Study of the plasma coating technology for plastics.
2002 Hidetaka Anma
This report deals with the deposition of SiC or ZnOlSiOz thin films on plastics made from organic materials by Plasma Enhanced Chemical Vapor Deposition(PEcvD). SiC and SiOz thin films were made from hexamethyldisilane(HMDS), and ZnO thin film was made from diethylzine(DEZ).
In this study, thin films were deposited by use of the Radio Frequency (RF) cathode plasma deposition method. Around the cathode electrode, an active area which has uniform thickness is generated due to the velocity difference between ions and electrons. This area is called ion sheath, which was found to enable us to deposit thin films of uniform thickness and characteristics on plastic parts with complicated shapes.
It was also found that amorphous SiC thin films and ZnO thin films could be obtained without raising the substrate temperature by a Cathode Plasma Deposition Method. Therefore, various deposition conditions were investigated.
It was found that SiC or ZnOlSiOz-coated polycarbonate plates have better abrasion-proof and ultraviolet degradation- proof. Especially, ZnOlSiOz thin film can contribute to the improvement of the hardness of polycarbonate surface due to SiOz surface layer, and also of ultraviolet degradation protection because ZnO film can absorb ultraviolet of the wavelength less than 350nm. SiOzlZnO, double-coating on polycarbonate can therefore contribute to the improvement of light transmittance, descoloration-proof and abrasion-proof. It is confirmed that these coatings are useful for the practical use for plastic coating technology.
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