴟ࡜ྠ➼࡛࠶ࡾ㸪┤ᚄ 100ȝP ௨ୗࡢ࣡࢖ࣖ㟁ᴟ ࢆ⏝࠸ࡿᚤ⣽࣡࢖ࣖᨺ㟁ຍᕤ࡛ࡣ࣡࢖᩿ࣖ⥺ࡀᐜ ᫆࡟㉳ࡁࡿ࡜ண᝿ࡉࢀࡿࡓࡵ㸪ᮏ◊✲࡛ࡣ 3.0at㸣 ࡢZr ࢆῧຍࡋࡓ Cu–3Zr ࢆ࣡࢖ࣖ㟁ᴟ࡜ࡋ࡚⏝࠸ ࡓ㸬ᘬᙇᙉᗘࡀ㧗ࡃ㸪࠿ࡘᑟ㟁⋡ࡢ㧗࠸Cu–3Zr ࡢ ࣡࢖ࣖ㟁ᴟࢆ⏝࠸࡚༑ศ࡞㟁ὶࢆᴟ㛫࡟౪⤥ࡍࡿ ࡇ࡜࡛㸪኱ࡁ࠸ຍᕤ㏿ᗘࡀᚓࡽࢀࡿ࡜ᮇᚅࡉࢀࡿ㸬 ࡲࡓ㸪᭦࡞ࡿຍᕤ㏿ᗘࡢྥୖࢆ┠ᣦࡋ㸪Cu–Zr ࣡ ࢖ࣖ࡟㯤㖡㸪࠾ࡼࡧள㖄ࢆࡵࡗࡁࡋࡓ(e)Cu–Zr(Bs) ࣡࢖ࣖ㸪 ࠾ࡼࡧ(f)Cu–Zr(Zn)࣡࢖ࣖࢆస〇ࡋࡓ㸬࡞ ࠾㸪Cu–Zr ࡢᚋ࡟࢝ࢵࢥ࡛௜グࡋ࡚࠸ࡿ(Bs)ࡸ(Zn) ࡣ㸪ࡑࢀࡒࢀ㯤㖡㸪ள㖄ࢆࡵࡗࡁࡋࡓ࣡࢖ࣖ㟁ᴟ࡛ ࠶ࡿࡇ࡜ࢆ⾲ࡍ㸬㯤㖡࠾ࡼࡧள㖄ࡢࡵࡗࡁཌࡉࡣࡑ ࢀࡒࢀȝP㸪ȝP ࡛࠶ࡿ㸬 &X±=U ࣡࢖ࣖ㟁ᴟࡢຍᕤᛶ⬟ホ౯ ྛ࣡࢖ࣖࢆ⏝࠸࡚ཌࡉ1mm ࡢ SKD11 ࢆ┤⥺ຍ ᕤࡋࡓ᫬ࡢ┤⥺ຍᕤ㏿ᗘࡢẚ㍑ࢆ)LJ ࡟♧ࡍ㸬ᅗ ࡼࡾ㸪ྠࡌタᐃຍᕤ᮲௳࡟ࡶ࠿࠿ࢃࡽࡎ㸪ᚑ᮶ࡢ Steel(Bs), Steel(Bs, Zn), ࠾ࡼࡧࢱࣥࢢࢫࢸࣥ࣡࢖ ࣖ࡜ẚ࡭࡚ Cu–Zr ࣡࢖ࣖࢆ⏝࠸ࡓሙྜࡢຍᕤ㏿ᗘ ࡣ༙ศ௨ୗ࡜࠿࡞ࡾᑠࡉ࠸ࡇ࡜ࡀࢃ࠿ࡿ㸬 ୍᪉㸪Cu–Zr ࣡࢖ࣖ࡟ࡵࡗࡁࢆࡋࡓ Cu–Zr(Bs)࣡ ࢖ࣖ࡜Cu–Zr(Zn)࣡࢖ࣖࢆ⏝࠸ࡓሙྜࡢຍᕤ㏿ᗘࡣ ࠿࡞ࡾ኱ࡁ࠸㸬≉࡟㸪ள㖄ࡵࡗࡁCu–Zr ࣡࢖ࣖ࡟࠾ ࠸࡚ࡣ㸪ᚑ᮶ࡢ⣽⥺࣡࢖ࣖ㟁ᴟ࡛᭱ࡶຍᕤ㏿ᗘࡢ኱ ࡁ࠸ Steel(Bs, Zn)࣡࢖ࣖࢆ⏝࠸ࡓሙྜࡼࡾࡶ㸪⣙ 1.5 ಸࡶ኱ࡁ࠸ຍᕤ㏿ᗘࢆᚓࡿࡇ࡜ࡀ࡛ࡁࡓ㸬ࡇࡢ ⤖ᯝࡼࡾ㸪ᑟ㟁⋡ࡢ㧗࠸Cu–Zr ࣡࢖ࣖࢆⰺ⥺࡜ࡋ㸪 ࡑࡢ࿘ࡾ࡟㯤㖡ࡸள㖄ࢆࡵࡗࡁࡍࡿࡇ࡜࡟ࡼࡗ࡚ ຍᕤ㏿ᗘࢆྥୖ࡛ࡁࡿࡇ࡜ࡀ᫂ࡽ࠿࡜࡞ࡗࡓ㸬 ࡇࡢຍᕤ࡛ࡢຍᕤ⁁ࡢᖹᆒ⁁ᖜࢆ)LJ ࡟♧ࡍ㸬 ᚑ᮶࣡࢖ࣖ㟁ᴟࡢሙྜࡣຍᕤ⁁ᖜࡀ⣙ 90ȝP~92ȝP㸪 ࡍ࡞ࢃࡕ∦ഃࢡࣜ࢔ࣛࣥࢫࡀ⣙ 10~11ȝP ࡛࠶ࡿࡢ ࡟ᑐࡋ㸪Cu–Zr ⣔ࡢ࣡࢖ࣖࡣ⣙ 96ȝP ௜㏆࡜ຍᕤ⁁ ᖜࡀࡸࡸ኱ࡁ࠸⤖ᯝ࡜࡞ࡗࡓ㸬ࡍ࡞ࢃࡕ㸪ࡵࡗࡁ Cu–Zr ࣡࢖ࣖࡢሙྜ㸪⁁ᖜࡀ኱ࡁࡃ㸪㝖ཤయ✚ࡀ኱ ࡁࡃ࡞ࡿ࡟ࡶ࠿࠿ࢃࡽࡎ㸪┤⥺ຍᕤ㏿ᗘࡀ኱ࡁࡃ࡞ ࡿࡇ࡜ࡀศ࠿ࡗࡓ㸬  ࡵࡗࡁ&X±=U ࣡࢖ࣖࡢຍᕤ㏿ᗘྥୖࡢ⪃ᐹ  ᨺ㟁㟁ὶ್࡜ᨺ㟁ᅇᩘࡢ ᐃ ຍᕤ㏿ᗘྥୖࡢせᅉ࡜ࡋ࡚㸪༢Ⓨᨺ㟁ࡢ㝖ཤయ✚㸪 ࠾ࡼࡧ༢఩᫬㛫ᙜࡓࡾࡢᨺ㟁ᅇᩘ㸪ࡍ࡞ࢃࡕᨺ㟁࿘

)LJ Relations between tensile strength and electrical conductivity for copper alloy wires

)LJ Difference in cutting speed with wire type

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)LJ Analysis method of discharge waveforms

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)LJ Difference in discharge frequency and distribution of current peak value

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Cu–Zr ࣡࢖ࣖ࡜ Cu–Zr(Zn)࣡࢖ࣖ࡟࠾ࡅࡿ㸪ࡑࢀ ࡒࢀࡢ┦ᑐᨺ㟁Ⓨ⏕఩⨨D_Rࢆ)LJD㸪)LJE࡟ ♧ࡍ㸬ᅗ୰ࡢⅬ⥺ࡣ஘ᩘࢆ⏝࠸࡚ࣛࣥࢲ࣒࡞఩⨨࡟ ᨺ㟁ࡀⓎ⏕ࡋࡓሙྜࡢ⌮᝿ⓗ࡞ศᕸࢆ♧ࡋ࡚࠾ࡾ㸪 Cu–Zr ࣡࢖ࣖࡢሙྜࡣ⌮᝿ⓗศᕸ࡜ẚ㍑ࡍࡿ࡜㸪ኚ ఩㔞ࡀs1.0mm ࡢᨺ㟁ࡀ㢧ⴭ࡟ከࡃⓎ⏕ࡋ࡚࠸ࡿ㸬 ࣉࣛࢬ࣐ࡀ᏶඲࡟ᾘỿࡍࡿ๓࡟ḟࡢᨺ㟁ࡀⓎ⏕ࡍ ࡿሙྜ㸪ᨺ㟁ࡣࡑࡢ㏆ഐ࡛Ⓨ⏕ࡋࡸࡍ࠸㸬ᚑࡗ࡚㸪 Cu–Zr ࣡࢖ࣖࡢሙྜ㸪ᨺ㟁ࡀ࠿࡞ࡾ㞟୰ࡋ࡚࠸ࡿ࡜ ุ᩿࡛ࡁࡿ㸬 ୍᪉㸪ள㖄ࢆࡵࡗࡁࡍࡿࡇ࡜࡛ᨺ㟁Ⓨ⏕఩⨨ࡀศ ᩓࡋ(b)ࡢࡼ࠺࡟ᨺ㟁㞟୰ࡀపῶࡋࡓศᕸ࡜࡞ࡿ㸬ࡇ ࡢࡇ࡜ࡼࡾ Cu–Zr ࣡࢖ࣖࡣࡵࡗࡁࢆ᪋ࡍࡇ࡜࡛ᨺ 㟁㞟୰ࡀῶᑡࡋ㸪ຍᕤࡀᏳᐃࡍࡿࡇ࡜ࢆ☜ㄆ࡛ࡁࡓ㸬  㟁ᴟᾘ⪖⋡ ᴟ㛫࡟୚࠼ࡽࢀࡿᨺ㟁࢚ࢿࣝࢠ࣮ࡀᕤస≀࡜࣡࢖ ࣖ㟁ᴟ࡟࡝ࡢࡼ࠺࡟㓄ศࡉࢀࡿࡢ࠿ࢆ⪃ᐹࡍࡿࡓ ࡵ㸪㟁ᴟᾘ⪖⋡ࡢ⟬ฟࢆヨࡳࡓ㸬ཌࡉ 10mm ࡢ SKD11 ࢆ୍ᐃ᫬㛫ຍᕤࡋ㸪ຍᕤ๓ᚋࡢᕤస≀ࡢ㉁ 㔞ࢆࢹࢪࢱࣝࢫࢣ࣮ࣝ࡟ࡼࡾ ᐃࡋࡓ㸬୍᪉㸪࣡࢖ ࣖ㟁ᴟ࡟ࡘ࠸࡚ࡣ࣡࢖ࣖᚄ࡜㉮⾜ࡋࡓ㛗ࡉ࠿ࡽຍ ᕤ๓ࡢ㔜㔞ࢆ⟬ฟࡋ㸪ຍᕤᚋࡣ┦ᙜ㛗ࡉࡢ࣡࢖ࣖ㔜 㔞ࢆᐇ ࡋࡓ㸬ࡑࡋ࡚㸪࣡࢖ࣖ㟁ᴟ࡜ᕤస≀ࡢ㝖ཤ య✚V EV Wࢆ⟬ฟࡋࡓ㸬ồࡵࡓ㝖ཤయ✚ࢆ)LJ ࡟♧ࡍ㸬㟁ᴟࡢᾘ⪖య✚࡟ᑐࡋ࡚ᕤస≀ࡢ㝖ཤయ✚ ࡀ኱ࡁ࠸࡯࡝㸪ᨺ㟁࢚ࢿࣝࢠ࣮ࡀᕤస≀㝖ཤ࡟┦ᑐ ⓗ࡟ከࡃ㈝ࡸࡉࢀࡿࡇ࡜ࢆ♧ࡍ㸬㏫ࡢሙྜࡣ㟁ᴟᾘ ⪖ࡀ┦ᑐⓗ࡟ከࡃ࣡࢖᩿ࣖ⥺ࡢྍ⬟ᛶࡶ㧗࠸ࡇ࡜ ࡟࡞ࡿ㸬ࡵࡗࡁࢆ᪋ࡋ࡚࠸࡞࠸Cu–Zr ࣡࢖ࣖ㟁ᴟࡢ ᾘ⪖㔞ࡀ௚࣡࢖ࣖ࡟ẚ࡭࡚㢧ⴭ࡟኱ࡁࡃ㸪ࡵࡗࡁࢆ ᪋ࡍࡇ࡜࡛࣡࢖ࣖࡢᾘ⪖㔞ࡀపῶࡉࢀ࡚࠸ࡿ㸬ࡵࡗ ࡁCu–Zr ࣡࢖࡛ࣖࡣ㸪๓㏙ࡢࡼ࠺࡟ Cu–Zr ࣡࢖ࣖ ࡼࡾ༢఩᫬㛫ᙜࡓࡾࡢᕤస≀ຍᕤ㔞ࡀቑຍࡋࡓࡇ ࡜࡜Ⰻࡃᑐᛂࡋ࡚࠸ࡿ㸬 ḟ࡟㸪V E࡜V W࠿ࡽ㸪ḟᘧ࡟ࡼࡾ㟁ᴟᾘ⪖⋡߭ࢆ ồࡵࡓ㸬 ߭ ൌ ܸ୉ ܸ୛ ൈ ͳͲͲ ሺʹሻ

)LJ Histograms of relative displacement of spark generation

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)LJ High speed observation of spark location

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)LJ ࡟ྛ࣡࢖ࣖࢆ⏝࠸ࡓ㝿ࡢ㟁ᴟᾘ⪖⋡߭ࢆ♧ ࡍ㸬ᅗࡼࡾ㸪Cu–Zr ࣡࢖ࣖࡣ௚ࡢ࣡࢖ࣖ࡜ẚ㍑ࡋ࡚ 㟁ᴟᾘ⪖⋡ࡀ㢧ⴭ࡟኱ࡁ࡞್ࢆ♧ࡍࡇ࡜ࡀࢃ࠿ࡿ㸬 ࡇࢀࡣ᪩ᕝࡽࡀᣦ᦬ࡋ࡚࠸ࡿࡼ࠺࡟ Cu–Zr ࡢ㧗࠸ ⇕ఏᑟ⋡࡟ࡼࡗ࡚㸪࣡࢖ࣖ㟁ᴟഃ࡟࢚ࢿࣝࢠ࣮㓄ศ ࡀከࡃ࡞ࡿࡓࡵ࡛࠶ࡿ9)_{㸬ࡼࡗ࡚Cu–Zr ࣡࢖ࣖࡣᨺ} 㟁࢚ࢿࣝࢠ࣮ࡀᕤస≀ࡼࡾࡶ࣡࢖ࣖ㟁ᴟࡢ㝖ཤ࡟ ከࡃ㈝ࡸࡉࢀ࡚࠸ࡿࡇ࡜࠿ࡽ㸪Fig. 7 ࡟♧ࡉࢀࡓࡼ ࠺࡟ᨺ㟁㟁ὶ್ࡀ኱ࡁ࠸࡟ࡶ࠿࠿ࢃࡽࡎFig. 3 ࡢࡼ ࠺࡟ຍᕤ㏿ᗘࡀᑠࡉࡃ࡞ࡗࡓ࡜⪃࠼ࡽࢀࡿ㸬୍᪉㸪 ࡇࡢ Cu–Zr ࣡࢖ࣖ࡟ள㖄ࡸ㯤㖡ࢆࡵࡗࡁ᪋ࡍࡇ࡜ ࡟ࡼࡾ࣡࢖ࣖ㟁ᴟഃ࡬ࡢ࢚ࢿࣝࢠ࣮㓄ศࡀῶᑡࡋ㸪 ࠿ࡘᨺ㟁⇿ᅽࡶ኱ࡁࡃ࡞ࡿࡓࡵ㸪ᕤస≀㝖ཤࡶຠ⋡ ࡟⾜ࢃࢀࡿ6)_{㸬ࡼࡗ࡚㸪㟁ᴟࡼࡾࡶᕤస≀ࡢ㝖ཤ࡟} ࢚ࢿࣝࢠ࣮ࡀ㈝ࡸࡉࢀࡿࡇ࡜࡛㸪㟁ᴟᾘ⪖⋡ࡣ࠿࡞ ࡾᑠࡉࡃ࡞ࡿ㸬ᚑࡗ࡚ࡵࡗࡁCu–Zr ࣡࢖ࣖࡢຍᕤ㏿ ᗘࡣࡵࡗࡁࢆ᪋ࡋ࡚࠸࡞࠸ Cu–Zr ࣡࢖ࣖࡢຍᕤ㏿ ᗘࡢ2 ಸ࠿ࡽ 3 ಸࡲ࡛ቑຍࡋࡓ࡜ゝ࠼ࡿ㸬  ຍᕤ୰ࡢ࣡࢖ࣖ᣺ᖜホ౯ Cu–Zr ࣡࢖ࣖࡣ Table 1 ࡟♧ࡋࡓࡼ࠺࡟ᚑ᮶ࡢ࣡ ࢖ࣖ࡜ẚ㍑ࡋ࡚㧗࠸ᑟ㟁⋡ࢆ᭷ࡍࡿࡶࡢࡢ㸪ᘬᙇᙉ ᗘࡣẚ㍑ⓗᑠࡉ࠸㸬ࡑࡢࡓࡵ㸪ຍᕤ୰ࡢ࣡࢖ࣖ᣺ື ᣺ᖜࡀ኱ࡁࡃ࡞ࡾ10)_{㸪Fig. 4 ࡢࡼ࠺࡟ຍᕤ⁁ᖜࡀ኱} ࡁࡃ࡞ࡗࡓྍ⬟ᛶࡀ࠶ࡿ㸬ࡑࡇ࡛㸪)LJ ࡟♧ࡍࡼ ࠺࡟㧗㏿ᗘ࣓࢝ࣛࢆ⏝࠸࡚ Cu–Zr ࣡࢖ࣖ࡜ᚑ᮶ࡢ ࣡࢖ࣖ࡜ࡢຍᕤ୰࡟࠾ࡅࡿ࣡࢖ࣖࡢ᣺ື᣺ᖜࢆẚ ㍑ࡋࡓ㸬Fig. 12 ࡟♧ࡍࡼ࠺࡟㸪ຍᕤ᪉ྥᚋ᪉࠿ࡽࡑ ࡢᵝᏊࢆ᧜ᙳࡋࡓ㸬ど㔝ࡢࢧ࢖ࢬࡣ0.4™0.2mm ࡜ ࡋ㸪ᕤస≀࡜ࡋ࡚ཌࡉ1mm ࡢ SKD11 ࢆ⏝࠸ࡓ㸬 ᧜ᙳ⟠ᡤࡣᕤస≀ୖ➃࠿ࡽ1mm ࡢ఩⨨࡛࠶ࡿ㸬)LJ  ࡟ྛ࣡࢖ࣖ㟁ᴟ࡟࠾ࡅࡿຍᕤ୰ࡢ࣡࢖ࣖ᭱኱᣺ ᖜࢆ♧ࡍ㸬ᅗࡼࡾྛ࣡࢖ࣖ㟁ᴟࡢ᭱኱᣺ᖜ࡟ᴟ➃࡞ ᕪࡣぢࡽࢀࡎ࣡࢖ࣖ┤ᚄ70ȝP ࡟ᑐࡋ㸪᣺ᖜࡢᕪࡣ 2ȝP ௨ෆ࡛࠶ࡿ㸬ࡑࡋ࡚㸪ຍᕤ⁁ᖜࡢᗈ࠿ࡗࡓࡵࡗ ࡁ Cu–Zr ࣡࢖ࣖࡢ᪉ࡀࡴࡋࢁຍᕤ୰ࡢ࣡࢖ࣖ㟁ᴟ ࡢ᣺ື᣺ᖜࡣᑠࡉ࠸ࡇ࡜ࡀศ࠿ࡿ㸬ᚑࡗ࡚Cu–Zr ࣡ ࢖ࣖࡸࡵࡗࡁ&X–=U ࣡࢖ࣖࡢຍᕤ⁁ᖜࡀ኱ࡁ࠸せᅉ ࡣຍᕤ୰ࡢ࣡࢖ࣖ᣺ື᣺ᖜ࡟ࡼࡿࡶࡢ࡛ࡣ࡞ࡃ㸪๓ ㏙ࡢࡼ࠺࡟㸪ࡼࡾ኱ࡁ࡞࢚ࢿࣝࢠ࣮ࡢᨺ㟁ࡀຍᕤ㐍 ⾜᪉ྥࡔࡅ࡛࡞ࡃຍᕤ⁁᪉ྥࡢᕤస≀㝖ཤ࡟ࡶస ⏝ࡋ࡚࠸ࡿ࡜⪃࠼ࡽࢀࡿ㸬  ⤖ ㄽ  ᮏ◊✲࡛ࡣ㸪㧗ᛶ⬟࡞࣡࢖ࣖ㟁ᴟࡢ㛤Ⓨࢆ┠ⓗ࡜ ࡋ࡚Cu–Zr ࣡࢖ࣖ㟁ᴟࢆヨసࡋ㸪ࡑࡢຍᕤ≉ᛶ࡟ࡘ ࠸࡚ᐇ㦂ⓗ᳨ウࢆ⾜ࡗࡓ㸬 ᮏ◊✲࡛ᚓࡽࢀࡓ⤖ㄽ ࡣ௨ୗࡢ㏻ࡾ࡛࠶ࡿ㸬

)LJ High-speed observation area of wire during wire EDM

)LJ Difference in electrode wear ratio with wire type

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)LJ Difference in wire vibration amplitude with wire type

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(1) Cu–Zr ࣡࢖ࣖ㟁ᴟࡣࡵࡗࡁࡢ᭷↓࡟㛵ࢃࡽࡎ㸪 ᨺ㟁㟁ὶࣆ࣮ࢡ್ࡀᚑ᮶࣡࢖ࣖ㟁ᴟࢆ⏝࠸ࡓሙ ྜ࡜ẚ࡭࡚኱ࡁ࠸㸬 (2) Cu–Zr ࣡࢖ࣖ㟁ᴟ࡟㯤㖡ࡸள㖄ࡵࡗࡁࢆ᪋ࡍࡇ ࡜࡛ᨺ㟁࿘Ἴᩘࡀ㧗ࡃ࡞ࡿ㸬 (3) Cu–Zr ࣡࢖ࣖ㟁ᴟ࡟ࡵࡗࡁࢆ᪋ࡍࡇ࡜࡟ࡼࡗ࡚㸪 ᕤస≀࡟㓄ศࡉࢀࡿᨺ㟁࢚ࢿࣝࢠ࣮ࡀቑ኱ࡋ㸪ᚑ ᮶࣡࢖ࣖ㟁ᴟ࡜ẚ㍑ࡋ1.5 ಸ௨ୖຍᕤ㏿ᗘࡀቑ኱ ࡍࡿ㸬 (4) Cu–Zr ࣡࢖ࣖ㟁ᴟࢆ⏝࠸ࡓሙྜ㸪ຍᕤ୰ࡢ࣡࢖ ࣖࡢ᣺ື᣺ᖜࡣᚑ᮶࣡࢖ࣖ㟁ᴟ࡜࡯ࡰྠ➼࡛࠶ ࡿ㸬 ཧ⪃ᩥ⊩  ∦ᖹᩗᏊ㸸᭱᪂ࡢᚤ⣽ຍᕤᢏ⾡㸪ᆺᢏ⾡㸪9RO1R SS-  ᮾ⬥ṇ᫂㸪∦⏣ెᏊ㸸᪂ᆺไᚚ⿦⨨ࠕ'–&8%(6ࠖᦚ㍕ ᪂ᆺ࣡࢖ࣖᨺ㟁ຍᕤᶵ㸪ᆺᢏ⾡㸪9RO 1R  SS  -:X0=KRX;;X-<DQJ==HQJDQG';X)DVWDQG VWDEOH HOHFWULFDO GLVFKDUJH PDFKLQLQJ ('0 0HFKDQLFDO 6\VWHPVDQG6LJQDO3URFHVVLQJ9ROSS  I. Maher, A. A. D. Sarhan, and M. Hambi: Review of improvements in wire electrode properties for longer working time and utilization in wire EDM machining,

International Journal of Advanced Manufacturing Technology, Vol.76 (2015) pp.329-351.

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ᙉᗘࢆᣢࡘCu-Zr ྜ㔠⥺ࡢ㛤Ⓨ࡜ࡑࡢ࣑ࢡࣟ⤌⧊㸪᪥

ᮏ㔠ᒓᏛ఍ㄅ㸪Vol.75㸪No.3 (2011) pp.159-165.  X. Yue, X. Yang and M. Kunieda: Influence of metal

vapor jets from tool electrode on material removal of workpiece in EDM, Precision Engineering, Vol.53 (2018) pp.278-288.

 I. Cabanes, E. Portillo, M. Marcos, and J. Sanchez: An industrial application for on–line detection of instability and wire breakage in wire EDM, Journal of Materials Processing Technology, Vol.195, No.1-3 (2008) pp.101-109.

 A. Okada, Y. Uno, and M. Nakazawa: Evaluations of spark distribution and wire vibration in wire EDM by high-speed observation, CIRP Annals, Vol.59 (2010) pp.231-234.

 ᪩ᕝఙဢ㸪ᅜᯞṇ඾㸪す⬥ಙᙪ㸸ᨺ㟁ຍᕤ࡟࠾ࡅࡿ㟁ᴟ ᮦᩱࡀ࢚ࢿࣝࢠ࣮㓄ศ࡟ཬࡰࡍᙳ㡪㸪㟁ẼຍᕤᏛ఍඲ ᅜ኱఍ㅮ₇ㄽᩥ㞟㸪(1996) pp.21-24.

10) A. Okada, S. Ichii, and Y. Okamoto: Investigation of Wire Movement in Fine Wire EDM by High-speed Observation, International Journal of Electrical Machining, No.18 (2013) pp.43-48.