−69−
4-21
శవ┵↪ߦࠃࠆᔕ↪⏛ᕈ᧚ᢱߩ⏛᳇⸘᷹ᛛⴚߩዷᦸ
Strategies for Magnetic Measurement for Applied Magnetic Materials using Advanced Synchrotron X-ray Techniques
࠽ࡁ࠺ࡃࠗࠬ⏛ᕈ⎇ⓥળ
Nano Device Magneto-Spectroscopy Research Group
ᧁᤘᄦ,
ᐢፉᄢቇ
ਛື,
㜞ノᐲశ⑼ቇ⎇ⓥࡦ࠲
/SPring-8 Akio Kimura, Hiroshima UniversityTetsuya Nakamura, JASRI/SPring-8 ߪߓߦ ‛⾰ࠨࠗ࠭ࠍ࠽ࡁࡔ࠻࡞ࠝ࠳߹ߢࠬࠤ࡞࠳࠙ࡦߔࠆߣޔ㔚ሶߩዪൻ߿ࠬࡇ ࡦ㑆ߩ឵⋧↪ߩᄌൻߦ㑐ㅪߒߡޔㅢᏱߩࠨࠗ࠭ߢߪᓧࠄࠇߥ⥝ᷓ⏛ᕈ߇ᓧࠄ ࠇࠆޕࡃ࡞ࠢ⁁ᘒߢߪ⏛ᕈ߿Ᏹ⏛ᕈߢࠆ㊄߿ࡄࠫ࠙ࡓ߇ޔ࠽ࡁ☸ሶߢߪᏱ⏛ᕈ߿ ᒝ⏛ᕈࠍ␜ߔߩ߽ߘߩ৻ߢࠆޕ߹ߚޔ㕙ߦ৻ේሶጀએਅߢⓍጀߐࠇߚ⏛ᕈ⭯⤑ߢ ߪޔၮ᧼߿ਅጀߣߥࠆ‛⾰ߩ㔚ሶ⁁ᘒ߿ේሶ㈩ߩᓇ㗀ࠍฃߌߟߟޔߘߩኻߪ⌀ⓨ ߦ㐿ߐࠇߡ߅ࠅ⏛᳇⋧↪߇㕖ኻ⒓ߥ⁁ᘒߢࠆߚޔ⏛᳇⋧ォ⒖᷷ᐲ߿⏛᳇⇣ᣇᕈ ߇ࡃ࡞ࠢߣ⇣ߥࠆ⚿ᨐߣߥࠆߎߣ߇ᦼᓙߐࠇࠆޕߎߩࠃ߁ߥ࠽ࡁ⏛ᕈߪၮ␆⊛ߥ⏛ᕈ⎇ ⓥߩⷰὐ߆ࠄ㕖Ᏹߦ⥝߽ᷓߩߢࠆޕ৻ᣇޔᦨㄭߢߪ⏛᳇⸥㍳ࠍߪߓᣂⷙࠬࡇࡦ࠻ ࡠ࠾ࠢࠬ᧚ᢱߦ߅ߡ߽ޔ৻ේሶጀએਅߩ⏛ᕈ‛⾰ߦࠃࠆ⏛᳇⚿วᓮ߇࠽ࡁࠬࠤ࡞ߢ ߩഃᚑᛛⴚߦࠃߞߡ㆐ᚑߐࠇߡ߅ࠅޔ⏛ᕈጀ߿ߘߩ⇇㕙ߩ⏛᳇⁁ᘒޔߐࠄߦޔᓸ㊂ߦ߹ ࠇࠆਇ⚐‛⏛ᕈర⚛ߩᓎഀࠍ⸃ߔࠆߎߣ߇᧚ᢱ㐿⊒ߣਗⴕߒߡ㊀ⷐߦߥߞߡࠆޕ ㄭᐕߦ߅ߌࠆ࠽ࡁ☸ሶ߿࠺ࡃࠗࠬ⏛ᕈ᧚ᢱߩഃᚑޔ㐿⊒߇ᕆㅦߦㅴዷߔࠆߦޔᓥ᧪ ߦߪή㜞ᐲߥ⏛᳇ࡊࡠࡉߩᔅⷐᕈ߇㜞ߊߥߞߡࠆޕ․ߦޔᓥ᧪ߩ⏛᳇᷹ቯ߇ㆡ↪ߢ ߈ߥ႐ว߿ᓥ᧪ߩᚻᴺߩઁߦᣂⷙᕈߩ㜞⏛᳇ࡊࡠࡉࠍട߃ߚᄙⷺ⊛ߥಽᨆ߇ਇนᰳ ߥ႐ว߇ᄙޕߎߩࠃ߁ߥ࠽ࡁ࠺ࡃࠗࠬ⏛ᕈߩ⊒ዷߣᣂߒ⏛᳇ࡊࡠࡉߦኻߔࠆᔅⷐ ᕈࠍ⢛᥊ߦޔశߩఝࠇߚశ․ᕈࠍᵴ߆ߒߚ㨄✢⏛᳇శቇലᨐߪᭂߡᒝജߢ⋥ធ⊛ ߥ⏛᳇ࡊࡠࡉߣߒߡᵴ↪ߐࠇߡࠆޕ․ߦޔ㨄✢⏛᳇ੑ⦡ᕈ㧔XMCD: X-ray Magnetic Circular Dichroism㧕ߪర⚛ㆬᛯ⊛ߦ⏛᳇ᖱႎࠍขᓧߢ߈ࠆߦޔᓸ㊂ߩ⏛ᕈర⚛ࠍ㕖⎕უߢ ಽᨆߢ߈ࠆὐࠍߔࠆޕޔSPring-8 ߦߪ BL25SUޔBL39XU ߦ߅ߡޔߘࠇߙࠇޔ㜞 ♖ᐲߩエ㨄✢ MCD ߣ⎬㨄✢ MCD ታ㛎߇ⴕ߃ࠆⵝ⟎߇ᢛߐࠇߡ߅ࠅޔSPring-8 ߪᧄ⎇ⓥ ળಽ㊁ߩὐߣߒߡᦨ߽⋧ᔕߒߊߘߩᓎഀࠍᜂ߁߽ߩߣᦼᓙߐࠇࠆޕߎߩࠃ߁ߥ⁁ᴫࠍ〯 ߹߃ߡޔᧄ⎇ⓥળߢߪࠃࠅ㜞ᐲߥ⸘᷹ᛛⴚߩឭ᩺ߣޔߘߩታߦะߌߚឭ⸒ޔߐࠄߦޔ㑐 ㅪߔࠆ⎇ⓥᖱႎߩߣᗧ឵ࠍㅢߒޔ࠽ࡁ‛⾰ߩ⏛ᕈ⎇ⓥ߅ࠃ߮࠺ࡃࠗࠬ⏛ᕈ⎇ⓥࠍ SPring-8ߩశࠍ߽ߞߡផㅴߔࠆߎߣࠍ⋡⊛ߣߒߡࠆޕ
−70− ⸘᷹ᛛⴚߩ⁁ BL25SU ߢߪޔ1.9T 㔚⏛⍹ᑼ MCD ⵝ⟎ޔశ㔚ሶ㗼ᓸ㏜ߦࠃࠆ⏛ᕈ᧚ᢱ⎇ⓥ߇ⴕࠊࠇߡ ࠆޕ⎇ⓥળࡔࡦࡃ߆ࠄߩߩ㜞ᐲൻឭ᩺ߦၮߠ߈ޔJASRI ࠬ࠲࠶ࡈߦࠃߞߡ BL25SU ߩ MCD ⵝ⟎ߩ⹜ᢱ᷷ᐲ߇ᦨૐ㆐᷷ᐲ 6Kޔᦨ㜞㆐᷷ᐲ 700K ߦᒛߐࠇߚޕ߹ߚޔ BL39XUߦ߅ߡߪޔ10T વዉࡑࠣࡀ࠶࠻ࠍ߃ߚ MCD ᷹ቯⵝ⟎ޔ߅ࠃ߮ޔࡆࡓᓘ 1ȝm ߩ㓸శ㨄✢ߦࠃࠆᩏဳ㗼ᓸ MCD ⵝ⟎ߦࠃࠆ⎇ⓥ߇ⴕࠊࠇߡࠆޕ․ߦޔࡑࠗࠢࡠࡆ ࡓߦࠃࠆᓸዊ㗔ၞߩ MCD ᷹ቯߣߘߩࡑ࠶ࡇࡦࠣ⸘᷹ޔ߅ࠃ߮ᤨಽഀ⸘᷹ᛛⴚߦߟߡߪ 2006ᐕ㨪2008 ᐕߩ㑆ߦᄢ߈ߊㅴᱠߒߚ[1-5]ޕߐࠄߦޔ྾⚛ሶߩ SDD(Silicon Drift Detector) ߩ ዉߦࠃࠅⰯశ XAFS ߩ᷹ቯല₸߇߇ࠅޔ⚿ᨐߣߒߡ♖ᐲߩ㜞࠺࠲ࠍขᓧߢ߈ࠆࠃ ߁ߦߥߞߡࠆޕ߹ߚޔBL25SU ߣ BL39XU ߦ߅ߡߪᧄ⎇ⓥળࡔࡦࡃߩࠣ࡞ࡊ߇⏛ ᳇₸᷹ቯߦขࠅ⚵ࠎߢ߅ࠅޔਃᰴర⏛᳇᭴ㅧߩนⷞൻ߇น⢻ߥᒝജߥ࠷࡞ߣߒߡߩ 㐿⊒ࠍㅴߡࠆޕ ৻ᣇޔߎࠇࠄߩ⎇ⓥࠍᦝߦ㜞ᐲߦ⊒ዷߐߖࠆߚߦߪޔᰴߩࠃ߁ߥ㗴߇ࠆޕBL25SU ߦ߅ߡߪޔ․ߦ࠽ࡁ⏛ᕈ᧚ᢱߣ᳗ਭ⏛⍹᧚ᢱߩ MCD ᷹ቯߦ߅ߡߪ⹜ᢱߦ 5㨪10T ߩ⏛ ႐ශട߇ᔅⷐߢࠆ߇ޔ⁁ߢߪᦨᄢ 1.9T ߣߥߞߡ߅ࠅචಽߥታ㛎߇ߢ߈ߥࠤࠬ߇⋡ ┙ߟޕ߹ߚޔBL39XU ߦ߅ߡߪ⹜ᢱࠧ࠾ࠝࡔ࠲ߩǿࠨࠢ࡞ࠨࠗ࠭ߣᒝᐲߩ㒢߆ ࠄޔ㔚⏛⍹߿಄ಓᯏߥߤ⹜ᢱߦኻߔࠆᄖ႐ࠕ࠲࠶࠴ࡔࡦ࠻ߩᒛ߇࿎㔍ߢࠆޕ ឭ⸒ ㄭᐕߩ࠽ࡁ⏛ᕈ᧚ᢱ⎇ⓥߩ߇ࠅޔ߅ࠃ߮ޔ⏛᳇࠺ࡃࠗࠬߩỗߒ࿖㓙┹ߣᕆㅦߥ㐿 ⊒ࠍ⢛᥊ߦޔ⸘᷹ᛛⴚ㕙ߦ߅ߌࠆశߩ⽸₂ߪᓟߣ߽ᔅⷐਇนᰳߥ߽ߩߢࠆޕᧄ⎇ ⓥળߢߪޔߎࠇ߹ߢ㨄✢ๆ MCD ࠍゲ⿷ߣߒߚశ↪ࠍⴕߞߡ߅ࠅޔ㨄✢ๆ MCD ߇৻⥸⊛ߥ⏛ൻᖱႎߦర⚛ㆬᛯ⊛ߥᖱႎࠍઃടߔࠆߣ߁⏛ᕈ᧚ᢱ⎇ⓥߦ᥉ㆉ⊛ߥ㊀ⷐᕈ ࠍߔࠆߎߣ߆ࠄޔ⸳ߩ㜞ᐲൻࠍㅴߟߟᓟߣ߽⛮⛯ߒߡᵴ↪ߒߡߊᔅⷐ߇ࠆޕ ߒߚ߇ߞߡ⁁ߢ㗼ࠊߦߥߞߡࠆ㗴ߦ㑐ߒޔBL25SU ߢߪ 10T ⚖વዉࡑࠣࡀ࠶࠻ࠍ ߃ߚ MCD ⵝ⟎ߩዉޔBL39XUߢߪ․ᄢဳߩǿࠨࠢ࡞ߩ⸳⟎߇㊀ⷐ߆ߟ✕ᕆߩ⺖㗴ߢ ࠆޕ ߐࠄߦޔ࠺ࡃࠗࠬන⚛ሶߩ㐿⊒ࠨࠗ࠭߇ᮡḰ⊛ߦ 100nm એਅߦߥߞߡࠆ⁁ࠍൊ᩺ߔ ࠆߣޔᓸ⚦ടᎿߦࠃࠅቅ┙ടᎿߒߚ⚛ሶࠍㆬᛯ⊛߆ߟല₸ࠃߊ㨄✢ᾖߔࠆߚߦᔅⷐߥ ⋥ᓘ 100nm એਅߩ㓸శࡆࡓ↢ᚑᛛⴚ㐿⊒߇ᦸ߹ࠇࠆޕߐࠄߦޔ⏛᳇࠺ࡃࠗࠬߩേࠢࡠ ࠶ࠢߦหᦼߒߚ⸘᷹ᛛⴚߩ㐿⊒߽㊀ⷐߢࠆޕߎࠇࠄߩ⸘᷹ᛛⴚߩၮ␆ߣߥࠆⷐ⚛㧔࠽ࡁ ࡆࡓޔᤨಽഀ⸘᷹ᛛⴚ㧕ߦߟߡߪޔSPring-8 ߩㅢၮ⋚ᛛⴚߣߒߡߩ࡙ࠩ↪ᡰេ ߇ᦸ߹ࠇޔᓟ 5 ᐕએౝߩᢛࠍᏗᦸߔࠆޕ߹ߚޔ᷹ቯኻ⽎߇ᦨవ┵᧚ᢱߢࠇ߫ⵝ ⟎ߦࠃࠆታ㛎ߢචಽߦᣂ⍮ࠍᓧࠆߎߣ߇ߢ߈ࠆࠤ߽ࠬᄙ߇ޔᣂⵝ⟎ࠍዉߒߥߌࠇ ߫⹏ଔᛛⴚ߇㒸⣣ൻߔࠆෂ㒾߽ࠆޕߒߚ߇ߞߡޔᓟචᐕࠍᱠਛߢߪ࠽ࡁ⏛ᕈ߅ࠃ߮ ⏛᳇࠺ࡃࠗࠬ⏛ᕈ⎇ⓥ㑐ㅪߢޔ৻㨪ੑంⷙᮨߩᣂⵝ⟎ࠍዉߒߡߊߎߣ߇ᔅⷐߢࠆޕ ߐࠄߦޔᣂⵝ⟎㐿⊒ߣㆇ↪ࠍṖߦⴕ߁ߚߦߪචಽߥ㐿⊒ࠬࡍࠬ߇ᔅⷐߢࠅޔߘߩ ߚޔታ㛎ࡎ࡞ߩ㕙Ⓧൻޔ߹ߚߪޔታ㛎ࡎ࡞ߣࠬ࠹࠶ࡊࠬߢߟߥ߇ࠆᄢⷙᮨߥታ 㛎ⵝ⟎࠼࠶ࠢᑪደߩᑪ⸳ࠍᦼᓙߔࠆޕᡰេߣߒߡߪޔ↪⠪߇⸘᷹ᛛⴚߩ↪ᡰ
−71− េࠍ੨ฃߒߟߟޔߘߎߢᓧߚᚑᨐࠍᦝߦᣂߒ⸘᷹ᛛⴚࠍ߽ߞߡ⊒ዷߐߖࠆߎߣࠍήℂߥ ߊታߔࠆߚߦ߽ޔᾫ✵ߒߚ⎇ⓥࠬ࠲࠶ࡈߣ⧯ᚻ⎇ⓥࠬ࠲࠶ࡈߩࡃࡦࠬࠆჇຬ߇ਇ นᰳߢࠆޕ એߩࠃ߁ߦޔ⸳ߩ㜞ᐲൻޔᣂⵝ⟎㐿⊒ޔၮ⋚ᛛⴚ↪ޔ⎇ⓥ㐿⊒ࠬ࠲࠶ࡈߩల ታߥߤߩ᧪ࠍታߒߡߊߎߣߦࠃߞߡޔᓟߣ߽ޔᧄ⎇ⓥળ߇㐿⊒ߒ↪ߔࠆ⸘᷹ ᛛⴚߪᦨవ┵⏛ᕈ᧚ᢱ㐿⊒ߩ⍮ࠍലᨐ⊛ߦਈ߃⛯ߌࠆὐߢ⋥ធ⊛ߥ␠ળ⽸₂ࠍᜂ߁߽ ߩߢࠆޕ
[1] M. Takagaki et al., "Development of Scanning Hard X-ray Microprobe for Element-specific Magnetic Imaging at SPring-8 BL39XU", IRAP Conference Series 7, 267-269 (2006).
[2] M. Suzuki et al., "Element-Specific Hard X-ray Micro-Magnetometry to Probe Anisotropy in Patterned Magnetic Films", AIP Conference Proceedings 879, 1699-1702 (2007).
[3] Y. Kondo et al., "Element-specific hard X-ray micro-magnetometry of magnetic modifications in Co–Pt dots fabricated by ion etching", J. Mag. Mag. Matt 320, 3157 (2008).
[4] ㋈ᧁၮኡ߶߆, "SPring-8 BL39XU ߦ߅ߌࠆᤨಽഀ㗼ᓸ⎬㨄✢⏛᳇ੑ⦡ᕈ᷹ቯᴺߩ㐿⊒",ᣣᧄ‛ℂቇ ળ 2007 ᐕᤐ, 18aZA-5.
[5] ㋈ᧁၮኡ߶߆, "BL39XU ߦ߅ߌࠆᤨಽഀ㗼ᓸ⎬㨄✢⏛᳇ੑ⦡ᕈታ㛎ߩ㐿⊒", ╙ 21 ࿁ᣣᧄశቇ ળᐕળశ⑼ቇวหࠪࡦࡐࠫ࠙ࡓ, 2E001.
