** ⑺↰ᄢቇᎿቇ⾗Ḯቇㇱ᧚ᢱᎿቇ⑼㧚 Department of Materials Science and Engineering, Faculty of Engineering and Resource Science, Akita University

2007 ᐕ 7 ᦬ 17 ᣣฃℂ

* ╙ 35 ࿁ᣣᧄ⚿᥏ᚑ㐳࿖ౝળ⼏㧔 2005 ᐕ 8 ᦬㧘᧲ᐢፉ Ꮢ㧕ߦ߅޿ߡ৻ㇱ⊒⴫

** ⑺↰ᄢቇᎿቇ⾗Ḯቇㇱ᧚ᢱᎿቇ⑼㧚 Department of Materials Science and Engineering, Faculty of Engineering and Resource Science, Akita University

⎇ⓥႎ๔ ᒁ߈਄ߍ Cu Ꮧ⭯ว㊄⚿᥏ߦ߅ߌࠆォ૏ᒻᚑߩ ଦㅴߣᛥ೙ *

੹ᷡ᳓㓶ੑ

Promotion and Suppression of Dislocation Formation in Czochralski-Grown Copper Dilute Alloy Crystals*

Yuji Imashimizu

Abstract

Some peculiar dislocation distributions formed in the Czochralski-grown crystals of Cu-0.05~0.2at%Al and Cu-0.02~0.1 at%Ni alloys were examined by use of etching techniques which distinguish the kinds of dislocation.

For the copper-aluminium dilute alloy crystals, the dislocation formation was suppressed resulting in grown crystals of low dislocation density compared with the copper crystal, while the substructure of an array of polygon walls parallel to a ޛ 112 ޜ direction or a polygon boundary crossing with an array of slip traces at right angle were occasionally formed. On the other hand, the slip traces in one or two ޛ 110 ޜ directions were prominently formed for the copper–nickel dilute alloy crystals. These effects suggest that some macroscopic compositional stress which probably arised from the difference in solute concentration between the center and periphery overlapped with the thermal stress during pulling of the copper dilute alloy crystal, and caused the asymmetric dislocation distributions depending on the deviation of the crystal center from the rotation axis. 㩷

㩷

㩷 㪈㪅㩷 ✜㩷 ⸒㩷

㪈㪅㪈㩷 ᒁ䈐਄䈕⚿᥏䈱ォ૏ᒻᚑ䈮෸䈿䈜ṁ⾰ᷝടലᨐ㩷 Cz 㧔ᒁ߈਄ߍ㧕 Si ⚿᥏

㧘 LEC 㧔ᶧ૕ኽᱛᒁ߈਄

ߍ㧕 GaAs ⚿᥏

߅ࠃ߮ InP ⚿᥏

ߢߪ㧘ㆡᒰߥṁ

⾰ࠍ࠼࡯ࡊߔࠆߣ⢒ᚑ⚿᥏ߩォ૏ኒᐲ߇⪺ߒߊૐᷫ

ߔࠆߎߣ߇⍮ࠄࠇߡ޿ࠆ㧚ਛߢ߽㧘 LEC GaAs ⚿᥏ߩ

࠼࡯ࡄࡦ࠻ߦࠃࠆォ૏ኒᐲߩૐᷫߪ㧘ૐォ૏ኒᐲൻ ߩ㔍ߒ޿ GaAs ⚿᥏ࠍήォ૏ൻߔࠆലᨐ߇޽ࠆߎߣ ߆ࠄ㧘ߘߩᯏ᭴ߦߟ޿ߡᄙߊߩ⎇ⓥ߇ߥߐࠇߚ㧚ߎ ࠇ߹ߢ㧘ṁ⾰ේሶߪ㧘 ( γ ) ォ૏ߣߩ⋧੕૞↪ߦࠃࠅ ᾲᔕജߦࠃࠆォ૏ߩㆇേࠍᛥ೙ߔࠆ

㧚 ( δ ) ォ

૏Ḯࠍ࿕⌕ߔࠆ

㧚 ( ε ) ὐᰳ㒱㓸วߦࠃࠆォ૏࡞࡯ࡊ ߥ޿ߒォ૏ߩᩭᒻᚑࠍᛥ೙ߔࠆ

㧚 ( ζ ) ಺⁁ォ૏ߩ

਄᣹ㆇേߦࠃࠆォ૏ᶖṌࠍଦㅴߔࠆ

㧘ߥߤߩ ᯏ᭴߇ឭ᩺ߐࠇߚ㧚ߎߩ߁ߜ㧘 ( γ ) ߩᯏ᭴ߦ㑐ߒߡ ߪ㧘⥃⇇ߖࠎᢿᔕജߩ᷹ቯ⚿ᨐߦࠃࠅ⺑᣿ߐࠇࠆߣ

޿߁ႎ๔

ߣᔅߕߒ߽⺑᣿ߢ߈ߥ޿ߣߔࠆႎ๔

(15),(16)

߇ߥߐࠇߡ޿ࠆ㧚ᓟ⠪ߢߪ㧘 LEC GaAs ⚿᥏ߩ

ォ૏ᒻᚑߪᾲᔕജߩᄢ߈ߐߩߺߦଐሽߒߥ޿ߣ޿߁

੐ታ㧘߹ߚ㧘ᓸ㊂ߩṁ⾰ᷝടߦࠃࠆ⚿᥏ߩ⎬ൻߪᾲ ᔕജߦࠃࠆォ૏ᒻᚑࠍᛥ೙ߔࠆߩߦචಽߢߥ޿ߣߔ ࠆታ㛎⚿ᨐߦࠃࠅ㧘 ( ε ) ߩᯏ᭴߿ṁ⾰ේሶߣὐᰳ㒱 ߣߩ⋧੕૞↪ࠍㅢߓߡォ૏ᒻᚑߪᛥ೙ߐࠇࠆߣ޿߁ ᯏ᭴߇⼏⺰ߐࠇߡ޿ࠆ㧚ߎߩࠃ߁ߦᒁ߈਄ߍ⚿᥏ߩ ṁ⾰ᷝടߦࠃࠆォ૏ኒᐲૐᷫߩᯏ᭴ߦߟ޿ߡߪ⎇ⓥ

⠪㑆ߦ⇣ߥࠆ⷗⸃߇޽ࠅᔅߕߒ߽᣿ࠄ߆ߢߪߥ޿㧚 㪈㪅㪉㩷 㪚㫌Ꮧ⭯ว㊄⚿᥏䈱ォ૏ᒻᚑ㩷

⪺⠪ࠄߪߎࠇ߹ߢ㧘ᒁ߈਄ߍᴺߦࠃࠅ৻ቯߩ᧦ઙ 㧔⚐ൻ Ar ᳇ᵹਛ , Ⲣᶧ㊂ 600 g 㧘ᒁ߈਄ߍㅦᐲ 1.7 ˜ 10

m/s, ⚿᥏࿁ォㅦᐲ 1 rad/s, ᚑ㐳ᣇ૏ [111] 㧕ߩ ਅߢ⋥ᓘ⚂ 10 mm, 㐳ߐ⚂ 70 mm ߩ Cu ⚿᥏߅ࠃ߮⒳ޘ ߩṁ⾰Ớᐲߩ Cu- Ꮧ⭯ Al ว㊄⚿᥏㧘 Cu- Ꮧ⭯ Au ว㊄⚿

᥏߅ࠃ߮ Cu- Ꮧ⭯ Ni ว㊄⚿᥏ߩᒁ߈਄ߍࠍⴕ޿㧘⢒ᚑ

⚿᥏ߩᚑ㐳ᣇะߦု⋥ߥ (111) ᢿ㕙ߦ߅ߌࠆォ૏ಽ Ꮣ ࠍ ⣣ 㘩 ᴺ ߦ ࠃ ࠅ ⺞ ߴ 㧘 ᰴ ߩ ࠃ ߁ ߥ ⚿ ᨐ ࠍ ᓧ ߚ

(17)~(20)

㧚

Cu ⚿᥏ߦߪ 5~7 ˜ 10

m

ߩኒᐲߩォ૏߇ᒻᚑߐࠇ㧘 ォ૏ߩᄢㇱಽߪಽᢔߒߡ޿ࠆ߇㧘ォ૏ࡇ࠶࠻߇ޛ 110 ޜ ߔߴࠅᣇะߦ㈩೉ߒߚߔߴࠅ᭴ㅧ㧔એᓟ̌ߔߴࠅォ

૏̍ߣ๭⒓㧕ࠍ฽ߺ㧘⚿᥏๟ㄝㇱߩォ૏ኒᐲߪਛᔃ

8

ㇱߦߊࠄߴߡ㜞޿

㧚ߎࠇߦኻߒߡ 0.1 㨪 0.2 at%Al ࠍᷝടߒߚ Cu- Ꮧ⭯ Al ว㊄⚿᥏ߢߪߔߴࠅォ૏ߩᒻ ᚑ߇ᛥ೙ߐࠇ㧘߹ߚ㧘⚿᥏ߩਛᔃㇱ߆ࠄ๟ㄝㇱ߳ඨ ᓘᣇะߦォ૏ኒᐲ߇Ⴧᄢߔࠆ௑ะ߇ᛥ೙ߐࠇ㧘ォ૏

ኒᐲߪ㧝ᩴએ਄ૐᷫߔࠆ

㧚 Cu- Ꮧ⭯ Au ว㊄⚿᥏ߦ ߅޿ߡ߽ォ૏ኒᐲૐᷫߩṁ⾰Ớᐲߩ▸࿐߅ࠃ߮ૐᷫ

₸ߪ⇣ߥࠆ߇㧘ห᭽ߩലᨐ߇޽ࠆ

㧚৻ᣇ㧘 0.02 㨪 0.1 at% ߩ Ni ࠍᷝടߒߚ Cu- Ꮧ⭯ Ni ว㊄⚿᥏ߩォ૏ኒ ᐲߪᒁ਄ߍ⚿᥏ߏߣߦ߫ࠄߟ߈߇ᄢ߈ߊ㧘 Ni ᷝടߩ ォ૏ᒻᚑߦ߅ࠃ߷ߔലᨐߪ᣿ࠄ߆ߢߪߥ޿߇㧘ߔߴ ࠅォ૏ߩᒻᚑ߇ଦㅴߐࠇࠆ௑ะ߇޽ࠅ㧘ォ૏ኒᐲߪ ᐔဋ⊛ߦߪ Cu ⚿᥏ࠃࠅ߻ߒࠈ㜞޿

㧚

ߎߩࠃ߁ߦ Cu ⚿᥏ߦ߅޿ߡ߽ GaAs ߿ InP ⚿᥏ߣห

᭽ߦ㧘ᓸ㊂ߩṁ⾰ᷝടߦࠃࠅォ૏ᒻᚑߪᛥ೙ߐࠇ㧘 ߘߩലᨐߪṁ⾰ర⚛ߩ⒳㘃߅ࠃ߮Ớᐲߦࠃߞߡ⇣ߥ ࠆ

㧚ߒ߆ߒߥ߇ࠄ㧘޿ߕࠇߩ Cu Ꮧ⭯ว㊄⚿᥏ ߣ߽ṁ⾰Ớᐲࠍ㜞ߊߔࠆߣォ૏ߩ㓸Ⓧߒߚࠢ࡜ࠬ࠲

࡯߅ࠃ߮ォ૏੝Ⴚ⇇߇ᒻᚑߐࠇ㧘ォ૏ኒᐲߪჇᄢߔ ࠆ㧚ߎߩലᨐߪ㧘ォ૏ኒᐲߩჇᄢߔࠆਅ㒢ߩṁ⾰Ớ ᐲ߇ฦว㊄⚿᥏ߩⲢᶧᚑ㐳ߦ߅ߌࠆ⚵ᚑ⊛ㆊ಄ළࠍ

⿠ߔ⥃⇇Ớᐲߩផቯ୯ߦ߶߷৻⥌ߔࠆߎߣ߆ࠄ㧘޿

ߕࠇ߽⚵ᚑ⊛ㆊ಄ළߦࠃࠆ࠮࡞⁁஍ᨆ᭴ㅧߩዉ౉ߦ ߣ߽ߥ߁ォ૏ᒻᚑߩߚ߼ߣ⠨߃ࠄࠇࠆ

㧚

਄ㅀߩ⚿ᨐߦ߅޿ߡ㧘⚐ Cu ⚿᥏ߩォ૏ߪߘߩඨᓘ ᣇะߩಽᏓ߆ࠄਥߦᾲᔕജߩ૞↪ߦࠃࠅᒻᚑߐࠇߚ ߣផኤߐࠇࠆ

㧚߹ߚ㧘ૐỚᐲߩ Cu- Ꮧ⭯ Al ว㊄޽

ࠆ޿ߪ Cu- Ꮧ⭯ Au ว㊄⚿᥏ߦ߅޿ߡߔߴࠅォ૏೉ߩ ᒻᚑ߇ᛥ೙ߐࠇ㧘߹ߚ㧘ォ૏ኒᐲ߇ඨᓘᣇะߦჇᄢ ߔࠆ௑ะ߇ᛥ೙ߐࠇ㧘ᐔဋ⊛ߦૐᷫߔࠆߩߪᾲᔕജ ߦࠃࠆォ૏ᒻᚑ߇ᛥ೙ߐࠇࠆߚ߼ߣ⠨߃ࠄࠇࠆ㧚ߒ ߆ߒߥ߇ࠄ㧘৻ᣇߦ߅޿ߡ㧘 0.1 㨪 0.2 at%Al ࠍ฽߻ૐ Ớᐲߩว㊄⚿᥏ߩਛߦߪ⚐ Cu ⚿᥏ߦߪᒻᚑߐࠇߥ

޿ࠃ߁ߥ㧘߹ߚ㧘 1at% એ਄ߩỚᐲߩ⚿᥏ߦᒻᚑߐࠇ ࠆ⚵ᚑ⊛ㆊ಄ළߦࠃࠆṁ⾰஍ᨆࠍߣ߽ߥ߁੝Ⴚ⇇ߣ ߪ࠲ࠗࡊߩ⇣ߥࠆ㧘੝Ⴚ⇇᭴ㅧ޽ࠆ޿ߪ੝Ⴚ⇇ߣߔ ߴࠅォ૏ࠍ฽߻․⇣ߥォ૏᭴ㅧ߇ᒻᚑߐࠇࠆߎߣ߇

޽ࠆ㧚ߐࠄߦ㧘 Cu ́ Ni ว㊄ߢߪ⚵ᚑ⊛ㆊ಄ළࠍ⿠ߎ ߐߥ޿ૐỚᐲߩ 0.02 㨪 0.1 at% ⚿᥏ߦߔߴࠅォ૏߇⪺

ߒߊᒻᚑߐࠇ㧘ォ૏ኒᐲߪ Cu ⚿᥏ߣห⒟ᐲߥ޿ߒ߻

ߒࠈ߿߿㜞ߊߥࠆ௑ะ߇޽ࠆ㧚ߎࠇࠄߩߎߣߪૐỚ ᐲߩ Cu Ꮧ⭯ว㊄⚿᥏ߢߪᓸ㊂ߩṁ⾰ᷝടߪ⚐ Cu ⚿ ᥏ߩォ૏ᒻᚑࠍᛥ೙ߔࠆ߇㧘⚵ᚑ⊛ㆊ಄ළߦࠃࠆṁ

⾰ߩ஍ᨆ᭴ㅧߩዉ౉ߣߪ⇣ߥࠆᯏ᭴ߦࠃߞߡォ૏ᒻ ᚑࠍଦㅴߔࠆ႐วߩ޽ࠆߎߣࠍ␜ߔ㧚

ᧄ⎇ⓥߢߪ㧘ᒁ߈਄ߍ Cu Ꮧ⭯ว㊄⚿᥏ߦ߅ߌࠆォ

૏ᒻᚑߩᛥ೙ߣ⚵ᚑ⊛ㆊ಄ළߦࠃࠆṁ⾰஍ᨆߣߪ⇣

ߥࠆォ૏ᒻᚑߩଦㅴലᨐߦߟ޿ߡ⍮⷗ࠍᓧࠆߚ߼ߦ㧘 Cu- Ꮧ⭯ Al ว㊄⚿᥏ߦ߅ߌࠆ․⇣ߥォ૏᭴ㅧ߅ࠃ߮

Cu- Ꮧ⭯ Ni ว㊄⚿᥏ߦ߅ߌࠆ⪺ߒ޿ߔߴࠅォ૏ߩᒻ ᚑࠍ⹦ߒߊ⺞ߴ㧘ᓸ㊂ṁ⾰ේሶߩォ૏ᒻᚑߦ߅ࠃ߷

ߔലᨐߦߟ޿ߡᬌ⸛ߒߚ㧚 㩷 㪉㪅㩷 ታ㛎ᣇᴺ㩷

వߩ⎇ⓥ

ߦ߅޿ߡ৻ቯߩ᧦ઙਅߢᒁ߈਄ߍ

ߚ Cu Ꮧ⭯ว㊄⚿᥏ߩ߁ߜ , ૐỚᐲߩ Cu-0.05 㨪 0.2at%

Al ว㊄⚿᥏߅ࠃ߮ Cu-0.02 㨪 0.1at%Ni ว㊄⚿᥏ߩᚑ㐳 ᣇะߦု⋥ߥ (111) ᢿ㕙ߩ৻ㇱ㧘ߐࠄߦᧃ┵ㇱߩ (111) ᢿ㕙ߩ․⇣ߥォ૏ಽᏓࠍォ૏⣣㘩ᴺߦࠃߞߡ⺞ߴߚ㧚 ᧄታ㛎ߢߪߣߊߦォ૏⣣㘩ᶧߦ಺⁁ォ૏ߣࠄߖࠎォ

૏ߣࠍ್೎ߔࠆ⣣㘩ᶧ㧔એᓟ㧘ਣᎹᶧߣ๭⒓㧕

߅ ࠃ߮ᱜ⽶ߩ಺⁁ォ૏ࠍ್೎ߔࠆ⣣㘩ᶧ㧔એ㒠㧘 Young ᶧߣ๭⒓㧕

ࠍ↪޿ߡ㧘ዉ౉ߐࠇߚォ૏ߩ⒳㘃ࠍ

⺞ߴߚ㧚࿃ߺߦ Cu ⚿᥏ࠍਣᎹᶧߦࠃߞߡ⣣㘩ߒߚ

(111) ᢿ㕙ࠍૐ୚₸㧔ኻ‛࡟ࡦ࠭ 10 㨪 12 ୚㧕ߩశቇ㗼

ᓸ㏜ߦࠃࠅᬌ㏜ߔࠆߣ㧘ࠄߖࠎォ૏૏⟎ߦߪᲧセ⊛

ᷓ޿㤥ࠦࡦ࠻࡜ࠬ࠻ߩࡇ࠶࠻㧔㤥ࡇ࠶࠻ߣ⒓ߔࠆ㧕 ߇㧘߹ߚ㧘಺⁁ォ૏૏⟎ߦߪᲧセ⊛ᵻ޿⊕ࠦࡦ࠻࡜

ࠬ࠻ߩࡇ࠶࠻㧔⊕ࡇ࠶࠻ߣ⒓ߔࠆ㧕߇ⷰኤߐࠇࠆ㧚

৻ᣇ㧘 Young ᶧߦࠃߞߡ⣣㘩ߒߚ႐วߦߪᱜߩ಺⁁

ォ૏૏⟎ߦߪ㤥ࡇ࠶࠻߇㧘⽶ߩ಺⁁ォ૏૏⟎ߦߪ߿

߿ዊߐ޿⊕ࡇ࠶࠻߇ⷰኤߐࠇࠆ

㧚

3. ታ㛎⚿ᨐ

㪊㪅㪈㩷㪚㫌㪄Ꮧ⭯㪘㫃ว㊄⚿᥏䈮䈍䈔䉎․⇣䈭੝Ⴚ⇇᭴ㅧ㩷 㪊㪅㪈㪅㪈㩷㪚㫌㪄Ꮧ⭯㪘㫃ว㊄⚿᥏䈱ォ૏ᒻᚑ㩷

ᒁ߈਄ߍߚ⚐ Cu ߅ࠃ߮ Cu- Ꮧ⭯ Al ว㊄ߩ⚿᥏

ߩ ォ૏ኒᐲࠍ Al Ớᐲߦኻߒߡࡊࡠ࠶࠻ߒߚ࿑ࠍ࿑㧝ߦ㧘

߹ߚ㧘ߔߴࠅォ૏ߩᒻᚑ㗫ᐲߦ෸߷ߔ Al ᷝടߩലᨐ ࠍ࿑㧞ߦ␜ߔ㧚ߎࠇࠄߩ⚿ᨐߪ㧘ᓸ㊂ߩ Al ᷝടߪߔ ߴࠅォ૏ߩᒻᚑࠍᛥ೙ߒォ૏ኒᐲࠍૐਅߐߖࠆ߇㧘 ṁ⾰Ớᐲࠍ㜞ߊߔࠆߣ੝Ⴚ⇇᭴ㅧߩዉ౉ߣߣ߽ߦォ

૏ኒᐲߪჇᄢߔࠆߎߣࠍ␜ߒߡ޿ࠆ㧚㤥ࡑ࡯ࠢߪߘ ߁ߒߚ੝Ⴚ⇇ߩᒻᚑߐࠇߚ⚿᥏ߩォ૏ኒᐲߢ޽ࠆߎ ߣࠍ␜ߔ߇㧘Ყセ⊛㜞Ớᐲ (1 㨪 2 at%Al) ߩ⚿᥏ߩ੝Ⴚ

⇇ߪ⍴ߊ߆ߟ㓸࿅⊛ߦᒻᚑߐࠇ㧘ᢿ㕙ߩਛᄩㇱߩߺ ߩ႐วߩઁ㧘ਛ㑆ㇱ޽ࠆ޿ߪ๟ㄝ߆ࠄਛᄩߦ߆ߌߡ ਇဋ৻ߦᒻᚑߐࠇ㧘න૏㐳ߐ޽ߚࠅߩォ૏ࡇ࠶࠻ᢙ ߪᲧセ⊛ᄙ޿㧚ߎࠇࠄߩ⚿᥏ߦߪ⚵ᚑ⊛ㆊ಄ළࠍ↢

ߕࠆ᧦ઙਅߢ⢒ᚑߒߚ⚿᥏ߦዉ౉ߐࠇࠆ․ᓽ⊛ߥォ

૏ࠢ࡜ࠬ࠲࡯᭴ㅧ߇ⷰኤߐࠇ㧘೨▵㧔 1.2 㧕ߢㅀߴߚ

Akita University

࿑ 1 ᒁ߈਄ߍᴺߦࠃࠅ⢒ᚑߒߚ Cu- Ꮧ⭯ Al ว㊄⚿᥏ߩォ૏ኒᐲߩ Al Ớᐲ ଐሽᕈ㧘

: ή੝Ⴚ⇇ 㧘

੝Ⴚ⇇ᒻᚑ㧚

ࠃ߁ߦ㧘੝Ⴚ⇇ߪ⚵ᚑ⊛ㆊ಄ළߦߣ߽ߥ߁ṁ⾰஍ᨆ ߦࠃࠅዉ౉ߐࠇߚォ૏᭴ㅧߢ޽ࠆߣ⠨߃ࠄࠇࠆ

㧚 ߎࠇߦኻߒߡ࿑㧝ߩૐ Al Ớᐲ㧔 0.05 㨪 0.2 at% 㧕⚿᥏ ߩォ૏ኒᐲࠍ㤥ࡑ࡯ࠢߢ␜ߒߚ⚿᥏ߦߪ࠲ࠗࡊߩ߿

߿⇣ߥࠆ੝Ⴚ⇇߇ᒻᚑߐࠇߚ㧚߹ߚ࿑㧞ߪ Cu- Ꮧ⭯

Al ว㊄⚿᥏ߢߪߔߴࠅォ૏ߩᒻᚑ㗫ᐲߪో૕⊛ߦૐ

޿߇㧘৻ㇱ⚿᥏ߦߔߴࠅォ૏߇ᒻᚑߐࠇߚߎߣࠍ␜

ߒߡ޿ࠆ㧚ߎࠇࠄߩ⚿᥏ߪ࿑㧝ߩ੝Ⴚ⇇ࠍ฽߻ォ૏

ኒᐲߩ߿߿㜞޿⚿᥏ߦኻᔕߔࠆ㧚એਅߦߘߩ଀ࠍ␜

ߔ㧚

㩷 㩷 㩷 㩷 㩷 㩷 㩷 㩷 㩷 㩷

㪊㪅㪈㪅㪉㩷 ੝Ⴚ⇇㩷

․⇣ߥォ૏ಽᏓߩ߭ߣߟߩ଀ߣߒߡ 0.05at%Al ว

㊄⚿᥏ߩ৻ᢿ㕙ࠍਣᎹᶧߢ⣣㘩ߒⷰኤߒߚォ૏ࡇ࠶

࠻ಽᏓߩ౮⌀ࠍ࿑㧟ߦ␜ߔ㧚੝Ⴚ⇇ߪ (a) ߩࠃ߁ߦᲧ セ⊛㐳ߊ⚿᥏ᢿ㕙ߩᐢ޿▸࿐ߦಽᏓߒߡ߅ࠅ㧘 1 at%

એ਄ߩ Al Ớᐲߩ⚿᥏ߦ⚵ᚑ⊛ㆊ಄ළߦࠃࠅዉ౉ߐࠇ ࠆ஍ᨆ᭴ㅧࠍߣ߽ߥ߁੝Ⴚ⇇

ߣߪ࠲ࠗࡊ߇⇣ߥ ࠆ㧚ૐ୚₸ߩ㗼ᓸ㏜౮⌀ (b) ࠃࠅ㧘੝Ⴚ⇇ࠍ᭴ᚑߔࠆ ォ૏ࡇ࠶࠻ߪ߅߽ߦ⊕ࡇ࠶࠻ߢ޽ࠅ㧘ォ૏ߪਃⷺᒻ ࡇ࠶࠻ߩㄝߦု⋥ߥޛ 112 ޜᣇะߦ㈩೉ߒߡ޿ࠆߎߣ ߇ಽ߆ࠆ . ߎࠇࠄߩߎߣ߆ࠄ , ੝Ⴚ⇇ߪ࿕ᶧ⇇㕙ߦ ᐔⴕߥࡃ࡯ࠟ࡯ࠬ࡮ࡌࠢ࠻࡞ࠍ᦭ߔࠆߔߴࠅ♽ߩ಺

⁁ォ૏ߩౣ㈩೉ߦࠃߞߡᒻᚑߐࠇߚࡐ࡝ࠧࡦ㧔ዊ௑

ⷺ㧕Ⴚ⇇ߢ޽ࠆߣ⠨߃ࠄࠇࠆ㧚㩷 㪊㪅㪈㪅㪊㩷 䊘䊥䉯䊮Ⴚ⇇㩷

․⇣ߥ੝Ⴚ⇇ߩᒻᚑߣߒߡ㧘 0.2 at%Al ᷝട⚿᥏ߩ ᢿ㕙ߦⷰኤߐࠇߚォ૏ಽᏓߩੑߟߩ଀ࠍ࿑㧠 (a) ߅ ࠃ߮ (b) ߦ㧘߹ߚߘߩ৻ㇱߩૐ୚₸ߩ㗼ᓸ㏜౮⌀ࠍ࿑

㧡 (a) 㧘 (b) ߅ࠃ߮ (c) ߦ␜ߔ㧚࿑㧠 (a) ߢߪ৻ߟߩޛ 112 ޜ ᣇะߦᐔⴕ㈩೉ߒߚ੝Ⴚ⇇೉߇ᒻᚑߐࠇߚ㧚ߎࠇࠄ

੝Ⴚ⇇ߪ࿑㧡 (a) ߦ␜ߔࠃ߁ߦ⊕ࡇ࠶࠻㧔಺⁁ォ૏㧕 ߆ࠄ᭴ᚑߐࠇߡ߅ࠅ㧘৻⟲ߩࡐ࡝ࠧࡦႺ⇇ߩ೉ߢ޽

ࠆߎߣ߇ࠊ߆ࠆ㧚࿑㧠 (b) ߩ႐ว㧘৻ߟߩࡐ࡝ࠧࡦႺ

⇇ߣߘࠇߦု⋥ߥߔߴࠅォ૏೉߆ࠄߥࠆ᭴ㅧ߇ⷰኤ ߐࠇߚ㧚หߓ▎ᚲࠍਣᎹᶧߣ Young ᶧߦࠃߞߡ⣣㘩

࿑㧞 ᒁ߈਄ߍ Cu ⚿᥏߅ࠃ߮ Cu- Ꮧ⭯ Al ว㊄⚿᥏ߩ

ⷰኤᢿ㕙㧔 18 એ਄㧕ߦ߅ߌࠆߔߴࠅォ૏ߩᒻᚑ㗫 ᐲ , ήࡑ࡯ࠢ㧦ᱴߤߥ޿㧘ࡂ࠶࠴ࡦࠣ㧦ዋ޿㧘࠳

ࡉ࡞ࡂ࠶࠴ࡦࠣ㧦⪺ߒ޿㧚

10

࿑㧟 Cu-0.05at%Al ⚿᥏ߦᒻᚑߐࠇߚ੝Ⴚ⇇㧘 (a) ੝Ⴚ⇇ᒻᚑߩో૕⊛ߥ᭽⋧㧘 (b) ੝Ⴚ⇇

ߪ⊕ࡇ࠶࠻㧔಺⁁ォ૏㧕ߦࠃࠅ᭴ᚑߐࠇߡ

޿ࠆ㧚

࿑㧠 Cu-0.2at%Al ⚿᥏ߦᒻᚑߐࠇߚ․⇣ߥ ォ૏ಽᏓߩో૕⊛ߥ᭽⋧㧚 (a) ᐔⴕ㈩೉ߒ ߚ੝Ⴚ⇇೉㧘 (b) ੝Ⴚ⇇ߣߔߴࠅォ૏㧚

࿑㧡 Cu-0.2at%Al ว㊄⚿᥏ߦᒻᚑߐࠇߚ․⇣ߥォ૏ಽᏓߩ৻ㇱ㧘 (a) ࿑ 4 (a) ߩ੝Ⴚ⇇㧔ਣᎹ

ᶧ⣣㘩㧕 㧘 (b) ࿑ 4 (b) ߩ੝Ⴚ⇇ߣߔߴࠅォ૏ߩ৻ㇱ㧔ਣᎹᶧ⣣㘩㧕 㧘 (c) (b) ߣห৻▎ᚲ 㧔 Young ᶧ⣣㘩㧕 㧚

Akita University

ߒૐ୚₸ਅߢⷰኤߒߚ౮⌀ߩ࿑㧡 (b) ߅ࠃ߮ (c) ࠃࠅ㧘੝

Ⴚ⇇ࠍ᭴ᚑߔࠆォ૏ߪਣᎹᶧ⣣㘩ߢߪ⊕ࡇ࠶࠻ࠍᒻᚑ

ߒ㧘߹ߚ Young ᶧ⣣㘩ߢߪߘߩᄢㇱಽߩࡇ࠶࠻ᒻᚑߪ

᣿⍎ߢߪߥ޿㧚ߎࠇߪ⽶ߩ಺⁁ォ૏ߦኻᔕߔࠆᓟ⠪ߦ ࠃࠆ⊕ࡇ࠶࠻ߪᵻߊዊߐ޿ߚ߼ߢ޽ࠆߣ⠨߃ࠄࠇࠆ㧚

৻ᣇ㧘੝Ⴚ⇇ߦု⋥ߥޛ 110 ޜᣇะߦ㈩೉ߒߚߔߴࠅォ

૏ࠍ᭴ᚑߔࠆォ૏ߪਣᎹᶧ⣣㘩ߢߪ⊕ࡇ࠶࠻㧔࿑㧡 (b) 㧕㧘

߹ߚ Young ᶧ⣣㘩ߢߪ㤥ࡇ࠶࠻㧔࿑㧡 (c) 㧕ࠍᒻᚑߒ㧘

ᱜߩ಺⁁ォ૏ߢ޽ࠆߎߣ߇ࠊ߆ࠆ㧚

㪊㪅㪉㩷 㪚㫌㪄Ꮧ⭯㪥㫀ว㊄⚿᥏䈮䈍䈔䉎䈜䈼䉍ォ૏᭴ㅧ㩷 ᒁ߈਄ߍߚ Cu- Ꮧ⭯ Ni ว㊄⚿᥏ߩォ૏ኒᐲࠍ Ni Ớ ᐲߦኻߒߡࡊࡠ࠶࠻ߒߚ࿑

ࠍ࿑㧢ߦ㧘߹ߚ㧘ߔߴࠅ ォ૏೉ߩᒻᚑ㗫ᐲߣ Ni Ớᐲߣߩ㑐ଥࠍ࿑㧣ߦ␜ߔ㧚ߎ ࠇࠄߩ࿑߇␜ߔࠃ߁ߦ㧘 0.1at% એਅߩᓸ㊂ߩ Ni ᷝട

⚿᥏ߢߪ੝Ⴚ⇇᭴ㅧ߇ᒻᚑߐࠇࠆߎߣߪᱴߤߥ޿߇㧘 ߔߴࠅォ૏߇ᒻᚑߐࠇࠆ௑ะ߇޽ࠅ㧘ᐔဋォ૏ኒᐲ ߪ⚐ Cu ⚿᥏ࠃࠅ߿߿㜞޿

㧚⚐ Cu ⚿᥏߅ࠃ߮ Cu- Ꮧ 㩷

㩷 㩷 㩷 㩷 㩷

࿑㧢 ᒁ߈਄ߍᴺߦࠃࠅ⢒ᚑߒߚ Cu- Ꮧ⭯ Ni ว㊄⚿᥏ߩォ૏ኒᐲߩ Ni Ớᐲଐሽᕈ㧘

㧦ή੝Ⴚ⇇㧘

㧦੝Ⴚ⇇ᒻᚑ㧚 * ߅ࠃ߮ ** ߪૐㅦᐲߢᒁ߈਄ߍߚ⚿᥏ࠍᗧ๧

ߔࠆ

㧚

࿑㧤 ߔߴࠅォ૏᭴ㅧߩ଀ (a) ⚐ Cu ⚿ ᥏ (b) Cu-0.1 at%Ni ว㊄⚿᥏㧚

࿑㧣 ᒁ߈਄ߍ Cu ⚿᥏߅ࠃ߮ Cu- Ꮧ⭯ Ni ว㊄⚿᥏ߩ

ⷰኤᢿ㕙㧔 18 એ਄㧕ߦ߅ߌࠆߔߴࠅォ૏ߩᒻᚑ㗫 ᐲ㧘ήࡑ࡯ࠢ㧦ᱴߤߥ޿㧘ࡂ࠶࠴ࡦࠣ㧦ዋ޿㧘࠳ࡉ

࡞ࡂ࠶࠴ࡦࠣ㧦⪺ߒ޿㧚 * ૐㅦᐲߢ⢒ᚑߒߚ⚿᥏ߩ

ⷰኤ⚿ᨐࠍ฽߻㧚

12

⭯ Ni ว㊄⚿᥏ߩߔߴࠅォ૏೉ߩᒻᚑߩ଀ࠍ࿑㧤ߦ␜

ߔ㧚⚐ Cu ⚿᥏ߢߪ (a) ߩࠃ߁ߦ㧘ߔߴࠅォ૏ߪߣߊߦ ᒁ߈਄ߍೋᦼߩ⢋ㇱಽߩᢿ㕙ߦ⪺ߒߊᒻᚑߐࠇࠆ㧚 ߎࠇߦኻߒߡ Cu- Ꮧ⭯ Ni ว㊄⚿᥏ߢߪ (b) ߩࠃ߁ߦ㧘

⢋ㇱಽએᄖߩ৻ቯ⋥ᓘㇱಽߦ߅޿ߡ߽ߔߴࠅォ૏߇

⪺ߒߊ㧘ߣߊߦ㧝޽ࠆ޿ߪ㧞ᣇะߦ⇣Ᏹߦᒝߊᒻᚑ ߐࠇࠆ௑ะ߇޽ࠆ㧚

࿑㧥ߪ Cu- Ꮧ⭯ Ni ว㊄⚿᥏ߩᧃ┵ㇱᢿ㕙ࠍ Young ᶧߦࠃߞߡ⣣㘩ߒߚォ૏ಽᏓߩశቇ㗼ᓸ㏜౮⌀ߢ޽

ࠆ㧚 (a) ߦ⚿᥏ᢿ㕙ߩో૕⊛ߥォ૏ಽᏓߩ᭽⋧ࠍ␜ߒ ߚ߇㧘ߘߩ৻ᣇߩ๟ㄝㇱߦߪ (b) ߩࠃ߁ߦ⽶ߩ಺⁁ォ

૏㧔⊕ዊࡇ࠶࠻㧕߇ᄙߊᒻᚑߐࠇߡ߅ࠅ㧘 (b) ߣߪ෻

ኻ஥ߩ๟ㄝㇱ߆ࠄਛᄩㇱಽߦߪ (c) ߅ࠃ߮ (d) ߩࠃ߁ ߦߔߴࠅᣇะߦ㈩೉ߒߚ߅߽ߦᱜߩ಺⁁ォ૏㧔㤥ࡇ

࠶࠻㧕߇ᒻᚑߐࠇߡ޿ߚ㧚ߎߩࠃ߁ߦ Cu- Ꮧ⭯ Ni ว㊄

⚿᥏ߢߪᱜ⽶ߩ಺⁁ォ૏߇੕޿ߦ෻ኻ஥ߩ๟ㄝㇱߦ

஍ߞߡᒻᚑߐࠇࠆߣߣ߽ߦඨᓘᣇะߦ㕖ኻ⒓⊛ߥߔ ߴࠅ᭴ㅧ߇ᒻᚑߐࠇߚ㧚

㩷

㩷 㪋㪅㩷 ⠨㩷 ኤ㩷 㪋㪅㪈 ․⇣䈭੝Ⴚ⇇᭴ㅧ䈱ᒻᚑⷐ࿃㩷

Cu- Ꮧ⭯ Al ว㊄ߩ৻ㇱ⚿᥏ߦᒻᚑߐࠇߚࡐ࡝ࠧࡦ Ⴚ⇇೉㧔࿑㧠 (a) 㧕ߪ㧘 Cu

, Fe-Si

, NaCl

ߥߤߩ

⚿᥏ߦᦛߍᄌᒻࠍട߃ߚᓟ㧘὾߈ߥ߹ߒࠍᣉߒߚ႐ วߦᒻᚑߐࠇࠆࡐ࡝ࠧࡦႺ⇇೉ߣห᭽ߢ޽ࠆ㧚ߎߩ 㘃ૃᕈࠃࠅ㧘࿑ 4 ߩࡐ࡝ࠧࡦႺ⇇೉ߪ㧘࿕ᶧ⇇㕙ઃㄭ ߩ⚿᥏ߦᚑ㐳ᣇะߣᐔⴕߥ஍ᔃゲࠍᦛߍゲߣߔࠆ࿑

10(a) ߩࠃ߁ߥඨᓘᣇะߦ㕖ኻ⒓⊛ߥᦛߍᔕജ߇૞

↪ߒ㧘ߘࠇࠍ✭๺ߔࠆࠃ߁ߦዉ౉ߐࠇߚ಺⁁ォ૏߇

ౣ㈩೉ߒߡᒻᚑߐࠇߚ᭴ㅧߣផ᷹ߐࠇࠆ㧚ߎߩࠃ߁ ߦᐔⴕ㈩೉ߒߚ੝Ⴚ⇇ߪ 0.05 at%Al ว㊄⚿᥏ߩᧃ┵

ㇱએᄖߩ৻ᢿ㕙ߦ߽ⷰኤߐࠇߚ߇ , ห᭽ߩේ࿃ߦࠃ ߞߡᒻᚑߐࠇߚߣ⠨߃ࠄࠇࠆ .

߹ߚ㧘࿑㧠 (b) ߩࠃ߁ߥォ૏᭴ㅧߪ㧘࿑ 10(b) ߩࠃ߁ߦ㧘 ᚑ㐳⋥ᓟߩ㜞᷷⁁ᘒߦ߅޿ߡߘࠇ߶ߤᄢ߈ߊߥ޿Ꮒⷞ

⊛ߥᦛߍᔕജߦࠃߞߡዉ౉ߐࠇߚ⽶ߩ಺⁁ォ૏߇ౣ㈩

೉ߒߡᒻᚑߐࠇߚ৻ߟߩ੝Ⴚ⇇ߣޔߘߩᓟߩ಄ළㆊ⒟

ߦ߅ߌࠆ὾㊰ലᨐߦࠃࠅ㜞᷷ᤨߦᏂⷞ⊛ߥᦛߍᔕജࠍ

↢ߓߚේ࿃߇⸃ᶖߐࠇࠆߣߣ߽ߦ෻ኻ╓ภߩᱷ⇐ᔕജ㩷

࿑ 9 Cu-0.1at%Ni ว㊄⚿᥏ߦᒻᚑߐࠇߚߔߴࠅォ૏᭴ㅧ㧔 Young ᶧ⣣㘩㧕 㧘 (a) ᢿ㕙ో

૕ߩォ૏ಽᏓ㧘 (b) ๟ㄝߩ৻ㇱߦߪ⊕ࡇ࠶࠻㧔⽶ߩ಺⁁ォ૏㧕߇ᄙ޿㧚 (c) (b) ߣ⋧

ኻߔࠆ๟ㄝㇱߦߪ㤥ࡇ࠶࠻㧔ᱜߩ಺⁁ォ૏㧕߇ᄙߊ㧘 (d) ਛᄩㇱߦߪޛޜߔ ߴࠅᣇะߦ㈩೉ߒߚ㤥ࡇ࠶࠻㧔ᱜߩ಺⁁ォ૏㧕ߣಽᢔߒߚ⊕ࡇ࠶࠻㧔⽶ߩ಺⁁ォ

૏㧕߇ⷰኤߐࠇࠆ㧚

Akita University

߇૞↪ߒ㧘ᱜߩ಺⁁ォ૏ߦࠃࠆߔߴࠅ᭴ㅧࠍᒻᚑߒ

ߚ㧔࿑㧡 (b),(c) 㧕ߎߣࠍ␜ߔߣ⠨߃ࠄࠇࠆ㧚㩷

㪋㪅㪉 㕖ኻ⒓⊛䈭䈜䈼䉍ォ૏᭴ㅧ䈱ᒻᚑⷐ࿃㩷

࿑㧤 (a) ߩࠃ߁ߥ Cu ⚿᥏ߩߔߴࠅォ૏೉ߩ᭴ㅧߪ㧘 ᚑ㐳⋥ᓟߩ⚿᥏ߦඨᓘᣇะߩ᷷ᐲ൨㈩߇ߣ߽ߥ߁ᾲ㩷 ᔕജࠍ✭๺ߔࠆࠃ߁ߦォ૏߇ዉ౉ߐࠇߚᓟ㧘಄ළㆊ㩷

⒟ߦ߅޿ߡ᷷ᐲಽᏓߩဋ৻ൻߦߣ߽ߥ޿ᱷ⇐ᔕജ߇㩷

૞↪ߒ

㧘ᒻᚑߐࠇߚߣ⠨߃ࠄࠇࠆ㧚 Cu- Ꮧ⭯ Ni ว

㊄⚿᥏ߢߪ࿑㧤 (b) ߩࠃ߁ߦ৻ߟߩޛ 110 ޜᣇะߩߔ ߴࠅ᭴ㅧ߇⪺ߒߊᒻᚑߐࠇࠆ௑ะ߇޽ࠆ㧚࿑㧥ߩᢿ 㕙ߩ႐ว㧘৻ߟߩޛ 110 ޜᣇะߦ㈩೉ߒߚߔߴࠅォ૏

ߩᒻᚑ㧔࿑ (a) 㧕ߦ߅޿ߡ㧘৻ㇱ๟ㄝㇱઃㄭߦߪ⽶ߩ

಺⁁ォ૏㧔⊕ዊࡇ࠶࠻㧕߇ᄙߊዉ౉ߐࠇ㧔࿑ (b) 㧕㧘 ߘࠇߣ෻ኻ஥ߩ๟ㄝㇱ߆ࠄਛᄩㇱߦ߆ߌߡᱜߩ಺⁁

ォ૏㧔㤥ࡇ࠶࠻㧕߇Ყセ⊛ᄙߊᒻᚑߐࠇߚ㧔࿑ (c) ߅ ࠃ߮ (d) 㧕㧚ߎࠇߪ࿑ 11(a) ߩࠃ߁ߦ㧘ᚑ㐳⋥ᓟߩ㜞᷷

⁁ᘒߦ߅޿ߡ↢ߓߚᚑ㐳ᣇะߦᐔⴕ߆ߟ஍ᔃߒߚゲ ࠍᦛߍゲߣߔࠆᏂⷞ⊛ߥᦛߍ߭ߕߺࠍ✭๺ߔࠆࠃ߁ ߦ๟ㄝઃㄭߩ৻ㇱߦ⽶ߩ಺⁁ォ૏߇ዉ౉ߐࠇߚᓟ㧘

಄ළㆊ⒟ߦ߅޿ߡ࿑ 11(b) ߩࠃ߁ߦ෻ኻ╓ภߩᱷ⇐

ᔕജ߇૞↪ߒ㧘ᱜߩ಺⁁ォ૏ߦࠃࠆߔߴࠅ᭴ㅧࠍᒻ ᚑߒߚߎߣࠍ⴫ߒߡ޿ࠆ㧚࿑ 7 ߩ⚿ᨐߪ Cu- Ꮧ⭯ Ni ว

㊄⚿᥏ߢߪߘߩࠃ߁ߥඨᓘᣇะߦ㕖ኻ⒓⊛ߥᏂⷞ⊛

ᔕജߩ૞↪ߦࠃࠆߔߴࠅォ૏᭴ㅧࠍ↢ߓ߿ߔ޿ߎߣ ࠍ␜ߒߡ޿ࠆߣ⠨߃ࠄࠇࠆ㧚

㪋㪅㪊㩷 ᒁ䈐਄䈕㪚㫌Ꮧ⭯ว㊄⚿᥏䈮૞↪䈜䉎ᔕജ㩷

㪋㪅㪊㪅㪈㩷 ᷷ᐲ䈍䉋䈶ṁ⾰䈱ਇဋ৻ಽᏓ䈮䉋䉎ᩰሶ䈵䈝䉂㩷 (1) ඨᓘᣇะߩ᷷ᐲᏅߦࠃࠆᾲ߭ߕߺ

Ⲣ ᶧ ߆ ࠄ ᚑ 㐳 ߔ ࠆ ⚿ ᥏ ߦ ߪ 㜞 ᷷ ߩ Ⲣ ᶧ ߆ ࠄ ⒳⚿

᥏࡮ᒁ߈਄ߍゲ߳ะ߆߁ゲᣇะߩᾲᵹߣ஥⴫㕙߆ࠄ

๟࿐߳᡼ᢔߔࠆඨᓘᣇะߩᾲᵹ߇↢ߕࠆ㧚⚿᥏ߪߘ ࠇߦኻᔕߔࠆゲᣇะ߅ࠃ߮ඨᓘᣇะߩ᷷ᐲ൨㈩ࠍ᦭

ߔࠆߚ߼㧚ᾲ߭ߕߺࠍ↢ߓᾲᔕജߦࠃࠅォ૏߇ᒻᚑ ߐࠇࠆ㧚ߎߩ߁ߜਛᔃㇱߣ๟ㄝㇱߩ᷷ᐲᏅ' T ߦߣ

߽ߥ߁ᄖ๟ㇱߩ౞๟ᣇะߩᾲ߭ߕߺߪ㧘ᾲ⤘ᒛଥᢙ 㧔✢⤘ᒛଥᢙ㧕ࠍDߣߔࠆߣ㧘ㄭૃ⊛ߦ

T D '

H

(1)

ߣ⴫ߐࠇࠆ㧚ߎࠇߪᚑ㐳ᣇะߦု⋥ᢿ㕙ࠍ⽾ߊ಺⁁

ォ૏ࠍᒻᚑߔࠆⷐ࿃ߣߥࠆ

㧚ᧄታ㛎ߩᒁ߈਄ߍⵝ

⟎ߦࠃࠅ Ar ᳇ᵹਛߢ⋥ᓘ 10 mm ߩ⚐ Cu ⚿᥏ࠍ⢒ᚑߔ ࠆߣ߈ߩ⚿᥏ਛᔃㇱߣ๟ㄝㇱߩ᷷ᐲᏅ'7ࠍ㧘࠳ࡒ࡯

⹜ᢱߦᾲ㔚ኻࠍขࠅઃߌߡ⋥ធ᷹ቯߒߚ୯ߣਛᔃㇱ ߩゲᣇะߩ᷷ᐲ൨㈩ߩ᷹ቯ୯߆ࠄ㑆ធ⊛ߦផቯߒߚ ୯

ߦࠃࠇ߫㧘ᑼ (1) ߦࠃࠆᾲ߭ߕߺߩ᭎▚୯ߪ⴫ 1 ߩࠃ߁ߦߥࠆ㧚 '7ߩ㑆ធ⊛ߥផቯ୯ߪᾲ᡼኿ߦࠃࠆ

⸘▚୯

ߦ߶߷৻⥌ߔࠆߩߦኻߒ㧘⋥ធ᷹ቯߒߚ୯ ߇ᄢ߈޿ߩߪ஥⴫㕙ߩ᷷ᐲߩ᷹ቯ⺋Ꮕߩߚ߼ߣᕁࠊ ࠇࠆ

㧚ߒ߆ߒ㧘ᧄታ㛎ߢᒁ߈਄ߍߚ⚐ Cu ⚿᥏ߩᚑ 㐳ᣇะߦု⋥ᢿ㕙ߩ಺⁁ォ૏ߩኒᐲ

㧦U § 3 ˜ 10

m

ߪ Billig ߩ㑐ଥᑼ

ߦࠃࠇ߫ᓟ⠪ߩ'7߇ਈ߃ ࠆᾲ߭ߕߺߦ⋧ᒰߒ㧘'7ߩ୯߅ࠃ߮'7ߣォ૏ኒᐲ ߩቯ㊂⊛㑐ଥߦߟ޿ߡߪ⹦⚦ߥᬌ⸛ࠍⷐߔࠆ㧚

Thermal strain

Material D[K

](1273K) 'T [K] H

_[10

_]

Cu 2.0 ˜ 10

0.2*~5**

0.4~10

D: Linear thermal expansion coefficient,

*Indirectly and ** directly measured values

࿑ 10 ੝Ⴚ⇇೉ߩᒻᚑࡕ࠺࡞㧘࿕ᶧ⇇㕙⋥ਅߩ⚿᥏ߦ ᦛߍᔕജ㧔⎕✢⍫ශ㧕߇૞↪ߒߡ⽶ߩ಺⁁ォ૏߇ ዉ౉ߐࠇ㧘 (a) ዊ௑ⷺႺ⇇ߩ೉ ޽ࠆ޿ߪ (b) ৻ ߟߩዊ௑ⷺႺ⇇ࠍᒻᚑ㧚 (b) ߢߪߐࠄߦ಄ළਛߦ ᱷ⇐ᔕജߦࠃࠆㅒߩᦛߍᔕജ㧔ታ✢⍫ශ㧕߇૞↪

ߒ㧘ᱜߩ಺⁁ォ૏ߦࠃࠆߔߴࠅ᭴ㅧࠍᒻᚑߔࠆ㧚

࿑ 11 ߔߴࠅォ૏ߩᒻᚑࡕ࠺࡞㧚 (a) ࿕ᶧ⇇㕙⋥ਅߩ

⚿᥏ߦᦛߍᔕജ㧔⎕✢⍫ශ㧕߇૞↪ߒ㧘⽶ߩ

಺⁁ォ૏㧕ࠍᒻᚑ㧘 (b) ಄ළਛߦᱷ⇐ᔕജߦࠃ ࠆㅒߩᦛߍᔕജ㧔ታ✢⍫ශ㧕߇૞↪ߒ㧘ᱜߩ

಺⁁ォ૏ߦࠃࠆߔߴࠅ᭴ㅧࠍᒻᚑߔࠆ㧚

⴫ 1 Cu ⚿᥏ߦ߅ߌࠆᾲ߭ߕߺ H

^{ߩ᭎▚୯㧚}

14

(2) ඨᓘᣇะߩṁ⾰ỚᐲᏅߦࠃࠆ⚵ᚑ߭ߕߺ

৻ᣇ㧘 Cz Si ⚿᥏

߅ࠃ߮ LEC InP ⚿᥏

ߥߤߢߪ ᒁ߈਄ߍ⚿᥏ߩਛᔃߣ๟ㄝㇱߣߩ㑆ߦṁ⾰ේሶߩỚ ᐲᏅࠍ↢ߕࠆߎߣ߇⍮ࠄࠇߡ޿ࠆޕߎࠇߪᚑ㐳⇇㕙 ߩṁ⾰ේሶߩ᜛ᢔႺ⇇ጀߩෘߐǬߪ⚿᥏ਛᔃ߆ࠄߩ ඨᓘ〒㔌ߦኻߒߡ৻᭽ߢߥߊ

㧘᦭ലಽ㈩ଥᢙ k

ߩ Ǭଐሽᕈ

ߦࠃࠅṁ⾰߇ඨᓘᣇะߦਇဋ৻ಽᏓߔ ࠆߚ߼ߣ⠨߃ࠄࠇࠆ

㧚ߎߩࠃ߁ߥṁ⾰ේሶߩਇဋ

৻ಽᏓߪᩰሶቯᢙߩṁ⾰Ớᐲଐሽᕈߦࠃࠆᩰሶ߭ߕ ߺࠍ↢ߓ

㧘ᾲᔕജߦ㘃ૃߒߚᏂⷞ⊛ߥᔕജ㧔એᓟ㧘

⚵ᚑᔕജߣ๭⒓㧕ࠍ⺃ዉߔࠆߣ⠨߃ࠄࠇࠆ㧚޿߹㧘 ⲢᶧỚᐲࠍ C ߣߒߡ㧘᜛ᢔႺ⇇ጀෘߐǬ߇৻᭽ߢߥ

޿ߎߣߦࠃࠆ᦭ലಽ㈩ଥᢙߩᏅ ' k

ߦߣ߽ߥ߁⚿

᥏ਛᔃߣ๟ㄝㇱߣߩṁ⾰ỚᐲᏅࠍ㧘'C = 'k

C ߣ߅ ߊ㧚߹ߚ㧘න૏ṁ⾰Ớᐲ޽ߚࠅߩᩰሶ߭ߕߺࠍ' a/a ߣߔࠆߣ㧘ṁ⾰ỚᐲᏅߦߣ߽ߥ߁⚵ᚑ߭ߕߺߪ

C a k C a a

a

C

' ' ' '

H (2)

ߣ⴫ߐࠇࠆ㧚᦭ലಽ㈩ଥᢙ k

ߪ㧘 BPS ᑼ

ߦࠃߞߡ ਈ߃ࠄࠇࠆߣߔࠆߣ㧘ߘߩ୯ߪ᜛ᢔႺ⇇ጀߩෘߐǬ ߩᄢ߈ߐߦଐሽߒߡᐔⴧಽ㈩ଥᢙ k ߣ 1 ߣߩ㑆ߩᄢ ߈ߐߦߥࠆ㧚ᐔⴧಽ㈩ଥᢙ k ߩ୯ࠍ⁁ᘒ࿑߆ࠄផቯ ߔࠆߣ㧘 Cu-Al ว㊄♽

ߩ႐ว㧘ᄢࠃߘ 0.7 < k

< 1, Cu-Ni ว㊄♽

ߩ႐ว㧘 1 < k

< 2.5 㧘ߣߥࠆ㧚᜛ᢔႺ

⇇ጀෘߐǬߩ㕖৻᭽ᕈߦࠃࠆ' k

ߪߎߩ▸࿐ߩ୯ߦ ߥࠆߎߣࠍ⠨ᘦߒߡ⷗Ⓧ߽ߞߚṁ⾰ỚᐲᏅ߅ࠃ߮ᑼ (2) ߦࠃࠆ⚵ᚑ߭ߕߺߩ᭎▚୯ࠍ⴫㧝 (b) ߦ␜ߔ㧚

Compositional strain

Alloy 'a / a 'C='k

˜ C H

[10

] Cu-Al 0.12 10

= 0.1 ˜ 10

1.2 Cu-Ni ࡯ 0.025 10

= 1 ˜ 10

࡯ 2.5 a: Lattice parameter, k

: Effective distribution coefficient, C: Solute concentration

ᒁ߈਄ߍ Cu Ꮧ⭯ว㊄⚿᥏ߩᚑ㐳⋥ᓟߩਛᔃߣ๟

ㄝㇱߩ㑆ߩṁ⾰ỚᐲᏅ' C ߩ᷹ቯߪ㔍ߒߊታ㓙ߤߩ

⒟ᐲߩᄢ߈ߐߦߥࠆ߆ߪಽ߆ࠄߥ޿㧚ߎࠇߪ⚿᥏ߩ ṁ⾰Ớᐲ C ⥄૕߇ዊߐߊ㧘߹ߚᚑ㐳ᓟߩ಄ළㆊ⒟ߦ ߅޿ߡṁ⾰ಽᏓߩဋ৻ൻ߇ㅴⴕߔࠆߣ⠨߃ࠄࠇࠆ߆ ࠄߢ޽ࠆ㧚ߐࠄߦ㧘᜛ᢔႺ⇇ጀߩෘߐǬߣඨᓘ〒㔌 ߣߩ㑐ଥߪන⚐ߢߪߥߊ㧘ṁ⾰ಽᏓߩࡊࡠࡈࠖ࡯࡞

߽᣿ࠄ߆ߢߪߥ޿㧚ߒ߆ߒ㧘⴫ 2 ߩ⚵ᚑ߭ߕߺ߇ᐔဋ

⊛ߦ↢ߕࠆߣߔࠆߥࠄ߫㧘⚵ᚑᔕജߪᾲᔕജߣߣ߽

ߦォ૏ᒻᚑߦᓇ㗀ࠍ߅ࠃ߷ߔߎߣ߇⠨߃ࠄࠇࠆ㧚ታ 㓙㧘ߎߩߎߣߦၮߠߊߣ㧘 Cu Ꮧ⭯ว㊄⚿᥏ߦ߅ߌࠆ ォ૏ᒻᚑߩᛥ೙߅ࠃ߮ଦㅴߩലᨐߦߟ޿ߡᰴߩࠃ߁ ߦ⺑᣿ߐࠇࠆ㧚

㪋㪅㪊㪅㪉㩷 㩷 Cu Ꮧ⭯ว㊄⚿᥏ߩォ૏ᒻᚑߩᛥ೙ߣଦㅴ Cu- Ꮧ⭯ Al ว㊄⚿᥏ߢߪᄙߊߩ႐ว㧘ૐኒᐲߩಽᢔ ォ૏ߩߺ߇ᒻᚑߐࠇ㧘ߔߴࠅォ૏ߪᱴߤᒻᚑߐࠇߥ

޿㧚ߎࠇߪ࿕ᶧ⇇㕙ߩ᜛ᢔႺ⇇ጀߩෘߐߩ㕖৻᭽ᕈ ߦࠃࠅ㧘଀߃߫࿕ᶧ⇇㕙⋥ਅߩ⚿᥏ߩ๟ㄝㇱߩṁ⾰

Ớᐲ߇ਛᔃㇱߦߊࠄߴߡ㜞޿ߣ߈㧘 Cu ේሶࠃࠅඨᓘ ߩᄢ߈޿ Al ේሶߩਇဋ৻ಽᏓߦࠃࠆ⚵ᚑᔕജߪ⚿᥏

๟ㄝㇱߩ౞๟ᣇะߦ૞↪ߔࠆᾲᔕജߩᒁᒛࠅᚑಽࠍ

✭๺ߒ㧘ォ૏ᒻᚑࠍᛥ೙ߔࠆ㧚ߎࠇߦኻߒߡ Cu- Ꮧ⭯

Ni ว㊄⚿᥏ߦߔߴࠅォ૏᭴ㅧ߇㜞㗫ᐲߢ⪺ߒߊᒻᚑ ߐࠇߚߩߪ㧘 Cu ේሶࠃࠅඨᓘߩዊߐ޿ Ni ේሶߩਇဋ

৻ಽᏓߦࠃࠆ⚵ᚑᔕജߪᾲᔕജߣ㊀⇥ߒߡᒝ߼ว޿

ォ૏ᒻᚑࠍଦㅴߒߚߚ߼ߣផ᷹ߐࠇࠆ㧚ߚߛߒ㧘 Cu

⚿᥏ߩ࿕ᶧ⇇㕙ߪⲢᶧߦኻߒߡಲဳߦߥࠅ

⇇㕙

⋥ਅߩ⚿᥏ߩ᷷ᐲಽᏓߪන⚐ߢߥߊ㧘ṁ⾰ಽᏓ߽⍮

ࠄࠇߡ߅ࠄߕ㧘ᾲᔕജߣ⚵ᚑᔕജߣߩᐓᷤߩ⹦⚦ߪ ਇ᣿ߢ޽ࠆ㧚

㪋㪅㪊㪅㪊㩷 㩷 㕖ኻ⒓⊛䈭ォ૏᭴ㅧ㩷

ૐỚᐲߩ Cu- Ꮧ⭯ Al ว㊄⚿᥏ߩ੝Ⴚ⇇᭴ㅧ߅ࠃ߮

Cu- Ꮧ⭯ Ni ว㊄⚿᥏ߦ߅ߌࠆߔߴࠅォ૏ߩᒻᚑߪඨ ᓘᣇะߦኻ⒓⊛ߢߥߊ㧘৻ߟ޽ࠆ޿ߪੑߟߩߔߴࠅ

♽ߩ಺⁁ォ૏߆ࠄߥߞߡ޿ࠆ㧚ߎࠇࠄ಺⁁ォ૏ߪ㧘

వㅀ㧔 4.1, 4.2 㧕ߩࠃ߁ߦ஍ᔃߒߚゲߩ๟ࠅߩᦛߍᔕ

ജߩ૞↪ߦࠃߞߡᒻᚑߐࠇߚߣ⠨߃ࠄࠇࠆ㧚ߘߩࠃ ߁ߥඨᓘᣇะߦ㕖ኻ⒓⊛ߥᔕജߩ૞↪ߩේ࿃ߣߒߡ ߪᒁ߈਄ߍ⚿᥏ߩਛᔃߣ࿁ォਛᔃߩߕࠇ߇᜼ߍࠄࠇ ࠆ㧘ߔߥࠊߜ⚿᥏߇ࠊߕ߆ߦ஍ᔃߒߡ࿁ォߔࠆߣ߈㧘

⚿᥏ߩ஥⴫㕙ߣࠆߟ߷߅ࠃ߮ࠕࡈ࠲࡯ࡅ࡯࠲ౝოߣ ߩ㑆㓒߇ਇဋ৻ߦߥࠅඨᓘᣇะߩ᷷ᐲಽᏓߪ㕖ኻ⒓

⊛ߦߥࠆ㧚߹ߚ㧘⚿᥏๟ㄝㇱߩ࿁ォඨᓘ߇⚿᥏ߩඨ ᓘᣇะߦࠃߞߡ⇣ߥࠅ㧘ᚑ㐳⇇㕙ߦ߅ߌࠆ᜛ᢔႺ⇇

ጀߩෘߐߣߣ߽ߦṁ⾰ಽᏓ߽㕖ኻ⒓⊛ߦߥࠆ㧚ߘߩ ႐ว㧘ᾲᔕജ߅ࠃ߮⚵ᚑᔕജߪඨᓘᣇะߦ㕖ኻ⒓⊛

ߦ૞↪ߔࠆ㧚

Al ޽ࠆ޿ߪ Ni ࠍᷝടߒߚ Cu Ꮧ⭯ว㊄⚿᥏ߦᒻᚑ ߐࠇߚ㕖ኻ⒓⊛ߥ․⇣ߥォ૏ಽᏓߪ⚐ Cu ⚿᥏ߢߪ ᱴߤⷰኤߐࠇߥߊ㧘ߘߩᒻᚑߪ਄ㅀߩߎߣࠍⷐ࿃ߣ ߔࠆᰴߩࠃ߁ߥᯏ᭴ߦࠃߞߡ⺑᣿ߐࠇࠆ㧚

(1) Cu- Ꮧ⭯ Al ว㊄⚿᥏ߩ․⇣ߥォ૏ᒻᚑ

Al ᷝടߩว㊄Ⲣᶧ߆ࠄ⚿᥏ࠍᒁ߈਄ߍࠆߣ߈㧘஥

⴫ 2 Cu Ꮧ⭯ว㊄⚿᥏ߦ߅ߌࠆ⚵ᚑ߭ߕߺ H

ߩ᭎▚୯㧚

Akita University

⴫㕙ߦ㉄ൻ⤑߇ᒻᚑߐࠇ㧘ᄖᒻ߇߿߿޿߮ߟߥ౞ᩇ ᒻ⁁ߦߥࠆߎߣ߇޽ࠆ㧚ߘߩ႐ว㧘࿁ォਛᔃ߇஍ࠃ ࠆ௑ะ߇ᒝ߼ࠄࠇᾲᔕജ޽ࠆ޿ߪ⚵ᚑᔕജߩ޿ߕࠇ ߆߇㕖ኻ⒓⊛ߦᄢ߈ߊ૞↪ߒ㧘․ቯߩߔߴࠅ♽ߩ಺

⁁ォ૏߇ዉ౉ߐࠇ㧘ߘߩౣ㈩೉ߦࠃߞߡ․⇣ߥࡐ࡝

ࠧࡦႺ⇇᭴ㅧ߇߹ࠇߦᒻᚑߐࠇߚߣផኤߐࠇࠆ㧚

(2) Cu- Ꮧ⭯ Ni ว㊄⚿᥏ߩߔߴࠅォ૏ᒻᚑ

ᒁ߈਄ߍ⚿᥏ߩਛᔃߣ࿁ォਛᔃߩߕࠇߦ઻߁ Ni ߩ ਇဋ৻ಽᏓߦࠃࠆ㕖ኻ⒓⊛ߥ⚵ᚑᔕജߪᾲᔕജߣ㊀

⇥ߒߡᒝ߼ว޿ォ૏ᒻᚑࠍଦㅴߔࠆ㧚ߘߒߡߘߩᓟ ߩ಄ළㆊ⒟ߦ߅ߌࠆ᷷ᐲಽᏓ߅ࠃ߮ṁ⾰ಽᏓߩဋ৻

ൻߦߣ߽ߥ޿↢ߕࠆᱷ⇐ᔕജ߽㊀⇥ߒߡ૞↪ߒߚߚ

߼㕖ኻ⒓⊛ߥߔߴࠅォ૏᭴ㅧ߇㜞㗫ᐲߢ⪺ߒߊᒻᚑ ߐࠇߚߣផኤߐࠇࠆ㧚 Ni ᷝട⚿᥏ߦ Al ᷝട⚿᥏ߩࠃ ߁ߥ੝Ⴚ⇇᭴ㅧ߇ᒻᚑߐࠇߥ޿ߩߪ㧘 Cu ⚿᥏ߦ߅ߌ ࠆ Al ṁ⾰ේሶߩ᜛ᢔଥᢙߪᲧセ⊛ᄢ߈޿

ߩߦኻ ߒߡ Ni ṁ⾰ේሶߩ᜛ᢔଥᢙߪዊߐߊ

㧘ṁ⾰ಽᏓߩ ဋ৻ൻ߅ࠃ߮ォ૏ߩౣ㈩೉߇ߔߺ߿߆ߦ⿠ߎࠄߥ߆ ߞߚߚ߼ߣᕁࠊࠇࠆ㧚

એ਄ߩࠃ߁ߦ㧘ᒁ߈਄ߍᴺߦࠃࠅ⢒ᚑߒߚ Cu- Ꮧ⭯

Al ว㊄߅ࠃ߮ Ni ว㊄⚿᥏ߩ㕖ኻ⒓⊛ߥ․⇣ߥォ૏ಽ Ꮣߪ㧘᷷ᐲ߅ࠃ߮ṁ⾰ේሶߩਇဋ৻ಽᏓ߇ߣ߽ߥ߁ ᾲᔕജߣ⚵ᚑᔕജߩᐓᷤߦࠃࠆォ૏ᒻᚑߩᛥ೙ߥ޿

ߒଦㅴߩലᨐ߇ṁ⾰ේሶߩ⒳㘃߅ࠃ߮ᚑ㐳᧦ઙߩᄌ

േߦଐሽߒߡ૞↪ߒߚߚ߼ߣផኤߐࠇࠆ㧚

㪌㪅㩷 ⚿㩷 ⸒㩷

ᒁ߈਄ߍᴺߦࠃߞߡ⢒ᚑߒߚ Cu- Ꮧ⭯ Al ว㊄⚿᥏ ߦ߅ߌࠆ․⇣ߥ੝Ⴚ⇇᭴ㅧߩᒻᚑ߅ࠃ߮ Cu- Ꮧ⭯ Ni ว㊄⚿᥏ߦ߅ߌࠆ⪺ߒ޿ߔߴࠅォ૏೉ߩᒻᚑߪ㕖ኻ

⒓⊛ߥᏂⷞ⊛ߥᔕജߩ૞↪ࠍ␜ໂߔࠆ㧚ߘߩࠃ߁ߥ 㕖ኻ⒓⊛ߥᔕജߩේ࿃ߣߒߡ㧘᷷ᐲߩਇဋ৻ಽᏓߦ ࠃࠆᾲᔕജߣߣ߽ߦṁ⾰Ớᐲߩਇဋ৻ಽᏓߦࠃࠆ⚵

ᚑᔕജ߇⚿᥏ਛᔃߣ࿁ォਛᔃߩߕࠇߦଐሽߒߡ૞↪

ߔࠆߎߣ߇ផኤߐࠇࠆ㧚

ߥ߅㧘 Cu- Ꮧ⭯ Al ว㊄ߢߪࡉ࡝࠶ࠫࡑࡦᴺߦࠃߞߡ [321] ᣇ૏ߦ⢒ᚑߒߚ⚿᥏ߢ߽ 0.05 㨪 0.2 at% ߩ Al ߩᷝ

ടߦࠃࠅ⚐ Cu ⚿᥏ߩ✂⋡⁁੝Ⴚ⇇ߩᒻᚑߪᛥ೙ߐ ࠇォ૏ኒᐲߪૐᷫߔࠆ߇㧘৻ᣇ㧘⢒ᚑ⚿᥏ߩਛߦߪ ᚑ㐳ᣇะߦ௑ᢳߒ⊒㆐ߒߚ⚐ Cu ⚿᥏ߣߪ࠲ࠗࡊߩ

⇣ߥࠆ੝Ⴚ⇇߇ᒻᚑߐࠇߚ

㧚ห᭽ߩ੝Ⴚ⇇᭴ㅧߪ ᧄታ㛎ߢᒁ߈਄ߍߚ Cu-0.5 at%Al ว㊄⚿᥏ߢ߽ⷰኤ ߐࠇߚ

㧚ߎࠇߪ߅ߘࠄߊᚑ㐳ᣇะߩ᷷ᐲ൨㈩ߩᄌ ൻߦࠃࠆᾲᔕജ߇㑐ଥߒ㧘 Al ࠍᷝടߒߚ⚿᥏ߢߪṁ

⾰ߩᚑ㐳ᣇะߩਇဋ৻ಽᏓ߇ߣ߽ߥ߁⚵ᚑᔕജߣߩ ᐓᷤലᨐߦࠃߞߡォ૏ᒻᚑߪᛥ೙޽ࠆ޿ߪଦㅴߐࠇ

ࠆߎߣࠍ␜ໂߔࠆ㧚ᧄ⺰ߢߪᚑ㐳ᣇะߩ᷷ᐲ൨㈩ߩ ᄌൻ߅ࠃ߮ṁ⾰ߩਇဋ৻ಽᏓߦࠃࠆᾲᔕജߣ⚵ᚑᔕ ജߩᐓᷤലᨐߦߟ޿ߡߪ⠨ኤߒߡ޿ߥ޿߇㧘੹ᓟᬌ

⸛ߐࠇߥߌࠇ߫ߥࠄߥ޿㧚

ෳ⠨ᢥ₂㩷

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16

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ᒻᚑߦ෸߷ߔ⚿᥏࿁ォㅦᐲߩᓇ㗀㧘ᣣᧄ⚿᥏ᚑ㐳ቇળ

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⚿᥏ߩォ૏ᒻᚑ㧘ᣣᧄ㊄ዻቇળ⹹㧘 59 㧔 1995 㧕 894-901 (19) ੹ᷡ᳓㓶ੑ㧘ᷰㄝᘏᦶ㧦ᒁ਄ߍᴺߦࠃࠆ Cu- Ꮧ⭯

Au ว㊄⚿᥏ߩ⢒ᚑߦ߅ߌࠆォ૏ᒻᚑ㧘ᣣᧄ㊄ዻቇળ

⹹㧘 60 㧔 1996 㧕 1000-1006.

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Akita University