40 vol%N 2 50 vol%N 2

823 K 873 K 923 K

100 m

ᅗ5 2223 K䛷30᫬㛫❅໬䛧䛯(a) Al₂O₃ 䝨䝺䝑䝖䛚䜘䜃(b) 10 mol % ZrO₂ῧຍ䛧䛯Al₂O₃䝨䝺䝑䝖䛾ᵝᏊ

研 究 活 動 報 告 30

◊㻌 ✲㻌 ά㻌 ື㻌 ሗ㻌 ࿌

Al5O6N

Ᏻᐃ㡿ᇦ䛾

Al

ྵ᭷䜺䝇䛾ศᅽ䛿

AlN

Ᏻᐃ㡿ᇦ䛾ศᅽ䜘䜚㧗䛔䛯䜑䠈Al

₂O3

䛾❅໬䜢ᢚ䛘䜛䛣䛸䛷䠈

AlN

⤖ᬗᡂ㛗䛾㐣㣬࿴᮲௳䜢ᚓ䜛䛣䛸䛜䛷䛝䜛䠊Zr(g)䛾ᖹ⾮ศᅽ䛿

Al

ྵ᭷䜺䝇䜘䜚䛿䜛䛛䛻ప䛟䠈䝨䝺䝑䝖䛾

⾲㠃䛻⃰⦰䛩䜛䛯䜑䠈ᅗ

1(b)䛻♧䛧䛯䝨䝺䝑䝖䛾⾲㠃䛻ZrN

䛚䜘䜃

ZrC0.62N0.38

䛜⏕ᡂ䛩䜛䠊ᅗ

6

䛻䝨䝺䝑䝖⾲

㠃䛾Ẽ┦✀䛾㍺㏦䛸

Al2O3

䝨䝺䝑䝖䛾❅໬䛻䜘䜛

AlN

ᡂ㛗䛾䝯䜹䝙䝈䝮䜢♧䛩䠊Al

₂O3

䝨䝺䝑䝖䛾ሙྜ䛿䠈䝨䝺 䝑䝖䛾⾲㠃䛜ᆒ୍䛻

AlN

䛚䜘䜃 -Al

₅O6N

䛻❅໬䛥䜜䠈䛭䛾䛯䜑䠈AlN ⤖ᬗᡂ㛗䛾㐣㣬࿴᮲௳䛜ᡂ❧䛷䛝䛪䠈

AlN

⤖ᬗ䛜ぢ䜙䜜䛺䛛䛳䛯䠊୍᪉䠈ZrO

₂

䜢ῧຍ䛩䜛䛸䠈ZrO

₂

䛾ඃඛ❅໬䛜㉳䛣䜚䠈Al

₂O3

䛾❅໬䜢ᢚ䛘䠈䜎䛯䠈

⢏⏺䛻Ⓨ⏕䛧䛯

ZrO2!Al2O3

ᾮ┦䛿

ZrO2

䛾እ㒊ᣑᩓ䜢ಁ㐍䛧䠈䝇䝫䞁䝆≧䛾

ZrN

ከᏍ㉁⭷䛜䝨䝺䝑䝖䛾⾲㠃 䛻ᙧᡂ䛧䛯䠊䛧䛯䛜䛳䛶䠈Al

₂O3

䛛䜙⏕䛨䜛

Al

ྵ᭷䜺䝇䛾ศᅽ䜢㧗䛟⥔ᣢ䛧䠈AlN ⤖ᬗᡂ㛗䛻ᚲせ䛺

Al

ྵ᭷䜺 䝇䜢㐣㣬࿴䛻౪⤥䛩䜛䛣䛸䛜ྍ⬟䛸䛺䛳䛯䛯䜑䠈AlN ⤖ᬗ䛜ᡂ㛗䛧䛯䜒䛾䛸⪃䛘䜙䜜䜛䠊

㻌

㻞㻚㻌 ㉸㧗 ⇕≀ᛶィ 䝅䝇䝔䝮䛻㛵䛩䜛◊✲㻌 㻌

㧗 ⼥య䛾⇕≀ᛶ䠄⇕ᐜ㔞䠈⇕ఏᑟ⋡䠈ᨺᑕ⋡䠈ᐦᗘ䠈⾲㠃ᙇຊ䠅䛿䠈໬Ꮫⓗ䛻άᛶ䛷ᐜჾ䛸䛾཯ᛂ䛜㑊 䛡䜙䜜䛺䛔䛯䜑䠈 ᐃ䛜ᅔ㞴䛷䛒䜛䠊⮬↛ᑐὶ䜔䝬䝷䞁䝂䝙ᑐὶ䛜⏕䛨䜛䛯䜑䠈⇕ఏᑟ⋡䛾 ᐃ䛿≉䛻ᅔ㞴 䛷䠈䜋䛸䜣䛹ᩚഛ䛥䜜䛶䛔䛺䛔䠊䜎䛯䠈⾲㠃ᙇຊ䛿䠈㞺ᅖẼ䛾㓟⣲ศᅽ䛻኱䛝䛟ᙳ㡪䛥䜜䜛䛯䜑䠈㓟⣲ศᅽ䛾 㛵ᩘ䛸䛧䛶 ᐃ䛩䜛ᚲせ䛜䛒䜛䠊䛣䜜䜙䛾ㄢ㢟䜢ඞ᭹䛩䜛䛯䜑䠈௨ୗ䛾

3

䛴䛾ᢏ⾡䠖

㻌

(1)

㻌 㟁☢ᾋ㐟ἲ䛻䜘䛳䛶䠈ヨᩱ⼥య䜢ᾋ㐟䛥䛫䠈ヨᩱ䛾ởᰁ䜢ᅇ㑊䛩䜛䠊

㻌

(2)

㻌 㟁☢ᾋ㐟ἲ䛻㟼☢ሙ䜢⤌䜏ྜ䜟䛫䜛䛣䛸䛻䜘䛳䛶䠈ᾋ㐟䛩䜛⼥య䛾᣺ື䛸ෆ㒊䛾ᑐὶ䜢ᢚไ䛩䜛䠊 㻌

(3)

㻌 㓟⣲䝫䞁䝥䛒䜛䛔䛿䜺䝇ᖹ⾮ἲ䜢⏝䛔䛶㞺ᅖẼ䛾㓟⣲䛒䜛䛔䛿௚䛾䜺䝇ᡂศά㔞䜢ไᚚ䛩䜛䠊

䜢 䝁 䜰 䛸 䛩 䜛 ㉸ 㧗   ⇕ ≀ ᛶ ィ   䝅 䝇 䝔 䝮 䠄

Properties and Simulations Probed with Electromagnetic Containerless Technique

䠅䛾㛤Ⓨ䜢⏘Ꮫ༠ྠ䠄᪥ẚ㇂Ꮧಇᩍᤵ䠄៞ᛂ኱䠅䠈ᑠ⃝ಇᖹ༤ኈ䠄༓ⴥᕤ኱䠅䠈Ώ㑓໷

ேᩍᤵ䠄Ꮫ⩦㝔኱䠅䠈ሯ⏣㝯ኵᩍᤵ䠄ᮾ໭኱ᕤ䠅䠈䜰䝹䝞䝑䜽⌮ᕤ䠈䝅䝇䝔䝮䝝䜴䝇䛚䜘䜃ᙜ◊✲ᐊ䠅䛷⾜䛳䛶䛔 䜛䠊ᮏィ 䝅䝇䝔䝮䜢⏝䛔䛶⾜䛳䛯◊✲䛻䛴䛔䛶䠈௨ୗ䛻ㄝ᫂䛩䜛䠊

ᅗ 6 䝨䝺䝑䝖⾲㠃䛾Ẽ┦✀䛾㍺㏦ᶍᘧᅗ(a)䛚䜘䜃(b)Al₂O3䝨䝺䝑䝖䠈(c) ZrO₂䜢ῧຍ䛧䛯Al2O3䝨䝑䝺䝖㻌 䛾❅໬䛻䜘䜛 AlNᡂ㛗䛾䝯䜹䝙䝈䝮

31 研 究 活 動 報 告

◊㻌 ✲㻌 ά㻌 ື㻌 ሗ㻌 ࿌

⁐⼥

Fe-Ni

ྜ㔠䛾ᆶ┤ศගᨺᑕ⋡ ᐃ

Fe-Ni

⣔ྜ㔠䛿䝇䝔䞁䝺䝇㗰䛾ᇶᮏ

2

ᡂศ⣔ྜ

㔠䛷䛒䜚䠈䛭䛾⇕≀ᛶ್䛿⁐᥋䝥䝻䝉䝇䛺䛹䛾᭱

㐺໬䛻ྥ䛡䛯ᩘ್䝅䝭䝳䝺䞊䝅䝵䞁䛻䛚䛔䛶ᚲせ୙

ྍḞ䛺䝟䝷䝯䞊䝍䛷䛒䜛䛜䠈㧗 ⼥య䛾⇕≀ᛶ್

䛿 ᐃ䛜ᅔ㞴䛷䛒䜚䠈༑ศ䛻䛿ᩚഛ䛥䜜䛶䛔䛺䛔 䛾䛜⌧≧䛷䛒䜛䠊

䛭䛣䛷ᙜ◊✲ᐊ䛷䛿䠈㟁☢ᾋ㐟ἲ䛸㟼☢ሙ䜢⤌

䜏ྜ䜟䛫䛯䠈“㠀᥋ゐ䝺䞊䝄䞊࿘ᮇຍ⇕䜹䝻䝸䝯䝖䝸 䞊ἲ”䜢㛤Ⓨ䛧䠈⁐⼥㔠ᒓ䛾⇕≀ᛶ್䜢 ᐃ䛧䛶䛝 䛯䠊௒ᅇ䛿䛣䛾 ᐃ᪉ἲ䛾ゎᯒ䛾㝿䛻ᚲせ䛸䛺䜛 䝺䞊䝄䞊྾཰⋡䛸䛧䛶Ἴ㛗

807 nm䛻䛚䛡䜛ᆶ┤ศ

ගᨺᑕ⋡䜢 ᐃ䛧䛯䠊

ᆶ┤ศගᨺᑕ⋡ ᐃ䛻⏝䛔䛯ᐇ㦂⿦⨨䜢ᅗ

7

䛻♧䛩䠊ヨᩱ䛾㓟໬䜢㜵䛠䛯䜑䠈䝏䝱䞁䝞䞊ෆ䜢

Ar-5vol.%H2

ΰྜ䜺䝇䛷⨨᥮䛧䠈㑏ඖ㞺ᅖẼ䛻ಖ

ᣢ䛧䛯䠊䛭䛾ᚋ䠈㟁☢ᾋ㐟⏝㧗࿘Ἴ䝁䜲䝹䛻㏻㟁 䛧ヨᩱ䜢ᾋ㐟䠈⁐⼥䛥䛫䛯䠊䛥䜙䛻㉸ఏᑟ☢▼䜢⏝

䛔䛶⁐⼥ヨᩱ䛻

3T

䛾㟼☢ሙ䜢༳ຍ䛧䠈ヨᩱ䛾୪ 㐍㐠ື䛚䜘䜃⾲㠃᣺ື䜢ᢚไ䛧䛯䠊୍ᐃ ᗘ䛻ಖ ᣢ䛧䛯ヨᩱ䛛䜙䛾ᆶ┤ග䜢ศගჾ䛻䜘䜚 ᐃ䛧䠈ヨ

ᩱ䛾ᨺᑕ㍤ᗘ䜢ồ䜑䛯䠊ศගჾ䛿ண䜑␲ఝ㯮య䜢

⏝䛔䛶ᰯṇ䜢⾜䛳䛯䜒䛾䜢౑⏝䛧䛯䠊ᅗ

8

䛻Ἴ㛗

807 nm

䛻䛚䛡䜛⁐⼥

Fe-Ni

ྜ㔠䛾ᆶ┤ศගᨺᑕ

⋡䛾 ᐃ⤖ᯝ䜢♧䛩䠊඲⤌ᡂẚ䛻䛚䛔䛶᫂☜䛺  ᗘ౫Ꮡᛶ䛿ぢ䜙䜜䛺䛛䛳䛯䠊

⁐⼥

Co

䛾ᐃᅽ䝰䝹⇕ᐜ㔞䛚䜘䜃⇕ఏᑟ⋡ ᐃ

㻌 䝆䜵䝑䝖䜶䞁䝆䞁䛾ຠ⋡䜢ྥୖ䛥䛫䜛䛯䜑䛻䠈䝍䞊䝡䞁䝤䝺䞊䝗䛾⪏⇕ᮦᩱ䛸䛧䛶

Ni

ᇶ㉸ྜ㔠䛾㛤Ⓨ䛜㐍䜣 䛷䛔䜛䠊䛭䛾㗪㐀ᕤ⛬䛾᭱㐺໬䛾䛯䜑䛻䛿ᩘ್䝅䝭䝳䝺䞊䝅䝵䞁䛜ᚲ㡲䛷䛒䜛䛜䠈ᩘ್䝅䝭䝳䝺䞊䝅䝵䞁䛾ධຊ 䝟䝷䝯䞊䝍䛸䛧䛶ᚲせ䛷䛒䜛⁐⼥㔠ᒓ䛾⇕≀ᛶ್䛿༑ศ䛻ᩚഛ䛥䜜䛶䛔䛺䛔䛾䛜⌧≧䛷䛒䜛䠊

䛭䛣䛷㠀᥋ゐ䝺䞊䝄䞊࿘ᮇຍ⇕䜹䝻䝸䝯䝖䝸䞊ἲ䜢

Co

䛻䛴䛔䛶㐺⏝䛧䠈⇕ᐜ㔞䛚䜘䜃⇕ఏᑟ⋡䜢 ᐃ䛧䛯䠊

⇕ᐜ㔞䛚䜘䜃⇕ఏᑟ⋡ ᐃ䛻⏝䛔䛯ᐇ㦂⿦⨨䛿ᅗ

7

䛸䜋䜌ྠᵝ䛷䛒䜛䛜䠈ศගჾ䜢䝺䞊䝄䞊↷ᑕ⿦⨨䛻⨨

䛝᥮䛘䠈ຍ⇕⏝䝺䞊䝄䞊䠄Ἴ㛗

807 nm

䠅䜢ヨᩱୖ㒊䛻↷ᑕ䛧䠈䛭䛾 ᗘᛂ⟅䜢ヨᩱୗ㒊䛛䜙ᨺᑕ ᗘィ䛻䜘 䜚 ᐃ䛧䛯䠊ヨᩱୗ㒊䛾 ᗘ᣺ᖜ䛚䜘䜃఩┦ᕪ䜢 ᐃ䛧䠈⇕ᐜ㔞䛚䜘䜃⇕ఏᑟ⋡䜢Ỵᐃ䛧䛯䠊

ᅗ

9

䛻 ᐃ䛥䜜䛯⁐⼥

Co

䛾ᐃᅽ䝰䝹⇕ᐜ㔞䜢♧䛩.᫂☜䛺 ᗘ౫Ꮡᛶ䛜ぢ䜙䜜䛺䛛䛳䛯䛯䜑䠈඲ ᐃ್

䛾ᖹᆒ䜢ྲྀ䜚䠈c

_p = 41.2 ± 1.9 J · mol^-1 · K^-1

䛸Ỵᐃ䛧䛯䠊୙☜䛛䛥䛿ᶆ‽೫ᕪ䛾

2

ಸ䜢᥇⏝䛧䛯䠊

ᅗ

10

䛻 ᐃ䛥䜜䛯⁐⼥

Co

䛾⇕ఏᑟ⋡䛾㟼☢ሙᙉᗘ౫Ꮡᛶ䜢♧䛩䠊 ᐃ್䛿㟼☢ሙᙉᗘ䛾ቑຍ䛻క䛔

ᅗ7㻌 ᆶ┤ศගᨺᑕ⋡ᐇ㦂⿦⨨

ᅗ8㻌 ⁐⼥Fe-Niྜ㔠䛾ᆶ┤ศගᨺᑕ⋡

研 究 活 動 報 告 32

◊㻌 ✲㻌 ά㻌 ື㻌 ሗ㻌 ࿌

ῶᑡ䛧䛶䛔䛝䠈8 T ௨ୖ䛷୍ᐃ䛾್䛻཰᮰䛩䜛䠊䛣䜜䛿㟼☢ሙ䛻䜘䜚ヨᩱෆ䛾ᑐὶ䛜ᢚไ䛥䜜䠈8 T ௨ୖ䛾㟼

☢ሙᙉᗘ䛷 ᐃ䛻ᙳ㡪䛾䛺䛔⛬ᗘ䜎䛷ᑐὶ䛜ᢚไ䛥䜜䛯䛸⪃䛘䜛䛣䛸䛜䛷䛝䜛䠊8 T ௨ୖ䛾㟼☢ሙᙉᗘ䛻䛚䛡 䜛⇕ఏᑟ⋡䛿ᖹᆒ್䜢ྲྀ䜛䛸䠈 = 34.1 ± 2.5 W·m

^-1·K^-1

䛷䛒䛳䛯䠊୙☜䛛䛥䛿ᶆ‽೫ᕪ䛾

2

ಸ䛾್䜢⏝䛔䛯䠊㻌

㻌

㻟㻚㻌㻯㼛 ῧຍ 㻺㼕㻙㻹㼚㻙㻵㼚 ☢ᛶᙧ≧グ᠈ྜ㔠䛾㛤Ⓨ䛚䜘䜃ᶵᲔ≉ᛶホ౯㻌 㻌

☢ᛶᙧ≧グ᠈ྜ㔠䛿䚸ᚑ᮶䛾 ᗘ䜔ᛂຊ䛰䛡䛷䛿䛺䛟䠈☢ሙ䛻䜘䜛ᙧ≧グ᠈ຠᯝ䜢♧䛩䛣䛸䛛䜙䠈㐲㝸᧯

స䜔ᛂ⟅㏿ᗘ䛾ྥୖ䜢ྍ⬟䛸䛩䜛☢Ẽ㥑ືᆺ䜰䜽䝏䝳䜶䞊䝍ᮦᩱ䜈䛾ᛂ⏝䛜ᮇᚅ䛥䜜䜛䠊 Ni-Mn-In ☢ᛶᙧ

≧グ᠈ྜ㔠䝞䝹䜽ᮦ䛷䛿䠈ᙉ☢ᛶ䜸䞊䝇䝔䝘䜲䝖 (A) ┦䛛䜙ᙅ☢ᛶ䝬䝹䝔䞁䝃䜲䝖 (M) ┦䜈䛸ᵓ㐀┦ኚែ

䛧䠈☢ሙ༳ຍ䛻క䛖

M

ኚែ ᗘ䛾పୗ䛜ሗ࿌䛥䜜䛶䛔䜛䠊䜎䛯䠈Co ῧຍ䛻క䛔

M

ኚែ ᗘ (

M_s)

䛿పୗ䛧䠈 䜻䝳䝸䞊 ᗘ (

T_C)

䛿ୖ᪼䛩䜛䛣䛸䛜ሗ࿌䛥䜜䛶䛔䜛䠊ᙜ◊✲䜾䝹䞊䝥䛷䛿䠈䝇䝟䝑䝍ἲ䛻䜘䜚⭷ཌ

1 !m

䛾

Ni-Mn-In

ྜ㔠⭷䜢స〇䛧䠈䛭䛾ᵓ㐀䛚䜘䜃☢Ẽ≉ᛶ䛻ཬ䜌䛩

Co

ῧຍ䛾ᙳ㡪䛻䛴䛔䛶䛣䜜䜎䛷䛻ሗ࿌䛧䛶䛔

䜛䠊䝉䞁䝃䞊䜔䜰䜽䝏䝳䜶䞊䝍⏝䛾ᙧ≧グ᠈⣲Ꮚ䛸䛧䛶ᮏྜ㔠⭷䛾ᐇ⏝໬䜢⪃䛘䛯ሙྜ䛻䛿䠈䛭䛾ᶵᲔⓗ≉

ᛶ䛿㠀ᖖ䛻㔜せ䛷䛒䜛䠊ᮏ◊✲䛷䛿䠈䝇䝟䝑䝍ἲ䛻䜘䜚

Co

ῧຍ㔞䛾␗䛺䜛

Ni-Mn-In

☢ᛶᙧ≧グ᠈ྜ㔠⭷䜢 స〇䛧䠈⤌ᡂ䠈⤖ᬗᵓ㐀䜢ㄪᰝ䛧䠈ᶵᲔⓗ≉ᛶ䜢䝘䝜䜲䞁䝕䞁䝔䞊䝅䝵䞁ἲ䛻䜘䜛ᢲ㎸䜏ヨ㦂䛻䜘䜚ホ౯䛧䛯䠊

Co

ῧຍ

Ni-Mn-In

ྜ㔠⭷䛿䠈஧※ྠ᫬䝇䝟䝑䝍ἲ䛻䜘䜚䠈ᇶᯈ ᗘ䜢

323 K

୍ᐃ (Ỉ෭≧ែ) 䛸䛧䛶䠈䝫䝸 䝡䝙䞊䝹䜰䝹䝁䞊䝹 (PVA) 䛚䜘䜃䜰䝹䝭䝘 (Al

₂O3)

ᇶᯈୖ䛻⣙

1 !m

䛾⭷ཌ䜎䛷స〇䛥䜜䛯䠊䝍䞊䝀䝑䝖䛻 䛿

Ni-Mn-In

ྜ㔠䛸⣧

Co

䜢⏝䛔䛶䠈ྛ䝍䞊䝀䝑䝖䛾䝇䝟䝑䝍㟁ຊ䜢

W_RF(Ni-Mn-In) = 200 W (㧗࿘Ἴ䠈RF)

䛚䜘 䜃

W_DC(Co) = 0 ~ 15 W (┤ὶ䠈DC)

䛸䛧䛯䠊PVA ᇶᯈୖ䛻స〇䛥䜜䛯䝇䝟䝑䝍⭷䛿ᇶᯈ䛛䜙๤㞳䛧䛯ᚋ䛻䠈䜎 䛯䠈Al

₂O3

ᇶᯈୖ䛾䜒䛾䛿ᇶᯈ䛸䛸䜒䛻䠈1123 K 䛷

3.6 ks

㛫䛾⇕ฎ⌮䜢┿✵⅔ෆ䛷᪋䛧䛯䠊

ᚓ䜙䜜䛯ྜ㔠⭷䛾

Co

ῧຍ㔞䛿

W_DC(Co)䛻ẚ౛䛧䛶༢ㄪ䛻ቑຍ䛧䛯䠊௨ᚋ䠈ᚓ䜙䜜䛯䝇䝟䝑䝍⭷䜢䛭䜜䛮䜜

䛾

Co

ῧຍ㔞 (

x mol%Co)

䜢⏝䛔䛶

xCo

䛸⾲䛩䠊Co ῧຍ㔞䛻౫䜙䛪䠈ᮍ⇕ฎ⌮⭷䛷䛿䠈ᙅ䛔ᅇᢡ䝢䞊䜽䛾䜏 䛜☜ㄆ䛥䜜䠈⇕ฎ⌮䛻క䛔⤖ᬗ㉁䜢♧䛩ᅇᢡ䝢䞊䜽䛜᫂░䛻☜ㄆ䛥䜜䛯(ᅗ

11 (a))䠊䜎䛯䠈⇕ฎ⌮⭷䛷䛿䠈Co

ῧຍ㔞䛾ቑຍ䛻క䛔䠈M ┦䛛䜙䛾ᅇᢡ䝢䞊䜽ᙉᗘ䛿పୗ䛧䠈Heusler ᵓ㐀䜢᭷䛩䜛

A

┦䛛䜙䛾ᅇᢡ䝢䞊䜽䛜ฟ

⌧䛧䛯䠊䛣䜜䜘䜚䠈Co ῧຍ㔞䛾ቑ኱䛻క䛔

Ni-Mn-In

ྜ㔠⭷䛾

M_s

䛿పୗ䛩䜛䛣䛸䛜䜟䛛䛳䛯䠊ᢲ㎸䜏ヨ㦂䛷ᚓ 䜙䜜䛯Ⲵ㔜䠉ኚ఩᭤⥺䛾୍౛䜢ᅗ

11(b)

䛻♧䛩䠊⭷䛾ᢲ㎸䜏◳䛥䛿᭱኱ヨ㦂Ⲵ㔜䛻䛚䛡䜛᭱኱ᢲ㎸䜏῝䛥 䜘䜚䠈⭷䛾ᙎᛶ⋡䛿㝖Ⲵึᮇ䛾ᙎᛶኚᙧ㡿ᇦ䜘䜚

ISO14577-1䠄4䠅䛻‽ᣐ䛧䛶ホ౯䛧䛯䠊ྜ㔠⭷䛾ᢲ㎸䜏䛛䛯

20 30 40 50 60 70 80 90 100

3 4 5 6 7 8 9 10

/ W䌭m-1䌭k-1

Static magnetic field / T

ᅗ10 ⁐⼥Co䛾⇕ఏᑟ⋡䛾㟼☢ሙᙉᗘ౫Ꮡᛶ

ᅗ9㻌 ⁐⼥Co䛾ᐃᅽ䝰䝹⇕ᐜ㔞䛾 ᗘ౫Ꮡᛶ

33 研 究 活 動 報 告

◊㻌 ✲㻌 ά㻌 ື㻌 ሗ㻌 ࿌

䛥䛚䜘䜃ᙎᛶ⋡䛿

Co

ῧຍ㔞䛻౫䜙䛪䠈⇕ฎ⌮䜢᪋䛩䛣䛸䛻䜘䜚పୗ䛧䛯䠊䛣䜜䛿䠈䝇䝟䝑䝍᫬䛻⏕䛪䜛䝢䞊䝙 䞁䜾ຠᯝ (䝇䝟䝑䝍⢏Ꮚ䛾䛯䛯䛝㎸䜏) 䛻䜘䜛⭷ෆ䛾ṧ␃ᛂຊ䛜⇕ฎ⌮䛻క䛔⦆࿴䛥䜜䛯䛣䛸䠈䛚䜘䜃䠈⤖ᬗ

⢏䛜⢒኱໬䛧䛯䛣䛸䛻㉳ᅉ䛩䜛䛸⪃䛘䜙䜜䜛䠊୍᪉䠈Co ῧຍ䛻క䛖ᢲ㎸䜏◳䛥䛚䜘䜃ᙎᛶ⋡䛾ኚ໬䛿ㄆ䜑䜙䜜 䛺䛛䛳䛯䠊

㻌

㻠㻚㻌㻭㼘 ῧຍ┬ 㻵㼚 ⤌ᡂ 㻵㼀㻻 䝇䝟䝑䝍ⷧ⭷䛾ప᢬ᢠ໬䛸㧗㉥እ㏱㐣ᛶ㻌

ITO (In2O3 - 10 mass%SnO2, ITO90)

ⷧ⭷䛿ప䛔య✚᢬ᢠ⋡

( V)

䠈ྍどග䛷䛾㧗䛔㏱㐣⋡

(!)

䛚䜘䜃Ⰻ ዲ䛺䜶䝑䝏䞁䜾≉ᛶ䜢᭷䛧䠈䝣䝷䝑䝖䝟䝛䝹䝕䜱䝇䝥䝺䜲

(FPD)

䜔ኴ㝧㟁ụ䛺䛹䛾㏱᫂㟁ᴟᮦᩱ䛸䛧䛶ᗈ䛟฼

⏝䛥䜜䛶䛔䜛䠊䛧䛛䛧䠈䛭䛾୺ᵓᡂඖ⣲䛷䛒䜛

In

䛿ୡ⏺ⓗ䛻ᕼᑡ໬䛷䠈┬

In

⤌ᡂ

ITO

ⷧ⭷䛾㛤Ⓨ䛜ᡤᮃ䛥䜜 䛶䛔䜛䠊䛣䜜䜎䛷䛻䠈

In2O3

ྵ᭷㔞䜢ᚑ᮶䛾

90

䛛䜙

50 mass%

䛻๐ῶ䛧䛯᪂つ┬

In

⤌ᡂ

ITO

䠄

ITO50

䠅䝇䝟䝑䝍

ⷧ⭷䛻䛴䛔䛶䠈ᇶᯈຍ⇕䛺䜙䜃䛻ῧຍඖ⣲

(Fe, Sb, Ti)

䛻䜘䜚ప䛔

_V

䛸ྍどග䛷䛾㧗䛔

!

䜢ᐇ⌧䛧䛶䛔䜛䠊ᮏ

◊✲䛷䛿䠈

In2O3

ྵ᭷㔞䜢

50 mass%

䛻๐ῶ䛧䛯

Al

ῧຍ┬

In

⤌ᡂ

ITO (ITO50:Al)

ⷧ⭷䜢䝇䝟䝑䝍䜺䝇୰䛾

O2

⃰ᗘ䜢ኚ໬䛥䛫䛶స〇䛧䠈

_V

䛻ཬ䜌䛩䝇䝟䝑䝍䜺䝇୰䛾

O2

⃰ᗘ䛾ᙳ㡪䜢ㄪᰝ䛧䛯䠊䜎䛯䠈ኴ㝧㟁ụ䛾ኚ᥮

ຠ⋡ྥୖ䛻䛿㉥እᇦ䛾᭷ຠ฼⏝䛜㔜せ䛷䛒䜚䠈ྍど䡚㉥እᇦ䛻䛚䛡䜛

!

䛻䛴䛔䛶䜒ホ౯䛧䛯䠊

ITO50:Al

ⷧ⭷䛿䠈஧※ྠ᫬䝇䝟䝑䝍ἲ䛻䜘䜚

523 K

䛾ຍ⇕䜺䝷䝇ᇶᯈୖ䛻

30 min

㛫స〇䛥䜜䛯䠊䝍䞊䝀䝑䝖

䛻䛿┬

In

⤌ᡂ

ITO (ITO50)

䛚䜘䜃

Al2O3

䜢⏝䛔䛶䠈ྛ䝍䞊䝀䝑䝖䛾䝇䝟䝑䝍㟁ຊ䜢

W_DC(ITO50) = 100 W (

┤ ὶ䠈

DC)

୍ᐃ䛸䛧䠈W

_RF(Al2O3) = 0 ~ 150 W (

㧗࿘Ἴ䠈

RF)

䛸ኚ໬䛥䛫䛶䠈

Ar-O2

ΰྜ䜺䝇୰䛾

O2

⃰ᗘ䜢

Ar - (0 ~ 1.2) vol%O2

䛸䛧䛶䠈⣙

130 nm

䛾⭷ཌ䜎䛷స〇䛥䜜䛯䠊ᚓ䜙䜜䛯

ITO50:Al

ⷧ⭷䛾

_V

䛿

Al

ῧຍ㔞䛚䜘䜃 䝇䝟䝑䝍䜺䝇୰䛾

O2

⃰ᗘ䛻ᙉ䛟౫Ꮡ䛧䠈

0.2 vol%O2

䛷䛿

W_RF(Al2O3) = 20 ~ 60 W

䛷పୗ䛧䛯䠊䜎䛯䠈

W_RF(Al2O3) = 40 W

䛷䛿

0.2 vol%O2

䛷

_V

䛿ᴟᑠ್

(

⣙

700 ! cm)

䜢♧䛧䛯䛾䛱༢ㄪ䛻ቑ኱䛧䛯

(

ᅗ

12 (a))

䠊

0 vol%O2

䛷ᚓ䜙䜜䛯

ITO50:Al

ⷧ⭷䛿ⷧ䛔〓Ⰽ䜢࿊䛧䛯䛜䠈䝇䝟䝑䝍䜺䝇୰䛾

O2

⃰ᗘ䛾ቑ኱䛻క䛔↓Ⰽ㏱᫂

䛸䛺䛳䛯䠊

ITO50:Al

ⷧ⭷䛾

!

䛿䠈

Al

ῧຍ㔞䛚䜘䜃䝇䝟䝑䝍䜺䝇୰䛾

O2

⃰ᗘ䛻䜘䜙䛪ྍどᇦ䛾

400~450 nm

䛷

ᅗ11㻌Ni-Mn-Inྜ㔠䛾 (a) XRDᅗᙧ 䛚䜘䜃 (b) Ⲵ㔜䇲ኚ఩᭤⥺䛻ཬ䜌䛩⇕ฎ⌮䛚䜘䜃Coῧຍ䛾ᙳ㡪

30 40 50

2 [deg.]

In te n si ty , I [ ar b. u n it s]

0Co 2.3Co 1123 K-3.6 ks

4.4Co 6.4Co

3.4Co

3.4Co as-deposited

A Phase M Phase

0 0.02 0.04 0.06

0 0.1 0.2 0.3 0.4 0.5 0.6

Penetration depth, h [! m]

L o ad , F [ m N ]

as-deposied 3.4Co

1123 K-3.6 ks

0Co

2.3Co

3.4Co

4.4Co

6.4Co

F

_max

研 究 活 動 報 告 34

◊㻌 ✲㻌 ά㻌 ື㻌 ሗ㻌 ࿌

85 %௨ୗ䛻పୗ䛩䜛䜒䛾䛾䠈450 ~ 800 nm

䛷䛿

85 %௨ୖ䛾Ⰻዲ䛺್䜢♧䛧䛯 (ᅗ 12 (b))䠊䜎䛯䠈ITO90

ⷧ⭷

䛷䛿

1000 nm

௨ୖ䛾㉥እᇦ䛻䛚䛔䛶 䛜ᛴ⃭䛻పୗ䛩䜛䛜䠈ITO50:Al ⷧ⭷䛷䛿䝇䝟䝑䝍䜺䝇୰䛾

O2

⃰ᗘ䛻

౫䜙䛪

800~1500 nm

䛾㉥እᇦ䛻䛚䛔䛶

80 %௨ୖ䛾Ⰻዲ䛺

䜢♧䛧䛯䠊ᮏ◊✲䛷㛤Ⓨ䛥䜜䛯㧗㉥እ⥺㏱㐣ᛶ

䛾

Al

ῧຍ┬

In

⤌ᡂ

ITO

ⷧ⭷䛿㧗ຠ⋡ኴ㝧㟁ụ䛾㏱᫂㟁ᴟᮦᩱ䛸䛧䛶䛾฼⏝䛜ᮇᚅ䛥䜜䜛䠊

ᅗ12㻌Alῧຍ┬In⤌ᡂITO (ITO50:Al) ⷧ⭷䛾 (a) య✚᢬ᢠ⋡䛚䜘䜃 (b) ග㏱㐣⋡䛻ཬ䜌䛩䝇䝟䝑䝍䜺䝇୰䛾O2⃰ᗘ䛾ᙳ㡪

0 0.2 0.4 0.6 0.8 1.0 1.2 10

²

10

³

10

⁴

10

⁵

V o lu m e R e s is ti v it y ,

v

/ !" c m

O

₂

Content (vol%O

₂

)

(a) W

RF

(Al

₂

O

₃

) = 40 W

as-depo.

^{(0.4 vol%O2)}

500 1000 1500 2000 2500 0

20 40 60 80 100

T ra n s m it ta n c e , ( % )

Wavelength, / nm

vol%O₂ 0 0.2 0.4 0.6 0.8 1.2

ITO50:Al

ITO90

(b) W

RF

(Al

₂

O

₃

) = 40 W

35 ◊㻌✲㻌研 究 活 動 報 告ά㻌ື㻌ሗ㻌࿌

࠙◊✲άືሗ࿌ࠚ ᇶ┙⣲ᮦࣉࣟࢭࢵࢩࣥࢢ◊✲ศ㔝 ^䠄

2013

䠊

1

䡚

2013

䠊

12

䠅

ᩍ ᤵ : ໭ᮧ ಙஓ

ຓ ᩍ : ୸ᒸ ఙὒࠊ㔠 ᐉ୰(10~)

ຓᩍ㸦◊✲≉௵㸧 : 㧗 ᪫(4~)

ᢏ ⾡ ⿵ బ ဨ : ᑠཎ ᜨ

ドキュメント内 研究業績・活動報告2013 (ページ 32-38)