Study on discharge characteristics of the ESD protection material and the effect of protection element

㟼㟁Ẽᑐ⟇ᮦᩱࡢᨺ㟁≉ᛶཬࡧ ಖㆤ⣲Ꮚࡢຠᯝ

Study on discharge characteristics of the ESD protection material and the effect of protection element

኱ὠᏕె

ࠊᇽᒣⱥஅࠊ㮛ᆏຌ୍

Takayoshi Ohtsu¹, Hideyuki Doyama, and Kouichi Sagisaka²

἟ὠᕤᴗ㧗➼ᑓ㛛Ꮫᰯ

ᰴἜ໬㟁Ꮚ

National Institute of Technology

, Yuka Denshi Co., Ltd

࠙せ᪨ࠚ

ᦠᖏ㟁ヰࠊࢫ࣐࣮ࢺࣇ࢛ࣥࠊࢱࣈࣞࢵࢺ➃ᮎ࡞࡝ࣘࣅ࢟ࢱࢫ᫬௦ࡢ฿᮶࡜࡜ࡶ࡟ࠊ༙ᑟయ〇 ရࡀᵝࠎ࡞⎔ቃୗ࡛౑ࢃࢀࡿࡼ࠺࡟࡞ࡗ࡚࠸ࡿࠋ≉࡟ࠊ㟼㟁Ẽ࡟ࡼࡾᩘ kV ࡟ᖏ㟁ࡋࡓேయ

࠿ࡽࡢᨺ㟁ࠊᦶ᧿ࡸ㟼㟁ㄏᑟ࡟ࡼࡗ࡚ᖏ㟁ࡋࡓᶵჾ࡜ࡢ᥋⥆࡟ࡼࡿᨺ㟁࡞࡝ࠊ㟼㟁Ẽᨺ㟁࡟

ࡼࡿ㟁Ꮚᶵჾࡢ◚ቯࡸㄗືసࡣ῝้࡞ၥ㢟࡛࠶ࡿࠋࡼࡗ࡚ࠊࢥ࣏࣮ࣥࢿࣥࢺ࡛ࣞ࣋ࣝࡢ㟼㟁 Ẽᑐ⟇ࡢࡳ࡞ࡽࡎࠊࢩࢫࢸ࣒࡛ࣞ࣋ࣝࡢ㟼㟁Ẽᑐ⟇ࡀᛴົ࡜ࡉࢀࡿࠋᮏሗ࿌࡛ࡣࠊESD࢞ࣥ

༳ຍ᫬ࡸ㟼㟁Ẽᨺ㟁᫬ࡢᨺ㟁㟁ᅽἼᙧࠊᨺ㟁㟁ὶἼᙧࠊᨺᑕ㟁☢ἼἼᙧࡀྠ᫬࡟ほᐹ࡛ࡁࡿ

⿦⨨ࢆ㛤Ⓨࡋࠊྛ✀㟼㟁Ẽᑐ⟇ᮦᩱࡢほᐹ⤖ᯝ࡜ඹ࡟ಖㆤ⣲Ꮚ࡜ࡢẚ㍑⤖ᯝ࡟ࡘ࠸࡚㏙࡭ࡿࠋ

㸯㸬ࡣࡌࡵ࡟

ᦠᖏ㟁ヰࠊࢫ࣐࣮ࢺࣇ࢛ࣥࠊࢱࣈࣞࢵࢺ➃ ᮎ࡞࡝ࣘࣆ࢟ࢱࢫ᫬௦ࡢ฿᮶࡜࡜ࡶ࡟ࠊ༙ᑟ య〇ရࡀᵝࠎ࡞⎔ቃୗ࡛౑ࢃࢀࡿࡼ࠺࡟࡞ࡗ

࡚࠸ࡿࠋ≉࡟ࠊ㟼㟁Ẽ࡟ࡼࡾᩘkV࡟ᖏ㟁ࡋࡓ

ேయ࠿ࡽࡢᨺ㟁ࠊᦶ᧿ࡸ㟼㟁ㄏᑟ࡟ࡼࡗ࡚ᖏ 㟁ࡋࡓᶵჾ࡜ࡢ᥋⥆࡟ࡼࡿᨺ㟁࡞࡝ࠊ㟼㟁Ẽ ᨺ㟁࡟ࡼࡿ㟁Ꮚᶵჾࡢ◚ቯࡸㄗືసࡣ῝้࡞

ၥ㢟࡛࠶ࡿ>@ࠋ ᖺ⡿ᅜ࢔ࣜࢰࢼ࡛㛤ദ ࡉࢀࡓ༙ᑟయᅜ㝿఍㆟,536㸸,QWHUQDWLRQDO 5HOLDELOLW\3K\VLFV6\PSRVLXPࠖ࡟࠾࠸࡚ࠊ

&KUYDND'XYYXU Ặ㸦7,㸧ࢆጞࡵ࡜ࡍࡿ༙ᑟయ

〇㐀ࢢ࣮ࣝࣉࡼࡾࠊ௒ᚋࠊಖㆤ⣲Ꮚࡢࡳ࡛ࡢ

⥅⥆ⓗᑐᛂࡣ୙ྍ⬟࡛࠶ࡿࡇ࡜ࡀሗ࿌ࡉࢀࡓ

>@ࠋࡑࢀ࡟ᇶ࡙ࡁࠊ⤌❧ᕤ⛬࡟࠾ࡅࡿ㟼㟁Ẽ

࠼ࡤࠊ༙ᑟయ㧗ᶵ⬟໬㸦ᚤ⣽໬㸧࡜ (6' ⪏ᛶ ࡣࢺ࣮ࣞࢻ࢜ࣇ㛵ಀ࡟࠶ࡾࠊࢥ࣏࣮ࣥࢿࣥࢺ

࡛ࣞ࣋ࣝࡢ㟼㟁Ẽ⪏ຊࢆᚑ᮶㏻ࡾࡢ࡛ࣞ࣋ࣝ

⥔ᣢࡍࡿࡇ࡜ࡀᅔ㞴࡛࠶ࡿ࡜ࡋࠊ6\VWHP/HYHO

࡛ ࡢ ᑐ ⟇ ࢆ ⾜ ࠺ ࡜ ࡢ 㔜 せ ᛶ ࡜ ࡋ ࡚ ࠊ ,QGXVWULDO&RXQFLO ࡸ⡿ᅜ (6'$VVRFLDWLRQ ࡢ୰࡛ :KLWH3DSHU6\VWHP/HYHO(6'3DUW , &RPPRQ 0LVFRQFHSWLRQV DQG 5HFRPPHQGHG

%DVLF$SSURDFKHV㸧➼ ࢆసᡂ ࡋ࡚࠸ ࡿ

>@ࠋࡲࡓࠊ㟼㟁Ẽ⪏ຊࡢホ౯᪉ἲࡣࠊHBM 㸦ேయᖏ㟁ࣔࢹࣝ㸧࡟ࡼࡿESD࢞ࣥホ౯࡜ࡉ

ࢀࠊ〇ရရ㉁ࡢᇶᮏ࡜ࡉࢀ࡚࠸ࡿࠋࡋ࠿ࡋ࡞

ࡀࡽࠊࡇࡢホ౯⤖ᯝࡔࡅ࡛ࡣࠊ୙Ⰻゎᯒࡢ⤖

ᯝ࡜ࡣᚲࡎࡋࡶ୍⮴ࡋ࡚࠸࡞࠸ࠋ௒ᚋࠊ༙ᑟ యࡢࢥ࣏࣮ࣥࢿࣥࢺ࡛ࣞ࣋ࣝࡢ㟼㟁Ẽ௙ᵝࢆ

➨䠍㻞ᅇ䚷䛂Ᏹᐂ⎔ቃ䝅䞁䝫䝆䜴䝮䛃ㅮ₇ㄽᩥ㞟 㻞㻝㻟

⏝⎔ቃࢆ⪃៖ࡋࡓ㟼㟁Ẽ௙ᵝ࡜ࡢ㛵ಀࢆ᫂☜

࡟ࡍࡿᚲせࡀ࠶ࡿࠋࡑࡇ࡛ࠊᮏ◊✲ࡢ┠ⓗࡣࠊ ಖㆤ⣲Ꮚ࡬ࡢ (6' ࢞ࣥ༳ຍ᫬ࡢᨺ㟁㟁ὶἼᙧ ࡢࡳ࡞ࡽࡎࠊᨺᑕ㟁☢ἼἼᙧཬࡧࠊᨺ㟁㟁ᅽ Ἴᙧࡢほᐹ࡛ࡁࡿ㟼㟁Ẽᨺ㟁ほᐹ⿦⨨࡟ࡼࡾࠊ ಖㆤ⣲Ꮚ࡟ࡼࡿᨺ㟁㟁ὶࠊᨺ㟁㟁ᅽࠊᨺᑕ㟁

☢Ἴࡢ㐪࠸ࢆㄪ࡭ࠊࢩࢫࢸ࣒࡛ࣞ࣋ࣝࡢ㟼㟁 Ẽᨺ㟁ᑐ⟇ࢆᨭ᥼ࡍࡿࡇ࡜࡟࠶ࡿࠋ

㸰㸬ᐇ㦂᪉ἲ

ᐇ㦂࡟⏝࠸ࡿࡓࡵ࡟᪂ࡓ࡟ᵓ⠏ࡋࡓ㟼㟁Ẽ ᨺ㟁ほᐹࢩࢫࢸ࣒ࡢእほࢆᅗ ࡟♧ࡍࠋ㟼 㟁Ẽᨺ㟁ほᐹࢩࢫࢸ࣒ࡣࠊᖏ㟁ࣉ࣮ࣞࢺࠊࣟ

࣎ࢵࢺ࢔࣮࣒ࠊࣉ࣮ࣟࣈࠊ㧗⪏ᅽ࣭㧗࿘Ἴ࢔

ࢵࢸࢿ࣮ࢱࠊ࢜ࢩࣟࢫࢥ࣮ࣉ࠿ࡽᵓᡂࡉࢀ࡚

࠸ࡿࠋ

ᅗ 㟼㟁Ẽᨺ㟁ほᐹࢩࢫࢸ࣒

ᅗ ᖏ㟁ࣉ࣮ࣞࢺ

ᅗ ࣉ࣮ࣟࣈ

ᅗ 㟼㟁Ẽᨺ㟁ほᐹࢩࢫࢸ࣒ࡢࣈࣟࢵࢡᅗ

ᅗ ࡟♧ࡍᖏ㟁ࣉ࣮ࣞࢺࡢୖ࡟⨨࠸ࡓࢧ

ࣥࣉࣝࡣ N9 ࡟ᖏ㟁ࡉࡏࠊᅗ ࡢࣉ࣮ࣟ

ࣈࡣࠊ᥋㏆㏿ᗘࡸ᥋ゐ఩⨨ࢆ୍ᐃ࡜ࡍࡿࡓࡵ

࡟ࣟ࣎ࢵࢺ࢔࣮࣒࡟ྲྀࡾ௜ࡅࡓࠋࣉ࣮ࣟࣈࡣࠊ ᅗ ࡢࡼ࠺࡟ࠊ㧗⪏ᅽ࣭㧗࿘Ἴ࢔ࢵࢸࢿ࣮

ࢱࠊ࢝ࣞࣥࢺࢺࣛࣥࢫ&7ࠊཬࡧࣔࣀ࣏࣮

ࣝ࢔ࣥࢸࢼPPࢆ⤌ࡳྜࢃࡏࠊ࢜ࢩࣟࢫࢥ

࣮ࣉ/HFUR\:DYH5XQQHU=L*+]࡛ࡑ

ࢀࡒࢀᨺ㟁㟁ᅽἼᙧࠊᨺ㟁㟁ὶἼᙧཬࡧᨺᑕ 㟁☢ἼἼᙧࢆྛࢧࣥࣉࣝ࡟ࡘࡁ ᅇほᐹࡋࡓࠋ

ࢧࣥࣉࣝࡣࠊᑟ㟁ᛶ࣏࣮ࣜ࢝࣎ࢿ࣮ࢺᶞ⬡

&17㸸࣮࢝࣎ࣥࢼࣀࢳ࣮ࣗࣈࠊ&)㸸࣮࢝࣎ࣥ

ࣇ࢓࢖ࣂ࣮ࠊ&1)㸸࣮࢝࣎ࣥࢼࣀࣇ࢓࢖ࣂ࣮ࡢ ✀㢮ࡢᑟ㟁ᛶࣇ࢕࣮ࣛࡀࡑࢀࡒࢀ⦎ࡾࡇࡲ

ࢀࡓࡶࡢࠊᑟ㟁ᛶࢭ࣑ࣛࢵࢡࢫࠊࢫࢸࣥࣞ

ࢫࢆ⏝࠸ࡓࠋ⾲㠃᢬ᢠࡣ (㹼(Ȑ ࡛࠶

ࡾࠊ⾲㠃᢬ᢠィ㸦$/&6WDWLFLGH$/&㸧࡟

ࡼࡗ࡚ ᐃࡋࡓࠋᑟ㟁ᛶ」ྜᶞ⬡࡟⦎ࡾࡇࡲ

ࢀࡓᑟ㟁ᛶࣇ࢕࣮ࣛࡢ⧄⥔ᚄࡣࡑࢀࡒࢀ &) ࡛ ࡣ ȣPࠊ&1) ࡣ QPࠊ&17 ࡣ QP ࡛࠶ࡿࠋ

ࡲࡓᑟ㟁ᛶᶞ⬡࡟࠾࠸࡚ࠊᑟ㟁ᛶࣇ࢕࣮ࣛࡢ ༨ࡵࡿ๭ྜࡣ௨ୗࡢ㏻ࡾ࡛࠶ࡿࠋ

࣭&17 㸸&17ࠊ&17ࠊ&17㸦ࣇ࢕

࣮ࣛࡀ༨ࡵࡿ๭ྜ 㹼ZW㸧

࣭&)㸸&)ࠊ&)㸦ࣇ࢕࣮ࣛࡀ༨ࡵ

ࡿ๭ྜ 㹼ZW㸧

࣭&1) 㸸&1)ࠊ&1)㸦ࣇ࢕࣮ࣛࡀ༨

ࡵࡿ๭ྜ 㹼ZW㸧

㸱㸬

ᐇ㦂⤖ᯝཬࡧ⪃ᐹ

௨ୗ࡟ࠊ඾ᆺⓗ࡞Ἴᙧࡢ౛ࢆ♧ࡍࠋ㯤Ⰽ

ୖ&ࡀᨺ㟁㟁ὶἼᙧࠊ㉥Ⰽ୰&ࡀ㟁ᅽ Ἴᙧࠊ㟷Ⰽୗ&ࡀᨺᑕ㟁☢ἼἼᙧ࡛࠶ࡿࠋ

᫬㛫㍈ࡣ࠸ࡎࢀࡶ QVGLY ࡛࠶ࡿࠋ

Ᏹᐂ⯟✵◊✲㛤Ⓨᶵᵓ≉ู㈨ᩱ䚷㻶㻭㼄㻭㻙㻿㻼㻙㻝㻡㻙㻜㻝㻞 㻞㻝㻠

ᅗ &)

&9GLY&9GLY&P9GLY

ᅗ &1)

&9GLY&P9GLY&P9GLY

ᅗ &17

&P9GLY&P9GLY&P9GLY

ᨺ㟁㟁ὶ

ᅗ ࡟ᨺ㟁㟁ὶࡢ⾲㠃᢬ᢠ౫Ꮡᛶࢆ♧ࡍࠋ ᶓ㍈ࡣ⾲㠃᢬ᢠࠊ⦪㍈ࡣᨺ㟁㟁ὶ࡛࠶ࡿࠋ

ᅗ ᨺ㟁㟁ὶࡢ⾲㠃᢬ᢠ౫Ꮡᛶ

ᨺ㟁㟁ὶ್ࡣ⾲㠃᢬ᢠࡀ኱ࡁࡃ࡞ࡿ࡯࡝ᑠࡉ ࡃ࡞ࡿࠋ&17 ࡢᨺ㟁㟁ὶࡣ௚࡜ẚ࡭࡚పࡃࠊྠ

ࡌ⾲㠃᢬ᢠ࡛ࡶ &) ࡼࡾ &17 ࡣ⣙ ᱆ᑠࡉ࠸ࠋ ᨺ㟁㟁ὶࡢప࠸ࡶࡢ࠿ࡽ &17ࠊ&1)ࠊᑟ㟁ᛶࢭ

࣑ࣛࢵࢡࢫࠊ&) ࡢ㡰࡜࡞ࡿࠋ

ᨺ㟁㟁ᅽ

ᅗ ࡟ᨺ㟁㟁ᅽࡢ⾲㠃᢬ᢠ౫Ꮡᛶࢆ♧ࡍࠋ ᶓ㍈ࡣ⾲㠃᢬ᢠࠊ⦪㍈ࡣᨺ㟁㟁ᅽ࡛࠶ࡿࠋ

ᨺ㟁㟁ᅽࡣ⾲㠃᢬ᢠࡀ኱ࡁࡃ࡞ࡿ࡯࡝ᑠࡉ ࡃ࡞ࡿࠋ&17 ࡢᨺ㟁㟁ὶࡣ௚࡜ẚ࡭࡚పࡃࠊྠ

ࡌ⾲㠃᢬ᢠ࡛ࡶ &) ࡼࡾ &17 ࡣ⣙ ᱆ᑠࡉ࠸ࠋ ᨺ㟁㟁ᅽࡢప࠸ࡶࡢ࠿ࡽ &17ࠊ&1)ࠊ&)ࠊᑟ㟁 ᛶࢭ࣑ࣛࢵࢡࢫࡢ㡰࡜࡞ࡿࠋ

ᅗ ᨺ㟁㟁ᅽࡢ⾲㠃᢬ᢠ౫Ꮡᛶ

ᨺᑕ㟁☢Ἴ

ᅗ ࡟ᨺᑕ㟁☢Ἴᙉᗘࡢ⾲㠃᢬ᢠ౫Ꮡᛶ

ࢆ♧ࡍࠋᶓ㍈ࡣ⾲㠃᢬ᢠࠊ⦪㍈ࡣᨺᑕ㟁☢Ἴ

࡛࠶ࡿࠋ

➨䠍㻞ᅇ䚷䛂Ᏹᐂ⎔ቃ䝅䞁䝫䝆䜴䝮䛃ㅮ₇ㄽᩥ㞟 㻞㻝㻡

ᨺᑕ㟁☢Ἴᙉᗘࡣ⾲㠃᢬ᢠࡀ኱ࡁࡃ࡞ࡿ࡯࡝

ᑠࡉࡃ࡞ࡿࠋ&17 ࡣ඲࡚ࡢ୰࡛࠸ࡕࡤࢇᨺᑕ㟁

☢Ἴᙉᗘࡀప࠸ࠋᨺᑕ㟁☢Ἴࡢప࠸ࡶࡢ࠿ࡽ

&17ࠊ&1)ࠊᑟ㟁ᛶࢭ࣑ࣛࢵࢡࢫࠊ&) ࡢ㡰࡜࡞

ࡿࠋ

ṧ␃㟁ᅽ

ᅗ ࡟⾲㠃᢬ᢠ࡜ṧ␃㟁ᅽࡢ㛵ಀࢆ♧ࡍࠋ ࡇࡇ࡛ࡢṧ␃㟁ᅽ࡜ࡣࠊᨺ㟁ᚋ࡟ᖏ㟁ࣉ࣮ࣞ

ࢺࡢ㟁ᅽ⾲♧㒊࡟⾲♧ࡉࢀࡿ㟁ᅽࡢࡇ࡜࡛࠶

ࡿࠋ

ᅗ ṧ␃㟁ᅽ

ᅗ୰࡟ࡣ♧ࡋ࡚࠸࡞࠸ࡀ &HUDPLF ࡣࠊN9

࡛࠶ࡗࡓࠋ&) ࡣṧ␃㟁ᅽࡢࡤࡽࡘࡁࡀ㠀ᖖ࡟

኱ࡁ࠸ࠋ

㸲ಖㆤ⣲Ꮚࡢຠᯝ

㟼㟁Ẽᑐ⟇ᮦᩱࡢホ౯ࢆ⾜࠺ࡓࡵ࡟ࠊಖㆤ

⣲Ꮚࡢຠᯝ࡟ࡘ࠸᳨࡚ウࡋࠊẚ㍑ࢆ⾜ࡗࡓࠋ

ᐇ㦂᪉ἲ

ᅗ ࡟♧ࡍࡼ࠺࡟ࠊ㟼㟁Ẽᨺ㟁ほᐹࢩࢫ ࢸ࣒ࢆ⏝࠸࡚ࢸࢫࢺ࣮࣎ࢻ࡟ (6' ࢞ࣥ࡟ࡼࡗ

࡚༳ຍ㟁ᅽࢆ┤᥋ᨺ㟁ࡉࡏࡓ࡜ࡁࡢᨺ㟁㟁 ὶ࣭㟁ᅽࠊᨺᑕ㟁☢ἼἼᙧࢆ࢜ࢩࣟࢫࢥ࣮ࣉ

࡛ほᐹࡋࡓࠋࢸࢫࢺ࣮࣎ࢻ࡟ࡣࠊಖㆤ⣲Ꮚ࠶

ࡾࠊಖㆤ⣲Ꮚ࡞ࡋࢆ⏝࠸ࡓࠋ

ᅗ 㟼㟁Ẽᨺ㟁ほᐹࢩࢫࢸ࣒

Ἴᙧࡢほᐹ

௨ୗ࡟ࠊ㟁ὶἼᙧ㸦ୖ&㸧࣭㟁ᅽἼᙧ 㸦୰&㸧࣭ᨺᑕ㟁☢ἼἼᙧ㸦ୗ&㸧ࡢほᐹ౛

ࢆ♧ࡍࠋ᫬㛫㍈ࡣ࠸ࡎࢀࡶ QVGLY ࡛࠶ࡿࠋ

ᅗ ಖㆤ⣲Ꮚ࡞ࡋN9

&P9GLY&P9GLY&P9GLY

ᅗ ಖㆤ⣲Ꮚ࠶ࡾN9

&P9GLY&P9GLY&P9GLY

㟼㟁Ẽᑐ⟇ᮦᩱࡢᨺ㟁≉ᛶ࡜ಖㆤ⣲Ꮚࡢ

ຠᯝࡢẚ㍑

ᅗ 㟼㟁Ẽᑐ⟇ᮦᩱ࡜ಖㆤ⣲Ꮚࡢẚ㍑ࢆ

♧ࡍࠋಖㆤ⣲Ꮚࡢタィ࡟ࡣ㟁ᅽࡀ⏝࠸ࡽࢀ࡚

࠸ࡿࡢ࡛ࠊࡇࡇ࡛ࡣᨺ㟁㟁ᅽ࡟ࡘ࠸࡚ࠊ㟼㟁 Ẽᑐ⟇ᮦᩱࠊಖㆤ⣲Ꮚ࡞ࡋࠊಖㆤ⣲Ꮚ࠶ࡾࡢ

⤖ᯝࢆ⏝࠸࡚ẚ㍑ࢆ⾜ࡗࡓࠋᅗ ࡢୖഃࡢ

◚⥺ࡣࠊಖㆤ⣲Ꮚ࡞ࡋࡢ N9 ࡢ್ࠊୗഃࡢ

◚⥺ࡣಖㆤ⣲Ꮚ࠶ࡾࡢ N9 ࡢ್࡛࠶ࡿࠋ

Ᏹᐂ⯟✵◊✲㛤Ⓨᶵᵓ≉ู㈨ᩱ䚷㻶㻭㼄㻭㻙㻿㻼㻙㻝㻡㻙㻜㻝㻞 㻞㻝㻢

ᅗ ᮦᩱࡢ⾲㠃᢬ᢠ࡜ᨺ㟁㟁ᅽࡢ㛵ಀ࡜

ಖㆤ⣲Ꮚࡢຠᯝࡢẚ㍑

ᅗ ࡼࡾࠊ&) ࡢ⾲㠃᢬ᢠ್ࡀ ( ࡢࡶࡢ

&)ࡀಖㆤ⣲Ꮚ࡜ྠ➼⛬ᗘࡢຠᯝࡀ࠶ࡿ࡜

⪃࠼ࡽࢀࡿࠋࡲࡓࠊᑟ㟁ᛶࢭ࣑ࣛࢵࢡࢫࡸࠊ

&1) ࡢ⾲㠃᢬ᢠ್ࡀ ( ࡢࡶࡢ&1)ࡸᑟ 㟁ᛶࢭ࣑ࣛࢵࢡࢫ&HUDPLFࠊ&HUDPLFࠊ

&) ࡢ⾲㠃᢬ᢠ್ࡀ ( ࡢࡶࡢ&)ࡢຠᯝ ࡣಖㆤ⣲Ꮚࡼࡾຠᯝࡀᑠࡉ࠸ࡇ࡜ࡀࢃ࠿ࡿࠋ ࡉࡽ࡟ࠊ&17 ࡣಖㆤ⣲Ꮚ 㹼 ಸࡢຠᯝࡀ࠶

ࡿࡇ࡜ࡀࢃ࠿ࡿࠋ

ࡇࢀ࡟ࡼࡾࠊᮦᩱࡢຠᯝ࡜ಖㆤ⣲Ꮚࡢຠᯝ

ࢆᑐᛂࡉࡏࡿࡇ࡜ࡀฟ᮶ࡓࠋࡇࡢࡼ࠺࡟ಖㆤ

⣲Ꮚࡢຠᯝ࡜ẚ㍑ࡍࡿࡇ࡜࡛ࠊ㟼㟁Ẽᑐ⟇ᮦ

ᩱࡢຠᯝࡣࠊಖㆤ⣲Ꮚࢆᇶ‽࡜ࡋࡓホ౯ࡀฟ ᮶ࡿࡼ࠺࡟࡞ࡗࡓࠋ

㸳㸬ࡲ࡜ࡵ

㟼㟁Ẽᨺ㟁ほᐹ⿦⨨࡟࡚ࠊಖㆤ⣲Ꮚࡢホ౯

ࢆ⾜࠸ḟࡢࡇ࡜ࡀ᫂ࡽ࠿࡜࡞ࡗࡓࠋ

ྠࡌ⾲㠃᢬ᢠࢆᣢࡘᮦᩱ࡛ࡶࠊᨺ㟁㟁ὶ࣭

㟁ᅽࠊᨺᑕ㟁☢Ἴࡣ␗࡞ࡿࡇ࡜ࡀࢃ࠿ࡗࡓࠋ

≉࡟ࠊᑟ㟁ᛶ࣏࣮ࣜ࢝࣎ࢿ࣮ࢺᶞ⬡ࡢᑟ㟁 ᛶࣇ࢕࣮ࣛ࡜ࡋ࡚ࠊ࣮࢝࣎ࣥࢼࣀࢳ࣮ࣗࣈ

ࢆ⏝࠸ࡓࡶࡢࡣࠊᨺ㟁㟁ᅽࠊᨺ㟁㟁ὶࡀᑠ ࡉ࠸ࠋࡲࡓࠊṧ␃㟁ᅽࡶపࡃࠊࡤࡽࡘࡁࡶ

ᑠࡉ࠸ࠋࡲࡓࠊᨺᑕ㟁☢Ἴᙉᗘࡶᑠࡉ࠸ࡇ

࡜ࡀࢃ࠿ࡗࡓࠋ

(2) ಖㆤ⣲Ꮚࡢຠᯝ࡜ࡢẚ㍑ࢆ⾜࠸ࠊ㟼㟁Ẽᑐ

⟇ᮦᩱࡢᨺ㟁㟁ᅽࡣࠊಖㆤ⣲Ꮚࢆᇶ‽࡜ࡍ

ࡿホ౯ࡀฟ᮶ࡿࡼ࠺࡟࡞ࡗࡓࠋ≉࡟ࠊCF

ཧ⪃ᩥ⊩

1) H.Tian and J.K.Lee: IEEE Trans. Magn., Vol.31, No.5, 2624, 1995.

3) Takayoshi Ohtsu, Hitoshi Yoshida and Noriaki Hatanaka: EOS/ESD Sympo- sium Proceedings, EOS-23, 173, 2001.

4) Takehiko Hamaguchi, Takayuki Ichihara and Takayoshi Ohtsu: EOS/ESD Sympo- sium Proceedings, EOS-24, 119, 2002.

5) A. Wallash and M. Honda: EOS/ESD Proceedings,EOS-19,pp.382-385.1997.

6) M. Honda and Y. Nakamura: EOS/ESD Proceedings, EOS-9, pp.96-103. 1987.

7) Takayoshi Ohtsu,”Study on ESD/EMI Phenomena for Magnetic Reproducing Head”, IEEJ Trans.FM, Vol.130 , No5, 473-478 ( 2010)

8) Takayoshi Ohtsu,”Study on ESD Pheno- mena of Magnetic Head by 1ns Pulse ESD”, APEMC, Beijing, China (2010) 9) C. Duvvury, “Paradigm Shift in ESD

Qualification”Reliability Physics Sympo- sium, Phoenix, AZ,27April - 1 May 2008.

10) White Paper 3: System Level ESD. Part I: Common Misconceptions and Recom- mended Basic Approaches, Industry Council on ESD Target Levels,Dec 2010.

ㅰ㎡

ᮏ◊✲ࡢ୍㒊ࡣᰴᘧ఍♫༙ᑟయ⌮ᕤᏛ◊✲

ࢭࣥࢱ࣮(STARC)࡜ࡢඹྠ◊✲࡛࠶ࡿࠋ

➨䠍㻞ᅇ䚷䛂Ᏹᐂ⎔ቃ䝅䞁䝫䝆䜴䝮䛃ㅮ₇ㄽᩥ㞟 㻞㻝㻣