深紫外−真空紫外域光学材料としてのシリカガラス

(1)

213 0012 3 2 1 KSP C-1232 TEL 044 850 9759

FAX 044 819 2205

E-mail: k-kajihara net.ksp.or.jp

Silica glass for deep-ultraviolet and vacuum-ultraviolet

optical materials

Koichi Kajihara㈙, Yoshiaki Ikuta, Masahiro Hirano

Transparent Electro-Active Materials Project, ERATO, JST

Masanori Oto

Showa Electric Wire and Cable Co. Ltd.

Hideo Hosono

Materials and Structures Laboratory, Tokyo Institute of Technology

.

300 200 nm

200 nm

KrF(5.0 eV, 248

nm), ArF(6.4 eV, 193 nm

Fig. 1

KrF, ArF

F

2

7.9 eV, 157 nm

7.9 eV

F

2 1)

mm

cm

1

(2)

5 mm Dry; SiOH 1 1016

cm 3_{, Wet; SiOH} ₂ ₁₀19_cm 3_{, F-doped;}

SiOH 1 1016_cm 3_, _SiF ₂ ₁₀20 cm 3 _F 2 F2 8 mJ cm 2pulse 1 3.6 105

.

SiOH

10

19

_cm

3

_Wet

KrF, ArF

SiOH

7.4 eV

2)

_Wet

F

2

Fig. 2

SiOH

Dry

Si-Si

7.6 eV

3)

F

2

SiOH

Si-Si

F

2

Fig. 2

SiF

4) 6)

_Si-F

_Si-O

SiF

SiOH

Si-Si

F

2

Modi-ˆed Silica

F

2

SiOH

Si-Si

Si-O-Si

SiO

4

3 (SiO)

3

4 (SiO)

4

Si-O-Si

7),8)

₃

4 Raman

D

2

, D

1 8),9)

₃

₄

Si-O-Si

a

10)

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Raman SiOH 2 1018_cm 3 F2 NBOHC F2 30 mJ cm 2pulse 1

Si-O-Si

SiF

.

NBOHC

H

2

NBOHC

H

2

NBOHC

H

2

H

0 14)

NBOHC

E center( Si )

4 7 eV

KrF, ArF

F

2

Si-Si

H

2

(4)

(a)ArF b)F2 ArF 30 mJ cm 2_pulse 1 ₁ 107 _F 2 6.7 mJ cm 2 pulse 1 _2.88 ₁₀6 H2 1 1018cm 3 ( ) 1 m ArF ArF 50 mJ cm 2_pulse 1 ArF )

Fig. 5)

15)

.

DNA

193 nm

6.4 eV

ArF

1 m

60 Fig. 6)

16)

5.8 eV

E center

H

2

ArF

10 DUV-SNOM

.

F

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J. Vac. Sci. Technol. B 15, 2112 (1997). 2) Y. Morimoto, S. Nozawa and H. Hosono, Phys.

Rev. B 59, 4066 (1999).

3) L. Skuja, H. Hosono and M. Hirano, Proc. SPIE 4347, 155 (2001).

4) 69, 415 (2000).

5) M. Mizuguchi, L. Skuja, H. Hosono and T. Oga-wa, Opt. Lett. 24, 863 (1999).

6) M. Mizuguchi, L. Skuja, H. Hosono and T. Oga-wa, J. Vac. Sci. Technol. B 17, 3280 (1999). 7) J. C. Mikkelsen, Jr. and F. L. Galeener, J.

Non-12) L. Skuja, J. Non-Cryst. Solids 239, 16 (1998). 13) K. Kajihara, L. Skuja, M. Hirano and H. Hosono,

Appl. Phys. Lett. 79, 1757 (2001).

14) K. Kajihara, L. Skuja, M. Hirano and H. Hosono, Phys. Rev. Lett. 89, 135507 (2002).

15) Y. Ikuta, K. Kajihara, M. Hirano, S. Kikugawa and H. Hosono, Appl. Phys. Lett. 80, 3916 (2002).

16) M. Oto, S. Kikugawa, N. Sarukura, M. Hirano and H. Hosono, IEEE Photo. Technol. Lett. 13, 978 (2001).