等価回路モデルによるバリスタのノイズ吸収特性の改善

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1

╬ଔ࿁〝ࡕ࠺࡞ߦࠃࠆࡃ࡝ࠬ࠲ߩ

ࡁࠗ࠭ๆ෼․ᕈߩᡷༀ

દ ⮮

ᷕ*

,1

㧘㋈ ᧁ 㓷 ผ**㧘㋈ ᧁ ᥍ ᒾ*㧘ศ ᧛ ᣹**

㧔2005 ᐕ 7 ᦬ 8 ᣣฃઃ㧘2006 ᐕ 3 ᦬ 1 ᣣฃℂ㧕

Improvement of Noise Absorption Characteristics of Ceramic Varistor

Using Equivalent Circuit

Atsushi ITO*

,1

,Masafumi SUZUKI**, Haruhiko SUZUKI* and Noboru YOSHIMURA**

(Received July 8, 2005; Accepted May 1, 2006)

Varistor has a lot of advantages compared with Zener diode, such as the symmetrical voltage-current

characteristic, the large capacitance and the high responsibility. Therefore, it is used as a protective element

against the static electricity and surge noise for mobile phones, video cameras, DVD-ROMs, DC motors and so

on. Especially, SrTiO

3

varistor is available for a noise absorption element, since it has a large capacitance and a

large non-linear coefficient between applied voltage and current at the region in a large current.

In this paper, we investigate the influence of the capacitance at the grain boundary and resistance in the

crystalline grain on the noise absorption characteristics of ceramic varistor using an equivalent circuit model.

The simulated results show that the noise occurred in a DC motor can be reduced with the increase of the

capacitance at the grain boundary near by the surface layer of the varistor and the decrease of the resistance in

the conduction layer of it.

1. ߪߓ߼ߦ ៤Ꮺ㔚⹤߿ࡆ࠺ࠝࠞࡔ࡜㧘 DVD-ROM㧘ฦ⒳ࡕ࡯࠲ߥ ߤ㧘ㄭᐕߩዊဳ㔚ሶᯏེߪ㧘ࠦࡦࡇࡘ࡯࠲ߦࠃࠆ೙ᓮ߇ ⴕࠊࠇߡ޿ࠆ㧚ߎࠇࠄߩ㔚ሶᯏེౝߢ⊒↢ߔࠆࠨ࡯ࠫࡁ ࠗ࠭߿㜞๟ᵄࡁࠗ࠭ߪ㧘ᯏེߩ⺋േ૞߿⎕უߦߟߥ߇ࠆ ᕟࠇ߇޽ࠆ㧚․ߦ⋥ᵹࡕ࡯࠲ߢߪࡉ࡜ࠪ㧙ᢛᵹሶ ߢࠗ ࡦ࠳ࠢ࠲ࡦࠬߩࠠ࠶ࠢࠝࡈ╬ߦߣ߽ߥ߁ࡁࠗ࠭ߩ⊒↢߇ ໧㗴ߣߥߞߡ޿ࠆ㧚ߎࠇࠄߩࡁࠗ࠭ࠍ㒰෰ߔࠆߚ߼ߦࡃ ࡝ࠬ࠲߇૶↪ߐࠇߡ޿ࠆ㧚ࡃ࡝ࠬ࠲ߩਛߢ߽․ߦ SrTiO3 ♽࠮࡜ࡒ࠶ࠢࡃ࡝ࠬ࠲ߪ㧘Ყセ⊛㔚࿶㧙㔚ᵹ․ᕈߩ㕖⋥ ✢ᕈ߇ᄢ߈ߊ㧘㕒㔚ኈ㊂߽ᄢ߈޿ߚ߼㧘ࠨ࡯ࠫๆ෼ߩߺ ߥࠄߕ㜞๟ᵄࡁࠗ࠭ߩๆ෼ߦ߽ఝࠇߚ․ᕈࠍ␜ߒ㧘⋥ᵹ ࡕ࡯࠲╬ߩࡁࠗ࠭ኻ╷ߣߒߡ߽ᐢߊ↪޿ࠄࠇߡ޿ࠆ㧚ߒ ߆ߒߥ߇ࠄ㧘ࡕ࡯࠲ߩ․ᕈ߇ᄌࠊߞߚ႐วߦߪᔅߕߒ߽ චಽߥࡁࠗ࠭ๆ෼߇ⴕ߃ߥ޿႐ว߽޽ࠅ㧘૶↪ߔࠆࡕ࡯ ࠲ߩ․ᕈߦᔕߓߚࡃ࡝ࠬ࠲․ᕈߩᦨㆡൻ߇ᦸ߹ࠇߡ޿ࠆ㧚 ╩⠪ࠄߩ⎇ⓥࠣ࡞࡯ࡊߪ࠮࡜ࡒ࠶ࠢࡃ࡝ࠬ࠲ࠍ⚿᥏☸ ⇇ߣ⚿᥏☸ሶߦಽߌ㧘ࡃ࡝ࠬ࠲ߩ㔚᳇⊛․ᕈࠍḩ⿷ߔࠆ ╬ଔ࿁〝ࡕ࠺࡞ࠍឭ᩺ߒ㧘ࡁࠗ࠭ๆ෼․ᕈߩᦨㆡൻࠍ⋡ ᜰߒߡ߈ߚ1-4)㧚߹ߚ㧘ߎߩ╬ଔ࿁〝ࡕ࠺࡞ࠍ↪޿ߡ㧘⋥ ᵹࡕ࡯࠲ߦ߅޿ߡࠗࡦ࠳ࠢ࠲ࡦࠬߩࠠ࠶ࠢࠝࡈߦߣ߽ߥ ߁ࠨ࡯ࠫࡁࠗ࠭߇ࡃ࡝ࠬ࠲ౝㇱߢߤߩࠃ߁ߦๆ෼ߐࠇࠆ ߩ߆ߦߟ޿ߡ߽ႎ๔ߒߡ޿ࠆ 4)㧚ߎߩ╬ଔ࿁〝ࡕ࠺࡞ࠍ ↪޿ࠆߎߣߦࠃࠅ㧘ࡃ࡝ࠬ࠲ߩࡁࠗ࠭ๆ෼ᯏ᭴ߩ⸃᣿߿㧘 ߘߩ㔚᳇⊛․ᕈߩᡷༀߦ߽೑↪ߔࠆߎߣ߇ߢ߈ࠆߚ߼㧘 ࡃ࡝ࠬ࠲ࠍ⸳⸘ߔࠆ਄ߢ᦭⋉ߥᜰᮡࠍਈ߃ࠆߎߣߣߥࠆ㧚 ᧄ⎇ⓥߢߪ㧘వߦឭ᩺ߒߚ╬ଔ࿁〝ࡕ࠺࡞ߩ߁ߜ㧘⚿ ᥏☸⇇ߩ㕒㔚ኈ㊂ߣ⚿᥏☸ሶߩᛶ᛫ߦᵈ⋡ߒ㧘ߎࠇࠄߩ ୯߇⋥ᵹࡑࠗࠢࡠࡕ࡯࠲ߢ⊒↢ߔࠆࠨ࡯ࠫࡁࠗ࠭ߩๆ෼ ․ᕈߦ෸߷ߔᓇ㗀ߦߟ޿ߡ㧘Pspice ࠍ↪޿ߚࠪࡒࡘ࡟࡯ ࡚ࠪࡦߦࠃࠅᬌ⸛ߒߚ㧚߹ߚ㧘ࡃ࡝ࠬ࠲ౝㇱߩߤߩㇱಽ ߩ㕒㔚ኈ㊂ߣᛶ᛫߇ࡁࠗ࠭ๆ෼․ᕈߦᓇ㗀ࠍ෸߷ߔߩ߆ ߦߟ޿ߡߩ⸃ᨆ߽ⴕ޿㧘ߤߩࠃ߁ߥ․ᕈߩࡃ࡝ࠬ࠲߇ࠃ ࠅലᨐ⊛ߦࡁࠗ࠭ࠍๆ෼ߔࠆߩ߆ߦߟ޿ߡ߽ᬌ⸛ߒߚ㧚 ࠠ࡯ࡢ࡯࠼㧦࠮࡜ࡒ࠶ࠢࡃ࡝ࠬ࠲㧘࿁〝ࠪࡒࡘ࡟࡯ ࠲㧘⺃㔚․ᕈ㧘ࡁࠗ࠭ๆ෼․ᕈ * ⑔ፉᎿᬺ㜞╬ኾ㐷ቇᩞ㔚᳇Ꮏቇ⑼㧔970-8034 ޿ࠊ߈Ꮢᐔ਄⨹Ꮉሼ㐳የ30㧕

Fukushima National College of Technology,

30 Nagao Kamiarakawa Taira, Iwaki , 970-8034, Japan **⑺↰ᄢቇᎿቇ⾗Ḯቇㇱ㔚᳇㔚ሶᎿቇ⑼㧔010-8502

⑺↰Ꮢᚻᒻቇ࿦↸1-1㧕

Engineering and Resource Science, Akita University, 1-1 Tegata Gakuenmachi, Akita 010-8502, Japan 1 _{[email protected]}

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2. ࡁࠗ࠭ๆ෼․ᕈ ᧄ⎇ⓥߢߪ㧘⴫㕙ౣ㉄ൻဳ SrTiO3ࡃ࡝ࠬ࠲ࠍ⚿᥏☸⇇ ߩ㕒㔚ኈ㊂ߣ⚿᥏☸ሶߩᛶ᛫ߦࠃࠅ╬ଔ࿁〝ࡕ࠺࡞ߢ⴫ ߒ㧘ࡁࠗ࠭ๆ෼․ᕈߦߟ޿ߡᬌ⸛ߔࠆ㧚╬ଔ࿁〝ߦߟ޿ ߡߩ⹦⚦ߪᣢߦႎ๔ߒߡ޿ࠆࠃ߁ߦ4)㧘࿑ 1 ߩࠃ߁ߦ᳿ ቯߒߚ㧚╬ଔ࿁〝ਛߩฦᛶ᛫୯߅ࠃ߮㕒㔚ኈ㊂ߪ⴫ 1 ߦ ␜ߔ㧚ߥ߅㧘ฦጀߩᛶ᛫ߣ㕒㔚ኈ㊂ߪ a ጀࠍ଀ߣߔࠆߣ㧘 หߓጀౝߩᛶ᛫ߣ㕒㔚ኈ㊂ߪోߡหߓ୯ߣߒߚ㧚 ࡃ࡝ࠬ࠲ߩࡁࠗ࠭ๆ෼․ᕈߪ⋥ᵹࡑࠗࠢࡠࡕ࡯࠲ࠍ ᮨᡆߒߚ╬ଔ࿁〝ߦ߅޿ߡᬌ⸛ߔࠆ㧚࿑ 2 ߦ␜ߔࠃ߁ߦ ࡑࠗࠢࡠࡕ࡯࠲ࠍ╬ଔ࿁〝ߢ⴫ߒ㧘ߎࠇߦ࿑ 1 ߩࡃ࡝ࠬ ࠲ߩ╬ଔ࿁〝ࠍਗ೉ߦធ⛯ߔࠆ㧚ࡑࠗࠢࡠࡕ࡯࠲ߢ⊒↢ ߔࠆࡁࠗ࠭ߪ㧘ࡉ࡜ࠪߣᢛᵹሶ ߩធ⸅ߩ㓙ߦ↢ߕࠆߚ ߼㧘ߎࠇࠍࠬࠗ࠶࠴ߩ on㧘off ߢᮨᡆߒߚ㧚ࠦࠗ࡞ߩࠗ ࡦ࠳ࠢ࠲ࡦࠬߪ 1mH㧘Ꮞ✢ᛶ᛫ߪ 40ǡ㧘㔚Ḯ㔚࿶ߪ 10V ߣߒ㧘ࠬࠗ࠶࠴ࠍ 0.5ms 㑆㓒ߢ on-off ߒߚ㧚 ⚿᥏☸ౝ ⚿ ᥏ ☸ ⇇ ᛶ᛫ R [ǡ] 㕒㔚ኈ㊂ C [nF] ᛶ᛫[ǡ] aጀ 10.0 10.0 bጀ 0.05 1000.0 c,e,g,iጀ 3.32 1.0 d,f,hጀ 0.043 200.0 jጀ 0.043 100.0 㔚࿶ଐሽဳ นᄌᛶ᛫4) ዉ૕ጀ 13.28 5.0 ⊒↢ߔࠆࡁࠗ࠭ߦ෸߷ߔ㕒㔚ኈ㊂ߣᛶ᛫ߩᓇ㗀ࠍᬌ⸛ ߔࠆߚ߼㧘ోߡߩጀߩ⚿᥏☸⇇ߩ㕒㔚ኈ㊂ߣ⚿᥏☸ሶߩ ᛶ᛫ࠍ⴫㧝ߦ␜ߒߚ୯ߩ 1/5㨪5 ୚ߣߒ㧘⊒↢ߔࠆࡁࠗ࠭ ᵄᒻࠍ࿁〝ࠪࡒࡘ࡟࡯࠲ߢ᳞߼ߚ㧚⚿᥏☸⇇ߩ㕒㔚ኈ㊂ ࠍᄌൻߐߖߚ႐วߩࡁࠗ࠭ᵄᒻࠍ࿑ 3 ߦ㧘⚿᥏☸ሶߩᛶ ᛫ࠍᄌൻߐߖߚ႐วߩࡁࠗ࠭ᵄᒻࠍ࿑ 4 ߦ␜ߔ㧚޿ߕࠇ ߩ႐วߦ߅޿ߡ߽ࡁࠗ࠭ߪࠬࠗ࠶࠴ࠍ off ߦߒߚ⍍㑆ߦ ↢ߓߡ޿ߚߚ߼㧘ࠬࠗ࠶࠴ off ߩㇱಽࠍ᜛ᄢߒߡ␜ߒߚ㧚㪄㪈㪌㪄㪈㪇㪄㪌㪇㪌㪈㪇㪇㪅㪐㪐㪈㪅㪇㪋㪈㪅㪇㪐㪈㪅㪈㪋 ᤨ㑆㩷㪲㫄㫊㪴㔚࿶㩷㪲㪭㪴㪚㪑㪌୚ 㪚㪑㪉୚ 㪚㪑㪈୚ 㪚㪑㪈㪆㪉㪚㪑㪈㪆㪌㪄㪈㪌㪄㪈㪇㪄㪌㪇㪌㪈㪇㪇㪅㪐㪐㪈㪅㪇㪋㪈㪅㪇㪐㪈㪅㪈㪋 ᤨ㑆㩷㪲㫄㫊㪴㔚࿶㩷㪲㪭㪴㪩㪑㪌୚ 㪩㪑㪉୚ 㪩㪑㪈୚ 㪩㪑㪈㪆㪉㪩㪑㪈㪆㪌㪩㪑㪈㪆㪈㪇 ࿑ 1 ࡃ࡝ࠬ࠲ߩ╬ଔ࿁〝ࡕ࠺࡞

Fig.1 Equivalent circuit of ceramic varistor.

⴫ 1 ╬ଔ࿁〝ߩࡄ࡜ࡔ࡯࠲ Table 1. Parameter of equivalent circuit.

࿑ 4 ోߡߩጀߩᛶ᛫ R ߇ᄌൻߒߚߣ߈ߩࡁࠗ࠭ᵄᒻ Fig.4 Calculated noise waveform when the resistance R

at all layer were changed.

࿑ 3 ోߡߩጀߩ㕒㔚ኈ㊂ C ߇ᄌൻߒߚߣ߈ߩࡁࠗ࠭ᵄᒻ Fig.3 Calculated noise waveform when the capacitance C

at all layer were changed.

ࡃ࡝ࠬ࠲ߩ╬ଔ࿁〝

ࡑࠗࠢࡠࡕ࡯࠲ㇱ

40ǡ

1mH

10V

࿑ 2 ࠪࡒࡘ࡟࡯࡚ࠪࡦ࿁〝 Fig.2 Simulated circuit.

a b aጀ cጀ eጀ gጀ iጀ bጀ dጀ fጀ hጀ jጀ ዉ૕ጀ Ca Ca Cb Cc Cc Cd Cd Cf Ce Ce Cf Ch Cg Cg Ch Cj Ci Ci Cj Ccon Cb Rcon Ri Rg Re Rc Ra Rb Rd Rf Rh Rj

(3)

࿑ 3 ߦ␜ߔࠃ߁ߦ⊒↢ߔࠆࡁࠗ࠭ᵄᒻߦߪ⚿᥏☸⇇ߩ 㕒㔚ኈ㊂ߩᓇ㗀߇ᄢ߈ߊ⃻ࠇߚ㧚⊒↢ߔࠆࡁࠗ࠭ߩࡇ࡯ ࠢ୯ߪ㕒㔚ኈ㊂ߩჇടߦᓥ޿ᷫዋߒ㧘ࡇ࡯ࠢ୯߹ߢߩᤨ 㑆߇㐳ߊߥࠆ௑ะߦ޽ࠆ㧚߹ߚ㧘ࡁࠗ࠭߇෼᧤ߔࠆ߹ߢ ߩᤨ㑆߇㐳ߊߥࠆߎߣ߇ࠊ߆ࠆ㧚⚿᥏☸ሶߩᛶ᛫ࠍᄌൻ ߐߖߚ႐วߦߪ㧘ᛶ᛫ߩჇടߦࠃࠅ㧘ࡁࠗ࠭ᵄᒻߩࡇ࡯ ࠢ୯ߪჇടߒߚ㧚ࡁࠗ࠭߇෼᧤ߔࠆ߹ߢߩᤨ㑆ߦߪᄢ߈ ߥᄌൻߪ⷗ࠄࠇߥ޿㧚ోߡߩጀߩ㕒㔚ኈ㊂㧯ߣᛶ᛫㧾ࠍ ᄌൻߐߖߚ႐วߩࡁࠗ࠭ߩࡇ࡯ࠢ୯ߩᄌൻࠍ࿑ 5 ߦ␜ߔ㧚 ห࿑߆ࠄ߽㕒㔚ኈ㊂߇ᄢ߈ߊ㧘߹ߚ㧘ᛶ᛫߇ዊߐߊߥࠆ ߎߣߦࠃࠅ⊒↢ߔࠆࡁࠗ࠭ߩࡇ࡯ࠢ୯߇ᷫዋߔࠆߎߣ߇ ࠊ߆ࠆ㧚߹ߚ㧘ᛶ᛫ࠃࠅ㕒㔚ኈ㊂ߩᄌൻߩᣇ߇⊒↢ߔࠆ ࡁࠗ࠭ߦ෸߷ߔᓇ㗀߇ᄢ߈޿ߎߣ߇ࠊ߆ࠆ㧚 ⚿᥏☸⇇ߩ㕒㔚ኈ㊂ߣ⚿᥏☸ሶߩᛶ᛫߇ᄌൻߒߚ႐ว ߩࡃ࡝ࠬ࠲ߩ㔚᳇⊛․ᕈߣߒߡ㧘ోߡߩጀߩ㕒㔚ኈ㊂ C ߣᛶ᛫ R ࠍᄌൻߐߖߚ႐วߩวᚑࠗࡦࡇ࡯࠳ࡦࠬߩᄢ߈ ߐߩ๟ᵄᢙଐሽᕈࠍ᳞߼ߚ㧚࿑ 6 ߅ࠃ߮࿑ 7 ߦ㕒㔚ኈ㊂ Cߣᛶ᛫ R ࠍᄌൻߐߖߚߣ߈ߩวᚑࠗࡦࡇ࡯࠳ࡦࠬߩ๟ ᵄᢙଐሽᕈࠍߘࠇߙࠇ␜ߔ㧚ోߡߩጀߩ㕒㔚ኈ㊂ C ߇ᷫ ዋߔࠆߎߣߦࠃࠅ㧘100kHz ࠃࠅૐ޿๟ᵄᢙߦ߅ߌࠆวᚑ ࠗࡦࡇ࡯࠳ࡦࠬ߇Ⴧടߒߡ޿ࠆ㧚߹ߚ㧘ోߡߩጀߩᛶ᛫ R߇Ⴧടߒߚ႐วߦ߽วᚑࠗࡦࡇ࡯࠳ࡦࠬߪჇടߒߡ޿ ࠆ㧚㕒㔚ኈ㊂߇ᷫዋߒߚ႐ว߅ࠃ߮ᛶ᛫߇Ⴧടߒߚ႐ว ߣ߽ߦ㧘ࡁࠗ࠭ߩࡇ࡯ࠢ୯߇Ⴧടߔࠆߎߣߪ㧘วᚑࠗࡦ ࡇ࡯࠳ࡦࠬߩჇടߣ㑐ㅪ߇⷗ࠄࠇࠆ㧚ࡁࠗ࠭ߩ๟ᵄᢙߪ ᢙ10kHz㨪ᢙ 100kHz ߣ⠨߃ࠄࠇ㧘⚿᥏☸ሶౝߩᛶ᛫ࠍ ᄌൻߐߖࠆ႐วࠃࠅ☸⇇ߩ㕒㔚ኈ㊂ࠍᄌൻߐߖߚ႐วߩ ᣇ߇ߎߩ๟ᵄᢙᏪၞߢߩวᚑࠗࡦࡇ࡯࠳ࡦࠬߩᄌൻ߇ᄢ ߈ߊ㧘ߎߩߚ߼㧘ࡁࠗ࠭ᵄᒻߦ෸߷ߔᓇ㗀߽ᄢ߈ߊ⃻ࠇ ࠆߣ⠨߃ࠄࠇࠆ㧚㪄㪈㪌㪄㪈㪇㪄㪌㪇㪇㪅㪈㪈㪈㪇 ోጀ䈱㕒㔚ኈ㊂㪚䈍䉋䈶 ᛶ᛫㪩䈱୚₸㩷㩷㩷㩷䌛୚䌝䊉䉟䉵䈱䊏䊷䉪 ୯㩷㪲㪭㪴㪚㪩㪇㪈㪇㪇㪉㪇㪇㪊㪇㪇㪋㪇㪇㪌㪇㪇㪍㪇㪇㪎㪇㪇㪈㪅㪇㪜㪂㪇㪋㪈㪅㪇㪜㪂㪇㪌㪈㪅㪇㪜㪂㪇㪍 ๟ᵄᢙ 㪲㪟㫑㪴 วᚑ䉟䊮䊏䊷䉻䊮䉴㪲㱅㪴㪚㪑㪈㪇୚ 㪚㪑㪌୚ 㪚㪑㪉୚ 㪚㪑㪈୚ 㪚㪑㪈㪆㪉㪚㪑㪈㪆㪌㪚㪑㪈㪆㪈㪇㪇㪌㪇㪈㪇㪇㪈㪌㪇㪉㪇㪇㪉㪌㪇㪊㪇㪇㪈㪅㪇㪜㪂㪇㪋㪈㪅㪇㪜㪂㪇㪌㪈㪅㪇㪜㪂㪇㪍 ๟ᵄᢙ 㪲㪟㫑㪴 วᚑ 䉟䊮䊏䊷䉻䊮䉴㪲㱅㪴 _{㪩㪑㪈㪇୚} 㪩㪑㪌୚ 㪩㪑㪉୚ 㪩㪑㪈୚ 㪩㪑㪈㪆㪉㪩㪑㪈㪆㪌㪩㪑㪈㪆㪈㪇 3. ࡁࠗ࠭ๆ෼․ᕈߩ⸃ᨆ ᣢߦႎ๔ߒߡ޿ࠆࠃ߁ߦ4㧕_{㧘ࡃ࡝ࠬ࠲ౝㇱߩ㔚ᵹߪᄙ} ߊ߇⴫㕙߆ࠄౝㇱߦะ߆޿㧘ዉ૕ጀࠍㅢࠅ㧘ౣ߮⴫㕙߳ ߽ߤࠆߣ޿߁⚻〝ࠍߚߤࠆ㧚࿑ 8 ߦฦጀࠍᵹࠇࠆ㔚ᵹᵄ ᒻࠍ␜ߔ㧚 ߒ߆ߒ㧘ࡃ࡝ࠬ࠲ౝㇱߦ߅޿ߡ㧘ฦጀߩ㕒㔚ኈ㊂߿ᛶ ᛫߇ࡁࠗ࠭ๆ෼․ᕈߦߤߩࠃ߁ߥᓇ㗀ߒߡ޿ࠆߩ߆ߪ᣿ ࠄ߆ߢߪߥ޿㧚ߎߩߚ߼㧘ฦጀߩ㕒㔚ኈ㊂ߣᛶ᛫߇ࡁࠗ ࠭ᵄᒻߦ෸߷ߔᓇ㗀ߦߟ޿ߡᬌ⸛ߔࠆߚ߼㧘1 ጀߛߌߩ 㕒㔚ኈ㊂ߣᛶ᛫ࠍ 1/5㨪5 ୚⒟ᐲߩ▸࿐ߢᄌൻߐߖ㧘⊒↢ ߔࠆࡁࠗ࠭ࠍ᳞߼ߚ㧚 ․ቯߩጀߩ⚿᥏☸⇇ߩ㕒㔚ኈ㊂ࠍᄌൻߐߖߚ႐วߦࡃ ࡝ࠬ࠲ߩ╬ଔ࿁〝ࡕ࠺࡞ߩਔ┵ߢ⊒↢ߔࠆࡁࠗ࠭ᵄᒻࠍ ࿑ 9㨪12 ߦ㧘߹ߚ㧘⊒↢ߔࠆࡁࠗ࠭ߩࡇ࡯ࠢ୯ࠍ࿑ 13 ߦ␜ߔ㧚⴫㕙ጀߩ㕒㔚ኈ㊂ Caߩᄌൻߦࠃࠆࡁࠗ࠭ߩᵄᒻ ߩᄌൻߪ࿑ 9 ߦ␜ߔࠃ߁ߦ޽߹ࠅᄢ߈ߊߥߊ㧘10 ୚⒟ᐲ ߦᄢ߈ߊᄌൻߐߖࠆߣࡁࠗ࠭߇ᷫዋߔࠆ㧚ᰴߦ⴫㕙ߦု ⋥ߥᣇะߩ㕒㔚ኈ㊂ Cbࠍᄌൻߐߖߚ႐วߦߪ㧘ࡁࠗ࠭ᵄ ࿑ 5 ోߡߩጀߩ㕒㔚ኈ㊂㧯߅ࠃ߮ᛶ᛫㧾߇ ᄌൻߒߚߣ߈ߩࡁࠗ࠭ߩࡇ࡯ࠢ୯

Fig.5 Peak of noise waveform when the capacitance C and the resistance R at all layer were changed.

࿑ 6 ోߡߩጀߩ㕒㔚ኈ㊂㧯߇ᄌൻߒߚߣ߈ߩ วᚑࠗࡦࡇ࡯࠳ࡦࠬ

Fig.6 Calculated impedance of varistor when the capacitance C at all layer were changed.

࿑ 7 ోߡߩጀߩᛶ᛫㧾߇ᄌൻߒߚߣ߈ߩ วᚑࠗࡦࡇ࡯࠳ࡦࠬ

Fig.7 Calculated impedance of the varistor when the resistance R at all layer were changed.

(4)

ᒻ߇ᄢ߈ߊᄌൻߒ㧘Cbߩᓇ㗀߇ᄢ߈޿ߎߣ߇ࠊ߆ࠆ㧚Cb ߇ᄢ߈ߊߥࠆߣࡁࠗ࠭ߩࡇ࡯ࠢ୯ߪᷫዋߔࠆ߇㧘⸃ᨆࠍ ⴕߞߚᤨ㑆ౝߢߪࡁࠗ࠭ߩᝄേߪ෼᧤ߒߥ߆ߞߚ㧚࿑ 11 ߪ㕒㔚ኈ㊂ Ccࠍᄌൻߐߖߚ႐วࠍ␜ߒߡ޿ࠆ㧚࿑ߩࠃ߁ ߦ㧘㕒㔚ኈ㊂ߩᄌൻߦࠃࠆࡁࠗ࠭ᵄᒻߩᄌൻߪ߶ߣࠎߤ ⷗ࠄࠇߥ߆ߞߚ㧚࿑ 13 ߦ␜ߔࠃ߁ߦ㧘ࠃࠅౝㇱߩ⴫㕙ߦ ᐔⴕߥᣇะߩ㕒㔚ኈ㊂ Ce㧘Cg㧘Ciߦߟ޿ߡ߽ Ccߣห᭽ ߩ௑ะ߇޽ࠅ㧘ࡃ࡝ࠬ࠲ߩౝㇱߦⴕߊߦᓥߞߡ⊒↢ߔࠆ ࡁࠗ࠭ߦ෸߷ߔ㕒㔚ኈ㊂ߩᓇ㗀ߪዊߐߊߥࠆ⚿ᨐ߇ᓧࠄ ࠇߚ㧚࿑ 12 ߦ㕒㔚ኈ㊂ Cdࠍᄌൻߐߖߚ႐วࠍ␜ߔ㧚࿑ ߩࠃ߁ߦ㧘 Cdߩᄌൻߦࠃࠅࡁࠗ࠭ᵄᒻߪᄌൻߒ㧘㕒㔚 ኈ㊂ߩჇടߦᓥ޿⊒↢ߔࠆࡁࠗ࠭ߪᷫዋߔࠆ௑ะߦ޽ࠆ㧚 ࠃࠅౝㇱߩ⴫㕙ߦု⋥ߥᣇะߩ㕒㔚ኈ㊂ Cf㧘Ch㧘Cjߦߟ ޿ߡ߽ Cdߣห᭽ߩ௑ะ߇޽ࠅ࿑ 13 ߦ␜ߔࠃ߁ߦ㧘ౝㇱ ߦⴕߊߦᓥߞߡ⊒↢ߔࠆࡁࠗ࠭ߦ෸߷ߔ㕒㔚ኈ㊂ߩᓇ㗀 ߪዊߐߊߥࠆߣ޿߁⚿ᨐ߇ᓧࠄࠇߚ㧚ዉ૕ጀߩ㕒㔚ኈ㊂ Cconࠍᄌൻߐߖߚ႐วߦߪ㧘Ccࠍᄌൻߐߖߚ႐วߣ߶߷ ห᭽ߩ௑ะࠍ␜ߒ⊒↢ߔࠆࡁࠗ࠭ߦ෸߷ߔᓇ㗀ߪዊߐ߆ ߞߚ㧚એ਄ߩߎߣ߆ࠄ⴫㕙ߦㄭ޿ጀߩ⚿᥏☸⇇ߩ㕒㔚ኈ ㊂㧘․ߦ⴫㕙ߦု⋥ߥᣇะߩ㕒㔚ኈ㊂ߪ⊒↢ߔࠆࡁࠗ࠭ ߦ෸߷ߔᓇ㗀߇ᄢ߈ߊ㧘㕒㔚ኈ㊂ߩჇടߦᓥ޿㧘ࡁࠗ࠭ ߩࡇ࡯ࠢ୯ߪᷫዋߔࠆߣ޿߁⚿ᨐ߇ᓧࠄࠇߚ㧚 ᰴߦ⚿᥏☸ሶߩᛶ᛫ࠍᄌൻߐߖߚ႐วߩࡁࠗ࠭ᵄᒻࠍ ࿑ 14 ߅ࠃ߮࿑ 15 ߦ␜ߔ㧚࿑ 14 ߪ⴫㕙ጀߩᛶ᛫ࠍᄌൻߐ ߖߚ႐วߩࡁࠗ࠭ᵄᒻࠍ␜ߒߡ޿ࠆ㧚ᛶ᛫ߩᓇ㗀ߪᄢ߈ ߊߪ⃻ࠇߡ޿ߥ޿߇㧘ᛶ᛫ߩჇടߦࠃࠅࡁࠗ࠭ߩࡇ࡯ࠢ ୯ߪࠊߕ߆ߦჇടߒߚ㧚ߎࠇߪዉ૕ጀࠍ㒰ߊోߡߩጀߩ ᛶ᛫ߦߟ޿ߡ߽߶߷ห᭽ߩ⚿ᨐ߇ᓧࠄࠇߚ㧚࿑ 15 ߦዉ૕ ጀߩᛶ᛫ Rconࠍᄌൻߐߖߚ႐วߩࡁࠗ࠭ᵄᒻࠍ␜ߔ㧚㪄㪇㪅㪊㪄㪇㪅㪉㪌㪄㪇㪅㪉㪄㪇㪅㪈㪌㪄㪇㪅㪈㪄㪇㪅㪇㪌㪇㪇㪅㪇㪌㪈㪈㪅㪇㪈㪈㪅㪇㪉㪈㪅㪇㪊㪈㪅㪇㪋㪈㪅㪇㪌 ᤨ㑆㪲㫄㫊㪼㪺㪴㔚ᵹ䇭㪲㪘㪴㪠㪸㪠㪹㪠㪺㪠㪻㪠㪼㪠㪽㪠㪾㪠㪿㪠㫀㪠㫁㪄㪈㪇㪄㪌㪇㪌㪈㪈㪅㪇㪌㪈㪅㪈 ᤨ㑆㩷㪲㫄㫊㪴㔚࿶ 㪲㪭㪴㪚㪸㪑㪈㪇୚ 㪚㪸㪑㪌୚ 㪚㪸㪑㪉୚ 㪚㪸㪑㪈୚ 㪚㪸㪑㪈㪆㪉㪚㪸㪑㪈㪆㪌㪄㪈㪌㪄㪈㪇㪄㪌㪇㪌㪈㪈㪅㪇㪌㪈㪅㪈 ᤨ㑆㩷㪲㫄㫊㪴㔚࿶ 㩷㪲㪭㪴㪚㪹㪑㪌୚ 㪚㪹㪑㪉୚ 㪚㪹㪑㪈୚ 㪚㪹㪑㪈㪆㪉㪚㪹㪑㪈㪆㪌㪄㪈㪇㪄㪌㪇㪌㪈㪈㪅㪇㪌㪈㪅㪈 ᤨ㑆㩷㪲㫄㫊㪴㔚࿶ 㪲㪭㪴㪚㪺㪑㪌୚ 㪚㪺㪑㪉୚ 㪚㪺㪑㪈୚ 㪚㪺㪑㪈㪆㪉㪚㪺㪑㪈㪆㪌㪄㪈㪇㪄㪌㪇㪌㪈㪈㪅㪇㪌㪈㪅㪈 ᤨ㑆㪲㫄㫊㪴㔚࿶㩷㪲㪭㪴㪚㪻㪑㪌୚ 㪚㪻㪑㪉୚ 㪚㪻㪑㪈୚ 㪚㪻㪑㪈㪆㪉㪚㪻㪑㪈㪆㪌 ࿑ 12 Cd߇ᄌൻߒߚߣ߈ߩࡁࠗ࠭ᵄᒻ Fig.12 Calculated noise waveform.

(Cd changed)

࿑ 9 Ca߇ᄌൻߒߚߣ߈ߩࡁࠗ࠭ᵄᒻ Fig.9 Calculated noise waveform.

(Ca changed)

࿑ 10 Cb߇ᄌൻߒߚߣ߈ߩࡁࠗ࠭ᵄᒻ Fig.10 Calculated noise waveform.

(Cb changed).

࿑ 11 Cc߇ᄌൻߒߚߣ߈ߩࡁࠗ࠭ᵄᒻ Fig.11 Calculated noise waveform.

(Cc changed) .

࿑ 8 ฦጀߩ㔚ᵹᵄᒻ Fig.8 Calculated current in the each layer.

(5)

㪄㪈㪍㪄㪈㪋㪄㪈㪉㪄㪈㪇㪄㪏㪄㪍㪄㪋㪚㪸㪚㪹㪚㪺㪚㪻㪚㪼㪚㪽㪚㪾㪚㪿㪚㫀㪚㫁㪚㪺㫆㫅 ᄌൻ䈘䈞䈢㕒㔚ኈ㊂䊉䉟䉵䈱䊏䊷䉪 ୯ 㩷㪲㪭㪴㪈㪇୚ 㪌୚ 㪉୚ 㪈୚ 㪈㪆㪉㪈㪆㪌㪈㪆㪈㪇 ࡁࠗ࠭ߩࡇ࡯ࠢ୯ߪዉ૕ጀߩᛶ᛫߇ᷫዋߔࠆߦᓥ޿ᷫዋ ߒߡ޿ࠆ㧚ᛶ᛫ߦ㑐ߒߡߪ⚿᥏☸ሶߩᛶ᛫ߪᧄ⎇ⓥߢⴕ ߞߚ▸࿐ߢߪࡁࠗ࠭ๆ෼ߦᄢ߈ߥᓇ㗀ߪਈ߃ߕ㧘ዉ૕ጀ ߩᛶ᛫߇ࡁࠗ࠭ๆ෼ߦᓇ㗀ࠍ෸߷ߔߎߣ߇␜ߐࠇߚ㧚 ⸃ᨆߦ↪޿ߚ࠮࡜ࡒ࠶ࠢࡃ࡝ࠬ࠲ߪ⴫㕙ౣ㉄ൻဳߩ࡝ ࡦࠣࡃ࡝ࠬ࠲ߢ޽ࠆߚ߼㧘ᾲಣℂ᷷ᐲ߿ᾲಣℂᤨ㑆ߥߤ ߢฦጀߩ☸⇇ߩ㕒㔚ኈ㊂߿⚿᥏☸ሶߩᛶ᛫ࠍ೙ᓮߔࠆ੐ ߇ߢ߈㧘߹ߚ㧘㔚ᭂ㑆㓒ߩᄌᦝߢ᳓ᐔᣇะߩ㕒㔚ኈ㊂߿ ᛶ᛫ࠍ೙ᓮߔࠆ੐߇ߢ߈ࠆ㧚ߘߎߢ㧘ฦጀߩ㕒㔚ኈ㊂ߣ ᛶ᛫߇⊒↢ߔࠆࡁࠗ࠭ߩᷫዋߦ෸߷ߔᓇ㗀ࠍߐࠄߦ⹦ߒ ߊ⺞ߴࠆߚ߼ߦᰴߩࠃ߁ߥ⸃ᨆࠍⴕߞߚ㧚ᆎ߼ߦ a ጀߩ 㕒㔚ኈ㊂ߩߺࠍ 2 ୚ߦჇട㧘ᰴߦ a ጀߣ b ጀࠍ 2 ୚ߦჇ ട㧘a ጀ㨪c ጀࠍ 2 ୚ߦჇടߣ޿߁ࠃ߁ߦ㧘ฦጀߩ㕒㔚ኈ ㊂ࠍ⴫㕙߆ࠄౝㇱߦะ߆ߞߡᲑ㓏⊛ߦჇടߐߖߚ㧚߹ߚ㧘 ᛶ᛫ߩ႐วߦߪ㧘ᆎ߼ a ጀߩᛶ᛫ߩߺࠍ 1/10 ߦᷫዋ㧘ᰴ ߦ a ጀߣ b ጀࠍ 1/10 ߦᷫዋߣ޿߁ࠃ߁ߦ㧘ฦጀߩᛶ᛫ࠍ ⴫㕙߆ࠄౝㇱߦะ߆ߞߡᲑ㓏⊛ߦᷫዋߐߖߚ㧚 ࿑ 16 ߦ⚿᥏☸⇇ߩ㕒㔚ኈ㊂ߩ୯ࠍ⴫㕙߆ࠄౝㇱߦะ ߆ߞߡᲑ㓏⊛ߦჇടߐߖߡⴕߊ႐วߦࡃ࡝ࠬ࠲ਔ┵ߦ⊒ ↢ߔࠆࡁࠗ࠭ᵄᒻࠍ␜ߔ㧚⴫㕙ߦㄭ޿㕒㔚ኈ㊂ Cd߹ߢߪ 㕒㔚ኈ㊂ߩჇടߦࠃߞߡ⊒↢ߔࠆࡁࠗ࠭ߪᷫዋߒߚ㧚ߒ ߆ߒ㧘ߎࠇࠃࠅౝㇱߩ㕒㔚ኈ㊂ࠍჇടߐߖࠆߣ㧘ࡁࠗ࠭ ߪࠊߕ߆ߢߪ޽ࠆ߇Ⴧടߩ௑ะࠍ␜ߒߚ㧚 ⚿᥏☸ሶߩᛶ᛫ࠍࡃ࡝ࠬ࠲⴫㕙߆ࠄౝㇱߦะ߆ߞߡᲑ 㓏⊛ߦᷫዋߐߖߚ႐วߦ⊒↢ߔࠆࡁࠗ࠭ᵄᒻࠍ࿑ 17 ߦ ␜ߔ㧚࿑ߩࠃ߁ߦ⴫㕙߆ࠄౝㇱߦะ߆޿ᛶ᛫ࠍᲑ㓏⊛ߦ ᷫዋߐߖࠆߣ㧘ᛶ᛫ߩᷫዋߦࠃࠅᰴ╙ߦࡁࠗ࠭ߩࡇ࡯ࠢ ୯ߪᷫዋߒߚ㧚߹ߚ㧘ዉ૕ጀߩᛶ᛫ߩᷫዋߦࠃࠆࡁࠗ࠭ ᵄᒻߩࡇ࡯ࠢ୯ߩᷫዋ߇ᄢ߈޿ߎߣ߇ࠊ߆ࠆ㧚㪄㪈㪇㪄㪌㪇㪌㪈㪈㪅㪇㪌㪈㪅㪈 ᤨ㑆㪲㫄㫊㪴㔚࿶ 㪲㪭㪴㪩㪸㪑㪌୚ 㪩㪸㪑㪉୚ 㪩㪸㪑㪈୚ 㪩㪸㪑㪈㪆㪉㪩㪸㪑㪈㪆㪌㪄㪈㪇㪄㪌㪇㪌㪈㪈㪅㪇㪌㪈㪅㪈 ᤨ㑆㩷㪲㫄㫊㪴㔚࿶ 㩷㪲㪭㪴㪩㪺㫆㫅㪑㪌୚ 㪩㪺㫆㫅㪑㪉୚ 㪩㪺㫆㫅㪑㪈୚ 㪩㪺㫆㫅㪑㪈㪆㪉㪩㪺㫆㫅㪑㪈㪆㪌㪩㪺㫆㫅㪑㪈㪆㪈㪇 ⴫㕙߆ࠄౝㇱߦะ߆ߞߡ㕒㔚ኈ㊂ߩ୚₸ࠍ 1/5㨪5 ୚ ߦᲑ㓏⊛ߦᄌ߃㧘ߎߩߣ߈⊒↢ߔࠆࡁࠗ࠭ߩࡇ࡯ࠢ୯ࠍ ࿑ 18 ߦ␜ߔ㧚࿑߆ࠄ㕒㔚ኈ㊂ Cb߇ᄌൻߒߚߣ߈ߦࡁࠗ ࠭ߩࡇ࡯ࠢ୯߇ᄢ߈ߊᄌൻߔࠆߚ߼㧘Cbߩᓇ㗀߇ᄢ߈޿ ߎߣ߇ࠊ߆ࠆ㧚㕒㔚ኈ㊂ࠍჇടߐߖࠆ႐วߦߪ㧘㕒㔚ኈ ㊂ Cdࠃࠅౝㇱߩኈ㊂߇Ⴧടߔࠆߣ㧘ࡁࠗ࠭ߩࡇ࡯ࠢ୯ߪ Ⴧടߩ௑ะߦ޽ࠆ㧚ߎߩ௑ะߪ㕒㔚ኈ㊂ࠍ 5 ୚ߦߒߚߣ ߈ߦᄢ߈ߊߥߞߚ㧚৻ᣇ㧘㕒㔚ኈ㊂ࠍᷫዋߐߖࠆ႐วߦ ߪ㧘⴫㕙ߦㄭ޿ጀߩ㕒㔚ኈ㊂ߩᷫዋߦࠃࠅ㧘ࡁࠗ࠭ߩࡇ ࡯ࠢ୯ߪჇടߒߚ㧚߹ߚ㧘㕒㔚ኈ㊂ Cdࠃࠅౝㇱߩኈ㊂߇ ᷫዋߔࠆߣࡁࠗ࠭ߩࡇ࡯ࠢ୯ߪ⧯ᐓᷫዋߒߡ޿ࠆ㧚 ࿑ 16 ߅ࠃ߮࿑ 18 ߩ⚿ᨐ߆ࠄ㧘⊒↢ߔࠆࡁࠗ࠭ߩࡇ࡯ ࠢ୯ࠍᷫዋߐߖࠆߚ߼ߦߪ㧘⴫㕙ߦㄭ޿ጀߩ㕒㔚ኈ㊂ࠍ ᄢ߈ߊߒ㧘ࡃ࡝ࠬ࠲ౝㇱߩዉ૕ጀߦㄭ޿ጀߩ㕒㔚ኈ㊂ߪ ዊߐߊߔࠆߎߣ߇ലᨐ⊛ߢ޽ࠆߣ޿߁⚿ᨐ߇ᓧࠄࠇߚ㧚 ࿑ 15 Rcon߇ᄌൻߒߚߣ߈ߩࡁࠗ࠭ᵄᒻ Fig.15 Calculated noise waveform.

(Rcon changed)

࿑ 14 Ra߇ᄌൻߒߚߣ߈ߩࡁࠗ࠭ᵄᒻ Fig.14 Calculated noise waveform.

(Ra changed) ࿑ 13 ฦጀߩ㕒㔚ኈ㊂߇ᄌൻߒߚߣ߈ߩࡁࠗ࠭ߩࡇ࡯ࠢ୯

Fig.13 Peak of calculated noise waveform when the capacitance at the each layer was changed.

(6)

㪄㪏㪄㪍㪄㪋㪄㪉㪈㪈㪅㪇㪌 ᤨ㑆㪲㫄㫊㪴㔚࿶ 㩷㪲㪭㪴㫆㫉㫀㪾㫀㫅㪸㫃㪚㪸㩽㪚㪹㪑㪉୚ 㪚㪸䌾㪚㪻㪑㪉୚ 㪚㪸䌾㪚㪽㪑㪉୚ 㪚㪸䌾㪚㪿㪑㪉୚ 㪚㪸䌾㪚㫁㪑㪉୚ 㪚㪸䌾㪚㪺㫆㫅㪑㪉୚ 㪄㪏㪄㪍㪄㪋㪄㪉㪈㪈㪅㪇㪌 ᤨ㑆㩷㪲㫄㫊㪴㔚࿶ 㪲㪭㪴㫆㫉㫀㪾㫀㫅㪸㫃㪩㪸㩽㪩㪹㪑㪈㪆㪈㪇㪩㪸䌾㪩㪻㪑㪈㪆㪈㪇㪩㪸䌾㪩㪽㪑㪈㪆㪈㪇㪩㪸䌾㪩㪿㪑㪈㪆㪈㪇㪩㪸䌾㪩㫁㪑㪈㪆㪈㪇㪩㪸䌾㪩㪺㫆㫅㪑㪈㪆㪈㪇㪄㪈㪌㪄㪈㪇㪄㪌㪇㫆㫉㫀㪾㫀㫅㪸㫃㪚㪸㪚㪸䌾㪚㪹㪚㪸䌾㪚㪺㪚㪸䌾㪚㪻㪚㪸䌾㪚㪼㪚㪸䌾㪚㪽㪚㪸䌾㪚㪾㪚㪸䌾㪚㪿㪚㪸䌾㪚㫀㪚㪸䌾㪚㫁㪚㪸䌾㪚㪺㫆㫅㕒㔚ኈ㊂䉕ᄌൻ䈘䈞䈢ጀ 䊉䉟䉵䈱䊏䊷䉪 ୯ 㪲㪭㪴㪌୚ 㪉୚ 㪈㪆㪉㪈㪆㪌 4. ߹ߣ߼ ᧄ⎇ⓥߦ߅޿ߡߪ㧘⴫㕙ౣ㉄ൻဳ SrTiO3♽࠮࡜ࡒ࠶ࠢ ࡃ࡝ࠬ࠲ࠍౝㇱߩᓸ⚦᭴ㅧࠍ⠨ᘦߒߚ㔚᳇⊛ߥ╬ଔ࿁〝 ߦ⟎߈឵߃㧘⚿᥏☸⇇ߩ㕒㔚ኈ㊂ߣ⚿᥏☸ሶߩᛶ᛫߇ࡁ ࠗ࠭ๆ෼․ᕈߦ෸߷ߔᓇ㗀ߦߟ޿ߡ⸃ᨆߒߚ㧚ᓧࠄࠇߚ ߅߽ߥ⚿ᨐࠍએਅߦ␜ߔ㧚 (1)ࡕ࡯࠲ߢ⊒↢ߔࠆࡁࠗ࠭ߪ⚿᥏☸⇇ߩ㕒㔚ኈ㊂ߩჇ ടߦࠃࠅᷫዋߒߚ㧚 (2)ᧄ⎇ⓥߢⴕߞߚ▸࿐ౝߢߪ⚿᥏☸ሶߩᛶ᛫ߪࡁࠗ࠭ ๆ෼․ᕈߦ෸߷ߔᓇ㗀ߪዊߐ߆ߞߚ㧚 (3)⴫㕙ߦㄭ޿ጀߩ⚿᥏☸⇇ߩ㕒㔚ኈ㊂߇Ⴧടߔࠆߎߣ ߦࠃࠅ㧘⊒↢ߔࠆࡁࠗ࠭ߩࡇ࡯ࠢ୯ߪᷫዋߒߚ㧚 (4)ࡃ࡝ࠬ࠲ౝㇱߩዉ૕ጀߦㄭ޿ጀߩ⚿᥏☸⇇ߩ㕒㔚ኈ ㊂߇ᷫዋߔࠆߎߣߦࠃࠅ㧘⊒↢ߔࠆࡁࠗ࠭ߩࡇ࡯ࠢ୯ ߪ⧯ᐓᷫዋߒߚ㧚 (5)ዉ૕ጀߩᛶ᛫߇ᷫዋߔࠆߎߣߦࠃࠅ㧘⊒↢ߔࠆࡁࠗ࠭ ߪᷫዋߒߚ㧚 એ਄ߩ╬ଔ࿁〝ࡕ࠺࡞ࠍ↪޿ߚࠪࡒࡘ࡟࡯࡚ࠪࡦߩ⚿ ᨐ߆ࠄ㧘࠮࡜ࡒ࠶ࠢࡃ࡝ࠬ࠲ߩࡁࠗ࠭ๆ෼․ᕈߪࡃ࡝ࠬ ࠲ߩ⴫㕙ߦㄭ޿ጀߩ⚿᥏☸⇇ߩ㕒㔚ኈ㊂ࠍᄢ߈ߊ㧘ዉ૕ ጀߦㄭ޿ጀߩ㕒㔚ኈ㊂ߪዊߐߊ㧘߹ߚ㧘ዉ૕ጀߩᛶ᛫ࠍ ዊߐߊߔࠆߎߣߢᡷༀ߇࿑ࠇࠆߎߣ߇᣿ࠄ߆ߣߥߞߚ㧚 ߹ߚ㧘એ਄ߩ⚿ᨐߪ㧘࠮࡜ࡒ࠶ࠢࡃ࡝ࠬ࠲ߩ⴫㕙ㄭߊߣ ౝㇱߩ㕒㔚ኈ㊂߇ᷝട‛ߩടᷫ߿὾ᚑ᷷ᐲ㧘὾ᚑᤨ㑆㧘 ὾ᚑ㔓࿐᳇ߥߤߢ޽ࠆ⒟ᐲ೙ᓮน⢻ߢ޽ࠆߎߣ߆ࠄ㧘ࠃ ࠅലᨐ⊛ߦࡁࠗ࠭ࠍๆ෼ߔࠆߚ߼ߩ࠮࡜ࡒ࠶ࠢࡃ࡝ࠬ࠲ ߩ⸳⸘ߦᓎ┙ߚߖࠆߎߣ߇น⢻ߢ޽ࠆߣ⠨߃ࠄࠇࠆ㧚 ᣣ㗃ࠃࠅߏഥജ㗂޿ߚዊ═ේᱜ᳁ࠍᆎ߼ߣߔࠆ TDK 㧔ᩣ㧕SA ੐ᬺㇱߩ㑐ଥฦ૏ߦᗵ⻢↳ߒ਄ߍ߹ߔ㧚 ෳ⠨ᢥ₂ 1) ㋈ᧁ㓷ผ,ᩊ↰ାᖝ,ศ᧛᣹㧦㔚ቇ,115-A,(1995)384 2) ㋈ᧁ㓷ผ,ᩊ↰ାᖝ,ศ᧛᣹㧦㔚ቇ,116-A,(1996)177 3) ㋈ᧁ㓷ผ,ᩊ↰ାᖝ,ศ᧛᣹㧦㕒㔚᳇ቇળ⹹, 24(2000)343 4) ㋈ᧁ㓷ผ,ᩊ↰ାᖝ,ศ᧛᣹㧦㕒㔚᳇ቇળ⹹, 25(2001)153 ࿑ 16 㕒㔚ኈ㊂ࠍᲑ㓏⊛ߦჇടߐߖߚߣ߈ߩࡁࠗ࠭ᵄᒻ

Fig.16 Calculated noise waveform when the capacitance of the each layer were increased step by step from the surface layer toward the conduction layer.

࿑ 17 ᛶ᛫ࠍᲑ㓏⊛ߦᷫዋߐߖߚߣ߈ߩࡁࠗ࠭ᵄᒻ Fig.17 Calculated noise waveform when the resistance of the each

layer were decreased step by step from the surface layer toward the conduction layer..

࿑ 18 㕒㔚ኈ㊂߇ᄌൻߒߚߣ߈ߩࡁࠗ࠭ᵄᒻߩࡇ࡯ࠢ୯ Fig.18 Peak of noise waveform when the capacitance of the each

layer were changed step by step from the surface layer toward the conduction layer.