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2D-RCWA 1 two dimensional rigorous coupled wave analysis [1, 2] 1 ε(x, y) = 1 ε(x, y) = ϵ mn exp [+j(mk x x + nk y y)] (1) m,n= m,n= ξ mn exp [+j(mk x

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Academic year: 2021

シェア "2D-RCWA 1 two dimensional rigorous coupled wave analysis [1, 2] 1 ε(x, y) = 1 ε(x, y) = ϵ mn exp [+j(mk x x + nk y y)] (1) m,n= m,n= ξ mn exp [+j(mk x"

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