©Research Institute for Integrated Science, Kanagawa University
عේ ⪺ع 2005
ᐕᐲᄹᎹᄢቇ✚วℂቇ⎇ⓥᚲห⎇ⓥഥᚑ⺰ᢥ
㜞ຠ⾰࠳ࠗࡗࡕࡦ࠼⭯⤑ߩᒻᚑߣ⹏ଔߩ⎇ⓥ
ਛ↰ⓛᴦ
1,㧠ᢪ⮮⋥
㧝Ꮉፒసೣ
2ㇱବᐘ
㧟Research for Formation of High-Quality Diamond Epitaxial Thin Layers on the Diamond Substrates and Evaluation of These Layers
Jyoji Nakata
1,4, Yasunao Saito
1, Katsunori Kawasaki
2and Toshiyuki Hattori
31 Department of Information Science, Faculty of Science, Kanagawa University, Hiratsuka-shi.
Kanagawa-ken, 259-1293, Japan
2 Graduate School of Science and Engineering Tokyo Institute of Technology, Meguro-ku, Tokyo, 152-8550, Japan
3Research Laboratory of Nuclear Reactor, Tokyo Institute of Technology, Meguro-ku, Tokyo, 152-8550, Japan
4To whom correspondence should be addressed. E-mail: jyojin@info.kanagawa-u.ac.jp
Abstract: We have developed a microwave-plasma CVD apparatus for depositing epitaxial diamond layers on the diamond substrates. We used Ib-type substrates and succeeded in depositing high-quality diamond epitaxial layers on these substrates, confirmed by measuring Raman shift spectra and the electrical characteristics of CVD layers using a Hall effect measuring instrument. However, the surface morphology of the deposited layers is not so good, as ascertained by Atomic Force Microprobe. We also measured impurity profiles in the CVD layers, using Secondary Ion Mass Spectroscopy. Moreover, we found an abrupt concentration difference of N impurity at the interface between the deposited layer and the substrate, showing that the concentration of N impurity is lower in the CVD layer than in the substrate.
Keywords: microwave-plasma, CVD, diamond, epitaxial layer, Hall-effect, AFM, SIMS
ᐨ⺰
ߪߓߦ
ࡢࠗ࠼ࠡࡖ࠶ࡊඨዉߩઍᩰߢࠆ࠳ࠗࡗࡕࡦ࠼ඨ ዉߪޔSiඨዉߢߪേߒߥࠃ߁ߥ㜞᷷ⅣႺਅ߿
㜞✢ⅣႺਅߦ߅ߡ߽േߔࠆඨዉߣߒߡᵈ⋡
ߐࠇߡࠆޕߘࠇ߫߆ࠅߢߪߥߊޔ㜞㔚ሶ⒖േᐲ߿㜞 ᱜሹ⒖േᐲޔࠆߪ㘻㔚ሶ࠼ࡈ࠻ㅦᐲ߇ᄢ߈
╬ߩᕈ⾰߆ࠄ㜞ㅦ㔚ሶ࠺ࡃࠗࠬ߳ߩᔕ↪߇ᦼᓙߐࠇߡ
ࠆޕߐࠄߦ⛘✼⠴߇㜞ߎߣ߆ࠄ㜞ࡄࡢ࠺ࡃࠗ
ࠬߣߒߡߩᓎഀ߽ᄢ߈ޕߎߩࠃ߁ߦ࠳ࠗࡗࡕࡦ࠼ඨ ዉߪ Si ඨዉࠃࠅ߽ߪࠆ߆ߦఝࠇߚ․ᓽࠍ߽ߟ㜞
᷷േน⢻ߥඨዉ⚛ሶߣߒߡޔ߹ߚ⠴✢ᕈ⚛ሶ ߣߒߡߩᔕ↪߇ᦼᓙߐࠇߡࠆޕ࠳ࠗࡗࡕࡦ࠼ඨዉ
ߩવዉᕈᓮᛛⴚ߇⏕┙ߐࠇࠇ߫ޔࡢࠗ࠼ࠡࡖ࠶ࡊඨ ዉߩታ↪ൻࠍᄢ߈ߊଦㅴߔࠆߎߣ߇ߢ߈ࠆޕࡢࠗ࠼
ࠡࡖ࠶ࡊඨዉ᧚ᢱࠍ↪ߚ⠴ⅣႺᕈ⚛ሶ߇᥉ߔࠇ
߫ޔ㔚ജᓮࠪࠬ࠹ࡓ߿ౝΆᯏ㑐ߩ㜞ല₸ൻߦࠃࠆ⾗
Ḯߩല↪ޔ᷷ቶലᨐࠟࠬߩૐᷫ╬߇ᦼᓙߐࠇޔ
ᦨ㊀ⷐߩ⺖㗴ߣߥߞߡࠆⅣႺ㗴ߦኻߒߡ⸃߳
ߩᄢ߈ߥ♻ญࠍਈ߃ࠆߎߣߦߥࠆޕ߹ߚޔੱᎿⴡᤊ
タ㔚ሶᯏེ߳ߩቝቮ✢ߩᓇ㗀ࠍૐᷫߢ߈ޔࡑ࡞࠴ࠖࡔ
࠺ࠖࠕᤨઍߦะߌߚⴡᤊㅍ߿⒖േㅢାߩ᥉ߦነ ਈߔࠆ߽ߩߣ⠨߃ࠄࠇޔ␠ળߦᄢ߈ߥࠗࡦࡄࠢ࠻ࠍਈ ߃ࠆޕߒ߆ߒޔએਅߩࠃ߁ߥ㗴ὐ߇ࠆޕ
ᱷᔨߥ߇ࠄ߹ߢ⦟ᅢߥ㧺ဳ࠳ࠗࡗࡕࡦ࠼ඨዉ
߇ታߐࠇߡߥޕඨዉ⚛ሶታߩߚߦߪޔP
ဳߣ N ဳ㗔ၞࠍᒻᚑߔࠆߚߦવዉᕈᓮߩਇ⚐‛
ዉᛛⴚ߇ᔅⷐߣߥࠆ߇ޔᢔଥᢙ߇ዊߐߚߦᾲ
ᢔߦࠃࠆਇ⚐‛ዉߪ࿎㔍ߢࠆޕᓥߞߡޔࠗࠝࡦ ᵈߦࠃࠆਇ⚐‛ర⚛ዉ߇ᦸⷞߐࠇߡࠆޕߒ߆ ߒޔ࠳ࠗࡗࡕࡦ࠼ߢߪࠗࠝࡦᵈߦ߁៊்ᒻᚑޔᚗ
ߪࠗࠝࡦᵈᓟߩᾲಣℂߦ߁ࠣࡈࠔࠗ࠻ᒻᚑߦ ࠃࠅޔ࠳ࠗࡗࡕࡦ࠼ߣߒߡߩ⚿᥏ᕈ⛽ᜬ߇࿎㔍ߥ⁁ᴫ ߦࠆޕ߹ߚޔ⦟ᅢߥNဳጀߪߢ߈ߡ߅ࠄߕޔ߿ߞߣ ᦨㄭCVDᴺߦࠃࠅၸⓍᤨߦหᤨ࠼ࡇࡦࠣߦࠃࠅN
ဳጀᒻᚑߩႎ๔߇ߡ߈ߚ߫߆ࠅߢࠆޕߒ߆ߒޔߎ ߩᣇᴺߦࠃࠆNဳጀߩ㔚᳇વዉᕈߪૐߊޔ㔚ሶ⒖േᐲ
߽ૐޕߐࠄߦ㔚ሶ࠺ࡃࠗࠬൻࠍ⠨߃ࠇ߫ਇ⚐‛ࡊࡠ ࡈࠔࠗ࡞ߩᓮᕈޔᵈ㗔ၞߩㆬᛯᕈߦఝࠇߚࠗࠝࡦ ᵈߦࠃࠆNဳਇ⚐‛ዉߪᔅ⥋ߢࠆޕߒ߆ߒޔࠗ
ࠝࡦᵈߦࠃࠆNဳጀᒻᚑߪ⇇ฦߦ߅ߌࠆ40ᐕ એߦ߽߱ߐ߹ߑ߹ߥ⹜ߺߦ᜔߽ࠊࠄߕޔᧂߛᚑഞ ߒߡߥޕ
ᧄ⎇ⓥߩ⁛ഃ⊛ߥὐ߮ߘߩ⌕ᗐߦ⥋ߞߚ⚻✲
⸥ߩᄖㇱ⁁ᴫߣߪ⁛┙ߦ⪺⠪ߪ23ᐕߦ߱NTT⎇
ⓥᚲᤨઍߦޔ2.5-MeV Van-de-Graaffဳടㅦེߦࠃࠆ MeV⚖ࠗࠝࡦࡆࡓᾖߣߘࠇࠍ↪ߒߚ‛ᕈታ㛎ޔ ᚗߪዊဳ SOR(Synchrotron Orbital Radiation)శ Ḯ↪વዉ㔚ሶ⫾Ⓧࡦࠣߩ⸳⸘ޔㅧߦ៤ߐࠊߞߚޕ හߜޔ৻⽾ߒߡޔടㅦེ⑼ቇޔߪߘࠇࠍ↪ߒߚ‛
ᕈ‛ℂቇߩಽ㊁ߢࠍߒߡ߈ߚޕ
ߘߩਛߢ߽․ߦVan-de-Graaffടㅦེࠍ↪ߒߚࠗ
ࠝ ࡦࡆ ࡓ⺃ ⚿ ᥏ ᚑ㐳ᴺ(Ion-Beam-Induced Epitaxial Crystallization, IBIEC)ߪޔ⪺⠪ߩઍ⊛
ߥᬺ❣ߢࠆޕIBIECߪ⪺⠪߇SiߦMeV⚖ࠗࠝࡦ ࡆࡓࠍᾖߔࠆߎߣߦࠃࠅޔㅢᏱߩᾲಣℂ᷷ᐲ (550-600°C)ࠃࠅ㆝߆ߦૐ᷷(200-300°C)ߢ㕖᥏⾰ Si ጀ߇ਅߩන⚿᥏ Si ၮ᧼ߦኻߒߡࠛࡇ࠲ࠠࠪࡖ࡞න
⚿᥏ᚑ㐳ߔࠆߎߣࠍߒߚߩ߇ ⇇ᦨೋߢࠆ1, 2㧕ޕ ߘߩᓟޔ⇇ฦߢߎߩ⎇ⓥ߇ᵴ⊒ߦⴕߥࠊࠇߚ3㧙18㧕ޕ ኻ⽎߽SiߛߌߢߪߥߊޔGe, SiGe, BP, Al2O3╬ߐ߹
ߑ߹ߥ᧚ᢱߦᐢ߇ࠅޔߎߩ⽎߇᷹ⷰߐࠇߡࠆޕℂ
⺰⊛ᬌ⸛߽ᵴ⊒ߦⴕߥࠊࠇޔߎߩ⽎ࠍ⺑ߔࠆฦ⒳
ࡕ࠺࡞߇ឭ᩺ߐࠇߚ19㧙21㧕ޕ
ㅢᏱࠗࠝࡦᾖߪᾖ៊்ࠍ⺃ߒޔ⚿᥏ᕈࠍૐਅ ߐߖࠆᣇะߦ↪ߔࠆޕߒ߆ߒޔIBIECߦࠃࠅㅢᏱߩ ᾲಣℂࠃࠅ߽㆝߆ߦૐ᷷ߦ߅ߡޔ㕖᥏⾰ጀ߇ࠛࡇ࠲
ࠠࠪࡖ࡞ᚑ㐳ߒߡޔߒࠈㅒߦ⚿᥏ᕈ߇Ⴧടߔࠆᣇะ ߦ↪ߔࠆޕߎߩࠃ߁ߥ৻ㅒ⺑⊛ߥ⽎߇ߥߗ߈ ࠆߩ߆ޔߐ߹ߑ߹ߥࡕ࠺࡞߇ឭ᩺ߐࠇ⼏⺰ߐࠇߡࠆޕ ၮ᧼න⚿᥏⇇㕙ઃㄭߢ㕖᥏⾰ጀౝㇱߦ⺃ߐࠇࠆࠄ ߆ߩᒻߩᰳ㒱㧔ⓨᩰሶὐ߿ᧂ⚿วᚻ╬㧕߇ૐ᷷⚿᥏ൻ ᚗߪᰳ㒱࿁ᓳߦነਈߒߡࠆߎߣޔ߹ߚ ᾖࠗࠝࡦ ߩ㔚ሶ⊛㕖ᒢᕈᢔੂ߇න⚿᥏ൻࠍჇㅦߔࠆߎߣ߽ಽ ߆ߞߡ߈ߚ 22㧙24㧕ޕߒ߆ߒޔߎߩ⽎ࠍ✚⊛߆ߟቯ
㊂⊛ߦ⺑ߔࠆࡕ࠺࡞ߪᧂߛឭ᩺ߐࠇߡߥޕ
ߎߩ IBIEC ߣ߁㕖ᾲᐔⴧㆊ⒟ࠍ↪ߒߚ⚿᥏ൻ
ߩᣇᴺࠍޔㅢᏱߩᾲᐔⴧㆊ⒟ߢࠆᾲಣℂߢߪోߊ㔚
᳇⊛ߦᵴᕈൻ߇ਇน⢻ߥޔࠗࠝࡦᵈ࠳ࠗࡗࡕࡦ࠼ߩ 㔚᳇⊛ᵴᕈൻߦ↪ߢ߈ߥ߆ߣ⌕ᗐߒߚޕ࠳ࠗࡗࡕ
ࡦ࠼ߦ IBIEC ࠍㆡ↪ߒߚߣ߁ႎ๔ߪޔ⪺⠪╬ߦࠃ
ࠆᬌ⸛એᄖߥޕ
ߎߩIBIECࠍSiߦᔕ↪ߒߚߢߪޔߎߩ㕖ᾲᐔⴧ ㆊ⒟ߣ߁․ᓽࠍᦨᄢ㒢ߦ↢߆ߒߡޔSiߩ࿕ṁ㒢⇇ࠍ
߃ߡ㜞Ớᐲ㧔1021/cm3㧕ߦAsࠗࠝࡦᵈߢ࠼ࡊߐ ࠇߚSiߦኻߒߡ߽ޔߘߩᵈߒߚAsߩ80%એࠍ⟎
឵⟎ߦࠇߡ㔚᳇⊛ߦᵴᕈൻߐߖࠆߎߣߦᚑഞߒߡ
ࠆޕ
೨⸥ߒߚࠃ߁ߦ40 ᐕએߦ߱⇇ਛߩദജߦ߽
᜔ࠊࠄߕޔㅢᏱߩᾲಣℂߦࠃࠆࠗࠝࡦᵈ࠳ࠗࡗࡕࡦ
࠼ߩ N ဳൻߪታ᧪ߡߥޕ໑৻ޔPrince߇㉄
⚛ࠗࠝࡦᵈߦࠃࠅޔNဳࠍᒻᚑߒߚߣߩႎ๔߇ࠆ
߇25,26㧕ޔNဳ࠼ࡄࡦ࠻ߢߪߥ㉄⚛ࠗࠝࡦᵈߢN
ဳ߇ߤ߁ߒߡߢ߈ࠆߩ߆㧔࠳ࡉ࡞࠼࠽ߥߩ߆㧕ߣ߆ޔ ᚗߪ㉄⚛ߘߩ߽ߩߩᕈ⾰ߢߪߥߊޔ㉄⚛ࠗࠝࡦᵈ
ߦࠃࠆᰳ㒱߇⺃ߒߚ N ဳጀߢߪߥ߆ߣ߆⼏⺰ߩ
߇ࠅޔ࠼ࡄࡦ࠻ࠗࠝࡦᵈߦࠃࠆNဳᵴᕈൻ ߣᢿቯߔࠆߦߪ⥋ߞߡߥޕ৻ᣇޔ⪺⠪ߪ⁛┙ⴕ
ᴺੱ ↥ᬺᛛⴚ✚ว⎇ⓥᚲߣหߢPࠗࠝࡦᵈߒߚ 㜞ຠ⾰ࡎࡕࠛࡇ࠲ࠠࠪࡖ࡞࠳ࠗࡗࡕࡦ࠼⭯⤑߇ޔMeV
⚖Neࠗࠝࡦࡆࡓᾖ(IBIEC)ߦࠃࠅNဳߩዉવጀ ࠍᒻᚑߒߡࠆ⏕߆ߥళࠍߟ߆ࠎߢ߅ࠅޔ․⸵㧔․
㗿ᐔ11-345410㧕ࠍ1999ᐕ12ߦឭߒߚޕߐࠄߦޔ ㅢᏱߩᾲಣℂߢߪࠗࠝࡦᵈߒߚ P ේሶ߇ᾲಣℂ᷷
ᐲ߇㜞ߊߥࠆߣޔ⟎឵⟎߆ࠄߪߕࠇᩰሶ㑆⟎ᚗ
ߪࡦ࠳ࡓߥࠨࠗ࠻߳ߞߡߊߩߦኻߒߡޔIBIEC ߢߪㅒߦ⟎឵₸߇ߔࠆߣ߁੍⊛⚿ᨐ߽ᓧߡ
ࠆޕߎߩࠃ߁ߦߎߩಽ㊁ߩ⎇ⓥߪᣣᧄ߇ᦨ㜞᳓Ḱߦ
ࠆޕᓥߞߡޔታ↪ൻߢ߈ࠆน⢻ᕈߪ㕖Ᏹߦ㜞ޕ⇇
⊛ߥIBIECߩ⎇ⓥߩ⋓ࠅ߇ࠅ߇৻Ბ⪭ߒߚ߽ޔ
ᣣᧄߢߪၮ␆⎇ⓥࠍਛᔃߦ⎇ⓥ߇⛮⛯ߐࠇߡࠆޕᣣ ᧄ߇⊒ାߣ߽߃ࠆߎߩ⎇ⓥ⺖㗴ࠍޔᔕ↪߹ߢⷞ㊁ ߦࠇߡᣣᧄߢ⢒ߡߡߊᗧ⟵ߪᄢ߈ޕ
ޔਇ⚐‛ࠍ࠼ࡇࡦࠣߔࠆએ೨ߦ⦟ᅢߥ࠳ࠗࡗ ࡕࡦ࠼⭯⤑ࠍవߕᒻᚑߔࠆၮᧄ⊛ߥ⎇ⓥ߇ⴕࠊࠇߡ
ࠆޕߘߩ㓙ޔലߥᚻᴺߣߒߡ㜞᷷㜞วᚑߢᒻᚑߒ ߚ࠳ࠗࡗࡕࡦ࠼ၮ᧼ߦCVDᴺߢ㜞ຠ⾰ߥ⭯⤑ࠍၸ
Ⓧߐߖࠆᣇᴺ߇ࠆޕߘߩ႐วߢ߽ജߥߩߪࡑࠗࠢ
ࡠᵄࡊ࠭ࡑCVDᴺߢࠆޕߎࠇ߇ലߥᣇᴺߢ
ࠆℂ↱ߪޔࡊ࠭ࡑᒻᚑᤨ㔚㔚ᭂ߇ᔅⷐߥߊޔ⋥ធ ࡑࠗࠢࡠᵄࡄࡢߢ᳓⚛Ꮧ㉼ߐࠇߚࡔ࠲ࡦࠟࠬߩࡊ
࠭ࡑࠍᒻᚑߔࠆߚߢࠆޕහߜޔ㔚ᭂ᧚ᢱߦ࿃ߒ ߚਇ⚐‛ߩ⤑ਛ߳ߩขࠅㄟߺ߇ߥߊޔ⚐☴ߥCVD⭯
⤑߇ᒻᚑߐࠇࠆޕ
᧚ᢱߣᣇᴺ
ࡑࠗࠢࡠᵄࡊ࠭ࡑCVDⵝ⟎ߩ
એߩℂ↱߆ࠄਛ↰⎇ⓥቶߦ߅ߡ߽ࡑࠗࠢࡠᵄࡊ
࠭ࡑCVDⵝ⟎ࠍ⹜ߒޔߘࠇࠍ↪ߒߡ㜞ຠ⾰ߥ࠳
ࠗࡗࡕࡦ࠼⭯⤑ࠍᒻᚑߔࠆߎߣࠍ⹜ߺߚޕ
࿑㧝ߦ⹜ߒߚࡑࠗࠢࡠᵄࡊ࠭ࡑCVDⵝ⟎ࠍ␜ߔޕ
࿑ਛࡑࠣࡀ࠻ࡠࡦࡏ࠶ࠢࠬ߆ࠄߐࠇߚ2.45 GH㨦 ߩᵄᢙߩ㔚⏛ᵄ㧔ࡑࠗࠢࡠᵄ㧕߇ࠬ࠲ࡉ࠴ࡘ࠽
ࠍ㈩ߒߚዉᵄ▤ߩਛࠍㅢㆊߔࠆޕ╴ᒻߩ⍹⧷ࠟࠬ
ਛߦ⟎߆ࠇߚ࠳ࠗࡗࡕࡦ࠼ၮ᧼⹜ᢱߦࡑࠗࠢࡠᵄ߇ᛩ
ߐࠇࠆޕ╴ᒻ⍹⧷▤ਛߦߪޔࡑࠬࡈࡠࡔ࠲ࠍ
ߒߡ᳓⚛ࠟࠬߣࡔ࠲ࡦࠟࠬߩᷙวࠟࠬ߇ଏ⛎ߐࠇࠆޕ
⍹⧷▤ోߪࠬ࠹ࡦࠬߩ⌀ⓨ࠴ࡖࡦࡃߦ⟎߆ࠇ
࠲ࡏಽሶࡐࡦࡊߣࡠ࠲ࡐࡦࡊࠍㅢߒߡ⌀ⓨឃ
᳇ߐࠇࠆޕ╴ᒻ⍹⧷▤ߪ⥄ߩࠦࠗ࡞ߢ࿐߹ࠇߡ߅ ࠅޔࡊ࠭ࡑᒻᚑⓨ㑆ਛߦ⏛႐ࠍ⊒↢ߢ߈ࠆޕᓥ᧪ޔ ࡑࠗࠢࡠᵄࡊ࠭ࡑCVDⵝ⟎ߢ࠳ࠗࡗࡕࡦ࠼⭯⤑ࠍ ၸⓍߐߖࠆ㓙ߪޔ⏛႐ࠍࠊߕ⋥ធࡑࠗࠢࡠᵄࡄࡢ
ߛߌߢࡊ࠭ࡑࠍᒻᚑߒߡߚޕ࿁ޔೋߡߩ⹜ߺ ߣߒߡ⏛႐ࠍᒻᚑߐߖޔߘࠇߦࠃࠆၸⓍㅦᐲะࠍ
⁓ߞߡⵝ⟎ࠍ⚵ߺߍߚޕᦝߦޔၮ᧼⹜ᢱࠍ⁛┙ߦࡅ
࠲ߢ1000͠⒟ᐲߦടᾲߢ߈ࠆ᭴ㅧߦߒߚޕㅢᏱߪࡑࠗ
ࠢࡠᵄࡄࡢߩߺߢടᾲߒߡࠆⵝ⟎߇ᱴߤߢߞߚޕ ߎߩࠃ߁ߦฦ⒳ߩᎿᄦࠍߒߡ㧞ᐕ߇߆ࠅߢߎߩⵝ⟎ࠍ ߊߺߍߚ߇ޔᄙߊߩㇱຠߪℂᵴ↪ߒߡߒߚޕ
࠳ࠗࡗࡕࡦ࠼⭯⤑ᒻᚑ᧦ઙ
1ߦᤓᐕߣᐕߩታ㛎ߦ߅ߌࠆ࠳ࠗࡗࡕࡦ࠼⭯⤑ᒻ ᚑ᧦ઙߩᲧセࠍ␜ߔޕ
ߎߩ߆ࠄࠄ߆ߥࠃ߁ߦᤓᐕᐲߣᐕᐲߣߢࡑࠗ
ࠢࡠᵄࡄࡢߣ᳓⚛ᵹ㊂ߩ୯߇ᄢߦ⇣ߥߞߡࠆޕ
᳓⚛ࠟࠬߣࡔ࠲ࡦࠟࠬߣߩᷙวࠟࠬജߪ 25 Torr (⚂3.3 kPa)ߣᄌᦝߪߥ߇ޔ᳓⚛ᵹ㊂ࠍ㧞ߦߒߚߚ
ߦࡔ࠲ࡦỚᐲ㧔ࡔ࠲ࡦࠟࠬᵹ㊂ߣ᳓⚛ࠟࠬᵹ㊂ߣߩ Ყ㧕ߪᤓᐕߩ0.1%߆ࠄᐕᐲߩ0.05%߳ߣඨಽߦߥߞ ߡࠆޕࡔ࠲ࡦỚᐲࠍᷫዋߐߖࠆߣၸⓍㅦᐲ㧔⭯⤑ᚑ 㐳ㅦᐲ㧕ߪඨಽߦߥࠆޕᓥߞߡޔᤓᐕᐲߣห৻ߩ⤑ෘ
ߦߔࠆߚߦߪᚑ⤑ᤨ㑆ࠍ2ߦߒߥߌࠇ߫ߥࠄߥ
ߪߕߢࠆ߇ޔታ㓙ߦߪࡑࠗࠢࡠᵄࡄࡢࠍ2ߦߒ ߚߚߦ⍹⧷▤ߩ᷷ᐲ߇ᄢ߈ߊޔ⌀ⓨࠍߟߚ
ߩࡃࠗ࠻ࡦߩOࡦࠣ߇ṁߌߡߒ߹ޔ⌀ⓨࠍ㐳ߊ
ߟߎߣ߇࿎㔍ߦߥߞߚޕߘߩߚޔᚑ⤑ᤨ㑆ߪߎߩታ 㛎ߦ߅ߡߪ10 ᤨ㑆ࠍ㒢⇇ߣߒߚޕߒ߆ߒޔ⍹⧷▤
ߩ಄ළᯏ᭴ࠍᎿᄦߒޔOࡦࠣઃㄭߩḴߩ಄ළ߽ⴕߞ ߚ⚿ᨐޔߢߪᢙ10ᤨ㑆ߩᚑ⤑ߦ߽⠴߃ࠄࠇࠆޕ
⚿ᨐ
࠳ࠗࡗࡕࡦ࠼⭯⤑ߩฦ⒳ಽᨆ⚿ᨐ:
AFMߦࠃࠆಽᨆ
CVD ⵝ ⟎ߦ ࠃ ࠅ ၸ Ⓧ ߒ ߚ ࠳ ࠗ ࡗ ࡕ ࡦ ࠼⭯ ⤑ࠍ AFM(Atomic Force Microprobe)ߦࠃࠅ⹏ଔߒߚ⚿ᨐ ࠍᰴߦ␜ߔޕAFM ߪ㕙ߩಳಲࠍ㜞ᗵᐲߦᬌߔࠆ ⵝ⟎ߢࠆޕ
࿑2ߦ⹏ଔߒߚ㕙ߩಳಲࠍ␜ߔޕᩏߒߚ▸࿐ߪ 20 µm20 µmߩᐢ㗔ၞߢࠆޕ
࿑2Aߪ㜞᷷㜞วᚑၮ᧼ߢ⭯⤑ၸⓍ೨ߩ㕙⁁ᘒ ࠍࠊߒߡࠆޕᭂߡṖࠄ߆ߥ㕙ߢࠆߎߣ߇
ࠄ߆ߢࠆޕ࿑2BߣDߪ⭯⤑ၸⓍᓟߩ႐ᚲࠍᄌ߃ߡ
࿑㧝. ⹜ߒߚࡑࠗࠢࡠᵄࡊ࠭ࡑCVDⵝ⟎.
㧝㧚ᐕߣᐕߩታ㛎୯Ყセ
ᐕ ᐕ ᚑ⤑ᤨ㑆 30ᤨ㑆 10ᤨ㑆 ࡔ࠲ࡦỚᐲ 0.1 % 0.05 %
᳓⚛ᵹ㊂ 200 sccm 400 sccm
ࡔ࠲ࡦᵹ㊂ 0.2 sccm 0.2 sccm ࡑࠗࠢࡠᵄ㔚ജ 500 W 750 W
ജ 25 Torr (⚂3.3 kPa) ၮ᧼᷷ᐲ ⚂800 ͠
᷹ቯߒߚ㕙⁁ᘒߢࠆޕ࿑2Bߦ߅ߡߪ㍈⓭
߇ᐞߟ߆᷹ⷰߐࠇߡࠆޕ࿑2DߪᲧセ⊛Ṗࠄ߆ߥ㗔
ၞࠍ᷹ⷰߒߡࠆߢࠆޕࡌࠬߦߥࠆㇱಽߦ߆ߥ ࠅᐢ߁ߨࠅ㧔ᢙ10 µmߩ▸࿐ߢࠦࡦࡑᢙǴ㨙ߩ㜞ߐ ߩફ߇߃ࠆ㧕߇᷹ⷰߐࠇߡࠆ߇ޔ⓭ߪᭂߡ వ㍈ߦᚑ㐳ߒߡࠆޕ࿑2Cߦߪᤓᐕᐲߩ᧦ઙߢၸⓍ
ߒߚߣ߈ߩ㕙⁁ᘒࠍ␜ߔޕᤓᐕᐲߩ᧦ઙߣߪ㧝Ꮐ ߦ␜ߒߚ᧦ઙߢࠆޕ
㕖Ᏹߦࠄ߆ߥࠃ߁ߦᤓᐕᐲߦ߅ߡߪ⤑߇ᚑ㐳ߒߡ
ࠆߣ߁ᒻ〔ߪߥߊޔፉ⁁ߦߚߊߐࠎߩ⓭‛߇ᚑ 㐳ߒߡࠆߣ߁ࠗࡔࠫߩᣇ߇ᒝޕᤓᐕߣ࿁ߩ ၸⓍ᧦ઙߩਛߢᄢ߈ߊ⇣ߥࠆߩߪࡑࠗࠢࡠᵄࡄࡢߢ
ࠆޕᤓᐕ500 Wߢߞߚ߇࿁ߪ750 Wߦߐ ߖߚޕߎࠇߦࠃࠅࡊ࠭ࡑኒᐲ߇ߒߚߎߣߪ㑆㆑
ߥޕࡔ࠲ࡦࠟࠬߣ᳓⚛ࠟࠬߩᵹ㊂Ყߪ೨࿁߇0.1%
ߥߩߦኻߒߡ࿁ߪ0.05%ߢࠆޕߎߩ2ߩᏅߪ
㕙ߩᒻ⁁ߦᄢ߈ߥᓇ㗀ߪਈ߃ߥߣᕁࠊࠇࠆޕߎߩᵹ
㊂Ყߪߒࠈᚑ㐳ㅦᐲߦᄢ߈ߊᓇ㗀ߒߡߊࠆ࿃ሶߛ߆ ࠄߢࠆޕߕࠇߦߒࠈᤓᐕᐲߣߪᩰᲑߦ㕙⁁ᘒߩ ఝࠇߚ࠳ࠗࡗࡕࡦ࠼⭯⤑߇ᚑ㐳ߢ߈ߚޕ
࿑3ߦ࿑2ࠃࠅ߽ᦝߦ⁜▸࿐ߢࠆ2 µm2 µm ߩ㗔ၞߦߟߡ᷹ⷰߒߚAFMࠍ␜ߔޕ࿑2Aߪၸ
Ⓧ೨ߩၮ᧼ޔ࿑2Bߪ࿁ߩ᧦ઙߢၸⓍߒߚ⭯⤑ߩ
ߢࠆޕߎߩ⁜▸࿐ߦߥࠆߣ߶߷ၮ᧼ߣห᭽ߥᭂ
ߡᐔမᕈߩఝࠇߚ⭯⤑߇ᚑ㐳ߒߡࠆߎߣ߇ࠄ߆ߢ
ࠆޕએߦࠃࠅ㕙ᒻ⁁ߛߌߦᵈ⋡ߔࠇ߫ޔᤓᐕࠃ ࠅ߽ᭂߡ⦟ᅢߥ⤑߇ᚑ㐳ߒߡࠆߎߣ߇⏕ߢ߈ߚޕ ߒ߆ߒޔߎߩಽᨆ⹏ଔߛߌߢߪ✚ว⊛ߦߣ߽⸒߃ߥ
ߩߢޔᦝߦઁߩಽᨆᣇᴺߢCVD࠳ࠗࡗࡕࡦ࠼⭯⤑
ߩ⹏ଔࠍⴕ߁ߎߣߦߒߚޕ
࿑2. 20 µm20 µmߩᐢ㗔ၞߦ߅ߡᩏߒߚฦ⒳⹜ᢱߩAFM. A. Ibဳ࠳ࠗࡗࡕࡦ࠼ၮ᧼(ᚑ㐳ήߒ).
B. 10ᤨ㑆ᚑ㐳(⇣Ᏹߥಳಲ߇⏕ߢ߈ߚㇱಽ). C. 30ᤨ㑆(ᐕ). D. 10ᤨ㑆ᚑ㐳(Ყセ⊛ᐔမߥㇱಽ).
A
600nm
400nm
B
250nm
C
250nm
D
䊤䊙䊮ಽశ᷹ቯ⚿ᨐ
㪇 㪈㪇㪇㪇 㪉㪇㪇㪇 㪊㪇㪇㪇 㪋㪇㪇㪇
㪇 㪌㪇㪇 㪈㪇㪇㪇 㪈㪌㪇㪇 㪉㪇㪇㪇 㪉㪌㪇㪇
䉦䉟䉱䊷䋨䋱㪆ᵄ㐳㪲㪺㫄㪴䋩
శ㊂ 㸇䌢ဳၮ᧼
䋱䋰ᤨ㑆䋨ᐕ䋩 䋳䋰ᤨ㑆䋨ᐕ䋩
㪇 㪈㪇㪇㪇 㪉㪇㪇㪇 㪊㪇㪇㪇 㪋㪇㪇㪇
㪈㪊㪇㪇 㪈㪊㪊㪊 㪈㪊㪍㪍
࿑4. ࡑࡦࠬࡍࠢ࠻࡞ߩ᷹ቯ⚿ᨐ߅ࠃ߮ᄢ࿑. 250nm
200nm 200nm
࿑3. 20 µm20 µmߩ⁜㗔ၞߦ߅ߡᩏߒߚAFM. A. Ibဳ࠳ࠗࡗࡕࡦ࠼ၮ᧼(ᚑ㐳ήߒ). B. 10ᤨ 㑆ᚑ㐳.
A B
ࡑࡦಽశᴺߦࠃࠆಽᨆ
࠳ࠗࡗࡕࡦ࠼ߩ⚿᥏ᕈࠍ⹏ଔߔࠆߢ㕖Ᏹߦ◲ଢߦ᷹
ቯߔࠆᣇᴺߩ৻ߟ߇ࡑࡦᢔੂಽశߢࠆޕߎߩ⹏ଔ ᣇᴺߩේℂߦߟߡ⚦ߦߪㅀߴߥ߇ޔ1333/cmߩ
⟎ߦ㍈ࡇࠢ߇᷹ⷰߐࠇࠆޕߎࠇߦࠃߞߡ࠳ࠗࡗ ࡕࡦ࠼ߩන⚿᥏߇ᒻᚑߐࠇߡࠆ߆ߤ߁߆ࠍ್ᢿߢ߈ ࠆޕਛ↰⎇ⓥቶߢߪᐕᐲ◲ଢߥࡑࡦᢔੂಽశⵝ⟎
ࠍዉߒߚޕಽ⸃⢻ߪ10/cm⒟ᐲߢࠆ߇ޔᭂߡ◲
ଢߥขࠅᛒᣇߢࡑࡦࠬࡍࠢ࠻࡞߇᷹ⷰߢ߈ࠆޕ
࿑4ߦ᷹ቯߒߚࡑࡦࠬࡍࠢ࠻࡞ࠍ␜ߔޕ࿑4ߩ
ߩࠬࡍࠢ࠻࡞ߪࡑࡦࠪࡈ࠻ߩᵄᢙ 2500/cm ߹ߢߩ
▸࿐ߢ᷹ቯߒߚᤓᐕߩ⹜ᢱߣ࿁ߩ⹜ᢱޔᦝߦࡈࠔ
ࡦࠬߣߒߡ Ib ࠲ࠗࡊߩ㜞᷷㜞วᚑၮ᧼ߩࠬࡍࠢ
࠻࡞ࠍ␜ߔޕߎߩࠬࡍࠢ࠻࡞߆ࠄࠄ߆ߥࠃ߁ߦޔIb ၮ᧼⹜ᢱߣ࿁ߩ⹜ᢱߢߪ࠳ࠗࡗࡕࡦ࠼න⚿᥏․ߩ
1333/cmߩ⟎ߦ㍈ࡇࠢ߇᷹ⷰߢ߈ߚޕߎࠇߦࠃ
ࠅၮ᧼ߣห⒟ᐲએߦ⚿᥏ᕈߩࠃ࠳ࠗࡗࡕࡦ࠼⭯⤑
߇ᒻᚑߐࠇߡࠆน⢻ᕈ߇ࠆߎߣ߇ಽ߆ߞߚޕ৻ᣇޔ ᤓᐕᐲߩ᧦ઙߢᒻᚑߒߚ⭯⤑ߪࡇࠢᒝᐲ߇ᒙߊޔߒ ߆߽ޔᄢ߈ߥࡃ࠶ࠢࠣ࠙ࡦ࠼ߩߦሽߔࠆޕߎ߁ ߒߡ⚿᥏ᕈߦߟߡߪᤓᐕᐲߩ⹜ᢱߪ㕖Ᏹߦᖡ߇ޔ
࿁ߪ⦟ᅢߥ⤑߇ᒻᚑߐࠇߡࠆޕਅߩࠬࡍࠢ࠻࡞ߪ
1333/cmߩ⟎ߩ㍈ࡇࠢࠍᄢߒߚࠬࡍࠢ࠻࡞ߢ
ࠆޕၮ᧼ࠃࠅ߽ࠄ߆ߦඨ୯߇ዊߐࠬࡍࠢ࠻࡞
߇ᓧࠄࠇߡ߅ࠅޔၮ᧼એߩ⦟ᅢߥ⚿᥏ᕈ߇ߚࠇߡ
ࠆߎߣࠍᒝߊ␜ໂߒߡࠆޕએߩ⚿ᨐ߆ࠄ⚿᥏ᕈ ߦఝࠇޔ㕙߽Ყセ⊛ᐔမߢࠆ࠳ࠗࡗࡕࡦ࠼⭯⤑߇ ᒻᚑߢ߈ߚߣᕁࠊࠇࠆ߇ޔߐࠄߦ⤑ਛߦሽߔࠆਇ⚐
‛ߩಽᏓࠍSIMSಽᨆߣ߁ᚻᴺࠍߞߡ⋥ធ⹏ଔߒ ߚޕߎߩᣇᴺߪ Cs ߩ㧝ᰴࠗࠝࡦࡆࡓࠍ⹜ᢱ㕙ߦ ᾖߒߡ㕙ࠍࠬࡄ࠶࠲ࡦࠣߒߥ߇ࠄⓣࠍជࠅޔߘ ߩᤨߡߊࠆฦ⒳㧞ᰴࠗࠝࡦࡆࡓᒝᐲࠍ⾰㊂ಽᨆߔ ࠆߎߣߦࠃࠅޔᓸ㊂ߥਇ⚐‛ಽᏓࠍ᷹ቯߔࠆᚻᴺߢ
ࠆޕ
SIMSߦࠃࠆಽᨆ
࿑5Aߪ8 keV Csࠗࠝࡦࠍ㧝ᰴࡆࡓߣߒߡޔ45q ߩⷺᐲ߆ࠄ⹜ᢱߦᾖߒߡࠬࡄ࠶࠲ࡦࠣߒߥ߇ࠄ
ߡߊࠆ㧞ᰴࠗࠝࡦࠍ⾰㊂ಽᨆߒߚࠬࡍࠢ࠻࡞ߢࠆޕ
࠳ࠗࡗࡕࡦ࠼⭯⤑ਛߦߪฦ⒳ਇ⚐‛߇ᷙߐࠇߡࠆ ߣᕁࠊࠇࠆ߇ޔ․ߦNਇ⚐‛ߦᵈ⋡ߒߡࠆޕߣ߁ ߩߪ࠳ࠗࡗࡕࡦ࠼CVD⤑ߦߪⓨ᳇ਛߩ⓸⚛ߦ࿃ߔ ࠆਇ⚐‛ᷙ߇㕖Ᏹߦ߈߿ߔߎߣ߇⍮ࠄࠇߡࠆ ߆ࠄߢࠆޕ
ታ㓙ޔ㜞᷷㜞วᚑၮ᧼ߦ߅ߡߪⓨ᳇ਛߩ⓸⚛ߦ
࿃ߔࠆ⓸⚛ਇ⚐‛߇100-200 ppm⒟ᐲߐࠇߡ
ࠆޕⓨ᳇ਛߩ㉄⚛ߪ߹ࠅขࠅㄟ߹ࠇߡߥࠃ߁ ߢࠆ߇ޔCVD ⭯⤑ߦ߅ߡ߽ߎߩ⓸⚛ਇ⚐‛߇ߤ ߩ⒟ᐲ߹ࠇߡࠆ߆ߪ㕖Ᏹߦ⥝ࠆߣߎࠈߢࠅޔ
․ߦߎߩర⚛ߦᵈ⋡ߒߡߺࠆޕ
࿑5Aߪฦ⒳⾰㊂ᢙࠍᜬߞߚᄙේሶಽሶߩ㧞ᰴࠗࠝ
ࡦᒝᐲಽᏓߢࠆޕᮮゲߪᷓߐߢࠆޕߎߎߢ⓸⚛ේ
ሶߩਇ⚐‛ಽᏓࠍ᷹ቯߔࠆ႐วޔ14ߣ߁⾰㊂ᢙߩේ
ሶࠍߘߩ߹߹᷹ቯߔࠆߣޕࡃ࠶ࠢࠣ࠙ࡦ࠼ߣߒߡᄙ ߊሽߔࠆߢࠈ߁ CH㧞ᄙේሶಽሶߣ߇ߟ߆ߥ
ޕߘߎߢޔ13C14Nߣ߁⾰㊂ᢙ27ߩᄙේሶಽሶߦ ᵈ⋡ߔࠆޕߎߩಽሶߪ13Cߣ߁ㅢᏱߩ12Cߣߪ⥄ὼ
⇇ሽᲧߢ1%ߣ߁ᓸ㊂ర⚛ߢࠆCߣNߩᄙේሶ ಽሶߢࠆޕߎࠇߪࡃ࠶ࠢࠣ࠙࠙ࡦ࠼ߣߒߡ⾰㊂ᢙ 14ߢࠆ12CH2ࠃࠅ㆝߆ߦዋߥߢࠈ߁߆ࠄޔߎߩ ಽᏓ߇⓸⚛ේሶߩಽᏓߦᲧߒߡࠆߣ⠨߃ࠄࠇࠆޕ ߐࠄߦޔ⾰㊂ᢙ26ߢࠆ12C14Nᄙේሶಽሶߣޔ߽ߒ 㧞ᰴࠗࠝࡦᒝᐲᲧߢ100:1ߣߥߞߡࠇ߫ޔ⏕ታߦ
⸥ᄙේሶಽሶߩ⋧ኻ⊛ಽᏓߪ N ේሶߩಽᏓࠍᔘታߦ
ߒߡࠆߎߣߦߥࠆޕߘߩࠃ߁ߥⷰὐߦ┙ߞߡ࿑
5A ࠍ⌑ࠆߣ⏕߆ߦਔಽᏓߪߜࠂ߁ߤ100:1 ߩഀว ߦߥߞߡ߅ࠅޔNේሶಽᏓࠍౣߒߚ߽ߩߢࠆߎߣ ߇⏕ାߢ߈ࠆޕߎߩ࿑ߢߪࠄ߆ߢߥ߇ޔ⾰㊂ ᢙ26ߣ27ߩಽᏓߦ߅ߡ0.6 µmઃㄭࠍᄢߒߚ߽
ߩ߇ޔ࿑5BޔCߢࠆޕ
࿑5Bߪ⾰㊂ᢙ26ߩ12C14NᄙේሶಽᏓߢࠅޔ࿑
5Cߪ⾰㊂ᢙ27ߩ13C14NᄙේሶಽሶಽᏓߢࠆޕߣ
߽ߦޔ0.6 µmઃㄭߩỚᐲߦᲑᏅ߇ࠄࠇࠆ㨫ߎߩ0.6 µm ߣ߁ᷓߐ߇CVD ࠳ࠗࡗࡕࡦ࠼⭯⤑ߣၮ᧼ߣߩ
⇇㕙ߢࠆޕߥࠄޔၮ᧼ߦ߅ߡߪ⓸⚛߇㜞Ớᐲ ߦ߹ࠇߡ߅ࠅ,⭯⤑ߦߪ⓸⚛Ớᐲ߇ߘࠇࠃࠅዋߥ
ߎߣ߇ᦼᓙߐࠇࠆ߆ࠄߢࠆޕ
ߒ߆ߒޔ࿑ 5BޔC ߦ߅ߡࠄ߆ߥࠃ߁ߦޔၮ᧼
ߣ⤑ߩ⓸⚛ỚᐲᏅߪ߹ࠅ㗼⪺ߢߪߥࠃ߁ߦᕁࠊࠇ ࠆޕ߽ߒޔ⤑ਛ⓸⚛Ớᐲ߇1 ppmએਅߢࠇ߫ޔዋߥ ߊߣ߽ၮ᧼ߦ100 ppm⒟ᐲߐࠇߡࠆߩࠇ߫ޔ
⇇㕙ߦ߅ߡ㧞ᩴ⒟ᐲ㧞ᰴࠗࠝࡦᒝᐲߦᲑᏅ߇ߞߡ ߒ߆ࠆߴ߈ߣᕁࠊࠇࠆޕߣߎࠈ߇ޔ࿑㧡BޔC ߦ␜ߔ ࠃ߁ߦߘࠎߥߦ㧞ᰴࠗࠝࡦᒝᐲߦᏅߪߥޕߎߩේ࿃
ߪታߪޔᏎߊਛߦᄙ㊂ߩ⓸⚛ਇ⚐‛߇߹ࠇߡࠆߣ
߁ߎߣߢߪߥߊ,ߒࠈޔSIMSߩ᷹ቯߩ㗴ߢ
ࠆߎߣࠍޔᓟߦ⼏⺰ߔࠆޕߕࠇߦߒࠈޔߎߎߢࠄ ߆ߦߥߞߚߎߣߪCVD⭯⤑ߪෘߐ߇0.6 µm⒟ᐲࠅޔ ၮ᧼ਛࠃࠅ⓸⚛ਇ⚐‛Ớᐲߪૐᷫߒߡࠆߣ߁ߎߣ ߢࠆޕᰴߦᦨᓟߩಽᨆ᷹ቯߣߒߡ Hall ലᨐ᷹ቯ⚿
ᨐࠍ␜ߔޕ
Hallലᨐ᷹ቯߦࠃࠆಽᨆ
Hall ലᨐ᷹ቯⵝ⟎ߪ⹜ᢱߩ㔚᳇⊛․ᕈࠍ᷹ቯߔࠆⵝ
⟎ߢޔ⏛႐ਛߢ⹜ᢱߦ㔚ᵹࠍᵹߔߎߣߦࠃࠅޔࡠ
ࡦ࠷ജߢ㔚ᵹ߇⹜ᢱਛߢࠅޔߘߩߣ߈ബߐࠇࠆ㔚
ߩ╓ภߢ⹜ᢱਛࠍᵹࠇࠆ㔚ᵹߩᜂᚻ߇㔚ሶߢࠆ ߆ᱜሹߢࠆ߆ࠍ್ቯߔࠆ᷹ቯᴺߢࠆޕහߜޔඨዉ
ߢࠇ߫⹜ᢱߩዉ㔚࠲ࠗࡊ߇Pဳߢࠆ߆ޔNဳߢ
ࠆ߆ࠍ್ቯߔࠆޕߘߩઁߦ߽ࠪ࠻ᛶ᛫ߩ୯ޔࠪ
࠻ࠠࡖࠕỚᐲޔ⒖േᐲ╬߇᷹ቯߢ߈ࠆޕ
࿑6Aߪࠪ࠻ᛶ᛫ߩ⛘ኻ᷷ᐲߩㅒᢙଐሽᕈࠍ␜ߔ
ࠣࡈߢࠆޕ⿒ਃⷺශ߇࿁ߒߚCVD⹜ᢱ ߩ⚿ᨐߢࠅޔ✛ߩਃⷺශ߇↥✚⎇ߢએ೨ߒߚ CVD ⹜ᢱߩ↥✚⎇ߢߩ᷹ቯ⚿ᨐߢࠆޕ߹ߚޔ㕍⦡
ߩ྾ⷺශߪ↥✚⎇ߢ᷹ቯߒߚ Ib ၮ᧼⹜ᢱߩ᷹ቯ⚿ᨐ ߢࠆޕߎߩ࿑߆ࠄࠄ߆ߥࠃ߁ߦޔ࿁ߒߚ⹜
ᢱߢߪ300͠ઃㄭࠍႺߦ߈߇ᄢ߈᷷ᐲ㗔ၞߣޔዊ
ߐ㗔ၞߣߦಽࠇߡࠆߎߣ߇ಽ߆ࠆޕ߹ߚޔ500͠
ઃㄭߢ᷹ቯ୯߇⇣Ᏹߥ୯ࠍ␜ߒߡࠆὐ߇ࠆ߇ޔߎ ߩ․⇣ὐߪᓟߦ␜ߔࠪ࠻ࠠࡖࠕỚᐲߩ᷷ᐲଐሽᕈ ߦ߅ߡ߽ޔ⒖േᐲߩ᷷ᐲଐሽᕈߦ߅ߡ߽᷹ⷰߐࠇ ߡࠆߩߢޔࠄ߆ߩ᷹ቯߩ㗴߇ߎߞߚߣ⠨߃ ߡࠆޕ
300͠ઃㄭ߆ࠄߤߩ⹜ᢱߦ߅ߡ߽ࠄࠇࠆ㜞᷷㗔
ၞߢ߈߇ᄢ߈ᵴᕈൻࠛࡀ࡞ࠡߩ୯ߪ1.4-1.7 eV ߢࠆޕߎࠇߪ࿁ᚒޘ߇ߒߚCVD⹜ᢱߦߟ
ߡߪޔߘߩਛߦ߹ࠇߡࠆ߆߽ߒࠇߥᓸ㊂ߩ⓸⚛
㧔߅ߘࠄߊ1 ppmએਅ㧕߇ᵴᕈൻߒߚߎߣߦࠃࠅ↢ᚑ ߐࠇߚࠠࡖࠕ㧔㔚ሶ㧕ߦၮߠߚࠛࡀ࡞ࠡࠍ␜ߒ ߡࠆߣᕁࠊࠇࠆޕߒ߆ߒޔSIMSಽᨆߩ㗄ߢ߽ㅀߴ ߚࠃ߁ߦޔ⤑ෘ߇0.6 µmߣ⭯ߚޔၮ᧼ߢᵴᕈൻ ߒߚ⓸⚛ࠠࡖࠕ߇⭯⤑߹ߢ࿁ߞߡࠠࡖࠕࠍଏ⛎ߒ ߚน⢻ᕈࠍุቯߒ߈ࠇࠆ߽ߩߢߪߥޕߎߩ㜞᷷㗔ၞ
࿑5. A.10ᤨ㑆ᚑ㐳⤑ߩSIMSಽᨆ⚿ᨐ. B. 12㧯14㧺ࠬࡍࠢ࠻࡞(A࿑Ԙ)ߩᄢ࿑. C. 13C14Nࠬࡍ
ࠢ࠻࡞(B࿑ԙ)ߩᄢ࿑. 㪈㪜㪂㪉
㪈㪜㪂㪊 㪈㪜㪂㪋 㪈㪜㪂㪌 㪈㪜㪂㪍 㪈㪜㪂㪎
㪇 㪇㪅㪍 㪈㪅㪉 㪈㪅㪏 㪉㪅㪋
ᷓ䈘㪲㫄㫄㪴
ੑᰴ䉟䉥䊮ᒝᐲ㪲㪺㫋㫊㪆㫊㪴䇭䇭䇭䇭㪅
㪈㪟 㪈㪊㪚 㪈㪍㪦 㪈㪐㪝 㪉㪏㪪㫀 㪉㪐㪪㫀
㪊㪈㪧 㪊㪌㪚㫃 㪉㪍㩿㪚㪥㪀 㪉㪎㩿㪈㪊㪚㪥㪀 㪊㪎㩿㪚㪊㪀
ԙ Ԙ
㪈㪜㪂㪍 㪉㪜㪂㪍
㪇 㪇㪅㪍 㪈㪅㪉 㪈㪅㪏
㪊㪜㪂㪋 㪊㪜㪂㪋
㪇 㪇㪅㪍 㪈㪅㪉 㪈㪅㪏
26(12㧯14㧺)(⓸⚛)
27(13㧯14㧺)(⓸⚛)
A
B C
ੑᰴࠗࠝࡦᒝᐲ=EVUU?ੑᰴࠗࠝࡦᒝᐲ=EVUU?
ᷓߐ=OO? ᷓߐ=OO?
ᷓߐ=OO?
ߦ߅ߡߪߔߴߡߩ⹜ᢱߢNဳࠍ␜ߒߚޕ߹ߚޔߎߩ
⹜ᢱߦߟߡߩૐ᷷ߢߩૐᵴᕈൻࠛࡀ࡞ࠡߪ 0.2-0.3 eVߢߞߚޕߘߒߡޔߎߩૐ᷷㗔ၞߢߪNဳޔ P ဳߩ್ߪߢ߈ߥ߆ߞߚޕ↥✚⎇ߢᒻᚑߒߚ CVD
⭯⤑ߦߟߡߩ᷹ቯ࠺࠲ߢߪ㜞᷷㗔ၞ߆ࠄૐ᷷㗔ၞ
ߦ⥋ࠆ߹ߢ߶߷ 1.4 eV ߩᵴᕈൻࠛࡀ࡞ࠡࠍ␜ߒߡ ߅ࠅޔߎߩ୯ߪIbၮ᧼ߩߘࠇߣ߶߷หߓߢࠆޕߎߩ ߎߣߪ↥✚⎇߇ᒰᤨ㧔1998ᐕ㗃㧕ၸⓍߒߚ⤑ਛߦߪ߆ ߥࠅᄙ㊂ߩ⓸⚛ర⚛߇ਇ⚐‛ߣߒߡ߹ࠇߡߚ㧔ᕟ ࠄߊ100 ppm⒟ᐲ㧕ࠍᒝߊ␜ໂߒߡࠆޕ࿁ᚒޘ
߇ᒻᚑߒߚ⤑ਛߦߪዋߥߊߣ߽ߘࠇࠃࠅߪ㆝߆ߦዋߥ
⓸⚛ਇ⚐‛ߒ߆߹ࠇߡߥߎߣࠍ⏕ߦ␜ߒߡ
ࠆޕ
࿑6Bߦߪࠪ࠻ࠠࡖࠕỚᐲߩ᷷ᐲଐሽᕈࠍ␜ߔޕ
᷷ᐲ߇㜞ߊߥࠆߦߟࠇޔࠪ࠻ࠠࡖࠕỚᐲߪ㜞ߊ ߥߞߡࠆޕૉߒޔࠪ࠻ᛶ᛫ߩࠣࡈߣหߓࠃ߁ߦ 500͠ઃㄭߢ᷹ቯὐ߇⇣Ᏹߥ୯ࠍ␜ߒߡࠆߎߣ߇ࠊ ߆ࠅޔ᷹ቯߩ㗴ߛߣᕁࠊࠇࠆޕ
࿑㧢C ߦࡎ࡞⒖േᐲߩ᷷ᐲଐሽᕈࠍ␜ߔޕ500͠ ߩὐߦ߅ߡ⇣Ᏹߥ୯ࠍ␜ߒߡࠆߩߪઁߩ㧞ߟߩࠣ
ࡈߣหߓߢࠅޔ᷹ቯࠄ߆ߩ㗴߇⊒↢ߒߚߣ ᕁࠊࠇࠆޕ
ߎߩࠣࡈ߆ࠄࠄ߆ߥߎߣߪ↥✚⎇ߢߩCVD⤑ ߩ⒖േᐲߩ୯ࠃࠅ߽1ᩴㄭߊ㜞୯ࠍ␜ߒߡࠆߣ
߁ߎߣߢࠆޕߎࠇߦࠃࠅޔ⚿᥏ᕈ߇⦟ᅢߢਇ⚐‛߇ ዋߥߊޔᓥߞߡਇ⚐‛߿ᰳ㒱ߦ࿃ߔࠆࠠࡖࠕߩᢔ
ੂ࿃ሶ߇ዋߥߊޔ㜞⒖േᐲࠍ⏕ߒߡࠆߣ߁ߎ ߣ߆ࠄޔ⦟ᅢߥ⤑⾰ߩCVD⤑߇ᒻᚑߐࠇߡࠆߣ੍
᷹ߐࠇࠆޕ
એߩޔAFMޔࡑࡦᢔੂޔSIMSಽᨆޔࡎ࡞ല ᨐ᷹ቯߩ⚿ᨐࠍ〯߹߃ޔ߆ߦ࿁ၸⓍߒߚCVD࠳
ࠗࡗࡕࡦ࠼⭯⤑ߩᕈ⾰ࠍ⼏⺰ߔࠆޕ
⸛⺰
ࠞࡏࡦ࠽ࡁ࠴ࡘࡉᒻᚑߩᬌ⸛
వߕޔAFMߩ⚿ᨐ߆ࠄዉ߆ࠇࠆၮ᧼ࠍߚCVD⭯
⤑ߩ᭴ㅧߪએਅߩࠃ߁ߦߥߞߡࠆߣ⠨߃ࠄࠇࠆޕ ᢙ10 µm ߢ㜞ߐ߇ࠦࡦࡑᢙµm⒟ᐲߩ߁ߨࠅࠍ ᜬߞߚၮ᧼ߦߘࠇߣᐔⴕߒߡ⤑ෘ 0.6 µm ⒟ᐲߩ CVD ⤑߇ᒻᚑߐࠇߡࠆޕߘߩ⤑ߦᚲޘಾࠅ┙ߞ ߚ⓭߇᷹ⷰߐࠇࠆޕߎߩ⓭ߦߟߡߪᕟࠄߊࠞ
ࡏࡦ࠽ࡁ࠴ࡘࡉ߇ᒻᚑߐࠇߚ߽ߩߣ⠨߃ߡࠆ߇ޔ
⚦ߪᓟߦ⼏⺰ߔࠆޕ
ᢙ10 µmߢ㜞ߐ߇ࠦࡦࡑᢙµm⒟ᐲߩ߁ߨࠅࠍ
࿑7. ၸⓍߒߚ࠳ࠗࡗࡕࡦ࠼⭯⤑ߩ᭴ㅧ.
⭯⤑
ၮ᧼
0.6 µm
ᢙ µmߩ߁ߨࠅ
ࠞࡏࡦ࠽ࡁ࠴ࡘࡉ
䉲䊷䊃䉨䊞䊥䉝Ớᐲ䈱᷷ᐲଐሽᕈ
㪈㪅㪇㪜㪂㪇㪊 㪈㪅㪇㪜㪂㪇㪋 㪈㪅㪇㪜㪂㪇㪌 㪈㪅㪇㪜㪂㪇㪍 㪈㪅㪇㪜㪂㪇㪎 㪈㪅㪇㪜㪂㪇㪏 㪈㪅㪇㪜㪂㪇㪐 㪈㪅㪇㪜㪂㪈㪇 㪈㪅㪇㪜㪂㪈㪈 㪈㪅㪇㪜㪂㪈㪉 㪈㪅㪇㪜㪂㪈㪊
㪇 㪈 㪈㪇㪇㪇㪆㪫㩷㪲㩷㪈㪆㪢㩷㪴㪉 㪊 㪋
䉲䊷䊃䉨䊞䊥䉝Ớᐲ㪲䋱㪆䂔㪴
䋱䋰ᤨ㑆䋨ᄢ䋩 㸇䌢ၮ᧼䋨↥✚⎇䋩
↥✚⎇䈪䈱୯
䉲䊷䊃ᛶ᛫䈱᷷ᐲଐሽᕈ
㪈㪅㪇㪜㪂㪇㪊 㪈㪅㪇㪜㪂㪇㪋 㪈㪅㪇㪜㪂㪇㪌 㪈㪅㪇㪜㪂㪇㪍 㪈㪅㪇㪜㪂㪇㪎 㪈㪅㪇㪜㪂㪇㪏 㪈㪅㪇㪜㪂㪇㪐 㪈㪅㪇㪜㪂㪈㪇 㪈㪅㪇㪜㪂㪈㪈 㪈㪅㪇㪜㪂㪈㪉 㪈㪅㪇㪜㪂㪈㪊
㪇 㪈 㪉 㪊 㪋
㪈㪇㪇㪇㪆㪫㩷㪲㩷㪈㪆㪢㩷㪴
䉲䊷䊃ᛶ᛫㪲㱅㪆䂔㪴
䋱䋰ᤨ㑆䋨ᄢ䋩 㸇䌢ၮ᧼䋨↥✚⎇䋩
↥✚⎇䈪䈱୯
࿑6. A. ࠪ࠻ᛶ᛫ߩ᷷ᐲଐሽᕈ. B. ࠪ࠻ࠠࡖࠕỚᐲ ߩ᷷ᐲଐሽᕈ. C. Hall⒖േᐲߩ᷷ᐲଐሽᕈ.
䊖䊷䊦⒖േᐲ䈱᷷ᐲଐሽᕈ
㪈㪅㪇㪜㪂㪇㪇 㪈㪅㪇㪜㪂㪇㪈 㪈㪅㪇㪜㪂㪇㪉 㪈㪅㪇㪜㪂㪇㪊 㪈㪅㪇㪜㪂㪇㪋
㪇 㪈 㪈㪇㪇㪇㪆㪫㩷㪲㩷㪈㪆㪢㩷㪴㪉 㪊 㪋
䊖䊷䊦⒖േᐲ㪲㪺㫄㪉㪆㪭㫊㪴
䋱䋰ᤨ㑆㸇䌢䋨↥✚⎇䋩
↥✚⎇䈪䈱୯
A
B
C
ᜬߞߚၮ᧼ߣ߁ߩߪ࿑2B߿Dߦ␜ߐࠇߚAFM ߆ࠄ㘃ផߒߚ߽ߩߢࠆޕߎߩᤨޔ᷹ⷰߐࠇߚ⓭‛
ߩේ࿃ߢࠆ߇࠳ࠗࡗࡕࡦ࠼߇⓭⁁ߦᚑ㐳ߔࠆߣߪ
⠨߃ߦߊޕࠞࡏࡦේሶߢ᭴ᚑߐࠇߡࠆࠄ߆ߩ
᭴ㅧߣᕁࠊࠇࠆޕߎߎߢ⠨߃ࠄࠇࠆ৻ߟߩน⢻ᕈߣߒ ߡޔࠞࡏࡦ࠽ࡁ࠴ࡘࡉ߇ᒻᚑߐࠇߡࠆߩߢߪߥ
߆ߣផኤߒߡࠆޕߣ߁ߩߪㅢᏱࡎࡕࠛࡇ࠲ࠠ
ࠪࡖ࡞࠳ࠗࡗࡕࡦ࠼⭯⤑ࠍCVDߢวᚑߔࠆ႐วޔࡔ
࠲ࡦỚᐲ߇ᢙ%㜞Ớᐲߩ႐วߦߪࠞࡏࡦߥߩ࠴ࡘ
ࡉ߇ᒻᚑߐࠇࠆߎߣ߇ಽ߆ߞߡࠆޕ࿁ߩ႐วޔ
0.05%ߣ߁ᭂᓸ㊂ߢࠆߎߣ߆ࠄߘߩน⢻ᕈߪ⭯
ߣᕁࠊࠇߚ߇ޔ࠳ࠗࡗࡕࡦ࠼ၮ᧼ߦ⭯⤑ࠍ࠺ࡐߔࠆ೨ ߦၮ᧼ᵞᵺࠍߔࠆᎿ⒟ࠍ࿁ߪⴕߞߡߥޕߎߩࠃ ߁ߥၮ᧼ߦߪᄙߊߩਇ⚐‛ේሶ߇㕙ߦᄙ㊂ߦઃ⌕
ߒߡࠆߎߣ߇ޔRBS࠴ࡖࡀࡦ᷹ࠣቯߦࠃࠅಽ߆ߞ ߡࠆޕ
࿑8AߦΣbဳ࠳ࠗࡗࡕࡦ࠼ၮ᧼ߩRBS࠴ࡖࡀࡦ
ࠣࠬࡍࠢ࠻࡞ࠍޔ߹ߚޔ࿑8BߦΣbဳߣΤaဳ࠳ࠗࡗ ࡕࡦ࠼ၮ᧼ߩ࠴ࡖࡀࡦࠣࠬࡍࠢ࠻࡞ࠍ␜ߔޕ
㪈 㪈㪇 㪈 㪈㪇 㪉 㪈㪇 㪊 㪈㪇 㪋 㪈㪇 㪌
㪌㪇 㪈㪇㪇 㪈㪌㪇 㪉㪇㪇 㪉㪌㪇 㪊㪇㪇 㪊㪌㪇 㪋㪇㪇 㪋㪌㪇
1.0-MeV He, =170°
0°-random [100]-channeling [110]-channeling [111]-channeling
Yield (counts)
Channel number (ch) q
O
Fe,Ni K,Ca
Si S,Cl
Type Ib diamond(1)
(5.7x1013/cm2) (2.7x1013/cm2)
(1.9x1015/cm2)
㪈 㪈㪇 㪈 㪈㪇 㪉 㪈㪇 㪊 㪈㪇 㪋 㪈㪇 㪌
㪌㪇 㪈㪇㪇 㪈㪌㪇 㪉㪇㪇 㪉㪌㪇 㪊㪇㪇 㪊㪌㪇 㪋㪇㪇 㪋㪌㪇
1.0-MeV He, [100]-channeling = 170°
Ib(1) Ib(2) Ib(1) Ib(3) Ib(3) IIa(1) IIa(2)
Yield (counts)
Channel number (ch) q
Type Ib and IIa diamond
O
Fe,Ni
K,Ca S,Cl Si
Zn,Ga (1.3-1.4x10
15/cm
2)
(2.1-2.6x10
15/cm
2)
࿑8. A. 㜞᷷㜞วᚑ࠳ࠗࡗࡕࡦ࠼Σbၮ᧼ߩ[100]-,[110]-,[111]-࠴ࡖࡀࡦࠣࠬࡍࠢ࠻࡞. B.ฦ⒳Σ bၮ᧼ߣฦ⒳Τaၮ᧼ߩ[100]࠴ࡖࡀࡦࠣࠬࡍࠢ࠻࡞.
q = 170 o
q = 170 o
A
B
RBS (Rutherford Backscattering Spectrometry) ߣߪMeV⚖ߩࠛࡀ࡞ࠡߩHeࠗࠝࡦࠍ⹜ᢱߦ
ߐߖޔRutherfordᓟᣇᢔੂߦࠃࠅޔࡆࡓㅴⴕᣇะ߆ ࠄᓟᣇߦᒢᕈᢔੂߐࠇࠆHeࠗࠝࡦᚗߪਛᕈHeේ ሶߩࠛࡀ࡞ࠡࠬࡍࠢ࠻࡞ࠍ᷹ቯߔࠆᚻᴺߢࠆޕߎ ߩᣇᴺߦࠃࠅޔ㕙߆ࠄޯ1 µm ⒟ᐲߩᷓߐߦሽߔ ࠆਇ⚐‛ߩಽᏓࠍ᷹ቯߢ߈ࠆޕ߹ߚޔHe ࠗࠝࡦࠍ㜞
♖ᐲߦࠦࡔ࠻ߒߡ⹜ᢱߩ⚿᥏ゲߦᐔⴕߦߐߖ ࠆ࠴ࡖࡀࡦࠣߣ⸒߁ᚻᴺߦࠃࠅ⚿᥏ᕈߩ⒟ᐲࠍᷓߐ ᣇะߦ᷹ቯߔࠆߎߣ߽ߢ߈ࠆޕ
ߎߩ RBS᷹ቯߪ᧲੩Ꮏᬺᄢቇᄢጟጊࠠࡖࡦࡄ
ࠬࡧࠔࡦ࠺ࠣࡈታ㛎ߦ߅ߡⴕߞߡࠆޕടㅦེ
ᧄߪޔ᧲Ꮏᄢߩ4.75 MeVࡧࠔࡦ࠺ࠣࡈടㅦེࠍ
ޔะ㔚⏛⍹ޔ㔚⏛⍹㔚Ḯޔ2ᧄߩࡆࡓࠗࡦޔ 㧞ߟߩ࠴ࡖࡦࡃޔ᷹ቯ♽╬ߪߔߴߡᄹᎹᄢቇ߆ࠄ ᜬߞߡⴕߞߡ⚵ߺߍߚޕᐔဋߒߡ㧝ࡩߦ5-6ᣣߩ ࡑࠪࡦ࠲ࠗࡓࠍഀࠅᒰߡࠄࠇޔߘߎߢታ㛎ࠍߒߡࠆޕ
࿑8AޔBߦ␜ߔRBSࠬࡍࠢ࠻࡞ߪ᧲Ꮏᄢߢ᷹ቯߒ ߚ߽ߩߢߪߥߊޔએ೨╩⠪߇NTT‛ᕈ⑼ቇၮ␆⎇ⓥ
ᚲߦ☋ߒߡߚᤨߦޔ᷹ቯߒߚ࠺࠲ߢࠆޕ࿑8A ߪΣb ࠲ࠗࡊߩ㜞᷷㜞วᚑ࠳ࠗࡗࡕࡦ࠼ၮ᧼ߩࡦ
࠳ࡓࠬࡍࠢ࠻࡞ߣ[100]-,[110]-,[111]-࠴ࡖࡀࡦࠣࠬ
ࡍࠢ࠻࡞ߢࠆޕၮ᧼ߘߩ߽ߩߪ[100]ၮ᧼ߢࠆޕߎ ߩࠬࡍࠢ࠻࡞ߩ100 chઃㄭએਅߦ߅ߡࠊࠇߡ
ࠆࠬࡍࠢ࠻࡞ߪၮ᧼ߩ⚛ේሶ߆ࠄᓟᣇᢔੂߐࠇߡ߈ ߚࡋ࠙ࡓߢࠆޕࡦ࠳ࡓࠬࡍࠢ࠻࡞ߪᄢ߈ߥ₸
ߢࠆ߇ޔ࠴ࡖࡀࡦࠣࠬࡍࠢ࠻࡞ߪᓟᣇᢔੂߐࠇࠆ ࡋ࠙ࡓߩ₸߇⪭ߜࠆߚޔࠞ࠙ࡦ࠻ᢙ߇ዋߥߊ ߥߞߡࠆޕߘߒߡޔၮ᧼ߩ㕙ࡇࠢߣ߫ࠇࠆ㍈
ࡇࠢ߇100 chઃㄭߦ᷹ⷰߐࠇࠆޕߎߩࡇࠢ߇ ᄢ߈߶ߤ㕙߆ࠄᢙේሶጀߩේሶ㈩ߩੂࠇ߇ᄢ߈
ߣ߁ߎߣߦߥࠆޕߘߩઁ㜞ࠛࡀ࡞ࠡ㧔࠴ࡖࡀ
࡞ᢙߩᄢ߈ㇱಽ㧕ߦࠊࠇࠆฦ⒳ߩࡇࠢߪޔࠛࡀ
࡞ࠡሽೣߣㆇേ㊂ሽೣߩ2ߟࠍߞߡߤߩࠃ߁ ߥ⒳㘃ߩේሶ߆ࠄࡋ࠙ࡓ߇ᓟᣇᢔੂߐࠇߡ߈ߚߩ߆ ࠍ෩ኒߥᢙᑼࠍ↪ߡ⸘▚ߔࠆߎߣ߇ߢ߈ࠆޕߘࠇߦ ࠃࠅޔฦࡇࠢߩ⟎ࠍหቯߔࠆߣ150 chઃㄭ߇㉄
⚛ޔ250 chઃㄭ߇ࠪࠦࡦߢࠆߎߣ߇ಽ߆ࠆޕᦝߦޔ 300 chઃㄭ߇ࠞ࠙ࡓ߿ࠞ࡞ࠪ࠙ࡓߢࠆߎߣޔ340 chઃㄭ߇㋕ޔࠢࡠࡓޔ࠾࠶ࠤ࡞╬ߩర⚛ߢࠆߎߣ߇ หቯߢ߈ࠆޕߒ߆߽ޔฦ࠴ࡖࡀࡦࠣࠬࡍࠢ࠻࡞ࠍ᷹
ቯߔࠆ㓙ޔ⹜ᢱ߇ࡆࡓㅴⴕᣇะߦኻߒߡߊߦ߽㑐 ࠊࠄߕޔࡇࠢߩޟ⟎߇ᄌൻߒߡߥߎߣ߇ࠄ ߆ߢࠆޕߎࠇߪޔߎࠇࠄߩర⚛߇ၮ᧼ౝㇱߢߪߥߊޔ
㕙ߦઃ⌕ߒߡࠆਇ⚐‛ߢࠆߣ߁ߎߣࠍ␜ߒߡ
ࠆޕታߦᄙߊߩਇ⚐‛ర⚛߇㕙ߦઃ⌕ߒߡࠆߎ ߣ߇ಽ߆ࠆޕߎࠇࠄߪၮ᧼⾼ᤨߘߩ߹߹ߩ⹜ᢱࠍ᷹
ቯߒߚߚߢࠅޔࠄ߆ߩᵞᵺಣℂࠍᣉߔߎߣߦࠃ
ࠅޔ㕙ߦઃ⌕ߒߡࠆߎࠇࠄర⚛߇ᄢߦૐᷫߔࠆ ߎߣ߇ᦼᓙߢ߈ࠆޕߎࠇࠄߩࡇࠢߩᄢ߈ߐ㧔㕙Ⓧ㧕 ߆ࠄ㕙ઃ⌕ේሶߩ㕙ኒᐲߩ⛘ኻ୯ࠍ▚ߔࠆߎߣ߇ ߢ߈ࠆޕߚߣ߃߫㉄⚛ߪ 1.91015/cm2ߢࠅޔࠞ
࠙ࡓᚗߪࠞ࡞ࠪ࠙ࡓߪ 2.71013/cm2ߢࠅޔ㋕ࠢ
ࡠࡓ࠾࠶ࠤ࡞ߩ㘃ߪ 5.71013/cm2ߢࠆߎߣ߇▚
ߢ߈ࠆޕRBS᷹ቯᴺߦ߅ߡߪ㊀ర⚛߶ߤᗵᐲ߇ࠃߊ ᬌߐࠇࠆޕߎߩ࿑8A߆ࠄࠄ߆ߥࠃ߁ߦޔ㋕ޔࠢ
ࡠࡓޔ࠾࠶ࠤ࡞ߩࠃ߁ߥࠊࠁࠆ㋕ᣖߩర⚛߇㕖Ᏹߦ ᄙߊၮ᧼㕙ߦઃ⌕ߒߡࠆߎߣ߇ಽ߆ࠆޕߎࠇߪޔ 㜞᷷㜞วᚑၮ᧼ࠍߔࠆᤨޔ⸅ᇦߣߒߡ㋕ߩṁⲢ ṁᶧਛߢวᚑߔࠆߚߢࠆޕߒ߆ߒޔၮ᧼ౝㇱߦߪ ߎࠇࠄ⸅ᇦ㊄ዻߪ߹ࠇߡߥࠃ߁ߢࠆޕߎߩࠃ ߁ߦ㋕㘃ߩ㊄ዻ߇࠳ࠗࡗࡕࡦ࠼ၮ᧼㕙ߦ߆ߥࠅ㜞Ớ ᐲߦઃ⌕ߒߡࠆߎߣߦࠃࠅޔߘࠇࠍᩭߣߒߡࠞࡏ ࡦ࠽ࡁ࠴ࡘࡉ߇ᒻᚑߐࠇߚߩߢߪߥ߆ߣផኤߐࠇ ࠆޕ
࿑ 8B ߪ 3 ⒳㘃ߩΣb ၮ᧼ߣ㧞⒳㘃ߩΤa ၮ᧼ߩ
[100]-࠴ࡖࡀࡦ᷹ࠣቯߒߚ⚿ᨐࠍ␜ߔࠬࡍࠢ࠻࡞ߢ
ࠆޕΤa ၮ᧼ߣߪ㜞᷷㜞วᚑߔࠆ㓙ߦ⓸⚛ਇ⚐‛
ߩขࠅㄟߺ㊂ࠍᭂߡዋ㊂ߦᛥ߃ࠆวᚑᴺߦࠃࠅ
ߒߚၮ᧼ߢࠆޕߎߩၮ᧼ߦ߹ࠇࠆ⓸⚛㊂ߪ1 ppm એਅߢࠅ,Σbၮ᧼߇⓸⚛ਇ⚐‛ߦࠃࠆ㤛⦡⦡ࠍᏪ
߮ߡࠆߩߦኻߒߡోߊߩή⦡ㅘߥ࠳ࠗࡗࡕࡦ࠼ၮ
᧼ߢࠆޕߎߩ࿑߆ࠄಽ߆ࠆࠃ߁ߦΣb ၮ᧼ߪ㋕ޔࠢ
ࡠࡓޔ࠾࠶ࠤ࡞╬ߩਇ⚐‛߇⹜ᢱߩ㆑ߦࠃࠅჇᷫߪ
ࠆ߽ߩߩޔߒߥߴߡ㜞ਇ⚐‛Ớᐲࠍ␜ߒߡࠆޕ Τa ၮ᧼ߪΣb ၮ᧼ߣᲧセߔࠇ߫㕙ߦઃ⌕ߒߡࠆ ਇ⚐‛ߪዋߥ߽ߩߩ߿ߪࠅޔ߆ߥࠅᄢ߈ߥ㊀ర⚛߇
㕙ߦઃ⌕ߒߡࠆߎߣߦߪᄌࠊࠅߪߥޕߕࠇߦ ߒࠈޔ㕙ߦઃ⌕ߒߡࠆਇ⚐‛ర⚛ߪᵞᵺಣℂߦࠃ ࠅޔᄢߦૐᷫߢ߈ࠆߎߣ߇ᦼᓙߐࠇࠆޕ
ߎࠇࠄ RBS᷹ቯߩ⚿ᨐߦࠃࠅޔ㕙ߦ㜞Ớᐲߦઃ
⌕ߒߡࠆ㋕㘃ర⚛ߩਇ⚐‛߇ᩭߣߥࠅޔࠞࡏࡦ࠽
ࡁ࠴ࡘࡉ߇ᒻᚑߐࠇߚ߽ߩ߇AFMߩ᷹ቯ⚿ᨐߦ
ߡ߈ߚ⓭ߢࠆߣផኤߒߡࠆ߇ޔߎࠇࠄ߇ᧄᒰߦ
ࠞࡏࡦ࠽ࡁ࠴ࡘࡉߢࠆ߆ߤ߁߆ߣ߁ߎߣߪ
ᓟޔTEM ╬ߩᚻᲑߦࠃࠅ⚦ߦᬌ⸛ߒߡࠁ߆ߥߌࠇ
߫ߪߞ߈ࠅߣߒߚ⋥ធߩ⸽ߣߪߥࠄߥޕ
SIMSಽᨆߩᬌ⸛
SIMSಽᨆߣߪ࿑9ߦ␜ߒߚࠃ߁ߦCsߩࠃ߁ߥ৻ᰴ
ࠗࠝࡦࡆࡓࠍૐࠛࡀ࡞ࠡ㧔ᢙkeV㧕ߢᢳ߆ࠄ⹜
ᢱߦᾖߒޔ㕙߆ࠄࠞࡏࡦේሶࠍࠬࡄ࠶࠲ߒߥ߇ ࠄⓣࠍជߞߡߊޕߎߩᤨޔࠬࡄ࠶࠲ߐࠇߚේሶ㧔ᄢ ㇱಽ߇⚛ߢࠆ߇ޔઁߩਇ⚐‛߽ᄙߊ߹ࠇࠆ㧕߇ 㘧߮ߒߡߊࠆޕߎࠇࠄߩේሶࠍ㔚႐ߣ⏛႐ࠍ⋥ⷺߦ
Ꮕߐߖߚ႐ߩਛࠍㅢߔߎߣߦࠃࠅޔ⾰㊂ߩ㆑ࠍ
ಽ㔌ߢ߈ࠆࡑࠬࡈࠖ࡞࠲ࠍㅢߔߎߣߦࠃࠅޔฦ⒳ේ
ሶߦಽ㘃ߒߡߘࠇߙࠇߩ2ᰴࠗࠝࡦᒝᐲࠍ᷹ቯߔࠆߎ ߣ߇ߢ߈ࠆޕ࿁ၸⓍߒߚ⤑ਛߦߪΣb ၮ᧼ߩࠃ߁ߦ
⓸⚛ਇ⚐‛߇ᢙ⊖ ppm ߽߹ࠇࠆߎߣߪߥߣᦼᓙ ߒߡߚߩߢ࿑9ฝߦ␜ߒߚࠃ߁ߥࠬࡍࠢ࠻࡞ࠍ੍
ᗐߒߡߚޕߣߎࠈ߇ޔታ㓙ߦߪ࿑5ߦ␜ߒߚࠃ߁ߦ ၮ᧼ߣ⤑ߩ⇇㕙ߦ߅ߡ㗼⪺ߥ⓸⚛2ᰴࠗࠝࡦᒝᐲߩ Ꮕߪࠄࠇߥ߆ߞߚޕߎߎߢታ㓙ߦޔ⤑ਛߦ㜞Ớᐲ ߦ⓸⚛߇߹ࠇߡࠆߩ߆ߤ߁߆ߣ߁ߎߣ߇㗴ߦ ߥࠆޕ
࿑ 10 ߦታ㓙ߦ᷹ቯߐࠇߚ⓸⚛ࠬࡍࠢ࠻࡞ߩ⤑ਛಽ Ꮣࠍᮨᑼ⊛ߦ␜ߒߚޕࠬࡍࠢ࠻࡞ߩ↢࠺࠲ߪ࿑5A-C ߦ␜ߒߡࠆޕߎߩ࿑5߆ࠄߪ࿁ၸⓍߒߚ⤑ਛߦ߽
߆ߥࠅ㜞Ớᐲߩ⓸⚛ਇ⚐‛߇߹ࠇߡࠆߩߢߪߥ
߆ߣᕁࠊࠇࠆ߇ޔታߪߘ߁ߢߪߥޕAFM ߩឬ߆ ࠄIbၮ᧼ߘࠇ⥄߇࿑10ߩᏀߦ␜ߒߚࠃ߁ߥ߆ߥ ࠅߥߛࠄ߆ߥફ߇ሽߔࠆߎߣ߇ಽ߆ߞߚޕߎࠇߪ
࿑2ߩAFMߩࠍࠆߣࠄ߆ߥࠃ߁ߦޔၮ᧼߿ၸ
Ⓧ⤑߇ᢙ10 µm⒟ᐲߩᦼߢᦨᄢ1 µm⒟ᐲߩફࠍ ᜬߞߡࠆ߆ࠄߢࠆޕߔࠆߣޔᢳ߆ࠄߔࠆCs 㧝ᰴࠗࠝࡦࡆࡓߪ⤑ߩ㕙ࠍ৻᭽ߦࠬࡄ࠶࠲ߒߡ
ࠆߩߢߪߥߊ,ફߩᓇߦ㓝ࠇߚ㗔ၞߪࠬࡄ࠶࠲ߦࠃ ࠆⓣជࠅㅦᐲ߇ㆃߊߥߞߡࠆޕߎ߁ߒߡ㕙߇৻᭽
ߦᓂࠇߡࠆߩߢߪߥߊޔ߆ߥࠅ㗔ၞߦࠃߞߡ߫ࠄߟ
߈߇ࠆࠬࡄ࠶࠲ㅦᐲߦߥߞߡࠆߎߣ߇੍᷹ߐࠇࠆޕ ߔࠆߣޔ৻ᰴࡆࡓ߇৻ㇱၮ᧼ߦ㆐ߒߡ⓸⚛Ớᐲ߇
߇ߞߚߣߒߡ߽ޔઁߩ㗔ၞߪ߹ߛ⤑ਛࠍࠬࡄ࠶࠲ߒ ߡߡ⓸⚛Ớᐲ߇ዋߥߦ߽㑐ࠊࠄߕޔోߣߒߡ⤑
ਛߩ⓸⚛Ớᐲ߇߆ߌߒߡࠆࠃ߁ߦ߃ࠆߎ ߣߦߥࠆޕᓥߞߡޔᱜ⏕ߥ⤑ਛߩ⓸⚛ỚᐲಽᏓࠍ᷹ቯ ߔࠆߚߦߪࠄ߆ߓᐔမߥၮ᧼ߦ᐀ࠍၸⓍߐߖ ࠆߎߣ߇ᔅⷐߢࠆޕ࿁ߩ᷹ቯߦ߅ߡߪᧄᒰߦ⤑
ਛߩ⓸⚛Ớᐲ߇ၮ᧼ߣᲧセߒߡ㧞ᩴએዋߥߩ߆ߤ ߁߆ࠍᬌ⸽ߔࠆߎߣߪߢ߈ߥ߆ߞߚޕߒ߆ߒޔࠄ߆ ߦၮ᧼ߣߩ⇇㕙ߦ߅ߡޔ⓸⚛Ớᐲ߇ᄌൻߒߡࠆߎ ߣ߆ࠄޔၮ᧼ࠃࠅߪዋߥ⓸⚛Ớᐲߢࠆߎߣߪ⏕ታ ߢࠆߣᕁࠊࠇࠆޕ
Hallലᨐ᷹ቯߦࠃࠆಽᨆߩᬌ⸛
⤑ߩ‛ᕈࠍ৻⇟ᢅᗵߦߔࠆߩߪ㔚᳇⊛᷹ቯߢࠆޕ
࿁ޔࡎ࡞ലᨐ᷹ቯⵝ⟎ࠍ↪ߒߡ᷹ቯߒߚ⚿ᨐޔ
ࠠࡖࠕߩ⒖േᐲߦ㑐ߒߡ࿑6Cߦ␜ߒߚࠃ߁ߦޔૐ
᷷㗔ၞ߆ࠄ㜞᷷㗔ၞߦᷰࠆ߹ߢޔ↥✚⎇ߢߒߚ⹜
ᢱࠃࠅ߽㜞⒖േᐲߩ⤑߇ᓧࠄࠇߡࠆߎߣ߇ಽ߆ߞߚޕ ᓧࠄࠇߚ⒖േᐲߩ୯߇ᧄᒰߛߣߔࠆߣ㕖Ᏹߦ㜞ຠ⾰ߥ
⤑߇ᓧࠄࠇߡࠆน⢻ᕈ߇ࠆޕߚߛޔ࿁ೋߡࡎ
࡞ലᨐ᷹ቯⵝ⟎ࠍ㚟ߒߡ᷹ቯߒߚ߇ޔ߹ߛޔߎ ߥߖߡ߅ࠄߕޔ㔚Ḯ╬ߩ㓚߽ߞߡᓟᬌ⸛ߔߴ߈
⭯⤑
ၮ᧼
৻ᰴࠗࠝࡦ
ᳪᨴ ⭯⤑ ၮ᧼
ᷓߐ
ࠗࠝࡦᒝᐲ
⓸⚛ߥߤߩ㕙ᳪᨴ ⓸⚛
࿑9. SIMSಽᨆߩේℂߣ੍ᗐߐࠇߚ⓸⚛ਇ⚐‛ಽᏓ.
ၮ᧼
৻ᰴࠗࠝࡦ
⓸⚛ߥߤߩ㕙ᳪᨴ
⭯⤑ ၮ᧼
ᷓߐ
ࠗࠝࡦᒝᐲ
⓸⚛
⭯⤑
ᢙ10Ǵm 1Ǵm
࿑10. ታ㓙ߦ᷹ቯߐࠇߚ⓸⚛ߩSIMSಽᨆࠬࡍࠢ࠻࡞.
⺖㗴ߪᄙޕ
ࡑࡦಽశ᷹ቯߦࠃࠆಽᨆߩᬌ⸛
࠳ࠗࡗࡕࡦ࠼⤑ߩ⚿᥏ᕈࠍ⹏ଔߔࠆᚻᴺߣߒߡࠃߊ
↪ߐࠇࠆߩߪࡑࡦᢔੂಽశᴺߢࠆޕ
࿑㧠ߦ␜ߔࡑࡦᢔੂࠬࡍࠢ࠻࡞ߦ߅ߡ࠳ࠗࡗࡕ ࡦ࠼ߦ․ߥ 1333/cm ߦ߅ߌࠆࠪࡖࡊߥࡇࠢ߇
᷹ⷰߐࠇߡࠆޕIbၮ᧼ߩࠬࡍࠢ࠻࡞ࡇࠢࠃࠅ߽ඨ ୯߇⁜ޕߐࠄߦޔᤓᐕၸⓍߒߚ⤑ߦᲧセߒߡࡃ࠶
ࠢࠣࡦ࠼߇ᩰᲑߦዊߐߊߥߞߡࠆޕߎࠇࠄߩߎߣ ߪ࿁ၸⓍߒߚ࠳ࠗࡗࡕࡦ࠼⤑߇㕖Ᏹߦ⚿᥏ᕈ߇ࠃ
ߎߣࠍࠊߒߡࠆޕߎߩߎߣߪ೨▵ߩࡎ࡞ലᨐ᷹
ቯߦࠃࠆࠠࡖࠕ⒖േᐲ߇㜞ߎߣߣㅪേߔࠆߎߣߢ
ࠅޔ⤑⾰ߣߒߡਇ⚐‛߇ዋߥߊޔ⚿᥏ᕈ߇⤑ޔ හߜ,ࠠࡖࠕߩᢔੂ߇ዊߐ⦟ᅢߥ⤑ߢࠆߎߣࠍ
␜ໂߒߡࠆޕߩࡑࡦᢔੂಽశ᷹ቯⵝ⟎ߩᵄᢙ
ಽ⸃⢻߇10/cm⒟ᐲߒ߆ߥߩߢޔߐࠄߦޔ㜞ಽ⸃⢻
ߩࡑࡦᢔੂಽశ᷹ቯེࠍ↪ࠇ߫ޔIbၮ᧼ߣᲧセߒ ߡ߽ߞߣඨ୯߇⁜߹ࠅޔߐࠄߦ⚿᥏ᕈ߇ࠃߎߣߩ
⸽߇ᓧࠄࠇࠆ߆߽⍮ࠇߥޕ
߹ߣ
࠳ࠗࡗࡕࡦ࠼ඨዉ߇ᧂ᧪ߩඨዉߣߒߡᅤߦᦼᓙ ߐࠇߡࠆߩ߆ߣ߁ߎߣ߆ࠄޔ߹ߢߦసߐࠇ ߡߥ㗴ὐ╬ߦ⸒ߒߚޕߘࠇࠍసߔࠆߚߩ ᣇ╷ࠍㅀߴޔߘࠇࠍታߔࠆߚߦߪߤߩࠃ߁ߥࡊࡠ
ࠬߢㅴ߫߆߽␜ߒߚޕ߹ߢߦᄹᎹᄢቇ ߦ߅ߡޔ㜞⚐ᐲޔ㜞ຠ⾰ߩ࠳ࠗࡗࡕࡦ࠼⭯⤑⹜ᢱࠍ ᒻᚑߢ߈ࠆǴᵄࡊ࠭ࡑCVDⵝ⟎ࠍ㐿⊒ߒߚߎߣޔ ߐࠄߦޔߘࠇࠍ↪ߒߡ߆ߥࠅ㜞ຠ⾰ߥ࠳ࠗࡗࡕࡦ࠼
⭯⤑ࠍᒻᚑߢ߈ᆎߚߎߣࠍ⚫ߒߚޕ߹ߚޔࠞࡏ ࡦ࠽ࡁ࠴ࡘࡉߣ߁ᭂߡᵈ⋡ߐࠇߡࠆ‛⾰
߽ᚑ㐳ߐߖࠆߎߣߩߢ߈ࠆน⢻ᕈ߽␜ߔߎߣ߇ߢ߈ߚޕ ߎࠇࠄߩ⤑ߩຠ⾰ࠍ⹏ଔߔࠆߚߦߪฦ⒳᷹ቯⵝ⟎߇ ᔅⷐߢࠆ߇ޔ߹ߢߦޔࡑࡦಽశ᷹ቯⵝ⟎ޔAFM ⵝ⟎ޔ⑳ቇഥᚑߦࠃࠅࡎ࡞ലᨐ᷹ቯⵝ⟎߇ዉߐࠇޔ
⹜ᢱᒻᚑ߆ࠄ⹏ଔߦ⥋ࠆ৻⽾ߒߚࡊࡠࠬࠍᄢቇౝㇱ ߢ㐽ߓߚᒻߢታߢ߈ࠆࠃ߁ߦߥߞߚޕߐࠄߦޔᐕ ᐲ⑳ቇഥᚑߢዉߔࠆߎߣߦߥߞߡࠆਛ㔚ᵹࠗࠝࡦ ᵈⵝ⟎ࠍ↪ߔࠆߎߣߦࠃࠅޔ࠳ࠗࡗࡕࡦ࠼ඨዉ
ߩߺߥࠄߕޔࠪࠦࡦඨዉ߿ฦ⒳ൻว‛ඨዉ╬ߦ ਇ⚐‛ࠍ࠼ࡇࡦࠣߒߚࠅޔ‛⾰ߩ⚵ᚑࠍ㕖ᾲᐔⴧㆊ
⒟ߦࠃࠅᡷ⾰ߔࠆߎߣ߇ߢ߈ࠆࠃ߁ߦߥࠅޔඨዉߩ ߺߥࠄߕޔ࿕‛ᕈߩࠄࠁࠆ㗔ၞߦ߅ߡ⎇ⓥߩ
߇ᐢ߇ࠆߎߣ߇ᦼᓙߢ߈ࠆޕ
⻢ㄉ
ߎߩ⎇ⓥࠍㆀⴕߔࠆߦߚࠅޔᖱႎ⑼ቇ⑼ߩᄙߊߩవ
↢ᣇ߆ࠄޔࠈࠈ⽷⊛េഥࠍ㗂߈ᷓߊᗵ⻢ߚߒ
߹ߔޕ߹ߚޔ↥ᬺᛛⴚ✚ว⎇ⓥᚲ ࠳ࠗࡗࡕࡦ࠼ࡦ
࠲ᄢਠ⑲᳁ߦߪࠈࠈ⸛⺰ߒߡߚߛ߈ޔᷓߊ ᗵ⻢ߚߒ߹ߔޕ
ᢥ₂
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