Study on the measurement system to evaluate the electrode temperature in super-high-pressure mercury lamps

(1)

࿑㧝⿥㜞࿶᳓㌁࡜ࡦࡊߩᄖ▤

ᬀ᦬ ໑ᄦ ㄞᨋ ⾆ม

Study on the measurement system to evaluate the electrode temperature in super-high-pressure mercury lamps

Tadao UETSUKI and Takashi TUJIBAYASHI

Thoriated tungsten (ThO2-W) is popularly used for the electrodes in super-high pressure mercury lamps (SHPs) used in semi-conductor processing. However, ThO2-W is not desirable for the global environment because of its radioactivity.

Therefore it would be very valuable to make a new non-radioactive material to replace ThO2-W as the electrode, and many research efforts have been attempted for this purpose. However, the materials which were researched till now could not improve upon ThO2-W lifetime when they were used as the electrode in the lamps. To evaluate the lamp life the electrode temperature and its distribution are very important, because the lamp life has the close relations with them. However to measure the electrode temperature of a SHP is very difficult because of its plasma radiation. We report the new optical method to evaluate the tungsten electrode temperature of SHP.

Key words: Super-high pressure mercury lamp, Thoriated tungsten, Radioactivity, Electrode temperature

㧝㧚✜ ⸒

ඨዉ૕⵾ㅧߩ৻Ꮏ⒟ߩࡈࠜ࠻࡝࠰ࠣ࡜ࡈࠖߦߪ

⿥㜞࿶᳓㌁࡜ࡦࡊ߇૶↪ߐࠇߡ޿ࠆ㧔࿑1ෳᾖ㧕

ߎߩ࡜ࡦࡊߪᢙ mm ߩ㔚ᭂ㑆〒㔌ߦᢙ #㨪ᢙච # ߩ㔚ᵹࠍᵹߔᔅⷐ߇޽ࠅ㧘㔚ᭂᕈ⢻߇࡜ࡦࡊߩᕈ

⢻࡮ା㗬ᕈߦᄢ߈ߥᓇ㗀ࠍ෸߷ߔ㧚⃻࿷ߎߩ࡜ࡦ ࡊߦ૶↪ߐࠇߡ޿ࠆ㔚ᭂ᧚ᢱߪ࠻࡝ࠛ࡯࠹࠶࠼࠲

ࡦࠣࠬ࠹ࡦߢ޽ࠆ߇㧘ߎߩ᧚ᢱߪᓸ㊂ߢߪ޽ࠆ߇

᡼኿ᕈࠍ᦭ߒߡ޿ࠆ㧚ߘߩߚ߼ߦߘࠇߦઍᦧߐࠇ ࠆߴ߈㔚ᭂߩഃ಴߇ᦸ߹ࠇߡ޿ࠆ㧚ߎࠇ߹ߢߦᢙ

ᄙߊߩ⎇ⓥ߇ߥߐࠇߡ߈ߚ^㧝㧙㧠㧕߇ᧂߛߦ࠻࡝ࠛ

࡯࠹࠶࠼࠲ࡦࠣࠬ࠹ࡦߦઍᦧߢ߈ࠆ㔚ᭂ᧚ᢱߪഃ

಴ߐࠇߡ޿ߥ޿㧚ᵤጊ㜞ኾߢߪߎߩ⺖㗴ߦኻߒߡ㧘㔚ᭂ᧚ᢱߛߌߢߥߊ㔚ᭂߩ☸⇇ᒻ⁁ߦ⌕⋡ߒߡ⎇

ⓥࠍⴕߞߡ޿ࠆ㧚ߎߩ⎇ⓥࠍㅴ߼ࠆ਄ߢ㧘㔚ᭂ᷷

ᐲ߿㔚ᭂ᷷ᐲߩಽᏓࠍᛠីߔࠆߎߣߪ㕖Ᏹߦ㊀ⷐ ߢ޽ࠆ㧚㔚ᭂ᷷ᐲߪ㧘㜞ߔ߉ࠆߣ⫳⊒߇ỗߒߊߥ ࠅ㧘ኼ๮ߦᄢ߈ߥᓇ㗀ࠍ෸߷ߔ㧚߹ߚ᷷ᐲಽᏓߪ㧘

࡜ࡦࡊߩᕈ⢻ࠍᏀฝߔࠆࡊ࡜࠭ࡑߩᐢ߇ࠅࠍᛠី

ߔࠆߩߦ㕖Ᏹߦ㊀ⷐߢ޽ࠆ㧚ࡈࠜ࠻࡝࠰ࠣ࡜ࡈࠖ

ߢߪߎߩ࡜ࡦࡊ߆ࠄߩ⚡ᄖ✢᡼኿ࠍ㓸శߒߡ೑↪

ߒߡ߅ࠅ㧘ࡊ࡜࠭ࡑ߇ᐢ߇ࠆߣ㓸శല₸߇ᖡߊߥ ࠅᕈ⢻߇ᖡߊߥࠆߚ߼ߢ޽ࠆ㧚ᚒޘߪ㧘࡜ࡦࡊὐ Ἦਛߩ㔚ᭂ᷷ᐲ࡮᷷ᐲಽᏓࠍ᷹ቯߔࠆߚ߼ߦ㧘ࠬ

ࡍࠢ࠻࡞᷹ቯ߆ࠄ᷷ᐲࠍ᳞߼ࠆ⸘᷹ࠪࠬ࠹ࡓߩ᭴

▽ࠍⴕߞߚߩߢႎ๔ߔࠆ㧚ᧄႎ๔ߩ᭴ᚑߢ޽ࠆ߇㧘㧞▵ߢ‛૕ߩ᷷ᐲߣ‛૕߆ࠄ᡼኿ߐࠇࠆࠬࡍࠢ࠻

࡞ߩ㑐ଥߦߟ޿ߡߩၮ␆⍮⼂ࠍᢛℂߒ㧘3▵ߢ⃻࿷

೑↪ߐࠇߡ޿ࠆ᷹ቯᣇᴺߩ⚫੺㧘߅ࠃ߮ߘߩ᷹ቯ ᣇᴺߦࠃࠅὐἮਛߩ⿥㜞࿶᳓㌁࡜ࡦࡊߩ㔚ᭂ᷷ᐲ ࠍ᷹ቯߔࠆߎߣߩ㔍ߒߐࠍㅀߴࠆ㧚ߘߒߡ 4 ▵ߢ ߘߩ࿎㔍ߐࠍస᦯ߒߡ᭴▽ߒߚ᷹ቯᣇᴺߣߘߩ⚿

ᨐࠍ 5▵ߢ⠨ኤࠍㅀߴ㧘ᦨᓟߦ 6▵ߢ߹ߣ߼ࠍⴕ ߁㧚

㧞㧚᷷ᐲ⸘᷹ߦ㑐ߔࠆၮ␆⍮⼂

ේⓂฃઃ ᐔᚑ23ᐕ8᦬31 㧖㔚᳇㔚ሶᎿቇ⑼

㧖㧖㔚᳇㔚ሶᎿቇ⑼㧡ᐕ

(2)

࿑㧞㤥૕߆ࠄߩಽశ᡼኿ノᐲ㧔ℂ⺰୯㧕

࿑㧟㔚ᭂ߆ࠄߩ᡼኿ࠬࡍࠢ࠻࡞᷹ቯࠪࠬ࠹ࡓᮨᑼ࿑

‛૕ߪߘߩ᷷ᐲߦᔕߓߚశ㧔㔚⏛ᵄ㧕ࠍ᡼኿ߔࠆ㧚

‛૕߇㤥૕ߢ޽ࠆ႐ว㧘ߘߩశߩಽశ᡼኿ノᐲ(ᵄ 㐳ǳߢߩන૏ᵄ㐳᏷޽ߚࠅ㧘න૏┙૕ⷺ޽ߚࠅ㧘 න૏ᛩᓇ㕙Ⓧ޽ߚࠅߩ᡼኿᧤)L(ǳ,T)ߣᾲജቇ⊛

᷷ᐲT ߣߩ㑐ଥࠍ⴫ߒߚ߽ߩ߇ࡊ࡜ࡦࠢߩ᡼኿ೣ

ߢ޽ࠅᰴᑼߢਈ߃ࠄࠇࠆ⁵⁾㧚

1

5 2

( , ) 1

exp( 1

O O

O L T C

C T

(1)

L(ǳ,T)㧧 ಽశ᡼኿ノᐲ(W࡮m^㧙³) ǳ 㧧 ‛૕߆ࠄ⊒ᢔߔࠆ᡼኿ߩᵄ㐳(m) T 㧧 ‛૕ߩ⛘ኻ᷷ᐲ(K)

C1=2Ǹc²h=3.7514010^㧙16 W࡮m² C2=ch/k=0.014388 m࡮K

c ; ⌀ⓨਛߩశߩㅦᐲ(c=3.010⁸ m࡮s^㧙1) h ; ࡊ࡜ࡦࠢቯᢙ(h=6.625610^㧙³⁴ J࡮s) k ; ࡏ࡞࠷ࡑࡦቯᢙ(k=1.38 10^㧙²³ J࡮K^㧙¹) ߎߩ L(ǳ,T)ߣǳߩ㑐ଥࠍ࿑ 2 ߦ␜ߔ㧚㤥૕એᄖ ߩ‛⾰߆ࠄߩಽశ᡼኿ノᐲߪߘߩ‛⾰࿕᦭ߩಽశ

᡼኿₸ǭ(ǳ)ࠍߎߩL(ǳ,T)ߦដߌߚ୯ߣߥࠆ㧚

㧟㧚৻⥸⊛᷹ቯᣇᴺ߅ࠃ߮ߘߩ໧㗴ὐ ߹ߕ㧘৻⥸ߩ⿒ᄖ᷷ᐲ᡼኿⸘ߦ↪޿ࠄࠇࠆේℂ ࠍ⺑᣿ߔࠆ㧚ᑼ(1)ߦ߅޿ߡᵄ㐳ǳ߇ᢙ 100nm ߣ ዊߐ޿ߣ߈㧘exp(C2/ǳT)Ҍ1 ߣ޿߁㑐ଥ߇ᚑ┙ߔ ࠆߚ߼㧘ᰴᑼ(2)ߦᄌᒻߢ߈ࠆ㧚

1

5 2

2 1

( , )

exp(

O O

O L T C

C T

(2)

ታ㓙ߦߪ㧘ಽశ᡼኿ノᐲߪࠬࡍࠢ࠻࡞ᒝᐲߣߒ ߡ᷹ቯߢ߈ࠆ㧚ߘࠇࠍ M(ǳ,T)ߣߔࠆߣ㧘ᰴᑼ(3) ߢ␜ߐࠇࠆ㧚

5 2

( ) 1 ( , )

exp(

O H O

O

O M T A

C T

(3)

ߎߎߢAߪಽశࠬࡍࠢ࠻࡞᷹ቯེߩᗵᐲߥߤࠍ⠨

ᘦߒߚቯᢙߢ޽ࠅ㧘ǭ(ǳ)ߪ‛૕ߩಽశ᡼኿₸ߢ޽

ࠆ㧚ࠬࡍࠢ࠻࡞ǳ1㧘ǳ2 ߢߩಽశࠬࡍࠢ࠻࡞ᒝᐲ 㧔᷹ቯ୯㧕ࠍ M1㧘M2ߣߔࠆߣߘࠇࠄߪએਅߩ㑐 ଥᑼߢ␜ߐࠇࠆ㧚

1 1 51

1 2

1

( ) 1

( , )

exp(

O H O

O

M T A

C T

(4)

2 2 52

2 2

2

( ) 1

( , )

exp(

O H O

O

M T A

C T

(5)

ᑼ(4),(5)ࠃࠅᰴᑼ(6)߇ᓧࠄࠇࠆ㧚

2

1 1 1 25 2

5 2

2 2 2 1

1

( , ) ( ) exp(

O H O O O

O H O O

O C

M T T

M T C

T

(6)

ߎߎߢǳ1㧘ǳ2 ࠍㄭ޿୯ߦขࠆߣǭ(ǳ1)㧩ǭ(ǳ2) ߇ᚑࠅ┙ߟ㧚ߒߚ߇ߞߡ㧘ᑼ(6)ࠍᄌᒻߐߖࠆߎߣ ߢ᷷ᐲTࠍᰴᑼߩࠃ߁ߦ᳞߼ࠆߎߣ߇ߢ߈ࠆ㧚

2

2 1

1 1 25

2 2 15

1 1

( , )

ln ln

( , )

O O

§ ·

¨ ¸

© ¹

§ ·

¨¨ ¸¸

© ¹

C

T M T

M T

(7)

ታ㓙ߦ㔚ᭂ߆ࠄߩࠬࡍࠢ࠻࡞ࠍ᷹ቯߒ㧘ᑼ(㧣)ߦࠃࠅ᷷

ᐲࠍ⸘▚ߒߚ㧚᷹ቯߪ࿑㧟ߦ␜ߔࠃ߁ߦ࡟ࡦ࠭ߢ⚿௝

ߐ ߖ 㧘 ࠬ ࡍࠢ ࠻ ࡞ ᷹ ቯߦ ߪ ᄢ Ⴆ 㔚ሶ ᩣ ᑼ ળ ␠ߩ MCPD-3700ࠍ૶↪ߒߚ㧚ߎߩ᷹ቯེߩ઀᭽ࠍ⴫1ߦ

␜ߔ㧚ߎߩᯏེߩᩞᱜߪၮḰశḮߩࠬࡍࠢ࠻࡞᷹ቯߦ ࠃࠅⴕߞߚ㧚

⴫ MCPD-3700ߩ઀᭽

᷹ቯน⢻ᵄ㐳▸࿐ 320nm~820nm

ಽశེ ࡉ࡟࡯࠭࠼ࡎࡠࠣ࡜ࡈࠖ࠶ࠢဳ

F = 3ޔf = 135 mm

ᬌ಴ེ 㔚ሶ಄ළဳ ࡈࠜ࠻࠳ࠗࠝ࡯࠼ࠕ

࡟ࠗ 1024ch 1⚛ሶ޽ߚࠅߩᵄ㐳

᏷

0.6nm/⚛ሶ

ࠝࡊ࠹ࠖࠞ࡞ࡈࠔ

ࠗࡃ࡯

⍹⧷⵾ࡈࠔࠗࡃ࡯ޔญ㊄ᓘǾ12 nmޔ㐳ߐ⚂㧝m

ࠬࠠࡖࡦᤨ㑆 16msec 㨪 20sec

(3)

࿑㧢 ᓥ᧪ߩ᷹ቯᣇᴺߢ᷹ቯߒߚ㔚ᭂ᷷ᐲಽᏓ

࿑ 㔚ᭂ᷷ᐲߩಽᏓࠍᛠីߔࠆߚ߼ߩ᷹ቯὐ

࿑㧠 ⿥㜞࿶᳓㌁࡜ࡦࡊ߆ࠄߩ᡼኿ࠬࡍࠢ࠻࡞

࿑㧣 ⿥㜞࿶᳓㌁࡜ࡦࡊߩᶖἮ೨ᓟߩ᭽ሶ

࿑㧤 ⿥㜞࿶᳓㌁࡜ࡦࡊᶖἮ೨ᓟߩ㔚ᭂ߆ࠄߩ᡼኿ࠬࡍࠢ࠻࡞

᷷ᐲࠍ⸘᷹ߒߚࠬࡍࠢ࠻࡞ᒝᐲࠍ࿑4ߦ␜ߔ㧚᷹ቯߒ ߚ࡜ࡦࡊߪ⚐☴ߥ࠲ࡦࠣࠬ࠹ࡦ㔚ᭂߢ૞ᚑߐࠇߚ߽ߩ ߢ200ᤨ㑆ὐἮߒߚ߽ߩࠍ૶↪ߒߚ㧚࿑4ߩࠬࡍࠢ࠻

࡞ᵄᒻߪ࿑2ߩㅪ⛯ࠬࡍࠢ࠻࡞ߦᒝὓߥノ✢ࠬࡍࠢ࠻

࡞߇ടࠊߞߚ߽ߩߦߥߞߡ޿ࠆ㧚ߎߩノ✢ࠬࡍࠢ࠻࡞

ߪࡊ࡜࠭ࡑਛߩ᳓㌁߆ࠄߩࠬࡍࠢ࠻࡞ߢ޽ࠆߣ⠨߃㧘 ߘߩᓇ㗀ߩߥ޿႐ᚲ㧔࿑ਛߩǳ1㧘ǳ2ߩ㧞ὐ㧕ߢߩᒝ ᐲ߆ࠄᑼ(7)ࠍ↪޿ߡ᷷ᐲࠍ⸘▚ߒߚ㧚ߎߩ᷹ቯࠍ࿑ 5 ߦ␜ߔవ┵߆ࠄ1.5চᲤߦ5ὐߦߟ޿ߡⴕ޿㧘㔚ᭂ਄

ߩ᷷ᐲಽᏓࠍ᳞߼ߚ㧚ߘߩ⚿ᨐࠍ࿑6ߦ␜ߔ㧚

࿑6ߢߪవ┵᷷ᐲ߇࠲ࡦࠣࠬ࠹ࡦߩⲢὐㄭߊߦߥߞߡ ߅ࠅ㧘߆ߟ㔚ᭂߩᩮరઃㄭߢ߽2700 Kࠍ␜ߒߡ޿ࠆ㧚 ߎߩ᷷ᐲߪ৻⥸Ᏹ⼂߆ࠄ⠨߃ߡ㜞᷷ߔ߉ࠆ㧚ߎߩࠃ߁ ߦ㜞᷷ߦߥߞߚේ࿃ߪ᳓㌁ࠬࡍࠢ࠻࡞ࠍ㒰෰ߔࠆߎߣ ߇ߢ߈ߥ߆ߞߚߚ߼ߣ⠨߃ߚ㧚ߘߎߢ᳓㌁ࠬࡍࠢ࠻࡞

ࠍ㒰෰ߒߡᱜ⏕ߥ᷷ᐲ᷹ቯࠍߔࠆߚ߼ߩ᷹ቯࠪࠬ࠹ࡓ ࠍ᭴▽ߔࠆᔅⷐࠍ↢ߓߚ㧚

㧠㧚ᣂ᷹ቯࠪࠬ࠹ࡓߩ᭴▽

㧠㧚㧝㧚㔚ᭂㇱಽߩⷰኤ⚿ᨐ

࡜ࡦࡊ߆ࠄ᡼಴ߐࠇࠆ᳓㌁ࠬࡍࠢ࠻࡞ࠍ㒰෰ߔ ࠆߎߣߪ㕖Ᏹߦ࿎㔍ߢ޽ࠆߚ߼㧘࡜ࡦࡊࠍᶖἮߒ ߡ߆ࠄߩ᷹ቯ߇น⢻߆ߤ߁߆ࠍ⺞ᩏߒߚ㧚૶↪ߒ ߡ޿ࠆಽశེMCPD-3700㧔ᄢႦ㔚ሶᩣᑼળ␠⵾㧕ߩ

࠺࡯࠲᷹ቯࠬࡇ࡯࠼߇⚂20msߢ޽ࠆߎߣ߆ࠄ㧘࡜ࡦ ࡊߩᶖἮᤨߩ㔚ᭂㇱಽߩ⿒ᾲ⁁ᘒ߇ߤ߁ᄌൻߔࠆ߆ࠍ

⍮ࠆߚ߼ߦᏒ⽼ຠߩ࡜ࡦࡊ㧔࿑5ߩW㔚ᭂ࡜ࡦࡊߣߪ

⇣ߥࠆ㧕ࠍࠬࡇ࡯࠼ࠞࡔ࡜ߢ᠟ᓇߒߚ㧚ߘߩ⚿ᨐࠍ࿑

7ߦ␜ߔ㧚

ߎߩ࿑߆ࠄ࡜ࡦࡊᶖἮᓟ߽ᢙ10msߩ㑆ߪචಽߦ⿒

ᾲ ߒ ߡ ޿ ࠆ ߎ ߣ ߇ ⏕ ⹺ ߢ ߈ ߚ 㧚 ߒ ߚ ߇ ߞ ߡ 㧘

MCPD-3700 ߢᶖἮ೨ᓟߩࠬࡍࠢ࠻࡞࠺࡯࠲ࠍ᷹ቯߔ

ࠆߎߣߦߒߚ㧚

㧠㧚㧞㧚ಽశེߢߩ᷹ቯ⚿ᨐ

࿑ 8 ߦࠬࡍࠢ࠻࡞᷹ቯ⚿ᨐࠍ␜ߔ㧚ߎߩ⚿ᨐ߆ ࠄ㧘ᶖἮᓟߪ᳓㌁ࠬࡍࠢ࠻࡞߇㒰෰ߢ߈㧘߆ߟ᷷

ᐲ᡼኿ߦࠃࠆ᡼኿ࠬࡍࠢ࠻࡞߇ⷰኤߢ߈ߡ޿ࠆߩ ߇⏕⹺ߢ߈ࠆ㧚

ߎߎߢ㧘ࠬࡍࠢ࠻࡞᷹ቯߩᤨ㑆߇ᢙ10msߣ㕖Ᏹ ߦ⍴޿ߚ߼ࡎࡢࠗ࠻ࡁࠗ࠭߇㕖Ᏹߦᄢ߈޿㧚ߘߩ ߚ߼ 2▵ߢㅀߴߚ 2ὐߩࠬࡍࠢ࠻࡞ᒝᐲ߆ࠄ᳞߼

ࠆ⸘▚ᣇᴺߪ⺋Ꮕ߇ᄢ߈޿ߚ߼㧘એਅߩࠃ߁ߦߒ ߡ᳞߼ߚ㧚ᑼ(3)ࠍᄌᒻߔࠆߣᰴᑼ(8)ߩࠃ߁ߦߥࠆ㧚

⁵

² ¹

log O ( , )O log H O( ) O

e e

M T A C

T (8)

ᑼ(8)ߩᏀㄝߪ᷹ቯ୯߆ࠄ᳞߼ࠆߎߣ߇ߢ߈ࠆ㧚ߘ ߩᏀㄝߩ୯ࠍ❑ゲߦߣࠅ㧘ᮮゲ ǳߣߒߡࠣ࡜ࡈ

(4)

࿑㧥 ࡊ࡜ࡦࠢߩ᡼኿ೣߦၮߠ޿ߡ⸘▚ߒߚ࠺࡯࠲

࿑12 ឭ᩺ߒߚ᷹ቯᣇᴺߢᓧࠄࠇߚ㔚ᭂ᷷ᐲಽᏓ㧔᡼኿₸⵬ᱜᷣ㧕

࿑ ࠲ࡦࠣࠬ࠹ࡦ࡝ࡏࡦߩ᡼኿₸

׋11 ્ݧྙǛᎋॾƠƯᚘምƠƨȇȸǿ

ൻߔࠆߣ㧘ᑼ(8)ߪ⋥✢ߣߥࠅ㧘ߘߩ௑߈ࠍǩߣߔ ࠆߣ㧘ᰴᑼ(9)ࠃࠅ㔚ᭂ᷷ᐲ6 ߇᳞߹ࠆ㧚

2 2

D ^C ? ^CD

T T (9)

㧠㧚㧟㧚㔚ᭂ᷷ᐲߩᤨ㑆⊛ߥᄌൻ

࿑8ߩ᷹ቯ⚿ᨐࠍᑼ(8)ߦၮߠ޿ߡࠣ࡜ࡈൻߒߚ

߽ߩࠍ࿑ 9ߦ␜ߔ㧚࿑9ߩ⋥✢ߩ௑߈߆ࠄ᷷ᐲࠍ

᳞߼ߚ⚿ᨐࠍ⴫㧝ߦ␜ߔ㧚

⴫2࠲ࡦࠣࠬ࠹ࡦ㔚ᭂవ┵᷷ᐲߩᤨ㑆ᄌൻ

ยܭ଺᧓ ໜ໊ɶ ෞ໊ࢸ OU

ෞ໊ࢸ OU

ෞ໊ࢸ OU ᩓಊภࡇ

-

⴫ 2 ߩ⚿ᨐ߆ࠄ㧘ὐἮਛߪ᳓㌁ࠬࡍࠢ࠻࡞ߩᓇ㗀 ߢ㔚ᭂ᷷ ᐲ߇ᱜ⏕ߦ ᷹ࠇߥ޿ߎ ߣ㧘ᶖἮᓟ ߩ⚂

100ms 㑆ߪߐ߶ߤ㔚ᭂ᷷ᐲߩૐਅ߇ߥ޿ߎߣ㧘ߩ

㧞ߟߩߎߣ߇⏕⹺ߢ߈ࠆ㧚⴫ 2 ߦ߅޿ߡ㧘ᶖἮᓟ ߩ㧟ߟߩ᷷ᐲߩ߫ࠄߟ߈ߪ㧘ࡎࡢࠗ࠻ࡁࠗ࠭ߦࠃ ࠆ᷹ቯ⺋Ꮕߛߣ⠨߃ߡ޿ࠆ㧚

㧠㧚㧠㧚᡼኿₸ߩᓇ㗀ߦߟ޿ߡ

3 ▵ߢㅀߴߚࠃ߁ߦ࠲ࡦࠣࠬ࠹ࡦߪ᡼኿₸ࠍ᦭

ߒߡ޿ࠆ㧚3▵ߢߪ2ߟߩᵄ㐳㧔ǳ1㧘ǳ2㧕ࠍㄭ޿

୯ߦขࠇ߫᡼኿₸ߪ߶߷৻ቯߢ޽ࠆߣ⠨߃ࠆߎߣ ߇ߢ߈ߚ㧚4.2▵ߣ4.3▵ߢߩ⚿ᨐ߽᡼኿₸ࠍ৻ቯ ߣߺߥߒߡⴕߞߚ㧚ߒ߆ߒ㧘ߎߎߢ૶↪ߒߚ᷷ᐲ

᷹ቯᣇᴺߪ㧘700㨪800nm ߩᐢ޿ᵄ㐳㗔ၞࠍ૶↪

ߒߡ߅ࠅ㧘ߎߩᐢ޿㗔ၞߢߪ᡼኿₸߇৻ቯߢߪߥ

޿㧚

࠲ࡦࠣࠬ࠹ࡦߩ᡼኿₸ߦ㑐ߒߡߪJ.C.De Vos߇

࠲ࡦࠣࠬ࠹ࡦ࡝ࡏࡦߦߟ޿ߡႎ๔ߒߡ޿ࠆ⁶⁾㧚 (࿑

10ෳᾖ)㧚ߘࠇࠍ↪޿ߡ࿑9㧘⴫2ߩᶖἮᓟߩ㔚ᭂ

᷷ᐲࠍ⵬ᱜߒߚ⚿ᨐࠍ࿑11㧘⴫3ߦ␜ߔ㧚

⴫3᡼኿₸⵬ᱜᓟߩ࠲ࡦࠣࠬ࠹ࡦ㔚ᭂవ┵᷷ᐲߩᤨ㑆ᄌൻ

ยܭ଺᧓ ෞ໊ࢸ OU

ෞ໊ࢸ OU

ᩓಊภࡇ-

㧡㧚᷹ቯ⚿ᨐߣ⠨ኤ

㧡㧚㧝㧚㔚ᭂ᷷ᐲಽᏓ᷹ቯ⚿ᨐ

4▵ߢㅀߴߚ᷹ቯᣇᴺߢ᳞߼ߚ⚿ᨐࠍ࿑12ߦ␜

ߔ㧚࿑12ߦ␜ߒߚ୯ߪ㧘ᶖἮᓟ33ms66ms99ms

ᤨὐߢ᳞߼ߚ᷷ᐲࠍᐔဋߒߚ୯ߢ޽ࠆ㧚

ߎߩ࿑߆ࠄవ┵ઃㄭߩ 2 ὐߪ᷷ᐲ߇ߐ߶ߤᄌൻ ߖߕ㧘వ┵߆ࠄ㔌ࠇߚ 3 ὐ⋡ߢᕆߦ᷷ᐲ߇ૐਅߒ ߡ޿ࠆࠃ߁ߦ⷗߃ࠆ㧚ߘߩේ࿃ࠍ⠨ኤߔࠆߚ߼ߦ㧘㒶ᭂࠍ᜛ᄢߒߚ౮⌀ࠍ࿑13ߦ␜ߔ㧚(a)ߪ࡜ࡦࡊ߇ ᣂຠᤨߩ㒶ᭂ౮⌀ߢ޽ࠅ㧘(b)ߪ 200ᤨ㑆ὐἮᤨߩ 㒶ᭂ౮⌀ߢ޽ࠆ㧚ߎߩ࿑ࠃࠅ㧘200ᤨ㑆ᤨὐߩ㒶ᭂ

(5)

(a) 0hr (b)200hr

࿑ ೋᦼߣ ᤨ㑆ὐἮᤨߩ㒶ᭂᒻ⁁

వ┵߇᡼㔚ߦࠃࠅ߆ߥࠅਣߊߥߞߡ޿ࠆߩ߇ࠊ߆ ࠆ㧚㔚ᭂవ┵ㇱಽ㧔࿑13ਛԘ㧘ԙㇱಽ㧘ฦ᷹ቯ૏

⟎ߩ㑆㓒ߪ1.5㨙㨙㧕ߩ㔚ᭂ᷷ᐲᏅ߇ዊߐ߆ߞߚߩ ߪ㧘ࡊ࡜࠭ࡑ߇߆ߥࠅᐢ߇ߞߡ޿ࠆߩ߇ේ࿃ߛߣ

⠨߃ߡ޿ࠆ㧚ᱷᔨߥߎߣߦᣂຠᤨߩ᷹ቯ߇ߢ߈ߡ

޿ߥ޿㧘߆ߟ․೎઀᭽ߩ࡜ࡦࡊߢᣂຠ࡜ࡦࡊ߇ᚻ రߦߥ޿ߚ߼ߦᲧセ߇ߢ߈ߥ޿㧚੹ᓟ㧘㒶ᭂవ┵

ᒻ⁁ߣࡊ࡜࠭ࡑߩ⁁ᘒ㧔ᐢ߇ࠅᣇ㧕ࠍⷰኤߒߡ⏕

⹺ߒߡ޿ߊ੍ቯߢ޽ࠆ㧚

㧢㧚߹ ߣ ߼

ᧄ⎇ⓥߢ㧘⿥㜞࿶᳓㌁࡜ࡦࡊߩᣂ㔚ᭂߩ㐿⊒ߩ ߚ߼ߦᔅⷐߥ㔚ᭂ᷷ᐲ᷹ቯᣇᴺߦߟ޿ߡᬌ⸛ߒߚ

⚿ᨐࠍㅀߴࠆ㧚㔚ᭂ᷷ᐲࠍ㕖ធ⸅ߢ᷹ቯߔࠆᣇᴺ ߣߒߡᦨ߽৻⥸⊛ߥߩߪ㧘Plankߩ᡼኿ೣߦၮߠ߈ 㧞ߟߩᵄ㐳ߦኻߔࠆಽశノᐲࠍ᳞߼㧘ߘࠇ߆ࠄ⸘

▚ߔࠆᣇᴺߢ޽ࠆ㧚ߎߩᣇᴺߪ㧘శቇ⊛ߦ⭯޿ⓨ

㑆ਛߢノ✢ࠬࡍࠢ࠻࡞ࠍ฽߹ߥ޿႐วߦߪ㕖Ᏹߦ

᦭ലߢ޽ࠆ߇㧘ᧄ⎇ⓥኻ⽎ߣߒߡ޿ࠆࠃ߁ߥࡊ࡜

࠭ࡑኒᐲߩỚ޿᡼㔚ⓨ㑆ਛߢߪᱜߒ޿᷷ᐲࠍ᷹ቯ ߔࠆߎߣߪ࿎㔍ߢ޽ߞߚ㧚ᧄ⎇ⓥߢߪ㧘࡜ࡦࡊᶖ Ἦ⋥ᓟߩ㔚ᭂ߆ࠄߩ᷷ᐲ᡼኿ࠬࡍࠢ࠻࡞ࠍ᷹ቯߔ

ࠆߎߣߢ㧘ࡊ࡜࠭ࡑ߆ࠄߩ᡼኿ߩᓇ㗀ࠍ㒰෰ߒ㧘

᷹ቯߔࠆᣇᴺࠍ⏕┙ߒߚ㧚ߚߛߒ㧘ߎߩ᷹ቯߦߪ

㜞ㅦ㧔⚂20ms㧕ߢᐢ▸࿐ߩࠬࡍࠢ࠻࡞᷹ቯ߇น⢻

ߥಽశེ߇ᔅⷐߢ޽ࠅ㧘MCPD-3700㧔ᄢႦ㔚ሶᩣᑼ ળ␠⵾㧕ࠍ૶↪ߒߚ㧚ὐἮਛ㧔ࡊ࡜࠭ࡑኒᐲ߇Ớ޿⁁

ᘒ㧕ߢ㧘ᓥ᧪ߩ᷹ቯᣇᴺߢߪᱜߒ޿୯߇᷹ࠇߥ޿ߎߣ㧘 ᚒޘ߇⠨߃ߚᣇᴺߢߪᅷᒰߥ୯߇᷹ቯߢ߈ࠆߎߣࠍ⏕

⹺ߒߚ㧚

⻢ㄉ

ᧄ⎇ⓥߦߣߞߡᰳ߆ߔߎߣߩߢ߈ߥ޿ MCPD-3700 ߣ޿߁㜞ଔߥ⸳஻ࠍ߅⾉ߒ޿ߚߛ޿ߚᄢႦ㔚ሶᩣ

ᑼળ␠ߦᔃ߆ࠄᓮ␞ࠍ↳ߒ਄ߍࠆ㧚

ෳ ⠨ ᢥ ₂

㧝㧕F.Matsuda et al., “Role and Behaviors of Rare Earth Metal Oxides During the Operation of Tungsten Doped Electrodes”, Transactions of the Japan Welding Society, Vol. 21, No. 2, pp.

75-84, October 1990R

㧞㧕F.Matsuda et al., “Consumption and "Rim" Formation of Gas Tungsten Arc Cathode”, Vol. 6, No. 2, pp. 205-209, 1988 㧟㧕K.Tanaka et al., “Effect of Additives in Tungsten Electrode”,

Japan Welding Society, Vol. 13, No. 4, pp. 524-531, 1995 㧠㧕F.Matsuda et al., “Comparative Study on Fundamental Arc

Characteristics with La-, Y- Ce-Oxide Tungsten Electrode”, Vol.

6, No. 2, pp. 199-204, 1988

㧡㧕ᷓየ଻߶߆㧦ᡷ⸓㔚᳇ᔕ↪Σ㧘ࠦࡠ࠽␠㧔2005㧕3-5 㧢㧕J.C.DeVos, “A NEW DETERMINATION OF THE EMIS-

SIVITY OF TUNGSTEN RIBBON”, Physica XX, pp.690-714 (1954)