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¶y`avwiSWMTè{D0.4 nm[ \MWNT s100nm Í w xQèOQMWNTycQDyçU4
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2.1. CNTíííí
CNTOQ"¥~1^ !Þ"#
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/¢ _01 gw +, UV a 2fg av wijgOFig. 2-1Uym`aÍwVUQCNT 345o6A)¥7X~(Ch) lQàá Fig. 1-1 The observation by TEM of multi-wall
coaxial nanotubes with various inner and outer diameters, di and do, and numbers of cylindrical shells N reported by Iijima in 1991: (a) N=5, do=67Å; (b) N=2, do=55Å; and (c) N=7, di=23Å, do=65Å [1-8].
"7X~a1Qa2¨89Ua
Ch:n•a1;m•a2:(n,m)
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<θ O=>_?ÛgQ@VUAB fgwi
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1985PU·w"!¤de[\6PQ èbCNTOQRSTx,!X<UVW"
!¤ÓMl`avwoUQ"
¥~NY(OP:[\defghij CNTOMWNTÍhièbSWNTyQR STlUWnVW9f(h"¥~Xl Y(U¬vwn_-fghiO
',!X<yÂdfgavwinÞOQ Z[x\4Ã]vCNTUßvav wi,!X<U^¬fgw_34`al Fig. 2-3UmZi
b¤!c!de
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l¬vaQ"¥~A!f@~UQRST lghwn_Q]vSWNTlif(w n_xµwÞÍwxQjOkÃQl O\4vi
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,ë|_`a¬vQ,r!Î,sL¤
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Fig. 2-2 Structures of CNT (SWNT). [2-2]
‾‾‾
‾ῑῑῑῑa1
‾
‾‾
‾ῑῑῑῑa2
Fig. 2-1 Graphene. [2-1]
RSTÐu_'Sf(wn_QCNTxr Z w i n g l r (chemical vapor
deposition)_?inÞ:UOQNvw
xUVw Uyi`hÞxÍWQSWNT
yMWNTyNçÍwi`[yQ iz UßvavwÞÍWQ{5Pà|
UNµwi
Fig. 2-3 Schematic of arc discharge method. [2-3]
Fig. 2-4 Schematic of laser assisted vapor deposition method. [2-3]
2.3. SWNT÷÷÷÷^^)^^)!))!!!KKKK--L--LMLLM!MM!!!NNNN Fig. 2-6QFig. 2-7USWNTTEMkH}lmZi
~OQD0.4nmSWNTx+U4
avwyÍwi
SWNT3àá¶OÓM3Uy3U yVÃð\gavwi@U`avÃi LpD_rf
è{pD0.4nm[\Q3UOéO4vO ÍwxQÓM3UO0.4nmq1.4nmUj pDx9:`avw_?Ûgavw[2-6]i
ÞQjrfOQ\4Ã_y100q200nmQþ O1µmÍWQ(ü4ÌOQ10mmU
ÖZwi b?
þQSWNTOLá÷LM!N_`a-
fg Q_V&xU4afgwi jgl+QhOQ!£_E`avwi j+#y?_`a1.3q1.5g/cm3
lmZ[2-7]i4·Q+ôU·
wSWNT./0O0.33nm_fgavwi Fig. 2-5 Schematic of chemical vapor deposition method. [2-3]
Fig. 2-6 TEM images of SWNTs grown by CVD. [2-4]
m36
3UêW6O100GPaQ
OTPaQÓMyêW6O10GPaQ
O1TPax\gavw[2-8, 11]iJIS Uafgavw¾O1GPaê
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3
QROx_V&Zðal`
avwxQSWNTQjgO"-Íw [2-11]iFig. 2-8UQÓfgh _SWNT¡
¢£¤lmZi_UQR¡¢
OQ¥10K»Uaèlm`Qjg
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l m ` Q þ O ¥ _ 4 W Q 400W/m¬KÍwi¡¢xª\Zw
OQQR:>l®xQ§
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¡¢_4wiÞQSWNT¡¢OQ Fig. 2-8(b)Um`hVUQ§U¨v»
O÷U&ZwiÓfghè¡¢
OQ1800q5900W/m¬K_¶xÍWQAB·$
Fig. 2-7 TEM image of SWNT bundle. [2-5].
Fig. 2-8 Temperature dependence of thermal conductivity for copper (a) [2-12] and SWNT (b) [2-13].
(a)
(b)
M¤!·¸ÌOQþ6600W/m¬
K [2-11]_Q"¥~5ôι¥º+9
»¡¢¼lm`avwi
½3
SWNT3OQUVWvxÍ wi,!pL#,¾Ch=(n,n)OQR3ÍWQ
¿c¾Ch=(n,0)OC¢í3ÍwiÀ
_34 Ch=(n,m) yOQ)¥¾ _?ÛgQn-mx3¼_µOQR3ÍWQ ÀOC¢í3ÍwiC¢í3CNT
! q@£µfOCNTCDUÁÌZw n_y`avwi
hQ¡¢x¯°Zwn_4Ãfg w.|/¢@X¡¢xQQR3SWNTÂÃ MWNT¶4_`a3UÄfga vwi
2.4. MWNT]]]]^^^^))!))!!!KKKK----LLMLLM!MM!N!!NNN Fig. 2-9UMWNTTEMkH}lmZingOû üÅÆavwCaped MWNTǾ34kHÍ wi
MWNTO^./0O0.34nm_Ófgav aQn/0O"¡$!|¾`[È [4vhcQ^.É-¬O(ca{fv_
ÄÊfgwiaQèbËÌ_`aO èÍ^SWNTxj3Î3l Ïcavw_ÁaVvxQj{f4É-
¬ÍayèÍ^SWNT+UÛ [4x\ÐÑ`avw_y?Ûgavw[2-15]i
`[`QÉ_nÒQMWNTUzvaOQSWNT
&4UVw¶vlÓkµa v4vi
LpD_rf
N f ga v w _ V & MWNT p D O
20nmq100nmCDUÍwxQjUzv
aOÒÔÍwihQMWNTrfOQ
þO3q5µmQèO1mmÖ`avwÌ ytufgavw[2-16]i,|}X~OQSWMT _ÕU100lÖ÷UÖ`Q105v
fÁ\gavwi b36
MWNTêW6OQèÍ^11GPaq 63GPaQO270GPaq930GPax\
gavw[2-17]inOSWNT__V&ÕÆ
Íwi m3
Fig. 2-10UQMWNT¡¢ÓÌlmZ [2-18]iMWNT¡¢ySWNT_ÕU
§Uzg&Zw×ßUÍwxQvU 4w_OhÃÇ4wipD14nmMWNT
O320Kè3000W/m¬Klm`Qjª
\ZwihMWNT+QpD80nm
O Õ U a1500W/m¬KQ p D200nm O 300W/m¬K_¡¢OµÃª\`avwij gO]^LM!N.É-¬V4"-
¯°UÙwy_Øfgavw[2-18]i
3
Ù MWNTÚÛOUVaµ 4xÍwn_x`avw[2-19]inn_
[\QR3ÂÃC¢í34MWNTxÓÜU¤
Zwn_xÛ[wi`[`QXhO
+_`aMWNTlÝoQjOÒvh vCQR3U4avw_?Ûgavw[2-20]
xQj3xU4avw_O
Ò?Á4vi
Fig. 2-9 TEM images of MWNT. [2-14]
3.
3.1. 5555<<=<<===
QRY(5[\x<=fgwQj n56_5U£¤`aQ<
=xÛwiFig. 3-1(a)OQxÃQ [zQ56x»v<=l`Q
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· ¸ @ ~ = ! < = (Exteneded Schottkey
Emission) _01gwiY(x»ÃQ5
56xÃ4w_QlÅÆncavw 5à/·qáâx»ÃQãÃ4whcQ
~äxåµaQ<=OQFig. 3- 1(b)UmZVU4WQvÛæwQ5<=
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èévlmZi
<=Q·¸@~=!<=Qß·¸@
~=!<=UVw>?JTEQJsQJESOQjg êgJëfgwi[3-2]
J me
h kT
TE =4 3
( )
−kTπ 2 φ
exp (3-1)
ngO8ìQRichardson-DushmanëÍwi
J J e F
s= TE kT
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3
4 0
/ πε
(3-2) nË2KO·¸@~=!;_0íi
J J q
ES = s q π
( )
π
sin (3-3)
nnQ
q m
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(
kT)
π
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4 0 3 1 4
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`[`Qß·¸@~=!¾<=U·v aQyîï@xWQhQ56yîï
xw_Qj<=>?OJëfg wi
JES =JFN πρ
( )
πρ
sin (3-5)
Fig. 2-10 Temperature dependence of thermal conductivity for MWNT.
Fig. 3-1 (a) Electron emission at high temperature and low applied field, (b) Electron emission at low temperature and high applied field (field emission), (c) Emission regimes as a function of temperature and field for an emitter with φφφφ =5eV [3-1].
nnQË2KO·¸@~=!;ÍWQ
ρ φ
=kT t y
( )
me F
2
0 2
h (3-6)
(3-5)ëJFNxQJUïðwFowler-Nordheim UVw<=>?_4wi
3.2. Fowler-Nordheim
Fig. 3-1(b)Um`hUQY(5U·wXÞ ß56xýþUÃ4w_5à/·
qáâô~.xånwxQn gUVw<=>?OJëÀÁ\gwi
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x x,)
x (3-7)nnQn(Ex)OQEx_Ex+dEx. !l
hQRô±x5à/·qá âU÷ð5PQ÷ðo.UñòZwóÍWQ
hQD(Ex, F)OQÍwôõ !ExQ Íw56FU·w~.áâ
ÍwiÉQn(Ex)OQFermi-DiracöA VWJëÀÁ\gwi
n E mk T E E
x B xkT f
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h QD(Ex, F)O Q C ÷ Ç Ì _ ` a QWKB (Wentzel-Kramers-Brillouin )l¬vaQ
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1
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x\gwi783456FOQÀÁ\gh 5 6 (Ea = V/d) _ 5 9 : ; field enhancement factorβl¬vaQ F = βEa_f gwi(3-11)ëE;lYûÎXû_`a£@~
`hyxF-N£@~_EfgQngxp¨l mZ4\1Qj>OQ5<=U åÙ`hyÍw_ü`avi(3-10)ë[
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CNT©U·vaQ>_r¸¹ÖU ýó4-./_ìí3ÞlQ@Q7zUï 0`aïðwiTable 5.1Uj_clmZin g\&g[xZw_Q(é>?l
\g4vn_U4wiÌÁ1Q$@A!F GEl@1w2l`ayQ7!|'¾Îõ
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µ4vihQjgêgKOÉvU.
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$@A|lÓZwhcUOQQR3l mZCNTÄNQ<=5PÐ{QCNTY(
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4vi
33.3 KΩΩΩΩ
Fig. 4-1 Experimental setup for CNT field emitter.
Test Chamber TMP
RGA
Fig. 4-2 Overview of experimental setup for CNT field emitter.
Table 5-1 >>_>>_r__r¸rr¸¸¸¹¹¹¹ÖÖÖÖUUýUUýýýóóóó4444../../_//_ì__ìììíííí3333ÞÞÞÞ
./ ìí3Þ
1 Ù CNTU·w59:;
lcwi
$Q,|}X~Q8; (SW, MW) U·vaQVWvCNT l<=Zwi
2 Ù CNT5U·vaÐ234 59:;lcwi
CNT5Uf\UÐI4l-Zwi
3 $@A!íU>WQ?ú[z {456ï8lwi
$@A!íU>wCNT?l³i ΣúÎë|l^vQCNTl @LZwi ÎCNTroQ A!`hSTl^i
Î@Al^¬`aï¯ZwQBl³i
4 $@A!FGEl@1wi FGE»vlCNTUef(wQÍwvOQr!/
¢Zwi
5 CNT[\à|®¡¢lcQ
[zQCNT-à|9¿M!
dlZwi
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6 X!¾UVwCNT¼Cl Zwi
CNT-à|.396lcwi
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5.1. ÙÙ ÙÙ CNT55559999::::;;;;llll&&&&
1áCNT[\\gw5<=>Ó
OQZUCNTé5100µAUavwi ngO¶4OFGyQv vCNTlÐ\`Qjn[\Z[4vQ<
WZHW1áÒ<=`aQ¾·.r ÎA|/$@A!ûüQÊ 34$@A!_`aQMxµw[\Í wi`[`Q,},I>xòó4©
4\1Qò 9J_`aCNTxòó_4wi n=¢4CNTl9J`4x\Q
>x\gwVUZwOQ1áCNT
_aQõK4n_O4vi
2Låæ`hVUQCNTU¯Æ aQj40_¶OQMNgÍ wiNyO¤7 U³ÛgwVU 4aµhxQÕÆNyjÔÕCNT
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µ4vi`hxaQMNgR:[\Q5 9:;xµj4CNTlÓ3U<=Zw UOQQR3lmZCNTlÍwvOS
UQ$$xvn_VWQ Õíx\4vn_xýóQ,|}X~
Q8;SWQMWlQSEMl^aT UZw`[4v_ÚÛgwiþ OQj<=
lõKUZwhcQSEM(ôUY(la
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µwVU`zzÍwi4·QC¢
í34CNTÚÛOQQR3lmZCNTU
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UQCNT±W¿M!d_<=fgh !ï8xXYéZw_vâãl
iÆwQ)wòóxÍwi
Ù CNT59:;l&f(wn_
ÒUÅZg1Q_3UOûüÅÆhQ pD{fÃQ,|}X~µvQSWNTl
^Á1vn_U4wi`[`QÓO[4\
`yjO4v_vn_lþ ²³Ì
mZiFig. 5.1(a)(b)OQZ pD20nm, µm rflzMWNT_pD1nm, mmrfl zSWNTSEM}Íwi~O$yvi`
[`Qng\CNT<=¶lZw _QCNT±W_`aÔ4¶lmZMWNTx '[3Uv<=¶lm`hiÓÜQ\
kHï[wVUQnSWNTOQ+
?xÍWUÃQPvZ]avaQ[zQ CNTxrvhcQjüx\4vijh cQ$@A!l-`hoUQv[Uy
<=äx\4vVUeÁwi^>SWNTyn
O^Á4vQ+lݵQr
vSWNTl,Ã`aQ<=älÎZ3
Q ZW_ `al bh i9 GQá 10mA/cm2 f g w c 5 O0.7V/µm_ MWNT¥CïU4WQd34lm
`hi
5.2. CNT55U55UUU··v··vavvaaaÐÐÐÐ222233433444559559:99:;::;;;llll
&&&&
CNTxvÃ\{fvpD_µ4,|}X~
lz_vayQ8eQ4òåOjü ÒÍwi`[`Q59:;l&f(Q [zQj59:äx]v&Q<=O
&Zwi`hxaQùNK-ù¥úÐ{
4X|A!lCNT5Uef(QCNTûü _Õ[jgBCDlzÐ{òål ]ÃQCNT5U-w_vÞO(caQ f´gviþ OQ2003PUnglhi/
jop (RuO2)Ó`hi
RuO2OQiÍwUyEÛ\ ÚÛ x|/¤|kbU»ÃQlÐuUWKv
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UVWQMWNT®RuO2®OV3õKÍ wiRuO2®UOA_xÍwxQ ÉóÓMOQ®jvAl7U
¬vQ® Ooͨ¦ï%p 2@³hiFig. 5-2(a)(b)URuO2®«
MWNTTEM}ljgêgmZiMWNTâ5U ùNnm[\nmlÐuxqre`av aQjDOMWNTù¥ú1/10q1/15Íwn _xï[wiZðaRuO2OMWNTÍ5UÍ w_ç`aQTEM}VWj5?lB=Z w_4%_4WQXPSUVW`h_s`
hihQFig. 5-3UmZVUQSEM_EDX(
!ﯾX¨ï¦Qenergy-dispersive X-ray spectroscopy)UVWnlÐuO/jop
(a) (b)
Fig. 5-1 SEM images of MWNTs (a) and SWNTs (b).
SWNTs: Courtesy of Dr. Kenji Hata, Research Center for Advanced Carbon Materials, AIST.
[\fgavwn_xfgQXPSUV WRuO2_`a¤l`hi`hxaQ jlÐuORuO2ÍWQýþUØ
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yÍw[5-1]i9GQ59:;x¼s
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(a)
(b)
Fig. 5-2 TEM images of MWNT before impreg- nated with nano-sized RuO2 particles (a) and after the impregnation (b).
Fig. 5-3 SEM image of one MWNT with RuO2
clusters and EDX spectra at two spots.
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Fig. 5-4 The center FEM image showing strong electron emission from sub-nano sized RuO2 clusters at a MWNT surface.
Fig. 5-5 TEM image of (a) a bundle of CNTs with several ZnO particles attached to it after the annealing process, (b) a large ZnO particle annealed to the sidewall of the nanotube causing the deformation of the tube, and (c) a HRTEM image showing the lattice fringes of the ZnO particle of polyhedral shape. [5-1]
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ÕoU?Zwxjxvi Fig. 5-6 Effect of RuO2 impregnation on the
field emission characteristics.
Fig. 5-7 Low threshold field of emitter with RuO2 impregnation [5-2].
Fig. 5-8 Comparison between two emitters with and without RuO2 impregnation.
(a) (b)
Fig. 5-9 SEM images of oriented MWNT (a) and randomly oriented MWNT(b).
Fig. 5-10UÍwÖ÷4·$M¤!·¸OQ p`avwf1µmCNTpD4nmQ 2µm@Là|UÍg1Qè59:;
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Fig. 5-10 Simulation of the equipotential lines of the electrostatic field for tubes of 1 µµµµm height and 2 nm radius, for distances between tubes of 4, 1, and 0.5 mm; along with the corresponding changes of the field enhancement factor ββββ and emitter density (b), and current density (c) as a function of the distance [5-3].
Fig. 5-11 SEM and TEM images of CNTs. (a) SEM image of as-grown CNTs. (b) TEM image of as-grown CNTs. (c) and (d) SEM image of plasma-treated CNTs The diameter of each CNT covered dot is about 70 µµµµm. (e) TEM image of sandwich-grown CNTs. (f) and (g) TEM image of plasma-treated CNTs [5-4].
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Fig. 5-12 An aligned array of carbon nanotubes grown from a uniform catalyst (a), carbon nanotube array grown from a patterned catalyst (b). [5-5]
Fig. 5-13 (a) TEM images for LaB6 tip-modified MWCNT emitter; (b) high magnification image for the emitter’s tip showing that most of LaB6 was deposited on the tip of the MWCNT dark area; (c) EDX spectrum of the emitter’s tip. [5-6]
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anode positioned at 2µµµµm distance before (a) and after (b) the destruction of the tube.
[5-7]
Fig. 5-16 I-E curves [(a) and (c)] of several test cycles just before failure: (a) L=1µµµµm, r=3 nm, (c) L=1µµµµm, r=20 nm. Inset of (a) is the corresponding SEM image of the CNT emitter. (b) and (d) are the corresponding SEM images of the failure sites. [5-8]
Ti CNT
200nm
CNT Ti
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Ti
Fig. 5-17 SEM images of the interfaces between Ti film and CNTs after the rooting process.
Fig. 5-18 Line elemental analysis of Ti and C at the interface between Ti film and CNTs with EDX.
Fig. 5-19 Comparison of MWNT rooted in Ti film with MWNT dispersed by use of acetone.
Ti
C
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Emission Current Density (A/cm2 )
Electric Field (V/µµµµm)
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![Fig. 2-3 Schematic of arc discharge method. [2-3]](https://thumb-ap.123doks.com/thumbv2/123deta/7074701.2312481/4.892.187.708.254.604/fig-schematic-of-arc-discharge-method.webp)
![Fig. 2-6 TEM images of SWNTs grown by CVD. [2-4]](https://thumb-ap.123doks.com/thumbv2/123deta/7074701.2312481/5.892.189.707.161.560/fig-tem-images-swnts-grown-cvd.webp)
![Fig. 2-8 Temperature dependence of thermal conductivity for copper (a) [2-12] and SWNT (b) [2-13].](https://thumb-ap.123doks.com/thumbv2/123deta/7074701.2312481/6.892.134.756.737.1085/fig-temperature-dependence-thermal-conductivity-copper-swnt-b.webp)
![Fig. 2-9 TEM images of MWNT. [2-14]](https://thumb-ap.123doks.com/thumbv2/123deta/7074701.2312481/7.892.467.798.127.464/fig-tem-images-of-mwnt.webp)
